TW201332922A - Method of processing a tempered glass substrate for touch screens - Google Patents

Method of processing a tempered glass substrate for touch screens Download PDF

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TW201332922A
TW201332922A TW101121385A TW101121385A TW201332922A TW 201332922 A TW201332922 A TW 201332922A TW 101121385 A TW101121385 A TW 101121385A TW 101121385 A TW101121385 A TW 101121385A TW 201332922 A TW201332922 A TW 201332922A
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glass substrate
tempered glass
original
cutting
mask pattern
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TW101121385A
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Chinese (zh)
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TWI478887B (en
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Yun-Kyo Jung
In-Su Yoon
Tae-Jung Kim
Yong-Soo Lee
Dong-Su Noh
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Mico C & C Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
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  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

In a method of processing a tempered glass substrate for touch screens, conductive structures may be formed on each of unit cells of an original tempered glass substrate. The original tempered glass substrate may be physically cut along boundary lines between the unit cells to form preliminary tempered glass substrates having cut faces. Minute cracks formed the cut faces of the preliminary tempered glass substrates may be removed by a chemical etching process to form the tempered glass substrate. Thus, the tempered glass substrate for the touch screen may have reinforced bending strength.

Description

處理用於觸控螢幕之強化玻璃基板的方法 Method of processing a tempered glass substrate for a touch screen

此處之實施例是有關於一種處理用於觸控螢幕之強化玻璃基板的方法。此處之實施例特別是有關於處理用於可用以製造電子裝置(例如是一手機)之面板之觸控螢幕的強化玻璃基板的方法。 The embodiments herein are directed to a method of processing a tempered glass substrate for a touch screen. Embodiments herein are particularly directed to methods of processing tempered glass substrates for use with touch screens that can be used to fabricate panels for electronic devices, such as a cell phone.

一般而言,觸控螢幕面板可被應用於一顯示裝置,例如手機、MP3播放器、個人數位助理(PDA)等等。觸控螢幕面板可以是一個輸入裝置,使用者利用手指選擇顯示裝置之螢幕上的圖像(icon),以輸入指令。 In general, the touch screen panel can be applied to a display device such as a cell phone, an MP3 player, a personal digital assistant (PDA), and the like. The touch screen panel can be an input device, and the user selects an image on the screen of the display device with a finger to input an instruction.

觸控螢幕面板可被設置於顯示裝置之一上表面,以將使用者手指之觸控接點轉換成電子訊號。使用者手指所碰觸到之圖像可作為一輸入訊號被顯示裝置接受。因此,觸控螢幕面板可取代連接於顯示裝置之分離式輸入裝置,如此一來觸控螢幕面板可能已被廣泛應用。 The touch screen panel can be disposed on an upper surface of the display device to convert the touch contact of the user's finger into an electronic signal. The image touched by the user's finger can be accepted as an input signal by the display device. Therefore, the touch screen panel can replace the separate input device connected to the display device, so that the touch screen panel may have been widely used.

觸控螢幕面板可包括一感應單元,感應單元設置於一玻璃基板上。為了加強觸控螢幕面板,玻璃基板可以包括一強化玻璃基板(tempered glass substrate)。用於觸控螢幕面板的強化玻璃可被切割成觸控螢幕面板之數個單元元件(unit cell)。切割後的強化玻璃可運用於製造觸控螢幕面板之製程。強化玻璃可利用蝕刻製程加以切割,蝕刻製程可採用一雷射或一噴砂製程(sand blast process)等。強化玻璃 的厚度可為約0.3公釐(mm)至約0.8公釐。此厚度之強化玻璃可利用雷射進行切割。使用雷射切割強化玻璃之方法可以具有整齊之切割表面以及大量生產的優點。然而,切割面(cut face)可能會因為雷射的熱處理而變色。因此需要再增加一道額外的製程來移除變色之切割面,如此一來會增加製作觸控螢幕面板的時間和成本。 The touch screen panel can include a sensing unit, and the sensing unit is disposed on a glass substrate. In order to reinforce the touch screen panel, the glass substrate may include a tempered glass substrate. The tempered glass for the touch screen panel can be cut into a plurality of unit cells of the touch screen panel. The cut tempered glass can be used in the process of manufacturing a touch screen panel. The tempered glass can be cut by an etching process using a laser or a sand blast process. Tempered glass The thickness can range from about 0.3 mm (mm) to about 0.8 mm. This thickness of tempered glass can be cut using a laser. The method of using laser-cut tempered glass can have the advantages of a neat cutting surface and mass production. However, the cut face may be discolored due to the heat treatment of the laser. Therefore, an additional process is required to remove the discolored cut surface, which increases the time and cost of making the touch screen panel.

在採用噴砂製程針對具有一觸控螢幕結構之一原始強化玻璃(original tempered glass)進行物理切割之方式中,當可能均勻地噴灑一研磨料(abrasive)在使用一遮罩薄膜層的原始強化玻璃上時,側面之的凸出部可能變大。再者,電弧或物理碰撞可能會對一電極或一跨接線造成破壞。因此,噴砂製程可能不適合用於處理具有觸控螢幕結構的強化玻璃。 In a method of physically cutting a raw tempered glass having a touch screen structure by using a sand blasting process, it is possible to uniformly spray an abrasive on the original tempered glass using a mask film layer. When it is up, the convex portion of the side may become large. Furthermore, arcing or physical collisions can cause damage to an electrode or a jumper. Therefore, the blasting process may not be suitable for processing tempered glass with a touch screen structure.

此外,韓國專利案第1023794號揭露一種採用噴砂製程切割強化玻璃基板的方法,此方法可包括在強化玻璃基板上形成一圖案,快速地在強化玻璃基板上噴灑研磨料,以對此圖案所暴露之區域施加衝擊,藉此切割強化玻璃基板。然而,由於研磨料的衝擊,可能在強化玻璃基板之一切割面產生微小裂痕(minute crack)。這些微小裂痕可能嚴重降低強化玻璃基板的彎曲強度(bending strength),使得強化玻璃基板可能因輕微的衝擊而損壞。 In addition, Korean Patent No. 1023794 discloses a method of cutting a tempered glass substrate by a sand blasting process, which may include forming a pattern on the tempered glass substrate, rapidly spraying the abrasive on the tempered glass substrate to expose the pattern. An impact is applied to the area to cut the tempered glass substrate. However, due to the impact of the abrasive, it is possible to generate minute cracks on the cut surface of one of the strengthened glass substrates. These micro-cracks may severely reduce the bending strength of the strengthened glass substrate, so that the strengthened glass substrate may be damaged by a slight impact.

此處之實施例提供一種處理用於觸控螢幕之一強化玻璃基板的方法,藉由移除可能因物理性切割原始強化玻 璃而產生之微小裂痕及切割面之凸出部,而不破壞形成於玻璃基板之單元元件上之觸控螢幕結構,可提高側面強度及確保大量生產。 Embodiments herein provide a method of processing a tempered glass substrate for a touch screen by removing the original reinforced glass that may be physically cut The small cracks generated by the glass and the projections of the cut surface without destroying the touch screen structure formed on the unit elements of the glass substrate can improve the side strength and ensure mass production.

根據一些實施例,提供一種處理用於觸控螢幕之強化玻璃基板的方法。在處理觸控螢幕之強化玻璃基板的方法中,數個導電結構可以形成在一原始強化玻璃基板的數個單元元件上。原始強化玻璃基板可以被沿著單元元件的數個界線做物理性切割,以形成具有切割面的初級強化玻璃基板。形成於初級強化玻璃基板之切割面上的微小裂痕可以化學蝕刻製程加以移除,以形成強化玻璃基板。 In accordance with some embodiments, a method of processing a tempered glass substrate for a touch screen is provided. In a method of processing a tempered glass substrate of a touch screen, a plurality of conductive structures may be formed on a plurality of unit elements of an original tempered glass substrate. The original tempered glass substrate can be physically cut along several boundaries of the unit elements to form a primary tempered glass substrate having a cut surface. The microcracks formed on the cut surface of the primary tempered glass substrate can be removed by a chemical etching process to form a tempered glass substrate.

在數個實施例中,物理性切割之步驟可以包括雷射切割製程、水刀切割製程、噴砂切割製程、削減切割製程等等。 In several embodiments, the physical cutting step may include a laser cutting process, a waterjet cutting process, a sandblasting process, a cutting process, and the like.

在數個實施例中,噴砂切割製程可以包括以一噴嘴快速地噴灑一研磨料及空氣至原始強化玻璃基板,以切割原始強化玻璃基板,噴嘴之內徑為約0.3公釐至約3公釐。 In several embodiments, the blasting process can include rapidly spraying an abrasive and air onto the original tempered glass substrate with a nozzle to cut the original tempered glass substrate, the nozzle having an inner diameter of from about 0.3 mm to about 3 mm.

在數個實施例中,以噴砂製程所形成之初級強化玻璃基板之切割面可以具有一凸出部,凸出部從切割面起算之一長度不超過約280微米。 In several embodiments, the cut surface of the primary tempered glass substrate formed by the blasting process may have a projection having a length from the cut surface of no more than about 280 microns.

在數個實施例中,原始強化玻璃基板之厚度可以為約0.5公釐至約3公釐。 In several embodiments, the original tempered glass substrate can have a thickness of from about 0.5 mm to about 3 mm.

在數個實施例中,此方法可以更包括將金屬遮罩設置於強化玻璃基板上,並物理性蝕刻原始強化玻璃基板未被金屬遮罩覆蓋之部份,以形成數個開孔貫穿原始強化玻璃基板。 In several embodiments, the method may further include disposing a metal mask on the tempered glass substrate and physically etching the portion of the original tempered glass substrate that is not covered by the metal mask to form a plurality of openings through the original reinforcement. glass substrate.

在數個實施例中,化學蝕刻之步驟可以使用一蝕刻溶液蝕刻切割面之深度至約100微米至約700微米。蝕刻溶液包括一氫氟酸。 In several embodiments, the step of chemical etching may etch the depth of the cut face to between about 100 microns and about 700 microns using an etching solution. The etching solution includes a hydrofluoric acid.

在數個實施例中,此方法更可以包括形成一遮罩圖案於強化玻璃基板上,以使強化玻璃基板選擇性地暴露出數條界線。遮罩圖案可以包括至少一層。 In several embodiments, the method may further include forming a mask pattern on the strengthened glass substrate to selectively expose the plurality of boundaries to the strengthened glass substrate. The mask pattern may include at least one layer.

根據數個實施例,原始強化玻璃基板可以被物理性切割。強化玻璃基板之切割面可以用包括氫氟酸來化學蝕刻,以移除微小裂痕及凸出部。如此,用於觸控螢幕之強化玻璃基板可具有增加之彎曲強度。 According to several embodiments, the original strengthened glass substrate can be physically cut. The cut surface of the tempered glass substrate can be chemically etched using hydrofluoric acid to remove microcracks and bulges. As such, the tempered glass substrate for the touch screen can have increased bending strength.

因此,由於觸控螢幕之強化玻璃基板可具有提高之側面強度及彎曲強度,觸控螢幕可不在製造過程中被破壞。再者,數個觸控螢幕可以由單一原始強化玻璃基板所製成,因此觸控螢幕之量產可以明顯被提高。 Therefore, since the tempered glass substrate of the touch screen can have improved side strength and bending strength, the touch screen can be not damaged during the manufacturing process. Furthermore, several touch screens can be made from a single original tempered glass substrate, so the mass production of the touch screen can be significantly improved.

再者,原始強化玻璃基板上的單元元件的導電結構可以不在物理性切割時受到破壞。因此,強化玻璃基板可以被降低成本及短時間地製造。 Furthermore, the conductive structure of the unit elements on the original tempered glass substrate may not be damaged during physical cutting. Therefore, the tempered glass substrate can be manufactured at a reduced cost and in a short time.

此外,此方法可以運用在強化玻璃基板之邊緣,使得導電結構可以不被損壞。因此,可大大改善觸控螢幕的量產。 In addition, the method can be applied to the edge of the tempered glass substrate so that the conductive structure can be prevented from being damaged. Therefore, the mass production of the touch screen can be greatly improved.

以下將配合顯示了部分實施例的所附圖式,對於各種不同的實施例進行更加完整的描述。然而本發明可有許多不同的實施態樣,而不僅限於在此提出的實施例。這些實 施例係用以徹底且完整地揭露本發明,並使得本發明所屬技術領域中具有通常知識者可據以完全了解本發明之範圍。為能清楚表達本發明之實施態樣,圖式中層與區域的尺寸與相對尺寸可能被誇大。 A more complete description of various embodiments will be provided in conjunction with the accompanying drawings, which are set However, the invention is capable of many different embodiments and is not limited to the embodiments set forth herein. These realities The present invention is to be used in a thorough and complete manner, and the scope of the present invention is fully understood by those of ordinary skill in the art. The size and relative sizes of layers and regions in the drawings may be exaggerated in order to clearly illustrate the embodiments of the invention.

當描述一元件或層係「位在…之上」、「連接至」或「耦接至」另一元件或層時,該元件或層可直接地位在該另一元件或層上、連接至該另一元件或層或耦接至該另一元件或層,或者也可存在有一中介元件或中介層。相對地,當描述一元件或層係「直接位在…之上」、「直接連接至」或「直接耦接至」另一元件或層時,則不存在任何中介元件或中介層。整篇說明書中,相似的元件具有相似的元件符號。此處所用之「及/或」一詞包含一或多個所列出之相關項目的任意及所有組合。 When a component or layer is described as being "on", "connected" or "coupled" to another element or layer, the element or layer can be directly contiguous on the other element or layer, The other element or layer may be coupled to the other element or layer, or an intervening element or interposer may also be present. In contrast, when an element or layer is described as "directly on", "directly connected" or "directly coupled" to another element or layer, there are no intervening elements or intervening layers. Like components have similar component symbols throughout the specification. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

雖然在此可使用第一、第二、第三等用語來描述各個元件、組成、區域、層及/或部分,這些元件、組成、區域、層及/或部分並不受限於這些描述用詞。這些描述用詞僅用以分辨一元件、組成、區域、層及/或部分與其他的元件、組成、區域、層及/或部分。因此,以下討論中的第一元件、組成、區域、層及/或部分也可被命名為第二元件、組成、區域、層及/或部分,而不會背離本發明之教示。 The elements, components, regions, layers, and/or portions may be used to describe various elements, components, regions, layers and/or portions, and are not limited to these descriptions. word. These descriptions are only used to identify one element, component, region, layer and/or portion, and other elements, components, regions, layers and/or parts. Thus, the first element, component, region, layer and/or portion of the following discussion may also be referred to as a second element, component, region, layer and/or portion, without departing from the teachings of the invention.

在此可使用空間相關之用語,例如「在…之下」、「在…下方」、「低於」、「在…上方」、「高於」及其他類似用詞,以簡化圖式中一元件或特徵與另一元件或特徵之間的關係描述。除了表示圖式中的方向外,空間相關用語尚用以包含裝置在使用或運作時的不同方向。舉例而言,一元件 原先位在其他元件或特徵之下或下方,若將圖示之裝置上下翻轉,則該元件會變成位在其他元件或特徵上方。因此,例示的用詞「在…下方」可包含上方與下方兩個方位。亦可將裝置朝其他方向翻轉(如旋轉90°或轉往其他方向),而對應地解釋此種狀況下所使用的空間相關用語。 Space-related terms such as "under", "below", "below", "above", "above" and other similar terms can be used here to simplify one of the patterns. A description of the relationship between an element or feature and another element or feature. In addition to indicating the orientation in the drawings, spatially related terms are used to encompass different orientations of the device in use or operation. For example, a component Originally below or below other components or features, if the device is flipped upside down, the component will become positioned above other components or features. Therefore, the exemplified word "below" can include both upper and lower directions. It is also possible to flip the device in other directions (eg by 90° or to other directions) and to interpret the spatially relevant terms used in this situation.

在此所用之術語僅用以描述特定之實施例,而非用於限定本發明。除非在文中已清楚指明,此處所用之單數形式「一」及「該」亦用以包含複數形式。本說明書中,當使用「包括」一詞與其變形體時,係意指存在有所述之特徵、整體、步驟、運作、元件及/或組成,而非排除一或多個其他特徵、整體、步驟、運作、元件及/或組成之組合的存在或添加。 The terminology used herein is for the purpose of description and the embodiments The singular forms "a" and "the" are used to include the plural. In the present specification, the use of the word "comprising" and its variants is used to mean the presence of the features, the whole, the steps, the operation, the components and/or the composition, and not to exclude one or more other features, The presence or addition of a combination of steps, operations, components, and/or components.

在此係配合繪示了理想狀況下之實施例(及內部結構)的截面圖,來對於實施例進行描述。如此一來,可預期會存在有由於例如製造技術及/或公差而造成的圖示形狀差異。因此,實施例並未將區域限定成在此所示之特定形狀,而包含例如由製造而導致的形狀差異。例如一以長方形來描述之離子植入區域,通常具有圓形或弧形之特徵及/或在邊緣具有植入濃度梯度,而非呈現植入區與非植入區之二元變化。同樣地,藉由離子植入而形成埋入區,可能導致在埋入區與進行植入的表面之間有某些離子植入。因此,繪示於圖中之區域僅為示意之用,其形狀並非用以描繪裝置之區域的實際形狀,亦非用以限制本發明之範圍。 The cross-sectional views of the embodiments (and internal structures) under ideal conditions are shown here to describe the embodiments. As such, it is contemplated that there may be variations in the shapes of the illustrations due to, for example, manufacturing techniques and/or tolerances. Thus, the embodiments do not limit the regions to the particular shapes shown herein, but include, for example, the resulting differences in the. For example, an ion implantation region, described as a rectangle, typically has a circular or curved feature and/or has an implant concentration gradient at the edge rather than exhibiting a binary change in the implanted and non-implanted regions. Likewise, the formation of a buried region by ion implantation may result in some ion implantation between the buried region and the surface being implanted. Therefore, the regions illustrated in the figures are for illustrative purposes only, and are not intended to depict the actual shapes of the regions of the device, and are not intended to limit the scope of the invention.

除非另有定義,此處使用之所有用詞(包含技術及科 學用語),係具有與本發明所屬技術領域中通常知識者所了解之意義相同的意義。另外,本文中之用詞,例如那些在一般通用之字典中即有定義的用詞,係具有與相關技術領域中習慣用法相同的意義,除非另有定義,否則不應以理想化或過於正式的方式加以解釋。 Unless otherwise defined, all terms used herein (including technology and subjects) The term "speech" has the same meaning as understood by those of ordinary skill in the art to which the invention pertains. In addition, the terms used in this article, such as those that are defined in the general dictionary, have the same meaning as the idioms in the related art, and should not be idealized or too formal unless otherwise defined. The way to explain it.

以下配合所附圖式,對於本發明之實施例進行詳細說明。 The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

用於處理觸控螢幕之強化玻璃基板的方法Method for processing a tempered glass substrate of a touch screen

第1圖是根據數個實施例之處理用於觸控螢幕之強化玻璃基板的方法的方塊圖。第2A~2E圖是第1圖中處理強化玻璃基板的方法的剖面流程圖。 1 is a block diagram of a method of processing a tempered glass substrate for a touch screen in accordance with several embodiments. 2A to 2E are cross-sectional flowcharts showing a method of processing a tempered glass substrate in Fig. 1.

參照第1圖及第2A圖所示,在步驟S210中,用於觸控螢幕之導電結構110可以形成在一原始強化玻璃基板(original tempered glass)100的數個單元元件(unit cell)R上。 Referring to FIGS. 1 and 2A, in step S210, the conductive structure 110 for the touch screen can be formed on a plurality of unit cells R of an original tempered glass 100. .

在數個實施例中,依據原始強化玻璃基板100的應用,原始強化玻璃基板100可以有不同的厚度及尺寸。舉例來說,原始強化玻璃基板100的尺寸可以是約為370公釐×470公釐,厚度為約0.5公釐到約3公釐。 In several embodiments, the original tempered glass substrate 100 can have different thicknesses and sizes depending on the application of the original tempered glass substrate 100. For example, the original tempered glass substrate 100 may have a size of about 370 mm x 470 mm and a thickness of about 0.5 mm to about 3 mm.

在數個實施例中,原始強化玻璃基板100可以透過將一玻璃基板加熱至約670℃到約710℃間之軟化溫度,壓縮被加熱之玻璃基板,使用一冷空氣快速冷卻受到壓縮之玻璃基板,壓縮被冷卻之玻璃基板的表面並拉伸被冷卻之玻璃基板的內部而形成。或者,原始強化玻璃基板可以透過將一玻璃基板浸泡於硝酸鉀溶液中,並於約400℃到約 450℃加熱玻璃基板持續約18小時而形成。 In several embodiments, the original strengthened glass substrate 100 can compress a heated glass substrate by heating a glass substrate to a softening temperature between about 670 ° C and about 710 ° C, and rapidly cooling the compressed glass substrate using a cold air. The surface of the glass substrate to be cooled is compressed and stretched to form the inside of the cooled glass substrate. Alternatively, the original tempered glass substrate can be immersed in a potassium nitrate solution through a glass substrate at about 400 ° C to about The glass substrate was heated at 450 ° C for about 18 hours to form.

在數個實施例中,導電結構110可以形成於原始強化玻璃基板100上。特別的是,在物理性切割原始強化玻璃基板100之前,導電結構110可以形成在強化玻璃基板的單元元件R上。在此,各個單元元件的尺寸可對應於觸控面板或觸控螢幕的尺寸。 In several embodiments, the electrically conductive structure 110 can be formed on the original strengthened glass substrate 100. In particular, the conductive structure 110 may be formed on the unit element R of the strengthened glass substrate before the original tempered glass substrate 100 is physically cut. Here, the size of each unit element may correspond to the size of the touch panel or the touch screen.

在數個實施例中,導電結構110可以包括有數個感測圖案、數個接地電極、數個跳線(jumper)等,包括一透明電極,例如是銦錫氧化物(ITO)。 In several embodiments, the conductive structure 110 can include a plurality of sensing patterns, a plurality of ground electrodes, a plurality of jumpers, and the like, including a transparent electrode, such as indium tin oxide (ITO).

雖然未繪示於圖中,可以額外地進行形成貫穿具有導電結構110之原始強化玻璃基板100的開孔(hole)的製程。開孔之形成可以是藉由將具有開口之金屬遮罩(metal mask)設置在原始強化玻璃基板100上,並物理蝕刻金屬遮罩未覆蓋部分之原始強化玻璃基板100。開孔可以對應到智慧型手機或智慧型平板電腦之出音孔或按鍵孔。 Although not shown in the drawings, a process of forming a hole through the original strengthened glass substrate 100 having the conductive structure 110 may be additionally performed. The opening may be formed by disposing a metal mask having an opening on the original strengthened glass substrate 100 and physically etching the original tempered glass substrate 100 of the uncovered portion of the metal mask. The opening can correspond to the sound hole or button hole of a smart phone or a smart tablet.

參照第1圖及第2B圖所示,在步驟S220中,遮罩圖案(mask pattern)120可以形成於原始強化玻璃基板100上。 Referring to FIGS. 1 and 2B, in step S220, a mask pattern 120 may be formed on the original strengthened glass substrate 100.

在數個實施例中,遮罩圖案120可以具有暴露出原始強化玻璃基板100之單元元件間的界線的開口。 In several embodiments, the mask pattern 120 may have openings that expose the boundaries between the unit elements of the original strengthened glass substrate 100.

在數個實施例中,為了防止原始強化玻璃基板100在接下來的化學蝕刻製程中受到蝕刻,二個遮罩圖案120可形成於原始強化玻璃基板100之上表面及下表面。並且,遮罩圖案120可以包括至少一層。 In several embodiments, in order to prevent the original strengthened glass substrate 100 from being etched in the subsequent chemical etching process, the two mask patterns 120 may be formed on the upper surface and the lower surface of the original strengthened glass substrate 100. Also, the mask pattern 120 may include at least one layer.

此外,在使用蝕刻溶液蝕刻切割面(cut face)時,遮罩圖案120可遮蓋原始強化玻璃基板100之切割面外之剩餘 部分,以防止強化玻璃切割面外之剩餘部分受到蝕刻。 In addition, when the cut surface is etched using the etching solution, the mask pattern 120 may cover the remaining of the cut surface of the original strengthened glass substrate 100. Partly to prevent the remainder of the tempered glass cut surface from being etched.

在數個實施例中,遮罩圖案120可以包括一遮罩膜(mask film),遮罩膜可以不被蝕刻溶液蝕刻。例如,遮罩膜可以具有抗化學腐蝕性(chemical resistance)。 In several embodiments, the mask pattern 120 can include a mask film that can be etched away from the etching solution. For example, the mask film can have chemical resistance.

在數個實施例中,遮罩圖案120可以包括依序堆疊之第一遮罩圖案(未繪示)及第二遮罩圖案(未繪示)。第一遮罩圖案及第二遮罩圖案可以實質上包括相同材料。或者,遮罩圖案120可以包括依序堆疊之第一遮罩圖案(未繪示)、第二遮罩圖案(未繪示)及第三遮罩圖案(未繪示)。第一遮罩圖案至第三遮罩圖案可以實質上包括具有抗化學腐蝕性之相同材料。 In several embodiments, the mask pattern 120 may include a first mask pattern (not shown) and a second mask pattern (not shown) stacked in sequence. The first mask pattern and the second mask pattern may comprise substantially the same material. Alternatively, the mask pattern 120 may include a first mask pattern (not shown), a second mask pattern (not shown), and a third mask pattern (not shown) stacked in sequence. The first to third mask patterns may substantially comprise the same material having chemical resistance.

參照第1圖及第2C圖所示,在步驟S230中,原始強化玻璃基板100可以被沿著單元元件R之間的界線物理切割成初級強化玻璃基板(preliminary tempered glass substrate)101。 Referring to FIGS. 1 and 2C, in step S230, the original strengthened glass substrate 100 may be physically cut into a preliminary tempered glass substrate 101 along a boundary line between the unit elements R.

在數個實施例中,物理性切割之製程包括雷射切割製程(laser cutting process)、水刀切割製程(water jet cutting process)、噴砂切割製程(sand blast cutting process)或削減切割製程(trim cutting process)等。原始強化玻璃基板100可以僅以噴砂切割製程切割。或者,原始強化玻璃基板100可以以雷射切割製程和削減切割製程切割。 In several embodiments, the physical cutting process includes a laser cutting process, a water jet cutting process, a sand blast cutting process, or a trim cutting process. Process) and so on. The original strengthened glass substrate 100 can be cut only by a sandblasting process. Alternatively, the original tempered glass substrate 100 can be cut by a laser cutting process and a cutting process.

在此,如第3圖所示,初級強化玻璃基板101可以具有一切割面。另外,物理性切割製程引起的衝擊在切割面可能產生微小裂痕(minute crack)C。 Here, as shown in FIG. 3, the primary tempered glass substrate 101 may have a cut surface. In addition, the impact caused by the physical cutting process may cause minute cracks C on the cut surface.

第3圖繪示藉由物理性切割製程之強化玻璃基板的切 割面之剖面放大圖。 Figure 3 is a diagram showing the tempered glass substrate cut by a physical cutting process An enlarged view of the section of the cut surface.

參照第3圖所示,切割面上之微小裂痕C可能會降低初級強化玻璃基板101之彎曲強度及側邊強度(side strength)。因此,有微小裂痕C之初級強化玻璃基板101可能容易在後續處理過程中損壞。 Referring to Fig. 3, the micro cracks C on the cut surface may lower the bending strength and side strength of the primary strengthened glass substrate 101. Therefore, the primary tempered glass substrate 101 having minute cracks C may be easily damaged during subsequent processing.

再者,切割面上可能形成一凸出部(protrusion)。凸出部可能以一長度D從切割面上凸出。凸出部也可能降低初級強化玻璃基板101之彎曲強度及側邊強度。特別的是,初級強化玻璃基板101之側邊強度和凸出部長度D可能成比例關係。也就是說,凸出部長度D越長,初級強化玻璃基板101之側邊強度則會越低。相反地,凸出部長度D越短,初級強化玻璃基板101之側邊強度則會越大。 Furthermore, a protrusion may be formed on the cutting surface. The projection may protrude from the cutting face with a length D. The projections may also lower the bending strength and the side strength of the primary tempered glass substrate 101. In particular, the side strength of the primary strengthened glass substrate 101 and the length D of the projections may be proportional. That is, the longer the length D of the projection, the lower the strength of the side of the primary tempered glass substrate 101. Conversely, the shorter the length D of the projection, the greater the strength of the side of the primary tempered glass substrate 101.

在數個實施例中,切割面可以是圓形(rounded shape)、圓角(rounded corner)或具有圓形凸出部的側平面。當切割面可具有上述之形狀,相對於施加在初級強化玻璃基板101側表面之衝擊,初級強化玻璃基板101可具有較堅固的結構。相反地,當切割面具有一尖銳轉角或尖銳之凸出部,相對於施加在強化玻璃基板側表面之衝擊,強化玻璃基板可具有較脆弱的結構。因此,凸出部可以較佳地具有一短的長度D。另外,切割面可以是圓形,特別是在中央部分為圓形。 In several embodiments, the cutting face can be a rounded shape, a rounded corner, or a side plane having a rounded projection. When the cut surface can have the above-described shape, the primary tempered glass substrate 101 can have a relatively strong structure with respect to the impact applied to the side surface of the primary tempered glass substrate 101. Conversely, when the cutting mask has a sharp corner or a sharp projection, the strengthened glass substrate may have a relatively fragile structure with respect to the impact applied to the side surface of the strengthened glass substrate. Therefore, the projections may preferably have a short length D. In addition, the cutting face may be circular, in particular circular in the central portion.

在數個實施例中,物理性切割製程可以是使用噴砂機器執行的噴砂切割製程。舉例來說,噴砂製程可包括以約7 kgf/cm2到約11 kgf/cm2的壓力,通過噴嘴使研磨劑快速地噴灑至原始強化玻璃基板100上。研磨料可包含金屬或 非金屬。噴嘴之內徑可為約0.3公釐至約3公釐。使用噴嘴的噴砂切割製程可不需使用蝕刻遮罩,因此處理強化玻璃基板的時間可被縮短。 In several embodiments, the physical cutting process can be a sandblasting process performed using a sandblasting machine. For example, the blasting process can include rapidly spraying the abrasive onto the original strengthened glass substrate 100 through a nozzle at a pressure of from about 7 kgf/cm 2 to about 11 kgf/cm 2 . The abrasive can comprise a metal or a non-metal. The inner diameter of the nozzle can be from about 0.3 mm to about 3 mm. The blasting process using nozzles eliminates the need for an etch mask, so the time to process the tempered glass substrate can be shortened.

如上所述,原始強化玻璃基板100可切割形成初級強化玻璃基板101。初級強化玻璃基板101的切割面上可能會產生微小裂痕C。 As described above, the original strengthened glass substrate 100 can be cut to form the primary strengthened glass substrate 101. A minute crack C may be generated on the cut surface of the primary tempered glass substrate 101.

在數個實施例中,凸出部自切割面凸出之長度不超過280微米。凸出部可以依據遮罩圖案120之厚度及噴嘴之內徑而變化。凸出部可以是由研磨料稠密地集中於切割面的中心部分和研磨料稀疏地集中於切割面邊緣所產生出來。 In several embodiments, the projections project from the cutting face to a length of no more than 280 microns. The projections may vary depending on the thickness of the mask pattern 120 and the inner diameter of the nozzle. The projections may be produced by densely concentrating the abrasive material on the central portion of the cutting surface and sparsely concentrating the abrasive material on the edge of the cutting surface.

參照第1圖及第2D圖所示,在步驟S240中,初級強化玻璃基板101切割面上的微小裂痕C和凸出部可能藉由化學蝕刻製程來移除,以形成強化玻璃基板102。 Referring to FIGS. 1 and 2D, in step S240, minute cracks C and projections on the cut surface of the primary tempered glass substrate 101 may be removed by a chemical etching process to form the tempered glass substrate 102.

在數個實施例中,化學蝕刻製程可以使用包含氫氟酸(hydrofluoric acid)之蝕刻溶液,切割面可能被移除約100微米至約700微米的深度。 In several embodiments, the chemical etching process may use an etching solution comprising hydrofluoric acid, and the cut surface may be removed to a depth of from about 100 microns to about 700 microns.

在數個實施例中,初級原始強化玻璃基板101可以浸泡於包含氫氟酸之蝕刻溶液中,以蝕刻微小裂痕C及凸出部。或者,包含氫氟酸之蝕刻溶液可以噴灑於初級原始強化玻璃基板101之切割面。 In several embodiments, the primary primary tempered glass substrate 101 may be immersed in an etching solution containing hydrofluoric acid to etch microcracks C and protrusions. Alternatively, an etching solution containing hydrofluoric acid may be sprayed on the cut surface of the primary original tempered glass substrate 101.

在數個實施例中,蝕刻溶液可以包含含有氫氟酸之混合溶液。舉例來說,蝕刻溶液可以包含一氫氟酸溶液。或者,蝕刻溶液可以包含氫氟酸、硝酸和水之混合溶液。此外,蝕刻溶液可以包含氫氟酸、鹽酸(hydrochloric acid)、 氟化氫銨(ammonium hydrogen fluoride)和水之混合溶液。 In several embodiments, the etching solution may comprise a mixed solution containing hydrofluoric acid. For example, the etching solution may comprise a hydrofluoric acid solution. Alternatively, the etching solution may contain a mixed solution of hydrofluoric acid, nitric acid, and water. In addition, the etching solution may comprise hydrofluoric acid, hydrochloric acid, A mixed solution of ammonium hydrogen fluoride and water.

蝕刻溶液可流動於微小裂痕C,以移除微小裂痕C及凸出部。如此一來,當具有微小裂痕C之切割面可能被蝕刻時,凸出部的長度可以減少,從而提高強化玻璃基板102之側邊強度及彎曲強度。 The etching solution can flow to the micro cracks C to remove the micro cracks C and the protrusions. As a result, when the cut surface having the micro cracks C may be etched, the length of the protrusions may be reduced, thereby improving the strength and bending strength of the side of the strengthened glass substrate 102.

因此,強化玻璃基板102可不具有微小裂痕C及凸出部,而可以提高強化玻璃基板102之側邊強度及彎曲強度。因此,衝擊所造成之強化玻璃基板102的損壞被抑制。遮罩圖案120可以保護強化玻璃基板102之上表面及下表面。因此強化玻璃基板102之上表面及下表面可以不受到蝕刻溶液蝕刻。 Therefore, the tempered glass substrate 102 does not have the micro cracks C and the convex portions, and the side strength and the bending strength of the tempered glass substrate 102 can be improved. Therefore, the damage of the tempered glass substrate 102 caused by the impact is suppressed. The mask pattern 120 can protect the upper surface and the lower surface of the strengthened glass substrate 102. Therefore, the upper surface and the lower surface of the strengthened glass substrate 102 may not be etched by the etching solution.

參照第1圖及第2E圖所示,在步驟S250中,遮罩圖案120可從強化玻璃基板120上移除。 Referring to FIGS. 1 and 2E, in step S250, the mask pattern 120 can be removed from the strengthened glass substrate 120.

在數個實施例中,遮罩圖案120可以藉由剝離或蝕刻來移除。舉例來說,當遮罩圖案120可能包含一光阻圖案時,遮罩圖案120可以藉由灰化製程(ashing process)和去膜製程(stripping process)移除。當遮罩圖案120可能包含一薄層(sheet)時,遮罩圖案120可以藉由使用蝕刻溶液之蝕刻製程移除。 In several embodiments, the mask pattern 120 can be removed by stripping or etching. For example, when the mask pattern 120 may include a photoresist pattern, the mask pattern 120 may be removed by an ashing process and a stripping process. When the mask pattern 120 may include a thin sheet, the mask pattern 120 may be removed by an etching process using an etching solution.

強化玻璃基板102可以接著使用去離子水清潔。強化玻璃基板102可以有好的側邊強度。在數個實施例中,含有強化玻璃基板102之觸控螢幕可以包括具有一體成型的強化玻璃的觸控螢幕、具有一體成型的保護玻璃(cover glass)的觸控螢幕及採用強化玻璃的觸控螢幕等。 The strengthened glass substrate 102 can then be cleaned using deionized water. The strengthened glass substrate 102 can have good side strength. In several embodiments, the touch screen including the tempered glass substrate 102 may include a touch screen having an integrally formed tempered glass, a touch screen having an integrally formed cover glass, and a touch using tempered glass. Screen and so on.

根據此一實施例,強化玻璃基板可不具有微小裂痕及 凸出部。因此強化玻璃基板在製作觸控面板時所需之側邊強度及彎曲強度可以被加強。 According to this embodiment, the tempered glass substrate may have no micro cracks and Protrusion. Therefore, the strength and bending strength required for the tempered glass substrate in fabricating the touch panel can be enhanced.

再者,這方法可用於原始強化玻璃基板之邊緣,所以導電結構可以不會受到損害。因此,可大大改善觸控螢幕的量產。 Moreover, this method can be applied to the edge of the original tempered glass substrate, so that the conductive structure can be not damaged. Therefore, the mass production of the touch screen can be greatly improved.

噴砂切割製程之噴嘴內徑與強化玻璃基板切割面之對應形狀改變的分析Analysis of the corresponding shape change of the inner diameter of the nozzle of the blasting cutting process and the cut surface of the tempered glass substrate

準備厚度為0.7公釐之第一強化玻璃。準備厚度為1.1公釐之第二強化玻璃。對於第一強化玻璃和第二強化玻璃施以使用研磨料的噴砂製程以切割第一強化玻璃和第二強化玻璃,並且改變噴嘴內徑。在噴砂製程中,第一及第二強化玻璃基板與噴嘴之距離為500微米。噴灑研磨料的壓力為9 kgf/cm2。移動噴嘴的速度為5公釐/秒(mm/s)。對於由第一及第二強化玻璃基板之切割面起算之凸出部長度D進行測量。測得之長度D列於表1。 A first tempered glass having a thickness of 0.7 mm was prepared. A second tempered glass having a thickness of 1.1 mm was prepared. A first tempering glass and a second tempered glass are subjected to a blasting process using an abrasive to cut the first tempered glass and the second tempered glass, and the nozzle inner diameter is changed. In the sand blasting process, the distance between the first and second tempered glass substrates and the nozzle is 500 micrometers. The pressure at which the abrasive was sprayed was 9 kgf/cm 2 . The speed of the moving nozzle is 5 mm/s. The length D of the projections from the cut faces of the first and second tempered glass substrates was measured. The measured length D is listed in Table 1.

如表1所示,可以發現凸出部長度D相對於噴嘴內徑之增加成比例地逐漸增加。特別的是,當噴嘴內徑可能超過3公釐時,可注意到長度D急遽地增加到不低於0.3公釐。因此噴嘴內徑不超過3公釐在噴砂製程中是較佳的設計。 As shown in Table 1, it can be found that the length D of the projection gradually increases in proportion to the increase in the inner diameter of the nozzle. In particular, when the inner diameter of the nozzle may exceed 3 mm, it can be noted that the length D is rapidly increased to not less than 0.3 mm. Therefore, the inner diameter of the nozzle is not more than 3 mm, which is a preferred design in the sandblasting process.

化學蝕刻量與強化玻璃基板對應之彎曲強度改變的分析Analysis of the change of bending strength corresponding to the amount of chemical etching and the strengthened glass substrate

物理性切割原始強化玻璃基板使之成為尺寸4英吋且厚度0.55公釐之強化玻璃基板。強化玻璃基板有一光阻遮罩圖案。使用蝕刻溶液化學蝕刻強化玻璃基板之切割面,並控制蝕刻深度。對於與切割面之蝕刻深度相關的強化玻璃基板彎曲強度進行測量。測得之彎曲強度列於表2。 The original tempered glass substrate was physically cut to a tempered glass substrate having a size of 4 inches and a thickness of 0.55 mm. The tempered glass substrate has a photoresist mask pattern. The etched surface of the tempered glass substrate is chemically etched using an etching solution, and the etching depth is controlled. The bending strength of the strengthened glass substrate in relation to the etching depth of the cut surface was measured. The measured bending strengths are shown in Table 2.

如表2所示,當蝕刻深度為100微米至700微米,可注意到強化玻璃基板的彎曲強度不低於180牛頓(N)。相反地,當蝕刻深度少於100微米,強化玻璃基板並不具有不低於180牛頓(N)的彎曲強度。此外,當蝕刻深度超過700微米,彎曲強度不會增加且遮罩圖案自強化玻璃基板剝離。因此,為了提供強化玻璃基板不低於180牛頓(N)之穩定的彎曲強度,較佳之切割面蝕刻深度為100微米到700微米。 As shown in Table 2, when the etching depth was from 100 μm to 700 μm, it was noted that the bending strength of the strengthened glass substrate was not less than 180 Newtons (N). Conversely, when the etching depth is less than 100 μm, the tempered glass substrate does not have a bending strength of not less than 180 Newtons (N). Further, when the etching depth exceeds 700 μm, the bending strength does not increase and the mask pattern peels off from the strengthened glass substrate. Therefore, in order to provide a stable bending strength of the tempered glass substrate of not less than 180 Newtons (N), it is preferred that the cut surface has an etching depth of from 100 μm to 700 μm.

化學蝕刻量與強化玻璃基板對應之彎曲強度改變的分析Analysis of the change of bending strength corresponding to the amount of chemical etching and the strengthened glass substrate

物理性切割原始強化玻璃基板使之成為尺寸4英吋且厚度0.7公釐之強化玻璃基板。強化玻璃基板有一光阻遮罩圖案。使用蝕刻溶液來化學蝕刻強化玻璃基板之切割面,並控制蝕刻深度。針對與切割面之蝕刻深度相關的強化玻璃基板之彎曲強度進行測量。測得之彎曲強度列於表3。 The original tempered glass substrate was physically cut to a tempered glass substrate having a size of 4 inches and a thickness of 0.7 mm. The tempered glass substrate has a photoresist mask pattern. An etching solution is used to chemically etch the cut surface of the strengthened glass substrate and control the etching depth. The bending strength of the strengthened glass substrate related to the etching depth of the cut surface was measured. The measured flexural strengths are listed in Table 3.

如表3所示,當蝕刻深度為100微米至700微米,可注意到強化玻璃基板的彎曲強度不低於230牛頓(N)。相反地,當蝕刻深度少於100微米,強化玻璃基板並不具有不低於230牛頓(N)的彎曲強度。此外,當蝕刻深度超過700微米,彎曲強度不會增加且遮罩圖案自強化玻璃基板剝離。因此,為了提供強化玻璃基板不低於230牛頓(N)之穩定彎曲強度,較佳之切割面蝕刻深度為100微米到700微米。 As shown in Table 3, when the etching depth is from 100 μm to 700 μm, it is noted that the bending strength of the strengthened glass substrate is not less than 230 Newtons (N). Conversely, when the etching depth is less than 100 μm, the tempered glass substrate does not have a bending strength of not less than 230 Newtons (N). Further, when the etching depth exceeds 700 μm, the bending strength does not increase and the mask pattern peels off from the strengthened glass substrate. Therefore, in order to provide a stable bending strength of the tempered glass substrate of not less than 230 Newtons (N), it is preferred that the cut surface has an etching depth of from 100 μm to 700 μm.

化學蝕刻量與強化玻璃基板對應之彎曲強度改變的分析Analysis of the change of bending strength corresponding to the amount of chemical etching and the strengthened glass substrate

物理性切割原始強化玻璃基板使之成為尺寸7英吋且厚度0.85公釐之強化玻璃基板。強化玻璃基板有一光阻遮罩圖案。使用蝕刻溶液來化學蝕刻強化玻璃基板之切割面,並控制蝕刻深度。針對與切割面之蝕刻深度相關的強 化玻璃基板之彎曲強度進行測量。測得之彎曲強度列於表4。 The original tempered glass substrate was physically cut to a tempered glass substrate having a size of 7 inches and a thickness of 0.85 mm. The tempered glass substrate has a photoresist mask pattern. An etching solution is used to chemically etch the cut surface of the strengthened glass substrate and control the etching depth. Strong for the depth of etching of the cut surface The bending strength of the glass substrate was measured. The measured bending strengths are shown in Table 4.

如表4所示,當蝕刻深度為100微米至700微米,可注意到強化玻璃基板的彎曲強度不低於340牛頓(N)。相反地,當蝕刻深度少於100微米,強化玻璃基板並不具有不低於340牛頓(N)的彎曲強度。此外,當蝕刻深度超過700微米,彎曲強度不會增加,且遮罩圖案自強化玻璃基板剝離。因此,為了提供強化玻璃基板不低於340牛頓(N)之穩定彎曲強度,較佳之切割面蝕刻深度為100微米到700微米。 As shown in Table 4, when the etching depth was from 100 μm to 700 μm, it was noted that the bending strength of the strengthened glass substrate was not less than 340 Newtons (N). Conversely, when the etching depth is less than 100 μm, the tempered glass substrate does not have a bending strength of not less than 340 Newtons (N). Further, when the etching depth exceeds 700 μm, the bending strength does not increase, and the mask pattern is peeled off from the strengthened glass substrate. Therefore, in order to provide a stable bending strength of the tempered glass substrate of not less than 340 Newtons (N), it is preferred that the cut surface has an etching depth of from 100 μm to 700 μm.

化學蝕刻量與強化玻璃基板對應之彎曲強度改變的分析Analysis of the change of bending strength corresponding to the amount of chemical etching and the strengthened glass substrate

物理性切割原始強化玻璃基板使之成為尺寸7英吋且厚度1.5公釐之強化玻璃基板。強化玻璃基板有一光阻遮罩圖案。使用蝕刻溶液來化學蝕刻強化玻璃基板之切割面,並控制蝕刻深度。針對與切割面之蝕刻深度相關的強化玻璃基板之彎曲強度進行測量。測得之彎曲強度列於表5。 The original tempered glass substrate was physically cut to a tempered glass substrate having a size of 7 inches and a thickness of 1.5 mm. The tempered glass substrate has a photoresist mask pattern. An etching solution is used to chemically etch the cut surface of the strengthened glass substrate and control the etching depth. The bending strength of the strengthened glass substrate related to the etching depth of the cut surface was measured. The measured flexural strengths are listed in Table 5.

如表5所示,當蝕刻深度為100微米至700微米,可注意到強化玻璃基板的彎曲強度不低於700牛頓(N)。相反地,當蝕刻深度少於100微米,強化玻璃基板並不具有不 低於700牛頓(N)的彎曲強度。此外,當蝕刻深度超過700微米,彎曲強度不會增加且遮罩圖案自強化玻璃基板剝離。因此,為了提供強化玻璃基板不低於700牛頓(N)之穩定彎曲強度,較佳之切割面蝕刻深度為100微米到700微米。 As shown in Table 5, when the etching depth was from 100 μm to 700 μm, it was noted that the bending strength of the strengthened glass substrate was not less than 700 Newtons (N). Conversely, when the etch depth is less than 100 microns, the tempered glass substrate does not have Bending strength below 700 Newtons (N). Further, when the etching depth exceeds 700 μm, the bending strength does not increase and the mask pattern peels off from the strengthened glass substrate. Therefore, in order to provide a stable bending strength of the tempered glass substrate of not less than 700 Newtons (N), it is preferred that the etched depth of the cut surface is from 100 micrometers to 700 micrometers.

化學蝕刻量與強化玻璃基板對應之彎曲強度改變的分析Analysis of the change of bending strength corresponding to the amount of chemical etching and the strengthened glass substrate

物理性切割原始強化玻璃基板使之為尺寸7英吋且厚度3.0公釐之強化玻璃基板。強化玻璃基板有一光阻遮罩圖案。使用蝕刻溶液來化學蝕刻強化玻璃基板之切割面,並控制蝕刻深度。針對與切割面之蝕刻深度相關的強化玻璃基板之彎曲強度進行測量。測得之彎曲強度列於表6。 The original tempered glass substrate was physically cut to a tempered glass substrate having a size of 7 inches and a thickness of 3.0 mm. The tempered glass substrate has a photoresist mask pattern. An etching solution is used to chemically etch the cut surface of the strengthened glass substrate and control the etching depth. The bending strength of the strengthened glass substrate related to the etching depth of the cut surface was measured. The measured bending strengths are shown in Table 6.

如表6所示,當蝕刻深度為100微米至700微米,可注意到強化玻璃基板的彎曲強度不低於1500牛頓(N)。相反地,當蝕刻深度少於100微米,強化玻璃基板並不具有不低於1500牛頓(N)的彎曲強度。此外,當蝕刻深度超過700微米,彎曲強度不會增加,且遮罩圖案自強化玻璃基板剝離。因此,為了提供強化玻璃基板不低於1500牛頓(N)之穩定彎曲強度,較佳之切割面蝕刻深度為100微米到700微米。 As shown in Table 6, when the etching depth was from 100 μm to 700 μm, it was noted that the flexural strength of the strengthened glass substrate was not less than 1,500 Newtons (N). Conversely, when the etching depth is less than 100 μm, the tempered glass substrate does not have a bending strength of not less than 1500 Newtons (N). Further, when the etching depth exceeds 700 μm, the bending strength does not increase, and the mask pattern is peeled off from the strengthened glass substrate. Therefore, in order to provide a stable bending strength of the tempered glass substrate of not less than 1500 Newtons (N), it is preferred that the cut surface has an etching depth of from 100 μm to 700 μm.

根據數個實施例,原始強化玻璃基板可以被物理性切割。強化玻璃基板之切割面可以用含有氫氟酸之化學蝕刻,以移除微小裂痕及凸出部。因此觸控螢幕之強化玻璃基板之彎曲強度可以被加強。 According to several embodiments, the original strengthened glass substrate can be physically cut. The cut surface of the tempered glass substrate can be chemically etched with hydrofluoric acid to remove microcracks and bulges. Therefore, the bending strength of the tempered glass substrate of the touch screen can be enhanced.

因此,由於觸控螢幕之強化玻璃基板之側邊強度與彎曲強度被加強,使得觸控螢幕在製造過程中可以不會被損壞。再者,數個觸控螢幕可由單一強化玻璃基板來製造,因此觸控螢幕的量產可以明顯地改善。 Therefore, since the strength and bending strength of the side of the tempered glass substrate of the touch screen are enhanced, the touch screen can be prevented from being damaged during the manufacturing process. Furthermore, several touch screens can be fabricated from a single tempered glass substrate, so the mass production of the touch screen can be significantly improved.

再者,原始強化玻璃基板上之單元元件之導電結構可以不會在物理性切割製程中受損壞。因此,強化玻璃基板可以在低成本及短時間被製造。 Furthermore, the conductive structure of the unit elements on the original tempered glass substrate may not be damaged in the physical cutting process. Therefore, the tempered glass substrate can be manufactured at low cost and in a short time.

更進一步,此方法可以使用於原始強化玻璃基板之邊緣,而導電結構可以不會受到損害。因此觸控螢幕的量產可以大幅改善。 Furthermore, this method can be used on the edge of the original tempered glass substrate without the conductive structure being damaged. Therefore, the mass production of the touch screen can be greatly improved.

再者,當原始強化玻璃基板可能被物理性切割時,導 電結構可以不會因物理衝擊受到損壞,例如灰化製程可以不施加於跳線、電極等。因此觸控螢幕之製造時間可以被明顯地降低。 Furthermore, when the original tempered glass substrate may be physically cut, The electrical structure may not be damaged by physical impact, for example, the ashing process may not be applied to jumpers, electrodes, and the like. Therefore, the manufacturing time of the touch screen can be significantly reduced.

再者,物理性切割原始強化玻璃基板的製程和化學蝕刻強化玻璃基板切割面的製程可以只使用一遮罩圖案。因而不需要在化學蝕刻中去更換一個新遮罩圖案。藉此,強化玻璃基板之製造時間將會降低,進而提高強化玻璃基板的產量。 Furthermore, the process of physically cutting the original tempered glass substrate and the process of chemically etching the tempered glass substrate cut surface may use only one mask pattern. Thus there is no need to replace a new mask pattern in a chemical etch. Thereby, the manufacturing time of the tempered glass substrate is lowered, and the yield of the tempered glass substrate is further improved.

綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。 In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

S210~S250‧‧‧步驟 S210~S250‧‧‧Steps

100‧‧‧原始強化玻璃基板 100‧‧‧Original tempered glass substrate

101‧‧‧初級強化玻璃基板 101‧‧‧Primary tempered glass substrate

102‧‧‧強化玻璃基板 102‧‧‧ Strengthened glass substrate

110‧‧‧導電結構 110‧‧‧Electrical structure

120‧‧‧遮罩圖案 120‧‧‧ mask pattern

C‧‧‧微小裂痕 C‧‧‧Microcracks

D‧‧‧長度 D‧‧‧ Length

R‧‧‧單元元件 R‧‧‧ unit components

第1圖是根據數個實施例之處理用於觸控螢幕之強化玻璃基板的方法的方塊圖 1 is a block diagram of a method of processing a tempered glass substrate for a touch screen according to several embodiments.

第2A~2E圖是第1圖處理強化玻璃基板的方法的剖面流程圖。 2A to 2E are cross-sectional flowcharts showing a method of processing a tempered glass substrate in Fig. 1.

第3圖繪示藉由物理性切割製程之強化玻璃基板的切割面之剖面放大圖。 Fig. 3 is a cross-sectional enlarged view showing a cut surface of a tempered glass substrate by a physical cutting process.

S210~S250‧‧‧步驟 S210~S250‧‧‧Steps

Claims (8)

一種處理用於觸控螢幕之一強化玻璃基板的方法,該方法包括:準備一原始強化玻璃基板,該原始強化玻璃基板具有複數個單元元件,用於觸控螢幕之複數個導電結構形成於該些單元元件內;沿著該些單元元件之間的複數條界線物理性切割該原始強化玻璃基板,以形成複數個初級強化玻璃基板,該些初級強化玻璃基板具有複數個切割面;以及以一化學蝕刻製程移除位於該些初級強化玻璃基板之該些切割面之微小裂痕,以形成該強化玻璃基板。 A method for processing a tempered glass substrate for a touch screen, the method comprising: preparing an original tempered glass substrate, the original tempered glass substrate having a plurality of unit elements, wherein a plurality of conductive structures for the touch screen are formed Within the unit elements; physically cutting the original tempered glass substrate along a plurality of boundary lines between the unit elements to form a plurality of primary tempered glass substrates, the primary tempered glass substrates having a plurality of cutting faces; The chemical etching process removes minute cracks on the cut faces of the primary strengthened glass substrates to form the strengthened glass substrate. 如申請專利範圍第1項所述之方法,其中物理性切割之步驟包括一雷射切割製程、一水刀切割製程、一噴砂切割製程或一削減切割製程。 The method of claim 1, wherein the step of physically cutting comprises a laser cutting process, a waterjet cutting process, a sandblasting process or a cutting process. 如申請專利範圍第1項所述之方法,其中物理性切割之步驟包括一噴砂切割製程,該噴砂切割製程包括以一噴嘴快速地噴灑一研磨料及空氣至該原始強化玻璃基板,該噴嘴之一內徑為約0.3公釐(mm)至約3公釐。 The method of claim 1, wherein the step of physically cutting comprises a sandblasting process comprising rapidly spraying an abrasive and air onto the original strengthened glass substrate with a nozzle, one of the nozzles The inner diameter is from about 0.3 mm (mm) to about 3 mm. 如申請專利範圍第3項所述之方法,其中以該噴砂切割製程形成之該些初級強化玻璃基板之各該切割面具有一凸出部,各該凸出部從各該切割面起算之一長度不超過約280微米(μm)。 The method of claim 3, wherein each of the cutting masks of the primary tempered glass substrates formed by the blasting cutting process has a protrusion, and each of the protrusions starts from each of the cutting surfaces. The length does not exceed about 280 microns (μm). 如申請專利範圍第4項所述之方法,其中該原始強化玻璃基板之厚度為約0.5公釐至約3公釐。 The method of claim 4, wherein the original tempered glass substrate has a thickness of from about 0.5 mm to about 3 mm. 如申請專利範圍第1項所述之方法,更包括形成一 遮罩圖案於該原始強化玻璃基板上,該遮罩圖案包括至少一層,該遮罩圖案暴露出該些界線。 For example, the method described in claim 1 further includes forming a A mask pattern is on the original tempered glass substrate, the mask pattern including at least one layer, the mask pattern exposing the boundary lines. 如申請專利範圍第1項所述之方法,其中該化學蝕刻製程使用一蝕刻溶液,該蝕刻溶液包括一氫氟酸,並且自各該切割面起算之一蝕刻深度為約100微米至約700微米。 The method of claim 1, wherein the chemical etching process uses an etching solution comprising a hydrofluoric acid and having an etching depth of from about 100 microns to about 700 microns from each of the cutting faces. 如申請專利範圍第1項所述之方法,更包括使用一金屬遮罩物理性蝕刻該原始強化玻璃基板,以形成複數個開孔,該些開孔貫穿該原始強化玻璃基板 The method of claim 1, further comprising physically etching the original tempered glass substrate using a metal mask to form a plurality of openings, the openings extending through the original tempered glass substrate
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