KR101288988B1

KR101288988B1 - Dispensing apparatus

Info

Publication number: KR101288988B1
Application number: KR1020100138462A
Authority: KR
Inventors: 김상순; 장재남; 노성화; 신재덕
Original assignee: 에이피시스템 주식회사
Priority date: 2010-12-30
Filing date: 2010-12-30
Publication date: 2013-07-23
Also published as: TW201226062A; KR20120076763A; CN102566153B; CN102566153A

Abstract

The dripping apparatus according to the embodiment of the present invention is arranged to be spaced apart from each other, the plurality of light emitting means for emitting the light, the plurality of light emitting means facing each other, disposed to face each other and received light emitted from the plurality of light emitting means, respectively And a sensing unit having a plurality of light receiving means, wherein the plurality of light emitting means are arranged such that movement paths of the light emitted from each light emitting means cross each other, and at least some of the movement paths overlap each other.
Therefore, according to embodiments of the present invention it is possible to prevent the detection of the raw material according to the discharge position deviation of the raw material. Therefore, it is possible to accurately determine whether the raw material dropping is defective. In addition, since the difference between the sum of the amount of light emitted and supplied to each of the plurality of light emitting means and the sum of the amount of light incident to the plurality of light receiving means is detected, the amount of emitted light and the amount of received light are compared with the prior art. The difference is large. For this reason, compared with the conventional one, it can be judged correctly whether a raw material dripped. Therefore, it is possible to prevent the progress of the process without recognizing the dropping failure of the raw material material, which can reduce the time required unnecessarily. In addition, it is possible to prevent the occurrence of a failure of the device due to the poor loading of the raw material.

Description

Dispensing apparatus

The present invention relates to a dropping device, and relates to a dropping device capable of accurately detecting whether the raw material is dripping.

In the case of a flat panel display panel, a pair of flat panel type board | substrate is bonded together and is produced. That is, taking the manufacture of a liquid crystal display panel as an example, first, a lower substrate on which a plurality of thin film transistors and pixel electrodes are formed, and an upper substrate on which a color filter and a common electrode are formed are manufactured. Thereafter, a liquid crystal is dropped on the lower substrate, and the upper substrate and the lower substrate are bonded and sealed to manufacture a liquid crystal display panel.

At this time, a liquid crystal dropping device is used to drop the liquid crystal onto the substrate. Such a liquid crystal dropping device is provided with a stage on which a substrate is seated, a gantry disposed above the stage, a discharge unit having a nozzle mounted on the gantry to drop the liquid crystal, and disposed below the discharge unit, and discharged from the discharge unit. It includes a detection unit for detecting whether the liquid crystal dropping. Here, the sensing unit is composed of a light emitting portion provided with a plurality of light emitting means for emitting light, and a plurality of light receiving means spaced apart from the light emitting portion to receive the light emitted from the plurality of light emitting means. In this case, the plurality of light emitting means and the plurality of light receiving means are disposed to face each other. The nozzle is disposed above the spaced space between the light emitting unit and the receiving unit. Such a sensing unit detects the drop of the liquid crystal by comparing the difference between the amount of light emitted from the light emitting means and the amount of light incident by the light receiving means. For example, if the liquid crystal is not discharged from the nozzle and does not fall, the light emitted from each of the plurality of light emitting means is incident on each of the plurality of light receiving means. Thus, the amount of light emitted from each of the plurality of light emitting means and the amount of light incident to each of the plurality of light receiving means are the same. When the amount of light emitted from each of the plurality of light emitting means and the amount of light incident to each of the plurality of light receiving means are the same, it is determined that the liquid crystal is not dropped. On the other hand, when the liquid crystal is discharged from the nozzle, the light emitted from any one of the plurality of light emitting means is reflected by the liquid crystal and is not incident to the light receiving means or only a small amount of light is incident. That is, the movement path of the liquid crystal discharged from the nozzle falls so as to pass through the path through which the light emitted from any one of the light emitting means respectively emitted from the plurality of light emitting means travels. Accordingly, light emitted from the light emitting means that emits light toward the falling path of the liquid crystal among the plurality of light emitting means is not incident on the light receiving means, or only a part of the light is incident on the light receiving means. Thus, there is a difference between the amount of light emitted from the light emitting means for emitting light toward the falling path of the liquid crystal and the amount of light incident on the light receiving means facing the corresponding light emitting means. Conventionally, when there is a difference between the amount of emitted light and the amount of incident light, it is determined that the liquid crystal is dropped.

On the other hand, when the liquid crystal is dropped, the entire light emitted from one light emitting means may not be incident to the light receiving means, or only a part of the light may not be incident. Further, even if the light receiving means does not receive the light emitted from the opposing light emitting means, part of the light emitted from another light emitting means adjacent to the light emitting means may be received. Accordingly, the difference between the amount of light emitted from one of the plurality of light emitting means and the amount of light incident on the light receiving means facing the corresponding light emitting means may be insignificant. Therefore, even if the difference between the amount of emitted light and the amount of incident light is small, even if the liquid crystal is dropped, it can be determined that the liquid crystal is not dropped. Therefore, it is not possible to accurately determine whether the liquid crystal is dropped and whether the liquid crystal drop is poor. For this reason, the process often occurs in a state in which the liquid crystal is not dropped, and thus there is a problem that the production yield is reduced.

One technical problem of the present invention is to provide a dropping device capable of accurately detecting whether a raw material is dripping.

Another technical problem of the present invention is to provide a dropping device which provides a plurality of light emitting means and a plurality of light receiving means, and the movement paths of the light emitted from each light emitting means cross each other, such that at least some of the movement paths overlap. There is.

Another technical problem of the present invention is to provide a dropping device for detecting whether a liquid crystal is dropped by using a difference between the sum of the amounts of light supplied to each of the plurality of light emitting means and the sum of the amounts of light incident on the plurality of light receiving means. have.

The dripping apparatus according to the present invention includes a plurality of light emitting means spaced apart from each other to emit light, a plurality of light emitting means facing each other so as to face the plurality of light emitting means, and spaced apart from each other to receive light emitted from the plurality of light emitting means. And a sensing unit having light receiving means, wherein the plurality of light emitting means are arranged such that movement paths of the light emitted from each light emitting means cross each other, and at least some of the movement paths overlap.

A detection unit connected to the sensing unit to detect whether the raw material is dropped by using a difference value between the sum of the amounts of light supplied to each of the plurality of light emitting means of the sensing unit and the sum of the amounts of light incident on the plurality of light receiving means; Include.

In the plurality of light emitting means, the light emitted from each light emitting means is irradiated toward the center region of the same space so that the movement paths of the light emitted from the respective light emitting means cross each other.

The detector includes a detector body having an open central area, and a plurality of light emitting means and a plurality of light receiving means are respectively inserted into the detector body.

Light emitted from the plurality of light emitting means is irradiated toward the open area of the sensing body.

The movement path of the light emitted from each of the plurality of light emitting means intersects in the open area of the sensor body.

The light emitting means and the light receiving means are alternately arranged to be spaced apart from each other.

The detection unit is connected to a plurality of light receiving means, and includes a sensing unit receiving light quantity data incident to each of the plurality of light receiving means, a plurality of light emitting means, and a sum of the amount of light emitted from the plurality of light emitting means. And a calculation unit for calculating a difference value between the sum of the amounts of light incident on the plurality of light receiving means.

And a determination unit determining whether the raw material is dropped by using a difference value between the sum of the amounts of light emitted from the plurality of light emitting means calculated by the calculating unit and the sum of the amounts of light incident on the plurality of light receiving means.

As described above, in the embodiments of the present invention, a plurality of light emitting means and a plurality of light receiving means are provided to arrange the light receiving means so as to face each of the plurality of light emitting means. The plurality of light emitting means allow the movement paths of the respective light emitted from each light emitting means to cross each other and overlap each other. At this time, since the nozzle for discharging the raw material is disposed correspondingly above the overlap region, the liquid crystal discharged from the nozzle falls through the overlap region. This may prevent the detection of the raw material according to the discharge position deviation of the raw material. Therefore, it is possible to accurately determine whether the raw material dropping is defective.

In addition, since the difference between the sum of the amount of light emitted and supplied to each of the plurality of light emitting means and the sum of the amount of light incident to the plurality of light receiving means is detected, it is detected whether the raw material is dripping. there is a big difference. For this reason, compared with the conventional one, it can be judged correctly whether a raw material dripped. Therefore, it is possible to prevent the progress of the process without recognizing the dropping failure of the raw material, which can reduce the time required unnecessarily. In addition, it is possible to prevent the occurrence of a failure of the device due to the poor loading of the raw material.

1 is a view showing a substrate processing apparatus according to an embodiment of the present invention;
FIG. 2 is a view showing the discharge unit and the extraction system shown in FIG. 1. 3 is a stereoscopic view illustrating a detector according to an embodiment.
4 is a block diagram illustrating a detection unit and a cross-sectional view showing a sensing unit according to an embodiment;
5A and 5B are diagrams for describing a method of detecting whether a liquid crystal is dropped by using a sensing unit and a detecting unit according to an embodiment.
6A and 6B are diagrams for explaining a method of detecting whether a liquid crystal is dropped using a conventional sensing unit.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information.

1 is a diagram illustrating a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a view showing the discharge unit and the extraction system shown in FIG. 1. 3 is a three-dimensional view illustrating a detector according to an embodiment. 4 is a block diagram illustrating a detection unit and a cross-sectional view of a sensing unit according to an exemplary embodiment.

1 and 2, a substrate processing apparatus according to an exemplary embodiment of the present invention includes a stage 100 on which a substrate s is placed, a gantry 200 disposed on an upper side of the stage 100, and a gantry 200. A plurality of discharge units 400 arranged in one direction and spaced apart from each other and connected to the discharge units 400 to detect whether the raw material is dropped from the discharge unit 400. And a discharge unit moving unit 700 installed in the same direction as the direction in which the plurality of discharge units 400 are arranged on the gantry 200 to horizontally move the discharge unit 400. In addition, it is provided on the stage 100 includes a gantry moving means 300 for moving the gantry 200 in the horizontal direction. In an embodiment, a liquid crystal is used as a raw material dropped on the substrate s, and the substrate processing apparatus according to the embodiment may be a liquid crystal dropping device. Of course, the present invention is not limited thereto, and various liquid substances may be used as the dropping raw material. For example, it may be a sealant or paste for bonding between the pair of substrates s.

The stage 100 is manufactured in a shape corresponding to the substrate s so as to settle the substrate s. In the embodiment, since the glass of the rectangular shape is used as the substrate s, the stage 100 also uses the rectangular shape. Of course, the shape of the stage 100 may be variously changed according to the shape of the substrate s. In addition, although not shown, the stage 100 may include a separate fixing member for supporting and fixing the substrate s. In this case, an electrostatic chuck using an electrostatic force or a vacuum fixing device using a vacuum suction force may be used as the fixing member. Here, when the vacuum fixing device is used as the fixing member, a plurality of holes communicating with the vacuum pump may be provided on the stage 100.

The gantry moving unit 300 is preferably manufactured to move the gantry 200 in a direction crossing the direction in which the plurality of discharge units 400 and the detection unit 510 move horizontally. The gantry moving means 300 is a pair of guide rails 310 are installed side by side in parallel spaced apart from the top of the stage 100, a pair of guide rails 310 are respectively installed above the pair of guides And a gantry drive member 320 sliding along the rail 310. Here, the pair of guide rails 310 are installed on the stage 100 so as to be orthogonal to the direction in which the plurality of discharge units 400 and the detection unit 510 move horizontally. The upper portion of the gantry driving member 320 is coupled to the lower portion of the gantry 200. Thus, as the gantry driving member 320 slides along the guide rail 310, the gantry 200 coupled with the gantry driving member 320 is horizontally moved. In this case, the gantry driving member 320 may be, for example, a combination of a linear motor for linear movement and a motor for rotating a ball screw, such as a ball screw. Of course, the present invention is not limited thereto, and any method in which the gantry driving member 320 may slide on the guide rail 310 may be applied.

Each of the plurality of discharge units 400 is coupled to the discharge unit moving means 700 mounted on the gantry 200, and the coupling member 410 horizontally moved by the discharge unit moving means 700, the coupling The liquid crystal is supplied from the raw material storage unit 420 mounted above the member 410 to store the liquid crystal, the liquid crystal supplied from the raw material storage unit 420, and the syringe 430 and the syringe 430 which discharge the liquid crystal. And a discharge part 450 for discharging the liquid crystal on the substrate s. In addition, the first supply pipe 480, one end is connected to the raw material storage unit 420, the other end is connected to the syringe 430, one end is connected to the syringe 430, and the other end is the nozzle 452 of the discharge unit 450 A second supply pipe 490 connected to the first supply pipe 480 and connected to the first valve 460 and the second supply pipe 490 to control communication between the syringe 430 and the raw material storage 420. A second valve 470 installed to control communication between the syringe 430 and the discharge part 450, each of which is mounted on the coupling member 410 to support the raw material storage part 420. And a syringe support member 430-1 supporting the syringe 430. Here, the first and second supply pipe 490 is manufactured in a tube shape having an internal space. In addition, the raw material storage unit support member 420-1 is manufactured in a plate shape having a larger area than the raw material storage unit 420, and the coupling member 410 to be disposed below the raw material storage unit 420. It is mounted on the), and supports the raw material storage unit 420. The syringe support member 430-1 is manufactured in a plate shape having an open hole, and is mounted to the coupling member 410. In addition, at least a portion of the lower region of the syringe 430 is inserted into the opening hole of the syringe support member 430-1 to be supported and fixed. The shape and mounting positions of the raw material storage part support member 420-1 and the syringe support member 430-1 are not limited to the examples described above, and each of the raw material storage compartment and the syringe 430 may be fixed and supported. Various shapes and mounting positions are possible. In addition, the rear surface of each of the coupling members 410 of the plurality of discharge units 400 is coupled to the discharge unit moving means 700 mounted on the gantry 200 as described above. Here, the coupling member 410 according to the embodiment is manufactured in a plate shape is mounted on the front material raw material storage unit 420, the syringe 430 and the discharge unit 450, the discharge unit moving means 700 on the rear Is connected. Accordingly, the plurality of discharge units 400 may drop the liquid crystal onto the substrate s while moving in the horizontal direction through the discharge unit moving means 700.

The raw material storage unit 420 stores the liquid crystal to be supplied to the syringe 430, and in this embodiment, a cylindrical shape having an internal space is manufactured in a shape. However, the present invention is not limited thereto and may be manufactured in various shapes provided with an inner space capable of accommodating liquid crystals. Although not shown, a raw material storage unit 420 may be provided with a defoaming device for removing bubbles in the liquid crystal. For example, it may be provided with a vacuum means for discharging the air in the raw material to the outside.

The syringe 430 receives the liquid crystal from the raw material storage unit 420, and provides a predetermined amount to the discharge unit 450. The syringe 430 is connected to the syringe body 431 having an internal space for storing the liquid crystal, the injection hole 432 for injecting the liquid crystal into the side of the syringe body 431, and the lower portion of the syringe body 431. Adjusting member for controlling the inflow and discharge of the liquid crystal by adjusting the pressure in the syringe body 431, the discharge port 433, the upper portion of the syringe body 431 to discharge the liquid crystal in the syringe body 431 ( 434). Here, the syringe body 431 may be manufactured in a cylindrical shape having an inner space for accommodating liquid crystal, and may be made of various materials such as metal, plastic, or glass. One end of the inlet 432 is connected to the syringe body 431, the other end is connected to the first supply pipe 480, one end of the outlet 433 is connected to the syringe body 431, and the other end is the second supply pipe 490. ). In addition, the adjusting member 434 injects the liquid crystal into the syringe body 431 through the injection hole 432 or controls to discharge the liquid crystal inside the syringe body 431 through the discharge hole 433. The adjusting member 434 may control the injection and discharge of the liquid crystal by, for example, adjusting the pressure inside the syringe body 431. That is, the adjustment member 434 may be a piston that is at least partially inserted into the syringe body 431 to move up and down. Of course, the present invention is not limited thereto, and various means for adjusting the pressure inside the syringe body 431 or controlling the injection (or inflow) and discharge of the liquid crystal may be used.

The discharge part 450 is mounted to the coupling member 410 to be disposed below the syringe 430, and serves to drop the liquid crystal onto the substrate s seated on the stage 100. The discharge part 450 includes a nozzle 452 for dropping liquid crystal on the substrate s, and a nozzle support member 451 to which the nozzle 452 is mounted and fixed. Here, the nozzle support member 451 may be manufactured in a plate shape having an opening hole through which at least a portion of the nozzle 452 may be inserted and fixed. The nozzle support member 451 is fixed to the coupling member 410. The nozzle 452 is connected to the other end of the second supply pipe 490 to receive the liquid crystal in the syringe 430 through the second supply pipe 490 and drop the liquid crystal onto the substrate s.

The detection system 500 detects whether liquid crystal is dropped by using the change in the amount of light. The detection system 500 is disposed corresponding to the position where the liquid crystal falls from the nozzle 452 of the discharge part 450, and the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the plurality of light receiving means. Sensing unit 510 having 512c-1, 512c-2, and 512c-3, connected to the sensing unit 510 in a signal manner and whether liquid crystal is dropped using the data sensed by the sensing unit 510 Detection unit 520 for detecting the error.

The detection unit 510 is formed in a ring shape having an open central portion, and includes a detection unit 512 and a light source supply unit configured to supply a light source to the detection unit 512 corresponding to a direction in which the liquid crystal discharged from the nozzle 452 falls. 513 and one end is connected to the sensing unit 512 and the other end is connected to the nozzle support member 451, and includes a sensing unit support member 511 for supporting and fixing the sensing unit 512.

3 and 4, the sensing unit 512 has a sensing unit body 512a formed in a ring shape having an open center, and at least a portion of the sensing unit 512 is inserted into and mounted at a predetermined distance from the sensing unit body 512a. A plurality of light emitting means (512b-1, 512b-2, 512b-3) and a plurality of light receiving means (512c-1, 512c-2, 512c-3) are included. Here, the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the plurality of light receiving means 512c-1, 512c-2, and 512c-3 may be inserted into and mounted on the sensing body 512a. A plurality of grooves (not shown) are provided. The sensing unit body 512a according to the embodiment is manufactured in a circular ring shape having a central opening, for example, a donut shape. Of course, the present invention is not limited thereto, and may be manufactured in various ring shapes, for example, a rectangular ring and a triangular ring. In the following, the opened center of the sensing unit body 512a is called an opening.

Each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 is connected to the light source supply unit 513, receives the light source from the light source supply unit 513, and emits the light source. In the embodiment, a plurality of strands of optical fibers are used which emit and receive light through the light emitting means 512b-1, 512b-2, and 512b-3. Of course, the present invention is not limited thereto, and any means may be used as long as it can emit light. In the embodiment, although the first to third light emitting means 512b-1, 512b-2, and 512b-3 are provided, two or more light emitting means may be provided. The plurality of light emitting means 512b-1, 512b-2, and 512b-3 are inserted into and mounted in the sensing body 512a, and are spaced apart from each other. At this time, the area where the light is emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 is exposed to the inner surface of the sensing unit body 512a. That is, the region where the light is emitted among the regions of each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 may face the opening of the sensing unit body 512a. In addition, the distance between the light emitting means (512b-1, 512b-2, 512b-3) and the center of the opening of the sensing body (512a) is the same. The light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 may have a predetermined area. As in the embodiment, when each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 is manufactured using a plurality of strands of optical fibers, the respective light beams emitted from the plurality of optical fibers may be combined together. In this case, the shape may have a predetermined area. In addition, the light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 has the light emitting means 512b-1, 512b-2, and 512b- depending on its propagation direction and diffusion. It may have a triangular shape in which the area becomes larger as it moves away from 3). And since the light emitted from each of the first to third light emitting means (512b-1, 512b-2, 512b-3) is all irradiated toward the opening of the sensing unit body (512a), the first to third in the opening The phenomenon in which at least a part of the movement paths of the light emitted from each of the light emitting means 512b-1, 512b-2, and 512b-3 overlaps occurs. In the following description, a place where the movement path of the light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 overlaps at the center of the opening of the detector body 512a is called an overlapping portion. Most of the liquid crystals discharged from the nozzle 452 of the discharge part 450 pass through the overlapping part and are dropped on the substrate s.

The plurality of light receiving means 512c-1, 512c-2, and 512c-3 respectively receive the light emitted from the plurality of light emitting means 512b-1, 512b-2, and 512b-3, and detect the amount of incident light. Forward to 500. The light receiving means 512c-1, 512c-2, 512c-3 is preferably provided in a number corresponding to the number of light emitting means 512b-1, 512b-2, 512b-3. In the embodiment, since three light emitting means 512b-1, 512b-2, and 512b-3 are provided, three light receiving means 512c-1, 512c-2, and 512c-3 are provided. The plurality of light receiving means 512c-1, 512c-2, and 512c-3 are inserted into and mounted in the sensor body 512a, and are spaced apart from each other. At this time, one of the plurality of light receiving means 512c-1, 512c-2, and 512c-3 is disposed between the plurality of light emitting means 512b-1, 512b-2, and 512b-3. That is, the plurality of light emitting means 512b-1, 512b-2, 512b-3 and the plurality of light receiving means 512c-1, 512c-2, 512c-3 are provided to provide the light emitting means 512c-1, 512c-. 2, 512c-3 and light receiving means 512c-1, 512c-2, 512c-3 are alternately arranged. Further, one light receiving means is disposed to face each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3. In addition, an area where light is incident from each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3 is exposed to the inner surface of the sensing unit body 512a. That is, a region where light is incident among the regions of each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3 may face the opening of the sensing unit body 512a. In addition, the separation distance between the light receiving means 512c-1, 512c-2, 512c-3 and the center of the opening of the sensor body 512a is the same.

As such, the sensing unit body 512a according to the embodiment is manufactured in a circular ring shape, and the plurality of light emitting means 512b-1, 512b-2, 512b-3 and the plurality of light emitting units are formed inside the sensing unit body 512a. Each of the light receiving means 512c-1, 512c-2, and 512c-3 is arranged to be spaced apart from each other. The light emitting means 512b-1, 512b-2, 512b-3 and the light receiving means 512c-1, 512c-2, 512c-3 are alternately arranged, and the plurality of light emitting means 512b-1, 512b-2. 512b-3, one light receiving means 512c-1, 512c-2, 512c-3 is disposed to face each other. In addition, light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 passes through the center of the opening as shown in FIG. Thus, an overlapping portion is formed in which the path of the light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 overlaps the center of the opening of the detector body 512a. And most of the liquid crystal discharged from the nozzle 452 falls to pass through the overlapping portion. For this reason, at least a part of each of the light emitted from each of the plurality of light emitting means 512b-1, 512b-2, 512b-3 is reflected by the falling liquid crystal and thus the plurality of light receiving means 512c-1, 512c-2. , 512c-3) is not incident on each. For example, the light moving in the direction in which the liquid crystal falls among the plurality of light emitted from the first light emitting means 512b-1 is reflected by the liquid crystal and is not incident to the first light receiving means 512c-1. Further, the light that does not move in the direction in which the liquid crystal falls among the plurality of light emitted from the first light emitting means 512b-1 is moved as it is, but is not received by the first light receiving means 512c-1. Of the light emitted from the second and third light emitting means 512b-2 and 512b-3, the light moving in the direction in which the liquid crystal falls among the plurality of emitted light is reflected by the liquid crystal and thus the second and third light receiving means. It is not incident at (512c-2, 512c-3). Further, among the light emitted from the second and third light emitting means 512b-2 and 512b-3, the light which does not move in the direction in which the liquid crystal falls is moved as it is, but the second and third light receiving means 512c- 2, 512c-3) is not incident. Accordingly, the difference between the amount of light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the amount of light incident to each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3 is different. Is generated. In the embodiment, the sum of the amounts of light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the light incident to the plurality of light receiving means 512c-1, 512c-2, and 512c-3, respectively. The difference in the sum of the amounts of light is used to detect whether or not the liquid crystal is dropped. At this time, as described above, the sum of the amounts of light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the plurality of light receiving means 512c-1, 512c-2, and 512c-3, respectively. Since the sum of the amounts of incident light is used, the difference is larger than in the related art. Therefore, it is possible to accurately detect whether or not the liquid crystal is dripped compared with the prior art. The difference between the sum of the amounts of light emitted from the plurality of light emitting means 512b-1, 512b-2, 512b-3 and the sum of the amounts of light incident on the plurality of light receiving means 512c-1, 512c-2, 512c-3 is used. The method for determining whether the liquid crystal is dropped will be described in detail later.

The detection unit 520 is connected to the light source supply unit 513 and the plurality of light receiving means 512c-1, 512c-2, and 512c-3 of the detection unit 510, and generates a plurality of light emission through the light source supply unit 513. The drop between the amount of light supplied to the means 512b-1, 512b-2, and 512b-3 and the amount of light incident to the plurality of light receiving means 512c-1, 512c-2, and 512c-3 is detected to drop the liquid crystal. Detect whether or not. The detection unit 520 is connected to a plurality of light receiving means 512c-1, 512c-2, and 512c-3, and the light amount data incident on the plurality of light receiving means 512c-1, 512c-2, and 512c-3. The sum of the quantity of light supplied to each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 connected to the sensing unit 521, the light source supply unit 513, and the sensing unit 521 to receive the plurality of Judgment for judging whether the liquid crystal is dropped or not based on the calculation values calculated by the calculation unit 522 and the calculation unit 522 that calculate the difference between the sum of the amounts of light incident on the light receiving means 512c-1, 512c-2, and 512c-3, respectively. Section 523. Here, the calculated value is a difference value of the sum of the amounts of light supplied to each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the sum of the amounts of light incident on each of the plurality of receiving means.

The sensing unit 521 is connected to a plurality of light receiving means 512c-1, 512c-2, and 512c-3, and receives an optical signal incident to the plurality of light receiving means 512c-1, 512c-2, and 512c-3. Is received and calculated as the amount of light. For example, when three light emitting means 512b-1, 512b-2, 512b-3 and three light receiving means 512c-1, 512c-2, 512c-3 are provided, the three light receiving means 512c -1, 512c-2, 512c-3) receives the signal of the light incident on each, and calculates it as the amount of light.

The calculating part 522 is connected to the light source supply part 513 and the sensing part 521, and the sum of the quantity of light emitted by the light emitting means 512b-1, 512b-2, 512b-3 and the plurality of light receiving means 512c. -1, 512c-2, 512c-3) calculates the difference between the sum of the amounts of incident light. To this end, the calculation unit 522 receives the light quantity data supplied to each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 through the light source supply unit 513, and adds them. In addition, the operation unit 522 is connected to the sensing unit 521, receives the light amount data of each light receiving means and adds them. In the following description, the sum of the amounts of light emitted from the plurality of light emitting means 512b-1, 512b-2, and 512b-3 is referred to as the sum of the amount of emitted light, and the plurality of light receiving means 512c-1 and 512c- 2, 512c-3) is the sum of the amounts of light incident on the surface. The calculating unit 522 calculates a difference between the sum of the emitted light amounts and the sum of the received light amounts. In the following, the difference between the sum of the amount of emitted light calculated by the operation unit 522 and the sum of the received light amounts is called a calculated value.

The determination unit 523 is connected to the calculation unit 522 to compare the sum of the amount of emitted light and the sum of the amount of received light or to determine whether the liquid crystal is dropped using the calculation value calculated by the operation of the operation unit 522. That is, when the sum of the amounts of light incident on the plurality of light receiving means 512c-1, 512c-2, 512c-3 is O or the difference between the sum of the amount of emitted light and the sum of the received light amounts, that is, the calculated value is large, the liquid crystal is dropped. I think it is. On the contrary, when the difference between the sum of the amount of emitted light and the amount of received light, that is, the calculated value is 0 or varies within a predetermined range, it is determined that the liquid crystal is not dropped.

In the above, a plurality of light emitting means 512b-1, 512b-2, and 512b-3 are inserted and mounted in the sensing unit body having the central area opened. However, the present invention is not limited thereto, and although not illustrated, the plurality of light emitting means may cause the light emitted from each light emitting means to be irradiated toward the center region of the same space. Thus, the movement paths of the light emitted from each of the light emitting means 512b-1, 512b-2, and 512b-3 intersect and overlap each other in the center region of the same space.

5A and 5B are diagrams for describing a method of detecting whether a liquid crystal is dropped by using a sensing unit and a detecting unit according to an exemplary embodiment. 5A shows a case where no liquid crystal is dropped, and FIG. 5B shows a case where liquid crystal is dropped. 6A and 6B are diagrams for explaining a method of detecting whether liquid crystal is dropped by using a conventional sensing unit. 6A shows a case where no liquid crystal is dropped, and FIG. 6B shows a case where liquid crystal is dropped. In addition, the content overlapping with the above description will be omitted or briefly described.

Referring to FIG. 5A, when liquid crystal is not discharged from the nozzle 452, at least some of the light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 may be first to Incident to 3rd light receiving means 512c-1, 512c-2, 512c-3, respectively. For example, light moving toward the first light receiving means 512c-1 among the light emitted from the first light emitting means 512b-1 is incident to the first light receiving means 512c-1. Among the light emitted from the first light emitting means 512b-1, the light that does not move toward the first light receiving means 512c-1 does not enter the first light receiving means 512c-1. Of course, all of the light emitted from the first light emitting means 512b-1 may be incident to the first light receiving means 512c-1. Also, some of the light emitted from the second and third light emitting means 512b-2 and 512b-3 are incident on the second and third light receiving means 512c-2 and 512c-3, respectively, and the rest are not incident. . Of course, all of the light emitted from the second and third light emitting means 512b-2 and 512b-3 may be incident to the second and third light receiving means 512c-2 and 512c-3.

In this case, the sensing unit 521 of the detection system 500 receives an optical signal incident to each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3, and calculates the amount of light. That is, the optical signal incident on each of the first to third light receiving means 512c-1, 512c-2, and 512c-3 is received and calculated as the amount of light. The calculator 522 receives the light quantity data supplied to each of the first to third light emitting means 512b-1, 512b-2, and 512b-3, and sums them. Subsequently, the calculating unit 522 may add the sum of the amount of light emitted from the first to third light emitting means 512b-1, 512b-2, and 512b-3, that is, the sum of the amount of emitted light and the first to third light receiving means 512c-. 1, 512c-2, and 512c-3), the sum of the amounts of light incident, that is, the difference of the sum of the received light amounts is calculated. The determination unit 523 compares the sum of the amount of emitted light and the sum of the amount of received light or determines whether the liquid crystal is dropped by using the calculated value calculated by the operation unit 522. At this time, at least a part of the light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 is the first to third light receiving means 512c-1, 512c-2, and 512c-3. Since each incident, the sum of the amount of emitted light and the sum of the amount of received light are the same or different in a predetermined range. That is, the operation value calculated by the operation unit 522 is '0' or the difference value is small. Therefore, the determination unit 523 determines that the liquid crystal is not dropped.

Referring to FIG. 5B, when the liquid crystal is discharged and dropped from the nozzle 452, the liquid crystal is a movement path of light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3. Falls to pass through the overlapping overlapping paths. As a result, at least a part of the light emitted from each of the first to third light emitting means 512b-1, 512b-2, and 512b-3 is reflected by the liquid crystal to block its movement. That is, a plurality of light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3, rather than any one of the plurality of light emitting means as in the related art, is reflected and thus the plurality of light receiving means 512c-. 1, 512c-2 and 512c-3). For example, the light moving to the region where the liquid crystal falls among the light emitted from the first light emitting means 512b-1 is reflected by the liquid crystal and is not incident to the first light receiving means 512c-1. In addition, among the light emitted from the second and third light emitting means 512b-2 and 512b-3, the light moving to the region where the liquid crystal falls is reflected by the liquid crystal, and the second and third light receiving means 512c- 2, 512c-3) does not enter each.

In this case, the sensing unit 521 of the detection system 500 receives an optical signal incident to each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3, and calculates the amount of light. The calculation unit 522 receives the light quantity data supplied to each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 through the light source supply unit 513, and sums them. Here, as shown in FIG. 5A, when the liquid crystal does not fall, as shown in FIG. 5B compared to the sum of the amounts of light incident on the first to third light receiving means 512c-1, 512c-2, and 512c-3. Similarly, when the liquid crystal falls, the sum of the amounts of light incident on the first to third light receiving means 512c-1, 512c-2, 512c-3 is small, and the difference is also large. Subsequently, the calculating unit 522 may add the sum of the amount of light emitted from the first to third light emitting means 512b-1, 512b-2, and 512b-3, that is, the sum of the amount of emitted light and the first to third light receiving means 512c-. 1, 512c-2, and 512c-3), the sum of the amounts of light incident, that is, the difference of the sum of the received light amounts is calculated. The determination unit 523 compares the sum of the amount of emitted light and the sum of the amount of received light or determines whether the liquid crystal is dropped by using the calculated value calculated by the operation unit 522. At this time, since at least some of the plurality of lights emitted from the first to third light emitting means are not received by each of the first to third light receiving means, the difference between the sum of the amount of emitted light and the sum of the received light amounts is large. In addition, as shown in FIG. 5A, the sum of the amount of emitted light and the amount of received light when the liquid crystal falls as illustrated in FIG. 5B as compared to the difference between the sum of the amount of emitted light when the liquid crystal does not drop and the sum of the received light amount. The difference between the sums is large. Therefore, the determination unit 523 determines that the liquid crystal is dropped.

6A and 6B, a plurality of light emitting means are arranged in a straight line so as to be spaced apart from each other, and a plurality of light receiving means are arranged in a straight line so as to face each other so as to face the plurality of light emitting means. At this time, when the liquid crystal is discharged and dropped from the nozzle as shown in Figure 6b, only the light emitted from one of the plurality of light emitting means is reflected by the liquid crystal. That is, only the light emitted from the light emitting means which emits light to the area where the liquid crystal passes among the plurality of light emitting means is reflected by the liquid crystal and is not received by the light receiving means. Since the difference between the amount of light emitted from one light emitting means and the amount of light incident on the light receiving means facing the conventionally is compared, the difference value is small. Thus, even if the liquid crystal is dropped, it can be determined that the liquid crystal is not dropped.

However, in the exemplary embodiment of the present invention, as described above, the plurality of light emitting means 512b-1 are disposed so that the paths through which the light emitted from the plurality of light emitting means 512b-1, 512b-2, and 512b-3 travel are overlapped with each other. , 512b-2, 512b-3). And the sum of the amounts of light emitted from each of the plurality of light emitting means 512b-1, 512b-2, and 512b-3 and the amount of received light incident to each of the plurality of light receiving means 512c-1, 512c-2, and 512c-3. The sum is compared to determine whether the liquid crystal is dropped. Thus, the difference between the amount of emitted light and the amount of received light is larger than in the prior art. Therefore, it is possible to accurately determine whether the liquid crystal drop detection compared to the conventional.

In the above, the dropping apparatus for dropping the liquid crystal has been described, but the present invention is not limited thereto, and may be applied to various devices for dropping raw materials, for example, a paste dropping apparatus, a paste dropping apparatus, an ink dropping apparatus, and the like.

510: detection unit 520: detection unit
512b-1 to 512b-3: light emitting means 512c-1 to 512c-3: light receiving means
521: sensing unit 522: arithmetic unit

Claims

In the dropping apparatus for dropping raw materials,
A plurality of light emitting means spaced apart from each other to emit light;
A light source supply unit supplying a light source to the plurality of light emitting means;
A plurality of light receiving means that are disposed to face the plurality of light emitting means, and are spaced apart from each other and receive light emitted from the plurality of light emitting means; It includes a sensing unit body that is inserted and mounted, and includes a sensing unit corresponding to the lower side of the nozzle for dropping the raw material,
The light emitted from the plurality of light emitting means is irradiated toward the open area of the sensor body, the movement paths of the plurality of light cross each other, and overlap at the center of the opening of the sensor body,
A detection unit connected to the detection unit and detecting whether the raw material is dropped;
Wherein the detection unit comprises:
A sensing unit connected to the light receiving means to receive light quantity data incident to each of the plurality of light receiving means;
Connected to the light source supply unit and the sensing unit, the sum of the amount of light emitted by each of the plurality of light emitting means is added to calculate the sum of the emitted light, and the sum of the amount of light incident to each of the plurality of light receiving means is added to calculate the sum of the received light amount. And an operation unit for calculating a difference value between the sum of the amount of emitted light and the sum of the amount of received light.

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The method according to claim 1,
The plurality of light emitting means is a dropping apparatus in which light emitted from each light emitting means is irradiated toward the center region of the same space.

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The method according to claim 3,
And a dropping device in which the light emitting means and the light receiving means are alternately spaced apart from each other.

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The method according to claim 1,
A determination unit that determines whether or not the raw material is dropped by using a difference value between the sum of the amounts of light supplied to each of the plurality of light emitting means calculated by the calculating unit and the sum of the amounts of light incident to each of the plurality of light receiving means. Unloading device.