TW201318074A - Fabricating method of semiconductor element - Google Patents
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- TW201318074A TW201318074A TW100139455A TW100139455A TW201318074A TW 201318074 A TW201318074 A TW 201318074A TW 100139455 A TW100139455 A TW 100139455A TW 100139455 A TW100139455 A TW 100139455A TW 201318074 A TW201318074 A TW 201318074A
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本案係為一種半導體元件製造方法,尤指應用於積體電路製程中之半導體元件製造方法。The present invention relates to a method of manufacturing a semiconductor device, and more particularly to a method of fabricating a semiconductor device in an integrated circuit process.
請參見圖1A與圖1B,其表示出在積體電路晶片上部份元件之佈局俯視示意圖,主要表示出金氧半電晶體之主動區域10以及閘極導體構造11、12,而由於電路佈局之需要,便會產生分別如圖1A與圖1B中不同延伸方向的閘極導體構造11、12。位於閘極導體構造11、12兩側之主動區域10是源/汲極區域,而被閘極導體構造11、12覆蓋之主動區域10便是通道之所在。因此,閘極導體構造11、12之寬度W1、W2基本上便可定義出通道的長度。1A and FIG. 1B, which are schematic top plan views showing the layout of some components on the integrated circuit wafer, mainly showing the active region 10 of the MOS transistor and the gate conductor structures 11, 12, due to the circuit layout. As needed, gate conductor structures 11, 12, respectively, having different extension directions as in Figures 1A and 1B, respectively, are produced. The active regions 10 on either side of the gate conductor structures 11, 12 are source/drain regions, and the active regions 10 covered by the gate conductor structures 11, 12 are where the channels are located. Thus, the widths W1, W2 of the gate conductor structures 11, 12 substantially define the length of the channel.
而由於電路設計上的需求,同一積體電路晶片上需要有不同通道長度的金氧半電晶體來提供不同的電路特性,例如導通電流Ion,因此,閘極導體構造11、12之寬度W1、W2便有變化的需求。另外,透過定義源/汲極區域時所進行之離子佈植角度的改變,也可改變金氧半電晶體的電路特性。Due to the design requirements of the circuit, MOS transistors of different channel lengths are required on the same integrated circuit chip to provide different circuit characteristics, such as the on current Ion, and therefore, the width W1 of the gate conductor structures 11, 12. W2 has changing needs. In addition, the circuit characteristics of the MOS transistor can also be changed by changing the ion implantation angle when the source/drain region is defined.
但因元件尺寸越來越小,因此閘極導體構造11、12之寬度W1、W2也隨之縮小,幾乎已經到達曝光顯影技術解析度的極限,而為能降低閘極導體構造關鍵尺寸(Critical Dimension,簡稱CD)的變異程度,一種雙極曝光技術(dipole exposure)便被發展出來,其係改變曝光用雷射光源之光源形狀,將原本如同甜甜圈之光源形狀,改成如圖2所示之光源形狀20,用以加強沿圖中箭頭22方向(平行於y方向)的曝光效果,但伴隨而來的便是沿圖中箭頭21方向(垂直於y方向)曝光效果的衰減。因此,若以圖2所示之光源形狀20來進行曝光,圖1A中平行於y方向之閘極導體構造11之關鍵尺寸(Critical Dimension,簡稱CD)的變異程度將可得到有效控制,但圖1B中垂直於y方向之閘極導體構造12之寬度W2將因曝光效果的衰減而無法下降到應有的水準,也就是寬度W2無法達到所需的關鍵尺寸。但是,依現今製程之需求,閘極導體構造12之寬度要求已經到達更小的關鍵尺寸,因此圖1B中通道長度為更小的關鍵尺寸之金氧半電晶體將無法利用圖2所示之光源形狀20來完成,此種製造方法的限制將造成產品設計不具彈性。而如何改善此類缺失,便是發展本案之主要目的。However, as the size of the components is smaller and smaller, the widths W1 and W2 of the gate conductor structures 11 and 12 are also reduced, and the limit of the resolution of the exposure and development technology is almost reached, and the critical dimension of the gate conductor structure can be reduced (Critical) The degree of variation of Dimension (CD), a dipole exposure technique, was developed to change the shape of the source of the laser source for exposure, and to change the shape of the light source like the doughnut to Figure 2. The light source shape 20 is shown to enhance the exposure effect in the direction of the arrow 22 (parallel to the y direction) in the figure, but with the accompanying effect of the attenuation of the exposure effect in the direction of the arrow 21 (perpendicular to the y direction) in the figure. Therefore, if the light source shape 20 shown in FIG. 2 is used for exposure, the degree of variation of the critical dimension (CD) of the gate conductor structure 11 parallel to the y direction in FIG. 1A can be effectively controlled, but The width W2 of the gate conductor structure 12 perpendicular to the y-direction in 1B will not fall to the desired level due to the attenuation of the exposure effect, that is, the width W2 cannot reach the required critical dimension. However, according to the requirements of the current process, the width requirement of the gate conductor structure 12 has reached a smaller critical dimension, so the gold oxide semi-transistor having a smaller critical length of the channel in FIG. 1B cannot be utilized as shown in FIG. The shape of the light source is 20, and the limitations of this manufacturing method will result in a product design that is not flexible. How to improve such a deficiency is the main purpose of the development of this case.
本發明之一目的在於提供一種半導體元件的製作方法,其可於雙極曝光技術(dipole exposure)的限制下,仍可完成兩個軸向的積體電路佈線,進而增加元件製作的彈性。An object of the present invention is to provide a method for fabricating a semiconductor device which can complete two axial integrated circuit wirings under the limitation of a dipole exposure technique, thereby increasing the flexibility of component fabrication.
本發明的一實施例中,一種半導體元件製造方法,包含下列步驟:提供一基板;於基板上方形成具有一第一寬度之一第一佈線結構;於具有第一寬度之第一佈線結構之上方形成一蝕刻罩幕,用以露出部份之該第一佈線結構;以及利用蝕刻罩幕對第一佈線結構進行一蝕刻製程,用以形成具有一第二寬度之一第二佈線結構,其中該第二寬度小於該第一寬度。In one embodiment of the invention, a method of fabricating a semiconductor device includes the steps of: providing a substrate; forming a first wiring structure having a first width over the substrate; above the first wiring structure having the first width Forming an etching mask to expose a portion of the first wiring structure; and etching the first wiring structure by using an etching mask to form a second wiring structure having a second width, wherein the The second width is less than the first width.
於本發明另一實施例中,上述基板為一矽基板,第一佈線結構為一第一多晶矽閘極結構,第二佈線結構為一第二多晶矽閘極結構。In another embodiment of the invention, the substrate is a germanium substrate, the first wiring structure is a first polysilicon gate structure, and the second wiring structure is a second polysilicon gate structure.
於本發明另一實施例中,形成該第一多晶矽閘極結構之方法包含下列步驟:於已形成有一主動區域之基板上方形成一多晶矽閘極層與一第一光阻層;使用一第一光罩定義第一光阻層而形成一第一光阻罩幕;及使用第一光阻罩幕定義該多晶矽閘極層而形成第一多晶矽閘極結構。In another embodiment of the present invention, a method of forming the first polysilicon gate structure includes the steps of: forming a polysilicon gate layer and a first photoresist layer over a substrate on which an active region has been formed; The first mask defines a first photoresist layer to form a first photoresist mask; and the first photoresist mask is used to define the polysilicon gate layer to form a first polysilicon gate structure.
於本發明另一實施例中,使用第一光罩定義第一光阻層時進行之一曝光製程為一雙極曝光技術(dipole exposure)。In another embodiment of the invention, one of the exposure processes is a dipole exposure when the first photoresist is used to define the first photoresist layer.
於本發明另一實施例中,上述基板為一矽基板,第一佈線結構為一第一主動區域,第二佈線結構為一第二主動區域。In another embodiment of the present invention, the substrate is a germanium substrate, the first wiring structure is a first active region, and the second wiring structure is a second active region.
於本發明另一實施例中,形成該第一主動區域之方法包含下列步驟:於基板上方形成一第一光阻層;使用一第一光罩定義第一光阻層而形成一第一光阻罩幕;使用第一光阻罩幕定義基板而形成複數個淺溝槽以及被淺溝槽包圍之第一主動區域。In another embodiment of the present invention, the method for forming the first active region includes the steps of: forming a first photoresist layer over the substrate; defining a first photoresist layer using a first mask to form a first light a mask: defining a substrate using a first photoresist mask to form a plurality of shallow trenches and a first active region surrounded by shallow trenches.
於本發明另一實施例中,形成蝕刻罩幕之方法包含下列步驟:於已形成有第一佈線結構之基板上方形成一第二光阻層;以及使用一第二光罩定義第二光阻層而形成蝕刻罩幕。In another embodiment of the present invention, a method of forming an etch mask includes the steps of: forming a second photoresist layer over a substrate on which the first wiring structure has been formed; and defining a second photoresist using a second mask The layers form an etch mask.
於本發明另一實施例中,於基板上方形成具有第一寬度之第一佈線結構之同時,於主動區域上方形成具有一第三寬度之第三佈線結構,第三佈線結構之延伸方向與該第一佈線結構之延伸方向基本上呈正交。In another embodiment of the present invention, a first wiring structure having a first width is formed over the substrate, and a third wiring structure having a third width is formed over the active region, and the extending direction of the third wiring structure is The extending direction of the first wiring structure is substantially orthogonal.
於本發明另一實施例中,上述第三寬度小於該第一寬度。In another embodiment of the invention, the third width is less than the first width.
上述半導體元件的製造方法,通過使用露出部分閘極結構的蝕刻罩幕配合蝕刻製程,可於雙極曝光技術(dipole exposure)的限制下,仍可完成兩個軸向的積體電路佈線,進而增加元件製作的彈性。In the above method for manufacturing a semiconductor device, by using an etching mask which exposes a part of the gate structure and an etching process, two axial integrated circuit wirings can be completed under the limitation of dipole exposure, and further Increase the flexibility of component fabrication.
而為能改善習用手段中閘極導體構造寬度無法有效縮小之缺失,本案便提出如圖3A至圖3C中所示之半導體元件製造方法的步驟示意圖,首先,圖3A表示出矽基板3已完成有主動區域30、第一閘極導體構造31以及第三閘極構造31’,其中主動區域30可由矽基板3上形成之淺溝槽隔離結構(Shallow Trench Isolation,簡稱STI,本圖未示出)所包圍定義而成,用以完成金氧半電晶體中之源/汲極區域與通道區域。而被第一閘極導體構造31覆蓋之主動區域30便是通道區域之所在。而第一閘極導體構造31可由下列步驟完成:於已形成有主動區域30之該基板3上方形成多晶矽閘極層(本圖未示出)與第一光阻層(本圖未示出),使用第一光罩定義該第一光阻層而形成第一光阻罩幕(本圖未示出),使用該第一光阻罩幕定義該多晶矽閘極層而形成閘極導體構造,其中包含分別朝x方向與y方向延伸之第一閘極導體構造31與第三閘極導體構造31’。In order to improve the lack of effective reduction of the gate conductor structure width in the conventional means, the present invention proposes a schematic diagram of the steps of the semiconductor device manufacturing method shown in FIGS. 3A to 3C. First, FIG. 3A shows that the germanium substrate 3 has been completed. There is an active region 30, a first gate conductor structure 31 and a third gate structure 31', wherein the active region 30 can be formed by a shallow trench isolation structure (STI, which is not shown in the figure). The enclosure is defined to complete the source/drain regions and channel regions in the MOS transistor. The active region 30 covered by the first gate conductor structure 31 is where the channel region is located. The first gate conductor structure 31 can be completed by forming a polysilicon gate layer (not shown in this figure) and a first photoresist layer (not shown in the figure) above the substrate 3 on which the active region 30 has been formed. Defining the first photoresist layer using a first mask to form a first photoresist mask (not shown in the figure), using the first photoresist mask to define the polysilicon gate layer to form a gate conductor structure, The first gate conductor structure 31 and the third gate conductor structure 31' extending in the x direction and the y direction, respectively, are included.
當利用雙極曝光技術(dipole exposure)來定義第一閘極導體構造31與第三閘極導體構造31’,其中第三閘極導體構造31’之延伸方向(y方向)與雙極曝光技術中使用的雷射光源形狀之延伸方向(y方向)平行,如圖3A左半部所示,因此第三閘極導體構造31’之寬度D1’可縮小到預定的數值,例如120 nm。但因第一閘極導體構造31之延伸方向(x方向)與雙極曝光技術中使用的雷射光源形狀之延伸方向(y方向)並不平行甚或呈正交時,如圖3A右半部所示,將會造成第一閘極導體構造31之寬度D1無法達到所需的較小的CD需求。而為能增加設計的彈性,本案利用另一道光罩微影製程來形成如圖3B中所示之蝕刻罩幕32,例如,於已形成有第一閘極導體構造31與第三閘極導體構造31’之該基板3上方於形成第二光阻層(本圖未示出),然後使用第二光罩定義該第二光阻層而形成該蝕刻罩幕32,用以露出部份之第一閘極導體構造31。而此道光罩微影製程中所使用之曝光技術並改採傳統的圓形光源來進行曝光,而非利用雙極曝光技術(dipole exposure),因此並不會有曝光效果衰減的問題。When the first gate conductor structure 31 and the third gate conductor structure 31' are defined by dipole exposure, wherein the third gate conductor structure 31' extends in the direction (y direction) and the bipolar exposure technique The extending direction (y direction) of the shape of the laser light source used is parallel, as shown in the left half of FIG. 3A, so that the width D1' of the third gate conductor structure 31' can be reduced to a predetermined value, for example, 120 nm. However, since the extending direction (x direction) of the first gate conductor structure 31 is not parallel or even orthogonal to the extending direction (y direction) of the shape of the laser light source used in the bipolar exposure technique, as shown in the right half of FIG. 3A. As shown, this will cause the width D1 of the first gate conductor construction 31 to fail to achieve the desired smaller CD requirements. In order to increase the flexibility of the design, another reticle lithography process is used to form the etch mask 32 as shown in FIG. 3B, for example, the first gate conductor structure 31 and the third gate conductor have been formed. Forming a second photoresist layer (not shown in the figure) on the substrate 3 of the structure 31', and then defining the second photoresist layer using a second mask to form the etching mask 32 for exposing a portion The first gate conductor construction 31. The exposure technology used in the reticle lithography process uses a conventional circular light source for exposure instead of dipole exposure, so there is no problem that the exposure effect is attenuated.
接著,利用該蝕刻罩幕32對露出之部份第一閘極導體構造31進行一蝕刻製程,用以形成如圖3C中所示,具有寬度D2之第二閘極導體構造33,由圖可明顯看出,其中D2小於D1。而為能突破解析度之限制,習知手段中已有兩道光罩-兩道蝕刻(簡稱2P2E)的技術被應用到積體電路佈線之製作過程中,因此本案增加之另一道光罩微影製程便可整合於2P2E中之第二道光罩及第二道蝕刻來完成,並不會增加製程步驟。Then, the exposed portion of the first gate conductor structure 31 is etched by the etching mask 32 to form a second gate conductor structure 33 having a width D2 as shown in FIG. 3C. It is apparent that D2 is smaller than D1. In order to overcome the limitation of resolution, two masks have been used in the conventional method - two etching (2P2E) technology is applied to the production process of integrated circuit wiring, so another reticle lithography added in this case The process can be integrated into the second mask and the second etch in the 2P2E without adding process steps.
另外,本案技術除了可以應用於閘極導體構造之製作外,也可應用於其它類似的佈線結構,例如被淺溝槽包圍之主動區域。In addition, the technology of the present invention can be applied to other similar wiring structures, such as active regions surrounded by shallow trenches, in addition to the fabrication of the gate conductor structure.
綜上所述,在本發明對技術進行改良後,已可有效改善習用手段的問題,進而可於雙極曝光技術(dipole exposure)的限制下,仍可完成兩個軸向的積體電路佈線,進而增加元件製作的彈性。In summary, after the technology of the present invention is improved, the problem of the conventional means can be effectively improved, and the two axial integrated circuit wiring can be completed under the limitation of the dipole exposure technique. , thereby increasing the flexibility of component fabrication.
雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
10、30...主動區域10, 30. . . Active area
11、12...閘極導體構造11,12. . . Gate conductor construction
20...光源20. . . light source
21、22...箭頭21, 22. . . arrow
3...矽基板3. . .矽 substrate
31...第一閘極導體構造31. . . First gate conductor construction
32...蝕刻罩幕32. . . Etching mask
33...第二閘極導體構造33. . . Second gate conductor construction
31’...第三閘極導體構造31’. . . Third gate conductor construction
W1、W2、D1、D2、D1’...寬度W1, W2, D1, D2, D1'. . . width
圖1A~1B,其表示出在積體電路晶片上部份元件之佈局俯視示意圖1A to 1B, which are schematic top views showing the layout of some components on an integrated circuit wafer.
圖2,其係雙極曝光技術中光源形狀示意圖。Figure 2 is a schematic diagram showing the shape of a light source in a bipolar exposure technique.
圖3A~3C,其係本案揭露之半導體元件製造方法的步驟示意圖。3A-3C are schematic diagrams showing the steps of a method for fabricating a semiconductor device disclosed in the present disclosure.
30...主動區域30. . . Active area
31...第一閘極導體構造31. . . First gate conductor construction
31’...第三閘極導體構造31’. . . Third gate conductor construction
32...蝕刻罩幕32. . . Etching mask
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