TW201221666A - Articles and method for making the same - Google Patents

Abstract

A article is provided which includes a magnesium or magnesium alloy substrate, and a first magnesium tin alloy layer, a tin layer, a second magnesium tin alloy layer, a magnesium layer and a Mg-N layer formed on the magnesium or magnesium alloy substrate in that order. The article has a high corrosion resistance and a high abrasion resistance. A method for making the article is also provided.

Description

201221666 VI. Description of the Invention: [Technical Field] [0001] The present invention relates to a coated member and a method of manufacturing the same, and, in particular, to a coated member of a magnesium or magnesium alloy and a method of manufacturing the same. [Prior Art] [0002] Magnesium and magnesium alloys are widely used in the covering parts of 3C products, automobiles, and aviation due to their advantages of light weight, good heat dissipation, and good electromagnetic shielding properties. However, the most obvious shortcomings of the town and town alloys are poor corrosion, which can cause rapid surface corrosion when exposed to the natural environment.

[0003] A method of improving the corrosion resistance of magnesium and magnesium alloy coatings is generally to form a protective coating on the surface thereof. Conventional anodizing, chromate conversion coating technology and electroplating methods for forming protective coatings on the surface of magnesium and magnesium alloys have the disadvantages of complicated production processes, low efficiency, and serious environmental pollution. The vacuum coating (PVD) technology is a very environmentally friendly coating process, and the coating layer can be rich in type and excellent in wear resistance. However, the film deposited by the PVD process tends to grow in the form of columnar crystals, so the film layer exists. A large number of intergranular gaps result in insufficient film density and limited improvement in corrosion resistance of aluminum alloys. SUMMARY OF THE INVENTION [0004] In view of the above, a coated member of magnesium or a magnesium alloy having better corrosion resistance is provided. Further, a method of manufacturing the above-described covering member is also provided. [0006] A coated member comprising a magnesium or magnesium alloy substrate, a first magnesium tin alloy layer sequentially formed on the magnesium or magnesium alloy substrate, a tin layer, and a second magnesium tin alloy 099141304 Form No. A0101 Page 3 of 11 Page 0992071865-0 201221666 Layer, magnesium layer and Mg-N layer. [0007] A method of manufacturing a coated member, comprising the steps of: [0008] providing a magnesium or magnesium alloy substrate; [0009] using a tin target as a target, magnetron sputtering a tin layer on the surface of the magnesium or magnesium alloy substrate The sputtering temperature is 100~150 ° C, and the sputtering time is 10~60 min. During the extinction of the tin layer, the tin metal at the interface between the tin layer and the magnesium or magnesium alloy matrix diffuses to the magnesium or magnesium alloy matrix. Forming a first magnesium tin alloy layer between the magnesium or magnesium alloy substrate and the tin layer; [0010] using a magnesium target as a target, magnetron sputtering the magnesium layer on the tin layer, the sputtering temperature is 100-150 During the sputtering of the magnesium layer, the tin metal at the interface between the tin layer and the magnesium layer diffuses toward the magnesium layer, and a second magnesium tin alloy layer is formed between the tin layer and the magnesium layer; [0011] The magnesium target is a target, and nitrogen is a reactive gas, and the Mg-N layer is magnetron-sputtered on the magnesium layer. [0012] The coated member obtained by the above manufacturing method has good corrosion resistance for the following three reasons: (1) the formation of the first magnesium tin alloy layer and the second magnesium tin alloy layer can improve the coated part The electrochemical potential makes the coated part less susceptible to electrochemical corrosion; (2) the metal tin diffuses into the magnesium or magnesium alloy matrix and the magnesium layer during sputtering of the tin layer and the magnesium layer, thereby reducing magnesium or magnesium alloy The void defect of the substrate simultaneously enhances the compactness of the surface layer of the coated member, so as to delay the diffusion of the corrosion-resistant gas and/or the liquid into the film layer; (3) the Mg-N layer has good corrosion resistance, It has a good protective effect on the coated member. 099141304 Form No. A0101 Page 4 of 11 0992071865-0 201221666 [0013] Due to the good compatibility and bonding force between magnesium and tin, the formation of the tin layer and the magnesium layer can effectively enhance the The bonding force between the respective film layers of the covering member is such that the covering member has better wear resistance. [0014] Referring to FIG. 1, a coated member 10 according to a preferred embodiment of the present invention includes a magnesium or magnesium alloy substrate 11, and a first-magnesium-tin alloy sequentially formed on the surface of the magnesium or magnesium alloy substrate. Layer 12' tin layer 13, second magnesium tin alloy layer 14, magnesium layer 15, and nitric acid compound (Mg-N) layer 17. [0016] [0017] The kick layer 13, the money layer 15, and the Mg-N layer 17 are each formed by a magnetron flooding film method. The formation of the tin layer 13 and the magnesium layer 15 can improve the bonding force between the respective film layers of the covering member 1〇. The thickness of the magnesium layer 15 is 〇. 2~〇 5 . The thickness of the Mg-N layer is 0. 2~2. 〇/zm. The first magnesium-tin alloy layer 12 is formed by diffusing metal tin at the π interface of the magnesium or magnesium alloy substrate into the magnesium or magnesium alloy substrate 11 during the formation of the tin layer 13. The second magnesium-tin alloy layer 14 is formed during the formation of the tin layer 13, and the metal tin at the interface between the tin layer 13 and the magnesium layer 15 is diffused into the magnesium layer 15 to form the coating [0018] The manufacturing method of the sheet is mainly composed of the following steps: Providing a magnesium or magnesium alloy substrate 11 which can be obtained by press forming to have a structure of the coated member 1 to be obtained. The magnesium or magnesium alloy substrate 11 is placed in an ultrasonic cleaner containing an ethanol or acetone solution for vibration cleaning to remove impurities and oil on the surface of the magnesium or magnesium alloy substrate 11. After cleaning, dry and set aside. 099141304 Form No. A0101 Page 5 / Total 11 Page 0992071865-0 [0020] [0022] [0023] The surface of the magnesium or magnesium alloy substrate 11 is further subjected to plasma cleaning to further remove the magnesium or magnesium alloy substrate 11 The oil on the surface is used to improve the adhesion of the surface of the magnesium or magnesium alloy substrate 11 to the subsequent coating. The method for plasma cleaning the surface of the magnesium or magnesium alloy substrate comprises the following steps: using a vacuum coating machine (not shown), the magnesium or magnesium alloy substrate is placed in the ore film 3 indoor station frame of the coating machine. The upper part is evacuated to a vacuum of 8 〇χ 10 3Pa, and a flow rate of 300 to 600 Sccm (standard state ML/min) is passed into the coating chamber to a purity of 99.999% argon gas (working gas) in magnesium or A magnesium alloy substrate 11 is applied with a bias of -300 - 8 〇〇v, and the surface of the magnesium or magnesium alloy substrate 11 is plasma-cleaned for a cleaning time of 3 to 1 Torr. After the electricity is cleaned by Yuancheng, the flow rate of argon gas is adjusted to 1 〇〇~3 〇〇se, the duty ratio is set to 30-50%, and the revolution speed of the workpiece holder is set to 〇·5~3. Or/ Min (revolution per minute, rpm), heating the coating chamber to l〇〇~15 (rc (ie, sputtering temperature is 100~150 ° C); turning on the tin that has been placed in the vacuum shovel machine The power source of the target, and its power is 5~1〇kw, a bias voltage of -50~-300V is applied to the carbon or alloy substrate η to deposit the tin layer 13. The time for depositing the tin layer 13 is 10 ~60min. Due to the low-temperature rapid diffusion of metal tin, in the process of forming the tin layer 13, the tin metal 13 and the metal tin at the interface of the magnesium or magnesium alloy substrate are diffused to the magnesium or magnesium alloy matrix u, and Forming the first tin-locked alloy layer 12 at the interface. After the deposition of the tin layer 13 is completed, the power of the tin handle is turned off, and the argon flow rate, duty cycle, and sputtering temperature are maintained. , turn on the power supply of the magnesium target installed in the coating chamber, set its power to 5~10kw, Shen 099141304 Form No. A0I01 Page 6 / Total Page 0 992071865-0 [0024] 201221666 [0025] [0028] [0028] The magnesium layer 15 is deposited, and the magnesium layer 15 is deposited for a time of 1 〇 30 30 min. Similarly, due to the low temperature of the metal tin Diffusion, in the process of forming the town layer 15, metal tin at the interface between the tin layer 13 and the town layer 15 also diffuses toward the town layer 15 and forms the second magnesium tin alloy layer 14 at the interface A Mg-N layer 17 is formed on the magnesium layer 15. When the Mg-N layer 17 is prepared, the argon flow rate, duty ratio, sputtering temperature, power supply of the magnesium stem, and application to the town or town alloy are maintained. The bias voltage of the substrate 11 is constant, and a reaction gas nitrogen gas having a flow rate of 30 to 80 sccm is introduced into the coating chamber to deposit a Mg-N layer 17. The time for depositing the Mg-N layer 17 is 30 to 120 min. The obtained coated member 10 has good corrosion resistance for the following three reasons: (1) formation of the first magnesium-tin alloy layer 12 and the second magnesium-tin alloy layer 14 can improve the electrification of the coated member 1 The potential is applied to make the coated member 10 less susceptible to electrochemical corrosion; (2) in the process of forming the tin layer 13 and the magnesium layer 15 by sputtering, the metal tin is Magnesium or magnesium alloy matrix n and magnesium layer 15 diffuse, which can reduce the void defects of the magnesium or magnesium alloy matrix u, and at the same time enhance the compactness of the surface layer of the coated member 10, thus retarding the corrosion resistance gas and/or the liquid to the film layer (3) The said layer 17 has good corrosion resistance and has good protection against the coated member. Because of the good compatibility and bonding between the magnesium and the metal. The tin layer 13 and the rider 15 can effectively (4) the bonding force between the film layers of the element 10 such that the coated member 1G has better wear resistance. 099141304 Form No. Α0101 Page 7 of 11 0992071865-0 201221666 [Schematic Description] [0029] Fig. 1 is a cross-sectional view showing a coated part of a preferred embodiment of the present invention. [Main component symbol description] [0030] Covering member: 10 [0031] Magnesium or magnesium alloy substrate: 11 [0032] First 4 US tin alloy layer: 12 .

[0033] Tin layer: 13 [0034] Second magnesium tin alloy layer: 14 [0035] Magnesium layer: 15 [0036] Mg-N layer: 17 0992071865-0 099141304 Form No. A010] Page 8 of 11

Claims (1)

201221666 VII. Patent application scope: 1. A coated member comprising a magnesium or magnesium alloy substrate, the improvement comprising: the covering member further comprising a first magnesium tin alloy layer, a tin layer, which are sequentially formed on the magnesium or magnesium alloy substrate, The second town tin alloy layer, town layer and Mg-N layer. 2. The coated article of claim 1, wherein the tin layer, the magnesium layer and the Mg-N layer are each formed by a magnetron sputtering coating method. 3. The coated article of claim 2, wherein the first magnesium tin alloy layer is formed by diffusion of a tin layer with a metal tin at a magnesium or a master alloy matrix interface to a town or a town alloy substrate, The second magnesium-tin alloy layer is formed by diffusion of metallic tin at the interface between the tin layer and the magnesium layer to the magnesium layer. 2 /2. 0 / The thickness of the Mg-N layer is 0. 2~2. 0 / The thickness of the Mg-N layer is 0. 2~2. 0 / /m. 5 . A method for manufacturing a coated member, comprising the steps of: providing a magnesium or magnesium alloy substrate; magnetron sputtering a tin layer on the surface of the magnesium or magnesium alloy substrate with a tin target as a target, and a sputtering temperature of 100 ~150 ° C, sputtering time is 10~60min; during the sputtering process of the tin layer, the tin metal and the metal tin at the interface of the town or town alloy matrix diffuse to the magnesium or magnesium alloy matrix, in magnesium or magnesium alloy Forming a first HI tin alloy layer between the base and the tin layer; magnetron sputtering the magnesium layer on the tin layer with the magnesium target as a target, the sputtering temperature is 100~150 ° C; During the spraying process, the tin metal at the interface between the tin layer and the town layer diffuses to the magnesium layer, and a second magnesium tin alloy layer is formed between the tin layer and the magnesium layer; the magnesium target is used as the target, and nitrogen is the reaction gas. The Mg-N layer was magnetron sputtered on the magnesium layer. The method for manufacturing the coated member according to claim 5, wherein the process parameter for stimulating the tin layer is: working with argon gas, the method of manufacturing the coated member according to claim 5, wherein the process parameter for stimulating the tin layer is: Gas, argon flow rate is 100~300 seem, the power supply of the tin target is set to 5~i〇kw, the bias voltage of -50~-300V is applied to the town or the carbon alloy substrate, and the sputtering temperature is 100~1 The 50°c 'sputtering time is 1 〇~ 60m iη. 7. The method for manufacturing a coated article according to claim 5, wherein the process parameter for sputtering the magnesium layer is: using argon as a working gas, and the flow rate of argon is 100 to 300 sccm in magnesium or magnesium. A bias of -50 to 300 V is applied to the alloy substrate, and the magnesium target is used as a target, the power of the power is 5 to 10 kw, the sputtering temperature is 100 to 150 Å, and the sputtering time is 1 〇 to 3 〇 min 〇 8 . The method for manufacturing a coated article according to claim 5, wherein the process parameter for reducing the Mg-N layer is: a flow rate of nitrogen gas is 1 〇 12 〇 sccm ' argon gas as a working gas, argon gas The flow rate is 1〇〇~3〇〇sccm, and the bias voltage of -50~-300V is applied to the town or magnesium alloy substrate, and the dry power of magnesium is used as the dry material. The power supply is 5~l〇kw, and the sputtering temperature is l. 〇〇 15 15 15 rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc rc The step of ultrasonic cleaning and plasma cleaning of the magnesium or magnesium alloy substrate before the tin layer. 099141304 No. A0101 Page 10 of 11 0992071865-0