TW201512547A - 定子圓盤 - Google Patents

定子圓盤 Download PDF

Info

Publication number
TW201512547A
TW201512547A TW103120832A TW103120832A TW201512547A TW 201512547 A TW201512547 A TW 201512547A TW 103120832 A TW103120832 A TW 103120832A TW 103120832 A TW103120832 A TW 103120832A TW 201512547 A TW201512547 A TW 201512547A
Authority
TW
Taiwan
Prior art keywords
stator disc
stator
blade
inner ring
transition
Prior art date
Application number
TW103120832A
Other languages
English (en)
Chinese (zh)
Inventor
Michael Richter
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of TW201512547A publication Critical patent/TW201512547A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW103120832A 2013-07-05 2014-06-17 定子圓盤 TW201512547A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310213256 DE102013213256A1 (de) 2013-07-05 2013-07-05 Statorscheibe

Publications (1)

Publication Number Publication Date
TW201512547A true TW201512547A (zh) 2015-04-01

Family

ID=51033155

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103120832A TW201512547A (zh) 2013-07-05 2014-06-17 定子圓盤

Country Status (3)

Country Link
DE (1) DE102013213256A1 (de)
TW (1) TW201512547A (de)
WO (1) WO2015000700A1 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH499019A (de) * 1970-04-10 1970-11-15 Balzers Patent Beteilig Ag Scheibe für eine Turbomolekular-Vakuumpumpe
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe

Also Published As

Publication number Publication date
DE102013213256A1 (de) 2015-01-08
WO2015000700A1 (de) 2015-01-08

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