TW201434655A - Release film for producing green sheet and method of producing release film for producing green sheet - Google Patents

Abstract

A release film of the present invention for producing a green sheet includes a base having a first surface and a second surface, a smoothing layer provided on the first surface, and a release agent layer provided at a side of a surface of the smoothing layer opposite to the base. The smoothing layer is formed by heating and curing a smoothing layer forming composition which includes a thermosetting compound having a mass average molecular weight of 950 or less. An average roughness Ra1 of an outer surface of the release agent layer is 8 nm or less and a height Rp1 of a maximum protrusion of the outer surface is 50 nm or lower. According to the present invention, it is possible to prevent pinholes from occurring to a surface of the green sheet and produce the green sheet having high reliability.

Description

Release film for producing green sheet and method for producing release film for producing green sheet

The present invention relates to a release film for producing a green sheet and a method for producing a release film for producing a green sheet.

In the production of a ceramic capacitor, a release film for producing a green sheet is used in order to form a green sheet.

In general, a release film for producing a green sheet is composed of a substrate and a release agent layer. The ceramic slurry is coated on the release film for producing a green sheet and dried to produce a green sheet which is dispersed and dissolved in an organic solvent to dissolve the ceramic particles and the binder resin. Next, the produced green sheet was peeled off from the release film for green sheet production and used for the production of a ceramic capacitor.

In the process of manufacturing a green sheet using a release film by the conventional green sheet manufacturing, the surface unevenness state of the release film for producing a green sheet is transferred to the green sheet, and pinholes are formed on the surface of the green sheet. problem. As a result, in the ceramic capacitor manufactured by stacking such a green sheet, a problem of malfunction due to a short circuit occurs. In order to solve such a problem, it is necessary to mold the surface of the release film for green sheet production (casting) Surface preparation) requires very high smoothness.

Therefore, it has been proposed to use a release film for the production of a smooth surface green sheet. In the manufacturing method, the release film is attached to one surface of a substrate sheet having a surface fine uneven state, and a thermosetting resin layer is provided by applying a thermosetting resin liquid and heating and hardening, and is provided on the thermosetting resin layer. The release agent is applied to form a release agent layer (for example, see Patent Document 1, Japanese Patent Laid-Open Publication No. 2007-069360).

Furthermore, in recent years, with the miniaturization and high density of ceramic capacitors, It is required that green sheets must be more thinned. However, when a thin green sheet is produced by using a conventional release film for producing a green sheet, pinholes are formed on the surface of the green sheet, and it is difficult to obtain a green sheet of high reliability.

The object of the present invention is to provide a release film for producing a green sheet, which can It is possible to prevent pinholes or partial thickness from being uneven on the surface of the green sheet, and it is possible to manufacture a green sheet of high reliability. Further, another object of the present invention is to provide a method for producing a release film for producing a green sheet which can prevent pinholes or partial unevenness from occurring on the surface of the green sheet.

The object is achieved by the present invention of (1) to (7) below.

(1) A release film for producing a green sheet, comprising a substrate, a smoothing layer, and a release agent layer. The substrate has a first surface and a second surface. The smoothing layer is disposed on the aforementioned first surface position of the substrate. The release agent layer is disposed on a surface of the smoothing layer opposite to a surface of the substrate. The smoothing layer is formed by heating and hardening a composition for forming a smoothing layer containing one of thermosetting compounds having a mass average molecular weight of 950 or less. From one of the outer surface of one layer form an arithmetic average roughness Ra ₁ of 8nm or less and the layer formed from the outer surface of one of the maximum projection height Rp ₁ to 50nm or less.

(2) The release film for producing a green sheet according to the above (1), wherein the first surface has an arithmetic mean roughness Ra ₂ of 10 to 200 nm, and one of the first surfaces has a maximum protrusion height Rp ₂ It is 80~1000nm.

(3) A release sheet for producing a green sheet according to the above (1) or (2) The film, wherein one of the aforementioned smoothing layers has an average film thickness of 0.2 to 10 μm.

(4) The green sheet according to any one of the above (1) to (3) A release film for manufacturing, wherein the thermosetting compound is a bisphenol type epoxy compound.

(5) The release film for producing a green sheet according to any one of the above (1), wherein the smoothing layer has a surface opposite to the surface of the substrate, and the smoothing layer is opposite to The arithmetic mean roughness Ra ₄ of the surface of the substrate is 8 nm or less, and the maximum protrusion height Rp ₄ of the smoothing layer opposite to the surface of the substrate is 50 nm or less.

(6) The release film for green sheet production according to any one of (1) to (5), wherein the second surface has an arithmetic mean roughness Ra ₃ of 10 to 200 nm, and the second One of the surfaces has a maximum protrusion height Rp ₃ of 80 to 1000 nm.

(7) The method for producing a release film for producing a green sheet according to any one of the above (1) to (6), comprising a substrate preparation process, a coating layer formation process, and a smoothing layer formation process And a release agent layer forming process. The substrate preparation process is to prepare the substrate, and the substrate has the first surface and the second surface. In the coating layer forming process, a coating layer is formed by applying the smoothing layer forming composition containing the thermosetting compound having a mass average molecular weight of 950 or less to the first surface position of the substrate. The smoothing layer forming process forms the smoothing layer by heating and hardening the coating layer. The release agent layer forming process is performed on the surface of the smoothing layer opposite to the surface of the substrate to form the release agent layer. The arithmetic mean roughness Ra ₁ of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp ₁ of the outer surface of the release agent layer is 50 nm or less.

According to the present invention, it is possible to provide a release film for producing a green sheet, which can It is possible to prevent pinholes or partial thickness from being uneven on the surface of the green sheet, and it is possible to manufacture a green sheet of high reliability. In particular, even if a substrate having a large surface roughness is used as a substrate constituting a release film for producing a green sheet, it is possible to provide a release film for producing a green sheet having excellent outer surface smoothness. When such a release film for producing a green sheet is used, it is possible to prevent pinholes or partial thickness from being uneven on the surface of the green sheet. As a result, when the green sheets are stacked to form a capacitor, the problem of malfunction due to the short circuit can be prevented. According to the present invention, it is possible to easily produce a release film for producing a green sheet, which is capable of producing a green sheet having excellent surface smoothness.

1‧‧‧Folding film for green sheet manufacturing

11‧‧‧Substrate

111‧‧‧The first surface of the substrate

112‧‧‧Second surface of the substrate

12‧‧‧Smoothing layer

121‧‧‧ surface (third surface)

13‧‧‧ release agent layer

131‧‧‧Outer surface of the release agent layer

Fig. 1 is a side sectional view showing a release film for producing a green sheet of the present invention.

The invention will be described in detail below with reference to preferred embodiments.

The release film for green sheet production will be described below.

The release film for producing a green sheet of the present invention is used to produce a green sheet. Moreover, the green sheets produced are used, for example, for the manufacture of ceramic capacitors and the like.

Fig. 1 is a side sectional view showing a release film for producing a green sheet of the present invention. Further, in the following description, the upper side of the first drawing is indicated by "upper" and the lower side is indicated by "lower".

As shown in Fig. 1, the release film 1 for green sheet production has a substrate 11, a smoothing layer 12, and a release agent layer 13. The substrate 11 has a first surface 111 and a second surface 112. The smoothing layer 12 is disposed on the first surface 111 of the substrate 11. The release agent layer 13 is provided at a position opposite to the surface 121 of the smoothing layer 12 (hereinafter sometimes referred to as "the third surface 121"). In other words, as shown in Fig. 1, the release film 1 for producing a green sheet is a three-layer structure in which the base material 11, the smoothing layer 12, and the release agent layer 13 are stacked in this order.

Further, in the present specification, in the case where a green sheet is produced using the release film 1 for green sheet production, the green sheet is coated with a dissolved ceramic slurry, for example, on the outer surface 131 of the release agent layer 13. The way is formed.

In the present invention, the release film 1 for producing a green sheet has a substrate 11, a release agent layer 13, and a smoothing layer 12 interposed therebetween. Further, the release film 1 for producing a green sheet of the present invention has the following feature, and the smoothing layer 12 is formed by heating and hardening a smoothing layer containing one of thermosetting compounds having a mass average molecular weight of 950 or less. The composition is formed such that the arithmetic average roughness Ra ₁ of the outer surface 131 of the release agent layer 13 is 8 nm or less, and the maximum protrusion height Rp ₁ of the outer surface 131 of the release agent layer 13 is 50 nm or less.

According to such a feature, the smoothness of the outer surface 131 of the release agent layer 13 can be improved, and the release film 1 for producing a green sheet excellent in release property can be obtained. When the green sheet is produced by using the release film 1 for green sheet production, it is possible to prevent pinholes or partial thickness from being uneven on the surface of the green sheet, and it is possible to manufacture a green sheet of high reliability. As a result, when the green sheets are stacked to form a capacitor, the problem of malfunction due to the short circuit can be prevented.

Incidentally, the film body used as the substrate can have various surface roughnesses. The surface roughness of an inexpensive film body tends to be rough. Even when a release film having a rough surface roughness is used to form a release film for producing a green sheet, it is possible to surely fill (eliminate) the surface of the substrate by providing a smoothing layer having the above-described characteristics on the surface of the substrate. The bump state. As a result, the surface of the smoothing layer opposite to the substrate can be made smooth. Thereby, it is possible to prevent the uneven state of the surface of the substrate from affecting the outer surface of the release agent layer formed on the smoothing layer, and to obtain a release film for producing a green sheet excellent in surface smoothness other than the release agent layer. .

Hereinafter, each layer of the release film for forming a green sheet of the present embodiment will be described in order.

The substrate 11 will be explained below.

The substrate 11 has a physical strength such as rigidity and flexibility imparted to the green body. The function of the release film 1 for sheet production (hereinafter sometimes referred to simply as "release film 1").

The substrate 11 has a first surface 111 and a second surface as shown in FIG. Face 112.

The material constituting the substrate 11 is not particularly limited, and for example, Such as polybutylene terephthalate (PBT) resin, polyethylene terephthalate (PET) resin and polyethylene naphthalate (PEN) Polyester resin such as resin, polyolefin resin such as polypropylene (PP) resin and polymethylpentene (PMP) resin, and polycarbonate (PC) resin, etc. The plastic film. The substrate 11 can be a single layer film or a multilayer film of two or more layers of the same type or different types. Among them, a polyester film is preferred, a polyethylene terephthalate film is preferred, and a biaxially stretched polyethylene terephthalate film is preferred. In particular, the polyester film is less prone to dust during processing and during use. For this reason, for example, in the case of producing a green sheet using the release film 1 made of a polyester resin, it is possible to effectively prevent coating failure of the ceramic slurry due to dust. As a result, a green sheet having fewer pinholes can be produced.

In addition, the substrate 11 can contain a filler in addition to the aforementioned materials. Etc. The filler can be one or a combination of two or more of silica, titania, calcium carbonate, kaolin, and alumina. By including such a filler, mechanical strength can be simultaneously imparted to the substrate 11, and the smoothness of the surface and the back surface of the substrate 11 can be improved, and blocking can be suppressed.

Further, the arithmetic mean roughness Ra ₂ of the first surface 111 of the substrate 11 is preferably 10 to 200 nm, and the maximum protrusion height Rp ₂ is preferably 80 to 1000 nm.

Furthermore, the arithmetic mean roughness Ra _{2 of the} first surface 111 is preferably 15 to 100 nm, and the arithmetic mean roughness Ra _{2 of the} first surface 111 is preferably 20 to 50 nm. Further, the maximum protrusion height Rp _{2 of the} first surface 111 is preferably 90 to 800 nm, and the maximum protrusion height Rp _{2 of the} first surface 111 is preferably 100 to 600 nm.

If the arithmetic mean roughness Ra ₂ and the maximum protrusion height Rp _{2 of the} first surface 111 fall within the above range, even if the film thickness of the smoothing layer 12 to be described later is relatively thin, the first substrate 11 can be more appropriately filled. The uneven state of the surface 111 makes it possible to make the surface 121 of the smoothing layer 12 opposite to the substrate 11 smoother. As a result, it is possible to more appropriately prevent the uneven state of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12.

Further, the substrate 11 having the arithmetic mean roughness Ra _{2 of the} first surface 111 and its maximum protrusion height Rp ₂ falling within the above range is easily obtained at a relatively low price.

In addition, when the arithmetic mean roughness Ra ₂ and the maximum protrusion height Rp _{2 of the} first surface 111 exceed the above upper limit, it is difficult to sufficiently fill the first surface 111 according to the constituent material of the composition for forming a smoothing layer. In the uneven state, it is necessary to make the film thickness of the release agent layer 13 thick.

Further, in the present specification, the arithmetic mean roughness Ra ₂ and the maximum protrusion height Rp ₂ of the first surface 111 of the substrate 11 are Mitutoyo according to Japanese Industrial Standards (JIS) B0601-1994. The value obtained by measuring the manufactured surface roughness measuring machine SV3000S4 (stylus type). In addition, in the present specification, unless otherwise specified, "arithmetic average roughness and maximum protrusion height" refer to values obtained by the above-described methods.

Further, the arithmetic mean roughness Ra ₃ of the second surface 112 of the substrate 11 is preferably 10 to 200 nm, and the maximum protrusion height Rp ₃ is preferably 80 to 1000 nm. Furthermore, the arithmetic mean roughness Ra _{3 of the} second surface 112 is preferably 15 to 100 nm, and the arithmetic average roughness Ra _{3 of the} second surface 112 is preferably 20 to 50 nm. Further, the maximum protrusion height Rp _{3 of the} second surface 112 is preferably 90 to 800 nm, and the maximum protrusion height Rp _{3 of the} second surface 112 is preferably 100 to 600 nm.

When the arithmetic mean roughness Ra ₃ and the maximum protrusion height Rp _{3 of the} second surface 112 fall within the above range, it is possible to appropriately prevent the occurrence of curl slip when the release film 1 is wound into a roll shape. Further, it is also possible to prevent the occurrence of agglomeration when the release film 1 is wound into a roll shape to be stored. Specifically, the release film 1 can be wound around a core material such as paper, plastic, or metal, and stored in a roll shape as needed. At this time, if the arithmetic mean roughness Ra ₃ and the maximum protrusion height Rp _{3 of the} second surface 112 fall within the above range, the air can be sufficiently removed when the release film 1 is wound into a roll shape, and the curl slip can be effectively suppressed. The situation. Therefore, when the release film 1 is wound into a roll shape, it is not necessary to increase the tension of the winding, and deformation of the core portion due to the tension of the winding can be suppressed. Further, in the roll-shaped release film 1, if the arithmetic mean roughness Ra ₃ and the maximum protrusion height Rp _{3 of the} second surface 112 fall within the above range, the release agent layer 13 can be more effectively prevented. The agglomeration phenomenon occurs when the second surface 112 of the substrate 11 is bonded to each other. Therefore, the roll-shaped release film 1 can be easily unwound.

On the other hand, if the arithmetic mean roughness Ra ₃ and the maximum protrusion height Rp _{3 of the} second surface 112 do not reach the aforementioned lower limit value, when the release film 1 is wound into a roll shape, the surface and the back surface of the release film 1 ( The second surface 112 of the substrate 11 and the outer surface 131 of the release agent layer 13 may be prone to agglomeration.

In addition, although the average film thickness of the substrate 11 is not particularly limited, 10~300μm is preferred, and 15~200μm is preferred. Thereby, the release film 1 can have moderate flexibility, and at the same time has particularly excellent tear resistance and breakage resistance.

The smoothing layer 12 will be explained below.

The smoothing layer 12 is opposite to the outer surface 131 of the release agent layer 13, And has a function of slowing down the influence of the uneven state of the first surface 111 of the substrate 11.

As shown in FIG. 1, the smoothing layer 12 is provided on the substrate 11 On a surface 111.

The smoothing layer 12 is made of a flat containing a specified thermosetting compound The composition for forming a sliding layer is composed of a composition. Further, the smoothing layer 12 is formed by heating and hardening the composition for forming a smoothing layer.

Such a composition for forming a smoothing layer is as described above, and contains a substance The thermosetting compound having a volume average molecular weight of 950 or less is particularly preferably a thermosetting compound having a mass average molecular weight of 300 to 700. Thereby applying to the base The composition for forming a smoothing layer before the first surface 111 of the material 11 and before heating can have a moderate viscosity, and the composition for forming a smoothing layer has moderate fluidity. By using such a composition for forming a smoothing layer, the smoothing layer 12 is formed at the position of the first surface 111 of the substrate 11, and the uneven state of the first surface 111 of the substrate 11 can be appropriately filled. As a result, it is possible to prevent the uneven state of the substrate 11 from affecting the third surface 121 of the smoothing layer 12, and to smooth the third surface 121 of the smoothing layer 12. Therefore, it is possible to prevent the uneven state of the substrate 11 from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12, and to smooth the outer surface 131 of the release agent layer 13.

In particular, even if the surface of the first surface 111 of the substrate 11 is uneven When the state is large, the smoothness of the outer surface 131 of the release agent layer 13 can be obtained by appropriately filling the uneven state of the first surface 111 by the action and effect of the composition for forming a smoothing layer. Excellent release film 1.

In this case, if the mass average molecular weight of the thermosetting compound exceeds The upper limit is described, and the fluidity of the composition for forming a smoothing layer is low, and the smoothing layer 12 may be formed along the uneven state of the first surface 111 of the substrate 11. As a result, the third surface 121 of the smoothing layer 12 may have a shape accompanying the uneven state of the first surface of the substrate 11.

Furthermore, for example, the mass average molecular weight falls within the aforementioned range The thermosetting compound may be a bisphenol A (BPA) type epoxy compound, a bisphenol A type epoxy ester compound, a bisphenol F (BPF) type epoxy compound, and a double Bisphenol type epoxy such as phenol F type epoxy ester compound In addition to an amino compound such as a compound, a melamine compound or a urea compound, it may be an isocyanate compound, an oxazoline compound, a urethane compound, or an acrylonitrile ( Materials such as acryl) compounds, phenol compounds, alkyd compounds, and polyester compounds. Among them, a bisphenol type epoxy compound is particularly preferred, and a bisphenol A type epoxy ester compound is preferred. Thereby, in addition to being able to more reliably fill the surface unevenness state of the first surface 111 of the substrate 11, it is possible to have particularly excellent hardenability even when the film thickness of the smoothing layer 12 is thin.

In addition, although the composition for forming a smoothing layer contains a mass average score The thermosetting compound having a sub-quantity within the above range may contain a solvent as needed. Thereby, the viscosity of the composition for forming a smoothing layer applied to the first surface 111 of the substrate 11 can be easily adjusted.

For example, the solvent can use toluene and xylene Fatty acid esters such as aromatic hydrocarbons, ethyl acetate and butyl acetate, and methyl ethyl ketone (xylene). MEK) and an organic solvent such as a ketone such as methyl isobutyl ketone (MIBK), an aliphatic hydrocarbon such as hexane or heptane, or the like. One or a combination of two or more. Thereby, the smoothing layer forming composition applied to the first surface 111 of the substrate 11 and heated can easily have an appropriate viscosity.

Further, the composition for forming a smoothing layer is in addition to the aforementioned components, It can also contain other ingredients. Other ingredients may be catalysts, dyes, dispersants, antistatic agents, hardeners, and the like. Further, in the case where the other components are contained, the content of the other components is preferably 0.1 to 10% by mass in the composition for forming a smoothing layer (calculated as a solid content).

Further, among the compositions for forming a smoothing layer containing a solvent, The content of the thermosetting compound is not particularly limited, but is preferably from 0.5 to 60% by mass, preferably from 1 to 45% by mass. Thereby, the composition for forming a smoothing layer tends to have an appropriate viscosity.

Furthermore, among the compositions for forming a smoothing layer (in terms of solid content) The content of the thermosetting compound is not particularly limited, but is preferably 90% by mass or more, and more preferably 95% by mass or more. Thereby, the composition for forming a smoothing layer can have particularly excellent hardenability.

Further, the arithmetic mean roughness Ra ₄ of the third surface 121 of the smoothing layer 12 is preferably 8 nm or less, and the maximum protrusion height Rp ₄ is preferably 50 nm or less. Furthermore, the arithmetic mean roughness Ra _{4 of the} third surface 121 is preferably 6 nm or less. Further, the maximum protrusion height Rp _{4 of the} third surface 121 is preferably 40 nm or less.

When the arithmetic mean roughness Ra ₄ and the maximum protrusion height Rp _{4 of the} third surface 121 fall within the above range, it is possible to more suitably prevent the surface unevenness state of the substrate 11 from affecting the outer surface 131 of the release agent layer 13.

On the other hand, when the arithmetic mean roughness Ra _{4 of the} third surface 121 exceeds the above upper limit value, a new smoothing layer needs to be further provided between the release agent layer 13 and the smoothing layer 12.

Further, if the maximum protrusion height Rp _{4 of the} third surface 121 exceeds the above upper limit value, a situation in which a new smoothing layer needs to be further provided between the release agent layer 13 and the smoothing layer 12 occurs.

In addition, although the average film thickness of the smoothing layer 12 is not particularly limited, It is preferably 0.2 to 10 μm, and preferably 0.3 to 5 μm. Thereby, the unevenness of the first surface 111 of the substrate 11 can be more reliably filled, and the smoothness of the outer surface of the release film 1 can be further improved. Moreover, the smoothing layer 12 can be made to have moderate flexibility.

In this regard, if the average film thickness of the smoothing layer 12 does not reach the aforementioned lower limit The value of the component constituting the smoothing layer forming composition is such that the surface roughness of the first surface 111 must be small in order to sufficiently fill the uneven state of the first surface 111 of the substrate 11. The situation of the material 11. In addition, when the average thickness of the smoothing layer 12 exceeds the above-described upper limit, it is easy to cause warpage of the release film 1 due to curing and shrinkage of the smoothing layer 12 depending on the composition of the composition for forming the smoothing layer. The operability of the release film 1 is lowered.

The release agent layer 13 will be described below.

The release agent layer 13 has a function of imparting a release property to the release film 1.

The release agent layer 13 is disposed on the smoothing layer 12 as shown in FIG. The third surface 121.

The release agent layer 13 is applied to the smoothing layer 12 by drying and hardening. The composition for forming a release agent layer on the third surface 121 is formed.

Such a composition for forming a release agent layer contains a release agent.

The release agent can use an alkyd compound, an acrylonitrile compound, One or a combination of two or more of a silicone compound, a long-chain alkyl group-containing compound, a fluoride, and the like. Among them, an alkyd compound, a propylene oxime compound, an fluorenone compound, or a compound containing a long-chain alkyl group is preferably used. Thereby, it is possible to obtain the release agent layer 13 which is particularly excellent in the release property from the green sheet while having moderate hardenability.

Specific examples, alkyd compounds can be denatured using long-chain alkane A denatured product of an alkyd compound, an anthrone denaturing alkyd compound, or the like. Further, when an alkyd compound is used, a crosslinking agent and a catalyst may be additionally added to the composition for forming a release agent layer. The release agent layer 13 having an alkyd compound having a crosslinked structure can be obtained by a method of heat-hardening the composition for forming a release agent layer.

Furthermore, for example, the propylene oxime compound can be used long A denatured product of an alkane-denatured acryl oxime compound, an fluorenone-modified acryl oxime compound or the like. Further, when the acrylonitrile-based compound is contained in the composition for forming a release agent layer, a crosslinking agent and a catalyst can be additionally added to the composition for forming a release agent layer. The release agent layer 13 having a propylene-based compound having a crosslinked structure can be obtained by a method of heat-hardening the composition for forming a release agent layer.

Furthermore, as an example, an anthrone-based compound can be used. There is an anthrone-based compound having dimethylpolysiloxane as a basic skeleton. The anthrone-based compound has an addition reaction type, a condensation reaction type, an ultraviolet curing type, and an electron beam curing type. Addition reaction type anthrone compound It is highly adaptable and can optimize productivity. Compared with the oxime ketone compound of the condensation reaction type, the oxime ketone compound of the addition reaction type is advantageously used for constituting the release agent layer because it has a small change in the release force after production and no hardening and shrinkage. 13 release agent.

Specifically, the above-mentioned addition reaction type anthrone compound can It is an organopolysiloxane which is attached to the molecular terminal and/or side chain of the compound such as vinyl, allyl, propenyl, hexenyl ( Hexenyl) or the like has two or more alkenyl groups of 2 to 10 alkenyl groups. When such an oxime ketone compound of the addition reaction type is used, a crosslinking agent and a catalyst can also be used in combination.

The above crosslinking agent is, for example, having one molecule and at least two hydrazines An organic polyoxane of an atom-bonded hydrogen atom, specifically, for example, dimethyl hydrogen siloxy-terminated dimethyl siloxane monomethylhydroquinoxane (methyl hydrogen siloxane) copolymer, trimethyl siloxy-terminated dimethyl methoxy oxy-monomethyl hydride copolymer, trimethyl siloxy-terminated Methylhydrogen polysiloxane, poly(hydrogen silsesquioxane), etc.

In addition, the above catalyst may be particulate platinum and adsorbed on carbon powder. A platinum-based compound such as particulate fine platinum, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefinic complex of chloroplatinic acid, palladium, rhodium or the like. By using such a catalyst, the release agent layer can be more efficiently carried out A hardening reaction for forming a composition.

Further, the compound containing a long-chain alkyl group is used, for example, for polyvinyl alcohol. (polyvinyl alcohol) is a polyvinyl carbamate obtained by reacting a long-chain alkyl isocyanate having 8 to 30 carbon atoms in a polymer, and in a polyethyleneimine. An alkylurea derivative obtained by reacting a long-chain alkyl isocyanate having 8 to 30 carbon atoms.

In addition, for example, fluoride can be used with fluorenone (fluorine silicone) compound, a compound such as a boron compound.

Further, in the composition for forming a release agent layer, in addition to the aforementioned release form In addition to the agent, a dispersing agent and a solvent can also be contained. By containing at least one of a dispersing agent and a solvent, the composition for forming a release agent layer applied to the third surface 121 of the smoothing layer 12 and dried can have an appropriate viscosity.

For example, the dispersant or solvent can use aromatics such as toluene One or a combination of two or more of a fatty acid ester such as a hydrocarbon or ethyl acetate, a ketone such as methyl ethyl ketone, or an organic solvent such as an aliphatic hydrocarbon such as hexane or heptane.

Further, the composition for forming a release agent layer is in addition to the aforementioned components, It can also contain other ingredients. Other ingredients may be, for example, catalysts, dyes, dispersants, antistatic agents, hardeners, and the like. Further, in the case where the other components are contained, the content of the other components in the composition for forming a release agent layer is preferably 0.1 to 10% by mass.

Further, as described above, the arithmetic mean roughness Ra ₁ of the outer surface 131 of the release agent layer 13 is 8 nm or less, and the maximum protrusion height Rp ₁ is 50 nm or less. Furthermore, the arithmetic average roughness Ra _{1 of the} outer surface 131 of the release agent layer 13 is preferably 6 nm or less. Further, the maximum protrusion height Rp _{1 of the} outer surface 131 of the release agent layer 13 is preferably 40 nm or less.

The arithmetic mean roughness Ra ₁ and the maximum protrusion height Rp _{1 of the} outer surface 131 of the release agent layer 13 fall within the foregoing range, and are transferred to the green body by the smooth surface shape of the outer surface 131 when the green sheet is formed. The sheet can more appropriately prevent the occurrence of pinholes or the like on the surface of the green sheet. As a result, a green sheet having a smoother surface can be obtained.

In addition, the average film thickness of the release agent layer 13 is preferably 0.01 to 3 μm. It is preferably 0.03 to 1 μm. If the thickness of the release agent layer 13 is less than 0.01 μm, depending on the material constituting the release agent layer 13, there is a case where the function as a release agent layer cannot be sufficiently exhibited. On the other hand, when the thickness of the release agent layer 13 exceeds 3 μm, when the release film 1 is wound into a roll shape, agglomeration may occur easily, and the release film 1 may be wound poorly, or may be caused. When the release film 1 is unwound, problems such as high static electricity occur.

Hereinafter, a method of producing a release film for producing a green sheet will be described.

Next, a description will be given of a suitable embodiment regarding the manufacturing method of the release film 1 for producing a green sheet as described above.

The manufacturing method of the release film 1 of the present embodiment includes a substrate preparation process, a coating layer forming process, a smoothing layer forming process, and a release agent layer forming process. The substrate preparation process prepares the substrate 11. Coating layer forming process system will contain The smoothing layer forming composition of the specified thermosetting compound is applied onto the first surface 111 of the substrate 11 and dried to form a coating layer. The smoothing layer forming process forms the smoothing layer 12 by heating and hardening the coating layer. The release agent layer forming process is performed at a position opposite to the surface 121 of the aforementioned substrate 11 of the smoothing layer 12 to form a release agent layer 13.

Hereinafter, each process will be described in detail.

The substrate preparation process will be described below.

First, the substrate 11 is prepared.

The substrate 11 can use the substrate 11 as described above.

Next, an oxidation method or the like can be performed on the first surface 111 of the substrate 11. The surface treatment or application of a primer treatment. Thereby, the adhesion between the substrate 11 and the smoothing layer 12 provided at the position of the first surface 111 of the substrate 11 can be particularly optimized.

The surface treatment such as the oxidation method can be adapted to the type of the substrate 11 Local selection. For example, it may be a corona discharge treatment, a plasma discharge treatment, a chrome oxidation treatment (wet), a flame treatment, a hot air treatment, an ozone treatment, an ultraviolet irradiation treatment, or the like. Among them, from the viewpoint of optimizing the adhesion between the smoothing layer 12 and the operation of simplifying the processing, it is preferable to use a corona discharge treatment in particular.

The coating layer forming process will be described below.

In the present process, a composition for forming a smoothing layer is first prepared.

The composition for forming a smoothing layer can be used alone as the heat mentioned above A hardening compound. In addition to this, it is also possible to use a composition for forming a smoothing layer in which a solvent or other component as described above is mixed as needed.

Then, it is applied to the first surface 111 of the substrate 11 to be liquid. A composition for forming a smoothing layer. Thereby, a coating layer was obtained. As described above, since the smoothing layer forming composition has moderate fluidity, it can be applied to the substrate 11 by applying the smoothing layer forming composition onto the first surface 111 of the substrate 11 and drying it. The uneven state of the first surface 111 is obtained to obtain a coating layer having a smooth outer surface.

a method of coating a composition for forming a smoothing layer, for example, gravure coating Gravure coat method, bar coat method, spray coat method, spin coat method, air knife coat method, roll coat method, doctor blade ( A blade coat method, a gate roll coat method, and a die coat method. Among them, a gravure coating method and a bar coating method are preferable, and a bar coating method is more preferable. Thereby, the coating layer of the target thickness can be easily formed.

The smoothing layer forming process will be described below.

Next, by heating and hardening the coating obtained by the coating layer forming process The smoothing layer 12 is formed by a cloth layer.

In this process, it is hardened to maintain the smoothness of the outer surface. The coating layer forming process is used to surely fill the coating layer in the uneven state of the first surface 111 of the substrate 11. As a result, the smoothing layer 12 in which the third surface 121 is very smooth can be obtained. Thereby, it is possible to more appropriately prevent the uneven state of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13. Therefore, smoothing of the outer surface 131 of the release agent layer 13 can be optimized in the process of forming the release agent layer described later. Sex.

Although the heating method is not particularly limited, it can be, for example, dried by hot air. Heating method such as furnace heating method.

Furthermore, the heating conditions are not particularly limited. Heating temperature in Celsius 80 It is preferably ~150 degrees, and the heating time is preferably from 5 seconds to 1 minute. Thereby, it is possible to prevent the smoothing layer 12 from being unintentionally deteriorated, and at the same time, the smoothing layer 12 can be formed particularly efficiently. As a result, the productivity of the finally obtained release film 1 can be improved. In addition, when the heating temperature is within the above range, when the composition for forming a smoothing layer contains a solvent, warping and cracking of the smoothing layer 12 can be particularly prevented as the solvent evaporates during heating.

The release agent layer forming process will be described below.

Next, on the surface 121 of the smoothing layer 12 opposite to the substrate 11 The release agent layer 13 is formed at the position.

It is prepared to mix as the aforementioned material as the detaching agent layer 13 The composition for forming a release agent layer.

Next, on the surface 121 of the smoothing layer 12 opposite to the substrate 11 After the liquid composition for forming a release agent layer is applied, it is dried and hardened to obtain a release agent layer 13.

Although the drying method is not particularly limited, it can be, for example, dried using hot air. Drying method such as drying furnace.

Further, the drying conditions are not particularly limited. Drying temperature is 80 ° C It is preferably ~150 degrees, and the drying time is preferably from 5 seconds to 1 minute. Thereby being able to The release agent layer 13 is prevented from being unintentionally deteriorated, and the release agent layer 13 can also be formed particularly efficiently. As a result, the productivity of the finally obtained release film 1 can be improved.

With the above process, it is easy to manufacture and have excellent smoothness. The release film 1 is excellent in release property and high in reliability.

In addition, by using such a release film 1 to manufacture a green sheet, Prevent the occurrence of pinholes or the like on the surface of the green sheet.

Further, a method of manufacturing a ceramic green sheet using the release film 1 can be exemplified In the following method, the method comprises coating a surface of the release agent layer of the release film with a ceramic powder dispersion slurry and drying it to form a green sheet, and then stacking the green sheets peeled off the release film to obtain a stacked body. An electrode is formed on the ceramic sheet obtained by sintering the stacked body. Thereby, a ceramic capacitor can be obtained. Therefore, by forming a ceramic capacitor using the green sheet formed by the release film 1, it is possible to prevent a ceramic capacitor having high reliability due to a problem of malfunction due to a short circuit.

The above detailed description based on the preferred embodiment of the present invention is not It is used to define the invention.

For example, in the foregoing embodiment, although the substrate has a single The method of the layer structure will be described, but is not limited thereto. The substrate can also have a multilayer structure of two or more layers of the same or different species. Further, the smoothing layer and the release agent layer are similarly described as having a single layer structure, but are not limited thereto. The smoothing layer and the release agent layer can also each have a multilayer structure of two or more layers of the same or different species.

Furthermore, in the above-described embodiment, the green sheet is manufactured by using a green sheet. The film is described as a substrate, a smoothing layer, and a release agent layer which are sequentially bonded to each other and stacked in a three-layer structure, but is not limited thereto. An intermediate layer can also be provided between the smoothing layer and the release agent layer. Further, an intermediate layer can also be provided between the substrate and the smoothing layer. Such an intermediate layer can be a layer which improves the adhesion between the smoothing layer and the release agent layer, and can also suppress the occurrence of static electricity when the release film for the green sheet before the formation of the green sheet is wound. Layer body.

Furthermore, the method for producing a release film for producing a green sheet of the present invention It is not limited to the above method, and any process may be added as needed.

The embodiment will be described below.

Next, although the production of the green sheet according to the present invention will be explained The specific embodiment of the film is not intended to limit the invention to only these embodiments.

The production of a release film for producing a green sheet will be described below.

Embodiment 1 will be explained below.

First, a biaxially stretched polyethylene terephthalate film as a substrate (thickness: 38 μm, arithmetic mean roughness Ra _{2 of the} first surface: 42 nm, maximum protrusion height Rp _{2 of the} first surface: 619 nm) The arithmetic mean roughness Ra _{3 of the} second surface is 42 nm, and the maximum protrusion height Rp _{3 of the} second surface is 619 nm].

Next, a smoothing of a mass percentage of 20 by weight is obtained. a layer-forming composition in which 100 parts by mass of a bisphenol A epoxy ester compound (TA31-059D) manufactured by Hitachi Chemicals Co., Ltd., having a solid content concentration of 50, is mixed with 100 parts by mass of a thermosetting compound. Mass percentage The amount is 530] and 3 parts by mass of an acid catalyst of p-toluenesulfonic acid and toluene and methyl ethyl ketone.

The obtained composition for forming a smoothing layer was applied to the first surface of the substrate by a No. 4 wire bar (Meyer bar #4) to obtain a coating layer.

Next, a smoothing layer (thickness 1.3 μm) was formed by continuously heating the coating layer at 130 ° C for 1 minute.

Then, a mixture of 100 parts by mass was diluted with toluene to obtain a diluted solution, and the mixture (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "SILICONE KS-847H", and a solid content of 30% by mass) was mixed. An addition reaction type anthrone compound and a crosslinking agent. To the diluted solution, two parts by mass of a platinum catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "PL-50T") was added and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. Things. The composition for forming a release agent layer was uniformly coated on the surface of the smoothing layer opposite to the surface of the substrate so that the thickness of the composition for forming the release agent layer was 0.1 μm. Thereafter, the release agent layer was formed by drying the composition for forming a release agent layer at 130 ° C for 1 minute to produce a release film for producing a green sheet.

Embodiment 2 will be described below.

In addition to changing the biaxially stretched polyethylene terephthalate film of Example 1 to a biaxially stretched polyethylene terephthalate film [thickness: 31 μm, the arithmetic mean roughness Ra _{2 of the} first surface: 29 nm, the maximum protrusion height Rp _{2 of the} first surface: 257 nm, the arithmetic mean roughness Ra _{3 of the} second surface: 29 nm, and the maximum protrusion height Rp _{3 of the} second surface: 257 nm are the same as in the first embodiment. A method is used to manufacture a release film for the production of a green sheet.

Embodiment 3 will be explained below.

In addition to changing the biaxially stretched polyethylene terephthalate film of Example 1 to a biaxially stretched polyethylene terephthalate film [thickness: 31 μm, the arithmetic mean roughness Ra _{2 of the} first surface: 15 nm, the maximum protrusion height Rp _{2 of the} first surface is: 98 nm, the arithmetic mean roughness Ra _{3 of the} second surface is 15 nm, the maximum protrusion height of the second surface is Rp ₃ : 98 nm, and the thickness of the smoothing layer is changed to 0.4 μm. A release film for producing a green sheet was produced in the same manner as in Example 1 except that the rest was carried out.

Embodiment 4 will be explained below.

In addition to changing the thickness of the smoothing layer of Example 1 to 1.8 μm Further, a release film for producing a green sheet was produced in the same manner as in Example 1 except for the rest.

Embodiment 5 will be explained below.

In addition to changing the thickness of the smoothing layer of Example 1 to 2.3 μm Further, a release film for producing a green sheet was produced in the same manner as in Example 1 except for the rest.

Comparative Example 1 will be described below.

First, a biaxially stretched polyethylene terephthalate film as a substrate (thickness: 38 μm, arithmetic mean roughness Ra _{2 of the} first surface: 42 nm, maximum protrusion height Rp _{2 of the} first surface: 619 nm) The arithmetic mean roughness Ra _{3 of the} second surface is 42 nm, and the maximum protrusion height Rp _{3 of the} second surface is 619 nm].

Next, a mixture of 100 parts by mass is diluted with toluene to obtain a rare Release liquid, this mixture (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "SILICONE KS-847H", solid content of 30% by mass] mixed with an addition-type anthrone-based compound as a release agent and cross-linking Agent. To the diluted solution, two parts by mass of a platinum catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "PL-50T") was added and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. Things. The release agent layer-forming composition was uniformly coated on the first surface of the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 μm. Thereafter, the release agent layer was formed by drying the composition for forming a release agent layer at 130 ° C for 1 minute to produce a release film for producing a green sheet.

Comparative Example 2 will be described below.

First, a biaxially stretched polyethylene terephthalate film as a substrate (thickness: 38 μm, arithmetic mean roughness Ra _{2 of the} first surface: 42 nm, maximum protrusion height Rp _{2 of the} first surface: 619 nm) The arithmetic mean roughness Ra _{3 of the} second surface is 42 nm, and the maximum protrusion height Rp _{3 of the} second surface is 619 nm].

Next, a composition for forming a smoothing layer is obtained, which is mixed with 100 a mixture of a stearyl denatured alkyd compound and a methylated melamine compound as a thermosetting compound (manufactured by Hitachi Chemical Co., Ltd., trade name "TESFINE 303", solid The acid catalyst having a content of 20% by mass, a mass average molecular weight of 15000] and 3 parts by mass of p-toluenesulfonic acid.

The resulting composition for forming a smoothing layer is coated with a wire rod of No. 4 The first surface of the substrate is applied to obtain a coating layer.

Next, the coating layer is continuously heated by 1 minute at 130 degrees Celsius. A smoothing layer (thickness 1.0 μm) was formed in the clock.

Then, a mixture of 100 parts by mass of toluene is diluted to obtain Diluate, this mixture (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "SILICONE KS-847H", solid content of 30% by mass] mixed with an addition-type anthrone-based compound as a release agent and cross-linking Agent. To the diluted solution, two parts by mass of a platinum catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "PL-50T") was added and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. Things. The composition for forming a release agent layer was uniformly coated on the surface of the smoothing layer opposite to the surface of the substrate so that the thickness of the composition for forming the release agent layer was 0.1 μm. Thereafter, the release agent layer was formed by drying the composition for forming a release agent layer at 130 ° C for 1 minute to produce a release film for producing a green sheet.

Comparative Example 3 will be described below.

First, a biaxially stretched polyethylene terephthalate film as a substrate (thickness: 38 μm, arithmetic mean roughness Ra _{2 of the} first surface: 42 nm, maximum protrusion height Rp _{2 of the} first surface: 619 nm) The arithmetic mean roughness Ra _{3 of the} second surface is 42 nm, and the maximum protrusion height Rp _{3 of the} second surface is 619 nm].

Next, a smoothing of a mass percentage of 20 by weight is obtained. A composition for forming a layer, which is a polyester compound (manufactured by Toyobo Co., Ltd., trade name "VYLON 20SS", manufactured by Toyobo Co., Ltd., having a solid content of 30% by mass, mass average, 80 parts by mass of a polyester compound as a thermosetting compound. Molecular weight is 3000], 20 The mass fraction is a methylated melamine compound as a crosslinking agent, three parts by mass of an acid catalyst of p-toluenesulfonic acid, toluene and methyl ethyl ketone.

The resulting composition for forming a smoothing layer is coated with a wire rod of No. 4 The first surface of the substrate is applied to obtain a coating layer.

Next, the coating layer is continuously heated by 1 minute at 130 degrees Celsius. A smoothing layer (thickness 1.2 μm) was formed in the clock.

Then, a mixture of 100 parts by mass of toluene is diluted to obtain Diluate, this mixture (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "SILICONE KS-847H", solid content of 30% by mass] mixed with an addition-type anthrone-based compound as a release agent and cross-linking Agent. To the diluted solution, two parts by mass of a platinum catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "PL-50T") was added and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. Things. The composition for forming a release agent layer was uniformly coated on the surface of the smoothing layer opposite to the surface of the substrate so that the thickness of the composition for forming the release agent layer was 0.1 μm. Thereafter, the release agent layer was formed by drying the composition for forming a release agent layer at 130 ° C for 1 minute to produce a release film for producing a green sheet.

Tables 1-1 to 1-3 show the manufacture of green sheets for each of the comparative examples. The composition of the release film is used.

Also in the table, bisphenol A type epoxy as a thermosetting compound The ester compound [TA31-059D, manufactured by Hitachi Chemical Co., Ltd., a solid content concentration of 50% by mass] is expressed as "A1", and is a hard curable compound of a thermosetting compound and methylated. A mixture of melamine compounds (trade name "TESFINE 303", manufactured by Hitachi Chemical Co., Ltd., and a solid content of 20% by mass) is expressed as "A2", and is a polyester compound of a thermosetting compound [Toyobo Co., Ltd. ), the product name is "VYLON 20SS", solid content The mass percentage of 30 is expressed as "A3".

Further, the substrate, the smoothing layer and the separation of each of the examples and the comparative examples The film thickness of each of the coating layers was measured by a reflective film thickness meter "F20" (manufactured by FILMETRICS Co., Ltd.).

Further, the arithmetic mean roughness Ra ₂ and the maximum protrusion height Rp ₂ of the first surface of the substrate, the arithmetic mean roughness Ra ₃ and the maximum protrusion height Rp ₃ of the second surface of the substrate, and smoothing are each measured in the following manner. The arithmetic mean roughness Ra ₄ and the maximum protrusion height Rp ₄ of the third surface of the layer, the arithmetic mean roughness Ra _{1 of the} outer surface of the release agent layer, and the maximum protrusion height Rp ₁ . First, attach double-sided tape to the glass. Next, the release film for producing a green sheet obtained by each of the examples and the comparative examples is fixed to the glass plate so that the opposite surface of the positional surface of the arithmetic mean roughness and the maximum protrusion height to be measured is oriented to the glass sheet. On double-sided tape. In this way, the arithmetic mean roughness Ra ₂ , Ra ₃ , Ra ₄ , Ra ₁ and the maximum amount described above were measured in accordance with Japanese Industrial Standard JIS B0601-1994 using a surface roughness measuring machine SV3000S4 (stylus type) manufactured by Mitutoyo Corporation. Protrusion heights Rp ₂ , Rp ₃ , Rp ₄ , Rp ₁ .

The evaluation of each of the examples and the comparative examples will be described below.

The evaluation of the release film for producing a green sheet obtained as described above was carried out.

The cavitability evaluation of each of the examples and the comparative examples will be described below.

The release film for producing a green sheet obtained by each of the examples and the comparative examples had a width of 400 mm, a length of 5000 m, and was wound into a roll shape to obtain a release film roll. Roll the release film at 40 degrees Celsius and 50% humidity Store under the environment for 30 days. Thereafter, the appearance of the release film roll was visually observed, and the caking property was evaluated on the following criteria.

A: Comparison is carried out by winding a release film for producing a green sheet into a roll shape. The appearance of the release film roll before storage, the appearance of the release film roll after storage did not change (no agglomeration phenomenon).

B: local tonal change in the release film cylinder for green sheet manufacturing Area (has a tendency to agglomerate but can still be used).

C: In the release film cylinder for the production of green sheets, the color of a large area Change the tone (with agglomeration).

Like the aforementioned reference C, the surface of the release film for green sheet production and When the back surfaces adhere to each other and agglomerate, when the color tone of a large area of the release film roll changes, the release film for the raw green sheet cannot be normally wound.

The evaluation of the number of recesses of each of the examples and the comparative examples will be described below.

A coating liquid of polyvinyl butyral (PVB) resin was dissolved in a toluene/ethanol mixed solvent (mass ratio of 6/4) so as to have a thickness of 3 μm after drying. The coating layer was obtained on the release agent layer (outer surface) of the release film for producing a green sheet obtained in each of the comparative examples. The coating layer was dried at 80 ° C for 1 minute to form a polyvinyl butyral resin layer. Next, a polyester tape was attached to the surface of the polyvinyl butyral resin layer. Next, the release film for producing a green sheet was peeled off from the polyvinyl butyral resin layer, and the polyvinyl butyral resin layer was transferred to a polyester tape. Of course After that, the surface of the polyvinyl butyral resin layer in contact with the release agent layer of the release film for producing a green sheet was observed using an optical interference type surface shape observation device "WYKO-1100" (manufactured by Veeco Co., Ltd.). . The observation condition is 50 times the PSI mode. The surface of the polyvinyl butyral resin layer was counted in the range of 91.2 × 119.8 μm, and the number of recesses found on the surface of the polyvinyl butyral resin layer was counted. The concave portion is a depth at which the shape of the release agent layer is transferred to a depth of 150 nm or more. The number of recesses was evaluated on the following criteria. In addition, when a capacitor is produced using a polyvinyl butyral resin layer (green sheet) which is evaluated as the following reference C, there is a tendency that a short circuit is likely to occur due to a breakdown voltage being lowered.

A: The number of recesses is zero.

B: The number of recesses is 1 to 5.

C: The number of recesses is six or more.

The results are shown in Table 2.

As can be seen from Table 2, the release film for producing a green sheet of the present invention is externally The surface has excellent smoothness. Further, the green sheet formed by using the release film of the green sheet of the present invention produced almost no large concave portion. Further, by manufacturing a ceramic capacitor using the green sheet formed by using the green sheet of the present invention to produce a release film, no occurrence of a failure such as a short circuit was observed. On the contrary, the comparative example did not give satisfactory results.

1‧‧‧Folding film for green sheet manufacturing

11‧‧‧Substrate

111‧‧‧The first surface of the substrate

112‧‧‧Second surface of the substrate

12‧‧‧Smoothing layer

121‧‧‧ surface (third surface)

13‧‧‧ release agent layer

131‧‧‧Outer surface of the release agent layer

Claims (7)

A release film for manufacturing a green sheet, comprising: a substrate having a first surface and a second surface; a smoothing layer disposed on the first surface of the substrate; and a a release agent layer disposed on a surface of the smoothing layer opposite to a surface of the substrate; wherein the smoothing layer is heated and hardened to contain one of thermosetting compounds having a mass average molecular weight of 950 or less Forming a composition for smoothing layer formation; wherein, one of the outer surfaces of the release agent layer has an arithmetic mean roughness Ra ₁ of 8 nm or less, and one of the outer surfaces of the release agent layer has a maximum protrusion height Rp ₁ It is 50 nm or less. The release film for producing a green sheet according to claim 1, wherein an arithmetic mean roughness Ra ₂ of the first surface is 10 to 200 nm, and a maximum protrusion height Rp ₂ of the first surface is 80 to 1000 nm. . The release film for producing a green sheet according to claim 1, wherein one of the smoothing layers has an average film thickness of 0.2 to 10 μm. The release film for producing a green sheet according to claim 1, wherein the thermosetting compound is a bisphenol type epoxy compound. The release film for producing a green sheet according to claim 1, wherein the smoothing layer has a surface roughness opposite to a surface of the substrate, and the smoothing layer is opposite to an average roughness of the surface of the substrate. Ra ₄ is 8 nm or less, and the maximum protrusion height Rp ₄ of the surface of the smoothing layer opposite to the surface of the substrate is 50 nm or less. The release film for producing a green sheet according to claim 1, wherein an arithmetic mean roughness Ra ₃ of the second surface is 10 to 200 nm, and a maximum protrusion height Rp ₃ of the second surface is 80 to 1000 nm. . The method for producing a release film for producing a green sheet according to any one of claims 1 to 6, comprising the following process: a substrate preparation process for preparing the substrate, the substrate having the first surface and The second surface; a coating layer forming process by applying the smoothing layer forming composition containing the thermosetting compound having a mass average molecular weight of 950 or less to the first surface position of the substrate Forming a coating layer; forming a smoothing layer to form the smoothing layer by heating and hardening the coating layer; and forming a release agent layer on the opposite side of the smoothing layer The surface position forms the release agent layer; wherein the arithmetic mean roughness Ra ₁ of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp ₁ of the outer surface of the release agent layer It is 50 nm or less.