TW201531603A - Multi-cavity texturing system - Google Patents

Abstract

The invention provides a multi-cavity texturing system. The multi-cavity texturing system comprises a reaction groove and a roller. A plurality of pairs of partition plates are arranged in the reaction groove and partition the reaction groove into a plurality of working liquid chambers, buffering chambers for overflow circulation are arranged between pairs of partition plates respectively, and outlets are formed in the bottoms of the buffering chambers and are connected with a liquid circulation system outside the reaction groove through pipelines. The height of the partition plates is smaller than the height of the periphery of the reaction groove. The multi-cavity texturing system can accelerate liquid medicine replacing in all inner regions of the reaction groove and effectively reduce difference of liquid medicine concentration and temperature of the inner regions of the reaction groove, and therefore the surface of silicon wafers can be more evenly processed. Furthermore, the multi-cavity texturing system is simple in structure, convenient to install and maintain and high in production efficiency.

Description

Multi-chamber fleece system 【0001】

The invention relates to a chain solar cleaning device and a wet processing device, in particular to a fluffing cleaning device for polycrystalline silicon wafers used in the photovoltaic industry.

【0002】

In the production of polycrystalline silicon wafers, the coffin is usually subjected to a texturing cleaning treatment using a chain solar cleaning device. When the bracts react with chemicals, the concentration of the liquid in the reaction tank of the cleaning equipment will be regionally inconsistent, and the temperature at each point in the reaction tank will be different, which will result in a large uniformity of the surface treatment of the bracts. reduce.

[0003]

Therefore, improving the difference in the concentration of the chemical solution in the reaction tank and the difference in the temperature of the liquid at each point in the reaction tank are technical problems to be solved in the industry.

[0004]

In order to solve the above technical problems, the present invention provides a multi-chamber texturing system having a high liquid exchange rate, a small liquid concentration in a reaction tank, and a small temperature difference.

[0005]

The invention provides a multi-chamber texturing system comprising a reaction tank and a drum. The reaction tank is provided with a plurality of pairs of partition plates and the reaction tank is divided into a plurality of working fluid chambers, and between the two plates of each pair of partition plates is a buffer chamber overflowing the loop, and the bottom of the buffer chamber is provided with an output. The outlet is connected to the liquid circulation system outside the reaction tank through a pipeline; the height of the separator is lower than the height of the periphery of the reaction tank.

[0006]

The invention uses a plurality of pairs of separators to divide the reaction tank cavity into a plurality of working fluid chambers. When the liquid level in the tank reaches a certain height, the liquid medicine in the upper layer of the reaction tank flows from the upper portion of the partition into the buffer chamber of the overflow loop. The chamber quickly flows away, thereby accelerating the liquid exchange rate of the liquid medicine in each area of the reaction tank, and effectively reducing the difference in the concentration of the liquid medicine in each area of the reaction tank and the temperature difference, thereby making the surface treatment of the bracts more uniform. The invention has simple structure, convenient installation and maintenance, and high production efficiency.

[0011]

1‧‧‧Reaction tank

2‧‧‧Roller

3‧‧‧Baffle

4‧‧‧Working fluid chamber

5‧‧‧buffer chamber

6‧‧‧pipe

7‧‧‧around

【0007】

Figure 1 is a schematic cross-sectional view showing a preferred embodiment of the present invention.

[0008]

The invention will now be further described with reference to the drawings and embodiments.

【0009】

As shown in FIG. 1, a multi-chamber texturing system according to a preferred embodiment of the present invention comprises a strip-shaped reaction tank 1 and a transport drum 2 disposed in the upper portion of the reaction tank 1. The reaction tank 1 is provided with a plurality of pairs of partitions 3, and the reaction tank 1 is divided into a plurality of working fluid chambers 4, and between the two plates of each pair of partition plates is a buffer chamber 5 overflowing the loop, the buffer The bottom of the chamber is provided with an output port which is connected through a line 6 to a liquid circulation system outside the reaction tank. The height of the partition 3 is lower than the height of the periphery 7 of the reaction tank 1. The shape, number and position of the working fluid chamber 4 can be selected according to different requirements.

[0010]

The invention provides a plurality of pairs of separators separating the chambers of the reaction tank in the reaction tank body, so that a plurality of working fluid chambers are formed in the reaction tank. When the liquid level in the tank reaches a certain height, the liquid flows from the upper part of the partition into the buffer chamber of the overflow loop between the pair of partitions, and then passes through the pipeline below the reaction tank to enter the liquid circulation system outside the reaction tank. Enter the reaction tank after heat exchange. The structure can make the liquid medicine in the upper layer of each working fluid chamber synchronously flow away quickly. Compared with the conventional overflow device, the multi-chamber structure of the present invention may disperse the liquid medicine in the tank body at random, thereby solving the reaction. The problem of inconsistent liquid concentration in different regions of the tank; and because the area of each working fluid chamber of the present invention is smaller, it facilitates a faster overflow loop, which greatly reduces the temperature difference in different regions of the reaction tank.

Domestic registration information [please note according to the registration authority, date, number order]

no

Foreign deposit information [please note according to the country, organization, date, number order]

no

no

1‧‧‧Reaction tank

2‧‧‧Roller

3‧‧‧Baffle

4‧‧‧Working fluid chamber

5‧‧‧buffer chamber

6‧‧‧pipe

7‧‧‧around

Claims (1)

[Item 1] A multi-chamber texturing system comprising a reaction tank (1) and a drum (2), characterized in that a plurality of pairs of partitions (3) are arranged in the reaction tank (1), and the reaction tank (1) is separated a plurality of working fluid chambers (4), between the two plates of each pair of partitions of the pair of partitions, an overflow chamber of the buffer chamber (5), the bottom of the buffer chamber is provided with an output port, The outlet is connected to the liquid circulation system outside the reaction tank through a line (6); the height of the partition (3) is lower than the height of the periphery (7) of the reaction tank (1).