KR100408154B1 - Roots vacuum pump - Google Patents
Roots vacuum pump Download PDFInfo
- Publication number
- KR100408154B1 KR100408154B1 KR10-2001-0048908A KR20010048908A KR100408154B1 KR 100408154 B1 KR100408154 B1 KR 100408154B1 KR 20010048908 A KR20010048908 A KR 20010048908A KR 100408154 B1 KR100408154 B1 KR 100408154B1
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- South Korea
- Prior art keywords
- pump
- root
- inlet
- motor
- outlet
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- 238000007789 sealing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000004891 communication Methods 0.000 description 3
- 230000002730 additional effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Abstract
본 발명은 루트 진공펌프에 관한 것으로서,The present invention relates to a root vacuum pump,
종래에는 루트펌프에서 배출된 가스가 모두 후단펌프를 통해 배출되지 못하고 후단펌프와 루트펌프의 사이에 존재하게되면 루트펌프를 가동시킬수록 루트펌프의 출구측 압력이 점점높아지게되며, 결국에는 높은 가스압에 의해 루트펌프의 로터와 같은 부품과 모터가 파손되는 문제점이 발생하고 있었다.Conventionally, when all the gas discharged from the root pump is not discharged through the rear end pump and is present between the rear end pump and the root pump, the outlet pressure of the root pump is gradually increased as the root pump is operated. As a result, parts such as the rotor of the root pump and the motor were damaged.
따라서, 상기 문제점을 해결하기 위한 본 발명은 실린더의 흡입구측과 배출구측을 상호연결하는 별도의 바이패스통로를 앞커버와 뒷커버의 내부에 형성하고, 실린더의 배출구측 배기압력이 기준치 이상일 경우 자동 개폐되는 밸브를 바이패스통로의 입구측에 형성하므로서, 루트진공펌프의 배기압이 항상 일정치를 유지하도록 하여 높은 배기압에 의해 펌프와 모터가 파손되는 현상을 미연에 방지할 수 있도록 하고, 이에의해 루트펌프와 후방펌프를 동시에 작동시킬 수 있게되어 작업시간을 현저히 단축시킬 수 있도록 한 루트진공펌프에 관한 것이다.Therefore, the present invention for solving the above problems is formed in the interior of the front cover and the rear cover and a separate bypass passage for interconnecting the inlet and outlet side of the cylinder, automatic when the exhaust side exhaust pressure of the cylinder is more than the reference value By opening and closing the valve at the inlet side of the bypass passage, the exhaust pressure of the root vacuum pump is always maintained at a constant value to prevent the pump and motor from being damaged by the high exhaust pressure. The present invention relates to a root vacuum pump that can simultaneously operate the root pump and the rear pump to significantly shorten the working time.
Description
본 발명은 루트 진공펌프에 관한 것으로서, 특히 루트진공펌프의 배기압이 항상 일정치를 유지하도록 하여 높은 배기압에 의해 펌프와 모터가 파손되는 현상을 미연에 방지할 수 있도록 하고, 이에의해 루트펌프와 후방펌프를 동시에 작동시킬 수 있게되어 작업시간을 현저히 단축시킬 수 있도록 한 루트진공펌프에 관한 것이다.The present invention relates to a root vacuum pump, and in particular, the exhaust pressure of the root vacuum pump to maintain a constant value at all times to prevent the phenomenon that the pump and motor damage due to the high exhaust pressure, thereby preventing the root pump The present invention relates to a root vacuum pump that can simultaneously operate the pump and the rear pump, thereby significantly reducing the working time.
루트 진공펌프는 메커니컬 부스터(Mechanical booster)라고 불리어 지는데 많은 양의 가스를 짧은 시간내에 작업하고자 할 때 사용되고, 진공도(Ultimate pressure)는 후단펌프에 의해 결정되며, 루트펌프 단독으로는 사용되지 않는다.Root vacuum pumps, called mechanical boosters, are used to work with a large amount of gas in a short time, and ultimate pressure is determined by the rear end pump and is not used by the root pump alone.
즉, 루트펌프를 사용할때에는 도 1 에 도시된 바와같이 루트펌프와 후단펌프를 연결하여 사용하게되고, 후단펌프와 루트펌프의 배기속도비는 보통 1: 4~6 으로 사용되며 조합된 펌프가 동시에 대기압력(760 Torr) 작업가스를 작업할 경우 루트펌프에서 흡입하여 배출한 가스를 후단펌프에서 전부 배기시키지 못하고 루트펌프의 배기구와 후단펌프의 흡입구 사이에 존재하게된다.That is, when the root pump is used, as shown in FIG. 1, the root pump and the rear pump are connected and used, and the exhaust speed ratio of the rear pump and the root pump is usually 1: 4 to 6, and the combined pump is used simultaneously. In case of working at atmospheric pressure (760 Torr) working gas, the gas which is inhaled and discharged from the root pump is not exhausted from the rear stage pump, but exists between the exhaust port of the root pump and the inlet of the rear stage pump.
상기와같이 루트펌프에서 배출된 가스가 모두 후단펌프를 통해 배출되지 못하고 후단펌프와 루트펌프의 사이에 존재하게되면 루트펌프를 가동시킬수록 루트펌프의 출구측 압력이 점점높아지게되며, 결국에는 높은 가스압에 의해 루트펌프의 로터와 같은 부품과 모터가 파손되는 문제점이 발생하고 있었다.If the gas discharged from the root pump is not discharged through the rear end pump and is present between the rear end pump and the root pump as described above, as the root pump is operated, the outlet pressure of the root pump is gradually increased. This caused a problem in that parts such as the rotor of the root pump and the motor were damaged.
상기와같은 문제점을 해결하기위해 진공설비의 진공도를 10Torr 부근의 압력까지는 후단펌프로 작업을 한 후에 루트펌프를 작동시켜 작업하고 있는데 이러한 방법은 루트펌프와 후단펌프를 동시에 작동시키지 못하는 이유로 작업시간이 길어지고, 또한 진공시스템의 구조가 복잡해지는 문제점이 발생하고 있었다.In order to solve the above problems, the vacuum level of the vacuum equipment is worked up to the pressure of around 10 Torr, and then the root pump is operated. This method has a long time because the root pump and the rear pump are not operated at the same time. There has been a problem of lengthening and complicated structure of the vacuum system.
따라서, 상기 문제점을 해결하기 위한 본 발명은 실린더의 흡입구측과 배출구측을 상호연결하는 별도의 바이패스통로를 앞커버와 뒷커버의 내부에 형성하고, 실린더의 배출구측 배기압력이 기준치 이상일 경우 자동 개폐되는 밸브를 바이패스통로의 입구측에 형성하므로서, 루트진공펌프의 배기압이 항상 일정치를 유지하도록 하여 높은 배기압에 의해 펌프와 모터가 파손되는 현상을 미연에 방지할 수 있도록 하고, 이에의해 루트펌프와 후방펌프를 동시에 작동시킬 수 있게되어 작업시간을 현저히 단축시킬 수 있도록 한 루트진공펌프를 제공함을 목적으로 한다.Therefore, the present invention for solving the above problems is formed in the interior of the front cover and the rear cover and a separate bypass passage for interconnecting the inlet and outlet side of the cylinder, automatic when the exhaust side exhaust pressure of the cylinder is more than the reference value By opening and closing the valve at the inlet side of the bypass passage, the exhaust pressure of the root vacuum pump is always maintained at a constant value to prevent the pump and motor from being damaged by the high exhaust pressure. It is an object of the present invention to provide a root vacuum pump that can operate the root pump and the rear pump at the same time, thereby significantly reducing the working time.
상기 목적달성을 위한 본 발명은,The present invention for achieving the above object,
내부에 한쌍의 로터가 회전축에 축지된 상태로 서로 맞물려 회전하도록 형성되는 실린더의 양측에 각각 흡입구와 배출구를 형성하고, 상기 실린더의 일측에 앞커버와 모터고정판이, 그 타측에 뒷커버와 기어박스가 순차적으로 결합되어 있는 루트진공펌프에 있어서,Inlet and outlet are respectively formed on both sides of the cylinder formed to engage and rotate with each other in a state in which a pair of rotors are supported on the rotating shaft, and the front cover and the motor fixing plate on one side of the cylinder, the rear cover and the gearbox on the other side. In the route vacuum pump is sequentially coupled,
상기 앞커버와 뒷커버의 내부에 실린더의 흡입구측과 배출구측을 상호 연결하는 제 1 바이패스통로와 제 2 바이패스통로를 각각 형성하고, 배출구측과 접하는 바이패스 통로의 입구측에 상기 출구측의 가스압역 세기에 따라 개폐되어 출구측 가스가 흡입구측으로 재순환되도록 하는 제 1 밸브와 제 2 밸브를 각각 형성한 것을 특징으로 한다.A first bypass passage and a second bypass passage are formed in the front cover and the rear cover to interconnect the inlet and outlet sides of the cylinder, respectively, and the outlet side is provided at the inlet side of the bypass passage in contact with the outlet side. A first valve and a second valve are formed to be opened and closed according to the gas pressure range strength of the outlet to allow the outlet gas to be recycled to the inlet side.
그리고, 상기 제 1 및 제 2 밸브는,And, the first and second valve,
제 1 및 제 2 바이패스통로의 입구와 대향되는 앞커버와 뒷커버의 벽면에 밸브가이드를 형성하고, 상기 밸브가이드와 대향되도록 밸브체를 형성하되, 밸브체와 밸브가이드의 사이에 밸브체가 입구에 밀착되도록 하는 방향으로 탄성을 가하는 탄성체를 형성하여 구성하고, 상기 밸브체의 밀착면에 오링을 형성하여 밸브체의 밀폐율이 향상되도록 한 것을 특징으로 한다.A valve guide is formed on the wall of the front cover and the rear cover facing the inlet of the first and second bypass passages, and a valve body is formed to face the valve guide, and the valve body is inlet between the valve body and the valve guide. It is characterized by forming an elastic body to apply elasticity in the direction to be in close contact with, and to form an O-ring on the contact surface of the valve body to improve the sealing rate of the valve body.
또한, 상기 모터고정판의 일측에 모터하우징을 결합하되,In addition, the motor housing is coupled to one side of the motor fixing plate,
모터하우징의 내측으로 내부가 밀폐되는 캔하우징을 결합하고, 상기 캔 하우징의 내부에 고정자를 고정 설치하며, 모터고정판의 외측으로 돌출되는 회전축의 외주면상에 모터로터를 고정하여 모터의 착탈이 용이하도록 한 것을 특징으로 한다.Coupling the can housing that is sealed inside the motor housing, the stator is fixed to the inside of the can housing, and the motor rotor is fixed on the outer circumferential surface of the rotating shaft projecting to the outside of the motor fixing plate to facilitate attachment and detachment of the motor. It is characterized by one.
도 1 은 종래 루트진공펌프의 사용예를 보인 도면.1 is a view showing an example of use of a conventional root vacuum pump.
도 2 는 본 발명의 루트진공펌프를 보인 단면도.Figure 2 is a sectional view showing a root vacuum pump of the present invention.
도 3 은 도 2 의 A-A선 단면도.3 is a cross-sectional view taken along the line A-A of FIG.
도 4 는 도 2 의 B-B선 단면도.4 is a sectional view taken along the line B-B in FIG.
도 5 는 도 2 의 C-C선 단면도.5 is a cross-sectional view taken along the line C-C in FIG.
도 6 과 도 7 은 본 발명에 적용된 밸브의 동작상태를 보인 도면.6 and 7 are views showing the operating state of the valve applied to the present invention.
※ 도면의 주요부분에 대한 부호의 설명※ Explanation of code for main part of drawing
1: 실린더, 2: 앞커버,1: cylinder, 2: front cover,
3: 뒷커버, 4: 기어박스,3: rear cover, 4: gearbox,
5: 모터고정판, 11: 흡입구,5: motor fixing plate, 11: inlet,
12: 배출구, 21,31: 바이패스통로,12: outlet, 21, 31: bypass passage,
22,32: 입구, 23,33: 출구,22,32: entrance, 23,33: exit,
51: 캔드모터, 52: 모터하우징,51: canned motor, 52: motor housing,
53: 캔하우징, 54: 회전자,53: can housing, 54: rotor,
55: 모터로터, 56: 회전축,55: motor rotor, 56: rotating shaft,
57: 베어링, 60,61: 밸브,57: bearing, 60,61: valve,
62: 밸브가이드, 63: 밸브체,62: valve guide, 63: valve body,
64: 탄성체, 65: 오링64: elastic body, 65: O-ring
이하, 첨부된 도면 도 2 내지 도 7 을 참조하여 본 발명의 바람직한 실시예를 설명하면 다음과 같다.Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, FIGS. 2 to 7.
도면부호 1 은 실린더를 나타내며, 이 실린더(1)의 상하측에는 각각 흡입구(11)와 배출구(12)가 형성되어 있고, 실린더(1)의 내부에는 한쌍의 로터(13)가 일정길이의 회전축(56)에 축지된 상태로 설치된다.Reference numeral 1 denotes a cylinder, and the inlet 11 and the outlet 12 are formed on the upper and lower sides of the cylinder 1, respectively, and a pair of rotors 13 have a predetermined length of rotation shaft ( 56) is installed in a state of being moistened.
상기 로터(13)가 서로 맞물려 회전하면서 흡입구(11)를 통해 가스를 흡입하여 배출구(12) 측으로 강제 배출하게된다.The rotor 13 is engaged with each other while rotating to suck the gas through the inlet 11 to forcibly discharge to the outlet 12 side.
실린더(1)의 일측으로 앞커버(2)와 모터고정판(5)이 순차적으로 결합되고, 상기 모터고정판(5)에는 착탈이 용이하게 형성된 캔드모터(51)가 결합된다.The front cover 2 and the motor fixing plate 5 are sequentially coupled to one side of the cylinder 1, and the canned motor 51 is easily coupled to the motor fixing plate 5 to be detachably attached.
상기 캔드모터(51)는 모터고정판(5)의 외각으로 돌출되어 있는 회전축(56)의 외주면상에 모터로터(55)를 고정 설치하고, 모터하우징(52)의 내측으로 그 내부가 밀폐되도록 형성되어 있는 캔하우징(53)을 형성하되, 상기 캔하우징(53)의 내부에 고정자(54)를 고정설치하여 상기 모터하우징(52)을 모터고정판(5)에 결합하는 것으로 간단하게 캔드모터(51)를 장착할 수 있도록 한 것이다.The canned motor 51 is fixed to the motor rotor 55 on the outer circumferential surface of the rotating shaft 56 protruding to the outer surface of the motor fixing plate 5, and formed so that the inside thereof is sealed inside the motor housing 52. The can housing 53 is formed, and the stator 54 is fixedly installed in the can housing 53 to couple the motor housing 52 to the motor fixing plate 5, thereby providing a can motor 51. ) Can be installed.
즉, 상기 캔하우징(53)과 모터하우징(52)이 모듈화되어 결합되어 있는 상태이므로 상기 모터하우징(52)을 모터고정판(5)에 볼트로서 결합하면 모터의 장착이 완료되며, 또 모터를 해체할때에는 모터고정판(5)으로부터 모터하우징(52)을 분리하는 것으로 간단하게 모터를 분리할 수 있게되는 것이다.That is, since the can housing 53 and the motor housing 52 are modularized and coupled, when the motor housing 52 is coupled to the motor fixing plate 5 as bolts, mounting of the motor is completed, and the motor is dismantled. When it is possible to simply separate the motor by separating the motor housing 52 from the motor fixing plate (5).
그리고, 상기 모터하우징(52)의 후단으로 모터의 과열을 방지하기위한 냉각팬(58)을 형성하므로서 캔드모터(51)가 장시간 동작하더라도 과열되지 않도록 하였다.In addition, since the cooling fan 58 for preventing overheating of the motor is formed at the rear end of the motor housing 52, the canned motor 51 is not overheated even if it is operated for a long time.
한편, 상기 실린더(1)의 타측으로 뒷커버(3)와 기어박스(4)가 순차적으로 결합되는데, 상기 기어박스(4) 내부에는 동력이 한쌍의 로터(13)에 균등하게 공급되도록 하는 기어설비가 장착된다.On the other hand, the rear cover 3 and the gear box 4 are sequentially coupled to the other side of the cylinder (1), the gear box 4 so that power is evenly supplied to the pair of rotors 13 inside the gear box (4). The equipment is mounted.
본 발명에서는 실린더(1)의 배출구(12) 측 가스 압력이 과도하게 상승하는 것을 방지하기위한 수단으로서 제 1 및 제 2 바이패스통로(21,31)를 앞커버(2)와 뒷커버(3)에 형성한다.In the present invention, the first and second bypass passages (21, 31) are the front cover (2) and the rear cover (3) as a means for preventing excessive rise of the gas pressure on the outlet (12) side of the cylinder (1). To form).
상기 제 1 바이패스통로(21)는 흡입구(11) 측과 배출구(12) 측을 상호 연결하도록 앞커버(2)의 내부에 형성되어 있고, 제 1 바이패스통로(21)의 입구(22)가 실린더(1)의 배출구(12)와 연통되고, 출구(23)가 실린더(1)의 흡입구(11)와 연결되도록 형성된다.The first bypass passage 21 is formed inside the front cover 2 to interconnect the inlet 11 side and the outlet 12 side, and the inlet 22 of the first bypass passage 21. Is communicated with the outlet 12 of the cylinder 1, the outlet 23 is formed to be connected to the inlet 11 of the cylinder (1).
또한 상기 제 2 바이패스통로(31)는 흡입구(11) 측과 배출구(12) 측을 상호 연결하도록 뒷커버(3)의 내부에 형성되어 있고, 제 2 바이패스통로(21)의 입구(32)가 실린더(1)의 배출구(12) 측과 연통되고, 출구(33)가 실린더(1)의 흡입구(11) 측과 연결되도록 형성하였다.In addition, the second bypass passage 31 is formed inside the rear cover 3 so as to interconnect the inlet 11 side and the outlet 12 side, and the inlet 32 of the second bypass passage 21. ) Is in communication with the outlet 12 side of the cylinder 1, the outlet 33 is formed to be connected to the inlet 11 side of the cylinder (1).
그리고, 상기 각각의 바이패스통로(21)(31)의 입구(22,32) 측에 개폐용 밸브(60)(61)를 형성하는데, 상기 제 1 및 제 2 바이패스통로(21,31)의 입구(22,32)와 대향되는 앞커버(2)와 뒷커버(3)의 벽면에 별도의 밸브가이드(62)를 고정 설치하고, 상기 밸브가이드(62)와 대향되는 곳에 개폐용 밸브체(63)를 형성하되, 이 밸브체(63)와 밸브가이드(62)의 사이에 일정 탄성을 가하는 탄성체(64)를 형성하여 상기 탄성체(64)의 탄성에 의해 밸브체(63)가 바이패스통로(21,31)의 입구(22,32)를 차단하도록 하였다.In addition, the opening and closing valves 60 and 61 are formed at the inlets 22 and 32 of the respective bypass passages 21 and 31, and the first and second bypass passages 21 and 31 are formed. A separate valve guide 62 is fixedly installed on the wall surfaces of the front cover 2 and the rear cover 3 opposite to the inlets 22 and 32 of the openings, and the valve body for opening and closing is opposed to the valve guide 62. (63) is formed, but an elastic body (64) is applied between the valve body (63) and the valve guide (62) so that the valve body (63) is bypassed by the elasticity of the elastic body (64). The inlets 22 and 32 of the passages 21 and 31 are blocked.
상기 밸브체(63)의 밀폐면, 즉, 입구(22,32)의 벽면과 접촉되는 곳에 오링(65)을 형성하여 밸브체(63)가 입구(22,32)를 막고 있을때 상기 오링(65)에 의해 밀폐율이 훨씬 향상되도록 하였다.The o-ring 65 is formed when the valve body 63 is blocking the inlets 22 and 32 by forming an o-ring 65 in contact with the sealing surface of the valve body 63, that is, the wall surfaces of the inlets 22 and 32. ) To improve the sealing rate even more.
한편, 기어박스(4)의 상단 벽면에 오일이나 가스의 이물질을 걸러주는 필터(71)를 형성하고, 이 필터(71)의 출력측과 제 2 바이패스통로(21)를 상호 연결해주는 연통홀(74)을 기어박스(4)와 뒷커버(3)의 접촉면에 형성하며, 기어박스(4)의 내부와 모터고정판(5)의 내부를 상호 연결하는 연결통로(73)를 도 3 에 도시된 바와같이 실린더(1)의 벽면 내부에 형성하고, 기어박스(4) 내부와 필터(71)를 연결해주는 작은크기의 노즐구멍(72)를 기어박스(4)의 벽면에 가공하였다.On the other hand, forming a filter 71 for filtering foreign matter of oil or gas on the upper wall surface of the gear box 4, the communication hole for connecting the output side of the filter 71 and the second bypass passage 21 ( 74 is formed on the contact surface of the gearbox 4 and the rear cover 3, and a connection passage 73 for interconnecting the inside of the gearbox 4 and the inside of the motor fixing plate 5 is shown in FIG. As described above, a small-sized nozzle hole 72 was formed in the wall surface of the cylinder 1 to connect the inside of the gear box 4 and the filter 71 to the wall surface of the gear box 4.
이와같이하면, 진공펌프가 동작할때 그 흡입력에 의해 모터고정판(5)과 기어박스(4) 내부의 공기 또는 가스 등이 상기 노즐구멍(72)을 통해 필터(71)로 공급되고, 필터(71)를 통과한 공기 또는 가스가 연통홀(74)을 통해 제 2 바이패스통로(31)로 배출되므로서 상기 기어박스(4) 내부와 모터고정판(5) 내부가 항상 진공상태를 유지할 수 있게되어 각종 마찰부품의 윤활작용을 하는 오일이 이물질에 의해 오염되는 현상을 방지할 수 있게되어 마찰부품의 마모율이 향상되는 효과를 기대할 수 있게된다.In this way, when the vacuum pump operates, air or gas inside the motor fixing plate 5 and the gearbox 4 is supplied to the filter 71 through the nozzle hole 72 by the suction force, and the filter 71. Air or gas passing through) is discharged into the second bypass passage 31 through the communication hole 74, so that the gearbox 4 and the motor fixing plate 5 can be kept in a vacuum at all times. The oil lubricating various friction parts can be prevented from being contaminated by foreign substances, so that the wear rate of the friction parts can be improved.
미설명된 도면부호 57은 회전축(56)을 회전가능하게 지지하고있는 베어링을 나타낸다.Unexplained reference numeral 57 denotes a bearing rotatably supporting the rotating shaft 56.
이와같이 구성된 본 발명의 동작을 설명하면 다음과 같다.Referring to the operation of the present invention configured as described above is as follows.
루트진공펌프에 전원이 공급되어 캔드모터(51)가 구동하게되면서 로터(13)가 회전하게되면, 흡입구(11)를 통해 가스를 흡입하여 배출구(12) 측으로 배출하게 되고, 배출구(12)로 배출되는 가스는 다시 미도시된 후방펌프에 의해 진공도가 개선되어 출력된다.When power is supplied to the root vacuum pump to drive the canned motor 51 and the rotor 13 rotates, the gas is sucked through the inlet 11 to be discharged to the outlet 12 and discharged to the outlet 12. The discharged gas is output by improving the degree of vacuum by the rear pump (not shown).
이때 배출구(12)에서 배출되는 가스의 배출속도가 후방펌프의 처리속도보다 월등히 빠르기때문에 배출구(12)로 배출되는 가스가 모두 후방펌프 측으로 공급되지 못하고 배출구(12)와 후방펌프의 사이에 점차 축적되게 된다.At this time, since the discharge speed of the gas discharged from the discharge port 12 is much faster than the processing speed of the rear pump, all the gas discharged to the discharge port 12 is not supplied to the rear pump side, but gradually accumulates between the discharge port 12 and the rear pump. Will be.
가스가 배출구(12)상에 점차 축적되면서 가스압이 상승하게되어 상기 가스의 압력이 밸브체(63)를 탄지하고있는 탄성체(64)의 탄성력보다 커지는 순간 상기 밸브체(63)가 탄성체(64)의 탄성력을 이기고 밀리면서 제 1 및 제 2 바이패스통로(21,31)의 입구(22,32)를 개방시킨다.As the gas gradually accumulates on the outlet 12, the gas pressure rises so that the valve body 63 becomes the elastic body 64 at the moment when the pressure of the gas is greater than the elastic force of the elastic body 64 holding the valve body 63. The inlets 22 and 32 of the first and second bypass passages 21 and 31 are opened while pushing and pushing the elastic force.
상기 입구(22,32)가 도 7 과같이 개방되면 배출구(12) 측에 존재하는 가스가 각각의 바이패스통로(21,31)를 통해 실린더(1)의 흡입구(11) 측으로 바이패스되어 재순환되므로서 배출구(12)측의 높은 가스압력이 감소하게 된다.When the inlets 22 and 32 are opened as shown in FIG. 7, the gas existing at the outlet 12 side is bypassed through the respective bypass passages 21 and 31 to the inlet 11 of the cylinder 1 to be recycled. Therefore, the high gas pressure on the outlet 12 side is reduced.
배출구(12) 측의 가스압력이 어느정도 감소하면, 다시 밸브체(63)가 탄성체(64)의 탄성력에 의해 전진하여 도 6 과같이 제 1 및 제 2 바이패스통로(21,31)의 입구(21,31)를 차단하게 된다.When the gas pressure on the outlet 12 side decreases to some extent, the valve body 63 is further advanced by the elastic force of the elastic body 64, so that the inlets of the first and second bypass passages 21 and 31 as shown in FIG. 21, 31) will be blocked.
밸브체(63)가 입구(21,31)를 차단하게되면 도면에 도시된 바와같이 오링(65)이 입구(21,31)의 벽면에 밀착되므로 기밀성이 유지된다.When the valve body 63 blocks the inlets 21 and 31, the O-ring 65 is in close contact with the wall surfaces of the inlets 21 and 31 as shown in the figure, thereby maintaining airtightness.
상기 설명과같이 배출구(12) 측에 가스가 축적되어 가스압력이 높아질때마다 밸브체(63)가 열리면서 가스를 흡입구(11)측으로 재순환시키게 되므로서 실린더(1)의 배출구(12) 측 가스압력이 항상 적정한 상태를 유지하게되어 펌프와 모터의 파손을 미연에 방지할 수 있게되고, 또한 루트진공펌프와 후방펌프를 동시에 가동시켜 사용할 수 있게되므로 그만큼 작업시간을 단축시킬 수 있는 효과를 기대할 수 있다.As described above, whenever gas is accumulated at the outlet 12 side and the gas pressure is increased, the valve body 63 is opened and the gas is recycled to the inlet 11 side, so that the gas pressure at the outlet 12 side of the cylinder 1 is reduced. The proper state is maintained at all times to prevent damage to the pump and motor in advance, and the root vacuum pump and the rear pump can be operated at the same time, thereby reducing the work time. .
또한, 바이패스통로가 앞커버와 뒷커버의 내부에 형성되어 있으므로 루트진공펌프의 외관이 수려해지고, 펌프의 크기를 줄여줄 수 있는 부가적인 효과를 기대할 수 있다.In addition, since the bypass passage is formed inside the front cover and the rear cover, the external appearance of the root vacuum pump is improved, and an additional effect of reducing the size of the pump can be expected.
이상에서 설명한 바와같이 본 발명은 실린더의 흡입구측과 배출구측을 상호연결하는 별도의 바이패스통로를 앞커버와 뒷커버의 내부에 형성하고, 실린더의 배출구측 배기압력이 기준치 이상일 경우 자동 개폐되는 밸브를 바이패스통로의 입구측에 형성하므로서, 루트진공펌프의 배기압이 항상 일정치를 유지하도록 하여 높은 배기압에 의해 펌프와 모터가 파손되는 현상을 미연에 방지할 수 있도록 하고, 이에의해 루트펌프와 후방펌프를 동시에 작동시킬 수 있게되어 작업시간을 현저히 단축시킬 수 있도록 한 루트진공펌프를 제공하는 효과를 기대할 수 있다.As described above, the present invention forms a separate bypass passage inside the front cover and the rear cover that interconnects the inlet and outlet of the cylinder, and automatically opens and closes when the exhaust pressure of the cylinder is greater than the reference value. Is formed at the inlet side of the bypass passage, so that the exhaust pressure of the root vacuum pump is always maintained to prevent the pump and motor from being damaged by the high exhaust pressure. It is possible to operate the and the rear pump at the same time can be expected to provide a root vacuum pump that can significantly reduce the working time.
Claims (3)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2001-0048908A KR100408154B1 (en) | 2001-08-14 | 2001-08-14 | Roots vacuum pump |
| US09/962,446 US20030035738A1 (en) | 2001-08-14 | 2001-09-26 | Roots vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2001-0048908A KR100408154B1 (en) | 2001-08-14 | 2001-08-14 | Roots vacuum pump |
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| Publication Number | Publication Date |
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| KR20030015422A KR20030015422A (en) | 2003-02-25 |
| KR100408154B1 true KR100408154B1 (en) | 2003-12-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR10-2001-0048908A KR100408154B1 (en) | 2001-08-14 | 2001-08-14 | Roots vacuum pump |
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| US (1) | US20030035738A1 (en) |
| KR (1) | KR100408154B1 (en) |
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| KR101385954B1 (en) | 2012-11-14 | 2014-04-16 | 데이비드 김 | Multistage dry vacuum pump |
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2001
- 2001-08-14 KR KR10-2001-0048908A patent/KR100408154B1/en active IP Right Grant
- 2001-09-26 US US09/962,446 patent/US20030035738A1/en not_active Abandoned
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR930000835A (en) * | 1991-06-28 | 1993-01-15 | 다니이 아끼오 | Fluid rotating device |
| JPH05296171A (en) * | 1992-04-13 | 1993-11-09 | Ulvac Japan Ltd | Shaft seal mechanism for positive displacement vacuum pump without using sealing fluid |
| JP2000345981A (en) * | 1999-06-03 | 2000-12-12 | Morita Econos Ltd | Multistage root's type vacuum pump suction device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101385954B1 (en) | 2012-11-14 | 2014-04-16 | 데이비드 김 | Multistage dry vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030015422A (en) | 2003-02-25 |
| US20030035738A1 (en) | 2003-02-20 |
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