TW201444630A - Method to cut off the resin plate adhered to the glass substrate - Google Patents

Method to cut off the resin plate adhered to the glass substrate Download PDF

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Publication number
TW201444630A
TW201444630A TW103100795A TW103100795A TW201444630A TW 201444630 A TW201444630 A TW 201444630A TW 103100795 A TW103100795 A TW 103100795A TW 103100795 A TW103100795 A TW 103100795A TW 201444630 A TW201444630 A TW 201444630A
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laser beam
cut
glass substrate
polarizing plate
resin sheet
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TW103100795A
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Chinese (zh)
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TWI581885B (en
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Satoshi Kokusei
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Mitsuboshi Diamond Ind Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626Energy control of the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass

Abstract

The present invention provides a cut-off method by laser beam, which can suppress the thermal damage to the glass substrate, and can make the cut-off surface of the rein plate adhered to the glass substrate as steep as possible. The method to cut off the resin plate 2 by irradiating the laser beam B onto the resin plate 2 adhered to the glass substrate 1 is: to irradiate the laser beam B in the state that the focal point P defocuses above the resin plate 2, allocate the shielding plate 3 to shield the laser beam B along the predetermined cut-off line S of mother substrate A and to expose the predetermined cut-off line S, so that it is configured to have only the peak portion B1 in the light intensity distribution of laser beam B irradiate the predetermined cut-off line S on the surface of resin plate 2, the other portion B2 is barred by the shielding plate 3.

Description

黏貼於玻璃基板之樹脂板之切斷方法 Cutting method of resin plate adhered to glass substrate

本發明係關於一種對黏貼於玻璃基板上之樹脂板,藉由雷射光束之照射進行切斷之切斷方法。例如,本發明被利用作為在玻璃基板上黏貼有樹脂製之偏光板的液晶顯示面板(LCD)中,以雷射光束對偏光板進行切斷時之切斷方法。 The present invention relates to a cutting method for cutting a resin sheet adhered to a glass substrate by irradiation of a laser beam. For example, the present invention is used as a cutting method in which a polarizing plate is cut by a laser beam in a liquid crystal display panel (LCD) in which a resin polarizing plate is adhered to a glass substrate.

以往習知有於玻璃基板之單面或兩面黏貼有由PET樹脂等構成之偏光板(偏光薄膜)的液晶顯示面板。製造如此般之液晶顯示面板之方法,例如揭示於專利文獻1。在該專利文獻1中所揭示之方法中,首先,從圖案化形成有多個單位面板之大面積的液晶母基板切出各個單位面板,就各該單位面板各黏貼一片另外作成之偏光板。 Conventionally, a liquid crystal display panel in which a polarizing plate (polarizing film) made of a PET resin or the like is adhered to one surface or both surfaces of a glass substrate is known. A method of manufacturing such a liquid crystal display panel is disclosed, for example, in Patent Document 1. In the method disclosed in Patent Document 1, first, each unit panel is cut out from a large-area liquid crystal mother substrate in which a plurality of unit panels are patterned, and a separately formed polarizing plate is attached to each of the unit panels.

在上述之方法中,由於必需就各單位面板黏貼偏光板,因此在該步驟中相當花費時間。此外,必需對玻璃基板正確地定位與其為相同尺寸之偏光板並加以黏貼,從而需要時間並且被要求定位之精度,容易產生因位置偏移所導致的不良情況。 In the above method, since it is necessary to adhere the polarizing plate to each unit panel, it takes a considerable amount of time in this step. In addition, it is necessary to correctly position and adhere the polarizing plate of the same size to the glass substrate, which requires time and is required to be positioned, and it is easy to cause a problem due to positional deviation.

因此,在專利文獻2中揭示有如以下之方法:申請人首先在大面積之液晶母基板之整面黏貼偏光板,之後,沿切斷預定線利用雷射光束對偏光板進行切斷。據此,可使偏光板與單位面板之玻璃基板相吻合而精度佳、且可一次地黏貼於多個單位面板。此外,藉由使ITO膜位於玻璃 基板與偏光板之間,可在光束照射時由ITO膜反射光束,抑制對玻璃基板之熱破壞。 Therefore, Patent Document 2 discloses a method in which the applicant first attaches a polarizing plate to the entire surface of a large-area liquid crystal mother substrate, and then cuts the polarizing plate by a laser beam along a line to cut. According to this, the polarizing plate can be matched with the glass substrate of the unit panel with high precision, and can be adhered to a plurality of unit panels at one time. In addition, by placing the ITO film in the glass Between the substrate and the polarizing plate, the light beam is reflected by the ITO film when the light beam is irradiated, and thermal damage to the glass substrate is suppressed.

專利文獻1:日本特開第2002-023151號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2002-023151

專利文獻2:日本特開第2011-178636號公報 Patent Document 2: Japanese Laid-Open Patent Publication No. 2011-178636

一般在使雷射光束掃描而對偏光板進行切斷之情形,係使雷射光束以既定之強度分布進行掃描。照射光束之光強度分布,如圖5(a)所示,成為光軸中心部較強而其外側較弱之山狀之分布(高斯分布)。雷射光束,亦可形成圓形狀光束點,此外,亦可形成具有既定之長軸徑、短軸徑之橢圓狀的光束點。 Generally, in the case where the laser beam is scanned and the polarizing plate is cut, the laser beam is scanned with a predetermined intensity distribution. As shown in Fig. 5(a), the light intensity distribution of the irradiation beam is a mountain-like distribution (Gaussian distribution) in which the center portion of the optical axis is strong and the outside is weak. The laser beam can also form a circular beam spot, and an elliptical beam spot having a predetermined major axis diameter and short axis diameter can also be formed.

因此,在使雷射光束之焦點以位於已黏貼於玻璃基板11之偏光板12之表面的方式進行了照射之情形,如圖5(b)所示,因熔融或剝蝕(ablation)所形成之溝槽13,大致成為上述光強度分布(與照射面之熱強度分布同樣)之反轉形狀。之後,將基板往下一步驟運送,當沿溝槽13之中心對玻璃基板11進行分斷成單位面板時,如圖5(c)所示,偏光板12之切斷面成為傾斜面。其結果為,在玻璃基板11之端面附近,偏光板12之板厚逐漸變薄之傾斜區域以既定之寬度L1形成。 Therefore, in the case where the focus of the laser beam is irradiated so as to be adhered to the surface of the polarizing plate 12 of the glass substrate 11, as shown in FIG. 5(b), it is formed by melting or ablation. The groove 13 is substantially in the reverse shape of the light intensity distribution (the same as the heat intensity distribution of the irradiation surface). Thereafter, the substrate is transported to the next step, and when the glass substrate 11 is divided into unit panels along the center of the trench 13, as shown in FIG. 5(c), the cut surface of the polarizing plate 12 becomes an inclined surface. As a result, in the vicinity of the end surface of the glass substrate 11, the inclined region in which the thickness of the polarizing plate 12 is gradually thinned is formed at a predetermined width L1.

然而,在將經分斷之單位面板作成製品之情形,較佳為傾斜區域之寬度L1盡可能小。亦即,較佳為偏光板12之端盡可能可在接近玻璃基板11之端的位置分斷。 However, in the case where the divided unit panel is formed into a product, it is preferable that the width L1 of the inclined region is as small as possible. That is, it is preferable that the end of the polarizing plate 12 is separated as close as possible to the end of the glass substrate 11.

作為用以使傾斜區域之寬度L1變小之方法,存在有使位於偏光板12表面之光束點小徑化。雷射光束,藉由使其聚光成更小而變成陡峭之光強 度分布。如上述般,溝槽13,由於成為對應光強度分布之反轉形狀,因此結果為能夠獲得更狹窄之傾斜區域之寬度L1。但另一方面,由於光束點內係以較強之光強度集中性地照射,因此亦對偏光板12正下方之玻璃基板11賦予熱破壞。對玻璃基板11之熱破壞,由於將導致玻璃基板11本身之強度降低而大大地損及製品價值,因此必需極力地避免。 As a method for reducing the width L1 of the inclined region, the beam spot located on the surface of the polarizing plate 12 is reduced in diameter. The laser beam becomes a steep light by concentrating it into a smaller light beam Degree distribution. As described above, since the groove 13 has an inverted shape corresponding to the light intensity distribution, the width L1 of the narrower inclined region can be obtained as a result. On the other hand, since the beam spot is concentratedly irradiated with a strong light intensity, thermal damage is also applied to the glass substrate 11 directly under the polarizing plate 12. The thermal destruction of the glass substrate 11 is greatly impaired because the strength of the glass substrate 11 itself is lowered to greatly impair the value of the product.

為了獲得高品質的單位面板,較佳為:在不對玻璃基板帶來熱破壞之情況下,盡可能使上述傾斜區域之寬度L1變小,具體而言係使L1成為50μm以下。 In order to obtain a high-quality unit panel, it is preferable to reduce the width L1 of the inclined region as much as possible without causing thermal damage to the glass substrate, and specifically, to make L1 50 μm or less.

有鑑於如此般之課題,在上述之專利文獻2中,係使ITO膜位於玻璃基板與偏光板之間,而在雷射光束照射時藉由ITO膜使其反射,從而抑制雷射光束對玻璃基板的熱破壞。 In view of such a problem, in the above-mentioned Patent Document 2, the ITO film is placed between the glass substrate and the polarizing plate, and is reflected by the ITO film when the laser beam is irradiated, thereby suppressing the laser beam to the glass. Thermal destruction of the substrate.

但是,若要組入ITO膜,則存在有液晶面板之構成變複雜、並且亦增加ITO蒸鍍等之製造步驟而使成本變高之問題點。 However, if an ITO film is to be incorporated, there is a problem that the configuration of the liquid crystal panel is complicated, and the manufacturing steps such as ITO vapor deposition are also increased to increase the cost.

本發明者,以不對位於偏光板下之玻璃基板賦予熱破壞之方式,當以遠離焦點之位置之散焦(defocus)進行加工時,藉由遮蔽雷射光束之周邊部分(刻劃線之兩側或單側)、防止往偏光板之照射,而發現偏光板之切斷面之傾斜變陡,而完成了本發明。 The inventors of the present invention shield the peripheral portion of the laser beam (the two of the scribe lines) by performing defocusing at a position away from the focus without imparting thermal damage to the glass substrate located under the polarizing plate. The side or the one side) is prevented from being irradiated to the polarizing plate, and the inclination of the cut surface of the polarizing plate is found to be steep, and the present invention has been completed.

本發明之目的在於提供一種利用雷射光束之樹脂板之切斷方法,該切斷方法係可省略利用ITO膜形成反射層的步驟,且能夠抑制對玻璃基板因雷射光束所造成的熱破壞,而且,能夠使黏貼於玻璃基板表面的偏光板等之樹脂板之寬度L1之傾斜區域變陡峭。 An object of the present invention is to provide a method for cutting a resin sheet using a laser beam, which can omit the step of forming a reflective layer using an ITO film, and can suppress thermal damage to a glass substrate due to a laser beam. Further, it is possible to make the inclined region of the width L1 of the resin sheet such as a polarizing plate adhered to the surface of the glass substrate steep.

為了解決上述課題,在本發明中提出了如以下般之技術性的 手段。 In order to solve the above problems, the following technical solutions are proposed in the present invention. means.

亦即,本發明之切斷方法,係對黏貼於玻璃等之底層基板之樹脂板,使雷射光束一邊沿切斷預定線相對地移動、一邊照射而切斷該樹脂板之方法。 In other words, the cutting method of the present invention is a method in which the resin sheet is adhered to the resin sheet of the underlying substrate such as glass, and the laser beam is irradiated while being relatively moved along the line to cut.

而且,對該樹脂板照射之雷射光束之光強度分布,以在光束之光軸中心附近的大致一定強度之峰值部分與在其外側緩緩地衰減之尾值部分照射之方式,以該雷射光束之焦點從該樹脂板之表面往高度方向散焦之狀態進行照射。 Further, the light intensity distribution of the laser beam irradiated to the resin plate is irradiated to a portion of a peak portion of a substantially constant intensity near the center of the optical axis of the light beam and a tail portion which is gradually attenuated on the outer side thereof. The focus of the beam is irradiated from the surface of the resin sheet in a state of being defocused in the height direction.

進一步地,將遮蔽照射於該樹脂板之雷射光束的遮蔽構件,以使該切斷預定線露出之狀態並以沿該切斷預定線相鄰之方式配置,該雷射光束之中,使該峰值部分之雷射光束對該切斷預定線進行照射,並且使該尾值部分之雷射光束由該遮蔽構件遮斷。 Further, a shielding member that shields a laser beam that is irradiated onto the resin sheet is disposed such that the line to be cut is exposed and disposed adjacent to the line to cut, and among the laser beams, The laser beam of the peak portion illuminates the line to cut, and the laser beam of the tail portion is blocked by the shielding member.

其中,較佳為:雷射光束係為CO2雷射。 Among them, it is preferable that the laser beam is a CO 2 laser.

根據本發明,照射於樹脂板(偏光板)之雷射光束,由於係為散焦狀態,因此,與光束聚光之位置相比,光強度分布之峰值相對地變更低。因此,與在光束所聚光之位置之加工相比,更能夠抑制在切斷偏光板時賦予玻璃基板之熱破壞。另一方面,在雷射光束照射時,雷射光束之光強度分布中之尾值部分由遮蔽板遮斷,因此沿遮蔽板端部切出之偏光板之切斷端面成為陡峭之傾斜面,而能夠獲得具有近乎垂直之切斷端面之高品質之製品。 According to the present invention, since the laser beam irradiated onto the resin plate (polarizing plate) is in a defocused state, the peak of the light intensity distribution is relatively low as compared with the position where the light beam is concentrated. Therefore, it is possible to suppress thermal damage imparted to the glass substrate when the polarizing plate is cut, compared to processing at a position where the light beam is concentrated. On the other hand, when the laser beam is irradiated, the tail value portion of the light intensity distribution of the laser beam is blocked by the shielding plate, so that the cut end surface of the polarizing plate cut along the end portion of the shielding plate becomes a steep inclined surface. It is possible to obtain a high quality product having a nearly perpendicular cut end face.

A‧‧‧液晶母基板 A‧‧‧LCD mother substrate

A1‧‧‧單位面板 A1‧‧‧unit panel

B‧‧‧雷射光束 B‧‧‧Laser beam

C‧‧‧溝槽 C‧‧‧ trench

P‧‧‧雷射光束之焦點 P‧‧‧The focus of the laser beam

1‧‧‧玻璃基板 1‧‧‧ glass substrate

2‧‧‧偏光板(樹脂板) 2‧‧‧Polar plate (resin plate)

3‧‧‧遮蔽板 3‧‧‧shading board

圖1,係表示本發明之切斷方法之一例的圖式。 Fig. 1 is a view showing an example of a cutting method of the present invention.

圖2,係表示未使用遮蔽板之情形之加工例的圖式。 Fig. 2 is a view showing a processing example in the case where a shielding plate is not used.

圖3,係說明在圖1所示之切斷方法之步驟的圖式。 Fig. 3 is a view showing the steps of the cutting method shown in Fig. 1.

圖4,係表示本發明之切斷方法之其他實施例的圖式。 Fig. 4 is a view showing another embodiment of the cutting method of the present invention.

圖5,係表示藉由習知的雷射光束照射方法所形成之溝槽之型態的圖式。 Fig. 5 is a view showing a pattern of a groove formed by a conventional laser beam irradiation method.

在以下,根據圖式詳細地說明本發明之切斷方法。 Hereinafter, the cutting method of the present invention will be described in detail based on the drawings.

圖1(a),係表示切出單位面板前之液晶母基板A中的玻璃基板1、與黏貼於其上面之偏光板2的剖面圖,並以將該液晶母基板A藉由雷射光束B從切斷預定線S分斷成左右之單位面板A1、A1之情形為例子進行說明。 1(a) is a cross-sectional view showing the glass substrate 1 in the liquid crystal mother substrate A before the unit panel is cut out, and the polarizing plate 2 adhered thereto, and the liquid crystal mother substrate A is irradiated with a laser beam. The case where B is divided into the left and right unit panels A1 and A1 from the cutting planned line S will be described as an example.

如圖1(a)所示,以成為使應抑制對玻璃基板1之熱破壞的雷射光束B之焦點P往液晶母基板A之上方(或下方)偏移之散焦狀態的方式,將雷射光學系統(圖示外)配置在切斷預定線S之上方。在本實施例之情形,偏光板2係以PET樹脂等形成,而玻璃基板1之厚度形成0.7mm左右,偏光板2之厚度形成0.2mm左右。此外,將散焦之雷射光束B之焦點P的位置、亦即焦點P與偏光板2之上面的距離H設定成約2mm。 As shown in Fig. 1(a), in a defocused state in which the focus P of the laser beam B which is to suppress thermal destruction of the glass substrate 1 is shifted above (or below) the liquid crystal mother substrate A, The laser optical system (outside the figure) is disposed above the cut-off planned line S. In the case of the present embodiment, the polarizing plate 2 is formed of PET resin or the like, and the thickness of the glass substrate 1 is about 0.7 mm, and the thickness of the polarizing plate 2 is about 0.2 mm. Further, the position of the focus P of the defocused laser beam B, that is, the distance H between the focus P and the upper surface of the polarizing plate 2 is set to be about 2 mm.

作為被使用之雷射光束B,較佳為使用對於偏光板2吸收效率佳之波長、例如具有9.4μm或10.6μm之波長的CO2雷射。 As the laser beam B to be used, it is preferable to use a CO 2 laser having a wavelength which is excellent in absorption efficiency for the polarizing plate 2, for example, having a wavelength of 9.4 μm or 10.6 μm.

而且,如圖1(b)所示,在已使切斷預定線S之附近部分露出之狀態下,沿切斷預定線S在其兩側、或單側配置遮蔽雷射光束B之遮蔽板(遮蔽構件)3。在遮蔽板3,使用玻璃板或墊片卷帶(shim tape)等CO2雷射無法透過之 材質。 Further, as shown in Fig. 1(b), in a state where the vicinity of the line to cut S is partially exposed, a shielding plate for shielding the laser beam B is disposed on both sides or one side thereof along the line to cut S. (shielding member) 3. In the shielding plate 3, a material such as a glass plate or a shim tape that cannot be transmitted by a CO 2 laser is used.

為了便於說明,針對不使用遮蔽板3時之加工狀態簡單地進行說明。圖2係表示將以散焦狀態照射之雷射光束B,在未使用遮蔽板3之情況下直接照射於偏光板2時之加工狀態的圖式。 For convenience of explanation, the processing state when the shield plate 3 is not used will be briefly described. FIG. 2 is a view showing a state in which the laser beam B irradiated in a defocused state is directly irradiated to the polarizing plate 2 without using the shielding plate 3.

照射於偏光板2之上面的雷射光束B,係焦點P之位置較為下側,也就是散焦之狀態,且光束徑較焦點P寬。因此,在偏光板2上面的光強度分布,如圖2(b)所示般,成為以雷射光束B之光軸中心為峰值部分,且相較於焦點P(參照圖5(a)),引出朝向外側周邊緩緩地衰減之尾值(tail)的山狀之形態(緩坡之高斯分布)。一旦使該雷射光束B照射於偏光板2,則在偏光板2形成之溝槽C1,如圖2(a)所示般,成為使光強度分布反轉之形狀。因此,沿切斷預定線S分斷後之偏光板2之切斷面,形成緩坡之傾斜面,作為偏光板2之分斷品質並非為較佳之狀態。雖亦根據分斷後之製品形狀而論,但一般而言,該傾斜面越近乎垂直則越高品質。 The laser beam B irradiated on the upper surface of the polarizing plate 2 is positioned lower than the position of the focus P, that is, in a state of defocusing, and the beam diameter is wider than the focal point P. Therefore, as shown in FIG. 2(b), the light intensity distribution on the polarizing plate 2 is a peak portion of the optical axis center of the laser beam B, and is compared with the focal point P (refer to FIG. 5(a)). A mountain-like form (a Gaussian distribution of a gentle slope) that slowly attenuates the tail toward the outer periphery is extracted. When the laser beam B is irradiated onto the polarizing plate 2, the groove C1 formed in the polarizing plate 2 has a shape in which the light intensity distribution is reversed as shown in Fig. 2(a). Therefore, the cut surface of the polarizing plate 2 which is divided along the cutting planned line S forms an inclined surface of the gentle slope, and the cutting quality of the polarizing plate 2 is not preferable. Although it is also based on the shape of the product after the break, in general, the closer the inclined surface is to the vertical, the higher the quality.

在本發明中,如圖3(a)所示般,將遮蔽板3(遮蔽構件)以使切斷預定線S之附近部分露出之狀態並沿切斷預定線S配置,以僅使光強度分布中之光軸中心附近之峰值部分B1之光照射於切斷預定線S之方式,將其他之尾值部分B2藉由遮蔽板3遮斷。遮蔽板3之端面與切斷預定線S之間隔L,較佳為10~200μm左右,更佳為20~100μm左右。 In the present invention, as shown in Fig. 3 (a), the shielding plate 3 (shielding member) is disposed along the line to cut S in a state in which the vicinity of the line to cut S is exposed, so that only the light intensity is made. The light of the peak portion B1 near the center of the optical axis in the distribution is irradiated onto the planned cutting line S, and the other tail portion B2 is blocked by the shielding plate 3. The distance L between the end surface of the shielding plate 3 and the planned cutting line S is preferably about 10 to 200 μm, more preferably about 20 to 100 μm.

藉由以如上述之方式使雷射光束沿切斷預定線S移動,而於偏光板2形成如圖3(b)所示般之溝槽C。雷射光束係僅以光強度分布中之峰值部分B1照射左右之遮蔽板3、3之間之切斷預定線S部分,尾值部分B2則藉由遮蔽板3遮斷。照射於切斷預定線S之雷射光束,由於係以散焦狀 態照射,因此與如使焦點位於偏光板2之上面而照射時般、經聚光之光強度之峰值較高的雷射光束相比,光強度被減弱並且為大致一定強度,能夠抑制對玻璃基板1之熱破壞。在切斷預定線S中,照射該峰值部分B1之雷射光束,能夠藉由熔融或剝蝕而形成溝槽C。 The groove C is formed in the polarizing plate 2 as shown in Fig. 3(b) by moving the laser beam along the line to cut S as described above. The laser beam is irradiated only by the peak portion B1 of the light intensity distribution to the portion of the cut line S between the left and right shield plates 3, 3, and the tail portion B2 is blocked by the shield plate 3. The laser beam that is irradiated on the cut line S is defocused Since the light is irradiated, the light intensity is weakened and the intensity is substantially constant, and the glass can be suppressed, as compared with a laser beam having a higher peak intensity of the concentrated light when the focus is placed on the polarizing plate 2 Thermal destruction of the substrate 1. In the line S of cutting, the laser beam of the peak portion B1 is irradiated, and the groove C can be formed by melting or denuding.

此外,在照射面,將雷射光束之光強度分布之尾值部分B2藉由遮蔽板3遮斷,將光強度為大致一定強度之峰值部分B1之光照射於偏光板2,因此照射部分完成利用大致均勻的光能量進行均勻的加工(剝蝕或熔融),且加工後之溝槽C如圖3(c)所示般形成左右側壁經切直之陡峭之傾斜面。因此,在下一步驟中沿切斷預定線S將玻璃基板1分斷成單位面板A1、A1時,偏光板2之端面形成陡峭之傾斜面,能夠使傾斜區域之寬度L1變小。亦即,根據本發明,能夠抑制對玻璃基板之熱破壞、且於偏光板形成陡峭之傾斜面。以往,該等之效果僅能夠以互為相反之條件(散焦或聚光)達成,但根據本發明,能夠利用一次的掃描達成以往無法兩全其美之加工結果。 Further, on the irradiation surface, the tail portion B2 of the light intensity distribution of the laser beam is blocked by the shielding plate 3, and the light having the peak intensity B1 of the light intensity of a certain intensity is irradiated onto the polarizing plate 2, so that the irradiation portion is completed. Uniform processing (erosion or melting) is performed using substantially uniform light energy, and the groove C after the processing forms a steeply inclined surface on which the left and right side walls are straightened as shown in Fig. 3(c). Therefore, when the glass substrate 1 is divided into the unit panels A1 and A1 along the line to cut S in the next step, the end faces of the polarizing plates 2 form a steep inclined surface, and the width L1 of the inclined regions can be made small. That is, according to the present invention, it is possible to suppress thermal damage to the glass substrate and form a steep inclined surface on the polarizing plate. Conventionally, these effects can be achieved only under mutually contradictory conditions (defocusing or concentrating). However, according to the present invention, it is possible to achieve a processing result that has not been both beautiful in the past by one-time scanning.

此處,針對使用本發明之具體的加工例進行說明。在玻璃基板1之板厚為0.7mm、且樹脂製之偏光板2之板厚為0.2mm的液晶母基板,安裝板厚為0.5mm之遮蔽板3,將遮蔽板3之端面與切斷預定線S的間隔L設定為50μm,將雷射之焦點P與偏光板2之上面的散焦之距離H設定為2mm,且以CO2雷射切斷偏光板2。 Here, a specific processing example using the present invention will be described. In the liquid crystal mother substrate having a thickness of 0.7 mm and a thickness of 0.2 mm of the polarizing plate 2 made of resin, the shielding plate 3 having a thickness of 0.5 mm is attached, and the end faces of the shielding plate 3 and the cutting schedule are prepared. The interval L of the line S is set to 50 μm, the distance H between the focus P of the laser and the defocus on the polarizing plate 2 is set to 2 mm, and the polarizing plate 2 is cut by a CO 2 laser.

其結果為,能夠使傾斜區域之寬度L1改善至較目標之50μm更小的38μm。 As a result, the width L1 of the inclined region can be improved to 38 μm smaller than the target 50 μm.

另外,為了做比較,在未安裝遮蔽板3而進行了同樣之雷射照射的結果,傾斜區域之寬度L1為80μm以上。 Further, for comparison, as a result of the same laser irradiation in which the shielding plate 3 was not attached, the width L1 of the inclined region was 80 μm or more.

接著,針對第二實施形態進行說明。圖4,係表示對以從玻璃基板1之端面外伸(overhang)之狀態黏貼之偏光板2進行切斷之情形。 Next, a second embodiment will be described. FIG. 4 shows a state in which the polarizing plate 2 adhered in a state of being overhanged from the end surface of the glass substrate 1 is cut.

該情形,如圖4(a)所示,從偏光板2切斷之端材部分2a係將被丟棄者,因此,遮蔽板3僅配置於沿玻璃基板1之端面之切斷預定線S的玻璃基板1側。然後,與上述實施例同樣地,使雷射光束B以散焦狀態沿切斷預定線S照射於偏光板2上。據此,於偏光板2形成之溝槽C’之側壁,如圖4(b)所示,在載置有遮蔽板3之側,與前一實施例同樣地將熱強度分布中的周邊部分(尾值部分)B2藉由遮蔽板3遮斷,因此形成陡峭之傾斜面,相反側則形成緩坡之傾斜面。將該緩坡之傾斜面之側的偏光板2作為端材2a而丟棄。 In this case, as shown in FIG. 4(a), the end portion 2a cut from the polarizing plate 2 is to be discarded, and therefore, the shielding plate 3 is disposed only on the cutting line S along the end surface of the glass substrate 1. Glass substrate 1 side. Then, similarly to the above-described embodiment, the laser beam B is irradiated onto the polarizing plate 2 along the line to cut S in a defocused state. As a result, as shown in FIG. 4(b), the side wall of the groove C' formed in the polarizing plate 2 has a peripheral portion in the heat intensity distribution as in the previous embodiment. The (tail value portion) B2 is blocked by the shielding plate 3, so that a steep inclined surface is formed, and the opposite side forms an inclined surface of the gentle slope. The polarizing plate 2 on the side of the inclined surface of the gentle slope is discarded as the end material 2a.

藉此,如圖4(c)所示,能夠使黏貼於玻璃基板1之偏光板2之切斷端面,以與玻璃基板1之端面一致之狀態切斷,且能夠使偏光板2之切斷端面之傾斜區域之寬度L1變小。 As a result, as shown in FIG. 4(c), the cut end surface of the polarizing plate 2 adhered to the glass substrate 1 can be cut in a state of being aligned with the end surface of the glass substrate 1, and the polarizing plate 2 can be cut. The width L1 of the inclined region of the end face becomes small.

以上,雖已針對本發明之代表性的實施例進行了說明,但本發明並不一定特定於上述之實施形態。例如,作為應切斷之樹脂板,雖揭示有黏貼於液晶顯示面板之玻璃基板的偏光板,但成為底層之基板即使是玻璃以外之基板,對於在照射雷射光束時將承受熱破壞者亦能夠利用本發明。此外,在本發明中,可在達成其目的、不脫離申請專利範圍之範圍內,適當地進行修正、變更。 Although the representative embodiments of the present invention have been described above, the present invention is not necessarily limited to the above embodiments. For example, as a resin plate to be cut, a polarizing plate adhered to a glass substrate of a liquid crystal display panel is disclosed, but a substrate which is a substrate of the bottom layer, even if it is a substrate other than glass, is also subjected to thermal damage when irradiating a laser beam. The present invention can be utilized. Further, in the present invention, it is possible to appropriately modify and change the scope of the invention without departing from the scope of the patent application.

本發明係在對如液晶顯示面板之偏光板般之黏貼於玻璃基板之樹脂板進行切斷時使用。 The present invention is used when cutting a resin sheet adhered to a glass substrate like a polarizing plate of a liquid crystal display panel.

A‧‧‧液晶母基板 A‧‧‧LCD mother substrate

A1‧‧‧單位面板 A1‧‧‧unit panel

B1‧‧‧峰值部分 B1‧‧‧ peak section

B2‧‧‧尾值部分 B2‧‧‧ tail value part

C‧‧‧溝槽 C‧‧‧ trench

L‧‧‧間隔 L‧‧‧ interval

L1‧‧‧傾斜區域之寬度 L1‧‧‧ Width of the inclined area

S‧‧‧切斷預定線 S‧‧‧ cut-off line

1‧‧‧玻璃基板 1‧‧‧ glass substrate

2‧‧‧偏光板(樹脂板) 2‧‧‧Polar plate (resin plate)

3‧‧‧遮蔽板 3‧‧‧shading board

Claims (3)

一種樹脂板之切斷方法,係對黏貼於底層基板之樹脂板,使雷射光束一邊沿切斷預定線相對地移動、一邊照射而切斷該樹脂板,其特徵在於:對該樹脂板照射之雷射光束之光強度分布,係以在光束之光軸中心附近的大致一定強度之峰值部分與在其外側緩緩地衰減之尾值部分照射之方式,以該雷射光束之焦點從該樹脂板之表面往高度方向散焦之狀態進行照射,將遮蔽照射於該樹脂板之雷射光束之遮蔽構件,以使該切斷預定線露出之狀態並以沿該切斷預定線相鄰之方式配置;該雷射光束之中,使該峰值部分之雷射光束對該切斷預定線進行照射,並且使該尾值部分之雷射光束藉由該遮蔽構件遮斷。 A method of cutting a resin sheet by cutting a resin sheet which is adhered to a resin sheet of a base substrate and relatively moving the laser beam while moving along a line to cut, and irradiating the resin sheet. The light intensity distribution of the laser beam is irradiated with a peak portion of a substantially constant intensity near the center of the optical axis of the beam and a tail portion that is gradually attenuated on the outer side thereof, from which the focus of the laser beam is The surface of the resin sheet is irradiated in a state of being defocused in the height direction, and the shielding member of the laser beam irradiated to the resin sheet is shielded so that the line to be cut is exposed and adjacent to the line to cut. In a mode configuration, the laser beam of the peak portion is irradiated to the line to cut, and the laser beam of the tail portion is blocked by the shielding member. 如申請專利範圍第1項之樹脂板之切斷方法,其中,該雷射光束係CO2雷射。 The method for cutting a resin sheet according to the first aspect of the invention, wherein the laser beam is a CO 2 laser. 如申請專利範圍第1或2項之樹脂板之切斷方法,其中,該樹脂板係黏貼於液晶顯示面板之玻璃基板的偏光板。 The method of cutting a resin sheet according to claim 1 or 2, wherein the resin sheet is adhered to a polarizing plate of a glass substrate of a liquid crystal display panel.
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