TWI520021B - Grass substrate for a touch panel and manufacturing method thereof - Google Patents

Grass substrate for a touch panel and manufacturing method thereof Download PDF

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TWI520021B
TWI520021B TW101135296A TW101135296A TWI520021B TW I520021 B TWI520021 B TW I520021B TW 101135296 A TW101135296 A TW 101135296A TW 101135296 A TW101135296 A TW 101135296A TW I520021 B TWI520021 B TW I520021B
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glass substrate
glass
touch panel
detecting electrode
electrode pattern
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TW101135296A
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TW201346670A (en
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中山尚美
井上努
前原利行
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Smk股份有限公司
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Description

觸控面板用玻璃基板及其製造方法 Glass substrate for touch panel and method of manufacturing same

本發明係關於供檢測出輸入位置之用的透明的檢測電極與使該檢測電極圖案往外部接續之配線圖案被形成於表面之觸控面板用玻璃基板及其製造方法,進而詳言之,係不發生微龜裂,即使薄型化在強度上也優異的觸控面板用玻璃基板及其製造方法。 The present invention relates to a glass substrate for a touch panel in which a transparent detecting electrode for detecting an input position and a wiring pattern for connecting the detecting electrode pattern to the outside are formed, and a method for manufacturing the same, and further, A glass substrate for a touch panel and a method for producing the same, which are excellent in strength and are not required to be micro-cracked.

觸控面板,作為指示輸入裝置被搭載於行動電話、汽車導航系統、攜帶資訊終端等種種機器,通常,與被層積配置於其內部的顯示裝置組合,在把顯示裝置的顯示作為目標之檢測出手指等輸入操作體的輸入位置之用途來使用。 The touch panel is mounted on a mobile phone, a car navigation system, a portable information terminal, and the like as an instruction input device. Generally, the touch panel is combined with a display device that is stacked in the display device, and the display of the display device is targeted. It is used for the purpose of inputting the input position of the operation body such as a finger.

於檢測出根據輸入操作體之輸入位置的觸控面板,被提出了由輸入位置與基準電極之間的電阻值來檢測出之電阻感壓方式、根據輸入操作體的接近導致的輸入位置之浮游電容的改變來檢測出之靜電電容方式、以電磁感應感受到輸入操作體的電氣訊號之電極的位置來檢測出之電磁感應方式等種種輸入位置檢測方式,但在由電氣變化來檢測出輸入位置之這些檢測方式,均在成為輸入操作面之絕緣基板的一個面上形成1個或複數個導電性之檢測圖案。 In order to detect the touch panel according to the input position of the input operating body, a resistance sensing method detected by the resistance value between the input position and the reference electrode, and a floating position of the input position according to the approach of the input operating body are proposed. The input capacitance detection method such as the electromagnetic induction method in which the capacitance is detected by the change of the capacitance and the position of the electrode of the electric signal input to the operation body is sensed by the electromagnetic induction, but the input position is detected by the electrical change. In these detection methods, one or a plurality of conductive detection patterns are formed on one surface of the insulating substrate that serves as the input operation surface.

如前所述,在配置顯示裝置於內方側的觸控面板,使用以可以透過觸控面板的輸入操作面來目視其內部的顯示裝置的顯示的方式,使構成觸控面板的各部以透明體來構 成,把透明的玻璃基板作為絕緣基板,把ITO等透明導電性材料所構成的檢測電極圖案形成於其表面的觸控面板用玻璃基板。 As described above, in the touch panel on which the display device is disposed on the inner side, the portions constituting the touch panel are transparent by visually observing the display of the display device inside the touch panel through the input operation surface of the touch panel. Body structure In the case of using a transparent glass substrate as an insulating substrate, a detection electrode pattern made of a transparent conductive material such as ITO is formed on the surface of the glass substrate for a touch panel.

由透明導電性材料構成的檢測電極圖案,藉由光蝕刻法圖案化於玻璃基板的表面,進而,於玻璃基板的表面,把檢測電極圖案往外部電路連接的配線圖案形成為連接於檢測電極圖案。於玻璃基板的表面,要形成檢測電極圖案或配線圖案,需要根據濺鍍之透明導電膜的形成,光阻層的附著、光阻層的曝光顯影、透明導電膜的蝕刻、配線圖案的印刷或者濺鍍等等多數的步驟,所以在從前的觸控面板用玻璃基板的製造,對於切出複數玻璃基板的大小的玻璃原板的表面進行前述各步驟統括形成要形成於各玻璃基板的檢測電極圖案與配線圖案,其後,由玻璃原板切出各個玻璃基板(專利文獻1)。 The detection electrode pattern made of a transparent conductive material is patterned on the surface of the glass substrate by photolithography, and the wiring pattern connecting the detection electrode pattern to the external circuit is formed on the surface of the glass substrate to be connected to the detection electrode pattern. . To form a detection electrode pattern or a wiring pattern on the surface of the glass substrate, it is necessary to form a transparent conductive film according to sputtering, adhesion of a photoresist layer, exposure development of a photoresist layer, etching of a transparent conductive film, printing of a wiring pattern, or In the production of a glass substrate for a touch panel, the surface of the glass original plate having a size of a plurality of glass substrates is subjected to the above-described respective steps to form a detection electrode pattern to be formed on each of the glass substrates. After the wiring pattern, each glass substrate is cut out from the original glass plate (Patent Document 1).

由玻璃原板切出各玻璃基板的步驟,係沿著各玻璃基板的輪廓以鑽石切刀等切入刻痕,以沖壓機對刻痕兩側施加壓力來切斷,以所謂的劃線切割來切出各玻璃基板(專利文獻2)。 The step of cutting each of the glass substrates from the original glass plate is performed by cutting a notch along a contour of each glass substrate with a diamond cutter or the like, and cutting is performed by applying pressure to both sides of the notch by a punching machine, and cutting is performed by so-called scribing cutting. Each glass substrate is shown (patent document 2).

在手指等輸入操作體接近導致檢測電極圖案之靜電電容改變來檢測輸入位置的靜電電容式觸控面板,在表面被形成檢測電極圖案的玻璃基板上進而層積保護膜或是於輸入操作區域的周圍印刷特定的顯示之裝飾膜,形成觸控面板。 A capacitive touch panel that detects an input position by a change in electrostatic capacitance of a detection electrode pattern, such as a finger, is applied to a glass substrate on which a surface of the detection electrode pattern is formed, or a protective film is laminated on the input operation region. A decorative film of a specific display is printed around to form a touch panel.

此外,由一枚玻璃原板以化學蝕刻切出被配置於觸控 面板的使用者側的複數覆蓋玻璃之玻璃基板的製造方法已因專利文獻3的介紹而廣為人知。 In addition, a glass original plate is cut by chemical etching and configured to be touched. A method of manufacturing a glass substrate that covers a plurality of glass on the user side of the panel has been widely known from the introduction of Patent Document 3.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特許第4000178號公報(說明書之0035段至0036段,圖5) [Patent Document 1] Japanese Patent No. 4000178 (paragraphs 0035 to 0036 of the specification, Fig. 5)

[專利文獻2]日本專利特開2009-294771號公報(說明書之0015段,圖2) [Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-294771 (paragraph 0015 of the specification, Fig. 2)

[專利文獻3]日本專利特開2010-254511號公報(說明書之0029至0031段,圖2) [Patent Document 3] Japanese Patent Laid-Open Publication No. 2010-254511 (paragraphs 0029 to 0031 of the specification, Fig. 2)

把觸控面板用玻璃基板,由玻璃原板以劃線切割法來切出的場合,於各玻璃基板的輪廓之切斷面會產生多數的微龜裂。特別是,玻璃基板的破損的大部分,是因為發生於其周邊的微龜裂所引發,所以藉由劃線切割會使機械強度大幅降低。另一方面,要求薄型化的行動電話機等攜帶型電子機器之作為輸入裝置使用觸控面板的場合,玻璃基板也希望能薄型化至例如厚度1mm以下,但薄型化的玻璃原板,在往行動電子機器搭載之後,容易因為往表面之衝擊而毀損,有必要在其表面側層積防止飛散膜或透明保護基板,結果會使觸控面板全體的薄型化變得困難,同時會因為重疊防止飛散膜或透明保護基板而使透明性受損, 伴此會導致高級感降低。 When the glass substrate for a touch panel is cut out by a scribe line cutting method from a glass original plate, many micro cracks generate|occur|produce at the cut surface of the outline of each glass substrate. In particular, most of the damage of the glass substrate is caused by microcracks occurring in the periphery thereof, so that the mechanical strength is greatly reduced by scribing. On the other hand, when a touch panel is used as an input device for a portable electronic device such as a mobile phone that is required to be thinned, the glass substrate is also required to be thinned to a thickness of, for example, 1 mm or less, but the thin glass original plate is in action. After the device is mounted, it is easy to be damaged by the impact on the surface. It is necessary to laminate the surface to prevent the scattering film or the transparent protective substrate. As a result, it is difficult to reduce the thickness of the entire touch panel, and the scattering film is prevented by the overlap. Or transparently protecting the substrate to impair transparency. This can lead to a decrease in sense of quality.

作為使玻璃基板的厚度薄型化到1mm以下也可得到特定強度的手段,已知有進行玻璃表面的離子交換之化學強化,但對玻璃原板進行化學強化的話,無法進行劃線切割而切出各玻璃基板,結果,有必要對各個玻璃基板進行化學強化之後,對於各個玻璃基板經過前述多數步驟而形成檢測電極圖案與配線圖案,會使製造效率及生產率變得極差。 A method of obtaining a specific strength by making the thickness of the glass substrate thinner than 1 mm is known. Chemical strengthening of ion exchange on the surface of the glass is known. However, when the glass original plate is chemically strengthened, it is impossible to cut and cut each of the glass substrates. As a result of the glass substrate, it is necessary to chemically strengthen each of the glass substrates, and the detection electrode pattern and the wiring pattern are formed for each of the glass substrates through the plurality of steps, which results in extremely inferior manufacturing efficiency and productivity.

進而,於被搭載於行動電話機的觸控面板,由於設計上的理由而期待能在其輪廓加入曲線,但是加以機械的衝擊而進行切斷的劃線切割是無法沿著曲面的輪廓進行切斷,所以,從前以切削、物理的研磨加工來形成曲面,會變得非常昂貴。而且,藉由這樣的切削或研磨加工,會產生新的微龜裂,所以還殘留強度劣化的問題。 Further, in the touch panel mounted on the mobile phone, it is expected that a curve can be added to the outline of the touch panel for design reasons, but the scribing cut by the mechanical impact can not be cut along the contour of the curved surface. Therefore, it has become very expensive to form a curved surface by cutting and physical grinding. Further, since such a micro-crack is generated by such cutting or polishing, there is a problem that the strength is deteriorated.

在此,如專利文獻3所記載的發明那樣,檢討藉由化學蝕刻由玻璃原板切出各玻璃基板的方法,但是在從前的玻璃原板上,如前所述,為了縮短製造步驟,而先於其表面形成連接於檢測電極圖案或鑑測電極之拉出配線圖案,所以有必要以光阻膜覆蓋其表面,以含有氟酸的化學研磨液化學蝕刻未以光阻膜覆蓋的部分而切出各玻璃基板。 Here, as in the invention described in Patent Document 3, a method of cutting out each glass substrate from a glass original plate by chemical etching is examined. However, in the former glass original plate, as described above, in order to shorten the manufacturing process, The surface thereof is formed with a pull-out wiring pattern connected to the detecting electrode pattern or the detecting electrode, so it is necessary to cover the surface with a photoresist film, and chemically etch the portion not covered with the photoresist film by chemical polishing liquid containing fluoric acid. Each glass substrate.

然而,這些檢測電極圖案或拉出配線圖案,係重疊而形成複數之導電層或絕緣層,所以其表面不會成為均一的平坦面,在薄膜之光阻膜無法完全密合地覆蓋這些全體,會有在化學蝕刻步驟中化學研磨液由光阻膜的間隙侵入之 虞。特別是,檢測電極圖案或拉出配線圖案,係以容易被氟酸氧化的鋁、銀、MAM等材料來形成的,所以會接觸到由光阻膜的間隙洩漏的氟酸受到化學侵襲,而有損及導電性的疑慮,對於被形成檢測電極圖案等的玻璃原板,未採用根據化學蝕刻之切斷法。 However, since these detection electrode patterns or the drawn wiring patterns are stacked to form a plurality of conductive layers or insulating layers, the surface thereof does not become a uniform flat surface, and the photoresist film of the film cannot completely cover the entire surface. There will be a chemical polishing solution in the chemical etching step that is invaded by the gap of the photoresist film. Hey. In particular, the detection electrode pattern or the pull-out wiring pattern is formed of a material such as aluminum, silver, or MAM which is easily oxidized by hydrofluoric acid, so that the hydrofluoric acid leaking from the gap of the photoresist film is chemically attacked. There is a concern that the conductivity is poor, and the glass original plate on which the detection electrode pattern or the like is formed is not subjected to a chemical etching.

本發明係有鑑於這樣的問題點而完成之發明,目的在於提供與其他觸控面板用玻璃基板一同統括製造,在輪廓不會產生微龜裂而可得到特定強度的觸控面板用玻璃基板及其製造方法。 The present invention has been made in view of such a problem, and an object of the invention is to provide a glass substrate for a touch panel which can be manufactured together with other glass substrates for a touch panel and which has a specific thickness without causing micro cracks in the outline. Its manufacturing method.

此外,目的在於提供不會使強度劣化,而使觸控面板的輪廓為曲面之觸控面板用玻璃基板及其製造方法。 Further, an object of the invention is to provide a glass substrate for a touch panel in which the contour of the touch panel is curved without deteriorating the strength, and a method of manufacturing the same.

為了達成前述目的,請求項第1項之觸控面板用玻璃基板之製造方法,其特徵係於玻璃基板的表面,被形成由透明導電層所構成的複數檢測電極圖案,以及導電連接於各檢測電極圖案的複數拉出配線圖案之觸控面板用玻璃基板之製造方法,藉由在分離複數玻璃基板的大小之玻璃原板的表背兩面,假想設定使前述複數玻璃基板之各輪廓往表背面投影之切出線,在玻璃原板的表面之以切出線包圍的各玻璃基板區域,圖案化而形成由透明導電層所構成的複數的檢測電極圖案的步驟1,於前述各玻璃基板區域,形成導電連接各檢測電極圖案的拉出配線圖案的步驟2,把覆蓋前述各玻璃基板區域的檢測電極圖案與拉出配線圖 案的保護膜(overcoat),形成於玻璃原板的表面之步驟3,於被形成前述保護膜的玻璃原板的表背兩面,除了沿著前述切出線的切斷區域以外,形成光阻膜的步驟4,將前述光阻膜遮罩而化學蝕刻玻璃原板的表背兩面的切斷區域,由玻璃原板分離各玻璃基板的步驟5,除去被形成於前述玻璃基板的表背兩面的光阻膜的步驟6;而製造於前述玻璃基板的表面圖案化而形成由透明導電層所構成的複數檢測電極圖案的觸控面板用玻璃基板。 In order to achieve the above object, a method for producing a glass substrate for a touch panel according to claim 1 is characterized in that a surface of the glass substrate is formed with a plurality of detection electrode patterns formed of a transparent conductive layer, and electrically connected to each detection. In the method for manufacturing a glass substrate for a touch panel in which a plurality of electrode patterns are drawn out of a wiring pattern, the contours of the plurality of glass substrates are projected onto the front and back sides by separating the front and back surfaces of the glass original plate having a size of a plurality of glass substrates. The step of forming a plurality of detection electrode patterns formed of a transparent conductive layer on each surface of the glass substrate surrounded by the cut-out line on the surface of the original glass plate, and forming the plurality of detection electrode patterns in the glass substrate region Step 2 of electrically connecting the pull-out wiring patterns of the respective detecting electrode patterns, and detecting electrode patterns and pull-out wiring patterns covering the respective glass substrate regions The overcoat is formed on the surface of the glass original plate, and the resistive film is formed on the front and back sides of the glass original plate on which the protective film is formed except for the cut region along the cut-out line. Step 4: masking the photoresist film to chemically etch the cut regions on both sides of the front and back surfaces of the glass original plate, and separating the glass substrates from the glass substrate by step 5, removing the photoresist film formed on both sides of the front and back of the glass substrate. Step 6: A glass substrate for a touch panel manufactured by patterning a surface of the glass substrate to form a plurality of detection electrode patterns composed of a transparent conductive layer.

因為是由玻璃原板在切斷區域進行化學蝕刻分離出被形成檢測電極圖案與拉出線的各玻璃基板,所以於切斷面不會發生微龜裂。 Since the glass substrate is chemically etched in the cut region to separate the glass substrates on which the detection electrode pattern and the pull-out line are formed, micro-cracking does not occur on the cut surface.

檢測電極圖案與拉出配線圖案係以保護膜(overcoat)覆蓋,所以玻璃原板的表面接近於平坦面,光阻膜會沒有不均地形成於玻璃基板的表面。 Since the detection electrode pattern and the pull-out wiring pattern are covered with an overcoat, the surface of the glass original plate is close to the flat surface, and the photoresist film is not unevenly formed on the surface of the glass substrate.

進行步驟5的化學蝕刻時,於檢測電極圖案與拉出配線圖案的表面側,會重疊層積保護膜與光阻膜,所以化學研磨液不會侵入檢測電極圖案或拉出配線圖案。 When the chemical etching in the step 5 is performed, the protective film and the photoresist film are laminated on the surface side of the detection electrode pattern and the drawn wiring pattern, so that the chemical polishing liquid does not intrude into the detection electrode pattern or pull out the wiring pattern.

請求項第2項之觸控面板用玻璃基板之製造方法,特徵係於化學強化的玻璃原板的各玻璃基板區域,藉由步驟1與步驟2形成複數檢測電極圖案與拉出配線圖案。 The method for producing a glass substrate for a touch panel according to Item 2 of the present invention is characterized in that, in each of the glass substrate regions of the chemically strengthened glass original plate, the plurality of detection electrode patterns and the drawn wiring patterns are formed by the steps 1 and 2.

即使是化學強化的玻璃原板,也可以不施加機械的衝擊,而藉由化學蝕刻分離各玻璃基板。 Even in the case of a chemically strengthened glass original plate, each glass substrate can be separated by chemical etching without applying a mechanical impact.

請求項第3項之觸控面板用玻璃基板之製造方法,特徵係於玻璃原板的表面之前述各玻璃基板區域,形成著色 裝飾層後,藉由步驟1形成複數之檢測電極圖案。 The method for producing a glass substrate for a touch panel according to Item 3 of the present invention, characterized in that the glass substrate region on the surface of the glass original plate is colored After the decorative layer, a plurality of detecting electrode patterns are formed by step 1.

於複數玻璃基板在一個步驟形成著色裝飾層。 A colored decorative layer is formed in one step on the plurality of glass substrates.

請求項第4項之觸控面板用玻璃基板之製造方法,特徵係於著色裝飾層施工出中空文字,以覆蓋該中空文字的方式形成拉出配線圖案。 The method for producing a glass substrate for a touch panel according to Item 4 of the present invention is characterized in that a hollow character is formed on the colored decorative layer, and the drawn wiring pattern is formed so as to cover the hollow character.

以拉出配線圖案的顏色,使中空文字著色。 The hollow text is colored by pulling out the color of the wiring pattern.

請求項第5項之觸控面板用玻璃基板之製造方法,特徵為鋁或其合金,為鉬或其合金所夾住而層積的3層構造來形成拉出配線圖案。 The method for producing a glass substrate for a touch panel according to claim 5, characterized in that aluminum or an alloy thereof is formed by laminating three layers of molybdenum or an alloy thereof to form a drawn wiring pattern.

拉出配線圖案係由耐酸性與導電性比較優異的導電材料之3層構造來形成,所以即使化學研磨液侵入也不容易斷線。 Since the pull-out wiring pattern is formed of a three-layer structure of a conductive material which is excellent in acid resistance and conductivity, it is not easy to break even if the chemical polishing liquid intrudes.

請求項第6項之觸控面板用玻璃基板,其特徵係藉由請求項第1項所記載的製造方法所製造。 The glass substrate for a touch panel of claim 6 is characterized in that it is produced by the manufacturing method according to claim 1.

藉由化學蝕刻而由玻璃原板分離,所以於周圍不會發生微龜裂。 It is separated from the original glass plate by chemical etching, so that micro-cracking does not occur around.

請求項第7項之觸控面板用玻璃基板,其特徵係藉由請求項第5項所記載的製造方法所製造。 The glass substrate for a touch panel of claim 7 is characterized in that it is produced by the manufacturing method according to claim 5.

拉出配線圖案係由耐酸性與導電性比較優異的導電材料之3層構造來形成,所以即使化學研磨液侵入也不容易斷線。 Since the pull-out wiring pattern is formed of a three-layer structure of a conductive material which is excellent in acid resistance and conductivity, it is not easy to break even if the chemical polishing liquid intrudes.

請求項第8項之觸控面板用玻璃基板,特徵為切出線之至少一部份為曲線。 The glass substrate for a touch panel of claim 8 is characterized in that at least a part of the cut-out line is a curve.

一部分沿著曲線的切出線之切斷區域被化學蝕刻,一 部分曲線輪廓的玻璃基板由玻璃原板分離。 A portion of the cut region along the cut line of the curve is chemically etched, one The partially curved profile of the glass substrate is separated by a glass original plate.

根據請求項第1項與第6項之發明,可以使形成於複數之玻璃基板的表面的檢測電極圖案與拉出線,對一枚玻璃原板統括形成,所以觸控面板用玻璃基板的量產步驟被簡化。 According to the inventions of the first and sixth aspects of the invention, the detection electrode pattern and the drawing line formed on the surface of the plurality of glass substrates can be integrally formed on one glass original plate, so that the glass substrate for the touch panel is mass-produced. The steps are simplified.

於接近平坦面的保護膜的表面側形成光阻膜,所以不會產生空隙或狹縫,可以在玻璃原板的表面無不均地形成光阻膜,於化學蝕刻時,化學研磨液不會通過光阻膜的空隙或狹縫而侵入。 The photoresist film is formed on the surface side of the protective film close to the flat surface, so that voids or slits are not generated, and the photoresist film can be formed unevenly on the surface of the glass original plate, and the chemical polishing liquid does not pass during chemical etching. The voids or slits of the photoresist film invade.

進而,於化學蝕刻時,檢測電極圖案與拉出配線圖案,係以重疊為二重的保護膜與光阻膜覆蓋,所以檢測電極圖案或拉出配案圖案不會接觸於化學研磨液而氧化損及導電性。 Further, in the chemical etching, the detection electrode pattern and the pull-out wiring pattern are covered with a double-layered protective film and a photoresist film, so that the detection electrode pattern or the pull-out pattern is not oxidized by contact with the chemical polishing liquid. Damage to electrical conductivity.

此外,與施加機械的衝擊而由玻璃原板分離各玻璃基板的劃線切割不同,是藉由化學蝕刻來分離各玻璃基板,所以在分離的切斷面不會發生微龜裂,即使薄型化到厚度1mm以下也可以是可得特定強度的玻璃基板。 Further, unlike the scribe line cutting in which the glass substrates are separated by the mechanical impact, the glass substrates are separated by chemical etching, so that the micro-cracks do not occur on the separated cut surfaces, and the thickness is reduced to A thickness of 1 mm or less may be a glass substrate having a specific strength.

此外,可以藉由化學蝕刻分離為各玻璃基板,所以能夠使成為各玻璃基板的輪廓的切出線成為包含曲線之任意形狀,可以使觸控面板用玻璃基板成為因應於設計上的要求之任意形狀。 In addition, since the glass substrate can be separated by chemical etching, the cut-out line that serves as the outline of each glass substrate can be any shape including a curved line, and the glass substrate for a touch panel can be made to meet the design requirements. shape.

根據請求項第2項的發明的化,即使與其他玻璃基板 一起於表面統括形成檢測電極圖案與拉出線之玻璃基板,也可以是化學強化而強度優異的觸控面板用玻璃基板。 According to the invention of claim 2, even with other glass substrates The glass substrate in which the detection electrode pattern and the pull-out line are integrally formed on the surface may be a glass substrate for a touch panel which is chemically strengthened and has excellent strength.

根據請求項第3項的發明的話,可以在各玻璃基板印刷著色裝飾層,或是不貼附裝飾膜,而往複數玻璃基板統括形成著色裝飾層。 According to the invention of claim 3, the colored decorative layer may be printed on each of the glass substrates or the decorative film may not be attached, and the reciprocating glass substrate may be integrally formed with a colored decorative layer.

根據請求項第4項之發明的話,能夠以拉出配線圖案之色,把中空文字著色為任意之色。 According to the invention of claim 4, the hollow character can be colored into an arbitrary color by pulling out the color of the wiring pattern.

根據請求項第5項與第7項之發明的話,即使少量的化學研磨液侵入,接觸拉出配線圖案,也不會氧化而斷線,可以改善製造生產率。 According to the inventions of the fifth and seventh aspects of the invention, even if a small amount of chemical polishing liquid intrudes and contacts the drawn wiring pattern, the wire is not oxidized and broken, and the manufacturing productivity can be improved.

根據請求項第8項的發明的話,因為可得任意輪廓形狀的觸控面板用玻璃基板,所以可使觸控面板成為因應於設計上的要求之任意形狀。 According to the invention of claim 8, since the glass substrate for a touch panel having an arbitrary outline shape can be obtained, the touch panel can be made into any shape that meets the design requirements.

以下,使用圖1至圖6說明相關於本發明之一實施形態之觸控面板用玻璃基板1及其製造方法。觸控面板用玻璃基板,一般係重疊於液晶面板等顯示面板的上方配置為平行,用於檢測出以顯示於顯示面板的圖標等為目標之輸入操作的輸入位置的觸控面板。隨著檢測出輸入位置的觸控面板的檢測方式其具體構成有所不同,但在本實施形態,係以用於由輸入操作體接近的檢測電極圖案之靜電電容變化來檢測出輸入位置的靜電電容方式的觸控面板所使用的觸控面板用玻璃基板1來進行說明。 Hereinafter, a glass substrate 1 for a touch panel according to an embodiment of the present invention and a method of manufacturing the same will be described with reference to FIGS. 1 to 6. The glass substrate for a touch panel is generally arranged in parallel with a display panel that is superimposed on a display panel such as a liquid crystal panel, and is used for detecting an input position of an input operation for an icon or the like displayed on the display panel. The specific configuration of the touch panel detection method in which the input position is detected differs. However, in the present embodiment, the static electricity at the input position is detected by the electrostatic capacitance change of the detection electrode pattern approached by the input operation body. The glass substrate 1 for a touch panel used in a capacitive touch panel will be described.

圖1係觸控面板用玻璃基板1的平面圖,以下把觸控面板用玻璃基板1的玻璃基板部分簡稱為玻璃基板1’,把被形成玻璃基板1’的檢測電極圖案的圖1所表示的平面當作表面來進行說明。如圖所示,玻璃基板1的輪廓,係配合重疊於下方(底面側)配置為縱長的長方形的顯示面板,全體為縱長的長方形形狀,長方形狀的四個角,由搭載觸控面板的機器的表面所表現的設計上的要求而以4分圓的圓弧來連續。玻璃基板1’,若是透明的玻璃的話,可以使用硼矽酸玻璃等種種玻璃,但在此為蘇打玻璃。 1 is a plan view of a glass substrate 1 for a touch panel. Hereinafter, the glass substrate portion of the glass substrate 1 for touch panel is simply referred to as a glass substrate 1', and the detection electrode pattern of the glass substrate 1' is formed as shown in FIG. The plane is described as a surface. As shown in the figure, the outline of the glass substrate 1 is a rectangular display panel that is vertically stacked on the lower side (bottom side), and has a vertically long rectangular shape and four rectangular corners. The design of the surface of the machine is continuous with a circular arc of 4 points. For the glass substrate 1', if it is a transparent glass, various kinds of glass such as borosilicate glass can be used, but here, it is a soda glass.

於透明的玻璃基板1’的表面,以可目視下方的顯示面板的方式使透明導電材料之例如ITO(Indium Tin Oxide)所構成的複數X檢測電極圖案Xn與複數之Y檢測電極圖案Yn,在正交的XY方向上相互交叉而形成。複數之X檢測電極圖案Xn,於X方向等間距地被形成,各X檢測電極圖案Xn,分別沿著Y方向形成為反覆菱形而連續的形狀。此外,複數之Y檢測電極圖案Yn,於Y方向等間距地被形成,各Y檢測電極圖案Yn,分別沿著X方向形成為反覆菱形而連續的形狀。X檢測電極圖案Xn的菱形與Y檢測電極圖案Yn的菱形,分別為互補的輪廓,亦即,以相互正交配置的複數X檢測電極圖案Xn與複數之Y檢測電極圖案Yn,來覆蓋長方形的輸入操作區域EA之幾乎全體。 On the surface of the transparent glass substrate 1', a plurality of X detecting electrode patterns Xn composed of, for example, ITO (Indium Tin Oxide) of a transparent conductive material and a plurality of Y detecting electrode patterns Yn are formed in a manner of visually observing the lower display panel. The orthogonal XY directions are formed to intersect each other. The plurality of X detecting electrode patterns Xn are formed at equal intervals in the X direction, and each of the X detecting electrode patterns Xn is formed in a shape that is continuous in a rhombic shape in the Y direction. Further, a plurality of Y detecting electrode patterns Yn are formed at equal intervals in the Y direction, and each of the Y detecting electrode patterns Yn is formed in a shape continuous with a rhombic shape in the X direction. The diamond shape of the X detecting electrode pattern Xn and the diamond shape of the Y detecting electrode pattern Yn are complementary contours, that is, a plurality of X detecting electrode patterns Xn and a plurality of Y detecting electrode patterns Yn arranged orthogonally to each other to cover the rectangular shape Enter almost all of the operating area EA.

X檢測電極圖案Xn與Y檢測電極圖案Yn交叉的部位,分別成為菱形的角之細寬幅,所以中介著微小面積的 中間絕緣片2使X檢測電極圖案Xn與Y檢測電極圖案Yn上下隔開而相互絕緣。中間絕緣片2很微小,此外,以透明的絕緣材料來形成,所以乍看之下是無法目視確認的程度之不醒目者。 The portions where the X detecting electrode pattern Xn and the Y detecting electrode pattern Yn intersect each other have a narrow width of a rhombic corner, so that a small area is interposed. The intermediate insulating sheet 2 separates the X detecting electrode pattern Xn and the Y detecting electrode pattern Yn from each other up and down. The intermediate insulating sheet 2 is very small, and is formed of a transparent insulating material, so that it is not obvious at the time of visual inspection.

各X檢測電極圖案Xn與Y檢測電極圖案Yn,分別在輸入操作區域EA的邊界導電連接於拉出配線圖案(以下,稱為配線圖案)3,在圖1的左下角藉由拉出配線圖案3的輸出部,可以往由特定的檢測電極圖案Xn、Yn的靜電電容的變化來檢測輸入位置的觸控面板的檢測電路部導電連接。此處,構成檢測電極圖案Xn、Yn的ITO,比電阻係比通常的金屬還要高,因此以單位長度電阻值比ITO之更低的MAM(層積Mo(molybdenum).Al(aluminium).Mo(molybdenum)之三層構造的金屬)來形成配線圖案3,降低直到輸出為止的合成電阻而成為檢測感度良好者。MAM在比較上耐酸性也優異,為3層構造,所以即使在後述之化學蝕刻步驟少許地接觸到含有氟酸的化學研磨液,也不會到完全斷線的程度,不會損及連接的可信賴性。 Each of the X detection electrode patterns Xn and the Y detection electrode patterns Yn is electrically connected to the pull-out wiring pattern (hereinafter referred to as a wiring pattern) 3 at the boundary of the input operation region EA, and the wiring pattern is pulled out in the lower left corner of FIG. The output portion of the third portion can electrically connect the detection circuit portion of the touch panel that detects the input position to the change in the electrostatic capacitance of the specific detection electrode patterns Xn and Yn. Here, the ITO constituting the detection electrode patterns Xn and Yn is higher in specific resistance than the normal metal, and therefore has a lower MAM than the ITO (layered Mo (molybdenum). Al (aluminium). The wiring pattern 3 is formed by the metal of the three-layer structure of Mo (molybdenum), and the combined resistance until the output is lowered, and the detection sensitivity is good. MAM is also excellent in acid resistance in comparison and has a three-layer structure. Therefore, even if a chemical polishing solution containing a fluoric acid is slightly contacted in a chemical etching step to be described later, it will not be completely broken, and the connection will not be damaged. Trustworthiness.

配線圖案3,可以目視,所以於輸入操作區域EA的周圍之與玻璃基板1’的輪廓之間網版印刷以黑色等不透明的油墨進行所謂的黑框印刷,在施以著色裝飾層6的輸入操作區域EA的周圍形成配線圖案3,隱藏配線圖案3。又,作為黑框印刷,使用彩色光阻油墨藉由光蝕刻法形成印刷層,應用所謂的黑矩陣印刷亦可。 Since the wiring pattern 3 can be visually observed, so-called black frame printing is performed on the screen printing between the periphery of the input operation area EA and the outline of the glass substrate 1' with an opaque ink such as black, and the input of the colored decorative layer 6 is applied. A wiring pattern 3 is formed around the operation area EA to hide the wiring pattern 3. Further, as the black frame printing, a printing layer is formed by photolithography using a color photoresist ink, and so-called black matrix printing may be applied.

被形成於玻璃基板1’的表面之檢測電極圖案Xn、Yn 與配線圖案3,除了配線圖案3的輸出部之全體,係以透明絕緣材料所形成的保護膜4所覆蓋。保護膜4,是以使這些導電圖案Xn、Yn、3不會露出於外部被氧化,或受到外力而破損的方式進行保護為目的,被形成於包含輸入操作區域EA的玻璃基板1’的區域,所以使用透明絕緣材料來形成。又,相關於本實施形態的玻璃基板1’,進行化學強化,同時藉由後述的製造步驟使在周圍不發生微龜裂,所以即使厚度為1mm以下也可得到特定的強度,不要如從前那樣在成為輸入操作面側的上方層積透明保護面板,或者貼附防止飛散膜亦可。另一方面,以包含氧化矽(SiO2)等絕緣材料形成保護膜4,兼用作為防反射膜。 The detection electrode patterns Xn and Yn and the wiring pattern 3 formed on the surface of the glass substrate 1' are covered with a protective film 4 made of a transparent insulating material except for the entire output portion of the wiring pattern 3. The protective film 4 is formed to protect the conductive patterns Xn, Yn, and 3 from being exposed to the outside or being damaged by an external force, and is formed in the region of the glass substrate 1' including the input operation region EA. Therefore, it is formed using a transparent insulating material. Further, the glass substrate 1' of the present embodiment is chemically strengthened, and micro-cracking does not occur around the manufacturing process described later. Therefore, even if the thickness is 1 mm or less, specific strength can be obtained, and it is not necessary to be as before. A transparent protective panel may be laminated on the side of the input operation surface, or a scattering preventing film may be attached. On the other hand, the protective film 4 is formed of an insulating material containing yttrium oxide (SiO 2 ), and also serves as an antireflection film.

此玻璃基板1’,如圖3至圖5所示,係由製造9枚觸控面板用玻璃基板1的大小的玻璃原板10來切出形成各個玻璃基板。以下,使用圖3至圖6說明製造此觸控面板用玻璃基板1的步驟。 As shown in FIG. 3 to FIG. 5, the glass substrate 1' is cut out to form each glass substrate from a glass original plate 10 of a size of nine glass substrates 1 for touch panels. Hereinafter, a step of manufacturing the glass substrate 1 for a touch panel will be described with reference to FIGS. 3 to 6 .

玻璃原板10,係由蘇打玻璃製之更大的玻璃原板來以劃線切割等方法切出成長方形。切出的玻璃原板10的輪廓,如圖3所示,使取出9枚玻璃基板1’的輪廓投影於玻璃原板10的表背面而把該投影線假設為切出線CL,於切出線CL的周圍確保至少數mm寬幅的切斷區域CA使9枚玻璃基板1’不相互重疊地整齊排列配置為矩陣狀的狀態成為外接於其全體之長方形。亦即,於玻璃原板10,長方形的4個角落以4分圓連續的切出線CL來包圍的區域,係成為各玻璃基板1’的玻璃基板區域。 The glass original plate 10 is cut into a rectangular shape by a scribing method or the like from a larger glass original plate made of soda glass. As shown in FIG. 3, the outline of the cut glass original plate 10 is projected onto the front and back surfaces of the glass original plate 10, and the projection line is assumed to be a cut-out line CL on the cut-out line CL. In the surrounding area, the cutting area CA having a width of at least several mm is ensured, and the nine glass substrates 1' are arranged in a matrix shape without being overlapped with each other, and are in a rectangular shape circumscribing the whole. In other words, in the glass original plate 10, the region surrounded by the four-circle continuous cut line CL at the four corners of the rectangular shape is the glass substrate region of each of the glass substrates 1'.

首先,將此玻璃原板10,放入加熱到380℃程度的硝酸鉀熔融鹽,於玻璃表面進行發生離子交換之化學強化。藉由此化學強化,玻璃原板10以及由此玻璃原板10分離的各玻璃基板1’,與化學強化之前相比具有5倍程度的強度。 First, the glass original plate 10 is placed in a molten salt of potassium nitrate heated to about 380 ° C to carry out chemical strengthening of ion exchange on the surface of the glass. By this chemical strengthening, each of the glass substrate 1 and the glass substrate 1' separated therefrom by the glass original plate 10 has a strength of about 5 times as compared with that before chemical strengthening.

接著,如圖3、圖6(a)所示,在玻璃原板10上的各輸入操作區域EA的周圍與設定的切出線CL之間使用黑色油墨進行黑框印刷,形成著色裝飾層6。 Next, as shown in FIG. 3 and FIG. 6(a), black frame printing is performed using black ink between the periphery of each input operation area EA on the glass original plate 10 and the set cut line CL to form the colored decorative layer 6.

接著,形成著色裝飾層6的玻璃原板10的表面全體藉由濺鍍形成由ITO構成的透明導電膜5’,使其全體流經滾輪塗料器於透明導電膜5’上附著光阻層7。光阻層7,如圖6(b)所示,使形成連接導體片5的部位曝光顯影作為遮罩,留下以遮罩覆蓋的透明導電膜5’蝕刻透明導電膜,如圖4、圖6(c)所示,在X檢測電極圖案Xn與Y檢測電極圖案Yn交叉的部分形成帶狀的連接導體片5。 Then, the transparent conductive film 5' made of ITO is formed by sputtering on the entire surface of the glass original plate 10 on which the colored decorative layer 6 is formed, and the photoresist layer 7 is adhered to the transparent conductive film 5' through the roller coater. As shown in FIG. 6(b), the photoresist layer 7 exposes and develops a portion where the connecting conductor piece 5 is formed as a mask, and leaves the transparent conductive film 5' covered with a mask to etch the transparent conductive film, as shown in FIG. As shown in FIG. 6(c), a strip-shaped connecting conductor piece 5 is formed in a portion where the X detecting electrode pattern Xn and the Y detecting electrode pattern Yn intersect.

進而,如圖6(d)所示,以同樣的光蝕刻法、網版印刷等,橫跨此連接導體片5上形成中間絕緣片2。 Further, as shown in FIG. 6(d), the intermediate insulating sheet 2 is formed across the connecting conductor piece 5 by the same photolithography method, screen printing or the like.

接著,於玻璃基板1’的表面形成X檢測電極圖案Xn與Y檢測電極圖案Yn。檢測電極圖案Xn、Yn,係以光蝕刻法圖案化而形成的,於被形成中間絕緣片2與連接導體片5的玻璃基板1’的表面全體藉由濺鍍形成由ITO所構成的透明導電膜,重疊於其上方全體使附著光阻層。其後,曝光顯影X檢測電極圖案Xn與菱形Y檢測電極圖案Yn的形成部位之光阻層形成遮罩,蝕刻未以遮罩覆蓋的透明 導電膜,而形成X檢測電極圖案Xn與Y檢測電極圖案Yn。藉此,在菱形的X方向相鄰的Y檢測電極圖案Yn的菱形部分中介著連接導體片5來連接,各Y檢測電極圖案Yn,沿著X方向被形成,X檢測電極圖案Xn,菱形間的連結部被形成於中間絕緣片2上,與Y檢測電極圖案Yn絕緣,而沿著Y方向被形成。 Next, an X detecting electrode pattern Xn and a Y detecting electrode pattern Yn are formed on the surface of the glass substrate 1'. The detection electrode patterns Xn and Yn are formed by patterning by photolithography, and transparent conductive layers made of ITO are formed by sputtering on the entire surface of the glass substrate 1' on which the intermediate insulating sheet 2 and the connecting conductor sheet 5 are formed. The film is superposed on the entire upper portion to adhere the photoresist layer. Thereafter, the photoresist layer of the portion where the exposure developing X detecting electrode pattern Xn and the diamond Y detecting electrode pattern Yn are formed forms a mask, and the etching is not covered by the mask. The conductive film forms the X detecting electrode pattern Xn and the Y detecting electrode pattern Yn. Thereby, the rhombic portions of the Y detecting electrode patterns Yn adjacent in the X direction of the rhombic are connected by the connecting conductor pieces 5, and the Y detecting electrode patterns Yn are formed along the X direction, and the X detecting electrode patterns Xn, between the diamonds The joint portion is formed on the intermediate insulating sheet 2, is insulated from the Y detecting electrode pattern Yn, and is formed along the Y direction.

如圖5、圖6(e)所示,各X檢測電極圖案Xn與Y檢測電極圖案Yn,分別在輸入操作區域EA的邊界,被連接於由MAM所構成的配線圖案3。配線圖案3,以網版印刷、使用遮罩的濺鍍等,被形成於施以黑框印刷的輸入操作區域EA的周圍,為了在輸出部與外部電路連接,被拉出至切出線CL所包圍的玻璃基板1’的左下方。 As shown in FIGS. 5 and 6(e), each of the X detection electrode patterns Xn and the Y detection electrode patterns Yn is connected to the wiring pattern 3 composed of the MAM at the boundary of the input operation region EA. The wiring pattern 3 is formed around the input operation area EA to which black frame printing is applied by screen printing, sputtering using a mask, or the like, and is pulled out to the cut-out line CL in order to be connected to the external circuit at the output portion. The lower left side of the surrounded glass substrate 1'.

接著,如圖6(f)所示,於玻璃原板10全體以旋轉塗布器等沒有不均地附著透明材料之保護膜4之後,以光蝕刻法,以覆蓋玻璃基板1’上之除了檢測電極圖案Xn、Yn與輸出部的配線圖案3的方式,而且比玻璃原板10的表面之以切出線CL所包圍的範圍(亦即,玻璃基板1’的形狀)還要跨全周長稍微小些的範圍形成保護膜4。如圖所示,把檢測電極圖案Xn、Yn或中間絕緣片2重疊形成所導致的玻璃原板10的表面的凹凸,會藉由無不均地附著保護膜4而緩和,接近於平面。 Next, as shown in FIG. 6(f), after the protective film 4 of the transparent material is not unevenly attached to the entire glass original plate 10 by a spin coater or the like, photolithography is performed to cover the detection electrode other than the glass substrate 1'. The pattern Xn, Yn and the wiring pattern 3 of the output portion are also slightly smaller than the entire circumference of the surface of the glass original plate 10 surrounded by the cut line CL (that is, the shape of the glass substrate 1'). The range of these forms the protective film 4. As shown in the figure, the unevenness on the surface of the original glass plate 10 caused by the formation of the detection electrode patterns Xn, Yn or the intermediate insulating sheet 2 is relaxed by the adhesion of the protective film 4 without unevenness, and is close to a plane.

由前述之化學強化到保護膜4的形成步驟為止之所謂的感測面的形成步驟,可以對9枚玻璃基板1’統括進行,所以量產步驟大幅縮短。 The so-called sensing surface forming step from the chemical strengthening to the step of forming the protective film 4 can be performed on all of the nine glass substrates 1', so that the mass production step is greatly shortened.

9枚玻璃基板1’,係藉由化學蝕刻由玻璃原板10分離,所以在玻璃原板10的表背面全體附著耐氟酸性之光阻膜8,除了以切出線CL區劃的切斷區域CA外曝光顯影光阻膜8。保護膜4,一般以不具耐氟酸性的材料來形成,所以曝光之光阻膜8,有必要以至少覆蓋保護膜4的表面全體的方式來形成,光阻膜8的範圍,係對保護膜4的範圍跨全周長稍微大些。藉由如此進行,藉著化學蝕刻來分離玻璃基板1’時,可以防止保護膜4受到化學侵襲。 Since the nine glass substrates 1' are separated from the glass original plate 10 by chemical etching, the fluorine-resistant acidic photoresist film 8 is adhered to the entire front and back surfaces of the glass original plate 10, except for the cut-off area CA which is defined by the cut-out line CL. The developed photoresist film 8 is exposed. The protective film 4 is generally formed of a material that does not have a fluorine-resistant acidity. Therefore, it is necessary to form the exposed photoresist film 8 so as to cover at least the entire surface of the protective film 4. The range of the photoresist film 8 is a protective film. The range of 4 is slightly larger across the entire circumference. By doing so, when the glass substrate 1' is separated by chemical etching, the protective film 4 can be prevented from being chemically attacked.

其後,以鹼溶液除去未使曝光的切斷區域CA的光阻膜,如圖6(g)所示,使相當於表背面的玻璃基板1’的區域以光硬化的光阻膜8來覆蓋。光硬化之光阻膜8為薄膜,附著保護膜4,被形成於接近平面的玻璃原板10的表面,所以不會發生層之階差或孔、缺口,確實密封保護膜4的表面全體。 Thereafter, the photoresist film of the cut region CA which is not exposed by the alkali solution is removed, and as shown in FIG. 6(g), the region corresponding to the glass substrate 1' on the front and back surfaces is cured by photocuring the photoresist film 8. cover. The photo-cured photoresist film 8 is a film, and the protective film 4 is adhered to the surface of the glass original plate 10 which is close to the plane. Therefore, the step of the layer, the holes and the notches are not generated, and the entire surface of the protective film 4 is surely sealed.

接著,把玻璃原板10浸於含有氟酸的化學研磨液,藉由化學蝕刻切斷區域CA,使9枚玻璃基板1’由玻璃原板10分離。於此化學蝕刻步驟,形成檢測電極圖案Xn、Yn等的感測器面,以保護膜4與光阻膜8重疊覆蓋,所以不會受到化學研磨液的化學侵襲。 Next, the glass original plate 10 is immersed in a chemical polishing liquid containing hydrofluoric acid, and the glass substrate 1' is separated from the glass original plate 10 by chemical etching to cut the region CA. In this chemical etching step, the sensor faces of the detecting electrode patterns Xn, Yn, and the like are formed, and the protective film 4 and the photoresist film 8 are overlaid, so that they are not chemically attacked by the chemical polishing liquid.

附著於由玻璃原板10分離的玻璃基板1’的表背面之光阻膜8,使用鹼溶液除去,在除去光阻膜8的階段,得到完成的觸控面板用玻璃基板1。又,此處除去的僅有光阻膜8,保護膜4殘留於玻璃基板1的表面。藉由此保護膜4,保護檢測電極圖案Xn、Yn等。 The photoresist film 8 adhered to the front and back surfaces of the glass substrate 1' separated from the glass original plate 10 is removed using an alkali solution, and the completed glass substrate 1 for a touch panel is obtained at the stage of removing the photoresist film 8. Further, only the photoresist film 8 is removed here, and the protective film 4 remains on the surface of the glass substrate 1. The detection electrode patterns Xn, Yn, and the like are protected by the protective film 4 thereby.

前述的實施形態,係針對使用於靜電電容方式的觸控面板之觸控面板用玻璃基板1來進行說明,但是對於觸控面板的輸入位置的檢測方式不同,包含檢測電極圖案的感測面的構成或是感測面的製造步驟不同的觸控面板用玻璃基板,也可以適用本發明。例如,使電阻感壓方式等之XY檢測電極圖案隔著絕緣間隔使其對向之電阻感壓方式等的觸控面板,把藉由本發明所製造的二枚觸控面板用玻璃基板,中介著間隔件而使電阻層所構成的檢測電極圖案相對向的方式層積。 The above-described embodiment is described with respect to the glass substrate 1 for a touch panel used in a capacitive touch panel. However, the detection method of the input surface of the touch panel is different, and the sensing surface of the detection electrode pattern is included. The present invention can also be applied to a glass substrate for a touch panel which is different in manufacturing steps of the sensing surface. For example, a touch panel such as a resistance sensing method in which an XY detecting electrode pattern such as a resistance sensing method is interposed between the insulating electrodes and the like is interposed by a glass substrate for two touch panels manufactured by the present invention. The spacers are stacked such that the detection electrode patterns formed of the resistance layers face each other.

此外,於玻璃基板的表面形成檢測電極圖案或拉出配線圖案的感測面的製造步驟,只要至少在形成保護膜4之後化學蝕刻切斷區域CA即可,不限於前述實施形態所說明的順序,隨著檢測電極圖案的構成不同其製造步驟順序不相同。 Further, the manufacturing step of forming the detecting electrode pattern or the sensing surface of the drawn wiring pattern on the surface of the glass substrate is not limited to the order described in the above embodiment, as long as the cutting region CA is chemically etched at least after the protective film 4 is formed. The order of manufacturing steps is different depending on the configuration of the detecting electrode pattern.

此外,雖以MAM形成拉出配線圖案3,但亦可以鋁、銀等其他導電材料來形成。此外,由Mo.Al.Mo之3層構造所構成的MAM,亦可置換為Mo或Mo合金.Al或Al合金.Mo或Mo合金之3層構造。 Further, although the drawn wiring pattern 3 is formed of MAM, it may be formed of another conductive material such as aluminum or silver. In addition, by Mo. Al. The MAM composed of the 3-layer structure of Mo can also be replaced by Mo or Mo alloy. Al or Al alloy. 3-layer structure of Mo or Mo alloy.

此外,對著色裝飾層6施以中空文字,於其上以覆蓋中空文字的區域的方式形成配線圖案,在中空文字部分使配線圖案的顏色透過,可以由觸控面板用玻璃基板的表側來顯示可視覺確認的文字。特別是使著色裝飾層6以接近於黑色的色調來施作,與配線圖案(鋁或銀)之色的對比會變大,中空文字顯示會變得明顯。 Further, the colored decorative layer 6 is provided with a hollow character, and a wiring pattern is formed thereon so as to cover a region of the hollow character, and the color of the wiring pattern is transmitted through the hollow character portion, and can be displayed by the front side of the glass substrate for the touch panel. Visually identifiable text. In particular, the colored decorative layer 6 is applied in a color tone close to black, and the contrast with the color of the wiring pattern (aluminum or silver) becomes large, and the hollow character display becomes conspicuous.

進而,對玻璃原板10進行的化學強化,若是不進行化學強化就可得到必要的強度之厚度,就沒有必要進行。 Further, if the chemical strengthening of the glass original plate 10 is performed without chemical strengthening, the thickness of the necessary strength can be obtained, and it is not necessary.

此外,沒有必要一定進行黑框印刷步驟,在本發明製造的觸控面板用玻璃基板1的上方覆蓋以相當於黑框印刷的裝飾膜亦可。 Further, it is not necessary to perform the black frame printing step, and the decorative film corresponding to the black frame printing may be covered on the glass substrate 1 for a touch panel manufactured by the present invention.

此外,在各步驟形成的光阻層,或是光阻膜,亦可以是貼附膜光阻(film resist)者。 Further, the photoresist layer formed in each step, or the photoresist film, may be a film resist.

[產業上利用可能性] [Industry use possibility]

本發明適用於要求薄型化與強度的觸控面板用玻璃基板及其製造方法。 The present invention is applicable to a glass substrate for a touch panel which is required to be thinner and stronger, and a method of manufacturing the same.

1‧‧‧觸控面板用玻璃基板 1‧‧‧ glass substrate for touch panel

1’‧‧‧玻璃基板 1'‧‧‧ glass substrate

3‧‧‧拉出配線圖案 3‧‧‧ Pull out the wiring pattern

4‧‧‧保護膜(overcoat) 4‧‧‧Protective film (overcoat)

8‧‧‧光阻膜(Resist膜) 8‧‧‧Photoresist film (Resist film)

10‧‧‧玻璃原板 10‧‧‧Glass original board

Xn‧‧‧X檢測電極圖案 Xn‧‧‧X detection electrode pattern

Yn‧‧‧Y檢測電極圖案 Yn‧‧‧Y detection electrode pattern

CL‧‧‧切出線 CL‧‧‧ cut out the line

CA‧‧‧切斷區域 CA‧‧‧ cut area

[圖1]相關於本發明之一實施形態之觸控面板用玻璃基板1的平面圖。 Fig. 1 is a plan view showing a glass substrate 1 for a touch panel according to an embodiment of the present invention.

[圖2]沿著圖1之A-A線的部分省略縱剖面圖。 2] A longitudinal cross-sectional view is omitted in a portion along the line A-A of FIG. 1.

[圖3]於各玻璃基板1’印刷著色裝飾層6之玻璃原板10的平面圖。 Fig. 3 is a plan view showing a glass original plate 10 on which a colored decorative layer 6 is printed on each glass substrate 1'.

[圖4]形成連接導體片5的玻璃原板10的平面圖。 4] A plan view of a glass original plate 10 forming a connecting conductor piece 5.

[圖5]分離觸控面板用玻璃基板1的步驟前之玻璃原板10的平面圖。 FIG. 5 is a plan view of the glass original plate 10 before the step of separating the glass substrate 1 for a touch panel.

[圖6]顯示觸控面板用玻璃基板1的製造步驟,分別係(a)於玻璃原板10印刷著色裝飾層6的步驟, (b)於透明導電膜5’上形成曝光顯影的光阻層7的遮罩之步驟,(c)於玻璃原板10形成連接導體片5的步驟,(d)於連接導體片5上跨架形成中間絕緣片2的步驟,(e)形成配線圖案3與檢測電極圖案Xn、Yn的步驟,(f)把覆蓋配線圖案3與檢測電極圖案Xn、Yn的保護膜4形成於玻璃原板10的表面的步驟,(g)以光硬化的光阻膜8遮罩玻璃原板10的表背面之切斷區域CA以外的相當於玻璃基板1’的區域之步驟,之部分省略剖面圖。 6 shows a manufacturing step of the glass substrate 1 for a touch panel, and the steps of (a) printing the colored decorative layer 6 on the glass original plate 10, respectively. (b) a step of forming a mask for exposing and developing the photoresist layer 7 on the transparent conductive film 5', (c) forming a step of connecting the conductor sheets 5 to the glass original sheet 10, and (d) bridging the connecting conductor sheets 5 The step of forming the intermediate insulating sheet 2, (e) the step of forming the wiring pattern 3 and the detecting electrode patterns Xn, Yn, and (f) forming the protective film 4 covering the wiring pattern 3 and the detecting electrode patterns Xn, Yn on the glass original sheet 10. In the step of the surface, (g) the photo-curable film 8 is used to cover the region corresponding to the glass substrate 1' other than the cut region CA of the front and back surfaces of the glass original plate 10, and a cross-sectional view is partially omitted.

3‧‧‧拉出配線圖案 3‧‧‧ Pull out the wiring pattern

6‧‧‧著色裝飾層 6‧‧‧Colored decorative layer

10‧‧‧玻璃原板 10‧‧‧Glass original board

Xn‧‧‧X檢測電極圖案 Xn‧‧‧X detection electrode pattern

Yn‧‧‧Y檢測電極圖案 Yn‧‧‧Y detection electrode pattern

CL‧‧‧切出線 CL‧‧‧ cut out the line

CA‧‧‧切斷區域 CA‧‧‧ cut area

EA‧‧‧輸入操作區域 EA‧‧‧Input operation area

2‧‧‧絕緣片 2‧‧‧Insulation sheet

4‧‧‧保護膜(overcoat) 4‧‧‧Protective film (overcoat)

5‧‧‧導體片 5‧‧‧Conductor

5’‧‧‧導電膜 5'‧‧‧Electrical film

7‧‧‧光阻層 7‧‧‧Photoresist layer

8‧‧‧光阻膜(Resist膜) 8‧‧‧Photoresist film (Resist film)

Claims (8)

一種觸控面板用玻璃基板之製造方法,其特徵係於玻璃基板的表面,被形成由透明導電層所構成而相互交叉配線的複數第1檢測電極圖案及複數第2檢測電極圖案,以及導電連接於各檢測電極圖案的複數拉出配線圖案,第1檢測電極圖案與第2檢測電極圖案係以被形成於交叉部位的中間絕緣片相互絕緣之觸控面板用玻璃基板之製造方法,藉由在分離複數玻璃基板的大小之玻璃原板的表背兩面,假想設定使前述複數玻璃基板之各輪廓往表背面投影之切出線,在玻璃原板的表面之以切出線包圍的各玻璃基板區域,依序把兩側連接於在前述各交叉部位被分離的第1檢測電極圖案之帶狀的連接導體片、橫跨於連接導體片上之前述中間絕緣片、以及複數之第1檢測電極圖案及複數之第2檢測電極圖案予以圖案化而形成由透明導電層所構成的複數的檢測電極圖案的步驟1,於前述各玻璃基板區域,形成導電連接各檢測電極圖案的拉出配線圖案的步驟2,把覆蓋前述各玻璃基板區域的檢測電極圖案與拉出配線圖案,平坦化前述連接導體片與前述中間絕緣片與第2檢測電極圖案層積的交叉部位,以及僅被形成第1檢測電極圖案與第2檢測電極圖案之某一方之其他區域之保護膜(overcoat),形成於玻璃原板的表面之步驟3,於被形成前述保護膜的玻璃原板的表背兩面,除了沿 著前述切出線的切斷區域以外,形成光阻膜的步驟4,將前述光阻膜作為遮罩而化學蝕刻玻璃原板的表背兩面的切斷區域,由玻璃原板分離各玻璃基板的步驟5,除去被形成於前述玻璃基板的表背兩面的光阻膜的步驟6;而製造於前述玻璃基板的表面圖案化而形成由透明導電層所構成的複數檢測電極圖案的觸控面板用玻璃基板之製造方法。 A method for producing a glass substrate for a touch panel, characterized in that a plurality of first detecting electrode patterns and a plurality of second detecting electrode patterns each formed by a transparent conductive layer and intersecting each other are formed on a surface of a glass substrate, and a conductive connection is formed In the method of manufacturing the glass substrate for a touch panel in which the first detecting electrode pattern and the second detecting electrode pattern are insulated from each other by the intermediate insulating sheets formed at the intersecting portions, the first detecting electrode pattern and the second detecting electrode pattern are formed by the method of manufacturing the glass substrate for the touch panel. Separating the front and back surfaces of the glass original plate of the size of the plurality of glass substrates, and arbitrarily setting a cut-out line for projecting the outlines of the plurality of glass substrates toward the front and back surfaces, and the glass substrate regions surrounded by the cut lines on the surface of the glass original plate, a strip-shaped connecting conductor piece that is connected to the first detecting electrode pattern separated at each of the intersecting portions, the intermediate insulating sheet that straddles the connecting conductor piece, and a plurality of first detecting electrode patterns and plural numbers Step 1 of patterning the second detecting electrode pattern to form a plurality of detecting electrode patterns composed of a transparent conductive layer Step 2 of electrically connecting the drawn wiring patterns of the respective detecting electrode patterns in each of the glass substrate regions, and flattening the connecting conductor pieces and the intermediate insulating layer by covering the detecting electrode patterns and the drawn wiring patterns covering the respective glass substrate regions The intersection of the sheet and the second detection electrode pattern and the overcoat formed only on the other of the first detection electrode pattern and the second detection electrode pattern are formed on the surface of the glass original sheet. , on the front and back sides of the original glass plate on which the protective film is formed, except Step 4 of forming a photoresist film in addition to the cut region of the cut-out line, and step of chemically etching the cut regions on the front and back surfaces of the glass original plate using the photoresist film as a mask, and separating the glass substrates from the glass original plate 5, the step 6 of removing the photoresist film formed on both the front and back surfaces of the glass substrate; and the glass for touch panel formed by patterning the surface of the glass substrate to form a plurality of detection electrode patterns composed of a transparent conductive layer A method of manufacturing a substrate. 如申請專利範圍第1項之觸控面板用玻璃基板之製造方法,其中於化學強化的玻璃原板的各玻璃基板區域,藉由步驟1與步驟2形成複數檢測電極圖案與拉出配線圖案。 The method for producing a glass substrate for a touch panel according to the first aspect of the invention, wherein the plurality of detection electrode patterns and the drawn wiring patterns are formed in each of the glass substrate regions of the chemically strengthened glass original plate by the steps 1 and 2. 如申請專利範圍第1或2項之觸控面板用玻璃基板之製造方法,其中於玻璃原板的表面之前述各玻璃基板區域,形成著色裝飾層後,藉由步驟1形成複數之檢測電極圖案。 The method for producing a glass substrate for a touch panel according to the first or second aspect of the invention, wherein the colored decorative layer is formed on each of the glass substrate regions on the surface of the glass original plate, and then a plurality of detection electrode patterns are formed by the step 1. 如申請專利範圍第3項之觸控面板用玻璃基板之製造方法,其中於前述著色裝飾層施工出中空文字,以覆蓋該中空文字的方式形成前述拉出配線圖案。 The method for producing a glass substrate for a touch panel according to the third aspect of the invention, wherein the colored decorative layer is formed with a hollow character, and the drawn wiring pattern is formed to cover the hollow character. 如申請專利範圍第1或2項之觸控面板用玻璃基板之製造方法,其中前述拉出配線圖案,係鋁或其合金,為鉬或其合金所夾住而層積的3層構造來形成。 The method for producing a glass substrate for a touch panel according to the first or second aspect of the invention, wherein the drawn wiring pattern is formed by laminating a three-layer structure in which aluminum or an alloy thereof is sandwiched by molybdenum or an alloy thereof. . 一種觸控面板用玻璃基板,其特徵係藉由申請專利範圍第1或2項所記載的製造方法所製造。 A glass substrate for a touch panel, which is produced by the manufacturing method described in claim 1 or 2. 一種觸控面板用玻璃基板,其特徵係藉由申請專利範圍第5項所記載的製造方法所製造。 A glass substrate for a touch panel, which is produced by the manufacturing method described in claim 5 of the patent application. 如申請專利範圍第6或7項之觸控面板用玻璃基板,其中切出線之至少一部份為曲線。 The glass substrate for a touch panel according to claim 6 or 7, wherein at least a part of the cut-out line is a curve.
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