TW201403749A - Method of setting conduct in through holes of substrate - Google Patents

Method of setting conduct in through holes of substrate Download PDF

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TW201403749A
TW201403749A TW101124631A TW101124631A TW201403749A TW 201403749 A TW201403749 A TW 201403749A TW 101124631 A TW101124631 A TW 101124631A TW 101124631 A TW101124631 A TW 101124631A TW 201403749 A TW201403749 A TW 201403749A
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Taiwan
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hole
ceramic substrate
substrate
conductor
holes
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TW101124631A
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Chinese (zh)
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Jing-Rong Tang
jia-wei Wei
Ruo-Yun Jiao
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Holy Stone Entpr Co Ltd
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Abstract

The present invention relates to a conduct installation method of through holes in the substrate which comprises a blank ceramic substrate with excellent dissipation effect prepared at first, one or more than one through holes molded on the ceramic substrate by a processing means to fill the conductor slurry into through holes of the ceramic substrate through process operation. The conductor slurry in the through holes of ceramic substrate can be molded and solidified in the through holes by sintering or solidifying process. Then coating can be proceeded in the surface of the ceramic surface to mold the coating layer. The predetermined layout can be proceeded on both the top and bottom surfaces of the coating layer on the ceramic substrate through yellow microfilm process to complete the conduct installation process on the through holes of ceramic substrate and achieves the aims of ceramic substrate having effect of excellent electric conductivities.

Description

基板的貫穿孔設置導體之方法 Method for providing a conductor through a through hole of a substrate

本發明係提供一種基板的貫穿孔設置導體之方法,尤指利用散熱型陶瓷基板設置貫穿孔後,成型導電體漿料、鍍膜層、並製作線路佈局之方法,以透過陶瓷基板製作上、下表面預設線路佈局導通,導電效果佳、小型化之陶瓷基板。 The present invention provides a method for providing a conductor through a through hole of a substrate, in particular, a method of forming a conductive paste, a coating layer, and a wiring layout by providing a through hole in a heat dissipation type ceramic substrate, and manufacturing the upper and lower layers through the ceramic substrate. The surface of the preset circuit layout is conductive, and the ceramic substrate with good electrical conductivity and miniaturization.

按,隨著電子/電氣產品的技術逐漸提升,各種無線訊號傳輸產品的普及、大行其道,相對的各種無線訊號傳輸設備如無線區域網路(Wireless LAN)、無線數據機(Wireless modem)的使用率也不斷提升,因此無線設備所使用的電路基板、要求也相對提高,如要求高頻、高功率及低損耗等特性,而對於電路基板的特性要求,必須製造符合其特性條件之電路基板,則以往的薄膜製程,係將電路基板置於真空環境中,經過特殊的金屬網罩以蒸鍍或濺鍍加工方式,再於電路基板表面形成電路,雖可製成細直的線路,濺鍍形成的電路厚薄不平均,但因線路較薄且含有氧化物或氮化物的雜質,更由於形成線路的塗料為顆粒狀,容易含帶有雜質,並在線路的較薄位置處具有較多的雜質,以致電傳導效率不佳,且散熱效果亦不理想。 According to the increasing technology of electronic/electrical products, the popularity of various wireless signal transmission products is prevalent, and the usage rates of various wireless signal transmission devices such as wireless LAN and wireless modem are relatively high. The number of circuit boards and requirements for wireless devices is also relatively high. For example, high-frequency, high-power, and low-loss characteristics are required. For circuit board characteristics, it is necessary to manufacture circuit boards that meet the characteristics of the circuit board. In the conventional thin film process, the circuit substrate is placed in a vacuum environment, and a special metal mesh cover is used for vapor deposition or sputtering processing, and then a circuit is formed on the surface of the circuit substrate, although a thin straight line can be formed and sputter formed. The thickness of the circuit is not uniform, but because the line is thin and contains oxide or nitride impurities, the coating forming the line is granular, easily contains impurities, and has more impurities at the thinner position of the line. The transmission efficiency is poor, and the heat dissipation effect is not satisfactory.

另有業者採用製造成本較低的厚膜製程,但製成線路的平整度不佳,無法符合高頻線路的要求;即有業者在電路基 板上鑽設許多貫穿孔,再於各貫穿孔進行濺鍍,利用真空濺鍍的方式,在電路基板的貫穿孔內形成金屬化後,再使用電鍍甜孔的方式,達成上下導通,然若鍍銅的厚度不足、孔洞太大無法配合時,容易發生孔洞填不滿而導致後續製程,產生上、下漏膠的現象,或者因電路基板上貫穿孔的孔徑太小,以致孔洞填孔時包空氣、形成氣孔,影響電傳導不良、產品信賴度降低等問題。 Another industry adopts a thick film process with lower manufacturing cost, but the flatness of the fabricated circuit is not good enough to meet the requirements of high frequency lines; A plurality of through holes are drilled in the plate, and then sputtered in each through hole, and metallization is formed in the through hole of the circuit substrate by vacuum sputtering, and then the plated sweet hole is used to achieve the upper and lower conduction. If the thickness of the copper plating is insufficient and the hole is too large to be matched, it may easily cause the hole to be filled and the subsequent process may occur, causing the phenomenon of the upper and lower leakage, or the hole diameter of the through hole on the circuit substrate is too small, so that the hole is filled when the hole is filled. Air, forming pores, affecting problems such as poor electrical conduction and reduced product reliability.

是以,要如何解決目前對於電路基板的製程中,因貫穿孔的填料加工作業造成線路導通不佳之缺失與困擾,且填料加工作業中易受到雜質、氣孔或氣泡的問題與麻煩,即為從事此行業者所亟欲改善之方向所在。 Therefore, how to solve the problem of the poor wiring conduction caused by the filler processing operation of the through hole in the current process of the circuit substrate, and the problem and trouble of being susceptible to impurities, pores or bubbles in the filling processing operation is to engage in The direction that the industry is eager to improve.

故,發明人有鑑於上述之問題與缺失,乃搜集相關資料,經由多方評估及考量,並以從事於此行業累積之多年經驗,經由不斷試作及修改,始設計出此種具有良好電性導通效果、體積小符合電子、電氣產品安裝應用之基板的貫穿孔設置導體之方法的發明專利誕生者。 Therefore, in view of the above-mentioned problems and deficiencies, the inventors have collected relevant information, evaluated and considered them through multiple parties, and through years of experience in the industry, through continuous trial and modification, they have designed such good electrical continuity. A patent for the invention of a method for setting a conductor in a through-hole of a substrate for an electronic or electrical product mounting application.

本發明之主要目的乃在於該基板的貫穿孔設置導體之方法,先取得具散熱效果的陶瓷基板,並利用加工手段在陶瓷基板上成型一個或一個以上之貫穿孔,再透過加工作業將導電體漿料填入陶瓷基板之貫穿孔內,且利用燒結或固化加工式,使導電體漿料成型、固定於貫穿孔內,即可於陶瓷基板 表面進行鍍膜加工、以成型鍍膜層,而經由黃光微影製程,於陶瓷基板表面製作表層及底層線路,以完成陶瓷基板的穿孔設置導電體作業,以供陶瓷基板具有良好電性導通之效果。 The main object of the present invention is to provide a conductor for the through hole of the substrate, first obtaining a ceramic substrate having a heat dissipation effect, and forming one or more through holes on the ceramic substrate by using a processing method, and then conducting the electrical conductor through the processing operation. The slurry is filled in the through hole of the ceramic substrate, and the conductive paste is molded and fixed in the through hole by the sintering or curing process, that is, the ceramic substrate can be The surface is subjected to a coating process to form a plating layer, and a surface layer and a bottom layer line are formed on the surface of the ceramic substrate through a yellow lithography process to complete the operation of the ceramic substrate by providing a conductive body for the ceramic substrate to have a good electrical conduction effect.

本發明之次要目的乃在於該基板上利用鑽孔、雷射加工、水刀加工或其他機械加工等方式,在基板上成型一個或一個以上貫穿孔,貫穿孔可為圓形、矩形、三角形、多邊形或者幾何形狀等,以供填注導電體漿料,導電體漿料係可由銀、銅或錫等材質製成,再利用厚膜印刷方式或灌注方式,將導電體漿料填入基板的各貫穿孔內。 A secondary object of the present invention is to form one or more through holes on the substrate by means of drilling, laser processing, water jet machining or other mechanical processing, and the through holes may be circular, rectangular or triangular. Polygon or geometry, etc., for filling the conductor paste, the conductor paste can be made of silver, copper or tin, and then filling the substrate with the conductive paste by thick film printing or filling. Within each through hole.

本發明之再一目的乃在於該基板於一個或一個以上貫穿孔內填入導電體漿料後,即可透過燒結(溫度係可介於400℃~1100℃)或固化方式(溫度係介於100℃~250℃),使導電體漿料成形於一個或一個以上貫穿孔內,再利用真空鍍膜或化學鍍膜之方式,使用蒸鍍、濺鍍或離子鍍的加工,於陶瓷基板上、下表面成型鍍膜層,即可透過黃光微影製程,製作陶瓷基板上、下表面之鍍膜層的預設線路佈局。 A further object of the present invention is that the substrate can be permeable to sintering (temperature system can be between 400 ° C and 1100 ° C) or curing mode after the conductor paste is filled in one or more through holes (the temperature system is between 100 ° C ~ 250 ° C), the conductive paste is formed in one or more through holes, and then by vacuum plating or electroless plating, using vapor deposition, sputtering or ion plating processing, on the ceramic substrate, under The surface forming coating layer can be used to make a predetermined line layout of the coating layer on the upper and lower surfaces of the ceramic substrate through the yellow lithography process.

為達成上述目的及功效,本發明所採用之技術手段及其構造,茲繪圖就本發明之較佳實施例詳加說明其特徵與功能如下,俾利完全瞭解。 In order to achieve the above objects and effects, the technical means and the configuration of the present invention will be described in detail with reference to the preferred embodiments of the present invention.

請參閱第一、二、三、四圖所示,係為本發明之製程流程圖、基板上成型貫穿孔之立體外觀圖、較佳實施例之側視剖面圖、另一實施例之側視剖面圖,由圖中可以清楚看出,本發明之基板的貫穿孔設置導體之方法,其步驟係為: Please refer to the first, second, third and fourth figures, which are a process flow diagram of the present invention, a three-dimensional appearance of a through-hole on a substrate, a side cross-sectional view of a preferred embodiment, and a side view of another embodiment. In the cross-sectional view, it can be clearly seen from the figure that the method of providing a conductor in the through hole of the substrate of the present invention is as follows:

(100)先取得空白之具散熱效果的陶瓷基板1。 (100) First, a ceramic substrate 1 having a blank heat dissipation effect is obtained.

(101)利用加工手段在陶瓷基板1上,形成一個或一個以上之成型貫穿孔10。 (101) One or more formed through-holes 10 are formed on the ceramic substrate 1 by means of processing means.

(102)再透過加工作業,將導電體漿料2填入陶瓷基板1之貫穿孔10內。 (102) The conductor paste 2 is filled into the through hole 10 of the ceramic substrate 1 by a processing operation.

(103)利用燒結或固化方式,將陶瓷基板1的貫穿孔10內之導電體漿料2,成型、固定於貫穿孔內。 (103) The conductive paste 2 in the through hole 10 of the ceramic substrate 1 is molded and fixed in the through hole by a sintering or curing method.

(104)在陶瓷基板1表面進行真空鍍膜或化學鍍膜的加工處理。 (104) A vacuum plating or a chemical plating process is performed on the surface of the ceramic substrate 1.

(105)經由黃光微影製程,於陶瓷基板1製作表層及底層之線路。 (105) A surface layer and a bottom layer are formed on the ceramic substrate 1 via a yellow light lithography process.

(106)完成陶瓷基板1的貫穿孔10設置導電體作業。 (106) The through hole 10 of the ceramic substrate 1 is completed to provide a conductor operation.

而陶瓷基板1上利用加工手段,成型一個或一個以上之貫穿孔10,係透過鑽孔、雷射加工、水刀加工或銑床銑刀加工或其他機械加工等方式,在陶瓷基板1上加工成型圓形孔、矩形孔、三角形孔、多邊形孔或幾何形狀孔等,各種形狀之貫穿孔10;且陶瓷基板1的一個或一個以上之貫穿孔10,係利用厚膜印刷或灌注方式,將導電體漿料2填入貫 穿孔10內,則可透過輔助工具3之方式,以厚膜印刷係利用網板印刷或鋼板印刷方式之網版32或刮刀33,將導電體漿料2填入貫穿孔10內,並可透過真空吸引器31輔助供導電漿料2進入貫穿孔10內,亦可直接透過網板印刷或鋼板印刷作業以網板32或刮刀33、不採用真空吸引器31的輔助,而使導電體漿料2順利填入貫穿孔10內;亦可利用點膠作業或針筒注射方式,透過針頭34將導電體漿料2填入陶瓷基板1的一個或一個以上貫穿孔10內,至於導電體漿料2係可為銀、銅或錫等金屬原料所製成;而在陶瓷基板1的一個或一個以上貫穿孔10內,填滿導電體漿料2,不致產生氣泡或氣孔,也不會有厚薄不一或不平均的現象,並供導電體漿料2在一個或一個以上貫穿孔成型、固定。 On the ceramic substrate 1, one or more through holes 10 are formed by processing means, and are formed on the ceramic substrate 1 by drilling, laser processing, water jet machining or milling cutter processing or other mechanical processing. a circular hole, a rectangular hole, a triangular hole, a polygonal hole or a geometric hole, etc., various shapes of the through hole 10; and one or more through holes 10 of the ceramic substrate 1 are printed by thick film printing or perfusion Body slurry 2 is filled in In the perforation 10, the electroconductive paste 2 can be filled into the through hole 10 by the screen printing or the screen printing type screen 32 or the scraper 33 by means of the auxiliary tool 3 through the thick film printing system. The vacuum aspirator 31 assists the conductive paste 2 to enter the through hole 10, and can also directly pass the screen printing or the steel plate printing operation with the mesh plate 32 or the scraper 33, without the assistance of the vacuum suction device 31, and the electric conductor paste. 2 is smoothly filled into the through hole 10; the conductive paste 2 may be filled into the one or more through holes 10 of the ceramic substrate 1 through the needle 34 by using a dispensing operation or a syringe injection method, as the conductive paste The 2 series may be made of a metal material such as silver, copper or tin; and in the one or more through holes 10 of the ceramic substrate 1, the conductor paste 2 is filled without causing bubbles or pores, and there is no thickness. There is a phenomenon of unevenness or unevenness, and the conductor paste 2 is molded and fixed in one or more through holes.

請參閱第五、六、七圖所示,係為本發明再一實施例之側視剖面圖、側視剖面圖、又一實施例之側視剖面圖,由圖中所示可以清楚看出,陶瓷基板1的一個或一個以上貫穿孔10內,填入導電體漿料2後,可以透過高溫燒結或固化加工之方式,將導電體漿料2成型、固定於貫穿孔10內,而高溫燒結的溫度可介於400℃~1100℃,且固化加工之溫度則介於100℃~250℃,並針對陶瓷基板1的成份為含有機材質或含無機材質,而將陶瓷基板1的貫穿孔10內導電體漿料2進行不同的成型、固定加工,若陶瓷基板1為含有機物之材質(如:酚醛樹脂等)所製成,即可利用 高溫燒結加工,將導電體漿料2成型於貫穿孔10內;若陶瓷基板1為含無機物之材質(如:玻璃纖維或氧化鋁、氮化鋁或氮化矽等)所製成,即可利用固化加工,供導電體漿料2成型於貫穿孔10內;若陶瓷基板1為金屬基板之材質(如:鋁基板或銅基板等)所製成,即可利用高溫燒結加工或固化加工方式,供導電體漿料2成型於貫穿孔10內。 Please refer to the fifth, sixth and seventh figures, which are side cross-sectional views, side cross-sectional views and side cross-sectional views of still another embodiment of the present invention, which can be clearly seen from the figure. After the conductor paste 2 is filled into one or more through holes 10 of the ceramic substrate 1, the conductor paste 2 can be molded and fixed in the through hole 10 by high-temperature sintering or solidification processing, and the temperature is high. The sintering temperature may be between 400 ° C and 1100 ° C, and the curing processing temperature is between 100 ° C and 250 ° C, and the ceramic substrate 1 is made of a machine material or an inorganic material, and the through hole of the ceramic substrate 1 is used. The inner conductor paste 2 is subjected to different molding and fixing processes, and the ceramic substrate 1 can be utilized if it is made of a material containing an organic material (for example, phenol resin). In the high-temperature sintering process, the conductor paste 2 is molded into the through hole 10; if the ceramic substrate 1 is made of an inorganic material (for example, glass fiber or alumina, aluminum nitride or tantalum nitride), The conductive paste 2 is molded into the through hole 10 by a curing process; if the ceramic substrate 1 is made of a metal substrate (for example, an aluminum substrate or a copper substrate), high-temperature sintering processing or curing processing can be utilized. The conductor paste 2 is molded into the through hole 10.

且導電體漿料2在貫穿孔10內成型、固定,係可供導電體漿料2略溢出貫穿孔10二外側形成弧凸狀,而形成略凸出陶瓷基板1表面;或者供導電體漿料2在貫穿孔10中填滿,二側與陶瓷基板1表面呈平整狀;亦可供導電體漿料2在貫穿孔10內呈略陷入的凹弧狀,二側為略低陷入陶瓷基板1表面,而於陶瓷基板1上、下表面進行鍍膜加工時,則供鍍膜層4可以與陶瓷基板1的貫穿孔10處,各種形式之導電體漿料2呈電性接觸、導通。 And the conductive paste 2 is formed and fixed in the through hole 10, so that the conductive paste 2 can be slightly overflowed to form an arc convex shape on the outer side of the through hole 10, and the surface of the ceramic substrate 1 is slightly protruded; or the conductive body slurry is provided. The material 2 is filled in the through hole 10, and the two sides are flat with the surface of the ceramic substrate 1. The conductive paste 2 can also be slightly concave in the through hole 10, and the two sides are slightly lower into the ceramic substrate. When the surface of the ceramic substrate 1 is subjected to a plating process on the surface of the ceramic substrate 1, the plating film layer 4 can be electrically and electrically connected to the conductive paste 2 of various forms at the through hole 10 of the ceramic substrate 1.

並於陶瓷基板1的一個或一個以上貫穿孔10內,成型導電漿料2後,則於陶瓷基板1上、下表面,透過真空鍍膜或化學鍍膜方式,可利用蒸鍍、濺鍍或離子鍍等加工方式,在陶瓷基板1的上、下表面,進行鍍膜作業,以成型為鍍膜層4之後,並透過黃光微影作業,在陶瓷基板1的上、下表面之鍍膜層4,製作、成型預設線路佈局,而陶瓷基板1的上、下表面的鍍膜層4之預設線路佈局,即可透過一個或一個以上貫穿孔10內的導電體漿料2,形成電性導通;因陶 瓷基板1的上、下表面都是呈平面式的加工處理,成型導電體漿料2與鍍膜層4,可供陶瓷基板1保持薄、小體積的特色,但陶瓷基板1的一個或一個以上貫穿孔10,內部係填滿導電體漿料2,而具有良好的導電效果,供陶瓷基板1上、下表面鍍膜層4成型之預設線路佈局,透過貫穿孔10內的導電體漿料2達到良好的電性導通作用。 After forming the conductive paste 2 in one or more through holes 10 of the ceramic substrate 1, the upper and lower surfaces of the ceramic substrate 1 are subjected to vacuum deposition or electroless plating, and vapor deposition, sputtering or ion plating may be used. In the processing method, a coating operation is performed on the upper and lower surfaces of the ceramic substrate 1 to form a coating layer 4, and then a yellow lithography operation is performed to form and form a coating layer 4 on the upper and lower surfaces of the ceramic substrate 1. The circuit layout is arranged, and the predetermined circuit layout of the coating layer 4 on the upper and lower surfaces of the ceramic substrate 1 can be electrically conductive through the conductive paste 2 in one or more through holes 10; The upper and lower surfaces of the ceramic substrate 1 are processed in a planar manner, and the conductive paste 2 and the plating layer 4 are molded to maintain the thinness and small volume of the ceramic substrate 1. However, one or more ceramic substrates 1 are provided. The through hole 10 is filled with the electric conductor paste 2, and has a good electric conductive effect. The predetermined circuit layout for forming the upper and lower surface coating layers 4 of the ceramic substrate 1 passes through the electric conductor paste 2 in the through hole 10. A good electrical conduction is achieved.

是以,以上所述僅為本發明之較佳實施例而已,非因此侷限本發明之專利範圍,本發明之基板的貫穿孔設置導體之方法,係利用陶瓷基板1上加工成型一個或一個以上之貫穿孔10,並於貫穿孔10內利用加工作業,填入導電體漿料2,再透過高溫燒結或固化方式,將導電體漿料2成型、固定於貫穿孔10內,且於陶瓷基板1上、下表面,進行鍍膜加工,成型鍍膜層4,並透過黃光微影製程,製作陶瓷基板1的上、下表面之預設線路佈局,則利用陶瓷基板1的貫穿孔10內填入之導電體漿料2,供上、下表面鍍膜層4之預設線路佈局形成電性導通,俾可達到成型體積小、導電效果佳的陶瓷基板1之目的,而透過陶瓷基板1上一個或一個以上之貫穿孔10,內部填滿導電體漿料2,可與陶瓷基板1上、下表面的鍍膜層4、形成良好電性接觸,以供陶瓷基板1上、下表面的預設線路佈局,達到良好的電性導通,提升陶瓷基板1的線路佈局應用之功效,故舉凡可達成前述效果之結構、裝置皆應受本發明所涵蓋,此種簡易修飾及等效結 構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Therefore, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The method of arranging a conductor in a through hole of a substrate of the present invention is one or more processes formed on the ceramic substrate 1. In the through hole 10, the conductive paste 2 is filled in the through hole 10 by a processing operation, and the conductive paste 2 is molded and fixed in the through hole 10 by a high-temperature sintering or curing method, and is formed on the ceramic substrate. 1 The upper and lower surfaces are subjected to coating processing, and the plating layer 4 is formed, and the predetermined wiring layout of the upper and lower surfaces of the ceramic substrate 1 is formed through the yellow lithography process, and the conductive holes filled in the through holes 10 of the ceramic substrate 1 are used. The body slurry 2 is electrically connected to the predetermined circuit layout of the upper and lower surface coating layers 4, and can achieve the purpose of forming the ceramic substrate 1 having a small volume and good electrical conductivity, and transmitting one or more through the ceramic substrate 1. The through hole 10 is internally filled with the conductor paste 2, and can form good electrical contact with the coating layer 4 on the upper and lower surfaces of the ceramic substrate 1 for the predetermined circuit layout of the upper and lower surfaces of the ceramic substrate 1. A good electrical conduction is achieved, and the effect of the circuit layout application of the ceramic substrate 1 is improved. Therefore, any structure and device that can achieve the aforementioned effects are covered by the present invention, and such simple modification and equivalent knot The structural changes are all included in the scope of the patent of the present invention and are combined with Chen Ming.

上述本發明之基板的貫穿孔設置導體之方法,於實際應用、實施時,為可具有下列各項優點,如: The method for arranging a conductor in the through hole of the substrate of the present invention has the following advantages in practical application and implementation, such as:

(一)陶瓷基板1上利用鑽孔、雷射加工、水刀加工或銑床銑刀加工或其他機械加工方式等,成型一個或一個以上貫穿孔10,並於貫穿孔10內利用厚膜印刷加工或灌注方式,填滿導電體漿料2,可供陶瓷基板1上、下表面的預設電路佈局,達到良好電性導通。 (1) One or more through holes 10 are formed on the ceramic substrate 1 by drilling, laser processing, water jet machining or milling cutter milling or other mechanical processing methods, and processed by thick film printing in the through hole 10 Or filling mode, filling the electrical conductor paste 2, the predetermined circuit layout of the upper and lower surfaces of the ceramic substrate 1 can be achieved, and good electrical conduction is achieved.

(二)陶瓷基板1上成型一個或一個以上之貫穿孔10,在透過加工填入導電體漿料2後,可以利用導電體漿料2完全填滿貫穿孔10,不會產生氣孔或氣泡現象、亦不致形成厚薄不一的情況,即可供導電體漿料2在貫穿孔10內形成良好的電性導通作用。 (2) One or more through holes 10 are formed on the ceramic substrate 1. After the conductive paste 2 is filled through the processing, the through hole 10 can be completely filled by the conductive paste 2 without causing pores or bubbles. Moreover, the case where the thickness is not uniform is formed, that is, the conductive paste 2 can be formed into a good electrical conduction function in the through hole 10.

故,本發明為主要針對陶瓷基板的電性導通進行設計,係利用陶瓷基板上加工成型一個或一個以上之貫穿孔,並於貫穿孔內透過厚膜印刷或灌注方式,填滿導電體漿料,且待導電體漿料成型、固定於陶瓷基板的貫穿孔內,再於陶瓷基板的上、下表面利用鍍膜加工,成型鍍膜層,即利用黃光微影製程在陶瓷基板上、下表面成型預設線路佈局,而可達到陶瓷基板的上、下表面預設線路佈局,透過貫穿孔內的導電體漿料形成良好的電性導通為主要保護重點,並可減少陶瓷基板的體積厚度,乃僅使具有導電性佳、產品小型化之優勢 ,且可符合現代化電子、電氣產品,輕、薄、短、小的設計理念與訴求,惟,以上所述僅為本發明之較佳實施例而已,非因此即侷限本發明之專利範圍,故舉凡運用本發明說明書及圖式內容所為之簡易修飾及等效結構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Therefore, the present invention is mainly designed for electrical conduction of a ceramic substrate, wherein one or more through holes are formed by using a ceramic substrate, and the conductive paste is filled through a thick film printing or infusion method in the through hole. And the conductive paste is molded and fixed in the through hole of the ceramic substrate, and then the upper and lower surfaces of the ceramic substrate are processed by coating, and the coating layer is formed, that is, the yellow light lithography process is used to form a preset on the ceramic substrate and the lower surface. The layout of the circuit can reach the preset circuit layout of the upper and lower surfaces of the ceramic substrate, and the formation of good electrical conduction through the conductive paste in the through hole is the main protection focus, and the volume thickness of the ceramic substrate can be reduced, Excellent conductivity and miniaturization And can meet the modern electronic and electrical products, light, thin, short, and small design concepts and demands, but the above is only the preferred embodiment of the present invention, and thus does not limit the patent scope of the present invention. The simple modifications and equivalent structural changes that are made by using the specification and the drawings of the present invention are all included in the scope of the patent of the present invention and are combined with Chen Ming.

綜上所述,本發明上述之基板的貫穿孔設置導體之方法於實施、製造時,為確實能達到其功效及目的,故本發明誠為一實用性優異之研發,為符合發明專利之申請要件,爰依法提出申請,盼 審委早日賜准本案,以保障發明人之辛苦研發、創設,倘若 鈞局審委有任何稽疑,請不吝來函指示,發明人定當竭力配合,實感德便。 In summary, the method for arranging a conductor in the through hole of the substrate of the present invention can achieve its efficacy and purpose during implementation and manufacture. Therefore, the present invention is an excellent application for research and development, and is an application for the invention patent. The requirements, 提出 提出 提出 提出 提出 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 盼 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审 审

1‧‧‧陶瓷基板 1‧‧‧ceramic substrate

10‧‧‧貫穿孔 10‧‧‧through holes

2‧‧‧導電體漿料 2‧‧‧Electrical fluid paste

3‧‧‧輔助工具 3‧‧‧Accessories

31‧‧‧真空吸引器 31‧‧‧Vacuum suction device

32‧‧‧網板 32‧‧‧ stencil

33‧‧‧刮刀 33‧‧‧ scraper

34‧‧‧針頭 34‧‧‧ needle

4‧‧‧鍍膜層 4‧‧‧ coating layer

第一圖 係為本發明之製程流程圖。 The first figure is a process flow chart of the present invention.

第二圖 係為本發明基板上成型貫穿孔之立體外觀圖。 The second figure is a perspective view of the through-hole formed on the substrate of the present invention.

第三圖 係為本發明較佳實施例之側視剖面圖。 The third drawing is a side cross-sectional view of a preferred embodiment of the invention.

第四圖 係為本發明另一實施例之側視剖面圖。 Figure 4 is a side cross-sectional view showing another embodiment of the present invention.

第五圖 係為本發明再一實施例之側視剖面圖。 Figure 5 is a side cross-sectional view showing still another embodiment of the present invention.

第六圖 係為本發明之側視剖面圖。 Figure 6 is a side cross-sectional view of the present invention.

第七圖 係為本發明又一實施例之側視剖面圖。 Figure 7 is a side cross-sectional view showing still another embodiment of the present invention.

Claims (10)

一種基板的貫穿孔設置導體之方法,其步驟:(a)取得陶瓷基板;(b)利用加工手段在陶瓷基板上成型貫穿孔;(c)透過加工作業將導電體漿料填入陶瓷基板之貫穿孔內;(d)將陶瓷基板的貫穿孔內之導電體漿料,成型、固定於貫穿孔內;(e)在陶瓷基板表面進行鍍膜;(f)經由黃光微影製程,於陶瓷基板製作表層及底層線路;(g)完成陶瓷基板的貫穿孔設置導電體作業。 A method for providing a conductor through a through hole of a substrate, wherein: (a) obtaining a ceramic substrate; (b) forming a through hole on the ceramic substrate by using a processing means; (c) filling the conductive paste into the ceramic substrate through a processing operation; (d) forming and fixing the conductor paste in the through hole of the ceramic substrate in the through hole; (e) coating the surface of the ceramic substrate; (f) fabricating the ceramic substrate by a yellow lithography process The surface layer and the bottom layer line; (g) completing the operation of providing a conductor for the through hole of the ceramic substrate. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(a)之陶瓷基板係為具散熱效果之陶瓷板材。 The method of providing a conductor through a through hole of a substrate according to claim 1, wherein the ceramic substrate of the step (a) is a ceramic plate having a heat dissipation effect. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(b)之加工手段係為鑽孔、雷射加工、水刀加工或銑床、銑刀加工或機械加工作業;且於陶瓷基板上成型一個或一個以上之貫穿孔。 The method for setting a conductor through a through hole of a substrate according to claim 1, wherein the processing method of the step (b) is drilling, laser processing, water jet machining or milling, milling machining or machining; And forming one or more through holes on the ceramic substrate. 如申請專利範圍第3項所述基板的貫穿孔設置導體之方法,其中該陶瓷基板上成型一個或一個以上之貫穿孔,而貫穿孔係為圓形孔、矩形孔、三角形孔、多邊形孔或幾何形狀孔。 The method of providing a conductor through a through hole of a substrate according to claim 3, wherein one or more through holes are formed on the ceramic substrate, and the through holes are circular holes, rectangular holes, triangular holes, polygonal holes or Geometric holes. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法, 其中該步驟(c)之加工作業係利用厚膜印刷方式之網板印刷作業或鋼板印刷作業,將導電體漿料印入陶瓷基板的貫穿孔內,並於貫穿孔處施以真空吸引作業,輔助導電漿料進入貫穿孔內。 A method of providing a conductor in a through hole of a substrate according to claim 1 of the patent application, The processing operation in the step (c) is to print the conductive paste into the through hole of the ceramic substrate by a screen printing operation or a steel plate printing operation of a thick film printing method, and apply a vacuum suction operation to the through hole. The auxiliary conductive paste enters the through hole. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(c)之加工作業係利用厚膜印刷方式之網板印刷作業或鋼板印刷作業,將導電體漿料印入陶瓷基板的貫穿孔內。 The method of providing a conductor through a through hole of a substrate according to claim 1, wherein the processing operation of the step (c) is to print the conductive paste by a screen printing operation or a steel plate printing operation of a thick film printing method. Inside the through hole of the ceramic substrate. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(c)之加工作業係利用灌注方式,透過點膠加工或針筒注射加工,將導電體漿料灌注入陶瓷基板的貫穿孔內。 The method of placing a conductor through a through hole of a substrate according to claim 1, wherein the processing operation of the step (c) is performed by injecting a potting method or a syringe injection process to inject a conductive paste into the ceramic. Inside the through hole of the substrate. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(d)之陶瓷基板的貫穿孔內之導電體漿料,係透過高溫燒結方式或固化方式,將導電體漿料成型、固定於貫穿孔內;而高溫燒結的溫度係介於400℃~1100℃;固化加工之溫度則介於100℃~250℃。 The method of providing a conductor through a through hole of a substrate according to the first aspect of the invention, wherein the conductive paste in the through hole of the ceramic substrate in the step (d) is passed through a high temperature sintering method or a curing method, and the conductive paste is used. The material is formed and fixed in the through hole; the temperature of the high temperature sintering is between 400 ° C and 1100 ° C; and the curing processing temperature is between 100 ° C and 250 ° C. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法,其中該步驟(e)之陶瓷基板係透過真空鍍膜、化學鍍膜、蒸鍍或濺鍍或離子鍍之製程加工作業,進行陶瓷基板上、下表面的鍍膜加工,成型鍍膜層。 The method for providing a conductor through a through hole of a substrate according to claim 1, wherein the ceramic substrate of the step (e) is subjected to a vacuum coating, an electroless plating, an evaporation coating or a sputtering or ion plating process to perform ceramic processing. Coating on the upper and lower surfaces of the substrate, forming a coating layer. 如申請專利範圍第1項所述基板的貫穿孔設置導體之方法 ,其中該步驟(c)或(d)之導電體漿料,係銀、銅或錫製成之漿料。 Method for providing a conductor in a through hole of a substrate according to claim 1 of the patent application The conductive paste of the step (c) or (d) is a slurry made of silver, copper or tin.
TW101124631A 2012-07-09 2012-07-09 Method of setting conduct in through holes of substrate TW201403749A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610601B (en) * 2016-03-08 2018-01-01 訊芯電子科技(中山)有限公司 A double sided copperizing ceramic circuit board and manufacturing method thereof
CN109890135A (en) * 2019-03-20 2019-06-14 上海矽安光电科技有限公司 A kind of metallized ceramic through-hole substrate and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI610601B (en) * 2016-03-08 2018-01-01 訊芯電子科技(中山)有限公司 A double sided copperizing ceramic circuit board and manufacturing method thereof
CN109890135A (en) * 2019-03-20 2019-06-14 上海矽安光电科技有限公司 A kind of metallized ceramic through-hole substrate and preparation method thereof

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