CN203746887U - Multi-cavity texturing system - Google Patents
Multi-cavity texturing system Download PDFInfo
- Publication number
- CN203746887U CN203746887U CN201420065986.6U CN201420065986U CN203746887U CN 203746887 U CN203746887 U CN 203746887U CN 201420065986 U CN201420065986 U CN 201420065986U CN 203746887 U CN203746887 U CN 203746887U
- Authority
- CN
- China
- Prior art keywords
- reactive tank
- reaction grooves
- dividing plate
- cavity
- boards
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012224 working solution Substances 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract 3
- 235000014347 soups Nutrition 0.000 abstract 2
- 238000004381 surface treatment Methods 0.000 abstract 1
- 210000005056 cell body Anatomy 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 235000008216 herbs Nutrition 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Weting (AREA)
Abstract
The utility model puts forward a multi-cavity texturing system comprising reaction grooves and rollers. A plurality of pairs of separation boards are arranged in the reaction grooves and thus the reaction grooves are separated into a plurality of working solution cavities. A buffer cavity for overflowing circulation is formed between the two boards of each pair of separation boards; and outlets are formed at the bottoms of the buffer cavities and are connected with the liquid circulation system outside the reaction grooves by pipelines. And the heights of the separation boards are lower than those of the peripheries of the reaction grooves. With the system, the soup exchange speed at all zones in the reaction grooves can be accelerated; and the soup concentration difference and the temperature difference of all zones in the reaction grooves can be reduced with high efficiency, so that the surface treatment of the silicon wafer becomes uniform. In addition, the provided system has advantages of simple structure, convenient installation and maintenance, and high production efficiency.
Description
Technical field
The utility model relates to chain type solar energy cleaning equipment and wet processing apparatus, relates in particular to a kind of making herbs into wool cleaning equipment that is applied to the polysilicon chip in photovoltaic industry.
Background technology
In the production of polysilicon chip, conventionally use chain type solar energy cleaning equipment to carry out making herbs into wool clean to silicon material.When silicon chip is when reacting with chemicals, can cause the liquor strength region property in the reactive tank of cleaning equipment inconsistent, and the each point temperature property of there are differences in reactive tank, this uniformity that will cause silicon chip surface to be processed reduces greatly.
Therefore, improve the liquor strength difference in reactive tank, and each point fluid temperature difference in reactive tank, be technical problem urgently to be resolved hurrily in the industry.
Summary of the invention
The utility model is in order to solve the problems of the technologies described above, and provides a kind of and changes that liquid speed is fast, strength of fluid and the little multi-chamber etching system of the temperature difference opposite sex in reactive tank.
A kind of multi-chamber etching system the utility model proposes, it comprises reactive tank and cylinder.In described reactive tank, be provided with multipair dividing plate and reactive tank is separated into a plurality of working solution chambers, between two plates of every pair of dividing plate, it is the buffer chamber of overflow circulating, the bottom of this buffer chamber is provided with delivery outlet, and this delivery outlet is connected with the fluid circulation system outside reactive tank by pipeline; The height of described dividing plate is lower than the height of described reactive tank periphery.
The utility model is used multipair dividing plate that reactive tank cavity is separated into a plurality of working solution chambers, when in cell body, liquid level arrives certain altitude, in reactive tank, the liquid on upper strata flows into the buffer chamber of overflow circulating from dividing plate top and flows away fast, thereby the liquid speed of changing of each region liquid in quickening reactive tank, the otherness of each region liquor strength and the difference of temperature in efficient minimizing reactive tank, thus it is more even that silicon chip surface is processed.The utility model is simple in structure, convenient for installation and maintenance, and production efficiency is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of the transverse cross sectional of the utility model preferred embodiment.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further detailed.
As shown in Figure 1, a kind of multi-chamber etching system that the utility model preferred embodiment provides, the conveying drum 2 that it comprises the reactive tank 1 of side's bar shaped and is located at reactive tank 1 internal upper part.In reactive tank 1, be provided with multipair dividing plate 3, and reactive tank 1 is separated into a plurality of working solution chambers 4, and between two plates of every pair of dividing plate, be the buffer chamber 5 of overflow circulating, the bottom of this buffer chamber is provided with delivery outlet, and this delivery outlet is connected with the fluid circulation system outside reactive tank by pipeline 6.The height of dividing plate 3 is lower than the height of reactive tank 1 periphery 7.According to different requirements, the shape of working solution chamber 4, quantity and position can be selected to arrange.
In reaction, some in cell body are provided with the multipair dividing plate that reactive tank cavity is separated to the utility model, make to form in reactive tank a plurality of working solution chambers.When in cell body, liquid level arrives certain altitude, liquid flows into each buffer chamber to the overflow circulating between dividing plate from dividing plate top, then enters the fluid circulation system outside reactive tank by the pipeline below reactive tank, carries out inputting reactive tank after heat exchange again.This structure can make the liquid on upper strata in each working solution chamber synchronously all can flow away fast, compare traditional overflow mechanism, multi-chamber structure of the present utility model may arbitrarily scatter by liquid in cell body, thereby has solved the inconsistent problem of strength of fluid of reactive tank zones of different; Because the region of each working solution chamber of the utility model is less, be convenient to overflow circulating faster again, greatly reduce the otherness of temperature in reactive tank zones of different.
Claims (1)
1. a multi-chamber etching system, comprise reactive tank (1) and cylinder (2), it is characterized in that, in described reactive tank (1), be provided with multipair dividing plate (3), and reactive tank (1) is separated into a plurality of working solution chambers (4), between two plates of every pair of dividing plate, be the buffer chamber (5) of overflow circulating, the bottom of this buffer chamber is provided with delivery outlet, and this delivery outlet is connected with the fluid circulation system outside reactive tank by pipeline (6); The height of described dividing plate (3) is lower than the height of described reactive tank (1) periphery (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420065986.6U CN203746887U (en) | 2014-02-14 | 2014-02-14 | Multi-cavity texturing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420065986.6U CN203746887U (en) | 2014-02-14 | 2014-02-14 | Multi-cavity texturing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203746887U true CN203746887U (en) | 2014-07-30 |
Family
ID=51346650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420065986.6U Expired - Fee Related CN203746887U (en) | 2014-02-14 | 2014-02-14 | Multi-cavity texturing system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203746887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762280A (en) * | 2014-02-14 | 2014-04-30 | 常州捷佳创精密机械有限公司 | Multi-cavity texturing system |
-
2014
- 2014-02-14 CN CN201420065986.6U patent/CN203746887U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762280A (en) * | 2014-02-14 | 2014-04-30 | 常州捷佳创精密机械有限公司 | Multi-cavity texturing system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102303870B (en) | High-purity quartz sand purifying and pickling device | |
| CN103762280A (en) | Multi-cavity texturing system | |
| CN105133039B (en) | A kind of single polycrystalline etching device | |
| MY158347A (en) | Solar cells with textured surfaces | |
| CN202308001U (en) | Reaction tank provided with multiple chambers | |
| CN203746887U (en) | Multi-cavity texturing system | |
| JP2016009729A5 (en) | ||
| CN104089468A (en) | Modified cloth drying device | |
| CN103276542A (en) | Efficient washing device | |
| CN209328856U (en) | A kind of flow-harmonization device | |
| CN207149539U (en) | A kind of silicon chip cleaning gaily decorated basket | |
| CN203777697U (en) | Continuous crystallizing device with preheaters for ammonium molybdate production | |
| CN203162924U (en) | Device for recycling and reusing of hot steam in drying room | |
| CN203256470U (en) | Efficient washing device | |
| CN102068382A (en) | Traditional Chinese medicine or grain treatment steamer pot and process flow thereof | |
| CN202289645U (en) | Belt pressure filter with good acid-washing effect | |
| CN203821086U (en) | Constant-temperature rinsing tank used for denim production | |
| CN204693781U (en) | A kind of for the prewashed hot-water cylinder of monocrystalline silicon | |
| CN104624552A (en) | Overflow pure water circulation system of silicon wafer cleaning machine | |
| CN203540995U (en) | Overflow pure water circulating system of silicon wafer cleaning machine | |
| CN202682864U (en) | Settling tank used for micro etching solution handling | |
| CN203578277U (en) | Improved trough for silicon wafer cleaning machine | |
| CN204180898U (en) | A kind of horseradish blanching equipment | |
| CN203653765U (en) | Polycrystalline felting feeding device | |
| CN204039553U (en) | A kind of flowing type sit multistage cocoon cooking pond |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140730 |