TW201525592A - Light irradiation apparatus - Google Patents

Abstract

To provide a light irradiation apparatus capable of properly cooling a light source and a polarizer unit. A light irradiation apparatus 1 is configured so that a reflecting mirror 5 and a light source 4 are accommodated into a housing 3 of a light irradiator 2, a light emitting opening portion 3A of the housing 3 is provided with light transmission members 6, 7 and a polarizer unit 10, and a heat source cooling path 30 of the reflecting mirror 5 and the light source 4 is separated from a space cooling path 40 between the light transmission members 6, 7 and the light polarizer unit 10, whereby the light source 4 and the polarizer unit 10 are cooled individually.

Description

Light irradiation device

The present invention relates to a light irradiation device including a light source and a polarizer unit.

Conventionally, there is known a light irradiation device in which a light source is provided in a casing of a light irradiator, and light from a light source is polarized and illuminated by a polarizer unit provided in a light exit opening of the casing (for example, reference) Patent Document 1). The light irradiation device is provided with a cooling path of a light source and a polarizer unit in the casing.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 5506991

In the light irradiation device, since the light source has a short life at a low temperature, it is required to be cooled in such a manner that the temperature becomes relatively high. On the other hand, in terms of heat resistance, the polarizer unit needs to be relatively warm in temperature. The low way is cooled. However, in the above-described conventional configuration, since the configuration of the light source is cooled by the cooling air after cooling the polarizer unit, there is a problem that the light source is excessively cooled if the polarizer unit is to be sufficiently cooled. The present invention has been made in view of the above circumstances, and an object thereof is to provide an appropriate one. A light irradiation device that cools the light source and the polarizer unit.

In order to achieve the above object, a light irradiation device according to the present invention is characterized in that a mirror and a light source are housed in a casing of a light irradiator, and a light transmitting member and a polarizer unit are provided in a light exit opening portion of the casing, and a mirror is provided. And the heat source cooling path of the light source is independent of the space cooling path between the light transmitting member and the polarizer unit.

In the above configuration, the space between the light transmitting member and the polarizer unit may be set to a positive pressure.

In the above configuration, the polarizer unit may be formed by arranging a plurality of polarizers in a lateral direction.

In the above configuration, the cooling air may be cooled by the cooler after the heat source cooling path and the space cooling path are cooled.

Further, the present invention is characterized in that the mirror and the light source are housed in the housing of the light illuminator, and the light-emitting member is provided in the light-emitting opening of the casing to close the light-emitting opening, and the light-transmitting member is provided in the light-transmitting member. a polarizer unit is provided at a position spaced apart from the light transmitting member at a position facing the light transmitting member, and a heat source of the mirror and the light source for supplying the cooling air to the inside of the light emitting opening of the casing is provided. The cooling path is independent of a polarizer cooling path of the polarizer unit that supplies the cooling air to the space between the light transmitting member and the polarizer unit, and the space between the light transmitting member and the polarizer unit constitutes the above Polarizer cooling path.

Furthermore, the present invention provides a light irradiation device comprising: a platform transport pedestal; the illuminator is provided with a pedestal provided with a light illuminator that illuminates the polarized light; and two working platforms are disposed on the illuminator pedestal Both sides; a linear motion mechanism that transfers the working platforms directly under the light illuminator; and a robot apparatus that is disposed in parallel with the platform transport pedestal and that mounts the workpiece to each of the work platforms, and includes an arm movable in a linear motion direction and a holding portion fixed to the arm and holding the workpiece; and the first working platform Between the irradiation area of the light irradiator and the space for the workpiece on the second working platform to pass through the irradiation area, a space for the first working platform is ensured between the second working platform and the irradiation area. The space above the extent to which the workpiece passes through the illuminated area.

In the above configuration, the linear motion mechanism may move the first working platform to the irradiation region of the light irradiator, and when the workpiece on the first working platform passes through the irradiation region, return the first working platform to the original working platform. The second working platform is moved to the irradiation area of the light illuminator, and when the workpiece on the second working platform passes through the irradiation area, the second working platform is returned to the original position.

In the above configuration, the rotation drive mechanism may be provided corresponding to each of the work platforms, and the work platform may be rotationally driven to finely adjust the angle of the workpiece on the work platform.

In the above configuration, the robot may move the arm to receive the workpiece from the outside, and place the workpiece on the adjustment platform of the angle adjusting device. After the angle adjusting device sets the posture of the workpiece to the positive posture, the angle adjustment is performed. The device loads the workpiece onto the work platform.

In the above configuration, the robot apparatus may include a surface plate provided in parallel with the platform transport pedestal, a robot supported by the flat plate, and a reciprocating drive mechanism that moves the robot in a linear motion direction.

According to the present invention, since the heat source cooling path of the mirror and the light source is independent of the space cooling path between the light transmitting member and the polarizer unit, the individual can be individually The light source and the polarizer unit are cooled, so that the light source and the polarizer unit can be appropriately cooled.

1,100,200‧‧‧Light alignment device (light irradiation device)

2‧‧‧Light illuminator

3‧‧‧Shell

3A‧‧‧Light exit opening

4‧‧‧Lights (light source)

5‧‧‧Mirror

5A‧‧‧through hole

6‧‧‧Transparent body (light transmitting member)

7‧‧‧Wavelength selection filter (light transmission member)

8‧‧‧Polarizer unit fixed table

10‧‧‧Polarizer unit

12‧‧‧Unit polarizer unit

14‧‧‧Frame

16‧‧‧Wire grid polarizer

19‧‧‧ screw

20‧‧‧Cooling unit

20A‧‧‧Cooling unit box

21‧‧‧Air blower

21A‧‧‧Blowing out

21B‧‧‧Inhalation

22‧‧‧ cooler

23‧‧‧Filter

24‧‧‧ chamber

24A‧‧‧ entrance

24B‧‧‧Export

25, 26, 27, 28, 29‧ ‧ catheter

28A, 29A‧‧‧ Extension

28B, 29B‧‧‧ Reduced diameter

28C, 29C‧‧‧ Supporting components

30‧‧‧Heat source cooling path

31‧‧‧ partition wall

31A‧‧‧ Opening

31B‧‧‧ventilation holes

40‧‧‧ Polarizer cooling path (space cooling path)

50‧‧‧ positive pressure mechanism

51‧‧‧Flow adjustment means

52‧‧‧Import

81‧‧‧ platform transfer pedestal

82‧‧‧ illuminator setting pedestal

83‧‧‧Working platform

84‧‧‧linear motion mechanism

85‧‧‧Angle adjustment device

90‧‧‧Robots

91‧‧‧ tablet

92‧‧‧Robot

92A‧‧‧ Arm

92B‧‧‧ Keeping Department

93‧‧‧Reciprocating drive mechanism

A‧‧‧ direction

B‧‧‧Orientation

C1‧‧‧ polarizing axis

Long axis of L‧‧‧ lamp 4

P1‧‧‧ end

P2‧‧‧The other end

R, S‧‧‧ space

W‧‧‧Light matching object

X‧‧‧linear motion direction

Δ1, δ2‧‧‧ gap

Fig. 1 is a front view schematically showing an optical alignment device according to a first embodiment of the present invention.

Figure 2 is a front view showing the optical alignment device.

Fig. 3 is an enlarged view of the light irradiator of Fig. 2.

Fig. 4 is a view showing the configuration of a polarizer unit, wherein (A) is a plan view and (B) is a side cross-sectional view.

Fig. 5 is a front view showing a light alignment device according to a modification of the present invention.

Fig. 6 is a plan view schematically showing a configuration of an optical alignment irradiation system including an optical alignment device according to a second embodiment of the present invention, and shows a standby state of the first and second working platforms.

Fig. 7 is a plan view schematically showing a configuration of a light alignment irradiation system, showing a state in which a light alignment object is placed on a first work surface.

Fig. 8 is a plan view schematically showing a configuration of a light alignment irradiation system, showing a state in which the robot receives the next light alignment object during the movement of the first work platform.

FIG. 9 is a plan view schematically showing a configuration of the light alignment irradiation system, and shows a state in which the next light alignment object is set to the second work surface during the movement of the first work surface.

Fig. 10 is a plan view schematically showing a configuration of a light alignment irradiation system, showing a state in which the robot is moved during the movement of the first and second working platforms.

Fig. 11 is a plan view schematically showing a configuration of a light alignment irradiation system, showing that the next light alignment object is set to the first work during the movement of the second work platform. The status of the platform.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First embodiment>

Fig. 1 is a front view schematically showing an optical alignment device according to a first embodiment, and Fig. 2 is a view showing a photo alignment device. Fig. 3 is an enlarged view of the light irradiator of Fig. 2. Fig. 4 is a view showing a configuration of a polarizer unit, Fig. 4(A) is a plan view, and Fig. 4(B) is a side cross-sectional view. As shown in Fig. 1, the optical alignment device 1 is a light-emitting device that performs light-alignment to a light-aligning film in which a light-aligning film of a target object (workpiece) W is irradiated with light in a plate shape or a strip shape.

The optical alignment device 1 includes a platform transfer pedestal 81, an illuminator pedestal 82, a work platform (platform) 83 on which a light aligning object W (FIG. 2) is placed, and a light illuminator 2 that illuminates the light directly below. Light. The illuminator installation pedestal 82 is located above the predetermined distance from the platform transport pedestal 81, and is transversely arranged in the width direction of the platform transport pedestal 81 (perpendicular to the direction of the linear motion direction X of the linear motion mechanism to be described later). The two columns are fixed to the platform transfer pedestal 81. The illuminator installation pedestal 82 incorporates a light illuminator 2, and the light illuminator 2 illuminates the polarized light directly below. Further, in order to separate the vibration accompanying the movement of the work platform 83 and the vibration caused by the cooling of the light irradiator 2, the illuminator mounting pedestal 82 may not be fixed to the platform transport pedestal 81, and The platform transfer pedestal 81 is separately provided. The platform transfer pedestal 81 and the illuminator installation pedestal 82 may also have an anti-vibration structure. A linear motion mechanism 84 (FIG. 6) is disposed in the platform transport pedestal 81. The linear motion mechanism 84 is transported in the linear motion direction X such that the surface of the platform transport pedestal 81 passes directly below the light illuminator 2. Work platform 83. By linearly aligning the light-aligning object W, by linear The moving mechanism 84 transfers the light-aligning object W placed on the working platform 83 in the linear motion direction X and passes directly under the light irradiator 2, and is exposed to the polarized light at the time of passing, and the optical alignment film is aligned. In the present embodiment, the light-aligning object W is formed in a rectangular shape in plan view, and is transported so that the short-side direction of the light-aligning object W coincides with the linear motion direction X.

As shown in FIG. 2 and FIG. 3, the light illuminator 2 includes a lamp 4 and a mirror 5 as light sources in a casing 3 having a light-emitting opening 3A on the lower surface, and a polarizer unit in the light-emitting opening 3A. 10. The casing 3 is positioned above the predetermined distance from the light-aligning object W, and is supported by the illuminator setting pedestal 82. The lamp 4 is a discharge lamp, and a straight tube type (rod-shaped) ultraviolet lamp which is extended to at least the length of the longitudinal direction of the light-aligning object W is used. The mirror 5 is a cylindrical concave mirror having an elliptical cross section and extending in the longitudinal direction of the lamp 4, and condenses the light of the lamp 4 to illuminate the polarizer unit 10 from the light exit opening 3A.

The light exit opening 3A is an opening formed in a rectangular shape in a plan view immediately below the lamp 4, and is provided so as to be aligned with the longitudinal direction of the lamp 4 in the longitudinal direction. In the light-emitting opening portion 3A, a plate-shaped transparent body 6 formed of a light-transmitting member having no filter characteristics (wavelength selection characteristics) such as a quartz plate is provided, and the light-emitting opening portion 3A is closed by the transparent body 6. Further, a wavelength selection filter 7 for selecting a wavelength of light to be transmitted is provided inside the light emission opening portion 3A, and the light illuminator 2 illuminates light of a desired wavelength by the wavelength selection filter 7. The transparent body 6 and the wavelength selection filter 7 constitute the light transmission member of the present embodiment. Further, in the present embodiment, the wavelength selection filter 7 is provided. However, when the lamp 4 itself can emit light of a desired wavelength, the wavelength selection filter 7 may be omitted.

The polarizer unit 10 is disposed on the transparent body 6 and the light alignment object W The light that is irradiated to the light to the object W is polarized. The light alignment film is irradiated to the light alignment film of the light-aligning object W, and the light alignment film is aligned. As shown in FIG. 4, the polarizer unit 10 includes a plurality of unit polarizer units 12, and a frame 14 in which the unit polarizer units 12 are arranged side by side in a row in a row. The frame 14 is a frame-like frame in which the unit polarizer units 12 are connected to each other. The unit polarizer unit 12 includes a wire grid polarizer (polarizer) 16 formed in a substantially rectangular plate shape.

In the present embodiment, each unit polarizer unit 12 supports the wire grid polarizer 16 such that the line direction A becomes parallel to the linear motion direction X, and the direction orthogonal to the line direction A and the wire grid polarizer The arrangement direction of 16 is the same.

The wire grid polarizer 16 is one of linear polarizers which are formed with a grid formed on the surface of the substrate. As described above, since the lamp 4 has a rod shape, light of various angles is incident on the wire grid polarizer 16, but even if it is obliquely incident light, the wire grid polarizer 16 linearly polarizes and transmits the light. The wire grid polarizer 16 is supported by the unit polarizer unit 12 in such a manner that its normal direction is a rotation axis, and the rotation axis is rotated in the plane to slightly adjust the direction of the polarization axis C1. That is, the plurality of wire grid polarizers 16 are disposed so as to be spaced apart from each other so that the direction of the polarization axis C1 can be finely adjusted. For all the unit polarizer units 12, the polarization axis C1 of the wire grid polarizer 16 is finely adjusted in a predetermined alignment direction, whereby the entire length of the long-axis direction of the polarizer unit 10 can be obtained, and the polarization is obtained. The axis C1 aligns the polarized light with high precision, thereby achieving high-quality light alignment. The wire grid polarizer 16 whose polarization axis C1 is adjusted is fixed to the frame 14 by the screw (fixing means) 19 at the upper end and the lower end of the unit polarizer unit 12, thereby being fixedly disposed on the frame 14.

Further, as shown in FIGS. 2 and 3, the optical alignment device 1 includes a cooling lamp 4, a mirror 5, a wavelength selection filter 7, and a cooling unit 20 of the polarizer unit 10. The The cooling unit 20 is independently provided with a heat source cooling path 30 for cooling the lamp 4 and the mirror 5, and a polarizer cooling path 40 for cooling the polarizer unit 10. Each of the heat source cooling path 30 and the polarizer cooling path 40 is provided with air blowers 21 and 21 for blowing cooling air, coolers 22 and 22 for cooling the cooling air, and foreign matter such as dust contained in the cooling air. Filters 23, 23. The blower 21 is disposed on the upstream side of the cooler 22 . Thereby, the cooling air cooled by the cooler 22 can be prevented from being reheated by the heat source of the blower 21. In the present embodiment, the blower 21 uses a blower, the cooler 22 uses a water-cooled radiator, and the filter 23 uses a high-efficiency particulate air (HEPA) filter, but the blower 21 and the cooler 22 The filter 23 and the filter 23 are not limited to these configurations.

In the heat source cooling path 30, the blower 21, the cooler 22, and the filter 23 are housed in the cooling unit case 20A provided outside the casing 3. In the present embodiment, the cooling unit case 20A is disposed above the case 3 so as to be spaced apart from the case 3, but the arrangement position of the cooling unit case 20A is not limited thereto. In the cooling unit tank 20A, a chamber 24 is provided, and the outlet 25A of the blower 21 and the inlet 24A of the chamber 24 are connected by a duct 25. The chamber 24 is expanded in diameter from the inlet 24A to the downstream side, a cooler 22 is disposed on the upstream side in the chamber 24, and a filter 23 is disposed on the downstream side. The outlet 24B of the chamber 24 is connected to the casing 3 by a duct 26, and the suction port 21B of the blower 21 is connected to the casing 3 by a duct 27.

A partition wall 31 surrounding the side of the lamp 4 and the mirror 5 is provided in the casing 3 so as to be spaced apart from the casing 3 by a gap δ1. The partition wall 31 has an opening 31A in the lower portion for exposing the lamp 4 and the mirror 5 to the lower portion, and a vent hole 31B at the upper portion. The duct 26 is connected to the casing 3 at a position corresponding to the gap δ1 on the outer side of the partition wall 31, and the duct 27 is connected to a position corresponding to the space R inside the partition wall 31. The housing 3. The air blower 21, the duct 25, the chamber 24 (the cooler 22, the filter 23), the duct 26, the gap δ on the outer side of the partition wall 31, the space R inside the partition wall 31, and the duct 27 constitute a heat source cooling path. 30.

In the heat source cooling path 30, the cooling air (air) blown from the blower 21 flows through the duct 25 through the duct 25, thereby being cooled by the cooler 22, and the foreign matter is removed by the filter 23. The cooling air is dehumidified by the filter 23 so that the dew point becomes -50 ° C to -90 ° C or less, and the foreign matter is removed to become a low dew point and high-purity air (clean dry air (clean dry Air)). The cooling air that becomes clean and dry air is supplied into the casing 3 via the duct 26. In the casing 3, the cooling air flows through the gap δ1 between the partition wall 31 and the casing 3, and flows into the gap δ2 between the partition wall 31 and the transparent body 6, thereby flowing into the mirror 5 and in the mirror. The lamp 4 and the mirror 5 are cooled by the space R in the outer side of the partition wall 31. The cooling air which cools the lamp 4 and the mirror 5 and has a high temperature is formed from the through hole 5A formed in the upper portion of the mirror 5, and then flows from the outside of the mirror 5 to the space R in the partition wall 31, thereby sucking in via the duct 27. It is cooled again to the blower 21. As described above, the cooling air is circulated through the heat source cooling path 30.

In the polarizer cooling path 40, a blower 21, a cooler 22 disposed in the chamber 24, and a filter 23 are also disposed in the cooling unit tank 20A, and the blower outlet 21A and the chamber 24 of the blower 21 are connected by the duct 25. Entrance 24A. Further, the outlet 24B of the chamber 24 is connected to the casing 3 by a duct 28, and the suction port 21B of the blower 21 is connected to the casing 3 by a duct 29.

The duct 28 includes an extending portion 28A that extends across the light emitting opening portion 3A of the casing 3, and more particularly across the length of the longitudinal direction of the polarizer unit 10, and a reduced diameter portion 28B from which the self-extending portion 28A Reduced diameter. The reduced diameter portion 28B is connected to the cavity The outlet 24B of the chamber 24 is connected to the housing 3 by an extension portion 28A. Similarly, the duct 29 is provided with an extending portion 29A that extends across the light exit opening portion 3A of the casing 3, more specifically across the length of the longitudinal direction of the polarizer unit 10, and a reduced diameter portion 29B from which The extension portion 29A is reduced in diameter. The reduced diameter portion 29B is connected to the suction port 21B of the blower 21, and the extended portion 29A is connected to the casing 3. The extension portion 28A and the extension portion 29A are supported by the casing 3 via the plate-shaped support members 28C and 29C.

The polarizer unit 10 is disposed on the outer side of the casing 3, and is disposed at a position opposed to the light exit opening 3A so as to be spaced apart from the transparent body 6, and the frame 14 is fixed to the polarizer unit fixing table 8. The ducts 28 and 29 are connected between the casing 3 and the polarizer unit fixing table 8. The duct 28 is connected to one end side of the linear motion direction X, and the duct 29 is connected to the other end side of the linear motion direction X. The air blower 21, the duct 25, the chamber 24 (the cooler 22, the filter 23), the duct 28, the space S between the transparent body 6 and the polarizer unit 10, and the duct 29 constitute a polarizer cooling path 40. That is, the polarizer cooling path 40 constitutes a space cooling path for cooling the space S between the transparent body 6 and the polarizer unit 10.

In the polarizer cooling path 40, the cooling air blown from the blower 21 flows through the duct 25 through the duct 25, is cooled by the cooler 22, and removes foreign matter by the filter 23, thereby flowing in through the duct 28. The polarizer unit 10 is cooled to a space S between the transparent body 6 and the polarizer unit 10. At this time, the cooling air flowing into the space S flows so as to be orthogonal to the longitudinal direction of the lamp 4. The cooling air that cools the polarizer unit 10 and has a high temperature is sucked into the blower 21 via the duct 29, and is cooled again. As described above, the cooling air is circulated through the polarizer cooling path 40.

Moreover, since the polarizer cooling path 40 is completely independent of the heat source cooling path 30, it is controlled by the heat source cooling path 30 and the polarizer cooling path 40, respectively. The temperature of the cooling air can individually cool the lamp 4 and the polarizer unit 10. At this time, the blowers 21 and 21 are individually controlled so that the wind speed of the cooling air of the heat source cooling path 30 is relatively slow, and the wind speed of the cooling wind of the polarizer cooling path 40 is relatively fast, thereby enabling The light source 4 is cooled at a relatively high temperature to cool the polarizer unit 10 at a relatively low temperature. Thereby, the lamp 4 and the polarizer unit 10 can be appropriately cooled. Further, the duct 28 for supplying the cooling air to the space S between the transparent body 6 and the polarizer unit 10, and the duct 29 for discharging the cooling air from the space S extend over the length of the longitudinal direction of the polarizer unit 10, so that It is cooled substantially uniformly across the entire polarizer unit 10.

In addition, it is present in the process of the light-aligning object W (during irradiation), and the outgas is generated from the alignment film. Further, in the environment in which the optical alignment device 1 is disposed, foreign matter such as paper powder may be present. When foreign matter such as outgas is mixed or adhered to the wire grid polarizer 16, the polarization characteristics of the wire grid polarizer 16 are changed to cause an adverse effect. Therefore, in the present embodiment, the optical alignment device 1 includes a positive pressure mechanism 50 that sets the space S between the transparent body 6 and the polarizer unit 10 to a positive pressure. More specifically, the duct 29 that connects the suction port 21B of the blower 21 to the casing 3 is provided with a flow rate adjusting means 51 composed of, for example, a damper or the like. The flow rate adjusting means 51 is used to reduce the flow rate of the cooling air flowing through the duct 29 located downstream of the space S, whereby the space S between the transparent body 6 and the polarizer unit 10 can be set to a positive pressure.

When the space S becomes a positive pressure, the cooling air is blown from the gap of the polarizer unit 10 to the outside. Therefore, it is possible to prevent foreign matter from entering the polarizer cooling path 40 from the gap of the polarizer unit 10. Thereby, it is possible to surely prevent foreign matter from adhering or intruding into the polarizer unit 10. Examples of the gap of the polarizer unit 10 include a gap between the frame 14 of the polarizer unit 10 and the polarizer unit fixing table 8, or a plurality of wire grid polarized lights. The gap between the sheets 16 and the like. Therefore, it is possible to reliably prevent the intrusion of foreign matter into the polarizer cooling path 40 without providing a means for hermetically closing the gaps. Therefore, the number of parts of the optical alignment device 100 can be reduced, and the manufacturing steps can be simplified.

Further, an introduction port 52 for introducing air from the outside is formed in the duct 29. Air is introduced from the outside only by the amount of air blown from the gap of the polarizer unit 10 via the introduction port 52. Therefore, it is possible to prevent the negative pressure from being excessively generated in the polarizer cooling passage 40, and the blower 21 can be efficiently operated. In the present embodiment, the introduction port 52 is provided downstream of the flow rate adjusting means 51. However, the introduction port 52 may be provided at any position as long as it is upstream of the cooler 22 and the filter 23. The flow rate adjusting means 51 and the inlet port 52 constitute the positive pressure mechanism 50 of the present embodiment.

As described above, according to the present embodiment, the optical alignment device 1 is configured such that the mirror 5 and the lamp 4 are housed in the casing 3 of the light illuminator 2, and the light-emitting opening 3A of the casing 3 is provided with a transparent body 6 and wavelength selection. The light transmitting member such as the filter 7 and the polarizer unit 10 are provided, and the heat source cooling path 30 of the mirror 5 and the lamp 4 is independent of the polarizer cooling path 40 between the light transmitting member and the polarizer unit 10. According to this configuration, the lamp 4 and the polarizer unit 10 can be individually cooled by individually controlling the temperature of the cooling air flowing through the heat source cooling path 30 and the polarizer cooling path 40, so that the lamp 4 and the polarizer can be appropriately cooled. Unit 10.

Further, according to the present embodiment, since the space S between the transparent body 6 and the polarizer unit 10 is set to a positive pressure, the cooling air can be blown from the gap of the polarizer unit 10 to the outside, thereby preventing foreign matter from entering. The light alignment device 100 is inside.

Further, according to the present embodiment, the polarizer unit 10 has a configuration in which a plurality of wire grid polarizers 16 are arranged side by side in the lateral direction. In this configuration, the space S between the transparent body 6 and the polarizer unit 10 can be set to a positive voltage, and a plurality of wire grids can be used. Since the cooling air is blown to the outside by the gap between the polarizers 16, foreign matter can be prevented from entering the optical alignment device 100.

Further, in the present embodiment, the polarizer cooling path 40 is provided, and the positive pressure mechanism 50 is provided in the duct 29 that connects the suction port 21B of the blower 21 and the casing 3, but the light irradiation device shown in FIG. 5 may be used. The suction port 21B of the blower 21 and the casing 3 are connected only by the duct 29 as usual.

<Second embodiment>

Next, a second embodiment of the present invention will be described with reference to Figs. 6 to 11 . In the first embodiment, the optical alignment device 1 has one working platform 83. However, in the second embodiment, the optical alignment device 200 is configured as a dual-platform type having two working platforms 83. In addition, in FIGS. 6 to 11 , the same portions as those of the optical alignment device 1 shown in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. FIG. 6 is a plan view schematically showing a configuration of an optical alignment illumination system including the optical alignment device 200 of the second embodiment, and shows a standby state of the work platform 83. The optical alignment illumination system includes a light alignment device 200, a robot device 90, and an angle adjustment device 85.

The optical alignment device 200 includes a stage transport pedestal 81, an illuminator installation pedestal 82, two working platforms 83, and a light illuminator 2. The platform transfer pedestal 81 is provided with a linear motion mechanism 84 and a rotation drive mechanism (not shown). The linear motion mechanism 84 is arranged such that the surface of the platform transport pedestal 81 passes directly below the light illuminator 2 The motion direction X is transferred to the work platform 83, and the rotation drive mechanism is provided in a manner corresponding to each of the work platforms 83 to rotationally drive the work platform 83. In the rotation drive mechanism, the work surface 83 is rotated to slightly adjust the angle of the light to the object W such that the light-aligning object W is in the following positive posture: one of the light-aligning objects W The opposite sides are aligned (parallel) with respect to the long axis L of the lamp 4, and the other pair of the light-aligning object W is orthogonal to the long axis L of the lamp 4. Further, when the polarization axis angle of the polarized light required to illuminate the light to the object W is a predetermined angle with respect to the long axis L of the lamp 4, the rotation drive mechanism rotates the work platform 83 by a predetermined angle.

The robot apparatus 90 includes a flat plate 91 that is disposed parallel to the platform transport pedestal 81 of the optical alignment device 200, a robot 92 that is supported by the flat plate 91, and a reciprocating drive mechanism 93 that reciprocates the robot 92 in the linear motion direction X. . The robot 92 includes an arm 92A that can reciprocate (rotate and expand and contract) in the linear motion direction X, and a holding portion 92B that is fixed to the arm 92A and holds the light-aligning object W. The arm 92A is supported by the flat plate 91 so as to be rotatable on a horizontal surface. The arm 92A of the present embodiment is a multi-joint arm configured to be expandable and contractible with a plurality of rotatory joints, but the configuration of the arm 92A is not limited thereto. The robot 92 moves the arm 92A, receives the light-aligning object W from the outside, and places the light-aligning object W on the adjustment platform of the angle adjusting device 85, and mounts the light-aligning object W to the work platform 83 from the angle adjusting device 85. .

The angle adjusting device 85 is not shown, but includes an adjustment stage that mounts the light-aligning object W and adjusts the angle of the light-aligning object W. The angle adjusting device 85 adjusts the angle of the light-aligning object W such that the one side of the light-aligning object W is aligned (parallel) with respect to the long axis L of the lamp 4, and the light is aligned with the object W. The other pair of sides are orthogonal to the long axis L of the lamp 4.

Next, the operation of the light alignment irradiation system will be described. Here, for convenience of explanation, one working platform 83 is referred to as a first working platform 83, and the other working platform 83 is referred to as a second working platform 83. As shown in FIG. 6, in the initial state, the first and second working platforms 83 are respectively located at one side P1 side and the other end of the linear motion direction X. On the P2 side, and the robot 92 is located on the side of the one end P1, the lamp 4 is lit.

First, the robot 92 receives the light-aligning object W from the outside of the optical alignment device 200, and after the light-aligning object W is set to the normal posture by the angle adjusting device 85, the light is aligned to the object as shown in FIG. W is placed on the first working platform 83. The rotation driving mechanism of the first working platform 83 drives the first working platform 83 to finely adjust the angle of the light to the object W, and if necessary, rotates the light to the object W with respect to the long axis L of the lamp 4, and rotates only the predetermined one. angle. Next, as shown in FIG. 8, the linear motion mechanism 84 moves the first work stage 83, thereby irradiating the light-aligning object W with the polarized light.

While the first working platform 83 is irradiating the light-aligning object W, the robot 92 moves the arm 92A to receive the next light-aligning object W from the outside of the optical alignment device 200, and the light is aligned by the angle adjusting device 85. The object W is set to the positive posture and receives the light alignment object W again. Next, as shown in FIG. 9, the robot 92 moves to the other end P2 side by the reciprocating drive mechanism 93, and moves the arm 92A to mount the optical alignment object W on the second work stage 83. The rotation drive mechanism of the second work platform 83 slightly adjusts the angle of the light-aligning object W, and if necessary, rotates the light-aligning object W by a predetermined angle with respect to the long axis L of the lamp 4. Next, as shown in FIG. 10, the linear motion mechanism 84 follows the movement of the return path of the first work platform 83 to move the second work platform 83, thereby irradiating the light to the object W on the second work platform 83. Light. While the first and second work platforms 83 are irradiating the light-aligning object W, the robot 92 is moved to the one end P1 side by the reciprocating drive mechanism 93.

While the second working platform 83 is irradiating the light-aligning object W, the robot 92 receives the light alignment from the first working platform 83 as shown in FIG. The object W is placed in an external storage place. Then, the robot 92 receives the light-aligning object W from the outside, and after the light-aligning object W is set to the normal posture by the angle adjusting device 85, the light-aligning object W is placed on the first working platform 83. In other words, between the first working platform 83 and the irradiation region of the light irradiator 2, a space for the light distribution object W on the second working platform 83 to pass through the irradiation region is secured to the second working platform 83 and Between the irradiation regions, a space is provided in which the light-aligning object W on the first working platform 83 passes through the irradiation region or more. As described above, the two working platforms 83 are provided to move the other working platform 83 in such a manner as to follow the movement of one working platform 83, whereby the step operation time of the processing (optical alignment irradiation) of the light-aligning object W can be shortened.

However, the above-described embodiments are an embodiment of the present invention, and may be appropriately modified without departing from the spirit and scope of the invention. For example, in the above embodiment, the ultraviolet ray lamp 4 has been described as a light source, but the light source is not limited thereto. Further, in the above embodiment, the transparent body 6 and the wavelength selective filter 7 are provided as the light transmitting member, but the light transmitting member is not limited thereto.

Further, in the above embodiment, the plurality of wire grid polarizers 16 constitute the polarizer unit 10, but the number of the wire grid polarizers 16 may be one. Further, in the above embodiment, the wire grid polarizer 16 is used as the polarizer, but the polarizer may be a polarizer using, for example, a vapor deposited film.

Further, in the above embodiment, the arrangement of the air blower 21, the cooler 22, and the filter 23 is arbitrarily changed from the upstream in the order of the blower 21, the cooler 22, and the filter 23.

Further, in the above embodiment, the blowers 21 and 21 are individually controlled to individually control the temperature of the cooling air flowing through the heat source cooling path 30 and the polarizer cooling path 40. However, the cooling temperatures of the coolers 22, 22 can also be set to different temperatures.

Further, in the above embodiment, the heat source cooling path 30 and the polarizer cooling path 40 are completely independent, but a part of the heat source cooling path 30 and the polarizer cooling path 40, for example, the blower 21, the cooler 22, and the filter 23 may be used. At least one of the commons. Further, in the above embodiment, the cooling air circulation of the heat source cooling path 30 and the polarizer cooling path 40 is circulated, but it is not necessary to circulate the cooling air.

1‧‧‧Light alignment device (light irradiation device)

2‧‧‧Light illuminator

4‧‧‧Lights (light source)

5‧‧‧Mirror

10‧‧‧Polarizer unit

81‧‧‧ platform transfer pedestal

82‧‧‧ illuminator setting pedestal

83‧‧‧Working platform

X‧‧‧linear motion direction

Claims (5)

A light irradiation device is characterized in that a mirror and a light source are housed in a casing of a light illuminator, and a light transmission member and a polarizer unit are provided in a light exit opening of the casing, and a heat source cooling path of the mirror and the light source is provided. It is independent of the space cooling path between the light transmitting member and the polarizer unit. The light irradiation device according to claim 1, wherein a space between the light transmitting member and the polarizer unit is set to a positive pressure. The light irradiation device according to claim 1 or 2, wherein the polarizer unit is formed by arranging a plurality of polarizers in a lateral direction. The light irradiation device according to any one of claims 1 to 3, wherein the heat source cooling path and the space cooling path flow through a cooling air cooled by a cooler. An optical alignment device is characterized in that a mirror and a light source are housed in a housing of a light illuminator, and a light-transmitting member is provided in a light-emitting opening of the casing to close the light-emitting opening, and the light-transmitting member is provided in the light-transmitting member. On the outer side, a polarizer unit is provided at a position facing the light transmitting member at a position facing the light transmitting member, and a mirror and a light source for supplying a cooling air to the inside of the light emitting opening of the casing are provided. The heat source cooling path is independent of the polarizer cooling path of the polarizer unit that supplies the cooling air to the space between the light transmitting member and the polarizer unit, and the space structure between the light transmitting member and the polarizer unit The above polarizer cooling path.