JP6398766B2 - Polarized light irradiation device for photo-alignment - Google Patents

Description

  Embodiments described herein relate generally to a polarized light irradiation apparatus for photo-alignment.

  In a manufacturing process of a liquid crystal panel or the like, an alignment process of an object such as an alignment film of a liquid crystal panel or an alignment layer of a viewing angle compensation film is performed. In the alignment treatment, there is known a polarized light irradiation apparatus for photo-alignment that is used to perform so-called photo-alignment, in which alignment is performed by irradiating polarized light with a predetermined wavelength to an alignment film.

  As this type of polarized light irradiation device for photo-alignment, for example, an irradiation unit that irradiates polarized light, a stage on which a substrate on which an alignment film is formed, and a stage that passes through an irradiation area of the irradiation unit. And a transport mechanism that transports the stage.

  Further, as an apparatus similar to the above-described polarized light irradiation apparatus for photo-alignment, the first and second stages on which the substrate is mounted pass through the exposure unit that exposes the substrate. An exposure apparatus that conveys two stages is known.

JP 2008-191302 A

  By the way, the object such as a liquid crystal panel tends to increase in size, and accordingly, the irradiation time for the object in the polarized light irradiation device for photo-alignment increases. For this reason, there is a problem that the processing time per one object (hereinafter referred to as tact time) becomes long and the productivity is lowered. Further, there is a problem that the polarized light irradiation device for photo-alignment is increased with the increase in size of the object.

  Accordingly, an object of the present invention is to provide a polarized light irradiation apparatus for photo-alignment that can suppress an increase in tact time and an increase in installation space of the entire apparatus.

  The polarized light irradiation apparatus for photo-alignment according to the embodiment includes an irradiation unit having an irradiation region for irradiating a target with polarized light, a first stage and a second stage on which the target is mounted, and the first. A first transport path for transporting the first stage from a first mounting position for mounting the target object on the stage to an irradiation start position adjacent to the irradiation area; and the target object on the second stage. And a second transport path for transporting the second stage from the second mounting position to the irradiation start position, and one end connected to the irradiation start position, and passing through the irradiation region and the irradiation A third conveyance path for conveying the first stage and the second stage, the other end extending to a passage position adjacent to the region, and between the first mounting position and the passage position In front of the first stage While reciprocating along the first transport path and the third transport path, the second stage is moved between the second mounting position and the passing position, and the second transport path and the third transport path. A transport mechanism that reciprocates along the transport path.

  According to the present invention, it is possible to suppress an increase in tact time and to suppress an increase in installation space of the entire apparatus.

FIG. 1 is a side view schematically showing a polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 2 is a plan view schematically showing the polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 3 is a schematic plan view for explaining the operations of the first and second stages in the polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 4 is a schematic plan view for explaining the operation of the first and second stages in the polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 5 is a schematic plan view for explaining the operation of the first and second stages in the polarized light irradiation device for photo-alignment according to the first embodiment. FIG. 6 is a schematic plan view for explaining the operations of the first and second stages in the polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 7 is a schematic plan view for explaining the operations of the first and second stages in the polarized light irradiation apparatus for photo-alignment according to the first embodiment. FIG. 8 is a plan view schematically showing a polarized light irradiation apparatus for photo-alignment according to the second embodiment. FIG. 9 is a plan view schematically showing a modification of the polarized light irradiation device for photo-alignment according to the second embodiment. FIG. 10 is a side view and a plan view schematically showing a polarized light irradiation apparatus for photo-alignment according to the third embodiment.

  A polarized light irradiation apparatus for photo-alignment (hereinafter referred to as a polarized light irradiation apparatus) 1 according to an embodiment described below includes an irradiation unit 10, a first stage 11, a second stage 12, and a transport mechanism 15. It comprises. The irradiation unit 10 has an irradiation area A that irradiates the object with polarized light. An object is mounted on the first stage 11 and the second stage 12. The transport mechanism 15 has a first transport path 16 that transports the first stage 11 from the first mounting position P1 on which the object is mounted on the first stage 11 to the irradiation start position P3 adjacent to the irradiation area A. Have. In addition, the transport mechanism 15 includes a second transport path 17 that transports the second stage 12 from the second mounting position P2 on which the object is mounted on the second stage 12 to the irradiation start position P3. The transport mechanism 15 has one end connected to the irradiation start position P3 and the other end extending to the passing position P4 adjacent to the irradiation area A through the irradiation area A, and the first stage 11 and the second stage. A third transport path 18 for transporting the stage 12 is provided. The transport mechanism 15 reciprocates the first stage 11 along the first transport path 16 and the third transport path 18 between the first mounting position P1 and the passage position P4, and also performs the second mounting. The second stage 12 is reciprocated along the second conveyance path 17 and the third conveyance path 18 between the position P2 and the passage position P4.

Further, the transport direction of at least one of the first transport path 16 and the second transport path 17 according to the embodiment described below intersects the transport direction of the third transport path 18 on the same plane. .
Moreover, the 1st conveyance path and 2nd conveyance path which concern on embodiment described below are arrange | positioned along with the up-down direction.

  Hereinafter, a polarized light irradiation apparatus according to an embodiment will be described with reference to the drawings.

(First embodiment)
Fig.1 (a) is a side view which shows typically the polarized light irradiation apparatus which concerns on 1st Embodiment. FIG. 1B is a side view schematically showing the polarized light irradiation apparatus according to the first embodiment. FIG. 2 is a plan view schematically showing the polarized light irradiation apparatus according to the first embodiment. The polarized light irradiation apparatus according to the present embodiment is used for photoalignment, for example, by irradiating polarized light such as linearly polarized light onto an alignment film that is an object. The polarized light irradiation apparatus according to the present embodiment is used for manufacturing, for example, an alignment film of a liquid crystal panel and an alignment film of a viewing angle compensation film.

(Configuration of polarized light irradiation device)
As shown in FIGS. 1A and 1B, the polarized light irradiation apparatus 1 according to the first embodiment includes an irradiation unit 10, a first stage 11 and a second stage 12, a transport mechanism 15, Is provided.

  The irradiation unit 10 has an irradiation region A for irradiating polarized light onto a substrate 9 (hereinafter simply referred to as a substrate 9) on which an alignment film as an object is formed. Further, the irradiation unit 10 includes a tubular light source 10a that emits light including ultraviolet rays, and a reflector 10b that controls the orientation of the light emitted from the light source 10a. Further, the irradiation unit 10 includes a polarizing element (not shown) that emits polarized light when light emitted from the light source 10a and light whose orientation is controlled by the reflecting plate 10b are incident.

  Here, the “irradiation area A” refers to an opening on the lowermost surface of the irradiation unit 10, that is, an opening at a position closest to the object in the irradiation unit 10. For example, if the lowermost surface of the irradiation unit 10 is a polarizing element, the opening of the polarizing element corresponds to the irradiation region A, and if there is a light shielding plate (not shown) closer to the object side than the polarizing element, the opening of the light shielding plate is irradiated. Corresponds to region A. Furthermore, if the light shielding plate has a protective glass (not shown), the opening of the protective glass corresponds to the irradiation region A.

  The light source 10a is, for example, a high-pressure mercury lamp in which a rare gas such as mercury, argon, or xenon is enclosed in an ultraviolet light transmissive glass tube, or a metal halide lamp in which a metal halide such as iron or iodine is further enclosed in the high-pressure mercury lamp. Tube-type lamps are used and have a linear light-emitting portion. In the light source 10 a, the longitudinal direction of the light emitting unit is orthogonal to the transport direction of the stages 11 and 12 with respect to the irradiation unit 10, and the length of the light emitting unit is longer than the length of one side of the substrate 9. The light source 10a can emit light including ultraviolet rays having a wavelength of 200 nm to 400 nm, for example, from a linear light emitting unit. The light emitted from the light source 10a is so-called non-polarized light having various polarization axis components.

  The reflection plate 10b has a reflection surface that reflects light emitted from the light source 10a on a surface facing the light source 10a, and the reflection surface is formed in a shape that forms part of an ellipse. Thereby, the reflecting plate 10b is configured as a so-called condensing type reflecting plate that collects the light emitted from the light source 10a. The polarizing element is capable of extracting light having a polarization axis oscillated only in the reference direction from light including various polarization axis components emitted from the light source 10a and uniformly oscillating in all directions. Note that light having a polarization axis that vibrates only in the reference direction is generally referred to as linearly polarized light. The polarization axis is the vibration direction of the electric field and magnetic field of light.

  The first and second stages 11 and 12 are formed in a rectangular plate shape, and a substrate 9 on which an alignment film is formed is mounted. As shown in FIG. 2A, the pair of first and second stages 11 and 12 are supported by the transport mechanism 15 so as to be movable.

  As shown in FIG. 2A, the transport mechanism 15 includes a first transport path 16 that transports the first stage 11, a second transport path 17 that transports the second stage 12, And a third transport path 18 for transporting the second stages 11 and 12.

  As shown in FIG. 2B, the transport mechanism 15 is set in parallel to each other, and is orthogonal to the set of first guide shafts 15a and the set of first guide shafts 15a. And a pair of second guide shafts 15b. Although not shown, the transport mechanism 15 includes a drive mechanism that transports the first and second stages 11 and 12 along the first and second guide shafts 15a and 15b. The first and second transport paths 16 and 17 are configured by a first guide shaft 15a in a linear shape that continues along the X-axis direction in FIGS. 1B and 2A. The third transport path 18 is configured linearly along the Y-axis direction in FIGS. 1A and 2A by the second guide shaft 15b, and the transport direction of the first and second transport paths 16, 17 Is orthogonal to. Accordingly, the first to third transport paths 16, 17, and 18 are connected in an overall T shape on the same plane.

  As shown in FIG. 1B and FIG. 2B, the first transport path 16 is irradiated adjacent to the irradiation area A from the first mounting position P1 where the substrate 9 is mounted on the first stage 11. The first stage 11 is transported to the start position P3. The second transport path 17 transports the second stage 12 from the second mounting position P2 on which the substrate 9 is mounted on the second stage 12 to the irradiation start position P3. As shown in FIG. 1A and FIG. 2B, the third transport path 18 is connected at one end to each end of the first transport path 16 and the second transport path 17, One end is connected to the irradiation start position P3. Further, the other end of the third conveyance path 18 extends through the irradiation area A to a passing position P4 adjacent to the irradiation area A. Thereby, the third transport path 18 transports the first stage 11 and the second stage 12.

  The transport mechanism 15 reciprocates the first stage 11 along the first transport path 16 and the third transport path 18 between the first mounting position P1 and the passage position P4, and also performs the second mounting. The second stage 12 is reciprocated along the second conveyance path 17 and the third conveyance path 18 between the position P2 and the passage position P4.

(Operation of each stage during irradiation with polarized light)
Regarding the polarized light irradiation apparatus 1 configured as described above, the operation of transporting the first and second stages 11 and 12 to the irradiation unit 10 and irradiating the substrate 9 with the polarized light will be described with reference to the drawings. To do. 3 to 7 are schematic plan views for explaining the operations of the first and second stages in the polarized light irradiation apparatus according to the first embodiment.

  First, as shown in FIGS. 2A and 2B, the substrate 9 is mounted on the first stage 11 located at the first mounting position P1. Subsequently, as shown in FIG. 3, the first stage 11 is transported along the first transport path 16 from the first mounting position P1 to the irradiation start position P3 by the transport mechanism 15. Subsequently, the first stage 11 is transported along the third transport path 18 by the transport mechanism 15 from the irradiation start position P3 through the irradiation region A of the irradiation unit 10 to the passing position P4. At this time, the first stage 11 passes through the irradiation region A, and the alignment film of the substrate 9 is irradiated with a predetermined amount of polarized light.

  Subsequently, as shown in FIG. 3, the first stage 11 is transported along the third transport path 18 by the transport mechanism 15 from the passing position P4 through the irradiation region A to the irradiation start position P3. At this time, the first stage 11 passes through the irradiation region A again, so that the alignment film of the substrate 9 is irradiated with a predetermined amount of polarized light, and the irradiation of the polarized light ends. Therefore, the irradiation start position P3 also corresponds to the irradiation end position. Hereinafter, for convenience of explanation, the irradiation start position P3 is also referred to as an irradiation end position P3.

  Then, as shown in FIG. 4, the first stage 11 is transported along the first transport path 16 from the irradiation end position P3 to the first mounting position P1. At this time, in conjunction with the movement of the first stage 11 from the irradiation end position P3 (irradiation start position P3) toward the first mounting position P1, the second stage 12 moves from the second mounting position P2 to the irradiation start position. It is transported along the second transport path 17 toward P3.

  With respect to the timing at which the conveyance of the second stage 12 is started, the second stage 12 is linked with the operation in which the first stage 11 starts moving from the irradiation end position P3 toward the first mounting position P1. The operation of starting the movement from the second mounting position P2 toward the irradiation start position P3 is preferable from the viewpoint of shortening the tact time. If necessary, after the first stage 11 is returned from the irradiation end position P3 to the first mounting position P1, the second stage 12 moves from the second mounting position P2 toward the irradiation start position P3. You may start moving.

  Therefore, the second stage 12 positioned at the second mounting position P2 during the operation in which the first stage 11 reciprocates between the first mounting position P1 and the irradiation end position P3 through the irradiation region A. A substrate 9 is mounted on the top.

  Subsequently, as shown in FIG. 5, the second stage 12 is transported along the second transport path 17 from the second mounting position P2 to the irradiation start position P3 by the transport mechanism 15, and then starts irradiation. It is conveyed along the third conveyance path 18 from the position P3 through the irradiation area A to the passing position P4. The second stage 12 is transported along the third transport path 18 by the transport mechanism 15 from the passing position P4 through the irradiation region A to the irradiation start position P3 (irradiation end position P3). At this time, the second stage 12 reciprocates in the irradiation region A, so that the alignment film of the substrate 9 is irradiated with a predetermined amount of polarized light.

  Further, as shown in FIG. 5, the second stage 12 moves to the first mounting position P1 while moving back and forth between the second mounting position P2 and the irradiation end position P3 through the irradiation area A. The substrate 9 that has been irradiated is recovered from the returned first stage 11, and the next substrate 9 is mounted on the first stage 11.

  Subsequently, as shown in FIG. 6, the first stage 11 on which the next substrate 9 is mounted in conjunction with the operation in which the second stage 12 is transported from the irradiation end position P3 to the second mounting position P2, It is conveyed from the first mounting position P1 toward the irradiation start position P3.

  Similarly to the above, as shown in FIG. 7, the first stage 11 is transported along the first transport path 16 from the first mounting position P1 to the irradiation start position P3, and then from the irradiation start position P3. It passes through the irradiation area A and is transported along the third transport path 18 to the passing position P4. The first stage 11 is transported along the third transport path 18 by the transport mechanism 15 from the passing position P4 through the irradiation region A to the irradiation start position P3 (irradiation end position P3). Similarly to the above, the first stage 11 is returned to the second mounting position P2 while moving back and forth between the first mounting position P1 and the irradiation end position P3 through the irradiation area A. The substrate 9 that has been irradiated is collected from the second stage 12 and the next substrate 9 is mounted on the second stage 12.

  Thereafter, irradiation of polarized light on the alignment film of the substrate 9 on the first stage 11 and irradiation of polarized light on the alignment film of the substrate 9 on the second stage 12 are performed alternately and repeatedly.

(Effects of the first embodiment)
The transport mechanism 15 in the first embodiment includes a first transport path 16 that transports the first stage 11 from the first mounting position P1 to the irradiation start position P3, and an irradiation start position P3 from the second mounting position P2. And a second transport path 17 that transports the second stage 12 to the bottom. The transport mechanism 15 includes a third transport path 18 that is connected to the irradiation start position P3 and has the other end extending to the passage position P4 and transports the first and second stages 11 and 12. The transport mechanism 15 reciprocates the first stage 11 along the first and third transport paths 16 and 18 between the first mounting position P1 and the passage position P4, and also performs the second mounting. The second stage 12 is reciprocated along the second and third transport paths 17 and 18 between the position P2 and the passage position P4.

  Thereby, in conjunction with the operation of returning one stage 11 (12) from the irradiation end position P3 to the mounting position P1 (P2), irradiation of the other stage 12 (11) from the mounting position P2 (P1) is started. It becomes possible to carry to the position P3. For this reason, a part of the transport operation of the first stage 11 and a part of the transport operation of the second stage 12 are performed simultaneously, so that the tact time can be shortened. In other words, since the irradiation start position P3 (irradiation end position P3) of the first stage 11 is the same position as the irradiation start position P3 (irradiation end position P3) of the second stage 12, the tact time Can be suppressed.

  In addition, when the first mounting position and the second mounting position are arranged on both sides of the irradiation area of the irradiation unit, the long path in which the transport path for transporting the first and second stages extends linearly. become. However, according to the first embodiment, since the first mounting position P1 and the second mounting position P2 are arranged on one end side of the irradiation area A, a long installation space (elongation installation space) is provided. Can be avoided. For this reason, it becomes possible to suppress an increase in installation space.

  Therefore, according to the first embodiment, an increase in tact time can be suppressed, and an increase in the installation space of the entire apparatus can be suppressed.

  In the first embodiment, the first and second transport paths 16 and 17 intersect the transport direction of the third transport path 18 on the same plane as the first and second transport paths 16 and 17. Since a mechanism for transporting the stages 11 and 12 in the vertical direction is unnecessary, it is possible to suppress the complexity of the transport mechanism 15.

  Hereinafter, a polarized light irradiation apparatus according to another embodiment will be described with reference to the drawings. In other embodiments, the same components as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof is omitted.

(Second Embodiment)
FIG. 8 is a plan view schematically showing a polarized light irradiation apparatus according to the second embodiment. The second embodiment is different from the first embodiment in the arrangement of the first conveyance path for conveying the first stage 11 and the arrangement of the second conveyance path for conveying the second stage 12.

  As shown in FIG. 8, the polarized light irradiation apparatus 2 of the second embodiment includes a first transport path 26 that transports the first stage 11 and a second transport path 27 that transports the second stage 12. And a third transport path 28 for transporting the first and second stages 11 and 12. The 1st, 2nd and 3rd conveyance paths 26, 27, and 28 are constituted in the shape of a straight line.

  One end of the third transport path 28 is connected to the first transport path 26 and the second transport path 27, and the other end extends to the passing position P4. The 2nd conveyance path 27 and the 3rd conveyance path 28 are connected so that it may continue linearly. The first transport path 26 is connected to the third transport path 28 so as to be orthogonal to the transport directions of the second and third transport paths 27 and 28 on the same plane.

(Effect of 2nd Embodiment)
Also in the second embodiment, similarly to the first embodiment, it is possible to suppress an increase in tact time and to suppress an increase in the installation space of the entire apparatus.

  Also in the second embodiment, the first and second transport paths 26, 27 intersect with the transport direction of the third transport path 28 on the same plane. Since the mechanism for transporting the stages 11 and 12 in the vertical direction is unnecessary, the transport mechanism 15 can be simply configured.

  In the second embodiment, the first mounting position P1 and the second mounting position P2 are arranged close to each other. By adopting such a configuration, an object mounting machine mechanism (not shown) for mounting an object on the first stage 11 at the first mounting position P1, and the second stage 12 at the second mounting position P2. Since an object mounting mechanism (not shown) for mounting an object can be shared, an increase in the object mounting mechanism can be suppressed.

  In the second embodiment, the two first and second stages 11 and 12 are configured to be transported. However, if necessary, three or more stages may be transported. Good. In this case, for example, in the second embodiment, the third mounting position on the third stage or the transport for transporting the third stage to the position facing the first mounting position P1 on the first stage 11. A road may be arranged.

(Modification of the second embodiment)
FIG. 9 is a plan view schematically showing a polarized light irradiation apparatus according to a modification of the second embodiment. The modification of the second embodiment differs from the second embodiment in the arrangement of the second conveyance path that conveys the second stage 12.

  As shown in FIG. 9, the polarized light irradiation apparatus 3 according to the modification of the second embodiment includes a first transport path 36 that transports the first stage 11 and a second transport that transports the second stage 12. A conveyance path 37 and a third conveyance path 38 that conveys the first and second stages 11 and 12 are provided. The 1st, 2nd and 3rd conveyance paths 36, 37, and 38 are constituted in the shape of a straight line.

  One end of the third transport path 38 is connected to the first transport path 36 and the second transport path 37, and the other end extends to the passing position P4. The first, second, and third transport paths 36, 37, and 38 are radially extended from the irradiation start position P3 (irradiation end position P3) in a direction intersecting each other, and one ends thereof are connected to each other. Has been. Accordingly, the first, second, and third transport paths 36, 37, and 38 are connected in an overall Y shape on the same plane.

(Effects of Modification of Second Embodiment)
Also in the modified example of the second embodiment, it is possible to suppress an increase in tact time as in the second embodiment.

  Also in the modification of the second embodiment, the first and second transport paths 36 and 37 intersect the transport direction of the third transport path 38 on the same plane as the first. And since the mechanism which conveys the 2nd stages 11 and 12 to an up-down direction is unnecessary, it becomes possible to suppress complication of the conveyance mechanism 15. FIG.

  Also in the modified example of the second embodiment, the first mounting position P1 and the second mounting position P2 are arranged close to each other. By adopting such a configuration, an object mounting machine mechanism (not shown) for mounting an object on the first stage 11 at the first mounting position P1, and the second stage 12 at the second mounting position P2. Since an object mounting mechanism (not shown) for mounting an object can be shared, an increase in the object mounting mechanism can be suppressed.

(Third embodiment)
FIG. 10A is a side view schematically showing a polarized light irradiation apparatus according to the third embodiment. FIG. 10B is a plan view schematically showing a polarized light irradiation apparatus according to the third embodiment. In the third embodiment, the arrangement of the first conveyance path that conveys the first stage 11 and the arrangement of the second conveyance path that conveys the second stage 12 are the same as those in the first and second embodiments. Different.

  As shown in FIGS. 10A and 10B, the polarized light irradiation device 4 of the third embodiment includes a first conveyance path 46 that conveys the first stage 11, and a second stage 12. And a third transport path 48 for transporting the first and second stages 11 and 12. The 1st, 2nd and 3rd conveyance paths 46, 47, and 48 are constituted in the shape of a straight line.

  One end of the third transport path 48 is connected to the first transport path 46 and the second transport path 47, and the other end extends to the passing position P4. As shown in FIG. 10A, the first conveyance path 46 and the second conveyance path 47 are arranged side by side in the vertical direction. In other words, the first stage 11 positioned at the first mounting position P1 and the second stage 12 positioned at the second mounting position P2 are arranged side by side in the vertical direction. Moreover, the 1st and 2nd conveyance paths 46 and 47 are connected with the 3rd conveyance path 48 so that it may continue linearly as shown in FIG.10 (b).

  The first transport path 46 and the second transport path 47 are arranged so as to overlap when viewed from the direction facing the mounting surfaces of the first and second stages 11 and 12, and Installation space has been reduced. Note that the first conveyance path 46 and the second conveyance path 47 are opposed to the mounting surfaces of the first and second stages 11 and 12 according to necessity such as arrangement restrictions and simplification of the conveyance mechanism. It may be arranged at a position that does not overlap when viewed from above.

(Effect of the third embodiment)
In the third embodiment, since the first transport path 46 and the second transport path 47 are arranged in the vertical direction, the entire apparatus is installed as compared with the first and second embodiments. The space can be further reduced, and an increase in installation space can be further suppressed. That is, the third embodiment is preferable when it is difficult to secure an installation space with respect to the horizontal direction, and it is possible to further suppress an increase in the installation space with respect to the horizontal direction of the installation surface.

  Also in the third embodiment, an increase in tact time can be suppressed as in the first or second embodiment.

  In each of the above-described embodiments, the first to third transport paths configured in a straight line are connected, but the present invention is not limited to this configuration. For example, at least one of the first conveyance path and the second conveyance path and one end of the third conveyance path may be bent and connected in an arc shape. The smoothness of the transport operation may be improved by smoothly connecting the first transport path and the third transport path, and the second transport path and the third transport path.

  In addition, the first stage and the second stage may have a so-called alignment mechanism that performs positioning after mounting an object at the first mounting position P1 and the second mounting position P2.

  The first stage and the second stage are provided with a plurality of pins and a movable part, and the plurality of pins and the movable part are moved up and down to mount the object on the first stage and the second stage. You may have a mounting mechanism.

  In each of the embodiments described above, only one irradiation unit 10 is provided, but the present invention is not limited to this configuration. For example, a plurality of irradiation units 10 may be provided at predetermined intervals along the conveyance direction of the third conveyance path. In this case, the irradiation area A is not only directly below the plurality of irradiation units 10 but also from the lower end of the irradiation unit 10 disposed on one end side to the lowermost surface of the irradiation unit 10 disposed on the other end side. It may be a region between the other ends of the openings.

  Although the embodiments of the present invention have been described, the embodiments are presented as examples and are not intended to limit the scope of the present invention. The embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. The embodiments and modifications thereof are included in the scope of the present invention and the gist thereof, and are also included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Polarized light irradiation apparatus 9 Substrate 10 Irradiation unit 10a Light source 11 1st stage 12 2nd stage 15 Conveyance mechanism 15a 1st guide shaft 15b 2nd guide shaft 16 1st conveyance path 17 2nd conveyance path 18 Third transport path A Irradiation area P1 First mounting position P2 Second mounting position P3 Irradiation start position (irradiation end position)
P4 passing position

Claims (2)

An irradiation unit having an irradiation region for irradiating the object with polarized light;
A first stage and a second stage on which the object is mounted;
A first transport path for transporting the first stage from a first mounting position on which the object is mounted on the first stage to an irradiation start position adjacent to the irradiation region; and a second stage A second transport path that transports the second stage from the second mounting position on which the object is mounted to the irradiation start position, and one end connected to the irradiation start position, and pass through the irradiation region. The other end extends to a passing position adjacent to the irradiation region, and has a third transport path for transporting the first stage and the second stage, the first mounting position and the passing position. The first stage is reciprocated along the first transport path and the third transport path between the second mounting position and the passing position. The stage is moved to the second transport path and the third transport A transport mechanism for reciprocating along the road;
Equipped with,
The polarized light irradiation apparatus for photo-alignment , wherein a transport direction of at least one of the first transport path and the second transport path intersects with a transport direction of the third transport path on the same plane . An irradiation unit having an irradiation region for irradiating the object with polarized light;
A first stage and a second stage on which the object is mounted;
A first transport path for transporting the first stage from a first mounting position on which the object is mounted on the first stage to an irradiation start position adjacent to the irradiation region; and a second stage A second transport path that transports the second stage from the second mounting position on which the object is mounted to the irradiation start position, and one end connected to the irradiation start position, and pass through the irradiation region. The other end extends to a passing position adjacent to the irradiation region, and has a third transport path for transporting the first stage and the second stage, the first mounting position and the passing position. The first stage is reciprocated along the first transport path and the third transport path between the second mounting position and the passing position. The stage is moved to the second transport path and the third transport A transport mechanism for reciprocating along the road;
Comprising
The polarized light irradiation device for photo-alignment , wherein the first transport path and the second transport path are arranged side by side in the vertical direction .

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