TW201506492A - Liquid crystal display element and radiation-sensitive resin composition - Google Patents

Liquid crystal display element and radiation-sensitive resin composition Download PDF

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Publication number
TW201506492A
TW201506492A TW103124339A TW103124339A TW201506492A TW 201506492 A TW201506492 A TW 201506492A TW 103124339 A TW103124339 A TW 103124339A TW 103124339 A TW103124339 A TW 103124339A TW 201506492 A TW201506492 A TW 201506492A
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liquid crystal
crystal display
substrate
electrode
wall
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TW103124339A
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Chinese (zh)
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Kouji Nishikawa
Ken-Ichi Hamada
Eri Mishima
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Jsr Corp
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134363Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133377Cells with plural compartments or having plurality of liquid crystal microcells partitioned by walls, e.g. one microcell per pixel

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Geometry (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

The invention provides a liquid crystal display element having a wall-like electrode and improving a display efficiency, and provides a radiation-sensitive resin composition for forming the wall-like electrode. A liquid crystal 4 is sandwiched between a first substrate 2 and a second substrate 3 in a liquid crystal display element 1, and electrodes 5, 6 are disposed on the first substrate 2, wherein the liquid crystal 4 is driven by an electric field applied between the electrodes. The electrodes 5, 6 are set to be the wall-like electrode including wall-like resin portions 9, 10 and conductive portions 11, 12. The conductive portions 11, 12 include a conductive component disposed on a side face of the resin portions 9, 10. The wall-like resin portions 9, 10 are formed by using the radiation-sensitive resin composition including [A] a polymer, and [B] a photo-sensitive agent.

Description

液晶顯示元件及感放射線性樹脂組成物 Liquid crystal display element and radiation sensitive resin composition

本發明是有關於一種液晶顯示元件及感放射線性樹脂組成物。 The present invention relates to a liquid crystal display element and a radiation sensitive resin composition.

液晶顯示元件是於一對基板中夾持液晶而構成。液晶顯示元件中,藉由對基板間施加電場而使液晶產生配向變化。而且,與液晶的配向變化相對應,部分性地透過或者遮蔽光。液晶顯示元件可利用所述特性來顯示圖像。與現有的陰極射線管(Cathode-Ray Tube,CRT)方式的顯示裝置相比較,液晶顯示元件具有實現薄型化或輕量化的優點。 The liquid crystal display element is configured by sandwiching a liquid crystal in a pair of substrates. In the liquid crystal display device, the alignment of the liquid crystal is changed by applying an electric field between the substrates. Further, corresponding to the change in the alignment of the liquid crystal, the light is partially transmitted or blocked. The liquid crystal display element can utilize the characteristics to display an image. The liquid crystal display element has an advantage of being thinner or lighter than a conventional cathode ray tube (CRT) type display device.

開發最初的液晶顯示元件用作以字元顯示(character display)等為中心的計算器或時鐘的顯示元件。然後,藉由單純矩陣方式的開發,點矩陣顯示變得容易,藉此用途擴大至筆記型個人電腦的顯示元件等。 The original liquid crystal display element was developed as a display element of a calculator or a clock centered on a character display or the like. Then, by the development of the simple matrix method, the dot matrix display becomes easy, and the use is expanded to display elements of a notebook personal computer.

繼而,藉由使用作為半導體裝置的薄膜電晶體(Thin Film Transistor,TFT)的主動矩陣方式的液晶顯示元件的開發, 可實現對比度比或響應性能優異的良好畫質,進而,亦克服彩色化以及視角擴大等課題,藉此亦用於桌上型電腦的監視器(monitor)等。近年來,更廣的視角、液晶的高速響應化以及顯示品質的提高等得以實現,從而用作薄型的電視用顯示元件。 Then, by developing an active matrix type liquid crystal display element using a thin film transistor (TFT) as a semiconductor device, It is possible to achieve good image quality with excellent contrast ratio or response performance, and also to overcome problems such as colorization and viewing angle expansion, and is also used for a monitor of a desktop computer or the like. In recent years, a wider viewing angle, high-speed response of liquid crystals, and improvement in display quality have been realized, and this has been used as a thin display element for televisions.

另外,另一方面,對應於高精細化,液晶顯示元件被廣泛用於智慧型手機等可攜式資訊設備的顯示元件。而且,最近,該些可攜式資訊設備中,要求畫質的進一步提高,且強烈要求高精細化、以及與此對應的開口率的提高等顯示效率的提高。 On the other hand, corresponding to high definition, liquid crystal display elements are widely used for display elements of portable information devices such as smart phones. Further, recently, in these portable information devices, image quality is further improved, and display efficiency such as high definition and an increase in aperture ratio corresponding thereto are strongly demanded.

用以提高液晶顯示元件的顯示效率的技術例如已知有專利文獻1中記載的技術。該專利文獻1中記載的液晶顯示裝置中,於畫素區域的兩端形成成對的電極,對其中一個電極(源電極)供給影像信號,且對另一個電極(共通電極)供給成為基準的共通信號。藉此,專利文獻1中記載的液晶顯示裝置形成如下構成:產生與液晶顯示面板的主面平行的電場(稱為橫向電場),在與液晶顯示面板的主面平行的面內驅動液晶。 For example, a technique described in Patent Document 1 is known as a technique for improving the display efficiency of a liquid crystal display device. In the liquid crystal display device described in Patent Document 1, a pair of electrodes are formed at both ends of a pixel region, and an image signal is supplied to one of the electrodes (source electrode), and the other electrode (common electrode) is supplied as a reference. Common signal. Thus, the liquid crystal display device described in Patent Document 1 has a configuration in which an electric field (referred to as a lateral electric field) parallel to the main surface of the liquid crystal display panel is generated, and the liquid crystal is driven in a plane parallel to the main surface of the liquid crystal display panel.

特別是專利文獻1中記載的液晶顯示裝置,源電極以及共通電極成為壁狀的電極形狀,所述壁狀的電極形狀不僅自第1基板的主面朝向第2基板而突出形成,並且以其延伸方向相對於第1基板的主面為垂直的方式而形成。藉由具備此種壁狀的電極,專利文獻1的液晶顯示裝置在與第1基板接近的區域至遠離第1基板的區域(與第2基板接近的區域)中,亦使電力線的密度成為同等。而且,可提高液晶的驅動效率,可提高顯示效率。 In the liquid crystal display device described in Patent Document 1, the source electrode and the common electrode have a wall-shaped electrode shape, and the wall-shaped electrode shape is formed not only from the main surface of the first substrate but also toward the second substrate, and The extending direction is formed to be perpendicular to the main surface of the first substrate. In the liquid crystal display device of Patent Document 1, the liquid crystal display device of Patent Document 1 has the same density as the power line in the region close to the first substrate and the region away from the first substrate (the region close to the second substrate). . Moreover, the driving efficiency of the liquid crystal can be improved, and the display efficiency can be improved.

另外,專利文獻2中記載有與專利文獻1同樣地,在與液晶顯示面板的主面平行的面內驅動液晶來提高顯示效率的技術。專利文獻2中記載的液晶顯示裝置中,於多數畫素的每個區域分別形成階差部。該階差部是於畫素的邊界部形成為凸狀的絕緣膜。而且,專利文獻2中記載的液晶顯示裝置中,於階差部的側壁面設置包含氧化銦錫(Indium Tin Oxide,ITO)等導電材料的平面電極而形成壁狀的電極。即,專利文獻2中記載的液晶顯示裝置中,壁狀的電極是具有構成階差部的絕緣膜與導電膜的積層結構而構成。 In the same manner as in Patent Document 1, the technique of driving liquid crystal in a plane parallel to the main surface of the liquid crystal display panel to improve display efficiency is disclosed. In the liquid crystal display device described in Patent Document 2, a step portion is formed in each of a plurality of pixels. The step portion is an insulating film formed in a convex shape at a boundary portion of the pixel. Further, in the liquid crystal display device described in Patent Document 2, a planar electrode including a conductive material such as indium tin oxide (ITO) is provided on the side wall surface of the step portion to form a wall-shaped electrode. In the liquid crystal display device described in Patent Document 2, the wall-shaped electrode is configured by a laminated structure of an insulating film and a conductive film which constitute a step portion.

[現有技術文獻] [Prior Art Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開平6-214244號公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 6-214244

[專利文獻2]日本專利特開2012-220575號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2012-220575

如上所述,為了提高液晶顯示元件的顯示效率,如專利文獻1中所記載的使用壁狀的電極(以下亦簡稱為壁狀電極)的技術有效。而且,於考慮到提高液晶顯示元件的生產性的情況下,如專利文獻2中所記載,較佳為將壁狀電極設為包含絕緣膜與導電膜的積層結構。 As described above, in order to improve the display efficiency of the liquid crystal display device, the technique of using a wall-shaped electrode (hereinafter also simply referred to as a wall electrode) as described in Patent Document 1 is effective. In addition, in consideration of the improvement of the productivity of the liquid crystal display device, as described in Patent Document 2, it is preferable that the wall electrode is a laminated structure including an insulating film and a conductive film.

該情況下,如下方法有效:於液晶顯示元件中,於夾持液晶的基板的其中一塊上形成經圖案化為凸狀的絕緣膜,然後, 於絕緣膜的側壁面上設置經圖案化的導電膜而形成壁狀電極。 In this case, the following method is effective: in the liquid crystal display element, an insulating film patterned into a convex shape is formed on one of the substrates sandwiching the liquid crystal, and then A patterned conductive film is formed on the side wall surface of the insulating film to form a wall electrode.

而且,所形成的壁狀電極為了對使用多個畫素的高精細顯示有效,而用以實現顯示效率的提高且要求均勻且簡便地形成於多個畫素間。即,要求壁狀電極不僅具有高的均勻性,而且以高的生產性來形成。因此,構成壁狀電極的凸狀絕緣膜較佳為高度均勻地經圖案化,且以高生產性來形成。 Further, the formed wall electrode is effective for high-definition display using a plurality of pixels, and is used to improve display efficiency and to form a uniform and simple formation between a plurality of pixels. That is, the wall electrode is required to have not only high uniformity but also high productivity. Therefore, the convex insulating film constituting the wall electrode is preferably highly uniformly patterned and formed with high productivity.

因此,要求高度均勻且以高感度將凸狀的絕緣膜進行圖案化而高效率地形成壁狀電極的技術。而且,要求提供一種具有壁狀電極且顯示效率提高的液晶顯示元件。 Therefore, a technique of patterning a convex insulating film with high uniformity and high sensitivity to form a wall electrode with high efficiency is required. Further, it is required to provide a liquid crystal display element having a wall electrode and improved display efficiency.

本發明是鑒於如以上所述的課題而形成。即,本發明的目的在於提供一種具有壁狀電極且顯示效率提高的液晶顯示元件。 The present invention has been made in view of the above problems. That is, an object of the present invention is to provide a liquid crystal display element having a wall electrode and improved display efficiency.

另外,本發明的目的在於提供一種用於形成液晶顯示元件的壁狀電極的感放射線性樹脂組成物。 Further, it is an object of the invention to provide a radiation sensitive resin composition for forming a wall electrode of a liquid crystal display element.

本發明的其他目的以及優點是由以下的記載來闡明。 Other objects and advantages of the present invention will be clarified by the following description.

本發明的第1態樣是有關於一種液晶顯示元件,其於對向配置的第1基板及第2基板之間夾持液晶,在第1基板的與第2基板對向的面上配置一對電極,且藉由施加於一對電極間的電場來驅動液晶;並且所述液晶顯示元件的特徵在於:一對電極的至少一者為壁狀電極,所述壁狀電極包括:壁狀 樹脂部,其自第1基板的面朝向第2基板側而突出設置;以及導電部,其包含導電性構件,所述導電性構件設置於包括所述樹脂部的側面的至少一部分的區域中;並且壁狀樹脂部是使用包含[A]聚合物、以及[B]感光劑的感放射線性樹脂組成物而形成。 According to a first aspect of the invention, there is provided a liquid crystal display device in which a liquid crystal is interposed between a first substrate and a second substrate disposed opposite to each other, and a surface of the first substrate facing the second substrate is disposed. a counter electrode, and driving the liquid crystal by an electric field applied between the pair of electrodes; and the liquid crystal display element is characterized in that at least one of the pair of electrodes is a wall electrode, and the wall electrode comprises: a wall a resin portion protruding from a surface of the first substrate toward the second substrate side; and a conductive portion including a conductive member, wherein the conductive member is provided in a region including at least a part of a side surface of the resin portion; Further, the wall-shaped resin portion is formed using a radiation-sensitive resin composition containing the [A] polymer and the [B] sensitizer.

本發明的第1態樣中,較佳為施加於一對電極間的電場具有和第1基板的與第2基板對向的的面平行的分量。 In the first aspect of the invention, it is preferable that the electric field applied between the pair of electrodes has a component parallel to a surface of the first substrate facing the second substrate.

本發明的第1態樣中,較佳為一對電極均為壁狀電極,且所述一對壁狀電極的導電部分別以具有相互對向的部分的方式來構成。 In the first aspect of the invention, it is preferable that each of the pair of electrodes is a wall electrode, and the conductive portions of the pair of wall electrodes are configured to have mutually opposing portions.

本發明的第1態樣中,較佳為使用感放射線性樹脂組成物而形成,所述感放射線性樹脂組成物包含[B]感光劑,所述[B]感光劑為選自光自由基聚合起始劑以及光酸產生劑中的至少一者。 In a first aspect of the invention, it is preferred to form a radiation sensitive resin composition comprising a [B] sensitizer, wherein the [B] sensitizer is selected from the group consisting of photoradicals. At least one of a polymerization initiator and a photoacid generator.

本發明的第1態樣中,較佳為壁狀樹脂部的剖面形狀為正錐形狀。 In the first aspect of the invention, it is preferable that the cross-sectional shape of the wall-shaped resin portion is a forward tapered shape.

本發明的第1態樣中,較佳為具有使用光配向劑而形成的配向膜。 In the first aspect of the invention, it is preferred to have an alignment film formed using a photo-aligning agent.

本發明的第2態樣是有關於一種感放射線性樹脂組成物,其包含: [A]聚合物;[B-1]光自由基聚合起始劑;以及[C]聚合性化合物;並且所述感放射線性樹脂組成物的特徵在於:用於形成本發明的第1態樣的液晶顯示元件的壁狀電極的壁狀樹脂部。 A second aspect of the present invention relates to a radiation sensitive resin composition comprising: [A] polymer; [B-1] photoradical polymerization initiator; and [C] polymerizable compound; and the radiation sensitive resin composition is characterized by: for forming the first aspect of the invention The wall-shaped resin portion of the wall electrode of the liquid crystal display element.

本發明的第3態樣是有關於一種感放射線性樹脂組成物,其包含:[A]聚合物;以及[B-2]光酸產生劑;並且所述感放射線性樹脂組成物的特徵在於:用於形成本發明的第1態樣的液晶顯示元件的壁狀電極的壁狀樹脂部。 A third aspect of the invention relates to a radiation sensitive resin composition comprising: [A] a polymer; and [B-2] a photoacid generator; and the radiation sensitive resin composition is characterized in that A wall-shaped resin portion for forming a wall electrode of a liquid crystal display element of the first aspect of the invention.

依據本發明的第1態樣,獲得具有壁狀電極且顯示效率提高的液晶顯示元件。 According to the first aspect of the present invention, a liquid crystal display element having a wall electrode and improved display efficiency is obtained.

依據本發明的第2態樣,獲得用於形成液晶顯示元件的壁狀電極的感放射線性樹脂組成物。 According to the second aspect of the present invention, a radiation-sensitive resin composition for forming a wall electrode of a liquid crystal display element is obtained.

依據本發明的第3態樣,獲得用於形成液晶顯示元件的壁狀電極的感放射線性樹脂組成物。 According to the third aspect of the invention, a radiation-sensitive resin composition for forming a wall electrode of a liquid crystal display element is obtained.

1、101、201‧‧‧液晶顯示元件 1, 101, 201‧‧‧ liquid crystal display elements

2‧‧‧第1基板 2‧‧‧1st substrate

3‧‧‧第2基板 3‧‧‧2nd substrate

4‧‧‧液晶 4‧‧‧LCD

5、6、15、16、106、206‧‧‧電極 5, 6, 15, 16, 106, 206‧‧‧ electrodes

7‧‧‧液晶分子 7‧‧‧liquid crystal molecules

9、10、210‧‧‧樹脂部 9, 10, 210‧‧‧ Resin Department

11、12、212‧‧‧導電部 11,12,212‧‧‧Electrical Department

17、18‧‧‧配線 17, 18‧‧‧ wiring

圖1是示意性地表示本發明實施形態的液晶顯示元件的第1例中的畫素結構的剖面圖。 FIG. 1 is a cross-sectional view schematically showing a pixel structure in a first example of a liquid crystal display device according to an embodiment of the present invention.

圖2是示意性地表示本發明實施形態的液晶顯示元件的第1例中的畫素結構的平面圖。 FIG. 2 is a plan view schematically showing a pixel structure in a first example of a liquid crystal display device according to an embodiment of the present invention.

圖3是示意性地表示本發明實施形態的液晶顯示元件的第1例中的電場施加時的畫素結構的剖面圖。 FIG. 3 is a cross-sectional view showing a pixel structure at the time of electric field application in the first example of the liquid crystal display device of the embodiment of the present invention.

圖4是示意性地表示本發明實施形態的液晶顯示元件的第1例中的電場施加時的畫素結構的平面圖。 FIG. 4 is a plan view showing a pixel structure at the time of electric field application in the first example of the liquid crystal display device of the embodiment of the present invention.

圖5是示意性地表示本發明實施形態的液晶顯示元件的壁狀電極的另一例的平面圖。 Fig. 5 is a plan view schematically showing another example of a wall electrode of a liquid crystal display element according to an embodiment of the present invention.

圖6是示意性地表示本發明實施形態的液晶顯示元件的第2例中的畫素結構的剖面圖。 FIG. 6 is a cross-sectional view schematically showing a pixel structure in a second example of the liquid crystal display device of the embodiment of the present invention.

圖7是示意性地表示本發明實施形態的液晶顯示元件的第3例中的畫素結構的剖面圖。 FIG. 7 is a cross-sectional view schematically showing a pixel structure in a third example of the liquid crystal display element of the embodiment of the present invention.

以下,使用圖式,對本發明的實施形態進行說明。 Hereinafter, embodiments of the present invention will be described using the drawings.

此外,本發明中,曝光時所照射的「放射線」中包含可見光線、紫外線、遠紫外線、X射線以及帶電粒子束等。 Further, in the present invention, the "radiation" to be irradiated during exposure includes visible light rays, ultraviolet rays, far ultraviolet rays, X-rays, and charged particle beams.

<液晶顯示元件> <Liquid crystal display element>

圖1是示意性地表示本發明實施形態的液晶顯示元件的第1例中的畫素結構的剖面圖。 FIG. 1 is a cross-sectional view schematically showing a pixel structure in a first example of a liquid crystal display device according to an embodiment of the present invention.

本發明實施形態的第1例的液晶顯示元件1是於對向配置的第1基板2及第2基板3之間夾持液晶4,且於第1基板2中,在與第2基板3對向的面上配置一對電極5、6,藉由施加於 該一對電極5、6間的電場來驅動液晶4的液晶顯示元件。 In the liquid crystal display element 1 of the first example of the embodiment of the present invention, the liquid crystal 4 is sandwiched between the first substrate 2 and the second substrate 3 that are opposed to each other, and the first substrate 2 is paired with the second substrate 3. a pair of electrodes 5, 6 are disposed on the facing surface by being applied to The electric field between the pair of electrodes 5 and 6 drives the liquid crystal display element of the liquid crystal 4.

第1基板2與第2基板3的間隔通常為2μm以上、20μm以下,即2μm~20μm,該些間隔是由設置於周邊部的密封材(未圖示)而相互固定。 The distance between the first substrate 2 and the second substrate 3 is usually 2 μm or more and 20 μm or less, that is, 2 μm to 20 μm, and these intervals are fixed to each other by a sealing material (not shown) provided in the peripheral portion.

構成第1基板2及第2基板3的材料例如可列舉:鈉鈣玻璃(soda lime glass)或無鹼玻璃(alkali free glass)等玻璃、矽、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚醚碸、聚碳酸酯、芳香族聚醯胺、聚醯胺醯亞胺、聚醯亞胺等。另外,對於該些基板,亦可視需要來實施利用矽烷偶合劑等的化學品處理、電漿處理、離子鍍(ion plating)、濺鍍、氣相反應法、真空蒸鍍等適當的前處理。 Examples of the material constituting the first substrate 2 and the second substrate 3 include glass such as soda lime glass or alkali free glass, bismuth, polyethylene terephthalate, and polyparaphenylene. Butane dicarboxylate, polyether oxime, polycarbonate, aromatic polyamine, polyamidimide, polyimine, and the like. Further, for these substrates, an appropriate pretreatment such as chemical treatment such as a decane coupling agent, plasma treatment, ion plating, sputtering, gas phase reaction method, or vacuum vapor deposition may be performed as needed.

於第1基板2及第2基板3各自的對向的面上,較佳為設置配向膜(未圖示)。例如,配向膜可設置於第1基板2及第2基板3的與液晶4接觸的面,以及後述電極5、6的與液晶4接觸的面上。而且,配向膜例如可使用聚醯亞胺等高分子材料來形成。另外,於需要的情況下,配向膜可實施例如摩擦處理或光配向處理等配向處理,實現夾持於第1基板2及第2基板3之間的液晶4的均勻配向。 It is preferable to provide an alignment film (not shown) on the opposing surface of each of the first substrate 2 and the second substrate 3. For example, the alignment film may be provided on the surface of the first substrate 2 and the second substrate 3 that is in contact with the liquid crystal 4, and on the surface of the electrodes 5 and 6 that are in contact with the liquid crystal 4, which will be described later. Further, the alignment film can be formed, for example, by using a polymer material such as polyimide. In addition, when necessary, the alignment film can be subjected to an alignment treatment such as a rubbing treatment or a photo-alignment treatment to achieve uniform alignment of the liquid crystal 4 sandwiched between the first substrate 2 and the second substrate 3.

液晶顯示元件1的一對電極5、6均為壁狀電極,所述壁狀電極包括:壁狀樹脂部9、10,其自第1基板2的面朝向第2基板3側而突出設置;以及膜狀的導電部11、12,其包含設置於樹脂部9、10的側面上的導電性構件。導電部11、12分別設置於 包含樹脂部9、10的相互對向的側面的至少一部分的區域。即,成為壁狀電極的電極5、6的導電部11、12分別夾持液晶4而以具有相互對向的部分的方式而構成。 The pair of electrodes 5 and 6 of the liquid crystal display element 1 are wall electrodes, and the wall electrodes include wall-like resin portions 9 and 10 which are protruded from the surface of the first substrate 2 toward the second substrate 3 side; The film-shaped conductive portions 11 and 12 include conductive members provided on the side faces of the resin portions 9 and 10. The conductive portions 11 and 12 are respectively disposed on A region including at least a part of mutually opposing side faces of the resin portions 9, 10. In other words, the conductive portions 11 and 12 of the electrodes 5 and 6 serving as the wall electrodes are sandwiched between the liquid crystals 4 and have mutually opposing portions.

而且,成為壁狀電極的電極5、6的導電部11、12分別如例如圖1所示,亦可設置於樹脂部9、10的相互對向的側面的整個面上。另外,電極5、6的導電部亦可僅設置於樹脂部9、10的相互對向的側面的一部分上。 Further, as shown in, for example, FIG. 1 , the conductive portions 11 and 12 of the electrodes 5 and 6 serving as the wall electrodes may be provided on the entire surface of the side faces of the resin portions 9 and 10 facing each other. Further, the conductive portions of the electrodes 5 and 6 may be provided only on a part of the side faces of the resin portions 9 and 10 that face each other.

電極5、6的導電部11、12分別同樣地使用導電性構件而形成。構成導電部11、12的導電性構件可列舉:氧化銦錫(Indium Tin Oxide,ITO)、氧化鋅系的摻鋁的氧化鋅(Aluminum doped Zinc Oxide,AZO)或摻鎵的氧化鋅(Gallium doped Zinc Oxide,GZO)等透明導電性材料。 The conductive portions 11 and 12 of the electrodes 5 and 6 are each formed using a conductive member in the same manner. Examples of the conductive member constituting the conductive portions 11 and 12 include indium tin oxide (ITO), zinc oxide-doped aluminum-doped zinc oxide (AZO), or gallium-doped zinc oxide (gallium doped). Transparent conductive materials such as Zinc Oxide, GZO).

電極5、6的壁狀樹脂部9、10分別同樣地包含絕緣性的樹脂。而且,電極5、6成為壁狀的電極形狀,所述壁狀的電極形狀是依據壁狀樹脂部9、10的結構,自第1基板2的面朝向第2基板3而突出形成,並且以其延伸方向相對於第1基板的主面而成為垂直的方式來形成。 The wall-shaped resin portions 9 and 10 of the electrodes 5 and 6 each contain an insulating resin in the same manner. Further, the electrodes 5 and 6 have a wall-shaped electrode shape, and the wall-shaped electrode shape is formed so as to protrude from the surface of the first substrate 2 toward the second substrate 3 in accordance with the configuration of the wall-shaped resin portions 9 and 10, and The extending direction is formed to be perpendicular to the main surface of the first substrate.

因此,使用電極5、6各自的導電部11、12,施加於一對電極5、6間的電場具有和第1基板2的與第2基板3對向的面平行的分量。液晶顯示元件1藉由施加於該一對電極5、6間的電場,自初始的配向狀態來驅動液晶4,使該液晶4在第1基板2的與第2基板3對向的面內進行配向變化。 Therefore, the electric fields applied between the pair of electrodes 5 and 6 using the conductive portions 11 and 12 of the electrodes 5 and 6 have a component parallel to the surface of the first substrate 2 opposed to the second substrate 3. The liquid crystal display element 1 drives the liquid crystal 4 from the initial alignment state by the electric field applied between the pair of electrodes 5 and 6, and causes the liquid crystal 4 to be in the plane of the first substrate 2 facing the second substrate 3. Orientation changes.

而且,藉由具備如上所述的壁狀的電極5、6,液晶顯示元件1在與第1基板2接近的區域至遠離第1基板2的區域(與第2基板3接近的區域)中,亦使電力線的密度成為相同,可提高液晶4的驅動效率,且可提高顯示效率。 Further, by providing the wall-shaped electrodes 5 and 6 as described above, the liquid crystal display element 1 is in a region close to the first substrate 2 to a region away from the first substrate 2 (a region close to the second substrate 3). The density of the power lines is also made the same, the driving efficiency of the liquid crystal 4 can be improved, and the display efficiency can be improved.

以下,使用圖2~圖4,對液晶顯示元件1中的液晶4的驅動進行更詳細的說明。 Hereinafter, the driving of the liquid crystal 4 in the liquid crystal display element 1 will be described in more detail with reference to FIGS. 2 to 4.

圖2是示意性地表示本發明實施形態的液晶顯示元件的第1例中的畫素結構的平面圖。 FIG. 2 is a plan view schematically showing a pixel structure in a first example of a liquid crystal display device according to an embodiment of the present invention.

如圖2所示,作為本發明實施形態的液晶顯示元件的第1例的液晶顯示元件1藉由所述配向膜(未圖示)的作用,構成液晶4的圖示為棒狀的液晶分子7均勻地配向。即,液晶4於對電極5、6間不施加電壓的電壓無施加時的初始配向狀態下,相對於圖2所示的電極5、6的長邊方向,圖示為棒狀的液晶分子7以形成若干角度的方式均勻地配向。更具體而言,以當對電極5、6間施加電壓時形成於電極5、6間的所述電場的形成方向(圖2中,以箭頭表示電場方向;後述圖3及圖4中亦同樣)、與液晶分子7的長軸(光學軸)方向所成的角度為45度以上且小於90度的方式,液晶4均勻地配向。 As shown in FIG. 2, the liquid crystal display element 1 of the first example of the liquid crystal display device of the embodiment of the present invention constitutes a liquid crystal molecule of a rod shape by the action of the alignment film (not shown). 7 evenly aligned. In other words, in the initial alignment state when the voltage of the liquid crystal 4 is not applied between the counter electrodes 5 and 6, the liquid crystal molecules 7 are shown as rod-shaped in the longitudinal direction of the electrodes 5 and 6 shown in FIG. 2 . Evenly aligned in a manner that forms several angles. More specifically, in the direction in which the electric field is formed between the electrodes 5 and 6 when a voltage is applied between the counter electrodes 5 and 6, (in FIG. 2, the direction of the electric field is indicated by an arrow; the same applies to FIGS. 3 and 4 which will be described later. The liquid crystal 4 is uniformly aligned so that the angle formed by the long axis (optical axis) direction of the liquid crystal molecules 7 is 45 degrees or more and less than 90 degrees.

圖3是示意性地表示本發明實施形態的液晶顯示元件的第1例中的電場施加時的畫素結構的剖面圖。 FIG. 3 is a cross-sectional view showing a pixel structure at the time of electric field application in the first example of the liquid crystal display device of the embodiment of the present invention.

圖4是示意性地表示本發明實施形態的液晶顯示元件的第1例中的電場施加時的畫素結構的平面圖。 FIG. 4 is a plan view showing a pixel structure at the time of electric field application in the first example of the liquid crystal display device of the embodiment of the present invention.

而且,液晶顯示元件1中,若對電極5、6間施加電場,則如圖3及圖4所示,液晶4被驅動。液晶顯示元件1中,液晶4例如具有正的介電各向異性。因此,構成液晶顯示元件1的液晶4的液晶分子7是以其長軸方向與電極5、6間的電場方向平行的方式進行配向變化。 Further, in the liquid crystal display element 1, when an electric field is applied between the electrodes 5 and 6, the liquid crystal 4 is driven as shown in FIGS. 3 and 4. In the liquid crystal display element 1, the liquid crystal 4 has, for example, positive dielectric anisotropy. Therefore, the liquid crystal molecules 7 constituting the liquid crystal 4 of the liquid crystal display element 1 are aligned so that the longitudinal direction thereof is parallel to the direction of the electric field between the electrodes 5 and 6.

此時,如上所述,使用電極5、6各自的導電部11、12,施加於一對電極5、6間的電場如上所述,具有和第1基板2的與第2基板3對向的面平行的分量。因此,液晶顯示元件1中,液晶4的液晶分子7在第1基板2的與第2基板3對向的面內,進行使所配向的角度改變的配向變化。 At this time, as described above, the electric fields applied to the pair of electrodes 5 and 6 using the conductive portions 11 and 12 of the electrodes 5 and 6 have the electric field opposed to the second substrate 3 of the first substrate 2 as described above. Parallel component of the face. Therefore, in the liquid crystal display element 1, the liquid crystal molecules 7 of the liquid crystal 4 change the alignment of the alignment angle in the plane of the first substrate 2 facing the second substrate 3.

以上所說明的可驅動液晶4的本實施形態的液晶顯示元件1可於第1基板2及第2基板3中,分別在與接觸液晶4之側相反側的面上配置偏光板(未圖示)來設置。 In the liquid crystal display element 1 of the present embodiment, which can drive the liquid crystal 4, the polarizing plate is disposed on the surface opposite to the side contacting the liquid crystal 4 in the first substrate 2 and the second substrate 3 (not shown). ) to set.

該一對偏光板進而將夾持液晶4的第1基板2及第2基板3進行夾持。因此,液晶顯示元件1藉由將該一對偏光板的偏光透過軸配置為規定角度,而可藉由電場施加來使液晶4的液晶分子7產生配向變化,可使光透過率變化。 The pair of polarizing plates further sandwich the first substrate 2 and the second substrate 3 sandwiching the liquid crystal 4. Therefore, by arranging the polarizing transmission axes of the pair of polarizing plates at a predetermined angle, the liquid crystal display element 1 can change the alignment of the liquid crystal molecules 7 of the liquid crystal 4 by electric field application, and can change the light transmittance.

即,本實施形態的液晶顯示元件1可構成所謂的雙折射模式的液晶顯示元件。液晶顯示元件1藉由電場施加,於使液晶4的液晶分子7的長軸(光軸)方向與基板面大致平行的狀態下,在面內改變其方位,改變與設定為規定角度的偏光板的軸所成的角度而使光透過率變化。而且,液晶顯示元件1將因所述電場施 加而引起的光透過率的變化用於圖像的顯示。 That is, the liquid crystal display element 1 of the present embodiment can constitute a so-called birefringence mode liquid crystal display element. The liquid crystal display element 1 is applied by an electric field, and the orientation of the long axis (optical axis) of the liquid crystal molecules 7 of the liquid crystal 4 is substantially parallel to the substrate surface, and the orientation thereof is changed in the plane, and the polarizing plate set to a predetermined angle is changed. The angle formed by the axis changes the light transmittance. Moreover, the liquid crystal display element 1 will be applied by the electric field The change in light transmittance caused by the addition is used for the display of an image.

如上所述,本實施形態的液晶顯示元件1的經施加電場的一對電極5、6均為自第1基板2的面朝向第2基板3而突出設置的壁狀電極。液晶顯示元件1可效率良好地形成與夾持液晶4的第1基板2及第2基板3的相互對向的基板面平行的電場。其結果為,本實施形態的液晶顯示元件1可實現高的顯示效率。 As described above, the pair of electrodes 5 and 6 to which the electric field is applied to the liquid crystal display element 1 of the present embodiment are all wall electrodes that are protruded from the surface of the first substrate 2 toward the second substrate 3. The liquid crystal display element 1 can efficiently form an electric field parallel to the mutually opposing substrate surfaces of the first substrate 2 and the second substrate 3 sandwiching the liquid crystal 4 . As a result, the liquid crystal display element 1 of the present embodiment can achieve high display efficiency.

此外,圖1~圖4的作為本發明實施形態的液晶顯示元件的第1例的液晶顯示元件1中,僅顯示1個畫素部分,表示對於所述1個畫素配置一對電極5、6的結構。然而,作為本發明實施形態的第1例的液晶顯示元件1中,並非僅限定於此種結構。液晶顯示元件1具有多個畫素,可於各個畫素上配置壁狀的電極。另外,作為本發明實施形態的第1例的液晶顯示元件1可具有與電極5、6不同的配置的壁狀的電極。 In the liquid crystal display element 1 of the first example of the liquid crystal display device of the embodiment of the present invention, only one pixel portion is displayed, and a pair of electrodes 5 are disposed on the one pixel. The structure of 6. However, the liquid crystal display element 1 which is the first example of the embodiment of the present invention is not limited to such a configuration. The liquid crystal display element 1 has a plurality of pixels, and a wall-shaped electrode can be disposed on each pixel. Moreover, the liquid crystal display element 1 which is the first example of the embodiment of the present invention may have a wall-shaped electrode which is different from the electrodes 5 and 6.

圖5是示意性地表示本發明實施形態的液晶顯示元件的壁狀電極的另一例的平面圖。 Fig. 5 is a plan view schematically showing another example of a wall electrode of a liquid crystal display element according to an embodiment of the present invention.

圖5藉由平面圖而示意性地表示配置於液晶顯示元件1(未圖示)的1個畫素部分上的電極15、16的結構。圖5所示的例子中,鄰接且相互對向的一對電極15以及電極16之間的區域構成副畫素,由該多個副畫素來構成1個畫素。此時,電極15及電極16均可設為壁狀電極。該情況下,電極15、16較佳為包括壁狀樹脂部及導電部而構成,所述壁狀樹脂部自其中一塊基板面朝向另一塊基板側而突出設置,所述導電部配置於所述樹脂部的 兩者的側面。 Fig. 5 schematically shows the configuration of the electrodes 15, 16 disposed on one pixel portion of the liquid crystal display element 1 (not shown) by a plan view. In the example shown in FIG. 5, the area between the pair of electrodes 15 and the electrodes 16 which are adjacent to each other and the electrode 16 constitute a sub-pixel, and the plurality of sub-pixels constitute one pixel. At this time, both the electrode 15 and the electrode 16 may be wall electrodes. In this case, the electrodes 15 and 16 preferably include a wall-shaped resin portion that protrudes from one of the substrate faces toward the other substrate side, and the conductive portion is disposed in the Resin department The sides of both.

即,本實施形態的液晶顯示元件的壁狀電極的另一例中,如圖5所示,於配線17上連接多個作為壁狀電極的電極15而配置為梳型,而且於另一配線18上連接多個作為壁狀電極的電極16而配置為同樣的梳型。而且,以2個梳型配置的梳齒部分相互咬合的方式來配置,且以電極15與電極16交替排列的方式來排列。即,可以進行梳型配置的多個電極15分別與進行梳型配置的多個電極16的其中1個對向的方式來配列,從而構成畫素內的電極組群。藉由畫素內的壁狀電極具有所述結構,本實施形態的液晶顯示元件可與畫素的尺寸獨立地控制經施加電場的一對電極間的距離。其結果為,本實施形態的液晶顯示元件對液晶的電場施加變得容易,可進行高效率的液晶驅動。 In another example of the wall electrode of the liquid crystal display device of the present embodiment, as shown in FIG. 5, a plurality of electrodes 15 as wall electrodes are connected to the wiring 17, and are arranged in a comb shape, and the other wiring 18 is provided. A plurality of electrodes 16 as wall electrodes are connected to each other and arranged in the same comb shape. Further, the comb-tooth portions arranged in two comb types are arranged to be engaged with each other, and the electrodes 15 and the electrodes 16 are alternately arranged. In other words, the plurality of electrodes 15 that can be comb-shaped are arranged in such a manner as to face one of the plurality of electrodes 16 arranged in a comb shape, thereby constituting an electrode group in the pixel. Since the wall electrode in the pixel has the above configuration, the liquid crystal display element of the present embodiment can control the distance between the pair of electrodes to which the electric field is applied independently of the size of the pixel. As a result, the liquid crystal display element of the present embodiment facilitates application of an electric field to the liquid crystal, and high-efficiency liquid crystal driving can be performed.

另外,圖1~圖4的作為本發明實施形態的液晶顯示元件的第1例的液晶顯示元件1中,經施加電場的一對電極5、6均為自第1基板2的面朝向第2基板3而突出設置的壁狀電極,但可將電極5、6中的其中一者設為形成於第1基板2的基板面上的線狀電極。 In the liquid crystal display element 1 of the first example of the liquid crystal display device of the embodiment of the present invention, the pair of electrodes 5 and 6 to which an electric field is applied are all oriented from the surface of the first substrate 2 toward the second. The wall electrode is protruded from the substrate 3, but one of the electrodes 5 and 6 may be a linear electrode formed on the substrate surface of the first substrate 2.

圖6是示意性地表示本發明實施形態的液晶顯示元件的第2例中的畫素結構的剖面圖。 FIG. 6 is a cross-sectional view schematically showing a pixel structure in a second example of the liquid crystal display device of the embodiment of the present invention.

圖6的作為本發明實施形態的第2例的液晶顯示元件101除了一對電極5、106中的電極106的結構不同以外,具有與圖1~圖4的液晶顯示元件1相同的結構。因此,對共通的構成要 素標註同一符號,並省略重複的說明。 The liquid crystal display element 101 of the second example of the embodiment of the present invention has the same configuration as that of the liquid crystal display element 1 of FIGS. 1 to 4 except that the configuration of the electrodes 106 in the pair of electrodes 5 and 106 is different. Therefore, the composition of the common The same symbols are denoted and the repeated description is omitted.

圖6所示的作為本發明實施形態的第2例的液晶顯示元件101是與所述液晶顯示元件1同樣地具有一對電極5、106。而且,液晶顯示元件101的一對電極5、106中,電極5包括:壁狀樹脂部9,其自第1基板2的面朝向第2基板3側而突出設置;以及導電部11,其包含設置於樹脂部9的側面的膜狀的導電性構件。 The liquid crystal display element 101 of the second example of the embodiment of the present invention shown in FIG. 6 has a pair of electrodes 5 and 106 similarly to the liquid crystal display element 1. Further, among the pair of electrodes 5 and 106 of the liquid crystal display element 101, the electrode 5 includes a wall-shaped resin portion 9 which is protruded from the surface of the first substrate 2 toward the second substrate 3 side, and a conductive portion 11 including A film-shaped conductive member provided on the side surface of the resin portion 9.

另一方面,液晶顯示元件101中,電極106是設置於第1基板2的面上的膜狀的線狀電極。可構成電極106的導電性構件可列舉ITO、氧化鋅系的AZO或GZO等透明導電性材料。 On the other hand, in the liquid crystal display element 101, the electrode 106 is a film-shaped linear electrode provided on the surface of the first substrate 2. The conductive member constituting the electrode 106 may be a transparent conductive material such as ITO or a zinc oxide-based AZO or GZO.

而且,液晶顯示元件101中,若對電極5、106間施加電場,則液晶4的液晶分子7產生配向變化。此時,施加於一對電極5、106間的電場具有和第1基板2的與第2基板3對向的面平行的分量。因此,液晶顯示元件101中,液晶4的液晶分子7在第1基板2的與第2基板3對向的面內,進行使所配向的角度改變的配向變化。 Further, in the liquid crystal display element 101, when an electric field is applied between the electrodes 5 and 106, the liquid crystal molecules 7 of the liquid crystal 4 are changed in alignment. At this time, the electric field applied between the pair of electrodes 5 and 106 has a component parallel to the surface of the first substrate 2 facing the second substrate 3. Therefore, in the liquid crystal display element 101, the liquid crystal molecules 7 of the liquid crystal 4 change the alignment of the alignment angle in the plane of the first substrate 2 opposed to the second substrate 3.

本實施形態的液晶顯示元件101可以與液晶顯示元件1相同的方式,於第1基板2及第2基板3上分別在與和液晶4接觸之側相反之側配置偏光板(未圖示)而設置。 In the liquid crystal display element 101 of the present embodiment, a polarizing plate (not shown) may be disposed on the first substrate 2 and the second substrate 3 on the side opposite to the side in contact with the liquid crystal 4, in the same manner as the liquid crystal display element 1. Settings.

因此,本實施形態的液晶顯示元件101是以與所述液晶顯示元件1相同的方式,構成雙折射模式的液晶顯示元件。液晶顯示元件101藉由電場施加,於使液晶4的液晶分子7的長軸(光軸)方向與基板面大致平行的狀態下,在面內改變其方位,改變 與設定為規定角度的偏光板的軸所成的角度來改變光透過率。而且,液晶顯示元件101可將因該電場施加所引起的光透過率的變化用於圖像的顯示。 Therefore, the liquid crystal display element 101 of the present embodiment constitutes a liquid crystal display element of a birefringence mode in the same manner as the liquid crystal display element 1. The liquid crystal display element 101 is applied by an electric field, and the orientation of the long axis (optical axis) of the liquid crystal molecules 7 of the liquid crystal 4 is substantially parallel to the substrate surface, and the orientation is changed in the plane. The light transmittance is changed by an angle with the axis of the polarizing plate set to a predetermined angle. Moreover, the liquid crystal display element 101 can use a change in light transmittance caused by the application of the electric field for display of an image.

此外,作為本發明實施形態的第2例的液晶顯示元件101中,亦可相對於1個畫素,將成為壁狀電極的電極5配置於該畫素的端部,且將成為線狀電極的電極106配置於該畫素的內部。該情況下,較佳為使用2個以上作為壁狀的電極的電極5來配置於畫素的端部,且使用至少1個電極106來配置於畫素的內部。藉由設為此種電極的配置結構,可對各個電極5與畫素內部的電極106之間施加電場,可於畫素內效率良好地形成電場。 Further, in the liquid crystal display element 101 of the second example of the embodiment of the present invention, the electrode 5 serving as the wall electrode may be disposed at the end of the pixel and become a linear electrode with respect to one pixel. The electrode 106 is disposed inside the pixel. In this case, it is preferable to use two or more electrodes 5 as wall electrodes to be disposed at the end of the pixel, and to arrange the inside of the pixel using at least one electrode 106. By providing such an arrangement of the electrodes, an electric field can be applied between the respective electrodes 5 and the electrodes 106 inside the pixels, and an electric field can be efficiently formed in the pixels.

另外,本發明實施形態的液晶顯示元件可構成主動矩陣方式的液晶顯示元件。該情況下,例如,作為本發明實施形態的液晶顯示元件的第1例的液晶顯示元件1中,於第1基板2上,掃描線(未圖示)與信號線(未圖示)配線為矩陣狀,且於該掃描線與信號線的各交點,經由TFT等主動元件(未圖示)而連接各畫素。 Further, the liquid crystal display element of the embodiment of the present invention can constitute an active matrix type liquid crystal display element. In this case, for example, in the liquid crystal display element 1 of the first example of the liquid crystal display device of the embodiment of the present invention, the wiring (not shown) and the signal line (not shown) are wired on the first substrate 2. Each of the pixels is connected to each other at an intersection of the scanning line and the signal line via an active element (not shown) such as a TFT.

掃描線與信號線分別與掃描驅動電路(未圖示)、信號驅動電路(未圖示)連接,可對各掃描線或者信號線施加任意的電壓。而且,於主動元件為TFT的情況下,TFT的汲電極(未圖示)與信號線連接,TFT的源電極(未圖示)例如與電極6電性連接。 The scanning line and the signal line are respectively connected to a scan driving circuit (not shown) and a signal driving circuit (not shown), and an arbitrary voltage can be applied to each scanning line or signal line. Further, when the active device is a TFT, a germanium electrode (not shown) of the TFT is connected to the signal line, and a source electrode (not shown) of the TFT is electrically connected to the electrode 6, for example.

進而,於第1基板2上,與信號線平行地配設有共用線 (未圖示),與所有畫素連接,從而可由共用電壓產生電路(未圖示)對全部畫素施加共用電壓。具體而言,以於共用線上連接電極5而對各畫素施加共用電壓的方式來構成。 Further, on the first substrate 2, a common line is disposed in parallel with the signal line (not shown), connected to all the pixels, a common voltage can be applied to all the pixels by a common voltage generating circuit (not shown). Specifically, the electrode 5 is connected to the common line, and a common voltage is applied to each pixel.

在第1基板2與第2基板3之間封入液晶4,液晶顯示元件1可構成主動矩陣方式的液晶顯示元件。 The liquid crystal 4 is sealed between the first substrate 2 and the second substrate 3, and the liquid crystal display element 1 can constitute an active matrix liquid crystal display element.

另外,本發明實施形態的液晶顯示元件中,不需要以壁狀的電極的上端部分與所對向的基板接觸的方式來構成。例如,圖1所示的液晶顯示元件1中,雖以電極5、6的上端部分與所對向的第2基板3的面接觸的方式來構成,但此種結構並非必需。電極5、6只要是自第1基板2的面朝向第2基板3側而突出設置的壁狀電極,則該些電極5、6的上端部分亦可不與第2基板3接觸。 Further, in the liquid crystal display device of the embodiment of the present invention, it is not necessary to form the upper end portion of the wall-shaped electrode in contact with the opposing substrate. For example, in the liquid crystal display element 1 shown in FIG. 1, the upper end portions of the electrodes 5 and 6 are configured to be in contact with the surface of the opposing second substrate 3, but such a configuration is not essential. When the electrodes 5 and 6 are wall electrodes protruding from the surface of the first substrate 2 toward the second substrate 3 side, the upper end portions of the electrodes 5 and 6 may not be in contact with the second substrate 3.

因此,例如於液晶顯示元件1中,亦可將電極5及電極6的至少一者設為上端部分不與和其對向的第2基板3的面接觸的結構。即,液晶顯示元件1中,電極5及電極6的至少一者中,亦可於該些電極5及電極6的上端部分與和其對向的第2基板3之間設置間隙來構成。 Therefore, for example, in the liquid crystal display element 1, at least one of the electrode 5 and the electrode 6 may be configured such that the upper end portion does not come into contact with the surface of the second substrate 3 opposed thereto. In other words, in the liquid crystal display device 1, at least one of the electrode 5 and the electrode 6 may be formed by providing a gap between the upper end portion of the electrode 5 and the electrode 6 and the second substrate 3 opposed thereto.

圖7是示意性地表示本發明實施形態的液晶顯示元件的第3例中的畫素結構的剖面圖。 FIG. 7 is a cross-sectional view schematically showing a pixel structure in a third example of the liquid crystal display element of the embodiment of the present invention.

圖7的作為本發明實施形態的液晶顯示元件的第3例的液晶顯示元件201除了經施加電場的一對電極5、206中的電極206的結構不同以外,具有與圖1~圖4的液晶顯示元件1相同的結 構。因此,對與液晶顯示元件1共通的構成要素標註同一符號,並省略重複的說明。 In the liquid crystal display element 201 of the third example of the liquid crystal display device of the embodiment of the present invention, the liquid crystal display element 201 of the pair of electrodes 5 and 206 to which an electric field is applied is different from the liquid crystal of FIGS. 1 to 4 . Display element 1 has the same knot Structure. Therefore, the same components as those of the liquid crystal display element 1 will be denoted by the same reference numerals, and overlapping description will be omitted.

圖7所示的液晶顯示元件201中,與電極5對向的電極206中,其上端部分設為不與第2基板3接觸的結構。液晶顯示元件201的電極206為壁狀電極,所述壁狀電極包括:壁狀樹脂部210,其自第1基板2的面朝向第2基板3側而突出設置;以及膜狀的導電部212,其包含設置於樹脂部210的側面的導電性構件。而且,於電極206的上端部分與和其對向的第2基板3之間設置間隙而構成。 In the liquid crystal display element 201 shown in FIG. 7, the upper end portion of the electrode 206 opposed to the electrode 5 is configured not to be in contact with the second substrate 3. The electrode 206 of the liquid crystal display element 201 is a wall electrode, and the wall electrode includes a wall-shaped resin portion 210 that protrudes from the surface of the first substrate 2 toward the second substrate 3 side, and a film-shaped conductive portion 212. It includes a conductive member provided on the side surface of the resin portion 210. Further, a gap is formed between the upper end portion of the electrode 206 and the second substrate 3 opposed thereto.

另外,本發明實施形態的液晶顯示元件中,亦可將對向的一對壁狀的電極的兩者設為其上端部分不與所對向的基板的面接觸的結構。例如,圖1的液晶顯示元件1中,亦可設為電極5及電極6的兩者的上端部不與所對向的第2基板3的面接觸的結構。 Further, in the liquid crystal display device of the embodiment of the present invention, both of the pair of opposed wall electrodes may be configured such that the upper end portion thereof does not contact the surface of the opposing substrate. For example, in the liquid crystal display element 1 of FIG. 1 , the upper end portions of both the electrode 5 and the electrode 6 may not be in contact with the surface of the opposing second substrate 3 .

而且,液晶顯示元件1中,於電極5及電極6分別存在多個的情況下,可將多個電極5中的一部分或者多個電極6中的一部分設為上端部分不與第2基板3的面接觸的結構。進而,對於多個電極5及多個電極6的兩者,亦可將各自的一部分設為上端部分不與第2基板3的面接觸的結構。 Further, in the liquid crystal display device 1, when a plurality of the electrodes 5 and 6 are present, a part of the plurality of electrodes 5 or a part of the plurality of electrodes 6 may be an upper end portion not be the same as the second substrate 3. Surface contact structure. Further, in the case where both of the plurality of electrodes 5 and the plurality of electrodes 6 are provided, a part of each of the plurality of electrodes 5 and the plurality of electrodes 6 may be configured such that the upper end portion does not contact the surface of the second substrate 3.

此時,本發明實施形態的液晶顯示元件中,於設置於夾持液晶的第1基板及第2基板中的第1基板上的成為壁狀電極的電極為與所對向的第2基板的面接觸的結構的情況下,可將該電 極作為用以保持基板間距離的間隙保持材(間隔件)來利用。 In the liquid crystal display device of the embodiment of the present invention, the electrode serving as the wall electrode on the first substrate and the second substrate sandwiching the liquid crystal is the second substrate facing the second substrate. In the case of a surface contact structure, the electricity can be The pole is utilized as a gap holding material (spacer) for maintaining the distance between the substrates.

例如,圖1所示的液晶顯示元件1中,以電極5、6的上端部分與第2基板3的面接觸的方式來構成,可將電極5、6作為用以保持第1基板2與第2基板3之間的基板間距離的間隔件來利用。 For example, in the liquid crystal display element 1 shown in FIG. 1, the upper end portions of the electrodes 5 and 6 are in contact with the surface of the second substrate 3, and the electrodes 5 and 6 can be used as the first substrate 2 and the second substrate. 2 spacers for the distance between the substrates between the substrates 3 are utilized.

另外,圖7所示的液晶顯示元件201中,以電極5的上端部分與第2基板3的面接觸的方式來構成,可將電極5作為用以保持第1基板2與第2基板3之間的基板間距離的間隔件來利用。 In the liquid crystal display element 201 shown in FIG. 7, the upper end portion of the electrode 5 is in contact with the surface of the second substrate 3, and the electrode 5 can be used as the first substrate 2 and the second substrate 3. A spacer for the distance between the substrates is utilized.

現有的液晶顯示元件中,為了保持由欲夾持液晶而對向配置的一對基板間的間隙,使用將球形的聚合物珠粒作為間隔件而分散於基板間的技術。於此種技術的情況下,存在聚合物珠粒不均等地分散於基板上,而於基板間的間隙中產生不均的情況。而且,由於此種間隙不均,於圖像的顯示時存在產生亮度不均的情況。 In the conventional liquid crystal display device, in order to maintain a gap between a pair of substrates which are opposed to each other by sandwiching a liquid crystal, a technique in which spherical polymer beads are dispersed as a spacer between the substrates is used. In the case of such a technique, polymer beads are unevenly dispersed on the substrate, and unevenness occurs in the gap between the substrates. Moreover, since such a gap is uneven, there is a case where uneven brightness occurs at the time of image display.

針對所述問題,例如,本發明實施形態的液晶顯示元件1中,如上所述,可將電極5、6作為設置於第1基板2與第2基板3之間的間隔件來使用。同樣地,液晶顯示元件201中,可將電極5用作間隔件。因此,液晶顯示元件1、201中,基板間的間隙不均的產生得以抑制,可減少亮度不均等顯示不良。 In the liquid crystal display element 1 of the embodiment of the present invention, as described above, the electrodes 5 and 6 can be used as a spacer provided between the first substrate 2 and the second substrate 3 as described above. Similarly, in the liquid crystal display element 201, the electrode 5 can be used as a spacer. Therefore, in the liquid crystal display elements 1, 201, generation of gap unevenness between the substrates is suppressed, and display defects such as uneven brightness can be reduced.

此外,液晶顯示元件201中,電極206的上端部分不與第2基板3接觸。然而,對於液晶顯示元件201,由使用者等,例 如,當施加使第2基板3向液晶4側凹陷的按壓時,可使用電極206作為用以抑制凹陷變形的支持材。 Further, in the liquid crystal display element 201, the upper end portion of the electrode 206 is not in contact with the second substrate 3. However, for the liquid crystal display element 201, by the user, etc., for example For example, when pressing to recess the second substrate 3 toward the liquid crystal 4 side is applied, the electrode 206 can be used as a supporting material for suppressing deformation of the recess.

以上所說明的本發明實施形態的液晶顯示元件可效率良好地形成與夾持液晶的基板面平行的電場,為了實現所述效果,成為壁狀電極的電極的結構變得特別重要。 In the liquid crystal display device of the embodiment of the present invention described above, an electric field parallel to the substrate surface on which the liquid crystal is sandwiched can be efficiently formed, and in order to achieve the above effect, the structure of the electrode serving as the wall electrode is particularly important.

如上所述,本實施形態的液晶顯示元件的電極是包括壁狀樹脂部及導電部而構成,所述壁狀樹脂部是自第1基板的面朝向第2基板側而突出設置,所述導電部包含設置於包含該樹脂部的側面的至少一部分的區域中的導電性構件。而且,該電極具備符合樹脂部的結構的形狀。即,本實施形態的液晶顯示元件的電極不僅自第1基板的面朝向第2基板而突出形成,並且以其延伸方向相對於第1基板的主面而垂直的方式來形成,從而具有壁狀的形狀。 As described above, the electrode of the liquid crystal display device of the present embodiment includes a wall-shaped resin portion that is protruded from the surface of the first substrate toward the second substrate side, and the conductive portion. The portion includes a conductive member provided in a region including at least a part of a side surface of the resin portion. Further, the electrode has a shape conforming to the structure of the resin portion. In other words, the electrode of the liquid crystal display device of the present embodiment is formed not only from the surface of the first substrate toward the second substrate, but also has a wall shape in which the extending direction thereof is perpendicular to the main surface of the first substrate. shape.

本實施形態的液晶顯示元件的成為壁狀電極的電極中,樹脂部較佳為將剖面形狀設為梯形、或者矩形(長方形、正方形)。特別是樹脂部較佳為於第1基板上具有後述的正錐形狀。而且,該電極的導電部如上所述,由ITO等導電材料形成而成為膜狀,配置於包含樹脂部的側壁面的區域。本實施形態的液晶顯示元件中,成為壁狀電極的電極具有樹脂部與作為導電膜的導電部的積層結構而構成。 In the electrode which is a wall electrode of the liquid crystal display element of the present embodiment, the resin portion preferably has a trapezoidal cross-sectional shape or a rectangular shape (rectangular or square). In particular, the resin portion preferably has a forward tapered shape to be described later on the first substrate. In addition, as described above, the conductive portion of the electrode is formed of a conductive material such as ITO to form a film, and is disposed in a region including the side wall surface of the resin portion. In the liquid crystal display device of the present embodiment, the electrode serving as the wall electrode has a laminated structure of a resin portion and a conductive portion as a conductive film.

此種本實施形態的液晶顯示元件的電極中,導電部的形成可利用公知的方法來進行。即,形成樹脂部後,依據公知的方 法,於該樹脂部上形成例如ITO等導電膜。而且,可使用公知的方法,將該導電膜圖案化而形成導電部。 In the electrode of the liquid crystal display device of the present embodiment, the formation of the conductive portion can be performed by a known method. That is, after the resin portion is formed, it is based on a known method. In the method, a conductive film such as ITO is formed on the resin portion. Further, the conductive film can be patterned by a known method to form a conductive portion.

因此,本實施形態的液晶顯示元件中,於欲在多個畫素間,高度均勻地以高生產性形成成為壁狀電極的電極的情況下,樹脂部的形成變得重要。即,構成電極的樹脂部較佳為藉由高度均勻地圖案化而形成。 Therefore, in the liquid crystal display device of the present embodiment, in order to form an electrode serving as a wall electrode with high productivity between a plurality of pixels, the formation of the resin portion becomes important. That is, the resin portion constituting the electrode is preferably formed by highly uniform patterning.

因此,包含樹脂部與導電部的壁狀電極的形成中,高感度且高度均勻地將樹脂部進行圖案化來形成作為壁狀電極的電極的技術變得特別重要。 Therefore, in the formation of the wall electrode including the resin portion and the conductive portion, the technique of patterning the resin portion with high sensitivity and high uniformity to form an electrode as a wall electrode is particularly important.

因此,以下對本實施形態的成為壁狀電極的電極的樹脂部的形成進行更詳細的說明。特別是對適合用於形成樹脂部的感放射線性樹脂組成物進行說明,所述樹脂部設置於夾持液晶的一對基板中的其中一塊基板的面上,且朝向所對向的另一基板側而突出設置。 Therefore, the formation of the resin portion of the electrode serving as the wall electrode of the present embodiment will be described in more detail below. In particular, a radiation-sensitive resin composition suitable for forming a resin portion which is provided on a surface of one of a pair of substrates sandwiching a liquid crystal and facing the other substrate facing each other will be described. Side and stand out.

<感放射線性樹脂組成物> <Inductive Radiation Resin Composition>

本發明實施形態的液晶顯示元件的形成壁狀電極的電極的樹脂部的形成中,使用本發明實施形態的感放射線性樹脂組成物。 In the formation of the resin portion of the electrode forming the wall electrode of the liquid crystal display device of the embodiment of the present invention, the radiation sensitive resin composition of the embodiment of the present invention is used.

本發明實施形態的感放射線性樹脂組成物含有[A]聚合物、以及[B]感光劑而成。本實施形態的感放射線性樹脂組成物具有感放射線性。 The radiation sensitive resin composition of the embodiment of the present invention comprises a [A] polymer and a [B] sensitizer. The radiation sensitive resin composition of the present embodiment has a susceptibility to radiation.

本發明實施形態的感放射線性樹脂組成物可應用:照射到光的部分藉由顯影而溶解的正型圖案形成用感放射線性樹脂組 成物、以及照射到光的部分不溶化的負型圖案形成用感放射線性樹脂組成物的任一種。 The radiation-sensitive resin composition of the embodiment of the present invention can be applied to a radiation-sensitive resin group for forming a positive pattern which is dissolved by light to be developed by development. The product and the portion of the radiation-sensitive resin composition for forming a negative pattern that is insolubilized by irradiation with light are formed.

正型圖案形成用感放射線性樹脂組成物可使用[B-2]光酸產生劑作為[B]成分即[B]感光劑。而且,負型圖案形成用感放射線性樹脂組成物可使用[B-1]光自由基聚合起始劑作為[B]成分,即[B]感光劑。 As the radiation-sensitive resin composition for positive pattern formation, a [B-2] photoacid generator can be used as the [B] component, that is, the [B] sensitizer. Further, as the radiation-sensitive resin composition for forming a negative pattern, a [B-1] photoradical polymerization initiator can be used as the component [B], that is, [B] a sensitizer.

即,本發明實施形態的感放射線性樹脂組成物可使用選自[B-1]光自由基聚合起始劑以及[B-2]光酸產生劑中的至少一者作為[B]感光劑,可用於負型圖案形成用途或者正型圖案形成用途。 In other words, at least one of the [B-1] photoradical polymerization initiator and the [B-2] photoacid generator can be used as the [B] sensitizer in the radiation sensitive resin composition of the embodiment of the present invention. It can be used for negative pattern forming purposes or positive pattern forming applications.

本實施形態的感放射線性樹脂組成物具有所述感放射線性,可藉由利用感放射線性的曝光‧顯影來容易地形成微細且精巧的圖案。即,本實施形態的感放射線性樹脂組成物可高精度地形成突出設置於基板上的形成壁狀電極的電極的樹脂部。而且,藉由含有後述[D]硬化促進劑,而實現例如200℃以下等更低溫度下的硬化。同時,具有保存穩定性,且具有充分的解析度以及放射線感度。以下,對本實施形態的感放射線性樹脂組成物的各成分進行詳細說明。 The radiation sensitive resin composition of the present embodiment has the above-described sensibility of radiation, and can be easily formed into a fine and delicate pattern by radiation exposure and sensitization. In other words, in the radiation sensitive resin composition of the present embodiment, the resin portion of the electrode on which the wall electrode is formed protruding on the substrate can be formed with high precision. Further, by containing the [D] hardening accelerator described later, curing at a lower temperature such as 200 ° C or lower is achieved. At the same time, it has storage stability, and has sufficient resolution and radiation sensitivity. Hereinafter, each component of the radiation sensitive resin composition of the present embodiment will be described in detail.

<[A]聚合物> <[A]polymer>

雖含有[A]聚合物作為感放射線性樹脂組成物中所含的樹脂成分,但考慮到本實施形態的樹脂部的圖案化,[A]聚合物較佳為選擇鹼可溶性樹脂。鹼可溶性樹脂只要是藉由具有羧基而具有鹼 顯影性的樹脂,則並無特別限定。而且,鹼可溶性樹脂中可含有具有環氧基的化合物。 Although the [A] polymer is contained as the resin component contained in the radiation sensitive resin composition, in view of the patterning of the resin portion of the present embodiment, the [A] polymer is preferably an alkali-soluble resin. The alkali-soluble resin has a base as long as it has a carboxyl group The developable resin is not particularly limited. Further, the alkali-soluble resin may contain a compound having an epoxy group.

具有環氧基的化合物例如可列舉:1分子內具有2個以上的氧雜環丙基、氧雜環丁基、縮水甘油基、3,4-環氧基環己基的化合物等。 Examples of the compound having an epoxy group include a compound having two or more oxyheteropropyl groups, oxetanyl groups, glycidyl groups, and 3,4-epoxycyclohexyl groups in one molecule.

1分子內具有2個以上3,4-環氧基環己基的化合物例如可列舉:3,4-環氧基環己基甲基-3',4'-環氧基環己烷羧酸酯、2-(3,4-環氧基環己基-5,5-螺環-3,4-環氧基)環己烷-間-二噁烷、雙(3,4-環氧基環己基甲基)己二酸酯、雙(3,4-環氧基-6-甲基環己基甲基)己二酸酯、3,4-環氧-6-甲基環己基-3',4'-環氧-6'-甲基環己烷羧酸酯、亞甲基雙(3,4-環氧基環己烷)、二環戊二烯二環氧化物、乙二醇的二(3,4-環氧基環己基甲基)醚、伸乙基雙(3,4-環氧基環己烷羧酸酯)、內酯改質3,4-環氧基環己基甲基-3',4'-環氧基環己烷羧酸酯等。 Examples of the compound having two or more 3,4-epoxycyclohexyl groups in one molecule include 3,4-epoxycyclohexylmethyl-3',4'-epoxycyclohexanecarboxylic acid ester, 2-(3,4-Epoxycyclohexyl-5,5-spiro-3,4-epoxy)cyclohexane-m-dioxane, bis(3,4-epoxycyclohexyl Adipate, bis(3,4-epoxy-6-methylcyclohexylmethyl)adipate, 3,4-epoxy-6-methylcyclohexyl-3', 4' - Epoxy-6'-methylcyclohexane carboxylate, methylene bis(3,4-epoxycyclohexane), dicyclopentadiene diepoxide, ethylene glycol (3) , 4-epoxycyclohexylmethyl)ether, ethyl bis(3,4-epoxycyclohexanecarboxylate), lactone modified 3,4-epoxycyclohexylmethyl-3 ', 4'-epoxycyclohexane carboxylate, and the like.

1分子內具有2個以上氧雜環丁基(1,3-環氧結構)的化合物例如可列舉:1,4-雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]苯、雙{[1-乙基(3-氧雜環丁基)]甲基}醚、雙(3-乙基-3-氧雜環丁基甲基)醚等。 Examples of the compound having two or more oxetanyl groups (1,3-epoxy structure) in one molecule include 1,4-bis[(3-ethyl-3-oxetanylmethoxy)methyl group. Benzene, bis{[1-ethyl(3-oxetanyl)]methyl}ether, bis(3-ethyl-3-oxetanylmethyl)ether, and the like.

作為其他的[A]聚合物中可含有的環氧化合物,具有縮水甘油基的化合物例如可列舉:雙酚A二縮水甘油醚、雙酚F二縮水甘油醚、雙酚S二縮水甘油醚、氫化雙酚A二縮水甘油醚、氫化雙酚F二縮水甘油醚、 氫化雙酚AD二縮水甘油醚、溴化雙酚A二縮水甘油醚、溴化雙酚F二縮水甘油醚、溴化雙酚S二縮水甘油醚等雙酚化合物的二縮水甘油醚;1,4-丁二醇二縮水甘油醚、1,6-己二醇二縮水甘油醚、甘油三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、聚乙二醇二縮水甘油醚、聚丙二醇二縮水甘油醚等多元醇的聚縮水甘油醚;藉由在乙二醇、丙二醇、甘油等脂肪族多元醇中加成1種或者2種以上的環氧烷而獲得的聚醚多元醇的聚縮水甘油醚;苯酚酚醛清漆型環氧樹脂;甲酚酚醛清漆型環氧樹脂;多酚型環氧樹脂;環狀脂肪族環氧樹脂;脂肪族長鏈二元酸的二縮水甘油酯;高級脂肪酸的縮水甘油酯;環氧化大豆油、環氧化亞麻仁油等。 Examples of the epoxy compound which may be contained in the other [A] polymer, and examples of the compound having a glycidyl group include bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, and bisphenol S diglycidyl ether. Hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol F diglycidyl ether, a diglycidyl ether of a bisphenol compound such as hydrogenated bisphenol AD diglycidyl ether, brominated bisphenol A diglycidyl ether, brominated bisphenol F diglycidyl ether or brominated bisphenol S diglycidyl ether; 4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, glycerol triglycidyl ether, trimethylolpropane triglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol II a polyglycidyl ether of a polyhydric alcohol such as a glycidyl ether; a polycondensation of a polyether polyol obtained by adding one or more alkylene oxides to an aliphatic polyol such as ethylene glycol, propylene glycol or glycerin; Glycerol ether; phenol novolac type epoxy resin; cresol novolak type epoxy resin; polyphenol type epoxy resin; cyclic aliphatic epoxy resin; diglycidyl ester of aliphatic long-chain dibasic acid; Glycidyl ester; epoxidized soybean oil, epoxidized linseed oil, and the like.

該些市售品例如:雙酚A型環氧樹脂可列舉:埃皮考特(Epikote)(註冊商標)1001、埃皮考特(Epikote)1002、埃皮考特(Epikote)1003、埃皮考特(Epikote)1004、埃皮考特(Epikote)1007、埃皮考特(Epikote)1009、埃皮考特(Epikote)1010、埃皮考特(Epikote)828(以上,日本環氧樹脂公司)等;雙酚F型環氧樹脂可列舉:埃皮考特(Epikote)(註冊商標) 807(日本環氧樹脂公司)等;苯酚酚醛清漆型環氧樹脂可列舉:埃皮考特(Epikote)(註冊商標)152、埃皮考特(Epikote)154、埃皮考特(Epikote)157S65(以上,日本環氧樹脂公司)、EPPN(註冊商標)201、EPPN 202(以上,日本化藥公司)等;甲酚酚醛清漆型環氧樹脂可列舉:EOCN(註冊商標)102、EOCN 103S、EOCN 104S、EOCN 1020、EOCN 1025、EOCN 1027(以上,日本化藥公司)、埃皮考特(Epikote)(註冊商標)180S75(日本環氧樹脂公司)等;多酚型環氧樹脂可列舉:埃皮考特(Epikote)(註冊商標)1032H60、埃皮考特(Epikote)XY--000(以上,日本環氧樹脂公司)等;環狀脂肪族環氧樹脂可列舉:CY-175、CY-177、CY-179、愛牢達(Araldite)(註冊商標)CY-182、愛牢達(Araldite)192、184(以上,汽巴精化(Ciba Specialty Chemicals)公司)、ERL-4234、4299、4221、4206(以上,U.C.C公司)、昭達因(Shodine)509(昭和電工公司)、愛匹克隆(Epiclon)200、愛匹克隆(Epiclon)400(以上,大日本油墨公司)、埃皮考特(Epikote)(註冊商標)871、埃皮考特(Epikote)872(以上,日本環氧樹脂公司)、ED-5661、ED-5662(以上,塞拉尼斯塗料(Celanese Coating)公司)等;脂肪族聚縮水甘油醚可列舉:愛坡萊特(Epolite)100MF(共榮社化學公司)、埃皮歐(Epiol)(註冊商標)TMP(日本油脂公 司)等。 Such commercially available products include, for example, bisphenol A type epoxy resins: Epikote (registered trademark) 1001, Epikote 1002, Epikote 1003, Eppi Epikote 1004, Epikote 1007, Epikote 1009, Epikote 1010, Epikote 828 (above, Japan Epoxy Resin Co., Ltd.) ); bisphenol F type epoxy resin can be cited as: Epikote (registered trademark) 807 (Nippon Epoxy Co., Ltd.), etc.; phenol novolac type epoxy resin: Epikote (registered trademark) 152, Epikote 154, Epikote 157S65 (The above, Japan Epoxy Resin Co., Ltd.), EPPN (registered trademark) 201, EPPN 202 (above, Nippon Kayaku Co., Ltd.), etc.; cresol novolac type epoxy resin: EOCN (registered trademark) 102, EOCN 103S, EOCN 104S, EOCN 1020, EOCN 1025, EOCN 1027 (above, Nippon Kayaku Co., Ltd.), Epikote (registered trademark) 180S75 (Japan Epoxy Resin Co., Ltd.), etc.; Epikote (registered trademark) 1032H60, Epikote XY--000 (above, Japan Epoxy Co., Ltd.), etc.; cyclic aliphatic epoxy resin can be listed as: CY-175, CY -177, CY-179, Araldite (registered trademark) CY-182, Araldite 192, 184 (above, Ciba Specialty Chemicals), ERL-4234, 4299 4221, 4206 (above, UCC), Shodine 509 (Showa Denko), Epiclon 200, Epiclon 40 0 (above, Dainippon Ink Co., Ltd.), Epikote (registered trademark) 871, Epikote 872 (above, Japan Epoxy Resin Co., Ltd.), ED-5661, ED-5662 (above) , Celanese Coatings, etc.; aliphatic polyglycidyl ethers can be listed as: Epolite 100MF (Kyoeisha Chemical Co., Ltd.), Epiol (registered trademark) TMP (Japan) Grease Division) and so on.

該些市售品中,較佳為苯酚酚醛清漆型環氧樹脂以及多酚型環氧樹脂。 Among these commercially available products, a phenol novolak type epoxy resin and a polyphenol type epoxy resin are preferable.

而且,感放射線性樹脂組成物所包含的[A]聚合物可使用包含具有羧基的構成單元及具有聚合性基的構成單元的樹脂,且為具有鹼顯影性的樹脂。 In addition, as the [A] polymer contained in the radiation sensitive resin composition, a resin containing a constituent unit having a carboxyl group and a constituent unit having a polymerizable group, and a resin having alkali developability can be used.

該情況下,所謂具有聚合性基的構成單元,較佳為選自由具有環氧基的構成單元以及具有(甲基)丙烯醯氧基的構成單元所組成的組群中的至少1種構成單元。藉由[A]聚合物包含所述特定的構成單元,可形成具有優異的表面硬化性以及深部硬化性的硬化膜,從而形成成為壁狀電極的電極的樹脂部。 In this case, the structural unit having a polymerizable group is preferably at least one constituent unit selected from the group consisting of a structural unit having an epoxy group and a constituent unit having a (meth)acryloxy group. . By including the specific constituent unit in the [A] polymer, a cured film having excellent surface hardenability and deep hardenability can be formed, and a resin portion serving as an electrode of the wall electrode can be formed.

具有(甲基)丙烯醯氧基的構成單元例如可利用以下方法來形成:使共聚物中的環氧基與(甲基)丙烯酸進行反應的方法、使共聚物中的羧基與具有環氧基的(甲基)丙烯酸酯進行反應的方法、使共聚物中的羥基與具有異氰酸基的(甲基)丙烯酸酯進行反應的方法、使共聚物中的酸酐部位與(甲基)丙烯酸羥基酯進行反應的方法等。該些方法中,特佳為使共聚物中的羧基與具有環氧基的(甲基)丙烯酸酯進行反應的方法。 The constituent unit having a (meth) acryloxy group can be formed, for example, by a method of reacting an epoxy group in a copolymer with (meth)acrylic acid, and a carboxyl group in the copolymer and having an epoxy group. a method of reacting a (meth) acrylate, a method of reacting a hydroxyl group in a copolymer with a (meth) acrylate having an isocyanate group, and an acid anhydride moiety in the copolymer and a (meth)acrylic acid hydroxyl group A method in which an ester is subjected to a reaction, and the like. Among these methods, a method of reacting a carboxyl group in the copolymer with a (meth) acrylate having an epoxy group is particularly preferred.

包含具有羧基的構成單元及具有環氧基作為聚合性基的構成單元的[A]聚合物可將(A1)選自由不飽和羧酸及不飽和羧酸酐所組成的組群中的至少1種(以下亦稱為「(A1)化合物」)、與(A2)含環氧基的不飽和化合物(以下亦稱為「(A2)化合物」) 進行共聚合而合成。該情況下,[A]聚合物成為包含以下構成單元的共聚物:由選自由不飽和羧酸及不飽和羧酸酐所組成的組群中的至少1種所形成的構成單元,以及由含環氧基的不飽和化合物所形成的構成單元。 The [A] polymer comprising a structural unit having a carboxyl group and a constituent unit having an epoxy group as a polymerizable group may be at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides. (hereinafter also referred to as "(A1) compound"), and (A2) an epoxy group-containing unsaturated compound (hereinafter also referred to as "(A2) compound") It is synthesized by copolymerization. In this case, the [A] polymer is a copolymer comprising the following constituent unit: a constituent unit formed of at least one selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride, and a ring-containing ring. A constituent unit formed by an unsaturated compound of an oxy group.

該[A]聚合物例如可藉由在溶劑中,於聚合起始劑的存在下,將提供含羧基的構成單元的(A1)化合物與提供含環氧基的構成單元的(A2)化合物進行共聚合來製造。另外,亦可進而添加(A3)提供含羥基的構成單元的含羥基不飽和化合物(以下亦稱為「(A3)化合物」)而形成共聚物。進而,製造包含具有羧基的構成單元及具有環氧基作為聚合性基的構成單元的[A]聚合物時,亦可不僅添加所述(A1)化合物、(A2)化合物以及(A3)化合物,而且進而添加(A4)化合物(提供來源於所述(A1)化合物、(A2)化合物及(A3)化合物的構成單元以外的構成單元的不飽和化合物),來形成共聚物。以下,對各化合物進行詳細說明。 The [A] polymer can be, for example, a compound (A1) which provides a carboxyl group-containing constituent unit and a (A2) compound which provides an epoxy group-containing constituent unit in the presence of a polymerization initiator in a solvent. Copolymerization to manufacture. Further, (A3) a hydroxyl group-containing unsaturated compound (hereinafter also referred to as "(A3) compound)) which provides a hydroxyl group-containing constituent unit may be further added to form a copolymer. Further, when the [A] polymer comprising a structural unit having a carboxyl group and a structural unit having an epoxy group as a polymerizable group is produced, not only the (A1) compound, the (A2) compound, and the (A3) compound may be added. Further, a compound (A4) (an unsaturated compound derived from a constituent unit other than the constituent unit of the (A1) compound, the (A2) compound, and the (A3) compound) is further added to form a copolymer. Hereinafter, each compound will be described in detail.

[(A1)化合物] [(A1) compound]

(A1)化合物可列舉:不飽和單羧酸、不飽和二羧酸、不飽和二羧酸的酐、多元羧酸的單[(甲基)丙烯醯氧基烷基]酯等。 Examples of the compound (A1) include an unsaturated monocarboxylic acid, an unsaturated dicarboxylic acid, an anhydride of an unsaturated dicarboxylic acid, and a mono[(meth)acryloxyalkylalkyl]ester of a polyvalent carboxylic acid.

不飽和單羧酸例如可列舉:丙烯酸、甲基丙烯酸、丁烯酸等。 Examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid, crotonic acid, and the like.

不飽和二羧酸例如可列舉:順丁烯二酸、反丁烯二酸、檸康酸、中康酸、衣康酸等。 Examples of the unsaturated dicarboxylic acid include maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid and the like.

不飽和二羧酸的酐例如可列舉作為所述二羧酸而例示的化合物的酐等。 Examples of the anhydride of the unsaturated dicarboxylic acid include an anhydride of the compound exemplified as the dicarboxylic acid.

多元羧酸的單[(甲基)丙烯醯氧基烷基]酯例如可列舉:丁二酸單[2-(甲基)丙烯醯氧基乙基]酯、鄰苯二甲酸單[2-(甲基)丙烯醯氧基乙基]酯等。 The mono[(meth)acryloxyalkylalkyl] ester of a polyvalent carboxylic acid may, for example, be succinic acid mono [2-(methyl) propylene oxiranyl ethyl] ester, phthalic acid mono [2- (Methyl) propylene methoxyethyl] ester and the like.

該些(A1)化合物中,較佳為丙烯酸、甲基丙烯酸、順丁烯二酸酐,就共聚合反應性、對鹼水溶液的溶解性以及獲取的容易性而言,更佳為丙烯酸、甲基丙烯酸、順丁烯二酸酐。 Among these (A1) compounds, acrylic acid, methacrylic acid, and maleic anhydride are preferred, and acrylic acid and methyl groups are more preferable in terms of copolymerization reactivity, solubility in an aqueous alkali solution, and ease of availability. Acrylic acid, maleic anhydride.

該些(A1)化合物可單獨使用,亦可將2種以上混合使用。 These (A1) compounds may be used singly or in combination of two or more.

基於(A1)化合物以及(A2)化合物(視需要的任意的(A3)化合物以及(A4)化合物)的合計,(A1)化合物的使用比例較佳為5質量%~30質量%,更佳為10質量%~25質量%。藉由將(A1)化合物的使用比例設為5質量%~30質量%,不僅使[A]聚合物對鹼水溶液的溶解性最佳化,而且獲得放射線性感度優異的絕緣膜,適合於形成成為壁狀電極的電極的樹脂部。 The ratio of the use of the compound (A1) is preferably from 5% by mass to 30% by mass based on the total of the (A1) compound and the (A2) compound (optional (A3) compound and (A4) compound), more preferably 10% by mass to 25% by mass. By using the ratio of the use of the compound (A1) to 5% by mass to 30% by mass, the solubility of the [A] polymer in an aqueous alkali solution is optimized, and an insulating film excellent in radiation sensitivity is obtained, which is suitable for formation. A resin portion that becomes an electrode of a wall electrode.

[(A2)化合物] [(A2) compound]

(A2)化合物是具有自由基聚合性的含環氧基不飽和化合物。環氧基可列舉氧雜環丙基(1,2-環氧結構)或者氧雜環丁基(1,3-環氧結構)等。 The (A2) compound is an epoxy group-containing unsaturated compound having a radical polymerizable property. Examples of the epoxy group include an oxoheteryl group (1,2-epoxy structure) or an oxetanyl group (1,3-epoxy structure).

具有氧雜環丙基的不飽和化合物例如可列舉:丙烯酸縮水甘油酯、甲基丙烯酸縮水甘油酯、甲基丙烯酸2-甲基縮水甘油 酯、丙烯酸3,4-環氧基丁酯、甲基丙烯酸3,4-環氧基丁酯、丙烯酸6,7-環氧基庚酯、甲基丙烯酸6,7-環氧基庚酯、α-乙基丙烯酸-6,7-環氧基庚酯、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚、甲基丙烯酸3,4-環氧基環己基甲酯等。該些化合物中,就共聚合反應性以及電極的樹脂部的耐溶劑性等提高的觀點而言,較佳為甲基丙烯酸縮水甘油酯、甲基丙烯酸2-甲基縮水甘油酯、甲基丙烯酸-6,7-環氧基庚酯、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚、甲基丙烯酸3,4-環氧基環己酯、丙烯酸3,4-環氧基環己酯等。 Examples of the unsaturated compound having an oxiranyl group include glycidyl acrylate, glycidyl methacrylate, and 2-methyl glycidol methacrylate. Ester, 3,4-epoxybutyl acrylate, 3,4-epoxybutyl methacrylate, 6,7-epoxyheptyl acrylate, 6,7-epoxyheptyl methacrylate, α-Ethyl acrylate-6,7-epoxyheptyl ester, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, methacrylic acid 3,4- Epoxycyclohexylmethyl ester and the like. Among these compounds, glycidyl methacrylate, 2-methyl glycidyl methacrylate, and methacrylic acid are preferred from the viewpoints of improvement in copolymerization reactivity and solvent resistance of the resin portion of the electrode. -6,7-epoxyheptyl ester, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, 3,4-epoxycyclohexane methacrylate Ester, 3,4-epoxycyclohexyl acrylate, and the like.

具有氧雜環丁基的不飽和化合物例如可列舉:3-(丙烯醯氧基甲基)氧雜環丁烷、3-(丙烯醯氧基甲基)-2-甲基氧雜環丁烷、3-(丙烯醯氧基甲基)-3-乙基氧雜環丁烷、3-(丙烯醯氧基甲基)-2-苯基氧雜環丁烷、3-(2-丙烯醯氧基乙基)氧雜環丁烷、3-(2-丙烯醯氧基乙基)-2-乙基氧雜環丁烷、3-(2-丙烯醯氧基乙基)-3-乙基氧雜環丁烷、3-(2-丙烯醯氧基乙基)-2-苯基氧雜環丁烷等丙烯酸酯;3-(甲基丙烯醯氧基甲基)氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-2-甲基氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-3-乙基氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-2-苯基氧雜環丁烷、3-(2-甲基丙烯醯氧基乙基)氧雜環丁烷、3-(2-甲基丙烯醯氧基乙基)-2-乙基氧雜環丁烷、3-(2-甲基丙烯醯氧基乙基)-3-乙基氧雜環丁烷、3-(2-甲基丙 烯醯氧基乙基)-2-苯基氧雜環丁烷、3-(2-甲基丙烯醯氧基乙基)-2,2-二氟氧雜環丁烷等甲基丙烯酸酯等。 Examples of the unsaturated compound having an oxetanyl group include 3-(acryloxymethyl)oxetane and 3-(acryloxymethyl)-2-methyloxetane. , 3-(acryloxymethyl)-3-ethyloxetane, 3-(acryloxymethyl)-2-phenyloxetane, 3-(2-propene oxime Oxyethyl)oxetane, 3-(2-propenyloxyethyl)-2-ethyloxetane, 3-(2-propenyloxyethyl)-3-B Acrylate such as oxetane, 3-(2-propenyloxyethyl)-2-phenyloxetane; 3-(methacryloxymethyl)oxetane , 3-(methacryloxymethyl)-2-methyloxetane, 3-(methacryloxymethyl)-3-ethyloxetane, 3-( Methyl propylene methoxymethyl)-2-phenyl oxetane, 3-(2-methylpropenyloxyethyl) oxetane, 3-(2-methylpropene oxime Benzyl)-2-ethyloxetane, 3-(2-methylpropenyloxyethyl)-3-ethyloxetane, 3-(2-methylpropane Methyl acrylate such as ethionyloxyethyl)-2-phenyloxetane or 3-(2-methylpropenyloxyethyl)-2,2-difluorooxetane .

該些(A2)化合物中,較佳為甲基丙烯酸縮水甘油酯、甲基丙烯酸3,4-環氧基環己酯、3-(甲基丙烯醯氧基甲基)-3-乙基氧雜環丁烷。該些(A2)化合物可單獨使用,亦可將2種以上混合使用。 Among these (A2) compounds, glycidyl methacrylate, 3,4-epoxycyclohexyl methacrylate, 3-(methacryloxymethyl)-3-ethyloxy is preferred. Heterocyclic butane. These (A2) compounds may be used singly or in combination of two or more.

基於(A1)化合物以及(A2)化合物(視需要的任意的(A3)化合物以及(A4)化合物)的合計,(A2)化合物的使用比例較佳為5質量%~60質量%,更佳為10質量%~50質量%。藉由將(A2)化合物的使用比例設為5質量%~60質量%,可形成具有優異的硬化性等的成為壁狀電極的電極的樹脂部。 The ratio of the (A2) compound to be used is preferably from 5% by mass to 60% by mass based on the total of the (A1) compound and the (A2) compound (optional (A3) compound and (A4) compound), more preferably 10% by mass to 50% by mass. By using the ratio of the use of the compound (A2) to 5% by mass to 60% by mass, a resin portion having an electrode which is a wall electrode having excellent curability or the like can be formed.

[(A3)化合物] [(A3) compound]

(A3)化合物可列舉:具有羥基的(甲基)丙烯酸酯、具有酚性羥基的(甲基)丙烯酸酯、羥基苯乙烯。 The (A3) compound may, for example, be a (meth) acrylate having a hydroxyl group, a (meth) acrylate having a phenolic hydroxyl group, or a hydroxystyrene.

具有羥基的丙烯酸酯可列舉:丙烯酸2-羥基乙酯、丙烯酸3-羥基丙酯、丙烯酸4-羥基丁酯、丙烯酸5-羥基戊酯、丙烯酸6-羥基己酯等。 Examples of the acrylate having a hydroxyl group include 2-hydroxyethyl acrylate, 3-hydroxypropyl acrylate, 4-hydroxybutyl acrylate, 5-hydroxypentyl acrylate, and 6-hydroxyhexyl acrylate.

具有羥基的甲基丙烯酸酯可列舉:甲基丙烯酸2-羥基乙酯、甲基丙烯酸3-羥基丙酯、甲基丙烯酸4-羥基丁酯、甲基丙烯酸5-羥基戊酯、甲基丙烯酸6-羥基己酯等。 Examples of the methacrylate having a hydroxyl group include 2-hydroxyethyl methacrylate, 3-hydroxypropyl methacrylate, 4-hydroxybutyl methacrylate, 5-hydroxypentyl methacrylate, and methacrylic acid 6 -Hydroxyhexyl ester and the like.

具有酚性羥基的丙烯酸酯可列舉:丙烯酸2-羥基苯酯、丙烯酸4-羥基苯酯等。具有酚性羥基的甲基丙烯酸酯可列舉:甲 基丙烯酸2-羥基苯酯、甲基丙烯酸4-羥基苯酯等。 Examples of the acrylate having a phenolic hydroxyl group include 2-hydroxyphenyl acrylate and 4-hydroxyphenyl acrylate. A methacrylate having a phenolic hydroxyl group can be exemplified: 2-hydroxyphenyl acrylate, 4-hydroxyphenyl methacrylate, and the like.

羥基苯乙烯較佳為鄰羥基苯乙烯、對羥基苯乙烯、α-甲基-對羥基苯乙烯。該些(A3)化合物可單獨使用,亦可將2種以上混合使用。 The hydroxystyrene is preferably o-hydroxystyrene, p-hydroxystyrene, or α-methyl-p-hydroxystyrene. These (A3) compounds may be used singly or in combination of two or more.

基於(A1)化合物、(A2)化合物以及(A3)化合物(視需要的任意的(A4)化合物)的合計,(A3)化合物的使用比例較佳為1質量%~30質量%,更佳為5質量%~25質量%。 The ratio of use of the compound (A3) is preferably from 1% by mass to 30% by mass based on the total of the (A1) compound, the (A2) compound, and the (A3) compound (optionally any (A4) compound), more preferably 5 mass% to 25% by mass.

[(A4)化合物] [(A4) compound]

(A4)化合物只要是所述(A1)化合物、(A2)化合物以及(A3)化合物以外的不飽和化合物,則並無特別限制。(A4)化合物例如可列舉:甲基丙烯酸鏈狀烷基酯、甲基丙烯酸環狀烷基酯、丙烯酸鏈狀烷基酯、丙烯酸環狀烷基酯、甲基丙烯酸芳基酯、丙烯酸芳基酯、不飽和二羧酸二酯、順丁烯二醯亞胺化合物、不飽和芳香族化合物、共軛二烯、具有四氫呋喃骨架等的不飽和化合物以及其他的不飽和化合物等。 The compound (A4) is not particularly limited as long as it is an unsaturated compound other than the (A1) compound, the (A2) compound, and the (A3) compound. Examples of the (A4) compound include a chain alkyl methacrylate, a cyclic alkyl methacrylate, a chain alkyl acrylate, a cyclic alkyl acrylate, an aryl methacrylate, and an aryl acrylate. An ester, an unsaturated dicarboxylic acid diester, a maleimide compound, an unsaturated aromatic compound, a conjugated diene, an unsaturated compound having a tetrahydrofuran skeleton or the like, and other unsaturated compounds.

甲基丙烯酸鏈狀烷基酯例如可列舉:甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸正丁酯、甲基丙烯酸第二丁酯、甲基丙烯酸第三丁酯、甲基丙烯酸2-乙基己酯、甲基丙烯酸異癸酯、甲基丙烯酸正月桂酯、甲基丙烯酸十三烷基酯、甲基丙烯酸正硬脂酯等。 Examples of the chain alkyl methacrylate include methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, second butyl methacrylate, butyl methacrylate, and methacrylic acid. 2-ethylhexyl ester, isodecyl methacrylate, n-lauryl methacrylate, tridecyl methacrylate, n-stearyl methacrylate, and the like.

甲基丙烯酸環狀烷基酯例如可列舉:甲基丙烯酸環己酯、甲基丙烯酸2-甲基環己酯、甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯、甲 基丙烯酸三環[5.2.1.02,6]癸-8-基氧基乙酯、甲基丙烯酸異莰酯等。 Examples of the cyclic alkyl methacrylate include cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, tricyclo[5.2.1.0 2,6 ]non-8-yl methacrylate, Tricyclo [ 0.45.1.0 2,6 ] 癸-8-yloxyethyl methacrylate, isodecyl methacrylate, and the like.

丙烯酸鏈狀烷基酯例如可列舉:丙烯酸甲酯、丙烯酸乙酯、丙烯酸正丁酯、丙烯酸第二丁酯、丙烯酸第三丁酯、丙烯酸2-乙基己酯、丙烯酸異癸酯、丙烯酸正月桂酯、丙烯酸十三烷基酯、丙烯酸正硬脂酯等。 Examples of the acrylic chain alkyl ester include methyl acrylate, ethyl acrylate, n-butyl acrylate, second butyl acrylate, tert-butyl acrylate, 2-ethylhexyl acrylate, isodecyl acrylate, and acrylic acid. Lauryl ester, tridecyl acrylate, n-stearyl acrylate, and the like.

丙烯酸環狀烷基酯例如可列舉:丙烯酸環己酯、丙烯酸-2-甲基環己酯、丙烯酸三環[5.2.1.02,6]癸-8-基酯、丙烯酸三環[5.2.1.02,6]癸-8-基氧基乙酯、丙烯酸異莰酯等。 The cyclic alkyl acrylate may, for example, be cyclohexyl acrylate, 2-methylcyclohexyl acrylate, tricyclo[5.2.1.0 2,6 ]non-8-yl acrylate, acryl tricyclo[5.2.1.0 2,6 ]癸-8-yloxyethyl ester, isodecyl acrylate, and the like.

甲基丙烯酸芳基酯例如可列舉:甲基丙烯酸苯酯、甲基丙烯酸苄酯等。 Examples of the aryl methacrylate include phenyl methacrylate and benzyl methacrylate.

丙烯酸芳基酯例如可列舉:丙烯酸苯酯、丙烯酸苄酯等。 Examples of the aryl acrylate include phenyl acrylate and benzyl acrylate.

不飽和二羧酸二酯例如可列舉:順丁烯二酸二乙酯、反丁烯二酸二乙酯、衣康酸二乙酯等。 Examples of the unsaturated dicarboxylic acid diester include diethyl maleate, diethyl fumarate, and diethyl itaconate.

順丁烯二醯亞胺化合物例如可列舉:N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、N-苄基順丁烯二醯亞胺、N-(4-羥基苯基)順丁烯二醯亞胺、N-(4-羥基苄基)順丁烯二醯亞胺、N-丁二醯亞胺基-3-順丁烯二醯亞胺苯甲酸酯、N-丁二醯亞胺基-4-順丁烯二醯亞胺丁酸酯、N-丁二醯亞胺基-6-順丁烯二醯亞胺己酸酯、N-丁二醯亞胺基-3-順丁烯二醯亞胺丙酸酯、N-(9-吖啶基)順丁烯二醯亞胺等。 Examples of the maleimide compound include N-phenyl maleimide, N-cyclohexyl maleimide, N-benzyl maleimide, and N- (4-hydroxyphenyl) maleimide, N-(4-hydroxybenzyl) maleimide, N-butylenedimino-3-methyleneimine Benzoate, N-butanediamine-4-butyleneimine butyrate, N-butylenedimino-6-m-butyleneimine hexanoate, N - Dibutyl imino-3-butanediimide propionate, N-(9-acridinyl) maleimide, and the like.

不飽和芳香族化合物例如可列舉:苯乙烯、α-甲基苯乙 烯、間甲基苯乙烯、對甲基苯乙烯、乙烯基甲苯、對甲氧基苯乙烯等。共軛二烯例如可列舉:1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 Examples of the unsaturated aromatic compound include styrene and α-methylphenylethyl. Alkene, m-methylstyrene, p-methylstyrene, vinyltoluene, p-methoxystyrene, and the like. Examples of the conjugated diene include 1,3-butadiene, isoprene, and 2,3-dimethyl-1,3-butadiene.

含有四氫呋喃骨架的不飽和化合物例如可列舉:甲基丙烯酸四氫糠酯、2-甲基丙烯醯氧基-丙酸四氫糠酯、3-(甲基)丙烯醯氧基四氫呋喃-2-酮等。 Examples of the unsaturated compound containing a tetrahydrofuran skeleton include tetrahydrofurfuryl methacrylate, 2-methylpropenyloxy-tetrahydrofurfuryl propionate, and 3-(methyl)propenyloxytetrahydrofuran-2-one. Wait.

其他的不飽和化合物例如可列舉:丙烯腈、甲基丙烯腈、氯乙烯、偏二氯乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸乙烯酯等。 Examples of the other unsaturated compound include acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, and vinyl acetate.

該些(A4)化合物中,較佳為甲基丙烯酸鏈狀烷基酯、甲基丙烯酸環狀烷基酯、甲基丙烯酸芳基酯、順丁烯二醯亞胺化合物、四氫呋喃骨架、不飽和芳香族化合物、丙烯酸環狀烷基酯。該些化合物中,就共聚合反應性以及對鹼水溶液的溶解性的方面而言,特佳為:苯乙烯、甲基丙烯酸甲酯、甲基丙烯酸第三丁酯、甲基丙烯酸正月桂酯、甲基丙烯酸苄酯、甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯、對甲氧基苯乙烯、丙烯酸2-甲基環己酯、N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺、甲基丙烯酸四氫糠酯。 Among these (A4) compounds, preferred are methacrylic chain alkyl esters, methacrylic cyclic alkyl esters, aryl methacrylates, maleimide compounds, tetrahydrofuran skeletons, and unsaturated groups. An aromatic compound, a cyclic alkyl acrylate. Among these compounds, in terms of copolymerization reactivity and solubility in an aqueous alkali solution, styrene, methyl methacrylate, butyl methacrylate, n-lauryl methacrylate, and the like are particularly preferable. Benzyl methacrylate, tricyclo [5.0.1.02 2,6 ] 癸-8-yl methacrylate, p-methoxy styrene, 2-methylcyclohexyl acrylate, N-phenyl cis-butene Yttrium, N-cyclohexylmethyleneimine, tetrahydrofurfuryl methacrylate.

該些(A4)化合物可單獨使用,亦可將2種以上混合使用。 These (A4) compounds may be used singly or in combination of two or more.

基於(A1)化合物、(A2)化合物以及(A4)化合物(以及任意的(A3)化合物)的合計,(A4)化合物的使用比例較佳為10質量%~80質量%。 The ratio of use of the compound (A4) is preferably from 10% by mass to 80% by mass based on the total of the (A1) compound, the (A2) compound, and the (A4) compound (and any (A3) compound).

<[B]感光劑> <[B] sensitizer>

本發明實施形態的感放射線性樹脂組成物中所含有的[B]感光劑可列舉:可對放射線進行感應而產生自由基來引發聚合的化合物(即,[B-1]光自由基聚合起始劑)、或者對放射線進行感應而產生酸的化合物(即,[B-2]光酸產生劑)。 The [B] sensitizer contained in the radiation sensitive resin composition of the embodiment of the present invention may be a compound capable of inducing radiation by inducing radiation to generate a radical (ie, [B-1] photoradical polymerization. A starting agent) or a compound that induces an acid to generate an acid (ie, [B-2] photoacid generator).

此種[B-1]光自由基聚合起始劑可列舉:O-醯基肟化合物、苯乙酮化合物、聯咪唑化合物等。該些化合物可單獨使用,亦可將2種以上混合使用。 Examples of such a [B-1] photoradical polymerization initiator include an O-indenyl hydrazine compound, an acetophenone compound, a biimidazole compound, and the like. These compounds may be used singly or in combination of two or more.

O-醯基肟化合物例如可列舉:1,2-辛二酮1-[4-(苯硫基)-2-(O-苯甲醯基肟)]、乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(0-乙醯基肟)、1-(9-乙基-6-苯甲醯基-9H-咔唑-3-基)-辛烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯、1-[9-正丁基-6-(2-乙基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-5-四氫呋喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜環戊基)甲氧基苯甲醯基}-9H-咔唑-3-基]-1-(O-乙醯基肟)等。 Examples of the O-indenyl hydrazine compound include 1,2-octanedione 1-[4-(phenylthio)-2-(O-benzylidene fluorenyl)], and ethyl ketone-1-[9-B -6-(2-methylbenzhydryl)-9H-indazol-3-yl]-1-(0-ethylindenyl), 1-(9-ethyl-6-benzylidene) -9H-carbazol-3-yl)-octane-1-one oxime-O-acetate, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-carbazole 3-yl]-ethane-1-one oxime-O-benzoate, 1-[9-n-butyl-6-(2-ethylbenzylidene)-9H-carbazole-3- Ethyl]-ethane-1-ketooxime-O-benzoate, ethyl ketone-1-[9-ethyl-6-(2-methyl-4-tetrahydrofurylbenzoguanidino)-9H-oxime Zyrid-3-yl]-1-(O-ethylindenyl), ethyl ketone-1-[9-ethyl-6-(2-methyl-4-tetrahydropyranylbenzylidene)- 9H-carbazol-3-yl]-1-(O-acetylindenyl), ethyl ketone-1-[9-ethyl-6-(2-methyl-5-tetrahydrofuranylbenzylidene)- 9H-carbazol-3-yl]-1-(O-acetylindenyl), ethyl ketone-1-[9-ethyl-6-{2-methyl-4-(2,2-dimethyl -1,3-dioxolyl)methoxybenzylidenyl}-9H-indazol-3-yl]-1-(O-ethylindenyl) and the like.

該些化合物中,較佳為:1,2-辛二酮1-[4-(苯硫基)-2-(O-苯甲醯基肟)]、乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3- 基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、或者乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜環戊基)甲氧基苯甲醯基}-9H-咔唑-3-基]-1-(O-乙醯基肟)。 Among these compounds, preferred is: 1,2-octanedione 1-[4-(phenylthio)-2-(O-benzylidenehydrazine)], ethyl ketone-1-[9-ethyl -6-(2-methylbenzimidyl)-9H-carbazole-3- 1-(O-ethylindenyl), ethyl ketone-1-[9-ethyl-6-(2-methyl-4-tetrahydrofurylmethoxybenzylidene)-9H-carbazole -3-yl]-1-(O-acetylindenyl), or ethyl ketone-1-[9-ethyl-6-{2-methyl-4-(2,2-dimethyl-1, 3-Dioxolyl)methoxybenzylidenyl}-9H-indazol-3-yl]-1-(O-ethylindenyl).

苯乙酮化合物例如可列舉:α-胺基酮化合物、α-羥基酮化合物。 Examples of the acetophenone compound include an α-aminoketone compound and an α-hydroxyketone compound.

α-胺基酮化合物例如可列舉:2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、2-二甲基胺基-2-(4-甲基苄基)-1-(4-嗎啉-4-基-苯基)-丁烷-1-酮、2-甲基-1-(4-甲硫基苯基)-2-嗎啉基丙烷-1-酮等。 Examples of the α-amino ketone compound include 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butan-1-one and 2-dimethylamino group- 2-(4-methylbenzyl)-1-(4-morpholin-4-yl-phenyl)-butan-1-one, 2-methyl-1-(4-methylthiophenyl) -2-morpholinylpropan-1-one and the like.

α-羥基酮化合物例如可列舉:1-苯基-2-羥基-2-甲基丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、4-(2-羥基乙氧基)苯基-(2-羥基-2-丙基)酮、1-羥基環己基苯基酮等。 The α-hydroxyketone compound may, for example, be 1-phenyl-2-hydroxy-2-methylpropan-1-one or 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropane- 1-ketone, 4-(2-hydroxyethoxy)phenyl-(2-hydroxy-2-propyl) ketone, 1-hydroxycyclohexyl phenyl ketone, and the like.

苯乙酮化合物較佳為α-胺基酮化合物,特佳為:2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、2-二甲基胺基-2-(4-甲基苄基)-1-(4-嗎啉-4-基-苯基)-丁烷-1-酮、2-甲基-1-(4-甲硫基苯基)-2-嗎啉基丙烷-1-酮。 The acetophenone compound is preferably an α-amino ketone compound, particularly preferably: 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butan-1-one, 2-Dimethylamino-2-(4-methylbenzyl)-1-(4-morpholin-4-yl-phenyl)-butan-1-one, 2-methyl-1-( 4-Methylthiophenyl)-2-morpholinylpropan-1-one.

聯咪唑化合物例如較佳為:2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、或者2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑,其中,更佳為2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑。 The biimidazole compound is preferably, for example, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-double (2,4-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, or 2,2'-bis(2,4,6-trichlorobenzene -4,4',5,5'-tetraphenyl-1,2'-biimidazole, more preferably 2,2'-bis(2,4-dichlorophenyl)-4,4 ',5,5'-Tetraphenyl-1,2'-biimidazole.

[B-1]光自由基聚合起始劑如上所述,可單獨使用或者將2種以上混合使用。相對於[A]聚合物100質量份,[B-1]光自由基聚合起始劑的含有比例較佳為1質量份~40質量份,更佳為5質量份~30質量份。藉由將[B-1]光自由基聚合起始劑的使用比例設為1質量份~40質量份,則即便為低曝光量,感放射線性樹脂組成物亦可形成具有高的耐溶劑性、高的硬度以及高的密接性的硬化膜,從而可提供此種特性優異的電極的樹脂部。 [B-1] The photoradical polymerization initiator may be used singly or in combination of two or more kinds as described above. The content ratio of the [B-1] photoradical polymerization initiator is preferably from 1 part by mass to 40 parts by mass, more preferably from 5 parts by mass to 30 parts by mass, per 100 parts by mass of the [A] polymer. When the ratio of use of the [B-1] photoradical polymerization initiator is from 1 part by mass to 40 parts by mass, the radiation-sensitive resin composition can be formed to have high solvent resistance even at a low exposure amount. A cured film having high hardness and high adhesion can provide a resin portion of an electrode having such excellent characteristics.

繼而,本實施形態的感放射線性樹脂組成物的[B]感光劑即[B-2]光酸產生劑例如可列舉:肟磺酸酯化合物、鎓鹽、磺醯亞胺化合物、含鹵素的化合物、重氮甲烷化合物、碸化合物、磺酸酯化合物、羧酸酯化合物等。此外,該些[B-2]光酸產生劑可單獨使用,亦可將2種以上混合使用。 In addition, the [B-2] photoacid generator which is a [B] photosensitive agent of the radiation sensitive resin composition of the present embodiment may, for example, be an oxime sulfonate compound, a phosphonium salt, a sulfonium imide compound, or a halogen-containing compound. a compound, a diazomethane compound, an anthraquinone compound, a sulfonate compound, a carboxylate compound, or the like. Further, these [B-2] photoacid generators may be used singly or in combination of two or more.

肟磺酸酯化合物較佳為包含下述式(1)所表示的肟磺酸酯基的化合物。 The oxime sulfonate compound is preferably a compound containing an oxime sulfonate group represented by the following formula (1).

所述式(1)中,Ra為碳數1~12的烷基、碳數1~12的氟烷基、碳數4~12的脂環式烴基、碳數6~20的芳基,或者該些烷基、脂環式烴基以及芳基所具有的氫原子的一部分或者全 部經取代基所取代的基團。 In the formula (1), R a is an alkyl group having 1 to 12 carbon atoms, a fluoroalkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 4 to 12 carbon atoms, and an aryl group having 6 to 20 carbon atoms. Or a group in which some or all of the hydrogen atoms of the alkyl group, the alicyclic hydrocarbon group, and the aryl group are substituted with a substituent.

所述式(1)中的Ra所表示的烷基較佳為碳數1~12的直鏈狀或者分支狀的烷基。該碳數1~12的直鏈狀或者分支狀的烷基可經取代基所取代,所述取代基例如可列舉:碳數1~10的烷氧基、7,7-二甲基-2-氧代降莰基等包含橋環式脂環基的脂環式基等。碳數1~12的氟烷基可列舉三氟甲基、五氟乙基、庚基氟丙基等。 The alkyl group represented by R a in the formula (1) is preferably a linear or branched alkyl group having 1 to 12 carbon atoms. The linear or branched alkyl group having 1 to 12 carbon atoms may be substituted with a substituent, and examples of the substituent include an alkoxy group having 1 to 10 carbon atoms and 7,7-dimethyl-2. An alicyclic group or the like containing a bridged cyclic alicyclic group, such as an oxopurpurinyl group. Examples of the fluoroalkyl group having 1 to 12 carbon atoms include a trifluoromethyl group, a pentafluoroethyl group, and a heptylfluoropropyl group.

所述Ra所表示的脂環式烴基較佳為碳數4~12的脂環式烴基。該碳數4~12的脂環式烴基可經取代基所取代,所述取代基例如可列舉:碳數1~5的烷基、烷氧基、鹵素原子等。 The alicyclic hydrocarbon group represented by R a is preferably an alicyclic hydrocarbon group having 4 to 12 carbon atoms. The alicyclic hydrocarbon group having 4 to 12 carbon atoms may be substituted with a substituent, and examples of the substituent include an alkyl group having 1 to 5 carbon atoms, an alkoxy group, and a halogen atom.

所述Ra所表示的芳基較佳為碳數6~20的芳基,更佳為苯基、萘基、甲苯基、二甲苯基。所述芳基可經取代基所取代,所述取代基例如可列舉:碳數1~5的烷基、烷氧基、鹵素原子等。 The aryl group represented by R a is preferably an aryl group having 6 to 20 carbon atoms, more preferably a phenyl group, a naphthyl group, a tolyl group or a xylyl group. The aryl group may be substituted with a substituent, and examples of the substituent include an alkyl group having 1 to 5 carbon atoms, an alkoxy group, and a halogen atom.

鎓鹽例如可列舉:二苯基錪鹽、三苯基鋶鹽、統鹽、苯并噻唑鎓鹽(benzothiazolium salt)、四氫噻吩鎓鹽(tetrahydrothiophenium salt)等。 Examples of the onium salt include diphenylphosphonium salt, triphenylsulfonium salt, sulfonium salt, benzothiazolium salt, and tetrahydrothiophenium salt.

磺醯亞胺化合物例如可列舉:N-(三氟甲基磺醯氧基)丁二醯亞胺、N-(樟腦磺醯氧基)丁二醯亞胺、N-(4-甲基苯基磺醯氧基)丁二醯亞胺、N-(2-三氟甲基苯基磺醯氧基)丁二醯亞胺、N-(4-氟苯基磺醯氧基)丁二醯亞胺、N-(三氟甲基磺醯氧基)鄰苯二甲醯亞胺、N-(樟腦磺醯氧基)鄰苯二甲醯亞胺、N-(2-三氟甲基苯基磺醯氧基)鄰苯二甲醯亞胺、N-(2-氟苯基磺醯氧基)鄰苯二甲醯亞 胺、N-(三氟甲基磺醯氧基)二苯基順丁烯二醯亞胺、N-(樟腦磺醯氧基)二苯基順丁烯二醯亞胺、4-甲基苯基磺醯氧基)二苯基順丁烯二醯亞胺等。 Examples of the sulfonimide compound include N-(trifluoromethylsulfonyloxy)butaneimine, N-(camphorsulfonyloxy)butadienimide, and N-(4-methylbenzene). Sulfosulfonyloxy)butanediamine, N-(2-trifluoromethylphenylsulfonyloxy)butanediamine, N-(4-fluorophenylsulfonyloxy)butane Imine, N-(trifluoromethylsulfonyloxy) phthalimide, N-(camphorsulfonyloxy) phthalimide, N-(2-trifluoromethylbenzene Alkyl sulfonyloxy) phthalimide, N-(2-fluorophenylsulfonyloxy) phthalate Amine, N-(trifluoromethylsulfonyloxy)diphenylmethylene iodide, N-(camphorsulfonyloxy)diphenylbutyleneimide, 4-methylbenzene Alkylsulfonyloxy)diphenylbutyleneimine and the like.

[B-2]光酸產生劑較佳為肟磺酸酯化合物、鎓鹽、磺醯亞胺化合物,更佳為肟磺酸酯化合物。 [B-2] The photoacid generator is preferably an oxime sulfonate compound, a phosphonium salt or a sulfonium imide compound, more preferably an oxime sulfonate compound.

另外,所述鎓鹽較佳為四氫噻吩鎓鹽、苄基鋶鹽,更佳為4,7-二-正丁氧基-1-萘基四氫噻吩鎓三氟甲磺酸鹽、苄基-4-羥基苯基甲基鋶六氟磷酸鹽,尤佳為4,7-二-正丁氧基-1-萘基四氫噻吩鎓三氟甲磺酸鹽。所述磺酸鹽化合物較佳為鹵代烷基磺酸鹽,更佳為N-羥基萘二甲醯亞胺-三氟甲磺酸鹽。藉由將[B-2]光酸產生劑設為所述化合物,則所得的本實施形態的感放射線性樹脂組成物可提高感度以及溶解性。 Further, the onium salt is preferably a tetrahydrothiophene salt or a benzyl phosphonium salt, more preferably 4,7-di-n-butoxy-1-naphthyltetrahydrothiophene trifluoromethanesulfonate, benzyl Further, 4-hydroxyphenylmethylphosphonium hexafluorophosphate, more preferably 4,7-di-n-butoxy-1-naphthyltetrahydrothiophene trifluoromethanesulfonate. The sulfonate compound is preferably a haloalkylsulfonate, more preferably N-hydroxynaphthylimine-triflate. By using the [B-2] photoacid generator as the compound, the radiation sensitive resin composition of the present embodiment obtained can improve sensitivity and solubility.

相對於[A]聚合物成分100質量份,[B-2]光酸產生劑的含量較佳為0.1質量份~10質量份,更佳為1質量份~5質量份。藉由將[B-2]光酸產生劑的含量設為所述範圍,則使本實施形態的感放射線性樹脂組成物的感度最佳化,可形成表面硬度高的硬化膜,可提供所述特性優異的電極的樹脂部。 The content of the [B-2] photoacid generator is preferably from 0.1 part by mass to 10 parts by mass, more preferably from 1 part by mass to 5 parts by mass, per 100 parts by mass of the [A] polymer component. By setting the content of the [B-2] photoacid generator to the above range, the sensitivity of the radiation sensitive resin composition of the present embodiment is optimized, and a cured film having a high surface hardness can be formed. A resin portion of an electrode having excellent characteristics.

<[C]聚合性化合物> <[C] polymerizable compound>

本發明實施形態的感放射線性樹脂組成物可不僅含有[A]聚合物以及[B]感光劑,而且還含有[C]聚合性化合物。本實施形態的感放射線性樹脂組成物可藉由選擇[B-1]光自由基聚合起始劑作為[B]感光劑,進而含有[C]聚合性化合物,而適合用作負型圖案形成 用感放射線性樹脂組成物。 The radiation sensitive resin composition of the embodiment of the present invention may contain not only the [A] polymer and the [B] sensitizer but also the [C] polymerizable compound. The radiation sensitive resin composition of the present embodiment can be used as a negative pattern formation by selecting [B-1] photoradical polymerization initiator as [B] sensitizer and further containing [C] polymerizable compound. A radiation sensitive resin composition was used.

本實施形態的感放射線性樹脂組成物中可含有的[C]聚合性化合物例如可列舉:ω-羧基聚己內酯單(甲基)丙烯酸酯、乙二醇(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,9-壬二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、雙苯氧基乙醇氟二(甲基)丙烯酸酯、二羥甲基三環癸烷二(甲基)丙烯酸酯、2-羥基-3-(甲基)丙烯醯氧基丙基甲基丙烯酸酯、2-(2'-乙烯氧基乙氧基)乙基(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三{2-(甲基)丙烯醯氧基乙基}磷酸酯、環氧乙烷改質二季戊四醇六丙烯酸酯、丁二酸改質季戊四醇三丙烯酸酯等,除此以外,還可列舉:使具有直鏈伸烷基以及脂環式結構且具有2個以上異氰酸基的化合物,與分子內具有1個以上羥基且具有3個~5個(甲基)丙烯醯氧基的化合物進行反應而獲得的(甲基)丙烯酸胺基甲酸酯化合物等。 The [C] polymerizable compound which can be contained in the radiation sensitive resin composition of the present embodiment includes, for example, ω-carboxypolycaprolactone mono(meth)acrylate, ethylene glycol (meth)acrylate, and 1 ,6-hexanediol di(meth)acrylate, 1,9-nonanediol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, polyethylene glycol di(methyl) Acrylate, polypropylene glycol di(meth)acrylate, bisphenoxyethanol fluorodi(meth)acrylate, dimethylol tricyclodecane di(meth)acrylate, 2-hydroxy-3-( Methyl) propylene methoxy propyl methacrylate, 2-(2'-vinyloxyethoxy)ethyl (meth) acrylate, trimethylolpropane tri(meth) acrylate, pentaerythritol Tris (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tri{2-(methyl) propylene methoxy ethoxylate a phosphate ester, an ethylene oxide-modified dipentaerythritol hexaacrylate, a succinic acid-modified pentaerythritol triacrylate, and the like, and may also be exemplified by having a linear alkyl group and a fat. (meth)acrylic acid obtained by reacting a compound having a ring structure and having two or more isocyanato groups with a compound having one or more hydroxyl groups in the molecule and having three to five (meth) acryloxy groups A urethane compound or the like.

[C]聚合性化合物可單獨使用,亦可將2種以上混合使用。 [C] The polymerizable compound may be used singly or in combination of two or more.

相對於[A]聚合物100質量份,本發明實施形態的感放射線性樹脂組成物中的[C]聚合性化合物的含量較佳為20質量份~200質量份,更佳為40質量份~160質量份。藉由將[C]聚合性化合物的使用比例設為所述範圍,則密接性優異,即便在低曝光 量下亦可形成具有充分硬度的硬化膜,可提供所述特性優異的電極的樹脂部。 The content of the [C] polymerizable compound in the radiation sensitive resin composition of the embodiment of the present invention is preferably 20 parts by mass to 200 parts by mass, and more preferably 40 parts by mass, based on 100 parts by mass of the [A] polymer. 160 parts by mass. When the ratio of use of the [C] polymerizable compound is in the above range, the adhesion is excellent even at a low exposure. A cured film having sufficient hardness can also be formed in an amount, and a resin portion of the electrode having the above-described characteristics can be provided.

<[D]硬化促進劑> <[D] hardening accelerator>

本實施形態的感放射線性樹脂組成物除了含有所述[A]聚合物以及[B]感光劑等以外,可更含有[D]硬化促進劑。[D]硬化促進劑為發揮促進硬化的功能的化合物,例如就實現藉由200℃以下的低溫硬化來形成電極的樹脂部的方面而言較佳。 The radiation sensitive resin composition of the present embodiment may further contain a [D] hardening accelerator in addition to the [A] polymer and the [B] sensitizer. [D] The curing accelerator is preferably a compound which exhibits a function of promoting hardening, and for example, a resin portion which forms an electrode by low-temperature curing at 200 ° C or lower is preferable.

[D]硬化促進劑可列舉:選自由4,4'-二胺基二苯基碸、2,2-雙(4-胺基苯基)六氟丙烷、2,2'-雙(三氟甲基)聯苯胺、3-胺基苯磺酸乙酯、3,5-雙三氟甲基-1,2-二胺基苯、4-胺基硝基苯、N,N-二甲基-4-硝基苯胺等分子中具有電子吸引性基及胺基的化合物,三級胺化合物,醯胺化合物,硫醇化合物,嵌段異氰酸酯化合物以及含咪唑環的化合物所組成的組群中的至少1種化合物。 The [D] hardening accelerator may be selected from the group consisting of 4,4'-diaminodiphenylanthracene, 2,2-bis(4-aminophenyl)hexafluoropropane, 2,2'-bis(trifluoro Methyl)benzidine, ethyl 3-aminobenzenesulfonate, 3,5-bistrifluoromethyl-1,2-diaminobenzene, 4-aminonitrobenzene, N,N-dimethyl a group consisting of a compound having an electron attracting group and an amine group in a molecule such as -4-nitroaniline, a tertiary amine compound, a guanamine compound, a thiol compound, a blocked isocyanate compound, and a compound containing an imidazole ring. At least one compound.

本實施形態的感放射線性樹脂組成物藉由含有選自所述特定的化合物組群中的[D]硬化促進劑,而促進感放射線性樹脂組成物的硬化,可實現藉由膜的低溫硬化而於低溫下形成電極的樹脂部,具體而言可實現於200℃以下來形成。進而亦可藉由使用所述[D]硬化促進劑,來提高感放射線性樹脂組成物的保存穩定性。 The radiation sensitive resin composition of the present embodiment accelerates the hardening of the radiation sensitive linear resin composition by containing a [D] hardening accelerator selected from the specific compound group, and can achieve low temperature hardening by the film. Further, the resin portion forming the electrode at a low temperature can be specifically formed at 200 ° C or lower. Further, by using the [D] hardening accelerator, the storage stability of the radiation sensitive resin composition can be improved.

<其他成分> <Other ingredients>

本實施形態的感放射線性樹脂組成物除了含有[A]聚合物等必需成分、或[D]硬化促進劑以外,亦可含有其他的任意成分。 The radiation sensitive resin composition of the present embodiment may contain other optional components in addition to the essential component such as [A] polymer or the [D] curing accelerator.

本實施形態的感放射線性樹脂組成物可於不損及本發明效果的範圍內,視需要含有界面活性劑、保存穩定劑、黏接助劑、耐熱性提高劑等作為其他成分。該些各任意成分可單獨使用,亦可將2種以上混合使用。 The radiation sensitive resin composition of the present embodiment may contain, as an additional component, a surfactant, a storage stabilizer, an adhesion aid, a heat resistance improving agent, and the like, as long as the effects of the present invention are not impaired. These optional components may be used singly or in combination of two or more.

<感放射線性樹脂組成物的製備> <Preparation of a radiation sensitive resin composition>

本發明實施形態的感放射線性樹脂組成物可藉由如下操作來製備:除了[A]聚合物以及[B]感光劑等以外,且除[D]硬化促進劑之外,於不損及所需效果的範圍內,視需要將所述其他的任意成分以規定的比例進行混合。本實施形態的感放射線性樹脂組成物較佳為溶解於適當的溶劑中而以溶液狀態來使用。 The radiation sensitive resin composition of the embodiment of the present invention can be produced by the following operations: except for the [A] polymer and the [B] sensitizer, etc., and without the [D] hardening accelerator, without damaging the Within the range in which the effect is desired, the other optional components are mixed at a predetermined ratio as needed. The radiation sensitive resin composition of the present embodiment is preferably used in a solution state by being dissolved in a suitable solvent.

用於製備感放射線性樹脂組成物的溶劑可使用將[A]聚合物及[B]感光劑、以及視需要而含有的[C]聚合性化合物均勻地溶解或者分散,且不與各成分反應的溶劑。而且,該溶劑較佳為將[D]硬化促進劑、或其他的任意成分均勻地溶解或者分散,且不與各成分反應的溶劑。 The solvent for preparing the radiation sensitive resin composition can be uniformly dissolved or dispersed by using the [A] polymer and the [B] photosensitive agent, and optionally the [C] polymerizable compound, and does not react with each component. Solvent. Further, the solvent is preferably a solvent which uniformly dissolves or disperses the [D] hardening accelerator or other optional components and does not react with the respective components.

用於製備本實施形態的感放射線性樹脂組成物的溶劑例如可列舉:醇、二醇醚、乙二醇烷基醚乙酸酯、二乙二醇單烷基醚、二乙二醇二烷基醚、二丙二醇二烷基醚、丙二醇單烷基醚、丙二醇烷基醚乙酸酯、丙二醇單烷基醚丙酸酯、酮、酯等。 Examples of the solvent for preparing the radiation sensitive resin composition of the present embodiment include an alcohol, a glycol ether, an ethylene glycol alkyl ether acetate, a diethylene glycol monoalkyl ether, and a diethylene glycol dioxane. Alkyl ether, dipropylene glycol dialkyl ether, propylene glycol monoalkyl ether, propylene glycol alkyl ether acetate, propylene glycol monoalkyl ether propionate, ketone, ester, and the like.

本實施形態的感放射線性樹脂組成物中的溶劑的含量並無特別限定,但就所得感放射線性樹脂組成物的塗佈性、穩定性等觀點而言,較佳為感放射線性樹脂組成物的除溶劑之外的各 成分的合計濃度成為5質量%~50質量%的量,更佳為成為10質量%~40質量%的量。於製備感放射線性樹脂組成物的溶液的情況下,實際上於所述濃度範圍內設定符合所需膜厚的值等的固體成分濃度(組成物溶液中所佔的溶劑以外的成分)。 The content of the solvent in the radiation-sensitive resin composition of the present embodiment is not particularly limited, but is preferably a radiation-sensitive resin composition from the viewpoints of applicability, stability, and the like of the obtained radiation-sensitive resin composition. Each of the solvent The total concentration of the components is 5% by mass to 50% by mass, and more preferably 10% by mass to 40% by mass. In the case of preparing a solution of the radiation sensitive resin composition, the solid content concentration (component other than the solvent in the composition solution) which satisfies the desired film thickness or the like is actually set within the concentration range.

以所述方式製備的溶液狀的組成物較佳為使用孔徑為0.5μm左右的微孔過濾器(millipore filter)等進行過濾後,用於形成成為壁狀電極的電極的樹脂部。 The solution-like composition prepared as described above is preferably a resin portion for forming an electrode serving as a wall electrode after filtration using a millipore filter having a pore diameter of about 0.5 μm.

繼而,對使用本實施形態的感放射線性樹脂組成物來形成成為壁狀電極的電極的樹脂部的方法進行說明。 Next, a method of forming a resin portion of an electrode serving as a wall electrode using the radiation sensitive resin composition of the present embodiment will be described.

<電極的樹脂部的形成方法> <Method of Forming Resin Portion of Electrode>

於形成壁狀電極的電極的樹脂部的形成步驟中,包含使用所述本實施形態的感放射線性樹脂組成物而於基板上形成樹脂部的步驟作為主要步驟。該樹脂部的形成步驟中,進行使用本實施形態的感放射線性樹脂組成物而獲得的塗膜的圖案化等。 In the step of forming the resin portion of the electrode forming the wall electrode, the step of forming the resin portion on the substrate using the radiation sensitive resin composition of the present embodiment is included as a main step. In the step of forming the resin portion, patterning or the like of the coating film obtained by using the radiation-sensitive resin composition of the present embodiment is performed.

成為壁狀電極的電極的樹脂部的形成方法中,為了於基板上形成所需形狀的樹脂部,較佳為至少包括下述[1]步驟~[4]步驟。 In the method of forming the resin portion of the electrode of the wall electrode, in order to form the resin portion having a desired shape on the substrate, it is preferable to include at least the following steps [1] to [4].

[1]將本實施形態的感放射線性樹脂組成物的塗膜形成於基板上的步驟(以下有時稱為「[1]步驟」);[2]對[1]步驟中形成的感放射線性樹脂組成物的塗膜的至少一部分照射放射線的步驟(以下有時稱為「[2]步驟」);[3]對[2]步驟中經照射放射線的塗膜進行顯影的步驟(以下有 時稱為「[3]步驟」);[4]對[3]步驟中經顯影的塗膜進行加熱硬化的步驟(以下有時稱為「[4]步驟」)。 [1] a step of forming a coating film of the radiation-sensitive resin composition of the present embodiment on a substrate (hereinafter referred to as "[1] step"); [2] sensitizing radiation formed in the step [1] a step of irradiating at least a part of the coating film of the resin composition (hereinafter sometimes referred to as "[2] step)); [3] a step of developing the coating film irradiated with radiation in the step [2] (hereinafter, The time is referred to as "[3] step"); [4] The step of heat-curing the developed coating film in the step [3] (hereinafter sometimes referred to as "[4] step").

以下,對[1]步驟~[4]步驟進行說明。 Hereinafter, the steps [1] to [4] will be described.

[[1]步驟] [[1] Steps]

於成為壁狀電極的電極的樹脂部的製造中,[1]步驟中,將本實施形態的感放射線性樹脂組成物的塗膜形成於基板上。該基板的材料例如可使用:鈉鈣玻璃或無鹼玻璃等玻璃、矽、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚醚碸、聚碳酸酯、芳香族聚醯胺、聚醯胺醯亞胺、聚醯亞胺等。進而,對該基板,亦可視需要而預先實施利用矽烷偶合劑等的化學品處理、電漿處理、離子鍍、濺鍍、氣相反應法、真空蒸鍍等適當的前處理。 In the production of the resin portion which is the electrode of the wall electrode, in the step [1], the coating film of the radiation sensitive resin composition of the present embodiment is formed on the substrate. The material of the substrate can be, for example, glass such as soda lime glass or alkali-free glass, bismuth, polyethylene terephthalate, polybutylene terephthalate, polyether oxime, polycarbonate, aromatic polyfluorene. Amine, polyamidimide, polyimine, and the like. Further, as the substrate, an appropriate pretreatment such as chemical treatment such as a decane coupling agent, plasma treatment, ion plating, sputtering, gas phase reaction method, or vacuum vapor deposition may be performed in advance.

另外,於本發明實施形態的液晶顯示元件為主動矩陣方式的液晶顯示元件的情況下,基板可使用以如下方式形成的基板:掃描線與信號線配線為矩陣狀,於該掃描線與信號線的各交點設置TFT等主動元件,進而與信號線平行地配線共用線(common line),從而與所有的畫素連接。 Further, in the case where the liquid crystal display element of the embodiment of the present invention is an active matrix type liquid crystal display element, a substrate formed by forming a scanning line and a signal line wiring in a matrix shape on the scanning line and the signal line can be used as the substrate. Each of the intersections is provided with an active element such as a TFT, and a common line is wired in parallel with the signal line to be connected to all the pixels.

本實施形態的感放射線性樹脂組成物的塗佈方法例如可採用:噴霧法、輥塗法、旋轉塗佈法(有時亦稱為旋塗法或者旋轉器法)、狹縫塗佈法(有時亦稱為縫模塗佈法)、棒塗法、噴墨塗佈法等適當的方法。該些方法中,就可形成均勻厚度的膜的方面而言,較佳為旋塗法或者狹縫塗佈法。 The coating method of the radiation sensitive resin composition of the present embodiment may be, for example, a spray method, a roll coating method, a spin coating method (also sometimes referred to as a spin coating method or a spinner method), or a slit coating method ( An appropriate method such as a slit die coating method, a bar coating method, or an inkjet coating method may be used. Among these methods, in terms of forming a film having a uniform thickness, a spin coating method or a slit coating method is preferred.

於利用塗佈法來形成感放射線性樹脂組成物的塗膜的情況下,可於基板上塗佈感放射線性樹脂組成物後,較佳為藉由對塗佈面進行加熱(預烘烤)而使溶劑蒸發,從而形成塗膜。 When the coating film of the radiation sensitive resin composition is formed by a coating method, after the radiation sensitive resin composition is applied onto the substrate, it is preferred to heat (pre-bake) the coated surface. The solvent is evaporated to form a coating film.

所述預烘烤的條件雖根據構成感放射線性樹脂組成物的各成分的種類、調配比例等而不同,但溫度較佳為70℃~120℃,時間較佳為1分鐘~15分鐘左右。塗膜的預烘烤後的膜厚較佳為0.5μm~10μm,更佳為1.0μm~7.0μm左右。 The pre-baking conditions vary depending on the type of the components constituting the radiation-sensitive resin composition, the blending ratio, and the like, but the temperature is preferably from 70 ° C to 120 ° C, and the time is preferably from about 1 minute to 15 minutes. The film thickness after prebaking of the coating film is preferably from 0.5 μm to 10 μm, more preferably from about 1.0 μm to 7.0 μm.

[[2]步驟] [[2] Steps]

繼而,對[1]步驟中形成於基板上的塗膜的至少一部分照射放射線。此時,為了於所需的位置形成電極的樹脂部,而對塗膜的一部分照射放射線,但例如可隔著具有規定圖案的光罩來進行。 Then, at least a part of the coating film formed on the substrate in the step [1] is irradiated with radiation. At this time, in order to form a resin portion of the electrode at a desired position, a part of the coating film is irradiated with radiation, but it may be performed, for example, by a mask having a predetermined pattern.

照射中使用的放射線可列舉可見光線、紫外線、遠紫外線等。其中較佳為波長在250nm~550nm的範圍內的放射線,更佳為包含365nm的紫外線的放射線。 Examples of the radiation used for the irradiation include visible light rays, ultraviolet rays, and far ultraviolet rays. Among them, radiation having a wavelength in the range of 250 nm to 550 nm is preferable, and radiation containing ultraviolet rays of 365 nm is more preferable.

以利用照度計(OAI model 356,光學夥伴公司(Optical Associates Inc.)製造)測定所照射的放射線的波長365nm下的強度而得的值計,放射線照射量(亦稱為曝光量)可設為10J/m2~10,000J/m2,較佳為100J/m2~5000J/m2,更佳為200J/m2~3000J/m2The amount of radiation exposure (also referred to as exposure amount) can be set by using an illuminometer (OAI model 356, manufactured by Optical Associates Inc.) to measure the intensity at the wavelength of 365 nm of the irradiated radiation. 10J / m 2 ~ 10,000J / m 2, preferably 100J / m 2 ~ 5000J / m 2, more preferably 200J / m 2 ~ 3000J / m 2.

用於形成成為壁狀電極的電極的樹脂部的感放射線性樹脂組成物與現有已知的技術,例如用以形成液晶顯示元件中的樹脂製間隔件的組成物相比較,放射線感度高。例如,即便所述 放射線照射量為700J/m2以下,進而為600J/m2以下,亦可以所需的膜厚、良好的形狀、優異的密接性以及高硬度的硬化膜的形式獲得電極的樹脂部。 The radiation sensitive resin composition for forming the resin portion of the electrode serving as the wall electrode has a high radiation sensitivity as compared with a conventionally known technique such as a composition for forming a resin spacer in the liquid crystal display element. For example, even if the irradiation amount is 700J / m 2 or less, and further a thickness of 600J / m 2 or less, also may be desired, a good shape, form excellent adhesion and high hardness of the cured film to obtain an electrode Resin department.

[[3]步驟] [[3] Steps]

繼而,對[2]步驟的放射線照射後的塗膜進行顯影而去除不需要的部分,獲得規定形狀的電極的樹脂部的圖案。 Then, the coating film after the radiation irradiation in the step [2] is developed to remove an unnecessary portion, and a pattern of the resin portion of the electrode having a predetermined shape is obtained.

顯影中使用的顯影液例如可使用:氫氧化鈉、氫氧化鉀、碳酸鈉等無機鹼,或四甲基氫氧化銨、四乙基氫氧化銨等四級銨鹽,或膽鹼、1,8-二氮雜雙環-[5.4.0]-7-十一烯、1,5-二氮雜雙環-[4.3.0]-5-壬烯等鹼性化合物的水溶液。所述鹼性化合物的水溶液中亦可添加適量的甲醇、乙醇等水溶性有機溶劑來使用。進而,亦可僅添加適量的界面活性劑,或者在添加所述水溶性有機溶劑的同時添加適量的界面活性劑來使用。 For the developer to be used for development, for example, an inorganic base such as sodium hydroxide, potassium hydroxide or sodium carbonate, or a quaternary ammonium salt such as tetramethylammonium hydroxide or tetraethylammonium hydroxide, or choline or 1, can be used. An aqueous solution of a basic compound such as 8-diazabicyclo-[5.4.0]-7-undecene or 1,5-diazabicyclo-[4.3.0]-5-decene. An appropriate amount of a water-soluble organic solvent such as methanol or ethanol may be added to the aqueous solution of the basic compound. Further, it is also possible to add only an appropriate amount of the surfactant or to add an appropriate amount of the surfactant while adding the water-soluble organic solvent.

顯影方法可為覆液法、浸漬法、噴淋法、噴霧法等的任一種,顯影時間可於常溫下設為5秒~300秒,較佳為於常溫下為10秒~180秒左右。繼顯影處理之後,例如進行30秒~90秒的流水洗滌後,利用壓縮空氣或壓縮氮氣進行風乾,藉此獲得所需的電極的樹脂部的圖案。 The development method may be any one of a liquid coating method, a dipping method, a shower method, a spray method, and the like, and the development time may be 5 seconds to 300 seconds at normal temperature, and preferably 10 seconds to 180 seconds at normal temperature. After the development treatment, for example, a running water wash is performed for 30 seconds to 90 seconds, and then air-dried by compressed air or compressed nitrogen gas, thereby obtaining a pattern of a resin portion of a desired electrode.

[[4]步驟] [[4] Steps]

繼而,利用加熱板、烘箱等適當的加熱裝置,將[3]步驟中獲得的形成電極的樹脂部的圖案的塗膜進行硬化(亦稱為後烘烤)。藉此,獲得作為硬化膜的成為壁狀電極的電極的樹脂部。 Then, the coating film of the pattern of the resin portion forming the electrode obtained in the step [3] is cured by a suitable heating means such as a hot plate or an oven (also referred to as post-baking). Thereby, the resin portion which is the electrode which becomes a wall electrode of a cured film is obtained.

藉由本實施形態的感放射線性樹脂組成物,可將硬化溫度設為200℃以下。進而,藉由形成於樹脂基板上,即便在較佳的180℃以下,亦獲得特性充分的絕緣膜。具體而言,較佳為將硬化溫度設為100℃~200℃,於欲以高水準來使低溫硬化與耐熱性並存的情況下,更佳為設為150℃~180℃。例如於加熱板上,硬化時間較佳為設為5分鐘~30分鐘,於烘箱中,硬化時間較佳為設為30分鐘~180分鐘。 According to the radiation sensitive resin composition of the present embodiment, the curing temperature can be set to 200 ° C or lower. Further, by forming on the resin substrate, an insulating film having sufficient characteristics can be obtained even at a temperature of preferably 180 ° C or lower. Specifically, it is preferable to set the curing temperature to 100° C. to 200° C., and when it is desired to have low-temperature curing and heat resistance at a high level, it is more preferably 150° C. to 180° C. For example, on the hot plate, the hardening time is preferably set to 5 minutes to 30 minutes, and in the oven, the hardening time is preferably set to 30 minutes to 180 minutes.

依據以上的形成方法,可於基板上形成成為壁狀電極的電極的樹脂部。成為壁狀電極的電極的樹脂部較佳為其剖面形狀為正錐形狀(圖案的剖面形狀是隨著自底邊部遠離,其寬度緩緩變窄的形狀),更佳為剖面形狀的錐角(圖案的剖面形狀的底邊、與邊緣部的切線所形成的角,以下相同)為80°以下,尤佳為60°以下。藉由設為所述錐角,可於壁狀電極的周邊部以及將壁狀電極用作間隔件的情況下的間隔件周邊部,減少漏光。這在形成後述光配向劑作為液晶配向劑的情況下,效果變得顯著。而且,如上所述,於樹脂部上,可依據公知的方法來設置例如包含ITO等的導電部,可形成成為壁狀電極的電極。而且,形成有成為壁狀電極的電極的基板可適合用於所述本發明實施形態的液晶顯示元件用途。 According to the above formation method, the resin portion of the electrode serving as the wall electrode can be formed on the substrate. The resin portion of the electrode serving as the wall electrode preferably has a cross-sectional shape of a forward tapered shape (the cross-sectional shape of the pattern is a shape in which the width gradually decreases as it goes away from the bottom edge portion), and more preferably a cross-sectional shape of the cone. The angle (the angle formed by the base of the cross-sectional shape of the pattern and the tangent to the edge portion, the same applies hereinafter) is 80 or less, and particularly preferably 60 or less. By setting the taper angle, light leakage can be reduced in the peripheral portion of the wall electrode and the peripheral portion of the spacer in the case where the wall electrode is used as a spacer. When the photo-aligning agent described later is formed as a liquid crystal alignment agent, the effect is remarkable. Further, as described above, a conductive portion including ITO or the like can be provided on the resin portion in accordance with a known method, and an electrode serving as a wall electrode can be formed. Further, the substrate on which the electrode serving as the wall electrode is formed can be suitably used for the liquid crystal display element of the embodiment of the present invention.

另外,使用形成有成為壁狀電極的電極的基板來提供本實施形態的液晶顯示元件時,較佳為於該基板上設置用以控制液晶配向的配向膜。因此,繼而對可設置於本實施形態的液晶顯示 元件中的本發明實施形態的配向膜進行說明,特別是對形成配向膜的本發明實施形態的液晶配向劑進行說明。 Further, when the liquid crystal display element of the present embodiment is provided using a substrate on which an electrode serving as a wall electrode is formed, it is preferable to provide an alignment film for controlling liquid crystal alignment on the substrate. Therefore, the liquid crystal display which can be provided in the embodiment is The alignment film of the embodiment of the present invention in the element will be described, and in particular, the liquid crystal alignment agent of the embodiment of the present invention which forms the alignment film will be described.

<液晶配向劑> <Liquid alignment agent>

本發明實施形態的液晶配向劑可使用公知的液晶配向劑。通常藉由對由液晶配向劑形成的塗膜實施摩擦處理,或實施藉由偏光照射的光配向處理,來賦予液晶配向能力。本發明的液晶配向劑較佳為藉由實施光配向處理而表現出液晶配向能力的液晶配向劑(以下有時稱為光配向劑)。 A known liquid crystal alignment agent can be used for the liquid crystal alignment agent of the embodiment of the present invention. The liquid crystal alignment ability is usually imparted by performing a rubbing treatment on a coating film formed of a liquid crystal alignment agent or performing a photoalignment treatment by polarized light irradiation. The liquid crystal alignment agent of the present invention is preferably a liquid crystal alignment agent (hereinafter sometimes referred to as a photoalignment agent) which exhibits liquid crystal alignment ability by performing photoalignment treatment.

光配向劑可設為含有具有光配向性結構的聚合物者。此處,所謂光配向性結構,是包含光配向性基以及分解型光配向部的兩者的概念。具體而言,光配向性結構可採用來源於藉由光異構化或光二聚化、光分解、光-夫里士重排(photo-Fries rearrangement)等而顯示光配向性的多種化合物的基團,例如可列舉:含有偶氮苯或其衍生物作為基本骨架的含偶氮苯的基團、含有桂皮酸或其衍生物作為基本骨架的具有桂皮酸結構的基團、含有查耳酮或其衍生物作為基本骨架的含查耳酮的基團、含有二苯甲酮或其衍生物作為基本骨架的含二苯甲酮的基團、含有香豆素或其衍生物作為基本骨架的含香豆素的基團、含環丁烷骨架結構的基團、含芳香族酯結構的基團等。該些基團中,較佳為具有桂皮酸結構的基團、含環丁烷骨架結構的基團、含芳香族酯結構的基團。該些基團例如可依據日本專利特開平6-287453號公報、日本專利特開平9-297313號公報、日本專利特願2013-60878號中 記載的方法而獲得。 The photo-aligning agent can be used as a polymer containing a photo-alignment structure. Here, the photo-alignment structure is a concept including both a photo-alignment group and a decomposable photo-alignment unit. Specifically, the photo-alignment structure may be a group derived from a plurality of compounds exhibiting photo-alignment by photoisomerization or photodimerization, photolysis, photo-Fries rearrangement, or the like. The group may, for example, be an azobenzene-containing group containing azobenzene or a derivative thereof as a basic skeleton, a group having a cinnamic acid structure containing cinnamic acid or a derivative thereof as a basic skeleton, containing chalcone or a derivative containing a chalcone-containing group as a basic skeleton, a benzophenone-containing group containing benzophenone or a derivative thereof as a basic skeleton, and a coumarin or a derivative thereof as a basic skeleton a group of a coumarin, a group containing a cyclobutane skeleton structure, a group containing an aromatic ester structure, and the like. Among these groups, a group having a cinnamic acid structure, a group having a cyclobutane skeleton structure, and a group having an aromatic ester structure are preferable. Such a group can be exemplified by, for example, Japanese Patent Application Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Obtained by the method described.

所述聚合物的基本骨架例如可列舉:聚醯胺酸、聚醯胺酸酯、聚醯亞胺、聚有機矽氧烷、聚(甲基)丙烯酸酯、聚(甲基)丙烯醯胺、聚乙烯基醚、聚烯烴等,較佳為聚醯胺酸、聚醯胺酸酯、聚醯亞胺、聚有機矽氧烷。 The basic skeleton of the polymer may, for example, be polylysine, polyphthalate, polyimide, polyorganosiloxane, poly(meth)acrylate, poly(meth)acrylamide, Polyvinyl ether, polyolefin, etc., preferably poly-proline, polyphthalate, polyimide, polyorganosiloxane.

光配向劑可更含有:所述具有光配向性結構的聚合物以外的聚合物、硬化劑、硬化觸媒、硬化促進劑、環氧化合物、官能性矽烷化合物、界面活性劑、光增感劑等。 The photo-aligning agent may further contain: a polymer other than the polymer having a photo-alignment structure, a hardener, a curing catalyst, a hardening accelerator, an epoxy compound, a functional decane compound, a surfactant, and a photosensitizer. Wait.

<配向膜的形成> <Formation of alignment film>

繼而,對本發明實施形態的配向膜的形成方法進行說明。 Next, a method of forming an alignment film according to an embodiment of the present invention will be described.

例如使用以所述方式形成有成為壁狀電極的電極的基板,塗佈本實施形態的液晶配向劑來形成配向膜。塗佈方法例如可列舉輥塗佈機法、旋轉器法、印刷法、噴墨法等。 For example, a liquid crystal alignment agent of the present embodiment is applied to a substrate on which an electrode serving as a wall electrode is formed as described above to form an alignment film. Examples of the coating method include a roll coater method, a rotator method, a printing method, and an inkjet method.

繼而,對塗佈有液晶配向劑的基板進行預烘烤,然後進行後烘烤,藉此形成塗膜。 Then, the substrate coated with the liquid crystal alignment agent is prebaked, and then post-baked, thereby forming a coating film.

關於預烘烤條件,例如,溫度為40℃~120℃,且時間為0.1分鐘~5分鐘。後烘烤條件的溫度較佳為120℃~250℃,更佳為150℃~230℃,尤佳為180℃~230℃。另外,後烘烤的時間根據加熱板或烘箱等加熱裝置而不同,通常較佳為5分鐘~200分鐘,更佳為10分鐘~100分鐘。後烘烤後的塗膜的膜厚較佳為0.001μm~1μm,更佳為0.005μm~0.5μm。 Regarding the prebaking conditions, for example, the temperature is from 40 ° C to 120 ° C, and the time is from 0.1 minute to 5 minutes. The post-baking condition temperature is preferably from 120 ° C to 250 ° C, more preferably from 150 ° C to 230 ° C, and particularly preferably from 180 ° C to 230 ° C. Further, the post-baking time varies depending on a heating means such as a hot plate or an oven, and is usually preferably from 5 minutes to 200 minutes, more preferably from 10 minutes to 100 minutes. The film thickness of the coating film after post-baking is preferably 0.001 μm to 1 μm, more preferably 0.005 μm to 0.5 μm.

塗佈液晶配向劑時所使用的液晶配向劑的固體成分濃 度(液晶配向劑的溶劑以外的成分的合計重量在液晶配向劑的總重量中所佔的比例)是考慮到黏性、揮發性等來適當選擇,較佳為1重量%~10重量%。 The solid content of the liquid crystal alignment agent used when coating the liquid crystal alignment agent is concentrated The degree (the ratio of the total weight of the components other than the solvent of the liquid crystal alignment agent to the total weight of the liquid crystal alignment agent) is appropriately selected in consideration of viscosity, volatility, and the like, and is preferably from 1% by weight to 10% by weight.

於使用光配向劑作為液晶配向劑的情況下,藉由對所述塗膜照射經直線偏光或部分偏光的放射線、或者非偏光的放射線,來賦予液晶配向控制能力。所述偏光放射線的照射與配向膜的配向處理相對應。 In the case where a photo-aligning agent is used as the liquid crystal alignment agent, the liquid crystal alignment control ability is imparted by irradiating the coating film with linearly polarized or partially polarized radiation or non-polarized radiation. The irradiation of the polarized radiation corresponds to the alignment treatment of the alignment film.

此處,放射線可使用例如包含150nm~800nm波長的光的紫外線以及可見光線。特佳為使用包含200nm~400nm波長的光的紫外線作為放射線。於所使用的放射線進行直線偏光或者部分偏光的情況下,可自垂直的方向對基板面進行照射,亦可為了賦予預傾角而自傾斜方向進行照射,另外,亦可將該些照射組合進行。於照射非偏光的放射線的情況下,照射的方向必須為傾斜方向。 Here, as the radiation, for example, ultraviolet rays including visible light having a wavelength of 150 nm to 800 nm and visible light rays can be used. It is particularly preferable to use ultraviolet rays containing light having a wavelength of 200 nm to 400 nm as radiation. When the radiation to be used is linearly polarized or partially polarized, the substrate surface may be irradiated from a vertical direction, or may be irradiated from an oblique direction in order to impart a pretilt angle, or the irradiation may be performed in combination. In the case of irradiating non-polarized radiation, the direction of irradiation must be an oblique direction.

放射線的照射量較佳為1J/m2以上且少於10000J/m2的量,更佳為10J/m2~3000J/m2Radiation irradiation amount is preferably 1J / m 2 or more the amount of 10000J / m 2 and less, more preferably 10J / m 2 ~ 3000J / m 2.

於使用光配向劑以外的液晶配向劑作為液晶配向劑的情況下,亦可使用後烘烤後的塗膜作為配向膜。而且,視需要,可對後烘烤後的塗膜進行處理(摩擦處理)來賦予液晶配向控制能力,所述處理是利用捲繞有包含例如尼龍、嫘縈、棉等纖維的布的輥,向一定方向進行擦拭。 When a liquid crystal alignment agent other than the photo-alignment agent is used as the liquid crystal alignment agent, a coating film after post-baking may be used as the alignment film. Further, if necessary, the post-baking coating film may be subjected to treatment (friction treatment) to impart liquid crystal alignment control capability by using a roll wound with a cloth containing fibers such as nylon, crepe, cotton, or the like. Wipe in a certain direction.

以所述方式製造的本實施形態的形成有成為壁狀電極 的電極及配向膜的基板可適合用於製造本發明實施形態的液晶顯示元件。 The electrode of the present embodiment manufactured as described above is formed as a wall electrode The substrate of the electrode and the alignment film can be suitably used for producing the liquid crystal display element of the embodiment of the present invention.

例如,將所述形成有成為壁狀電極的電極及配向膜的基板作為第1基板。而且,將與所述第1基板對向配置的基板作為第2基板,以與所述相同的方法來形成配向膜。而且,使用密封材將第1基板與第2基板貼合以及封入液晶,然後,進行偏光板的貼合等,可製造本發明實施形態的液晶顯示元件。 For example, the substrate on which the electrode serving as the wall electrode and the alignment film are formed is referred to as a first substrate. Further, a substrate disposed opposite to the first substrate is used as the second substrate, and an alignment film is formed in the same manner as described above. In addition, the liquid crystal display element of the embodiment of the present invention can be produced by laminating the first substrate and the second substrate and sealing the liquid crystal, and then bonding the polarizing plate.

此外,於使用公知的具備彩色濾光片的彩色濾光片基板作為第2基板的情況下,本發明實施形態的液晶顯示元件可構成彩色液晶顯示元件。 Further, when a known color filter substrate having a color filter is used as the second substrate, the liquid crystal display element of the embodiment of the present invention can constitute a color liquid crystal display element.

以所述方式,於基板上形成成為壁狀電極的電極,形成配向膜等,可製造具有高顯示效率的本發明實施形態的液晶顯示元件。 In the above manner, an electrode serving as a wall electrode is formed on the substrate to form an alignment film or the like, and a liquid crystal display element of the embodiment of the present invention having high display efficiency can be produced.

此外,本發明並不限定於所述各實施形態,可於不脫離本發明的主旨的範圍內,進行各種變形來實施。 The present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit and scope of the invention.

[產業上之可利用性] [Industrial availability]

本發明的液晶顯示元件可藉由使用本發明的感放射線性樹脂組成物來形成壁狀的電極,進行使用其的液晶的驅動,從而表現出高的顯示效率。因此,本發明的液晶顯示元件除了適合於大型液晶TV等用途以外,亦適合於最近強烈要求低消耗電力化以及高畫質化的智慧型手機等可攜式資訊設備的顯示元件的用途。 In the liquid crystal display device of the present invention, a wall-shaped electrode can be formed by using the radiation-sensitive resin composition of the present invention, and driving of a liquid crystal using the same can be performed, thereby exhibiting high display efficiency. Therefore, the liquid crystal display device of the present invention is suitable for applications such as a large-sized liquid crystal TV, and is also suitable for use in a display element of a portable information device such as a smart phone that strongly requires low power consumption and high image quality.

1‧‧‧液晶顯示元件 1‧‧‧Liquid display components

2‧‧‧第1基板 2‧‧‧1st substrate

3‧‧‧第2基板 3‧‧‧2nd substrate

4‧‧‧液晶 4‧‧‧LCD

5、6‧‧‧電極 5, 6‧‧‧ electrodes

7‧‧‧液晶分子 7‧‧‧liquid crystal molecules

9、10‧‧‧樹脂部 9, 10‧‧‧ Resin Department

11、12‧‧‧導電部 11, 12‧‧‧Electrical Department

Claims (8)

一種液晶顯示元件,其於對向配置的第1基板及第2基板之間夾持液晶,在所述第1基板的與所述第2基板對向的面上配置一對電極,且藉由施加於所述一對電極間的電場來驅動所述液晶;並且所述液晶顯示元件的特徵在於:所述一對電極的至少一者為壁狀電極,所述壁狀電極包括:壁狀樹脂部,自所述第1基板的面朝向所述第2基板側而突出設置;以及導電部,包含導電性構件,所述導電性構件設置於包括所述樹脂部的側面的至少一部分的區域中;並且所述壁狀樹脂部是使用包含[A]聚合物、以及[B]感光劑的感放射線性樹脂組成物而形成。 A liquid crystal display device in which a liquid crystal is sandwiched between a first substrate and a second substrate disposed opposite to each other, and a pair of electrodes are disposed on a surface of the first substrate facing the second substrate, and Applying an electric field between the pair of electrodes to drive the liquid crystal; and the liquid crystal display element is characterized in that at least one of the pair of electrodes is a wall electrode, and the wall electrode comprises: a wall resin a portion that protrudes from a surface of the first substrate toward the second substrate side, and a conductive portion that includes a conductive member that is provided in a region including at least a portion of a side surface of the resin portion And the wall-shaped resin portion is formed using a radiation-sensitive resin composition containing the [A] polymer and the [B] sensitizer. 如申請專利範圍第1項所述的液晶顯示元件,其中施加於所述一對電極間的電場具有和所述第1基板的與所述第2基板對向的面平行的分量。 The liquid crystal display device according to claim 1, wherein an electric field applied between the pair of electrodes has a component parallel to a surface of the first substrate facing the second substrate. 如申請專利範圍第1項或第2項所述的液晶顯示元件,其中所述一對電極均為所述壁狀電極,一對壁狀電極的導電部分別以具有相互對向的部分的方式構成。 The liquid crystal display device according to claim 1 or 2, wherein the pair of electrodes are the wall electrodes, and the conductive portions of the pair of wall electrodes respectively have portions facing each other. Composition. 如申請專利範圍第1項至第3項中任一項所述的液晶顯示元件,其使用感放射線性樹脂組成物而形成,所述感放射線性樹脂組成物包含[B]感光劑,所述[B]感光劑為選自光自由基聚合起始劑以及光酸產生劑中的至少一者。 The liquid crystal display element according to any one of claims 1 to 3, which is formed using a radiation sensitive resin composition containing a [B] sensitizer, [B] The sensitizer is at least one selected from the group consisting of a photoradical polymerization initiator and a photoacid generator. 如申請專利範圍第1項至第4項中任一項所述的液晶顯示元件,其中所述壁狀樹脂部的剖面形狀為正錐形狀。 The liquid crystal display device according to any one of the first to fourth aspect, wherein the cross-sectional shape of the wall-shaped resin portion is a forward tapered shape. 如申請專利範圍第1項至第5項中任一項所述的液晶顯示元件,其包括使用光配向劑而形成的配向膜。 The liquid crystal display element according to any one of claims 1 to 5, which comprises an alignment film formed using a photoalignment agent. 一種感放射線性樹脂組成物,其包含:[A]聚合物;[B-1]光自由基聚合起始劑;以及[C]聚合性化合物;並且所述感放射線性樹脂組成物的特徵在於:用於形成如申請專利範圍第1項至第6項中任一項所述的液晶顯示元件的所述壁狀電極的所述壁狀樹脂部。 A radiation sensitive resin composition comprising: [A] a polymer; [B-1] a photoradical polymerization initiator; and [C] a polymerizable compound; and the radiation sensitive resin composition is characterized by The wall-shaped resin portion for forming the wall electrode of the liquid crystal display element according to any one of the first to sixth aspects of the invention. 一種感放射線性樹脂組成物,其包含:[A]聚合物;以及[B-2]光酸產生劑;並且所述感放射線性樹脂組成物的特徵在於:用於形成如申請專利範圍第1項至第6項中任一項所述的液晶顯示元件的所述壁狀電極的所述壁狀樹脂部。 A radiation sensitive resin composition comprising: [A] a polymer; and [B-2] a photoacid generator; and the radiation sensitive resin composition is characterized in that it is formed as in the first application patent range The wall-shaped resin portion of the wall electrode of the liquid crystal display element according to any one of the items of the present invention.
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