CN101634012A - 一种用于表面防护的离子束辅助磁控溅射沉积装置及方法 - Google Patents
一种用于表面防护的离子束辅助磁控溅射沉积装置及方法 Download PDFInfo
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Cited By (7)
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CN102560439A (zh) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | 等离子体表面处理方法及装置 |
CN102605335A (zh) * | 2012-04-01 | 2012-07-25 | 湖南大学 | 一种离子束磁控溅射两步法制备微晶硅薄膜的方法和一种离子束磁控溅射复合镀膜的装置 |
CN103774104A (zh) * | 2012-04-01 | 2014-05-07 | 湖南大学 | 一种离子束磁控溅射复合镀膜的装置 |
CN104060234A (zh) * | 2014-06-30 | 2014-09-24 | 宇龙计算机通信科技(深圳)有限公司 | 一种溅镀装置及溅镀方法 |
CN105543792A (zh) * | 2015-12-11 | 2016-05-04 | 中国电子科技集团公司第四十八研究所 | 磁控溅射装置及磁控溅射方法 |
CN108611590A (zh) * | 2016-12-13 | 2018-10-02 | 核工业西南物理研究院 | 一种Ti合金工件防咬死的方法 |
CN110670033A (zh) * | 2018-07-03 | 2020-01-10 | 定西中庆玄和玻璃科技有限公司 | 一种在真空环境中进行离子溅射镀膜的工艺方法 |
Families Citing this family (1)
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KR20240042451A (ko) * | 2021-08-13 | 2024-04-02 | 샤인 테크놀로지스 엘엘씨 | 이온 및 동위원소 생산과 같은 고진공 응용을 위한 자기 회전 장치 |
Family Cites Families (7)
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GB2306510B (en) * | 1995-11-02 | 1999-06-23 | Univ Surrey | Modification of metal surfaces |
US6153061A (en) * | 1998-03-02 | 2000-11-28 | Auburn University | Method of synthesizing cubic boron nitride films |
CN1401816A (zh) * | 2002-03-20 | 2003-03-12 | 太原理工大学 | 离子束增强磁控溅射渗镀涂层装置及工艺 |
CN1206386C (zh) * | 2003-06-26 | 2005-06-15 | 上海交通大学 | 离子注入复合镀膜设备 |
US20050224343A1 (en) * | 2004-04-08 | 2005-10-13 | Richard Newcomb | Power coupling for high-power sputtering |
CN1644752A (zh) * | 2005-01-15 | 2005-07-27 | 大连理工大学 | 黄铜件真空离子镀替代电镀方法 |
CN100392147C (zh) * | 2005-07-26 | 2008-06-04 | 武汉大学 | 一种对靶孪生磁控溅射离子镀沉积装置 |
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2008
- 2008-07-21 CN CN2008101200137A patent/CN101634012B/zh active Active
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102560439A (zh) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | 等离子体表面处理方法及装置 |
CN102605335A (zh) * | 2012-04-01 | 2012-07-25 | 湖南大学 | 一种离子束磁控溅射两步法制备微晶硅薄膜的方法和一种离子束磁控溅射复合镀膜的装置 |
CN103774104A (zh) * | 2012-04-01 | 2014-05-07 | 湖南大学 | 一种离子束磁控溅射复合镀膜的装置 |
CN103774104B (zh) * | 2012-04-01 | 2016-08-17 | 湖南大学 | 一种离子束磁控溅射复合镀膜的装置 |
CN104060234A (zh) * | 2014-06-30 | 2014-09-24 | 宇龙计算机通信科技(深圳)有限公司 | 一种溅镀装置及溅镀方法 |
CN105543792A (zh) * | 2015-12-11 | 2016-05-04 | 中国电子科技集团公司第四十八研究所 | 磁控溅射装置及磁控溅射方法 |
CN105543792B (zh) * | 2015-12-11 | 2018-03-20 | 中国电子科技集团公司第四十八研究所 | 磁控溅射装置及磁控溅射方法 |
CN108611590A (zh) * | 2016-12-13 | 2018-10-02 | 核工业西南物理研究院 | 一种Ti合金工件防咬死的方法 |
CN108611590B (zh) * | 2016-12-13 | 2021-02-09 | 核工业西南物理研究院 | 一种Ti合金工件防咬死的方法 |
CN110670033A (zh) * | 2018-07-03 | 2020-01-10 | 定西中庆玄和玻璃科技有限公司 | 一种在真空环境中进行离子溅射镀膜的工艺方法 |
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