TW201215693A - Vacuum depositing article and method for making the same - Google Patents

Vacuum depositing article and method for making the same Download PDF

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Publication number
TW201215693A
TW201215693A TW99134301A TW99134301A TW201215693A TW 201215693 A TW201215693 A TW 201215693A TW 99134301 A TW99134301 A TW 99134301A TW 99134301 A TW99134301 A TW 99134301A TW 201215693 A TW201215693 A TW 201215693A
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Taiwan
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layer
substrate
fingerprint layer
fingerprint
polytetrafluoroethylene
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TW99134301A
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Chinese (zh)
Inventor
Hsin-Pei Chang
Wen-Rong Chen
Huan-Wu Chiang
Cheng-Shi Chen
Cong Li
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Hon Hai Prec Ind Co Ltd
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Priority to TW99134301A priority Critical patent/TW201215693A/en
Publication of TW201215693A publication Critical patent/TW201215693A/en

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Abstract

The present disclosure provides a vacuum depositing article and a method for making the vacuum depositing article. The vacuum depositing article includes a substrate and an anti-finger print coat formed on the substrate. The anti-finger print coat includes a first anti-finger print layer formed on the substrate and a second anti-finger print layer formed on the first anti-finger print layer. The first anti-finger print layer is a polytetrafluoroethylene layer. The second anti-finger print layer is a polytetrafluoroethylene and Al-O-N layer. The method for making the vacuum depositing article includes: providing a substrate; forming a first anti-finger print layer on the substrate by vacuum sputtering polytetrafluoroethylene; forming a second anti-finger print layer on the first anti-finger print layer by vacuum sputtering polytetrafluoroethylene and Al-O-N.

Description

201215693 六、 [0001] [0002] [0003] [0004] [0005] [0006] [0007] 發明說明: 【發明所屬之技術領域】 本發明涉及一種鍍膜件及其製作方法,尤其涉及一種具 有抗指紋功能的鍍膜件及該鍍臈件的製作方法。 【先前技術】 傳統技術中,早期抗指紋化處理一般係採用在鍍鋅層上 形成鉻酸鹽層及特殊的樹脂層。該方法需要使用鉻酸鹽 處理,環境污染嚴重且工序複雜,對基材的要求也高。 隨著技術的發展,目前通常將具有抗指紋性能的塗料或 溶液塗覆於基材的表面來實現抗指紋功能。該具有抗指 紋性能的塗料或溶液通常含有毒的有機物,對環境及人 體健康不利,且所述的有機物一般來說結構複雜,難以 製備。 為了避免上述問題’習知技術中有提出以真空蒸鍍的方 式在塑膠板材上鍍覆聚四氟乙烯層以實現抗指紋的功能 。然而,該聚四氟乙烯層的耐磨性拫差,使用過程中很 容易被磨損’而導致抗指紋功能的失效。 【發明内容】 鑒於此,有必要提供一種環保的、且具有持久抗指紋功 能的鍍膜件。 另外,還有必要提供一種上述鍍膜件的製作方法。 一種鍍膜件,其包括一基體及一形成於基體表面的抗指 紋層,該抗指紋層包括一第一抗指紋層及一第二抗指紋 層,該第一抗指紋層形成於基體的表面,該第二抗指紋 099134301 表單鳊號A0101 第4頁/共11頁 0992059934-0 201215693 層形成於第一抗指紋層的表面,該第一抗指紋層為聚四 氟乙烯層,該第二抗指紋層為聚四氟乙烯與鋁氧氮的混 合物層。 [0008] [0009] [0010] [0011] Ο [0012] ❹ [0013] [0014] [0015] [0016] 一種鍍膜件的製作方法,其包括如下步驟: 提供一基體; 採用真空濺鍍法在該基體的表面濺鍍聚四氟乙烯層以形 成一第一抗指紋層; 採用真空濺鍍法在該第一抗指紋層的表面濺鍍聚四氟乙 烯與鋁氧氮的混合物層以形成一第二抗指紋層。 相較於習知技術,所述的鍍膜件採用真空濺鍍的方法在 基體表面依次形成一聚四氟乙烯層及一聚四氟乙烯與鋁 氧氮的混合物層得以實現良好的抗指紋的功能,且該聚 四氟乙烯與鋁氧氮的混合物層具有較高的硬度及較好的 耐磨性,可防止所述抗指紋層被磨損,使得所述的鍍膜 件的抗指紋功能更持久。 【實施方式】 請參閱圖1,本發明一較佳實施方式的鍍膜件10包括基體 11及形成於基體11表面的抗指紋層13。該抗指紋層13包 括一第一抗指紋層131及一第二抗指紋層133。 基體11可由金屬材料或塑膠製成。 第一抗指紋層131為一聚四氟乙烯層,其可以真空濺鍍的 方式形成於基體11的表面。 第二抗指紋層133為一聚四氟乙烯與鋁氧氮(A1 ON)的混 099134301 表單編號A0101 第5頁/共11頁 0992059934-0 201215693 [0017] [0018] [0019] [0020] [0021] 099134301 α物層,其可以真空濺鑛的方式形成於第一抗指紋層】3】 的表面。 所述第抗4曰紋層1 31與第—抗指紋層13 3的總厚度可為1 以下,優選為〇.卜〇. 5em。該第一抗指紋層131與第 一抗指紋層1 3 3均為透明狀。 本發明一較佳實施方式的製作上述鍍膜件10的方法包括 如下步驟: 提供一基體11,並對該基體11進行前處理。該前處理可 包括以下步驟: 將基體11放入盛裝有乙醇及/或丙酮溶液的超聲波清洗器 中進行超聲波清洗,以除去基體U表面的雜質和油污等 〇 對經超聲波清洗後的基體1 1的表面進行電裝清洗,以進 一步去除基體11表面的髒污,以及改善基體丨丨表面與後 續塗層的結合力。將基體Π放入^真空濺鍍機(圖未示 )的鍍膜室中,抽真空該鍍膜室至真空度為4. 〇xl(r3Pa ,然後通入流量為300〜50Osccm (標準毫升每分)的工 作氣體氬氣(純度為99· 999%),對基體η施加― 300〜-500V的偏壓,使鍍膜室中產生高頻電壓,使所述 氬氣發生離子化而產生氩氣電漿對基體u的表面進行物 理轟擊,而達到對基體11表面電漿清洗的目的。所述電 衆清洗的時間可為3 ~ 1 〇 m i η。 所述電漿清洗完成後,繼續在所述鍍膜室中以真空濺鍍 法在基體11的表面濺鍍抗指紋層13,濺鍍該抗指紋層13 表單編號Α0101 第6頁/共11頁 0992059934-0 [0022] 201215693 包括分別濺鍍第一抗指紋層1 31及第二抗指紋層ι 33的步 [0023] 幾鍍該第一抗指紋層131時,加熱所述鍍膜室的溫度至 2〇~30〇°C (即濺鍍溫度為20〜300t),以聚四氟乙婦為 靶材,並對基體11施加-100〜-300V的偏壓,調節鍍膜室 中氬氣的流量至5〜15〇Sccm,並通入流量為5〜7〇sccn^ 氮氣及5〜6〇Sccm的乙炔氣體,開啟靶材的電源,於基體 U的表面沉積所述第一抗指紋層131。沉積該第—抗指紋 Ο [0024] 層131的時間可為20〜60分鐘。 ' ...; . .... 沉積所述第-抗減層131後,停止通人乙块氣體,向所 述鑛膜室中再通人流量為1Q〜6()scein的反應氣體氧氣, 同時開啟聚四氟乙軸材魏姆的電源,以繼續於所 述第-抗指紋層131的表面減錄一第二抗指紋層⑶。該 第二抗指紋層133為聚四氟乙稀與純氮的混合物層。錢 鑛該第二抗指紋層133的時間可為2G〜60分鐘。 [0025] Ο 對所述鍍膜件10進行t輝光放電發射光譜⑽—〇⑻測 戈由所述第一抗指紋層133的表面向第一抗指紋層⑶ 的方向項谱’發現第二抗指纹層133中的A卜Ο、N各元素 的分佈較均勻。 [0026] 使用ACCU牌(產地:美國)的達因筆對所述抗指紋層13 的抗指紋⑽崎了職。結絲日㈣抗指㈣i 3的表 面張力小於3G達因’具有較好的抗指紋功能。 相較於$知技術’所述騎膜件1()採用真线鑛的方法 在基體11表面依切成—聚4乙稀層及—聚四氟乙稀 099134301 表單編號A0101 第7頁/共Π頁 0992059934-0 [0027] 201215693 與鋁氧氮的混合物層得以實現良好的抗指紋的功能,且 該聚四氟乙稀與銘氧氮的混合物層具有較高的硬度及較 好的耐磨性,可防止所述抗指紋層13被磨損,使得所述 的鍍膜件10的抗指紋功能更持久。 【圖式簡單說明】 [0028] 圖1係本發明一較佳實施方式的鍍膜件的剖視示意圖。 【主要元件符號說明】 [0029] 鍍膜件:10 [0030] 基體:11 [0031] 抗指紋層:13 [0032] 第一抗指紋層:131 [0033] 第二抗指紋層:133 099134301 表單編號A0101 第8頁/共11頁 0992059934-0201215693 6. [0001] [0002] [0003] [0006] [0007] [0007] [0007] [Technical Field] The present invention relates to a coated member and a method of fabricating the same, and more particularly to A coating member for a fingerprint function and a method of manufacturing the same. [Prior Art] In the conventional art, early anti-fingerprinting treatment generally employs a chromate layer and a special resin layer on a galvanized layer. This method requires the use of chromate treatment, which is serious in environmental pollution and complicated in process, and has high requirements on the substrate. With the development of technology, a coating or solution having anti-fingerprint properties is usually applied to the surface of a substrate to achieve an anti-fingerprint function. The paint or solution having anti-stripe properties usually contains toxic organic substances which are detrimental to the environment and human health, and the organic substances are generally complicated in structure and difficult to prepare. In order to avoid the above problems, it has been proposed in the prior art to apply a polytetrafluoroethylene layer on a plastic sheet by vacuum evaporation to achieve an anti-fingerprint function. However, the polytetrafluoroethylene layer has poor abrasion resistance and is easily worn during use, resulting in failure of the anti-fingerprint function. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide an environmentally friendly coated member having a durable anti-fingerprint function. In addition, it is also necessary to provide a method of manufacturing the above-mentioned coated member. A coating member comprising a substrate and an anti-fingerprint layer formed on the surface of the substrate, the anti-fingerprint layer comprising a first anti-fingerprint layer and a second anti-fingerprint layer, the first anti-fingerprint layer being formed on the surface of the substrate The second anti-fingerprint 099134301 Form nickname A0101 Page 4 / Total 11 page 0992059934-0 201215693 The layer is formed on the surface of the first anti-fingerprint layer, the first anti-fingerprint layer is a Teflon layer, and the second anti-fingerprint The layer is a mixture of polytetrafluoroethylene and aluminum oxynitride. [0012] [0012] [0016] [0016] [0016] [0016] [0016] A method of fabricating a coated member, comprising the steps of: providing a substrate; using vacuum sputtering Depositing a polytetrafluoroethylene layer on the surface of the substrate to form a first anti-fingerprint layer; depositing a mixture layer of polytetrafluoroethylene and aluminum oxynitride on the surface of the first anti-fingerprint layer by vacuum sputtering to form A second anti-fingerprint layer. Compared with the prior art, the coating member adopts a vacuum sputtering method to sequentially form a polytetrafluoroethylene layer and a mixture layer of polytetrafluoroethylene and aluminum oxynitride on the surface of the substrate to achieve good anti-fingerprint function. And the mixture layer of the polytetrafluoroethylene and the aluminum oxynitride has higher hardness and better wear resistance, and the anti-fingerprint layer is prevented from being worn, so that the anti-fingerprint function of the coated member is more durable. [Embodiment] Referring to Figure 1, a coated member 10 according to a preferred embodiment of the present invention includes a substrate 11 and an anti-fingerprint layer 13 formed on the surface of the substrate 11. The anti-fingerprint layer 13 includes a first anti-fingerprint layer 131 and a second anti-fingerprint layer 133. The base 11 can be made of a metal material or plastic. The first anti-fingerprint layer 131 is a polytetrafluoroethylene layer which is formed on the surface of the substrate 11 by vacuum sputtering. The second anti-fingerprint layer 133 is a mixture of polytetrafluoroethylene and aluminum oxynitride (A1 ON). 099134301 Form No. A0101 Page 5 of 11 0992059934-0 201215693 [0017] [0019] [0020] 0021] 099134301 α layer, which can be formed on the surface of the first anti-fingerprint layer by vacuum sputtering. The total thickness of the first anti-4 crepe layer 1 31 and the first anti-fingerprint layer 13 3 may be 1 or less, preferably 〇.卜〇. 5em. The first anti-fingerprint layer 131 and the first anti-fingerprint layer 133 are both transparent. A method of fabricating the above coated member 10 according to a preferred embodiment of the present invention includes the steps of: providing a substrate 11 and pretreating the substrate 11. The pretreatment may include the following steps: the substrate 11 is placed in an ultrasonic cleaner containing an ethanol and/or acetone solution for ultrasonic cleaning to remove impurities and oil stains on the surface of the substrate U, and the ultrasonically cleaned substrate 1 1 The surface is electrically cleaned to further remove the dirt on the surface of the substrate 11, and to improve the adhesion of the surface of the substrate to the subsequent coating. The substrate is placed in a coating chamber of a vacuum sputtering machine (not shown), and the coating chamber is evacuated to a vacuum of 4. 〇xl (r3Pa, and then the flow rate is 300~50 Osccm (standard cc per minute). Working gas argon (purity: 99·999%), applying a bias of ~300~-500V to the substrate η, generating a high-frequency voltage in the coating chamber, ionizing the argon gas to generate argon plasma The surface of the substrate u is physically bombarded to achieve the purpose of plasma cleaning on the surface of the substrate 11. The cleaning time of the electric group can be 3 ~ 1 〇mi η. After the cleaning of the plasma is completed, the coating is continued. The anti-fingerprint layer 13 is sputtered on the surface of the substrate 11 by vacuum sputtering, and the anti-fingerprint layer 13 is sputtered. Form No. 1010101 Page 6 of 11 0992059934-0 [0022] 201215693 includes sputtering of the first anti-separation Steps of the fingerprint layer 1 31 and the second anti-fingerprint layer ι 33 [0023] When the first anti-fingerprint layer 131 is plated, the temperature of the coating chamber is heated to 2 〇 30 〇 ° C (ie, the sputtering temperature is 20 ~300t), using Teflon as a target, and applying a bias of -100~-300V to the substrate 11, adjusting the coating chamber The flow rate of the gas is 5~15〇Sccm, and the acetylene gas with a flow rate of 5~7〇sccn^ nitrogen and 5~6〇Sccm is introduced, the power of the target is turned on, and the first anti-fingerprint is deposited on the surface of the substrate U. The layer 131 may deposit the first anti-fingerprint layer [0024] The layer 131 may have a time of 20 to 60 minutes. After the deposition of the first anti-reduction layer 131, the passage of the block is stopped. a gas, a reaction gas oxygen of a flow rate of 1Q to 6 () scein is recirculated into the film chamber, and a power source of the polytetrafluoroethylene shaft material is turned on to continue the first anti-fingerprint layer 131. A second anti-fingerprint layer (3) is subtracted from the surface. The second anti-fingerprint layer 133 is a mixture layer of polytetrafluoroethylene and pure nitrogen. The time of the second anti-fingerprint layer 133 of the money ore may be 2G to 60 minutes. 0025] t performing a glow discharge spectrum on the coated member 10 (10)—〇(8) dying to find a second anti-fingerprint layer from the surface of the first anti-fingerprint layer 133 toward the direction of the first anti-fingerprint layer (3) The distribution of the elements of A and N in 133 is relatively uniform. [0026] The anti-fingerprint of the anti-fingerprint layer 13 is obtained using the Dyne pen of the ACCU brand (origin: USA) (10) The position of the silky day (four) anti-finger (four) i 3 surface tension is less than 3G dyne 'has a good anti-fingerprint function. Compared with the known technology 'the riding element 1 () using the true line method in the matrix 11 surface is cut into - poly 4 ethylene layer and - polytetrafluoroethylene 099134301 Form No. A0101 Page 7 / Total Page 0992059934-0 [0027] 201215693 The mixture layer with aluminum oxide is good anti-fingerprint The function, and the mixture layer of the polytetrafluoroethylene and the oxynitride has higher hardness and better wear resistance, and the anti-fingerprint layer 13 is prevented from being worn, so that the anti-fingerprint of the coated member 10 is prevented. More durable. BRIEF DESCRIPTION OF THE DRAWINGS [0028] FIG. 1 is a cross-sectional view showing a coated member of a preferred embodiment of the present invention. [Main component symbol description] [0029] Coating member: 10 [0030] Base: 11 [0031] Anti-fingerprint layer: 13 [0032] First anti-fingerprint layer: 131 [0033] Second anti-fingerprint layer: 133 099134301 Form number A0101 Page 8 of 11 0992059934-0

Claims (1)

201215693 七、申請專利範圍: 1 . 一種鍍膜件,其包括一基體及一形成於基體表面的抗指紋 層,其改良在於:該抗指紋層包括一第一抗指紋層及一第 二抗指紋層,該第一抗指紋層形成於基體的表面,該第二 抗指紋層形成於第一抗指紋層的表面,該第一抗指紋層為 聚四氟乙烯層,該第二抗指紋層為聚四氟乙烯與鋁氧氮的 混合物層。 2 .如申請專利範圍第1項所述的鍍膜件,其中所述第一抗指 紋層與第二抗指紋層的總厚度為1以m以下。 ® 3 .如申請專利範圍第2項所述的鍍膜件,其中所述第一抗指 紋層與第二抗指紋層的總厚度為0. 1〜0. 5 y m。 4.如申請專利範圍第1項所述的鍍膜件,其中所述第一抗指 ' 紋層與第二抗指紋層均以真空濺鍍的方式製成。 5 .如申請專利範圍第1項所述的鍍膜件,其中所述基體由金 屬材料或塑膠製成。 6 . —種鍍膜件的製作方法,其包括如下步驟: 提供一基體; ^ 採用真空濺鍍法在該基體的表面濺鍍聚四氟乙烯層以形成 一第一抗指紋層; 採用真空濺鍍法在該第一抗指紋層的表面濺鍍一聚四氟乙 烯與鋁氧氮的混合物層以形成一第二抗指紋層。 7 .如申請專利範圍第6項所述的鍍膜件的製作方法,其中濺 鍍所述第一抗指紋層以聚四氟乙烯為靶材,對基體設置 -1 00 — 300V的偏壓,濺鍍溫度為20〜300°C,通入的氬氣 的流量為5~150sccm,氮氣的流量為5~70sccm,乙炔的 099134301 表單編號A0101 第9頁/共11頁 0992059934-0 201215693 流量為5〜6 0 s c c m,滅Μ時間為2 0 ~ 6 0分鐘。 8 .如申請專利範圍第6項所述的鍍膜件的製作方法,其中濺 鍍所述第二抗指紋層同時開啟聚四氟乙烯靶材及鋁靶材, 對基體設置-1 00 — 300V的偏壓,濺鍍溫度為20〜300°C, 通入的氬氣的流量為5〜1 50seem,氮氣的流量為 5~70sccm,氧氣的流量為10~60sccm,滅鑛時間為 20~60分鐘。 9 .如申請專利範圍第6項所述的鍍膜件的製作方法,其中所 述製作方法還包括在濺鍍第一抗指紋層前對基體進行進行 超聲波清洗及電漿清洗的步驟。 10 .如申請專利範圍第6項所述的鍍膜件的製作方法,其中所 述基體由金屬材料或塑膠製成。 099134301 表單編號A0101 第10頁/共11頁 0992059934-0201215693 VII. Patent application scope: 1. A coated component comprising a substrate and an anti-fingerprint layer formed on the surface of the substrate, wherein the anti-fingerprint layer comprises a first anti-fingerprint layer and a second anti-fingerprint layer The first anti-fingerprint layer is formed on the surface of the substrate, the second anti-fingerprint layer is formed on the surface of the first anti-fingerprint layer, the first anti-fingerprint layer is a polytetrafluoroethylene layer, and the second anti-fingerprint layer is a poly A layer of a mixture of tetrafluoroethylene and aluminum oxynitride. The coated article according to claim 1, wherein the total thickness of the first anti-finger layer and the second anti-fingerprint layer is 1 or less. 5 y m。 The total thickness of the first anti-fingerprint layer and the second anti-fingerprint layer is 0. 1~0. 5 y m. 4. The coated article of claim 1, wherein the first anti-finger layer and the second anti-fingerprint layer are both formed by vacuum sputtering. 5. The coated article of claim 1, wherein the substrate is made of a metal material or a plastic. 6 . A method for fabricating a coating member, comprising the steps of: providing a substrate; ^ sputtering a polytetrafluoroethylene layer on the surface of the substrate by vacuum sputtering to form a first anti-fingerprint layer; using vacuum sputtering A layer of a mixture of polytetrafluoroethylene and aluminum oxynitride is sputtered on the surface of the first anti-fingerprint layer to form a second anti-fingerprint layer. 7. The method of fabricating a coated member according to claim 6, wherein the first anti-fingerprint layer is sputtered with a polytetrafluoroethylene as a target, and a bias voltage of -100 to 300 V is set on the substrate, and the sputtering is performed. The plating temperature is 20~300°C, the flow rate of argon gas is 5~150sccm, the flow rate of nitrogen is 5~70sccm, the 099134301 of acetylene Form No. A0101 Page 9/11 Page 0992059934-0 201215693 Flow rate is 5~ 6 0 sccm, the sputum time is 2 0 ~ 60 minutes. 8. The method of fabricating a coated article according to claim 6, wherein the second anti-fingerprint layer is sputtered to simultaneously open the polytetrafluoroethylene target and the aluminum target, and the substrate is set to -100 to 300V. Bias, sputter temperature is 20~300°C, the flow rate of argon gas is 5~1 50seem, the flow rate of nitrogen is 5~70sccm, the flow rate of oxygen is 10~60sccm, and the time of extinction is 20~60 minutes. . 9. The method of fabricating a coated article according to claim 6, wherein the manufacturing method further comprises the steps of ultrasonically cleaning and plasma cleaning the substrate before sputtering the first anti-fingerprint layer. 10. The method of producing a coated member according to claim 6, wherein the substrate is made of a metal material or a plastic. 099134301 Form No. A0101 Page 10 of 11 0992059934-0
TW99134301A 2010-10-08 2010-10-08 Vacuum depositing article and method for making the same TW201215693A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104425759A (en) * 2013-08-27 2015-03-18 财团法人工业技术研究院 Organic-inorganic composite film and method for forming the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104425759A (en) * 2013-08-27 2015-03-18 财团法人工业技术研究院 Organic-inorganic composite film and method for forming the same

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