TW201519343A - Multi-track feeding rotary type crystal grain detection device - Google Patents

Abstract

The present invention relates to a multi-track feeding rotary type crystal grain detection device, mainly comprising a rotating turret, a plurality of crystal grain taking and putting devices, a plurality of feeding devices, a plurality of detecting stations and a plurality of classification stations. The plurality of crystal grain taking and putting devices are circularly arranged on the rotating turret at an equal interval. The plurality of feeding devices, the plurality of detecting stations, and the plurality of classification stations are circularly arranged along the radial extension direction of the rotating turret at an equal interval. After the crystal grain taking and putting devices take crystal grains from the feeding devices, the rotating turret rotates and transfers the crystal grains to the detecting stations for detection, then the rotating turret rotates and transfers the crystal grains to the classification stations and places the crystal grains, and the classification stations classify the crystal grains. Accordingly, the present invention employs a multi-track feeding and rotation feeding transference mode simultaneously, so as to detect and classify the crystal grains one by one, thereby being a high-efficiency continuous detection and classification technology.

Description

Rotary grain detecting device for multi-track feeding

The invention relates to a rotary grain detecting device for multi-track feeding, in particular to a detecting device suitable for detecting semiconductor crystal grains.

Semiconductor dies are usually subjected to secondary inspection during the manufacturing process, one for semi-finished products and the other for finished product inspection. Among them, the semi-finished product inspection is usually aimed at the die after the completion of the basic semiconductor process, and its main purpose is to first screen and filter the germanium crystal grains so as to avoid the inflow of germanium crystal grains, including die mount, wire bond, and sealant ( Mold), as well as printing and other processes, cause unnecessary cost and affect the yield.

The conventional grain detecting equipment can refer to the Patent No. M439261 of the Republic of China. That is, as shown in Fig. 1, a V-shaped spiral arm 90 is disclosed, each of which is provided with a pick-and-place device 91, 92. When one of the pick-and-place devices 91 picks up the die at the feed device 93, it moves to the probe holder 94 on the side of the feed device 93 for testing. At this time, another pick-and-place device 91 returns to the feeding device 93 to pick up the next die, whereby the V-shaped arm 90 continuously reciprocates the feed and test. In addition, when the die test on the pick-and-place device 91 is completed, the finished die is directly dropped to the lower dosing device (not shown) to classify the finished die.

Accordingly, the conventional crystal grain detecting apparatus is circulated in the above cycle. The way to test, although it has reached a fairly stable level regardless of the accuracy of the test, or the efficiency of the test. However, when faced with the need for higher test speeds, the conventional die inspection equipment has faced bottlenecks and can no longer be significantly improved.

In view of this, a die inspection device capable of greatly improving the detection speed and having an elastic expansion function is an urgent need in the industry.

The main object of the present invention is to provide a multi-track feed rotary crystal grain detecting apparatus capable of simultaneously feeding multi-track crystal grains, simultaneously transferring crystal grains, simultaneously testing crystal grains, and simultaneously classifying crystal grains, and each The same angle of rotation transfer can significantly shorten the transfer time. Compared with the conventional grain inspection equipment, the detection speed can be greatly improved in several times, and it is more flexible. Any test can be expanded or changed according to actual needs. Features.

To achieve the above object, a multi-track feed rotary crystal grain detecting apparatus of the present invention mainly comprises a turret, a plurality of die pick-and-place devices, a plurality of feeding devices, a plurality of detecting stations, and a plurality of sorting stations. Wherein, the turret includes a central shaft, and the turret rotates along the central axis; the plurality of die pick-and-place devices are equidistantly disposed on the turret; the plurality of feeding devices are equidistantly disposed in the radial direction of the turret In the extending direction, each feeding device includes a die picking area adjacent to one side of the turret; the plurality of detecting stations and the plurality of sorting stations are also equidistantly disposed in a radial extending direction of the turret. Wherein, the plurality of die pick-and-place devices respectively obtain a grain on the die pick-up area of the plurality of feeding devices, and the turret rotates to form a plurality of grains The pick-and-place device transfers the die to a plurality of detection stations for testing, and then the turret rotates and the plurality of die pick-and-place devices transfer the die to the plurality of sorting stations to place the grains, and the plurality of sorting stations classify the grains.

Accordingly, the multi-track feed rotary crystal grain detecting apparatus provided by the present invention can utilize a turret to continuously rotate the feed transfer mode, and transport the crystal grains from the feeding device to the inspection station one by one for testing. When the test is completed and the die is transported to the sorting station for classification, it is a high-efficiency continuous detection and classification technology. In addition, the present invention greatly increases the test throughput by means of simultaneous multi-track feeding.

Preferably, the plurality of feeding devices of the present invention comprise a first feeding device and a second feeding device which are disposed opposite each other on opposite sides of the turret. In other words, the present invention can adopt a dual-track feeding mode, and the angle between the two feeding devices can be 180 degrees, whereby the present invention can increase the test capacity by more than twice as compared with the conventional single-track feeding test. And the volume does not increase too much. However, the present invention is not limited to the dual-track feeding mode, and may also be a three-track feeding, a four-track feeding, or other multi-track feeding, wherein the three-track feeding mode is between two adjacent feeding devices. The angle can be 120 degrees, and the angle between two adjacent feeding devices can be 90 degrees in the four-track feeding mode.

Furthermore, each of the feeding devices of the present invention may include a vibrating feed tray, a feed rail, and a return rail, and the vibrating feed tray may include a feed port that communicates with the feed rail. And the die picking area may be located on one side of the feeding track remotely from the vibration feeding tray, and the returning track may be disposed under the feeding track and used to receive the die falling from the feeding track.

In addition, each detecting station of the present invention may include a probe holder and at least one probe, and one side of the at least one probe may be fixed to the probe holder, and the other side may protrude from the side end of the probe holder. Exposed; wherein the plurality of die pick-and-place devices transfer the die to the top of the at least one probe and electrically contact the at least one probe. In addition, each of the die pick-and-place devices of the present invention may include a nozzle and a lifting mechanism, and the lifting mechanism may be assembled on the turret to drive the nozzle up or down.

Moreover, each of the sorting stations of the present invention may include a rotating dispensing tube and a plurality of receiving compartments, the rotating dispensing tube may include an inlet opening and a discharge opening, and the inlet opening may be connected to the rotating dispensing tube The discharge port, and the rotating branch pipe is rotatable and the discharge port is aligned with one of the plurality of storage bins; wherein the plurality of die pick-and-place devices rotate the transfer die to the inlet port and place the die. Additionally, each of the sorting stations of the present invention may further include a rotary drive that couples and drives the rotary splitter tube to rotate.

Moreover, the complex detection station of the present invention may include a plurality of first detection stations and a plurality of second detection stations, and the plurality of feeding devices, the plurality of first detecting stations, the plurality of second detecting stations, and the plurality of sorting stations may be sequentially The arrangement is arranged in a circumferential direction of the radial extension of the turret. Moreover, the turret of the present invention can be rotated stepwise in the same direction of rotation along the central axis.

[study]

90‧‧‧V-type arm

91, 92‧‧‧ pick and place device

93‧‧‧Feeding device

94‧‧‧ probe holder

[this creation]

2‧‧‧ turret

21‧‧‧ center axis

3‧‧‧Grad pick and place device

31‧‧‧ nozzle

32‧‧‧ Lifting mechanism

4‧‧‧Feeding device

41‧‧‧First feeding device

42‧‧‧Second feeding device

43‧‧‧Vibration feeding tray

431‧‧‧ Feeding port

44‧‧‧Feed track

45‧‧‧Return track

40‧‧‧Grad picking area

5‧‧‧Checkpoint

51‧‧‧ probe holder

52‧‧‧ probe

53‧‧‧First test station

54‧‧‧Second test station

6‧‧‧ sorting station

61‧‧‧Inlet

62‧‧‧Rotating distributor

621‧‧‧Outlet

63‧‧‧ 容仓

64‧‧‧Rotating drive

Figure 1 is a conventional grain inspection apparatus.

Figure 2 is a top plan view of a first embodiment of the present invention.

Fig. 3 is a partially enlarged plan view showing the first embodiment of the present invention.

Figure 4 is a die pick-up of the feeding device of the first embodiment of the present invention. Side view of the district.

Fig. 5 is a side view of the detecting station of the first embodiment of the present invention.

Figure 6 is a side view of the sorting station of the first embodiment of the present invention.

Figure 7 is a top plan view of a second embodiment of the present invention.

Figure 8 is a top plan view showing a third embodiment of the present invention.

Prior to the detailed description of the multi-track feed rotary die inspection apparatus of the present invention, in the following description, like elements will be denoted by the same reference numerals.

The following first embodiment of the present invention is described in a two-track feeding manner. Please refer to FIG. 2 and FIG. 3 simultaneously. FIG. 2 is a top plan view of the first embodiment of the present invention, and FIG. 3 is a first embodiment of the present invention. A partially enlarged view of an embodiment.

The figure shows a turret 2 comprising a central shaft 21 and the turret 2 is rotated along a central axis 21. In the present embodiment, the turret 2 is driven to rotate stepwise in the same rotational direction along the central axis 21 by an actuator (not shown). Furthermore, the two sets of die pick-and-place devices 3 include a first feeding device 41 and a second feeding device 42 which are equidistantly arranged in the radial direction of the turret 2, that is, 180. The angle of the angle is relatively oppositely disposed on the corresponding two sides outside the turret 2.

In the present embodiment, each feeding device 4 includes a vibration feeding tray 43, a feeding rail 44, and a return rail 45, and the vibration feeding tray 43 includes a feeding port 431 which is connected to Feed rail 44. Moreover, the feed rail 44 includes a die picking area 40 adjacent one side of the turret 2, that is, the die picking area 40 is located on the feed rail 44 and the vibrating feed tray 43 One side of the opposite side. As for the return rail 45, it is disposed below the feed rail 44 for receiving the die C dropped from the feed rail 44.

Referring to Fig. 4 again, Fig. 4 is a side view of the die picking area 40 of the feeding device 4 of the first embodiment of the present invention. Among them, eight sets of die pick-and-place devices 3 are equidistantly arranged on the turret 2. As shown in FIG. 4, in the present embodiment, each of the die pick-and-place devices 3 includes a nozzle 31 and a lifting mechanism 32, and the lifting mechanism 32 is assembled on the turret 2 and can drive the nozzle. 31 rises or falls.

Referring to Fig. 5 again, Fig. 5 is a side view of the detecting station 5 of the first embodiment of the present invention. As shown in FIG. 2, the detecting station 5 of the present embodiment includes two first detecting stations 53 and two second detecting stations 54, and the detecting stations are sequentially arranged in the radial direction of the turret 2, respectively. It extends in the circumferential direction and is located on one side of the feed rail 44. The first detecting station 53 and the second detecting station 54 perform two different tests on the die C, respectively. However, the invention is not limited thereto, and may be in the form of a single detection station or other multiple detection stations. In addition, in this embodiment, each detecting station 5 includes a probe base 51 and two probes 52, and one side of the two probes 52 is fixed to the probe base 51, and the other side is self-probe. The side end of the seat 51 is convexly exposed. The probe 52 is used to electrically contact the die C and test the die C.

Referring again to Fig. 6, Fig. 6 is a side view of the sorting station 6 of the first embodiment of the present invention. As shown in FIG. 2, the two sorting stations 6 are equidistantly disposed in the radial extension direction of the turret 2 and on one side of the second detecting station 54. In the present embodiment, each sorting station 6 includes a rotary branching tube 62, a rotary drive 64, and five receiving compartments 63, and the rotating material is divided. The tube 62 includes a feed port 61 and a discharge port 621. The inlet port 61 is connected to the discharge port 621 of the rotary branch pipe 62, and the rotary drive 64 is connected to drive the rotary branch pipe 62 to rotate, and the five storage bins 63 are respectively different grades of the crystal C. Placed. In other words, the sorting station 6 of the present embodiment can drive the rotary splitter 62 to rotate through the rotary drive 64 and align the discharge port 621 with one of the five receptacles 63 to classify the crystal grains C.

The actual operation mode of the multi-track feed rotary crystal grain detecting apparatus of the present embodiment is as follows. First, the two-grain pick-and-place device 3 respectively obtains a crystal on the die pick-up area 40 of the feeding device 4 on the two sides. After the grain C. Next, the turret 2 rotates counterclockwise and the two-grain pick-and-place device 3 respectively transfers the die C to be tested to the two first detecting stations 53 for the first stage of testing. After the detection by the first detecting station 53 is completed, the turret 2 is again rotated counterclockwise to transfer the die C to the second detecting station 54 for the second stage of testing.

It should be particularly noted that when the first detecting station 53 and the second detecting station 54 are tested, the die pick-and-place device 3 always sucks the crystal grains C. After the detection by the second detecting station 54 is completed, the turret 2 rotates counterclockwise again, and the die pick-and-place device 3 transfers the measured die C to the loading port 61 of the sorting station 6 and drops it. The inlet port 61 is entered, and the crystal grains C are sorted by the rotary dividing pipe 62 so as to fall into the corresponding receiving compartments 63. In this embodiment, when the second detection station 54 is tested, the detection result is immediately transmitted to the sorting station 6, so that the die pick-and-place device 3 transfers the measured die C to the sorting station 6 When the feed port 61 is opened, the discharge port 621 of the rotary branch pipe 62 has also been aligned with the corresponding container 63, waiting The grain C has fallen. Accordingly, the die pick-and-place device 3 of the present embodiment does not have an idle waiting time at the sorting station 6, and once the die C is placed, the pick-and-drop task of the next step can be performed.

However, the present invention is not limited to the dual rail feed of the first embodiment, and may also be a three rail feed, a four rail feed, or other more rail feed modes. The second embodiment shown in FIG. 7 is an embodiment of the three-track feed, wherein the angle between the two adjacent feeding devices 4 is 120 degrees, and the test capacity can be increased by more than three times in this manner. . In addition, as shown in Fig. 8, a four-track feeding mode in which the angle between two adjacent feeding devices 4 is 90 degrees, the test capacity can be increased by more than four times in this manner.

The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

2‧‧‧ turret

21‧‧‧ center axis

3‧‧‧Grad pick and place device

4‧‧‧Feeding device

41‧‧‧First feeding device

42‧‧‧Second feeding device

43‧‧‧Vibration feeding tray

431‧‧‧ Feeding port

44‧‧‧Feed track

45‧‧‧Return track

5‧‧‧Checkpoint

53‧‧‧First test station

54‧‧‧Second test station

6‧‧‧ sorting station

Claims (10)

A multi-track feed rotary crystal grain detecting apparatus comprising: a turret comprising a central shaft, the turret rotating along the central axis; a plurality of die pick-and-place devices equidistantly disposed at the a plurality of feeding devices equidistantly disposed in a radial extension direction of the turret, each feeding device including a die picking area adjacent to one side of the turret; a plurality of detecting stations, Is equidistantly disposed in a radial extension direction of the turret; and a plurality of sorting stations are equidistantly disposed in a radial extension direction of the turret; wherein the plurality of dies are respectively attached to the gantry After the die is obtained on the die pick-up area of the plurality of feeding devices, the turret rotates and the plurality of die pick-and-place devices transfer the die to the plurality of detecting stations for testing, and the turret rotates again. A plurality of die pick-and-place devices transfer the die to the complex sorting station, place the die, and the complex sorting station classifies the die. The multi-track feeding rotary crystal grain detecting apparatus according to claim 1, wherein the plurality of feeding devices comprise a first feeding device and a second feeding device, and the outer side of the rotating frame is opposite Ground setting. The rotary grain detecting device for multi-track feeding according to claim 1, wherein each feeding device comprises a vibration feeding tray and a feeding rail, and the vibration feeding tray comprises a feeding material. a port that is connected to the feed track, the die picking zone being located on the feed track and The vibrating feed tray is on one side. The rotary grain detecting device for multi-track feeding according to claim 3, wherein each feeding device further comprises a returning track disposed under the feeding track for receiving The grain falling from the feed track. The multi-track feeding rotary crystal grain detecting apparatus according to claim 1, wherein each detecting station comprises a probe holder and at least one probe, and one of the at least one probe is fixed to one side The probe holder has the other side protruding from the side end of the probe holder; the plurality of die pick-and-place devices transfer the die to the at least one probe and electrically contact the at least one probe . The rotary die detecting device of the multi-track feeding method of claim 1, wherein each of the die pick-and-place devices comprises a nozzle and a lifting mechanism, and the lifting mechanism is assembled on the rotating frame And drive the nozzle up or down. The rotary grain detecting device of the multi-track feeding according to claim 1, wherein each sorting station comprises a rotating branching pipe and a plurality of receiving bins, wherein the rotating branching pipe comprises an inlet port, And a discharge port, the inlet port is connected to the discharge port of the rotary branch pipe, the rotary branch pipe rotates and the discharge port is aligned with one of the plurality of storage bins; the plurality of crystals The pellet picking and placing device rotationally transfers the die to the inlet port and places the die. The multi-track feed rotary die inspection apparatus of claim 7, wherein each sorting station further comprises a rotary drive that connects and drives the rotary splitter to rotate. The multi-track feeding rotary crystal grain detecting apparatus according to claim 1, wherein the plurality of detecting stations comprise a plurality of first detecting stations and a plurality of second detecting stations, the plurality of feeding devices, the plurality of feeding devices A detection station, the plurality of second detection stations, and the plurality of classification stations are sequentially disposed in a circumferential direction of the radial extension of the turret. The multi-track feed rotary grain detecting apparatus according to claim 1, wherein the turret is stepwise rotated in the same rotational direction along the central axis.