201244833 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明是關於對基板（substrate)吐出並塗佈塗佈 液之塗佈裝置（coating machine)及塗佈方法。 【先前技#ί】 [0002] 在太陽電池板（solar ce 11 pane 1)使用用以進行 光電轉換的基板，該基板是經過對玻璃基板（glass substrate)塗佈規定的塗佈液並形成塗膜的製程而製造 D 。 為了形成該塗膜，可使用具備在寬度方向具有由長 的開縫（slit)構成的吐出口的開缝喷嘴（slit nozzle) 之塗佈裝置（例如參照專利文獻1)，由前述吐出口對基板 吐出塗佈液，在基板上形成由塗佈液形成的塗膜。 被塗佈於玻璃基板上之由塗佈液形成的塗膜有因塗 佈液的特性等而大大地擠出到比吐出口還靠寬度方向兩 側而形成的情形，此情形該擠出部分，亦即塗膜的寬度 Q 方向兩側部分的膜厚變薄。此點可考慮為由於開縫模頭 (slit die)的吐出口開口的下端面與基板之間的餘隙 (clearance)非常小，故被吐出的塗佈液透過開縫模頭 的下端面與基板之間的毛細管現象而由吐出口的寬度方 向兩側端部更進一步大大地擠出到外侧。 因此，在記載於前述專利文獻1的裝置中，在吐出口 的寬度方向兩側的延長部分設有缺口（notch)(或段差） ，抑制所吐出的塗佈液擴展於寬度方向。 [專利文獻1]日本國特開平6-1 70306號公報 10110557#單編號廳01 第3頁/共28頁 1013209103-0 201244833 【發明内容】 [0003] 依照前述專利文獻1，可抑制由所塗佈的塗佈液形成 的塗膜之寬度方向尺寸對所需的值變動。但是，此點僅 在來自開縫的塗佈液的吐出寬為一定（固定）的情形才可 能，為了變更吐出寬，需更換開缝模頭。若更換開缝模 頭，則需重新調整吐出口開口的下端面與基板之間的餘 隙，吐出寬的變更需要勞力時間。 因此，本發明的目的為提供一種塗佈裝置及塗佈方 法，塗佈寬的變更容易，且可抑制由所塗佈的塗佈液形 成的塗膜的寬度方向尺寸的變動。 本發明的塗佈裝置其特徵包含：在寬度方向形成有由 長的開縫構成的吐出口，由該吐出口對基板吐出並塗佈 塗佈液之開縫喷嘴；使前述開縫喷嘴與前述基板相對地 移動於正交於前述寬度方向的前後方向之驅動部；配設 於前述開縫，藉由在寬度方向移動於該開缝内，變更前 述吐出口的寬度方向尺寸之吐出寬變更構件；具有對由 前述吐出口吐出的塗佈液的寬度方向兩外側的區域喷塗 空氣之空氣喷嘴（air nozzle)，可依照前述吐出口的寬 度方向尺寸的變更進行藉由該空氣噴嘴進行的空氣的喷 塗位置的調整之空氣供給單元。 而且，本發明為一種塗佈方法，透過前述塗佈裝置 將由塗佈液形成的塗膜形成於基板，其特徵為：藉由前述 吐出寬變更構件的位置調整，與藉由前述空氣供給單元 所具有的前述空氣喷嘴進行的空氣的噴塗位置的調整規 定前述塗膜的寬度方向尺寸。 依照本發明的塗佈裝置及塗佈方法，因空氣供給單 10110557^^ A〇101 第4頁/共28頁 1013209103-0 201244833 元所具有的空氣喷嘴對由吐出口吐出的塗佈液的寬度方 向兩外侧的區域喷塗空氣，故可透過該空氣，防止形成 於基板上之由塗佈液形成的塗膜擴展於寬度方向，因此 可抑制塗膜的寬度方向尺寸的變動。再者，可藉由透過 吐出寬變更構件變更吐出口的寬度方向尺寸而容易變更 吐出寬，而且因可藉由空氣供給單元，依照吐出口的寬 度方向尺寸的變更進行藉由空氣喷嘴進行的空氣的喷塗 位置的調整，故即使變更吐出寬，抑制塗膜的寬度方向 的尺寸的變動的功能也被維持。 而且，前述吐出寬變更構件包含 突出部，比前述開縫喷嘴的前述吐出口開口的端面 還突出於前述基板侧，並且在朝寬度方向外侧離開前述 基板的方向具有對基板成陡峭的傾斜的形狀較佳。 由所塗佈的塗佈液形成的塗膜的寬度方向尺寸變動 的原因除了塗佈液擴展於寬度方向之外，也有因塗佈液 的特性或開縫喷嘴的吐出口開口的端面與基板之間的餘 隙而使吐出的塗佈液在寬度方向變窄（塗佈液被拉到寬度 方向中央侧）。但是，藉由突出部突出於基板側，透過該 突出部捕獲塗佈液，可抑制塗膜的寬度方向尺寸變動。 進而因突出部在朝寬度方向外側離開基板的方向具有對 基板成陡峭的傾斜的形狀，故可藉由該形狀產生的邊緣 效應（edge effect)抑制塗佈液朝寬度方向擴展。此外 ，抑制該擴展的功能藉由前述空氣供給單元而被補強。 而且，前述空氣喷嘴的空氣喷出口在通過具有如下 要素的前述近旁區域後與前述基板相交的假想直線上具 有中心線較佳： 1()11{)557f單編號A0101 第5頁/共28頁 1013209103-0 201244833 由前述吐出口吐出的塗佈液的寬度方向兩外侧，且 具有相當於由前述基板到前述吐出口的餘隙的高度，且 具有包含前述開缝的前後方向的寬度的微小寬。 此情形，空氣可流過由吐出口吐出被塗佈於基板上 的塗佈液的寬度方向兩外側的近旁，可藉由該空氣的動 壓確實抑制塗佈液朝寬度方向外側擴展。此外，例如能 以將形成有塗膜的側的開縫喷嘴的唇形頂端面及開缝加 在一起的寬度（前後方向尺寸）當作前述[微小寬]。 而且，本發明的塗佈裝置其特徵包含：在寬度方向形 成有由長的開缝構成的吐出口，由該吐出口對基板吐出 並塗佈塗佈液之開縫喷嘴；使前述開縫喷嘴與前述基板 相對地移動於正交於前述寬度方向的前後方向之驅動部 :配設於前述開縫，藉由在寬度方向移動於該開縫内， 變更前述吐出口的寬度方向尺寸之吐出寬變更構件，前 述吐出寬變更構件包含：比前述開缝喷嘴的前述吐出口開 口的端面還突出於前述基板側，並且在朝寬度方向外側 離開前述基板的方向具有對基板成陡峭的傾斜的形狀的 突出部。 藉由本發明，可藉由透過吐出寬變更構件變更吐出 口的寬度方向尺寸而容易變更吐出寬，而且藉由該吐出 寬變更構件所具有的突出部比開縫喷嘴的吐出口開口的 端面還突出於基板側，所吐出的塗佈液透過該突出部捕 獲，可抑制塗膜的寬度方向尺寸變動。進而因突出部在 朝寬度方向外側離開基板的方向具有對基板成陡峭的傾 斜的形狀，故可藉由該形狀產生的邊緣效應，抑制塗佈 液朝寬度方向擴展。 單編號删1 第6頁/共28頁 1013209103-0 201244833 _]【發明的功效】 依照本發明，塗佈寬的變更容易，且可抑制由所塗 佈的塗佈液形成的塗膜的寬度方向尺寸變動。 【實施方式】 以下根據圖面說明本發明的實施的形態。201244833 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a coating machine and a coating method for discharging and applying a coating liquid to a substrate. [Previous Technology #ί] [0002] A solar cell panel (solar ce 11 pane 1) is used for performing photoelectric conversion, and the substrate is coated with a predetermined coating liquid on a glass substrate and formed into a coating. D is produced by the process of the film. In order to form the coating film, a coating device having a slit nozzle having a discharge port formed of a long slit in the width direction (for example, refer to Patent Document 1), and the discharge port pair may be used. The coating liquid is discharged from the substrate, and a coating film formed of the coating liquid is formed on the substrate. The coating film formed of the coating liquid applied to the glass substrate is formed by being extruded to the both sides in the width direction of the discharge port by the characteristics of the coating liquid or the like. In this case, the extrusion portion is formed. That is, the film thickness of both sides in the width Q direction of the coating film becomes thin. This point is considered to be because the clearance between the lower end surface of the discharge opening of the slit die and the substrate is very small, so that the discharged coating liquid passes through the lower end surface of the slit die and The capillary phenomenon between the substrates is further extruded to the outside from the both end portions in the width direction of the discharge port. Therefore, in the apparatus described in the above-mentioned Patent Document 1, a notch (or a step) is provided in an extended portion on both sides in the width direction of the discharge port, and the discharged coating liquid is prevented from expanding in the width direction. [Patent Document 1] Japanese Patent Laid-Open No. Hei 6-1 70306, No. 10110557# Single Number Hall 01, Page 3 of 28, 1013209103-0, 201244833 [Description of the Invention] [0003] According to the aforementioned Patent Document 1, it is possible to suppress the application by The width direction dimension of the coating film formed by the coating liquid of the cloth varies with a desired value. However, this point is only possible when the discharge width of the coating liquid from the slit is constant (fixed), and the slit die needs to be replaced in order to change the discharge width. If the slit die is replaced, the clearance between the lower end surface of the discharge opening and the substrate needs to be re-adjusted, and the change in the discharge width requires labor time. Accordingly, it is an object of the present invention to provide a coating apparatus and a coating method which are easy to change in coating width and which can suppress variations in the width direction dimension of a coating film formed by the applied coating liquid. The coating apparatus according to the present invention includes: a discharge port formed of a long slit in the width direction; a slit nozzle that discharges the substrate from the discharge port and applies a coating liquid; and the slit nozzle and the aforementioned The substrate is relatively moved by a driving portion that is orthogonal to the front-rear direction in the width direction, and is disposed in the slit, and the ejection width changing member that changes the width direction of the discharge port by moving in the slit in the width direction An air nozzle that sprays air on a region outside the width direction of the coating liquid discharged from the discharge port, and the air by the air nozzle can be changed in accordance with the change in the width direction of the discharge port. The air supply unit for the adjustment of the spray position. Further, the present invention provides a coating method in which a coating film formed of a coating liquid is formed on a substrate by the coating device, wherein the position adjustment of the discharge width changing member is performed by the air supply unit The adjustment of the spray position of the air by the air nozzle described above defines the width direction dimension of the coating film. According to the coating apparatus and the coating method of the present invention, the width of the coating liquid discharged from the discharge port by the air nozzle of the air supply unit 10110557^^ A〇101 4/28 pages 1013209103-0 201244833 Since the air is sprayed in the outer side of the direction, the air can be prevented from spreading in the width direction by the coating film formed on the substrate, so that the variation in the width direction of the coating film can be suppressed. In addition, the discharge width can be easily changed by changing the width direction of the discharge port by the discharge width changing member, and the air by the air nozzle can be changed by the air supply unit in accordance with the change in the width direction of the discharge port. Since the adjustment of the spraying position is performed, even if the discharge width is changed, the function of suppressing the variation in the dimension of the coating film in the width direction is maintained. Further, the discharge width changing member includes a protruding portion that protrudes from the substrate side more than the end surface of the discharge opening of the slit nozzle, and has a shape that is steeply inclined toward the substrate in a direction away from the substrate in the width direction outer side. Preferably. The reason why the dimension of the coating film formed by the applied coating liquid fluctuates in the width direction is not limited by the width of the coating liquid, but also the surface of the opening of the discharge nozzle of the slit nozzle and the substrate. The coating liquid to be discharged is narrowed in the width direction (the coating liquid is pulled to the center in the width direction). However, when the protruding portion protrudes from the substrate side and the coating liquid is captured through the protruding portion, the dimensional change in the width direction of the coating film can be suppressed. Further, since the protruding portion has a shape that is steeply inclined toward the substrate in the direction away from the substrate in the width direction, the edge effect caused by the shape can suppress the spread of the coating liquid in the width direction. Further, the function of suppressing the expansion is reinforced by the aforementioned air supply unit. Further, the air ejection port of the air nozzle has a center line on an imaginary straight line that intersects the substrate after passing through the vicinity of the element: 1 () 11 {) 557f single number A0101 page 5 / total 28 pages 1013209103-0 201244833 The coating liquid discharged from the discharge port has a height corresponding to the clearance from the substrate to the discharge port, and has a width which includes the width of the slit in the front-rear direction. . In this case, air can flow in the vicinity of both outer sides in the width direction of the coating liquid applied to the substrate by the discharge port, and the dynamic pressure of the air can surely prevent the coating liquid from spreading outward in the width direction. Further, for example, the width (front-rear direction dimension) at which the lip tip end surface and the slit of the slit nozzle on the side on which the coating film is formed can be regarded as the aforementioned [small width]. Further, the coating apparatus of the present invention is characterized in that: a discharge port formed of a long slit is formed in the width direction, and a slit nozzle for discharging a coating liquid from the discharge port is applied to the substrate; and the slit nozzle is formed a driving portion that moves in a front-rear direction orthogonal to the width direction with respect to the substrate: is disposed in the slit, and moves in the slit in the width direction to change a discharge width in a width direction of the discharge port In the change member, the discharge width changing member includes a shape that protrudes from the end surface of the discharge opening of the slit nozzle and protrudes from the substrate side, and has a shape that is steeply inclined toward the substrate in a direction away from the substrate in the width direction outer side. Highlights. According to the present invention, the discharge width can be easily changed by changing the width direction of the discharge port by the discharge width changing member, and the protruding portion of the discharge width changing member can be protruded from the end surface of the discharge opening of the slit nozzle. On the substrate side, the discharged coating liquid is caught by the protruding portion, and the dimensional change in the width direction of the coating film can be suppressed. Further, since the protruding portion has a shape which is steeply inclined toward the substrate in the direction away from the substrate in the width direction, the edge effect by the shape can suppress the spread of the coating liquid in the width direction. Single number deletion 1 Page 6 / 28 pages 1013209103-0 201244833 _] [Effect of the invention] According to the present invention, the coating width is easily changed, and the width of the coating film formed by the applied coating liquid can be suppressed. Direction size changes. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
圖1是顯示本發明的塗佈裝置的實施的一形態之概略 .。該塗佈裝置包含：基台1;配設於基台1之導引構件2 二可透過導引構件2移動於前後方向，可承載基板w之平 I(stage)3 ;使該平台3移動於前後方向之驅動部4。再 該塗佈裝置包含對平台3上的基細吐出並塗佈塗佈 縫噴嘴U。基板W為矩形的單片構件，在本實施形 ^中為太陽電池板用的玻璃基板。 導引構件2是將平台3導引於前後方向之導件 ’驅動部4使平台3移動於前後方向。驅動部4具 殊^藉由飼服馬達（咖° ―以未圖示）旋轉的滾 ^機構（ball screw mechanism)，可透過該滚珠 、于機構控制平的前後方向的移動及其移動位置。 〜平台3可在其頂面放置基板卜而且，例如可透過空 氣°及弓丨力或靜電力保持（固定）該基板w。 而且 ，在基台1配設有開缝喷嘴用支杈（未圖示），開 縫嘴嘴10被固定於該支柱。 圖2疋放大顯示由寬度方向看的開縫噴嘴10的下部之 剖面圖。圖3是由正面看開縫喷嘴1〇之剖面圖。在圖卜圖 3中，開縫噴嘴1〇為塊狀且在寬度方向具有：長的本體塊 Η 別唇(fr〇nt lip)12、後唇(rear Πρ)13，唇 12 、13在前後方向空出間隙而被配置’與本 , nccr7(#：單編號Α0101 脰鬼1 4成一體 10110557Γ^ 第 7 頁 / 共 28 頁 1013209103-0 201244833 。在本體塊14内於寬度方向形成有長的孔（歧管 :raani f old) 1 5，該孔1 5在形成於唇1 2、13間的寬度方 向與長的開縫1 6連通。該開縫1 6的縱向與塗佈裝置的寬 度方向一致，正交於該寬度方向的方向為前後方向。 在圖1中’塗佈裝置更包含：儲存塗佈液L的槽 (tank)5 ;具有泵（pump)及閥（valve)的泵單元6 ;塗佈 液L流過的管（pipe)7，可藉由泵單元6進行驅動使槽5内 的塗佈液L通過管7供給至開縫喷嘴1〇。被供給至開縫噴 嘴10的塗佈液L通過前述孔（歧管）15而流到開縫16，然 後被吐出到基板W上。亦即開縫16成為塗佈液L被吐出的 吐出口 11。 如以上，在開縫喷嘴10形成有由開縫16構成的吐出 口 Π ’可由該吐出口 11對基板w吐出並塗佈塗佈液L。由 吐出口 11連續吐出的塗佈液L在寬度方向成長的帶狀而被 吐出’與此同時’透過前述驅動部4使保持了基板W的平 台3朝後方移動，據此，在基板^上形成有由塗佈液[形成 的塗膜S。此外，稱塗膜S的寬度方向的尺寸為塗佈寬b。 在開縫喷嘴10配設有在寬度方向移動於開縫丨6内的 吐出寬變更構件17。吐出寬變更構件17為配設於開縫16 的薄板構件，比開缝16的寬度（前後方向的尺寸）稍微薄 ’可防止塗佈液L在開縫16内朝比吐出寬變更構件π還靠 寬度方向外側洩漏（限制更進一步朝寬度方向外側流出） 因此透過吐出寬變更構件17，使成為塗佈液被吐出 的寬度的吐出口 Π的寬度方向尺寸（吐出寬）被規定，而 且’可藉由使該吐出寬變更構件17移動於寬度方向，變 1013209103-0 10557^1 編號 A0101 第 8 頁 / 址 28 頁 201244833 更吐出口 11的寬度方向尺寸（吐出寬）。亦即吐出口 11的 寬度方向尺寸意味著可吐出塗佈液L的寬度尺寸，可藉由 變更該吐出寬而變更由塗佈液形成的塗佈寬B。可藉由該 吐出寬變更構件17，不更換開缝喷嘴10而將塗佈寬B變更 為各式各樣的值。 在圖3中，吐出寬變更構件17與在寬度方向進退於孔 15内的活塞（piston)18—體化，而且在開縫喷嘴10配設 有使該活塞18進退移動的軸19。可藉由使軸19移動於寬 度方向，調整吐出寬變更構件17的寬度方向的位置，可 變更塗佈寬B。 如此，為了將塗佈寬B設定為規定的值而將吐出寬變 更構件17定位使用於規定位置，惟為了照該塗佈寬B那樣 進行塗佈，亦即塗佈裝置具備抑制塗佈寬B的變動的吐出 寬變動抑制機構，以便塗佈寬B在寬度方向不變動而形成 塗膜S。吐出寬變動抑制機構是由以下說明的空氣供給單 元21與吐出寬變更構件17所具有的突出部27之中的一方 或雙方構成。此外，即使將吐出寬變更構件17定位使用 於規定位置，塗佈寬B變動的原因也有塗佈液L的特性（黏 性等）、開縫喷嘴10的吐出口 11開口的下端面與基板W的 餘隙的變動以及與塗佈速度等有關的塗佈條件。 [針對空氣供給單元21] 圖4是放大顯示開縫喷嘴10的下部之後視圖（由後方 看的圖）。如圖2與圖4所示，塗佈裝置更具備空氣供給單 元21，該空氣供給單元21具有對由吐出口 11吐出的塗佈 液L的寬度方向兩外側的近旁區域A喷塗空氣的空氣喷嘴 22。而且，空氣供給單元21包含：具有調整壓縮空氣源（ 10110557#單減紐01 第9頁/共28頁 1013209103-0 201244833 未圖示）及壓縮空氣的流量及壓力的功能之控制單元23 ; 空氣管（air pipe)24，透過控制單元23調整了流量及壓 力的壓縮空氣經由空氣管24被供給至空氣喷嘴22，壓縮 空氣被由形成於空氣噴嘴22的頂端的空氣喷出口 22a喷射 。空氣噴出口 22a為直徑1〜3mm，由空氣喷出口 22a(正交 於該空氣喷出口 22a)使朝圖2與圖4所示的箭頭方向的空 氣流產生。 雖然圖4僅顯示開縫喷嘴10的寬度方向一方側，但他 方側也是同樣的構成。以下針對一方側進行說明。 空氣喷嘴22透過安裝構件25安裝於開缝喷嘴10的一 部分，可將依照該安裝構件25進行的空氣喷嘴22的安裝 位置變更於寬度方向。此外，空氣管24由具有可撓性 (flexibility)的素材構成，不阻礙空氣噴嘴22的移動 。如此，可藉由變更空氣喷嘴22的安裝位置，進行藉由 空氣喷嘴22進行的空氣的喷塗位置的調整。 特別是在本實施形態的塗佈裝置中，如上述因吐出 口 11的寬度方向尺寸（吐出寬）透過吐出寬變更構件17變 更，故空氣喷嘴22與開縫喷嘴10以不同體在開縫喷嘴10 的外部中透過安裝構件25而被設置，再者，依照由該吐 出寬變更構件17進行的吐出口 11的寬度方向尺寸的變更 ，進行藉由空氣喷嘴22進行的空氣的噴塗位置的調整。 此外，吐出寬變更構件17(前述軸19)的位置調整及 空氣喷嘴22的位置調整透過作業員的人工操作進行也可 以，惟以致動器（actuator)進行也可以。而且，當以致 動器進行時，例如使吐出寬變更構件17的寬度方向的移 動與空氣噴嘴22的寬度方向的移動連動也可以。亦即進 10110557#單編號 A_ 第10頁/共28頁 1013209103-0 201244833 行使空氣喷嘴22的位置調整用的致動器與吐出寬變更構 件17的位置調整用的致動器的移動量相同的控制，據此 ，能以相同的衝程（stroke)使吐出寬變更構件17與空氣 喷嘴22移動於寬度方向。 針對空氣喷嘴22的設置位置及空氣的喷塗位置更進 一步說明。空氣喷嘴22為了防止由吐出口 11吐出的塗佈 液L擴展於寬度方向外側，需朝該塗佈液L(液體液珠 (liquid bead)的形成區域的寬度方向外側的近旁區 域A喷出空氣，為此，空氣喷嘴22被設置於規定的位置。 亦即針對空氣喷嘴22的空氣喷出口 22a的寬度方向的位置 如圖4所示，為比規定塗佈寬B的吐出寬變更構件17的内 側面17a(更詳細說明的話，在本實施形態中為後述的角 部31)稍微靠寬度方向外側的位置。而且，針對空氣喷出 口 22a的前後方向位置及上下方向位置如圖2所示，為開 縫16的開口端16a(空氣喷嘴22的頂端）的近旁位置。再 者，空氣的喷射方向，亦即由圓形的開口構成的空氣噴 出口 22a的中心線為朝開縫16的開口端16a與基板W之間 的空間的方向，且沿著與寬度方向正交的鉛直面朝下傾 斜。 更進一步說明的話，空氣喷嘴22的空氣喷出口 22a 在通過圖2的右侧的部分放大視圖中以影線表示的近旁區 域A後與基板W相交的假想直線Y上具有中心線。此外，該 近旁區域A為由吐出口 11吐出的塗佈液L (液體液珠的形成 區域的寬度方向兩外側的區域，且為具有相當於由基 板W到吐出口 11的開口端11a的餘隙的高度h，且具有包含 開縫16的開口端16a中的前後方向的寬度%的微小寬k的 10110557#單編號 A〇101 第11頁/共28頁 1013209103-0 201244833 區域。 在本實施形態中，該微小寬請以將形成有塗膜s的 侧的開縫喷臂10的唇形頂端面13a(在圖2中為後唇13的 頂端面叫的寬度及開縫16的寬度加在-起的寬度（前後 D寸）#即微小寬k是由頂端面13a之中形成有塗膜 的側的角4 13b到開縫】6的（從這裡形成有塗 )開口端16a的寬度。 幻 依照該空氣喷嘴22，在由吐出口 n吐出的塗佈液L 的寬度方向外側的近旁形成有由空氣造成的壁，可透過 _防止形成於基板w上之由塗佈飢形成的塗膜S擴展於 見度方向’可抑制塗則的寬度方向尺寸的變動。特別是 可藉由如上述設定空氣噴嘴22的位置，使空氣流過被塗 佈於基板W上的塗佈液L的寬度方向兩外側的近旁，可透 =該空氣的動壓確實地抑制塗佈液L之朝寬度方向外侧擴 展0 更進步4明的法，為了防止所吐出的塗佈液l在基 板w上擴展於寬度方向，在圖4的右侧的放大視圖中需 吏透過開縫喷嘴1〇與基板w之間的毛細管現象使塗佈液以 液體液珠）想擴展的力（毛細力（叫⑴㈣f〇rce)pi) 與作用於该塗佈液L(液體液珠）的空氣壓？2平衡（亦即 P1-P2)。但是，若考慮塗佈液[的表面張力與空氣的密度 ’則容易成為P1>P2。 因此依照本實施形態，因可在前述空氣壓p2包含來 2空氣嘴嘴22的空氣的喷塗造成的動壓p2a ，故為了滿足 ⑴述條件式P1=P2 ’若加大該動壓P2a的話即可，為此若 加大來自空氣噴嘴22的空氣的流速即可。 赐#單編號謝〇1 第頁/共28頁 1013209103-0 201244833 但是，一般空氣的流動容易擴散，若擴散的話則流 速顯著降低。因此在本實施形態中’為了防止空氣的擴 散，藉由由微細的空氣噴出口 22a喷射空氣使擴散變小且 使匯集的空氣流產生，然後對在應產生前述動壓P2a的作 用點的近旁，亦即圖2的右侧的部分放大視圖中以影線表 示的近旁區域A，有效地喷塗（使其通過）該空氣流。 據此，可不使空氣擴散而加大流速’可對由吐出口 Π吐出的塗佈液l使所需的動壓P2a產生，可滿足前述條 件式P1=P2。 此外，當預料到空氣的擴散且以流速過大的空氣流 時’會擾亂周圍的環境（流場（flow field))而無法形成 穩定的液體液珠。但是依照本實施形態，可無須過度加 大流速而產生所需的動壓p 2 a。 再者’由空氣喷出口 2 2a喷射，直線地前進的空氣之 在基板W上的接觸區域q(參照圖2的部分放大視圖）的至少 一部分為前述前後方向的微小寬k的範圍内較佳。此外在 Q 本實施形態中’接觸區域Q的全部存在於微小寬k的範圍 内°再者’被噴塗到基板W的空氣沿著基板w流動產生並 流（parallei fi〇w) 〇 針對空氣噴出口 2 2a的位置更進一步說明的話，在圖 2中’當開縫噴嘴10的下端面l〇a與基板W之間的餘隙被設 定為例如0. 5mm〜1. 2mm時，空氣噴出口 22a的位置被設定 為距下端面l〇a的高度為lmm〜3min的範圍，被設定為距開 缝16的（噴嘴22側的）開口端16a的水平距離為1mm〜3 mm 的被圍。再者，空氣喷出口 22a的位置被設定，以便來自 空氣喷出口 22a的直線地被喷射的空氣的方向對基板w成 1013209103-0 10110557#單編號 A〇101 帛 13 S / 共 28 頁 201244833 4 0度~ 50度。 而且在圖4中，雖然顯示空氣喷嘴22沿著鉛直面喷射 空氣的情形，惟對鉛直面傾斜於寬度方向而設置空氣喷 嘴22也可以。但是即使是此情形，也不是朝寬度方向外 侧使其傾斜於喷射空氣的方向，而是如以圖4的二點鏈線 所示的，朝寬度方向内側使其傾斜於喷射空氣的方向較 佳。 依照具備以上的構成的空氣供給單元21，因可依照 透過吐出寬變更構件17進行的吐出口 11的寬度方向尺寸 的變更（吐出寬的變更），進行藉由空氣喷嘴22進行的空 氣的喷塗位置的調整，故即使變更吐出寬，透過空氣抑 制塗膜S的寬度方向的尺寸的變動的功能也被維持。 再者，在藉由具備該空氣供給單元21的塗佈裝置進 行之將塗膜S形成於基板W的塗佈方法中，可藉由吐出寬 變更構件17的位置調整，與藉由空氣供給單元21所具有 的空氣喷嘴22進行的空氣的喷塗位置的調整規定塗膜S的 寬度方向尺寸（塗佈寬Β)。 [針對吐出寬變更構件17所具有的突出部27] 吐出寬變更構件17如圖4所示，具備比開縫喷嘴10 的吐出口 11開口的下端面10a還突出於基板W側的突出部 27，該突出部27在朝寬度方向外側離開基板W的方向具有 對基板成陡峭的傾斜的形狀。 更進一步說明的話，突出部27具有：將流出開縫16 内的塗佈液L朝下方導引之中央側的導引面28 ;由該導引 面28的下端朝寬度方向外侧延伸之底面29 ;由底面29的 寬度方向外侧端斜斜朝上延伸的傾斜面30。導引面28是 10110557#單編號删1 第14頁/共28頁 1013209103-0 201244833 由與吐出見變更構件17的内側面17a連續的鉛直面構成， 底面29為對面於基板W的面，傾斜面30為上述的[在朝寬 度方向外娜開基―的方向具有對基板纽俩傾斜的 形狀]的面。 此處，由塗佈於基板W上的塗佈液L形成的塗膜S的寬 度方向尺寸（塗佈寬…變動的原因除了塗佈液[擴展於寬 度方向外側之外，也有因塗佈液L的特性（黏性等），或吐 出口 11開口的下端面1〇a與基板评之間的餘隙而使吐出的 塗佈液L在寬度方向内側變窄（塗佈液[被拉到寬度方向中 央側）。 如此，即使是塗佈液L想在寬度方向内側變窄的條件 ，也藉由突出部27突出於基板w側，透過該突出部27捕獲 塗佈液L，可抑制塗佈寬B變動。特別是因突出部27的底 面29與基板W之間的餘隙比開縫噴嘴丨〇的下端面！ 與基 板w之間的餘隙窄，故藉由該突出部27的底面29與基板w 之間的毛細管現象使塗佈液藉由突出部27捕獲。 再者，因該底面29與傾斜面30的邊界部由鈍角的角 部（邊緣部）31構成，傾斜面30在朝寬度方向外侧離開基 板W的方向具有對基板成陡峭的傾斜的形狀，故即使是塗 佈液L想朝寬度方向外側擴展的條件，也可藉由該形狀產 生的邊緣效應抑制塗佈液L的擴展。 針對突出部27的具體的形狀進行說明。距下端面 l〇a的突出部27的突出尺寸m盡可能大較佳，且藉由前述 餘隙h變更，可設突出尺寸m為下端面1〇3到基板w的頂面 的尺寸（餘隙h)的1〇〜40%。例如當設餘隙h為〇· 8mm時， 而且，底面29的寬度 1013209103-0 可將突出尺寸m設定為〇. l~〇. 3mm 10110557^"早編说第15頁/共28頁 201244833 方向η的尺寸大較佳，例如被設定為0. 1〜10mm °再者， 傾斜面3 0對底面2 9 (在本實施形態中為水平面）的傾斜角 度0需為30。以上，被設定為30〜90° ° 以上，在藉由具備具有突出部27的吐出寬變更構件 17的塗佈裝置進行之將塗膜S形成於基板W的塗佈方法中 ，可藉由吐出寬變更構件17的位置調整規定塗膜S的寬度 方向尺寸（塗佈寬B)。再者，當該塗佈裝置也具備空氣供 給單元21時，可更進一步藉由空氣供給單元21所具有的 空氣噴嘴22進行的空氣的噴塗位置的調整而規定。 圖5是說明抑制塗佈寬B的變動的吐出寬變動抑制機 構的功能之說明圖。 此處，可考慮為若精密地調整吐出口 11開口的下端 面10a與基板W之間的餘隙，則可抑制塗佈液l擴大於寬度 方向的[塗佈擴大]及變窄的[塗佈縮小]◊設如此精密地 調整的情形的前述餘隙為圖5的Cfl。 但是實際上，因例如基板W的厚度在面方向不同，基 板W的表面的高度會變動，其結果該餘隙變成不均勻。因 此，即使精密地調整吐出口 11開口的下端面1〇a的高度位 置，當不具備如本發明的吐出寬變動抑制機構時，抑制 刖述餘隙造成的塗佈擴大或塗佈縮小的功能有時無法 民好地被發揮 - 此，依照與本實施形態有關的塗佈裝置，即使是 因 10110557#單編號 A0101 .一 •，- 且，呷^文疋 塗佈液L變成塗佈縮小的條件，具體上即使是餘隙比c還 寬的情形，也藉由突出部27突出於基板？侧，透過該^出 2捕獲塗佈液L。而且，即使是塗佈液L變成塗佈擴大 _、件’具體上即使是餘隙比％還窄的情形，也因突出 第16頁/共28頁 1013209103-0 201244833 部27在朝寬度方向外侧離開基板w的方向具有對基板成陡 峭的傾斜的形狀的傾斜面3〇，可藉由該形狀產生的邊緣 效應有效地抑制塗佈液L的塗佈擴大。 如此依照突出部27，在前述餘隙的設定產生餘裕量 ，即使不將餘隙設定為嚴密的、的值，也能如圖5所示將 餘隙設定為crc2的範圍n。特別是在由該突出部27發揮 的功育b中㈣父於塗佈擴大，因可有效地防止塗佈縮小 ’故右以將餘隙設定气的情形為基準，則朝抑制塗佈 縮小的方向的餘隙調整的餘裕量變大。 再者，依照與本實施形態有關的塗佈裝置，即使是Fig. 1 is a schematic view showing an embodiment of an embodiment of a coating apparatus of the present invention. The coating device comprises: a base 1; a guiding member 2 disposed on the base 1 and movable in the front-rear direction through the guiding member 2, capable of carrying a flat stage 3 of the substrate w; moving the platform 3 The drive unit 4 is in the front-rear direction. Further, the coating apparatus includes discharging the base on the stage 3 and applying the coating slit nozzle U. The substrate W is a rectangular one-piece member, and in this embodiment, is a glass substrate for a solar cell panel. The guide member 2 is a guide for guiding the stage 3 in the front-rear direction. The drive unit 4 moves the stage 3 in the front-rear direction. The drive unit 4 has a ball screw mechanism that is rotated by a feeding motor (not shown), and is movable through the ball to control the movement of the flat front and rear direction and its moving position. The platform 3 can be placed on the top surface of the substrate and, for example, the substrate w can be held (fixed) by air and bow or electrostatic force. Further, a support for a slit nozzle (not shown) is disposed on the base 1, and the slit nozzle 10 is fixed to the support. Fig. 2 is an enlarged cross-sectional view showing the lower portion of the slit nozzle 10 as seen in the width direction. Fig. 3 is a cross-sectional view showing the slit nozzle 1'' from the front. In Fig. 3, the slit nozzle 1 is block-shaped and has a long body block lip 12, a rear lip 13 and a lip 12 and 13 in the width direction. The direction is free of the gap and is configured 'with this, nccr7 (#: single number Α 0101 脰 ghost 1 4 into 10110557 Γ ^ page 7 / 28 pages 1013209103-0 201244833. Formed in the body block 14 in the width direction is long Hole (manifact: raani f old) 1 5, the hole 15 is in communication with the long slit 16 in the width direction formed between the lips 12, 13. The longitudinal direction of the slit 16 and the width of the coating device The directions are the same, and the direction orthogonal to the width direction is the front-rear direction. In Fig. 1, the coating device further includes: a tank 5 for storing the coating liquid L; a pump having a pump and a valve. The unit 6; a pipe 7 through which the coating liquid L flows can be driven by the pump unit 6 to supply the coating liquid L in the tank 5 to the slit nozzle 1 through the tube 7. It is supplied to the slit nozzle The coating liquid L of 10 flows through the hole (manifold) 15 to the slit 16 and is discharged onto the substrate W. That is, the slit 16 becomes the discharge port 11 from which the coating liquid L is discharged. As described above, the slit nozzle 10 is formed with a discharge port Π which is formed by the slit 16 and can be discharged from the discharge port 11 to apply the coating liquid L. The coating liquid L continuously discharged from the discharge port 11 is in the width. In the strip shape in which the direction is formed, the substrate 3 holding the substrate W is moved rearward through the driving unit 4, whereby the coating film S formed by the coating liquid is formed on the substrate. In addition, the size of the coating film S in the width direction is the coating width b. The discharge width changing member 17 is disposed in the slit nozzle 10 in the width direction. The discharge width changing member 17 is disposed. The thin plate member of the slit 16 is slightly thinner than the width (the dimension in the front-rear direction) of the slit 16 to prevent the coating liquid L from leaking outside the width direction of the discharge width changing member π in the slit 16 (restriction Further, the discharge width is changed to the outside in the width direction. Therefore, the width direction (discharge width) of the discharge port 宽度 which is the width at which the coating liquid is discharged is defined by the discharge width changing member 17, and the discharge width changing member can be made 17 moves in the width direction Change 1013209103-0 10557^1 No. A0101 Page 8 / Address 28 Page 201244833 The width direction dimension of the discharge port 11 (spitting width). That is, the width direction of the discharge port 11 means the width dimension of the coating liquid L that can be discharged. The coating width B formed by the coating liquid can be changed by changing the discharge width. The coating width changing member 17 can be used to change the coating width B to various types without replacing the slit nozzle 10. value. In Fig. 3, the discharge width changing member 17 is integrally formed with a piston 18 that advances and retreats into the hole 15 in the width direction, and a shaft 19 that moves the piston 18 forward and backward is disposed in the slit nozzle 10. The coating width B can be changed by adjusting the position of the discharge width changing member 17 in the width direction by moving the shaft 19 in the width direction. In this manner, in order to set the coating width B to a predetermined value, the discharge width changing member 17 is positioned and used at a predetermined position, but the coating device is coated in the same manner as the coating width B, that is, the coating device has a coating width B. The variation of the discharge width variation suppression mechanism is such that the coating width B does not change in the width direction to form the coating film S. The discharge width variation suppressing means is constituted by one or both of the air supply unit 21 and the protruding portion 27 of the discharge width changing member 17 which will be described below. In addition, even if the discharge width changing member 17 is positioned and used at a predetermined position, the coating width L varies depending on the characteristics (viscosity, etc.) of the coating liquid L, and the lower end surface of the opening of the discharge nozzle 11 of the slit nozzle 10 and the substrate W. The variation of the clearance and the coating conditions related to the coating speed and the like. [For Air Supply Unit 21] Fig. 4 is a rear view (a view seen from the rear) showing the lower portion of the slit nozzle 10 in an enlarged manner. As shown in FIG. 2 and FIG. 4, the coating apparatus further includes an air supply unit 21 having air for spraying air to the vicinity A of the outer side in the width direction of the coating liquid L discharged from the discharge port 11. Nozzle 22. Further, the air supply unit 21 includes: a control unit 23 having a function of adjusting a compressed air source (10110557# single minus button 01/total 28 pages 1013209103-0 201244833 not shown) and compressed air flow rate and pressure; The air pipe 24, the compressed air whose flow rate and pressure are adjusted by the control unit 23, is supplied to the air nozzle 22 via the air pipe 24, and the compressed air is injected by the air discharge port 22a formed at the tip end of the air nozzle 22. The air ejection port 22a has a diameter of 1 to 3 mm, and is caused by an air flow in the direction of the arrow shown in Figs. 2 and 4 by the air ejection port 22a (orthogonal to the air ejection port 22a). Although Fig. 4 shows only one side in the width direction of the slit nozzle 10, the other side has the same configuration. The following describes one side. The air nozzle 22 is attached to a portion of the slit nozzle 10 through the attachment member 25, and the attachment position of the air nozzle 22 in accordance with the attachment member 25 can be changed in the width direction. Further, the air tube 24 is made of a material having flexibility and does not hinder the movement of the air nozzle 22. Thus, the adjustment of the spray position of the air by the air nozzle 22 can be performed by changing the attachment position of the air nozzle 22. In the coating apparatus of the present embodiment, since the width direction (discharge width) of the discharge port 11 is changed by the discharge width changing member 17, the air nozzle 22 and the slit nozzle 10 are different in the slit nozzle. The outer portion of the 10 is installed through the attachment member 25, and the position of the air sprayed by the air nozzle 22 is adjusted in accordance with the change in the width direction of the discharge port 11 by the discharge width changing member 17. Further, the position adjustment of the discharge width changing member 17 (the aforementioned shaft 19) and the position adjustment of the air nozzle 22 may be performed by a manual operation by a worker, but may be performed by an actuator. Further, when the actuator is used, for example, the movement of the discharge width changing member 17 in the width direction may be interlocked with the movement of the air nozzle 22 in the width direction. In other words, the number of the actuators for adjusting the position of the air nozzle 22 and the amount of movement of the actuator for adjusting the position of the discharge width changing member 17 are the same as that of the actuator for adjusting the position of the air nozzle 22; According to this, the discharge width changing member 17 and the air nozzle 22 can be moved in the width direction by the same stroke. The position of the air nozzle 22 and the spraying position of the air will be further explained. In order to prevent the coating liquid L discharged from the discharge port 11 from spreading outward in the width direction, the air nozzle 22 is required to eject air toward the vicinity of the coating liquid L (the vicinity of the liquid bead formation region in the width direction). For this reason, the air nozzles 22 are provided at predetermined positions. That is, the position of the air ejection port 22a in the width direction of the air nozzle 22 is a discharge width changing member 17 that is wider than the predetermined coating width B as shown in Fig. 4 . The inner side surface 17a (in the present embodiment, a corner portion 31 to be described later in the present embodiment) is slightly positioned outward in the width direction. Further, the position in the front-rear direction and the vertical position of the air ejection port 22a are as shown in Fig. 2, It is a near position of the open end 16a (the tip end of the air nozzle 22) of the slit 16. Further, the jet direction of the air, that is, the center line of the air discharge port 22a constituted by the circular opening is an opening toward the slit 16. The direction of the space between the end 16a and the substrate W is inclined downward along the vertical plane orthogonal to the width direction. Further, the air ejection port 22a of the air nozzle 22 passes through the right side of FIG. A virtual line Y intersecting the substrate W after the vicinity of the area A in the enlarged view has a center line. Further, the near area A is the coating liquid L discharged from the discharge port 11 (the formation area of the liquid bead) The outer side of the width direction is a height h corresponding to the clearance from the substrate W to the open end 11a of the discharge port 11, and has a small width % of the front-rear direction in the open end 16a including the slit 16 10110557# single number A 〇 101 of the width k page 11 / 28 pages 1013209103-0 201244833 area. In the present embodiment, the minute width is the lip of the slit spray arm 10 on the side where the coating film s is to be formed. The top end surface 13a (in FIG. 2, the width of the top end surface of the rear lip 13 and the width of the slit 16 are added to the width (front and rear D inch) #, that is, the minute width k is formed by the top end surface 13a. The width of the side of the coating film from the corner 4 13b of the coating film to the opening end 16a of the slit 6 (formed from here). The air nozzle 22 is outside the width direction of the coating liquid L discharged from the discharge port n. A wall caused by air is formed in the vicinity, and is permeable to prevent formation on the substrate w. The coating film S formed by the application of the hunger spreads in the visibility direction to suppress the variation in the width direction of the coating. In particular, the air can be applied to the substrate W by setting the position of the air nozzle 22 as described above. In the vicinity of both outer sides in the width direction of the coating liquid L, the dynamic pressure of the air can surely suppress the expansion of the coating liquid L toward the outer side in the width direction by 0, and the coating liquid is prevented from being discharged. l extends in the width direction on the substrate w, and in the enlarged view on the right side of FIG. 4, the capillary force between the slit nozzle 1〇 and the substrate w is required to cause the coating liquid to expand as a liquid liquid bead ( Capillary force (called (1) (four) f〇rce) pi) and air pressure acting on the coating liquid L (liquid bead)? 2 balance (also known as P1-P2). However, considering the surface tension of the coating liquid [the density of air], it is easy to become P1 > P2. Therefore, according to the present embodiment, since the dynamic pressure p2a due to the spraying of the air of the air nozzles 22 can be included in the air pressure p2, the dynamic pressure P2a is increased in order to satisfy the conditional expression P1 = P2' (1). That is, if the flow rate of the air from the air nozzle 22 is increased for this purpose.赐#单号谢〇1 Page / Total 28 pages 1013209103-0 201244833 However, the general air flow is easy to spread, and if it spreads, the flow rate is significantly reduced. Therefore, in the present embodiment, in order to prevent the diffusion of air, the air is injected by the fine air ejection port 22a to reduce the diffusion and the collected air flow is generated, and then the vicinity of the point of action at which the dynamic pressure P2a should be generated is generated. That is, the vicinity area A, which is indicated by hatching in a partially enlarged view on the right side of FIG. 2, effectively sprays (passes) the air flow. According to this, the flow rate can be increased without diffusing the air. The required dynamic pressure P2a can be generated for the coating liquid 1 discharged from the discharge port, and the above-described conditional expression P1 = P2 can be satisfied. In addition, when it is expected that the air is diffused and the flow rate is excessively large, the surrounding environment (flow field) is disturbed, and a stable liquid bead cannot be formed. However, according to this embodiment, the required dynamic pressure p 2 a can be generated without excessively increasing the flow rate. Further, it is preferable that at least a part of the contact region q (see a partially enlarged view of FIG. 2) of the air which is linearly advanced on the substrate W is in the range of the minute width k in the front-rear direction. . Further, in the present embodiment, "all of the contact regions Q exist in the range of the minute width k. Further, the air sprayed onto the substrate W flows along the substrate w to generate a parallel flow (parallei fi〇w). 5毫米〜1. 2毫米的空气喷出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出出口口The position of 22a is set to a range from the lower end face l〇a to a range of 1 mm to 3 min, and is set to be a horizontal distance of 1 mm to 3 mm from the open end 16a of the slit 16 (on the nozzle 22 side). Further, the position of the air ejection port 22a is set so that the direction of the linearly ejected air from the air ejection port 22a is 1013209103-0 to 10110557# single number A〇101 帛13 S / total 28 pages 201244833 4 0 degrees to 50 degrees. Further, in Fig. 4, although the air nozzle 22 is shown to eject air along the vertical plane, the air nozzle 22 may be provided so that the vertical plane is inclined in the width direction. However, even in this case, it is not inclined to the direction in which the air is sprayed toward the outer side in the width direction, but is preferably inclined toward the direction of the jet air toward the inner side in the width direction as indicated by the two-dot chain line of Fig. 4 . . In the air supply unit 21 having the above-described configuration, the air is sprayed by the air nozzle 22 in accordance with the change in the width direction of the discharge port 11 by the transmission/discharge width changing member 17 (change in the discharge width). Since the position is adjusted, even if the discharge width is changed, the function of suppressing the change in the dimension of the coating film S in the width direction by the air is maintained. Further, in the coating method in which the coating film S is formed on the substrate W by the coating device including the air supply unit 21, the position adjustment by the discharge width changing member 17 can be performed by the air supply unit. The adjustment of the spray position of the air by the air nozzles 22 provided by the 21 defines the width dimension (coating width) of the coating film S. [The protruding portion 27 of the discharge width changing member 17] The discharge width changing member 17 includes a protruding portion 27 that protrudes from the lower end surface 10a of the discharge port 11 of the slit nozzle 10 and protrudes from the substrate W side as shown in Fig. 4 . The protruding portion 27 has a shape that is steeply inclined to the substrate in a direction away from the substrate W in the width direction outer side. Further, the protruding portion 27 has a guide surface 28 on the center side that guides the coating liquid L flowing out of the slit 16 downward, and a bottom surface 29 that extends outward in the width direction from the lower end of the guide surface 28 An inclined surface 30 that extends obliquely upward from the outer end of the bottom surface 29 in the width direction. The guide surface 28 is 10110557# single number deletion 1 page 14 / total 28 page 1013209103-0 201244833 is formed by a vertical surface continuous with the inner side surface 17a of the discharge member 17 and the bottom surface 29 is inclined to the surface of the substrate W. The surface 30 is a surface having the above-described shape [the shape inclined to the substrate in the direction of the outer opening in the width direction]. Here, the width dimension of the coating film S formed by the coating liquid L applied to the substrate W (the application width varies depending on the coating liquid [expanded in the width direction outer side, but also due to the coating liquid The characteristic (adhesiveness, etc.) of L, or the clearance between the lower end surface 1〇a of the opening of the discharge port 11 and the substrate evaluation, so that the coating liquid L to be discharged is narrowed in the width direction (the coating liquid is pulled to In the case of the coating liquid L being narrowed on the inner side in the width direction, the protruding portion 27 protrudes from the substrate w side, and the coating liquid L is captured by the protruding portion 27, thereby suppressing the coating. The cloth width B varies. In particular, since the clearance between the bottom surface 29 of the protruding portion 27 and the substrate W is narrower than the clearance between the lower end surface of the slit nozzle ! and the substrate w, the projection 27 is The capillary phenomenon between the bottom surface 29 and the substrate w causes the coating liquid to be captured by the protruding portion 27. Further, the boundary portion between the bottom surface 29 and the inclined surface 30 is constituted by an obtuse angle portion (edge portion) 31, and the inclined surface 30 The direction away from the substrate W in the width direction outer side has a shape that is steeply inclined to the substrate, so In the case where the coating liquid L is intended to expand outward in the width direction, the expansion of the coating liquid L can be suppressed by the edge effect generated by the shape. The specific shape of the protruding portion 27 will be described. The protruding dimension m of the protruding portion 27 is as large as possible, and by the aforementioned clearance h, the protruding dimension m can be set to 1 〇 3 of the lower end surface 1 〇 3 to the top surface of the substrate w (the clearance h). ~40%. For example, when the clearance h is 〇·8mm, and the width of the bottom surface 29 is 1013209103-0, the protruding dimension m can be set to 〇. l~〇. 3mm 10110557^"早编说第15页/ A total of 28 pages 201244833 The size of the direction η is preferably large, for example, set to 0.1 to 10 mm °. Further, the inclination angle 0 of the inclined surface 30 to the bottom surface 2 9 (in the present embodiment, the horizontal plane) needs to be 30. In the coating method in which the coating film S is formed on the substrate W by the coating device including the discharge width changing member 17 having the protruding portion 27, it is possible to discharge by 30 to 90°° or more. The positional adjustment of the width changing member 17 defines the width direction dimension (coating width B) of the coating film S. Further, when When the air supply unit 21 is provided, the air supply unit 21 can be further adjusted by the adjustment of the spray position of the air by the air nozzle 22 of the air supply unit 21. Fig. 5 is a view showing the discharge width for suppressing the fluctuation of the coating width B. In the following, it is conceivable that when the clearance between the lower end surface 10a of the opening of the discharge port 11 and the substrate W is precisely adjusted, it is possible to prevent the coating liquid 1 from being enlarged in the width direction. The cloth expansion] and the narrower [coating reduction] are the aforementioned clearances in the case of such fine adjustment, which is Cfl of Fig. 5. However, actually, for example, the thickness of the substrate W is different in the plane direction, and the surface of the substrate W is The height changes, and as a result, the clearance becomes uneven. Therefore, even if the height position of the lower end surface 1〇a of the opening of the discharge port 11 is precisely adjusted, when the discharge width variation suppression mechanism according to the present invention is not provided, the function of coating expansion or coating reduction due to the clearance is suppressed. In this case, according to the coating apparatus according to the present embodiment, even if it is 10110557# single number A0101. I, -, and the coating liquid L becomes coating shrinkage. The condition, specifically, even if the clearance is wider than c, is the protrusion 27 protruding from the substrate? On the side, the coating liquid L is captured through the film 2 . In addition, even if the coating liquid L becomes a coating enlargement_, the article 'specifically, even if the clearance ratio is narrow, the 16th page/total 28 page 1013209103-0 201244833 portion 27 is outward in the width direction. The direction away from the substrate w has an inclined surface 3〇 which is steeply inclined to the substrate, and the edge effect by the shape can effectively suppress the spread of the coating liquid L. Thus, in accordance with the projections 27, a margin is generated in the above-described clearance setting, and the clearance can be set to the range n of crc2 as shown in Fig. 5 even if the clearance is not set to a strict value. In particular, in the work b which is exhibited by the protruding portion 27, (four) the father enlarges the coating, and since the coating can be effectively prevented from being reduced, the right side is adjusted to reduce the coating. The margin of the clearance adjustment of the direction becomes large. Furthermore, according to the coating device according to the embodiment, even
塗佈液L變成塗佈擴大的條件，具體上即使是餘隙比C還 窄的情形’也可藉由空氣供給單元21使空該過由吐0出 口 11吐出«佈絲Μ上的塗佈机枝度方向兩外側 的近旁，可透過該空氣的動壓有效地抑制塗佈液L的塗饰 擴大。如此，藉由线供給單元21，在料餘隙的設定 產生餘裕量，即使祕㈣設定為嚴密咐的值， 所示若能將餘隙設定為的範圍F2即二亦即若㈣ 餘隙設定為c〇的情形為基準，則朝抑制塗佈擴 的餘隙調整的餘裕量變大。 ° 如此，依照圖5的說明，在由前述突出部27發揮的功 能中’若以將餘隙歧為Cq的情形為基準，則抑制塗佈 擴大的效果比抑制塗佈縮小小，惟可藉由使空氣供給單 元21與該突出部27-起發揮功能而補強抑㈣佈擴^ 效果。 、 置，前述 而且藉由 由以上，依照與本實施形態有關的塗佈裝 餘隙的餘裕量變寬，無須餘隙的精密的調整， 10110557#單編號A0101 第Π頁/共28頁 1013209103-0 201244833 基板w的厚度在面方向不同，即使餘隙變動也能抑制塗佈 寬B的變動。 本實施形態的塗佈裝置因特別是可抑制塗佈液塗佈 擴大於寬度方向外側，故如圖1所示，能以比成為塗佈對 象的基板W的總寬度還窄的寬度形成由塗佈液形成的塗膜 S。亦即可使吐出口 π的寬度尺寸比基板w的總寬度還小 而進行塗佈液的塗佈。 而且，本發明的塗佈裝置為抑制塗佈寬B的變動的吐 出寬變動抑制機構具備空氣供給單元21與吐出寬變更構 件17的突出部27之中的一方或雙方。在上述的實施形態 中雖然說明了具備雙方的情形，惟一方也可以。 例如吐出寬變更構件17不具有突出部27，僅空氣供 給單元21當作吐出寬變動抑制機構而被配設也可以。若 針對此情形下之藉由空氣喷嘴22進行的空氣的喷塗位置 進行說明的話，由確保塗膜S的膜厚的均勻性的點，吐出 口 11的寬度方向尺寸（吐出寬）與塗佈寬B 一致較佳，塗佈 寬B在藉由吐出寬變更構件17的内側面i7a與對向於基板w 的導引面20(參照圖4的右側的部分放大視圖）交叉的角部 2〇a中，空氣喷嘴22的空氣噴塗位置被調整，以便塗膜s 的塗佈寬B被規定。 而且’本發明的塗佈裝置不限於圖示的形態，在本 發明的範圍内其他的形態也可以。雖然以本實施形態的 驅動部4在基台1對處於固定狀態的開縫喷嘴10使保持了 基板W的平台3朝前方移動的形態進行了說明，但與此相 反’即使是對處於固定狀態的平台3使開縫喷嘴1〇移動的 構成也可以。亦即驅動部4使開缝喷嘴1〇與基板w相對地 10110557产單，編號· A0101 第18頁/共28頁 1013209103-0 201244833 移動於前後方向的話即可。 而且，在前述實施形態中，雖然說明了空氣喷嘴22 配設於後唇13側，關於前後方向朝與形成有塗膜S的側相 反側喷射空氣的形態，但也可以是空氣喷嘴22配設於前 唇12侧，關於前後方向朝形成有塗膜S的側喷射空氣的形 態。 【圖式簡單說明】 [0006] ❹ [0007] ❹ 圖1是顯示本發明的塗佈裝置的實施的一形態之概略 圖。 圖2是放大顯示開縫喷嘴的下部之剖面圖。 圖3是由正面看開縫喷嘴之剖面圖。 圖4是放大顯示開縫喷嘴的下部之後視圖。 圖5是說明抑制吐出寬的變動的吐出寬變動抑制機構 的功能之說明圖。 【主要元件符號說明】 1 :基台 2:導引構件 3:平台 4 :驅動部 5:槽 6:泵單元 7:管 9:吐出寬變更手段 10:開縫噴嘴 10a:開縫喷嘴的下端面 10110557#單編號删1 第19頁/共28頁 1013209103-0 201244833 11 :吐出口 11 a :吐出口的開口端 12:前唇 13:後唇 13a :開缝喷嘴的頂端面 13b:角部 14 :本體塊 15:孔（歧管） 15a:孔的内壁面 1 6 :開縫 1 6a :開縫的開口端 17:吐出寬變更構件 17a:吐出寬變更構件的内侧面 18 :活塞 21 :空氣供給單元 22 :空氣噴嘴 22a:空氣喷出口 23:控制單元 24:空氣管 25:安裝構件 2 7 :突出部 28:導引面 2 9 :底面 3 0 :傾斜面 31 :角部 40 :軸 101脳#單編號A0101 第20頁/共28頁 1013209103-0 201244833 A :塗佈液的寬度方向兩外側的近旁區域 B:塗佈寬 C0、C1、C2、c3、c4:餘隙 D:吐出寬 h:餘隙 k:微小寬 % :開缝的開口端中的前後方向的寬度 L:塗佈液 m :突出尺寸 η:底面的寬度方向 Ρ1 :毛細力 Ρ2:空氣壓 ， Q:由空氣喷出口喷射在基板上的接觸區域 S:塗膜 W:基板The coating liquid L becomes a condition for coating enlargement, and specifically, even if the clearance is narrower than C, the coating by the air supply unit 21 can be performed by discharging the discharge from the discharge port 11 to the cloth. In the vicinity of the outer sides of the machine branching direction, the dynamic pressure of the air can effectively suppress the expansion of the coating liquid L. In this way, the line supply unit 21 generates a margin in the setting of the material clearance, and even if the secret (4) is set to a strict value, if the clearance can be set to the range F2, that is, if the (four) clearance is set. In the case of c〇, the margin for adjusting the clearance for suppressing the coating expansion becomes large. In this way, according to the description of FIG. 5, in the function exerted by the protruding portion 27, the effect of suppressing the coating enlargement is smaller than the suppression of the coating shrinkage based on the case where the clearance is Cq. The air supply unit 21 and the protruding portion 27 function to reinforce the effect of the expansion. Further, by the above, the margin of the coating clearance according to the present embodiment is widened, and the precise adjustment without the clearance is required. 10110557#单号A0101第Π页/Total 28 page 1013209103-0 201244833 The thickness of the substrate w is different in the plane direction, and the fluctuation of the coating width B can be suppressed even if the clearance is varied. In the coating apparatus of the present embodiment, since the application of the coating liquid can be suppressed from being enlarged to the outside in the width direction, as shown in FIG. 1, the coating can be formed to have a width narrower than the total width of the substrate W to be coated. The coating film S formed by the cloth liquid. Alternatively, the coating liquid can be applied by making the width of the discharge port π smaller than the total width of the substrate w. In the coating apparatus of the present invention, the discharge width variation suppressing means for suppressing the fluctuation of the coating width B includes one or both of the air supply unit 21 and the protruding portion 27 of the discharge width changing member 17. In the above embodiment, it has been described that both cases are provided, and only one of them may be used. For example, the discharge width changing member 17 does not have the protruding portion 27, and only the air supply unit 21 may be disposed as a discharge width variation suppressing mechanism. In the case of the position of the air sprayed by the air nozzle 22 in this case, the width dimension (discharge width) of the discharge port 11 and the coating are ensured at the point of ensuring the uniformity of the film thickness of the coating film S. It is preferable that the width B is uniform, and the coating width B is at a corner portion 2 intersecting with the inner surface i7a of the discharge width changing member 17 and the guide surface 20 (refer to a partial enlarged view on the right side of FIG. 4) facing the substrate w. In a, the air spray position of the air nozzle 22 is adjusted so that the coating width B of the coating film s is specified. Further, the coating device of the present invention is not limited to the illustrated embodiment, and other embodiments are possible within the scope of the present invention. Although the driving unit 4 of the present embodiment has described the form in which the platform 3 holding the substrate W is moved forward to the slot nozzle 10 in the fixed state in the base 1, the opposite is true even if the pair is in a fixed state. The structure of the platform 3 for moving the slit nozzle 1〇 is also possible. In other words, the driving unit 4 can make the slit nozzle 1 〇 and the substrate w face each other 10110557, and the number A0101 page 18/28 page 1013209103-0 201244833 can be moved in the front-rear direction. Further, in the above-described embodiment, the air nozzle 22 is disposed on the side of the rear lip 13 and the air is ejected toward the side opposite to the side on which the coating film S is formed in the front-rear direction. However, the air nozzle 22 may be disposed. On the side of the front lip 12, air is sprayed toward the side where the coating film S is formed in the front-rear direction. BRIEF DESCRIPTION OF THE DRAWINGS [0007] Fig. 1 is a schematic view showing an embodiment of an embodiment of a coating apparatus of the present invention. Fig. 2 is a cross-sectional view showing a lower portion of the slit nozzle in an enlarged manner. Figure 3 is a cross-sectional view of the slit nozzle viewed from the front. Fig. 4 is a rear elevational view showing a lower portion of the slit nozzle in an enlarged manner. Fig. 5 is an explanatory view for explaining the function of the discharge width variation suppressing means for suppressing the fluctuation of the discharge width. [Description of main component symbols] 1 : Base 2: Guide member 3: Platform 4: Drive unit 5: Slot 6: Pump unit 7: Tube 9: Discharge width changing means 10: Slotting nozzle 10a: Under the slit nozzle End face 10110557# Single number deletion 1 Page 19 / Total 28 page 1013209103-0 201244833 11 : Discharge port 11 a : Open end of discharge port 12: Front lip 13: Rear lip 13a: Top end face of slit nozzle 13b: Corner 14: body block 15: hole (manifold) 15a: inner wall surface of the hole 16: slit 6 6a: open end 17 of the slit: discharge width changing member 17a: inner side surface 18 of the discharge width changing member: piston 21: Air supply unit 22: Air nozzle 22a: Air ejection port 23: Control unit 24: Air tube 25: Mounting member 2 7: Projection portion 28: Guide surface 2 9: Base surface 3 0: Inclined surface 31: Corner portion 40: Shaft 101脳#单编号A0101 Page 20/28 page 1013209103-0 201244833 A : The vicinity of the outer side of the width direction of the coating liquid B: coating width C0, C1, C2, c3, c4: clearance D: spitting Width h: clearance k: small width %: width L in the front-rear direction in the open end of the slit: coating liquid m: protruding dimension η: width direction of the bottom surface Ρ1: capillary force Ρ 2: air , Q: the contact area S of the air ejection outlet for ejecting on a substrate: coating film W: substrate
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