TW201413532A - Touch panel manufacturing method - Google Patents

Touch panel manufacturing method Download PDF

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Publication number
TW201413532A
TW201413532A TW102126967A TW102126967A TW201413532A TW 201413532 A TW201413532 A TW 201413532A TW 102126967 A TW102126967 A TW 102126967A TW 102126967 A TW102126967 A TW 102126967A TW 201413532 A TW201413532 A TW 201413532A
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Taiwan
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tempered glass
touch panel
protective layer
manufacturing
unit
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TW102126967A
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Chinese (zh)
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Byung-Soon Chen
Hyun-Il Cho
Yong-Woon Jung
Kyung-Ho Kim
Hun-Kuk Jeon
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Dongjin Semichem Co Ltd
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Publication of TW201413532A publication Critical patent/TW201413532A/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Abstract

Provided is a method for manufacturing a touch panel, capable of improving durability by improving a masking method. The method for manufacturing a touch panel according to one embodiment of the present invention comprises the steps of: preparing tempered glass having a set cell region; forming a touch sensor on one side of the tempered glass; forming a first protective layer that covers at least the touch sensor using a first protective material; forming a second protective layer that covers at least the first protective layer using a second protective material; forming cellular tempered glass by cutting the tempered glass into the size of the set cell region; removing the second protective layer of the cellular tempered glass; and removing the first protective layer of the cellular tempered glass.

Description

觸控面板製造方法 Touch panel manufacturing method

本申請案以2012年7月27日申請的韓國第2012-0082715號專利申請案和2013年7月24日申請的韓國第2013-0087417號專利申請案為基礎主張優先權,並在本說明書中援引前述基礎案的所有內容。 The present application claims priority on the basis of the Korean Patent Application No. 2012-0082715, filed on July 27, 2012, and the Korean Patent Application No. 2013-0087417, filed on Jul. 24, 2013. All the contents of the aforementioned basic case are cited.

本發明有關一種觸控面板的製造方法。 The invention relates to a method of manufacturing a touch panel.

觸控面板係透過加壓在面板上顯示的畫面而輸入相應於畫面的資訊。由於其使用上的方便性,近來觸控面板在所有的顯示裝置中獲得廣泛的應用。 The touch panel inputs information corresponding to the screen by pressurizing the screen displayed on the panel. Due to its ease of use, touch panels have recently gained wide application in all display devices.

一般來講,觸控面板採用電容式、電阻式、表面超音波式、紅外線方式等,提取被加壓部分的座標並輸入資訊。其中,電容式屬於當使用者觸摸畫面時,利用人體的電容識別電流變化量來檢測位置。 Generally speaking, the touch panel adopts a capacitive type, a resistive type, a surface ultrasonic type, an infrared type, etc., and extracts coordinates of the pressed portion and inputs information. Among them, the capacitive type belongs to when the user touches the screen, the capacitance of the human body is used to identify the amount of current change to detect the position.

本發明提供一種觸控面板的製造方法,該觸控面板的製造方法改善遮蔽方式,從而能夠提高耐久性。 The present invention provides a method of manufacturing a touch panel, which is improved in the method of manufacturing the touch panel, thereby improving durability.

本發明實施例的觸控面板的製造方法,包括:準備具有預定單元區域的強化玻璃;在強化玻璃的一面上形成觸控感應器;透過第一保護材料形成至少覆蓋觸控感應器的第一保護層;透過第二保護材料形成至少覆蓋第一保護層的第二保護層;將強化玻璃按預定單元區域大小切割而形成單元強化玻璃;去除單元強化玻璃的第二保護層;以及去除單元強化玻璃的第一保護層。 A method for manufacturing a touch panel according to an embodiment of the present invention includes: preparing a tempered glass having a predetermined unit area; forming a touch sensor on one side of the tempered glass; forming a first covering at least the touch sensor through the first protective material a protective layer; forming a second protective layer covering at least the first protective layer through the second protective material; forming the tempered glass by a predetermined unit area to form a unit tempered glass; removing the second protective layer of the unit tempered glass; and removing the unit strengthening The first protective layer of glass.

第一保護材料和第二保護材料可為耐酸性材料,第一保護材料可為光阻劑。第一保護層的厚度可為10~20μm。第二保護材料可為薄膜。透過切割強化玻璃而形成單元強化玻璃的步驟可透過單面蝕刻法進行。強化玻璃可由鋁矽酸鹽系玻璃構成。 The first protective material and the second protective material may be acid resistant materials, and the first protective material may be a photoresist. The first protective layer may have a thickness of 10 to 20 μm. The second protective material can be a film. The step of forming the unit tempered glass by cutting the tempered glass can be performed by a one-side etching method. The tempered glass may be composed of aluminosilicate glass.

本發明該實施例之觸控面板的製造方法可進一步包括:去除單元強化玻璃的第二保護層後,對單元強化玻璃進行第一次加工的步驟;以及對該第一次加工後的單元強化玻璃進行第二次加工的步驟。其中,第一次加工可為以與預定產品規格相比,約大0.1~0.2mm的尺寸加工單元強化玻璃表面之外輪廓形狀的研磨(Grinding)製程,第二次加工可為採用蝕刻法去除在第一次加工中產生之微屑(Micro Chip)的修復(Healing)製程。 The method for manufacturing the touch panel of the embodiment of the present invention may further include: a step of performing the first processing on the unit tempered glass after removing the second protective layer of the unit tempered glass; and strengthening the unit after the first processing The glass is subjected to the second processing step. The first processing may be a grinding process in which the contour of the glass surface is strengthened by a processing unit having a size of about 0.1 to 0.2 mm larger than a predetermined product specification, and the second processing may be performed by etching. The Healing process of the Micro Chip produced in the first process.

光阻劑塗膜的厚度與習知材料相比大約薄3~5倍左右,從而能夠節省材料費並簡化製程條件。 The thickness of the photoresist coating film is about 3 to 5 times thinner than that of the conventional material, thereby saving material costs and simplifying process conditions.

此外,能夠利用研磨和修復等製程加工切割的單元強化玻璃的外輪廓,以獲得所需要的形狀及尺寸。 In addition, the outer contour of the tempered glass can be tempered using a process such as grinding and repair to obtain the desired shape and size.

此外,在研磨製程中能夠減少因鼓起而導致的不良。 In addition, defects caused by bulging can be reduced in the polishing process.

10‧‧‧強化玻璃 10‧‧‧Strengthened glass

10a,10b‧‧‧單元強化玻璃 10a, 10b‧‧‧ unit tempered glass

12‧‧‧觸控感應器 12‧‧‧Touch sensor

14‧‧‧第一保護層 14‧‧‧First protective layer

16‧‧‧第二保護層 16‧‧‧Second protective layer

20,20a‧‧‧切割面 20,20a‧‧‧cut surface

22‧‧‧加工面 22‧‧‧Processing surface

S100,S102,S104,S106,S108,S110,S112,S114,S116‧‧‧步驟 S100, S102, S104, S106, S108, S110, S112, S114, S116‧‧ steps

圖1顯示本發明實施例之觸控面板的製造方法的流程圖。 FIG. 1 is a flow chart showing a method of manufacturing a touch panel according to an embodiment of the present invention.

圖2顯示用顯微鏡檢測去除薄膜後之單元強化玻璃的切割面的照片。 Fig. 2 is a photograph showing the cut surface of the unit tempered glass after the removal of the film by a microscope.

圖3顯示經過研磨製程加工後之單元強化玻璃的加工面的照片。 Figure 3 shows a photograph of the processed surface of the unit tempered glass after the grinding process.

圖4顯示經過單面噴霧製程後切割之單元強化玻璃的切割面的照片。 Figure 4 shows a photograph of the cut surface of the unit tempered glass cut after the one-sided spray process.

圖5a和圖5b顯示僅採用光阻劑作為單遮蔽的狀態下,比較蝕刻前和蝕刻後圖像的圖。 Figures 5a and 5b show a comparison of pre-etched and post-etched images in a state where only a photoresist is used as a single mask.

圖6a和圖6b顯示僅採用薄膜作為單遮蔽的狀態下,比較蝕刻前和蝕刻後圖像的圖。 Figures 6a and 6b show a comparison of pre-etched and post-etched images in a state where only a film is used as a single mask.

當述及某部分設置在其他部分之“上”時,表示該某部分直接設置在該其他部分的上面,或者在兩者之間可能會存在其他部分。相對地,當述及某部分設置在其他部分的“正上方”時,表示兩者之間不存在其他部分。 When a portion is referred to as being "on" another portion, it indicates that the portion is directly disposed above the other portion, or other portions may exist between the two. In contrast, when a part is set "directly above" of other parts, it means that there is no other part between the two.

在此使用的專業術語只是用來說明特定實施例,並不是用來限制本發明。在此使用的單數形式,在沒有明確表明相反含義的情況下也包含複數形式。在說明書中使用的“包含”的含義詳細係指特定的特性、區域、整數、步驟、動作、要素及/或成分,但不排除其 他特定的特性、區域、整數、步驟、動作、要素、成分及/或組的存在或附加。 The terminology used herein is for the purpose of illustration and description of the embodiments. As used herein, the singular forms " " " The meaning of "including" in the specification refers to specific characteristics, regions, integers, steps, actions, elements and/or components, but does not exclude The existence or addition of his specific characteristics, regions, integers, steps, actions, elements, components and/or groups.

“上方”、“下方”等表示相對空間關係的用語,可用於更加容易地說明圖中顯示出的某一部分與其他部分之間的關係。這些用語除了包含圖中要說明的含義之外,還包含正在使用的裝置的其他含義或動作。例如,當圖中的裝置反轉時,原先被說明為處於其他部分之“下方”的某部分,可被說明為處於其他部分之“上方”。因此,“下方”的用語會同時包括上方和下方。裝置可旋轉90度或者其他角度,針對表示相對空間關係的用語,解釋同上。 The terms "upper", "lower", etc., which indicate relative spatial relationships, can be used to more easily illustrate the relationship between a certain portion and other portions shown in the figure. These terms include, in addition to the meanings to be described in the figures, other meanings or actions of the device being used. For example, when the device in the figures is reversed, a portion of the "below" that is previously described as being "below" the other portion can be described as being "above" the other portions. Therefore, the term "below" will include both above and below. The device can be rotated 90 degrees or other angles, as explained above for terms that represent relative spatial relationships.

雖然未有不同的定義,在此使用之包括技術用語及科學用語在內的所有用語,均具有與本發明所屬技術領域中具有通常知識者一般理解的含義相同的含義。在一般使用的詞典中所定義的用語,被補充解釋為與相關技術文獻及當前公開的內容相符的含義,在沒有特別定義的情況下,不被解釋為理想的或是非常正式的含義。 Although not defined differently, all terms including technical terms and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the invention pertains. The terms defined in the commonly used dictionary are supplementally interpreted as meanings consistent with the relevant technical literature and the presently disclosed content, and are not interpreted as ideal or very formal meanings unless otherwise defined.

下面,參照圖式詳細說明本發明的實施例,以使本發明所屬技術領域中具有通常知識者能夠容易實施。但本發明並不局限於在此說明的實施例,可用多種形式實現本發明。 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, so that those of ordinary skill in the art to which the present invention pertains can be easily implemented. However, the invention is not limited to the embodiments described herein, and the invention may be embodied in a variety of forms.

圖1顯示本發明實施例之觸控面板的製造方法的製程流程圖。參照圖1,觸控面板的製造方法只是用於例示本發明,並不是用來限定本發明。 FIG. 1 is a flow chart showing a process of manufacturing a touch panel according to an embodiment of the present invention. Referring to Fig. 1, the manufacturing method of the touch panel is merely for illustrating the present invention and is not intended to limit the present invention.

首先,執行第一步驟(S100),準備具有預定單元區域的強化玻璃(10)。強化玻璃(10)可採用鹼石灰玻璃或鋁矽酸鹽系玻璃。當 使用鹼石灰玻璃時,壓縮強化深度(DOL)為10~15μm、壓縮應力為400~500MPa,且可透過刀輪(Wheel)、噴砂(Sandblast)、濕式蝕刻(Wet etching)、水刀(Water Jet)或雷射(Laser)等多種方法進行切割。當使用鋁矽酸鹽系玻璃時,壓縮強化深度(DOL)為20~40μm、壓縮應力為600MPa以上,因此用常規方法不易切割。如上所述,鋁矽酸鹽系玻璃的壓縮應力高,因此容易產生破裂的問題。基於這些理由,在本發明的實施例中,由於使用同時適用薄膜和光阻劑的製程,並且使用能夠減少破裂之作為單面蝕刻法的單面噴射切割製程,因此能將鋁矽酸鹽系玻璃作為強化玻璃(10)使用。 First, the first step (S100) is performed to prepare a tempered glass (10) having a predetermined unit area. The tempered glass (10) may be a soda lime glass or an aluminosilicate glass. when When using soda lime glass, the compression strengthening depth (DOL) is 10~15μm, the compressive stress is 400~500MPa, and it can pass through the wheel, sandblast, wet etching, water knife (Water). Jet) or laser (Laser) and other methods for cutting. When an aluminosilicate glass is used, the compression strengthening depth (DOL) is 20 to 40 μm, and the compressive stress is 600 MPa or more, so that it is difficult to cut by a conventional method. As described above, since the aluminosilicate glass has a high compressive stress, it is liable to cause cracking. For these reasons, in the embodiment of the present invention, since the process of applying both the film and the photoresist is used, and the one-side jet cutting process as the one-side etching method capable of reducing cracking is used, the aluminum silicate glass can be used. Used as tempered glass (10).

在結束前述第一步驟(S100)後,執行在強化玻璃(10)的一面上形成觸控感應器(12)的第二步驟(S102)。在第二步驟(S102)中形成用於驅動觸控感應之各層(Layer)。在觸控感應器(12)的形成中,可使用絕緣膜在強化玻璃(10)上形成X軸及Y軸。此外,可同時形成X軸和Y軸。另外,也可包括先形成X軸和Y軸中的某一軸,並於薄膜(Film)上形成其他軸的情況。 After the first step (S100) is completed, a second step (S102) of forming the touch sensor (12) on one side of the tempered glass (10) is performed. Layers for driving touch sensing are formed in the second step (S102). In the formation of the touch sensor (12), an X-axis and a Y-axis may be formed on the tempered glass (10) using an insulating film. In addition, the X-axis and the Y-axis can be formed simultaneously. In addition, it may also include a case where one of the X-axis and the Y-axis is formed first, and another axis is formed on the film (Film).

在結束前述第二步驟(S102)後,執行第三步驟(S104),透過將第一保護材料形成至少覆蓋觸控感應器(12)的第一保護層(14)。第一保護材料可為耐酸性材料,第一保護材料可使用光阻劑。在第三步驟(S104)中形成分別用於第一次加工(亦即研磨製程)和第二次加工(亦即修復製程中)的光阻。隨著光阻形成,能夠最大限度地減少研磨製程中產生的雜質和刮痕(Scratch)。此外,形成光阻時,考量到修復製程中的去除區域,可形成比設計值約大0.1mm的圖案 (Pattern)。形成光阻時,包括膜形成/曝光/顯影及加熱製程。當採用網版印刷時,包括印刷製程和乾燥製程。此外,光阻可形成於強化玻璃(10)的兩面上,厚度優選為大約10~20μm。隨著形成大約10~20μm厚度的光阻,厚度比習知材料薄,從而能夠節省費用並能簡化製程條件,並且能夠降低在研磨製程中因鼓起而導致的不良。在習知技術中,耐酸性材料採用大約100μm的光阻劑或者網版印刷膏來進行強化玻璃的加工。但是,當光阻的厚度較薄時,進行蝕刻切割時的剝離可能性較大,因此需要反覆進行光阻形成製程,產生難以解決的對準問題以及不易最佳化曝光量的問題。在本發明的實施例中為了進行研磨、修復的後續製程,同時形成耐酸性材料(亦即光阻劑)和耐酸性薄膜。耐酸性材料的高度可為大約10~20μm,亦即形成較低的高度。因此,無需反覆進行光阻形成製程。若形成較厚的光阻,如習知技術,則在研磨製程中有可能產生光阻鼓起的問題。在第三步驟(S104)中可形成光阻,而且根據需要也可形成網版印刷膏(Paste)。 After the foregoing second step (S102) is completed, the third step (S104) is performed to form the first protective layer (14) covering at least the touch sensor (12). The first protective material may be an acid resistant material, and the first protective material may use a photoresist. In the third step (S104), photoresists are formed for the first processing (i.e., the polishing process) and the second processing (i.e., in the repair process). As the photoresist is formed, impurities and scratches generated in the polishing process can be minimized. In addition, when the photoresist is formed, the removal area in the repair process is considered, and a pattern larger than the design value by about 0.1 mm can be formed. (Pattern). When forming a photoresist, a film formation/exposure/development and heating process is included. When screen printing is used, it includes printing process and drying process. Further, a photoresist may be formed on both faces of the tempered glass (10), and the thickness is preferably about 10 to 20 μm. As the photoresist having a thickness of about 10 to 20 μm is formed, the thickness is thinner than that of the conventional material, thereby saving cost and simplifying process conditions, and reducing defects caused by bulging in the polishing process. In the prior art, the acid-resistant material uses a photoresist of about 100 μm or a screen printing paste to process the tempered glass. However, when the thickness of the photoresist is thin, there is a high possibility of peeling at the time of etching and etching, and therefore it is necessary to repeatedly perform the photoresist forming process, which causes an alignment problem which is difficult to solve and a problem that it is difficult to optimize the exposure amount. In the embodiment of the present invention, an acid-resistant material (ie, a photoresist) and an acid-resistant film are simultaneously formed for the subsequent processes of grinding and repair. The height of the acid resistant material can be about 10-20 μm, that is, a lower height is formed. Therefore, it is not necessary to repeatedly perform the photoresist forming process. If a thick photoresist is formed, as in the prior art, there is a possibility that a problem of photoresist bulging may occur in the polishing process. A photoresist can be formed in the third step (S104), and a screen printing paste can also be formed as needed.

在結束前述第三步驟(S104)後,執行第四步驟(S106),透過將第二保護材料形成至少覆蓋第一保護層(14)的第二保護層(16)。第二保護材料可為耐酸性材料,第二保護材料可採用薄膜(Film)。在第四步驟(S106)中形成化學切割製程中使用的薄膜。在形成薄膜時,為了保證尺寸精度,優選形成比設計值約大1mm的圖案。薄膜可形成在強化玻璃(10)的雙面或者單面。 After the foregoing third step (S104) is completed, a fourth step (S106) is performed to form a second protective layer (16) covering at least the first protective layer (14). The second protective material may be an acid resistant material, and the second protective material may be a film. A film used in the chemical cutting process is formed in the fourth step (S106). When forming a film, in order to ensure dimensional accuracy, it is preferable to form a pattern which is about 1 mm larger than the design value. The film can be formed on both sides or on one side of the tempered glass (10).

在結束前述第四步驟(S106)後,執行第五步驟(S108),將強化玻璃(10)按照預定單元區域大小切割,以形成單元強化玻璃 (10a)。在第五步驟(S108)中可透過化學蝕刻法進行切割(Cutting)製程。蝕刻法可採用單面噴霧(Spray)、雙面噴霧或垂直層流式(Down Flow)等方法。氫氟酸溶液濃度優選為30~45%,根據氫氟酸溶液濃度來控制尺寸非常重要。由於單元強化玻璃(10a)的切割面(20)屬於未經強化處理的區域,因此對外部衝擊的耐受性會比較弱。因此可在未經強化處理的側面上塗敷含有氫氟酸的膏物後再清洗,作為未經強化處理的彌補。 After the fourth step (S106) is completed, the fifth step (S108) is performed to cut the tempered glass (10) according to a predetermined unit area size to form a unit tempered glass. (10a). In the fifth step (S108), a cutting process can be performed by a chemical etching method. The etching method may be a method such as single-side spray (Spray), double-sided spray or vertical flow (Down Flow). The concentration of the hydrofluoric acid solution is preferably 30 to 45%, and it is important to control the size according to the concentration of the hydrofluoric acid solution. Since the cut surface (20) of the unit tempered glass (10a) belongs to an unreinforced area, the resistance to external impact is weak. Therefore, the paste containing hydrofluoric acid can be applied to the side which has not been reinforced, and then washed, and it can be compensated as an unreinforced process.

在結束前述第五步驟(S108)後,執行去除單元強化玻璃(10a)的第二保護層(16)的第六步驟。第六步驟(S110)是為了執行第一次加工製程而剝除薄膜的製程。若未剝除薄膜,則不易透過腐蝕進行研磨。 After the termination of the aforementioned fifth step (S108), the sixth step of removing the second protective layer (16) of the unit tempered glass (10a) is performed. The sixth step (S110) is a process of stripping the film in order to perform the first processing. If the film is not peeled off, it is less likely to be polished by etching.

在結束前述第六步驟(S110)後,執行對單元強化玻璃(10a)進行第一次加工的第七步驟。第七步驟(S112)是用來加工單元強化玻璃(10a)之切割面(20)的外輪廓形狀,以形成加工面(22)的研磨(Grinding)製程。在第一次加工中,以與預定產品規格約大0.1~0.2mm的方式進行研磨製程。 After the foregoing sixth step (S110) is completed, the seventh step of performing the first processing of the unit tempered glass (10a) is performed. The seventh step (S112) is for processing the outer contour shape of the cut surface (20) of the unit tempered glass (10a) to form a grinding process of the processed surface (22). In the first processing, the polishing process is performed in a manner of about 0.1 to 0.2 mm larger than the predetermined product specification.

在結束前述第七步驟(S112)後,執行對經過第一次加工的單元強化玻璃(10a)進行第二次加工的第八步驟(S114)。第二次加工可為透過蝕刻法去除在研磨時產生之微屑(Micro Chip)的修復(Healing)製程。第二次加工為蝕刻大約0.1~0.2mm以配合所需要的產品規格的製程。在第二次加工中,蝕刻至黑色矩陣(BM,black matrix)區域以防漏光,而且優選為使用浸漬(Dipping)法的蝕刻。需要說明的是,氫氟 酸溶液濃度和製程時間為反比關係。 After the termination of the seventh step (S112) described above, an eighth step (S114) of performing the second processing on the unit tempered glass (10a) subjected to the first processing is performed. The second processing may be a Healing process for removing microchips generated during polishing by etching. The second process is a process that etches approximately 0.1 to 0.2 mm to match the required product specifications. In the second processing, etching is performed to a black matrix (BM) region to prevent light leakage, and etching using a Dipping method is preferable. It should be noted that hydrogen fluoride The acid solution concentration and the process time are inversely related.

在結束前述第八步驟(S114)後,執行去除經第二次加工之單元強化玻璃(10a)的第一保護層(14)的第九步驟(S116)。 After the end of the foregoing eighth step (S114), the ninth step (S116) of removing the first protective layer (14) of the second processed unit tempered glass (10a) is performed.

與由預先被切割之單元強化玻璃(10a)形成面板時相比,由於透過先由強化玻璃(10)形成面板後,再將其切割為多個單元強化玻璃(10a)的方式,能夠同時對多個單元強化玻璃(10a)進行同一個製程,因此具有能夠縮短生產時間而且能夠有效地管理製程的優點。此外,為了研磨和修復的後製程,採用耐酸性材料(光阻劑)形成第一保護層(14),並採用耐酸性薄膜形成覆蓋第一保護層(14)的第二保護層(16)。因此,能夠將光阻劑的高度形成為大約10~20μm,亦即形成較低的高度,而且能夠解決在蝕刻切割時,由於剝離可能性高而導致需要反覆進行光阻形成製程的問題。當完成由強化玻璃(10)形成面板的製程後,為了將其切割為多個單元強化玻璃(10a),採用光罩進行氟蝕刻,從而將強化玻璃(10)切割為單元強化玻璃(10a)。然後去除第二保護層(16),對單元強化玻璃(10a)的切割面(20)進行研磨及修復處理後,去除第一保護層(14),即完成觸控面板的製造。 Compared with the case where the panel is formed by the unit tempered glass (10a) which is cut in advance, since the panel is formed by the tempered glass (10) and then cut into a plurality of unit tempered glass (10a), it is possible to simultaneously Since a plurality of unit tempered glass (10a) are subjected to the same process, there is an advantage that the production time can be shortened and the process can be effectively managed. In addition, for the post-grinding process of grinding and repair, an acid-resistant material (photoresist) is used to form the first protective layer (14), and an acid-resistant film is used to form a second protective layer (16) covering the first protective layer (14). . Therefore, the height of the photoresist can be formed to be about 10 to 20 μm, that is, a lower height can be formed, and the problem that the photoresist formation process needs to be repeatedly performed due to the high possibility of peeling at the time of etching and cutting can be solved. After the process of forming the panel from the tempered glass (10) is completed, in order to cut it into a plurality of unit tempered glass (10a), a reticle is used for fluorine etching, thereby cutting the tempered glass (10) into a unit tempered glass (10a). . Then, the second protective layer (16) is removed, and after the cutting surface (20) of the unit tempered glass (10a) is polished and repaired, the first protective layer (14) is removed, thereby completing the manufacture of the touch panel.

以下透過實驗例更為詳細地說明本發明。然而這些實驗例只是用於舉例說明本發明而提供的,本發明並不限於此。 Hereinafter, the present invention will be described in more detail by way of experimental examples. However, these experimental examples are merely provided for exemplifying the present invention, and the present invention is not limited thereto.

第一實驗例 First experimental example

1)第一步驟(S100) 1) First step (S100)

準備大小為370mm×470mm、厚度為0.7mm的強化玻璃(10)。該強化玻璃(10)為強化深度為40μm、壓縮應力為645MPa的鋁矽 酸鹽系強化玻璃。 A tempered glass (10) having a size of 370 mm × 470 mm and a thickness of 0.7 mm was prepared. The tempered glass (10) is an aluminum crucible having a depth of 40 μm and a compressive stress of 645 MPa. The acid salt is tempered glass.

2)第二步驟(S102) 2) Second step (S102)

在觸控感應器(12)的形成中,首先形成第一電極層(ITO Layer),該第一電極層為橋狀(Bridge),具有厚度為200Å、表面電阻為45Ω/□的特性值。在形成第一電極層後,形成厚度為1.5μm的絕緣體(Insulator)。第二電極層為X、Y層,顯示出厚度為200Å、表面電阻為45Ω/□的特性值。線跡(Trace)部由鉬/鋁/鉬(Mo/Al/Mo)形成,其厚度為2,400Å(Mo:300Å、Al:1,600Å、Mo:500Å)。此時,表面電阻為0.4Ω/□。在下一製程中形成厚度1.5μm的保護層(Overcoat),以保護電極層(ITO)和線跡(Trace)層。觸控感應器(12)的大小為120mm×60mm,按3mm間隔配置,共形成15片。 In the formation of the touch sensor (12), a first electrode layer (ITO layer) is formed first, and the first electrode layer has a bridge shape and has a characteristic value of a thickness of 200 Å and a surface resistance of 45 Ω/□. After the formation of the first electrode layer, an insulator (Insulator) having a thickness of 1.5 μm was formed. The second electrode layer was an X and Y layer, and showed a characteristic value of a thickness of 200 Å and a surface resistance of 45 Ω/□. The trace portion is formed of molybdenum/aluminum/molybdenum (Mo/Al/Mo) and has a thickness of 2,400 Å (Mo: 300 Å, Al: 1,600 Å, Mo: 500 Å). At this time, the surface resistance was 0.4 Ω/□. An overcoat having a thickness of 1.5 μm was formed in the next process to protect the electrode layer (ITO) and the trace layer. The size of the touch sensor (12) is 120 mm × 60 mm, and is arranged at intervals of 3 mm to form a total of 15 pieces.

3)第三步驟(S104) 3) Third step (S104)

將光阻劑作為耐酸性材料來形成第一保護層。耐酸性材料採用丙烯酸(Acryl)系樹脂,為了形成薄膜而採用的塗敷方法為棒塗法,塗敷厚度為20μm。曝光採用金屬鹵化燈,照射量為100mJ/cm2。在顯影及後曝光製程中,顯影液為Na2CO3,濃度為0.4%,進行時間為150秒。後曝光製程以1,000mJ/cm2的照射量進行。在一面上形成第一保護層後,用相同的方法在另一面上形成第一保護層。在進行後曝光製程之後,檢測尺寸的結果為120.15×60.13mm。 A photoresist is used as an acid-resistant material to form a first protective layer. The acid-resistant material was made of an acrylic resin (Acryl) resin, and the coating method used to form the film was a bar coating method, and the coating thickness was 20 μm. The exposure was carried out using a metal halide lamp with an irradiation amount of 100 mJ/cm 2 . In the development and post-exposure processes, the developer was Na 2 CO 3 , the concentration was 0.4%, and the progress time was 150 seconds. The post-exposure process was carried out at an irradiation dose of 1,000 mJ/cm 2 . After the first protective layer is formed on one side, the first protective layer is formed on the other side by the same method. After the post-exposure process, the result of the inspection size was 120.15 x 60.13 mm.

4)第四步驟(S106) 4) Fourth step (S106)

薄膜則用PVC薄膜進行全面層壓(Lamination)後採用雷射(Laser)形成圖案,然後去除蝕刻部分。另一面也用相同的方法形成。 尺寸為122.1×62.1mm。 The film is laminated with a PVC film and then patterned using a laser, and then the etched portion is removed. The other side is also formed in the same way. The size is 122.1 x 62.1 mm.

5)第五步驟(S108) 5) Fifth step (S108)

關於蝕刻製程,在30℃中以1.0~1.5kgf/cm2噴射壓力的噴嘴,對已進行遮蔽的強化玻璃10的一側表面水平噴射30%的氫氟酸溶液,以進行蝕刻,噴射時間為10分鐘。另外,用相同的方法對其他表面進行水平噴射以進行蝕刻。透過蝕刻製程,獲得無任何損傷的15片單元(Cell)。圖2顯示為了使用顯微鏡進行檢測而去除薄膜狀態的單元強化玻璃(10a)的切割面(20)的照片,檢測尺寸的結果,平均尺寸為120.33×60.32mm。 Regarding the etching process, a nozzle having a jetting pressure of 1.0 to 1.5 kgf/cm 2 at 30 ° C is horizontally sprayed with a 30% hydrofluoric acid solution on one side surface of the tempered glass 10 that has been shielded, and the etching time is performed. 10 minutes. In addition, other surfaces were horizontally sprayed for etching in the same manner. Through the etching process, 15 cells without any damage are obtained. 2 shows a photograph of a cut surface (20) of a unit tempered glass (10a) in a state in which a film is removed in order to perform inspection using a microscope, and as a result of detecting a size, the average size is 120.33 × 60.32 mm.

6)第六步驟(S110) 6) Sixth step (S110)

為了進行研磨製程而剝除薄膜。薄膜可透過手工作業進行剝離。 The film is peeled off for the grinding process. The film can be peeled off by hand.

7)第七步驟(S112) 7) Seventh step (S112)

在進行研磨製程時,刀輪尺寸(Wheel Size)為800mesh,旋轉速度為6000rpm,製作晶片尺寸為50μm以下的樣品。圖3顯示利用研磨製程加工後之單元強化玻璃(10a)的加工面(22)的照片。尺寸檢測結果為20.15×60.15mm。 When the polishing process was carried out, the cutter size was 800 mesh, the rotation speed was 6000 rpm, and a sample having a wafer size of 50 μm or less was produced. Fig. 3 shows a photograph of the processed surface (22) of the unit tempered glass (10a) processed by the polishing process. The size detection result is 20.15×60.15 mm.

8)第八步驟(S114) 8) Eighth step (S114)

修復製程採用浸漬(Dipping)法,在進行評估時,修復液為15%的氫氟酸溶液,時間為15min。發現加工面(22)的形狀與研磨時相比沒有大的區別,微屑(Chip)已被去除。尺寸為120.03×60.02mm,符合設計值標準±50μm。 The repair process was performed by dipping (Dipping) method, and the evaluation solution was a 15% hydrofluoric acid solution for 15 minutes. It was found that the shape of the machined surface (22) was not significantly different from that during the grinding, and the chip was removed. The size is 120.03×60.02mm, which is in accordance with the design value standard ±50μm.

9)第九步驟(S116) 9) The ninth step (S116)

關於光阻的剝離製程,在12%的氫氧化鈉(NaOH)溶液中於製程溫度為60℃的條件下進行兩分鐘,以去除殘留的光阻。另外,為了確保修復製程所帶來的彎曲強度特性,進行彎曲強度評估。在評估時使用的設備為三軸折彎(Bending)機,跨距(Span)長度方面,下部為80mm,上部為40mm,速度(Speed)為10mm/min。檢測結果發現,只進行研磨時,最小剛性值為11.04kgf,最大剛性值為12.33kgf,進行修復製程後,最小剛性值為28.7kgf,最大剛性值為40.36kgf,顯見修復製程可將剛性值約提高兩倍以上。單元強化玻璃(10a)產品的最小剛性值為29.40kgf,最大剛性值為34.17kgf。 The stripping process for the photoresist was carried out in a 12% sodium hydroxide (NaOH) solution at a process temperature of 60 ° C for two minutes to remove residual photoresist. In addition, in order to ensure the bending strength characteristics brought about by the repair process, the bending strength evaluation is performed. The equipment used in the evaluation was a three-axis bending machine with a span of 80 mm, an upper portion of 40 mm and a speed of 10 mm/min. The test results show that the minimum rigidity value is 11.04kgf and the maximum rigidity value is 12.33kgf. After the repair process, the minimum rigidity value is 28.7kgf, and the maximum rigidity value is 40.36kgf. It is obvious that the repair process can be about the rigidity value. Increase by more than twice. The unit tempered glass (10a) product has a minimum stiffness value of 29.40 kgf and a maximum stiffness value of 34.17 kgf.

第二實驗例 Second experimental example

第二實驗例中的大部分製程與第一實驗例的製程相同,在切割製程中採用單面噴霧製程切割強化玻璃。以下省略與第一實驗例的觸控面板的製造方法重複的詳細說明。圖4顯示透過單面噴霧製程被切割的單元強化玻璃(10b)的切割面(20a)的照片。第二實施例之切割製程的耗費時間為20分鐘。當如上述透過單面噴霧製程進行單面蝕刻時,在單元強化玻璃(10b)的下部區域配置觸控感應器(12),並在單元強化玻璃(10b)的上部進行單面蝕刻。如此在單元強化玻璃(10b)的上部進行單面蝕刻時,能有效地保護位於下部區域的觸控感應器(12)。 Most of the processes in the second experimental example were the same as those in the first experimental example, and the tempered glass was cut by a single-sided spray process in the cutting process. Detailed descriptions overlapping with the method of manufacturing the touch panel of the first experimental example are omitted below. Figure 4 shows a photograph of the cut surface (20a) of the unit tempered glass (10b) cut by the one-sided spray process. The cutting process of the second embodiment took a time of 20 minutes. When single-sided etching is performed by the one-side spray process as described above, the touch sensor (12) is disposed in the lower region of the unit tempered glass (10b), and single-sided etching is performed on the upper portion of the unit tempered glass (10b). When the single-sided etching is performed on the upper portion of the unit tempered glass (10b), the touch sensor (12) located in the lower portion can be effectively protected.

如上所述,在本發明的實施例中透過同時使用薄膜和光阻劑的雙重遮蔽製程切割單元強化玻璃(10b),但是在只使用薄膜和光阻劑其中之一的單遮蔽製程中會產生如下問題。 As described above, in the embodiment of the present invention, the glass (10b) is reinforced by the double masking process cutting unit using both the film and the photoresist, but the following problem occurs in the single masking process using only one of the film and the photoresist. .

圖5a和圖5b為在只塗敷一次光阻劑的單遮蔽狀態下,比較蝕刻前和蝕刻後之圖像的圖。 Figures 5a and 5b are graphs comparing the images before and after etching in a single masked state in which only one photoresist is applied.

如圖5a所示,蝕刻前的圖像中顯示出光阻未被剝離的狀態。如圖5b所示,蝕刻後的圖像中顯示出光阻已被剝離的狀態。如圖5a和圖5b所示,當僅採用耐酸性材料(亦即光阻劑)而沒有採用薄膜時,在蝕刻過程中,光阻會被剝離,從而影響觸控感應器,而且無法進行後續製程。此外,當反覆塗敷兩次光阻劑時,蝕刻後會產生100~150μm左右的黑矩陣損傷。 As shown in FIG. 5a, the image before etching shows a state in which the photoresist is not peeled off. As shown in FIG. 5b, the etched image shows a state in which the photoresist has been peeled off. As shown in FIG. 5a and FIG. 5b, when only an acid-resistant material (ie, a photoresist) is used without a film, the photoresist is peeled off during the etching process, thereby affecting the touch sensor, and cannot be followed. Process. In addition, when the photoresist is applied twice, the black matrix damage of about 100 to 150 μm is generated after the etching.

圖6a和圖6b為僅採用薄膜作為單遮蔽的狀態下,比較蝕刻前和蝕刻後的圖像的圖。 Fig. 6a and Fig. 6b are diagrams for comparing images before and after etching in a state where only a film is used as a single mask.

如圖6a所示,蝕刻前的圖像中顯示出黑矩陣區域未被損傷的狀態。如圖6b所示,蝕刻後的圖像中顯示出黑矩陣區域被損傷的狀態。從圖6a和圖6b可知,當僅採用薄膜而沒有採用耐酸性材料(亦即光阻劑)時,在蝕刻過程中會損傷黑矩陣區域。此外,僅採用薄膜作為單遮蔽時,在研磨製程中,薄膜會剝離,從而在後續製程中會損傷觸控感應器。 As shown in FIG. 6a, the image before etching shows a state in which the black matrix region is not damaged. As shown in FIG. 6b, the etched image shows a state in which the black matrix region is damaged. As can be seen from Figures 6a and 6b, when only a thin film is used without an acid-resistant material (i.e., a photoresist), the black matrix region is damaged during the etching. In addition, when only a film is used as a single mask, the film peels off during the polishing process, which may damage the touch sensor in subsequent processes.

以上說明了本發明,但本領域的技術人員應當容易理解,在未脫離隨附之申請專利範圍中的概念及範疇的範圍內,可進行多種修飾及變化。 The invention has been described above, but it will be understood by those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the invention.

10‧‧‧強化玻璃 10‧‧‧Strengthened glass

10a‧‧‧單元強化玻璃 10a‧‧‧Unit tempered glass

12‧‧‧觸控感應器 12‧‧‧Touch sensor

14‧‧‧第一保護層 14‧‧‧First protective layer

16‧‧‧第二保護層 16‧‧‧Second protective layer

S100,S102,S104,S106,S108,S110,S112,S114,S116‧‧‧步驟 S100, S102, S104, S106, S108, S110, S112, S114, S116‧‧ steps

Claims (10)

一種觸控面板的製造方法,包括下列步驟:準備一具有一預定單元區域的強化玻璃;在該強化玻璃的一面上形成一觸控感應器;透過一第一保護材料形成一至少覆蓋該觸控感應器的第一保護層;透過一第二保護材料形成一至少覆蓋該第一保護層的第二保護層;將該強化玻璃依該預定單元區域的大小切割,而形成一單元強化玻璃;去除該單元強化玻璃的該第二保護層;以及去除該單元強化玻璃的該第一保護層。 A method for manufacturing a touch panel includes the steps of: preparing a tempered glass having a predetermined unit area; forming a touch sensor on one side of the tempered glass; and forming at least a touch through the first protective material a first protective layer of the inductor; forming a second protective layer covering at least the first protective layer through a second protective material; cutting the tempered glass according to the size of the predetermined unit area to form a unit tempered glass; The unit strengthens the second protective layer of glass; and removes the first protective layer of the unit tempered glass. 如申請專利範圍第1項所述的觸控面板的製造方法,其中該第一保護材料和該第二保護材料為耐酸性材料。 The method of manufacturing a touch panel according to claim 1, wherein the first protective material and the second protective material are acid-resistant materials. 如申請專利範圍第2項所述的觸控面板的製造方法,其中該第一保護材料為光阻劑。 The method of manufacturing a touch panel according to claim 2, wherein the first protective material is a photoresist. 如申請專利範圍第1項所述的觸控面板的製造方法,其中該第一保護層的厚度為10~20μm。 The method of manufacturing a touch panel according to claim 1, wherein the first protective layer has a thickness of 10 to 20 μm. 如申請專利範圍第2項所述的觸控面板的製造方法,其中該第二保護材料為薄膜。 The method of manufacturing a touch panel according to claim 2, wherein the second protective material is a thin film. 如申請專利範圍第1項所述的觸控面板的製造方法,其中,利用切割該強化玻璃而形成該單元強化玻璃的步驟,係由單面蝕刻法予以進行。 The method of manufacturing a touch panel according to the first aspect of the invention, wherein the step of forming the unit tempered glass by cutting the tempered glass is performed by a single-sided etching method. 如申請專利範圍第6項所述的觸控面板的製造方法,其中該強化玻璃為鋁矽酸鹽系玻璃。 The method of manufacturing a touch panel according to claim 6, wherein the tempered glass is an aluminosilicate glass. 如申請專利範圍第1項所述的觸控面板的製造方法,進一步包括下列步驟:去除該單元強化玻璃的第二保護層後,對該單元強化玻璃進行一第一次加工;以及對經過該第一次加工的該單元強化玻璃進行一第二次加工。 The method for manufacturing a touch panel according to claim 1, further comprising the steps of: after removing the second protective layer of the unit tempered glass, performing a first processing on the unit tempered glass; The unit tempered glass processed for the first time is subjected to a second processing. 如申請專利範圍第8項所述的觸控面板的製造方法,其中,該第一次加工係為以與預定產品規格相比,約大0.1~0.2mm的尺寸加工該單元強化玻璃表面的外輪廓形狀的研磨(Grinding)製程。 The method of manufacturing a touch panel according to claim 8, wherein the first processing is processing the surface of the unit tempered glass by a size of about 0.1 to 0.2 mm larger than a predetermined product specification. Grinding process of contour shape. 如申請專利範圍第8項所述的觸控面板的製造方法,其中,該第二次加工為透過蝕刻法去除在該第一次加工中產生之微屑(Micro Chip)的修復(Healing)製程。 The method of manufacturing a touch panel according to claim 8, wherein the second processing is a Healing process for removing microchips generated in the first processing by a transparent etching method. .
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KR102604022B1 (en) * 2022-02-25 2023-11-20 주식회사 도우인시스 Side healing method of UTG glass using acid-resistant coating and film
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