JP7396561B2 - Dry vacuum pumps and pump equipment - Google Patents

Description

The present invention relates to dry vacuum pumps, such as, for example, roughing vacuum pumps such as roots-type pumps, claw-type pumps, or screw-type pumps. The invention also relates to pumping equipment including a load lock connected to a vacuum pump.

The power required for gas compression is one of the important parameters in the energy consumption of vacuum pumps. The electrical power for the compression of this gas is used primarily in the last two compression stages in the case of roots-type or claw-type multistage roughing vacuum pumps.

Load-lock pumping devices, in particular, have relatively high energy consumption. This loadlock is used to reduce the pressure around the substrate in the loadlock chamber before the substrate is transported into the processing chamber, which is maintained at low pressure to prevent any impurities from entering the processing chamber. be done.
Therefore, the pressure within the load lock chamber must be alternately lowered and then raised each time a substrate is loaded. Each time this pressure is lowered, the pressure within the load lock chamber remains lower until the substrate is subsequently transferred into the processing chamber. This idle phase in which the load lock is maintained at low pressure can be a relatively long time and is costly in terms of energy.

One known solution to reduce the consumption of electrical energy is to reduce the pressure of the final compression stage of the vacuum pump, for example during these idle phases of the load lock, with the help of an external pumping device. It is.

Examples of this external pumping device include ejectors, diaphragm pumps and rotary vane pumps.

One disadvantage of this solution is that it requires the use of two different pumping devices, which can be difficult to use, costly, consumes electrical energy and gas, and makes the pumping system bulky. be.

One object of the invention is to provide a dry vacuum pump that at least partially overcomes one of the drawbacks of the prior art mentioned above.

For this purpose, the dry vacuum pump of the invention
- at least one pump stage;
- two rotating shafts extending into said at least one pump stage and each carrying at least one rotor, said rotors carrying the gas to be pumped between an inlet and an outlet of said vacuum pump; configured to rotate synchronously in opposite directions to drive;
This vacuum pump is
- an auxiliary stator through which at least one of the rotating shafts passes;
- an inlet passageway with a controllable inlet valve;
- at least one auxiliary rotor carried by the rotating shaft;
the inlet passage is configured to connect the auxiliary stator inlet to a final pump stage communicating with the outlet of the vacuum pump;
when the controllable inlet valve is commanded to open, rotation of the auxiliary rotor within the auxiliary stator drives gas to be pumped between the inlet and outlet of the auxiliary stator; configured to reduce the pressure of the final pump stage;
When the controllable inlet valve is commanded to close, the at least one auxiliary rotor and the auxiliary stator are fluidly isolated from the final pump stage in communication with the discharge port. It is characterized by

According to the invention, a controllable inlet valve for driving the rotor of a vacuum pump is provided when a controllable inlet valve is commanded to open to reduce the pressure of the last pump stage communicating with the outlet of the vacuum pump. Rotation of the rotary shaft is also used to drive the at least one auxiliary rotor into rotation. Thereby, there is no need to provide a new pump device outside the vacuum pump, and the power consumption of the vacuum pump can be reduced.
When commanded to close the controllable inlet valve, the auxiliary rotor itself turns on without interfering with the operation of the vacuum pump. The auxiliary pump stage is thus bypassed and does not take part in the pumping action of the gas in the vacuum pump.

When the controllable inlet valve is commanded to open, the pressure in the pump stage communicating with the vacuum pump outlet can be reduced at a precise moment and for a selected amount of time. The use of controllable inlet valves therefore greatly increases operational flexibility.

The vacuum pump of the invention is compact, easy to install and easy to control.

This vacuum pump is, for example, a roughing vacuum pump configured to discharge gas at atmospheric pressure. The rotor is, for example, a roots-type or claw-type rotor.

The outlet of the auxiliary stator is communicated with the outlet of the vacuum pump by an auxiliary outlet passage fitted with a controllable outlet valve.
The use of a controllable outlet valve allows the at least one auxiliary rotor to be maintained under vacuum when not being used to reduce the pressure of the final pump stage. The at least one auxiliary rotor turns on itself consuming little or no energy. In this case, no new gas enters and the pumping action in at least one pumping stage of the vacuum pump is not disturbed.

The vacuum pump includes a control unit that controls a controllable inlet valve and/or as a function of the pressure at the inlet of the vacuum pump and/or the measured power consumed by the vacuum pump. or configured to command the controllable outlet valve to open.

According to another embodiment of the invention, an enclosure such as a loadlock connected to a vacuum pump includes control means for a controllable inlet valve and/or a controllable outlet valve. The control means may, for example, operate the controllable inlet valve and/or the controllable outlet valve for a predetermined period of time between the start and end of the idle phase, e.g. when the load lock is in the idle phase. order it to open. Also, the controllable valve can be commanded to close, for example, as soon as the power drops below its threshold.

The vacuum pump of the first embodiment has two rotating shafts passing through an auxiliary stator, and two auxiliary rotors disposed within the auxiliary stator and supported by the respective rotating shafts. , these two auxiliary rotors are configured to rotate synchronously in opposite directions. The auxiliary rotor is, for example, roots-type, screw-type, or claw-type. In this embodiment, the auxiliary stator is configured similar to an additional dry pump stage.

According to a second embodiment of the invention, an auxiliary stator is provided in the oil casing of the vacuum pump, the vacuum pump comprising two auxiliary rotors formed by respective gears of the synchronous gear of this vacuum pump. , the synchronous gear and the auxiliary stator constitute one gear pump. The synchronization gear is further configured to synchronize the rotations of the two rotating shafts. In this embodiment, the synchronizing gear already present for the synchronization of the two rotary axes is also used as an additional pumping means in case it is necessary to reduce the pressure of the last pumping stage.

According to a third embodiment of the invention, the auxiliary rotor is a rotor of a rotary vane pump, which together with the auxiliary stator forms a rotary vane pump arranged in a chamber of the oil casing of the vacuum pump.
In this embodiment, a vacuum pump integrated with a rotary vane pump makes it possible to reduce the pressure of the last pump stage with a very good compression ratio.

The invention also relates to a pumping installation comprising a loadlock, the dry vacuum pump being connected to the loadlock for alternately raising and lowering the pressure in the loadlock.
Other advantages and features of the invention will become apparent from the description of illustrative but non-limiting embodiments of the invention, taken in conjunction with the accompanying drawings.

It is a diagram showing an outline of general pump equipment. 2 is a diagram schematically showing a dry roughing vacuum pump according to a first embodiment of the present invention, which is applied to the pump equipment of FIG. 1. FIG. FIG. 3 is a diagram schematically showing a dry roughing vacuum pump according to a second embodiment of the present invention. FIG. 4 is a schematic diagram showing the oil casing of the vacuum pump taken along the line AA in FIG. 3; FIG. 7 is a diagram schematically showing a dry roughing vacuum pump according to a third embodiment of the present invention. 6 is a schematic diagram showing the oil casing of the vacuum pump taken along the AA cross section in FIG. 5. FIG.

The following embodiments are illustrative. Although the description may refer to one or more embodiments, this does not necessarily imply that each reference numeral relates to the same embodiment or that the features apply to only one embodiment. do not have. Single features of different embodiments may also be combined or exchanged to provide other embodiments.

FIG. 1 shows a typical pump installation 100. This pumping equipment includes one load lock 101 and one dry vacuum pump 1 connected to this load lock 101 for alternately raising and lowering the pressure in the chamber of this load lock 101. The load lock 101 lowers the pressure around the substrate in the load lock chamber before the substrate is transferred from the chamber of the load lock to a processing chamber maintained at low pressure to prevent impurities from entering the processing chamber. used for. The substrate is, for example, a flat panel display, a photovoltaic substrate, a semiconductor wafer, or a semiconductor manufacturing photomask.

The vacuum pump 1 is a roughing vacuum pump configured to discharge gas at atmospheric pressure.
A roughing vacuum pump is defined as a positive displacement vacuum pump that uses a pair of rotors to suck in and transfer the gas to be pumped, and discharge it at atmospheric pressure.
As shown in FIG. 2, the vacuum pump 1 includes at least one pump stage 3a to 3f and two rotating shafts 4.
These rotation shafts 4 extend into at least one pump stage 3a to 3f and each carry at least one rotor 5.
In this embodiment, the vacuum pump 1 comprises a plurality of pump stages 3 a , 3 b , 3 c , 3 d , 3 e , 3 f , for example 6 pump stages, which are connected to one inlet 7 of the vacuum pump 1 . and one discharge port 8, and the gas to be pumped circulates between the plurality of pump stages.

Each pump stage 3a-3f is each constituted by a compression chamber receiving a pair of rotors 5, each compression chamber having a respective inlet and outlet. Successive pump stages 3a-3f are connected in series one after the other by respective interstage passages connecting the outlet of the preceding pump stage to the inlet of the subsequent pump stage.
In multistage pumps of this kind, the first pump stage 3a, whose inlet communicates with the suction port 7 of the vacuum pump 1, is also called the suction stage. The last pump stage 3f, whose outlet communicates with the outlet 8 of the vacuum pump 1, is also called the evacuation stage, and its evacuation pressure is generally of the order of ambient pressure (or atmospheric pressure).

The pair of rotors 5 at each stage rotates synchronously in opposite directions during operation, driving the gas to be pumped between the suction port 7 and the discharge port 8 .
During the rotation of the vacuum pump, the gas sucked through the suction port is confined within the volume formed by the rotor 5 and stator 9 of the vacuum pump 1 and is then driven by the rotor 5 towards the next stage (pump The direction of circulation of the gas to be pumped is indicated by arrows in FIGS. 1 and 2).
The rotor 5 can be, for example, a root-shaped, for example figure-eight or bean-shaped, cross-section rotor, or a claw-shaped or screw-shaped rotor, with lobes with the same profile, or else according to the principle of a positive displacement vacuum pump. A similar rotor.
Each rotating shaft 4 carrying a rotor 5 is driven by a motor M of the vacuum pump 1 . Each rotating shaft is supported by a bearing lubricated by a lubricant in at least one oil casing 10 of the vacuum pump 1 and driven synchronously by a lubricated synchronizing gear 6 . The oil casing 10 is separated from the dry pump part by sealing means in which the rotating shaft 4 can rotate at all times.

According to one embodiment of the invention, the vacuum pump 1 has a main outlet passage 11 connecting the outlet of the last pump stage 3f to the outlet 8. A check valve 12 is arranged in the main outlet passage 11 in order to prevent the gas to be pumped from flowing back into the vacuum pump 1 .

The vacuum pump 1 further comprises an auxiliary stator 13 , an inlet passage 14 with a controllable inlet valve 15 , and at least one auxiliary rotor 16 arranged in the auxiliary stator 13 .
The auxiliary stator 13 has one inlet 17 and one outlet 18, and at least one of the rotating shafts 4 passes through this auxiliary stator.
The inlet channel 14 connects the inlet 17 of the auxiliary stator 13 to the last pump stage 3f communicating with the outlet 8 of the vacuum pump 1, for example at the level of the inlet of this pump stage 3f. This stage is the last pump stage in the direction of the flow of the gas to be pumped if the vacuum pump is a multi-stage vacuum pump 1, or the last pump stage in the direction of the flow of the gas to be pumped if the vacuum pump is a single stage screw type vacuum pump. It is formed by the final screw pitch in the direction of gas flow.

At least one auxiliary rotor 16 is carried by a rotating shaft 4 passing through the auxiliary stator 13 . This auxiliary rotor drives the gas to be pumped between the inlet 17 and outlet 18 of the auxiliary stator 13 by rotation within the auxiliary stator 13 when the controllable inlet valve 15 is commanded to open. , is configured to reduce the pressure in the final pump stage 3f communicating with the outlet 8.
When the controllable inlet valve 15 is commanded to close, the at least one auxiliary rotor 16 and the auxiliary stator 13 are fluidly isolated from the final pump stage 3f communicating with the outlet 8.

Therefore, the rotation of the rotary shaft 4 driving the rotor 5 of the vacuum pump 1 is caused by the pressure in the pump stage 3f communicating with the outlet of the vacuum pump 1 when the controllable inlet valve 15 is commanded to open. It is also used to rotationally drive at least one auxiliary rotor 16 in order to lower the auxiliary rotor 16. Thereby, there is no need to provide a new pump device outside the vacuum pump 1, so the power consumption of the vacuum pump 1 can be reduced.
When the controllable inlet valve 15 is commanded to close, the auxiliary rotor itself turns on within the auxiliary stator without interfering with the operation of the vacuum pump. The auxiliary pump stage is thus bypassed and no longer takes part in pumping the gas in the vacuum pump.
This vacuum pump 1 is compact, easy to install, and easy to control.

The controllable inlet valve 15 is, for example, a pneumatic valve or a solenoid, for example a solenoid valve or a piezoelectric valve, in particular an on/off valve, ie a valve with either an open or a closed function.
The vacuum pump 1 comprises a control unit 19 comprising one or more controllers or microcontrollers or a processor and a memory for controlling the controllable inlet valve 15 .

The control unit 19 is configured, for example, to control the opening of the controllable inlet valve 15 as a function of the pressure at the inlet of the vacuum pump 1 and/or the measured value of the power consumed by the vacuum pump 1. There is.
For this purpose, the control unit 19 monitors whether the pressure and/or the power exceeds a threshold value. For example, it is monitored whether the pressure at the inlet of the vacuum pump 1 exceeds a low pressure threshold and/or whether the power (or current) of the motor M exceeds a power threshold for a predetermined period of time. This situation generally corresponds to an idle phase at low pressure of the load lock 101, where the vacuum pump 1 is pumping at a critical vacuum (no gas injection), or at low pressure and pumping a small purge flow. It is in a situation where it is working.

According to another embodiment, the load lock 101 comprises control means 102 for the controllable inlet valve 15, which control means can control the controllable inlet valve 15 directly or alternatively. , connected to the control unit 19 of the vacuum pump 1 for controlling the controllable inlet valve 15.
The control means 102 command the controllable inlet valve 15 to open, for example when the load lock 101 is in the idle phase. The signal of the control means 102 is, for example, a signal coming from an electrical switch or a numerical code.
The controllable inlet valve 15 is commanded to open only for a limited time, ie for a predetermined period of time, for example less than 5 minutes. The controllable inlet valve 15 is triggered at the beginning (commanded open) and at the end of the idle phase. The controllable inlet valve 15 is also commanded to close immediately, for example when the power falls below a power threshold.
By commanding the controllable inlet valve 15 to open, it is possible to reduce the pressure in the pump stage 3f communicating with the outlet of the vacuum pump at a precise time and for a selected period of time. The use of a controllable inlet valve 15 therefore provides great flexibility in the operation of the pump.

According to one embodiment of the invention, the outlet 18 of the auxiliary stator 13 communicates with the outlet 8 of the vacuum pump 1 by an auxiliary outlet passage 20 comprising a controllable outlet valve 21 .
The outlet of the auxiliary outlet channel 20 is connected, for example, to the outlet 8 of the vacuum pump 1 downstream of the check valve 12 of the main outlet channel 11 in the direction of the flow of the gas to be pumped.
The outlets of the main outlet passage 11 and the auxiliary outlet passage 20 are independent.

The control of the controllable outlet valve 21 is linked to the control of the controllable inlet valve 15. These two valves 15, 21 are commanded to open and close simultaneously by the same means. Preferably, immediately after the inlet valve 15 is closed, the outlet valve 21 is closed, or the inlet valve 15 is Just before opening, the outlet valve 21 is opened.
The controllable outlet valve 21 is thus commanded to open by the control unit 19, for example as a function of the pressure at the inlet of the vacuum pump 1 and/or the measured value of the power consumed by the vacuum pump 1. Alternatively, the controllable outlet valve 21 is commanded to open by the control means 102 of the load lock 101, for example when the load lock 101 is in an idle phase.
At least one auxiliary rotor 16 can be maintained under vacuum when it is not being used to reduce the pressure of the final pump stage. At least one auxiliary rotor 16 turns on itself without a new inflow of gas. At this time, the pumping action in the pump stages 3a to 3f of the vacuum pump 1 is not hindered, and no or almost no energy is consumed.

In the first embodiment shown in FIG. 2 , the vacuum pump 1 has a pair of auxiliary rotors 16 arranged within an auxiliary stator 13 . The pair of auxiliary rotors 16 are supported by respective rotating shafts 4 of the vacuum pump 1 passing through the auxiliary stator 13, that is, two rotating shafts 4 passing through the auxiliary stator 13. The pair of auxiliary rotors 16 are configured to rotate synchronously in opposite directions and drive the gas to be pumped between the inlet 17 and outlet 18 of the auxiliary stator 13 .
The auxiliary rotor 16 is, for example, roots-type, screw-type, or claw-type.

The auxiliary stator 13 has, for example, a size that is the same as or smaller than the stator 9 of the pump stage 3f communicating with the discharge port of the vacuum pump 1. For example, the auxiliary stator 13 may be thinner than the stator 9 of the last pump stage, or the axis of rotation 4 of the auxiliary stator 13 may have a larger diameter than the axis of rotation of the vacuum pump.
The auxiliary stator 13 is arranged, for example, at the end of the pump stages 3a to 3f, for example along the pump stage 3f, which communicates with the outlet of the vacuum pump. For example, the auxiliary stator is arranged between the oil casing 10 and the final pump stage 3f.
The auxiliary stator 13 may also be arranged between two successive pump stages 3a to 3f, for example between the last pump stage 3f and the second pump stage 3e from the last pump stage.
In this embodiment, the auxiliary stator 13 is configured similar to an additional dry pump stage and is used only when it is necessary to reduce the pressure of the last pump stage.

In the second embodiment shown in FIGS. 3 and 4, the vacuum pump 1 comprises two auxiliary rotors 16 arranged in an auxiliary stator 22, each of which is connected to a synchronous gear 6. It is formed by a gear 31.
A pair of gears 31 of the synchronous gear 6 are supported by respective rotating shafts 4, and these two rotating shafts 4 of the vacuum pump 1 pass through an auxiliary stator 22 provided in the oil casing 10. There is.
The pair of gears 31 are configured to synchronize the rotations of the two rotating shafts 4 and drive the gas to be pumped between the inlet 17 and outlet 18 of the auxiliary stator 22. Therefore, the pair of gears 31 of the synchronous gear 6 and the auxiliary stator 22 form one gear pump.

This gear pump utilizes the combined profiles of a pair of gears 31 to drive the gas to be pumped. During operation of the gear pump, the gas to be pumped is accommodated between each tooth of the gear 31 of the gear pump and the auxiliary stator 22. Rotation of the pair of gears 31 in opposite directions drives the gas around the outside of these gears 31.
In this embodiment, a pair of synchronizing gears 6, already present for synchronizing a pair of rotating shafts 4, is used as an additional pumping means when it is necessary to reduce the pressure of the last pump stage. .
By adding an oil trap between the inlet 17 of the auxiliary stator 22 and the controllable inlet valve 15, migration of lubricant to the dry pump parts can be prevented.

In the third embodiment shown in FIGS. 5 and 6, the auxiliary rotor 23 is the rotor of a rotary vane pump.
The auxiliary rotor 23 and the auxiliary stator 24 constitute a rotary vane pump housed in a chamber 25 of the oil casing 10 of the vacuum pump 1.
As can be seen in Figure 6, the rotor of a rotary vane pump has two vanes 26 that slide in one slot as is well known, and one spring that connects them to each other by pushing them apart. are doing. The rotor of this rotary vane pump rotates eccentrically within the cylinder of the auxiliary stator 24. The auxiliary stator 24 is placed in a liquid lubricant 27, such as oil, contained in a chamber 25 of the oil casing 10. The inlet 17 of the auxiliary stator 24 extends inside the chamber 25 but is isolated from the liquid lubricant 27 . A relief valve (or check valve) 29 immersed in liquid lubricant 27 is provided at the outlet 18 of the auxiliary stator 24 .
The rotor of the rotary vane pump is supported by the rotating shaft 4 of the vacuum pump 1 passing through the auxiliary stator 24, and is driven as the rotating shaft rotates.

When the pump starts operating, the volume formed by the auxiliary rotor 23 and the auxiliary stator 24 increases and sucks gas through the inlet 17. The suction volume is maximum when the vanes 26 are in the vertical position. This volume then decreases as the vanes 26 rotate, thus increasing the pressure of the gas trapped within said volume. This gas is then discharged through outlet 18. This gas escapes via the relief valve 29 and rises through the liquid lubricant 27 towards the outlet 30 of the chamber 25 which is connected to the auxiliary outlet passage 20 .

The vacuum pump 1 with a built-in rotary vane pump can reduce the pressure of the final pump stage with a very good compression ratio.
By adding an oil trap between the inlet 17 of the auxiliary stator 24 and the controllable inlet valve 15, lubricant can be prevented from migrating to the dry pump parts.

1 Vacuum pumps 3a to 3f Pump stage 4 Rotating shaft 5 Vacuum pump rotor 6 Synchronous gear 7 Vacuum pump suction port 8 Vacuum pump discharge port 9 Vacuum pump stator 10 Oil casing 11 Outlet passage 12 Check valve 13 Auxiliary stator 14 Inlet channel 15 Controllable inlet valve 16 Auxiliary rotor 17 Auxiliary stator inlet 18 Auxiliary stator outlet 19 Control unit 20 Auxiliary outlet channel 21 Controllable outlet valve 22 Auxiliary stator 23 Auxiliary rotor 24 Auxiliary stator 25 Chamber 26 of the oil casing Vanes 27 Liquid lubricant 29 Relief valve 30 Chamber outlet 31 Gear pump gear 100 Pump equipment 101 Load lock 102 Control means M Motor

Claims (11)

- at least one pump stage (3a, 3b, 3c, 3d, 3e, 3f);
- a vacuum pump (1) comprising two rotation shafts (4) extending into said at least one pump stage (3a, 3b, 3c, 3d, 3e, 3f) and carrying at least one rotor (5) in each case; ) and
The rotor (5) is configured to rotate synchronously in opposite directions in order to drive the gas to be pumped between the inlet (7) and outlet (8) of the vacuum pump (1). In what is being done,
The vacuum pump (1) further includes:
- an auxiliary stator (13; 22; 24) through which at least one of the rotational shafts (4) passes;
- an inlet passage (14) with a controllable inlet valve (15);
- at least one auxiliary rotor (16; 23) carried by said rotation axis (4);
The inlet passage (14) connects the inlet (17) of the auxiliary stator (13; 22; 24) with the outlet (8) of the vacuum pump (1) to the last pump stage (3f). is configured to connect and
Rotation of the auxiliary rotor (16; 23) within the auxiliary stator (13; 22; 24) causes the auxiliary stator (13; 22; 24) between said inlet (17) and outlet (18) to drive the gas to be pumped to reduce the pressure in said final pump stage (3f);
When the controllable inlet valve (15) is commanded to close, the at least one auxiliary rotor (16; 23) and the auxiliary stator (13; 22; 24) communicate with the outlet (8). Dry vacuum pump, characterized in that it is adapted to be fluidly isolated from said final pump stage (3f). A vacuum pump (1) according to claim 1, comprising:
The auxiliary stator (13) has two rotating shafts (4) passing through the auxiliary stator,
Said vacuum pump (1) comprises two auxiliary rotors (16) arranged in said auxiliary stator (13) and carried by respective rotational shafts (4), said two auxiliary rotors rotating in opposite directions. A dry vacuum pump characterized in that it is configured to rotate synchronously. A vacuum pump (1) according to claim 2, comprising:
The dry vacuum pump is characterized in that the auxiliary rotor (16) is of a roots type. A vacuum pump (1) according to claim 1, comprising:
The auxiliary stator (22) is formed within the oil casing (10) of the vacuum pump (1),
said vacuum pump (1) comprises two said auxiliary rotors formed by respective gears (31) of a synchronous gear (6);
The synchronous gear (6) and the auxiliary stator (22) form one gear pump,
The dry vacuum pump characterized in that the synchronization gear (6) is further configured to synchronize the rotation of the rotation shaft (4). A vacuum pump (1) according to claim 1, comprising:
Said auxiliary rotor (23) is the rotor of a rotary vane pump which together with said auxiliary stator (24) forms a rotary vane pump received in a chamber (25) of an oil casing (10) of said vacuum pump (1). Dry vacuum pump with special features. The vacuum pump (1) according to any one of claims 1 to 5,
The outlet (18) of the auxiliary stator (13; 22; 24) communicates with the outlet (8) of the vacuum pump by an auxiliary outlet passageway (20) having a controllable outlet valve (21). A dry vacuum pump comprising: The vacuum pump (1) according to any one of claims 1 to 6,
A dry vacuum pump characterized in that the vacuum pump is a roughing vacuum pump (1) configured to discharge gas at atmospheric pressure. The vacuum pump (1) according to any one of claims 1 to 7,
The vacuum pump includes a control unit (19),
The control unit is configured to open the controllable inlet valve (15) as a function of the pressure at the inlet of the vacuum pump (1) and/or a measurement of the power consumed by the vacuum pump (1). A dry vacuum pump configured to command. The vacuum pump (1) according to any one of claims 1 to 8,
The dry vacuum pump is characterized in that the rotor (5) is of a roots type or a claw type. A pump facility (100) comprising one load lock (101),
comprising a dry vacuum pump (1) according to any one of claims 1 to 9, connected to the load lock (101) to alternately raise and lower the pressure in the load lock (101). Pump equipment characterized by: The pump equipment (100) according to claim 10,
Said load lock (101) comprises control means (102) for said controllable inlet valve (15), said control means controlling said controllable inlet valve (101) when said load lock (101) is in an idle phase. Pump installation, characterized in that it is configured to command an inlet valve (15) to open.

Images