JP2003332404A - Conveying device within vacuum container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a constant velocity and safe conveyance of conveyed matters as well as an improvement in a degree of positioning accuracy of a conveying table in a conveyer within a vacuum container for conveying the conveyed matters within a vacuum. <P>SOLUTION: There is provided a conveyer 1 within a vacuum container comprising the conveying table 4 for holding and conveying certain conveyed matters 3 and a secondary magnetic pole 5 linked with the conveying table 4 that are arranged in a vacuum container 2, an armature 6 arranged in a movable manner along a wall surface 2b of the vacuum container 2 and an armature transferring mechanism 7 for transferring the armature 6 that are arranged outside the vacuum container 2. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-vacuum container transfer device for transferring an object to be transferred in a vacuum container.

[0002]

2. Description of the Related Art Generally, a vacuum container transfer device transfers a semiconductor in a vacuum container in order to prevent dust from adhering to a substrate during semiconductor manufacturing. Conventionally, there is, for example, one in which a carrier is fixed to a chain belt, and the chain belt is wound around a rotary motor fixed to one end in a vacuum container and a gear fixed to the other end. Then, by rotating the rotary motor, the carrier is driven, that is, by a so-called chain drive, the carrier is moved within the vacuum container. Further, the vacuum container is provided with a gate for carrying out and carrying in the transferred object into and out of the vacuum container, and the transfer table is provided with a transfer mechanism for taking the transferred object in and out through the gate.

[0003]

However, since the rotary motor is arranged inside the vacuum container in this vacuum container transfer device, dust generated from the power cable connected to the rotary motor has been a problem. Further, since the carrier is moved by driving the chain, there is a problem that the positioning accuracy of the carrier is low. Further, since the transfer table is provided with the transfer mechanism, a large amount of electric power is required to drive the transfer table, and the maintenance cost of the vacuum container transfer device is high.

Here, as a method for solving the problem of dust generation, there is a method of using a magnetic coupling to move a carrier arranged inside the vacuum container by a drive mechanism arranged outside the vacuum container. .

This is because a magnetic coupling is provided on each of the carrier inside the vacuum container and the drive mechanism outside the vacuum container, and the magnetic coupling outside the vacuum container moves along the wall of the vacuum container. The driving force of the driving mechanism is transmitted to the magnetic coupling inside the vacuum container, and the carrier is moved inside the vacuum container.

Therefore, by placing the drive mechanism of the carrier table outside the vacuum container, it is possible to prevent dust from being generated in the vacuum container. The two magnetic couplings have magnetic poles fixed in a fixed direction like a permanent magnet. Further, the external drive mechanism includes a rotary motor and a ball screw.

However, in this vacuum container transfer device, when the relative positions of the magnetic couplings such as permanent magnets are close to each other, that is, when the magnetic couplings are synchronized with each other, the magnetic attraction force is generated. Almost no transmission of driving force occurs. Therefore, when the carrier is stopped at the target position, there is a problem that the position control accuracy of the carrier cannot be improved due to the friction generated along with the movement of the carrier.

Further, when the carrier is moved at a constant speed, since the magnetic couplings are in synchronization with each other, the friction accompanying the movement of the carrier cannot be controlled, and the carrier is unable to be controlled. Becomes unstable. Therefore,
As well as adversely affecting the transported object placed on the carrier,
There is a problem that it takes a long time to stop at a desired position. further,

The present invention has been made in view of the above circumstances, and provides an in-vacuum container transfer device which improves the positioning accuracy of a transfer table and can safely transfer an object to be transferred at a constant speed. It is an object.

[0010]

In order to solve the above problems, the present invention proposes the following means. According to a first aspect of the present invention, there is provided a transfer table which is disposed in a vacuum container and holds and transfers a predetermined object to be transferred, a secondary magnetic pole connected to the transfer table, and the vacuum container outside the vacuum container. An armature movably arranged along the wall surface of the armature and an armature moving mechanism for moving the armature, and a plurality of magnetic poles are formed in the armature in a moving direction of the armature. A transport device in a vacuum container is proposed.

According to the in-vacuum-conveyor apparatus of the present invention, since the linear motor is composed of the secondary magnetic pole and the armature, when the armature is moved, the inside of the vacuum container is The secondary magnetic pole follows the magnetic attraction force, and the carrier is moved. Also, by switching the magnetic poles of the armature, the secondary magnetic pole can be moved, so that the positional accuracy of the carrier with respect to the position of the armature can be improved. Then, while the armature is moving, by switching the magnetic poles of the armature, it is possible to finely control the movement of the secondary magnetic pole and move the carrier table at a constant speed.

According to a second aspect of the present invention, in the vacuum container transfer device according to the first aspect, the armature is used to perform the above-mentioned operation based on the position information of the secondary magnetic pole and the position information of the armature. A transfer device in a vacuum container is proposed which is equipped with a control device for controlling the position of the secondary magnetic pole.

According to the in-vacuum transfer device of the present invention, by controlling the position of the secondary magnetic pole by this control device, it is possible to further improve the positional accuracy of the transfer table with respect to the position of the armature. The carrier table can be accurately stopped at the intended stop position in a short time.

According to a third aspect of the present invention, in the vacuum container transfer device according to the first or second aspect, the secondary magnetic pole is on the transfer path of the transfer table and in the transfer direction of the transfer table. At least two secondary magnetic poles spaced apart from each other, the two secondary magnetic poles adjacent to each other and the transport base being formed by a pair of connecting members, the transport being performed according to the interval between the two secondary magnetic poles. It proposes an in-vacuum container transfer device in which a table is connected so as to move in a direction intersecting the transfer passage.

The invention according to claim 4 is the transfer apparatus in a vacuum container according to claim 3, wherein the pair of connecting members are two secondary magnetic poles adjacent to each other, and one end side thereof in the transfer direction. A pair of links attached with orthogonal axes, wherein the other ends of the pair of links are attached to the carrier according to the distance between the two secondary magnetic poles in a direction in which the carrier intersects the carrier passage. It proposes a transfer device in a vacuum container that is movably connected.

According to the in-vacuum transfer apparatus of the present invention, when two adjacent secondary magnetic poles are moved while maintaining a constant gap between them, the transfer base moves the secondary magnetic poles. It will move along the direction. Further, when the distance between the two secondary magnetic poles is changed, the carrier table moves in the direction intersecting the carrier passage.

Therefore, it is possible to move the carrier in a direction other than the moving direction of the secondary magnetic pole only by the armature and the secondary magnetic pole without using any other transfer mechanism. Then, the weight of the carrier can be reduced, and the driving force for moving the carrier can be saved. Also, for example,
A gate for loading and unloading the transported object in the vacuum container,
When provided in the direction intersecting the moving direction of the secondary magnetic pole,
By moving the carry-out table to the outside of the gate, it is possible to easily take in and out the carried-out object.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION A vacuum container transfer apparatus according to a first embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 2, the vacuum container transfer device 1 according to the present embodiment is disposed in a vacuum container 2, and has a transfer table 4 for holding and transferring a predetermined object 3 to be transferred, and a transfer table. Four
Secondary magnetic pole 5 fixed to the lower surface 4 a of the armature, an armature 6 movably arranged outside the vacuum container 2 along the outer wall surface 2 b of the vacuum container 2, and an armature movement for moving the armature 6. The mechanism 7 is provided.

The vacuum container 2 is provided with a gate 8 so that the transferred object 3 can be taken in and out of the vacuum container 2. On the lower surface 4a side of the carrier 4, the carrier 4
Orbit 9 for moving along the length direction of the vacuum container 2
Is provided.

The secondary magnetic pole 5 has, for example, as shown in FIG. 3, a plurality of permanent magnets 5b having different polarities on the holding member 5a.
Are sequentially and alternately arranged along the length direction of the track 9. Further, the armature 6 has a holding member 6a,
A plurality of cores 6b and coils 6c are provided, and magnetic poles are formed in each core 6b by energizing the coils 6c. The magnetic pole of each core 6b can be switched by controlling the energization of the coil 6c. The secondary magnetic pole 5 and the armature 6 form a linear motor 20.

Further, the secondary magnetic pole 5 and the armature 6 constituting the linear motor 20 may be those as shown in FIG. 3 (b). That is, the secondary magnetic pole 5 has pole teeth 5c arranged at regular intervals in place of the permanent magnet 5b, and the armature 6 embeds a thin plate-shaped permanent magnet 6d in the core 6b and a coil in the core 6b. 6c may be wound around. In this configuration, the magnetic path H is provided between the secondary magnetic pole 5 and the armature 6.
In the case where is formed, the secondary magnetic pole 5 moves in the I direction.

The armature moving mechanism 7, as shown in FIG.
The rotary motor 11 serving as a drive source, a ball screw 12 connected to the rotary shaft of the rotary motor 11, and a female screw portion 13 screwed to the ball screw 12. The ball screw 12 is arranged in a direction parallel to the linear motion bearing 9,
The armature 6 is fixed to the female screw portion 13.
Therefore, when the rotary motor 11 rotates, the armature 6 moves in the length direction of the ball screw 12 together with the female screw portion 13.

A position sensor (position detecting means) 14 for detecting position information of the transfer table 4 is provided on the carrier table 4, and a position sensor (position detecting means) for detecting position information of the armature 6 is provided on the armature 6. No.) are provided respectively, and these two position sensors are connected to the control device 15 that controls the rotary motor 11 and the armature 6.

Here, the position sensor 14 is provided with a device for transmitting the position information of the carrier 4 from the inside of the vacuum container 2 to the outside, and includes an optical switch, an optical distance meter,
It may be a magnetic sensor, a resolver, or the like. In addition to the position sensor 14, for example, a transparent portion may be provided in the vacuum container 2 and an optical type, an eddy current type, or a camera may be used for sensing from the outside.

Based on the position information of the carrier 4 and the armature 6 detected by the two position sensors, the controller 15
The armature 6 is controlled to finely control the position of the secondary magnetic pole 5. For example, in the case of the linear motor 20 shown in FIG. 3A, the position of the secondary magnetic pole 5 is controlled by switching the magnetic pole of the armature 6.

The operation of the in-vacuum-container transfer device 1 thus constructed will be described below. That is, when the rotary motor 11 is driven, as shown in FIG. 4, the ball screw 12 rotates in the B direction and the armature 6 moves in the A direction together with the female screw portion. At this time, the carrier 4 moves in the direction A following the armature 6 together with the secondary magnetic pole 5 so that the armature 6 and the secondary magnetic pole 5 attract each other.

During this movement, the relative position between the carrier 4 and the armature 6 is detected by two position sensors, and the controller 15 controls the position of the secondary magnetic pole 5.
The relative position between the armature 6 and the armature 6 can be kept constant.

When the carrier table 4 reaches a target position and stops, the position of the carrier table 4 is detected by the position sensor 10 and the position of the secondary magnetic pole is controlled by the controller, whereby the carrier table 4 is stopped. Can move minutely and stop at an appropriate position.

As described above, according to the in-vacuum-container transfer device 1 of the present embodiment, the transfer table 4 can be moved by forming the linear motor 20 with the wall of the vacuum container 2 sandwiched therebetween. it can. Therefore, since the position of the secondary magnetic pole 5 is finely controlled by the control of the control device 15, the positional accuracy of the carrier table 4 with respect to the position of the armature 6 is maintained regardless of the friction between the carrier table 4 and the track 9. Can be improved.

While the armature 6 is moving, the controller 15 finely controls the position of the secondary magnetic pole 5,
It becomes possible to move the carrier 4 at a constant speed.
Therefore, the transported object 3 can be safely transported. Further, the position of the secondary magnetic pole 5 can be finely controlled by the control device 15, and the carrier table 4 can be stopped at a target stop position with high accuracy and in a short time.

Further, since the linear motor 20 constitutes a moving mechanism of the carrier, the armature moving mechanism 7 is
Since the high control accuracy is not required, the position sensor accuracy of the armature 6 is not required, and the in-vacuum container transfer device 1 can be configured at low cost.

In the present embodiment, the track 9 is linearly formed, but the structure is not limited to this and may be curved according to the shape of the vacuum container 2. Further, the trajectory 9 is not limited to being arranged on the two-dimensional plane, but may be arranged on the two-dimensional curved surface. Therefore,
For example, the tracks 9 may be circularly arranged on a plane, or may be arranged on the circumferential surface of a cylinder.

Further, although it is assumed that the carrier 4 and the secondary magnetic pole 5 move along the track 9, the present invention is not limited to this. For example, the carrier 4 may be provided with wheels to follow the inner wall surface of the vacuum container 2. You may move it. Further, the armature moving mechanism 7 is configured to include the rotary motor 11, the ball screw 12, and the female screw portion 13, but the armature moving mechanism 7 is not limited to this. Good. Also,
It may be configured by a linear motor or a fluid direct acting cylinder.

When a rotary motor is used as a drive source of the armature moving mechanism 7, the position detection of the armature 6 is not limited to the position sensor provided in the armature, and, for example, in a rotary motor or the like. The position of the armature 6 may be detected. Further, the relative position of the linear motor 20 is detected by the position sensors on both the carrier 4 and the armature 6, but the present invention is not limited to this, and the armature 6 may be directly detected. That is, the position of the secondary magnetic pole 5 in the vacuum container 2 may be detected by the position sensor in the armature 6 to determine the mutual positional relationship.

Next, a vacuum container transfer device according to a second embodiment of the present invention will be described below. In the description of the transfer device in the vacuum container according to the present embodiment, the portions having the same configurations as those of the transfer device 1 in the vacuum container according to the first embodiment described above are denoted by the same reference numerals, and description thereof will be omitted. I will do it.

The vacuum container transfer device 21 according to the present embodiment
As shown in FIG. 4 and FIG.
Is provided, and the pair of sliders 22 and 23 can run along the extending direction of the track 9. Secondary magnetic poles 5 are attached to the lower surfaces 22a and 23a of the sliders 22 and 23, respectively. Further, on the upper surfaces 22b, 23b of the sliders 22, 23, one end sides 24a, 2 of the first and second links (connecting members) 24, 25 are provided.
5a are attached to be swingable around an axis C orthogonal to the extending direction of the track 9. Further, the other ends 24b and 25b of the first and second links 24 and 25 are attached to the carrier 4 so as to be swingable around the axis C.

In this embodiment, FIG.
As in the first embodiment shown in FIG. 2, the controller 15 is provided, and the controller 15 finely controls the position of the secondary magnetic pole 5 so that the mutual distance between the sliders 22 and 23 can be controlled. Has become. In addition, the sliders 22 and 23
The armature 6 for moving the armature is moved by the armature moving mechanism 7 along the wall portion 2c of the vacuum container 2. The armature moving mechanism 7 is provided below the armature 6.
It is composed of two linear motors 20.

The operation of the vacuum container transporting device 21 thus constructed will be described below. Similar to the first embodiment, when the carrier 4 is transported in the direction A, the controller 15 controls the distance between the sliders 22 and 23 to move the carrier 4 along the length direction of the track 9. It can be moved in the width direction (DE direction) orthogonal to the transport path.

That is, as shown in FIG. 5, the first and second
When the links 24 and 25 are in the positions shown by the solid lines, the carrier 4 is located in the middle of the two tracks 9. If the sliders 22 and 23 are moved in the A direction while maintaining the distance between the sliders 22 and 23 in this state, the carrier table 4 can be moved in the A direction while being kept in the middle of the track 9. become. On the other hand, as indicated by the chain double-dashed line, when the distance between the sliders 22 and 23 is reduced by the control device 15, the carrier table 4 moves in the D direction.

As described above, according to the in-vacuum container transfer device 21 of the present embodiment, the transfer table 4 can be moved in the width direction (DE direction) of the transfer path.
As shown in FIG. 8, when the process chamber 31 is provided through the gate 8 of the vacuum container 2, each process chamber 3
It is possible to perform various necessary operations by moving the carrier table 4 on which the object to be transferred 3 is mounted side by side. Further, since it is not necessary to separately provide a transfer mechanism for laterally transferring the transfer table 4, it is possible to reduce the weight of the transfer table 4 and save the driving force for transferring the transfer table 4.

Although the armature moving mechanism 7 for moving the two armatures 6 is composed of the two linear motors 20 in the present embodiment, the present invention is not limited to this. As shown, one linear motor 2
It may be configured by 0. In this case, the lengths of the two armatures 6 fixed to the armature moving mechanism 7 at regular intervals are increased along the moving direction of the sliders 22 and 23, and the sliders 22 and 23 move. You can widen the range.

Although the first and second links 24 and 25 are used as a structure for moving the carrier 4 to the side of the track 9, the structure is not limited to this, and the carrier 4 is not limited to this structure.
Any configuration may be used as long as it is moved laterally. In addition, the carrier 4
Was moved in the DE direction orthogonal to the track 9, but the present invention is not limited to this, and it is sufficient if it can be moved in the direction intersecting the track 9. Therefore, for example, a mechanism that moves in a direction intersecting the track 9 may be configured so that the transport table 4 is rotated by a rack and pinion.

Further, although the one carriage 4 is moved by the two sliders 22 and 23 in the direction intersecting the track 9 (DE direction), the present invention is not limited to this configuration.
For example, as shown in FIG. 8, three sliders 22, 2
It is also possible to adopt a configuration in which the two conveyors 4 and 4 are moved in the DE direction by 3, 26. In this case, the two sliders 22 and 23 adjacent to each carrier 4 or the slider 2
3, 26, so that each carrier 4 can move independently,
Each is controlled independently. With this configuration, the number of sliders that move the plurality of transfer tables 4 can be saved, so that the manufacturing cost and maintenance cost of the vacuum container transfer device 21 can be reduced.

Further, the sliders 22 and 23 have the orbit 9
Although it is assumed that the vacuum container 2 is moved along with the vacuum container 2 as described above, the sliders 22 and 23 are provided with wheels.
You may move along the inner wall surface of. Further, the first and second links 24 and 25 are swingably connected to the carriage 4, but the invention is not limited to this, and at least one of the links swings with respect to the carriage 4. It only needs to be movably connected.

Although the embodiment of the present invention has been described in detail above with reference to the drawings, the specific configuration is not limited to this embodiment, and includes design changes and the like within the scope not departing from the gist of the present invention. Be done.

[0046]

As described above, according to the invention of claim 1, since the linear motor is constituted by the secondary magnetic pole and the armature, the positional accuracy of the carrier with respect to the position of the armature is improved. Can be made. In addition, since it is possible to move the carrier table at a constant speed, it is possible to safely transport the object to be transported.

According to the second aspect of the present invention, the control device controls the switching of the magnetic poles of the armature, whereby the positional accuracy of the carriage with respect to the position of the armature can be further improved. The carrier table can be accurately stopped at the intended stop position in a short time.

Further, according to the third and fourth aspects of the invention, when the interval between the two secondary magnetic poles adjacent to each other is changed, the carrier can be moved in the direction intersecting the carrier passage. Therefore, it is possible to reduce the weight of the transfer table, to save the driving force for moving the transfer table, and to reduce the maintenance cost of the vacuum container transfer device. In addition, by moving the carry-out table to the outside of the gate, it is possible to easily take in and out the carried-out object.

[Brief description of drawings]

FIG. 1 is a front view showing a transfer device in a vacuum container according to a first embodiment of the present invention.

FIG. 2 is a plan view of the transfer device in the vacuum container of FIG.

FIG. 3 is an explanatory view showing an example of a linear motor configured by a secondary magnetic pole and an armature in the vacuum container transfer device of FIG. 1, in which (a) uses a permanent magnet as the secondary magnetic pole, (B) shows the arrangement of pole teeth.

FIG. 4 is a front view showing the operation of the vacuum container transfer device of FIG. 1.

FIG. 5 is a plan view showing a transfer device in a vacuum container according to a second embodiment of the present invention.

6 is a front sectional view of the transfer device in the vacuum container of FIG.

FIG. 7 is a front sectional view of a transfer device in a vacuum container according to another embodiment.

FIG. 8 is a plan view of a transfer device in a vacuum container according to another embodiment.

[Explanation of symbols]

1,21 Vacuum container transfer device 2 vacuum container 3 Objects to be transported 4 carrier 5 Secondary magnetic pole 6 armature 7 Armature movement mechanism 15 Control device 24 1st link (connecting member) 25 Second Link (Connecting Member)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Ichiji Kato             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Makoto Omori             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Toshio Miki             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Atsushi Okuno             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Nobuo Ariga             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Yasuhiro Nakai             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. (72) Inventor Katsuyoshi Nakano             100, Takegahana Town, Ise City, Mie Prefecture             Ise Manufacturing Co., Ltd. F-term (reference) 5F031 CA02 FA01 FA07 GA57 GA64                       KA10 LA08 NA05 PA23

Claims (4)

[Claims] 1. A transfer table arranged in a vacuum container for holding and transferring a predetermined object to be transferred; a secondary magnetic pole connected to the transfer table; and a wall surface of the vacuum container outside the vacuum container. An in-vacuum-vessel transfer device, comprising: an armature movably arranged along the armature; and an armature moving mechanism for moving the armature. 2. The vacuum container according to claim 1, further comprising a controller that controls the position of the secondary magnetic pole by the armature based on the position information of the secondary magnetic pole and the position information of the armature. Internal transport device. 3. The secondary magnetic pole comprises at least two secondary magnetic poles which are arranged on the transport passage of the transport base at positions spaced in the transport direction of the transport base, and two secondary magnetic poles adjacent to each other. 3. The carrier and the carrier are connected by a pair of connecting members so that the carrier moves in a direction intersecting with the carrier passage according to a distance between the two secondary magnetic poles. The transfer device in the vacuum container according to. 4. The pair of linking members is a pair of links, one end of which is attached to two secondary magnetic poles adjacent to each other with an axis line orthogonal to the transport direction, and the other end of the pair of links is 4. The transport base is connected to the transport base so as to move in a direction intersecting the transport passage in accordance with a distance between the two secondary magnetic poles.
The transfer device in the vacuum container according to.