TW201219746A - used in gantry type processing machine for measuring errors in linear displacement of lead screws - Google Patents

used in gantry type processing machine for measuring errors in linear displacement of lead screws Download PDF

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Publication number
TW201219746A
TW201219746A TW099137460A TW99137460A TW201219746A TW 201219746 A TW201219746 A TW 201219746A TW 099137460 A TW099137460 A TW 099137460A TW 99137460 A TW99137460 A TW 99137460A TW 201219746 A TW201219746 A TW 201219746A
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TW
Taiwan
Prior art keywords
mirror
beam splitter
receiving module
light emitting
light
Prior art date
Application number
TW099137460A
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English (en)
Chinese (zh)
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TWI425189B (https=
Inventor
jun-de Li
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Prec Machinery Res & Amp Dev Ct
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Publication date
Application filed by Prec Machinery Res & Amp Dev Ct filed Critical Prec Machinery Res & Amp Dev Ct
Priority to TW099137460A priority Critical patent/TW201219746A/zh
Publication of TW201219746A publication Critical patent/TW201219746A/zh
Application granted granted Critical
Publication of TWI425189B publication Critical patent/TWI425189B/zh

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  • Length Measuring Devices By Optical Means (AREA)
TW099137460A 2010-11-01 2010-11-01 used in gantry type processing machine for measuring errors in linear displacement of lead screws TW201219746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099137460A TW201219746A (en) 2010-11-01 2010-11-01 used in gantry type processing machine for measuring errors in linear displacement of lead screws

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099137460A TW201219746A (en) 2010-11-01 2010-11-01 used in gantry type processing machine for measuring errors in linear displacement of lead screws

Publications (2)

Publication Number Publication Date
TW201219746A true TW201219746A (en) 2012-05-16
TWI425189B TWI425189B (https=) 2014-02-01

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Application Number Title Priority Date Filing Date
TW099137460A TW201219746A (en) 2010-11-01 2010-11-01 used in gantry type processing machine for measuring errors in linear displacement of lead screws

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TW (1) TW201219746A (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3175395D1 (en) * 1981-02-20 1986-11-06 Kaptron Inc Fiber optics communications modules
JP2855834B2 (ja) * 1990-09-20 1999-02-10 日本精工株式会社 ねじ精度測定方法
EP1092125B1 (en) * 1998-06-30 2005-11-09 Optodyne, Inc. Vector measurement for coordinate measuring machine
US7251039B1 (en) * 2005-04-29 2007-07-31 Agilent Technologies, Inc. Low non-linear error displacement measuring interferometer

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Publication number Publication date
TWI425189B (https=) 2014-02-01

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