TW201333490A - Improved press bar of a testing socket and a testing equipment using the same - Google Patents

Abstract

The present invention is about an improved press bar of a testing socket and a testing equipment using the same. The testing socket has a tray, a bushing seat and a base. The tray has a plurality of pillars and each pillar has a vacuum passage and a cross-section part having a pattern. The bushing seat has a plurality of test rooms corresponding to the pillars. The base has a plurality of holes so as to contain a plurality of probes. Each pillar is provided in the each test room. Therefore, the present invention can avoid the sensor element of the testing unit suffering testing failure and other problem during the testing unit is in motion and test.

Description

Test stand with improved press column and test system thereof

The present invention relates to a test system, and more particularly to a test stand with an improved press column suitable for testing various different semiconductor components and a test system therefor.

In recent years, with the rapid development of MEMS, various miniaturized, high-performance and low-cost sensors have emerged, which has further enhanced the sensor from key components into the main components of innovative value, such as Apple's iPhone. Most of the three-axis acceleration sensors used in the new generation iPod and Nintendo's Wii are applied to the sensor using MEMS technology. The principle of the acceleration sensor is to induce the XYZ triaxial component of the acceleration direction. The motion vector of the object in the three-dimensional space.

In addition, in order to make the sensor to be tested more miniaturized and convenient for subsequent assembly, a high-sensitivity sensing element is often disposed on the surface of the sensor to be tested or inside thereof, wherein the sensing element includes a circuit pattern and a microelectromechanical structure. Wait. During the test, the sensor to be tested is sucked from the collecting device to the testing device, and the sensor to be tested is fixedly pressed, corresponding to the sensing element of the sensor to be tested. In addition, the conventional sensor to be tested may be an acceleration sensor or a gyroscope, etc., which is a built-in sensing element of the sensor to be tested, and although there is no direct contact with the sensing element of the sensor to be tested, the pressure is applied. The vertical stress easily causes the sensing component inside the sensor to be tested to fail in the electrical test, and the sensor to be tested cannot be correctly judged as a good or defective product. Again, example For example, a pressure sensor or a micro-electromechanical microphone is provided with an inductive component on the surface of the sensor to be tested, and if the sensing component of the sensor to be tested is pressed, the test failure is more likely to occur.

In view of this, it is necessary to design a device that avoids the failure of the sensor to be tested in the test and can perform multi-site rotation test to improve the yield, capacity and completion of the test.

The main object of the present invention is to provide a test stand with an improved press column and a test system thereof, which can replace the corresponding bushing seat according to different types of sensors to be tested, and can avoid the sensor to be tested. Inductive component testing fails to improve test yield and reduce equipment costs.

In order to achieve the above object, the test stand with the improved press column of the present invention comprises: a suction test disc, a set of linings and a base. The suction test disc has a plurality of pressure columns, each of the plurality of pressure columns is provided with a passage and a section having a pattern; the sleeved seat has a plurality of accommodation chambers capable of accommodating a plurality of sensors to be tested, and the plurality of accommodation chambers It is disposed corresponding to the plurality of columns; the base has a plurality of perforations for accommodating the plurality of probes. Each of the pressing columns of the suction test disc is respectively placed in each of the accommodating chambers of the lining seat, and each of the pressing columns respectively presses each of the sensors to be tested.

The cross-section of each of the pressure-receiving discs may be a symmetrical or asymmetrical geometry, such as a polygon, a cross, a bow, a circle, an ellipse, or the like, or a combination thereof, and the passage of each column may be a cylinder, an elliptical cylinder, a polygonal cylinder, or the like, a cross section of each cylinder and a shape of the passage It can also be used in any combination, mainly in accordance with the position of the sensing element designed by the sensor to be tested, so as to avoid the sensing element of the sensor to be tested, but can also apply sufficient suction to the sensor to be tested. Or pressure to move or test smoothly.

That is, when the pressure column is to be pressed to the sensor to be tested, the channel corresponds to the sensing element of the sensor to be tested, and the cross-section of the pressure column corresponds to the non-inductive component of the sensor to be tested, so as to avoid The sensing element of the sensor to be tested is opened, but the suction or pressure of the sensor to be tested can be applied.

In addition, the cross-sectional portion of each of the pressure-sensitive measuring discs may have the same size as the sensor to be tested to provide sufficient pressure, and an elastic layer may be disposed on the cross-section portion to resist the sensing to be tested. To avoid excessive pressure damage to the sensor to be tested.

In addition, the sleeve lining can be designed in a variety of different sizes to be quickly mounted on the suction smear to accommodate the appropriate size of the sensor to be tested, so that the operator can change the line to test different sizes of the sensor to be tested, and increase Productivity.

Each of the pressure sensing columns can be connected to a vacuum source and a pressure source for applying sufficient suction or pressure to the sensor to be tested. The invention can also have a plurality of through holes on the base, each through hole connecting a vacuum source and a pressure source for applying sufficient suction or pressure to the sensor to be tested.

The test system using the improved press test stand of the present invention comprises: a first machine, a second machine, and a moving mechanism. The first machine has a sorting module, and the sorting module is configured to classify the feeds of the plurality of sensors to be tested and sort and discharge according to the test result; the second machine is disposed on one side of the first machine. The moving mechanism is connected to the first machine and the second machine; The second machine includes a load board and a test seat. The test stand has a suction test disk, a set of linings and a base. The suction test disc has a plurality of pressure columns, each of the pressure columns is provided with a channel and a section having a pattern; the sleeve lining has a plurality of accommodation chambers capable of accommodating a plurality of sensors to be tested, and the plurality of accommodation chambers The system is provided corresponding to the plurality of columns; the base has a plurality of perforations for accommodating the plurality of probes. Each of the pressing columns of the suction test disc is respectively placed in each of the accommodating chambers of the lining seat, and each of the pressing columns respectively presses each of the sensors to be tested.

The classification module of the first machine may include a first body, a turret disposed on the first body, a feeding slot surrounding the turret, an inspection device, and a tray on the tray Has a plurality of grooves. Moreover, the moving mechanism may further include a pick-and-place device, and the pick-and-place device may be used to suck the suction test disc.

The load substrate of the second machine may have a plurality of chucks for clamping the base, and increasing the stability of the base during testing.

The pick-and-place device of the moving mechanism can move the suction-measuring disk to move to a first position and a second position, and when the pick-and-placer is in the first position, corresponds to the tray, and when the pick-and-placer is in the second position, the corresponding On the pedestal. That is, when the pick-up device of the transfer mechanism sucks the suction test tray to the first position, the sensor to be tested that has been aggregated is sucked from the tray, and then the pick-up device of the transfer mechanism is moved to the corresponding base. In the second position of the seat, the sensor to be tested is sucked into the sleeve pedestal, and then the pedestal is clamped by the plurality of chucks on the load substrate for subsequent testing.

a passage through which each of the pressure-receiving discs passes and a section having a symmetrical pattern, the function of which can be used to absorb the sensor to be tested through the passage. It is also possible to avoid the sensing elements of the sensor to be tested by selecting a suitable channel and a section having a pattern, but it is possible to apply sufficient suction or pressure to the sensor to be tested.

In addition, with the above system design, the present invention not only integrates multiple functions of feeding, inspection, and testing, but also needs to be separated by separating the first machine from the second machine when changing different test components. The second machine of the test stand can be connected to the first machine.

Please refer to FIG. 1 to FIG. 1 . FIG. 1 is a schematic diagram of a test stand with an improved press column and a test system thereof according to a first preferred embodiment of the present invention, and FIG. 2 is a partial view of the first machine of the first preferred embodiment of the present invention. 3A is a perspective view of a test stand according to a first preferred embodiment of the present invention, FIG. 3B is a partially enlarged view of a susceptor according to a first preferred embodiment of the present invention, and FIG. 4 is a second preferred embodiment of the present invention. A partial enlarged view of the machine. The test system using the improved press column of the embodiment mainly includes: a first machine 1, a second machine 2, and a moving mechanism 15.

The first machine 1 has a sorting module, and the sorting module is used to classify the feeds of the plurality of sensors 4 to be tested (shown in FIG. 6A) and sort and discharge according to the test results. The sorting module has a first body 10, a turret 11 disposed on the first body 10, a feeding trough 12 disposed around the turret 11, an inspection device 13, and a tray 14, the turret 11 The plurality of suction heads 111 are mounted on the tray 14. The tray 14 has a plurality of grooves 141 for receiving the sensor 4 to be tested.

The second machine 2 is disposed on one side of the first machine 1. The first machine 1 is connected to the second machine 2 by a moving mechanism 15, and the second machine 2 includes a test. a load board 21, a second body 20, and a protective cover 24 of the test stand. The protective cover 24 covers the load substrate 21 with an inverted L-shaped cover so that the operator can be positioned by the first machine 1. The substrate 21 is observed while avoiding contamination or interference of the load substrate 21 during operation and testing.

Please refer to FIG. 5 and FIG. 6A. FIG. 5 is a partial enlarged view of the first embodiment of the present invention, wherein the sensor is to be tested according to the first preferred embodiment of the present invention. A partial enlarged cross-sectional view of the test stand. The test stand with the improved press column of the embodiment has a suction test disc 3, a set of linings 75 and a base 22, and the suction test disc 3 has a plurality of pressure columns 31, wherein each press column 31 is provided with a passage. 312 and a section 311 having a pattern. The lining 75 has a plurality of accommodating chambers 80 for accommodating the plurality of sensors 4 to be tested, and the plurality of accommodating chambers 80 are disposed corresponding to the plurality of columns 31 of the absorbing tray 3, and each column of the absorbing tray 3 The 31 series are respectively placed in each of the accommodating chambers 80 of the sleeve lining 75. During the test, the plurality of sensors 4 to be tested are respectively placed in the plurality of accommodating chambers 80, and each of the columns 31 can be respectively Each sensor 4 to be tested is pressed. The base 22 has a plurality of through holes 221 for receiving the plurality of probes 70. In the present embodiment, the passage 312 is a cylinder and penetrates the column 31, and the section 311 on the column 31 is square.

In addition, referring to FIG. 2 and FIG. 5, the moving mechanism 15 has a pick-and-placer 151, and the pick-and-placer 151 of the moving mechanism 15 can suck the suction measuring disc 3 to move to a first position and a second position. The 151 in the first position corresponds to the tray 14 and corresponds to the base 22 when the picker 151 is in the second position. The load substrate 21 is provided with a base 22 and a plurality of chucks 23, and the plurality of through holes 221 of the base 22 are provided with a plurality of probes 70, which can be tested and placed in the receiving chamber 80 of the sleeve holder 75. The sensor 4 is electrically connected.

During operation, the pick-up device 151 of the transfer mechanism 15 draws the suction test disc 3 and the sleeve liner 75 to the first position, and then sucks the collected sensor 4 to be tested from the tray 14 and then moves the mechanism. The pick-and-placer 151 of 15 is moved to the second position corresponding to the base 22 of the load substrate 21, and the suction dial 3 and the sleeve holder 75 are moved over the base 22, and then the plural on the load substrate 21 is utilized. The chuck 23 grips the base 22 for subsequent testing. In addition, each of the pressure columns 31 of the suction dial 3 is connected to a vacuum source 60 and a pressure source 65 for sucking the sensor 4 to be tested or the sensor 4 to be tested (such as a pressure sensor). To test.

As shown in FIG. 6A and FIG. 3, each of the pressing columns 31 of the suction dial 3 is provided with a channel 312 and a cross-sectional portion 311 having a pattern. When each of the pressing columns 31 sucks or presses the sensor 4 to be tested, the pressure is pressed. The channel 312 of the column 31 corresponds to a portion of the sensing element 41 of the sensor 4 to be tested, and the section 311 of the column 31 is correspondingly pressed against the non-inductive element 42 of the sensor 4 to be tested. Thereby, the sensing element 41 is prevented from being moved and pressure-measured when the sensor 4 is to be tested, causing the problem of the test failure of the sensing element 41 of the sensor 4 to be tested. Furthermore, in the embodiment, the surface of the sensor 4 to be tested is provided with an inductive element 41, which may be a pressure sensor or a micro electromechanical microphone or the like. Of course, in the test stand with the improved press column and the test system thereof, the sensor to be tested is also applicable to the type of the built-in sensing element, such as an acceleration sensor or a gyroscope.

6B is a partial enlarged cross-sectional view of the sensor to be tested and the test socket according to the second preferred embodiment of the present invention, and please refer to FIG. 5 together. The difference between this embodiment and the first embodiment is that the sensor 40 to be tested in this embodiment is different in size from the sensor 4 to be tested in the first embodiment. Therefore, only the different sets of the pedestal 751 need to be replaced, that is, Each of the suction pads 3 can be pressed as in the first embodiment. The channel 312 of the column 31 corresponds to the portion of the sensing element 410 of the sensor 40 to be tested, and the section 311 of the column 31 is correspondingly pressed against the non-inductive element 420 of the sensor 40 to be tested. Thereby, it is avoided that the sensing element 410 on the surface of the sensor 40 to be tested is caused to have a problem of test failure when the sensor is moved and pressured.

6C is a partial enlarged cross-sectional view of the sensor to be tested and the test socket according to the third preferred embodiment of the present invention. The difference between this embodiment and the first embodiment lies in the sensor to be tested in this embodiment. The thickness of 400 is smaller than that of the sleeve 752. Therefore, a recess 32 is formed in each of the housing chambers 80 of the sleeve 752. In addition, the susceptor 220 of the embodiment has a plurality of through holes 222, and each of the through holes 222 is connected to a vacuum source 60 and a pressure source 65, so that the vacuum source 60 sucks the gas in the groove 32 through the through hole 222, thereby generating The vacuum required for the test, or the gas of the pressure source 65, is pressurized into the recess 32 via the through hole 222 to produce the pressure required for the test.

6D is a partially enlarged cross-sectional view of the sensor to be tested and the test socket according to the fourth preferred embodiment of the present invention. The difference between this embodiment and the third embodiment is only in the suction meter 5 of the embodiment. An elastic layer 52 is disposed on the front end of the indenter 51 to abut the non-inductive component 421 of the sensor 400 to be tested, and the sensing element 411 of the sensor 400 to be tested is also avoided by the channel 512. The problem of test failure occurs in the sensing element 411 and the non-inductive element 421 of the sensor 400 to be tested during the pressure measurement process, so as to improve the test yield of the sensor 400 to be tested.

Please refer to FIG. 7 and FIG. 8 , wherein FIGS. 7 a 7 d are respectively schematic views of the shape of the cross section of the channel on the pressing column of the first preferred embodiment of the present invention, and FIGS. 8 a 8 g are points. For the first preferred embodiment of the present invention, the shape of the cross-section of the column is shown, and please refer to FIG. 3 together. The shape of the channel 312 of the suction dial 3 in FIG. 3 can be as shown in FIGS. 7a to 7d. The passage 312 through which the pressure column 31 is worn is not limited to the cylinder 312 as shown in FIG. 7a. The square shape may also be that the channel 313 shown in FIG. 7b is a diamond cylinder, the channel 314 shown in FIG. 7c is a hexagonal cylinder, or the channel 315 shown in FIG. 7d is a two cylinder, thereby being The tested sensor to be tested is designed for use.

Each of the pressing columns 31 is pressed against the cross-sectional portion 311 of the surface of the sensor to be tested with a symmetrical pattern, except that the cross-sectional portion 311 shown in FIG. 7a is square, please refer to FIGS. 8a-8g, and FIGS. 8a-8g are respectively A schematic view of the shape of the cross-section of the column of the embodiment. The shape of the cross-sectional portion may also be in the form of a diagonal portion in FIGS. 8a to 8g, that is, the cross-sectional portion 316 has a hexagonal shape as shown in FIG. 8a, and the cross-sectional portion 318 has a cross shape as shown in FIG. 8b. The cross-sectional portion 319 shown in Fig. 8c has a rhombus shape, and the cross-sectional portions 320, 321 shown in Figs. 8d and 8e are all in the shape of a radial dart, or the cross-sectional portion 322 shown in Fig. 8f has a bow-tie shape and the like. In order to minimize the cross-section that is pressed against the sensor to be tested, it may be designed such that the cross-section 323 is rhombic in FIG. 8g and the channel 324 is also a diamond-shaped cylinder.

The shape of the cross-section of the channel of Figures 7a to 7d and the shape of the cross-section of the column of Figures 8a to 8f can be arbitrarily combined and matched as needed, so as to provide the pressure required for the test, and also avoid the sensor 4 to be tested. The sensing element 41 generates problems such as test failure.

Please refer to FIG. 9A and FIG. 9B , which are respectively a partial enlarged view of the sensor to be tested that is not placed in and placed on the test socket according to the fifth preferred embodiment of the present invention. Figure, and please refer to Figure 3 and Figure 5 together. The difference between this embodiment and the first embodiment is that the test socket of the embodiment has only one suction dial 3 and one base 82, and there is no sleeve liner 75 of the first embodiment, and the base of the embodiment A plurality of accommodating chambers 85 for the plurality of sensors 4 to be tested are formed on the upper and lower sides of the 82. In addition, each of the pressing columns 31 of the suction test disc 3 of the present embodiment is also connected to a vacuum source 60 and a pressure source 65 for sucking the sensor 4 to be tested or sensing the same as the first embodiment. The device 4 (such as a pressure sensor) is pressurized for testing.

In this embodiment, as in the first embodiment, a channel 312 and a cross-sectional portion 311 having a pattern are provided through each of the pressing columns 31 of the suction dial 3, and each of the pressing columns 31 sucks or presses the sensing to be tested. In the case of the device 4, the channel 312 of the column 31 corresponds to the sensing element 41 of the sensor 4 to be tested, and the section 311 of the column 31 is correspondingly pressed against one of the sensors 4 to be tested. The component 42 is used to avoid causing problems such as test failure of the sensing element 41 of the sensor 4 to be tested when picking up and moving the sensor 4 to be tested.

The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

1‧‧‧First machine

10‧‧‧First Ontology

11‧‧‧Tower

111‧‧‧Sucking head

12‧‧‧feed trough

13‧‧‧Viewing device

14‧‧‧Material

141‧‧‧ Groove

15‧‧‧Transition agencies

151‧‧‧ picker

2‧‧‧Second machine

20‧‧‧Second ontology

21‧‧‧Load substrate

22,220,82‧‧‧Base

221‧‧‧Perforation

222‧‧‧through hole

23‧‧‧ chuck

24‧‧‧ protective cover

3,5‧‧‧Sucking tray

31, 51‧‧ ‧ column

311,316,318,319,320,321,322,323‧‧‧ Section

312,313,314,315,324,512‧‧‧ channels

32‧‧‧ Groove

4,40,400‧‧‧Sensor to be tested

41,410,411‧‧‧Inductive components

42,420,421‧‧‧ Non-inductive components

52‧‧‧Elastic layer

60‧‧‧vacuum source

65‧‧‧stress source

70‧‧‧ probe

75,751,752‧‧‧ sets of linings

80,85‧‧‧ housing room

1 is a schematic view of a test stand with an improved press column and a test system thereof according to a first preferred embodiment of the present invention.

Figure 2 is a partial enlarged view of the first machine of the first preferred embodiment of the present invention.

Figure 3A is a perspective view of a test stand in accordance with a first preferred embodiment of the present invention.

Figure 3B is a partial enlarged view of the susceptor of the first preferred embodiment of the present invention.

Figure 4 is a partial enlarged view of a second machine of the first preferred embodiment of the present invention.

Figure 5 is a partial enlarged view of the first embodiment of the present invention in which the pick and place device is moved to the second position.

6A is a partial enlarged cross-sectional view showing the sensor and the test stand of the first preferred embodiment of the present invention.

6B is a partial enlarged cross-sectional view showing the sensor and the test stand of the second preferred embodiment of the present invention.

6C is a partial enlarged cross-sectional view showing the sensor and the test stand of the third preferred embodiment of the present invention.

6D is a partial enlarged cross-sectional view showing the sensor and the test stand of the fourth preferred embodiment of the present invention.

7a-7d are schematic views respectively showing the shape of a cross-sectional portion of a passage on a press column according to a first preferred embodiment of the present invention.

8a to 8g are respectively schematic views showing the shape of a cross section of a press column according to a first preferred embodiment of the present invention.

9A is a partial enlarged cross-sectional view showing the sensor to be tested in the fifth preferred embodiment of the present invention, which is not placed on the test stand.

9B is a partial enlarged cross-sectional view showing the sensor to be tested placed on the test stand according to the fifth preferred embodiment of the present invention.

22‧‧‧ pedestal

221‧‧‧Perforation

3‧‧‧Sucking tray

31‧‧‧Press

311‧‧‧ Section

312‧‧‧ channel

75‧‧‧ sets of linings

80‧‧‧ housing room

Claims (22)

A test stand with an improved press column, comprising: a suction test disc having a plurality of press columns, each of the press columns is provided with a passage and a section having a pattern; and a set of linings is provided for accommodating a plurality of test pieces a plurality of accommodating chambers of the sensor, which are disposed corresponding to the plurality of pressure columns, each of the pressure absorbing columns being respectively placed in each of the accommodating chambers of the lining; and a pedestal The base has a plurality of perforations for receiving a plurality of probes. The test seat of claim 1, wherein the cross-section is polygonal, cross-shaped, bow-shaped, circular, and combinations thereof. The test stand of claim 1, wherein the channel is a cylindrical shape, a polygonal cylinder, and a combination thereof. The test seat of claim 1, wherein the cross-sectional portion is a symmetrical or asymmetrical geometry. The test socket of claim 1, wherein the channel is an inductive component of one of the sensors to be tested. The test stand of claim 1, wherein the cross-section portion corresponds to one of the non-inductive elements of the sensor to be tested. The test stand of claim 1, wherein the cross-sectional portion has the same size as the sensor to be tested. The test seat of claim 1, wherein the cross-section portion is provided with an elastic layer for resisting the sensor to be tested. The test socket of claim 1, wherein each of the pressure sensing columns is connected to a vacuum source and a pressure source. A test system using an improved press column, comprising: a first machine having a sorting module for classifying a plurality of test sensors to be tested and sorting and discharging according to test results; The second machine is disposed on one side of the first machine, wherein the first machine is connected to the second machine by a moving mechanism, and the second machine includes a test seat and a load substrate. The test stand comprises: a suction test disc having a plurality of pressure columns, wherein each of the pressure columns is provided with a channel and a section having a pattern; and a set of linings having a plurality of capacitances capable of accommodating a plurality of sensors to be tested a chamber, which is corresponding to a plurality of columns, each of the suction columns is respectively placed in each of the housings of the sleeve; and a base having a plurality of Perforation to accommodate multiple probes. The test system of claim 10, wherein the cross-section is polygonal, cross-shaped, bow-shaped, circular, and combinations thereof. The test system of claim 10, wherein the channel is a cylindrical shape, a polygonal cylinder, and a combination thereof. The test system of claim 10, wherein the cross-sectional portion is a symmetrical or asymmetrical geometry. The test system of claim 10, wherein the channel is an inductive component of one of the sensors to be tested. The test system of claim 10, wherein the cross-section portion corresponds to one of the non-inductive elements of the sensor to be tested. The test system of claim 10, wherein the cross-sectional portion has the same size as the sensor to be tested. The test system of claim 10, wherein the section is provided with an elastic layer for resisting the sensor to be tested. The test system of claim 10, wherein the classification module comprises a first body, a turret disposed on the first body, a feeding trough disposed around the turret, and a The inspection device, and a tray having a plurality of grooves. The test system of claim 10, wherein the transfer mechanism further comprises a pick and place device for sucking the suction test disk. The test system of claim 10, wherein the load substrate is provided with a plurality of chucks for holding the base. The test system of claim 19, wherein the pick-up device of the transfer mechanism moves the suction-sistence disk to move to a first position and a second position, when the pick-up device is located at the first position The time corresponds to the tray, and corresponds to the base when the picker is in the second position. The test system of claim 10, wherein the base has a plurality of through holes, each of the through holes being connected to a vacuum source and a pressure source.