JP5881080B2 - Wire saw and duct device for wire saw - Google Patents

Description

  The present invention relates to a wire saw and a wire saw duct device used for cutting semiconductor materials and the like.

In recent years, for example, a wire saw that cuts a workpiece made of a hard and brittle material such as a semiconductor material, a magnetic material, or ceramic with a traveling wire has been used.
For example, in Patent Document 1, a member to be cut such as a semiconductor material is formed into a desired shape by pressing a wire, which is attached by supplying a processing liquid in which loose abrasives are mixed with an oil to a running wire, and pressing the wire against the workpiece. In order to improve the wire saw cutting accuracy and cutting efficiency in a wire saw to be cut, a horizontal processing liquid having a vertical processing liquid storage portion and a slit-shaped outflow hole for allowing the processing liquid to flow out in the horizontal direction is provided directly below the processing liquid supply nozzle. There is disclosed a brittle material cutting device in which an inverted T-shaped slit nozzle having a continuous rectifying portion is arranged immediately before a wire enters a member to be cut.

Japanese Patent Laid-Open No. 5-212720 (published on August 24, 1993)

However, the conventional cutting apparatus has the following problems.
In the cutting apparatus disclosed in the above publication, simply by placing the inverted T-shaped slit nozzle just before the wire enters the member to be cut, the machining liquid can be reliably supplied until just before the wire enters the member to be cut. It is configured with the intention of attaching to the wire and drawing the working fluid into the cutting portion by the wire. For this reason, no consideration is given to the fact that the machining liquid adhering to the wire collides with the opposing surface of the member to be cut and scatters to the surroundings. There is a problem that a sufficient amount of machining liquid does not enter the cutting portion because the drawing force is not sufficient by simply drawing the machining liquid into the part.

Further, in the cited document 1, it is not assumed that the pressure in the space in the inverted T-shaped slit nozzle is increased.
An object of the present invention is to provide a wire saw and a duct device for a wire saw that can prevent the machining fluid from being scattered to the surroundings and can sufficiently supply the machining fluid to a cutting groove of a workpiece to improve cutting performance. There is.

  A wire saw according to a first aspect of the present invention is a wire saw that presses a workpiece against the wire and cuts the workpiece while supplying the machining fluid to the traveling wire, and includes a machining fluid supply unit and a moving mechanism. The machining fluid supply unit supplies the machining fluid to the traveling wire from the upstream side in the traveling direction of the wire. The moving mechanism moves the workpiece relative to the traveling wire. The machining fluid supply unit includes a machining fluid pressure feeding device and a duct member. The machining fluid pressure feeding device feeds the machining fluid. In the duct member, the wire passes through the inside of the duct member, and the tip portion thereof is arranged close to the workpiece, and the machining fluid pumped from the connected machining fluid pumping device is brought into contact with the facing surface of the wire and the workpiece. Supply.

  Here, in a wire saw that cuts a workpiece by contacting the wire and the workpiece while the machining fluid is supplied and adhered to the running wire, the machining fluid is fed by the machining fluid pressure feeding device and the duct, and the wire is A structure is employed in which pressure is applied around the cutting start point by supplying the cutting start point that comes into contact with the opposing surface and is drawn into the workpiece to start cutting.

  Furthermore, when the working fluid adhering to the traveling wire collides with the facing surface of the workpiece, the working fluid supplied by being pumped through the inside of the duct member can be prevented from being scattered and confined in the internal space of the duct member.

As a result, a local pressure increase portion where the pressure of the machining liquid is locally high is formed in the vicinity of the cutting start point.
As a result, due to the pressure applied around the cutting start point where the wire starts cutting the workpiece and the local pressure generated in the vicinity of the cutting start point, the machining fluid near the cutting start point cuts the workpiece formed by the wire. It is pushed into the groove, and more machining fluid can be effectively supplied than before, and the cutting performance can be improved. Furthermore, the scattering of the machining fluid around is suppressed, and the workpiece and the machining chamber are not soiled.

A wire saw according to a second invention is the wire saw according to the first invention, and further includes a flange portion protruding from a tip portion of the duct member.
Here, the flange part which protruded from the front-end | tip part of the duct member is provided in the proximity | contact part with the workpiece | work in a duct member.

  As a result, leakage of the machining fluid from between the workpiece and the duct member is suppressed, and the pressure of the machining fluid in the vicinity of the cutting start point is increased, so that the machining fluid is more effectively transferred to the cutting groove of the workpiece than the conventional wire saw. You can get inside. As a result, the cutting performance can be improved by preventing the machining fluid from being scattered around and supplying the machining fluid sufficiently to the cutting grooves.

  Further, the machining fluid leaking from between the workpiece and the duct member falls to the back (upstream side) of the flange and is collected from the outside of the wire row, thereby preventing the workpiece and the machining chamber from being contaminated.

A wire saw according to a third aspect of the present invention is the wire saw according to the second aspect of the present invention, wherein the flange portion is disposed in parallel to the opposing surface of the workpiece.
Here, in order to prevent the leakage of the machining fluid, a flange portion provided at the tip portion of the duct member is provided in parallel to the opposing surface of the workpiece.
As a result, the machining liquid is less likely to leak from the gap between the front end of the duct member and the facing surface where the workpiece faces the duct member, and scattering of the machining liquid can be more effectively suppressed.

A wire saw according to a fourth invention is the wire saw according to the second or third invention, wherein the flange portion is formed of the same material as that of the duct member.
Thereby, a flange can be formed by bending the front-end | tip part of a duct member, and manufacture becomes easy.

A wire saw according to a fifth invention is the wire saw according to any one of the first to fourth inventions, wherein a seal member made of an elastic body or a bellows (bellows) is provided at the tip of the duct member. .
Here, in order to further suppress the leakage of the working fluid, the seal member provided at the tip of the duct member is formed of an elastic member such as rubber or a bellows (bellows).

  As a result, it is possible to cope with a slight change in the shape of the workpiece and the like, and it is possible to more effectively suppress the working fluid from leaking from the gap between the tip end portion of the duct member and the opposing surface of the workpiece. . Moreover, when installing a duct member with respect to a workpiece | work, even if it does not exactly match | combine the distance of the opposing surface of a workpiece | work and the front-end | tip part of a duct member, it can adjust after installation with a seal member or a bellows.

A wire saw according to a sixth aspect is the wire saw according to the fifth aspect, wherein the seal member is in contact with the workpiece.
By the contact, it is possible to more effectively suppress the machining liquid from leaking from the gap between the front end portion of the duct member and the facing surface of the workpiece.

A wire saw according to a seventh aspect of the present invention is the wire saw according to any one of the first to sixth aspects, wherein the size of the gap between the tip end portion of the duct member and the opposing surface of the workpiece is variable. .
Thus, by adjusting the gap, the pressure generated in the vicinity of the cutting start point can be changed, so that an amount of machining fluid more suitable for cutting can be supplied to the cutting groove.

A wire saw according to an eighth aspect of the present invention is the wire saw according to any one of the first to seventh aspects, wherein the gap between the tip of the duct member and the facing surface of the workpiece is 9 mm or less.
Here, the duct member is arranged so that the distance between the tip of the duct member and the workpiece facing surface in the vicinity of the workpiece and the duct member is 9 mm or less.

  This effectively prevents the machining fluid from leaking from the gap between the tip of the duct member and the facing surface of the workpiece, and cuts the wire saw by sufficiently supplying the machining fluid to the inside of the workpiece. Efficiency can be improved. As a result, for example, wire consumption can be reduced by about 10%.

A wire saw according to a ninth aspect of the present invention is the wire saw according to any one of the first to seventh aspects, wherein the gap between the tip of the duct member and the facing surface of the workpiece is 7 mm or less.
Here, the duct member is arranged so that the distance between the tip of the duct member and the workpiece facing surface in the vicinity of the workpiece and the duct member is 7 mm or less.

  This effectively prevents the machining fluid from leaking from the gap between the tip of the duct member and the facing surface of the workpiece, and cuts the wire saw by sufficiently supplying the machining fluid to the inside of the workpiece. Efficiency can be further improved.

  A wire saw according to a tenth aspect of the present invention is the wire saw according to any one of the first to ninth aspects, wherein the machining fluid supply section is only upstream of the workpiece in the wire traveling direction, or upstream and downstream. On the side.

  Here, by providing the above-described machining fluid supply unit only on the upstream side, for example, in a wire saw that cuts a workpiece while always running the wire in a certain direction, the wire is cut in one direction. By increasing the pressure of the machining fluid in the vicinity of the portion, the cutting efficiency of the workpiece can be effectively improved.

  In addition, by providing duct members on the upstream side and the downstream side in the traveling direction of the wire traveling relative to the workpiece, for example, in a wire saw that cuts the workpiece while reciprocating the wire by switching the traveling direction of the wire Even when the wire is run in either direction, it is possible to effectively increase the cutting efficiency of the workpiece by raising the pressure of the working fluid in the vicinity of the cutting start point.

  A duct device for a wire saw according to an eleventh aspect of the invention is a duct device mounted on a wire saw that presses a workpiece against a wire and cuts the workpiece while supplying the machining fluid to the traveling wire, and the machining fluid pressure feed for supplying the machining fluid A connecting portion connected to the apparatus, an opening portion arranged close to the workpiece, and an internal space through which the wire passes, and the working fluid is directed toward a portion where the workpiece is cut from the upstream side in the traveling direction of the wire Pump.

  Here, in a duct device attached to a wire saw that cuts a workpiece by contacting the wire and the workpiece in a state where the machining fluid is supplied and adhered to a running wire, the machining fluid is fed by a connected machining fluid pressure feeder. Is applied to the cutting start point where the wire and the facing surface of the workpiece come into contact with each other, thereby adopting a structure in which pressure is applied in the vicinity of the cutting start point. Further, conventionally, the machining fluid adhering to the traveling wire has been scattered around when colliding with the opposing surface of the workpiece. However, according to the present invention, the machining fluid is fed by being fed by pressure inside the duct member. Is confined in the internal space of the duct member.

As a result, a local pressure increasing portion having a high processing fluid pressure is locally formed in the vicinity of the cutting start point.
As a result, the processing fluid near the cutting start point is pushed into the cutting groove of the workpiece formed by the wire by the pressure applied around the cutting start point and the local pressure generated near the cutting start point. More machining fluid can be effectively supplied than before, and cutting performance can be improved.

  According to the wire saw according to the present invention, it is possible to prevent the machining fluid from being scattered around and to sufficiently supply the machining fluid to the cutting groove to improve the cutting performance.

1 is an overall perspective view showing a configuration of a wire saw according to an embodiment of the present invention. The whole perspective view of the wire saw of FIG. The schematic diagram which shows the structure of the wire supply mechanism mounted in the wire saw of FIG. The schematic diagram which shows the structure of the cutting mechanism periphery mounted in the wire saw of FIG. Sectional drawing which shows the structure of the processing liquid supply apparatus mounted in the wire saw of FIG. (A) is a schematic diagram which shows the process liquid distribution of the cutting groove vicinity in the wire cross section of the conventional wire saw. (B) is a schematic diagram showing the distribution of the machining fluid in the vicinity of the cutting groove in the wire cross section of the wire saw of FIG. The schematic diagram which shows the structure of the duct member mounted in the wire saw which concerns on one Example of this invention. Figure. Explanatory drawing which shows the experimental condition which concerns on the Example of FIG. The graph which shows the experimental result which concerns on the Example of FIG. The graph which shows the experimental result which concerns on the Example of FIG. The figure explaining the experiment which prepared and implemented multiple types of duct members mounted in the wire saw which concerns on the other Example of this invention. (A)-(c) is a schematic diagram which shows the structure of the duct member corresponding to FIG. The figure which shows the experimental conditions corresponding to FIG. The graph which shows the experimental result which concerns on the Example of FIG. The graph which shows the experimental result which concerns on the Example of FIG. The graph which shows the relationship between the distance of a duct front-end | tip part and the opposing surface of a workpiece | work, and a wire consumption reduction rate. (A)-(d) is a figure which shows the simulation result which shows the change of the pressure in the 2nd machining fluid supply space at the time of changing the flow volume of a machining fluid in the duct member mounted in the wire saw which concerns on this invention. . (A)-(c) shows the simulation result which shows the pressure of the process liquid in the 2nd process liquid supply space at the time of changing the traveling speed of a wire in the duct member mounted in the wire saw which concerns on this invention. FIG. The graph which shows the simulation result of FIG. (A)-(c) is the duct member mounted on the wire saw according to the present invention, and the change in the pressure in the second machining fluid supply space when the distance between the tip of the duct member and the workpiece facing surface is changed. The figure which shows the simulation result which shows. The graph which shows the change of the pressure in the 2nd process liquid supply space at the time of changing the distance of the front-end | tip of a duct member, and a workpiece | work opposing surface. (A), (b) is a schematic diagram which shows the structure of the duct member which concerns on other embodiment of this invention. (A)-(d) is a schematic diagram which shows the structure of the duct member which concerns on further another embodiment of this invention.

A wire saw 20 according to an embodiment of the present invention will be described below with reference to FIGS. 1 to 6B.
[Configuration of Wire Saw 20]
A wire saw 20 according to the present embodiment is an apparatus that simultaneously cuts a workpiece W into a plurality of wafers by causing a plurality of wires to run in parallel and pressing the workpiece W against the running wire. 1 and 2, the control panel 10, the processing liquid tank 11, the heat exchanger 12, the operation panel 13, the base 21, the processing chamber 22 provided on the base 21, the processing And a cutting mechanism 23 attached to the inside of the chamber 22. In the present embodiment, the wire saw 20 cuts the workpiece W made of a hard and brittle material such as silicon.

The control panel 10 controls the cutting mechanism 23 and the like mounted on the wire saw 20.
The machining liquid tank 11 stores a machining liquid S to be attached to a cutting wire 26 (see FIG. 3 and the like) used in the cutting mechanism 23. The machining liquid S stored in the machining liquid tank 11 is supplied by a main pump 50 through a connection pipe 51 to a machining liquid supply device (machining fluid pressure feeding device) 29 provided in the cutting mechanism 23 in the apparatus of the wire saw 20 (see FIG. 4) to the vicinity of the cutting start point 47 (see FIG. 5) of the workpiece W by the wire 26.

  The heat exchanger 12 is provided in the connection pipe 51 and is in the middle of sending the machining liquid S whose temperature has been increased by heat generated when the workpiece W is cut by the wire 26 from the machining liquid tank 11 to the machining liquid supply device 29 again. To cool, heat exchange is performed with air or water.

The operation panel 13 is set and inputted with control details of the cutting mechanism 23 and the like in the wire saw 20.
The cutting mechanism 23 uses the wire 26 to cut the workpiece W to a predetermined thickness based on the pitch interval of the wire 26. The detailed configuration of the cutting mechanism 23 will be described in detail later.

(Cutting mechanism 23)
The cutting mechanism 23 includes a pair of processing rollers 24a and 24b arranged in parallel with each other at a predetermined interval, a wire supply mechanism 25 (see FIG. 2 and the like), and a processing liquid supply device 29. Yes.

  On the outer periphery of the processing rollers 24a and 24b, a plurality of annular grooves 19 are formed at regular intervals. A wire 26 for cutting the workpiece W is continuously wound around the annular groove 19 between the processing rollers 24a and 24b. Thereby, a wire row composed of a plurality of wires 26 arranged in parallel is formed between the processing rollers 24a and 24b (part of the intermediate portion is omitted in FIG. 3). Then, the wire 26 is transported between the processing rollers 24 a and 24 b by being transported by a reel motor (not shown) of the wire supply mechanism 25 and a travel motor (not shown) of the cutting mechanism 23.

  At this time, the wire 26 cuts the workpiece W while repeating the operation of moving forward by a certain amount and moving backward by a certain amount, and being fed forward little by little as a whole. Note that the workpiece W may be cut while continuously feeding the wire 26 in one direction.

  Note that at least one pair of the processing rollers 24a and 24b may be provided. Further, three or more processing rollers may be provided as long as they are arranged parallel to each other with a predetermined interval.

  A machining fluid supply device 29 is disposed on the upper portion of the cutting mechanism 23. Further, a work support device 28 for supporting the work W is attached to the processing chamber 22 above the cutting mechanism 23 so as to be movable up and down.

  The machining liquid supply device 29 supplies the machining liquid S in which free abrasive grains are mixed with oil to the wire 26 traveling between the machining rollers 24a and 24b. The detailed configuration of the machining fluid supply device 29 will be described in detail later.

  The wire supply mechanism 25 is, for example, a device that feeds the wire 26 wound around the reel bobbin 27a to the processing rollers 24a and 24b for cutting the workpiece W, and collects it on the reel bobbin 27b. As shown, a traverser 25a, a tension applying mechanism 25b, and a plurality of guide rollers 25c are provided.

The traverser 25a is disposed in the vicinity of the reel bobbins 27a and 27b, and moves in the axial direction of the reel bobbins 27a and 27b to always pull out the wire 26 at a predetermined angle.
The tension applying mechanism 25b adjusts so that a constant tension is applied to the wire 26 conveyed between the reel bobbins 27a and 27b and the processing rollers 24a and 24b.

  The plurality of guide rollers 25c are auxiliary rollers for guiding the wire 26 in a desired direction, and are arranged on a conveyance path between the reel bobbins 27a and 27b and the processing rollers 24a and 24b in the apparatus of the wire saw 20. Several are arranged.

  Of the pair of reel bobbins 27a and 27b provided on the base 21, the wire 26 is wound, for example, with one end connected to one reel bobbin 27a. The wire 26 is wound around an annular groove formed on the surfaces of the processing rollers 24a and 24b via a tension applying mechanism 25b for applying tension to the wire 26 and a plurality of guide rollers 25c. The other end of the wire 26 is connected to and wound around the other reel bobbin 27b via a tension applying mechanism 25b that applies tension from the processing rollers 24a and 24b. In this state, the driving motor and the reel motor that is controlled to follow the driving motor are driven, so that the wire 26 can be driven between the processing rollers 24a and 24b.

  The workpiece W is pressed against a wire row that travels between the processing rollers 24a and 24b, so that the workpiece W is cut to a thickness corresponding to the pitch interval of the wires 26, and a plurality of wafers are formed simultaneously. Specifically, the workpiece W is lowered toward the cutting mechanism 23 by the workpiece support device 28 in a state where the machining fluid S is supplied onto the traveling wire 26 from the machining fluid supply device 29. Thus, the workpiece W is pressed against the traveling wire 26 between the processing rollers 24a and 24b and is cut.

(Work W holding mechanism)
Next, the work W holding mechanism included in the wire saw 20 will be described in detail.
In the present embodiment, as shown in FIG. 4, the glass plate 31 and the metal plate 32 are bonded and fixed to the upper surface of the workpiece W.

On the upper surface of the metal plate 32, a metal holder 33 is detachably attached by a plurality of bolts (not shown).
A plurality of pieces to be held 34 project from the upper surface of the body 33 to be held. A regulated surface 34 a is formed on the top surface of each retained piece 34.

  The work support member 35 is a holding means for supporting the work W and is moved up and down with respect to the wire 26 stretched between the processing rollers 24a and 24b by a moving mechanism such as a feed motor or a linear guide (not shown). It is arranged in the processing chamber 22 in a possible state. On the lower surface of the work support member 35, a plurality of holding members 36 are supported as holding means having a substantially inverted T shape that can be engaged with an engaging portion on the held body 33. A plurality of cylinders 37 are disposed on the upper surface of the work support member 35. Then, the cylinder 37 pulls up the holding member 36, whereby the held member 33 engaged with the holding member 36 is pulled up via the engaging portion, and the regulated surface 34 a on the held member 33 becomes the work support member 35. Is pressed against the regulating surface 35a on the lower surface of the plate. As a result, the workpiece W is held in a suspended state on the regulation surface 35 a of the workpiece support member 35.

(Working fluid supply device 29)
The machining liquid supply device 29 of the present embodiment employs the following configuration in order to efficiently cut the machining liquid S into the cutting groove of the workpiece W and efficiently perform the cutting.

  That is, as shown in FIG. 4, the machining liquid supply device 29 sandwiches the workpiece W descending into the space between the machining rollers 24 a and 24 b arranged in parallel with each other when cutting in the traveling direction of the wire 26. Thus, for example, metal duct members (wire saw duct devices) 40, 40 are provided on both sides of the workpiece W.

  Note that the vertical arrow below the workpiece W in FIG. 4 indicates the moving direction of the workpiece W. The machining fluid supply device 29 has a main pump 50 and a connection pipe 51 that connects the main pump 50 and the duct members 40 and 40.

  The duct member 40 is provided over the entire width of the wire row along the wire 26 that travels between the upper portions of the outer peripheral surfaces of the processing rollers 24a and 24b, and travels toward the portion where the workpiece W is cut. The machining fluid S is supplied to the wire 26 to be processed. An arrow A <b> 1 indicated by a one-dot chain line in the horizontal direction in FIG. 5 indicates the traveling direction of the wire 26.

  In the following, for convenience of explanation, the configuration of the duct member 40 arranged on the right side of the workpiece W in FIG. 4 will be described, but the configuration of the duct member 40 arranged on the left side of the workpiece W is the same.

As shown in FIG. 5, the duct member 40 includes a machining liquid storage portion 41 (connection portion), a first duct 42, a lower member 43, and a tip member 44.
The machining fluid reservoir 41 is connected to the main pump 50 by a connection pipe 51, temporarily stores the machining fluid S fed by the main pump 50, and is connected to the first duct 42 via the lower hole 41a. To the pressure.

  The first duct 42 includes a first machining fluid supply space S1 for feeding the machining fluid S sent from the machining fluid reservoir 41 along a direction substantially parallel to the wire 26 to the cutting start point 47. Have. Note that the two-dot chain arrow A2 in FIG. 5 indicates the direction in which the machining fluid S is pumped.

  A plate-like tip member 44 described later is attached to the first duct 42 via a spacer 45 made of an elastic body or other material at the tip of the workpiece W side. For this reason, by exchanging the spacer 45, the size of the gap between the tip member 44 and the facing surface W1 of the workpiece W can be changed. Further, the lower member 43 is provided below the first duct 42 and can move in the traveling direction of the wire 26, and the size of the gap between the lower member 43 and the facing surface W1 of the workpiece W can be reduced. Can be changed.

The second duct 46 includes an upper surface 43 a of the lower member 43, a lower surface 42 a of the first duct 42, and a lower surface 44 b of the tip member 44.
A space surrounded by the lower surface 44b of the tip member 44, the upper surface 43a of the lower member 43, and the facing surface W1 of the workpiece W is referred to as a second machining liquid supply space S2 (internal space). The machining fluid supply space S2 is around the cutting start point 47. A space sandwiched between the lower surface 42a of the first duct 42 and the upper surface 43a of the lower member 43 is referred to as a third processing liquid supply space S3 (internal space). The wire 26 travels inside the second machining fluid supply space S2 and the third machining fluid supply space S3. The lower surface 44b of the tip member 44 functions as an upper plate that forms the upper surface of the second machining liquid supply space S2. And the upper surface 43a of the lower member 43 functions as a lower board which forms 2nd process liquid supply space S2. Further, the lower surface 42a of the first duct 42 functions as an upper plate that forms the upper surface of the third machining fluid supply space S3, and the upper surface 43a of the lower member 43 serves as a lower plate that forms the third machining fluid supply space S3. Function. Further, an opening is formed toward the workpiece W by the tip member 44 and the lower member 43.

  The tip member 44 is formed of the same material as the duct member 40, for example, metal. The tip of the tip member 44 is bent to form a flange-like flange portion 44a. The flange portion 44a is provided substantially parallel to the facing surface W1 of the workpiece W that moves in the space between the processing rollers 24a and 24b. The flange portion 44a may be attached to the tip member 44 as a separate member.

  Thereby, the amount of the machining fluid S leaking from the gap between the tip of the duct member 40 and the facing surface W1 of the workpiece W is suppressed, and the pressure of the machining fluid in the second machining fluid supply space S2 is further increased. Can be effectively increased.

  The second machining fluid supply space S <b> 2 is arranged in the duct member 40 on the upstream side of the workpiece W in the traveling direction of the wire 26, and the second machining fluid supply space S <b> 2 is in contact with the workpiece 26 in contact with the workpiece W and cutting the workpiece W. Then, the machining liquid S is supplied. Further, as described above, the second machining liquid supply space S2 is formed by being surrounded by the lower surface 42a of the first duct 42, the upper surface 43a of the lower member 43, and the facing surface W1 of the workpiece W. Furthermore, the second machining fluid supply space S <b> 2 is applied with pressure in order to effectively allow the machining fluid S to enter the cutting groove of the workpiece W formed by contact with the wire 26.

  The pressure generated in the second machining fluid supply space S <b> 2 is the first pressure formed by the first duct 42 and the lower member 43 by the machining fluid S fed by the main pump 50 included in the machining fluid supply device 29 described above. This is caused by being sent to the upstream side close to the cutting start point 47 while being confined in the second machining fluid supply space S1, S2.

  Furthermore, in the second machining liquid supply space S2, the wire 26 having the machining liquid S attached to the surface thereof is traveling at high speed, and the machining liquid S adhered to the surface of the wire 26 collides with the facing surface W1 of the workpiece W. At this time, as described above, pressure is generated in the second machining fluid supply space S2, and the machining fluid S that has hitherto collided with the opposing surface W1 of the workpiece W and scattered around the second machining fluid is supplied to the second machining fluid. It is confined in the space S2 and held without being scattered around.

  As a result, a local pressure increase portion where the pressure is locally high occurs around the cutting start point 47. Since this local pressure increasing portion is formed in the vicinity of the cutting groove of the workpiece W, the machining liquid S can enter the depth of the cutting groove. As a result, in the wire saw 20 of the present embodiment, it is possible to improve the cutting efficiency of the wire 26 by supplying the machining liquid S to the depth of the cutting groove of the workpiece W as compared with the conventional case.

  Furthermore, in the conventional wire saw, the pressure around the wire immediately before cutting the workpiece cannot be sufficiently increased. Therefore, as shown in FIG. It only exists in the vicinity of, and the amount is reduced. For this reason, in the conventional wire saw, when the workpiece W is cut, a sufficient amount of the machining fluid S cannot be supplied to the most downstream side in the traveling direction of the wire 26 in the cutting groove of the workpiece W. May not be able to ensure proper cutting performance.

  In contrast, in the wire saw 20 of the present embodiment, the duct member 40 that forms the second machining fluid supply space S2 described above is provided, so that the machining fluid S in the workpiece cutting groove is not only around the wire 26. Widely present in the cutting groove.

  As a result, in the wire saw 20 of the present embodiment, when the workpiece W is cut, a sufficient amount of the machining fluid S can be supplied to the most downstream side in the traveling direction of the wire 26 in the cutting groove of the workpiece W. Therefore, compared with the conventional wire saw, the cutting performance of the workpiece | work W can be improved significantly, for example, effects, such as an improvement of cutting efficiency and reduction of the amount of process liquid supply, can be acquired.

  Hereinafter, in each example, a cutting experiment was performed using a conventional wire saw without the duct member 40 (hereinafter referred to as a conventional configuration) and the wire saw 20 of the present embodiment (hereinafter referred to as the configuration of the present embodiment). Various effects obtained by adopting the configuration of the present embodiment are verified.

<Example 1>
In this embodiment, when the workpiece W is cut using the duct member 40 as shown in FIG. 7, the feed speed of the workpiece W to the wire 26 (hereinafter referred to as the feed speed of the workpiece W), the wire 26. An experiment was conducted to confirm the cutting performance under various conditions in which the running speed and the supply amount of the machining fluid S were changed.

In the duct member 40 of FIG. 7, the structures of the duct member 40 and the tip member 44 shown in FIG. 5 are different, and the opening is wide.
In the present embodiment, as shown in FIG. 7, the distance between the tip member 44 of the first duct 42 and the facing surface W1 of the workpiece W is 7 mm, and the distance between the lower member 43 and the facing surface W1 of the workpiece W. The duct member 40 was used in which the distance between the upper plate and the lower plate of the second machining liquid supply space S2 was set to 11 mm.

  As specific experimental conditions, as shown in FIG. 8, first, a feed speed of a certain workpiece W is set as a reference speed V1, a flow rate of a certain machining liquid S is set as a reference flow rate Q1, and this is set as a condition 1. In condition 2, the work W feed speed was increased by 15% compared to condition 1. In condition 3, the feed rate of the workpiece W was increased by 15% compared to condition 1, and the flow rate of the machining fluid S was reduced by half. In condition 4, the feeding speed of the wire 26 was reduced by 15% with respect to condition 1.

(Wire cross-sectional area reduction rate)
First, the degree of reduction in the cross-sectional area of the wire 26 before and after cutting was compared between the conventional configuration and the configuration of the present embodiment.

  As a result, as shown in FIG. 9, in the condition 1, the reduction rate of the conventional wire saw was 17%. Hereinafter, this is referred to as a reference reduction rate. On the other hand, in the configuration of the present embodiment, the wire cross-sectional area is reduced by only 15%, and the reduction rate (wear amount) of the wire cross-sectional area can be reduced by 2%. That is, it was found that the life of the wire 26 can be extended by using the duct member 40 according to the above embodiment.

  In condition 2, the feed speed of the workpiece W is increased by 15% compared to condition 1, but in the conventional configuration, the wire cross-sectional area reduction rate is 19%, an increase of 2% from the reference reduction rate (17%). I have. On the other hand, in this example, even when the feed speed of the workpiece W was increased by 15%, the wire cross-sectional area reduction rate was 17%, which was equivalent to the reference reduction rate. In other words, in the configuration according to the above-described embodiment, the feed speed of the workpiece W is set to 15 while maintaining the same wire feed speed, the supply amount of the machining fluid S, and the cross-sectional area reduction rate (17%) of the wire 26 as in the past. % Improvement. This corresponds to an improvement in the cutting efficiency of the workpiece W by 15%.

  In condition 3, the supply rate of the machining fluid S is halved while the feed speed of the workpiece W is equal to that in condition 2 (up from 15% in condition 1). In the conventional configuration, the wire cross-sectional area reduction rate is somewhat reduced, and in the configuration according to the embodiment, the cross-sectional area reduction rate of the wire 26 is slightly increased.

  In Condition 4, the feed speed of the workpiece W is reduced by 15% compared to Condition 1, but in the conventional configuration, the wire cross-sectional area reduction rate is about 19.5%, which is from the reference reduction rate (17%). In contrast to the 2.5% increase, in the configuration according to the embodiment, the cross-sectional area reduction rate of the wire 26 is about 17.5%, which is 0.5% higher than the reference reduction rate (17%). It was found that the amount of wire 26 used can be reduced, although the effect of improving the workpiece W feed rate by 15% cannot be obtained.

(Output of driving motor)
Next, the results of examining the change in the output (the magnitude of the cutting resistance) of the traveling motor that runs the wire 26 during the cutting process under each condition 1 to 4 will be described with reference to FIG.

  In each of the conditions 1 to 4, as shown in FIG. 10, the increase in cutting of the traveling motor output in the configuration of the present embodiment was reduced by 20% or more compared to the conventional configuration. That is, according to this invention, it turned out that the magnitude | size of cutting resistance becomes small.

  As this factor, in the case of the present embodiment, since the cutting can be performed in a state where a sufficient amount of the machining liquid S is supplied into the cutting groove of the workpiece W, the cutting resistance due to the cutting out of the machining liquid or the like is reduced. This is considered to be because there is no increase and the cutting can be performed with a low cutting resistance.

  From the above, according to the present embodiment, it is possible to obtain effects such as a reduction in the wire cross-sectional area reduction rate and a reduction in cutting resistance as compared with the conventional case, and the cutting performance can be improved as compared with the conventional case. I understood.

<Example 2>
In this embodiment, when the workpiece W is cut using the three types of duct members 40 as shown in FIGS. 11 and 12A to 12C, the feed speed of the workpiece W, the machining fluid, An experiment was conducted to confirm the cutting performance under each condition where the supply amount of S was changed.

(duct)
Specifically, as shown in FIG. 11, as the duct 1, the distance between the tip member 44 of the first duct 42 and the facing surface W <b> 1 of the work W is 7 mm, and the distance between the lower member 43 and the facing surface W <b> 1 of the work W is set. The distance between them is 5 mm, the distance between the upper and lower plates of the third machining fluid supply space S3 is 11 mm, and the height distance of the tip opening of the second machining fluid supply space S2 facing the facing surface W1 of the workpiece W The duct member 40 set to 23 mm was used.

  Further, as the duct 2, the distance between the tip member 44 of the first duct 42 and the facing surface W1 of the workpiece W is 2 mm, the distance between the lower member 43 and the facing surface W1 of the workpiece W is 2 mm, and the second machining fluid Ducts set such that the distance between the upper plate and the lower plate of the supply space S2 is 11 mm, and the height distance of the tip opening of the second machining liquid supply space S2 facing the facing surface W1 of the workpiece W is 11 mm. Member 40 was used.

  As the duct 3, the distance between the tip member 44 of the first duct 42 and the facing surface W1 of the workpiece W is 3 mm, the distance between the lower member 43 and the facing surface W1 of the workpiece W is 2 mm, and the third machining fluid supply space The duct member 40 is set such that the distance between the upper plate and the lower plate of S3 is set to 11 mm, and the height distance of the tip opening of the second machining liquid supply space S2 facing the facing surface W1 of the workpiece W is set to 23 mm. It was used.

(Experimental conditions)
As experimental conditions for the ducts 1 to 3, as shown in FIG. 13, the feed speed of a certain workpiece W is set as a reference speed V 2, and the flow rate of a certain machining fluid S is set as a reference flow rate Q 2. Then, in condition 12, the feed rate of the workpiece W was increased by 15% compared to condition 11, and the flow rate of the machining liquid S was reduced by half.

(Wire cross-sectional area reduction rate and duct)
FIG. 14 is a comparison of wire cross-sectional area reduction rates when a cutting experiment is performed in conditions 11 and 12 using a conventional configuration and a configuration using each of the ducts 1 to 3. In condition 11, the reduction rate was 17% in the conventional configuration. Hereinafter, this is referred to as a reference reduction rate.

  In condition 11, the wire cross-sectional area reduction rate was smaller in the configuration using the ducts 1 and 2 than in the conventional configuration, and the amount of wire wear was suppressed. The wire cross-sectional area reduction rate of the configuration using the duct 1 is reduced by about 1.7% compared to the reference reduction rate (17%), and the wire cross-sectional area reduction rate of the configuration using the duct 2 is the standard reduction rate. Compared to (17%), it decreased by about 1.3%.

  Further, in the condition 12 in which the supply amount of the machining fluid S was reduced by half and the feed speed of the workpiece W was increased by 15%, the wire cross-sectional area reduction rate was about 18.8% in the conventional configuration, The configuration using the duct 1 was about 17.3%, and the configuration using the duct 2 was about 18.4%. The reduction rate of the wire cross-sectional area was small, and the wear amount of the wire was suppressed. In the duct 3, the result was almost the same as the conventional one.

(Driving motor output increase)
Next, for each of the ducts 1 to 3, the results of examining the change in the output of the traveling motor (the magnitude of the cutting resistance) for traveling the wire 26 during the cutting process under the conditions 11 and 12 are shown in FIG. 15. I will explain.

  Here, an operation in a state where the workpiece W is not pressed against the wire 26 is defined as an empty operation, and the workpiece W is attached to the wire 26 in the conventional wire saw device and the wire saw device using each of the ducts 1 to 3 for the idle operation. The amount of increase in the output of the motor for traveling when pressed against and was examined.

  As shown in FIG. 15, in condition 11, the increase in the output of the traveling motor with respect to the idle operation in the conventional wire saw device is about 5.2 kw, whereas in the ducts 1 and 2, about 3.9 kw, It was about 5 kw, and it was found that the increase in the traveling motor output (difference from the idling operation) can be reduced compared to the conventional case.

  Under condition 12 (work W feed speed 15% UP + working fluid S supply amount halved), the increase in the output of the motor for running in the conventional wire saw device with respect to the idle operation is about 5.3 kw. On the other hand, the ducts 1 to 3 are about 4 kW, about 4.7 kW, and about 4.7 kW, respectively. It was found that (difference from idling) can be reduced.

Furthermore, it was found that among the ducts 1 to 3, the result of the duct 1 can reduce the increase in the motor output for traveling (difference from the idling operation) most.
From the above results, when the ducts 1 to 3 of the present embodiment are used, the resistance at the time of cutting can be reduced as compared with the conventional case, and among them, the resistance at the time of cutting is most reduced when the duct 1 is used. I found out that I can do it.

<Distance between duct end and workpiece facing surface>
Here, in the wire saw 20 on which the duct member 40 according to the present embodiment described above is mounted, an experiment is performed on the rate of reduction in wire consumption with respect to the distance between the distal end portion (flange portion 44a) of the duct member 40 and the facing surface W1 of the workpiece W. The results will be described with reference to FIG.

As a result, as shown in FIG. 16, it has been found that the wire consumption reduction rate increases as the distance between the duct tip and the workpiece facing surface W1 decreases.
For example, when the distance between the duct tip and the workpiece facing surface W1 is set to 9 mm or less, the ratio of the wire consumption reduction amount can be increased to 10% or more, which is preferable.

In particular, when the distance between the duct tip and the workpiece facing surface W1 is set to 7 mm or less, the ratio of the wire consumption reduction amount can be increased to about 13% or more, which is more preferable.
<Simulation of machining fluid pressure in second machining fluid supply space S2>
Here, the result of examining the pressure of the machining fluid S in the second machining fluid supply space S2 in the wire saw 20 equipped with the duct member 40 described above by simulation will be described with reference to FIGS.

(Working fluid flow rate and working fluid pressure)
First, in FIGS. 17A to 17D, the supply amount of the machining liquid S by the main pump 50 of the machining liquid supply device 29 is changed to a standard flow rate, a double flow rate, a quadruple flow rate, and an 8-fold flow rate. The pressure of the machining fluid S in the second machining fluid supply space S2 is shown. Note that the standard flow rate in this case is independent of the reference flow rate under the experimental conditions.

  According to this, as shown in FIG. 26A, it can be seen that even when the flow rate of the machining fluid S is the standard flow rate, a high pressure portion (local pressure increase portion) is generated in the vicinity of the wire 26. This is because the working fluid adhering to the wire 26 is confined in the second working fluid supply space S2 so that it does not scatter around when it collides with the opposing surface W1 of the workpiece W. It shows that the value is high.

  Also, as shown in FIGS. 17B to 17D, when the flow rate of the machining liquid S becomes a double flow rate, a quadruple flow rate, or an 8-fold flow rate, there is a range of a high pressure portion generated in the vicinity of the wire 26. You can see that it is getting bigger.

  From the above results, when the flow rate of the machining liquid S by the main pump 50 of the machining liquid supply device 29 is increased, the pressure of the machining liquid S in the vicinity of the cutting start point 47 by the wire 26 can be locally increased. As a result, since a larger amount of the machining fluid S can be effectively pushed into the cutting groove by the wire 26 than before, cutting failure due to cutting of the machining fluid S and an increase in the amount of wear of the wire 26 can be prevented, and the cutting performance. Can be improved.

(Wire speed and machining fluid pressure)
Next, FIGS. 18A to 18C show the machining in the second machining fluid supply space S2 when the traveling speed of the wire 26 is changed to the standard speed, the 5-times speed, and the 10-times speed. The pressure of the liquid S is shown. Note that the standard speed in this case is independent of the reference speed under the experimental conditions.

  FIG. 19 is a graph in which the results of FIGS. 18A to 18C are digitized. As can be seen from this graph, the higher the traveling speed of the wire 26, the higher the pressure of the machining liquid S in the second machining liquid supply space S2.

(Distance between duct tip and workpiece facing surface and machining fluid pressure)
Next, in FIGS. 20A to 20C, the machining fluid S in the second machining fluid supply space S2 when the distance between the duct tip and the workpiece facing surface W1 is changed to 0 mm, 1 mm, and 2 mm. Shows the pressure. FIG. 21 shows the relationship between the distance between the duct tip and the workpiece facing surface W1 and the working fluid pressure in the vicinity of the cutting start point 47.

  According to this, as shown in FIGS. 20C and 20B, when the distance between the duct tip and the facing surface W1 of the workpiece W is 2 mm and 1 mm, around the cutting start point 47, A local pressure increase portion having a high local pressure (hereinafter referred to as local pressure) is formed. Further, as shown in FIG. 21, the local pressure is larger when the distance is 1 mm, which is smaller than when the distance is 2 mm.

  On the other hand, as shown in FIGS. 20A and 21, when the distance between the duct tip and the facing surface W1 of the workpiece is substantially 0, the local pressure is smaller than when the distance is 1 mm. This indicates that when the machining fluid S adhering to the wire 26 collides with the opposing surface W1 of the workpiece W, it flows backward in the vicinity of the second machining fluid supply space S2 and vortexes and does not change to static pressure. .

  That is, the pressure of the machining fluid S at the cutting start point 47 increases as the distance between the duct tip and the facing surface W1 of the workpiece W decreases to a distance of about 1 mm, It was found that when the distance was set to 0, the local pressure did not increase.

[Other Embodiments]
As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary of invention.

(A)
In the said embodiment, the dimension of each part including the distance of the front-end | tip part (part closest to the workpiece | work W of the front-end | tip member 44) of the duct member 40 and the opposing surface W1 of the workpiece | work W was demonstrated as an example. However, the present invention is not limited to this.

  For example, as shown in FIG. 22A, the distance δ between the tip end portion of the duct member 40 (the portion closest to the workpiece W of the tip member 44) and the facing surface W1 of the workpiece W is parallel to the wire 26 at the tip member 44. A length L1 of the lower portion 40, a length L2 of the lower member 40, a length L3 of the portion where the first duct 42 joins the second duct 46 and the machining fluid flows, and an upper plate of the second machining fluid supply space S2 The dimensions such as the distance d1 between the lower plate and the distance d2 between the upper plate and the wire 26 in the second machining fluid supply space S2 depend on, for example, the wire feed speed, the material and viscosity of the machining fluid, and the type of workpiece. The size may be changed to an optimum size as appropriate.

  Further, as shown in FIG. 22B, the duct member 140 may be formed in an inverted T shape having a machining fluid reservoir 141, a first duct 142, and a second duct 143. At this time, the first duct 142 and the second duct 143 are not necessarily substantially vertical. Even in this case, the pressure of the second machining fluid supply space S2 is increased by pumping the machining fluid S from the main pump 50, and in addition, the local pressure increasing portion is brought close to the cutting start point 47 by the drawing of the wire 26. As a result, the machining fluid is preferably supplied to the cutting groove.

In this case, the first duct 142 is not provided with a tip member, but the position 143a closest to the workpiece W on the upper side of the second duct 143 is the tip portion.
Furthermore, the front end of the first duct 142 may be bent to provide a flange portion, or a flange portion of another member may be attached to the front end of the first duct 142.

(B)
In the above embodiment, in order to maintain the pressure in the second machining fluid supply space S2, the flange portion 44a is provided at the tip of the tip member 44 of the duct member 40 substantially parallel to the facing surface W1 of the workpiece W. Explained with an example. However, the present invention is not limited to this.

  For example, as shown in FIG. 23 (a), instead of the flange portion 44a, a seal member 244a made of an elastic member such as rubber disposed along a direction substantially perpendicular to the facing surface W1 of the workpiece W is replaced with a duct member. It may be provided at the tip of 140. The seal member 244a may be in contact with the workpiece W or may not be in contact with the workpiece W.

Further, as shown in FIG. 23B, the seal member 244a is not limited to the direction substantially perpendicular to the facing surface W1 of the workpiece W, and may be inclined.
Further, as shown in FIG. 23C, the seal member 244a may be provided substantially perpendicular to the tip of the flange portion 44a, or the flange portion 44a may be extended over the flange portion 44a. Good. Furthermore, the flange portion 44a may be replaced with the seal member 244a as it is.

Alternatively, instead of the seal member 244a, a member whose shape is easily changed corresponding to a change in the shape of the workpiece, such as an elastic member or a bellows made of a metal material or the like, may be used.
At this time, the merit of using the seal member 244a and the bellows is that when the duct member 140 is installed on the workpiece W, the distance between the facing surface W1 of the workpiece W and the tip of the duct member 44 is not strictly matched. Adjustment is possible after installation by the seal member 244a or bellows. The seal member 244a and the bellows may be attached to the tip of the duct member 140 as shown in FIG.

  Further, as shown in FIG. 23 (d), the flange portion 44 a may be provided obliquely with respect to the facing surface W <b> 1 of the workpiece W. Furthermore, the flange portion 44a may not be provided, and the flange portion 44a may be attached to the tip of the first duct 42 as a separate member.

  In any case, the amount of the machining fluid S leaking from the gap between the tip of the duct member 140 and the facing surface W1 of the workpiece W is suppressed, and the pressure of the machining fluid in the second machining fluid supply space S2 is suppressed. Can be further enhanced.

(C)
In the above embodiment, in the wire saw 20 that cuts the workpiece W while switching the traveling direction of the wire 26, the machining fluid supply device 29 is provided on both sides of the workpiece W so as to sandwich the workpiece W in the traveling direction of the wire 26. Explained with examples. However, the present invention is not limited to this.

For example, in the case of a wire saw that cuts a workpiece with the wire traveling in one direction, the machining fluid supply device 29 may be provided only on the upstream side of the workpiece.
In other words, the present invention can be applied to both a wire saw that cuts a workpiece while moving the wire in one direction and a wire saw that cuts a workpiece while switching the traveling direction of the wire.

(D)
In the said embodiment, the example which used the metal as a material of a duct member was given and demonstrated. However, the present invention is not limited to this.
For example, any material that can withstand the pressure when the working fluid S is pumped may be used, and a non-metallic material such as a resin or a polymer compound may be used.

(E)
In the above embodiment, an example using the main pump 50 has been described as the machining fluid pressure feeding device. However, the present invention is not limited to this.
For example, a sub pump may be provided separately from the main pump 50, and the working fluid may be pumped to the contact portion between the facing surface W 1 of the workpiece W and the wire 26.

(F)
Moreover, although the said embodiment gave and demonstrated the example of the type of a wire saw using the processing liquid which mixed the loose abrasive in the oil agent, it is not limited to this.

  For example, it can also be used for a wire saw of a type using an oil agent in which abrasive grains such as diamond are previously attached to a wire and free abrasive grains are not mixed as a processing liquid.

  The wire saw of the present invention has the effect of preventing the machining fluid from being scattered to the surroundings and improving the cutting performance by sufficiently supplying the machining fluid to the cutting groove, thereby cutting various materials to be cut. It can be widely applied to a wire saw.

DESCRIPTION OF SYMBOLS 10 Control panel 11 Processing liquid tank 12 Heat exchanger 13 Operation panel 20 Wire saw 21 Base 22 Processing chamber 23 Cutting mechanism 24a, 24b Processing roller 25 Wire supply mechanism 26 Wire 27a, 27b Reel bobbin 28 Work support device 29 Processing liquid supply Equipment (working fluid pressure feeder)
31 Glass plate 32 Metal plate 33 Hold object 34 Hold piece 34a Restricted surface 35 Work support member 35a Restriction surface 36 Holding member 37 Cylinder 40 Duct member (wire saw duct device)
41 Working fluid reservoir 42 First duct 42a Lower surface 43 Lower member 43a Upper surface 44 Tip member 44a Flange 44b Lower surface 50 Main pump 51 Connection pipe 140 Duct member 141 Working fluid reservoir 142 First duct 143 Second duct 244a Seal member S Working fluid S1 First machining fluid supply space S2 Second machining fluid supply space (internal space)
S3 Second machining fluid supply space (internal space)
W Work W1 Opposite surface

Claims (12)

A wire saw that presses a workpiece against the wire and cuts the workpiece while supplying a working fluid to the traveling wire,
A machining fluid supply unit for supplying the machining fluid to the wire traveling from the upstream side in the traveling direction of the wire;
A moving mechanism that moves the workpiece relative to the wire that is running;
With
The machining fluid supply unit
A machining fluid pumping device for pumping the machining fluid;
The wire passes through the inside thereof, and the tip of the wire is disposed close to the workpiece, and the machining fluid pumped from the machining fluid pumping device connected thereto is brought into contact with the facing surface of the wire and the workpiece. A duct member for supplying the working fluid under pressure around the cutting start point when supplying to the section;
Having a wire saw. A wire saw that presses a workpiece against the wire and cuts the workpiece while supplying a working fluid to the traveling wire,
A machining fluid supply unit for supplying the machining fluid to the wire traveling from the upstream side in the traveling direction of the wire;
A moving mechanism that moves the workpiece relative to the wire that is running;
With
The machining fluid supply unit
A machining fluid pumping device for pumping the machining fluid;
The wire passes through the inside thereof, and the tip of the wire is disposed close to the workpiece, and the machining fluid pumped from the machining fluid pumping device connected thereto is brought into contact with the facing surface of the wire and the workpiece. A duct member to be supplied to the section;
Have
A flange portion projecting from the distal end portion of the duct member, that provides further, a wire saw. A flange projecting from the tip of the duct member,
The wire saw according to claim 1. The flange portion is disposed in parallel to the facing surface of the workpiece.
The wire saw according to claim 3 . The flange portion is formed of the same material as the duct member.
The wire saw according to claim 3 or 4 . At the tip of the duct member, a sealing member made of an elastic member or bellows is provided.
The wire saw according to any one of claims 1 to 5 . The seal member is in contact with the workpiece;
The wire saw according to claim 6 . The size of the gap between the front end of the duct member and the facing surface of the workpiece is variable.
The wire saw according to any one of claims 1 to 7 . The gap between the tip of the duct member and the facing surface of the workpiece is 9 mm or less.
The wire saw according to any one of claims 1 to 8 . The gap between the front end of the duct member and the facing surface of the workpiece is 7 mm or less.
The wire saw according to any one of claims 1 to 8 . The machining fluid supply unit is provided only on the upstream side of the workpiece in the traveling direction of the wire, or on the upstream side and the downstream side,
The wire saw according to any one of claims 1 to 10 . A duct device attached to a wire saw that presses a workpiece against the wire and cuts the workpiece while supplying a working fluid to the traveling wire,
A connecting portion connected to a machining fluid supply unit for pumping the machining fluid;
An opening disposed close to the workpiece;
An internal space through which the wire passes;
With
Supplying the working fluid under pressure around the cutting start point when the working fluid is pumped from the upstream side in the traveling direction of the wire toward the part where the workpiece is cut;
Wire saw duct device.

Images