JP2013129479A - Substrate conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate conveying device achieving reduction of loads on a motor and reduction in the manufacturing cost.SOLUTION: The substrate conveying device includes a substrate supporter movable along the path in a chamber, a magnetic rack having a plurality of rack magnets arranged on the substrate supporter in a straight manner, and a magnetic pinion having a plurality of pinion magnets to be magnetically coupled with the plurality of rack magnets of the magnetic rack, and rotatable with respect to the axis of rotation. The plurality of rack magnets include at least one specified rack magnet at an end of the magnetic rack. The magnetically coupling force generated between the specified rack magnet and the pinion magnet is weakened more than the magnetically coupling force generated between the other rack magnet and the pinion magnet.

Description

  The present invention relates to a substrate transfer apparatus for transferring a substrate along a path in a chamber.

Patent Document 1 discloses a magnetic drive system for moving a substrate transfer shuttle by rotating a rack in which a plurality of rack magnets are linearly arranged on the substrate transfer shuttle and a magnetically coupled pinion magnet. Has been.

Special Table 2002-516243

  However, this magnetic drive system has a problem that the load on the motor side increases when the substrate transport shuttle having the rack enters and exits the pinion magnet. That is, when there is a rotating pinion at the center lower part of the rack magnet, the pinion magnets on both sides of the pinion magnet and the rack magnets on both sides of the rack magnet with respect to the magnetic lines of force between the pinion magnet and the closest rack magnet Are substantially symmetrically magnetically coupled (see FIG. 6B of Patent Document 1). However, for example, when the tip of the magnetic rack of the substrate transfer shuttle enters the pinion magnet, since there is no rack magnet in front of the tip of the magnetic rack, the plurality of pinion magnets and the plurality of rack magnets are With respect to the magnetic field lines with the closest rack magnet, magnetic coupling is performed asymmetrically only on one side. In other words, when the tip of the magnetic rack of the substrate transfer shuttle enters the pinion magnet, a torque in the direction opposite to the rotation direction acts on the pinion magnet. Therefore, the motor that rotates the pinion magnet is loaded accordingly. End up. For this reason, a large motor that can withstand this extra load has to be prepared, resulting in an increase in manufacturing cost.

  Therefore, the present invention has been made in view of conventional problems, and an object of the present invention is to provide a substrate transfer apparatus that reduces the load on the motor and reduces the manufacturing cost.

  A substrate transfer apparatus according to the present invention includes a chamber, a substrate support movable along a path in the chamber, and a magnetic rack having a plurality of rack magnets arranged linearly on the substrate support, A plurality of pinion magnets that can be magnetically coupled to a plurality of rack magnets of the magnetic rack, and a magnetic pinion that is rotatable with respect to a rotating shaft; and the plurality of rack magnets at an end of the magnetic rack Including at least one specific rack magnet, and the magnetic coupling force generated between the specific rack magnet and the pinion magnet is weaker than the magnetic coupling force generated between the other rack magnet and the pinion magnet. It is characterized by being.

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate conveyance apparatus which reduced the load to a motor and reduced the manufacturing cost can be provided.

1 is a schematic view of a substrate processing apparatus according to a first embodiment. It is a schematic sectional drawing of the board | substrate conveyance apparatus of FIG. It is an enlarged view explaining the upper magnet of FIG. It is an enlarged view of the magnetic rack and magnetic pinion of FIG. It is a side view of the magnetic pinion in the AA line of FIG. It is a bottom view of the magnetic rack shown in FIG. It is an enlarged view of the magnetic rack and magnetic pinion which concern on 2nd Embodiment. It is a bottom view of the magnetic rack shown in FIG. It is a schematic sectional drawing of the board | substrate conveyance apparatus which concerns on 3rd Embodiment. It is a side view of the magnetic rack and magnetic pinion which concern on 3rd Embodiment. It is an enlarged front view of the magnetic rack 6 and the magnetic pinion 5 which concern on 3rd Embodiment. It is an enlarged top view for demonstrating the relationship between the magnetic rack and magnetic pinion which concern on 3rd Embodiment. It is a side view of the magnetic rack and magnetic pinion which concern on 4th Embodiment. It is an enlarged top view for demonstrating the relationship between the magnetic rack and magnetic pinion which concern on 4th Embodiment. It is a side view of the magnetic rack and magnetic pinion which concern on 5th Embodiment.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.
FIG. 1 is a schematic side view of a substrate processing apparatus according to a first embodiment of the present invention. FIG. 2 is a side sectional view of the substrate processing apparatus according to the first embodiment of the present invention.

  As shown in FIG. 1, the substrate processing apparatus includes a chamber 1 </ b> A and a chamber 1 </ b> B connected to the chamber 1 </ b> A via a gate valve 11. The gate valve can be opened so that the substrate support 4 is transportable and can be closed to isolate it from the adjacent chamber. Examples of the chamber 1A include a load lock chamber, a sputtering film forming chamber, a CVD film forming chamber, and an etching chamber. Examples of the chamber 1B include an unload lock chamber, a sputtering film forming chamber, a CVD film forming chamber, and an etching chamber. Each chamber is connected to unillustrated exhaust means and is a casing that can be exhausted to a reduced pressure atmosphere. In this example, the substrate transfer apparatus includes two chambers, but may include three or more chambers.

FIG. 2 is a schematic cross-sectional view of the substrate transfer apparatus. As shown in FIG. 2, the substrate support 4 arranged in the vertical direction has rectangular side surfaces that face each other in a cross-section that is perpendicular to the traveling direction, and each has a rectangular shape on each side surface. The substrate 2 can be supported. That is, the substrate support 4 has inclined side walls 4a and 4b facing in a letter C shape, and a flat upper wall 4c connecting the upper ends of the inclined side walls 4a and 4b.
In this example, the substrate 2 is a large rectangular substrate having a length of 1700 mm or more and a width of 1300 mm or more, but is not limited thereto, and may be a disk-shaped substrate. Moreover, the board | substrate support body 4 is 2000 mm or more in length and 1700 mm or more in width.
Engagement members (hereinafter referred to as guide rails) 14 are provided on the inner sides of the inclined side walls 4a and 4b of the substrate support 4 in the horizontal direction. Note that the guide rail 14 may have a curved groove or may have only a slidable flat surface.

  On the other hand, as shown in FIG. 1, a plurality of rotatable bearings (hereinafter referred to as guide rollers) 3 are provided in the chambers 1 </ b> A and 1 </ b> B along the movement path of the substrate support 4. The guide roller 3 is fitted into the groove of the guide rail 14 of the substrate support 4 and functions as a support member that supports the substrate support 4 so as to be movable in the horizontal direction.

  As shown in FIG. 2, a first magnetic rack 6 having a plurality of rack magnets is provided at the lower ends of the inclined side walls 4a and 4b of the substrate support 4 in the substrate transport direction (horizontal direction). ing. Below each first magnetic rack 6, rotatable magnetic pinions 5a and 5b having a plurality of pinion magnets that are magnetically coupled to the first magnetic rack 6 in a non-contact state are provided. As shown in FIG. 1, a plurality of magnetic pinions 5 (three in this example) are arranged at predetermined intervals along a path along which the substrate support 4 moves, perpendicular to the direction of travel of the substrate support. ing. As shown in FIG. 2, the rotation shaft of the magnetic pinion 5 magnetically coupled to the first magnetic rack 6 provided at the lower end of one inclined side wall 4a of the substrate support 4 is provided outside the chamber 1A. It is connected to the rotation shaft 51 of the motor 7 and is rotatable by the rotation of the motor 7. Further, the rotating shaft of the magnetic pinion 5 magnetically coupled to the first magnetic rack 6 provided at the lower end of the other inclined side wall 4 b of the substrate support 4 is also connected to the rotating shaft 51 of the motor 7. It can be rotated by rotation. In this example, the magnetic pinion 5 is provided inside the chamber, that is, inside the process environment. However, the present invention is not limited to this, and the magnetic pinion 5 may be provided outside the chamber via a partition wall. In this example, the magnetic pinions 5a and 5b and the magnetic rack 6 are magnetically coupled in the vertical direction, but may be configured to be magnetically coupled in the horizontal direction.

  By rotating the magnetic pinion 5, the substrate support 4 moves linearly in the direction of the arrow in FIG. The magnetic pinion 5 and the first magnetic rack 6 constitute a magnetic drive unit that converts the rotation of the magnetic pinion 5 into the linear movement of the first magnetic rack 6 in a non-contact state. In addition, as shown in FIG. 1, in order to rotate the several magnetic pinion provided apart, you may provide a motor separately and provide the control means which synchronizes each motor. Alternatively, a plurality of magnetic pinions 5 may be connected with a gear, and the rotation of each magnetic pinion may be synchronized with a single motor. In this example, the magnetic pinion 5 includes the first magnetic pinion 5a and the second magnetic pinion 5b. However, only one of the magnetic pinions may be used.

  As shown in FIGS. 1 and 2, an upper magnet 9 is provided on the upper wall 4 c of the substrate support 4. On the other hand, a magnet 8 that is magnetically coupled to the magnet 9 is disposed on the ceiling of the chamber 1A.

FIG. 3 is an enlarged view for explaining the upper magnets 8 and 9 of FIG. FIG. 3A is a cross-sectional view of the upper magnets 8 and 9, and FIG. 3B is a side view of the upper magnets 8 and 9.
As shown in FIG. 3A, rod-shaped magnets 8a and 8b having different magnetic poles are arranged in two rows on the chamber side. On the substrate support side, bar magnets 9a and 9b having different magnetic poles are arranged in two rows.
As shown in FIG. 3B, the bar-shaped magnet 8a (N pole in this example) fixed to the chamber side and the bar-shaped magnet 9a (S pole) fixed to the substrate support 4 side are in a non-contact state and vertically Magnetically coupled in the direction. Similarly, a bar-shaped magnet 8b (S pole in this example) fixed to the chamber side and a bar-shaped magnet 9b (N pole) fixed to the substrate support 4 side are magnetically coupled in the vertical direction in a non-contact state. .

4 is an enlarged view of the magnetic rack 6 and the magnetic pinion 5 of FIG.
As shown in FIG. 4, the magnetic rack 6 is provided with a plurality of rack magnets 6 b in which N-pole magnets and S-pole magnets are alternately arranged in a straight line, and at a position farther from the ground than the rack magnet 6 b. Specific rack magnets 6a and 6c.
As shown in FIG. 4, magnetic pinion magnets of opposite polarities adjacent to the plurality of rack magnets of the magnetic rack 6 are magnetically coupled to each other. Therefore, when the magnetic pinion 5 rotates, the substrate support 4 moves in the right direction. When the magnetic pinion 5 is rotated in the opposite direction, the substrate support 4 moves to the left.
The plurality of rack magnets arranged in the central portion of the magnetic rack 6 are magnetically coupled to the pinion magnets in a substantially symmetrical manner with respect to the rack magnet and the pinion magnet that are closest to each other.
Furthermore, in this example, each of the three specific rack magnets 6a and 6b (N pole, S pole, N pole) is provided so that the distance from the ground gradually increases toward both ends of the substrate support 4. ing.
Thus, the specific rack magnets 6a and 6c are arranged at positions where the distance from the pinion magnet 5 gradually increases toward the end of the magnetic rack, so that the magnetic force becomes weaker as the distance between the magnets increases. Become. That is, the specific rack magnets 6a and 6c are configured so that the magnetic coupling force generated between the specific rack magnets 6a and 6c and the magnetic pinion becomes weaker toward both ends of the magnetic rack. That is, when the magnetic pinion 5 is located at the end of the magnetic rack 6, the left and right magnets are magnetically coupled to each other asymmetrically with the rack magnet and the pinion magnet that are closest to each other as axes. In this embodiment, with such a configuration, it is possible to reduce the load on the motor when the magnetic rack 6 enters and exits the magnetic pinion 5.
In this example, three specific rack magnets are provided. However, the gist of the present invention is not limited to this, and the magnetic force between the pinion magnets is weaker than that of the other rack magnets 6b. There may be more than one specific rack magnet. Further, when two or more rack magnets are provided, it is preferable that the magnetic coupling force with the pinion magnet gradually decreases toward the end of the magnetic rack.
The cylindrical rotatable magnetic pinion 5 includes N-pole magnets and S-pole magnets alternately arranged around a rotation axis extending in the horizontal direction. Each pinion magnet of the magnetic pinion 5 is magnetized in the radial direction of the magnetic pinion. On the other hand, each rack magnet of the magnetic rack 6 is magnetized in the vertical direction. In this example, the magnets of the rack magnet have the same shape and are arranged at the same interval. Similarly, each pinion magnet has the same fan shape and is arranged at the same interval (no gap). Each pinion magnet may be a rod-shaped (square) magnet, and may be provided with a predetermined same interval.

FIG. 5 is a side view of the magnetic pinion along line AA in FIG.
As shown in FIG. 5, a magnetic pinion 5 is provided directly below the magnetic rack 6 so as to be rotatable via a shaft 51.
FIG. 6 is a bottom view of the magnetic rack shown in FIG. As shown in FIG. 6, the specific rack magnets 6a and 6c and the other rack magnets 6b have the same surface area facing the magnetic pinion. The spacing between the rack magnets is also the same.

(Second Embodiment)
With reference to FIG.7 and FIG.8, the magnetic rack and magnetic pinion which concern on 2nd Embodiment of this invention are demonstrated. FIG. 7 is an enlarged view of the magnetic rack and the magnetic pinion according to the second embodiment. FIG. 8 is a bottom view of the magnetic rack shown in FIG.
The substrate transfer apparatus of the present embodiment has basically the same configuration as the substrate transfer apparatus shown in the first embodiment, and the same reference numerals are given to the same structural members, and detailed description thereof will be given. Omitted.
As shown in FIG. 7, in the plurality of rack magnets of the magnetic rack 6 of the present embodiment, magnets of different polarities are alternately arranged, and all of them including the specific rack magnets 6a and 6c are arranged in a straight line.
On the other hand, as shown in FIG. 8, the surface area of the specific rack magnets 6a, 6c facing the magnetic pinion is smaller than that of the other rack magnets 6b. Furthermore, in this example, the three specific rack magnets 6a and 6c are provided, and their surface areas are gradually reduced toward the end of the magnetic rack. That is, the specific rack magnets 6a and 6c are configured so that the magnetic coupling force generated between the specific rack magnets 6a and 6c and the magnetic pinion becomes weaker toward the end. That is, when the magnetic pinion 5 is positioned at the end of the magnetic rack 6, the left and right magnets are magnetically coupled to each other asymmetrically with the rack magnet and the pinion magnet being closest to each other as an axis. In this embodiment, with such a configuration, it is possible to reduce the load on the motor when the magnetic rack 6 enters and exits the magnetic pinion 5.

(Third embodiment)
With reference to FIGS. 9-11, the board | substrate conveyance apparatus which concerns on 3rd Embodiment is demonstrated. The substrate transfer apparatus of the present embodiment has basically the same configuration as the substrate transfer apparatus shown in the first embodiment, and the same reference numerals are given to the same structural members, and detailed description thereof will be given. Omitted.
FIG. 9 is a schematic cross-sectional view of the substrate transfer apparatus according to the third embodiment. FIG. 10 is a side view of the magnetic rack and the magnetic pinion according to the third embodiment.
As shown in FIG. 9, a magnetic rack 6 having a plurality of rack magnets is provided at the lower ends of the inclined side walls 4a and 4b of the substrate support 4 in the horizontal direction. Below each magnetic rack 6, rotatable magnetic pinions 5a and 5b having a plurality of pinion magnets that are magnetically coupled to the magnetic rack 6 in a non-contact state are provided. As shown in FIG. 10, along the path along which the substrate support 4 moves, a plurality of magnetic pinions 5 are arranged at a predetermined interval perpendicular to the traveling direction of the substrate support. As shown in FIG. 9, the rotation shafts of the magnetic pinions 5a and 5b magnetically coupled to the magnetic rack 6a provided at the lower end portion of the one inclined side wall 4a of the substrate support 4 are provided outside the chamber 1A. It is connected to the rotation shaft 51 of the motor 7 and can be rotated by the rotation of the motor 7. Further, the rotating shafts of the magnetic pinions 5a and 5b magnetically coupled to the first magnetic rack 6 provided at the lower end of the other inclined side wall 4b of the substrate support 4 are also connected to the rotating shaft 51 of the motor 7, and the motor It can be rotated by rotating 7. In this example, the magnetic pinion 5 includes the first magnetic pinion 5a and the second magnetic pinion 5b. However, the present invention is not limited to this, and only one of the magnetic pinions may be used.

  As shown in FIG. 10, magnetic pinion magnets of opposite polarities that are close to the plurality of rack magnets of the magnetic rack 6 are magnetically coupled to each other. By rotating the magnetic pinion 5, the substrate support 4 can move linearly in the direction of the arrow in FIG. The magnetic pinion 5 and the magnetic rack 6 constitute a magnetic drive unit that converts the rotation of the magnetic pinion 5 into the linear movement of the first magnetic rack 6 in a non-contact state.

FIG. 11 is an enlarged front view of the magnetic rack 6 and the magnetic pinion 5 of FIG. FIG. 12 is an enlarged top view for explaining the relationship between the magnetic rack and the magnetic pinion of FIG.
As shown in FIGS. 10 and 12, the magnetic rack 6 includes a plurality of rack magnets 6b in which N-pole magnets and S-pole magnets are alternately arranged linearly, and pinion magnets 5a and 5b from the rack magnet 6b. Specific rack magnets 6a and 6c configured to increase the distance are included. In this example, each of the three specific rack magnets 6 a and 6 c is configured so that the distance from the pinion magnet gradually increases toward both ends of the substrate support 4. As shown in FIG. 12, the width of the specific rack magnets 6a and 6c in the rotation axis direction is shorter than that of the other rack magnets 6b. That is, the specific rack magnets 6a and 6c have a smaller magnetic coupling force with the pinion magnet than the other rack magnets 6b. Furthermore, in this example, each of the three specific rack magnets 6a and 6c has three specific rack magnets 6a and 6c so that the magnetic coupling force generated between the magnetic pinions 5a and 5b decreases toward the end of the magnetic rack 6. ,It is configured.
The cylindrical rotatable magnetic pinion 5a includes N-pole magnets and S-pole magnets alternately arranged around a rotation axis extending in the horizontal direction. The rack magnets other than the specific rack magnets 6a and 6c have the same shape and are arranged at the same interval. Similarly, the pinion magnets have the same shape and are arranged at the same interval.
That is, when the magnetic pinion 5 is positioned at both ends of the magnetic rack 6, the left and right magnets are magnetically coupled to each other asymmetrically with the closest rack magnet and pinion magnet as axes. In this embodiment, with such a configuration, it is possible to reduce the load on the motor when the magnetic rack 6 enters and exits the magnetic pinion 5.

As shown in FIG. 11, a first magnetic pinion 5 a and a second magnetic pinion 5 b are provided via a shaft 51 extending in the horizontal direction with a magnetic rack 6 interposed therebetween. A shaft 51 extending in the horizontal direction indicates the rotation axis of the first magnetic pinion 5a and the second magnetic pinion 5b. In this example, the magnetic field generated between the first magnetic rack 6 and the first magnetic pinion 5a is directed in the rotation axis direction of the first magnetic pinion 5a and the second magnetic pinion 5b. That is, each pinion magnet of the first magnetic pinion 5a is magnetized in the rotation axis direction of the first magnetic pinion 5a and the second magnetic pinion 5b.
Similarly, the magnetic field generated between the first magnetic rack 6 and the second magnetic pinion 5b is also directed in the direction of the rotation axis of the first magnetic pinion 5a and the second magnetic pinion 5b. That is, each pinion magnet of the second magnetic pinion 5b is magnetized in the rotation axis direction of the first magnetic pinion 5a and the second magnetic pinion 5b.
Thus, by arranging the first magnetic pinion 5a and the second magnetic pinion 5b on both sides of the first magnetic rack 6, the magnetic force between the first magnetic pinion 5a and the first magnetic rack 6 and the second magnetic pinion 5b are arranged. The magnetic forces of the magnetic pinion 5b and the first magnetic rack 6 are canceled out, and the substrate support can be maintained in a stable posture with little fluctuation in the horizontal direction.

(Fourth embodiment)
A substrate transfer apparatus according to the fourth embodiment will be described with reference to FIGS. 13 and 14. The substrate transfer apparatus of the present embodiment has basically the same configuration as the substrate transfer apparatus shown in the third embodiment. The same reference numerals are assigned to the same components, and the detailed description thereof will be given. Omitted. FIG. 13 is a side view of a magnetic rack and a magnetic pinion according to the fourth embodiment. FIG. 14 is an enlarged top view for explaining the relationship between the magnetic rack and the magnetic pinion according to the fourth embodiment.
As shown in FIG. 13, the magnetic rack 6 is configured such that a plurality of rack magnets 6b in which N-pole magnets and S-pole magnets are alternately arranged in a straight line and a distance from the ground away from the rack magnet 6b. Specific rack magnets 6a and 6c are included. In this example, each of the three specific rack magnets 6 a and 6 c is configured so that the distance from the ground gradually increases toward the end of the substrate support 4.
As shown in FIG. 14, the widths of the specific rack magnets 6a and 6c as viewed from above are set to be the same as those of the other rack magnets 6b. That is, the magnetic rack of this embodiment has the same configuration as the magnetic rack of the first embodiment shown in FIG.

On the other hand, the cylindrical rotatable magnetic pinions 5a and 5b include N-pole magnets and S-pole magnets alternately arranged around a rotation axis extending in the horizontal direction. That is, the magnetic pinion of the present embodiment has the same configuration as the magnetic pinion of the third embodiment.
With this configuration, in the horizontal direction, the specific rack magnets 6a and 6c have a smaller surface area facing the magnetic pinions 5a and 5b than the other magnetic racks 6b. The magnetic force of the magnet increases as the surface area increases. That is, the specific rack magnets 6a and 6c are configured such that the magnetic coupling force with the magnetic pinion becomes weaker toward the end of the magnetic rack. That is, when the magnetic pinion 5 is positioned at the end of the magnetic rack 6, the left and right magnets are magnetically coupled to each other asymmetrically with the rack magnet and the pinion magnet being closest to each other as an axis. In this embodiment, with such a configuration, it is possible to reduce the load on the motor when the magnetic rack 6 enters and exits the magnetic pinion 5.
The specific rack magnets 6a, 6c and the other rack magnets have the same shape and are arranged at the same interval. Similarly, the pinion magnets have the same shape and are arranged at the same interval.

(Fifth embodiment)
With reference to FIG. 15, a substrate transfer apparatus according to a fifth embodiment will be described. The substrate transfer apparatus of this embodiment has basically the same configuration as that of the substrate transfer apparatus shown in the fourth embodiment. The same reference numerals are given to the same components, and detailed description thereof will be given. Omitted. FIG. 15 is a side view of a magnetic rack and a magnetic pinion according to the fifth embodiment. The top view of the magnetic rack and the magnetic pinion according to the present embodiment is the same as FIG.
As shown in FIG. 15, the magnetic rack 6 has a volume so that the distance from the ground to the plurality of rack magnets 6b in which N-pole magnets and S-pole magnets are alternately arranged in a straight line is increased. Specific rack magnets 6a and 6c configured to be small are included. In this example, each of the three specific rack magnets 6a and 6c has a small volume so that the distance from the ground gradually increases toward the end of the substrate support 4.

On the other hand, the cylindrical rotatable magnetic pinions 5a and 5b include N-pole magnets and S-pole magnets alternately arranged around a rotation axis extending in the horizontal direction. That is, the magnetic pinion of the present embodiment has the same configuration as the magnetic pinion of the third embodiment.
With this configuration, in the horizontal direction, the specific rack magnets 6a and 6c have a smaller surface area facing the magnetic pinions 5a and 5b than the other magnetic racks 6b. The magnetic force of the magnet becomes weaker as the surface area becomes smaller. That is, the specific rack magnets 6a and 6c are configured such that the magnetic coupling force with the magnetic pinion is weaker than the other rack magnets 6b toward the end of the magnetic rack. That is, when the magnetic pinion 5 is positioned at the end of the magnetic rack 6, the left and right magnets are magnetically coupled to each other asymmetrically with the rack magnet and the pinion magnet being closest to each other as an axis. In this embodiment, with such a configuration, it is possible to reduce the load on the motor when the magnetic rack 6 enters and exits the magnetic pinion 5.

  As described above, by configuring the specific rack magnets 6a and 6c toward the end of the magnetic rack so that the magnetic coupling force with the magnetic pinion is weaker than the other rack magnets 6b, the magnetic rack Torque generated when entering and exiting the pinion magnet can be reduced. As a result, the maximum load on the motor can be reduced, and the manufacturing cost can be reduced.

1A, 1B Chamber 2 Substrate 3 Support member (guide roller)
4 Substrate Support 5 Lower Magnetic Pinion 5a First Magnetic Pinion 5b Second Magnetic Pinion 6 Lower Magnetic Rack (First Magnetic Rack)
7 Motor 10 Magnetic drive part 14 Guide rail 51 Shaft (rotating shaft)

Claims (6)

A chamber;
A substrate support movable along a path in the chamber;
A magnetic rack having a plurality of rack magnets arranged linearly on the substrate support;
A magnetic pinion having a plurality of pinion magnets that can be magnetically coupled to a plurality of rack magnets of the magnetic rack;
With
The plurality of rack magnets include at least one specific rack magnet at an end of the magnetic rack,
The substrate transfer apparatus, wherein a magnetic coupling force generated between the specific rack magnet and the pinion magnet is weaker than a magnetic coupling force generated between another rack magnet and the pinion magnet.   The substrate transfer apparatus according to claim 1, wherein a distance between the specific rack magnet and the pinion magnet is longer than a distance between another rack magnet and the pinion magnet.   2. The substrate transfer apparatus according to claim 1, wherein a surface area facing the specific rack magnet and the pinion magnet is smaller than a surface area facing the other rack magnet and the pinion magnet.   The substrate transport apparatus according to claim 1, wherein the rack magnet and the pinion magnet are magnetically coupled in a radial direction of the pinion magnet.   The substrate transport apparatus according to claim 1, wherein the rack magnet and the pinion magnet are magnetically coupled in a rotation axis direction of the pinion magnet.   2. The substrate transfer apparatus according to claim 1, wherein the specific rack magnet includes two or more magnets, and a magnetic coupling force is gradually reduced toward an end of the magnetic rack.