JP4119932B1 - Liquid crystal supply device - Google Patents

Liquid crystal supply device Download PDF

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JP4119932B1
JP4119932B1 JP2007025937A JP2007025937A JP4119932B1 JP 4119932 B1 JP4119932 B1 JP 4119932B1 JP 2007025937 A JP2007025937 A JP 2007025937A JP 2007025937 A JP2007025937 A JP 2007025937A JP 4119932 B1 JP4119932 B1 JP 4119932B1
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勇夫 一尾
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Shibaura Mechatronics Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

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  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
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Abstract

【課題】この発明は基板に液晶を供給するとき、ノズルから液晶の液滴が吐出されたか否かを確実に検出できるようにした液晶の供給装置を提供することにある。
【解決手段】基板に液晶を液滴にして供給する液晶の供給装置であって、
先端が基板の板面に対向するノズル８を有し、ノズルの先端から液晶の液滴が吐出される液晶供給手段６と、ノズルを挟んで離間対向して配置された投光器２１と受光器２２を有し、投光器から出射される検出光を受光する受光器の受光量によってノズルから液滴が吐出されたか否かを検出する光検出手段１５と、基板の板面と光検出手段との間に配置され投光器から出射された検出光から生じる拡散光が基板の板面で反射して受光器に入射するのを阻止する遮光部材２４を具備する。
【選択図】 図２An object of the present invention is to provide a liquid crystal supply device capable of reliably detecting whether or not liquid crystal droplets are discharged from a nozzle when supplying liquid crystal to a substrate.
A liquid crystal supply device for supplying liquid crystal as droplets to a substrate, comprising:
The liquid crystal supply means 6 has a nozzle 8 whose front end is opposed to the plate surface of the substrate, and liquid crystal droplets are discharged from the front end of the nozzle, and a projector 21 and a light receiver 22 that are arranged to face each other with the nozzle interposed therebetween. And a light detection means 15 for detecting whether or not a droplet is ejected from the nozzle according to the amount of light received by the light receiver that receives the detection light emitted from the projector, and between the plate surface of the substrate and the light detection means And a light shielding member 24 for preventing diffused light generated from the detection light emitted from the projector from being reflected by the plate surface of the substrate and entering the light receiver.
[Selection] Figure 2

Description

この発明は液晶表示パネルを構成する基板に液晶を液滴にして供給する液晶の供給装置に関する。   The present invention relates to a liquid crystal supply device that supplies liquid crystals as droplets to a substrate constituting a liquid crystal display panel.

周知のように液晶表示パネルの製造に際しては、２枚の透明な基板を、これら基板間に液晶を介在させてシール剤によってμｍオーダの間隔で貼り合わせる基板の組立てが行なわれる。上記液晶は２枚の基板を貼り合わせる前に、一方の基板に予め設定された量の液晶を供給装置によって供給するようにしている。   As is well known, when a liquid crystal display panel is manufactured, a substrate is assembled in which two transparent substrates are bonded to each other at intervals of the order of μm with a sealing agent with liquid crystals interposed between the substrates. The liquid crystal supplies a predetermined amount of liquid crystal to one substrate by a supply device before the two substrates are bonded together.

従来の液晶の供給装置としては特許文献１に示されるものが知られている。特許文献１に示された供給装置は液晶が貯えられたタンクからなる液晶室を有し、この液晶室には圧電素子を有する圧力室が連通形成されている。   As a conventional liquid crystal supply device, one disclosed in Patent Document 1 is known. The supply device disclosed in Patent Document 1 has a liquid crystal chamber composed of a tank in which liquid crystal is stored, and a pressure chamber having a piezoelectric element is formed in communication with the liquid crystal chamber.

上記液晶室に貯えられた液晶は上記圧力室に流入し、この圧力室に設けられた圧電素子によって加圧されてその先端の吐出口から液滴となって基板の板面に吐出されるようになっている。   The liquid crystal stored in the liquid crystal chamber flows into the pressure chamber, is pressurized by a piezoelectric element provided in the pressure chamber, and is discharged as a droplet from the discharge port at the tip thereof onto the plate surface of the substrate. It has become.

したがって、基板に対して滴下供給される液滴数を制御すれば、その基板に対して所定量の液晶を供給することが可能となる。
特開平５−２８１５６２号公報 Therefore, by controlling the number of droplets supplied to the substrate, a predetermined amount of liquid crystal can be supplied to the substrate.
Japanese Patent Laid-Open No. 5-281562

特許文献１に示された構成の供給装置によると、圧力室に設けられた圧電素子に印加するパルス数によって基板に供給する液滴数、つまり基板に供給する液晶の量を設定することができる。   According to the supply device having the configuration shown in Patent Document 1, the number of droplets supplied to the substrate, that is, the amount of liquid crystal supplied to the substrate can be set by the number of pulses applied to the piezoelectric element provided in the pressure chamber. .

ところで、圧力室に液晶が十分に供給されていなかったり、圧力室の先端の吐出口が詰まっているような場合などには、圧電素子にパルス電圧を印加しても、基板に液晶が供給されないということがある。   By the way, when the liquid crystal is not sufficiently supplied to the pressure chamber or the discharge port at the tip of the pressure chamber is clogged, the liquid crystal is not supplied to the substrate even if a pulse voltage is applied to the piezoelectric element. There is.

しかしながら、従来の供給装置では、基板に供給する液晶の供給量に応じて圧電素子に印加するパルス数を設定し、そのパルス数に応じて上記圧電素子を駆動すれば、基板に所定数の液滴が供給されたとみなしていた。   However, in the conventional supply device, if the number of pulses applied to the piezoelectric element is set according to the supply amount of liquid crystal supplied to the substrate and the piezoelectric element is driven according to the number of pulses, a predetermined number of liquids are applied to the substrate. It was assumed that a drop was supplied.

そのため、上述したように圧力室に液晶が十分に供給されていなかったり、圧力室の先端の吐出口が詰まっている場合などには設定されたパルス数に応じた数の液滴が基板に供給されないことになるから、液晶の供給量が不足することになる。   Therefore, as described above, when the liquid crystal is not sufficiently supplied to the pressure chamber or the discharge port at the tip of the pressure chamber is clogged, the number of droplets corresponding to the set number of pulses is supplied to the substrate. As a result, the amount of liquid crystal supplied will be insufficient.

とくに、基板が携帯電話の液晶表示パネルのように小型であると、その基板に供給される液滴数がわずかに少ないだけであっても、２枚の基板を貼り合わせたときに、これら基板間に液晶が存在しない空間が生じ、表示不良を招く原因になるということがある。   In particular, if the substrate is small like a liquid crystal display panel of a mobile phone, even when the number of droplets supplied to the substrate is only a little, when these two substrates are bonded together, There may be a space in which no liquid crystal exists between them, causing display defects.

この発明は、基板に液晶の液滴が供給されたか否かを確実に検出することができるようにすることで、基板に予め設定された数の液滴を正確に供給することができる液晶の供給装置を提供することにある。   The present invention makes it possible to reliably detect whether or not liquid crystal droplets have been supplied to the substrate, so that a predetermined number of liquid droplets can be accurately supplied to the substrate. It is to provide a supply device.

この発明は、基板に液晶を液滴にして供給する液晶の供給装置であって、
先端が上記基板の板面に対向するノズルを有し、このノズルの先端から上記液晶の液滴が吐出される液晶供給手段と、
上記ノズルを挟んで離間対向して配置された投光器と受光器を有し、この投光器から出射される検出光を受光する上記受光器の受光量によって上記ノズルから上記液滴が吐出されたか否かを検出する光検出手段と、
上記基板の板面と上記光検出手段との間に配置され上記投光器から出射された検出光から生じる拡散光が上記基板の板面で反射して上記受光器に入射するのを阻止する遮光部材と
を具備したことを特徴とする液晶の供給装置にある。 The present invention is a liquid crystal supply device for supplying liquid crystal in droplets to a substrate,
A liquid crystal supply means having a nozzle whose tip is opposed to the plate surface of the substrate and from which the liquid crystal droplets are ejected from the tip of the nozzle;
Whether or not the liquid droplets are ejected from the nozzle according to the amount of light received by the light receiver that has a light projector and a light receiver that are arranged to face each other with the nozzle interposed therebetween, and that receives the detection light emitted from the light projector Light detecting means for detecting
A light-shielding member disposed between the plate surface of the substrate and the light detection means for preventing the diffused light generated from the detection light emitted from the projector from being reflected by the plate surface of the substrate and entering the light receiver And a liquid crystal supply device.

上記遮光部材の上記光検出器側を向いた面は粗面或いはつや消し面に形成されていることが好ましい。   It is preferable that the surface of the light-shielding member facing the photodetector is formed as a rough surface or a matte surface.

上記液晶供給手段と一体的に固定され上記光検出手段の投光器と受光器が取付けられるブラケットが設けられていて、
上記遮光部材の一端部は上記投光器とともに上記ブラケットにねじ止め固定され、他端部は上記受光器とともに上記ブラケットにねじ止め固定されることが好ましい。 A bracket is provided which is fixed integrally with the liquid crystal supply means and to which the light projector and the light receiver of the light detection means are attached,
It is preferable that one end portion of the light shielding member is screwed and fixed to the bracket together with the light projector, and the other end portion is screwed and fixed to the bracket together with the light receiver.

この発明によれば、液晶の液滴がノズルから吐出されたか否かを光検出手段によって検出するとともに、その検出が基板からの反射光によって影響を受けるのを遮光部材によって防止するようにしたから、基板に供給される液滴の検出を確実に行なうことが可能となる。したがって、製品不良の発生を防止し、製品歩留まりを向上させることができる。   According to the present invention, the light detection means detects whether or not the liquid crystal droplets are ejected from the nozzle, and the light shielding member prevents the detection from being affected by the reflected light from the substrate. Thus, it is possible to reliably detect the droplets supplied to the substrate. Therefore, the occurrence of product defects can be prevented and the product yield can be improved.

以下、この発明の一実施の形態を図面を参照して説明する。   An embodiment of the present invention will be described below with reference to the drawings.

図１はこの発明の液晶の供給装置を示す概略的構成図であって、この供給装置は内部に液晶が供給される密閉型のタンク１を備えている。このタンク１の上面には不活性ガスなどの加圧気体の供給管２が接続されていている。   FIG. 1 is a schematic configuration diagram showing a liquid crystal supply device according to the present invention, and this supply device includes a sealed tank 1 into which liquid crystal is supplied. A supply pipe 2 for a pressurized gas such as an inert gas is connected to the upper surface of the tank 1.

上記供給管２には開閉制御弁３が設けられている。この開閉制御弁３は制御装置４によって開閉が制御される。開閉制御弁３が開放されれば、上記タンク１内の液晶は上記供給管２によって供給される加圧気体によって加圧される。   The supply pipe 2 is provided with an open / close control valve 3. The opening / closing control valve 3 is controlled to open / close by a control device 4. When the open / close control valve 3 is opened, the liquid crystal in the tank 1 is pressurized by the pressurized gas supplied by the supply pipe 2.

図２に示すように、上記タンク１の下面には、タンク１内の液晶を液滴にして供給する液晶供給手段６が設けられている。この液晶供給手段６はポンプ部７を有する。このポンプ部７の吸引側は上記タンク１内に連通し、吐出側にはノズル８が接続されている。上記ポンプ部７は駆動源としてのパルスモータ（不図示）を備え、このパルスモータは上記制御装置４からのパルス信号によって駆動される。   As shown in FIG. 2, a liquid crystal supply means 6 for supplying liquid crystals in the tank 1 as droplets is provided on the lower surface of the tank 1. The liquid crystal supply means 6 has a pump unit 7. The suction side of the pump unit 7 communicates with the tank 1 and a nozzle 8 is connected to the discharge side. The pump unit 7 includes a pulse motor (not shown) as a drive source, and this pulse motor is driven by a pulse signal from the control device 4.

それによって、上記ノズル８からは、上記制御装置４からのパルス信号によって液晶が吐出される。つまり、上記制御装置４から上記ポンプ部７のパルスモータにパルス信号が送られると、そのパルス数に応じた数の液晶の液滴が上記ノズル８から吐出されるようになっている。なお、上記タンク１は図１に示すように上記制御装置４によって駆動が制御される第１の駆動源９によってＺ方向（上下方向）に駆動されるようになっている。   As a result, liquid crystal is ejected from the nozzle 8 by the pulse signal from the control device 4. That is, when a pulse signal is sent from the control device 4 to the pulse motor of the pump unit 7, liquid crystal droplets corresponding to the number of pulses are ejected from the nozzle 8. The tank 1 is driven in the Z direction (vertical direction) by a first drive source 9 whose drive is controlled by the control device 4 as shown in FIG.

上記ノズル８から吐出された液晶の液滴は、このノズル８の下方に配置される液晶表示パネルを構成する基板Ｗに供給滴下される。この基板Ｗは上記制御装置４によって駆動が制御される第２の駆動源１０によってＸ、Ｙ方向（水平方向）に駆動されるテーブル１１上に載置される。   Liquid crystal droplets discharged from the nozzle 8 are supplied and dropped onto a substrate W constituting a liquid crystal display panel disposed below the nozzle 8. The substrate W is placed on a table 11 that is driven in the X and Y directions (horizontal directions) by the second drive source 10 whose drive is controlled by the control device 4.

制御装置４には入力部１３が接続されている。この入力部１３は上記基板Ｗの種類に応じてこの基板Ｗに供給する液晶の液滴数、つまり上記制御装置４から上記ポンプ部７に出力されるパルス信号の数を設定することができるようになっている。   An input unit 13 is connected to the control device 4. The input unit 13 can set the number of liquid crystal droplets to be supplied to the substrate W according to the type of the substrate W, that is, the number of pulse signals output from the control device 4 to the pump unit 7. It has become.

なお、タンク１とテーブル１１は相対的にＸ、Ｙ及びＺ方向に駆動されるようになっていればよいから、テーブル１１をＺ方向に駆動し、タンク１をＸ、Ｙ方向に駆動するようにしてもよく、その点は限定されるものでない。   Since the tank 1 and the table 11 need only be relatively driven in the X, Y, and Z directions, the table 11 is driven in the Z direction, and the tank 1 is driven in the X, Y directions. However, the point is not limited.

上記ノズル８から吐出された液晶の液滴は上記タンク１の下面に設けられた光検出手段１５によって検出されるようになっている。すなわち、図２に示すように上記タンク１の下面には一対の取り付け部１６を有するブラケット１７がポンプ部７と一体で取り付け固定されている。一対の取り付け部１６は上記ノズル８を挟んでほぼ対称になっている。   Liquid crystal droplets discharged from the nozzle 8 are detected by a light detection means 15 provided on the lower surface of the tank 1. That is, as shown in FIG. 2, a bracket 17 having a pair of attachment portions 16 is attached and fixed integrally with the pump portion 7 on the lower surface of the tank 1. The pair of attachment portions 16 are substantially symmetrical with the nozzle 8 interposed therebetween.

一対の取り付け部１６の下端には取り付け板１８が水平に設けられている。図４に示すように、一方の取り付け板１８の下面には上記光検出手段１５を構成する投光器２１が皿ねじ２１ａによって取り付け固定され、他方の取り付け板１８には上記投光器２１から出射された検出光Ｌを受光する受光器２２が皿ねじ２２ａによって取り付け固定されている。上記投光器２１と受光器２２で上記光検出手段１５を構成している。   A mounting plate 18 is horizontally provided at the lower ends of the pair of mounting portions 16. As shown in FIG. 4, a projector 21 constituting the light detection means 15 is attached and fixed to the lower surface of one attachment plate 18 by a countersunk screw 21 a, and the detection emitted from the projector 21 is attached to the other attachment plate 18. A light receiver 22 that receives the light L is attached and fixed by a countersunk screw 22a. The light projector 15 and the light receiver 22 constitute the light detection means 15.

それによって、上記ノズル８から液晶の液滴が基板Ｗの上面に向けて吐出されると、その液滴が上記検出光Ｌを遮り、受光器２２の受光量が変化するから、その変化によってノズル８から液滴が吐出されたことが検出されるようになっている。   Accordingly, when a liquid crystal droplet is ejected from the nozzle 8 toward the upper surface of the substrate W, the droplet blocks the detection light L, and the amount of light received by the light receiver 22 changes. From 8, it is detected that a droplet has been ejected.

図３に示すように、上記検出光Ｌは上記投光器２１から所定の幅寸法の帯状、つまりノズル８の直径よりも大きな幅寸法で出射される。投光器２１から出射された検出光Ｌの一部は拡散して拡散光が生じ、その拡散光は基板Ｗの上面で反射し、そのうちの一部は上記受光器２２によって受光されることがある。   As shown in FIG. 3, the detection light L is emitted from the projector 21 in a band shape having a predetermined width dimension, that is, a width dimension larger than the diameter of the nozzle 8. A part of the detection light L emitted from the projector 21 is diffused to generate diffused light, and the diffused light is reflected on the upper surface of the substrate W, and a part of the diffused light may be received by the light receiver 22.

基板Ｗの上面の凹凸形状は、たとえば基板ＷがＴＦＴ基板であったり、ＣＦ基板であるなどの基板Ｗの種類によって異なったり、同じ基板Ｗであってもその部位によって異なるから、基板で反射して受光器２２によって受光される拡散光の受光量は一定とならずに変化する。   The uneven shape of the upper surface of the substrate W differs depending on the type of the substrate W, for example, the substrate W is a TFT substrate or a CF substrate, and even if it is the same substrate W, it varies depending on the part thereof. Thus, the amount of diffused light received by the light receiver 22 changes without being constant.

受光器２２によって受光される基板Ｗからの拡散光の受光量が一定でないと、ノズル８から吐出された液滴が検出光Ｌを遮っても、そのときに受光器２２に受光される基板Ｗからの拡散光の光量が増大すると、上記受光器２２による受光量が制御装置４に設定された閾値よりも大きくなることがある。この場合、制御装置４は液滴がノズル８から吐出されても、吐出されていないと判定することになる。   If the amount of diffused light received from the substrate W received by the light receiver 22 is not constant, even if the liquid droplets ejected from the nozzle 8 block the detection light L, the substrate W received by the light receiver 22 at that time When the amount of diffused light from the light source increases, the amount of light received by the light receiver 22 may become larger than the threshold set in the control device 4. In this case, the control device 4 determines that the droplet is not ejected even when the droplet is ejected from the nozzle 8.

そこで、受光器２２の受光量が基板Ｗからの検出光Ｌから生じる拡散光の影響を受けるのを防止するために、上記光検出手段１５と上記基板Ｗの上面との間には遮光部材２４が設けられている。   Therefore, in order to prevent the amount of light received by the light receiver 22 from being affected by the diffused light generated from the detection light L from the substrate W, a light shielding member 24 is provided between the light detection means 15 and the upper surface of the substrate W. Is provided.

上記遮光部材２４は、厚さが０．３〜０．５ｍｍ程度の板材によって図３に示すように上記検出光Ｌの幅寸法よりも大きな幅寸法を有する帯板状に形成されていて、幅方向の両端には図５に示すように補強のための一対の折り曲げ辺２５が上面側に向かって折曲形成されている。なお、折り曲げ辺２５はなくてもよく、また幅方向の一端にだけ形成するようにしてもよい。
そして、遮光部材２４の長手方向の一端部は上記投光器２１の下面に、この投光器２２を上記取り付け板１８に固定したねじ２１ａによって投光器２１とともに取付け固定され、他端部は上記受光器２１の下面に、この受光器２２を上記取り付け板１８に固定した皿ねじ２２ａによって受光器２２とともに取付け固定されている。 The light shielding member 24 is formed in a band plate shape having a width dimension larger than the width dimension of the detection light L as shown in FIG. 3 by a plate material having a thickness of about 0.3 to 0.5 mm. As shown in FIG. 5, a pair of bending sides 25 for reinforcement are formed at both ends in the direction so as to be bent toward the upper surface side. The bent side 25 may not be provided, and may be formed only at one end in the width direction.
One end portion of the light shielding member 24 in the longitudinal direction is attached and fixed to the lower surface of the projector 21 together with the projector 21 by a screw 21 a that fixes the projector 22 to the mounting plate 18, and the other end portion is the lower surface of the light receiver 21. The light receiver 22 is attached and fixed together with the light receiver 22 by a countersunk screw 22 a fixed to the mounting plate 18.

液晶を基板Ｗの上面に滴下するとき、通常、ノズル８の先端と基板Ｗの上面との間隔は５〜６ｍｍ程度に設定されるため、投光器２１及び受光器２２の下面と、基板Ｗの上面との間隔は２ｍｍ程度になってしまう。   When the liquid crystal is dropped on the upper surface of the substrate W, the distance between the tip of the nozzle 8 and the upper surface of the substrate W is usually set to about 5 to 6 mm, so that the lower surfaces of the projector 21 and the light receiver 22 and the upper surface of the substrate W are set. The distance between and becomes about 2 mm.

そこで、図４に示すように、遮光部材２４には、皿ねじ２１ａ，２２ａを通す孔として、皿ねじ２１ａ，２２ａの頭部外周の傾きに合わせた傾斜を備えたざぐり加工を施した孔を設けた。   Therefore, as shown in FIG. 4, the shading member 24 is provided with a counterbore hole having an inclination according to the inclination of the head outer periphery of the countersunk screws 21a and 22a as a hole through which the countersunk screws 21a and 22a are passed. Provided.

そして、上記遮光部材２４の一端部と他端部を、投光器２１と受光器２２の下面に皿ねじ２１ａ，２２ａによって上記投光器２１及び受光器２２とともにそれぞれ取付け板１４に固定したときには、皿ねじ２１ａ，２２ａの頭部端面が遮光部材２４の下面とほぼ同じ高さとなるようにした。   When the one end portion and the other end portion of the light shielding member 24 are fixed to the mounting plate 14 together with the light projector 21 and the light receiver 22 on the lower surfaces of the projector 21 and the light receiver 22 by the counter screws 21a and 22a, respectively, the countersunk screw 21a , 22a so that the head end faces are substantially the same height as the lower surface of the light shielding member 24.

これにより、皿ねじ２１ａ，２２ａの頭部が、遮光部材２４の下面から下方に突出することがないので、上記遮光部材２４を、投光器２１及び受光器２２の下面と、基板Ｗの上面との間の狭い空間に設けることが可能となる。   Accordingly, the heads of the countersunk screws 21a and 22a do not protrude downward from the lower surface of the light shielding member 24. Therefore, the light shielding member 24 is placed between the lower surfaces of the projector 21 and the light receiver 22 and the upper surface of the substrate W. It becomes possible to provide in the narrow space between.

上記遮光部材２４の上記ノズル８と対向する部位には、このノズル８から吐出された液晶の液滴が通過する矩形状の通孔２４ａが穿設されている。さらに、遮光部材２４の上面は平坦面であって、所定の反射率の反射面２４ｂに形成されている。なお、通孔２４ａは矩形でなく、円形であってもよい。   A rectangular through hole 24 a through which liquid crystal droplets discharged from the nozzle 8 pass is formed in a portion of the light shielding member 24 facing the nozzle 8. Further, the upper surface of the light shielding member 24 is a flat surface, and is formed on the reflection surface 24b having a predetermined reflectance. The through hole 24a may be circular instead of rectangular.

投光器２１から検出光Ｌが出射されることによって生じる拡散光は上記遮光部材２４の反射面２４ｂで規則的に反射し、一部は上記受光器２２で受光される。つまり、反射面２４ａで反射して受光器２２に入射する拡散光の光量は、反射面２４ａの反射率と平坦度によってほぼ一定となる。   Diffuse light generated when the detection light L is emitted from the projector 21 is regularly reflected by the reflection surface 24 b of the light shielding member 24, and a part thereof is received by the light receiver 22. That is, the amount of diffused light reflected by the reflecting surface 24a and entering the light receiver 22 is substantially constant depending on the reflectance and flatness of the reflecting surface 24a.

上記遮光部材２４の反射面２４ｂの表面粗さや色を変えるなどして反射率を変化させれば、反射面２４ｂで反射して受光器２２に入射する拡散光の光量を制御することができる。一方、液晶はその種類によって透明度が異なる。そのため、液晶の透明度が高くなればなる程、液晶の液滴を透過する検出光Ｌの光量、つまり透光率が高くなる。   If the reflectance is changed by changing the surface roughness or color of the reflection surface 24b of the light shielding member 24, the amount of diffused light reflected by the reflection surface 24b and incident on the light receiver 22 can be controlled. On the other hand, the transparency of liquid crystals varies depending on the type. Therefore, the higher the transparency of the liquid crystal, the higher the amount of detection light L that passes through the liquid crystal droplets, that is, the light transmittance.

液晶の透光率が高くなると、ノズル８から吐出された液晶の液滴が検出光Ｌを遮っても、受光器２２が受光する検出光Ｌの光量の変化が微小になる。検出光Ｌの光量の変化が微小であって、その上、検出光Ｌの出射によって生じた拡散光が遮光部材２４の反射面２４ｂで反射してノズル８から吐出された液滴を回り込んで受光器２２に入射してしまうと、微小な光量の変化、つまりノズル８から液滴が吐出され、その液滴が検出光Ｌを遮っても、そのことを検出することが困難なことがある。   When the transmissivity of the liquid crystal increases, even if the liquid crystal droplets discharged from the nozzle 8 block the detection light L, the change in the amount of the detection light L received by the light receiver 22 becomes minute. The change in the amount of the detection light L is very small, and the diffused light generated by the emission of the detection light L is reflected by the reflection surface 24b of the light shielding member 24 and wraps around the droplet ejected from the nozzle 8. If it enters the light receiver 22, even if a minute change in the amount of light, that is, a droplet is ejected from the nozzle 8 and the droplet blocks the detection light L, it may be difficult to detect this. .

そこで、液晶の透明度が高い場合には、遮光部材２４の上面に形成された反射面２４ｂの反射率を低くする。それによって、遮光部材２４の反射面２４ｂで反射して受光器２３に入射する拡散光の光量が低減するから、受光器２２に入射する光の総量が減少する。受光器２２に入射する光の総量が減少すると、液晶の液滴によって遮られる検出光Ｌの光量がわずかであっても、入射する光の総量に対する光量の減少量の割合が大きくなる。   Therefore, when the transparency of the liquid crystal is high, the reflectance of the reflecting surface 24b formed on the upper surface of the light shielding member 24 is lowered. As a result, the amount of diffused light reflected by the reflecting surface 24b of the light shielding member 24 and incident on the light receiver 23 is reduced, so that the total amount of light incident on the light receiver 22 is reduced. When the total amount of light incident on the light receiver 22 decreases, even if the amount of the detection light L blocked by the liquid crystal droplets is small, the ratio of the decrease in the amount of light to the total amount of incident light increases.

また、吐出された液晶の液滴を回り込んで受光器２２へ入射してしまう反射面２４ｂで反射された拡散光も減少するので、液晶の液滴に遮られることによって生じた検出光Ｌの光量の減少分を受光器２２によって精度よく測定することができる。   In addition, since the diffused light reflected by the reflecting surface 24b that goes around the discharged liquid crystal droplet and enters the light receiver 22 is also reduced, the detection light L generated by being blocked by the liquid crystal droplet is reduced. The decrease in the amount of light can be accurately measured by the light receiver 22.

そのため、この検出器２２によりノズル８から液滴が吐出されたか否かの判定を高い精度で行なうことが可能となる。つまり、液晶の液滴が検出光Ｌを遮ったときに、受光器２２が検出する光の強度を、制御装置４に予め設定された閾値よりも確実に低くすることができる。   For this reason, it is possible to determine with high accuracy whether or not a droplet has been ejected from the nozzle 8 by the detector 22. That is, when the liquid crystal droplet blocks the detection light L, the intensity of the light detected by the light receiver 22 can be surely made lower than the threshold value preset in the control device 4.

ここで、反射面２４ｂの反射率（検出光Ｌの出射によって生じた拡散光が反射面２４ｂで反射して受光器２２に入射する割合）を低くするためには、例えば、反射面２４ｂを梨地仕上げなどの微細な凹凸を備えた粗面としたり、黒色や灰色などのつや消し面としたりする表面処理を施すとよい。   Here, in order to reduce the reflectance of the reflecting surface 24b (the ratio at which the diffused light generated by the emission of the detection light L is reflected by the reflecting surface 24b and incident on the light receiver 22), for example, the reflecting surface 24b is matte. A surface treatment such as a rough surface with fine irregularities such as a finish or a matte surface such as black or gray may be performed.

このような構成の液晶の供給装置によれば、制御装置４に入力部１３から基板Ｗの大きさなどの液晶の滴下量を決定する滴下条件を入力した後、滴下動作を開始すると、テーブル１１が第２の駆動源１０によってＸ、Ｙ方向に駆動される。   According to the liquid crystal supply device having such a configuration, when the dropping operation is started after the dropping condition for determining the dropping amount of the liquid crystal such as the size of the substrate W is input to the control device 4 from the input unit 13, the table 11 Are driven in the X and Y directions by the second drive source 10.

そして、基板Ｗの複数の滴下位置が順次ノズル８に対応する（Ｘｎ、Ｙｎ）座標に位置決めされると、そのときにポンプ部７にパルス信号が入力され、その（Ｘｎ、Ｙｎ）座標で基板Ｗに液晶の液滴がノズル８から吐出されて滴下される。そして、最終的には基板Ｗには予め設定された滴下量となる複数の液滴が行列状に滴下されることになる。   Then, when a plurality of dropping positions on the substrate W are sequentially positioned at the (Xn, Yn) coordinates corresponding to the nozzles 8, a pulse signal is input to the pump unit 7 at that time, and the substrate at the (Xn, Yn) coordinates. Liquid crystal droplets are ejected from the nozzle 8 onto W. Eventually, a plurality of droplets having a preset dropping amount are dropped on the substrate W in a matrix.

なお、ノズル８からの液晶の液滴を吐出させる際は、基板Ｗを停止させて行ってもよいし、基板Ｗを移動させたまま行ってもよい。   Note that when discharging liquid crystal droplets from the nozzle 8, the substrate W may be stopped or may be performed while the substrate W is moved.

基板Ｗに液晶の液滴を滴下するとき、ノズル８から液滴が確実に吐出されたか否かが光検出手段１５によって検出される。すなわち、光検出手段１５の透光器２１から検出光Ｌが出射され、その検出光Ｌが受光器２２によって受光される。そして、ノズル８から液滴が吐出されたとき、つまり制御装置４からポンプ部７にパルス信号が出力されたときに、その液滴が検出光Ｌの一部を遮ることで、受光器２２に受光される光量がパルスに応じた液晶の液滴の吐出回数と同じ回数だけ変化（減少）すれば、ノズル８から液滴が吐出されたと判定されることになる。   When the liquid crystal droplets are dropped onto the substrate W, the light detection means 15 detects whether or not the droplets are reliably discharged from the nozzle 8. That is, the detection light L is emitted from the translucent device 21 of the light detection means 15, and the detection light L is received by the light receiver 22. Then, when a droplet is ejected from the nozzle 8, that is, when a pulse signal is output from the control device 4 to the pump unit 7, the droplet blocks a part of the detection light L, thereby causing the light receiver 22. If the amount of received light changes (decreases) by the same number as the number of liquid crystal droplets ejected according to the pulse, it is determined that the droplets are ejected from the nozzle 8.

仮に、制御装置４からポンプ部７にパルス信号が出力されたときに受光器２２の受光量が変化しなければ、ノズル８から液滴が吐出されていないと判定されることになるから、液晶の滴下動作が中断され、作業者は供給装置を点検することになる。   If the amount of light received by the light receiver 22 does not change when a pulse signal is output from the control device 4 to the pump unit 7, it is determined that no liquid droplet is ejected from the nozzle 8. The dripping operation is interrupted, and the operator checks the supply device.

上記投光器２１から検出光Ｌが出射されると、検出光Ｌの一部が拡散して拡散光が発生する。光検出手段１５と基板Ｗの上面との間に遮光部材２４が設けられていなければ、検出光Ｌから生じた拡散光が基板Ｗの上面で不規則に反射して受光器２２に入射するため、受光器２２に入射する光量が一定になり難い。   When the detection light L is emitted from the projector 21, a part of the detection light L is diffused to generate diffused light. If the light shielding member 24 is not provided between the light detection means 15 and the upper surface of the substrate W, diffused light generated from the detection light L is irregularly reflected on the upper surface of the substrate W and enters the light receiver 22. The amount of light incident on the light receiver 22 is difficult to be constant.

それによって、検出光Ｌの一部がノズル８から吐出された液滴によって遮られても、受光器２２に入射する光量が制御装置４に設定された閾値以下に変化しないため、ノズル８から液滴が吐出されたか否かを検出できないということがある。   Thereby, even if a part of the detection light L is blocked by the droplet ejected from the nozzle 8, the amount of light incident on the light receiver 22 does not change below the threshold set in the control device 4. It may not be possible to detect whether or not a droplet has been ejected.

しかしながら、光検出手段１５と基板Ｗの上面との間には上記遮光部材２４を設けるようにした。そのため、透光器２１から出射された検出光Ｌから拡散光が生じても、その拡散光は遮光部材２４の上面の反射面２４ｂでほぼ規則的に反射するから、受光器２２に入射する拡散光の光量はほぼ一定となる。   However, the light shielding member 24 is provided between the light detection means 15 and the upper surface of the substrate W. Therefore, even if diffused light is generated from the detection light L emitted from the translucent device 21, the diffused light is reflected almost regularly by the reflecting surface 24 b on the upper surface of the light shielding member 24, so that the diffused light incident on the photoreceiver 22. The amount of light is almost constant.

したがって、ノズル８から液滴が吐出されて検出光Ｌの一部を遮ると、そのとき受光器２２が受光する光量が確実に減少し、その受光量が制御装置４に設定された閾値以下になるから、ノズル８から液滴が吐出されたか否かを上記受光器２２が検出する光量によって確実に判定することが可能となる。   Therefore, when a droplet is ejected from the nozzle 8 and a part of the detection light L is blocked, the amount of light received by the light receiver 22 at that time is surely reduced, and the amount of received light is below the threshold set in the control device 4. Therefore, it is possible to reliably determine whether or not a droplet has been ejected from the nozzle 8 based on the amount of light detected by the light receiver 22.

これにより、基板Ｗ上に必要量の液晶を確実に滴下することができるので、製造される液晶表示パネルの製品不良の発生を防止し、歩留まりを向上させることができる。   Thereby, since a required amount of liquid crystal can be reliably dripped on the substrate W, it is possible to prevent occurrence of product defects in the manufactured liquid crystal display panel and to improve the yield.

液晶はその種類によって透明度が異なるから、透明度の高い液晶の場合には遮光部材２４の反射面２４ｂの反射率を低くし、反射面２４ｂで反射して受光器２２に入射する拡散光の光量が少なくなるようにする。   Since the transparency of the liquid crystal differs depending on the type, in the case of a highly transparent liquid crystal, the reflectance of the reflection surface 24b of the light shielding member 24 is lowered, and the amount of diffused light reflected by the reflection surface 24b and incident on the light receiver 22 is reduced. Try to reduce it.

それによって、受光器２２の受光量に占める検出光Ｌの割合が増大し、拡散光の割合が減少する。拡散光が受光器２２に入射する割合が減少すれば、検出光Ｌが入射する光量の変化がわずかであっても、そのことを確実に検出することが可能となる。   As a result, the ratio of the detection light L to the amount of light received by the light receiver 22 increases, and the ratio of the diffused light decreases. If the ratio of the diffused light incident on the light receiver 22 decreases, even if the change in the amount of light incident on the detection light L is slight, this can be reliably detected.

そのため、液滴の透明度が高くなって検出光Ｌが液滴を透過し易くなり、液滴によって遮られる検出光Ｌの光量がわずかであっても、そのわずかな光量の変化を、受光器２２に入射する拡散光の光量によって影響を受けることなく、確実に検出することが可能となる。   For this reason, the transparency of the droplet is increased, and the detection light L is easily transmitted through the droplet. Even if the amount of the detection light L blocked by the droplet is small, the light receiver 22 It is possible to reliably detect the light without being affected by the amount of diffused light incident on the light.

つまり、透明度が高い液晶を基板Ｗに滴下する場合、遮光部材２４の反射面２４ｂの反射率を低くすれば、検出光Ｌの出射によって生じる拡散光が受光器２２にほとんど入射しなくなるから、吐出された液滴を回り込んで受光部２２へ到達してしまう拡散光もほとんどなくなり、液滴によって遮られる検出光Ｌがわずかであっても、受光器２２による受光量の変化が大きくなる。そのため、液滴がノズル８から吐出されたか否かを上記受光器２２によって確実に検出することができる。   That is, when a highly transparent liquid crystal is dropped on the substrate W, if the reflectance of the reflecting surface 24b of the light shielding member 24 is lowered, the diffused light generated by the emission of the detection light L hardly enters the light receiver 22, so that There is almost no diffused light that wraps around the droplet and reaches the light receiving unit 22, and even if the detection light L blocked by the droplet is small, the change in the amount of light received by the light receiver 22 becomes large. Therefore, whether or not a droplet is ejected from the nozzle 8 can be reliably detected by the light receiver 22.

上記一実施の形態では遮光部材の一端を透光器の下面に取り付け、他端を受光器の下面に取り付け、ノズルと対向する中途部に通孔を形成するようにしたが、遮光部材は左右２つに分断し、ノズルと対向する部分で２つの遮光部材の端部間にノズルから吐出される液滴が通過する隙間を設けるようにしてもよい。   In the above embodiment, one end of the light shielding member is attached to the lower surface of the translucent device, and the other end is attached to the lower surface of the light receiving device, and a through hole is formed in the middle portion facing the nozzle. It divides | segments into two and you may make it provide the clearance gap through which the droplet discharged from a nozzle passes between the edge parts of two light shielding members in the part facing a nozzle.

その場合、遮光部材は一端部だけが透光器と受光器の下面に取り付けられる片持ち支持になってたわみ易くなるから、その場合には遮光部材の幅方向両端部若しくは一端部に折り曲げ片を上面側に向けって折曲形成し、たわみに対する強度を向上させるようにするとよい。   In that case, since only one end of the light shielding member is cantilevered to be attached to the lower surfaces of the light transmitting device and the light receiving device, it is easy to bend. It is preferable to bend it toward the upper surface side to improve the strength against bending.

この発明の一実施の形態を示す液晶の供給装置の概略的構成図。1 is a schematic configuration diagram of a liquid crystal supply device according to an embodiment of the present invention. タンクの下端部の拡大図。The enlarged view of the lower end part of a tank. 透光器と受光器が設けられた遮光部材の平面図。The top view of the light-shielding member provided with the light transmitter and the light receiver. 遮光部材の長手方向に沿う断面図。Sectional drawing which follows the longitudinal direction of a light shielding member. 遮光部材の幅方向に沿う断面図。Sectional drawing which follows the width direction of a light-shielding member.

符号の説明Explanation of symbols

１…タンク、４…制御装置、６…液晶供給手段、７…ポンプ部、１５…光検出手段、１７…ブラケット、２１…透光器、２２…受光器、２４…遮光部材。   DESCRIPTION OF SYMBOLS 1 ... Tank, 4 ... Control apparatus, 6 ... Liquid crystal supply means, 7 ... Pump part, 15 ... Light detection means, 17 ... Bracket, 21 ... Light transmitter, 22 ... Light receiver, 24 ... Light shielding member

Claims (3)

基板に液晶を液滴にして供給する液晶の供給装置であって、
先端が上記基板の板面に対向するノズルを有し、このノズルの先端から上記液晶の液滴が吐出される液晶供給手段と、
上記ノズルを挟んで離間対向して配置された投光器と受光器を有し、この投光器から出射される検出光を受光する上記受光器の受光量によって上記ノズルから上記液滴が吐出されたか否かを検出する光検出手段と、
上記基板の板面と上記光検出手段との間に配置され上記投光器から出射された検出光から生じる拡散光が上記基板の板面で反射して上記受光器に入射するのを阻止する遮光部材と
を具備したことを特徴とする液晶の供給装置。 A liquid crystal supply device for supplying liquid crystal as droplets to a substrate,
A liquid crystal supply means having a nozzle whose tip is opposed to the plate surface of the substrate and from which the liquid crystal droplets are ejected from the tip of the nozzle;
Whether or not the liquid droplets are ejected from the nozzle according to the amount of light received by the light receiver that has a light projector and a light receiver that are arranged to face each other with the nozzle interposed therebetween, and that receives the detection light emitted from the light projector Light detecting means for detecting
A light-shielding member disposed between the plate surface of the substrate and the light detection means for preventing the diffused light generated from the detection light emitted from the projector from being reflected by the plate surface of the substrate and entering the light receiver And a liquid crystal supply device. 上記遮光部材の上記光検出器側を向いた面は粗面或いはつや消し面に形成されていることを特徴とする請求項１記載の液晶の供給装置。   2. The liquid crystal supply device according to claim 1, wherein a surface of the light shielding member facing the photodetector is formed as a rough surface or a matte surface. 上記液晶供給手段と一体的に固定され上記光検出手段の投光器と受光器が取付けられるブラケットが設けられていて、
上記遮光部材の一端部は上記投光器とともに上記ブラケットにねじ止め固定され、他端部は上記受光器とともに上記ブラケットにねじ止め固定されることを特徴とする請求項１記載の液晶の供給装置。 A bracket is provided which is fixed integrally with the liquid crystal supply means and to which the light projector and the light receiver of the light detection means are attached,
2. The liquid crystal supply device according to claim 1, wherein one end portion of the light shielding member is screwed and fixed to the bracket together with the light projector, and the other end portion is screwed and fixed to the bracket together with the light receiver.
JP2007025937A 2007-02-05 2007-02-05 Liquid crystal supply device Active JP4119932B1 (en)

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KR1020087027142A KR100957085B1 (en) 2007-02-05 2008-02-04 Apparatus for supplying a liquid crystal
PCT/JP2008/051771 WO2008096710A1 (en) 2007-02-05 2008-02-04 Device for supplying liquid crystals

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