TW201326437A - 具自轉及公轉複合式真空濺鍍設備 - Google Patents

具自轉及公轉複合式真空濺鍍設備 Download PDF

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Publication number
TW201326437A
TW201326437A TW100148248A TW100148248A TW201326437A TW 201326437 A TW201326437 A TW 201326437A TW 100148248 A TW100148248 A TW 100148248A TW 100148248 A TW100148248 A TW 100148248A TW 201326437 A TW201326437 A TW 201326437A
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Taiwan
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target
rod
drum
cavity
gear
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TW100148248A
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Chinese (zh)
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TWI473897B (enrdf_load_stackoverflow
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Ji-Hua Yang
jing-fu Yang
Ting-Bin Zhuo
Yu-Jia Gao
Zheng-Yan Wu
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Metal Ind Res & Dev Ct
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TW100148248A 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備 TW201326437A (zh)

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TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

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TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

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TW201326437A true TW201326437A (zh) 2013-07-01
TWI473897B TWI473897B (enrdf_load_stackoverflow) 2015-02-21

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TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573890B (zh) * 2014-08-22 2017-03-11 三井金屬鑛業股份有限公司 濺鍍靶用靶材之製造方法及爪構件

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3503398A1 (de) * 1985-02-01 1986-08-07 W.C. Heraeus Gmbh, 6450 Hanau Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573890B (zh) * 2014-08-22 2017-03-11 三井金屬鑛業股份有限公司 濺鍍靶用靶材之製造方法及爪構件

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TWI473897B (enrdf_load_stackoverflow) 2015-02-21

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