201226062 40764pif 六、發明說明： 【相關申請案】 本申請案主張2011年12月3〇號申請的第 10_2〇10-0138462麟國專利申請案的優先權以及根據％ U.S.C. §119自其產生的所有權益，所述專利申請案的内容 以引用的方式全部併入本文中。 【發明所屬之技術領域】 本揭示關於一種分配設備，且更明確地說關於一種能 夠準確地感測是否分配源材料的分配設備。 【先前技術】 一般來說，通過將一對平面基板結合在一起來製造平 面顯示面板。舉例來說，當製造液晶顯示面板時，製造具 備薄膜電晶體和晝素電極的下部基板和具備彩色遽光器和 共用電極的上部基板。接著，將液晶分配在下部基板上， 且將上部基板與下部基板結合並密封以製造液晶顯示面 板。 在此情況下，使用液晶分配設備來將液晶分配在基板 上。此類液晶分配設備包含：在其上置放基板的台；安置 在所述2：上的門架(gantry);排放單元，其安置在門架上且 ^含用於分配液晶的噴嘴；以及感測單元，其安置在排放 單兀下方以感測液晶是否從所述排放單元分 包含：發光零件，其包含用於發射光的紐射器 個光接收H，其與發光零㈣隔_減從光發射器發射 的光。光發射器面對光接收器。噴嘴安置在多個光發射器 4 201226062 40764pif 與多個光接收器之間的空間上方。感測單元比較從光發射 器發射的光量與入射到光接收器的光量，以感測是否分配 了液晶。舉例來說，當液晶未從喷嘴滴落時，從光發射器 發射的光束分別入射到光接收器。因此，從光發射器發射 的光束量等於入射到光接收器的光束量。因而，當從光發 射器發射的光束量等於入射到光接收器的光束量時，得出 液晶未被分配的結論。相反，當從喷嘴分配液晶時，從光 發射器中的一者發射的光被液晶反射，且因此，被防止入 射到光接收器，或僅少量光入射到光接收器。即，從喷嘴 滴落的液晶的路徑穿過從光發射器中的一者發射的光的路 控。因此’從光發射器發射的對應於所滴落液晶的路徑的 光並未入射到光接收器’或僅所述光的一部分入射到光接 收器。因此，從光發射器發射的對應於所滴落液晶的路徑 的光量不同於入射到面對光發射器的光接收器的光量。因 而’當所發射的光量不同於入射光的量時，得出液晶被分 配的結論。 當液晶被分配時’從光發射器中的一者發射的光的至 少一部分可能未入射到光接收器。另外，即使光接收器未 接收從面對所述光接收器的光發射器發射的光，光接收器 仍可接收從鄰近第一光發射器的另一光發射器發射的光的 一部分。在此情況下，從第一光發射器發射的光量可實質 上與入射到面對第一光發射器的光接收器的光量相同。因 此，所發射光量與入射光的量之間的差異是小的。因此， 即使液晶經分配，仍可得出液晶未經分配的結論。此可能 201226062 HU /OHpif 使得難以準確地確定是否分配液晶’或難以感測液晶的分 配失敗。因此’可能在未分配液晶的情況下執行處理程式， 由此降低生產率。 【發明内容】 本揭示提供一種可準確地確定源材料是否被分配的分 配設備。 本揭示還提供一種分配設備，其包含多個光發射器和 多個光接收器’其中從光發射器發射的光束的路徑交I且 在至少一個區域中彼此重疊。 本揭示還提供一種分配設備，其基於供應到光發射器 的光束的量的總和與入射到光接收器的光束的量的總和之 間的差異來確定液晶是否被分配。 根據例示性實施例’分配設備包含：多個光發射器， 所述多個光發射器彼此間隔開以發射光；以及感應器零件 (sensorpar〇,其包含多個光接收器，所述多個光接收器面 對光發射器且彼此間隔開以接收從所述光發射器發射的 光，其中所述光發射器經安置使得從光發射器發射的光束 的路徑彼此交叉且在其至少一部分中彼此重疊。 分配設備可包含檢測單元，所述檢測單元連接到所述 感應器零件，以基於供應到光發射器的光束的量的總和與 入射到光接收器的光束的量的總和之間的差異來確定源材 料是否被分配。 ’從所述光發射器發射的光束可指向相同空間的中央區 域’且所發射光束的路徑可彼此交叉。 6 201226062 40764pif 感應器零件可包含具有開放中央區域的感應器零件主 體’且所述光發射盗和所述光接收為可插入在所述感應器 零件主體中。 從光發射器發射的光可指向所述感應器零件主體的開 放中央區域。 從所述光發射器發射的光束的路徑可在所述感應器零 件主體的開放中央區域中彼此交叉。 所述多個光發射器與所述多個光接收器可彼此間隔 開，且經交替地安置。 所述檢測單元可包含：感測零件(sensing part)，其連 接到所述光接收器以接收入射到光接收器的光束的強度資 料；以及計算零件，其連接到所述光發射器和所述感測零 件以計算從光發射器發射的光束的量的所總和與入射到光 接收器的光束的量的總和之間的差異。 所述分配設備可包含確定零件，所述確定零件基於由 s十算零件計算的所述差異來確定源材料是否被分配。 【實施方式】 下文中，將參看附圖詳細描述具體實施例。然而，本 發明可以不同形式體現，且不應解釋為限於本文所陳述的 實施例。而且，提供這些實施例以使得本揭示將為透徹且 凡整的，且將本發明的範圍充分傳達給所屬領域的技術人 員。 圖1是說明根據例示性實施例的基板處理設備的透視 圖。圖2是說明圖i的排放單元和檢測系統的示意圖。圖 201226062 w/o^pif 3是說明根據當前實施例的檢測零件的透視圖。圖4是士兒 明根據當前實施例的感應器零件和檢測單元的示音圖。。 參看圖1和圖2，根據當前實施例的基板處理二備包 含：台100’在所述台100上置放基板S;門架200^其^ 置在所述台100上；多個排放單元400，其固定到所&二 架200上且彼此間隔開且在佈置方向上排列；多個檢測系 統500，其連接到排放單元4〇〇以感測源材料是否從排^ 單元400分配；以及多個排放單元移動部件7〇〇，其安置 在門架200上且在排放單元400的佈置方向上延伸^水平 地移動排放單元400。基板處理設備更包含安置在台 上且水平移動門架200的門架移動部件3〇〇。在當前實施 例中，將液晶用作源材料以分配在基板8上，且基板處= 設備可為液晶分配設備。然而，本揭示並不限於其，且因 此，可將各種液體用作源材料。舉例來說，源材料可為塗 覆在一對基板S之間以使其結合的密封劑或軟膏。 台1〇〇具有對應於基板s的形狀，使得可將基板s置 放在台100上。由於將四角形玻璃基板用作基板s，所以 台100為四角形。然而，台100的形狀並不限於其，且因 此，可者基板S的形狀變化。台1〇〇可包含單獨的固定 部件（未圖示）來支撐和固定基板s。可將使用靜電力的 靜電卡盤或使用真空吸力的真空固定裝置用作固定部件。 當使用真空固定裝置時，台100可具備與真空泵連通的孔。 門架移動部件300可在橫穿排放單元400和檢測零件 510的水平移動方向的方向上移動門架2〇〇。門架移動部件 201226062 40764pif Γ及ΐ”了導軌31。，其在台1GG上彼此平行且間隔開; H_動部件32G，其分別安置在導轨31〇上且 :二t=滑動。導軌310在垂直於排放單元彻和檢 ，”牛51G的水平移動方向的方向上延 320的上部部分耦合到門架·的下部部分。動^ 沿著導軌31G滑動時，麵合到門架驅二 =0的Η架期水平移動。舉例來說，門架驅動部件32〇 可為、、，配置以線性移動的線性馬達與使滾珠螺杆（祕 screw)㈣的馬達的組合。然而，本揭* 門架驅動部件細可為在導軌3K)上編_部 排放單it 4〇〇中的每一者包含：輕合部件㈣，立搞 安ΐί門架200上的排放單元移動部件700，蝴 漏水平移動；源材料儲存部，盆安 =ΓΓ410的上部部分上且儲存液晶;注射器·， 源材料儲存部420的液晶且排放所述液晶… 其接收來自注射器43G的液晶且將液晶 排放在基板S上。此外，排放單元彻中的每—者 第：：應管480 ’其具有連接到源材料儲201226062 40764pif VI. INSTRUCTIONS: [RELATED APPLICATIONS] This application claims the priority of the 10th 〇10-0138462 Lin Guo patent application filed on December 3, 2011, and all the proceeds from it according to % USC §119 The content of the patent application is hereby incorporated by reference in its entirety. TECHNICAL FIELD The present disclosure relates to a dispensing apparatus, and more particularly to a dispensing apparatus capable of accurately sensing whether or not a source material is dispensed. [Prior Art] Generally, a flat display panel is manufactured by bonding a pair of planar substrates together. For example, when manufacturing a liquid crystal display panel, a lower substrate having a thin film transistor and a halogen electrode and an upper substrate having a color chopper and a common electrode are fabricated. Next, the liquid crystal is dispensed on the lower substrate, and the upper substrate and the lower substrate are bonded and sealed to manufacture a liquid crystal display panel. In this case, a liquid crystal dispensing device is used to dispense the liquid crystal on the substrate. Such a liquid crystal dispensing apparatus includes: a stage on which a substrate is placed; a gantry disposed on the 2:; a discharge unit disposed on the gantry and including a nozzle for dispensing liquid crystal; a sensing unit disposed under the discharge unit to sense whether the liquid crystal comprises from the discharge unit: a light-emitting part comprising a beam light receiving H for emitting light, which is separated from the light-emitting zero (four) Light emitted from a light emitter. The light emitter faces the light receiver. The nozzle is placed above the space between the plurality of light emitters 4 201226062 40764pif and the plurality of light receivers. The sensing unit compares the amount of light emitted from the light emitter with the amount of light incident to the light receiver to sense whether liquid crystal is dispensed. For example, when the liquid crystal does not drip from the nozzle, the light beams emitted from the light emitter are respectively incident on the light receiver. Therefore, the amount of light beam emitted from the light emitter is equal to the amount of light beam incident on the light receiver. Thus, when the amount of the light beam emitted from the light emitter is equal to the amount of the light beam incident on the light receiver, it is concluded that the liquid crystal is not distributed. In contrast, when liquid crystal is dispensed from the nozzle, light emitted from one of the light emitters is reflected by the liquid crystal, and thus, is prevented from entering the light receiver, or only a small amount of light is incident on the light receiver. That is, the path of the liquid crystal dripping from the nozzle passes through the path of light emitted from one of the light emitters. Therefore, the light emitted from the light emitter corresponding to the path of the dropped liquid crystal is not incident on the light receiver' or only a part of the light is incident on the light receiver. Therefore, the amount of light emitted from the light emitter corresponding to the path of the dropped liquid crystal is different from the amount of light incident to the light receiver facing the light emitter. Therefore, when the amount of light emitted is different from the amount of incident light, it is concluded that the liquid crystal is assigned. At least a portion of the light emitted from one of the light emitters may not be incident on the light receiver when the liquid crystal is dispensed. In addition, even if the light receiver does not receive light emitted from the light emitter facing the light receiver, the light receiver can receive a portion of the light emitted from another light emitter adjacent to the first light emitter. In this case, the amount of light emitted from the first light emitter may be substantially the same as the amount of light incident to the light receiver facing the first light emitter. Therefore, the difference between the amount of emitted light and the amount of incident light is small. Therefore, even if the liquid crystal is dispensed, it can be concluded that the liquid crystal is unallocated. This possibility 201226062 HU /OHpif makes it difficult to accurately determine whether or not to dispense liquid crystals or to fail to sense the failure of liquid crystal distribution. Therefore, it is possible to execute the processing program without dispensing the liquid crystal, thereby reducing the productivity. SUMMARY OF THE INVENTION The present disclosure provides an dispensing device that can accurately determine whether a source material is dispensed. The present disclosure also provides a dispensing apparatus comprising a plurality of light emitters and a plurality of light receivers wherein the paths of the light beams emitted from the light emitters intersect and overlap each other in at least one region. The present disclosure also provides a dispensing device that determines whether liquid crystal is dispensed based on a difference between a sum of a quantity of light beams supplied to a light emitter and a sum of light beams incident to the light receiver. According to an exemplary embodiment, a dispensing device includes: a plurality of light emitters spaced apart from one another to emit light; and a sensor component (sensorpar, comprising a plurality of light receivers, the plurality of The light receivers face the light emitters and are spaced apart from each other to receive light emitted from the light emitters, wherein the light emitters are disposed such that paths of light beams emitted from the light emitters cross each other and in at least a portion thereof The dispensing device may comprise a detection unit coupled to the sensor part to be based on a sum of the sum of the amounts of the light beams supplied to the light emitter and the sum of the amounts of the light beams incident on the light receiver The difference is to determine if the source material is dispensed. 'The light beam emitted from the light emitter can point to the central area of the same space' and the paths of the emitted light beams can cross each other. 6 201226062 40764pif The sensor part can comprise an open central area The sensor part body 'and the light emitting thief and the light receiving are insertable in the body of the inductor part. The emitted light may be directed to an open central region of the body of the inductor. The paths of the beams of light emitted from the light emitter may intersect each other in an open central region of the body of the inductor. The plurality of light receivers may be spaced apart from each other and alternately disposed. The detecting unit may include: a sensing part connected to the light receiver to receive incident light to the light receiver a strength data of the light beam; and a calculation part coupled to the light emitter and the sensing part to calculate a sum of a sum of a quantity of light beams emitted from the light emitter and a sum of a quantity of light beams incident to the light receiver The dispensing device may include a determining part that determines whether the source material is dispensed based on the difference calculated by the s-calculated part. [Embodiment] Hereinafter, specific description will be specifically described with reference to the accompanying drawings. The present invention may, however, be embodied in various forms and should not be construed as limited to the embodiments set forth herein. The present invention will be fully described and will be fully conveyed to those skilled in the art. Fig. 1 is a perspective view illustrating a substrate processing apparatus according to an exemplary embodiment. Fig. 2 is a view illustrating a discharge unit of Fig. And a schematic diagram of the detection system. Fig. 201226062 w/o^pif 3 is a perspective view illustrating the detecting part according to the current embodiment. Fig. 4 is a sound diagram of the sensor part and the detecting unit according to the current embodiment. Referring to FIGS. 1 and 2, a substrate processing apparatus according to the current embodiment includes a stage 100' on which a substrate S is placed, a gantry 200 disposed on the stage 100, and a plurality of discharge units. 400, which is fixed to the & two racks 200 and spaced apart from each other and arranged in the arrangement direction; a plurality of detecting systems 500 connected to the discharging unit 4A to sense whether the source material is dispensed from the rowing unit 400; And a plurality of discharge unit moving members 7 that are disposed on the gantry 200 and extend in the arrangement direction of the discharge unit 400 to horizontally move the discharge unit 400. The substrate processing apparatus further includes a gantry moving member 3 that is placed on the stage and horizontally moves the gantry 200. In the current embodiment, liquid crystal is used as a source material for distribution on the substrate 8, and at the substrate = the device can be a liquid crystal dispensing device. However, the present disclosure is not limited thereto, and thus various liquids can be used as the source material. For example, the source material may be a sealant or ointment applied between a pair of substrates S to bond them. The stage 1 has a shape corresponding to the substrate s so that the substrate s can be placed on the stage 100. Since the square glass substrate is used as the substrate s, the stage 100 has a square shape. However, the shape of the stage 100 is not limited thereto, and therefore, the shape of the substrate S may vary. The table 1 can include a separate fixing member (not shown) to support and fix the substrate s. An electrostatic chuck using an electrostatic force or a vacuum fixing device using a vacuum suction can be used as a fixing member. When a vacuum fixture is used, the stage 100 can be provided with a hole in communication with the vacuum pump. The gantry moving part 300 can move the gantry 2 在 in a direction crossing the discharge unit 400 and the horizontal moving direction of the detecting part 510. The gantry moving parts 201226062 40764pif 导轨 and ΐ" the guide rails 31. They are parallel and spaced apart from each other on the table 1GG; H_ moving parts 32G are respectively disposed on the guide rails 31〇 and: two t=sliding. The upper portion of the extension 320 in the direction perpendicular to the discharge unit, "the direction of the horizontal movement of the bull 51G, is coupled to the lower portion of the gantry. When moving along the guide rail 31G, the surface is moved horizontally to the truss of the gantry drive =0. For example, the gantry drive unit 32 can be a combination of a linear motor that moves linearly and a motor that makes a ball screw (four). However, the gantry drive member can be spliced on the guide rail 3K), each of which includes: a light-fitting component (four), and the discharge unit on the gantry 200 is moved. The component 700 moves horizontally; the source material storage portion, the upper portion of the basin 410 and stores the liquid crystal; the injector, the liquid crystal of the source material storage portion 420 and discharges the liquid crystal... it receives the liquid crystal from the injector 43G and will The liquid crystal is discharged on the substrate S. In addition, each of the discharge units is: - should be 480 ‘ it has a connection to the source material storage
考口連接到注射器430的另一端；第二供應管49〇，U 靖^物的—端和連制排放零件的喷嘴 452的另-‘第—閥偏’其安裝在第—供應管彻 控制注射H 430與源材簡存部42 連 470’其安裝在第二供應管上以控制 201226062 4U/04pif Ϊ件45G之_連通；源材料儲存部支撐部件42(M，並 ^在耦合部件41G上以支_材料儲存部_ ; ^ 射器支樓部件43(M，其支撐注射器43〇 如 和第二供應管490具有帶有内部空間的管形狀^J : :=r:=r:= 的下部部分的至少一邱八奸A * m — 上。注射器430 销-1的開放孔中。J而刀 衬疋在注射器支標部件 和注射器支撐部件43(M的形狀和^^撐部件420] 且因此可變化，位置並不限於其， 撐和固定便可。〇和注射器_被支 相合到安合rr购 部件410具有板形狀，並早疋移動#件700。輕合 注射器430和排放零件：材料儲存部420、 移動部件7〇〇。 …後表面連接到排放單元 動部件水平移動以基可^ 源材料儲存部42〇儲存 上。 具有帶有内部空間的圓柱形狀:：而、應:注射器430,且 ，狀並不限於其，且因此，可二:材料儲存部 一空間的各種形狀_選擇。 :。。以接收液晶的内 綠材料錯存部420上以從液晶去;^包^ (未圖示）安裝在 日曰去除財。舉例來說，消泡 201226062 40764pif 器可包含真空部件以從源材料排放空氣。 r曰43^接收來自源材料儲存部42G的液晶，並將 液曰曰的特疋部分供應到排放零件45G。注料43 其具有儲存液晶的内部空間；注射入口 ❹1 f 體431的側部部分以注射液晶；排 放出口 433，其連接驗射器主體43ι的下部部分 =主，43!的上部部分以調整注射器主體431的 ㈣液晶的引入和排放。注射器主體431具 晶的内部空間的桶形狀，且可由例 注射入口 432的-端連接到注輪 v、另端連接到第一供應管480。排放出口 433 端連接到注射器主體43卜且其另一端連接到第二供 應官携。調整器434控制液晶經由注射入口 432到注射 器主體431的注射，以及液晶經由排放出口 433從注射器 主體431的排放。舉例來說，調整器434可調整注射器^ 體31的内σρ壓力以控制液晶的注射和排放。#，調整器 434可為至少—部分在注射器主體431内垂直移動· 塞。f而’調整器434並不限於其，朋此可從用於調整 注射器主體431的内部壓力或控制液晶的注射（或引入） 和排放的多種部件中選擇。排放零件·安裝在注射器43〇 下方的耗合部件41〇上’以將液晶分配在置放在台1〇〇上 的基板s上。排放零件梢包含將液晶分配在基板s上的 噴嘴452以及在其上安裝並固定噴嘴Μ2的喷嘴支樓部件 11 201226062 40764pif 451。喷嘴支撐部件451可具有帶有開放孔的板形狀，在所 述開放孔中插入且固定喷嘴452的至少一部分。將喷嘴支 撐部件451安裝且固定到耦合部件41〇。喷嘴452連接到 第二供應管490的一端，且經由第二供應管49〇接收來自 注射器430的液晶以將液晶分配到基板s。 檢測系統500基於光強度的變化來確定液晶是否被分 配。檢測系統500的位置對應於從排放零件45〇的喷嘴452 滴落的液晶的位置。檢測系統5〇〇包含：感測單元51〇， 其包含多個光發射器5121>1、512b_2和512b 3以及多個 光接收器512c]、512c-2和512c-3 ;以及檢測單元52〇， 其關於信號傳輸而連接到感測單元51〇，其基於由 元510感測的資料來確定液晶是否被分配。' 、' 感測單元510包含：感應||零件512，其具有帶有開 放中央部分的環形形狀且安置在液晶從噴嘴极、滴落所在 上；光供應零件513，其經配置以將光供應_應 Ϊ ; 件511 ’其具有連接到 ，應益零件512的-端和連接到噴嘴支撐部件451的另一 端，從而支撐並固定感應器零件512。 ==和圖4 ’感應器零件512包含：感應器零件 發射器二=== :口距離且具有插入在感應器零件主體：射== =，以及多個光接收器512c_b512c姊5i2c_3 接收器彼關陳定㈣且具有插人在感絲零件主體 12 201226062 4U/()4pif 512a中的至少-部分。感應器零件主體5ΐ2&具有在其中 ^插入級射If 5H、512b_2和512b_3以及光接收 斋512M、512c_2和512C-3的凹座（未圖示舉例來說， 感應器零件域512a的環形雜可為甜甜_狀。然而， 感應器零件主體512a的形狀並不限於其，且因此可從例如 四角形環形形狀和三肖形環形職的各種環形形狀中選 擇在下文中，將感應器零件主體512a的開放中央部分稱 為開口。 光發射器512b-l、512b-2和512b-3連接到光供應零 件513以接收來自光供應零件513的光並發射光。為此目 的，光發射器512b-l、512b-2和512b-3包含光纖。然而， 光發射器512b-l、512b-2和512b-3並不限於其，且因此， 可包含用於發射光的任何部件。儘管提供光發射器 512b-l、512b-2和512b-3，但可提供兩個或兩個以上光發 射器°如上所述，光發射器512b-l、512b-2和512b-3插 入在感應器零件主體512a中，且彼此間隔開。光發射器 512b_l、512b_2和512b-3的各自發光區域經由感應器零件 主體512a的内部表面而暴露。即，發光區域指向感應器零 件主體512a的開口。光發射器512b-l、512b-2和512b-3 與感應器零件主體512a的開口中心間隔恆定距離。從光發 射器512b-l、512b-2和512b-3中的每一者發射的光具有 特定面積。即，構成光發射器512b-l、512b-2和512b-3 中的每一者的光纖發射相應光束，所述光束聯合成具有特 定面積的一個光束。從光發射器512b-l、512b-2和512b-3 13 201226062 40764pif 中的每一者發射的光可具有三角形形狀，其隨著光傳播和 擴展而在面積上增加。由於從光發射器512卜1、512b-2和 512b-3發射的光束全部指向感應器零件主體5i2a的開 口，所以所述光束的路徑在至少一個區域中彼此重疊。將 感應裔零件主體512a開口的中央區域中的路徑的重疊部 分稱作重璧區域。從排放路徑450的喷嘴452滴落的大多 數液晶穿過重疊區域’且經分配在基板S上。 光接收器512c-l、512c-2和512c-3接收從光發射器 512b-1、512b-2和512b-3發射的光束以將光束的相應強度 值傳輸到檢測系統500。根據本揭示，光接收器的數目可 對應於光發射器的數目。光接收器512(>1、512〇2和512c-3 的數目對應於光發射器512b-l、512b-2和512b-3的數目 為三。如上所述’光接收器512c-l、512c-2和512c-3插入 在感應器零件主體512a中，且彼此間隔開。光接收器 512c-l、512C-2和512c-3中的一者安置在光發射器 512b-l、512b-2和512b-3中的兩者之間。多個光發射器 512b-l、512b-2 和 512b-3 與多個光接收器 512c-l、512c-2 和512c-3交替安置。光接收器512(>1、512c_2和512c_3 分別面對光發射器512b-l、512b-2和512b-3。光接收器 512c-l、512C-2和512C-3的各自光入射區域經由感應器零 件主體512a的内部表面暴露。即，相應光入射區域指向感 應益零件主體512a的開口。光接收器512c-l、512c-2和 512c-3與感應器零件主體512a開口的中心間隔恆定距離。 因而’感應器零件主體512a具有圓形環形狀，且光發 201226062The test port is connected to the other end of the syringe 430; the second supply tube 49〇, the end of the U-shaped object, and the other end of the nozzle 452 of the discharge part are installed in the first-supply tube The injection H 430 and the source material storage portion 42 470' are mounted on the second supply pipe to control the communication of the 201226062 4U/04pif element 45G; the source material storage portion support member 42 (M, and the coupling member 41G) The upper portion of the material storage portion _; ^ the ejector member 43 (M, which supports the syringe 43 and the second supply tube 490 has a tube shape with an internal space ^J : :=r:=r:= The lower part of the lower part of the at least one Qiu trait A* m — on the syringe 430 pin-1 in the open hole. J and the knife lining the syringe holder part and the syringe support part 43 (M shape and support part 420 ] and thus can be changed, the position is not limited to it, and the support can be fixed. The 〇 and the syringe _ are coupled to the erecting rr component 410 having a plate shape, and moving the #700 early. The light-supplied syringe 430 and the discharge Parts: material storage portion 420, moving member 7〇〇. ... rear surface connected to the discharge unit moving member horizontal movement The base material storage portion 42 is stored thereon. It has a cylindrical shape with an internal space:: and should be: a syringe 430, and the shape is not limited thereto, and therefore, two: a material storage portion - a variety of spaces The shape_selection: is received on the inner green material storage portion 420 of the liquid crystal to be removed from the liquid crystal; the package (not shown) is installed in the sundial to remove the wealth. For example, the defoaming 201226062 40764pif can include The vacuum member discharges air from the source material, receives the liquid crystal from the source material storage portion 42G, and supplies the characteristic portion of the liquid helium to the discharge member 45G. The injection material 43 has an internal space for storing the liquid crystal; The side portion of the inlet f1 f body 431 to inject liquid crystal; the discharge outlet 433 which connects the lower portion of the accommodator main body 43 ι = the upper portion of the main portion 43 to adjust the introduction and discharge of the liquid crystal of the syringe body 431. The 431 has a barrel shape of a crystal internal space, and can be connected to the injection wheel v from the end of the injection inlet 432 and the other end to the first supply tube 480. The discharge outlet 433 end is connected to the syringe body 43 and the other is Connected to the second supply officer. The adjuster 434 controls the injection of liquid crystal via the injection inlet 432 to the syringe body 431, and the discharge of liquid crystal from the syringe body 431 via the discharge outlet 433. For example, the adjuster 434 can adjust the syringe body 31. The internal σρ pressure is used to control the injection and discharge of the liquid crystal. #, the adjuster 434 can be at least partially moved vertically within the syringe body 431. The ' adjuster 434 is not limited thereto, and can be used for adjustment. The internal pressure of the syringe body 431 or a plurality of components that control the injection (or introduction) and discharge of the liquid crystal are selected. The discharge member is mounted on the consuming member 41 下方 under the syringe 43A to distribute the liquid crystal on the substrate s placed on the stage 1A. The discharge part tip includes a nozzle 452 that distributes the liquid crystal on the substrate s and a nozzle branch member 11 201226062 40764pif 451 on which the nozzle Μ 2 is mounted and fixed. The nozzle support member 451 may have a plate shape with an open hole in which at least a portion of the nozzle 452 is inserted and fixed. The nozzle support member 451 is mounted and fixed to the coupling member 41A. The nozzle 452 is connected to one end of the second supply pipe 490, and receives liquid crystal from the injector 430 via the second supply pipe 49 to distribute the liquid crystal to the substrate s. Detection system 500 determines whether liquid crystals are dispensed based on changes in light intensity. The position of the detection system 500 corresponds to the position of the liquid crystal dropped from the nozzle 452 of the discharge member 45A. The detecting system 5A includes: a sensing unit 51A including a plurality of light emitters 5121> 1, 512b_2 and 512b 3 and a plurality of light receivers 512c], 512c-2 and 512c-3; and a detecting unit 52〇 It is connected to the sensing unit 51A with respect to signal transmission, which determines whether liquid crystal is dispensed based on the material sensed by the element 510. The ',' sensing unit 510 includes: an inductive || part 512 having an annular shape with an open central portion and disposed on the liquid crystal from the nozzle pole, where the drip is placed; a light supply part 513 configured to supply light The member 511' has a terminal connected to the benefit component 512 and is connected to the other end of the nozzle support member 451 to support and fix the inductor component 512. == and Figure 4 'Sensor part 512 contains: sensor part transmitter two ===: port distance and has inserted in the sensor part body: shot ===, and multiple light receivers 512c_b512c姊5i2c_3 receiver Guan Chending (4) and has at least a part inserted in the body part 12 201226062 4U/() 4pif 512a of the wire component. The sensor part body 5ΐ2& has a recess in which the stage shots If 5H, 512b_2 and 512b_3 and the light receiving 512M, 512c_2 and 512C-3 are inserted (not shown, for example, the ring part of the sensor part field 512a) It is sweet. However, the shape of the inductor part main body 512a is not limited thereto, and thus it is possible to select from various ring shapes such as a quadrangular ring shape and a three-Shape ring shape, hereinafter, the inductor part main body 512a The open central portion is referred to as an opening. The light emitters 512b-1, 512b-2, and 512b-3 are connected to the light supply part 513 to receive light from the light supply part 513 and emit light. For this purpose, the light emitter 512b-1, 512b-2 and 512b-3 comprise optical fibers. However, the light emitters 512b-1, 512b-2, and 512b-3 are not limited thereto, and thus, may include any component for emitting light. Although the light emitter 512b is provided. -l, 512b-2, and 512b-3, but two or more light emitters may be provided. As described above, the light emitters 512b-1, 512b-2, and 512b-3 are inserted in the inductor part body 512a. And spaced apart from each other. Light emitters 512b_1, 512b_2, and 5 The respective light emitting regions of 12b-3 are exposed via the inner surface of the inductor part body 512a. That is, the light emitting regions are directed to the openings of the inductor part body 512a. The light emitters 512b-1, 512b-2, and 512b-3 and the sensor parts The centers of the openings of the main body 512a are spaced apart by a constant distance. The light emitted from each of the light emitters 512b-1, 512b-2, and 512b-3 has a specific area. That is, the light emitters 512b-1, 512b-2 and The fibers of each of 512b-3 emit respective beams that are combined into one beam having a particular area. The beams are emitted from each of the light emitters 512b-1, 512b-2, and 512b-3 13 201226062 40764pif The light may have a triangular shape which increases in area as the light propagates and expands. Since the light beams emitted from the light emitters 512, 512b-2, and 512b-3 all point to the opening of the inductor part body 5i2a, The paths of the light beams overlap each other in at least one region. The overlapping portion of the paths in the central region of the opening of the sensory part body 512a is referred to as a heavy-duty region. Most of the liquid crystals dripping from the nozzles 452 of the discharge path 450 pass through the heavy The region 'is distributed over the substrate S. The light receivers 512c-1, 512c-2, and 512c-3 receive the light beams emitted from the light emitters 512b-1, 512b-2, and 512b-3 to correlate the respective intensity values of the light beams Transmission to detection system 500. According to the present disclosure, the number of optical receivers may correspond to the number of light emitters. The number of light receivers 512 (> 1, 512 〇 2, and 512c-3 corresponds to the number of light emitters 512b-1, 512b-2, and 512b-3 being three. As described above, 'light receiver 512c-1, 512c-2 and 512c-3 are inserted in the inductor part body 512a and are spaced apart from each other. One of the light receivers 512c-1, 512C-2, and 512c-3 is disposed at the light emitters 512b-1, 512b- Between two of 2 and 512b-3, a plurality of light emitters 512b-1, 512b-2, and 512b-3 are alternately disposed with the plurality of light receivers 512c-1, 512c-2, and 512c-3. The 512s (> 1, 512c_2, and 512c_3 face the light emitters 512b-1, 512b-2, and 512b-3, respectively. The respective light incident regions of the light receivers 512c-1, 512C-2, and 512C-3 are via the sensor The inner surface of the part body 512a is exposed. That is, the corresponding light incident area is directed to the opening of the inductive part body 512a. The light receivers 512c-1, 512c-2, and 512c-3 are spaced a constant distance from the center of the opening of the inductor part body 512a. Thus, the sensor part body 512a has a circular ring shape, and the light is issued 201226062
4U/04piI 射器 512b-l、512b-2 和 512b-3 與光接收器 512cq、512c_2 和512c-3在感應器零件主體512a中彼此間隔開。另外， 多個光發射器512b-l、512b-2和512b-3與多個光接收器 512c-l、5li2c-2和512c-3交替地安置，且光發射器5i2b-l、 512b-2和512b-3分別面對光接收器512(>1、512(>2和 512c-3。如圖4中說明’從光發射器512b_卜512b_2和512b_3 中的每一者發射的光穿過感應器零件主體512a的開口的 中央部分。因此，在感應器零件主體512a的開口的中央部 分中形成重疊區域’在所述重疊區域中從光發射器 512b-l、512b-2和512b-3發射的光束路徑彼此重疊。另外， 從噴嘴452滴落的大多數液晶穿過重疊區域。因此，從光 發射器512b-l、512b-2和512b-3發射的光的至少一部分 被所滴落液晶反射’且因此未入射在光接收器5i2c-l、 512c-2和512c-3上。舉例來說，從光發射器5121>1發射 到所滴洛液晶的光被所滴落液晶反射，且因此未入射到第 二光接收器512〇1。從光發射器512b-l發射但未遇到所滴 落液晶的光在無反射的情況下傳播，但未入射到第一光接 收器512c-l。從第二和第三光發射器512b-2和512b-3發 射到所滴洛液晶的光被所滴洛液晶反射，且因此未入射到 第二和第三光接收器512c-2和512c-3。從第二和第三光發 射器512b-2和512b-3發射但未遇到所滴落液晶的光在無 反射的情況下傳播，但未入射到第二和第三光接收器 5l2c-2和512c-3。因此，從光發射器512b-l、512b-2和 5l2b-3發射的光量不同於入射到光接收器512c-l、512c-2The 4U/04piI emitters 512b-1, 512b-2, and 512b-3 are spaced apart from the light receivers 512cq, 512c_2, and 512c-3 in the inductor part body 512a. In addition, a plurality of light emitters 512b-1, 512b-2, and 512b-3 are alternately disposed with the plurality of light receivers 512c-1, 5li2c-2, and 512c-3, and the light emitters 5i2b-1, 512b-2 And 512b-3 face the optical receiver 512 (> 1, 512 (> 2 and 512c-3 respectively). As illustrated in Fig. 4, the light emitted from each of the light emitters 512b_b 512b_2 and 512b_3 Passing through a central portion of the opening of the inductor part body 512a. Thus, an overlapping area 'in the central portion of the opening of the inductor part body 512a' is received from the light emitters 512b-1, 512b-2, and 512b The beam paths of the -3 emission overlap each other. In addition, most of the liquid crystal dropped from the nozzle 452 passes through the overlap region. Therefore, at least a portion of the light emitted from the light emitters 512b-1, 512b-2, and 512b-3 is The dripping liquid crystal reflects 'and thus is not incident on the photoreceivers 5i2c-1, 512c-2, and 512c-3. For example, light emitted from the light emitter 5121>1 to the dripped liquid crystal is dropped by the liquid crystal Reflected, and therefore not incident on the second light receiver 512〇1. Light emitted from the light emitter 512b-1 but not encountered by the falling liquid crystal is in the opposite direction Propagating in the case of radiation, but not incident on the first light receiver 512c-1. Light emitted from the second and third light emitters 512b-2 and 512b-3 to the dripped liquid crystal is reflected by the dripped liquid crystal, And therefore not incident on the second and third light receivers 512c-2 and 512c-3. Light emitted from the second and third light emitters 512b-2 and 512b-3 but not immersed in the liquid crystal is present Propagating in the case of reflection, but not incident on the second and third photoreceivers 51-2c-2 and 512c-3. Therefore, the amount of light emitted from the light emitters 512b-1, 512b-2, and 5112b-3 is different from incident to Optical receivers 512c-1, 512c-2
15 S 201226062 40764pif 和512c-3的光量。因此’基於從光發射器512b_i、5i2b-2 和512b-3發射的光束的量的總和與入射到光接收器 512c-l、512c-2和512〇3的光束的量的總和之間的差異來 確定液晶是否被分配。從光發射器512b-l、512b-2和512b-3 發射的光束的量的總和與入射到光接收器512c-l、512c-2 和512c-3的光束的量的總和之間的差異大於典型方法的 差異。因此，可比使用典型方法更準確地確定液晶是否被 分配。稍後將詳細描述基於從光發射器512b-l、512b-2和 512b-3發射的光束的量的總和與入射到光接收器5丨2c-l、 512c-2和512c-3的光束的量的總和之間的差異來確定液晶 是否被分配的方法。 檢測單元520連接到光供應零件513和光接收器 512c-l、512c-2和512c-3，且檢測從光供應零件513供應 到光發射器512b-l、512b-2和512b-3的光量與入射到光 接收器512c-l、512〇2和512c-3的光量之間的差異，以確 定液晶是否被分配。檢測單元520包含：感測零件521， 其連接到光接收器512ol、512c-2和512c-3以接收入射到 光接收器512c-l、512c-2和512c-3的光的強度資料；計算 零件522，其連接到光供應零件513和感測零件52ι以計 算供應到光發射器512b-l、512b-2和512b-3的光束的量 的總和與入射到光接收器512c-卜512c-2和512c-3的光束 的量的總和之間的差異；以及確定零件523，其基於由計 鼻令件522 5十异的值來確定液晶是否被分配。由計算零件 522計算的值是供應到光發射器512]>1、5121>2和512b_3 16 201226062 40764pif 的光束的量的總和與入射到光接收器512c-l、512c-2和 512c-3的光束的量的總和之間的差異。 感測零件521連接到光接收器512C-1、512c-2和512c-3 以接收入射到光接收器512c-l、512c-2和512c-3的光的信 號，且基於所述信號計算光強度。舉例來說，當三個光發 射器512b-l、512b-2和512b-3對應於三個光接收器 512c-l、512C-2和512c-3時，感測零件521接收入射到光 接收器512c-l、512c-2和512c-3的光束的信號並基於所述 信號計算光束的光強度。 如上所述，計算零件522連接到光供應零件513和感 測零件521以計算供應到光發射器512b-l、512b-2和 512b-3的光束的量的總和與入射到光接收器512c-1、 512c-2和512c-3的光束的量的總和之間的差異。為此目 的’計算零件522接收從光供應零件513供應到光發射器 512b-l、512b-2和512b-3的光束的強度資料並求和。另外， 計算零件522連接到感測零件521以接收入射到光接收器 512c-l、512C-2和512c-3的光束的強度資料並求和。在下 文，將從光發射器512b-l、512b-2和512b-3發射的光束 的量的總和稱作所發射光強度總和，且將入射到光接收器 512c-l、512c-2和512c-3的光束的量的總和稱作入射光強 度總和。計算零件522計算所發射光強度總和與入射光強 度總和之間的差異。在下文中，將由計算零件522計算的 所發射光強度總和與入射光強度總和之間的差異稱作計算 值0 17 201226062 40764pif 確定零件523連接到計算零件522以通過比較所發射 光強度總和與入射光強度總和或通過使用由計算零件522 計算的計算值來確定液晶是否被分配。即，當入射到光接 收斋512c-l、512c-2和512c-3的光束的量的總和為零時， 或當所發射光強度總和與入射光強度總和之間的差異 (即，計算值）較大時，確定零件523得出液晶被分配的結 論。相反，當所發射光強度總和與入射光強度總和之間的 差異（即，計算值）為零或在特定範圍内時，確定零件523 得出液晶未被分配的結論。 如上所述，將光發射器512b-l、512b-2和512b-3插 入到在中心具有開口的感應器零件主體512a中。然而，本 揭tf並不限於其。儘管未展示，光發㈣可發射光束到相 同空間的中央區域。因此，所發射光束的路徑在相同空間 的中央區域中彼此交叉和重疊。 圖5A #圖SB疋說明借助於根據例示性實施例的感須 單元和制單元來確歧晶是倾分_方法的示意圖。 參看圖5A，沒有液晶經安置。參看圖5B，液晶經安置。 圖6A和圖6B是說明借助於相關技術中的感測單元來確定 液晶是否被分_方法的示意圖。參看圖从，沒有液晶經 看圖6B ’液晶經安置。將簡要描述當前實施例的 與先刚貫闕鱗件相_零件，祕省略其描述。 射看=i ΐ液晶未從嘴嘴452排放時，從光發 器 512b-l 512b_2 和 51奴 a· / 射到光接收器512c]、512e_2#^ 9、=至5 一部分入 )12c2和5l2c-3。舉例來說，從第 18 201226062 4U754pif -光發射If皿-丨發射的光束的部分入射到第一光接收 器犯C-卜所發射光束的剩餘部分未入射到第一光接收器 512c-l。或者，從第一光發射器512b]發射的光束的全部 可入射到第-光接收器512c-l。從第二和第三光發射器 512b-2和512b-3發射的光束的一部分入射到第二和第三 光接收器512c-2和512c-3’且其剩餘光束未入射到第二和 第二光接收态512c-2和512c-3。或者，從第二和第三光發 射器512b-2和512b-3發射的光束的全部可入射到第二和 第三光接收器512c-2和512c-3。 檢測系統500的感測零件521接收入射到光接收器 512c-l、512c-2和512c-3的光束的信號，且基於所述信號 計算光強度值。接著，計算零件522接收供應到光發射器 512b-l、512b-2和512b-3的光束的強度資料並求和。其後， 計算零件522計算從光發射器5!^」、512b_2和512b_3 發射的光束的量的總和（即，所發射光強度總和）與入射 到光接收器512c-l、512c-2和512c-3的光束的量的總和 (即’入射光強度總和）之間的差異。確定零件523通過比 較所發射光強度總和與入射光強度總和或通過使用由計算 零件522計算的計算值來確定液晶是否被分配。此時，由 於來自光發射器512b-l、512b-2和512b-3的光束的至少 一部分入射到光接收器512c-l、512C-2和512〇3，所以所 發射光強度總和等於入射光強度總和或在特定範圍内與其 不同。gp，由計算零件522計算的計算值為零或較小。因 此，確定零件523得出液晶未被分配的結論。 19 201226062 40764pif 參看圖5B，當液晶從喷嘴452滴落時，液晶穿過重疊 路徑，在所述重疊路徑中從光發射器5121>1、512b_2和 512b-3發射的光束的路徑彼此重疊。從光發射器、 512b-2和512b-3發射的光束的至少一部分被反射且被液 晶阻擂。即’與從光發射器中的一者發射的光被反射且阻 擋的相關技術不同，從光發射器5121>1、；5i2b-2和512b-3 發射的光束被反射且被防止入射到光接收器512(>1、 512c-2和512c-3。舉例來說，從第一光發射器5121>1發射 到所滴落液晶的光束被所滴落液晶反射，且因此未入射到 第一光接收器512c-l。從第二和第三光發射器512b-2和 512b_3發射到所滴落液晶的光束被所滴落液晶反射，且因 此未入射到第二和第三光接收器512(>2和512c_3。 此時’檢測系統500的感測零件521接收入射到光接 收器512c-l、512c-2和512c-3的光束的信號，且基於所述 信號計算光強度值。計算零件522接收從光供應零件513 供應到光發射器512b-l、512b-2和512b-3的光束的強度 資料並求和。此時，在液晶滴落的情況下入射到光接收器 512c-l、512c-2和512c-3的光束的量的總和小於如圖5A 所說明的在無液晶滴落的情況下入射到光接收器512C-1、 512c-2和512c-3的光束的量的總和。另外，所發射光強度 總和與入射光強度總和之間的差異大於圖5A中的差異。 其後’計算零件522計算從光發射器512b-l、512b-2和 512b-3發射的光束的量的總和（即，所發射光強度總和） 與入射到光接收器512c-l、512c-2和512C-3的光束的量的 201226062 40764pif 總和（即，入射光強度總和）之間的差異。確定零件523 通過比較所發射光強度總和與入射光強度總和或通過使用 由計算零件522計算的計算值來確定液晶是否被分配。此 時，由於來自光發射器512b-l、512b-2和512b-3的光束 的至少一部分未入射到光接收器512c_i、512c-2和 512c-3 ’所以所發射光強度總和與入射光強度總和之間的 差異較大。另外，所發射光強度總和與入射光強度總和之 間的差異在液晶滴落的情況下大於如圖5A中所說明的在 無液晶滴落的情況下的所發射光強度總和與入射光強度總 和之間的差異。因此，確定零件523得出液晶被分配的結 論0 在相關技術中，光發射器在直線上彼此間隔開，且光 接收器在直線上彼此間隔開以面對光發射器，如圖6A和 圖6B所說明。參看圖6B ’當液晶從喷嘴滴落時，僅有從 光發射器中的一者發射的光被液晶反射。即，僅有從光發 射器發射的對應於所滴落液晶的路徑的光被所滴落液晶反 射’且被防止入射到光接收器。另外，將來自光發射器中 的一者的光量與僅入射到對應於光發射器的光接收器的光 量相比’且因此其間的差異較小。因此，即使液晶被分配， 仍可付出液晶未被分配的結論。 然而’根據上述實施例，光發射器512b-l、512b-2和 512b-3經安置使得從光發射器5i2b-l、512b-2和512b-3 發射的光束的路徑彼此重疊。另外，通過比較從光發射器 512W、512b-2和512b-3發射的光束的量的總和與入射到 201226062 4U/〇4pif 光接收器512c-卜512C-2和512C-3的光束的量的總和來確 定液晶是否被分配。因此，所發射光強度與入射光強度之 間的差異大於相關技術的差異。因此，可比使用典型方法 更準確地確定液晶是否被分配。 一儘管在本文中舉例說明用於分配液晶的設備，但本揭 示不限於其，且因此可舉例說明用於分配源材料的各種設 備，例如軟膏分配器和墨水分配器。 根據所述實施例，光發射器分別面對光接收器。從光 發射器發射的光束的路徑彼此交叉並重疊。由於用於排放 源材料的喷嘴安置在所發射光束的路徑彼此重疊的重疊區 域上，所以從喷嘴滴落的液晶穿過重疊區域。因此，可減 少源材料的排放位置的偏離以可靠地感測源材料。因此， 可準確地確定液晶是否被分配。 另外，由於將從光發射器發射的光束的量的總和與入 射到光接收器的光束的量的總和之間的差異用以確定源材 料是否被分配，所以所發射光強度與入射光強度之間的差 異大於相關技術的差異。因此，可比使用 地確定源材料是否被分配。因此，可防止在未分配源^ 的情況下執行處理程式，由此節省時間。另外，可防止由 於源材料的分配失敗而引起的裝置缺陷。 、儘官已參考具體例示性實施例描述了分配設備，但其 並不限於此。因此，所屬領域陳術人員將容易理解在^ 偏離Ik附申清專利範圍所界定的本揭示精神和範圍的情況 下可對本揭示進行各種修改和改變。 22 201226062 40764pif 【圖式簡單說明】 可從以下描述結合附圖更詳細地理解例示性實施例， 其中： 、 圖1是說日嫌據例示性實施例的基板處理設備的透視 圖。 圖=°兒明圖1的排放單元和檢測系統的示意圖。 圖3 =説明根據例示性實施例的檢測零件的透視圖。 圖4是5兒明根據例示性實施例的感應器零件和檢測單 元的示意圖。 圖5A和圖5B是說明借助於根據例示性實施例的感測 單元寿檢單元來確定是否分配液晶的方法的示意圖。 圖6A和圖6B是說明借助於相關技術中的感測單元來 確定疋否分配液晶的方法的示意圖。 【主要元件符號說明】 100 :台 200 :門架 300 :移動部件 310 :導軌 320 .門架驅動部件 400 :排放單元 410 :輕合部件 42〇 .源材料儲存部 42〇_1 :源材料儲存部支撐部件 430 :注射器 23 201226062 40764pif 430-1 :注射器支撐部件 431 :注射器主體 432:注射入口 433 :排放出口 434 :調整器 450 :排放零件 451 :喷嘴支撐部件 452 :喷嘴 460 :第一閥 470 :第二閥 480 :第一供應管 490 :第二供應管 500 :檢測系統 510 :感測單元 511 :感應器零件支撐部件 512 :感應器零件 512a :感應器零件主體 512b、512b-卜 512b-2、512b-3 :光發射器 512c、512c-l、512c-2、512〇3 :光接收器 513 :光供應零件 520:檢測單元 521 :感測零件 522 :計算零件 523 :確定零件 700 :移動部件 2415 S 201226062 40764pif and 512c-3 light quantities. Therefore, the difference between the sum of the amounts of the light beams emitted from the light emitters 512b_i, 5i2b-2, and 512b-3 and the sum of the amounts of the light beams incident to the light receivers 512c-1, 512c-2, and 512〇3 To determine if the liquid crystal is assigned. The difference between the sum of the amounts of the light beams emitted from the light emitters 512b-1, 512b-2, and 512b-3 and the sum of the amounts of the light beams incident to the light receivers 512c-1, 512c-2, and 512c-3 is greater than The difference between typical methods. Therefore, it is possible to determine more accurately whether or not the liquid crystal is dispensed than by using a typical method. The sum of the amounts based on the light beams emitted from the light emitters 512b-1, 512b-2, and 512b-3 and the light beams incident on the light receivers 5丨2c-1, 512c-2, and 512c-3 will be described in detail later. The difference between the sum of the quantities to determine whether the liquid crystal is dispensed. The detecting unit 520 is connected to the light supply part 513 and the light receivers 512c-1, 512c-2, and 512c-3, and detects the amount of light supplied from the light supply part 513 to the light emitters 512b-1, 512b-2, and 512b-3. The difference between the amounts of light incident on the light receivers 512c-1, 512A2, and 512c-3 to determine whether the liquid crystal is dispensed. The detecting unit 520 includes: a sensing part 521 connected to the light receivers 512ol, 512c-2, and 512c-3 to receive intensity data of light incident to the light receivers 512c-1, 512c-2, and 512c-3; A part 522, which is coupled to the light supply part 513 and the sensing part 52ι to calculate the sum of the amounts of the light beams supplied to the light emitters 512b-1, 512b-2, and 512b-3 and to the light receiver 512c-b 512c- The difference between the sum of the amounts of the light beams of 2 and 512c-3; and the determining part 523 which determines whether the liquid crystal is dispensed based on the value of the nasal 522. The value calculated by the calculation part 522 is the sum of the amounts of the light beams supplied to the light emitters 512]> 1, 5121 > 2 and 512b_3 16 201226062 40764pif and incident on the light receivers 512c-1, 512c-2 and 512c-3. The difference between the sum of the amounts of beams. The sensing part 521 is connected to the light receivers 512C-1, 512c-2, and 512c-3 to receive signals of light incident to the light receivers 512c-1, 512c-2, and 512c-3, and calculates light based on the signals strength. For example, when the three light emitters 512b-1, 512b-2, and 512b-3 correspond to the three light receivers 512c-1, 512C-2, and 512c-3, the sensing part 521 receives the incident light reception. The signals of the beams of the devices 512c-1, 512c-2, and 512c-3 calculate the light intensity of the beam based on the signals. As described above, the calculation part 522 is connected to the light supply part 513 and the sensing part 521 to calculate the sum of the amounts of the light beams supplied to the light emitters 512b-1, 512b-2, and 512b-3 and to the light receiver 512c- 1. The difference between the sum of the amounts of the beams of 512c-2 and 512c-3. The calculation part 522 for this purpose receives the intensity data of the light beams supplied from the light supply part 513 to the light emitters 512b-1, 512b-2, and 512b-3 and sums them. Additionally, computing component 522 is coupled to sensing component 521 to receive and sum the intensity data of the beams incident on light receivers 512c-1, 512C-2, and 512c-3. Hereinafter, the sum of the amounts of light beams emitted from the light emitters 512b-1, 512b-2, and 512b-3 is referred to as the sum of the emitted light intensities, and will be incident on the light receivers 512c-1, 512c-2, and 512c. The sum of the amounts of the beams of -3 is called the sum of the incident light intensities. The calculation part 522 calculates the difference between the sum of the emitted light intensities and the sum of the incident light intensities. In the following, the difference between the sum of the emitted light intensities and the sum of the incident light intensities calculated by the calculation part 522 is referred to as the calculated value. 0 17 201226062 40764pif It is determined that the part 523 is connected to the calculation part 522 by comparing the sum of the emitted light intensities with the incident light. The sum of the intensities or by using the calculated values calculated by the calculation part 522 determines whether the liquid crystal is dispensed. That is, when the sum of the amounts of the light beams incident to the light receiving 512c-1, 512c-2, and 512c-3 is zero, or when the sum of the sum of the emitted light and the sum of the incident light intensities (ie, the calculated value) When larger, it is determined that the part 523 concludes that the liquid crystal is dispensed. Conversely, when the difference between the sum of the emitted light intensities and the sum of the incident light intensities (i.e., the calculated value) is zero or within a certain range, it is determined that the part 523 concludes that the liquid crystal is not dispensed. As described above, the light emitters 512b-1, 512b-2, and 512b-3 are inserted into the inductor part main body 512a having an opening in the center. However, this disclosure is not limited to it. Although not shown, the light (4) emits a beam of light to a central region of the same space. Therefore, the paths of the emitted light beams cross and overlap each other in the central region of the same space. Figure 5A. Figure SBA illustrates a schematic diagram of the method of determining the disparity by means of a sensing unit and a unit according to an exemplary embodiment. Referring to Figure 5A, no liquid crystal is placed. Referring to Figure 5B, the liquid crystal is placed. Fig. 6A and Fig. 6B are diagrams for explaining whether or not the liquid crystal is divided by the sensing unit in the related art. Referring to the figure, there is no liquid crystal as shown in Fig. 6B'. A description will be briefly made of the parts of the current embodiment which are identical to the first-order squall scales. Shooting = i ΐ When the liquid crystal is not discharged from the nozzle 452, from the light generators 512b-l 512b_2 and 51 slave a· / to the light receiver 512c], 512e_2#^9, = to 5 part into) 12c2 and 5l2c -3. For example, a portion of the light beam emitted from the 18th 201226062 4U754pif-light emission If dish-丨 is incident on the first light receiver. The remaining portion of the emitted light beam is not incident on the first light receiver 512c-1. Alternatively, all of the light beams emitted from the first light emitter 512b] may be incident on the first-light receiver 512c-1. A part of the light beams emitted from the second and third light emitters 512b-2 and 512b-3 are incident on the second and third light receivers 512c-2 and 512c-3' and the remaining light beams are not incident on the second and the The two light receiving states 512c-2 and 512c-3. Alternatively, all of the light beams emitted from the second and third light emitters 512b-2 and 512b-3 may be incident on the second and third light receivers 512c-2 and 512c-3. The sensing component 521 of the detection system 500 receives signals of the light beams incident on the light receivers 512c-1, 512c-2, and 512c-3, and calculates a light intensity value based on the signals. Next, the calculation part 522 receives the intensity data of the light beams supplied to the light emitters 512b-1, 512b-2, and 512b-3 and sums them. Thereafter, the calculation part 522 calculates the sum of the amounts of the light beams emitted from the light emitters 5!^", 512b_2, and 512b_3 (i.e., the sum of the emitted light intensities) and the incident light receivers 512c-1, 512c-2, and 512c. The sum of the sum of the amounts of -3 beams (ie, the sum of the incident light intensities). The determination part 523 determines whether the liquid crystal is dispensed by comparing the sum of the emitted light intensities with the sum of the incident light intensities or by using the calculated values calculated by the calculation part 522. At this time, since at least a part of the light beams from the light emitters 512b-1, 512b-2, and 512b-3 are incident on the light receivers 512c-1, 512C-2, and 512〇3, the sum of the emitted light intensities is equal to the incident light. The sum of the strengths is different or different within a specific range. Gp, the calculated value calculated by the calculation part 522 is zero or less. Therefore, it is determined that the part 523 concludes that the liquid crystal is not dispensed. 19 201226062 40764pif Referring to FIG. 5B, when the liquid crystal drops from the nozzle 452, the liquid crystal passes through the overlapping path in which the paths of the light beams emitted from the light emitters 5121 > 1, 512b_2, and 512b-3 overlap each other. At least a portion of the light beams emitted from the light emitters, 512b-2 and 512b-3 are reflected and blocked by the liquid crystal. That is, 'the light beam emitted from the light emitters 5121> 1, 5i2b-2, and 512b-3 is reflected and prevented from being incident on the light, unlike the related art in which light emitted from one of the light emitters is reflected and blocked. Receivers 512 (> 1, 512c-2, and 512c-3. For example, a light beam emitted from the first light emitter 5121>1 to the dropped liquid crystal is reflected by the dropped liquid crystal, and thus is not incident on the first a light receiver 512c-1. The light beams emitted from the second and third light emitters 512b-2 and 512b_3 to the dripped liquid crystal are reflected by the dripped liquid crystal, and thus are not incident on the second and third light receivers 512 (> 2 and 512c_3. At this time, the sensing part 521 of the detecting system 500 receives the signals of the light beams incident to the light receivers 512c-1, 512c-2, and 512c-3, and calculates the light intensity value based on the signals. The calculation part 522 receives and sums the intensity data of the light beams supplied from the light supply part 513 to the light emitters 512b-1, 512b-2, and 512b-3. At this time, the light receiver is incident on the light receiver in the case of liquid crystal dropping The sum of the amounts of the light beams of 512c-1, 512c-2, and 512c-3 is smaller than that in the case of no liquid crystal dripping as illustrated in FIG. 5A. The sum of the amounts of the light beams incident on the light receivers 512C-1, 512c-2, and 512c-3. In addition, the difference between the sum of the emitted light intensity and the sum of the incident light intensities is greater than the difference in Fig. 5A. The calculation part 522 calculates the sum of the amounts of the light beams emitted from the light emitters 512b-1, 512b-2, and 512b-3 (i.e., the sum of the emitted light intensities) and the incident light receivers 512c-1, 512c-2, and 512C. - The difference between the amount of beams of -201226062 40764pif (ie, the sum of the incident light intensities). The part 523 is determined by comparing the sum of the emitted light intensities to the sum of the incident light intensities or by using the calculated values calculated by the calculation part 522. It is determined whether or not the liquid crystal is dispensed. At this time, since at least a part of the light beams from the light emitters 512b-1, 512b-2, and 512b-3 are not incident on the light receivers 512c_i, 512c-2, and 512c-3', the emitted light The difference between the sum of the intensity and the sum of the incident light is large. In addition, the difference between the sum of the emitted light intensity and the sum of the incident light in the case of liquid crystal dropping is greater than that in the case of no liquid crystal dripping as illustrated in FIG. 5A. In the case of The difference between the sum of the emitted light intensities and the sum of the incident light intensities. Therefore, it is determined that the part 523 is derived from the liquid crystal being distributed. In the related art, the light emitters are spaced apart from each other in a straight line, and the light receivers are in line with each other in a straight line. They are spaced apart to face the light emitter as illustrated in Figures 6A and 6B. Referring to Figure 6B 'When liquid crystal drops from the nozzle, only light emitted from one of the light emitters is reflected by the liquid crystal. That is, only light emitted from the light emitter corresponding to the path of the dropped liquid crystal is reflected by the dropped liquid crystal and is prevented from being incident on the light receiver. In addition, the amount of light from one of the light emitters is compared with the amount of light incident only to the light receiver corresponding to the light emitter' and thus the difference therebetween is small. Therefore, even if the liquid crystal is dispensed, the conclusion that the liquid crystal is not dispensed can be paid. However, according to the above embodiment, the light emitters 512b-1, 512b-2, and 512b-3 are disposed such that the paths of the light beams emitted from the light emitters 5i2b-1, 512b-2, and 512b-3 overlap each other. In addition, by comparing the sum of the amounts of the light beams emitted from the light emitters 512W, 512b-2, and 512b-3 with the amounts of the light beams incident on the 201226062 4U/〇4pif light receivers 512c-b 512C-2 and 512C-3 Sum to determine if the liquid crystal is dispensed. Therefore, the difference between the emitted light intensity and the incident light intensity is larger than the difference in the related art. Therefore, it is possible to determine more accurately whether or not the liquid crystal is dispensed than by using a typical method. Although the apparatus for dispensing liquid crystals is exemplified herein, the present disclosure is not limited thereto, and thus various apparatuses for distributing source materials such as an ointment dispenser and an ink dispenser can be exemplified. According to the embodiment, the light emitters respectively face the light receiver. The paths of the beams emitted from the light emitters cross each other and overlap. Since the nozzles for discharging the source material are disposed on the overlapping regions where the paths of the emitted light beams overlap each other, the liquid crystal dropped from the nozzles passes through the overlapping regions. Therefore, the deviation of the discharge position of the source material can be reduced to reliably sense the source material. Therefore, it is possible to accurately determine whether or not the liquid crystal is dispensed. In addition, the intensity of the emitted light and the intensity of the incident light are determined by the difference between the sum of the amounts of the light beams emitted from the light emitter and the sum of the amounts of the light beams incident on the light receiver to determine whether the source material is dispensed. The difference between the two is greater than the difference between the related technologies. Therefore, it is possible to determine whether or not the source material is dispensed. Therefore, it is possible to prevent the processing program from being executed without the source being allocated, thereby saving time. In addition, device defects caused by the failure of the distribution of the source material can be prevented. The dispensing device has been described with reference to specific exemplary embodiments, but is not limited thereto. Therefore, it will be readily apparent to those skilled in the art that various modifications and changes can be made in the present disclosure without departing from the spirit and scope of the disclosure as defined by the appended claims. 22 201226062 40764pif [Brief Description of the Drawings] The exemplary embodiments can be understood in more detail from the following description in conjunction with the accompanying drawings in which: FIG. 1 is a perspective view of a substrate processing apparatus according to an exemplary embodiment. Figure = ° Schematic diagram of the discharge unit and detection system of Figure 1. FIG. 3 is a perspective view illustrating a detecting part according to an exemplary embodiment. 4 is a schematic diagram of an inductor component and a detection unit in accordance with an exemplary embodiment. 5A and 5B are schematic views illustrating a method of determining whether to dispense liquid crystal by means of a sensing unit life inspection unit according to an exemplary embodiment. 6A and 6B are schematic views illustrating a method of determining whether or not to dispense liquid crystal by means of a sensing unit in the related art. [Description of main component symbols] 100: Table 200: Gantry 300: Moving member 310: Guide rail 320. Gantry driving member 400: Discharging unit 410: Light fitting member 42. Source material storage portion 42〇_1: Source material storage Part support member 430: syringe 23 201226062 40764pif 430-1 : syringe support member 431 : syringe body 432 : injection inlet 433 : discharge outlet 434 : adjuster 450 : discharge part 451 : nozzle support member 452 : nozzle 460 : first valve 470 Second valve 480: first supply pipe 490: second supply pipe 500: detection system 510: sensing unit 511: sensor part support member 512: sensor part 512a: sensor part body 512b, 512b-b 512b- 2. 512b-3: light emitters 512c, 512c-1, 512c-2, 512〇3: light receiver 513: light supply part 520: detection unit 521: sensing part 522: calculation part 523: determining part 700: Moving part 24