CN205789890U - Roasting plant - Google Patents
Roasting plant Download PDFInfo
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- CN205789890U CN205789890U CN201620532772.4U CN201620532772U CN205789890U CN 205789890 U CN205789890 U CN 205789890U CN 201620532772 U CN201620532772 U CN 201620532772U CN 205789890 U CN205789890 U CN 205789890U
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- China
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- exhaustor
- processing chamber
- air inlet
- roasting plant
- inlet pipe
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Abstract
The utility model discloses a kind of roasting plant, including processing chamber, air inlet pipe and exhaustor；Air inlet pipe and exhaustor are arranged at described processing chamber antarafacial；Air inlet pipe is provided with gas outlet, and for being inputted to processing chamber by the process gas after heating by gas outlet, process gas the device being opposite in processing chamber carries out heated baking；Exhaustor is arranged on the inside of processing chamber, offers air inlet and air vent, for being introduced process gases in exhaustor by air inlet, and is discharged by processing chamber by air vent.Thus, when using above-mentioned roasting plant that device is carried out heated baking, by being positioned at the heat of the process gas of the exhaustor within processing chamber, device can be preheated, thus shorten the rise time of the default baking temperature in processing chamber, reduce energy resource consumption.Efficiently solve the problem that traditional roasting plant easily produces energy waste.
Description
Technical field
This utility model relates to semiconductor manufacturing equipment technical field, particularly relates to a kind of roasting plant.
Background technology
Along with the development of semiconductor technology, in flat pannel display industry, low temperature polysilicon process is compared to non-crystalline silicon
Technique, processing procedure is complicated, and operation is various, and roasting plant proposes increasing requirement.At present, tradition
Roasting plant be typically with baking chamber outer wall both sides hot type pipe is set so that baking chamber
Interior waste gas discharges chamber after being passed through chiller by hot type pipe.But, use traditional roasting plant to make
Waste gas can not be utilized effectively, thus easily causes the waste of the energy.
Utility model content
Based on this, it is necessary to the problem easily producing energy waste for traditional roasting plant, it is provided that a kind of
Roasting plant.
For realizing a kind of roasting plant that this utility model purpose provides, including processing chamber, air inlet pipe and row
Trachea；
Described air inlet pipe and described exhaustor are arranged at described processing chamber antarafacial；
Described air inlet pipe is provided with gas outlet；And
Described air inlet pipe is for inputting the process gas after heating to described processing chamber by described gas outlet
In, described process gas it is opposite to the device in described processing chamber and carries out heated baking；
Described exhaustor is arranged on the inside of described processing chamber, and offers air inlet and air vent；
Described exhaustor is used for being introduced in described exhaustor by described process gas by described air inlet, and will
Described process gas is discharged by described processing chamber by described air vent.
Wherein in an embodiment, described air inlet pipe is arranged on the inside of described processing chamber；And
The gas outlet of described air inlet pipe is oppositely arranged with the air inlet position of described exhaustor.
Wherein in an embodiment, described air inlet pipe is positioned at the top of described processing chamber；Described exhaustor
It is positioned at the bottom of described processing chamber.
Wherein in an embodiment, described exhaustor structure in the shape of a spiral or polyline shaped structure are laid on described
On the sidewall of processing chamber.
Wherein in an embodiment, the number of described air inlet is multiple；The number of described exhaustor is many
Individual, and multiple described exhaustor is sequentially communicated.
Wherein in an embodiment, the dispersed sidewall being opened in described exhaustor of multiple described air inlets
On.
Wherein in an embodiment, described exhaustor is metal tube.
Wherein in an embodiment, also include connecting pipeline；And the number of described processing chamber is multiple；
Described connecting pipeline is connected to the air vent of the described exhaustor in each described processing chamber and sets with aerofluxus
Between standby bleeding point；And
The air vent of the described exhaustor in each described processing chamber is all connected with connecting pipeline.
Wherein in an embodiment, the number of described processing chamber is multiple；
Multiple described processing chambers are arranged in series, and are provided with division board described in each two between processing chamber；
Described exhaustor in multiple described processing chambers is connected in series.
Wherein in an embodiment, the described exhaustor in multiple described processing chambers is one-body molded.
Above-mentioned roasting plant, by arranging air inlet pipe, will heating by its gas outlet offered by air inlet pipe
After process gas input in processing chamber so that the process gas after heating is opposite in processing chamber
Device carries out heated baking.Meanwhile, also by exhaustor being arranged on the inside of processing chamber, and in aerofluxus
Corresponding air inlet and air vent is offered so that exhaustor is introduced process gases into row by air inlet on pipe
Tracheal strips, and discharged by processing chamber by air vent.Thus, when using above-mentioned roasting plant that device is entered
During row heated baking, it is possible to by being positioned at the heat of the process gas of the exhaustor within processing chamber to device
Part preheats, thus reduces the variations in temperature width caused when putting into device to be heated in processing chamber
Degree, this most just shortens the rise time of the default baking temperature in processing chamber, eventually reduces the energy and disappear
Consumption.Efficiently solve the problem that traditional roasting plant easily produces energy waste.
Accompanying drawing explanation
Fig. 1 is the cross-sectional view of the embodiment one of roasting plant of the present utility model；
Fig. 2 is the top view of the embodiment two of roasting plant of the present utility model；
Fig. 3 is the top view of the embodiment three of roasting plant of the present utility model；
Fig. 4 is the cross-sectional view of the embodiment four of roasting plant of the present utility model；
Fig. 5 is the cross-sectional view of the embodiment five of roasting plant of the present utility model；
Fig. 6 is the cross-sectional view of the embodiment six of roasting plant of the present utility model.
Detailed description of the invention
For making technical solutions of the utility model clearer, below in conjunction with drawings and the specific embodiments to this practicality
Novel it is described in further detail.
Firstly, it is necessary to explanation, roasting plant of the present utility model, as long as in flat pannel display industry
In, prepared flat-panel display device is carried out baking used.That is, roasting plant of the present utility model, be
For toasting prepared various flat-panel display devices.
Seeing Fig. 1, as a specific embodiment of roasting plant 100 of the present utility model, it includes process cavity
Room 110, air inlet pipe 120 and exhaustor 130.Wherein, processing chamber 110 can be provided with base station 111,
This base station 111 is used for placing device 200 to be heated, such as: flat-panel display device, it is possible to for wafer etc..
Air inlet pipe 120 and exhaustor 130 are arranged at described processing chamber 110 antarafacial.Air inlet pipe 120 has
Blowing mouth and gas outlet 121.Wherein, blowing mouth is connected with the gas pipeline 140 of process gas.Herein,
It should be noted that, be disposed with switch valve 141, effusion meter 142, filter 143 on gas pipeline 140
With preheating apparatus 144, it is respectively used to control being turned on and off of gas pipeline 140, enters gas pipeline
The flow of the process gas in 140, and the process gas entered in gas pipeline 140 is filtered and heats.
So that eventually pass through the process gas after filtering and heating to enter air inlet by the blowing mouth of air inlet pipe 120
In pipe 120, and input the inside to processing chamber 110 by the gas outlet 121 of air inlet pipe 120, and then
The device to be heated 200 that process gas after heating is opposite in processing chamber 110 carries out heated baking.
Exhaustor 130 is then arranged on the inside of processing chamber 110, and offers air inlet 131 and aerofluxus
Mouth 132.Wherein, exhaustor 130 carries out heated baking for treating heater element 200 by air inlet 131
After process gas introduce in exhaustor 130, and discharged by processing chamber 110 by air vent 132.
It should be noted that owing to processing chamber 110 moment in baking process of roasting plant 100 keeps
The temperature moment in sealing state, and processing chamber 110 keeps preset temperature.When using roasting plant 100
Treat heater element 200 when carrying out heated baking, need first to be opened by processing chamber 110, and by be heated
Processing chamber 110 put into by device 200.When opening processing chamber 110, inside and outside processing chamber 110
The temperature difference temperature in processing chamber 110 can be caused to be varied from.And roasting plant 100 of the present utility model,
By arranging exhaustor 130 in process cavity, due to heat and the process cavity of the process gas in exhaustor 130
Temperature when room 110 is not switched on is almost equal.Therefore, device to be heated is put into opening processing chamber 110
After 200, now the temperature in processing chamber 110 is due to by the shadow of the heat of process gas in exhaustor 130
Ringing, its amplitude of variation is much smaller compared to traditional roasting plant 100.Thus, carry out on this basis
During the heated baking of device 200 to be heated, it achieves heat to the process gas in exhaustor 130
Effectively utilize, thus substantially shorten the temperature in the processing chamber 110 after closedown and rise to preset temperature institute
The time needed, this most just effectively reduces the energy resource consumption of roasting plant 100, finally efficiently solves tradition
The problem of energy waste that caused of roasting plant 100.
Further, see Fig. 1, as a specific embodiment of roasting plant 100 of the present utility model, for
Realize effective utilization of process gas, it is preferred that air inlet pipe 120 is similarly disposed at processing chamber 110
Internal.Further, the gas outlet 121 of air inlet pipe 120 and the air inlet 131 of exhaustor 130 are at processing chamber
Position in 110 is oppositely arranged.Thus, it is possible to make to be inputted to technique by the gas outlet 121 of air inlet pipe 120
Process gas in chamber 110 can effectively be treated heater element 200 and carry out heated baking, and makes to add
Process gas after baking the affected part after applying some drugs bakes device 200 to be heated can effectively be introduced in exhaustor 130, by exhaustor
130 discharge processing chamber 110, thus ensure that effective circulation of the process gas in processing chamber 110.
Wherein, in order to further ensure that process gas treats effective heated baking of heater element 200,
And effective discharge that exhaustor 130 is to the process gas after using, seeing Fig. 1, air inlet pipe 120 is preferred
Being arranged on the top of processing chamber 110, exhaustor 130 is then preferably provided at the bottom of processing chamber 110.
It, by air inlet pipe 120 is arranged on the top of processing chamber 110, is effectively shortened air inlet pipe 120 and treats
Vertical dimension between heater element 200, so that by adding that the gas outlet 121 of air inlet pipe 120 is derived
Process gas after heat can vertically be flowed into the surface of device 200 to be heated, treats heater element 200 and enters
The significantly more efficient heated baking of row, to improve the cured effect of device 200 to be heated.Meanwhile, by arranging
Trachea 130 is arranged on the bottom of processing chamber 110, is further effectively shortened exhaustor 130 and air inlet
Vertical dimension between pipe 120 so that the process gas after use can be introduced to aerofluxus at short notice
In pipe 130, and discharging processing chamber 110 by exhaustor 130, this is the most just effectively increased processing chamber
The circulation efficiency of the process gas in 110, it is ensured that baking quality.
It addition, see Fig. 2 and Fig. 3, in order to further improve the gas circulation in processing chamber 110,
Ensureing the effective discharge to the process gas after using, exhaustor 130 can structure or polyline shaped be tied in the shape of a spiral
On the dispersed sidewall being laid on processing chamber 110 of structure, thus effectively increase the introducing area of process gas,
Improve the rate of discharge of process gas.
Further, see Fig. 2 and Fig. 3, as roasting plant 100 of the present utility model another specifically
Embodiment, the number of the air inlet 131 being opened on exhaustor 130 can be multiple.By at exhaustor 130
On offer multiple air inlet 131, further improve the expulsion efficiency of process gas, it is ensured that process cavity
Effective circulation of process gas in room 110.
And, it is preferred that when the number of the air inlet 131 of exhaustor 130 is multiple, multiple air inlets
On the 131 dispersed sidewalls being opened in exhaustor 130.
Further, the number of exhaustor 130 is the most multiple, and multiple exhaustor 130 is sequentially communicated.
Simultaneously as roasting plant of the present utility model 100 is by effectively utilizing the technique in exhaustor 130
The heat of gas is treated heater element 200 and is preheated, to realize the energy resource consumption of roasting plant 100
Effectively reduce.Wherein, by utilizing the heat of the process gas in exhaustor 130 to treat heater element 200
Being based on heat-conduction principle when heating, therefore exhaustor 130 is preferably the metal tube that heat conductivity is good,
As: copper pipe, aluminum pipe etc..
Further, see Fig. 4, Fig. 5 and Fig. 6, in order to realize the batch production of device 200 to be heated,
Simultaneously to reduce total process time of multiple devices 200 to be heated, as roasting plant of the present utility model
One specific embodiment of 100, its processing chamber 110 can be multiple.
Concrete, see Fig. 4 and Fig. 5, when the number of processing chamber 110 is multiple, multiple processing chambers
110 can be arranged in series or be arranged in parallel.Wherein, when multiple processing chambers 110 are arranged in series, two often it are separated by
Between individual processing chamber 110, division board 150 can be set, to realize the isolation between processing chamber 110.Meanwhile,
The multiple processing chambers 110 no matter being arranged in parallel or being arranged in series, the aerofluxus in each processing chamber 110
The air vent 132 of pipe 130 is all connected with connecting pipeline 170.Wherein, this connecting pipeline 170 is connected to
Between air vent 132 and the bleeding point of exhaust equipment 160 of the exhaustor 130 in each processing chamber 110.
Further, the air vent 132 of the exhaustor 130 in each processing chamber 110 is all connected with connecting pipeline 170
Logical.Thus, by exhaust equipment 160, each exhaustor 130 is bled so that each exhaustor 130
Interior process gas can effectively smoothly pass over connecting pipeline 170 and be discharged by corresponding processing chamber 110.
It achieves the purpose that multiple processing chamber 110 works simultaneously such that it is able to carry out device 200 to be heated
Heated baking in batches, this also reduces energy consumption with regard to significantly more efficient, saves processing cost, and improves and add
Work efficiency rate.
Further, see Fig. 6, wherein, when multiple processing chambers 110 are arranged in series, by every phase
Between adjacent two processing chambers 110, division board 150 is set, effective with realize adjacent processing chamber 110
Isolation.Meanwhile, the exhaustor 130 in multiple processing chambers 110 is connected in series, thus realizes exhaustor 130
Circulating type in multiple processing chambers 110 is arranged so that exhaustor 130 is through each processing chamber 110
Inside, reach effectively to utilize the purpose of the heat of process gas in exhaustor 130.
Preferably, when the exhaustor 130 in multiple processing chambers 110 is connected in series, it may be configured as one
Molding structure, thus the sealing being effectively ensured between the exhaustor 130 in adjacent two processing chambers 110
Performance, improves reliability and the effectiveness of exhaustor 130.Further, in the processing being exhausted pipe 130
Time, directly use corresponding mould to be processed, this is the most just effectively simplified the processing of exhaustor 130
Technique, saves the processing cost of exhaustor 130.
It addition, also, it should be noted when the exhaustor 130 in multiple processing chambers 110 is connected in series,
The connection between exhaustor 130 in the most adjacent two processing chambers 110 can be threaded.By arranging
The connection between exhaustor 130 in the most adjacent two processing chambers 110 is threaded, simplifies aerofluxus
Installation and removal between pipe 130, when being thus exhausted the assembling of pipe 130, it is possible to reaches time saving and energy saving
Effect.
Embodiment described above only have expressed several embodiments of the present utility model, its describe more concrete and
In detail, but therefore can not be interpreted as the restriction to this utility model the scope of the claims.It should be pointed out that,
For the person of ordinary skill of the art, without departing from the concept of the premise utility, it is also possible to
Making some deformation and improvement, these broadly fall into protection domain of the present utility model.Therefore, this utility model
The protection domain of patent should be as the criterion with claims.
Claims (10)
1. a roasting plant, it is characterised in that include processing chamber, air inlet pipe and exhaustor；
Described air inlet pipe and described exhaustor are arranged at described processing chamber antarafacial；
Described air inlet pipe is provided with gas outlet；And
Described air inlet pipe is for inputting the process gas after heating to described processing chamber by described gas outlet
In, described process gas it is opposite to the device in described processing chamber and carries out heated baking；
Described exhaustor is arranged on the inside of described processing chamber, and offers air inlet and air vent；
Described exhaustor is used for being introduced in described exhaustor by described process gas by described air inlet, and will
Described process gas is discharged by described processing chamber by described air vent.
Roasting plant the most according to claim 1, it is characterised in that described air inlet pipe is arranged on described
The inside of processing chamber；And
The gas outlet of described air inlet pipe is oppositely arranged with the air inlet position of described exhaustor.
Roasting plant the most according to claim 2, it is characterised in that described air inlet pipe is positioned at described work
The top of skill chamber；Described exhaustor is positioned at the bottom of described processing chamber.
Roasting plant the most according to claim 1, it is characterised in that described exhaustor is tied in the shape of a spiral
Structure or polyline shaped structure are laid on the sidewall of described processing chamber.
Roasting plant the most according to claim 1, it is characterised in that the number of described air inlet is many
Individual；The number of described exhaustor is multiple, and multiple described exhaustor is sequentially communicated.
Roasting plant the most according to claim 5, it is characterised in that multiple described air inlets uniformly divide
Scatter on the sidewall being located at described exhaustor.
Roasting plant the most according to claim 1, it is characterised in that described exhaustor is metal tube.
8. according to the roasting plant described in any one of claim 1 to 7, it is characterised in that also include connection
Pipeline；And the number of described processing chamber is multiple；
Described connecting pipeline is connected to the air vent of the described exhaustor in each described processing chamber and sets with aerofluxus
Between standby bleeding point；And
The air vent of the described exhaustor in each described processing chamber is all connected with connecting pipeline.
9. according to the roasting plant described in any one of claim 1 to 7, it is characterised in that described process cavity
The number of room is multiple；
Multiple described processing chambers are arranged in series, and are provided with division board described in each two between processing chamber；
Described exhaustor in multiple described processing chambers is connected in series.
Roasting plant the most according to claim 9, it is characterised in that in multiple described processing chambers
Described exhaustor one-body molded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620532772.4U CN205789890U (en) | 2016-06-02 | 2016-06-02 | Roasting plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620532772.4U CN205789890U (en) | 2016-06-02 | 2016-06-02 | Roasting plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205789890U true CN205789890U (en) | 2016-12-07 |
Family
ID=58137076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620532772.4U Active CN205789890U (en) | 2016-06-02 | 2016-06-02 | Roasting plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205789890U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783684A (en) * | 2016-12-19 | 2017-05-31 | 惠科股份有限公司 | Substrate toasts board and its baking operational method |
| CN109827417A (en) * | 2019-01-24 | 2019-05-31 | 深圳市华星光电半导体显示技术有限公司 | A kind of drying device of display panel |
-
2016
- 2016-06-02 CN CN201620532772.4U patent/CN205789890U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783684A (en) * | 2016-12-19 | 2017-05-31 | 惠科股份有限公司 | Substrate toasts board and its baking operational method |
| CN109827417A (en) * | 2019-01-24 | 2019-05-31 | 深圳市华星光电半导体显示技术有限公司 | A kind of drying device of display panel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |