CN103137532B - 共平面三轴定位装置 - Google Patents

共平面三轴定位装置 Download PDF

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Publication number
CN103137532B
CN103137532B CN201110451213.2A CN201110451213A CN103137532B CN 103137532 B CN103137532 B CN 103137532B CN 201110451213 A CN201110451213 A CN 201110451213A CN 103137532 B CN103137532 B CN 103137532B
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platform
positioning
driving
coplanar
positioning platform
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CN103137532A (zh
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刘冠志
洪国凯
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Metal Industries Research and Development Centre
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Metal Industries Research and Development Centre
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CN201110451213.2A 2011-11-22 2011-12-23 共平面三轴定位装置 Active CN103137532B (zh)

Applications Claiming Priority (2)

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TW100142664A TW201321120A (zh) 2011-11-22 2011-11-22 共平面三軸定位裝置
TW100142664 2011-11-22

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CN103137532A CN103137532A (zh) 2013-06-05
CN103137532B true CN103137532B (zh) 2015-10-21

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CN (1) CN103137532B (enrdf_load_stackoverflow)
TW (1) TW201321120A (enrdf_load_stackoverflow)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
TW201509587A (zh) * 2013-09-05 2015-03-16 yuan-long Lai 多軸加工機
TWI487593B (zh) * 2013-12-30 2015-06-11 中原大學 三軸共平面斜向驅動式平台
TWI725500B (zh) * 2019-07-31 2021-04-21 和碩聯合科技股份有限公司 扭力測試設備及其待測物定位座
CN113691098B (zh) * 2021-08-09 2023-01-24 中南大学 用于光电子器件封装的单边直线电机驱动的共面运动装置

Citations (1)

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Publication number Priority date Publication date Assignee Title
CN101296778A (zh) * 2005-10-26 2008-10-29 岩崎系统股份有限公司 工作台的定位控制装置

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US5163651A (en) * 1990-03-13 1992-11-17 Ntn Corporation Movable table
JP2700050B2 (ja) * 1994-10-04 1998-01-19 ヒーハイスト精工株式会社 縦横移動旋回テーブル機構
JP3481540B2 (ja) * 2000-02-21 2003-12-22 シャープ株式会社 ステージ装置
JP4480960B2 (ja) * 2003-06-27 2010-06-16 東北パイオニア株式会社 支持ユニット並びにその支持ユニットを用いた移動テーブル装置及び直動案内装置
CN1921026A (zh) * 2005-09-08 2007-02-28 北京慧摩森电子系统技术有限公司 X－Y－θ三自由度微动平台
WO2007055339A1 (ja) * 2005-11-11 2007-05-18 Hephaist Seiko Co., Ltd. 三次元位置決めテーブル
JP4782710B2 (ja) * 2006-03-02 2011-09-28 住友重機械工業株式会社 ステージ装置
TW200734112A (en) * 2006-03-10 2007-09-16 Icf Technology Co Ltd Rotation module, sliding rotation module and double housing apparatus
TW201129987A (en) * 2007-01-17 2011-09-01 Qiu Ren You Rotation unit for 4-driving alignment mechanism
TWM408100U (en) * 2007-01-17 2011-07-21 Qiu Ren You Four-drive alignment mechanism
TWM324557U (en) * 2007-06-08 2008-01-01 Smart Chain Entpr Co Ltd Linear moving apparatus of positioning theta angle of main axis
CN201530059U (zh) * 2009-04-30 2010-07-21 苏州德龙激光有限公司 新型应用于LED激光切割设备的X-Y-θ运动平台
JP2010274429A (ja) * 2009-05-26 2010-12-09 Ihi Corp アライメントステージ
TWM400904U (en) * 2009-12-11 2011-04-01 mao-xiang Wu Alignment stage
CN201954205U (zh) * 2011-01-05 2011-08-31 河南科技大学 精密气浮工作台

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101296778A (zh) * 2005-10-26 2008-10-29 岩崎系统股份有限公司 工作台的定位控制装置

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TWI455789B (enrdf_load_stackoverflow) 2014-10-11
CN103137532A (zh) 2013-06-05
TW201321120A (zh) 2013-06-01

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