TW201405129A - Probe and electrical connection device - Google Patents

Abstract

An object of the present invention is to provide a probe of high durability and an electrical connection device. The probe 5 of the present invention comprises: a base 8; a first resilient member 10 and a second resilient member 11 that are arranged to space from each other by a predetermined distance; a first connection member 12, which is arranged between the first resilient member 10 and the second resilient member 11 in order to connect a front end section of the first resilient member 10 and a front end section of the second resilient member 11; a second connection member 13, which is arranged between the first resilient member 10 and the second resilient member 11 in order to connect a rear end section of the first resilient member 10 and a rear end section of the second resilient member 11; a third connection member 14, which is arranged to be opposite to the first connection member 12 arranged on the first resilient member 10; and a contacting device 9, which is connected via the third connection member 14 to the front end section of the first resilient member 10 and projects from an opposite side of the third connection member 14, wherein the third connection member 14 has a rear end that is arranged behind the rear end of the first connection member 12.

Description

Probe and electrical connection device

The present invention relates to a probe and an electrical connection device using the same.

A probe is used for the detection of the semiconductor device, and the probe is in contact with the electrode of the semiconductor device having the subject under test. For example, the probe of Patent Document 1 includes: a pedestal; a contactor; a first elastic member to which a contactor is connected; a second elastic member connected to the first elastic member; and a first connecting member that connects the front end of the first elastic member and a second elastic member front end portion; a second connecting member connecting the rear end portion of the first elastic member and the rear end portion of the second elastic member; and a third connecting member positioned at a front end of the first elastic member and connected to the first portion A contactor that protrudes from the back side of the two elastic members. When the contact is in contact with the electrode of the subject, the probe is highly rigid by the first elastic member, the second elastic member, the first connecting member, and the second connecting member being connected in parallel. Therefore, a large needle pressure with a small overdrive can be obtained.

[Practical technical documents] [Patent Document]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2004-156993

In the probe of Patent Document 1, the rear edge of the third connecting member is disposed earlier than the rear edge of the first connecting member. Therefore, when the contactor contacts the electrode of the subject to make the probe over-exploit, the stress is concentrated on the position where the end edge of the first connecting member is disposed behind the first connecting member, and the probe is damaged. Resistance The longevity.

In view of the above problems, an object of the present invention is to provide a high durability Probe and electrical connection device using the probe.

A probe according to an aspect of the present invention comprises: a pedestal; An elastic member and a second elastic member are spaced apart at a predetermined interval; a first connecting member is disposed between the first elastic member and the second elastic member, and connects the front end of the first elastic member And a front end portion of the second elastic member; a second connecting member disposed between the first elastic member and the second elastic member, and connecting the rear end portion of the first elastic member and the second elastic member An end portion; a third connecting member disposed opposite to the first connecting member disposed on the first elastic member; and a contactor connected to the first elastic member by the third connecting member The front end portion protrudes from the opposite side of the third connecting member, wherein the rear end edge of the third connecting member is disposed rearward of the rear edge of the first connecting member.

An electrical connection device according to an aspect of the present invention includes: the probe that is in contact with the subject; and a circuit substrate that supports the probe in a cantilever beam.

As described above, the present invention can provide a probe with high durability and An electrical connection device using this probe.

1‧‧‧Electrical connection device

2‧‧‧Subject

3‧‧‧Electrode

4‧‧‧Line substrate

4a‧‧‧ Opening

5‧‧‧ probe

6‧‧‧Connected land

7‧‧‧Tester pad

8‧‧‧ pedestal

9‧‧‧Contactor

10‧‧‧First elastic member

11‧‧‧Second elastic member

12‧‧‧First connecting member

13‧‧‧Second connection member

14‧‧‧ Third connecting member

15‧‧‧s

16‧‧‧Needle

P1‧‧‧ position

P2‧‧‧ position

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a bottom plan view showing an electrical connecting device of an embodiment of the present invention.

Figure 2 is a partial cross-sectional view showing an electrical connecting device in accordance with an embodiment of the present invention.

Figure 3 is a perspective view showing a probe relating to an embodiment of the present invention.

Figure 4 is a side elevational view showing the front end of the control probe.

Figure 5 is a side elevational view showing the front end of the control probe.

Fig. 6 is a view showing the acting stress at a position where the probe provided in the embodiment of the present invention and the collating probe are disposed at the end edge of the first connecting member of the first elastic member.

Fig. 7 is a view showing the acting stress at a position where the probe and the collating probe of the embodiment of the present invention are disposed at the end edge of the first connecting member of the first elastic member.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred modes for carrying out the invention will be described with reference to the accompanying drawings. However, the invention is not limited to the following embodiments. Furthermore, for the sake of brevity of description, the following description and drawings will be simplified as appropriate. In the following description, the front-rear direction, the left-right direction, and the vertical direction are defined for clarity of explanation, but are appropriately changed depending on the usage mode.

First, the configuration of the probe and the electrical connection device of the present embodiment will be described. As shown in FIG. 1 and FIG. 2, the electrical connection device 1 is a plurality of electrodes 3 and a tester (not shown) included in the subject 2 such as a semiconductor device for the power supply test of the subject 2 ( Tester) used in electrically connected devices.

Hereinafter, for the sake of easy understanding, the subject 2 is set to have a plurality of electrodes 3 in two rows. However, in the present invention, it is also possible to apply a device and a probe for a plurality of electrodes, such as a test object provided on each side of a rectangle, and a plurality of test objects arranged in a matrix of electrodes.

As shown in FIG. 1 and FIG. 2, the electrical connecting device 1 includes a disk-shaped circuit substrate 4 made of an electrically insulating material, and a plurality of probes 5 connected to the lower surface of the circuit substrate, that is, Manufactured from the probe card.

As shown in FIG. 1, the circuit board 4 is an electrically insulating substrate. The circuit board 4 has an opening 4a larger than the detection point of the subject 2 at the center. Further, the circuit substrate 4 has a plurality of connection pads 6 corresponding to the probes 5, respectively, and is disposed at a lower surface of the periphery of the openings 4a. In addition, the circuit substrate 4 has a plurality of tester pads 7 electrically connected to the tester at a peripheral portion of the upper surface.

As shown in FIGS. 1 and 2, the opening 4a penetrates the wiring board 4 in the thickness direction. In FIGS. 1 and 2, the opening 4a has a rectangular shape in which a plurality of electrodes 3 are arranged in two rows. However, actually, the shape of the opening 4a is based on the electrode 3 The configuration state and the arrangement of the probes corresponding thereto are determined. Alternatively, the opening 4a may not be provided.

The connection pad 6 is formed on the circuit substrate 4 as shown in FIGS. 1 and 2 . One part of the underlying surface pattern. The connection pad 6 is arranged in two rows with the openings 4a in between. The land 6 on the opposite side of the opening 4a extends from the side of the opening 4a toward the opposite sides of each other.

The tester pad 7 is as shown in FIG. 1 on the periphery of the circuit substrate 4 The department is configured in a multi-circle type. The tester pad 7 corresponds to the probe 5 and the connection pad 6 and is electrically connected to the corresponding connection pad 6 by an internal circuit (not shown) of the circuit substrate 4. The tester pad 7 is electrically connected to the tester during testing.

As shown in FIG. 2 and FIG. 3, the probe 5 includes a pedestal 8, a contactor 9, The first elastic member 10, the second elastic member 11, the first connecting member 12, the second connecting member 13, and the third connecting member 14. These components are composed of a conductive material. The probe 5 is connected to the connection pad 6 by a pedestal 8.

The contactor 9 is in contact with the electrode 3 of the subject 2 as shown in FIG. The contactor 9 includes a seat portion 15 and a needle tip portion 16 and is coupled to the first elastic member 10 by a third connecting member 14.

The seat portion 15 is connected to the first elastic structure as shown in FIGS. 2 and 3. The lower surface of the front end of the piece 10. The tip portion 16 is coupled to the lower surface of the seat portion 15. Thereby, the contactor 9 of the present embodiment is formed in the shape of a protruding electrode that protrudes downward from the third connecting member 14.

The tip portion 16 has a shape such as a pyramid shape as shown in FIG. but In other words, the lower end of the electrode 3 pressed against the subject 2 is sharp, in other words, it may have another shape such as a conical shape as long as the outer surface has a tapered shape toward the lower end.

The first elastic member 10 is a long strip as shown in FIGS. 2 and 3 . Pieces. Furthermore, the second elastic member 11 is also an elongated plate member. That is, the first elastic member 10 and the second elastic member 11 are leaf springs. First elastic member 10 and second bomb The sexual member 11 is an arm that extends in the front-rear direction. Further, the front and rear directions in FIGS. 2 and 3 are the longitudinal directions of the first elastic member 10 and the second elastic member 11. The first elastic member 10 and the second elastic member 11 are disposed vertically apart from each other and extend in parallel.

The first elastic member 10 and the second elastic member 11 of the embodiment are The thickness dimensions (height dimensions) and width dimensions are equal. Moreover, the length dimension of the first elastic member 10 is longer than the length dimension of the second elastic member. Further, the thickness dimension is represented by the dimension in the upper and lower directions of FIGS. 2 and 3, and the width dimension is represented by the vertical direction of the paper surface of FIG. 2 and the horizontal direction of FIG. 3, and the length dimension is shown in FIGS. 2 and 3. The size of the front and rear directions is indicated.

Here, as shown in FIG. 2, the first elastic member 10 in the front-rear direction Thereafter, the end edge and the rear edge of the second elastic member 11 are disposed at equal positions. As a result, the front end edge of the first elastic member 10 protrudes forward more than the front end edge of the second elastic member 11. However, the respective sizes of the first elastic member 10 and the second elastic member 11 can be appropriately set as long as they are elastically deformable.

The first connecting member 12 is connected to the first bomb as shown in FIG. 2 and FIG. The front end of the sexual member 10 and the front end of the second connecting member 11. That is, the lower surface of the first connecting member 12 is coupled to the upper surface of the front end portion of the first elastic member 10. Furthermore, the upper surface of the first connecting member 12 is connected to the lower surface of the front end portion of the second elastic member 11.

The first connecting member 12 of the embodiment has a predetermined length in the front-rear direction degree. The front end portion of the first connecting member 12 is disposed at a position between the front end portion of the first elastic member 10 and the front end portion of the second elastic member 11 in the front-rear direction. That is, the front end portion of the first connecting member 12 is disposed rearward of the front end portion of the first elastic member 10 and before the front end portion of the second elastic member 11.

The second connecting member 13 is connected to the first bomb as shown in FIGS. 2 and 3 The rear end of the structural member 10 and the rear end of the second elastic member 11. That is, the lower surface of the second connecting member 13 is connected to the upper surface of the rear end portion of the first elastic member 10. Furthermore, the upper surface of the second connecting member 13 is connected to the lower surface of the rear end portion of the second elastic member 11.

The second connecting member 13 of the present embodiment has a predetermined length in the front-rear direction degree. In the front-rear direction, the rear end edge of the second connecting member 13 is disposed at a position approximately equal to the rear edge of the first elastic member 10 and the second elastic member 11.

The first connecting member 12 and the second connecting member 13 are formed to have, for example, There is a rectangular planar shape having a width dimension approximately equal to the width dimension of the first elastic member 10. Furthermore, the first connecting member 12 and the second connecting member 13 have the same height dimension (ie, thickness dimension). Thereby, the first elastic member 10, the second elastic member 11, the first connecting member 12, and the second connecting member 13 are formed as an elastically deformable parallel link. That is, the first elastic member 10, the second elastic member 11, the first connecting member 12, and the second connecting member 13 constitute a cantilever of a double-arm structure. Then, at the time of excessive driving, the first elastic member 10 and the second elastic member 11 are maintained in an approximately parallel state to be elastically deformed.

The third connecting member 14 is as shown in FIG. 2 and FIG. 3, and the contactor 9 is connected. It is connected to the lower surface of the front end of the first elastic member 10. That is, the lower surface of the third connecting member 14 is connected to the upper surface of the seat portion 15 of the contactor 9. Furthermore, the upper surface of the third connecting member 14 is connected to the lower surface of the front end portion of the first elastic member 10. The third connecting member 14 is formed to be longer than the first connecting member 12.

Here, the third connecting member 14 is formed to have, for example, a first elasticity The width dimension of the member 10 is approximately equal to the planar shape of the width dimension of the rectangle. Moreover, the third connecting member 14 has a predetermined length in the front-rear direction. In detail, the front end edge of the third connecting member 14 protrudes forward from the front edge of the first elastic member 10. Further, the rear end edge of the third connecting member 14 protrudes rearward from the rear end edge of the first connecting member 12.

In other words, the third connecting member 14 is from below (ie, from the contactor 9) The side cover is located at a position P1 at which the end edge is disposed after the first connecting member 12 of the first elastic member 10. Therefore, the contactor 9 of the probe 5 is in contact with the electricity of the subject 2 In the pole 3, when the front end of the probe 5 is raised upward due to excessive driving, stress concentration does not occur at the position P1 of the first elastic member 10, so that the position P1 acting on the first elastic member 10 can be lowered. stress.

Moreover, the third connecting member 14 is also located at the first cover from below. The position P2 at which the front end edge of the first connecting member 12 of the elastic member 10 is disposed. Therefore, therefore, the contactor 9 of the probe 5 is in contact with the electrode 3 of the subject 2, and further, when the front end of the probe 5 is raised upward due to excessive driving, the position P2 at the first elastic member 10 does not occur. Stress concentration is generated, and thus the stress acting on the position P2 of the first elastic member 10 can be reduced.

According to this, the durability of the first elastic member 10 can be improved, and even It is enough to improve the durability of the probe 5.

The rear end of such a probe 5 is as shown in FIG. 2, and is supported by the pedestal 8 Electrically connected to the connection pad 6. That is, the upper surface of the rear end portion of the second elastic member 11 is electrically connected to the connection pad 6 by the pedestal 8. Thereby, the probe 5 is supported by the circuit board 4 in a cantilever beam type.

Incidentally, the probe 5 can perform photoresist by a plurality of repetitions. The photolithography technique of exposure and etching and the plating technique of plating a conductive material on the etching are integrally formed. As the conductive material, for example, nickel can be used.

Using the electrical connecting device 1 to inspect the following subject 2 Measurement. First, pressing, the lower end of the contactor 9 is in contact with the electrode 3 of the subject 2, and then the detection signal outputted from the tester is input to the probe 5 through the tester pad 7 and the connection pad 6 and the like, and then passed. The contactor 9 is input to the electrode 3 of the subject 2 . On the other hand, the response signal output from the electrode 3 of the subject 2 is input to the probe 5 through the contactor 9, and is output to the tester through the connection pad 6 and the tester pad 7 or the like.

At this time, although with the over-exploitation, there is an upward force applied to the exploration. As described above, since the third connecting member 14 of the probe 5 covers the position P1 of the first elastic member 10 from below, the stress acting on the position P1 of the first elastic member 10 can be reduced, and the probe can be lifted. 5 durability.

Next, the first elastic member acting on the probe 5 of the present embodiment The effect of reducing the stress of P1 at position 10 is verified. As a comparison, it is assumed that the rear edge of the third connecting member 14 of the probe A shown in FIG. 4 is disposed forward of the rear edge of the first connecting member 12, and the third connecting member 14 of the probe B shown in FIG. Thereafter, the end edge is disposed at a position approximately equal to the rear edge of the first connecting member 12 in the front-rear direction. 6 and 7 show simulation results of stress applied to the probe, probes A and B of the present embodiment.

First, FIG. 6 shows the first elastic member 10 acting on each probe in the case where the probe 5, the probes A and B of the present embodiment are formed using a Young's modulus of 16500 kgf/mm ² . The stress at position P1 (see Figs. 2, 4, and 5). As shown in Fig. 6, the stress at the position P1 of the first elastic member 10 acting on the probes 5 of the present embodiment is higher than the stress at the position P1 of the first elastic member 10 acting on the probes A and B. Reduced, this stress can be reduced by about 23%.

Next, FIG. 7 shows the first elastic member 10 acting on each probe in the case where the probe 5, the probes A and B of the present embodiment are formed using a material having a Young's modulus of 11,200 kgf/mm ² . The stress at position P1 (see Figs. 2, 4, and 5). As shown in Fig. 7, the stress at the position P1 of the first elastic member 10 acting on the probes 5 of the present embodiment is higher than the stress at the position P1 of the first elastic member 10 acting on the probes A and B. Reduced, this stress can be reduced by about 23%.

Above, although the probe and the electrical connector are described with respect to the present invention. The embodiment is not limited to the above, and may be appropriately modified without departing from the spirit of the invention. For example, the probe of the above embodiment includes the first elastic member 10 and the second elastic member 11, but the number of the elastic members is not particularly limited as long as it is plural.

This application claims to be based on the application filed on July 27, 2012. The priority of the Japanese application No. 2012-166539 is hereby incorporated by reference.

2‧‧‧Subject

3‧‧‧Electrode

4‧‧‧Line substrate

4a‧‧‧ Opening

5‧‧‧ probe

6‧‧‧Connected land

8‧‧‧ pedestal

9‧‧‧Contactor

10‧‧‧First elastic member

11‧‧‧Second elastic member

12‧‧‧First connecting member

13‧‧‧Second connection member

14‧‧‧ Third connecting member

15‧‧‧s

16‧‧‧Needle

P1‧‧‧ position

P2‧‧‧ position

Claims (2)

A probe comprising: a pedestal; a first elastic member and a second elastic member spaced apart at a predetermined interval; a first connecting member disposed between the first elastic member and the second elastic member And connecting the front end portion of the first elastic member and the front end portion of the second elastic member; a second connecting member disposed between the first elastic member and the second elastic member to connect the first elastic a rear end portion of the member and a rear end portion of the second elastic member; a third connecting member disposed opposite to the first connecting member disposed on the first elastic member; and a contactor by the third The connecting member is connected to the front end portion of the first elastic member and protrudes on the opposite side of the third connecting member, wherein the rear end edge of the third connecting member is disposed rearward of the rear edge of the first connecting member. An electrical connecting device comprising: the probe according to claim 1 contacting a subject; and a circuit substrate supporting the probe in a cantilever beam.