TW201531526A - Polyimide precursor and resin composition containing same - Google Patents

Polyimide precursor and resin composition containing same Download PDF

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TW201531526A
TW201531526A TW103122404A TW103122404A TW201531526A TW 201531526 A TW201531526 A TW 201531526A TW 103122404 A TW103122404 A TW 103122404A TW 103122404 A TW103122404 A TW 103122404A TW 201531526 A TW201531526 A TW 201531526A
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dianhydride
mmol
tetracarboxylic dianhydride
film
pmda
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TWI567135B (en
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Yoshiki Miyamoto
Masaki Maitani
Yasuhito Iiduka
Takayuki Kanada
Toshiaki Okuda
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Asahi Kasei E Materials Corp
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    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
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    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003Preparatory processes
    • C08G73/1007Preparatory processes from tetracarboxylic acids or derivatives and diamines
    • C08G73/1028Preparatory processes from tetracarboxylic acids or derivatives and diamines characterised by the process itself, e.g. steps, continuous
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    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors

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Abstract

The present invention is related to a polyimide precursor, which is characterized in containing the structure derived from 2,2'-bis (trifluoromethyl) benzidine to be used as the diamine structure, the structure derived from the specific alicyclic tetracarboxylic dianhydride and the structure of aromatic tetracarboxylic dianhydride to be used as the structure of tetracarboxylic dianhydride, wherein the imidization rate of the amide bond derived from the above-mentioned alicyclic tetracarboxylic dianhydride is 10~100%.

Description

聚醯亞胺前驅體及含有其之樹脂組合物 Polyimine precursor and resin composition containing the same

本發明係關於一種聚醯亞胺前驅體及含有其之樹脂組合物。該聚醯亞胺前驅體例如可用作用於可撓性裝置之基板。 The present invention relates to a polyimide precursor and a resin composition containing the same. The polyimine precursor can be used, for example, as a substrate for a flexible device.

本發明亦提供一種聚醯亞胺膜及其製造方法、以及積層體及其製造方法。 The present invention also provides a polyimide film, a method for producing the same, and a laminate and a method for producing the same.

一般而言,聚醯亞胺膜係包含聚醯亞胺樹脂之膜。聚醯亞胺樹脂係將芳香族四羧酸二酐與芳香族二胺進行溶液聚合而製造聚醯亞胺前驅體後,進行熱醯亞胺化或化學醯亞胺化而製造之高耐熱樹脂。上述熱醯亞胺化係藉由高溫下之閉環脫水而進行,上述化學醯亞胺化係藉由利用觸媒之閉環脫水而進行。 In general, the polyimide film comprises a film of a polyimide resin. Polyimide resin is a high heat resistant resin produced by solution polymerization of an aromatic tetracarboxylic dianhydride and an aromatic diamine to produce a polyimide precursor, followed by thermal imidization or chemical hydrazine imidization. . The above thermal sulfiliation is carried out by closed-loop dehydration at a high temperature, and the above chemical ruthenium is carried out by ring-closing dehydration using a catalyst.

聚醯亞胺樹脂係不溶及不熔之超耐熱性樹脂,具有耐熱氧化性、耐熱特性、耐放射線性、耐低溫性、耐化學品性等優異之特性。因此,聚醯亞胺樹脂係用於例如絕緣塗佈劑、絕緣膜、半導體、TFT-LCD(Thin Film Transistor-Liquid Crystal Display,薄膜電晶體液晶顯示器)之電極保護膜等包括電子材料在內之廣泛領域。最近,亦用於液晶配向膜等顯示器材料、光纖等。 The polyimide resin is an insoluble and non-fusible super heat resistant resin, and has excellent properties such as heat resistance, heat resistance, radiation resistance, low temperature resistance, and chemical resistance. Therefore, the polyimide resin is used for, for example, an insulating coating agent, an insulating film, a semiconductor, an electrode protective film of a TFT-LCD (Thin Film Transistor-Liquid Crystal Display), and the like, including an electronic material. A wide range of areas. Recently, it has also been used for display materials such as liquid crystal alignment films, optical fibers, and the like.

然而,聚醯亞胺樹脂因其較高之芳香環密度而著色為棕色或黃色,使可見光線區域中之透過率較低,因而難以用於要求透明性之領域。 However, the polyimide resin is colored brown or yellow due to its higher aromatic ring density, so that the transmittance in the visible light region is low, and thus it is difficult to use in the field requiring transparency.

關於該方面,專利文獻1中報告有:已製造出藉由使用具有特定 結構之四羧酸二酐及二胺而使透過率及色相之透明度得以提高之新穎結構之聚醯亞胺。 In this regard, Patent Document 1 reports that it has been manufactured to have specific use by use. A novel structure of polyimine which has a structure of tetracarboxylic dianhydride and a diamine to improve transparency and hue transparency.

又,專利文獻2及專利文獻3中分別揭示有為了賦予透明性而導入有脂環結構之聚醯亞胺膜。 Further, in Patent Document 2 and Patent Document 3, a polyimide film having an alicyclic structure introduced to impart transparency is disclosed.

進而,專利文獻4中報告有:藉由併用特定之芳香族四羧酸二酐與脂環式四羧酸二酐作為四羧酸二酐,可獲得黃色度(以下,亦稱為「YI值」)較低之聚醯亞胺樹脂。 Further, in Patent Document 4, it is reported that a specific degree of yellowness can be obtained by using a specific aromatic tetracarboxylic dianhydride and an alicyclic tetracarboxylic dianhydride as a tetracarboxylic dianhydride (hereinafter, also referred to as "YI value". ") Lower polyimine resin.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2000-198843號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-198843

[專利文獻2]日本專利特開2005-336243號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-336243

[專利文獻3]日本專利特開2003-155342號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2003-155342

[專利文獻4]韓國專利公開第10-2013-0077946號 [Patent Document 4] Korean Patent Publication No. 10-2013-0077946

然而,專利文獻1所揭示之聚醯亞胺之機械特性及熱特性對於用作例如半導體絕緣膜、TFT-LCD絕緣膜、電極保護膜及可撓性顯示器基板而言並不充分。 However, the mechanical properties and thermal properties of the polyimide disclosed in Patent Document 1 are not sufficient for use as, for example, a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, and a flexible display substrate.

尤其是,專利文獻1所揭示之聚醯亞胺係以線膨脹係數(以下,亦記為「CTE」)較高為特徵。關於CTE較高之樹脂,於將其用作膜之情形時,由溫度變化所引起之膜之膨脹及收縮之程度增大。因此,若於例如TFT步驟等中使用CTE較高之膜,則會對作為元件材料之無機物膜產生損傷,導致元件能力下降。因此,形成TFT之基板、形成彩色濾光片之基板、配向膜、可撓性顯示器用透明基板等中所使用之聚醯亞胺樹脂必須為無色透明且CTE較低。 In particular, the polyimine disclosed in Patent Document 1 is characterized by a high coefficient of linear expansion (hereinafter also referred to as "CTE"). Regarding the resin having a higher CTE, when it is used as a film, the degree of expansion and contraction of the film caused by the temperature change is increased. Therefore, when a film having a high CTE is used in, for example, a TFT step, damage to the inorganic film as a device material is caused, resulting in a decrease in device capability. Therefore, the polyimide film used for forming the TFT substrate, the color filter substrate, the alignment film, and the transparent substrate for a flexible display must be colorless and transparent, and have a low CTE.

又,專利文獻2所揭示之聚醯亞胺具有如下缺點:雖然具有透明 性,但CTE較高,進而破斷伸長率較低。於破斷伸長率較低之情形時,對可撓性裝置進行操作時,會對可撓性基板產生損傷,因而無法作為裝置而使用。 Further, the polyimine disclosed in Patent Document 2 has the following disadvantages: although it is transparent Sex, but the CTE is higher, and the elongation at break is lower. When the elongation at break is low, when the flexible device is operated, the flexible substrate is damaged, and thus it cannot be used as a device.

於為專利文獻3所揭示之聚醯亞胺之情形時,藉由使用多環之芳香族二胺而賦予韌性。然而,由於該聚醯亞胺之CTE亦較高,故而不適合用作半導體絕緣膜、TFT-LCD絕緣膜、電極保護膜或可撓性顯示器基板。 In the case of the polyimine disclosed in Patent Document 3, toughness is imparted by using a polycyclic aromatic diamine. However, since the polyethylenimine has a high CTE, it is not suitable as a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film or a flexible display substrate.

並且,於為專利文獻4所揭示之聚醯亞胺之情形時,YI值確實較低。然而,本發明者等經過研究,結果CTE較高且伸長率較小,因而對於應用於顯示器製程而言尚存改良之餘地(參照下述比較例22~24)。 Further, in the case of the polyimine disclosed in Patent Document 4, the YI value is indeed low. However, the inventors of the present invention have studied that the CTE is high and the elongation is small, so that there is room for improvement in application to the display process (see Comparative Examples 22 to 24 below).

本發明係鑒於上述所說明之問題開發而成者,其目的在於提供一種可製造無色透明並且CTE較低且伸長率優異之聚醯亞胺膜的聚醯亞胺前驅體及含有其之樹脂組合物、聚醯亞胺膜及其製造方法、以及積層體及其製造方法。 The present invention has been developed in view of the above-described problems, and an object thereof is to provide a polyimine precursor which can produce a polyimide film which is colorless and transparent, has a low CTE and excellent elongation, and a resin composition containing the same. And a polyimide film, a method for producing the same, and a laminate and a method for producing the same.

本發明者等人為了解決上述問題而努力研究並反覆實驗。結果發現:包含特定結構之聚醯亞胺前驅體的樹脂組合物(清漆)於保存穩定性方面優異;使該組合物硬化而獲得之聚醯亞胺膜具有優異之透明性、低線膨脹係數及高伸長率;以及關於在該聚醯亞胺膜上形成有無機膜之積層體,其Haze較小,水蒸氣透過率優異;基於該等見解而完成了本發明。 The inventors of the present invention have diligently studied and repeated experiments in order to solve the above problems. As a result, it was found that the resin composition (varnish) containing the polyimine precursor of a specific structure is excellent in storage stability; the polyimide film obtained by hardening the composition has excellent transparency and low linear expansion coefficient. And a high elongation; and a laminate having an inorganic film formed on the polyimide film, which has a small Haze and excellent water vapor transmission rate, and has completed the present invention based on these findings.

即,本發明如下。 That is, the present invention is as follows.

[1]一種聚醯亞胺前驅體,其特徵在於:具有下述通式(A)所表示之結構,且具有作為源自二胺之結構的源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構,作為源自四羧酸二酐之結構的源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種脂環式四羧酸二酐之結構,以及源自芳香族四羧酸二酐之結構,並且源自上述脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為10~100%, [1] A polyimine precursor having a structure represented by the following formula (A) and having a structure derived from a diamine derived from 2,2'-bis (three) Fluoromethyl)benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'-diaminobenzoquinone and 4-aminobenzoic acid 4- The structure of at least one diamine in the aminophenyl ester derived from the structure derived from tetracarboxylic dianhydride derived from 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1, 2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexane tetracarboxylic acid Acid dianhydride, bicyclo [2.2.1] heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3 ,5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5 -(tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3,3,0]octane-2 a structure of at least one alicyclic tetracarboxylic dianhydride of 4,6,8-tetracarboxylic dianhydride, and a structure derived from an aromatic tetracarboxylic dianhydride, and derived from the above alicyclic tetracarboxylic acid The imidization ratio of the guanamine bond of dianhydride is 10~100%

{X1為源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構;X2為源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷 四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種四羧酸二酐之結構}。 {X 1 is derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'- a structure of at least one diamine of diaminophenylbenzophenone and 4-aminophenyl 4-aminobenzoate; X 2 is derived from a 1,2,3,4-cyclobutanetetracarboxylic acid Desic anhydride (CBDA), 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1,2,4 , 5-bicyclohexanetetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2] octane -7-ene-2,3,5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4, 5,9b-hexahydro-5-(tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3, 3,0] Structure of at least one tetracarboxylic dianhydride of octane-2,4,6,8-tetracarboxylic dianhydride}.

[2]如[1]之聚醯亞胺前驅體,其中上述聚醯亞胺前驅體具有下述通式(B)之結構, [2] The polyimine precursor according to [1], wherein the polyimine precursor has a structure of the following formula (B),

{X1與上述式(A)中相同,X3為源自上述芳香族四羧酸二酐之結構}。 {X 1 is the same as in the above formula (A), and X 3 is a structure derived from the above aromatic tetracarboxylic dianhydride}.

[3]如[1]或[2]之聚醯亞胺前驅體,其中源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為20~100%。 [3] The polyimine precursor of [1] or [2], wherein the guanidine linkage derived from the alicyclic bond of the alicyclic tetracarboxylic dianhydride is from 20 to 100%.

[4]如[1]至[3]中任一項之聚醯亞胺前驅體,其中源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為30~100%。 [4] The polyimine precursor of any one of [1] to [3], wherein the guanidinium linkage derived from the alicyclic bond of the alicyclic tetracarboxylic dianhydride is from 30 to 100%.

[5]如[1]至[4]中任一項之聚醯亞胺前驅體,其中上述芳香族四羧酸二酐包含作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,以及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)中之至少一種。 [5] The polyiminamide precursor according to any one of [1] to [4] wherein the aromatic tetracarboxylic dianhydride comprises, as the aromatic tetracarboxylic dianhydride 1, a pyromellitic acid At least one of anhydride (PMDA) and 3,3',4,4'-biphenyltetracarboxylic dianhydride, and 4,4'-oxydi-phthalic acid as aromatic tetracarboxylic dianhydride 2 At least one of formic acid dianhydride (ODPA), 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA) and 4,4'-biphenylbis(trimellitic acid monoester anhydride) One.

[6]如[1]至[5]中任一項之聚醯亞胺前驅體,其中上述芳香族四羧 酸二酐1為均苯四甲酸二酐(PMDA)。 [6] The polyiminamide precursor according to any one of [1] to [5] wherein the above aromatic tetracarboxylic acid Acid dianhydride 1 is pyromellitic dianhydride (PMDA).

[7]如[1]至[5]中任一項之聚醯亞胺前驅體,其中上述芳香族四羧酸二酐2為選自4,4'-氧二鄰苯二甲酸二酐(ODPA)及4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)中之至少一種。 [7] The polyimine precursor of any one of [1] to [5] wherein the aromatic tetracarboxylic dianhydride 2 is selected from the group consisting of 4,4'-oxydiphthalic dianhydride ( At least one of ODPA) and 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA).

[8]如[1]至[7]中任一項之聚醯亞胺前驅體,其中上述源自二胺之結構為源自2,2'-雙(三氟甲基)聯苯胺(TFMB)之結構。 [8] The polyimine precursor of any one of [1] to [7] wherein the structure derived from the diamine is derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB) ) structure.

[9]如[1]至[8]中任一項之聚醯亞胺前驅體,其中上述脂環式四羧酸二酐為選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐及雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐中之至少一種。 [9] The polyimine precursor of any one of [1] to [8] wherein the alicyclic tetracarboxylic dianhydride is selected from 1,2,3,4-cyclobutanetetracarboxylic acid Desic anhydride (CBDA), 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1,2,4 , 5-bicyclohexane tetracarboxylic dianhydride, bicyclo [2.2.1] heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride and bicyclo [2.2.2] octane At least one of -7-ene-2,3,5,6-tetracarboxylic dianhydride.

[10]如[1]至[9]中任一項之聚醯亞胺前驅體,其中上述脂環式四羧酸二酐為選自1,2,3,4-環丁烷四羧酸二酐(CBDA)及1,2,4,5-環己烷四羧酸二酐(H-PMDA)中之至少一種。 [10] The polyiminamide precursor according to any one of [1] to [9] wherein the alicyclic tetracarboxylic dianhydride is selected from 1,2,3,4-cyclobutanetetracarboxylic acid At least one of dianhydride (CBDA) and 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA).

[11]如[1]至[10]中任一項之聚醯亞胺前驅體,其中包含在全部之源自二胺之結構中占60莫耳%以上的源自上述TFMB之結構,包含在全部之源自四羧酸二酐之結構中合計占60莫耳%以上的源自選自上述PMDA、上述ODPA、上述6FDA、上述CBDA及上述H-PMDA中之至少一種四羧酸二酐之結構。 [11] The polyimine precursor according to any one of [1] to [10], which comprises a structure derived from the above TFMB in a total of 60 mol% or more of the structure derived from the diamine, comprising At least one tetracarboxylic dianhydride derived from the above PMDA, the above ODPA, the above 6FDA, the above CBDA, and the above H-PMDA in a total of 60 mol% or more of the total structure derived from the tetracarboxylic dianhydride The structure.

[12]如[1]至[11]中任一項之聚醯亞胺前驅體,其中包含在全部之源自四羧酸二酐之結構中占1~70莫耳%的源自上述PMDA之結構,且包含在全部之源自四羧酸二酐之結構中占1~50莫耳%的源自選自上述ODPA及6FDA中之至少一種四羧酸二酐之結構。 [12] The polyimine precursor according to any one of [1] to [11], which comprises from 1 to 70 mol% of the total structure derived from tetracarboxylic dianhydride derived from the above PMDA The structure is composed of a structure derived from at least one tetracarboxylic dianhydride selected from the above ODPA and 6FDA, which accounts for 1 to 50 mol% of the total structure derived from tetracarboxylic dianhydride.

[13]如[1]至[11]中任一項之聚醯亞胺前驅體,其中源自上述PMDA、上述ODPA、上述6FDA、上述CBDA及上述H-PMDA各者之結構之莫耳數之和與源自上述TFMB之結構之莫耳數的比{PMDA+ODPA+6FDA+CBDA+H-PMDA)/TFMB}為100/99.9~100/95。 [13] The polyimine precursor of any one of [1] to [11], wherein the molar number of the structure derived from the above PMDA, the above ODPA, the above 6FDA, the above CBDA, and the above H-PMDA The ratio of the sum to the molar number derived from the structure of the above TFMB {PMDA+ODPA+6FDA+CBDA+H-PMDA)/TFMB} is 100/99.9 to 100/95.

[14]如[1]至[13]中任一項之聚醯亞胺前驅體,其中溶解於溶劑並在支持體之表面展開後,藉由氮氣環境下之加熱進行醯亞胺化所獲得之聚醯亞胺膜之黃色度為10以下,線膨脹係數為25ppm以下,且膜厚20μm時之膜之伸長率為15%以上。 [14] The polyimine precursor of any one of [1] to [13], which is obtained by dissolving in a solvent and developing on the surface of the support, and then performing imidization by heating under a nitrogen atmosphere. The polyimide film has a yellowness of 10 or less, a linear expansion coefficient of 25 ppm or less, and an elongation of the film of 15% or more at a film thickness of 20 μm.

[15]如[1]至[14]中任一項之聚醯亞胺前驅體,其係用於可撓性裝置之製造。 [15] The polyimine precursor of any one of [1] to [14], which is used in the manufacture of a flexible device.

[16]一種樹脂組合物,其特徵在於:包含如[1]至[15]中任一項之聚醯亞胺前驅體與溶劑。 [16] A resin composition comprising the polyimine precursor of any one of [1] to [15] and a solvent.

[17]如[16]之樹脂組合物,其進而含有烷氧基矽烷化合物。 [17] The resin composition according to [16], which further contains an alkoxydecane compound.

[18]如[16]或[17]之樹脂組合物,其進而含有界面活性劑。 [18] The resin composition according to [16] or [17] which further contains a surfactant.

[19]一種聚醯亞胺膜,其特徵在於:將如[16]至[18]中任一項之樹脂組合物在支持體之表面上展開而形成塗膜,繼而對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體進行醯亞胺化而形成。 [19] A polyimide film according to any one of [16] to [18], which is developed on a surface of a support to form a coating film, and then the support and the above The coating film is heated to form the polyimine imide precursor by hydrazine imidization.

[20]一種聚醯亞胺膜之製造方法,其特徵在於包括:塗膜形成步驟,其將如[16]至[18]中任一項之樹脂組合物在支持體之表面上展開而形成塗膜;加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體進行醯亞胺化而形成聚醯亞胺膜;及剝離步驟,其將上述聚醯亞胺膜自上述支持體剝離而獲得聚醯亞胺膜。 [20] A method for producing a polyimide film, comprising: a coating film forming step of forming a resin composition according to any one of [16] to [18] on a surface of a support. a coating film; a heating step of heating the support and the coating film to imidize the polyimine precursor to form a polyimide film; and a peeling step of the polyimine The film was peeled off from the above support to obtain a polyimide film.

[21]一種積層體,其特徵在於:具備支持體及形成於該支持體上之聚醯亞胺膜,並且 該積層體係於上述支持體之表面上展開如[16]至[18]中任一項之樹脂組合物而形成塗膜,繼而對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體進行醯亞胺化形成聚醯亞胺膜而獲得。 [21] A laminate comprising: a support and a polyimide film formed on the support, and The laminated system is formed by laminating a resin composition according to any one of [16] to [18] on the surface of the support to form a coating film, and then heating the support and the coating film to form the polyimine The precursor is obtained by ruthenium imidization to form a polyimide film.

[22]一種積層體之製造方法,該積層體係具備支持體及形成於該支持體上之聚醯亞胺膜者,該製造方法包括:塗膜形成步驟,其於支持體之表面上展開如[16]至[18]中任一項之樹脂組合物而形成塗膜;及加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體進行醯亞胺化而形成聚醯亞胺膜。 [22] A method for producing a laminate comprising a support and a polyimide film formed on the support, the method comprising: a coating film forming step of expanding on a surface of the support a resin composition according to any one of [16] to [18], wherein a coating film is formed; and a heating step of heating the support and the coating film to imidize the polyimine precursor A polyimide film is formed.

[23]一種聚醯亞胺膜,其特徵在於:其係由二胺與四羧酸二酐之共聚物所製造者,上述二胺為選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種,上述四羧酸二酐包含作為脂環式四羧酸二酐的選自2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種,作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)及4,4'-聯苯雙 (偏苯三甲酸單酯酸酐)中之至少一種,並且於該聚醯亞胺膜上,於350℃下使用CVD法而形成無機膜時,對該無機膜表面使用原子力顯微鏡(AFM)所測得之表面粗糙度為0.01~50nm。 [23] A polyimine film, which is produced by a copolymer of a diamine and a tetracarboxylic dianhydride, wherein the diamine is selected from 2,2'-bis(trifluoromethyl). Benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'-diaminobenzophenidine and 4-aminophenyl 4-aminobenzoate In at least one of the above, the above tetracarboxylic dianhydride comprises, as an alicyclic tetracarboxylic dianhydride, 2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1,2,4,5- Cyclohexane tetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic dianhydride, bicyclo [ 2.2.1] heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetra Carboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5-(tetrahydro-2 ,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3,3,0]octane-2,4,6,8 At least one of tetracarboxylic dianhydrides selected from the group consisting of pyromellitic dianhydride (PMDA) and 3,3',4,4'-biphenyltetracarboxylic dianhydride as aromatic tetracarboxylic dianhydride 1 At least one of them, and 4,4'-oxydi-orthobenzene selected from aromatic tetracarboxylic dianhydride 2 Acid dianhydride (ODPA), 4,4 '- (hexafluoro isopropylidene) diphthalic anhydride (6FDA) and 4,4'-bis At least one of (trimellitic acid monoester anhydride), and an inorganic film is formed on the polyimine film by a CVD method at 350 ° C, and the surface of the inorganic film is measured by atomic force microscopy (AFM) The surface roughness is 0.01 to 50 nm.

[24]如[23]之聚醯亞胺膜,其中上述二胺為2,2'-雙(三氟甲基)聯苯胺(TFMB),上述四羧酸二酐包含作為脂環式四羧酸二酐的選自2,3,4-環丁烷四羧酸二酐(CBDA)及1,2,4,5-環己烷四羧酸二酐(H-PMDA)中之至少一種,作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)及4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)中之至少一種。 [24] The polyimine film according to [23], wherein the above diamine is 2,2'-bis(trifluoromethyl)benzidine (TFMB), and the above tetracarboxylic dianhydride is contained as an alicyclic tetracarboxylic acid. The acid dianhydride is at least one selected from the group consisting of 2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA) and 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA). As the aromatic tetracarboxylic dianhydride 1, at least one selected from the group consisting of pyromellitic dianhydride (PMDA) and 3,3',4,4'-biphenyltetracarboxylic dianhydride, and as an aromatic tetracarboxylic acid The acid dianhydride 2 is at least one selected from the group consisting of 4,4'-oxydiphthalic dianhydride (ODPA) and 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA). .

[25]一種可撓性裝置,其包含如[23]或[24]之聚醯亞胺膜。 [25] A flexible device comprising a polyimine film such as [23] or [24].

[26]一種可撓性裝置之製造方法,其包括如[20]之聚醯亞胺膜之製造方法。 [26] A method of producing a flexible device comprising the method for producing a polyimide film according to [20].

[27]一種可撓性裝置之製造方法,其包括如[22]之積層體之製造方法。 [27] A method of producing a flexible device comprising the method of producing a laminate according to [22].

包含本發明之聚醯亞胺前驅體的樹脂組合物(清漆)於保存穩定性方面優異。又,由該組合物所獲得之聚醯亞胺膜為無色透明,線膨脹係數較低,且伸長率優異。關於對該聚醯亞胺膜形成有無機膜之積層體,其Haze較小,水蒸氣透過率優異。 The resin composition (varnish) containing the polyimine precursor of the present invention is excellent in storage stability. Further, the polyimide film obtained from the composition is colorless and transparent, has a low coefficient of linear expansion, and is excellent in elongation. The laminate having an inorganic film formed on the polyimide film has a small Haze and excellent water vapor transmission rate.

以下,對本發明之一實施形態(以下,簡稱為「實施形態」)進行詳細說明。再者,本發明並不限定於以下之實施形態,可於其主旨之範圍內進行各種變化而實施。 Hereinafter, an embodiment (hereinafter, simply referred to as "the embodiment") of the present invention will be described in detail. The present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit and scope of the invention.

<聚醯亞胺前驅體> <Polyimine precursor>

本實施形態之聚醯亞胺前驅體之特徵在於:具有下述通式(A)所表示之結構,且具有作為源自二胺之結構的源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺及4,4'-二胺基苯醯替苯胺、4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構,作為源自四羧酸二酐之結構的源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種脂環式四羧酸二酐之結構,及源自芳香族四羧酸二酐之結構,並且源自上述脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為10~100%, The polyimine precursor of the present embodiment is characterized by having a structure represented by the following formula (A) and having a structure derived from a diamine derived from 2,2'-bis(trifluoro) Methyl)benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine and 4,4'-diaminobenzoquinone, 4-aminobenzoic acid 4-amine The structure of at least one diamine in the phenyl ester is derived from a structure derived from tetracarboxylic dianhydride derived from 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1,2 , 4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic acid Dihydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3, 5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5- (tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3,3,0]octane-2, a structure of at least one alicyclic tetracarboxylic dianhydride of 4,6,8-tetracarboxylic dianhydride, and a structure derived from an aromatic tetracarboxylic dianhydride, and derived from the above alicyclic tetracarboxylic acid The hydrazine imidization ratio of the anhydride amine bond is 10~10 0%,

{X1為源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯 苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構;X2為源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種四羧酸二酐之結構}。 {X 1 is derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'- a structure of at least one diamine of diaminophenylbenzophenone and 4-aminophenyl 4-aminobenzoate; X 2 is derived from a 1,2,3,4-cyclobutanetetracarboxylic acid Desic anhydride (CBDA), 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1,2,4 , 5-bicyclohexanetetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2] octane -7-ene-2,3,5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4, 5,9b-hexahydro-5-(tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3, 3,0] Structure of at least one tetracarboxylic dianhydride of octane-2,4,6,8-tetracarboxylic dianhydride}.

較佳為本實施形態之聚醯亞胺前驅體具有下述通式(B)之結構, Preferably, the polyimine precursor of the present embodiment has a structure of the following formula (B).

{X1與上述式(A)相同,X3為源自上述芳香族四羧酸二酐之結構}。 {X 1 is the same as the above formula (A), and X 3 is a structure derived from the above aromatic tetracarboxylic dianhydride}.

並且,本實施形態之聚醯亞胺前驅體如上所述,源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為10~100%。即,其係源自脂環式四羧酸二酐之醯胺鍵之至少一部分經醯亞胺化之醯亞胺化聚醯胺酸。 Further, as described above, the polyimine precursor of the present embodiment has a ruthenium imidization ratio of from 10 to 100% by the indole bond of the alicyclic tetracarboxylic dianhydride. That is, it is derived from at least a part of the guanidine imidized ruthenium imine polyamine of the alicyclic bond of the alicyclic tetracarboxylic dianhydride.

為了獲取源自脂環式四羧酸二酐之醯胺鍵經醯亞胺化之醯亞胺化聚醯胺酸結構,可採用例如以下方法:首先,進行脂環式四羧酸二酐與二胺之反應而獲得聚醯胺酸後,或者於獲得聚醯胺酸之同時,使該聚醯胺酸之醯胺鍵進行醯亞胺化,繼而,繼續進行其他四羧酸二酐(於本實施形態之情形時為芳香 族四羧酸二酐)與二胺之反應。 In order to obtain a ruthenium imidized polyamine structure derived from a hydrazine imine bond of an alicyclic tetracarboxylic dianhydride, for example, the following method may be employed: First, an alicyclic tetracarboxylic dianhydride is carried out. After obtaining the polyamine acid by the reaction of the diamine, or obtaining the poly-proline acid, the indoleamine bond of the poly-proline is subjected to hydrazylation, and then the other tetracarboxylic dianhydride is continued. In the case of this embodiment, it is aroma The reaction of a tetracarboxylic dianhydride with a diamine.

就增大聚醯亞胺前驅體之分子量之觀點以及提高所獲得之聚醯亞胺膜之透明性之觀點而言,較佳為先使脂環式四羧酸二酐進行反應。並且,為了增大具有源自脂環式四羧酸二酐之結構的聚醯亞胺(前驅體)之分子量,需要將通常為60~100℃之合成溫度提高至150~210℃。藉由如此提高合成溫度,結果引起源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化,從而使源自脂環式酸二酐之部分之醯亞胺基濃度(醯亞胺化率)增大。此處,就包含聚醯亞胺前驅體之組合物(清漆)之保存穩定性、以及所獲得之聚醯亞胺膜之伸長率及YI之觀點而言,源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率較佳為10~100%,更佳為20~100%,進而較佳為30~100%。 From the viewpoint of increasing the molecular weight of the polyimine precursor and improving the transparency of the obtained polyimide film, it is preferred to first react the alicyclic tetracarboxylic dianhydride. Further, in order to increase the molecular weight of the polyimine (precursor) having a structure derived from an alicyclic tetracarboxylic dianhydride, it is necessary to increase the synthesis temperature of usually 60 to 100 ° C to 150 to 210 ° C. By thus increasing the synthesis temperature, the result is a ruthenium imidization derived from the indole bond of the alicyclic tetracarboxylic dianhydride, thereby causing the concentration of the quinone imine group derived from the alicyclic acid dianhydride (醯亚The amination rate) increases. Here, the alicyclic tetracarboxylic acid is derived from the viewpoint of the storage stability of the composition (varnish) containing the polyimide precursor, and the elongation of the obtained polyimide film and YI. The imidization ratio of the guanamine bond of the anhydride is preferably from 10 to 100%, more preferably from 20 to 100%, still more preferably from 30 to 100%.

如此先使脂環式四羧酸二酐進行反應之原因為:同時添加脂環式四羧酸二酐與芳香族四羧酸二酐,或者添加芳香族四羧酸二酐後添加脂環式四羧酸二酐,並在150~210℃之溫度下進行合成之情形時,會引起遽烈之源自芳香族四羧酸二酐之部分之醯胺鍵之醯亞胺化,導致聚合物析出,故不適宜。 The reason why the alicyclic tetracarboxylic dianhydride is first reacted is to add an alicyclic tetracarboxylic dianhydride and an aromatic tetracarboxylic dianhydride, or to add an alicyclic ring after adding an aromatic tetracarboxylic dianhydride. When a tetracarboxylic dianhydride is synthesized at a temperature of 150 to 210 ° C, it causes a strong imidization of a guanamine bond derived from a portion of an aromatic tetracarboxylic dianhydride, resulting in a polymer. It is not suitable because it is precipitated.

本實施形態中之聚醯亞胺前驅體之詳細合成方法於下文加以說明。 The detailed synthesis method of the polyimine precursor in the present embodiment will be described below.

以下,對各結構進行詳細說明。 Hereinafter, each structure will be described in detail.

<源自四羧酸二酐之結構> <Structure derived from tetracarboxylic dianhydride>

本實施形態之聚醯亞胺前驅體具有作為源自四羧酸二酐之結構的源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃- 1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種四羧酸二酐之結構,及源自芳香族四羧酸二酐之結構。 The polyimine precursor of the present embodiment has a structure derived from tetracarboxylic dianhydride derived from 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1, 2, 4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic acid Anhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5 ,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5-( Tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan- a structure of at least one tetracarboxylic dianhydride of 1,3-diketone and bicyclo[3,3,0]octane-2,4,6,8-tetracarboxylic dianhydride, and derived from aromatic tetracarboxylic acid The structure of acid dianhydride.

此處,作為上述脂環式四羧酸二酐,較佳為選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種。其中,就所獲得之聚醯亞胺膜之CTE之觀點而言,較佳為選自CBDA、H-PMDA、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐及雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐中之至少一種,並且,就成本以及所獲得之聚醯亞胺膜之YI及透明性之觀點而言,更佳為選自CBDA及H-PMDA中之至少一種,就成本之觀點而言,進而較佳為H-PMDA。 Here, as the alicyclic tetracarboxylic dianhydride, it is preferably selected from 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA) and 1,2,4,5-cyclohexane. Tetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic dianhydride, bicyclo [2.2.1 Heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic acid Anhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5-(tetrahydro-2,5- Bis-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3,3,0]octane-2,4,6,8-tetracarboxylate At least one of acid dianhydrides. Among them, from the viewpoint of the CTE of the obtained polyimide film, it is preferably selected from the group consisting of CBDA, H-PMDA, 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2, 4,5-bicyclohexanetetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride and bicyclo [2.2.2] At least one of oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, and more preferably in terms of cost and YI and transparency of the obtained polyimide film At least one selected from the group consisting of CBDA and H-PMDA is further preferably H-PMDA from the viewpoint of cost.

上述1,2,4,5-環己烷四羧酸二酐(H-PMDA)可為下述式(1)~(3) The above 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA) may be the following formula (1) to (3)

各者所表示之異構物中之任一種,亦可為包含該等之2種以上之混合物。 Any one of the isomers represented by each may be a mixture containing two or more of these.

上述芳香族四羧酸二酐較佳為包含:作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)中之至少一種。 The aromatic tetracarboxylic dianhydride preferably contains, as the aromatic tetracarboxylic dianhydride 1, pyromellitic dianhydride (PMDA) and 3,3',4,4'-biphenyltetracarboxylic acid. At least one of dianhydrides and 4,4'-oxydiphthalic dianhydride (ODPA), 4,4'-(hexafluoroisopropylidene) as aromatic tetracarboxylic dianhydride 2 At least one of diphthalic anhydride (6FDA) and 4,4'-biphenyl bis(trimellitic acid monoester anhydride).

此處,上述芳香族四羧酸二酐1主要為了有助於提高所獲得之聚醯亞胺膜之熱特性、機械特性等而使用,上述芳香族四羧酸二酐2係為了有助於提高聚醯亞胺膜之透明性等而使用。 Here, the aromatic tetracarboxylic dianhydride 1 is mainly used to contribute to improvement of thermal properties, mechanical properties, and the like of the obtained polyimide film, and the aromatic tetracarboxylic dianhydride 2 is useful. It is used by improving the transparency and the like of the polyimide film.

作為芳香族四羧酸二酐1,就所獲得之聚醯亞胺膜之CTE之觀點而言,更佳為使用PMDA。 As the aromatic tetracarboxylic dianhydride 1, it is more preferable to use PMDA from the viewpoint of the CTE of the obtained polyimide film.

作為芳香族四羧酸二酐2,就所獲得之聚醯亞胺膜之YI及透明性之觀點而言,更佳為使用選自ODPA及6FDA中之至少一種,就聚醯亞胺膜之CTE之觀點而言,進而較佳為使用6FDA。 As the aromatic tetracarboxylic dianhydride 2, from the viewpoint of YI and transparency of the obtained polyimide film, it is more preferable to use at least one selected from the group consisting of ODPA and 6FDA, and it is a polyimide film. From the viewpoint of CTE, it is further preferred to use 6FDA.

本實施形態之聚醯亞胺前驅體較佳為具有在全部之源自四羧酸二酐之結構中占5~60莫耳%的源自上述脂環式四羧酸二酐之結構,具有在全部之源自四羧酸二酐之結構中占40~95莫耳%的源自芳香族四羧酸二酐之結構;更佳為 具有在全部之源自四羧酸二酐之結構中占5~60莫耳%的源自上述脂環式四羧酸二酐之結構,具有在全部之源自四羧酸二酐之結構中占20~80莫耳%的源自上述芳香族四羧酸二酐1之結構,具有在全部之源自四羧酸二酐之結構中占5~60莫耳%的源自上述芳香族四羧酸二酐2之結構。 The polyimine precursor of the present embodiment preferably has a structure derived from the above alicyclic tetracarboxylic dianhydride in an amount of from 5 to 60 mol% based on the total structure derived from the tetracarboxylic dianhydride. 40 to 95% by mole of the structure derived from the aromatic tetracarboxylic dianhydride in all of the structures derived from the tetracarboxylic dianhydride; more preferably A structure derived from the above alicyclic tetracarboxylic dianhydride in an amount of from 5 to 60 mol% based on all of the structure derived from tetracarboxylic dianhydride, having a structure derived from all of the tetracarboxylic dianhydride 20 to 80 mol% of the structure derived from the above aromatic tetracarboxylic dianhydride 1 having 5 to 60 mol% of the total structure derived from the tetracarboxylic dianhydride derived from the above aromatic tetra The structure of carboxylic acid dianhydride 2.

進而較佳為本實施形態之聚醯亞胺前驅體包含在全部之源自四羧酸二酐之結構中合計占60莫耳%以上的源自選自上述PMDA、上述ODPA、上述6FDA、上述CBDA及上述H-PMDA中之至少一種四羧酸二酐之結構。 Further, it is preferable that the polyimine precursor of the present embodiment contains 60 or more moles of the total of the structure derived from the tetracarboxylic dianhydride, and is derived from the above-mentioned PMDA, the above ODPA, the above 6FDA, and the above. The structure of at least one tetracarboxylic dianhydride of CBDA and the above H-PMDA.

並且,就獲得聚醯亞胺膜之較佳之黃色度、CTE及破斷強度之觀點而言,尤佳為具有在全部之源自四羧酸二酐之結構中占1~70莫耳%的源自均苯四甲酸二酐(PMDA)之結構,具有在全部之源自四羧酸二酐之結構中占1~50莫耳%的源自選自4,4'-氧二鄰苯二甲酸二酐(ODPA)及4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)中之至少一種之結構。 Further, from the viewpoint of obtaining a preferable yellowness, CTE and breaking strength of the polyimide film, it is particularly preferable to have 1 to 70 mol% of the structure derived from all of the tetracarboxylic dianhydride. a structure derived from pyromellitic dianhydride (PMDA) having a content of from 1 to 50 mol% in a structure derived entirely from tetracarboxylic dianhydride derived from 4,4'-oxydi-phthalene A structure of at least one of formic acid dianhydride (ODPA) and 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA).

<源自二胺之結構> <Structure derived from diamine>

本實施形態之聚醯亞胺前驅體具有作為源自二胺之結構的源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構。其中,就所獲得之聚醯亞胺膜之YI及透明性之觀點而言,較佳為TFMB。 The polyimine precursor of the present embodiment has a structure derived from a diamine derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB), 2,2'-dimethyl linking. A structure of at least one diamine of benzene-4,4'-diamine, 4,4'-diaminobenzoquinone and 4-aminophenyl 4-aminobenzoate. Among them, from the viewpoint of YI and transparency of the obtained polyimide film, TFMB is preferred.

尤佳為包含在全部之源自二胺之結構中占60莫耳%以上的源自上述TFMB之結構。 More preferably, it is a structure derived from the above TFMB, which accounts for 60 mol% or more of the total diamine-derived structure.

<源自四羧酸二酐之結構與源自二胺之結構之比> <The ratio of the structure derived from tetracarboxylic dianhydride to the structure derived from diamine>

關於上述源自四羧酸二酐之結構之莫耳數之和與源自二胺之結構之莫耳數之和的比,就聚醯亞胺膜之透明性、熱特性及機械特性之觀點而言,較佳為100/99.9~100/95。更具體而言,關於源自PMDA、ODPA、6FDA、CBDA及H-PMDA各者之結構之莫耳數之和與源自TFMB之結構之莫耳數的比{(PMDA+ODPA+6FDA+CBDA+H-PMDA)/TFMB},就獲得具有更佳之黃色度、CTE及破斷強度之聚醯亞胺膜之觀點而言,較佳為100/99.9~100/95。 Regarding the ratio of the sum of the molar numbers of the structure derived from the tetracarboxylic dianhydride to the sum of the molar numbers of the structure derived from the diamine, the viewpoint of the transparency, thermal properties and mechanical properties of the polyimide film In terms of, it is preferably from 100/99.9 to 100/95. More specifically, the ratio of the sum of the molar numbers of the structures derived from each of PMDA, ODPA, 6FDA, CBDA, and H-PMDA to the molar number of the structure derived from TFMB {(PMDA+ODPA+6FDA+CBDA) +H-PMDA)/TFMB} is preferably from 100/99.9 to 100/95 from the viewpoint of obtaining a polyimide film having a better yellowness, CTE and breaking strength.

<聚醯亞胺前驅體之重量平均分子量> <weight average molecular weight of polyimine precursor>

本實施形態之聚醯亞胺前驅體之重量平均分子量較佳為5,000以上、1,000,000以下,更佳為50,000以上、500,000以下,進而較佳為70,000以上、250,000以下。藉由使重量平均分子量為5,000以上,所獲得之聚醯亞胺膜之強伸長率得以改善,機械物性變得優異。尤其就獲得低CTE及低黃色度(YI值)之觀點而言,分子量更佳為50,000以上。藉由使重量平均分子量Mw為1,000,000以下,可將含有該聚醯亞胺前驅體之樹脂組合物無滲透地塗層為所需膜厚。 The weight average molecular weight of the polyimide precursor of the present embodiment is preferably 5,000 or more and 1,000,000 or less, more preferably 50,000 or more and 500,000 or less, and still more preferably 70,000 or more and 250,000 or less. When the weight average molecular weight is 5,000 or more, the obtained polyethyleneimine film has a high elongation and mechanical properties. Particularly, from the viewpoint of obtaining low CTE and low yellowness (YI value), the molecular weight is more preferably 50,000 or more. By making the weight average molecular weight Mw 1,000,000 or less, the resin composition containing the polyimide precursor can be non-permeablely coated to a desired film thickness.

此處,所謂重量平均分子量意指在以單分散聚苯乙烯為標準,藉由凝膠滲透層析法所測得之分子量分佈中,各分子分子量乘以其分子質量所得值之總和除以全部分子之總質量所得之值。 Here, the weight average molecular weight means the sum of the values obtained by multiplying the molecular weight of each molecule by the molecular mass thereof by the molecular weight distribution measured by gel permeation chromatography using monodisperse polystyrene as a standard. The value obtained from the total mass of the molecule.

<聚醯亞胺前驅體之合成方法> <Synthesis method of polyimine precursor>

本實施形態之聚醯亞胺前驅體可藉由將上述四羧酸二酐成分及二胺成分較佳為溶解於溶劑中進行反應,而以含有聚醯亞胺前驅體及溶劑之溶液之形式製造。反應時之條件並無特別限定,例如可例示反應溫度為-20~250℃、反應時間為2~48小時之條件。反應時之周圍氣體環境較佳為氬氣、氮氣等惰性氣體環境。 The polyimine precursor of the present embodiment can be reacted by dissolving the tetracarboxylic dianhydride component and the diamine component in a solvent, and in the form of a solution containing a polyimide precursor and a solvent. Manufacturing. The conditions at the time of the reaction are not particularly limited, and examples thereof include a reaction temperature of -20 to 250 ° C and a reaction time of 2 to 48 hours. The ambient gas atmosphere during the reaction is preferably an inert gas atmosphere such as argon or nitrogen.

上述溶劑只要為能夠溶解所生成之聚合物的溶劑,則無特別限定。作為公知之反應溶劑,例如有用的是選自間甲酚、N-甲基-2-吡 咯啶酮(NMP)、二甲基甲醯胺(DMF)、二甲基乙醯胺(DMAc)、二甲基亞碸(DMSO)、丙酮、乙酸二乙酯、Equamide M100(商品名:出光興產公司製造)及Equamide B100(商品名:出光興產公司製造)中之一種以上極性溶劑。其中,較佳為選自NMP、DMAc、Equamide M100及Equamide B100中之一種以上。此外,亦可代替上述溶劑,或者與上述溶劑一併使用四氫呋喃(THF)、氯仿之類的低沸點溶劑,或γ-丁內酯之類的低吸收性溶劑。 The solvent is not particularly limited as long as it is a solvent capable of dissolving the produced polymer. As a known reaction solvent, for example, it is useful to select m-cresol, N-methyl-2-pyridyl Roridone (NMP), dimethylformamide (DMF), dimethylacetamide (DMAc), dimethyl hydrazine (DMSO), acetone, diethyl acetate, Equamide M100 (trade name: light One or more polar solvents in the production of Equamide B100 (trade name: manufactured by Idemitsu Kosan Co., Ltd.). Among them, one or more selected from the group consisting of NMP, DMAc, Equamide M100, and Equamide B100 are preferred. Further, instead of the above solvent, a low boiling point solvent such as tetrahydrofuran (THF) or chloroform or a low absorption solvent such as γ-butyrolactone may be used together with the above solvent.

上述聚醯亞胺前驅體係聚醯胺酸中之源自脂環式四羧酸二酐之醯胺鍵之至少一部分經閉環脫水之醯亞胺化聚醯胺酸。 The at least a portion of the indoleamine bond derived from the alicyclic tetracarboxylic dianhydride of the polyamidene precursor system polyamine is subjected to ring closure dehydration of the ruthenium imine polyamine.

作為使醯胺鍵進行閉環脫水之步驟,並無特別限定,可應用公知之方法。例如可採用熱醯亞胺化或化學醯亞胺化。 The step of subjecting the indoleamine bond to ring-opening dehydration is not particularly limited, and a known method can be applied. For example, thermal hydrazylation or chemical hydrazylation can be employed.

熱醯亞胺化更具體而言例如可藉由以下方法而進行。首先,將二胺溶解及/或分散至適當之聚合溶劑中,向其中添加四羧酸二酐,並添加與水共沸之溶劑(例如甲苯等)。繼而,使用機械攪拌器,一面將副產生之水共沸而去除,一面加熱攪拌0.5小時~96小時、較佳為0.5小時~30小時。加熱溫度較佳為超過100℃且250℃以下,較佳為130~230℃,更佳為150~210℃。此時,單體濃度較佳為設為0.5質量%以上、95質量%以下,更佳為1質量%以上、90質量%以下。 More specifically, the heat imidization can be carried out, for example, by the following method. First, the diamine is dissolved and/or dispersed in a suitable polymerization solvent, tetracarboxylic dianhydride is added thereto, and a solvent (for example, toluene or the like) which azeotropes with water is added. Then, using a mechanical stirrer, the side-generated water is azeotropically removed and heated and stirred for 0.5 to 96 hours, preferably 0.5 to 30 hours. The heating temperature is preferably more than 100 ° C and not more than 250 ° C, preferably from 130 to 230 ° C, more preferably from 150 to 210 ° C. In this case, the monomer concentration is preferably 0.5% by mass or more and 95% by mass or less, more preferably 1% by mass or more and 90% by mass or less.

化學醯亞胺化可使用公知之醯亞胺化觸媒而進行。作為醯亞胺化觸媒,並無特別限制,例如可列舉:乙酸酐之類的酸酐;γ-戊內酯、γ-丁內酯、γ-特窗酸、γ-酞內酯、γ-香豆素、γ-酞內酯酸之類的內酯化合物;吡啶、喹啉、N-甲基嗎啉、三乙胺之類的三級胺等。醯亞胺化觸媒可視需要僅使用1種,或者亦可為2種以上之混合物。其中,尤其就反應性較高之觀點而言,尤佳為γ-戊內酯與吡啶之混合系。 The chemical imidization can be carried out using a known ruthenium imidization catalyst. The ruthenium imidization catalyst is not particularly limited, and examples thereof include acid anhydrides such as acetic anhydride; γ-valerolactone, γ-butyrolactone, γ-tero window acid, γ-decalactone, and γ- a lactone compound such as coumarin or γ-caprolactone; a tertiary amine such as pyridine, quinoline, N-methylmorpholine or triethylamine. The ruthenium-based catalyst may be used singly or in combination of two or more. Among them, a mixed system of γ-valerolactone and pyridine is particularly preferable from the viewpoint of high reactivity.

作為醯亞胺化觸媒之添加量,相對於聚醯胺酸100質量份,較佳為50質量份以下,更佳為30質量份以下。 The amount of the ruthenium-imiding catalyst to be added is preferably 50 parts by mass or less, and more preferably 30 parts by mass or less based on 100 parts by mass of the polyamic acid.

關於醯胺鍵之閉環脫水,就將對以後反應之影響最小化之觀點而言,尤佳為藉由在無觸媒下進行之熱醯亞胺化而進行。 The closed-loop dehydration of the indoleamine bond is preferably carried out by thermal hydrazyl imidization without a catalyst from the viewpoint of minimizing the influence of the subsequent reaction.

本實施形態之聚醯亞胺前驅體最佳為藉由如下方法而合成:首先,於上述熱醯亞胺化之條件下進行脂環式四羧酸二酐與二胺之反應,而獲得經醯亞胺化之聚醯胺酸,繼而,追加添加芳香族四羧酸二酐與二胺,較佳為在100℃以下繼續進行反應。 The polyimine precursor of the present embodiment is preferably synthesized by the following method: First, a reaction of an alicyclic tetracarboxylic dianhydride with a diamine is carried out under the conditions of the above thermal hydrazylation to obtain a The ruthenium imidized polyamine acid is then additionally added with an aromatic tetracarboxylic dianhydride and a diamine, and it is preferred to continue the reaction at 100 ° C or lower.

如上所述,可獲得含有聚醯亞胺前驅體之溶液。 As described above, a solution containing a polyimide precursor can be obtained.

該溶液可直接供於樹脂組合物之製備,或者亦可將該溶液中所含之聚醯亞胺前驅體進行單離純化後,供於樹脂組合物之製備。 The solution may be directly supplied to the preparation of the resin composition, or may be subjected to isolation and purification of the polyimine precursor contained in the solution for the preparation of the resin composition.

<其他添加劑> <Other additives>

本實施形態之樹脂組合物含有如上所述之聚醯亞胺前驅體及溶劑,亦可視需要進而含有其他添加劑。 The resin composition of the present embodiment contains the polyimine precursor described above and a solvent, and may further contain other additives as needed.

作為此類其他添加劑,例如可列舉烷氧基矽烷化合物、界面活性劑、調平劑等。 Examples of such other additives include alkoxydecane compounds, surfactants, leveling agents, and the like.

(烷氧基矽烷化合物) (alkoxydecane compound)

於由本實施形態之樹脂組合物所獲得之聚醯亞胺形成TFT等元件時,為了使與支持體之間之密著性變得充分,樹脂組合物可含有相對於聚醯亞胺前驅體100質量%為0.001~2質量%之烷氧基矽烷化合物。 When the polyimine obtained by the resin composition of the present embodiment forms an element such as a TFT, the resin composition may contain a polyimide precursor 100 in order to sufficiently adhere the adhesion to the support. The alkoxydecane compound having a mass % of 0.001 to 2% by mass.

相對於聚醯亞胺前驅體100質量%之烷氧基矽烷化合物之含量為0.01質量%以上,由此可獲得與支持體良好之密著性。又,就樹脂組合物之保存穩定性之觀點而言,較佳為烷氧基矽烷化合物之含量為2質量%以下。烷氧基矽烷化合物之含量相對於聚醯亞胺前驅體,更佳 為0.02~2質量%,進而較佳為0.05~1質量%,進而較佳為0.05~0.5質量%,尤佳為0.1~0.5質量%。 The content of the alkoxydecane compound in an amount of 100% by mass based on the polyimine precursor is 0.01% by mass or more, whereby good adhesion to the support can be obtained. Moreover, from the viewpoint of storage stability of the resin composition, the content of the alkoxydecane compound is preferably 2% by mass or less. The content of the alkoxydecane compound is preferably higher than that of the polyimide precursor It is 0.02 to 2% by mass, more preferably 0.05 to 1% by mass, still more preferably 0.05 to 0.5% by mass, still more preferably 0.1 to 0.5% by mass.

作為烷氧基矽烷化合物,例如可列舉3-巰基丙基三甲氧基矽烷(信越化學工業股份有限公司製造:商品名KBM803,Chisso股份有限公司製造:商品名Sila-Ace S810)、3-巰基丙基三乙氧基矽烷(Azmax股份有限公司製造:商品名SIM6475.0)、3-巰基丙基甲基二甲氧基矽烷(信越化學工業股份有限公司製造:商品名LS1375,Azmax股份有限公司製造:商品名SIM6474.0)、巰基甲基三甲氧基矽烷(Azmax股份有限公司製造:商品名SIM6473.5C)、巰基甲基甲基二甲氧基矽烷(Azmax股份有限公司製造:商品名SIM6473.0)、3-巰基丙基二乙氧基甲氧基矽烷、3-巰基丙基乙氧基二甲氧基矽烷、3-巰基丙基三丙氧基矽烷、3-巰基丙基二乙氧基丙氧基矽烷、3-巰基丙基乙氧基二丙氧基矽烷、3-巰基丙基二甲氧基丙氧基矽烷、3-巰基丙基甲氧基二丙氧基矽烷、2-巰基乙基三甲氧基矽烷、2-巰基乙基二乙氧基甲氧基矽烷、2-巰基乙基乙氧基二甲氧基矽烷、2-巰基乙基三丙氧基矽烷、2-巰基乙基三丙氧基矽烷、2-巰基乙基乙氧基二丙氧基矽烷、2-巰基乙基二甲氧基丙氧基矽烷、2-巰基乙基甲氧基二丙氧基矽烷、4-巰基丁基三甲氧基矽烷、4-巰基丁基三乙氧基矽烷、4-巰基丁基三丙氧基矽烷、N-(3-三乙氧基矽烷基丙基)脲(信越化學工業股份有限公司製造:商品名LS3610,Azmax股份有限公司製造:商品名SIU9055.0)、N-(3-三甲氧基矽烷基丙基)脲(Azmax股份有限公司製造:商品名SIU9058.0)、N-(3-二乙氧基甲氧基矽烷基丙基)脲、N-(3-乙氧基二甲氧基矽烷基丙基)脲、N-(3-三丙氧基矽烷基丙基)脲、N-(3-二乙氧基丙氧基矽烷基丙基)脲、N-(3-乙氧基二丙氧基矽烷基丙基)脲、N-(3-二甲氧基丙氧基矽烷基丙基)脲、N-(3-甲氧基二丙氧基矽烷基丙基)脲、N-(3-三甲氧基矽烷基乙基)脲、N-(3-乙氧基二甲氧 基矽烷基乙基)脲、N-(3-三丙氧基矽烷基乙基)脲、N-(3-三丙氧基矽烷基乙基)脲、N-(3-乙氧基二丙氧基矽烷基乙基)脲、N-(3-二甲氧基丙氧基矽烷基乙基)脲、N-(3-甲氧基二丙氧基矽烷基乙基)脲、N-(3-三甲氧基矽烷基丁基)脲、N-(3-三乙氧基矽烷基丁基)脲、N-(3-三丙氧基矽烷基丁基)脲、3-(間胺基苯氧基)丙基三甲氧基矽烷(Azmax股份有限公司製造:商品名SLA0598.0)、間胺基苯基三甲氧基矽烷(Azmax股份有限公司製造:商品名SLA0599.0)、對胺基苯基三甲氧基矽烷(Azmax股份有限公司製造:商品名SLA0599.1)、胺基苯基三甲氧基矽烷(Azmax股份有限公司製造:商品名SLA0599.2)、2-(三甲氧基矽烷基乙基)吡啶(Azmax股份有限公司製造:商品名SIT8396.0)、2-(三乙氧基矽烷基乙基)吡啶、2-(二甲氧基矽烷基甲基乙基)吡啶、2-(二乙氧基矽烷基甲基乙基)吡啶、(3-三乙氧基矽烷基丙基)-t-丁基胺基甲酸酯、(3-縮水甘油氧基丙基)三乙氧基矽烷、四甲氧基矽烷、四乙氧基矽烷、四-正丙氧基矽烷、四-異丙氧基矽烷、四-正丁氧基矽烷、四-異丁氧基矽烷、四-t-丁氧基矽烷、四(甲氧基乙氧基矽烷)、四(甲氧基-正丙氧基矽烷)、四(乙氧基乙氧基矽烷)、四(甲氧基乙氧基乙氧基矽烷)、雙(三甲氧基矽烷基)乙烷、雙(三甲氧基矽烷基)己烷、雙(三乙氧基矽烷基)甲烷、雙(三乙氧基矽烷基)乙烷、雙(三乙氧基矽烷基)乙烯、雙(三乙氧基矽烷基)辛烷、雙(三乙氧基矽烷基)辛二烯、雙[3-(三乙氧基矽烷基)丙基]二硫醚、雙[3-(三乙氧基矽烷基)丙基]四硫醚、二-t-丁氧基二乙醯氧基矽烷、二-異丁氧基鋁氧基三乙氧基矽烷、雙(戊二酸酯)鈦-O,O'-雙(氧基乙基)-胺基丙基三乙氧基矽烷、苯基矽烷三醇、甲基苯基矽烷二醇、乙基苯基矽烷二醇、正丙基苯基矽烷二醇、異丙基苯基矽烷二醇、正丁基苯基矽烷二醇、異丁基苯基矽烷二醇、第三丁基苯基矽烷二醇、二苯基矽烷二醇、二甲氧基二苯基矽烷、二乙氧基二苯基矽烷、二甲氧基二-對甲苯基矽烷、乙 基甲基苯基矽烷醇、正丙基甲基苯基矽烷醇、異丙基甲基苯基矽烷醇、正丁基甲基苯基矽烷醇、異丁基甲基苯基矽烷醇、第三丁基甲基苯基矽烷醇、乙基正丙基苯基矽烷醇、乙基異丙基苯基矽烷醇、正丁基乙基苯基矽烷醇、異丁基乙基苯基矽烷醇、第三丁基乙基苯基矽烷醇、甲基二苯基矽烷醇、乙基二苯基矽烷醇、正丙基二苯基矽烷醇、異丙基二苯基矽烷醇、正丁基二苯基矽烷醇、異丁基二苯基矽烷醇、第三丁基二苯基矽烷醇、三苯基矽烷醇、3-脲基丙基三乙氧基矽烷、雙(2-羥基乙基)-3-胺基丙基三乙氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、苯基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、γ-胺基丙基三甲氧基矽烷、γ-胺基丙基三丙氧基矽烷、γ-胺基丙基三丁氧基矽烷、γ-胺基乙基三乙氧基矽烷、γ-胺基乙基三甲氧基矽烷、γ-胺基乙基三丙氧基矽烷、γ-胺基乙基三丁氧基矽烷、γ-胺基丁基三乙氧基矽烷、γ-胺基丁基三甲氧基矽烷、γ-胺基丁基三丙氧基矽烷、γ-胺基丁基三丁氧基矽烷等,但並不限定於該等。該等可單獨使用,亦可將複數種組合使用。 Examples of the alkoxydecane compound include 3-mercaptopropyltrimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd.: trade name KBM803, manufactured by Chisso Co., Ltd.: trade name Sila-Ace S810), 3-mercaptopropyl propyl Triethoxy decane (manufactured by Azmax Co., Ltd.: trade name SIM6475.0), 3-mercaptopropylmethyldimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd.: trade name LS1375, manufactured by Azmax Co., Ltd. : trade name SIM6474.0), mercaptomethyltrimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SIM6473.5C), mercaptomethylmethyldimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SIM6473. 0), 3-mercaptopropyldiethoxymethoxydecane, 3-mercaptopropylethoxydimethoxydecane, 3-mercaptopropyltripropoxydecane, 3-mercaptopropyldiethoxylate Propyloxydecane, 3-mercaptopropylethoxydipropoxydecane, 3-mercaptopropyldimethoxypropoxydecane, 3-mercaptopropylmethoxydipropoxydecane, 2- Mercaptoethyltrimethoxydecane, 2-mercaptoethyldiethoxymethoxydecane 2-mercaptoethylethoxydimethoxydecane, 2-mercaptoethyltripropoxydecane, 2-mercaptoethyltripropoxydecane, 2-mercaptoethylethoxydipropoxydecane, 2-mercaptoethyldimethoxypropoxydecane, 2-mercaptoethylmethoxydipropoxydecane, 4-mercaptobutyltrimethoxydecane, 4-mercaptobutyltriethoxydecane, 4 - mercaptobutyl tripropoxydecane, N-(3-triethoxydecylpropyl)urea (manufactured by Shin-Etsu Chemical Co., Ltd.: trade name LS3610, manufactured by Azmax Co., Ltd.: trade name SIU9055.0) N-(3-trimethoxydecylpropyl)urea (manufactured by Azmax Co., Ltd.: trade name SIU9058.0), N-(3-diethoxymethoxydecylpropyl)urea, N- (3-ethoxydimethoxydecylpropyl)urea, N-(3-tripropoxydecylpropyl)urea, N-(3-diethoxypropoxydecylpropyl) Urea, N-(3-ethoxydipropoxydecylpropyl)urea, N-(3-dimethoxypropoxydecylpropyl)urea, N-(3-methoxydipropyl) Oxidylalkylpropyl)urea, N-(3-trimethoxydecylethyl)urea, N-(3-ethoxydimethoxy Alkylethyl)urea, N-(3-tripropoxydecylethyl)urea, N-(3-tripropoxydecylethyl)urea, N-(3-ethoxydipropyl Oxidylalkylethyl)urea, N-(3-dimethoxypropoxydecylethyl)urea, N-(3-methoxydipropoxydecylethyl)urea, N-( 3-trimethoxydecylbutyl)urea, N-(3-triethoxydecylbutyl)urea, N-(3-tripropoxydecylbutyl)urea, 3-(m-amino group) Phenoxy)propyltrimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SLA0598.0), m-aminophenyltrimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SLA0599.0), and amino group Phenyltrimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SLA0599.1), aminophenyltrimethoxydecane (manufactured by Azmax Co., Ltd.: trade name SLA0599.2), 2-(trimethoxydecylalkyl) Ethyl)pyridine (manufactured by Azmax Co., Ltd.: trade name SIT8396.0), 2-(triethoxydecylethylethyl)pyridine, 2-(dimethoxydecylmethylethyl)pyridine, 2- (diethoxydecylmethylethyl)pyridine, (3-triethoxydecylpropyl)-t-butylamino Ester, (3-glycidoxypropyl) triethoxy decane, tetramethoxy decane, tetraethoxy decane, tetra-n-propoxy decane, tetra-isopropoxy decane, tetra-n-butyl Oxydecane, tetra-isobutoxydecane, tetra-t-butoxydecane, tetrakis(methoxyethoxydecane), tetrakis(methoxy-n-propoxydecane), tetra(ethoxy) Ethoxy decane), tetrakis(methoxyethoxyethoxy decane), bis(trimethoxydecyl)ethane, bis(trimethoxydecyl)hexane, bis(triethoxydecylalkyl) Methane, bis(triethoxydecyl)ethane, bis(triethoxydecyl)ethylene, bis(triethoxydecyl)octane, bis(triethoxydecyl)octadiene , bis[3-(triethoxydecyl)propyl]disulfide, bis[3-(triethoxydecyl)propyl]tetrasulfide, di-t-butoxydiethyloxy Base decane, di-isobutoxyaluminum triethoxy decane, bis(glutarate) titanium-O, O'-bis(oxyethyl)-aminopropyltriethoxy decane, Phenyl decane triol, methyl phenyl decane diol, ethyl phenyl decane diol, n-propyl phenyl decane diol, isopropyl phenyl decane , n-butylphenyl decane diol, isobutyl phenyl decane diol, tert-butyl phenyl decane diol, diphenyl decane diol, dimethoxy diphenyl decane, diethoxy bis Phenyl decane, dimethoxy bis-p-tolyl decane, B Methyl phenyl decyl alcohol, n-propyl methyl phenyl stanol, isopropyl methyl phenyl stanol, n-butyl methyl phenyl stanol, isobutyl methyl phenyl stanol, third butyl methyl phenyl Hydranol, ethyl n-propyl phenyl decyl alcohol, ethyl isopropyl phenyl stanol, n-butyl ethyl phenyl stanol, isobutyl ethyl phenyl stanol, tert-butyl ethyl benzene Base alkanol, methyl diphenyl stanol, ethyl diphenyl stanol, n-propyl diphenyl stanol, isopropyl diphenyl stanol, n-butyl diphenyl stanol, isobutyl Diphenyl decyl alcohol, tert-butyl diphenyl decyl alcohol, triphenyl decyl alcohol, 3-ureidopropyl triethoxy decane, bis (2-hydroxyethyl)-3-aminopropyl three Ethoxy decane, 3-glycidoxypropyl trimethoxy decane, phenyl trimethoxy decane, γ-aminopropyl triethoxy decane, γ-aminopropyl trimethoxy decane, γ- Aminopropyl tripropoxydecane, γ-aminopropyl tributoxy decane, γ-aminoethyl triethoxy decane, γ-aminoethyl trimethoxy decane, γ-amino group B Tripropoxy Alkane, γ-aminoethyl tributoxydecane, γ-aminobutyl triethoxy decane, γ-aminobutyl trimethoxy decane, γ-aminobutyl tripropoxy decane, γ - aminobutyl tributoxy decane, etc., but is not limited to these. These may be used alone or in combination of plural kinds.

作為矽烷偶合劑,於上述矽烷偶合劑之中,就確保樹脂組合物之保存穩定性之觀點而言,較佳為選自苯基矽烷三醇、三甲氧基苯基矽烷、三甲氧基(對甲苯基)矽烷、二苯基矽烷二醇、二甲氧基二苯基矽烷、二乙氧基二苯基矽烷、二甲氧基二-對甲苯基矽烷、三苯基矽烷醇及下述結構各者所表示之矽烷偶合劑中之1種以上。 As the decane coupling agent, among the above decane coupling agents, from the viewpoint of ensuring storage stability of the resin composition, it is preferably selected from the group consisting of phenyldecanetriol, trimethoxyphenylnonane, and trimethoxy (pair). Tolyl) decane, diphenyl decane diol, dimethoxy diphenyl decane, diethoxy diphenyl decane, dimethoxy bis-p-tolyl decane, triphenyl decyl alcohol and the following structure One or more of the decane coupling agents represented by each.

(界面活性劑或調平劑) (surfactant or leveling agent)

又,藉由將界面活性劑或調平劑添加至樹脂組合物中,可提高塗佈性。具體而言,可防止塗佈後之收縮。 Further, by adding a surfactant or a leveling agent to the resin composition, the coatability can be improved. Specifically, shrinkage after coating can be prevented.

作為此類界面活性劑或調平劑,例如可列舉有機矽氧烷聚合物KF-640、642、643、KP341、X-70-092、X-70-093、KBM303、KBM403、KBM803(以上,商品名,信越化學工業公司製造)、SH-28PA、SH-190、SH-193、SZ-6032、SF-8428、DC-57、DC-190(以上,商品名,Dow Corning Toray Silicone公司製造)、SILWET L-77、L-7001、FZ-2105、FZ-2120、FZ-2154、FZ-2164、FZ-2166、L-7604(以上,商品名,日本尤尼卡(Nippon Unicar)公司製造)、DBE-814、DBE-224、DBE-621、CMS-626、CMS-222、KF-352A、KF-354L、KF-355A、KF-6020、DBE-821、DBE-712(Gelest)、BYK-307、BYK-310、BYK-378、BYK-333(以上,商品名,BYK-Chemie Japan製造)、Glanol(商品名,共榮社化學公司製造)、作為聚氧乙烯月桂醚、聚氧乙烯硬脂醚、聚氧乙烯油醚、聚氧乙烯辛基酚醚等之Megafacs F171、F173、R-08(大日本油墨化學工業股份有限公司製 造,商品名)、Fluorad FC430、FC431(Sumitomo 3M股份有限公司,商品名)等。 As such a surfactant or leveling agent, for example, an organic siloxane polymer KF-640, 642, 643, KP341, X-70-092, X-70-093, KBM303, KBM403, KBM803 (above, Trade name, manufactured by Shin-Etsu Chemical Co., Ltd.), SH-28PA, SH-190, SH-193, SZ-6032, SF-8428, DC-57, DC-190 (above, trade name, manufactured by Dow Corning Toray Silicone) , SILWET L-77, L-7001, FZ-2105, FZ-2120, FZ-2154, FZ-2164, FZ-2166, L-7604 (above, trade name, manufactured by Nippon Unicar) , DBE-814, DBE-224, DBE-621, CMS-626, CMS-222, KF-352A, KF-354L, KF-355A, KF-6020, DBE-821, DBE-712 (Gelest), BYK- 307, BYK-310, BYK-378, BYK-333 (above, trade name, manufactured by BYK-Chemie Japan), Glanol (trade name, manufactured by Kyoeisha Chemical Co., Ltd.), as polyoxyethylene lauryl ether, polyoxyethylene hard Megafacs F171, F173, R-08, such as aliphatic ether, polyoxyethylene ether ether, polyoxyethylene octylphenol ether, etc., manufactured by Dainippon Ink Chemical Industry Co., Ltd. Manufacture, trade name), Fluorad FC430, FC431 (Sumitomo 3M Co., Ltd., trade name).

於使用界面活性劑或調平劑之情形時,其合計調配量相對於樹脂組合物中之聚醯亞胺前驅體100質量份,較佳為0.001~5質量份,更佳為0.01~3質量份。 In the case of using a surfactant or a leveling agent, the total amount thereof is preferably 0.001 to 5 parts by mass, more preferably 0.01 to 3 parts by mass based on 100 parts by mass of the polyimine precursor in the resin composition. Share.

<樹脂組合物> <Resin composition>

本實施形態之樹脂組合物用作將上述聚醯亞胺前驅體及任意使用之其他成分溶解於溶劑中而成之溶液組合物(清漆)。 The resin composition of the present embodiment is used as a solution composition (varnish) obtained by dissolving the above-mentioned polyimine precursor and other components used arbitrarily in a solvent.

此處,作為溶劑,可使用與作為合成聚醯亞胺前驅體時可使用之溶劑已進行敍述者相同的溶劑。 Here, as the solvent, the same solvent as that which has been used as a solvent for synthesizing a polyimide precursor can be used.

溶劑之使用量較佳為設為使樹脂組合物之固形物成分濃度成為3~50質量%之量。 The amount of the solvent used is preferably such that the solid content concentration of the resin composition is from 3 to 50% by mass.

本實施形態之樹脂組合物之清漆係室溫保存穩定性優異,在室溫下保存4週之情形時之清漆之黏度變化率相對於初始黏度為10%以下。若室溫保存穩定性優異,則不需要冷凍保管,故而容易操作。 The varnish of the resin composition of the present embodiment is excellent in room temperature storage stability, and the viscosity change rate of the varnish when stored at room temperature for 4 weeks is 10% or less with respect to the initial viscosity. If it is excellent in storage stability at room temperature, it does not need to be stored frozen, so it is easy to handle.

<積層體> <Laminated body>

本實施形態之積層體具備支持體及形成於該支持體上之聚醯亞胺膜。又,上述積層體亦可於上述聚醯亞胺膜上進而具備無機膜。 The laminate of the present embodiment includes a support and a polyimide film formed on the support. Further, the laminate may further include an inorganic film on the polyimide film.

上述積層體藉由經過如下步驟而形成:塗膜形成步驟,其於支持體之表面上展開本實施形態之樹脂組合物而形成塗膜;以及加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體進行醯亞胺化而形成聚醯亞胺膜。 The laminated body is formed by a coating film forming step of developing the resin composition of the present embodiment on the surface of the support to form a coating film, and a heating step of performing the support and the coating film The polyimine precursor is subjected to hydrazine imidization by heating to form a polyimide film.

上述無機膜用作用以防止水分或氧氣自本發明之聚醯亞胺膜滲入至有機EL(Electroluminescence,電致發光)發光層等中之阻氣層,較佳地例示有氧化矽、氧化鋁、碳化矽、氧化碳化矽、碳化氮化矽、 氮化矽、氮化氧化矽等無機氧化物膜。該無機膜係利用電漿CVD法(Chemical Vapor Deposition,化學氣相沈積法)等進行成膜。 The inorganic film is used as a gas barrier layer for preventing penetration of moisture or oxygen from the polyimide film of the present invention into an organic EL (electroluminescence) light-emitting layer or the like, and is preferably exemplified by cerium oxide or aluminum oxide. Tantalum carbide, oxidized tantalum carbide, tantalum carbide, An inorganic oxide film such as tantalum nitride or tantalum oxide. This inorganic film is formed by a plasma CVD method (Chemical Vapor Deposition) or the like.

作為上述支持體,例如為無鹼玻璃基板等玻璃基板之類的無機基板,但並無特別限定。 The support is, for example, an inorganic substrate such as a glass substrate such as an alkali-free glass substrate, but is not particularly limited.

作為上述展開方法,例如可列舉旋轉塗佈、狹縫式塗佈、刮刀塗佈等公知之塗層方法。 As the development method, for example, a known coating method such as spin coating, slit coating, or doctor blade coating can be mentioned.

更具體而言,將樹脂組合物在支持體上(或形成於其主表面上之接著層上)展開,去除溶劑後,較佳為在惰性氣體環境下藉由加熱將聚醯亞胺前驅體予以醯亞胺化,由此可於上述支持體上形成聚醯亞胺膜。 More specifically, the resin composition is developed on the support (or formed on the adhesive layer on the main surface thereof), and after removing the solvent, it is preferred to heat the polyimide precursor in an inert gas atmosphere. The ruthenium imidization is carried out, whereby a polyimide film can be formed on the above support.

上述溶劑去除例如可利用在未達250℃、較佳為50~200℃之溫度下1分鐘~300分鐘之熱處理而進行。上述醯亞胺化例如可利用在250℃~550℃之溫度下1分鐘~300分鐘之加熱處理而進行。醯亞胺化時之周圍氣體環境較佳為設為氮氣等惰性氣體環境下。 The solvent removal can be carried out, for example, by heat treatment at a temperature of not more than 250 ° C, preferably 50 to 200 ° C for 1 minute to 300 minutes. The above hydrazine imidation can be carried out, for example, by heat treatment at a temperature of from 250 ° C to 550 ° C for from 1 minute to 300 minutes. The ambient gas atmosphere during the imidization of hydrazine is preferably an inert gas atmosphere such as nitrogen.

藉由本實施形態所獲得之聚醯亞胺膜之厚度並無特別限定,較佳為10~50μm之範圍,更佳為15~25μm。 The thickness of the polyimide film obtained by the present embodiment is not particularly limited, but is preferably in the range of 10 to 50 μm, more preferably 15 to 25 μm.

該積層體例如用於製造可撓性裝置。更具體而言,於聚醯亞胺膜上形成半導體元件(semiconductor device),其後,剝離支持體,可獲得具備包含聚醯亞胺膜之可撓性透明基板的可撓性裝置。 This laminate is used, for example, to manufacture a flexible device. More specifically, a semiconductor device is formed on the polyimide film, and thereafter, the support is peeled off to obtain a flexible device including a flexible transparent substrate including a polyimide film.

<聚醯亞胺膜> <Polyimide film>

本實施形態之聚醯亞胺膜藉由經過如下步驟而形成:塗膜形成步驟,其將含有上述本實施形態之聚醯亞胺前驅體及溶劑之樹脂組合物在支持體之表面上展開而形成塗膜;加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體予以醯亞胺化而形成聚醯亞胺膜;以及剝離步驟,其將上述聚醯亞胺膜自上述支持體剝離而獲得聚醯 亞胺膜。 The polyimide film of the present embodiment is formed by a coating film forming step of developing a resin composition containing the polyimine precursor of the present embodiment and a solvent on the surface of the support. Forming a coating film; heating step of heating the support and the coating film to imidize the polyimine precursor to form a polyimide film; and a stripping step of the polyazide The amine film is peeled off from the support to obtain polyfluorene Imine film.

該聚醯亞胺膜例如用於製造可撓性裝置。具體而言,可將該聚醯亞胺膜使用於形成TFT之基板、形成彩色濾光片之基板、配向膜、可撓性顯示器用透明基板等。 The polyimide film is used, for example, to manufacture a flexible device. Specifically, the polyimide film can be used for a substrate on which a TFT is formed, a substrate on which a color filter is formed, an alignment film, a transparent substrate for a flexible display, or the like.

<本發明之優點> <Advantages of the Invention>

如上所述,本實施形態之聚醯亞胺前驅體較佳為具有:(1)作為源自四羧酸二酐之結構的源自選自CBDA、H-PMDA等中之至少1種脂環式四羧酸二酐之結構;源自選自PMDA等中之芳香族四羧酸二酐1之結構;以及源自選自OPDA、6FDA等中之芳香族四羧酸二酐之結構;並且具有(2)作為源自二胺之結構的源自TFMB等之結構。使用此類聚醯亞胺前驅體所製造之聚醯亞胺膜為無色透明,CTE較低,進而伸長率優異。於該聚醯亞胺膜上形成無機膜而成之積層體因表面粗糙度較小,Haze值較小,水蒸氣透過率較小,故而適合使用於可撓性顯示器之透明基板中。 As described above, the polyimine precursor of the present embodiment preferably has (1) at least one alicyclic ring derived from CBDA, H-PMDA or the like as a structure derived from tetracarboxylic dianhydride. a structure of a tetracarboxylic dianhydride; a structure derived from an aromatic tetracarboxylic dianhydride 1 selected from PMDA or the like; and a structure derived from an aromatic tetracarboxylic dianhydride selected from OPDA, 6FDA, etc.; (2) A structure derived from TFMB or the like as a structure derived from a diamine. The polyimide film produced by using such a polyimide precursor is colorless and transparent, has a low CTE, and is excellent in elongation. The laminate formed by forming an inorganic film on the polyimide film has a small surface roughness, a small Haze value, and a small water vapor transmission rate, and is therefore suitable for use in a transparent substrate of a flexible display.

若進而進行具體說明,則為如下。 Specifically, the details are as follows.

於形成可撓性顯示器之情形時,將玻璃基板用作支持體,於其上形成可撓性基板,進而於其上形成TFT等無機膜。將無機膜形成於基板上之步驟典型的是在150~650℃之廣範圍之溫度下實施。為發揮實際所需之性能,主要採用250℃至400℃之溫度範圍。作為上述無機膜,例如可列舉TFT-IGZO(InGaZnO)氧化物半導體、TFT(a-Si-TFT、poly-Si-TFT)等。 In the case of forming a flexible display, a glass substrate is used as a support, a flexible substrate is formed thereon, and an inorganic film such as a TFT is formed thereon. The step of forming the inorganic film on the substrate is typically carried out at a temperature ranging from 150 to 650 °C. In order to achieve the actual performance required, the temperature range of 250 ° C to 400 ° C is mainly used. Examples of the inorganic film include a TFT-IGZO (InGaZnO) oxide semiconductor, a TFT (a-Si-TFT, a poly-Si-TFT), and the like.

此時,若可撓性基板之CTE高於玻璃基板之CTE,則該等在高溫之無機膜形成步驟中膨脹後之冷卻時產生收縮,此時出現玻璃基板之翹曲及破損、可撓性基板自玻璃基板之剝離等問題。通常,玻璃基板 之熱膨脹係數小於樹脂。因此,可撓性基板之線膨脹係數越低越好。 At this time, if the CTE of the flexible substrate is higher than the CTE of the glass substrate, the shrinkage occurs during cooling after expansion in the high-temperature inorganic film forming step, and warpage, breakage, and flexibility of the glass substrate occur at this time. Problems such as peeling of the substrate from the glass substrate. Usually, the glass substrate The coefficient of thermal expansion is smaller than that of the resin. Therefore, the lower the linear expansion coefficient of the flexible substrate, the better.

於本實施形態之聚醯亞胺膜中,考慮到上述方面,以膜之厚度15~25μm為基準,可將依據TMA法(thermomechanical analysis,熱機械分析)在100~300℃下測定之平均線膨脹係數(CTE)設為25.0ppm/℃以下。 In the polyimine film of the present embodiment, in consideration of the above aspect, the average line measured by the TMA method (thermomechanical analysis) at 100 to 300 ° C can be used based on the thickness of the film of 15 to 25 μm. The coefficient of expansion (CTE) is set to 25.0 ppm/° C. or less.

又,於本實施形態之聚醯亞胺膜中,黃色度(YI值)為10以下,且以膜之厚度15~25μm為基準,可將利用紫外分光光度計測定透過率之情形時之550nm中之透過率設為85%以上。 Further, in the polyimide film of the present embodiment, the yellowness (YI value) is 10 or less, and the thickness of the film is 15 to 25 μm, and the transmittance can be measured by the ultraviolet spectrophotometer at 550 nm. The transmittance is set to 85% or more.

於本實施之聚醯亞胺膜上形成有無機膜之積層體中,無機膜之表面粗糙度較小,Haze值較小,水蒸氣透過率較小。 In the laminate in which the inorganic film is formed on the polyimide film of the present embodiment, the surface roughness of the inorganic film is small, the Haze value is small, and the water vapor transmission rate is small.

於有機EL顯示器之情形時,於聚醯亞胺膜上形成無機膜作為阻氣層。此時,若無機膜之表面粗糙度較大,Haze值較大,則積層體中引起渾濁及污點,故而不適合用作顯示器。又,若水蒸氣透過率較大,則無法發揮作為阻氣層之功能,故而不適合。 In the case of an organic EL display, an inorganic film is formed on the polyimide film as a gas barrier layer. At this time, if the surface roughness of the inorganic film is large and the Haze value is large, turbidity and stains are caused in the laminated body, and thus it is not suitable for use as a display. Moreover, if the water vapor transmission rate is large, the function as a gas barrier layer cannot be exhibited, and it is not suitable.

認為聚醯亞胺膜之耐熱性與該等積層體之表面粗糙度、Haze值、水蒸氣透過率有關係。其原因在於:於聚醯亞胺膜上使用CVD法而形成無機膜時,包含該聚醯亞胺膜之積層體暴露於形成聚醯亞胺膜時之固化(醯亞胺化處理)溫度以上之高溫。該積層體較佳為表面粗糙度為25nm以下,Haze為15以下,水蒸氣透過率為0.1g/(m2‧24h)以下。 It is considered that the heat resistance of the polyimide film is related to the surface roughness, the Haze value, and the water vapor transmission rate of the laminate. The reason for this is that when an inorganic film is formed by a CVD method on a polyimide film, the laminate containing the polyimide film is exposed to a temperature higher than the temperature at which the polyimide film is formed. High temperature. The laminate preferably has a surface roughness of 25 nm or less, Haze of 15 or less, and a water vapor transmission rate of 0.1 g/(m 2 ‧24 h) or less.

又,本實施形態之聚醯亞胺膜較佳為以膜之厚度15~25μm為基準,伸長率為15%以上。藉由具有此類伸長率,對可撓性基板進行操作時破斷強度變得優異,因此可提高良率。 Further, the polyimide film of the present embodiment preferably has an elongation of 15% or more based on the thickness of the film of 15 to 25 μm. By having such an elongation, the breaking strength is excellent when the flexible substrate is operated, so that the yield can be improved.

滿足上述物性的本實施形態之聚醯亞胺膜可使用於由於已知聚醯亞胺膜所具有之黃色而限制使用之用途及要求透明性之用途。尤其是,除較佳地用作可撓性顯示器用透明基板以外; 例如,亦可使用於保護膜或TFT-LCD中之散光片及塗膜(例如,TFT-LCD之中間層、閘極絕緣膜及液晶配向膜)等。於應用本實施形態之聚醯亞胺作為液晶配向膜時,可製造有助於開口率之增加且高對比率之TFT-LCD。 The polyimide film of the present embodiment which satisfies the above physical properties can be used for applications in which the yellow color of the polyimide film is known to be limited, and the use of transparency is required. In particular, in addition to being preferably used as a transparent substrate for a flexible display; For example, it can also be used for a diffusing film and a coating film (for example, an intermediate layer of a TFT-LCD, a gate insulating film, and a liquid crystal alignment film) in a protective film or a TFT-LCD. When the polyimine of this embodiment is used as a liquid crystal alignment film, a TFT-LCD which contributes to an increase in aperture ratio and a high contrast ratio can be manufactured.

使用本實施形態之聚醯亞胺前驅體所製造之聚醯亞胺膜及積層體例如可較佳地利用於製造半導體絕緣膜、TFT-LCD絕緣膜、電極保護膜及可撓性裝置。尤其是,適合於製造基板。此處,作為可撓性裝置,例如可列舉可撓性顯示器、可撓性太陽電池、可撓性照明及可撓性電池等。 The polyimide film and the laminate produced by using the polyimide precursor of the present embodiment can be preferably used, for example, for producing a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, and a flexible device. In particular, it is suitable for manufacturing substrates. Here, examples of the flexible device include a flexible display, a flexible solar cell, a flexible illumination, and a flexible battery.

[實施例] [Examples]

以下,基於實施例,對本發明進行具體說明。該等係為了說明而記述者,本發明之範圍並不限定於下述實施例。 Hereinafter, the present invention will be specifically described based on examples. These are described for the sake of explanation, and the scope of the present invention is not limited to the following examples.

實施例及比較例中之各種評價如下所述進行。 The various evaluations in the examples and comparative examples were carried out as follows.

(重量平均分子量之測定) (Measurement of weight average molecular weight)

重量平均分子量係利用凝膠滲透層析法(GPC),根據下述條件進行測定。用以算出重量平均分子量之校正曲線係使用標準聚苯乙烯(Tosoh公司製造)而製作。 The weight average molecular weight was measured by gel permeation chromatography (GPC) under the following conditions. A calibration curve for calculating the weight average molecular weight was produced using standard polystyrene (manufactured by Tosoh Corporation).

溶劑:使用N,N-二甲基甲醯胺(和光純藥工業公司製造,高速液相層析用),於測定前添加24.8mmol/L之溴化鋰一水合物(和光純藥工業公司製造,純度99.5%)及63.2mmol/L之磷酸(和光純藥工業公司製造,高速液相層析用)而成者 Solvent: N,N-dimethylformamide (manufactured by Wako Pure Chemical Industries, Ltd., for high-speed liquid chromatography) was added, and 24.8 mmol/L of lithium bromide monohydrate (manufactured by Wako Pure Chemical Industries, Ltd.) was added before the measurement. 99.5% purity) and 63.2 mmol/L phosphoric acid (manufactured by Wako Pure Chemical Industries, Ltd., for high-speed liquid chromatography)

管柱:Shodex KD-806M(昭和電工公司製造) Pipe column: Shodex KD-806M (made by Showa Denko)

流速:1.0mL/min Flow rate: 1.0mL/min

管柱溫度:40℃ Column temperature: 40 ° C

泵:PU-2080Plus(JASCO公司製造) Pump: PU-2080Plus (manufactured by JASCO)

檢測器:RI-2031Plus(RI:示差折射計,JASCO公司製造),UV- 2075Plus(UV-VIS:紫外可見吸光計,JASCO公司製造) Detector: RI-2031Plus (RI: differential refractometer, manufactured by JASCO), UV- 2075Plus (UV-VIS: UV-visible absorbometer, manufactured by JASCO)

(源自脂環式四羧酸二酐之部分之醯亞胺基濃度之算出) (calculation of the concentration of the quinone imine group derived from the portion of the alicyclic tetracarboxylic dianhydride)

源自脂環式酸二酐之部分之醯亞胺基濃度係根據對聚醯亞胺前驅體清漆進行測定之13C-NMR(Nuclear Magnetic Resonance,核磁共振)信號之積分值而算出。13C-NMR測定係在下述條件下進行。 The concentration of the quinone imine group derived from the alicyclic acid dianhydride was calculated from the integral value of the 13 C-NMR (Nuclear Magnetic Resonance) signal measured on the polyimide precursor varnish. The 13 C-NMR measurement was carried out under the following conditions.

測定裝置:日本電子公司製造JNM-GSX400型 Measuring device: JNM-GSX400 manufactured by JEOL

測定溫度:23℃ Measuring temperature: 23 ° C

測定溶劑:氘化二甲基亞碸溶劑(DMSO-d6) Determination of solvent: deuterated dimethyl hydrazine solvent (DMSO-d 6 )

源自脂環式四羧酸二酐之部分之醯亞胺鍵、醯胺鍵及羧酸之各碳所屬之信號係表示為下述之磁場強度: 源自脂環式四羧酸二酐之部分之醯亞胺鍵結碳之所屬信號:177ppm附近(A) The signal system of each of the quinone imine bond, the guanamine bond, and the carboxylic acid derived from the alicyclic tetracarboxylic dianhydride is represented by the following magnetic field strength: The signal of the quinone imine bonded carbon derived from the part of the alicyclic tetracarboxylic dianhydride: near 177 ppm (A)

源自脂環式四羧酸二酐之部分之醯胺鍵結碳之所屬信號:172ppm附近(B) The signal of the amine-bonded carbon derived from the part of the alicyclic tetracarboxylic dianhydride: near 172 ppm (B)

源自脂環式四羧酸二酐之部分之羧基碳之所屬信號:177ppm附近(C) The signal of the carboxyl group derived from the part of the alicyclic tetracarboxylic dianhydride: near 177 ppm (C)

此處,關於醯胺酸(未進行醯亞胺化)部位,B與C之積分值成為相同值。進行醯亞胺化之部位中之醯亞胺鍵結碳之積分值與未進行醯亞胺化之部位中之醯胺鍵結碳之積分值分別由下述式所表示:醯亞胺鍵結碳之積分值:A之積分值-B之積分值 Here, the integral value of B and C is the same value with respect to the proline (not ruthenium) site. The integral value of the yttrium-immobilized carbon in the site of the ruthenium imidization and the integral value of the guanamine-bonded carbon in the site where the oxime imidization is carried out are represented by the following formula: 醯imino bond The integral value of carbon: the integral value of A - the integral value of B

醯胺鍵結碳與羧基碳之積分值:B之積分值×2 Integral value of guanamine bonded carbon and carboxyl carbon: integral value of B × 2

藉此,醯亞胺基濃度由下述計算式所表示:醯亞胺基濃度(%)=100×(A之積分值-B之積分值)/(A之積分值-B之積分值+B之積分值×2)=100×(A之積分值-B之積分值)/(A之積分值+B之積分值) Thereby, the quinone imine group concentration is represented by the following formula: 醯imino group concentration (%) = 100 × (integral value of A - integral value of B) / (integral value of A - integral value of B + The integral value of B × 2) = 100 × (the integral value of A - the integral value of B) / (the integral value of A + the integral value of B)

(清漆保存穩定性之評價) (Evaluation of varnish preservation stability)

將使下述實施例及比較例中分別製備之組合物清漆在室溫下放置3天之樣品設為製備後之樣品,進行23℃下之黏度測定。其後,將進而在室溫下放置4週之樣品設為4週後之樣品,再次進行23℃下之黏度測定。 The sample varnish prepared in each of the following examples and comparative examples was placed at room temperature for 3 days, and the sample was prepared, and the viscosity was measured at 23 ° C. Thereafter, the sample which was further left at room temperature for 4 weeks was set as a sample after 4 weeks, and the viscosity measurement at 23 ° C was again performed.

上述黏度測定係使用附帶溫調機之黏度計(東機產業公司製造TV-22)而進行。 The viscosity measurement described above was carried out using a viscometer (TV-22 manufactured by Toki Sangyo Co., Ltd.) equipped with a thermostat.

使用上述測定值,藉由下述數式算出室溫4週黏度變化率。 Using the above measured values, the room temperature 4 week viscosity change rate was calculated by the following formula.

室溫4週黏度變化率(%)=[(4週後之樣品之黏度)-(製備後之樣品之黏度)]/(製備後之樣品之黏度)×100 The change rate of viscosity at room temperature for 4 weeks (%) = [(viscosity of sample after 4 weeks) - (viscosity of sample after preparation)] / (viscosity of sample after preparation) × 100

室溫4週黏度變化率根據下述基準進行評價。將結果示於表2。 The viscosity change rate at room temperature for 4 weeks was evaluated according to the following criteria. The results are shown in Table 2.

◎:黏度變化率為5%以下(保存穩定性「優良」) ◎: The viscosity change rate is 5% or less (storage stability is "excellent")

○:黏度變化率為10%以下(保存穩定性「良好」) ○: The viscosity change rate is 10% or less (storage stability is "good")

×:黏度變化率大於10%(保存穩定性「不良」) ×: The viscosity change rate is more than 10% (storage stability is "poor")

(積層體及單離膜之製作) (Production of laminated body and single film)

將各實施例及比較例中獲得之聚醯亞胺前驅體之清漆利用棒式塗佈機塗層於無鹼玻璃基板(厚度0.7mm)上。繼而,在室溫下進行調平5分鐘~10分鐘後,於熱風烘箱中在140℃下加熱60分鐘,進而在氮氣環境下在規定溫度下加熱60分鐘,製作出上述基板上具有塗膜之積層體。積層體中之塗膜之膜厚係以使固化後之膜厚成為20μm之方式設定。繼而,在規定溫度下進行固化(硬化處理)而使塗膜進行醯亞胺化。將固化後之積層體在室溫下放置24小時後,將聚醯亞胺膜自玻璃剝離,由此單離出膜。 The varnish of the polyimide precursor obtained in each of the examples and the comparative examples was coated on an alkali-free glass substrate (thickness: 0.7 mm) by a bar coater. Then, after leveling at room temperature for 5 minutes to 10 minutes, the film was heated at 140 ° C for 60 minutes in a hot air oven, and further heated at a predetermined temperature for 60 minutes in a nitrogen atmosphere to prepare a coating film on the substrate. Laminated body. The film thickness of the coating film in the laminate was set so that the film thickness after curing became 20 μm. Then, curing (hardening treatment) is carried out at a predetermined temperature to carry out oxime imidization of the coating film. After the cured laminate was allowed to stand at room temperature for 24 hours, the polyimide film was peeled off from the glass to thereby separate the film.

於以下之破斷強度、黃色度及線膨脹係數之評價中,使用該在規定溫度下進行固化之聚醯亞胺膜作為樣品。 The polyimine film which was cured at a predetermined temperature was used as a sample in the evaluation of the breaking strength, yellowness, and coefficient of linear expansion below.

(伸長率之評價) (Evaluation of elongation)

對在規定溫度下進行固化之寬度5mm、長度50mm、厚度20μm 之聚醯亞胺膜之樣品,使用拉伸試驗機(A&D股份有限公司製造:RTG-1210)以速度100mm/min進行拉伸測定。將破斷伸長率為20%以上之情形評價為◎(伸長率「優良」),將15%以上未達20%之情形評價為○(伸長率「良好」),將10%以上未達15%之情形評價為△(伸長率「不良」),將未達10%之情形評價為×(伸長率「惡劣」)。 The width of curing at a specified temperature is 5 mm, length 50 mm, thickness 20 μm A sample of the polyimide film was subjected to tensile measurement at a speed of 100 mm/min using a tensile tester (manufactured by A&D Co., Ltd.: RTG-1210). The case where the breaking elongation was 20% or more was evaluated as ◎ (the elongation was "excellent"), and when 15% or more was less than 20%, it was evaluated as ○ (elongation "good"), and 10% or more was less than 15 The case of % was evaluated as Δ (elongation "bad"), and the case where it was less than 10% was evaluated as × (elongation "bad").

(黃色度(YI值)之評價) (Evaluation of yellowness (YI value))

對在規定溫度下進行固化之厚度20μm之聚醯亞胺膜,利用日本電色工業(股)製造(Spectrophotometer:SE600)使用D65光源進行測定。將YI值為8.0以下之情形評價為◎(黃色度「優良」),將超過8.0且10.0以下之情形評價為○(黃色度「良好」),將超過10.0且15.0以下之情形評價為△(黃色度「不良」),將超過15.0之情形評價為×(黃色度「惡劣」)。 The polyimine film having a thickness of 20 μm which was cured at a predetermined temperature was measured by a D65 light source manufactured by Nippon Denshoku Industries Co., Ltd. (Spectrophotometer: SE600). When the YI value was 8.0 or less, it was evaluated as ◎ (yellowness is "excellent"), and when it is more than 8.0 and 10.0 or less, it is evaluated as ○ (yellowness is "good"), and when it is more than 10.0 and 15.0 or less, it is evaluated as Δ ( The yellowness is "poor", and the case where it exceeds 15.0 is evaluated as × (yellowness is "bad").

(線膨脹係數(CTE)之評價) (Evaluation of coefficient of linear expansion (CTE))

對在規定溫度下進行固化之聚醯亞胺膜,使用島津製作所製造之熱機械分析裝置(TMA-50),藉由熱機械分析,在以下之條件下進行試驗片伸長率之測定。 The polyimine film which was cured at a predetermined temperature was subjected to thermomechanical analysis using a thermomechanical analyzer (TMA-50) manufactured by Shimadzu Corporation, and the elongation of the test piece was measured under the following conditions.

荷重:5g Load: 5g

升溫速度:10℃/min Heating rate: 10 ° C / min

測定氣體環境:氮氣環境 Measuring gas environment: nitrogen environment

氮氣流量:20ml/min Nitrogen flow rate: 20ml/min

測定溫度範圍:50~450℃ Measuring temperature range: 50~450°C

求出此時之100~300℃之溫度範圍內之聚醯亞胺膜之CTE,將CTE為20ppm/℃以下之情形評價為◎(CTE「優良」),將超過20ppm/℃且25ppm/℃以下之情形評價為○(CTE「良好」),將超過25ppm/℃且30ppm/℃以下之情形評價為△(CTE「不良」),將超過30ppm/℃之情形評價為×(CTE「惡劣」)。 The CTE of the polyimine film in the temperature range of 100 to 300 ° C at this time was determined, and the case where the CTE was 20 ppm/° C. or less was evaluated as ◎ (CTE "excellent"), and it was more than 20 ppm/° C. and 25 ppm/° C. In the following cases, it was evaluated as ○ (CTE "good"), and when it was more than 25 ppm/°C and 30 ppm/°C or less, it was evaluated as Δ (CTE "poor"), and when it exceeded 30 ppm/°C, it was evaluated as × (CTE "bad" ).

(形成於聚醯亞胺膜上之無機膜之表面粗糙度之測定) (Measurement of surface roughness of inorganic film formed on polyimide film)

使用上述實施例及比較例中分別製備之組合物清漆,如下所述形成在表面上設置有鋁蒸鍍層之6英吋矽晶圓基板上依序積層有聚醯亞胺膜及無機膜之積層體晶圓。 Using the composition varnish prepared in the above examples and comparative examples, a laminate of a polyimide film and an inorganic film was sequentially formed on a 6-inch wafer substrate having an aluminum vapor-deposited layer on the surface as described below. Body wafer.

首先,於上述基板上旋轉塗佈各組合物清漆後,利用熱風烘箱在140℃下加熱60分鐘,進而在氮氣環境下,在320℃下加熱60分鐘,由此獲得包含膜厚20μm之聚醯亞胺膜之晶圓。 First, each composition varnish was spin-coated on the above substrate, and then heated at 140 ° C for 60 minutes in a hot air oven, and further heated at 320 ° C for 60 minutes in a nitrogen atmosphere, thereby obtaining a polyfluorene having a film thickness of 20 μm. A film of an imide film.

其後,於上述中形成之聚醯亞胺膜上,利用CVD法於350℃下以100nm之厚度形成作為無機膜之氮化矽(SiNx)膜。其次,對所形成之氮化矽之表面粗糙度,使用作為AFM(Atomic Force Microscopy,原子力顯微鏡)之Nanopics 2100(SII Nanotechnology公司製造,商品名),以100μm×100μm之尺度進行測定。試驗進行N=5,獲取其平均值而設為表面粗糙度Ra。 Thereafter, on the polyimide film formed above, a tantalum nitride (SiN x ) film as an inorganic film was formed by a CVD method at a thickness of 100 nm at 350 °C. Next, the surface roughness of the formed tantalum nitride was measured on a scale of 100 μm × 100 μm using Nanopics 2100 (manufactured by SII Nanotechnology Co., Ltd.) as an AFM (Atomic Force Microscopy). The test was carried out with N = 5, and the average value was obtained to set the surface roughness Ra.

將結果示於表2。 The results are shown in Table 2.

(Haze之評價) (Haze's review)

將上述中獲得之積層體晶圓浸漬於稀鹽酸水溶液中,並將無機膜及聚醯亞胺膜之二層作為一體自晶圓剝離,由此獲得表面上形成有無機膜的聚醯亞胺膜之樣品。使用該樣品,利用Suga試驗機公司製造之SC-3H型測霧計,依據JIS K7105透明度試驗法測定Haze。 The laminate wafer obtained above is immersed in a dilute hydrochloric acid aqueous solution, and the inorganic film and the polyimide film are peeled off from the wafer as a unit, thereby obtaining a polyimide film having an inorganic film formed on the surface thereof. A sample of the membrane. Using this sample, Haze was measured in accordance with the JIS K7105 transparency test method using an SC-3H type mist meter manufactured by Suga Test Machine Co., Ltd.

測定結果根據下述基準進行評價。 The measurement results were evaluated based on the following criteria.

◎:Haze為5以下(Haze「優良」) ◎: Haze is 5 or less (Haze "Excellent")

○:Haze大於5且15以下(Haze「良好」) ○: Haze is greater than 5 and 15 or less (Haze "good")

×:Haze大於15(Haze「不良」) ×: Haze is greater than 15 (Haze "bad")

將結果示於表2。 The results are shown in Table 2.

(水蒸氣透過率之評價) (Evaluation of water vapor transmission rate)

對上述中獲得之表面上形成有無機膜的聚醯亞胺膜之水蒸氣透 過率,使用膜康(MOCON)公司製造之水蒸氣透過率測定裝置(機種名:PERMATRAN(註冊商標)W3/31),在溫度40℃、濕度90%RH及測定面積80mm之條件下進行測定。設定測定次數為各5次,將其平均值設為水蒸氣透過率,並根據下述基準進行評價。 For the water vapor transmission rate of the polyimide film having an inorganic film formed on the surface obtained above, a water vapor transmission rate measuring device manufactured by MOCON Co., Ltd. (model name: PERMATRAN (registered trademark) W3/31 was used. ), at a temperature of 40 ° C, a humidity of 90% RH and a measurement area of 80 mm The measurement was carried out under the conditions. The number of times of measurement was set to 5 times each, and the average value was set to the water vapor transmission rate, and it evaluated based on the following criteria.

◎:水蒸氣透過率為0.01g/(m2‧24h)以下(水蒸氣透過率「優良」) ◎: The water vapor transmission rate is 0.01 g/(m 2 ‧24 h) or less (the water vapor transmission rate is "excellent")

○:水蒸氣透過率大於0.01g/(m2‧24h)且0.1g/(m2‧24h)以下(水蒸氣透過率「良好」) ○: The water vapor transmission rate is more than 0.01 g/(m 2 ‧24 h) and 0.1 g/(m 2 ‧24 h) or less (the water vapor transmission rate is "good")

×:水蒸氣透過率大於0.1g/(m2‧24h)(水蒸氣透過率「不良」) ×: The water vapor transmission rate is more than 0.1 g/(m 2 ‧24 h) (the water vapor transmission rate is "poor")

將結果示於表2。 The results are shown in Table 2.

[參考例1] [Reference Example 1]

在氮氣環境下,於500ml可分離式燒瓶內放入2,2'-雙(三氟甲基)聯苯胺(TFMB)15.69g(49.00mmol)及N-甲基-2-吡咯啶酮(NMP)178.95g,在攪拌下溶解TFMB。其後,添加均苯四甲酸二酐(PMDA)1.09g(5.0mmol)、4,4'-氧二鄰苯二甲酸二酐(ODPA)3.10g(10.0mmol)及1,2,3,4-環丁烷四羧酸二酐(CBDA)6.86g(35.0mmol),在80℃下攪拌4小時,由此獲得聚醯胺酸之NMP溶液(以下,亦稱為「清漆」)。所獲得之聚醯胺酸之重量平均分子量(Mw)為116,500。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 2,2'-bis(trifluoromethyl)benzidine (TFMB) 15.69 g (49.00 mmol) and N-methyl-2-pyrrolidone (NMP) were placed in a 500 ml separable flask under a nitrogen atmosphere. 178.95 g, TFMB was dissolved under stirring. Thereafter, pyromellitic dianhydride (PMDA) 1.09 g (5.0 mmol), 4,4'-oxydiphthalic dianhydride (ODPA) 3.10 g (10.0 mmol) and 1,2,3,4 were added. - 6.68 g (35.0 mmol) of cyclobutane tetracarboxylic dianhydride (CBDA), and stirred at 80 ° C for 4 hours, thereby obtaining a polyacrylic acid NMP solution (hereinafter also referred to as "varnish"). The weight average molecular weight (Mw) of the obtained polyamic acid was 116,500. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[參考例2] [Reference Example 2]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP180.42g、PMDA3.27g(15.0mmol)、ODPA3.10g(10.0mmol)及CBDA4.90g(25.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為120,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB 15.69 g (49.0 mmol), NMP 180.42 g, PMDA 3.27 g (15.0 mmol), ODPA 3.10 g (10.0 mmol), and CBDA 4.90 g (25.0 mmol), and the others were A varnish was obtained in the same manner as in Reference Example 1. The weight average molecular weight (Mw) of the obtained polyamic acid was 120,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[參考例3] [Reference Example 3]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP186.58g、PMDA1.09g(5.00mmol)、ODPA6.20g(20.0mmol)及CBDA4.90g(25.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為128,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB 15.69 g (49.0 mmol), NMP 186.58 g, PMDA 1.09 g (5.00 mmol), ODPA 6.20 g (20.0 mmol), and CBDA 4.90 g (25.0 mmol), except for A varnish was obtained in the same manner as in Reference Example 1. The weight average molecular weight (Mw) of the obtained polyamic acid was 128,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[實施例4] [Example 4]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加1,2,4,5-環己烷四羧酸二酐(H-PMDA)2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。繼而,將燒瓶內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP168.43g、PMDA6.54g(30.0mmol)及ODPA3.10g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為82,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA) was added, and after refluxing at 180 ° C for 2 hours, it was removed as an azeotropic solvent for 3 hours. Toluene. Then, after cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 16.43 g of NMP, 6.54 g (30.0 mmol) of PMDA, and 3.10 g (10.0 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of the polyimine-polyamide polymer was thus obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 82,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[參考例5] [Reference Example 5]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP178.14g、PMDA5.45g(25.0mmol)、ODPA1.55g(5.0mmol)及CBDA3.92g(20mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為119,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feeding of the raw materials was changed to TFMB 15.69 g (49.0 mmol), NMP 178.14 g, PMDA 5.45 g (25.0 mmol), ODPA 1.55 g (5.0 mmol), and CBDA 3.92 g (20 mmol), and the rest was used for reference. A varnish was obtained in the same manner as in Example 1. The weight average molecular weight (Mw) of the obtained polyamic acid was 119,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[參考例6] [Reference Example 6]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP187.38g、PMDA2.18g(10.0mmol)、ODPA6.20g(20.0mmol)及CBDA3.92g(20.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得 之聚醯胺酸之重量平均分子量(Mw)為123,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB 15.69 g (49.0 mmol), NMP 187.38 g, PMDA 2.18 g (10.0 mmol), ODPA 6.20 g (20.0 mmol), and CBDA 3.92 g (20.0 mmol), and the others were A varnish was obtained in the same manner as in Reference Example 1. Obtained The polyamine has a weight average molecular weight (Mw) of 123,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[參考例7] [Reference Example 7]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP175.19g、PMDA1.09g(5.0mmol)、ODPA1.55g(5.0mmol)及CBDA7.84g(40.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為123,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB 15.69 g (49.0 mmol), NMP 175.19 g, PMDA 1.09 g (5.0 mmol), ODPA 1.55 g (5.0 mmol), and CBDA 7.84 g (40.0 mmol), except for A varnish was obtained in the same manner as in Reference Example 1. The weight average molecular weight (Mw) of the obtained polyamic acid was 123,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[參考例8] [Reference Example 8]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP189.59g、PMDA5.45g(25.0mmol)、ODPA6.20g(20.0mmol)及CBDA0.98g(5.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為103,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feeding of the raw materials was changed to TFMB 15.69 g (49.0 mmol), NMP 189.59 g, PMDA 5.45 g (25.0 mmol), ODPA 6.20 g (20.0 mmol), and CBDA 0.98 g (5.0 mmol), and the others were A varnish was obtained in the same manner as in Reference Example 1. The weight average molecular weight (Mw) of the obtained polyamic acid was 103,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[實施例9] [Embodiment 9]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP171.51g、PMDA5.45g(25.0mmol)及ODPA4.65g(15.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為123,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 171.51 g of NMP, 5.45 g (25.0 mmol) of PMDA, and 4.65 g (15.0 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 123,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例10] [Embodiment 10]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環 境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP174.59g、PMDA4.36g(20.0mmol)及ODPA6.20g(20.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為81,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark unit and a reflux unit, in a nitrogen ring Under the conditions, TFMB 3.14 g (9.8 mmol), NMP 16.14 g and toluene 50 g were placed, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 174.59 g of NMP, 4.36 g (20.0 mmol) of PMDA, and 6.20 g (20.0 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 81,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例11] [Example 11]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB6.28g(19.6mmol)、NMP32.28g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA4.48g(20.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB9.42g(29.4mmol)、NMP76.44g、PMDA5.45g(25.0mmol)及ODPA1.55g(5.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合組合物之重量平均分子量(Mw)為68,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 6.28 g (19.6 mmol), NMP 32.28 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 4.48 g (20.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, TFMB 9.42 g (29.4 mmol), NMP 76.44 g, PMDA 5.45 g (25.0 mmol) and ODPA 1.55 g (5.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The obtained polyamidene-polyglycine polymerization composition had a weight average molecular weight (Mw) of 68,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例12] [Embodiment 12]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB6.28g(19.6mmol)、NMP32.28g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA4.48g(20.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB9.42g(29.4mmol)、NMP78.28g、PMDA4.36g(20.0mmol)及ODPA3.10g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺- 聚醯胺酸聚合物之重量平均分子量(Mw)為68,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 6.28 g (19.6 mmol), NMP 32.28 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 4.48 g (20.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, TFMB 9.42 g (29.4 mmol), NMP 78.28 g, PMDA 4.36 g (20.0 mmol) and ODPA 3.10 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. Polyimine obtained - The polyamine polymer had a weight average molecular weight (Mw) of 68,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例13] [Example 13]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB0.63g(1.96mmol)、NMP3.22g及甲苯30g,在攪拌下溶解TFMB。於此,添加H-PMDA0.45g(2.00mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB15.06g(47.0mmol)、NMP186.57g、PMDA6.33g(29.0mmol)及ODPA5.89g(19.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為112,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux apparatus, TFMB 0.63 g (1.96 mmol), NMP 3.22 g, and toluene 30 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.45 g (2.00 mmol) of H-PMDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. After cooling the contents of the flask to 40 ° C, 15.06 g (47.0 mmol) of TFMB, 186.57 g of NMP, 6.33 g (29.0 mmol) of PMDA, and 5.89 g (19.0 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 112,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例14] [Embodiment 14]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP166.88g、PMDA7.09g(32.5mmol)及ODPA2.33g(7.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合組合物之重量平均分子量(Mw)為79,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 166.88 g of NMP, 7.09 g (32.5 mmol) of PMDA, and 2.33 g (7.5 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The obtained polyamidene-polyglycine polymerization composition had a weight average molecular weight (Mw) of 79,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例15] [Example 15]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB9.42g(29.4mmol)、NMP48.42g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA6.78g(30.0mmol),在180℃下 回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB6.28g(19.6mmol)、NMP60.54g、PMDA3.27g(15.0mmol)及ODPA1.55g(5.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合組合物之重量平均分子量(Mw)為56,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux apparatus, TFMB 9.42 g (29.4 mmol), NMP 48.42 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 6.78g (30.0mmol) was added at 180 ° C After refluxing for 2 hours, toluene as an azeotropic solvent was removed over 3 hours. After cooling the contents of the flask to 40 ° C, TFMB 6.28 g (19.6 mmol), NMP 60.54 g, PMDA 3.27 g (15.0 mmol) and ODPA 1.55 g (5.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The obtained polyamidene-polyglycine polymerization composition had a weight average molecular weight (Mw) of 56,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例16] [Example 16]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.80mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP168.43g、PMDA4.36g(20.0mmol)、ODPA3.10g(10.0mmol)及CBDA1.96g(10.0mmol),在80℃下攪拌4小時,獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為71,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.80 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 16.43 g of NMP, 4.36 g (20.0 mmol) of PMDA, 3.10 g (10.0 mmol) of ODPA, and 1.96 g (10.0 mmol) of CBDA were added. The mixture was stirred at 80 ° C for 4 hours to obtain a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 71,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[參考例17] [Reference Example 17]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP162.24g、PMDA6.54g(30.0mmol)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)4.44g(10.0mmol)及CBDA1.96g(10mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之聚醯胺酸之重量平均分子量(Mw)為159,000。將在330℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB 15.69g (49.0mmol), NMP162.24g, PMDA6.54g (30.0mmol), 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA) 4.44. A varnish was obtained in the same manner as in Reference Example 1, except that g (10.0 mmol) and CBDA 1.96 g (10 mmol) were used. The weight average molecular weight (Mw) of the obtained polyamic acid was 159,000. The CTE, YI value and elongation of the film cured at 330 ° C are shown in Table 2 below.

[實施例18] [Embodiment 18]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環 境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加1,2,4,5-環己烷四羧酸二酐(H-PMDA)2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP147.70g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為85,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark unit and a reflux unit, in a nitrogen ring Under the conditions, TFMB 3.14 g (9.8 mmol), NMP 16.14 g and toluene 50 g were placed, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA) was added, and after refluxing at 180 ° C for 2 hours, it was removed as an azeotropic solvent for 3 hours. Toluene. After cooling the contents of the flask to 40 ° C, 12.55 g (39.2 mmol) of TFMB, 147.70 g of NMP, 6.54 g (30.0 mmol) of PMDA, and 4.44 g (10.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 85,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[實施例19] [Embodiment 19]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由紅外分光分析(IR)確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,於燒瓶內添加TFMB12.55g(39.2mmol)、NMP153.4g、PMDA5.45g(25.0mmol)及6FDA6.66g(15.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為88,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by infrared spectroscopic analysis (IR) that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 153.4 g of NMP, 15.4 g (25.0 mmol) of PMDA, and 6.660 g (15.0 mmol) of 6FDA were added to the flask, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine. - varnish of polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 88,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例20] [Example 20]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消 失。其後,添加TFMB12.55g(39.2mmol)、NMP159.8g、PMDA4.36g(20.0mmol)及6FDA8.88g(20.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為86,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 159.8 g of NMP, 4.36 g (20.0 mmol) of PMDA, and 8.FDA (80.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 86,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例21] [Example 21]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB6.28g(19.6mmol)、NMP32.28g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA4.48g(20.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB9.42g(29.4mmol)、NMP124.9g、PMDA5.45g(25.0mmol)及6FDA2.22g(5.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為76,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 6.28 g (19.6 mmol), NMP 32.28 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 4.48 g (20.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 9.42 g (29.4 mmol), NMP 124.9 g, PMDA 5.45 g (25.0 mmol), and 6FDA 2.22 g (5.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 76,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例22] [Example 22]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB6.28g(19.6mmol)、NMP32.28g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA4.48g(20.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB9.42g(29.4mmol)、NMP131.3g、PMDA4.36g(20.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為77,000。將於350℃下進行固化之膜 之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 6.28 g (19.6 mmol), NMP 32.28 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 4.48 g (20.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 9.42 g (29.4 mmol), NMP 131.3 g, PMDA 4.36 g (20.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 77,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例23] [Example 23]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.45g(2.00mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP158.3g、PMDA6.33g(29.0mmol)及6FDA8.44g(19.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為89,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.45 g (2.00 mmol) of H-PMDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 158.3 g of NMP, 6.33 g (29.0 mmol) of PMDA, and 8.84 g (19.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 89,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例24] [Example 24]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP143.9g、PMDA7.09g(32.5mmol)及6FDA3.33g(7.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為89,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) in the vicinity of 1650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 143.9 g of NMP, 7.09 g (32.5 mmol) of PMDA, and 3.33 g (7.5 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 89,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例25] [Example 25]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB9.42g(29.4mmol)、NMP48.42g及甲苯50g,在攪 拌下溶解TFMB。於此,添加H-PMDA6.78g(30.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB6.28g(19.6mmol)、NMP109.5g、PMDA3.27g(15.0mmol)及6FDA2.22g(5.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為75,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux apparatus, TFMB 9.42 g (29.4 mmol), NMP 48.42 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 6.78 g (30.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 6.28 g (19.6 mmol), NMP 109.5 g, PMDA 3.27 g (15.0 mmol), and 6FDA 2.22 g (5.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyamidene-polyglycine polymer had a weight average molecular weight (Mw) of 75,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例26] [Example 26]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP153.5g、PMDA3.27g(15.0mmol)、BPDA4.41g(15.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為87,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 153.5 g, PMDA 3.27 g (15.0 mmol), BPDA 4.41 g (15.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 87,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例27] [Example 27]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP143.3g、PMDA6.54 g(30.0mmol)、ODPA1.55g(5.0mmol)及6FDA2.22g(5.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為86,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 143.3 g, PMDA 6.54 g (30.0 mmol), ODPA 1.55 g (5.0 mmol), and 6FDA 2.22 g (5.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. This gave a varnish of a polyamidene-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 86,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例28] [Example 28]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA1.12g(5.0mmol)、CBDA0.98g(5.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP146.3g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為90,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 1.12 g (5.0 mmol) and CBDA 0.98 g (5.0 mmol) were added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 146.3 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyimine-polyamide polymer had a weight average molecular weight (Mw) of 90,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例29] [Example 29]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.34g(1.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP147g、PMDA6.54g(30.0mmol)、6FDA4.44g(10.0mmol)及H-PMDA1.9g(8.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為71,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.34 g (1.5 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 147 g of NMP, 6.54 g (30.0 mmol) of PMDA, 4.44 g (10.0 mmol) of 6FDA, and 1.9 g (8.5 mmol) of H-PMDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 71,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例30] [Example 30]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.56g(2.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP147g、PMDA6.54g(30.0mmol)、6FDA4.44g(10.0mmol)及H-PMDA1.68g(7.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為75,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.56 g (2.5 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 147 g of NMP, 6.54 g (30.0 mmol) of PMDA, 4.44 g (10.0 mmol) of 6FDA, and 1.68 g (7.5 mmol) of H-PMDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The obtained polyamidene-polyglycine polymer had a weight average molecular weight (Mw) of 75,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例31] [Example 31]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.78g(3.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP147g、PMDA6.54g(30.0mmol)、6FDA4.44g(10.0mmol)及H-PMDA1.46g(6.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為78,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.78 g (3.5 mmol) of H-PMDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 147 g of NMP, 6.54 g (30.0 mmol) of PMDA, 4.44 g (10.0 mmol) of 6FDA, and 1.46 g (6.5 mmol) of H-PMDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 78,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例32] [Example 32]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.62g(2.75mmol),在180℃下回 流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP153.3g、PMDA6.54g(30.0mmol)、6FDA6.66g(15.0mmol)及H-PMDA0.5g(2.25mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為80,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.62 g (2.75 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 153.3 g, PMDA 6.54 g (30.0 mmol), 6FDA 6.66 g (15.0 mmol), and H-PMDA 0.5 g (2.25 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of the polyimine-polyamide polymer was thus obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 80,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例33] [Example 33]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA1.68g(7.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP160.1g、PMDA6.54g(30.0mmol)、6FDA2.22g(5.0mmol)及H-PMDA5.1g(22.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為71,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 1.68 g (7.5 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 160.1 g of NMP, 6.54 g (30.0 mmol) of PMDA, 2.12 g (5.0 mmol) of FDA, and 5.1 g (22.5 mmol) of H-PMDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of the polyimine-polyamide polymer was thus obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 71,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例34] [Example 34]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA1.96g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP166.5g、PMDA6.54g(30.0mmol)及ODPA3.10g(10.0mmol),在80℃下攪拌4小時,由此 獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為120,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, CBDA 1.96 g (10.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 166.5 g of NMP, 6.54 g (30.0 mmol) of PMDA, and 3.10 g (10.0 mmol) of ODPA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyamidene-polyaminic acid polymer had a weight average molecular weight (Mw) of 120,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例35] [Example 35]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA0.98g(5.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP191.3g、PMDA5.45g(25.0mmol)及6FDA8.88g(20.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為95,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.98 g (5.0 mmol) of CBDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 191.3 g, PMDA 5.45 g (25.0 mmol), and 6FDA 8.88 g (20.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 95,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例36] [Example 36]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA1.96g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP175.5g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為100,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, CBDA 1.96 g (10.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 175.5 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyamidene-polyamide polymer had a weight average molecular weight (Mw) of 100,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例37] [Example 37]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB9.42g(29.4mmol)、NMP48.42g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA5.88g(30.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB6.28g(19.6mmol)、NMP169.5g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為100,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux apparatus, TFMB 9.42 g (29.4 mmol), NMP 48.42 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 5.88 g (30.0 mmol) of CBDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 6.28 g (19.6 mmol), NMP 169.5 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyamidene-polyamide polymer had a weight average molecular weight (Mw) of 100,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例38] [Example 38]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA0.29g(1.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP175.5g、PMDA6.54g(30.0mmol)、6FDA4.44g(10.0mmol)及CBDA1.67g(8.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為95,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.29 g (1.5 mmol) of CBDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 175.5 g of NMP, 6.54 g (30.0 mmol) of PMDA, 4.44 g (10.0 mmol) of 6FDA, and 1.67 g (8.5 mmol) of CBDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 95,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例39] [Example 39]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA0.53g(2.75mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至 40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP183.8g、PMDA6.54g(30.0mmol)、6FDA6.66g(15.0mmol)及CBDA0.45g(2.25mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為80,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.53 g (2.75 mmol) of CBDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 183.8 g of NMP, 6.54 g (30.0 mmol) of PMDA, 6.66 g (15.0 mmol) of 6FDA, and 0.45 g (2.25 mmol) of CBDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 80,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例40] [Embodiment 40]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CBDA1.47g(7.5mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP186.8g、PMDA6.54g(30.0mmol)、6FDA2.22g(5.0mmol)及CBDA4.41g(22.5mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為91,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 1.47 g (7.5 mmol) of CBDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 186.8 g, PMDA 6.54 g (30.0 mmol), 6FDA 2.22 g (5.0 mmol), and CBDA 4.41 g (22.5 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 91,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例41] [Example 41]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP160g、BPDA8.83g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸 聚合物之重量平均分子量(Mw)為86,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 160 g, BPDA 8.83 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyproline. Polymer varnish. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 86,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例42] [Example 42]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失後,放入TFMB12.55g(39.2mmol)、NMP147.8g、PMDA6.54g(30.0mmol)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)(TAHQ)4.58g(10.0mmol)放入在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為84,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The content of the flask was cooled to 40° C., and it was confirmed by IR that the absorption (C=O) in the vicinity of 1,650 cm −1 derived from the indole bond disappeared, and then TFMB 12.55 g (39.2 mmol) and NMP 147.8 g were placed. PMDA 6.54 g (30.0 mmol) and 4,4'-biphenyl bis(trimellitic acid monoester anhydride) (TAHQ) 4.58 g (10.0 mmol) were placed at 80 ° C for 4 hours, thereby obtaining polyazide. A varnish of an amine-polyaminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 84,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例43] [Example 43]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加CPDA2.1g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP146.3g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為71,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.1 g (10.0 mmol) of CPDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 146.3 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 71,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例44] [Example 44]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環 境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-BPDA3.06g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP151.7g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為73,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 3.06 g (10.0 mmol) of H-BPDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 151.7 g of NMP, 15.4 g (30.0 mmol) of PMDA, and 4. 4 g (10.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 73,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例45] [Example 45]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加BCDA2.36g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP147.7g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為75,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, BCDA 2.36 g (10.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, TFMB 12.55 g (39.2 mmol), NMP 147.7 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The obtained polyamidene-polyglycine polymer had a weight average molecular weight (Mw) of 75,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例46] [Example 46]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐(BOTDA)2.48g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認 源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP148.4g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為74,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride (BOTDA) 2.48 g (10.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, 3 The toluene as an azeotropic solvent was removed in an hour. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 148.4 g of NMP, 6.54 g (30.0 mmol) of PMDA, and 4. 4 g (10.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 74,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例47] [Example 47]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入2,2'-二甲基聯苯-4,4'-二胺(mTB)2.08g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解mTB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加mTB8.32g(39.2mmol)、NMP117.2g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為82,000。將於350℃下進行固化之膜之評價結果示於表2。 2,2'-Dimethylbiphenyl-4,4'-diamine (mTB) 2.08 g (9.8 mmol) was placed in a separable flask equipped with a Dean Stark apparatus and a reflux apparatus under a nitrogen atmosphere. NMP16.14g and toluene 50g were dissolved in mTB under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, mTB 8.32 g (39.2 mmol), NMP 117.2 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 82,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例48] [Example 48]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入4,4'-二胺基苯醯替苯胺(DABA)2.23g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解DABA。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加DABA8.91g(39.2mmol)、NMP121.4g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚 合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為83,000。將於350℃下進行固化之膜之評價結果示於表2。 4,4'-diaminophenyl benzoanilide (DABA) 2.23 g (9.8 mmol), NMP 16.14 g and toluene were placed in a separable flask equipped with a Dean Stark apparatus and a reflux apparatus under a nitrogen atmosphere. 50 g, dissolved DABA with stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, DABA 8.91 g (39.2 mmol), NMP 121.4 g, PMDA 6.54 g (30.0 mmol), and 6FDA 4.44 g (10.0 mmol) were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 83,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例49] [Example 49]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入4-胺基苯甲酸4-胺基苯酯(APAB)2.24g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解APAB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加APAB8.95g(39.2mmol)、NMP121.6g、PMDA6.54g(30.0mmol)及6FDA4.44g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為82,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux reactor, 4-aminophenyl 4-aminobenzoate (APAB) 2.24 g (9.8 mmol), NMP 16.14 g and toluene were placed under a nitrogen atmosphere. 50 g, APAB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 8.75 g (39.2 mmol) of APAB, 12.6 g of NMP, 12.6 g of NMP (30.0 mmol), and 6.FDA (40.0 mmol) of 6FDA were added, and the mixture was stirred at 80 ° C for 4 hours to obtain a polyimine-polyfluorene. A varnish of aminic acid polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 82,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[實施例50] [Example 50]

於實施例9中獲得之聚醯亞胺-聚醯胺酸聚合物之清漆中,溶解相對於樹脂100重量份為0.5重量份換算之烷氧基矽烷化合物1(ROSi1),並利用0.1μm之過濾器進行過濾,由此調製樹脂組合物。對該組合物及其硬化膜之特性,依據上述評價方法進行測定。將所獲得之結果示於表2。 In the varnish of the polyimine-polyamide polymer obtained in Example 9, the alkoxydecane compound 1 (ROSi1) was dissolved in an amount of 0.5 part by weight based on 100 parts by weight of the resin, and 0.1 μm was used. The filter was filtered to thereby prepare a resin composition. The characteristics of the composition and the cured film thereof were measured in accordance with the above evaluation method. The results obtained are shown in Table 2.

[實施例51] [Example 51]

於實施例19中獲得之聚醯亞胺-聚醯胺酸聚合物之清漆中,溶解相對於樹脂100重量份為0.5重量份換算之烷氧基矽烷化合物1,並利用0.1μm之過濾器進行過濾,由此調製樹脂組合物。對該組合物及其硬化膜之特性,依據上述評價方法進行測定。將所獲得之結果示於表2。 In the varnish of the polyimine-polyamide polymer obtained in Example 19, the alkoxydecane compound 1 was dissolved in an amount of 0.5 part by weight based on 100 parts by weight of the resin, and was filtered using a 0.1 μm filter. Filtration, thereby preparing a resin composition. The characteristics of the composition and the cured film thereof were measured in accordance with the above evaluation method. The results obtained are shown in Table 2.

[實施例52] [Example 52]

於實施例9中獲得之聚醯亞胺-聚醯胺酸聚合物之清漆中,溶解相對於樹脂100重量份為0.05重量份換算之界面活性劑1(Surf1),並利用0.1μm之過濾器進行過濾,由此調製樹脂組合物。對該組合物及其硬化膜之特性,依據上述評價方法進行測定。將所獲得之結果示於表2。 In the varnish of the polyimine-polyamide polymer obtained in Example 9, the surfactant 1 (Surf1) was dissolved in an amount of 0.05 part by weight based on 100 parts by weight of the resin, and a filter of 0.1 μm was used. Filtration was carried out to thereby prepare a resin composition. The characteristics of the composition and the cured film thereof were measured in accordance with the above evaluation method. The results obtained are shown in Table 2.

[實施例53] [Example 53]

於實施例19中獲得之聚醯亞胺-聚醯胺酸聚合物之清漆中,溶解相對於樹脂100重量份為0.05重量份換算之界面活性劑1,並利用0.1μm之過濾器進行過濾,由此調製樹脂組合物。對該組合物及其硬化膜之特性,依據上述評價方法進行測定。將所獲得之結果示於表2。 In the varnish of the polyimine-polyamide polymer obtained in Example 19, the surfactant 1 was dissolved in an amount of 0.05 part by weight based on 100 parts by weight of the resin, and filtered using a 0.1 μm filter. The resin composition was thus prepared. The characteristics of the composition and the cured film thereof were measured in accordance with the above evaluation method. The results obtained are shown in Table 2.

[比較例1] [Comparative Example 1]

將原料之饋入變更為TFMB14.39g(44.9mmol)、NMP163.23g、PMDA10.0g(45.8mmol)、ODPA0g(0mmol)及CBDA0g(0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中之聚醯胺酸之重量平均分子量(Mw)為47,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feed was changed to TFMB 14.39 g (44.9 mmol), NMP 163.23 g, PMDA 10.0 g (45.8 mmol), ODPA0g (0 mmol), and CBDA0g (0 mmol), except for the same manner as Reference Example 1. Get varnish. The weight average molecular weight (Mw) of the polyamic acid in the obtained varnish was 47,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例2] [Comparative Example 2]

將原料之饋入變更為TFMB10.12g(31.6mmol)、NMP134.65g、PMDA0g(0mmol)、ODPA10.0g(32.2mmol)及CBDA0g(0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中之聚醯胺酸之重量平均分子量(Mw)為65,500。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feed was changed to TFMB 10.12 g (31.6 mmol), NMP 134.65 g, PMDA0g (0 mmol), ODPA 10.0 g (32.2 mmol), and CBDA0g (0 mmol), except for the same manner as Reference Example 1. Get varnish. The weight average molecular weight (Mw) of the polyamic acid in the obtained varnish was 65,500. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例3] [Comparative Example 3]

將原料之饋入變更為TFMB16.00g(50.0mmol)、NMP174.00g、PMDA0g(0mmol)、ODPA0g(0mmol)及CBDA10.00g(51.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中之聚醯胺酸之重量平均分子量(Mw)為221,000。將在330℃下進行固化 之膜之CTE、YI值及伸長率示於以下之表2。 The feed was changed to TFMB of 16.00 g (50.0 mmol), NMP of 174.00 g, PMDA0g (0 mmol), ODPA0g (0 mmol), and CBDA of 10.00 g (51.0 mmol), except for the same manner as in Reference Example 1. Get varnish. The weight average molecular weight (Mw) of the polyamic acid in the obtained varnish was 221,000. Will cure at 330 ° C The CTE, YI value and elongation of the film are shown in Table 2 below.

[比較例4] [Comparative Example 4]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB14.00g(43.7mmol)、NMP160.62g及甲苯50g,在攪拌下溶解TFMB。於其中添加H-PMDA10.00g(44.6mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。其後,將燒瓶之內容物冷卻至室溫為止,由此獲得聚醯亞胺之清漆。所獲得之清漆中之聚醯亞胺之重量平均分子量(Mw)為50,600。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 14.00 g (43.7 mmol), NMP 160.62 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. 10.00 g (44.6 mmol) of H-PMDA was added thereto, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed over 3 hours. Thereafter, the contents of the flask were cooled to room temperature, whereby a varnish of polyimine was obtained. The weight average molecular weight (Mw) of the polyimine in the obtained varnish was 50,600. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例5] [Comparative Example 5]

將原料之饋入變更為TFMB8.79g(27.4mmol)、NMP60.6g、PMDA5.50g(25.2mmol)及ODPA0.87g(2.8mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中所含之聚合物之重量平均分子量(Mw)為47,000。將於350℃下進行固化之膜之CTE、YI值及破斷強度示於以下之表2。 A varnish was obtained in the same manner as in Reference Example 1, except that the feed was changed to TFMB 8.79 g (27.4 mmol), NMP 60.6 g, PMDA 5.50 g (25.2 mmol), and ODPA 0.87 g (2.8 mmol). . The weight average molecular weight (Mw) of the polymer contained in the obtained varnish was 47,000. The CTE, YI value and breaking strength of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例6] [Comparative Example 6]

將原料之饋入變更為TFMB16.44g(51.3mmol)、NMP184.18g、PMDA8.00g(36.7mmol)、ODPA0g(0mmol)及CBDA3.08g(15.7mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中所含之聚合物之重量平均分子量(Mw)為121,900。將在330℃下進行固化之膜之CTE、YI值及破斷強度示於以下之表2。 The feeding of the raw materials was changed to TFMB 16.44 g (51.3 mmol), NMP 184.18 g, PMDA 8.00 g (36.7 mmol), ODPA0g (0 mmol), and CBDA 3.08 g (15.7 mmol), except for the reference example 1 The varnish is obtained in the same manner. The weight average molecular weight (Mw) of the polymer contained in the obtained varnish was 121,900. The CTE, YI value and breaking strength of the film cured at 330 ° C are shown in Table 2 below.

[比較例7] [Comparative Example 7]

將原料之饋入變更為TFMB14.17g(44.2mmol)、NMP171.31g、PMDA0g(0mmol)、ODPA7.00g(22.6mmol)及CBDA4.43g(22.6mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆之重量平均分子量(Mw)為105,000。將在330℃下進行固化之膜 之CTE、YI值及破斷強度示於以下之表2。 The feeding of the raw materials was changed to TFMB 14.17 g (44.2 mmol), NMP 171.31 g, PMDA0g (0 mmol), ODPA 7.00 g (22.6 mmol), and CBDA 4.43 g (22.6 mmol), except for the reference example 1 The varnish is obtained in the same manner. The obtained varnish had a weight average molecular weight (Mw) of 105,000. Film that will cure at 330 ° C The CTE, YI value and breaking strength are shown in Table 2 below.

[比較例8] [Comparative Example 8]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP186.91g及ODPA12.41g(40.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為66,700。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40° C., 12.55 g (39.2 mmol) of TFMB, 186.91 g of NMP, and 12.41 g (40.0 mmol) of ODPA were added, and the mixture was stirred at 80° C. for 4 hours to obtain a polyimine-poly. A varnish of a proline polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 66,700. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例9] [Comparative Example 9]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP175.05g、PMDA6.54g(30.0mmol)、ODPA0g(0mmol)及CBDA3.92g(20.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中所含之聚合物之重量平均分子量(Mw)為91,200。將在330℃下進行固化之膜之CTE、YI值及破斷強度示於以下之表2。 The feeding of the raw materials was changed to TFMB 15.69 g (49.0 mmol), NMP 175.05 g, PMDA 6.54 g (30.0 mmol), ODPA0g (0 mmol), and CBDA 3.92 g (20.0 mmol), except for the reference example 1 The varnish is obtained in the same manner. The weight average molecular weight (Mw) of the polymer contained in the obtained varnish was 91,200. The CTE, YI value and breaking strength of the film cured at 330 ° C are shown in Table 2 below.

[比較例10] [Comparative Example 10]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA2.24g(10.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB12.55g(39.2mmol)、NMP162.26g及PMDA8.72g(40.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合組合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合組合物之重量平均分子量(Mw)為226,000。將於350℃下進行固化之膜之 CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 2.24 g (10.0 mmol) of H-PMDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40° C., 12.55 g (39.2 mmol) of TFMB, 162.26 g of NMP, and 8.72 g (40.0 mmol) of PMDA were added, and the mixture was stirred at 80° C. for 4 hours to obtain a polyimine-poly. A varnish of a proline acid polymerized composition. The obtained polyamidene-polyglycine polymerization composition had a weight average molecular weight (Mw) of 226,000. Cured film at 350 ° C The CTE, YI values and elongation are shown in Table 2 below.

[比較例11] [Comparative Example 11]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP193.54g、PMDA0g(0mmol)、ODPA9.31g(30.0mmol)及CBDA3.92g(20.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中所含之聚合物之重量平均分子量(Mw)為125,100。將在330℃下進行固化之膜之CTE、YI值及破斷強度示於以下之表2。 The feeding of the raw materials was changed to TFMB 15.69 g (49.0 mmol), NMP 193.54 g, PMDA0g (0 mmol), ODPA 9.31 g (30.0 mmol), and CBDA 3.92 g (20.0 mmol), except for the reference example 1 The varnish is obtained in the same manner. The weight average molecular weight (Mw) of the polymer contained in the obtained varnish was 125,100. The CTE, YI value and breaking strength of the film cured at 330 ° C are shown in Table 2 below.

[比較例12] [Comparative Example 12]

將原料之饋入變更為TFMB15.69g(49.0mmol)、NMP178.27g、PMDA0g(0mmol)、ODPA3.10g(10.0mmol)及CBDA7.84g(40.0mmol),除此以外,其餘以與參考例1相同之方式獲得清漆。所獲得之清漆中所含之聚合物之重量平均分子量(Mw)為120,900。將在330℃下進行固化之膜之CTE、YI值及破斷強度示於以下之表2。 The feeding of the raw materials was changed to TFMB 15.69 g (49.0 mmol), NMP 178.27 g, PMDA0g (0 mmol), ODPA 3.10 g (10.0 mmol), and CBDA 7.84 g (40.0 mmol), except for the reference example 1 The varnish is obtained in the same manner. The weight average molecular weight (Mw) of the polymer contained in the obtained varnish was 120,900. The CTE, YI value and breaking strength of the film cured at 330 ° C are shown in Table 2 below.

[比較例13] [Comparative Example 13]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB12.55g(39.2mmol)、NMP64.56g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA8.97g(40.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至40℃為止後,添加TFMB3.14g(9.8mmol)、NMP46.48g及ODPA3.1g(10.0mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為49,800。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux apparatus, TFMB 12.55 g (39.2 mmol), NMP 64.56 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, H-PMDA 8.97 g (40.0 mmol) was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. After cooling the contents of the flask to 40° C., TFMB 3.14 g (9.8 mmol), NMP 46.48 g, and ODPA 3.1 g (10.0 mmol) were added, and the mixture was stirred at 80° C. for 4 hours to obtain a polyimine-poly. A varnish of a proline polymer. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 49,800. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例14] [Comparative Example 14]

將原料之饋入變更為TFMB7.06g(22.0mmol)、NMP96.67g、PMDA0g(0mmol)及6FDA10.00g(22.5mmol),除此以外,其餘以與 參考例1相同之方式獲得清漆。所獲得之清漆中之聚醯胺酸之重量平均分子量(Mw)為110,000。將於350℃下進行固化之膜之CTE、YI值及伸長率示於以下之表2。 The feedstock was changed to TFMB7.06g (22.0mmol), NMP96.67g, PMDA0g (0mmol) and 6FDA10.00g (22.5mmol), except for A varnish was obtained in the same manner as in Reference Example 1. The weight average molecular weight (Mw) of the polyamic acid in the obtained varnish was 110,000. The CTE, YI value and elongation of the film which was cured at 350 ° C are shown in Table 2 below.

[比較例15] [Comparative Example 15]

在氮氣環境下,於500ml可分離式燒瓶內放入TFMB15.69g(49.00mmol)及NMP203.4g,在攪拌下溶解TFMB。繼而,添加BPDA14.71g(50.0mmol),在80℃下攪拌4小時,由此獲得聚醯胺酸之NMP溶液(清漆)。所獲得之聚醯胺酸之重量平均分子量(Mw)為49,000。將在330℃下進行固化之膜之評價結果示於表2。 Under a nitrogen atmosphere, 15.69 g (49.00 mmol) of TFMB and 203.4 g of NMP were placed in a 500 ml separable flask, and TFMB was dissolved under stirring. Then, 14.71 g (50.0 mmol) of BPDA was added, and the mixture was stirred at 80 ° C for 4 hours, thereby obtaining a NMP solution (varnish) of polyglycine. The weight average molecular weight (Mw) of the obtained polyamic acid was 49,000. The evaluation results of the film which was cured at 330 ° C are shown in Table 2.

[比較例16] [Comparative Example 16]

在氮氣環境下,於500ml可分離式燒瓶內放入TFMB15.69g(49.00mmol)及NMP258.4g,在攪拌下溶解TFMB。繼而,添加TAHQ22.92g(50.0mmol),在80℃下攪拌4小時,由此獲得聚醯胺酸之NMP溶液(清漆)。所獲得之聚醯胺酸之重量平均分子量(Mw)為64,000。將在330℃下進行固化之膜之評價結果示於表2。 Under a nitrogen atmosphere, 15.69 g (49.00 mmol) of TFMB and 258.4 g of NMP were placed in a 500 ml separable flask, and TFMB was dissolved under stirring. Then, 22.92 g (50.0 mmol) of TAHQ was added, and the mixture was stirred at 80 ° C for 4 hours to obtain a NMP solution (varnish) of polylysine. The weight average molecular weight (Mw) of the obtained polyamic acid was 64,000. The evaluation results of the film which was cured at 330 ° C are shown in Table 2.

[比較例17] [Comparative Example 17]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB15.69g(49.0mmol)、NMP175.3g及甲苯50g,在攪拌下溶解TFMB。於此,添加CPDA10.51g(100.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。其後,將燒瓶之內容物冷卻至室溫為止,由此獲得聚醯亞胺之清漆。所獲得之清漆中之聚醯亞胺之重量平均分子量(Mw)為51,600。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, 15.69 g (49.0 mmol) of TFMB, 175.3 g of NMP, and 50 g of toluene were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 10.51 g (100.0 mmol) of CPDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. Thereafter, the contents of the flask were cooled to room temperature, whereby a varnish of polyimine was obtained. The weight average molecular weight (Mw) of the polyimine in the obtained varnish was 51,600. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[比較例18] [Comparative Example 18]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB15.69g(49.0mmol)、NMP175.3g及甲苯50g,在攪 拌下溶解TFMB。於此,添加H-BPDA15.32g(100.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。其後,將燒瓶之內容物冷卻至室溫為止,由此獲得聚醯亞胺之清漆。所獲得之清漆中之聚醯亞胺之重量平均分子量(Mw)為54,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, 15.69 g (49.0 mmol) of TFMB, 175.3 g of NMP and 50 g of toluene were placed under a nitrogen atmosphere. Dissolve TFMB under mixing. Here, 15.32 g (100.0 mmol) of H-BPDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. Thereafter, the contents of the flask were cooled to room temperature, whereby a varnish of polyimine was obtained. The weight average molecular weight (Mw) of the polyimine in the obtained varnish was 54,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[比較例19] [Comparative Example 19]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB15.69g(49.0mmol)、NMP175.3g及甲苯50g,在攪拌下溶解TFMB。於此,添加BCDA11.82g(100.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。其後,將燒瓶之內容物冷卻至室溫為止,由此獲得聚醯亞胺之清漆。所獲得之清漆中之聚醯亞胺之重量平均分子量(Mw)為50,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, 15.69 g (49.0 mmol) of TFMB, 175.3 g of NMP, and 50 g of toluene were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 11.82 g (100.0 mmol) of BCDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. Thereafter, the contents of the flask were cooled to room temperature, whereby a varnish of polyimine was obtained. The weight average molecular weight (Mw) of the polyimine in the obtained varnish was 50,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[比較例20] [Comparative Example 20]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB15.69g(49.0mmol)、NMP175.3g及甲苯50g,在攪拌下溶解TFMB。於此,添加BOTDA12.41g(100.0mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。其後,將燒瓶之內容物冷卻至室溫為止,由此獲得聚醯亞胺之清漆。所獲得之清漆中之聚醯亞胺之重量平均分子量(Mw)為54,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, 15.69 g (49.0 mmol) of TFMB, 175.3 g of NMP, and 50 g of toluene were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 12.41 g (100.0 mmol) of BOTDA was added, and after refluxing at 180 ° C for 2 hours, toluene as an azeotropic solvent was removed for 3 hours. Thereafter, the contents of the flask were cooled to room temperature, whereby a varnish of polyimine was obtained. The weight average molecular weight (Mw) of the polyimine in the obtained varnish was 54,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[比較例21] [Comparative Example 21]

於安裝有Dean Stark裝置及回流器之可分離式燒瓶內,在氮氣環境下,放入TFMB3.14g(9.8mmol)、NMP16.14g及甲苯50g,在攪拌下溶解TFMB。於此,添加H-PMDA0.16g(0.7mmol),在180℃下回流2小時後,以3小時去除作為共沸溶劑之甲苯。將燒瓶之內容物冷卻至 40℃為止,藉由IR確認源自醯胺鍵之1,650cm-1附近之吸收(C=O)消失。其後,添加TFMB12.55g(39.2mmol)、NMP147g、PMDA6.54g(30.0mmol)、6FDA4.44g(10.0mmol)及H-PMDA2.08g(9.3mmol),在80℃下攪拌4小時,由此獲得聚醯亞胺-聚醯胺酸聚合物之清漆。所獲得之聚醯亞胺-聚醯胺酸聚合物之重量平均分子量(Mw)為51,000。將於350℃下進行固化之膜之評價結果示於表2。 In a separable flask equipped with a Dean Stark apparatus and a reflux vessel, TFMB 3.14 g (9.8 mmol), NMP 16.14 g, and toluene 50 g were placed under a nitrogen atmosphere, and TFMB was dissolved under stirring. Here, 0.16 g (0.7 mmol) of H-PMDA was added, and the mixture was refluxed at 180 ° C for 2 hours, and then toluene as an azeotropic solvent was removed over 3 hours. The contents of the flask were cooled to 40 ° C, and it was confirmed by IR that the absorption (C=O) near 1,650 cm -1 derived from the indole bond disappeared. Thereafter, 12.55 g (39.2 mmol) of TFMB, 147 g of NMP, 6.54 g (30.0 mmol) of PMDA, 4.44 g (10.0 mmol) of 6FDA, and 2.08 g (9.3 mmol) of H-PMDA were added, and the mixture was stirred at 80 ° C for 4 hours. A varnish of a polyamidene-polyaminic acid polymer is obtained. The weight average molecular weight (Mw) of the obtained polyimine-polyamide polymer was 51,000. The evaluation results of the film which was cured at 350 ° C are shown in Table 2.

[比較例22] [Comparative Example 22]

依據韓國專利公開第10-2013-0077946號所揭示之方法,製備清漆。 A varnish is prepared in accordance with the method disclosed in Korean Patent Publication No. 10-2013-0077946.

在氮氣環境下,於1,000ml可分離式燒瓶內放入二甲基乙醯胺(DMAc)270ml,在室溫下完全溶解TFMB32.02g(100.0mmol)。繼而,依序添加6FDA111.1g(25.0mmol)、PMDA109.1g(50.0mmol)及H-PMDA56.04g(25.0mmol),在室溫下攪拌12小時。其後,利用120℃之油浴加熱20分鐘後,在常溫下攪拌12小時,由此獲得聚醯胺酸溶液(清漆)。所獲得之聚醯胺酸之重量平均分子量(Mw)為32,000。 Under a nitrogen atmosphere, 270 ml of dimethylacetamide (DMAc) was placed in a 1,000 ml separable flask, and TFMB 32.02 g (100.0 mmol) was completely dissolved at room temperature. Then, 6FDA 111.1 g (25.0 mmol), PMDA 109.1 g (50.0 mmol), and H-PMDA 56.04 g (25.0 mmol) were sequentially added, and the mixture was stirred at room temperature for 12 hours. Thereafter, the mixture was heated in an oil bath at 120 ° C for 20 minutes, and then stirred at normal temperature for 12 hours to obtain a polyamidonic acid solution (varnish). The weight average molecular weight (Mw) of the obtained polyamic acid was 32,000.

將藉由使用上述清漆,以8小時自80℃加熱至250℃為止後,緩慢進行冷卻所獲得之聚醯亞胺膜之評價結果示於表2。 The evaluation results of the polyimide film obtained by slowly cooling after heating to 80 ° C from 80 ° C for 8 hours using the above varnish are shown in Table 2.

[比較例23] [Comparative Example 23]

依據韓國專利公開第10-2013-0077946號所揭示之方法,製備清漆。 A varnish is prepared in accordance with the method disclosed in Korean Patent Publication No. 10-2013-0077946.

將原料之饋入變更為6FDA88.85g(20.0mmol)、PMDA87.25g(40.0mmol)及H-PMDA89.67g(40.0mmol),除此以外,其餘與比較例22相同地進行操作。將所獲得之聚醯亞胺膜之評價結果示於表2。 The same procedure as in Comparative Example 22 was carried out, except that the feed was changed to 6FDA 88.85 g (20.0 mmol), PMDA 87.25 g (40.0 mmol), and H-PMDA 89.67 g (40.0 mmol). The evaluation results of the obtained polyimide film were shown in Table 2.

[比較例24] [Comparative Example 24]

依據韓國專利公開第10-2013-0077946號所揭示之方法,製備清漆。 A varnish is prepared in accordance with the method disclosed in Korean Patent Publication No. 10-2013-0077946.

將原料之饋入變更為6FDA177.7g(40.0mmol)、PMDA87.25g(40.0mmol)及H-PMDA44.83g(20.0mmol),除此以外,其餘與比較例22相同地進行操作。將所獲得之聚醯亞胺膜之評價結果示於表2。 The same procedure as in Comparative Example 22 was carried out except that the feed was changed to 6FDA 177.7 g (40.0 mmol), PMDA 87.25 g (40.0 mmol), and H-PMDA 44.83 g (20.0 mmol). The evaluation results of the obtained polyimide film were shown in Table 2.

表1所揭示之成分之簡稱分別為以下之含義。 The abbreviations of the components disclosed in Table 1 are respectively the following meanings.

[芳香族四羧酸二酐1] [Aromatic tetracarboxylic dianhydride 1]

PMDA:均苯四甲酸二酐 PMDA: pyromellitic dianhydride

BPDA:3,3',4,4'-聯苯四羧酸二酐 BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride

[芳香族四羧酸二酐2] [Aromatic tetracarboxylic dianhydride 2]

ODPA:4,4'-氧二鄰苯二甲酸二酐 ODPA: 4,4'-oxydiphthalic dianhydride

6FDA:4,4'-(六氟亞異丙基)二鄰苯二甲酸酐 6FDA: 4,4'-(hexafluoroisopropylidene)diphthalic anhydride

TAHQ:4,4'-聯苯雙(偏苯三甲酸單酯酸酐) TAHQ: 4,4'-biphenyl bis(trimellitic acid monoester anhydride)

[脂環式四羧酸二酐] [alicyclic tetracarboxylic dianhydride]

CBDA:1,2,3,4-環丁烷四羧酸二酐 CBDA: 1,2,3,4-cyclobutane tetracarboxylic dianhydride

H-PMDA:1,2,4,5-環己烷四羧酸二酐 H-PMDA: 1,2,4,5-cyclohexanetetracarboxylic dianhydride

CPDA:1,2,3,4-環戊烷四羧酸二酐 CPDA: 1,2,3,4-cyclopentane tetracarboxylic dianhydride

H-BPDA:1,2,4,5-雙環己烷四羧酸二酐 H-BPDA: 1,2,4,5-bicyclohexanetetracarboxylic dianhydride

BCDA:雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐 BCDA: bicyclo [2.2.1] heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride

BOTDA:雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐 BOTDA: Bicyclo [2.2.2] oct-7-ene-2,3,5,6-tetracarboxylic dianhydride

[二胺] [diamine]

TFMB:2,2'-雙(三氟甲基)聯苯胺 TFMB: 2,2'-bis(trifluoromethyl)benzidine

mTB:2,2'-二甲基聯苯-4,4'-二胺 mTB: 2,2'-dimethylbiphenyl-4,4'-diamine

DABA:4,4'-二胺基苯醯替苯胺 DABA: 4,4'-diaminobenzoquinone

APAB:4-胺基苯甲酸4-胺基苯酯 APAB: 4-aminophenyl 4-aminobenzoate

[其他添加劑] [Other additives]

ROSi1:烷氧基矽烷化合物1,下述結構式之化合物 ROSi1: alkoxydecane compound 1, a compound of the following structural formula

Surf1:界面活性劑1,聚矽氧型非離子界面活性劑DBE224(商品名,Gelest公司製造) Surf1: surfactant 1, polyfluorene type nonionic surfactant DBE224 (trade name, manufactured by Gelest)

如表所示,確認包含具有源自脂環式四羧酸二酐之結構、源自上述芳香族四羧酸二酐1之結構及源自上述芳香族四羧酸二酐2之結構全部之聚醯亞胺前驅體的樹脂組合物(清漆):(0)4週室溫保存時之黏度變化率為10%以下;將上述組合物進行硬化所獲得之聚醯亞胺膜在膜物性上,同時滿足以下之條件:(1)CTE為25ppm以下,(2)YI值為10以下,(3)伸長率為15%以上;於上述聚醯亞胺膜上形成有無機膜之積層體同時滿足:(4)Haze為15以下,(5)水蒸氣透過率為0.1g/(m2‧24h)以下。 As shown in the table, it was confirmed that the structure derived from the alicyclic tetracarboxylic dianhydride, the structure derived from the above aromatic tetracarboxylic dianhydride 1, and the structure derived from the above aromatic tetracarboxylic dianhydride 2 were all included. The resin composition (varnish) of the polyimide precursor: (0) The viscosity change rate at the time of storage at room temperature for 4 weeks is 10% or less; the polyimide film obtained by hardening the above composition is on the film property At the same time, the following conditions are satisfied: (1) CTE is 25 ppm or less, (2) YI value is 10 or less, and (3) elongation is 15% or more; and a laminate of an inorganic film is formed on the above polyimine film simultaneously It satisfies: (4) Haze is 15 or less, and (5) water vapor transmission rate is 0.1 g/(m 2 ‧24 h) or less.

又,根據比較例1~4、14及15~20之評價結果,確認使用僅具有源自1種四羧酸二酐之結構之聚醯亞胺前驅體的聚醯亞胺膜無法同時滿足上述(0)~(5)之全部膜物性;根據比較例5~13之評價結果,確認即便為使用具有源自2種四羧酸二酐各者之2種結構之聚醯亞胺前驅體的聚醯亞胺膜,亦無法對上述(0)~(5)之全部膜物性賦予充分之性能。進而, 根據比較例21~25之評價結果,確認即便為使用具有源自上述3種四羧酸二酐各者之3種結構之聚醯亞胺前驅體的聚醯亞胺膜,於該聚醯亞胺前驅體之源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率超出10~100%之範圍之情形時,亦無法對上述(0)~(5)之全部膜物性賦予充分之性能。 Further, according to the evaluation results of Comparative Examples 1 to 4, 14 and 15 to 20, it was confirmed that the polyimide film having only the polyimine precursor having a structure derived from one type of tetracarboxylic dianhydride cannot simultaneously satisfy the above. All the film properties of (0) to (5); according to the evaluation results of Comparative Examples 5 to 13, it was confirmed that even if a polyimine precursor having two structures derived from each of two kinds of tetracarboxylic dianhydrides was used, The polyimide film does not give sufficient performance to all of the above film properties (0) to (5). and then, According to the evaluation results of Comparative Examples 21 to 25, it was confirmed that a polyimine film having a polyimine precursor having three structures derived from each of the above three tetracarboxylic dianhydrides was used. When the imidization ratio of the amine precursor derived from the alicyclic bond of the alicyclic tetracarboxylic dianhydride exceeds 10 to 100%, the film properties of the above (0) to (5) cannot be obtained. Give full performance.

根據以上之結果,確認僅限於聚醯亞胺前驅體具有源自脂環式四羧酸二酐之結構、源自上述芳香族四羧酸二酐1之結構及源自上述芳香族四羧酸二酐2之結構全部,且源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為10~100%之範圍之情形時,包含該聚醯亞胺前驅體之組合物之保存穩定性優異,使該組合物硬化而獲得之聚醯亞胺膜為無色透明,並且線膨脹係數較低,進而伸長率優異,於該聚醯亞胺膜上形成有無機膜之積層體之Haze較小,水蒸氣透過率優異。 From the above results, it was confirmed that the polyimine precursor has a structure derived from an alicyclic tetracarboxylic dianhydride, a structure derived from the above aromatic tetracarboxylic dianhydride 1, and a derived from the above aromatic tetracarboxylic acid. When the dianhydride 2 has the entire structure and the sulfhydryl imidization ratio of the alicyclic bond of the alicyclic tetracarboxylic dianhydride is in the range of 10 to 100%, the composition containing the polyimine precursor The polyimine film obtained by curing the composition is colorless and transparent, has a low coefficient of linear expansion, and is excellent in elongation, and a laminate of an inorganic film is formed on the polyimide film. The Haze is small and has excellent water vapor transmission rate.

[產業上之可利用性] [Industrial availability]

本發明之聚醯亞胺前驅體例如可較佳地利用於製造半導體絕緣膜、TFT-LCD絕緣膜、電極保護膜及可撓性顯示器,可尤其較佳地利用於製造基板。 The polyimide precursor of the present invention can be preferably used, for example, for producing a semiconductor insulating film, a TFT-LCD insulating film, an electrode protective film, and a flexible display, and can be particularly preferably used for manufacturing a substrate.

Claims (27)

一種聚醯亞胺前驅體,其特徵在於:具有下述通式(A)所表示之結構,且具有作為源自二胺之結構的源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構,作為源自四羧酸二酐之結構的源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種脂環式四羧酸二酐之結構,及源自芳香族四羧酸二酐之結構;並且源自上述脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為10~100%, {X1為源自選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種二胺之結構; X2為源自選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環[3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種四羧酸二酐之結構}。 A polyimine precursor having a structure represented by the following formula (A) and having a structure derived from a diamine derived from 2,2'-bis(trifluoromethyl) Benzylamine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'-diaminobenzophenidine and 4-aminobenzoic acid 4-aminobenzene The structure of at least one diamine in the ester derived from the structure derived from tetracarboxylic dianhydride derived from 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1, 2, 4 , 5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic dianhydride Bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5, 6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5-(four Hydrogen-2,5-di-oxy-3-furanyl-naphtho[1,2-c]furan-1,3-dione and bicyclo[3,3,0]octane-2,4, a structure of at least one alicyclic tetracarboxylic dianhydride of 6,8-tetracarboxylic dianhydride, and a structure derived from an aromatic tetracarboxylic dianhydride; and derived from the above alicyclic tetracarboxylic dianhydride The imidization ratio of the indoleamine bond is 10 to 100%. {X 1 is derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'- a structure of at least one diamine of diaminophenylbenzophenone and 4-aminophenyl 4-aminobenzoate; X 2 is derived from a 1,2,3,4-cyclobutanetetracarboxylic acid Desic anhydride (CBDA), 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1,2,4 , 5-bicyclohexanetetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2] octane -7-ene-2,3,5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4, 5,9b-hexahydro-5-(tetrahydro-2,5-di-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclo[3, 3,0] Structure of at least one tetracarboxylic dianhydride of octane-2,4,6,8-tetracarboxylic dianhydride}. 如請求項1之聚醯亞胺前驅體,其中上述聚醯亞胺前驅體具有下述通式(B)之結構, {X1與上述式(A)中相同,X3為源自上述芳香族四羧酸二酐之結構}。 The polyimine precursor of claim 1, wherein the polyimine precursor has a structure of the following formula (B), {X 1 is the same as in the above formula (A), and X 3 is a structure derived from the above aromatic tetracarboxylic dianhydride}. 如請求項1或2之聚醯亞胺前驅體,其中源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為20~100%。 The polyamidene precursor of claim 1 or 2, wherein the guanidinium linkage derived from the alicyclic bond of the alicyclic tetracarboxylic dianhydride is from 20 to 100%. 如請求項1至3中任一項之聚醯亞胺前驅體,其中源自脂環式四羧酸二酐之醯胺鍵之醯亞胺化率為30~100%。 The polyimine precursor according to any one of claims 1 to 3, wherein the guanidinium linkage derived from the alicyclic bond of the alicyclic tetracarboxylic dianhydride is from 30 to 100%. 如請求項1至4中任一項之聚醯亞胺前驅體,其中上述芳香族四羧酸二酐包含:作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)及4,4'-聯苯 雙(偏苯三甲酸單酯酸酐)中之至少一種。 The polyimine precursor according to any one of claims 1 to 4, wherein the aromatic tetracarboxylic dianhydride comprises: pyromellitic dianhydride (PMDA) as aromatic tetracarboxylic dianhydride 1 And at least one of 3,3',4,4'-biphenyltetracarboxylic dianhydride, and 4,4'-oxydiphthalic dianhydride as aromatic tetracarboxylic dianhydride 2 ( ODPA), 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA) and 4,4'-biphenyl At least one of bis(trimellitic acid monoester anhydride). 如請求項1至5中任一項之聚醯亞胺前驅體,其中上述芳香族四羧酸二酐1為均苯四甲酸二酐(PMDA)。 The polyimine precursor according to any one of claims 1 to 5, wherein the aromatic tetracarboxylic dianhydride 1 is pyromellitic dianhydride (PMDA). 如請求項1至5中任一項之聚醯亞胺前驅體,其中上述芳香族四羧酸二酐2為選自4,4'-氧二鄰苯二甲酸二酐(ODPA)及4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)中之至少一種。 The polyimine precursor according to any one of claims 1 to 5, wherein the aromatic tetracarboxylic dianhydride 2 is selected from the group consisting of 4,4'-oxydiphthalic dianhydride (ODPA) and 4, At least one of 4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA). 如請求項1至7中任一項之聚醯亞胺前驅體,其中上述源自二胺之結構為源自2,2'-雙(三氟甲基)聯苯胺(TFMB)之結構。 The polyimine precursor according to any one of claims 1 to 7, wherein the structure derived from the diamine is a structure derived from 2,2'-bis(trifluoromethyl)benzidine (TFMB). 如請求項1至8中任一項之聚醯亞胺前驅體,其中上述脂環式四羧酸二酐為選自1,2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐及雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐中之至少一種。 The polyamidiamine precursor according to any one of claims 1 to 8, wherein the alicyclic tetracarboxylic dianhydride is selected from the group consisting of 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA) 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexane Alkanetetracarboxylic dianhydride, bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride and bicyclo[2.2.2]oct-7-ene- At least one of 2,3,5,6-tetracarboxylic dianhydride. 如請求項1至9中任一項之聚醯亞胺前驅體,其中上述脂環式四羧酸二酐為選自1,2,3,4-環丁烷四羧酸二酐(CBDA)及1,2,4,5-環己烷四羧酸二酐(H-PMDA)中之至少一種。 The polyimine precursor according to any one of claims 1 to 9, wherein the alicyclic tetracarboxylic dianhydride is selected from the group consisting of 1,2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA) And at least one of 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA). 如請求項1至10中任一項之聚醯亞胺前驅體,其中包含在全部之源自二胺之結構中占60莫耳%以上的源自上述TFMB之結構,包含在全部之源自四羧酸二酐之結構中合計占60莫耳%以上的源自選自上述PMDA、上述ODPA、上述6FDA、上述CBDA及上述H-PMDA中之至少一種四羧酸二酐之結構。 The polyimine precursor according to any one of claims 1 to 10, which comprises 60% by mole or more of the structure derived from the above-mentioned TFMB in all of the structures derived from the diamine, and is contained in all The structure of the tetracarboxylic dianhydride is a structure of at least 60 mol% or more of at least one tetracarboxylic dianhydride derived from the above PMDA, the above ODPA, the above 6FDA, the above CBDA, and the above H-PMDA. 如請求項1至11中任一項之聚醯亞胺前驅體,其中包含在全部之源自四羧酸二酐之結構中占1~70莫耳%的源自上述PMDA之結構,且 包含在全部之源自四羧酸二酐之結構中占1~50莫耳%的源自選自上述ODPA及6FDA中之至少一種四羧酸二酐之結構。 The polyimine precursor according to any one of claims 1 to 11, which comprises from 1 to 70 mol% of the structure derived from the above-mentioned PMDA in a structure derived from all of the tetracarboxylic dianhydride, and A structure derived from at least one tetracarboxylic dianhydride selected from the above ODPA and 6FDA, which accounts for 1 to 50 mol% of the total structure derived from tetracarboxylic dianhydride. 如請求項1至11中任一項之聚醯亞胺前驅體,其中源自上述PMDA、上述ODPA、上述6FDA、上述CBDA及上述H-PMDA各者之結構之莫耳數之和與源自上述TFMB之結構之莫耳數的比{PMDA+ODPA+6FDA+CBDA+H-PMDA)/TFMB}為100/99.9~100/95。 The polyimine precursor according to any one of claims 1 to 11, wherein the sum of the molar numbers derived from the structures of the above PMDA, the above ODPA, the above 6FDA, the above CBDA, and the above H-PMDA is derived from The ratio of the molar number of the structure of the above TFMB {PMDA+ODPA+6FDA+CBDA+H-PMDA)/TFMB} is 100/99.9 to 100/95. 如請求項1至13中任一項之聚醯亞胺前驅體,其中溶解於溶劑並在支持體之表面展開後,藉由氮氣環境下之加熱進行醯亞胺化所獲得之聚醯亞胺膜之黃色度為10以下,線膨脹係數為25ppm以下,且膜厚20μm時之膜之伸長率為15%以上。 The polyimine precursor obtained according to any one of claims 1 to 13, wherein the polyimine obtained by hydrazine imidization by heating under a nitrogen atmosphere after dissolving in a solvent and developing on the surface of the support The yellowness of the film was 10 or less, the coefficient of linear expansion was 25 ppm or less, and the elongation of the film at a film thickness of 20 μm was 15% or more. 如請求項1至14中任一項之聚醯亞胺前驅體,其係用於可撓性裝置之製造。 The polyimine precursor of any one of claims 1 to 14 for use in the manufacture of a flexible device. 一種樹脂組合物,其特徵在於:含有如請求項1至15中任一項之聚醯亞胺前驅體、與溶劑。 A resin composition comprising the polyimine precursor according to any one of claims 1 to 15, and a solvent. 如請求項16之樹脂組合物,其進而含有烷氧基矽烷化合物。 The resin composition of claim 16, which further contains an alkoxydecane compound. 如請求項16或17之樹脂組合物,其進而含有界面活性劑。 The resin composition of claim 16 or 17, which further comprises a surfactant. 一種聚醯亞胺膜,其特徵在於:將如請求項16至18中任一項之樹脂組合物在支持體之表面上展開而形成塗膜,繼而,對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體予以醯亞胺化而形成。 A polyimine film, which is characterized in that a resin composition according to any one of claims 16 to 18 is developed on a surface of a support to form a coating film, and then the support and the coating film are heated. The polyimine precursor is formed by imidization of ruthenium. 一種聚醯亞胺膜之製造方法,其特徵在於包括:塗膜形成步驟,其將如請求項16至18中任一項之樹脂組合物在支持體之表面上展開而形成塗膜;加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體予以醯亞胺化而形成聚醯亞胺膜;及 剝離步驟,其將上述聚醯亞胺膜自上述支持體剝離而獲得聚醯亞胺膜。 A method for producing a polyimide film, comprising: a coating film forming step of developing a resin composition according to any one of claims 16 to 18 on a surface of a support to form a coating film; and heating step Heating the support and the coating film to imidize the polyimine precursor to form a polyimide film; A peeling step of peeling the polyimine film from the support to obtain a polyimide film. 一種積層體,其特徵在於:具備支持體及形成於該支持體上之聚醯亞胺膜,並且該積層體係於上述支持體之表面上展開如請求項16至18中任一項之樹脂組合物而形成塗膜,繼而對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體予以醯亞胺化形成聚醯亞胺膜而獲得。 A laminate comprising a support and a polyimide film formed on the support, and the laminate system spreads the resin composition according to any one of claims 16 to 18 on the surface of the support A coating film is formed, and then the support and the coating film are heated, and the polyimine precursor is obtained by hydrazine imidization to form a polyimide film. 一種積層體之製造方法,該積層體係具備支持體及形成於該支持體上之聚醯亞胺膜者,該製造方法包括:塗膜形成步驟,其於支持體之表面上展開如請求項16至18中任一項之樹脂組合物而形成塗膜;及加熱步驟,其對上述支持體及上述塗膜進行加熱,將上述聚醯亞胺前驅體予以醯亞胺化而形成聚醯亞胺膜。 A method for producing a laminate comprising a support and a polyimide film formed on the support, the method comprising: a coating film forming step of expanding on a surface of the support as claimed in claim 16 a resin composition according to any one of 18 to form a coating film; and a heating step of heating the support and the coating film to imidize the polyimine precursor to form a polyimine membrane. 一種聚醯亞胺膜,其特徵在於:其係由二胺與四羧酸二酐之共聚物所製造者,上述二胺為選自2,2'-雙(三氟甲基)聯苯胺(TFMB)、2,2'-二甲基聯苯-4,4'-二胺、4,4'-二胺基苯醯替苯胺及4-胺基苯甲酸4-胺基苯酯中之至少一種,上述四羧酸二酐包含作為脂環式四羧酸二酐的選自2,3,4-環丁烷四羧酸二酐(CBDA)、1,2,4,5-環己烷四羧酸二酐(H-PMDA)、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-雙環己烷四羧酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四羧酸2,3:5,6-二酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、2,3,5-三羧基環戊乙酸-1,4:2,3-二酐、1,3,3a,4,5,9b-六氫-5-(四氫-2,5-二側氧基-3-呋喃基)-萘并[1,2-C]呋喃-1,3-二酮及雙環 [3,3,0]辛烷-2,4,6,8-四羧酸二酐中之至少一種,作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)及4,4'-聯苯雙(偏苯三甲酸單酯酸酐)中之至少一種,並且於該聚醯亞胺膜上,於350℃下使用CVD法而形成無機膜時,對該無機膜表面使用原子力顯微鏡(AFM)所測得之表面粗糙度為0.01~50nm。 A polyimine film characterized by being a copolymer of a diamine and a tetracarboxylic dianhydride, wherein the diamine is selected from the group consisting of 2,2'-bis(trifluoromethyl)benzidine ( At least one of TFMB), 2,2'-dimethylbiphenyl-4,4'-diamine, 4,4'-diaminobenzoquinone and 4-aminophenyl 4-aminobenzoate In one embodiment, the tetracarboxylic dianhydride comprises, as an alicyclic tetracarboxylic dianhydride, 2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 1,2,4,5-cyclohexane. Tetracarboxylic dianhydride (H-PMDA), 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-bicyclohexanetetracarboxylic dianhydride, bicyclo [2.2.1 Heptane-2,3,5,6-tetracarboxylic acid 2,3:5,6-dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic acid Anhydride, 2,3,5-tricarboxycyclopentaacetic acid-1,4:2,3-dianhydride, 1,3,3a,4,5,9b-hexahydro-5-(tetrahydro-2,5- Bis-oxy-3-furanyl)-naphtho[1,2-c]furan-1,3-dione and bicyclic At least one of [3,3,0]octane-2,4,6,8-tetracarboxylic dianhydride, which is selected from pyromellitic dianhydride (PMDA) as aromatic tetracarboxylic dianhydride 1 and At least one of 3,3',4,4'-biphenyltetracarboxylic dianhydride, and 4,4'-oxydiphthalic dianhydride (ODPA) as aromatic tetracarboxylic dianhydride 2 At least one of 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA) and 4,4'-biphenylbis(trimellitic acid monoester anhydride), and When an inorganic film was formed by a CVD method at 350 ° C on a polyimide film, the surface roughness of the surface of the inorganic film measured by atomic force microscopy (AFM) was 0.01 to 50 nm. 如請求項23之聚醯亞胺膜,其中上述二胺為2,2'-雙(三氟甲基)聯苯胺(TFMB),上述四羧酸二酐包含作為脂環式四羧酸二酐的選自2,3,4-環丁烷四羧酸二酐(CBDA)及1,2,4,5-環己烷四羧酸二酐(H-PMDA)中之至少一種,作為芳香族四羧酸二酐1的選自均苯四甲酸二酐(PMDA)及3,3',4,4'-聯苯四羧酸二酐中之至少一種,及作為芳香族四羧酸二酐2的選自4,4'-氧二鄰苯二甲酸二酐(ODPA)及4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)中之至少一種。 The polyimine film according to claim 23, wherein the diamine is 2,2'-bis(trifluoromethyl)benzidine (TFMB), and the tetracarboxylic dianhydride comprises alicyclic tetracarboxylic dianhydride. At least one selected from the group consisting of 2,3,4-cyclobutanetetracarboxylic dianhydride (CBDA) and 1,2,4,5-cyclohexanetetracarboxylic dianhydride (H-PMDA) as an aromatic The tetracarboxylic dianhydride 1 is at least one selected from the group consisting of pyromellitic dianhydride (PMDA) and 3,3',4,4'-biphenyltetracarboxylic dianhydride, and as an aromatic tetracarboxylic dianhydride. 2 is at least one selected from the group consisting of 4,4'-oxydiphthalic dianhydride (ODPA) and 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA). 一種可撓性裝置,其包含如請求項23或24之聚醯亞胺膜。 A flexible device comprising the polyimide film of claim 23 or 24. 一種可撓性裝置之製造方法,其包括如請求項20之聚醯亞胺膜之製造方法。 A method of producing a flexible device comprising the method of producing a polyimide film according to claim 20. 一種可撓性裝置之製造方法,其包括如請求項22之積層體之製造方法。 A method of manufacturing a flexible device comprising the method of manufacturing a laminate according to claim 22.
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