TWI473897B - - Google Patents

Info

Publication number
TWI473897B
TWI473897B TW100148248A TW100148248A TWI473897B TW I473897 B TWI473897 B TW I473897B TW 100148248 A TW100148248 A TW 100148248A TW 100148248 A TW100148248 A TW 100148248A TW I473897 B TWI473897 B TW I473897B
Authority
TW
Taiwan
Application number
TW100148248A
Other languages
Chinese (zh)
Other versions
TW201326437A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW100148248A priority Critical patent/TW201326437A/zh
Publication of TW201326437A publication Critical patent/TW201326437A/zh
Application granted granted Critical
Publication of TWI473897B publication Critical patent/TWI473897B/zh

Links

TW100148248A 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備 TW201326437A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

Publications (2)

Publication Number Publication Date
TW201326437A TW201326437A (zh) 2013-07-01
TWI473897B true TWI473897B (enrdf_load_stackoverflow) 2015-02-21

Family

ID=49224804

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100148248A TW201326437A (zh) 2011-12-23 2011-12-23 具自轉及公轉複合式真空濺鍍設備

Country Status (1)

Country Link
TW (1) TW201326437A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5887391B1 (ja) * 2014-08-22 2016-03-16 三井金属鉱業株式会社 スパッタリングターゲット用ターゲット材の製造方法および爪部材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798663A (en) * 1985-02-01 1989-01-17 Leybold-Heraeus Gmbh Sputtering installation for the reactive coating of a substrate with hard materials

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798663A (en) * 1985-02-01 1989-01-17 Leybold-Heraeus Gmbh Sputtering installation for the reactive coating of a substrate with hard materials

Also Published As

Publication number Publication date
TW201326437A (zh) 2013-07-01

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