TW201543023A - Bright spot inspection apparatus for filtering out foreign objects and noises and method thereof - Google Patents

Bright spot inspection apparatus for filtering out foreign objects and noises and method thereof Download PDF

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TW201543023A
TW201543023A TW103116360A TW103116360A TW201543023A TW 201543023 A TW201543023 A TW 201543023A TW 103116360 A TW103116360 A TW 103116360A TW 103116360 A TW103116360 A TW 103116360A TW 201543023 A TW201543023 A TW 201543023A
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image
panel
tested
light source
bright spot
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TW103116360A
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Chinese (zh)
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TWI502186B (en
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pin-jie Lin
yao-sheng Li
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Utechzone Co Ltd
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Abstract

A bright spot inspection apparatus for filtering out foreign objects and noises comprises an inspection platform, an image capturing device, a back light source, a lateral light source, and an arithmetic unit. The inspection platform is for placing a to-be-inspected panel. The image capturing device is arranged at one side of the inspection platform for capturing surface images of the to-be-inspected panel according to an imaging command. The back light source is arranged at another side of the inspection platform opposing to the image capturing device. The lateral light source is arranged at a periphery side of a front surface and/or a back surface of the to-be-inspected panel. The arithmetic unit activates the back light source for obtaining a mixed defect surface image from the image capturing device and activates the lateral light source for obtaining a foreign object defect surface image from the image capturing device, and filters out the foreign object and noises on the mixed defect surface image according to the foreign object defect surface image so as to output a bright light distribution image.

Description

濾除異物雜訊的亮點檢測設備及其方法 Bright spot detecting device for filtering foreign matter noise and method thereof

本發明係有關於一種亮點檢測設備,尤指一種可濾除異物雜訊的亮點檢測設備。 The invention relates to a bright spot detecting device, in particular to a bright spot detecting device capable of filtering foreign matter noise.

目前於業界中,一個完整的面板(panel)製程,必須至少經過以下幾種檢測:1.玻璃基板及彩色濾光片的檢測。2.面板(panel)、偏光片(polarization sheet)上的亮點、碎亮點檢測。3.不均勻(Mura)的檢測,通常是在液晶胞工程或模組工程中進行。4.陣列電路工程中的瑕疵檢測。 Currently in the industry, a complete panel process must pass at least the following tests: 1. Detection of glass substrates and color filters. 2. Panels, bright spots on the polarization sheet, and broken spot detection. 3. Detection of unevenness (Mura) is usually carried out in liquid crystal cell engineering or module engineering. 4. 瑕疵 detection in array circuit engineering.

其中,面板及偏光片上的亮點、碎亮點,係為面板製程中常見的瑕疵。於偏光片或面板製作完成時,會先藉由自動光學檢測系統(Automated Optical Inspection,AOI)對偏光片或面板的表面進行非接觸式的檢查。一般代表性的作法,係利用光學儀器取得成品的表面狀態,再以電腦影像處理技術來檢出異物或圖案異常等瑕疵。這類的亮點、碎亮點的瑕疵影像,被檢測出時將會被自動的分類,並被標示為待測點,以供後續的最終品質管制人員(Final Quality Control,FQC)以人工目測的方式進行最後的判定。 Among them, the bright spots and broken bright spots on the panel and the polarizer are common defects in the panel manufacturing process. When the polarizer or panel is completed, the surface of the polarizer or panel is first inspected by the Automated Optical Inspection (AOI). Generally speaking, the surface state of the finished product is obtained by using an optical instrument, and the foreign matter or pattern abnormality is detected by computer image processing technology. Such bright spots and broken highlight images will be automatically classified when they are detected and marked as points to be tested for subsequent manual quality control (FQC) manual visual inspection. Make the final decision.

習知有關於面板檢測的技術,針對這類的亮點、碎亮點,具有固定的檢測步驟,其檢測步驟如下:將待測面板輸送至檢測平台,並提供上、下光源(即背光源)打光於該面板上藉以顯示出偏光板、或面板上的瑕疵點,顯示出的瑕疵點係藉由檢測鏡頭(CCD camera)拍攝後取得。所取得的瑕疵影像藉由影像處理器經二值化處理後,將可以取得對應的亮點、碎亮點。藉由進一步定義前述亮點、及碎亮點的位置及座標,所述的瑕疵面板(亮點、碎亮點)可藉由雷射熔接法進行瑕疵補修,藉以提升產品的良率。 There are some techniques for panel detection. For such bright spots and broken bright spots, there are fixed detection steps. The detection steps are as follows: the panel to be tested is transported to the detection platform, and the upper and lower light sources (ie, backlights) are provided. The light is displayed on the panel to display a polarizing plate or a defect on the panel, and the displayed defect is obtained by shooting with a CCD camera. After the obtained image is binarized by the image processor, corresponding bright spots and broken bright points can be obtained. By further defining the aforementioned bright spots, and the position and coordinates of the broken bright spots, the enamel panels (bright spots, broken bright spots) can be repaired by laser welding to improve the yield of the product.

惟,藉由上、下光源所打出的瑕疵影像,除上述於製程中所產生的亮點、碎亮點外,尚有可能會顯示出附著於面板、偏光片上的異物(如灰塵、毛髮),這類的異物將會導致於檢測過程中產生誤宰(overkill)的情事。 However, with the sputum image produced by the upper and lower light sources, in addition to the bright spots and broken bright spots generated in the process, it is possible to display foreign matter (such as dust and hair) attached to the panel and the polarizer. Foreign bodies of the class will cause an overkill in the detection process.

本發明之目的,在於解決習知的檢測方式中,無法分辨面板瑕疵及異物,因而導致產生誤宰(overkill)的情事。 It is an object of the present invention to solve the problem of the occurrence of an overkill in a conventional detection method in which panel defects and foreign matter cannot be resolved.

為達到上述目的,本發明係提供一種濾除異物雜訊的亮點檢測設備,係用於對待測面板的表面進行檢測以取得該待測面板的亮點分布影像,該亮點檢測設備包含有一供該待測面板設置的檢測平台,一設置於該檢測平台一側的取像裝置,一設置於該檢測平台相對該取像裝置的一側的背面光源,一或複數個設置於該待測面板的一正面及/或一背面的周側的側向光源,以及一運算器。該取像裝置依據攝像指令對該待測面板的表面進行取 像。該運算器係包含有一取像指示器,以及一影像處理器。該取像指示器藉由啟動該背面光源並傳送該攝像指令至該取像裝置以取得一混和瑕疵表面影像,藉由啟動該側向光源並傳送該攝像指令至該取像裝置以取得一異物瑕疵表面影像,該影像處理器係依據該異物瑕疵表面影像濾除該混和瑕疵表面影像上的異物雜訊,藉以輸出一亮點分布影像。 In order to achieve the above object, the present invention provides a bright spot detecting device for filtering foreign matter noise, which is used for detecting a surface of a panel to be tested to obtain a bright spot distribution image of the panel to be tested, and the bright spot detecting device includes a a detecting platform provided on the measuring panel, an image capturing device disposed on one side of the detecting platform, a back light source disposed on a side of the detecting platform opposite to the image capturing device, and one or a plurality of panels disposed on the panel to be tested A lateral light source on the front side and/or a back side of the back side, and an arithmetic unit. The image capturing device takes the surface of the panel to be tested according to the image capturing instruction image. The operator includes an image capture indicator and an image processor. The image capturing indicator obtains a foreign object by activating the back light source and transmitting the image capturing command to the image capturing device to obtain a mixed surface image by activating the lateral light source and transmitting the image capturing command to the image capturing device. The surface image is obtained by filtering the foreign matter noise on the surface image of the mixed image according to the surface image of the foreign matter, thereby outputting a bright spot distribution image.

進一步地,該側向光源係分別設置於該檢測平台的該正面二側及該檢測平台的該背面二側。 Further, the lateral light sources are respectively disposed on the two sides of the front side of the detecting platform and the two sides of the back side of the detecting platform.

進一步地,該側向光源的照射方向與該待測面板的表面間的夾角係介於20度至30度之間。 Further, an angle between an illumination direction of the lateral light source and a surface of the panel to be tested is between 20 degrees and 30 degrees.

進一步地,該側向光源的照射方向與該待測面板的表面間的夾角大約為25度。 Further, an angle between an irradiation direction of the lateral light source and a surface of the panel to be tested is about 25 degrees.

本發明的另一目的,在於提供一種濾除異物雜訊的碎亮點檢測方法,係透過取像裝置對待測面板的表面進行檢測,以取得該待測面板的亮點分布影像,該方法包含有以下步驟:提供背面光源至該待測面板,並由該取像裝置拍攝該待測面板而取得一混和瑕疵表面影像;提供一或複數個側向光源於該待測面板的正面及/或提供一或複數個側向光源於該待測面板的背面,並由該取像裝置拍攝該待測面板而取得一異物瑕疵表面影像;依據該異物瑕疵表面影像而濾除該混和瑕疵表面影像上的異物雜訊,藉以輸出一亮點分布影像。 Another object of the present invention is to provide a method for detecting a broken bright spot for filtering foreign matter noise, which is obtained by detecting the surface of the panel to be tested by the image capturing device to obtain a bright spot distribution image of the panel to be tested, and the method includes the following Step: providing a back light source to the panel to be tested, and taking the panel to be tested by the image capturing device to obtain a mixed surface image; providing one or more lateral light sources on the front side of the panel to be tested and/or providing a Or a plurality of lateral light sources on the back surface of the panel to be tested, and the panel to be tested is taken by the image capturing device to obtain a foreign matter surface image; and the foreign matter on the surface image of the mixed layer is filtered according to the surface image of the foreign matter Noise, by which a bright spot distribution image is output.

進一步地,該側向光源係分別設置於該檢測平台的 該正面二側及該檢測平台的該背面二側。 Further, the lateral light sources are respectively disposed on the detection platform The two sides of the front side and the two sides of the back side of the detecting platform.

進一步地,該側向光源的照射方向與該待測面板的表面間的夾角係介於20度至30度之間。 Further, an angle between an illumination direction of the lateral light source and a surface of the panel to be tested is between 20 degrees and 30 degrees.

進一步地,該側向光源的照射方向與該待測面板的表面間的夾角大約為25度。 Further, an angle between an irradiation direction of the lateral light source and a surface of the panel to be tested is about 25 degrees.

是以,本發明之若干實施例相較於先前技術具有以下之有益技術功效: Therefore, several embodiments of the present invention have the following beneficial technical effects over the prior art:

1.本發明可有效的濾除面板影像中的異物成分,藉此,可取得相對精確的亮點分布影像。 1. The invention can effectively filter out the foreign matter components in the panel image, thereby obtaining a relatively accurate bright spot distribution image.

2.本發明側向光源的照射方向與該待測面板的表面間的夾角大約呈25度角時,可減少於異物瑕疵表面影像中誤檢出亮點的情形,藉以提升異物雜訊的濾除率。 2. When the angle between the illumination direction of the lateral light source and the surface of the panel to be tested is about 25 degrees, the false detection of the bright spot in the surface image of the foreign matter can be reduced, thereby improving the filtering of the foreign matter noise. rate.

100‧‧‧亮點檢測設備 100‧‧‧ Highlight detection equipment

P‧‧‧待測面板 P‧‧‧Down panel

10‧‧‧檢測平台 10‧‧‧Testing platform

11A‧‧‧檢測平台正面 11A‧‧‧Detection platform front

11B‧‧‧檢測平台背面 11B‧‧‧Detector platform back

20‧‧‧取像裝置 20‧‧‧Image capture device

30‧‧‧背面光源 30‧‧‧Back light source

31‧‧‧燈具 31‧‧‧Lighting

32‧‧‧擴散板 32‧‧‧Diffuser board

40‧‧‧側向光源 40‧‧‧Side light source

40A‧‧‧上方側向光源 40A‧‧‧Upside lateral light source

40B‧‧‧下方側向光源 40B‧‧‧Lower lateral light source

50‧‧‧運算器 50‧‧‧Operator

51‧‧‧取像指示器 51‧‧‧Image indicator

52‧‧‧影像處理器 52‧‧‧Image Processor

G1‧‧‧混和瑕疵表面影像 G1‧‧‧mixed surface image

G2‧‧‧異物瑕疵表面影像 G2‧‧‧ foreign object surface image

G3‧‧‧亮點分布影像 G3‧‧‧ Highlight distribution image

θ 1 ‧‧‧側向光源角度 θ 1 ‧‧‧lateral light source angle

θ 2 ‧‧‧側向光源角度 θ 2 ‧‧‧lateral light source angle

S201-S203‧‧‧步驟 S201-S203‧‧‧Steps

S301-S305‧‧‧步驟 S301-S305‧‧‧Steps

圖1,係為本發明本發明亮點檢測設備的方塊示意圖。 FIG. 1 is a block diagram of a bright spot detecting device of the present invention.

圖2,係為本發明本發明亮點檢測設備的側面示意圖。 2 is a side view showing the bright spot detecting device of the present invention.

圖3,係顯示瑕疵影像的截圖。 Figure 3 shows a screenshot of the 瑕疵 image.

圖4,係為本發明亮點檢測方法的流程示意圖。 FIG. 4 is a schematic flow chart of a bright spot detecting method according to the present invention.

圖5,係顯示亮點分布影像的演算流程。 Figure 5 shows the calculation flow of the bright spot distribution image.

有關本發明之詳細說明及技術內容,現就配合圖式 說明如下。再者,本發明中之圖式,為說明方便,其比例未必按實際比例繪製,而有誇大之情況,該等圖式及其比例非用以限制本發明之範圍。 The detailed description and technical content of the present invention are now in conjunction with the schema. described as follows. In addition, the drawings are not intended to limit the scope of the present invention, and the proportions thereof are not intended to limit the scope of the present invention.

本發明係提供一種濾除異物雜訊的亮點檢測設備,所述的亮點檢測設備係用於進行高精密度的光學儀器檢測,運用機器視覺(檢測鏡頭)做為檢測的標準,藉以處理取得面板或偏光片上的異物或圖案瑕疵的位置。 The invention provides a bright spot detecting device for filtering foreign matter noise, wherein the bright spot detecting device is used for performing high-precision optical instrument detection, and uses machine vision (detecting lens) as a standard for detecting, thereby obtaining a panel. Or the position of the foreign object or pattern on the polarizer.

請參閱「圖1」及「圖2」,係為本發明亮點檢測設備的側面示意圖及方塊示意圖,如圖所示:本發明係提供一種濾除異物雜訊的亮點檢測設備100,用於對待測面板P的表面進行檢測以取得該待測面板P的亮點分布影像。所述的亮點檢測設備100包含有一供該待測面板P設置的檢測平台10,一設置於該檢測平台10一側的取像裝置20,一設置於該檢測平台10相對該取像裝置20一側的背面光源30,一或複數個設置於該檢測平台正面11A及/或檢測平台背面11B周側的側向光源40(40A、40B),以及一連結至上述取像裝置20、背面光源30、側向光源40的運算器50。 Please refer to FIG. 1 and FIG. 2 , which are schematic side views and block diagrams of the bright spot detecting device of the present invention. As shown in the figure, the present invention provides a bright spot detecting device 100 for filtering foreign matter noise for treating The surface of the measuring panel P is detected to obtain a bright spot distribution image of the panel P to be tested. The illuminating device 100 includes a detecting platform 10 for the panel P to be tested, an image capturing device 20 disposed on one side of the detecting platform 10, and a detecting platform 10 disposed on the detecting device 10 a side back light source 30, one or a plurality of side light sources 40 (40A, 40B) disposed on the front side of the detecting platform front surface 11A and/or the detecting platform back surface 11B, and a connection to the image capturing device 20 and the back light source 30 The operator 50 of the lateral light source 40.

所述的檢測平台10係用以供該待測面板P設置,於較佳的實施態樣中,該檢測平台10係可為用於定位面板的面板定位支架,藉由可調式的X軸定位桿、及Y軸定位桿將待測面板P定位於固定的平面上。於另一實施態樣中,該檢測平台10係可為真空式的吸附裝置,藉由真空式的吸附盤吸附所述的待測面板P, 藉以將待測面板P定位於固定的平面上。除此之外,該檢測平台10亦可為乘載該待測面板P的傳輸帶,於待測面板P經過取像裝置20時對待測面板P的表面進行取像。惟,上述僅例示本發明之幾種較佳實施態樣,於本發明中並不欲限制於上述的實施態樣。 The detecting platform 10 is configured to be disposed on the panel to be tested P. In a preferred embodiment, the detecting platform 10 can be a panel positioning bracket for positioning the panel, and the X-axis positioning is adjustable. The rod and the Y-axis positioning rod position the panel to be tested P on a fixed plane. In another embodiment, the detecting platform 10 can be a vacuum type adsorption device, and the panel P to be tested is adsorbed by a vacuum adsorption disk. Thereby, the panel to be tested P is positioned on a fixed plane. In addition, the detection platform 10 can also be a transport belt that carries the panel P to be tested, and the surface of the panel P to be tested is imaged when the panel P to be tested passes through the image capturing device 20. However, the above description is merely illustrative of several preferred embodiments of the present invention, and is not intended to be limited to the embodiments described above.

所述的取像裝置20係設置於該檢測平台10的一側(於圖示中係設置於該檢測平台10的上方),用以對應地拍攝該待測面板P,藉以取得該待測面板P的表面影像。所述的取像裝置20係可為CMOS線掃描相機(CMOS line scan camera)、CMOS面掃描相機(CMOS area scan camera)或CCD(Charge Coupled Device)線掃描相機,可對該待測面板P進行取像和自動辨識,藉以得到該待測面板P的瑕疵分布影像。 The image capturing device 20 is disposed on one side of the detecting platform 10 (shown above the detecting platform 10 in the drawing) for correspondingly capturing the panel P to be tested, thereby obtaining the panel to be tested. The surface image of P. The image capturing device 20 can be a CMOS line scan camera, a CMOS area scan camera, or a CCD (Charge Coupled Device) line scan camera, and the panel P can be tested. Image acquisition and automatic identification, thereby obtaining a 瑕疵 distribution image of the panel P to be tested.

所述的背面光源30係設置於該檢測平台10相對該取像裝置20的另一側(於圖示中係對應至該檢測平台10的下方)。所述的背面光源30係可藉由燈具31及設置於燈具31一側的擴散板32將光源垂直均勻地散出,藉此可對該面板、偏光片(待測面板P)均勻的照光。藉由背面光源照射,該面板、偏光片(待測面板P)上的亮點、碎亮點及異物將隨背面光源30的照射而被顯示出,此時,取像裝置20將拍攝出混和有亮點瑕疵及異物反光(異物雜訊)的混和瑕疵表面影像G1(如圖3所示)。 The back light source 30 is disposed on the other side of the detecting platform 10 relative to the image capturing device 20 (corresponding to the lower side of the detecting platform 10 in the drawing). The back light source 30 can uniformly and uniformly illuminate the light source by the lamp 31 and the diffuser 32 disposed on the side of the lamp 31, whereby the panel and the polarizer (the panel P to be tested) can be uniformly illuminated. By the backlight of the back light source, bright spots, broken bright spots and foreign matter on the panel and the polarizer (the panel P to be tested) are displayed along with the illumination of the back light source 30. At this time, the image capturing device 20 will capture the mixed highlights.混 and foreign matter reflection (foreign noise) mixed 瑕疵 surface image G1 (as shown in Figure 3).

所述的側向光源40設置於該檢測平台正面及/或背面的周側。於本實施態樣中,所述的側向光源40可分為上方側向光源40A及下方側向光源40B二部分(於圖示中係對應至該檢測平 台10的上方及下方二側)。藉由上方側向光源40A及下方側向光源40B於待測面板P的正、反面進行打光,照射於該待測面板P上的光線大多因為全反射效應而未能穿透該面板、偏光片,因此該面板、及偏光片上的瑕疵(亮點、碎亮點)將不會顯示於該待測面板P上,相對地該面板、偏光片上的異物將藉由側向光照射而被顯示出,此時,取像裝置20將拍攝出僅包含有異物反光的異物瑕疵表面影像G2。為降低側向光源40的透光率,藉以降低亮點、碎亮點的析出率,於較佳的實施態樣中,該側向光源40的照射方向與該待測面板P的表面間的夾角較佳係介於20度至30度,此部分於後段將有詳細的實驗數據結果予以佐證。 The lateral light source 40 is disposed on a front side of the front and/or back of the detection platform. In this embodiment, the lateral light source 40 can be divided into two parts: an upper lateral light source 40A and a lower lateral light source 40B (in the figure, corresponding to the detection flat Above and below the table 10). The front side light source 40A and the lower side light source 40B are polished on the front and back sides of the panel P to be tested, and the light irradiated onto the panel P to be tested is mostly unable to penetrate the panel due to the total reflection effect. Therefore, the enamel (bright spot, broken bright spot) on the panel and the polarizer will not be displayed on the panel P to be tested, and the foreign matter on the panel and the polarizer will be displayed by the lateral light irradiation. At this time, the image capturing device 20 captures the foreign matter surface image G2 including only the foreign matter reflection. In order to reduce the light transmittance of the lateral light source 40, the deposition rate of the bright spot and the broken bright spot is reduced. In a preferred embodiment, the angle between the illumination direction of the lateral light source 40 and the surface of the panel P to be tested is compared. The best is between 20 degrees and 30 degrees. This part will be supported by detailed experimental data in the latter part.

所述的運算器50可與儲存單元共同構成一電腦或處理器,例如是個人電腦、工作站、主機電腦、行動裝置、平板或其他型式之電腦或處理器,在此並不限制其種類。在本實施例中,該運算器例如是中央處理器(Central Processing Unit,CPU),或是其他可程式化之一般用途或特殊用途的微處理器(Microprocessor)、數位訊號處理器(Digital Signal Processor,DSP)、可程式化控制器、特殊應用積體電路(Application Specific Integrated Circuits,ASIC)、可程式化邏輯裝置(Programmable Logic Device,PLD)或其他類似裝置或這些裝置的組合。 The computing unit 50 can be combined with the storage unit to form a computer or a processor, such as a personal computer, a workstation, a host computer, a mobile device, a tablet or other type of computer or processor, and the type is not limited herein. In this embodiment, the computing unit is, for example, a central processing unit (CPU), or other programmable general purpose or special purpose microprocessor (Microprocessor), digital signal processor (Digital Signal Processor) , DSP), programmable controller, Application Specific Integrated Circuits (ASIC), Programmable Logic Device (PLD) or other similar devices or a combination of these devices.

於本發明中,所述的運算器50主要包含有一取像指示器51,以及一影像處理器52。該取像指示器51係用於對該取像裝置20、背面光源30、及側向光源40下達啟動指令及攝像指 令,藉此,可透過該取像裝置20分別取得一混和瑕疵表面影像G1以及一異物瑕疵表面影像G2。該影像處理器52係可依據該異物瑕疵表面影像G2濾除該混和瑕疵表面影像G1上的異物雜訊成分,藉以輸出一亮點分布影像G3(如圖3所示)。 In the present invention, the computing unit 50 mainly includes an image capturing indicator 51 and an image processor 52. The image capturing indicator 51 is used to issue a start command and an image finger to the image capturing device 20, the back light source 30, and the side light source 40. Thereby, a mixed 瑕疵 surface image G1 and a foreign matter surface image G2 can be respectively obtained by the image capturing device 20. The image processor 52 can filter out the foreign matter noise component on the mixed 瑕疵 surface image G1 according to the foreign matter surface image G2, thereby outputting a bright spot distribution image G3 (as shown in FIG. 3).

以下係針對本發明的詳細操作流程及對應的演算流程進行詳細的說明:請一併參閱「圖3」及「圖4」,係顯示瑕疵影像的截圖及本發明亮點檢測方法的流程示意圖,如圖所示:於本發明中,所述的亮點檢測方法係經由以下步驟執行。於檢測程序開始時,首先,該取像指示器51係啟動該背面光源30,並傳送一攝像指令至該取像裝置20藉以拍攝取得所述的混和瑕疵表面影像G1(步驟S201)。接續,該取像指示器51係啟動該側向光源40,並傳送一攝像指令至該取像裝置20藉以拍攝取得所述的異物瑕疵表面影像G2(步驟S202)。最後,該影像處理器52依據該異物瑕疵表面影像G2濾除該混和瑕疵表面影像G1上的異物雜訊成分,藉以輸出一亮點分布影像G3(步驟S203)。 The following is a detailed description of the detailed operation flow and corresponding calculation flow of the present invention: Please refer to "Fig. 3" and "Fig. 4" together, which is a schematic diagram showing a screenshot of the image and a flow chart of the bright spot detection method of the present invention, such as As shown in the figure, in the present invention, the bright spot detecting method is performed through the following steps. At the beginning of the detection process, first, the image capturing indicator 51 activates the back light source 30, and transmits an imaging command to the image capturing device 20 to capture and obtain the mixed 瑕疵 surface image G1 (step S201). In the continuation, the image capturing indicator 51 activates the side light source 40 and transmits an imaging command to the image capturing device 20 to capture and obtain the foreign matter surface image G2 (step S202). Finally, the image processor 52 filters out the foreign matter noise component on the mixed pupil surface image G1 according to the foreign matter surface image G2, thereby outputting a bright spot distribution image G3 (step S203).

所述的亮點分布影像G3係可藉由以下的演算方式取得,請參閱「圖5」。影像處理器52於取得混合瑕疵表面影像G1及異物瑕疵表面影像G2時,係先對該混和瑕疵表面影像G1及該異物瑕疵表面影像G2分別進行灰階處理、二值化處理,藉以取得影像中的特徵點(步驟S301),並藉由上色或標記的方式凸顯出上述特徵點,以紀錄該些特徵點的座標及邊緣特徵(步驟 S302)。接續,藉由該些特徵點的座標找出該混和瑕疵表面影像G1及該異物瑕疵表面影像G2中對應的特徵點並針對其邊緣特徵進行比對(步驟S303),濾除該混和瑕疵表面影像G1中與該異物瑕疵表面影像G2中相符的特徵點(步驟S304),並標記、或上色其餘的特徵點(步驟S305),藉此取得該亮點分布影像G3。 The bright spot distribution image G3 can be obtained by the following calculation method, please refer to "Fig. 5". When acquiring the mixed 瑕疵 surface image G1 and the foreign matter 瑕疵 surface image G2, the image processor 52 performs gray scale processing and binarization processing on the mixed 瑕疵 surface image G1 and the foreign matter 瑕疵 surface image G2, respectively, to obtain an image. Feature points (step S301), and highlighting the feature points by coloring or marking to record coordinates and edge features of the feature points (step S302). Continuing, the corresponding feature points of the mixed 瑕疵 surface image G1 and the foreign matter 影像 surface image G2 are found by coordinates of the feature points and aligned for the edge features (step S303), and the mixed 瑕疵 surface image is filtered out A feature point corresponding to the foreign matter surface image G2 in G1 (step S304), and marking or coloring the remaining feature points (step S305), thereby obtaining the bright spot distribution image G3.

經由上述的步驟,本發明經由多次實驗的結果,係得到以下的實驗數據。於實驗條件中所述的側向光源角度θ 1 ,係為上方側向光源40A的照射方向與該待測面板P的表面間的夾角,所述的側向光源角度θ 2 ,係為下方側向光源40B的照射方向與該待測面板P的表面間的夾角。背光檢出係指經背面光源30照射時,於該混和瑕疵表面影像G1中所能取得的特徵點的數量A,濾除後檢出係指經濾除處理過後的亮點分布影像G3中,所剩餘的特徵點的數量B。濾除率係指所能濾除的數量的百分比P={(A-B)/A}x100%。 Through the above steps, the present invention obtained the following experimental data through the results of a plurality of experiments. The lateral light source angle θ 1 in the experimental condition is an angle between the irradiation direction of the upper lateral light source 40A and the surface of the panel P to be tested, and the lateral light source angle θ 2 is the lower side. An angle between the direction of illumination of the light source 40B and the surface of the panel P to be tested. The backlight detection refers to the number A of feature points that can be obtained in the mixed 瑕疵 surface image G1 when illuminated by the back light source 30, and the filtered detection image refers to the bright spot distribution image G3 after filtering. The number of remaining feature points B. The filtration rate is the percentage of the amount that can be filtered out P = {(AB) / A} x 100%.

經實驗的結果,可得到以下的結論: 當該上方側向光源、及下方側向光源的照射方向與待測面板表面間的夾角呈水平時(即θ 1 =θ 2 =0°時),異物雜訊的濾除率為82.2%。當該上方側向光源的照射方向與待測面板表面間的角度為25°,下方側向光源的照射方向與待測面板表面間的夾角呈水平時(即θ 2 =0°時),異物雜訊的濾除率為85%。當該上方側向光源、及該下方側向光源的照射方向與待測面板表面間的角度為25°時,該異物雜訊的濾除率將可提升至90.5%。 As a result of the experiment, the following conclusion can be obtained: when the angle between the irradiation direction of the upper lateral light source and the lower lateral light source and the surface of the panel to be tested is horizontal (ie, θ 1 = θ 2 =0°), The filtration rate of foreign matter noise was 82.2%. When the angle between the illumination direction of the upper lateral light source and the surface of the panel to be tested is 25°, and the angle between the illumination direction of the lower lateral light source and the surface of the panel to be tested is horizontal (ie, when θ 2 =0°), the foreign matter The noise filtering rate is 85%. When the angle between the upper lateral light source and the lower lateral light source and the surface of the panel to be tested is 25°, the foreign matter noise filtering rate can be increased to 90.5%.

以下的實驗數據係針對不同廠牌面板的市售樣本1、市售樣本2及市售樣本3進行測試。於本次測試中,上方及下方的側向光源的照射方向與該待測面板的表面間的夾角均為25度,作為實驗中的控制變因,針對不同廠牌市售樣本1、2、3分別進行測試,係作為實驗中的操作變因。於實驗結果中,背光檢出係指經背面光源照射時,於該混和瑕疵表面影像中所能取得的特徵點的數量A,濾除後檢出係指經濾除處理過後的亮點分布影像中,所剩餘的特徵點的數量B。濾除率係指所能濾除的數量的百分比P={(A-B)/A}x100%。 The following experimental data was tested for commercial samples 1, commercial samples 2 and commercial samples 3 of different brand panels. In this test, the angle between the direction of the upper and lower lateral light sources and the surface of the panel to be tested is 25 degrees. As a control factor in the experiment, samples 1 and 2 are sold for different brands. 3 Tests were performed separately as operational variables in the experiment. In the experimental results, the backlight detection refers to the number A of feature points that can be obtained in the surface image of the mixed crucible when irradiated by the back light source, and the detected point is filtered after the filtering process. , the number B of remaining feature points. The filtration rate is the percentage of the amount that can be filtered out P = {(A - B) / A} x 100%.

經實驗的結果,可得到以下的結論:於市售樣本1的測試中,經背光檢出所能取得的特徵點的數量為1484個,濾除處理過後的亮點分布影像中所剩餘的特徵點的數量為234個,濾除率為84.2%。於市售樣本2的測試中,經背光檢出所能取得的特徵點的數量為1718個,濾除處理過後的亮點分布影像中所剩餘的特徵點的數量為190個,濾除率為88.9%。於市售樣本3的測試中,經背光檢出所能取得的特徵點的數量為1500個,濾除處理過後的亮點分布影像中所剩餘的特徵點的數量為168個,濾除率為88.8%。由三份樣本的測試結果可知,上方及下方的側向光源的照射方向與該待測面板的表面間的夾角為25度時,異物雜訊的濾除率均可達到80%以上的優異效果。由上述的實驗結果可知,夾角大致呈25°時,係可大幅度地增加異物雜訊的檢出率並減少誤判。 According to the experimental results, the following conclusions can be drawn: in the test of the commercially available sample 1, the number of feature points that can be obtained by the backlight detection is 1484, and the remaining feature points in the processed bright spot distribution image are filtered out. The number is 234 and the filtration rate is 84.2%. In the test of the commercially available sample 2, the number of feature points that can be obtained by backlight detection is 1,718, and the number of feature points remaining in the image of the bright spot distribution after filtering is 190, and the filtering rate is 88.9. %. In the test of the commercially available sample 3, the number of feature points that can be obtained by backlight detection is 1500, and the number of feature points remaining in the filtered image of the bright spot after filtering is 168, and the filtering rate is 88.8. %. From the test results of the three samples, it can be seen that when the angle between the irradiation direction of the upper and lower lateral light sources and the surface of the panel to be tested is 25 degrees, the filtering rate of the foreign matter noise can reach 80% or more. . From the above experimental results, it can be seen that when the angle is approximately 25°, the detection rate of foreign matter noise can be greatly increased and false positives can be reduced.

綜上所述,本發明可有效的濾除面板影像中的異物成分,藉此,可取得相對精確的亮點分布影像。此外,本發明側向光源的照射方向與該待測面板的表面間的夾角大約呈25度角時,可減少於異物瑕疵表面影像中誤檢出亮點的情形,藉以提升異物雜訊的濾除率。 In summary, the present invention can effectively filter out foreign matter components in the panel image, thereby obtaining a relatively accurate bright spot distribution image. In addition, when the angle between the illumination direction of the lateral light source of the present invention and the surface of the panel to be tested is about 25 degrees, the situation of erroneously detecting a bright spot in the surface image of the foreign matter can be reduced, thereby improving the filtering of the foreign matter noise. rate.

以上已將本發明做一詳細說明,惟以上所述者,僅為本發明之一較佳實施例而已,當不能以此限定本發明實施之範 圍,即凡依本發明申請專利範圍所作之均等變化與修飾,皆應仍屬本發明之專利涵蓋範圍內。 The present invention has been described in detail above, but the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The equivalent changes and modifications made by the scope of the present invention should remain within the scope of the patent of the present invention.

100‧‧‧亮點檢測設備 100‧‧‧ Highlight detection equipment

P‧‧‧待測面板 P‧‧‧Down panel

10‧‧‧檢測平台 10‧‧‧Testing platform

11A‧‧‧檢測平台正面 11A‧‧‧Detection platform front

11B‧‧‧檢測平台背面 11B‧‧‧Detector platform back

20‧‧‧取像裝置 20‧‧‧Image capture device

30‧‧‧背面光源 30‧‧‧Back light source

31‧‧‧燈具 31‧‧‧Lighting

32‧‧‧擴散板 32‧‧‧Diffuser board

40A‧‧‧上方側向光源 40A‧‧‧Upside lateral light source

40B‧‧‧下方側向光源 40B‧‧‧Lower lateral light source

θ 1 ‧‧‧側向光源角度 θ 1 ‧‧‧lateral light source angle

θ 2 ‧‧‧側向光源角度 θ 2 ‧‧‧lateral light source angle

Claims (8)

一種濾除異物雜訊的亮點檢測設備,係用於對一待測面板的表面進行檢測以取得該待測面板的亮點分布影像,該亮點檢測設備包含有:一檢測平台,供該待測面板設置;一取像裝置,設置於該檢測平台一側,依據一攝像指令對該待測面板的表面進行取像;一背面光源,設置於該檢測平台相對該取像裝置的一側;一或複數個側向光源,設置於該檢測平台的一正面及/或一背面的周側;以及一運算器,係包含有一取像指示器,以及一影像處理器,該取像指示器藉由啟動該背面光源並傳送該攝像指令至該取像裝置以取得一混和瑕疵表面影像,藉由啟動該側向光源並傳送該攝像指令至該取像裝置以取得一異物瑕疵表面影像,該影像處理器係依據該異物瑕疵表面影像而濾除該混和瑕疵表面影像上的異物雜訊,藉以輸出一亮點分布影像。 A bright spot detecting device for filtering foreign matter noise is used for detecting a surface of a panel to be tested to obtain a bright spot distribution image of the panel to be tested, the highlight detecting device comprising: a detecting platform for the panel to be tested The image capturing device is disposed on a side of the detecting platform, and the surface of the panel to be tested is imaged according to an image capturing instruction; a back light source is disposed on a side of the detecting platform opposite to the image capturing device; a plurality of lateral light sources disposed on a front side of the detecting platform and/or a peripheral side of a back surface; and an arithmetic unit including an image capturing indicator and an image processor, wherein the image capturing indicator is activated by The back light source transmits the image capturing command to the image capturing device to obtain a mixed surface image, and the image processor is obtained by activating the side light source and transmitting the image capturing command to the image capturing device to obtain a foreign matter surface image. The foreign matter noise on the surface image of the mixed image is filtered according to the surface image of the foreign matter, thereby outputting a bright spot distribution image. 如申請專利範圍第1項所述之亮點檢測設備,其中,該側向光源係分別設置於該檢測平台的該正面二側及該檢測平台的該背面二側。 The bright spot detecting device of claim 1, wherein the lateral light sources are respectively disposed on the front side of the detecting platform and the back side of the detecting platform. 如申請專利範圍第1項或第2項其中一項所述之亮點檢測設備,其中,該側向光源的照射方向與該待測面板的表面間的夾角係介於20度至30度之間。 The bright spot detecting device according to any one of the preceding claims, wherein the angle between the direction of illumination of the lateral light source and the surface of the panel to be tested is between 20 and 30 degrees. . 如申請專利範圍第1項或第2項其中一項所述之亮點檢測設備,其中,該側向光源的照射方向與該待測面板的表面間的夾角大約為25度。 The bright spot detecting device according to any one of claims 1 to 2, wherein an angle between an irradiation direction of the lateral light source and a surface of the panel to be tested is about 25 degrees. 一種濾除異物雜訊的亮點檢測方法,係透過一取像裝置對一待測面板的表面進行檢測,以取得該待測面板的亮點分布影像,該方法包含有以下步驟:提供一背面光源至該待測面板,並由該取像裝置拍攝該待測面板而取得一混和瑕疵表面影像;提供一或複數個側向光源於該待測面板的正面及/或提供一或複數個側向光源於該待測面板的背面,並由該取像裝置拍攝該待測面板而取得一異物瑕疵表面影像;以及依據該異物瑕疵表面影像而濾除該混和瑕疵表面影像上的異物雜訊,藉以輸出一亮點分布影像。 A method for detecting a bright spot for filtering foreign matter noise is to detect a surface of a panel to be tested by using an image capturing device to obtain a bright spot distribution image of the panel to be tested, the method comprising the steps of: providing a back light source to The panel to be tested, and the panel to be tested is taken by the image capturing device to obtain a mixed surface image; one or more lateral light sources are provided on the front surface of the panel to be tested and/or one or more lateral light sources are provided. And the surface of the panel to be tested is taken by the image capturing device to obtain a foreign matter surface image; and the foreign matter noise on the surface image of the mixed layer is filtered according to the surface image of the foreign matter, thereby outputting A bright spot distributes the image. 如申請專利範圍第5項所述之亮點檢測方法,其中,該側向光源係分別設置於該檢測平台的該正面二側及該檢測平台的該背面二側。 The method for detecting a bright spot according to claim 5, wherein the lateral light sources are respectively disposed on the front side of the detecting platform and the back side of the detecting platform. 如申請專利範圍第5項或第6項其中一項所述之亮點檢測方法,其中,該側向光源的照射方向與該待測面板的表面間的夾角係介於20度至30度之間。 The method for detecting a bright spot according to any one of the items 5 or 6, wherein the angle between the direction of the lateral light source and the surface of the panel to be tested is between 20 and 30 degrees. . 如申請專利範圍第5項或第6項其中一項所述之亮點檢測方法,其中,該側向光源的照射方向與該待測面板的表面間的夾角大約為25度。 The bright spot detecting method according to any one of the items 5 or 6, wherein the angle between the direction of illumination of the lateral light source and the surface of the panel to be tested is about 25 degrees.
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