201233904 六、發明說明： 【發明所屬之技術領域] 本發明係關於一種稱為機械升壓泵浦或魯式真空系浦 (Roots vacuum pump)白勺 | |、甫。 【先前技術】 機械升壓泵浦為使配置於殼體内的兩個_轉子互相 向相反方向同步旋轉，而從吸氣口往排氣口移送氣體的容 積移送型真空泵浦。機械升壓泵浦因無兩轉子間及各轉子 與殼體之間的接觸而機械損失非常少，相較㈣如油旋轉 式真空栗叙綱摩擦功大的真线浦，有可減少驅動所 需的能量這種優點。 、由於機械升壓泵浦在收容兩轉子的粟浦室内不需要潤 滑油，所以由油所造成的真空的污染少。另一方面 泵浦的運轉上，需要經常正確地維持兩轉子的 赤 ί轉=的中心，所以對於用以使各轉子同步旋轉的ί 輪、支持各轉子之旋轉轴的轴承 在收谷上述齒輪_輪室内儲存潤滑油， ^先 行各部的潤滑（參閱例如下述專利文獻丨）。 轉時進 。此外，在機械升壓泵浦方面，鄰接泵浦 上述齒輪的齒輪室、及收容使其中— *收谷 軸的驅動室。為了提高泵浦室内的密封村：旋轉之驅動 室分別和泵浦室連通 力被均勻化 ’回輪室及驅動 ’猎此錢浦的動作中，各室内的壓 在例如下述專利文獻2中記载了旦 泵浦室、收容使各轉子同步旋轉之齒輪的，-對？子的 旋轉自如地支持轉子軸的第2崎力 崎室、及 月至的夂轉式真空泵浦之 4/16 201233904 =室排氣裝置。此真空泵浦具有設於第 潤滑室之間的除氣用的第1通路、及設於第2 :二 浦室之間的除氣用的第2通路。 ^泵 油不直接流出到泵浦室，以 I 潤μ室内的 染。 s至以防止由泵浦室的油所造成的污 [先前技術文獻] [專利文獻] 專利文獻1曰本特開平6〜185483號 專利文獻2日本特開平5—1873 【發明内容】 報 [發明欲解決之課題] 然而，在上述專利文獻2中所記載的直处 特別是在果浦啟動時，到達除氣二 軋通路回到第i潤滑室側，而 Ί攸该除 稍微不足這種問題。:有第/間^月至内的潤滑油 滑之虞。 …’。果，有不能確保齒輪機構穩定潤 有鑑於如以上的情況，本201233904 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a so-called mechanical boost pump or a Roots vacuum pump. [Prior Art] The mechanical boost pump is a volume transfer type vacuum pump that transfers the gas from the intake port to the exhaust port in such a manner that the two rotors disposed in the casing rotate in opposite directions to each other. The mechanical boost pump has very little mechanical loss due to the absence of contact between the two rotors and between the rotors and the housing. Compared with the (4) oil-rotating vacuum pump, the true-line pulse with large frictional force is required to reduce the drive. The advantage of energy. Since the mechanical boost pump does not require lubricating oil in the Supu chamber that houses the two rotors, the vacuum caused by the oil is less polluted. On the other hand, in the operation of the pump, it is necessary to constantly maintain the center of the two rotors, so that the bearings for supporting the rotation of each rotor and the rotating shaft supporting the rotors are in the above-mentioned gears. _The indoor storage of lubricating oil, ^The lubrication of each part first (see, for example, the following patent document 丨). Going forward. Further, in terms of mechanical boost pumping, the gear chamber of the above-mentioned gear is adjacently pumped, and the drive chamber for accommodating the - - valley is accommodated. In order to improve the sealing village in the pumping chamber: the driving force of the rotating drive chamber and the pumping chamber are equalized in the 'returning chamber and driving' hunting, the pressure in each chamber is, for example, in Patent Document 2 below. It is described that the pump chamber is housed in a gear that rotates the rotors synchronously, right? The second rotation of the rotor shaft and the turbulent vacuum pump of the moon are 4/16 201233904 = room exhaust. This vacuum pump has a first passage for degassing provided between the first lubrication chambers and a second passage for degassing provided between the second and second chambers. ^The pump oil does not flow directly into the pumping chamber, so it can be dyed in the room. s to prevent the contamination caused by the oil in the pumping chamber. [PRIOR ART DOCUMENT] Patent Document 1 Patent Publication No. JP-A No. Hei. No. Hei. [Problem to be Solved] However, the straightness described in the above-mentioned Patent Document 2, particularly when the fruit is started, reaches the side of the degassing two-rolling passage and returns to the side of the i-th lubrication chamber, and this problem is slightly insufficient. . : There is a lubricant in the first / second month to the inside. ...’. If you can't ensure that the gear mechanism is stable, in view of the above situation, this
確保齒輪機構穩定潤滑的真空^浦。的在於提供一種可 [解決課題之手段J 為了達成上述目的，闕於本發明形態之 具備栗浦部、驅動部、旋轉傳達部、及限制構件Γ 配置 方向旋轉的第2轉子、及收容;^第1 =目反側的第2 子的第】室。 ^上述第1轉子與上述第2轉 上述驅動部具有使上述第]轉子旋轉的驅動機構、收 5/ 16 201233904 谷上述驅動機構的第2室、 連通的第1除氣通路。 及使上述第1室與上述第2室 上述旋轉傳達部具有使上述第1轉子與上述第2轉子 同步旋轉的it輪機構、收容上述錄機構並謂存潤滑上 述齒輪機構之潤滑油的第3 t、及使上述第3室連通到上 述第2室或上述第1室的第2除氣通路。 、上述關構件具有設於上述第2除氣通路上並限制上 述潤滑油從上述第3室流到上述第2室的限制部。 【實施方式】 關於本發明實施形態之一的真空泵浦具備果浦部、驅 動部、旋轉傳達部、及限制構件。 上述泵浦部具有可向第1方向旋轉的第1轉子、接近 述第1轉子並可向和上述第1方向相反側的第2 1的第2轉子、及收容上述第1轉子與上述第2轉 千的弟1室。 q^述驅動部具有使上述第1轉子旋轉的驅動機構、1 以驅動機構的第2室、及使上述第i室盥上述第2 , 連通的第1除氣通路。 /、上江第2 旋轉傳達部具有使上述第1轉子與上述第2轉· 、:、：二：齒輪機構' 收容上述齒輪機構並可儲存潤滑· 潤滑油的第3室、及使上述第3室連通到 述第2至或上述第1室的第2除氣通路。 、P1i=制構件具有設於上述第2除氣通路上並限制-述潤=油攸上述第3室流到上述第2室的限制部。 六而命真工泵浦方面，第1轉子由驅動機構承受驅〗 σ 方向旋轉。第2轉子藉由將第1轉子的旋轉〗 6/ 16 201233904 由齒輪機構傳達到第2轉子而向第2方向旋轉。藉此使第！ 3氣，並使收容驅動機構的第2室及收料“_第3 至也沒由第1除氣通路及第2除氣通料分別排氣。 洲ί上述真空果浦方面，具備在第2除氣通路上具有限 :=從第3室流到第2室的限制部的限制構件。因此， 室内的潤滑油之量的減少，確保齒輪機構穩定 體。=旋轉傳達部也可以更具有劃分上述第3室的殼 通路才’上述第2除氣通路包含形成於上述殼體内部的 流路Μ限制構件係以上述限制部遮蔽上述通路部之 肌^部分之方式被安裝於上述殼體上。 藉此，使侵入第2除氣通路的潤滑油 以可穩定地維持第3室内的潤滑油之量。到第3至所 ☆上述通路部也可以具有第】流路與第2流路。上 二路具有與重力方向平行的第i軸方向並第Make sure that the gear mechanism is stable and lubricated. In order to achieve the above object, the second rotor and the housing having the chestnut portion, the driving portion, the rotation transmitting portion, and the regulating member Γ in the arrangement direction are provided in the present invention. 1 = the first room of the second child on the opposite side of the head. The first rotor and the second rotation drive unit have a drive mechanism that rotates the first rotor, and a second chamber that communicates with the second chamber of the drive mechanism. And the rotation unit of the first chamber and the second chamber has an in-wheel mechanism that rotates the first rotor and the second rotor in synchronization, and a third portion that stores the recording mechanism and lubricates the lubricating oil of the gear mechanism And a second degassing passage that connects the third chamber to the second chamber or the first chamber. The closing member has a restricting portion that is provided in the second degassing passage and restricts the flow of the lubricating oil from the third chamber to the second chamber. [Embodiment] The vacuum pump according to one embodiment of the present invention includes a fruiting portion, a driving portion, a rotation transmitting portion, and a regulating member. The pumping unit includes a first rotor that is rotatable in a first direction, a second rotor that is adjacent to the first rotor and that is opposite to the first direction, and a first rotor and the second rotor. Turn a thousand brothers 1 room. The driving unit includes a driving mechanism that rotates the first rotor, a second chamber that is a driving mechanism, and a first degassing passage that connects the second chamber to the second. / The upper-stage second rotation transmitting unit has a third chamber in which the first rotor and the second rotation, the second gear mechanism are housed in the gear mechanism, and can store lubrication and lubricating oil, and the third chamber The third chamber is connected to the second degassing passage of the second to the first chamber or the first chamber. The P1i=component has a restriction portion provided in the second degassing passage and restricting the flow of the third chamber to the second chamber. In terms of the pump, the first rotor is rotated by the drive mechanism in the direction of σ. The second rotor rotates in the second direction by transmitting the rotation of the first rotor to the second rotor by the gear mechanism 6/16 201233904. Take this to the first! 3 gas, and the second chamber of the storage drive mechanism and the receiving material "_3 to the first degassing passage and the second degassing material are exhausted separately. (2) The degassing passage has a limit: = a restricting member that flows from the third chamber to the restricting portion of the second chamber. Therefore, the amount of lubricating oil in the room is reduced to secure the gear mechanism. The rotation transmitting portion can also have The second passage of the third deaeration passage includes a flow passage restricting member formed inside the casing, and the restricting member is attached to the casing so that the restricting portion shields the muscle portion of the passage portion In this way, the lubricating oil that has entered the second degassing passage can stably maintain the amount of lubricating oil in the third chamber. The third to the ☆ passage portions may have the first flow path and the second flow path. The second road has an i-axis direction parallel to the direction of gravity and
路具有與上述第1轴方向交又的第丄 向。此時，上述限制構件係以安裝於 H 體形成，該筒體具有位於上述第: 抓路上的同 上述限制部。 、上相卜姐内的第i端部做為 藉此，潤滑油難以進入第2流路，所 潤滑油流出到第2室側。瘡々k ± 有效地阻礙 因重力作用而有效地回_此3外室可使碰到限制部的潤滑油 G為面面，—面說明本發明的實施形態。 圖1為顯不關於本發明一每 ^ 剖面圖。圖2為顯示果浦二〜的真工泵浦的概略 中’X軸方向及相絲相互正交^平在方各向圖 7/16 201233904 向Γ重方力向方與此等x轴方向及γ軸方向正交的垂直方 成。1以單級的機械升壓泵浦構 ^ ，、有泵浦部2、驅動部3、及旋轉傳達部4。 π 部2具有形成果浦室23的第1殼體1第1殼體 泵浦梦⑼未圖不的真空室連絡的吸氣口 201、及與後段的 、置(例如旋轉泵浦)連絡的排氣口 202。吸氣口 201及 90氣口 ^02分別與果浦室23連通。泵浦室23為第1殼體 ;、及氣密地安裝於第1殼體2Q兩側關壁24、Μ所劃 果浦部2具有一對轉子2卜22。轉子2卜22分別具有 與Y軸方向平行延伸的旋轉輛210、220。轉子21、具 有_(印袋)型的剖面，如圖2所示，被相互接近配置並收容 於泵浦室23内。在此等轉子21、22之間、轉子21、22與 第1殼體20之間、及轉子2卜22與間壁24、25之間分別 保有微小的間隙(例如0.02〜〇.〇4mm程度）。 旋轉軸210、220分別貫穿間壁24、25，旋轉軸21〇、 220其中一方的端部位於驅動部3内的馬達室33。而且， 旋轉軸210、220另一方的端部位於旋轉傳達部4内的齒輪 驅動部3具有氣密地安裝於間壁24上的第2殼體3〇， 馬達室33形成於第2殼體30的内部。在間壁24的馬達室 33側分別設有旋轉自如地支持旋轉軸21〇、22〇的輛承μ 及軸封32。 馬達室33經由第1除氣通路！^而與泵浦室幻連通。 藉此’馬達室33可經由第1除氣通路P1而除氣，在真空 8/ 16 201233904 J 作時’和果浦室23的壓力 开-4中，幻除氣 J化在本實施 通路形成。 ^以在Υ轴方向貫穿間壁24的 馬達^:有^有輯子21的旋轉軸加旋轉的馬達35。 〇令被固定於第2殼體3〇上， 文α 構50而與旋轉軸 並且！由磁耦合機 有固定於旋轉^的娜35°。_合機構心 於驅動軸聊嫩的内周側磁鐵51、及固定 51、52之間的狀的外周側磁鐵52，藉由此等磁鐵 内周側磁鐵相互連結旋轉軸210與驅動轴35。。 地口疋於形成在第2殼體3〇内周面的環狀凸部3〇a上。 配置内周側磁鐵51的馬達室33及配置外周 氣室34為分隔構件55所隔離。 旋轉傳達部4具有氣密地安裝於間壁25上的第3殼體 40 ’齒輪室43形成於第3殼體40的内部。在間壁25的齒 輪室43側分別設有旋轉自如地支持旋轉軸21〇、22〇的軸 承45及軸封46。 第3殼體40形成收容使轉子21、22相互向反方向同 步旋轉之齒輪機構的齒輪室43。上述齒輪機構具有固定於 旋轉軸210端部的同步齒輪41、及固定於旋轉軸220端部 的同步齒輪42。藉此，其中一方的旋轉軸21〇藉由驅動馬 達35的驅動而繞其軸旋轉’就將旋轉力經由同步齒輪41、 42而傳達到另一方的旋轉軸220。此時，旋轉軸22〇向和 9/16 201233904 旋轉軸210相反的方向旋轉。 齒輪室43内儲存用以潤滑齒輪機構的潤滑油G。在同 步齒輪41、42的前端固定有桴上潤滑油G的平板47，藉 由和同步齒輪41、42共同旋轉’使潤滑油G供應給同步齒 輪41、42、軸承45等。藉此，可使轉子21、22 —面維持 其相對位置一面使其適當地旋轉。在第3殼體40上設有用 以確認齒輪室43内的潤滑油G之儲存量的窗44。而且， 為了抑制同步齒輪4卜42的旋轉所造成的潤滑油〇的飛散 而在齒輪室43設有擋板48。擋板48具有安裝於間壁25上 的大致平板形狀，以便覆蓋同步齒輪41、42的上部。 齒輪室43經由第2除氣通路P2而與馬達室33連通。 藉此’齒輪室43經由第2除氣通路P2而可被除氣，在真 空泵浦1的動作時，和馬達室33及泵浦室23的壓力被均 勻化。 在本實施形態中，第2除氣通路P2經由第3殼體4〇 間壁25、第1殼體20及間壁24而使齒輪室43連通到馬. 室33。第2除氣通路P2主要是由在γ軸方向貫穿第工, 體20、間壁24、25的主通路部P2卜及形成於第3殼體、 的連絡通路部P22所形成。再者，也可以藉由在第2咬, 3〇上也—形朗樣的連絡祕部，耐目科魅通路部^ ^、馬達至3 3。 圖3為顯示連絡通路部p22詳細的 圖。連絡通路部P22具有第丨流路咖、及第 第1流路_係在Z軸方向具有軸方向丄:：P22 輪室43。第2流路P222係在γ ，、鳊邛面向¥ 第！流路咖與主通路部P21之間。向、有軸方向’ 10/16 201233904 本貫施形態的真空泵浦〗具有限制構 形態中，限制構件60具有圓筒形狀，其α 1本實施 Ρ222嵌合，另-端部以遮蔽第1流路Ρ221的第2流路 位於第1流路P221内。此限制構件6〇的另」分之方式 做為限制崎油G從齒輪室43朗馬達^部起作用 也可=:6_質沒有特別限定， 等形成Lit:在本實施形態中，以不_輪 就如以上所構成的真空泵浦1的動作進行說明。 合機構達35的動作，旋轉轴210經由磁耗 2! ^ Γ 共同旋轉，在聚浦室D内轉子 傳達到轉^卜旋轉軸21Q的旋轉力在旋轉傳達部4中被 向和轉Ϊ 21 軸，藉此轉子22和轉子21同步 栗浦部轉子21、22的旋轉， 出的預定的栗=⑽1吸入的氣體向排氣口 2。2排 由第ϊ及ί 〜至43伴隨策浦室23的壓力降低，經 與鄰接通路P1、Ρ2而被減壓。藉此，栗浦室23 /至3的馬達室33及齒輪室43之間的差壓變 斤以可防止由果浦㈣的茂漏所造成的泵浦性能的降The road has a third direction that intersects with the first axis direction. At this time, the restricting member is formed by being attached to the H body, and the cylindrical body has the same restricting portion on the first gripping path. In this way, the i-th end of the upper phase is used to make it difficult for the lubricating oil to enter the second flow path, and the lubricating oil flows out to the second chamber side. The scab k ± effectively hinders the effective return of the gravitational force. The outer chamber of the third chamber can make the lubricating oil G that hits the restricting portion a surface, and the embodiment of the present invention will be described. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view of the present invention. Fig. 2 is a schematic diagram showing the actual pumping of the Guopu 2~ 'X-axis direction and the phase wires are orthogonal to each other. The horizontal direction is shown in Fig. 7/16 201233904, and the direction of the x-axis is in the direction of the x-axis. And the vertical direction orthogonal to the γ-axis direction. 1 is a single-stage mechanical boost pump configuration, a pumping unit 2, a driving unit 3, and a rotation transmitting unit 4. The π portion 2 has an intake port 201 that is connected to a vacuum chamber in which the first casing 1 of the first chamber 1 of the fruit chamber 23 is pumped (9), and a connection with a rear stage (for example, a rotary pump). Exhaust port 202. The intake ports 201 and 90 ports ^02 are in communication with the Guopu chamber 23, respectively. The pump chamber 23 is a first casing; and is airtightly attached to the closing wall 24 on both sides of the first casing 2Q, and the pumping portion 2 has a pair of rotors 22. The rotors 2b 22 respectively have rotating vehicles 210, 220 extending in parallel with the Y-axis direction. The rotor 21 and the cross section having the _ (printed bag) type are disposed close to each other and housed in the pump chamber 23 as shown in Fig. 2 . A slight gap is maintained between the rotors 21 and 22, between the rotors 21 and 22 and the first casing 20, and between the rotors 22 and the partitions 24 and 25 (for example, 0.02 to 〇.〇4 mm). ). The rotating shafts 210 and 220 respectively penetrate the partition walls 24 and 25, and one of the rotating shafts 21 and 220 is located in the motor chamber 33 in the driving unit 3. Further, the other end of the rotating shafts 210 and 220 is located in the gear driving unit 3 in the rotation transmitting unit 4, and the second housing 3 is airtightly attached to the partition wall 24. The motor chamber 33 is formed in the second housing. The interior of 30. On the motor chamber 33 side of the partition wall 24, a bearing member 51 and a shaft seal 32 that rotatably support the rotating shafts 21A and 22B are respectively provided. The motor chamber 33 passes through the first degassing passage! ^ and connected to the pump room. Thereby, the 'motor chamber 33 can be degassed via the first degassing passage P1, and during the vacuum 8/16 201233904 J' and the pressure opening of the Guopu chamber 23, the magical degassing is formed in the present passage. . A motor that passes through the partition wall 24 in the direction of the x-axis: a motor 35 having a rotating shaft of the set 21 and a rotating motor 35. The cymbal is fixed to the second housing 3〇, and the structure is 50 and the rotation axis and! The magnetic coupling machine has a fixed 35° rotation of the rotor. The inner peripheral side magnet 51 of the drive shaft and the outer peripheral side magnet 52 of the fixed shape 51 and 52 are connected to each other by the magnet inner peripheral side magnet and the drive shaft 35. . The ground opening is formed on the annular convex portion 3〇a formed on the inner circumferential surface of the second casing 3〇. The motor chamber 33 in which the inner circumference side magnet 51 is disposed and the arrangement outer peripheral air chamber 34 are isolated by the partition member 55. The rotation transmitting portion 4 has a third housing 40' that is airtightly attached to the partition wall 25'. The gear chamber 43 is formed inside the third housing 40. A bearing 45 and a shaft seal 46 that rotatably support the rotating shafts 21A and 22B are provided on the gear chamber 43 side of the partition wall 25, respectively. The third casing 40 forms a gear chamber 43 that accommodates a gear mechanism that rotates the rotors 21, 22 in opposite directions to each other. The gear mechanism has a synchronizing gear 41 fixed to the end of the rotating shaft 210 and a synchronizing gear 42 fixed to the end of the rotating shaft 220. Thereby, one of the rotating shafts 21'' is rotated about its axis by the driving of the driving motor 35, and the rotational force is transmitted to the other rotating shaft 220 via the synchronizing gears 41, 42. At this time, the rotating shaft 22 turns in the opposite direction to the 9/16 201233904 rotating shaft 210. The lubricating oil G for lubricating the gear mechanism is stored in the gear chamber 43. At the front end of the synchronous gears 41, 42, a flat plate 47 of the lubricating oil G is fixed, and the lubricating oil G is supplied to the synchronous gears 41, 42, the bearing 45, and the like by co-rotating with the synchronizing gears 41, 42. Thereby, the rotors 21, 22 can be rotated while being maintained in their relative positions. A window 44 for confirming the amount of storage of the lubricating oil G in the gear chamber 43 is provided in the third casing 40. Further, a baffle 48 is provided in the gear chamber 43 in order to suppress the scattering of the lubricating oil 造成 caused by the rotation of the synchronizing gear 4b. The shutter 48 has a substantially flat plate shape mounted on the partition wall 25 so as to cover the upper portions of the synchronizing gears 41, 42. The gear chamber 43 communicates with the motor chamber 33 via the second degassing passage P2. Thereby, the gear chamber 43 can be deaerated via the second degassing passage P2, and the pressures of the motor chamber 33 and the pump chamber 23 are equalized during the operation of the vacuum pump 1. In the present embodiment, the second deaeration passage P2 communicates the gear chamber 43 to the horse chamber 33 via the third casing 4, the partition wall 25, the first casing 20, and the partition wall 24. The second deaeration passage P2 is mainly formed by a main passage portion P2 that penetrates the workpiece 20, the partition walls 24, 25 in the γ-axis direction, and a contact passage portion P22 formed in the third casing. In addition, it is also possible to make a contact with the secret part of the second bite, 3 〇, and the head of the eye, and the motor to 3 3 . Fig. 3 is a view showing the details of the contact passage portion p22. The contact passage portion P22 has a second flow path and a first flow path having an axial direction 丄::P22 wheel chamber 43 in the Z-axis direction. The second flow path P222 is in the γ, and the 鳊邛 is facing the ¥! The flow path is between the flow path and the main passage portion P21. Directional and axial direction '10/16 201233904 The vacuum pumping mode of the present embodiment has a restricted configuration. The restricting member 60 has a cylindrical shape, and the α 1 is configured to be fitted with the Ρ 222, and the other end is used to shield the first flow. The second flow path of the path 221 is located in the first flow path P221. The other way of restricting the restriction member 6〇 is to limit the effect of the oil G from the gear chamber 43. The quality of the restriction oil G can be determined as follows: 6_Quality is not particularly limited, and the like is formed. Lit: In the present embodiment, The _ wheel is described as the operation of the vacuum pump 1 configured as described above. When the mechanism reaches 35, the rotating shaft 210 rotates together via the magnetic loss 2! ^ ,, and the rotational force transmitted from the rotor to the rotating shaft 21Q in the collecting chamber D is turned and turned in the rotation transmitting portion 4 The shaft, whereby the rotor 22 and the rotor 21 synchronize the rotation of the chestnut rotors 21, 22, and the predetermined pump = (10) 1 inhaled gas is directed to the exhaust port 2. The second row is accompanied by the third and third to the 43 chambers 23 The pressure is lowered and decompressed by the adjacent passages P1 and Ρ2. Thereby, the differential pressure between the motor chamber 33 of the chestnut chamber 23/3 and the gear chamber 43 is reduced to prevent the drop in pumping performance caused by the leakage of the fruit (4)
I ^21 22的疑轉時’同步齒輪41、42為儲存於齒 、=^的潤滑油G所潤滑。如上所述，齒輪室43和栗 ^被排氣。此時，潤滑油G也被除氣，該除氣經 广除氣通路P2巾往馬達室％側被排放。此時，潤滑 ’因除乳而激烈地起泡，並且也伴隨由平板47的旋轉所 11/16 201233904 產生的攪拌作用，潤滑油的飛沫在齒輪室43的内部飛散。 雖然推板48抑制潤滑油G的飛散’但如同例如泵浦啟動時 一般’在潤滑油G的起泡激烈的情況，有時會越過擋板48 而到達除氣通路P2。在齒輪室43内飛散的潤滑油到達除氣 通路P2，就和齒輪室43的殘留氣體共同往馬達室33側流 出。若忽視此狀態，則潤滑油G的儲存量會減少，產生不 能穩定地維持同步齒輪41、42或軸承45的潤滑作用的擔 心。 於是，在本實施形態中，在除氣通路P2上設有限制構 件60。如圖3所示，限制構件60的限制部61以遮蔽第1 流路P221的一部分之方式安裝於第2流路P222上。藉此， 以限制部61承受侵入第1流路P221的潤滑油G的飛沫， 限制潤滑油G侵入第2流路P222。藉此，阻止潤滑油G從 齒輪室43向馬達室33的流出，可確保同步齒輪41、42或 軸承45等穩定的潤滑作用。 此外’由於限制構件60以筒體構成，所以可經由限制 構件60的内部而將齒輪室43内的殘留氣體有效地引導到 第2流路P222。 再者’依據本實施形態，由於以第1流路P221與第2 流路P222構成除氣通路p2的連絡通路部P22，所以可使 被限制部61擋住的潤滑油g利用重力作用而有效地回到齒 輪室43。藉此’可防止連絡通路部p22内的潤滑油〇的停 滯。 從第2流路P222向第1流路P221突出的限制部61的 突出量沒有特別限定，可按照齒輪室43的容積、除氣通路 P2的剖面積、潤滑油G的儲存量等適當設定。 12/16 201233904 以上，雖然就本發明的實施形態進行了說明，但本發 明並不限於此，可根據本發明的技術思想進行各種變更。 例如，在以上的實施形態中，係在對於第i流路p221 正交的方向形成連絡通路部P22的第2流路P222，但不限 於此，第2流路P222也可以從第1流路P221向主通路部 P21以向上傾斜形成。 此外，在以上的貫施形態中，係以筒體的端部形成限 制部61，但不限於此，也可以是平面的板部。此外，也可 以^在該板部形成有單數個或複數個除氣用的孔的形態。 此時，該板部也可以配置於第1流路的全區。 ，者，在以上的實施形態中，係在間壁24上形成有第 1除氣通路P1 ’但該除氣通路P1也可以用連絡泵浦室23 與馬達至33的另外的配管構件構成。此外，第1除氣通路 P1不限於使馬達室33直接連通到泵浦室23的情況，也可 以連通到栗浦室23的吸氣側或排氣側。 ，2除氣通路P2也同樣，也可以用連絡齒輪室幻與 馬達室33的另外的配管構件構成。再者，第2除氣通路p2 ，可以以不經由馬達室33而使齒輪室43直接連通到果浦 至、23一的方式構成。藉由設置限制構件60抑制潤滑油侵入 泵浦室23，可將泵浦室23維持在潔淨的狀態。 又 用於在以上的實施形態中，軸說明了將本發明適 、、早'，及式的機械升壓泵浦之例，但不限於此，本笋 :以適用—於例如多級式的魯式泵浦等其他的真空泵浦' 【圖式簡單說明】 圖1為關於本發明-實施形態的真空泵浦的概略剖面 13/16 201233904 圖2為顯示上述真空泵浦的泵浦部之結構的剖面圖。 圖3為說明上述真空泵浦的除氣通路之結構的主要部 位剖面圖。 【主要元件符號說明】 1 真空泵浦 2 泵浦部 3 驅動部 4 旋轉傳達部 20、30、40 殼體 21 > 22 轉子 23 泵浦室 24 > 25 間壁 30a 環狀凸部 31 ' 45 轴承 32、46 轴封 33 馬達室 34 大氣室 35 馬達 41 > 42 同步齒輪 43 齒輪室 44 儲存量的窗 47 平板 48 擋板 50 磁耦合機構 51 内周側磁鐵 52 外周侧磁鐵 14/16 201233904 53、54 支持構件 55 分隔構件 60 限制構件 61 限制部 201 吸氣口 202 排氣口 210 、 220 旋轉軸 G 潤滑油 PI 第1除氣通路 P2 第2除氣通路 P21 主通路部 P22 連絡通路部 P221 第1流路 P222 第2流路 15/16When the I ^ 21 22 is suspected of turning, the synchronous gears 41 and 42 are lubricated by the lubricating oil G stored in the teeth and =^. As described above, the gear chamber 43 and the pump are exhausted. At this time, the lubricating oil G is also deaerated, and the degassing is discharged to the motor chamber % side via the wide degassing passage P2. At this time, the lubrication 'foaming is intense due to degreasing, and the agitation of the lubricating oil is scattered in the inside of the gear chamber 43 by the stirring action by the rotation of the flat plate 47 11/16 201233904. The push plate 48 suppresses the scattering of the lubricating oil G. However, as in the case of, for example, pump start-up, when the foaming of the lubricating oil G is intense, the baffle 48 may be passed over the degassing passage P2. The lubricating oil scattered in the gear chamber 43 reaches the degassing passage P2, and flows out to the motor chamber 33 side together with the residual gas in the gear chamber 43. When this state is ignored, the amount of the lubricating oil G stored is reduced, and the fear that the lubricating gears of the synchronizing gears 41, 42 or the bearing 45 cannot be stably maintained is generated. Therefore, in the present embodiment, the restricting member 60 is provided in the deaeration passage P2. As shown in FIG. 3, the restricting portion 61 of the restricting member 60 is attached to the second flow path P222 so as to shield a part of the first flow path P221. Thereby, the restriction portion 61 receives the droplets of the lubricating oil G that has entered the first flow path P221, and restricts the entry of the lubricating oil G into the second flow path P222. Thereby, the outflow of the lubricating oil G from the gear chamber 43 to the motor chamber 33 is prevented, and stable lubricating action such as the synchronizing gears 41, 42 or the bearing 45 can be ensured. Further, since the restricting member 60 is formed of a cylindrical body, the residual gas in the gear chamber 43 can be efficiently guided to the second flow path P222 via the inside of the regulating member 60. According to the present embodiment, the first flow path P221 and the second flow path P222 constitute the communication passage portion P22 of the deaeration passage p2, so that the lubricating oil g blocked by the restriction portion 61 can be effectively moved by gravity. Return to the gear chamber 43. Thereby, the stagnation of the lubricating oil hopper in the communication passage portion p22 can be prevented. The amount of protrusion of the restricting portion 61 that protrudes from the second flow path P222 to the first flow path P221 is not particularly limited, and can be appropriately set in accordance with the volume of the gear chamber 43, the sectional area of the deaeration passage P2, the storage amount of the lubricating oil G, and the like. Although the embodiment of the present invention has been described above, the present invention is not limited thereto, and various modifications can be made in accordance with the technical idea of the present invention. For example, in the above embodiment, the second flow path P222 that connects the passage portion P22 is formed in a direction orthogonal to the i-th flow path p221. However, the present invention is not limited thereto, and the second flow path P222 may be from the first flow path. P221 is formed to be inclined upward toward the main passage portion P21. Further, in the above-described embodiment, the restricting portion 61 is formed at the end portion of the cylindrical body. However, the present invention is not limited thereto, and may be a flat plate portion. Further, a form of a single or a plurality of holes for degassing may be formed in the plate portion. In this case, the plate portion may be disposed in the entire area of the first flow path. In the above embodiment, the first deaeration passage P1' is formed in the partition wall 24. However, the deaeration passage P1 may be constituted by another piping member that connects the pump chamber 23 and the motor to 33. Further, the first deaeration passage P1 is not limited to the case where the motor chamber 33 is directly communicated to the pump chamber 23, and may be connected to the intake side or the exhaust side of the chestnut chamber 23. Similarly, the 2 degassing passage P2 may be constituted by another piping member that connects the gear chamber to the motor chamber 33. Further, the second degassing passage p2 can be configured such that the gear chamber 43 is directly connected to the Guopu to 23 without passing through the motor chamber 33. By providing the restriction member 60 to suppress the intrusion of the lubricating oil into the pump chamber 23, the pump chamber 23 can be maintained in a clean state. Further, in the above embodiment, the shaft has been described as an example of the mechanical boost pumping of the present invention, and is not limited thereto. The present invention is applicable to, for example, a multi-stage type. Fig. 1 is a schematic cross-sectional view of a vacuum pump according to the present invention-embodiment 13/16 201233904. Fig. 2 is a cross section showing the structure of the vacuum pumped pump portion. Figure. Fig. 3 is a cross-sectional view showing the main part of the structure of the above-described vacuum pumped degassing passage. [Description of main component symbols] 1 Vacuum pumping 2 Pumping section 3 Driving section 4 Rotation transmitting section 20, 30, 40 Housing 21 > 22 Rotor 23 Pumping chamber 24 > 25 partition 30a Annular projection 31 ' 45 Bearing 32, 46 Shaft seal 33 Motor chamber 34 Atmosphere chamber 35 Motor 41 > 42 Synchronous gear 43 Gear chamber 44 Storage window 47 Plate 48 Baffle 50 Magnetic coupling mechanism 51 Inner circumference side magnet 52 Outer side magnet 14/16 201233904 53, 54 support member 55 partition member 60 restriction member 61 restriction portion 201 intake port 202 exhaust port 210, 220 rotary shaft G lubricating oil PI first deaeration passage P2 second deaeration passage P21 main passage portion P22 communication passage portion P221 First flow path P222 Second flow path 15/16