TW201321120A - 共平面三軸定位裝置 - Google Patents
共平面三軸定位裝置 Download PDFInfo
- Publication number
- TW201321120A TW201321120A TW100142664A TW100142664A TW201321120A TW 201321120 A TW201321120 A TW 201321120A TW 100142664 A TW100142664 A TW 100142664A TW 100142664 A TW100142664 A TW 100142664A TW 201321120 A TW201321120 A TW 201321120A
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- 230000003014 reinforcing effect Effects 0.000 claims description 6
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- 238000006073 displacement reaction Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
CN201110451213.2A CN103137532B (zh) | 2011-11-22 | 2011-12-23 | 共平面三轴定位装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201321120A true TW201321120A (zh) | 2013-06-01 |
TWI455789B TWI455789B (enrdf_load_stackoverflow) | 2014-10-11 |
Family
ID=48497169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100142664A TW201321120A (zh) | 2011-11-22 | 2011-11-22 | 共平面三軸定位裝置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN103137532B (enrdf_load_stackoverflow) |
TW (1) | TW201321120A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI487593B (zh) * | 2013-12-30 | 2015-06-11 | 中原大學 | 三軸共平面斜向驅動式平台 |
TWI513541B (enrdf_load_stackoverflow) * | 2013-09-05 | 2015-12-21 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI725500B (zh) * | 2019-07-31 | 2021-04-21 | 和碩聯合科技股份有限公司 | 扭力測試設備及其待測物定位座 |
CN113691098B (zh) * | 2021-08-09 | 2023-01-24 | 中南大学 | 用于光电子器件封装的单边直线电机驱动的共面运动装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4107881C2 (de) * | 1990-03-13 | 1997-04-17 | Ntn Toyo Bearing Co Ltd | Verstellbarer Tisch |
JP2700050B2 (ja) * | 1994-10-04 | 1998-01-19 | ヒーハイスト精工株式会社 | 縦横移動旋回テーブル機構 |
JP3481540B2 (ja) * | 2000-02-21 | 2003-12-22 | シャープ株式会社 | ステージ装置 |
JP4480960B2 (ja) * | 2003-06-27 | 2010-06-16 | 東北パイオニア株式会社 | 支持ユニット並びにその支持ユニットを用いた移動テーブル装置及び直動案内装置 |
CN1921026A (zh) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子系统技术有限公司 | X-Y-θ三自由度微动平台 |
CN101296778A (zh) * | 2005-10-26 | 2008-10-29 | 岩崎系统股份有限公司 | 工作台的定位控制装置 |
JPWO2007055339A1 (ja) * | 2005-11-11 | 2009-04-30 | ヒーハイスト精工株式会社 | 三次元位置決めテーブル |
JP4782710B2 (ja) * | 2006-03-02 | 2011-09-28 | 住友重機械工業株式会社 | ステージ装置 |
TW200734112A (en) * | 2006-03-10 | 2007-09-16 | Icf Technology Co Ltd | Rotation module, sliding rotation module and double housing apparatus |
TW201129987A (en) * | 2007-01-17 | 2011-09-01 | Qiu Ren You | Rotation unit for 4-driving alignment mechanism |
TWM408100U (en) * | 2007-01-17 | 2011-07-21 | Qiu Ren You | Four-drive alignment mechanism |
TWM324557U (en) * | 2007-06-08 | 2008-01-01 | Smart Chain Entpr Co Ltd | Linear moving apparatus of positioning theta angle of main axis |
CN201530059U (zh) * | 2009-04-30 | 2010-07-21 | 苏州德龙激光有限公司 | 新型应用于LED激光切割设备的X-Y-θ运动平台 |
JP2010274429A (ja) * | 2009-05-26 | 2010-12-09 | Ihi Corp | アライメントステージ |
TWM400904U (en) * | 2009-12-11 | 2011-04-01 | mao-xiang Wu | Alignment stage |
CN201954205U (zh) * | 2011-01-05 | 2011-08-31 | 河南科技大学 | 精密气浮工作台 |
-
2011
- 2011-11-22 TW TW100142664A patent/TW201321120A/zh unknown
- 2011-12-23 CN CN201110451213.2A patent/CN103137532B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI513541B (enrdf_load_stackoverflow) * | 2013-09-05 | 2015-12-21 | ||
TWI487593B (zh) * | 2013-12-30 | 2015-06-11 | 中原大學 | 三軸共平面斜向驅動式平台 |
Also Published As
Publication number | Publication date |
---|---|
TWI455789B (enrdf_load_stackoverflow) | 2014-10-11 |
CN103137532B (zh) | 2015-10-21 |
CN103137532A (zh) | 2013-06-05 |
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