TW201349283A - Manufacturing method of pixel structure of field emission display - Google Patents

Abstract

A manufacturing method of a pixel structure of a field emission display is provided, which includes following steps. A first electrode is covered by a first insulating layer. A second electrode is formed on the first insulating layer. A plurality of grains are formed on the first insulating layer and the second electrode. A first metal layer is formed on the first insulating layer and the second electrode to cover the grains. The grains and the first metal layer which covers the grains are removed at the same time so as to form a patterned metal layer. A plurality of openings are formed in the first insulating layer by using the patterned metal layer as a mask. A second metal layer is formed on the patterned metal layer and on the bottom of the openings. A third metal layer is formed on the second metal layer and the third metal layer forms a plurality of electron emitters in the openings. The third metal layer which disposed above the electron emitters is removed so as to expose the electron emitters and the second metal layer.

Description

Method for manufacturing pixel structure of field emission display

The present invention relates to a method of fabricating a pixel structure, and more particularly to a method of fabricating a pixel structure of a field emission display.

With the rapid development of multimedia, users are increasingly demanding peripheral sound and light equipment. In the past, the cathode ray tube or the cathode tube type (CRT) type display, which is commonly used in the era of light, thin, short, and small, has become increasingly indispensable. Therefore, in recent years, many flat panel display technologies have been developed, such as liquid crystal display (LCD), plasma display panel (PDP), and field emission display (Field Emission Display). , FED).

In each of the above displays, since the field emission display has a short optical response time, image sticking does not occur. In addition, field emission displays have the advantages of thin thickness, light weight, wide viewing angle, high brightness, large operating temperature range and energy saving. Therefore, field emission displays are considered one of the most promising flat panel display technologies. However, the manufacturing process of the pixel structure of the field emission display at this stage is relatively complicated. Therefore, the increase of the processing time and the increase of the process cost are not conducive to a large number of applications in the market.

The invention provides a method for manufacturing a pixel structure of a field emission display, which has low process cost.

The present invention provides a method of fabricating a pixel structure of a field emission display. First, a first electrode is formed on a substrate. A first insulating layer is formed on the substrate, wherein the first insulating layer covers the first electrode. A second electrode is formed on the first insulating layer. A plurality of particles are formed on the first insulating layer and the second electrode. A first metal layer is formed to cover the particles. The particles are removed while the first metal layer on the surface of the particles is removed such that the first metal layer forms a patterned metal layer. A plurality of openings are formed in the first insulating layer using the patterned metal layer as a mask. A second metal layer is formed on the patterned metal layer and at the bottom of the opening, wherein the second metal layer is in contact with the second electrode. A third metal layer is formed on the second metal layer, and the third metal layer forms a plurality of electron emitters in the opening. A third metal layer over the electron emitter is removed to expose the electron emitter and the second metal layer.

Based on the above, the present invention can manufacture the pixel structure of the field emission display by reducing the number of masks, thereby reducing the processing time and the process cost.

The above described features and advantages of the present invention will be more apparent from the following description.

The field emission display includes a cathode plate, an anode plate, and a vacuum chamber between the cathode plate and the anode plate. 1 is a top plan view of a cathode plate of a field emission display according to an embodiment of the present invention. Please refer to Figure 1, cathode plate 100 has a display area A and a non-display area B surrounding the display area A, and the display area A includes a plurality of pixel structures, and the non-display area B includes a via area B1, a first signal area B2, and a second signal. District B3.

A method of manufacturing a cathode plate of a field emission display will be described below with reference to FIGS. 2A to 2M. The four cross-sections in Figs. 2A to 2M are schematic cross-sectional views taken along line A-A', B-B', C-C' and D-D' in Fig. 1, respectively.

2A to 2M are schematic cross-sectional views showing a manufacturing process of a pixel structure of a field emission display according to an embodiment of the present invention. Referring to FIG. 2A, first, a first conductive layer M1 is formed on the substrate 110, and includes a first electrode E1 located in the display area A, a first signal line S1 located in the first signal area B2, and a first hole line S1 located in the through hole area B1. The circuit layer S, wherein the first electrode E1 is electrically connected to the corresponding first signal line S1. In this embodiment, the first conductive layer M1 is formed by depositing a conductive layer (not shown), and patterning the conductive layer by a lithography process and an etching process to form the first electrode E1. Signal line S1 and line layer S. In addition, the material of the substrate 110 may be glass, quartz, organic polymer or other suitable materials, and the material of the first conductive layer M1 (the first electrode E1, the first signal line S1 and the circuit layer S) may be electrically conductive. Metal or metal laminate.

Referring to FIG. 2B, a first insulating layer 120 is formed on the substrate 110, wherein the first insulating layer 120 covers the first electrode E1, the first signal line S1, and the circuit layer S. In this embodiment, the cathode plate of the field emission display may further include a resistance layer 130, wherein the resistance layer 130 is located between the first insulation layer 120 and the first electrode E1. In addition, the material of the first insulating layer 120 is, for example, an oxide, a nitride, or a combination of the two, and the material of the resistive layer 130 The substance is, for example, niobium oxynitride (SiCN), niobium oxycarbide (SiCO), niobium carbide (SiC), niobium carbonitride (SiCON) or niobium oxynitride (SiON). . Next, an opening W1 and an opening W are respectively formed in the first insulating layer 120 and the resistive layer 130 above the first signal line S1 and the circuit layer S, wherein the opening W1 exposes a portion of the first signal line S1, and the opening W exposes a portion Line layer S. In the present embodiment, the method of forming the opening W1 and the opening W is, for example, an etching process.

Referring to FIG. 2C, a second conductive layer M2 is formed on the first insulating layer 120, and includes a second electrode E2 located in the display area A and a second signal line S2 located in the second signal area B3, wherein the second electrode E2 is electrically connected to the corresponding second signal line S2. In this embodiment, the method for forming the second conductive layer M2 is, for example, first depositing a conductive layer (not shown), and patterning the conductive layer by a lithography process and an etching process to form the second electrode E2 and the first Second signal line S2. In addition, the material of the second electrode layer (the second electrode E2 and the second signal line S2) may be a conductive metal or a metal laminate.

Referring to FIG. 2D, a plurality of particles G are formed on the first insulating layer 120 and the second electrode E2. In the present embodiment, the method of forming the particles G includes randomly spraying the particles G onto the first insulating layer 120. In other words, it is also possible for the particles G to be located on the first signal line S1 of the portion where the opening W1 is exposed. Of course, this embodiment does not limit the position at which the particles G are formed.

Referring to FIG. 2E, a first metal layer M3 is formed to cover the particles G. In the present embodiment, the material of the first metal layer M3 is, for example, chromium (Chromium, Cr).

Referring to FIG. 2F, the particle G is removed while the first metal layer M3 located on the surface of the particle G is removed, so that the first metal layer M3 forms the patterned metal layer P, wherein the patterned metal layer P exposes the previous particle G. The film layer below. In the present embodiment, the patterned metal layer P is, for example, a portion of the exposed first insulating layer 120 and a portion of the second electrode E2. Further, in the present embodiment, the method of removing the particles G while simultaneously removing the first metal layer M3 located on the surface of the particles G includes using a brushing process.

Referring to FIG. 2G, a plurality of openings W2 are formed in the first insulating layer 120 by using the patterned metal layer P as a mask, wherein the opening W2 exposes a portion of the resistive layer 130. In the present embodiment, the method of forming the opening W2 is, for example, an etching process, wherein an etchant in the etching process may, for example, optionally have a high etching rate to the first insulating layer 120, but to the resistive layer 130 and the first conductive layer M1. Etching agent having a low etching rate (first electrode E1, first signal line S1 and wiring layer S) and second conductive layer M2 (second electrode E2 and second signal line S2) to reduce the etchant pair as much as possible The damage of the resistance layer 130, the first electrode E1, the first signal line S1, the circuit layer S, the second electrode E2, and the second signal line S2.

Referring to FIG. 2H, a second metal layer M4 is formed on the patterned metal layer P and at the bottom of the openings W, W1, W2. In this embodiment, the materials of the first metal layer M3 and the second metal layer M4 are the same. In addition, the second metal layer M4 is in contact with the second electrode E2, and the second metal layer M4 on the patterned metal layer P and the second metal layer M4 located at the bottom of the opening W2 are separated from each other. Specifically, the adjustment of the process parameters is performed, for example, by reducing the particle size of the particle G, and forming the brushing process and the etching process. The aperture of the opening W2 is reduced or a thin second metal layer M4 is deposited, so that the second metal layer M4 is not formed on the sidewall of the opening W2, or even if it is formed on the sidewall of the opening W2, the patterned metal layer P is not located. The upper second metal layer M4 is connected to the second metal layer M4 located at the bottom of the opening W2. As a result, the effect that the second metal layer M4 on the patterned metal layer P and the second metal layer M4 located at the bottom of the opening W2 are separated from each other can be achieved.

Referring to FIG. 2I, a third metal layer M5 is formed on the second metal layer M4, and at the same time, an electron emitter E is formed in the opening W2. In the process of forming the third metal layer M5 and the electron emitter E, the opening W2 is gradually closed by the third metal layer M5, and thus the third metal layer M5 and the third metal layer M5 are separated from each other. Further, the material of the third metal layer M5 is, for example, chromium, niobium (Nb), molybdenum (Mo), tungsten (Tungsten, W), hafnium (Hf), titanium (Titanium, Ti), and hexabos. A material having a high melting point or a low work function (Φ), such as Lanthanum Hexaboride (LaB6), wherein the material of the third metal layer M5 is preferably molybdenum. In addition, in the present embodiment, the cathode plate of the field emission display may further form the second insulating layer 140 on the third metal layer M5 to cover the third metal layer M5. .

Referring to FIG. 2J, the second insulating layer 140 and the third metal layer M5 on the non-display area B (including the via area B1, the first signal area B2, and the second signal area B3) are removed, and the display area A is removed. The upper portion of the second insulating layer 140 and the third metal layer M5 expose the second metal layer M4. In this embodiment, a portion of the second insulating layer 140 and the third metal layer are removed After M5, the second insulating layer 140 has the same pattern as the third metal layer M5. In addition, the method of removing the second insulating layer 140 and the third metal layer M5 is covered by a patterned photoresist layer (not shown) on the second insulating layer 140 to be retained, specifically, the pattern. The photoresist layer covers a portion of the second insulating layer 140 on the display area A. Next, the second insulating layer 140 and the third metal layer M5 are patterned by using the patterned photoresist layer as a mask to remove the second insulating layer 140 and the second insulating layer 140 that are not covered by the patterned photoresist layer. The third metal layer M5 is underneath. Further, the method of removing the second insulating layer 140 and the third metal layer M5 is, for example, an etching process.

Referring to FIG. 2K, a gap pattern FW is formed on the exposed second insulating layer 140 over the second metal layer M4 and the second electrode E2 in the display area A, wherein the material of the gap pattern FW is, for example, a material having a high dielectric constant. .

Referring to FIG. 2L, the second insulating layer 140 and the third metal layer M5 not covered by the gap pattern FW in the display area A are removed to make the electron emitter E and the second metal layer not covered by the gap pattern FW. M4 is exposed. In the present embodiment, the method of removing the second insulating layer 140 and the third metal layer M5 located above the electron emitter E includes removing the second insulating layer 140 and the third metal layer M5 by using the gap pattern FW as a mask. In order to expose the electron emitter E. In the present embodiment, the method of removing the second insulating layer 140 and the third metal layer M5 includes performing a chemical-electrochemical etching process. Here, the chemical electrolytic etching process removes the second insulating layer 140 and the third metal by electrolysis by immersing the cathode plate 100 (shown in FIG. 1) in the electrolyte and electrically connecting the cathode plate to the negative electrode. Layer M5.

Referring to FIG. 2M, a conductive layer 150 is formed on a top surface T of one of the gap patterns FW, wherein the conductive layer 150 is electrically connected to the wiring layer S of the through-hole region B1 (shown in FIG. 1). In the present embodiment, the method of forming the conductive layer 150 includes performing an oblique vapor deposition process. Here, the oblique vapor deposition process is performed by placing the cathode plate 100 in the vapor deposition chamber, shielding the non-display area B (shown in FIG. 1) and exposing the display area A (shown in FIG. 1), and borrowing The conductive layer 150 is covered on the top surface T of the gap pattern FW by adjusting the tilt angle (not shown) of the cathode plate 100. After forming a conductive layer 150, the cathode plate 100 of the field emission display of the present embodiment is initially completed, wherein the cathode plate 100 includes a pixel structure PS located in the display area A.

It is worth mentioning that the pixel structure PS of the field emission display formed by the above manufacturing method can be completed by only five masks. In contrast, conventional techniques require a mask to remove the first metal layer above the first signal line after removing the particles and the first metal layer on the surface of the particle G. In addition, prior art prior to forming the third metal layer, an insulating layer is formed between the third metal layer and the second metal layer, and a photomask is required to etch an opening on the insulating layer. Therefore, compared with the conventional technique, the pixel structure of the seven-mask manufacturing field emission display is required, and the manufacturing method of the pixel structure of the field emission display of the embodiment can reduce the number of masks required, thereby reducing the required number of masks. Process time and process cost.

The pixel structure PS of this embodiment is suitable for use in a field emission display, which is exemplified below with reference to FIG.

3 is a schematic cross-sectional view of a field emission display to which the pixel structure of the present embodiment is applied. Please refer to FIG. 3, the field emission display FED package of this embodiment. The cathode plate 100 manufactured as described above and the anode plate 200 disposed opposite to the cathode plate 100 include an substrate 210, a phosphor layer 220, an electrode layer 230, and a plurality of spacers 240. The phosphor layer 220 is coated on the substrate 210, the electrode layer 230 is disposed on the substrate 210, and the phosphor layer 220 is disposed between the substrate 210 and the electrode layer 230, and the spacer 240 abuts against the cathode plate 100 and the anode plate 200. between. In the present embodiment, the spacer 240 abuts between the conductive layer 150 of the cathode plate 100 and the anode plate 200. Further, the cathode plate 100 and the anode plate 200 may be vacuumed or filled with an inert gas.

The principle of illumination of the field emission display FED is, for example, in a vacuum environment, using an electric field to cause the tip of the electron emitter E to emit electrons e, which leave the cathode plate 100 and are accelerated and attracted by the positive voltage on the anode plate 200, and impinge on the anode. The phosphor layer 220 of the board 200 is then exposed.

In summary, the present application can produce a pixel structure of a field emission display by using a small number of masks, and thus the required process cost is low.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧ cathode plate

110, 210‧‧‧ substrate

120‧‧‧First insulation

130‧‧‧resistance layer

140‧‧‧Second insulation

150‧‧‧ Conductive layer

200‧‧‧Anode plate

220‧‧‧Fluorescent layer

230‧‧‧electrode layer

240‧‧‧ spacers

A‧‧‧ display area

B‧‧‧Non-display area

B1‧‧‧Tongkong District

B2‧‧‧First Signal Zone

B3‧‧‧Second Signal Area

E1‧‧‧first electrode

E2‧‧‧second electrode

S1‧‧‧first signal line

S2‧‧‧second signal line

S‧‧‧ circuit layer

W, W1, W2‧‧‧ openings

G‧‧‧ granules

M1‧‧‧ first conductive layer

M2‧‧‧Second conductive layer

M3‧‧‧ first metal layer

M4‧‧‧Second metal layer

M5‧‧‧ third metal layer

E‧‧‧Electronic transmitter

FW‧‧‧ gap pattern

T‧‧‧ top surface

P‧‧‧ patterned metal layer

PS‧‧‧ pixel structure

FED‧‧ field emission display

e‧‧‧Electronics

A-A’, B-B’, C-C’, D-D’‧‧‧

1 is a top plan view of a cathode plate of a field emission display according to an embodiment of the present invention.

2A to 2M are schematic cross-sectional views showing a manufacturing process of a pixel structure of a field emission display according to an embodiment of the present invention.

3 is a schematic cross-sectional view of a field emission display to which the pixel structure of the present embodiment is applied.

100‧‧‧ cathode plate

110, 210‧‧‧ substrate

120‧‧‧First insulation

130‧‧‧resistance layer

140‧‧‧Second insulation

150‧‧‧ Conductive layer

200‧‧‧Anode plate

220‧‧‧Fluorescent layer

230‧‧‧electrode layer

240‧‧‧ spacers

e‧‧‧Electronics

E1‧‧‧first electrode

E2‧‧‧second electrode

W2‧‧‧ openings

M3‧‧‧ first metal layer

M4‧‧‧Second metal layer

M5‧‧‧ third metal layer

P‧‧‧ patterned metal layer

E‧‧‧Electronic transmitter

FW‧‧‧ gap pattern

T‧‧‧ top surface

FED‧‧ field emission display

Claims (13)

A method for manufacturing a pixel structure of a field emission display, comprising: forming a first electrode on a substrate; forming a first insulating layer on the substrate to cover the first electrode; forming a first insulating layer a second electrode; forming a plurality of particles on the first insulating layer and the second electrode; forming a first metal layer to cover the particles; removing the particles and simultaneously making the surface on the particles Removing a metal layer to form the first metal layer to form a patterned metal layer; using the patterned metal layer as a mask to form a plurality of openings in the first insulating layer; on the patterned metal layer And forming a second metal layer on the bottom of the openings, wherein the second metal layer is in contact with the second electrode; forming a third metal layer on the second metal layer, and the third metal layer is in the openings Forming a plurality of electron emitters therein; and removing a third metal layer over the electron emitters to expose the electron emitters and the second metal layer. The method for fabricating a pixel structure of a field emission display according to claim 1, wherein after forming the third metal layer, further comprising forming a second insulating layer on the third metal layer. The method of fabricating a pixel structure of a field emission display according to claim 2, wherein the third metal layer and the second insulating layer have the same pattern. The pixel of the field emission display as described in claim 2 The manufacturing method of the structure further includes removing a portion of the second insulating layer and the third metal layer to expose the second metal layer. The method of fabricating a pixel structure of a field emission display according to claim 4, wherein the method of removing the third metal layer above the electron emitters comprises: exposing the second metal layer and the Forming a gap pattern on the second insulating layer above the second electrode; and using the gap pattern as a mask to remove the second insulating layer and the third metal layer to expose the electron emitters. The method for fabricating a pixel structure of a field emission display according to claim 5, wherein the gap pattern is used as a mask to remove the second insulating layer and the third metal layer to enable the electron emitters The bare method involves performing a chemical electrolytic etching process. The method for fabricating a pixel structure of a field emission display according to claim 5, further comprising forming a conductive layer on a top surface of one of the gap patterns. The method of fabricating a pixel structure of a field emission display according to claim 7, wherein the method of forming the conductive layer on a top surface of the gap pattern comprises performing an oblique vapor deposition process. The method for fabricating a pixel structure of a field emission display according to claim 1, wherein the first insulating layer and the first electrode further comprise a resistive layer. The method of fabricating a pixel structure of a field emission display according to claim 1, wherein the first metal layer conformally covers the first insulating layer and surfaces of the particles. The method of fabricating a pixel structure of a field emission display according to claim 1, wherein the method of forming the particles comprises randomly spraying the particles onto the first insulating layer. The method for fabricating a pixel structure of a field emission display according to claim 1, wherein the method of removing the particles and simultaneously removing the first metal layer on the surface of the particles comprises using a brush removal method program. The method for fabricating a pixel structure of a field emission display according to claim 1, wherein the first metal layer and the second metal layer are made of the same material.