TW201318946A - Conveying device - Google Patents

Abstract

The present invention provides a conveying device which can inhibit particle from generating. The conveying device comprises a substrate supporting body moving along the path inside a chamber; a first magnetic rack provided with a plurality of rack magnets linearly arranged on the substrate supporting body; a first small gear provided with a plurality of small gear magnets configured at the side portion of the first magnetic rack and coupled with the first magnetic rack; and a supporting member supporting the substrate supporting body in a manner of enabling the substrate supporting body to be movable, and the first small gear gears rotate to move the substrate supporting body.

Description

Transport device

The present invention relates to a conveying apparatus that conveys a substrate along a path in a cavity.

Patent Document 1 discloses a film forming apparatus that transports a substrate tray using a rack and pinion mechanism.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-118008

In recent years, as the size of the substrate has increased, the weight of the substrate support that supports the substrate has continued to increase, and the particles generated by the rack and pinion mechanism have not been negligible, so that it is required to reduce the particles.

Therefore, the present invention has been made in view of the conventional problems, and an object thereof is to provide a conveying apparatus that suppresses the occurrence of fine particles.

A conveying apparatus according to the present invention is characterized in that: a cavity and a substrate support are provided, and the substrate is supported and movable along a path in the cavity, and the first magnetic rack is linearly arranged in the foregoing Substrate support The plurality of rack magnets and the first magnetic pinion gear have a plurality of pinion magnets disposed on the side of the first magnetic rack, magnetically coupled to the first magnetic rack, and a support member. The substrate support is movably supported; and the substrate support is moved by rotating the first magnetic pinion.

Another conveying device according to another aspect of the present invention includes a cavity and a substrate supporting body, wherein the substrate is supported and movable along a path in the cavity, and the first magnetic rack is provided on the substrate The support body, the first magnetic pinion gear, and the support member are movably supported by the substrate support, and the substrate support is moved by rotating the first magnetic pinion.

According to the present invention, it is possible to provide a conveying device that suppresses the occurrence of fine particles.

Hereinafter, embodiments for carrying out the invention will be described with reference to the accompanying drawings. Fig. 1 is a schematic side view showing a substrate processing apparatus according to a first embodiment of the present invention. Fig. 2 is a side sectional view showing the substrate processing apparatus of the present invention.

As shown in Fig. 1, the substrate processing apparatus 1 includes a chamber 1A and a chamber 1B that is connected to the chamber 1A via a gate valve 11. Examples of the cavity 1A include a load lock chamber, a sputtering film forming chamber, and a CVD process. Membrane cavity, etching chamber, and the like.

Examples of the cavity 1B include an unloading lock chamber, a sputtering film forming chamber, a CVD film forming chamber, an etching chamber, and the like. Each of the chambers is connected to an exhausting means (not shown), and is a casing that can be evacuated into a reduced pressure environment. Further, in the present embodiment, two cavities are shown, but the present invention is not limited thereto, and the substrate processing apparatus 1 may include three or more cavities.

Fig. 2 is a schematic cross-sectional view of the substrate transfer device. As shown in FIG. 2, the substrate support body 4 arranged in the longitudinal direction is configured to have two rectangular side surfaces (substrate support surface; first surface) which are inclined in a cross section perpendicular to the traveling direction, and The rectangular substrate 2 can be supported by its side surface. In other words, the substrate supporting body 4 has the inclined side walls 4a and 4b and the upper wall 4c which is disposed in a flat manner so that the upper end portions of the inclined side walls 4a and 4b are connected to each other. The inclined side walls 4a, 4b are arranged such that the interval between them is larger toward the lower side. The substrate 2 may be a large rectangular substrate having a longitudinal direction of 1700 mm or more and a lateral direction of 1300 mm or more. However, the size or shape thereof is not limited thereto, and may be, for example, a disk-shaped substrate. The substrate support 4 may have a longitudinal direction of 2000 mm or more and a lateral direction of 1700 mm or more. An engaging member (hereinafter referred to as a rail) 14 is provided on the inner side of the inclined side walls 4a and 4b of the substrate support 4 (the side opposite to the substrate supporting surface; the side of the second surface) across the horizontal direction. The engaging member 14 may have a curved groove or may have only a slidable plane.

On the other hand, as shown in Fig. 1, in the chambers 1A and 1B, a plurality of rotatable bearings (hereinafter referred to as guide rolls) 3 are provided separately along the movement path of the substrate support 4. The guide roller 3 is embedded in the substrate The groove of the rail 14 of the support body 4 functions as a support member that supports the substrate support body 4 so as to be movable in the horizontal direction. Since the weight of the substrate support 4 can be dispersedly supported by the plurality of guide rolls 3, the particles generated by the contact of the guide rolls 3 with the tracks 14 can be reduced.

As shown in Fig. 2, at the lower end portions of the inclined side walls 4a, 4b of the substrate support 4, a first magnetic rack 6 having a plurality of rack magnets is provided across the horizontal direction. Rotating magnetic pinions 5a and 5b are provided below each of the first magnetic racks 6, and the magnetic pinions 5a and 5b are magnetically coupled in a non-contact state with the first magnetic rack 6. A plurality of pinion magnets. As shown in Fig. 1, a plurality of magnetic pinions 5 are arranged along a path along which the substrate support 4 moves, with a specific interval therebetween. Here, each of the magnetic pinions 5 rotates around an axis parallel to a direction perpendicular to the traveling direction of the substrate support 4. As shown in Fig. 2, the rotation shafts of the magnetic pinions 5a and 5b magnetically coupled to the first magnetic rack 6 formed at the lower end portion of one of the inclined side walls 4a of the substrate support 4 are provided in the cavity 1A. The external motor 7 has a rotating shaft 51 connected thereto, and can be rotated by the rotation of the motor 7. Further, the rotation shafts of the magnetic pinions 5a and 5b magnetically coupled to the first magnetic rack 6 formed at the lower end portion of the other inclined side wall 4b of the substrate support 4 are also connected to the rotation shaft 51 of the motor 7. It can be rotated by the rotation of the motor 7. Further, in the present embodiment, the magnetic pinion 5 has the first magnetic pinion 5a and the second magnetic pinion 5b. However, the magnetic pinion 5 is not limited thereto, and may be any single magnetic pinion.

The substrate support 4 is linearly movable in the direction of the arrow by rotating the magnetic pinion 5 . The magnetic pinion 5 and the first magnetic rack 6 constitute a magnetic drive unit that converts the rotation of the magnetic pinion 5 into a straight line of the first magnetic rack 6 in a non-contact state. mobile. Further, as shown in Fig. 1, a motor may be separately provided in order to rotate a plurality of magnetic pinions that are separated and provided, and a control means for synchronizing the motors may be provided. Further, a plurality of magnetic pinions 5 may be coupled to each other by a gear, and the rotation of each of the magnetic pinions may be synchronized by a single motor.

As described above, according to the present embodiment, the magnetic racks provided on the substrate support body and the plurality of magnetic pinions 5 that are arranged to cover the range of movement of the substrate support body constitute a non-contact magnetic drive unit. . According to the present embodiment, when the structure of the substrate support is driven by a magnetic screw extending in the direction in which the substrate support extends in the direction in which the substrate support moves, the embodiment is reduced in size. Manufacturing costs are more favorable.

As shown in FIGS. 1 and 2, an upper magnet 9 is provided on the upper wall 4c of the substrate support 4. On the other hand, at the top plate of the chamber 1A, a magnet 8 magnetically coupled to the magnet 9 is disposed.

3A and 3B are enlarged views for explaining the upper magnets 8 and 9 of Fig. 1 . Fig. 3A is a cross-sectional view, and Fig. 3B is a side view. As shown in FIG. 3A, on the side of the cavity 1A, two rows of rod-shaped magnets 8a and 8b whose magnetic poles are different from each other are disposed downward. On the side of the substrate support 4, two rows of mutually different magnetic poles are arranged upwardly. Body 9a, 9b.

As shown in Fig. 3B, the rod-shaped magnet 8a (in this example, the N pole) to be fixed to the cavity 1A side and the rod-shaped magnet 9a (S pole) fixed to the substrate support 4 side are in non-contact. In the state, it is magnetically bonded in the vertical direction. Similarly, the rod-shaped magnet 8b (in this example, the S-pole) to be fixed to the cavity 1A and the rod-shaped magnet 9b (N-pole) fixed to the substrate support 4 side are vertically in a non-contact state. Magnetically bonded in the direction.

According to the above, the substrate support body 4 is capable of maintaining a stable vertical posture, and a force that is pulled upward by the magnetic force acts on the substrate support body 4, thereby reducing the guidance for supporting the substrate support body. The load of the roller suppresses the occurrence of particles from the guide roller 3.

4A and 4B are enlarged views of the magnetic rack 6 and the magnetic pinion 5 of Fig. 1 . As shown in FIG. 4A, the first magnetic rack 6 includes a plurality of rack magnets in which a plurality of N poles and S poles are arranged in a staggered line. Further, the cylindrical first rotatable pinion 5a includes a plurality of pinion magnets in which N poles and S poles are alternately arranged around the rotation axis X extending in the horizontal direction. The plurality of rack magnets have the same shape and are arranged at the same interval. Similarly, the plurality of pinion magnets also have the same shape and are arranged at the same interval.

As shown in FIG. 4B, the first magnetic pinion 5a and the second magnetic pinion 5b are disposed to hold the first magnetic rack 6. The first magnetic pinion 5a and the second magnetic pinion 5b are connected via a shaft 50 extending in the horizontal direction. The rotation axis X-X of the shaft 50 extending to the horizontal direction indicates the rotation of the first magnetic pinion 5a and the second magnetic pinion 5b. axis. In the present example, the magnetic field generated between the first magnetic rack 6 and the first magnetic pinion 5a is directed in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b. In other words, each of the pinion magnets of the first magnetic pinion 5a is magnetized in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b.

Similarly, the magnetic field generated between the first magnetic rack 6 and the second magnetic pinion 5b is also oriented in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b. In other words, each of the pinion magnets of the second magnetic pinion 5b is magnetized in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b.

In this manner, the first magnetic pinion 5a and the second magnetic pinion 5b can be disposed to hold the first magnetic pinion 6 and act on the first magnetic pinion 5a and the first magnetic rack 6 The magnetic force between them and the magnetic force acting between the second magnetic pinion 5b and the first magnetic rack 6 cancel out, thereby reducing the fluctuation of the substrate support 4 in the horizontal direction and maintaining a stable posture.

5A-5D is a view explaining the phase shift of the first magnetic pinion 5a and the second magnetic pinion 5b. In Figures 5A-5D, the faces of the magnetic coupling of the rack magnets of the magnetic pinion are shown. As described above, each of the pinion magnets constituting the first magnetic pinion 5a and the second magnetic pinion 5b is configured to have the same shape and the same size.

In the example shown in Fig. 5A, there is no phase shift between the first magnetic pinion 5a and the second magnetic pinion 5b. At this point, you can increase the pair The propulsive force of the substrate support 4.

On the other hand, in the example shown in FIGS. 5B, 5C, and 5D, there is a phase shift of 22.5°, 45°, and 67.5° between the first magnetic pinion 5a and the second magnetic pinion 5b. As described above, by shifting the phase between the first magnetic pinion 5a and the second magnetic pinion 5b, the maximum thrust is lowered, but the thrust fluctuation is reduced, and the movement can be smoothly performed. The phase shift between the first magnetic pinion 5a and the second magnetic pinion 5b is set to 15 to 85 degrees, preferably 22.5 to 67.5 degrees.

(Modification)

Fig. 6 is a side view of the magnetic rack of the modification. Unlike the rack magnet shown in Fig. 4 and the like, the magnetic rack 6 of this example is arranged with a specific interval between the N pole and the S pole. As described above, by spacing the magnetic poles of the magnetic rack 6 apart, the respective magnetic poles on the corresponding magnetic pinion side can be spaced apart by the same pitch. Therefore, a magnetic bar can be used as the magnet on the side of the magnetic pinion gear instead of the fan-shaped magnet as described above. Thus, in this example, the manufacturing cost can be reduced.

Fig. 7 shows a magnetic rack 60 as a modification of the magnetic rack 6. Here, the magnetic rack is an example of a magnetic rack. Examples of the magnetic rack 60 include a rack including a magnetic body such as iron or SUS430. The magnetic rack 60 of this example is formed in a concavo-convex shape with a predetermined interval therebetween. The magnetic rack 60 may be combined with the magnetic pinions 5a and 5b shown in Fig. 4 to form a magnetic drive unit. Compared to the case of using a magnet, the push of the substrate support is performed by using a magnetic body. The pushing force is reduced, but the magnetic rack can be manufactured at a lower cost than the magnet.

Fig. 8 shows a magnetic pinion of a modification. The magnetic pinion 25 is a disk-shaped magnetic material in which irregularities are formed on the outer peripheral portion. Here, the magnetic pinion gear is an example of a magnetic pinion gear. The magnetic pinion 25 may be combined with the magnetic rack 6 shown in Fig. 4 or Fig. 7 to constitute a magnetic driving portion. When the magnet is used, the magnetic pinion of the substrate support is lowered by using such a magnetic pinion, but the magnetic pinion can be manufactured at a lower cost than the magnet.

9A and 9B are schematic views of a magnetic rack and a magnetic pinion of a modification. Basically, the magnetic rack and the magnetic pinion of this modification have the same structure as the magnetic rack and the magnetic pinion of the first embodiment shown in FIG. 4 and the like, and the same constituent members are labeled the same. The reference number is omitted, and the detailed description thereof is omitted. However, in this modification, the first shaft 50 is provided with a rotatable third magnetic pinion 5c having magnetic properties for causing magnetic interaction with the magnetic rack 6. A pinion magnet of a plurality of repulsive forces. Each of the pinion magnets of the third magnetic pinion 5c is magnetized in the X-X direction of the rotation axis of the shaft 50. However, the present invention is not limited thereto, and each of the pinion magnets of the third magnetic pinion 5c may be magnetized in the radial direction from the rotation axis X-X. As described above, in this example, the pinion magnet of the same polarity as the magnetic rack 6 is placed on the lower side of the magnetic rack 6, and the substrate support 4 is floated by the magnetic repulsive force, thereby changing Have to move more smoothly.

10A and 10B are magnetic racks and magnetic pinions of a modified example. Schematic diagram. Basically, the magnetic rack and the magnetic pinion of this modification have the same structure as the magnetic rack and the magnetic pinion of the first embodiment shown in Fig. 1 and the like, and the same constituent members are labeled the same. The reference number is omitted, and the detailed description thereof is omitted. However, the magnetic rack and the magnetic pinion of this modification are different from the magnetic rack and the magnetic pinion of the first embodiment, and are additionally provided on the first shaft 50 to be magnetic with the first magnetic rack 6. The combined third magnetic pinion 5c. In other words, in this example, a pinion magnet of a different polarity that generates a magnetic attraction between the first magnetic rack 6 and the first magnetic rack 6 is placed on the lower side of the first magnetic rack 6, whereby In this modification, a larger propulsive force can be transmitted by the substrate support 4. The third magnetic pinion 5c is magnetized in the X-X direction of the rotation axis of the shaft 50. However, the present invention is not limited thereto, and may be magnetized in the radial direction from the rotation axis X-X.

In this example, since the third magnetic pinion 5c and the first magnetic rack 6 which are added are magnetically coupled in the vertical direction, the force larger than the weight of the substrate support itself is added as in the first 2 is between the guide roller 3 and the substrate support 4. In order to reduce this force, the second magnetic rack 16 and the magnetic pinions 15a, 15b, and 15c may be provided on the upper portion of the substrate support 4 in order to cancel the magnetic force in the downward direction.

Specifically, as shown in FIGS. 10A and 10B, in the upper end portion of the substrate support 4 of the modification, the second magnetic rack 16 is provided in the cavity, and the second magnetic rack 16 has a straight line. Arrange the plurality of rack magnets. That is, the second magnetic rack 16 is provided on the substrate support 4 at the side opposite to the first magnetic rack 6. Here, the second magnetic rack 16 The upper portion is provided with rotatable magnetic pinions 15a, 15b, 15c having a plurality of pinion magnets magnetically coupled to the second magnetic rack 16 in a non-contact state.

As shown in FIG. 10A, the second magnetic rack 16 includes a plurality of rack magnets in which N pole magnets and S pole magnets are arranged in a staggered line. Further, the cylindrical magnetically rotatable fourth magnetic pinion 15a includes a plurality of pinion magnets in which N pole magnets and S pole magnets are alternately arranged around the rotating shaft. Each of the rack magnets has the same shape and is arranged at the same interval. Similarly, each pinion magnet also has the same shape and is arranged at the same interval.

The rotating shaft of the magnetic pinion 15 is connected to a rotating shaft of a motor (not shown) provided outside the chamber 1A, and is rotatable by the rotation of the motor.

As shown in FIG. 4B, the fourth magnetic pinion 15a and the fifth magnetic pinion 15b are separated and disposed so as to hold the second magnetic rack 16. In the present example, the magnetic field generated between the second magnetic rack 16 and the fourth magnetic pinion 15a is directed in a direction parallel to the rotation axes of the fourth magnetic pinion 15a and the fifth magnetic pinion 15b. In other words, each of the pinion magnets of the fourth magnetic pinion gear 15a is magnetized in a direction parallel to the rotation axes of the fourth magnetic pinion gear 15a and the fifth magnetic pinion gear 15b.

Similarly, the magnetic field generated between the second magnetic rack 16 and the fifth magnetic pinion 15b is also oriented in a direction parallel to the rotation axes of the fourth magnetic pinion 15a and the fifth magnetic pinion 15b. That is, each of the pinion magnets of the fifth magnetic pinion 15b is magnetically parallel to the fourth magnetic The direction of the rotation axis of the pinion 15a and the fifth magnetic pinion 15b.

As described above, the fourth magnetic pinion 15a and the fifth magnetic pinion 15b can be disposed to sandwich the second magnetic pinion 16 and act between the fourth magnetic pinion 15a and the rack magnet 16. The magnetic force and the magnetic force acting between the fifth magnetic pinion 15b and the second magnetic rack 16 cancel out, and the substrate support is maintained in a stable posture.

Further, a sixth magnetic pinion 15c that is magnetically coupled to the second magnetic rack 16 may be added to the second shaft 150. Due to this magnetic attraction force, in the present modification, a larger thrust can be transmitted to the substrate support 4.

Fig. 11 is a schematic view showing a magnetic rack and a magnetic pinion of a modification. Basically, the magnetic rack and the magnetic pinion of this modification have the same structure as the magnetic rack and the magnetic pinion shown in FIG. 2, and the same constituent elements are denoted by the same reference numerals, and are omitted. Its detailed description. However, in this modification, the magnetic pinions 5a and 5b, the shaft 50, and the rotary drive shaft 51 are disposed outside the process environment (atmosphere side) via the partition wall 12 in order to further reduce the number of particles. Further, the magnetic pinions 5a, 5b may be provided outside the cavity 1A.

Further, although not shown in Fig. 11, in the case where the magnetic pinions 15a, 15b, 15c shown in Fig. 10 are used, similarly, the magnetic pinions 15a, 15b, 15c can be separated. The partition wall is provided on the atmosphere side or on the outer side of the chamber 1A.

Fig. 12 is a schematic view showing a magnetic rack and a magnetic pinion of a modification. In this modification, unlike the magnetic pinion shown in FIG. 4, The difference is that the first magnetic rack 6a and the second magnetic rack 6b are provided on both sides of the substrate support 4, and the first magnetic rack 6a and the second magnetic rack 6b are respectively held. Magnetic pinions are provided, and the rotation axes of the respective magnetic pinions are oriented in the vertical direction.

Specifically, the first magnetic rack 6a on one side of the substrate support 4 is magnetically coupled to the first magnetic pinion 5a and the second magnetic pinion 5b in the vertical direction. The first magnetic pinion 5a and the second magnetic pinion 5b are coupled via a shaft 50, and the shaft 50 is coupled to a rotating shaft of the motor 7a.

In other words, in the present example, the magnetic field generated between the first magnetic rack gear 6a and the first magnetic pinion gear 5a is oriented parallel to the rotation axes of the first magnetic pinion gear 5a and the second magnetic pinion gear 5b. direction. In other words, each of the pinion magnets of the first magnetic pinion 5a is magnetized in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b.

Similarly, the magnetic field generated between the first magnetic rack 6a and the second magnetic pinion 5b is also oriented in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b. In other words, each of the pinion magnets of the second magnetic pinion 5b is magnetized in a direction parallel to the rotation axes of the first magnetic pinion 5a and the second magnetic pinion 5b.

On the other hand, the second magnetic rack 6b on the other side of the substrate support 4 is magnetically coupled to the seventh group magnetic pinion 55a and the eighth group magnetic pinion 55b in the vertical direction. The seventh group magnetic pinion 55a and the eighth group magnetic pinion 55b are coupled via a shaft 50, and the shaft 50 is coupled to the motor 7b. The rotating shaft is connected.

In other words, in the present example, the magnetic field generated between the second magnetic rack 6b and the seventh magnetic pinion 55a is oriented parallel to the rotation axes of the seventh magnetic pinion 55a and the eighth magnetic pinion 55b. direction. In other words, each of the pinion magnets of the seventh magnetic pinion 55a is magnetized in a direction parallel to the rotation axes of the seventh magnetic pinion 55a and the eighth magnetic pinion 55b.

Similarly, the magnetic field generated between the second magnetic rack 6b and the eighth magnetic pinion 55b is also oriented in a direction parallel to the rotation axes of the seventh magnetic pinion 55a and the eighth magnetic pinion 55b. In other words, each of the pinion magnets of the eighth magnetic pinion gear 55b is magnetized in a direction parallel to the rotation axes of the seventh magnetic pinion 55a and the eighth magnetic pinion 55b.

The motors 7a and 7b are connected to the control unit 20, and can be synchronously rotated by the control unit 20.

Fig. 13 is a view for explaining a mechanism for synchronizing two magnetic pinions without using the control unit 20. In this example, the rotation axis 51a of the pinion gear on one side and the other side can be made by a rotation transmission means (for example, a gear, a helical gear, a magnetic gear, a belt) coupled to the rotating shaft of the motor 7. The rotating shaft 51b of the pinion gear rotates in synchronization.

Specifically, a rotation transmitting means 13a is provided at the front end portion of the rotating shaft 51a of the motor 7. The rotation transmitting means 13a is engaged with the rotation transmitting means 13b coupled to the shaft 51c, and converts the rotation of the motor 7 into the rotation of the shaft 51a. Further, rotation transmitting means 13c, 13d are provided at both end portions of the shaft 51c.

The rotation transmitting means 13c is engageable with the rotation transmitting means 13e connected to the distal end of the rotating shaft 51a of the magnetic pinion, and the rotation of the shaft 51c is converted into the rotation of the rotating shaft 51a of the magnetic pinion.

Similarly, the rotation transmitting means 13d is engaged with the rotation transmitting means 13f connected to the distal end of the rotating shaft 51b of the magnetic pinion, and the rotation of the shaft 51c is converted into the rotation of the rotating shaft 51b of the magnetic pinion.

With such a mechanism, the rotation of the motor 7 is synchronously converted into the rotation of the rotation shafts 51a, 51b of the two magnetic pinions.

At this time, from the viewpoint of preventing the occurrence of fine particles, it is preferable that the portions of the rotation transmitting means 13a, 13b, 13c, 13d, and 13f are disposed outside the cavity.

Further, in Fig. 14, although an example in which a helical gear is used as the rotation transmitting means 13 is shown, the rotation can be transmitted in a non-contact state by using a magnetic gear.

The conveying apparatus of the present invention can be constructed by combining any of the features described in the respective embodiments.

Further, the phase of the fourth magnetic pinion gear 15a and the fifth magnetic pinion gear 15b may be shifted from each other in the same manner as the first magnetic pinion gear 5a and the second magnetic pinion gear 5b shown in Fig. 6 .

1A, 1B‧‧‧ cavity

2‧‧‧Substrate

3‧‧‧Support member (guide roller)

4‧‧‧Substrate support

5‧‧‧Lower magnetic pinion

5a‧‧‧1st magnetic pinion

5b‧‧‧2nd magnetic pinion

5c‧‧‧3rd magnetic pinion

6‧‧‧Lower magnetic rack (1st magnetic rack)

7‧‧‧Motor

8a, 8b‧‧‧ magnet

9a, 9b‧‧‧ magnet

10‧‧‧Magnetic drive department

12‧‧‧ next door

13‧‧‧Rotating means

14‧‧‧ Track

15‧‧‧Upper magnetic pinion

15a‧‧‧4th magnetic pinion

15b‧‧‧5th magnetic pinion

15c‧‧‧6th magnetic pinion

16‧‧‧Upper magnetic rack (2nd magnetic rack)

25‧‧‧Magnetic pinion

50‧‧‧1st axis

51‧‧‧Drive shaft

55a‧‧‧7th group of magnetic pinions

55b‧‧‧8th group of magnetic pinions

150‧‧‧2nd axis

[Fig. 1] is a schematic view of a substrate processing apparatus according to a first embodiment of the present invention.

[Fig. 2] is a schematic cross-sectional view of the substrate transfer device of Fig. 1.

[3A, 3B] is an enlarged view for explaining the upper magnet of Fig. 1.

[Figs. 4A and 4B] are enlarged views of the magnetic rack and the magnetic pinion of Fig. 1.

[5A-5D] is a plan view of a magnetic pinion gear according to a modification.

[Fig. 6] is a plan view of a magnetic rack according to a modification.

[Fig. 7] is a side view of a magnetic rack of a modification.

[Fig. 8] is a schematic view of a magnetic rack and a magnetic pinion of a modification.

[9A and 9B] FIG. 9 is a schematic view showing a magnetic rack and a magnetic pinion of a modification.

[10A, 10B] is a schematic view of a magnetic rack and a magnetic pinion of a modification.

[Fig. 11] is a schematic view of a magnetic rack and a magnetic pinion of a modification.

[12] Fig. 12 is a schematic view showing a magnetic rack and a magnetic pinion of a modification.

[Fig. 13] is a schematic view of a magnetic rack and a magnetic pinion of a modification.

1‧‧‧Substrate processing unit

1A, 1B‧‧‧ cavity

2‧‧‧Substrate

3‧‧‧Support member (guide roller)

4‧‧‧Substrate support

5‧‧‧Lower magnetic pinion

6‧‧‧Lower magnetic rack (1st magnetic rack)

8, 9‧‧‧ magnet

11‧‧‧ gate valve

14‧‧‧ Track

Claims (12)

A conveying apparatus comprising: a cavity and a substrate supporting body, wherein the substrate is supported and movable along a path in the cavity, and the first magnetic rack has a linear arrangement on the substrate support a plurality of rack magnets and a first magnetic pinion having a plurality of pinion magnets disposed on the side of the first magnetic rack, magnetically coupled to the first magnetic rack, and a supporting member The substrate support is movably supported; and the substrate support is moved by rotating the first magnetic pinion. The transfer device according to the first aspect of the invention, wherein the substrate support body is configured to have two side surfaces that are inclined in a cross section perpendicular to the traveling direction, and that is capable of being formed by the two side surfaces The substrate is supported. The transport device according to the first aspect of the invention, further comprising: a second magnetic pinion gear having a plurality of pinion magnets connected to the first magnetic pinion via a first shaft; And being disposed on the side of the first magnetic rack and magnetically coupled to the first magnetic rack; and the second magnetic pinion is configured to hold the aforementioned by the first magnetic pinion and the second magnetic pinion The side of the first magnetic rack In the arrangement, the substrate support is moved by rotating the first and second magnetic pinions. The transfer device according to the third aspect of the invention, wherein the plurality of pinion magnets of the first magnetic pinion gear are disposed in phase with a plurality of pinion magnets of the second magnetic pinion gear. The transfer device according to claim 3, wherein the first shaft is provided with a rotatable third magnetic pinion, and the third magnetic pinion has a first magnetic pinion A plurality of pinion magnets that generate a magnetic repulsive force between the magnetic racks. The transfer device according to claim 3, wherein the first shaft is provided with a rotatable third magnetic pinion, and the third magnetic pinion has a first magnetic pinion A plurality of pinion magnets that generate magnetic attraction between the magnetic racks. The transport device according to claim 6, further comprising: a second magnetic rack attached to the substrate support and disposed at a side opposite to the first magnetic rack a plurality of rack magnets arranged in a line and a fourth magnetic pinion having a plurality of pinion magnets disposed on one side of the second magnetic rack and magnetically coupled to the second magnetic rack And a fifth magnetic pinion gear having a plurality of pinion magnets connected to the second shaft of the fourth magnetic pinion and disposed on the second magnetic teeth On the other side of the strip, the sixth magnetic pinion that is magnetically coupled to the second magnetic rack and rotatable is provided on the second shaft, and is provided between the second magnetic rack and the second magnetic rack. A pinion magnet with a plurality of magnetic adsorptive forces. A conveying device comprising: a cavity and a substrate supporting body, wherein the substrate is supported and movable along a path in the cavity, and the first magnetic rack is provided on the substrate supporting body, and The first magnetic pinion gear and the support member are movably supported by the substrate support; and the substrate support is moved by rotating the first magnetic pinion. The conveying device according to the eighth aspect of the invention, further comprising: a first member provided on an upper portion of the substrate support and a second member disposed to face the first member In the cavity; and a magnetic force occurs between the first member and the second member, and the substrate support receives an upward force by the magnetic force. The transfer device according to the eighth aspect of the invention, wherein the substrate support body has a first surface that supports the substrate and a second surface that is opposite to the substrate, and the support member is disposed on the support member. The aforementioned 2 sides of the side. The transfer device according to claim 8 or 9, wherein the substrate support has a first side wall and a second side wall, and each of the first side wall and the second side wall has a substrate support The first surface and the second surface on the opposite side, the first side wall and the second side wall are formed such that the second surface of the first side wall faces the second surface of the second side wall The support member is disposed between the first side wall and the second side wall. The conveying device according to claim 11, wherein the first side wall and the second side wall are disposed such that an interval between the first side wall and the second side wall increases downward.