JP5729725B2 - Glass substrate for touch panel and manufacturing method thereof - Google Patents

Description

  The present invention relates to a glass substrate for a touch panel having a transparent detection electrode pattern for detecting an input position and a wiring pattern for connecting the detection electrode pattern to the outside, and a method for manufacturing the same. The present invention relates to a glass substrate for a touch panel that is excellent in strength even if it is thinned and a method for manufacturing the same.

  The touch panel is mounted on various devices such as a mobile phone, a car navigation system, and a personal digital assistant as an instruction input device. Usually, the touch panel is combined with a display device that is stacked on the inside thereof, with the aim of displaying on the display device. This is used for detecting the input position of an input operation body such as a finger.

  The touch panel that detects the input position by the input operation body has a resistance pressure detection method that detects from the resistance value between the input position and the reference electrode, and the capacitance that is detected from the change in stray capacitance at the input position due to the proximity of the input operation body Various input position detection methods such as an electromagnetic induction method that detects an electric signal of an input operation body from the position of an electrode that has been received by electromagnetic induction have been proposed, but these detections detect the input position from an electrical change. In any of the methods, one or a plurality of conductive detection patterns are formed on one surface of an insulating substrate serving as an input operation surface.

  As described above, in the touch panel in which the display device is arranged on the inner side, each part constituting the touch panel is made of a transparent body so that the display of the inner display device can be visually confirmed through the input operation surface of the touch panel. A glass substrate for a touch panel in which a detection electrode pattern made of a transparent conductive material such as ITO is formed on the surface of a glass substrate as an insulating substrate is used.

  The detection electrode pattern made of a transparent conductive material is patterned on the surface of the glass substrate by a photolithography method, and a wiring pattern for connecting the detection electrode pattern to an external circuit is connected to the detection electrode pattern on the surface of the glass substrate. Formed. In order to form a detection electrode pattern or a wiring pattern on the surface of a glass substrate, formation of a transparent conductive film by sputtering, adhesion of a photoresist layer, exposure development of a photoresist layer, etching of a transparent conductive film, printing of a wiring pattern, or Since a number of processes such as sputtering are required, in the manufacture of conventional glass substrates for touch panels, detection is performed on each glass substrate by performing each of the above steps on the surface of a glass plate having a size for cutting out a plurality of glass substrates. An electrode pattern and a wiring pattern are collectively formed, and then individual glass substrates are cut out from the glass original plate (Patent Document 1).

  The process of cutting out each glass substrate from the glass original plate cuts each glass substrate by so-called scribe cut, in which cutting is performed with a diamond cutter or the like along the outline of each glass substrate, and pressure is applied with a press on both sides of the cutting. (Patent Document 2).

  In a capacitive touch panel that detects an input position from a change in capacitance of a detection electrode pattern caused by an input operation body such as a finger approaching, a protective film or a protective film is further formed on a glass substrate having a detection electrode pattern formed on the surface. A touch panel is formed by laminating a decoration film on which a predetermined display is printed around the input operation area.

  Further, Patent Document 3 discloses a manufacturing method of a glass substrate in which a plurality of cover glasses arranged on the touch panel user side is cut out from a single glass original plate by chemical etching.

Japanese Patent No. 4000178 (Items 0035 to 0036 of the specification, FIG. 5) JP 2009-294771 A (Item 0015 of the specification, FIG. 2) JP 2010-254511 A (Items 0029 to 0031 of the specification, FIG. 2)

  When the glass substrate for a touch panel is cut out from the glass original plate by scribe cutting, a large number of microcracks are generated on the cut surface which is the outline of each glass substrate. In particular, most of the breakage of the glass substrate is triggered by microcracks generated around the glass substrate, so that the mechanical strength is greatly reduced by scribe cutting. On the other hand, when a touch panel is used as an input device of a portable electronic device such as a mobile phone that is required to be thin, it is desired that the glass substrate is also thinned to a thickness of, for example, 1 mm or less. After being mounted on a portable electronic device, it is easy to bend by impact on the surface, and it is necessary to laminate an anti-scattering film and a transparent protective substrate on the surface side. Transparency is impaired by overlapping a protective film and a transparent protective substrate, and accordingly, a high-class feeling is lowered.

  As a means to obtain a predetermined strength even if the thickness of the glass substrate is reduced to 1 mm or less, chemical strengthening that performs ion exchange on the glass surface is known. Thus, each glass substrate cannot be cut out, and eventually, after chemically strengthening each glass substrate, a detection electrode pattern and a wiring pattern are formed through the above-described many steps for each glass substrate. It was necessary, and the manufacturing efficiency and yield were extremely deteriorated.

  Furthermore, there is a demand for incorporating a curved line into the outline of a touch panel mounted on a mobile phone for design reasons, but a scribe cut that cuts by applying a mechanical impact may cut along a curved outline. Therefore, conventionally, a curved surface is formed by cutting and physical polishing, which is expensive. In addition, new microcracks are generated by such cutting and polishing, and there remains a problem that the strength deteriorates.

  Therefore, as in the invention described in Patent Document 3, a method of cutting out each glass substrate from the glass original plate by chemical etching was studied, but the conventional glass original plate, as described above, to shorten the manufacturing process, Since the detection electrode pattern and the lead wiring pattern connected to the detection electrode are formed on the surface, it is necessary to cover the surface with a resist film, and the portion not covered with the resist film is covered with a chemical polishing solution containing hydrofluoric acid. Each glass substrate is cut out by chemical etching.

  However, these detection electrode patterns and lead-out wiring patterns are formed by overlapping a plurality of conductive layers and insulating layers, so that the surface thereof is not a uniform flat surface. In other words, the chemical polishing liquid may enter through the gaps in the resist film during the chemical etching process. In particular, since the detection electrode pattern and the lead-out wiring pattern are made of materials such as aluminum, silver, and MAM that are easily oxidized by hydrofluoric acid, they are exposed to the hydrofluoric acid leaking from the gaps in the resist film and are subjected to a chemical attack. There is a concern about damage, and a cutting method using chemical etching has not been adopted for a glass original plate on which a detection electrode pattern or the like is formed.

  The present invention has been made in view of such problems, and is manufactured together with other glass substrates for touch panels, and a glass substrate for touch panels capable of obtaining a predetermined strength without generating microcracks in the contours thereof. An object is to provide a manufacturing method.

  It is another object of the present invention to provide a glass substrate for a touch panel in which the strength of the touch panel is not deteriorated and the contour of the touch panel is a curved surface, and a manufacturing method thereof.

In order to achieve the above-described object, a method for manufacturing a glass substrate for a touch panel according to claim 1 includes a plurality of first detection electrode patterns and a plurality of first detection electrode patterns that are formed of a transparent conductive layer and are arranged to cross each other on the surface of the glass substrate . 2 detection electrode patterns and a plurality of lead wiring patterns electrically connected to each detection electrode pattern are formed , and the first detection electrode pattern and the second detection electrode pattern are insulated from each other by an intermediate insulating piece formed at the intersection A method for manufacturing a glass substrate for a touch panel, in which a cutting line is formed by projecting the outlines of the plurality of glass substrates on the front and back surfaces of a glass original plate having a size for separating the plurality of glass substrates. and, in each glass substrate region surrounded by cutting line on the surface of the glass original plate, strip-shaped connecting both sides is connected to the first detection electrode pattern separated in each intersection part And body piece, said intermediate insulating piece which is passed over the strip connecting conductors, and a plurality of first detection electrode patterns and the plurality of second detection electrode pattern, and the step 1 is formed by patterning in this order, wherein each glass A lead wiring pattern formed in a three-layer structure in which a substrate region is electrically connected to each detection electrode pattern and aluminum or an alloy thereof is sandwiched and laminated between molybdenum or an alloy thereof, at least a part of which is formed Forming an output portion to be drawn out at an end portion of each glass substrate region and / or forming a lead wiring pattern in which at least a part thereof is formed at a peripheral portion of each glass substrate region; and the detection electrode patterns and the lead wiring pattern of each glass substrate areas not covered, and the connecting conductor piece and the intermediate insulating piece and the second detection electrode pattern A cross sites layer, an overcoat to flatten the other areas where only one is formed of first sensing electrode pattern and the second detection electrode pattern, and the step 3 of forming on the surface of the glass original plate, wherein Step 4 of forming a resist film on both the front and back surfaces of the glass original plate on which the overcoat is formed, except for the cutting region along the cut line, and the cutting regions on the front and back surfaces of the glass original plate using the resist film as a mask. Etching and separating from the glass original plate to each glass substrate; and
Step 6 of removing the resist film formed on both the front and back surfaces of the glass substrate,
A glass substrate for a touch panel, in which a plurality of detection electrode patterns made of a transparent conductive layer are patterned on the surface of the glass substrate, is manufactured.

  Since each glass substrate on which the detection electrode pattern and the lead wire are formed is separated from the glass original plate by chemical etching in the cutting region, no microcrack is generated on the cut surface.

  Since the detection electrode pattern and the lead wiring pattern are covered with the overcoat, the surface of the glass original plate approaches a flat surface, and the resist film is uniformly formed on the surface of the glass substrate.

During the chemical etching in step 5, since the overcoat and the resist film are stacked on the surface side of the detection electrode pattern and the lead-out wiring pattern, the chemical polishing liquid does not enter the detection electrode pattern and the lead-out wiring pattern. . Moreover, since the lead-out wiring pattern is formed with a three-layer structure of a conductive material having relatively excellent acid resistance and conductivity, it is difficult to break even if a chemical polishing liquid enters.

  The method for manufacturing a glass substrate for a touch panel according to claim 2 is characterized in that a plurality of detection electrode patterns and lead-out wiring patterns are formed in each glass substrate region of the chemically strengthened glass original plate by steps 1 and 2.

  Even if it is a chemically strengthened glass original plate, each glass substrate can be separated by chemical etching without applying mechanical impact.

  The manufacturing method of the glass substrate for touchscreens of Claim 3 forms a several detection electrode pattern by the process 1 after forming a colored decoration layer in each glass substrate area | region of the surface of a glass original plate.

  A colored decorative layer is formed on a plurality of glass substrates in one step.

  According to a fourth aspect of the present invention, there is provided a method for producing a glass substrate for a touch panel, wherein a colored character is applied to a colored decorative layer, and a lead-out wiring pattern is formed so as to cover the extracted character.

  The extracted characters are colored with the color of the lead-out wiring pattern.

The glass substrate for a touch panel according to claim 5 is manufactured by the manufacturing method according to claim 1 or 2 .

  Since it is separated from the glass original plate by chemical etching, microcracks are not generated around it.

The glass substrate for a touch panel according to claim 6 is characterized in that at least a part of the cut line is a curve.

  A part of the cut region along the curved cut line is chemically etched, and a glass substrate having a part of the curved outline is separated from the glass original plate.

According to the first and fifth aspects of the invention, the detection electrode patterns and lead lines formed on the surfaces of a plurality of glass substrates are collectively formed on a single glass original plate. Is simplified.

  Since the resist film is formed on the surface side of the overcoat that is close to a flat surface, the resist film can be formed evenly on the surface of the glass original plate without generating voids and slits. Does not enter through the voids or slits of the resist film.

  Furthermore, during chemical etching, the detection electrode pattern and the lead-out wiring pattern are covered with a double overcoat and a resist film, so that the detection electrode pattern and the lead-out wiring pattern come into contact with the chemical polishing liquid and oxidize. Will not be damaged.

  Also, unlike the scribe cut that separates each glass substrate from the glass original plate by applying mechanical impact, each glass substrate is separated by chemical etching, so that no microcracks are generated on the separated cut surface, and the thickness is 1 mm or less. Even if it thins, it can be set as the glass substrate from which predetermined intensity | strength is obtained.

  Moreover, since it can isolate | separate into each glass substrate by chemical etching, the cutting line used as the outline of each glass substrate can be made into arbitrary shapes including a curve, and the glass substrate for touchscreens can be made into arbitrary shapes according to the design demand. can do.

  According to invention of Claim 2, even if it is a glass substrate which forms a detection electrode pattern and a lead line collectively on the surface with another glass substrate, it is set as the glass substrate for touch panels excellent in intensity | strength by chemically strengthening. Can do.

  According to invention of Claim 3, a colored decoration layer can be collectively formed in several glass substrates, without printing a colored decoration layer for every glass substrate, or affixing a decoration film.

  According to the fourth aspect of the present invention, the extracted character can be colored in any color with the color of the lead-out wiring pattern.

According to the first and fifth aspects of the invention, even if a small amount of chemical polishing liquid enters and touches the lead-out wiring pattern, it is not oxidized and disconnected, and the manufacturing yield can be improved.

According to invention of Claim 6 , since the glass substrate for touchscreens of arbitrary outline shapes is obtained, a touchscreen can be made into the arbitrary shapes according to the request | requirement on a design.

It is a top view of the glass substrate 1 for touchscreens which concerns on one embodiment of this invention. FIG. 2 is a partially omitted vertical sectional view taken along line AA in FIG. 1. It is a top view of the glass original plate 10 which printed the colored decoration layer 6 on each glass substrate 1 '. It is a top view of the glass original plate 10 in which the connection conductor piece 5 was formed. It is a top view of the glass original plate 10 before the process of isolate | separating the glass substrate 1 for touchscreens. The manufacturing process of the glass substrate 1 for touch panels is shown, (a) shows the process of printing the colored decoration layer 6 on the glass original plate 10, (b) shows the photoresist layer 7 exposed and developed on the transparent conductive film 5 ′. The process of forming the mask, (c) is a process of forming the connection conductor piece 5 on the glass original plate 10, (d) is a process of forming the intermediate insulating piece 2 over the connection conductor piece 5, (E) shows the process of forming the wiring pattern 3 and the detection electrode patterns Xn and Yn, and (f) forms the overcoat 4 covering the wiring pattern 3 and the detection electrode patterns Xn and Yn on the surface of the glass original plate 10. (G) is a partially omitted cross-sectional view showing a step of masking a region corresponding to the glass substrate 1 ′ other than the cutting region CA on the front and back surfaces of the glass original plate 10 with a photocured photoresist film 8. is there.

  Hereinafter, the glass substrate 1 for touch panels which concerns on one embodiment of this invention, and its manufacturing method are demonstrated in detail using FIG. 1 thru | or FIG. A glass substrate for a touch panel is generally disposed in parallel over a display panel such as a liquid crystal panel and is used in a touch panel for detecting an input position of an input operation targeting an icon or the like displayed on the display panel. Although the specific configuration differs depending on the detection method of the touch panel that detects the input position, in this embodiment, the capacitance method that detects the input position from the change in the capacitance of the detection electrode pattern that the input operation body approaches. It will be described as a glass substrate 1 for a touch panel used for a touch panel.

  FIG. 1 is a plan view of a glass substrate 1 for a touch panel. Hereinafter, a glass substrate portion of the glass substrate 1 for a touch panel is simply shown in FIG. 1 where a glass substrate 1 ′ and a detection electrode pattern of the glass substrate 1 ′ are formed. A plane will be described as a surface. As shown in the figure, the outline of the glass substrate 1 is a vertically-long rectangular shape in accordance with a vertically long rectangular display panel that is stacked vertically (bottom side), and the four corners of the rectangular shape are touch panels. Due to the design requirements that appear on the surface of the equipment to be mounted, the arc is a quadrant. As the glass substrate 1 ′, various kinds of glass such as borosilicate glass can be used as long as it is transparent glass, but here, it is soda glass.

  On the surface of the transparent glass substrate 1 ′, a plurality of X detection electrode patterns Xn and a plurality of Y detection electrode patterns Yn made of a transparent conductive material, for example, ITO (Indium Tin Oxide) so that the lower display panel can be visually observed. Are formed so as to cross each other in the orthogonal XY directions. The plurality of X detection electrode patterns Xn are formed at an equal pitch in the X direction, and each X detection electrode pattern Xn is formed in a continuous shape by repeating rhombuses along the Y direction. The plurality of Y detection electrode patterns Yn are formed at an equal pitch in the Y direction, and each Y detection electrode pattern Yn is formed in a continuous shape by repeating rhombuses along the X direction. The rhombuses of the X detection electrode pattern Xn and the rhombuses of the Y detection electrode pattern Yn are complementary contours, respectively. Therefore, a plurality of X detection electrode patterns Xn and a plurality of Y detection electrode patterns Yn arranged orthogonally to each other. The almost entire rectangular input operation area EA is covered.

  The portions where the X detection electrode pattern Xn and the Y detection electrode pattern Yn intersect each have a narrow diamond-shaped corner, so that the X detection electrode pattern Xn and the Y detection electrode pattern are interposed through the intermediate insulating piece 2 having a small area. Yn is insulated from each other across the top and bottom. Since the intermediate insulating piece 2 is minute and is formed of a transparent insulating material, the intermediate insulating piece 2 is not so conspicuous that it cannot be visually confirmed at first glance.

  Each X detection electrode pattern Xn and Y detection electrode pattern Yn are electrically connected to a lead-out wiring pattern (hereinafter referred to as a wiring pattern) 3 at the boundary of the input operation area EA, and are connected to the lower left corner of FIG. The output unit can be electrically connected to a detection circuit unit of a touch panel that detects an input position from a change in capacitance of specific detection electrode patterns Xn and Yn. Here, since the ITO constituting the detection electrode patterns Xn and Yn has a higher specific resistance than a normal metal, the wiring pattern 3 has a resistance value per unit length lower than that of MAM (Mo (molybdenum) · Al (aluminum). ) · Mo (molybdenum)) is formed of a three-layer structure metal), and the combined resistance up to the output is lowered to improve the detection sensitivity. MAM is relatively excellent in acid resistance and has a three-layer structure. Therefore, even if a chemical polishing liquid containing hydrofluoric acid is slightly touched in the chemical etching process described later, it does not lead to complete disconnection. Connection reliability is not impaired.

  Since the wiring pattern 3 can be visually observed, so-called black frame printing in which opaque ink such as black is screen-printed between the outline of the glass substrate 1 ′ around the input operation area EA is performed, and the input operation in which the colored decorative layer 6 is applied. A wiring pattern 3 is formed around the area EA, and the wiring pattern 3 is hidden. As black frame printing, so-called black matrix printing in which a printing layer is formed by photolithography using color resist ink may be applied.

The detection electrode patterns Xn and Yn and the wiring pattern 3 formed on the surface of the glass substrate 1 ′ are entirely covered with an overcoat 4 formed of a transparent insulating material except for the output portion of the wiring pattern 3. The overcoat 4 is formed on the area of the glass substrate 1 ′ including the input operation area EA in order to protect the conductive patterns Xn, Yn, 3 from being exposed to the outside and being oxidized or damaged by receiving external force. Since it is formed, it is formed using a transparent insulating material. Incidentally, the glass substrate 1 ′ according to the present embodiment is chemically strengthened, and since microcracks are not generated in the surroundings by the manufacturing process described later, a predetermined strength can be obtained even when the thickness is 1 mm or less. Thus, a transparent protective panel may not be laminated above the input operation surface side, or a scattering prevention film may not be attached. On the other hand, the overcoat 4 can be formed of an insulating material containing silicon oxide (SiO ₂ ) or the like, and can also be used as an antireflection film.

  As shown in FIGS. 3 to 5, the glass substrate 1 ′ is formed by individually cutting from a glass original plate 10 having a size for manufacturing nine touch panel glass substrates 1. Hereinafter, the process of manufacturing this glass substrate 1 for touch panels is demonstrated using FIG. 3 thru | or FIG.

  The glass original plate 10 is cut into a rectangle from a larger glass original plate made of soda glass by a method such as scribe cutting. As shown in FIG. 3, the outline of the cut glass original plate 10 is formed by projecting the outlines of the nine glass substrates 1 ′ to be taken out on the front and back surfaces of the glass original plate 10, and virtually setting the projection lines as cut lines CL. A cutting area CA having a width of at least several millimeters is secured around the line CL, and the nine glass substrates 1 'are arranged in a matrix shape without overlapping each other, and are in the shape of a rectangle circumscribing the whole. Therefore, in the glass original plate 10, the area | region enclosed by the cut-out line CL which four corners of a rectangle continue with a quadrant becomes a glass substrate area | region used as each glass substrate 1 '.

  First, this glass original plate 10 is put into a potassium nitrate molten salt heated to about 380 ° C., and chemical strengthening is performed by performing ion exchange on the glass surface. By this chemical strengthening, the glass original plate 10 and each glass substrate 1 ′ separated from the glass original plate 10 have a strength about five times that before the chemical strengthening.

  Subsequently, as shown in FIG. 3 and FIG. 6A, black frame printing using black ink is performed between the periphery of each input operation area EA on the glass original plate 10 and the set cut line CL, and the colored decorative layer 6 is formed.

  Subsequently, a transparent conductive film 5 ′ made of ITO is formed on the entire surface of the glass original plate 10 on which the colored decorative layer 6 is formed by sputtering, and the whole is passed through a roll coater to form a photoresist layer on the transparent conductive film 5 ′. 7 is attached. As shown in FIG. 6B, the photoresist layer 7 is formed by exposing and developing a portion where the connection conductor piece 5 is formed to form a mask, and etching the transparent conductive film leaving the transparent conductive film 5 ′ covered with the mask. 4 and 6C, the strip-shaped connecting conductor piece 5 is formed at a portion where the X detection electrode pattern Xn and the Y detection electrode pattern Yn intersect.

  Further, as shown in FIG. 6D, the intermediate insulating piece 2 is formed over the connecting conductor piece 5 by the same photolithography method, screen printing or the like.

  Subsequently, an X detection electrode pattern Xn and a Y detection electrode pattern Yn are formed on the surface of the glass substrate 1 '. The detection electrode patterns Xn and Yn are formed by patterning by a photolithography method, and a transparent conductive film made of ITO is formed by sputtering on the entire surface of the glass substrate 1 ′ on which the intermediate insulating piece 2 and the connecting conductor piece 5 are formed. And a photoresist layer is deposited over the entire surface. Thereafter, the photoresist layer at the site where the X detection electrode pattern Xn and the diamond Y detection electrode pattern Yn are formed is exposed and developed to form a mask, the transparent conductive film not covered with the mask is etched, and the X detection electrode patterns Xn and Y A detection electrode pattern Yn is formed. Thereby, the rhombus portions of the Y detection electrode patterns Yn adjacent to each other in the X direction of the rhombus are connected via the connection conductor piece 5, and each Y detection electrode pattern Yn is formed along the X direction, and the X detection electrode pattern Xn Are formed on the intermediate insulating piece 2 so as to insulate from the Y detection electrode pattern Yn and to be formed along the Y direction.

  As shown in FIGS. 5 and 6E, each X detection electrode pattern Xn and Y detection electrode pattern Yn is connected to the wiring pattern 3 made of MAM at the boundary of the input operation area EA. The wiring pattern 3 is formed around the input operation area EA that has been subjected to black frame printing by screen printing, sputtering using a mask, or the like, and is connected to an external circuit at the output unit, and is surrounded by a cut line CL. It is pulled out to the lower left of 1 '.

  Subsequently, as shown in FIG. 6 (f), the transparent coating material overcoat 4 is uniformly adhered to the entire glass original plate 10 by a spin coater or the like, and then detected on the glass substrate 1 ′ by photolithography. A little smaller over the entire circumference so as to cover the wiring patterns 3 excluding the electrode patterns Xn and Yn and the output portion and surrounded by the cut line CL on the surface of the glass original plate 10 (that is, the shape of the glass substrate 1 ′). Overcoat 4 is formed in the area. As shown in the drawing, the unevenness on the surface of the glass original plate 10 formed by overlapping the detection electrode patterns Xn and Yn and the intermediate insulating piece 2 is alleviated by evenly attaching the overcoat 4 and approaches a flat surface.

  Since the so-called sensor surface forming process from the chemical strengthening to the overcoat 4 forming process described above can be performed collectively on the nine glass substrates 1 ′, the mass production process is greatly shortened.

  The nine glass substrates 1 ′ are separated from the glass original plate 10 by chemical etching. The hydrofluoric acid-resistant photoresist film 8 is attached to the entire front and back surfaces of the glass original plate 10, and the cutting area CA is separated by the cutting line CL. Except for the above, the photoresist film 8 is exposed and developed. Since the overcoat 4 is generally formed of a material having no resistance to hydrofluoric acid, the exposed photoresist film 8 needs to be formed so as to cover at least the entire surface of the overcoat 4, and the range of the photoresist film 8 is limited. The overcoat 4 is made slightly larger over the entire circumference. By doing so, it is possible to prevent the overcoat 4 from receiving a chemical attack when the glass substrate 1 ′ is separated by chemical etching.

  Thereafter, the photoresist film in the cutting area CA not exposed to the alkaline solution is removed, and the areas corresponding to the glass substrates 1 ′ on the front and back surfaces are photocured with the photoresist film 8 as shown in FIG. cover. Although the photocured photoresist film 8 is a thin film, the overcoat 4 adheres to it and is formed on the surface of the glass original plate 10 close to a flat surface, so that no step, hole, or notch in the layer occurs. The entire surface of the overcoat 4 is securely sealed.

  Subsequently, nine glass substrates 1 ′ are separated from the glass original plate 10 by immersing the glass original plate 10 in a chemical polishing liquid containing hydrofluoric acid and chemically etching the cutting area CA. In this chemical etching process, the sensor surface on which the detection electrode patterns Xn, Yn, etc. are formed is covered with the overcoat 4 and the photoresist film 8 so as not to be subjected to chemical attack by the chemical polishing liquid.

  The photoresist film 8 adhering to the front and back surfaces of the glass substrate 1 ′ separated from the glass original plate 10 is removed using an alkaline solution, and when the photoresist film 8 is removed, the completed glass substrate 1 for a touch panel is formed. can get. Here, only the photoresist film 8 is removed, and the overcoat 4 remains on the surface of the glass substrate 1. The overcoat 4 protects the detection electrode patterns Xn, Yn and the like.

  Although the above-mentioned embodiment demonstrated the glass substrate 1 for touch panels used for an electrostatic capacitance type touch panel, the detection method of the input position of a touch panel differs, and the structure of a sensor surface containing a detection electrode pattern, and the manufacturing process of a sensor surface Even if it is a glass substrate for touch panels from which this differs, this invention is applicable. For example, in a resistance pressure sensitive touch panel such as a resistance pressure sensitive XY detection electrode pattern facing each other with an insulation interval, two glass substrates for a touch panel manufactured according to the present invention are separated from a resistance layer via a spacer. The detection electrode patterns are stacked so as to face each other.

  In addition, as long as the manufacturing process of the sensor surface for forming the detection electrode pattern and the lead-out wiring pattern on the surface of the glass substrate is such that at least the overcoat 4 is formed and the cutting area CA is chemically etched, the above-described embodiment is used. Not only the order described but also the order of the manufacturing process differs depending on the configuration of the detection electrode pattern.

  The lead wiring pattern 3 is formed of MAM, but may be formed of other conductive materials such as aluminum and silver. Further, MAM may be replaced with a three-layer structure of Mo, Mo alloy, Al, Al alloy, Mo, or Mo alloy from a three-layer structure of Mo, Al, and Mo.

  In addition, by applying a letter to the colored decorative layer 6 and forming a wiring pattern on the colored decorative layer 6 so as to cover the area of the letter, the color of the wiring pattern is transmitted through the letter part, and from the front side of the glass substrate for the touch panel. Visible characters can also be displayed. In particular, when the colored decorative layer 6 is applied in a color tone close to black, the contrast with the color of the wiring pattern (aluminum or silver) is increased, and the character display is clear.

  Furthermore, the chemical strengthening to the glass original plate 10 does not necessarily need to be performed if it is the thickness which can obtain required intensity | strength without performing chemical strengthening.

  Further, it is not always necessary to perform the black frame printing process, and the upper part of the glass substrate 1 for a touch panel manufactured in the present invention may be covered with a decorative film corresponding to black frame printing.

  Further, the photoresist layer or the photoresist film formed in each step may be a film resist.

  INDUSTRIAL APPLICABILITY The present invention is suitable for a glass substrate for touch panel that requires thinning and strength and a manufacturing method thereof.

1 Glass substrate for touch panel 1 'Glass substrate 3 Drawer wiring pattern 4 Overcoat 8 Photoresist film (resist film)
10 Glass original plate Xn X detection electrode pattern Yn Y detection electrode pattern CL Cutting line CA Cutting region

Claims (6)

A plurality of first detection electrode patterns and a plurality of second detection electrode patterns which are made of a transparent conductive layer and are arranged to cross each other on the surface of the glass substrate, and a plurality of lead wiring patterns electrically connected to each detection electrode pattern A method for manufacturing a glass substrate for a touch panel , wherein the first detection electrode pattern and the second detection electrode pattern are insulated from each other by an intermediate insulating piece formed at an intersection ,
Virtually set the cut lines that project the respective outlines of the glass substrates on the front and back surfaces of the glass original plate of a size that separates the plurality of glass substrates, each surrounded by the cut lines on the surface of the glass original plate A strip-shaped connection conductor piece connected on both sides to the first detection electrode pattern separated at each intersection in the glass substrate region, the intermediate insulation piece stretched over the connection conductor piece, and a plurality of first detection electrode patterns And a step 1 of forming a plurality of second detection electrode patterns by patterning in this order ;
A lead-out wiring pattern formed in a three-layer structure in which each glass substrate region is electrically connected to each detection electrode pattern, and aluminum or an alloy thereof is sandwiched and laminated between molybdenum or an alloy thereof, Step 2 of forming an output portion that is partially drawn out at an end portion of each glass substrate region and / or forming a lead wiring pattern in which at least a portion thereof is formed at the peripheral edge portion of each glass substrate region When,
Wherein not covering the detection electrode patterns and the lead wiring pattern of each glass substrate regions, cross-site and the first detection electrode pattern and the second detection electrode and the connecting conductor piece and the intermediate insulating piece and the second detection electrode patterns are stacked Forming an overcoat on the surface of the glass original plate for flattening the other region where only one of the patterns is formed; and
Step 4 of forming a resist film on both the front and back surfaces of the glass original plate on which the overcoat is formed, except for a cutting region along the cut line;
Chemically etching the cut regions on both the front and back surfaces of the glass original plate using the resist film as a mask, and separating the glass original plate into each glass substrate; and
Step 6 of removing the resist film formed on both the front and back surfaces of the glass substrate,
A method for producing a glass substrate for a touch panel, comprising: producing a glass substrate for a touch panel in which a plurality of detection electrode patterns made of a transparent conductive layer are patterned on the surface of the glass substrate. The method for producing a glass substrate for a touch panel according to claim 1, wherein a plurality of detection electrode patterns and lead wiring patterns are formed in each glass substrate region of the chemically strengthened glass substrate in steps 1 and 2. 3. The detection electrode pattern according to claim 1, wherein a plurality of detection electrode patterns are formed in step 1 after forming a colored decorative layer on each glass substrate region on the surface of the glass original plate. 4. Manufacturing method of glass substrate for touch panel. 4. The method for manufacturing a glass substrate for a touch panel according to claim 3, wherein the colored decorative layer is cut out and the lead-out wiring pattern is formed so as to cover the cut out letter. A glass substrate for a touch panel manufactured by the manufacturing method according to claim 1. The glass substrate for a touch panel according to claim 5, wherein at least part of the cut line is a curve.

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