TW201319007A - 導電性鈣鋁石化合物燒結體、濺鍍用靶及導電性鈣鋁石化合物燒結體之製造方法 - Google Patents

導電性鈣鋁石化合物燒結體、濺鍍用靶及導電性鈣鋁石化合物燒結體之製造方法 Download PDF

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TW201319007A
TW201319007A TW101137024A TW101137024A TW201319007A TW 201319007 A TW201319007 A TW 201319007A TW 101137024 A TW101137024 A TW 101137024A TW 101137024 A TW101137024 A TW 101137024A TW 201319007 A TW201319007 A TW 201319007A
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Taiwan
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mayenite compound
sintered
sintered body
powder
calcium
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TW101137024A
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English (en)
Chinese (zh)
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Kazuhiro Ito
Toshinari Watanabe
Satoru Watanabe
Naomichi Miyakawa
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Asahi Glass Co Ltd
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Publication of TW201319007A publication Critical patent/TW201319007A/zh

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