CN103792070B - 半导体激光阵列光学特性检测装置 - Google Patents
半导体激光阵列光学特性检测装置 Download PDFInfo
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CN104897372B (zh) * | 2015-06-09 | 2018-05-25 | 西安炬光科技股份有限公司 | 多发光单元半导体激光器近场非线性自动测试方法及装置 |
CN104865052A (zh) * | 2015-06-09 | 2015-08-26 | 西安炬光科技有限公司 | 多发光单元半导体激光器空间光束轮廓的测试方法及装置 |
CN105334024B (zh) * | 2015-09-18 | 2017-08-25 | 西安炬光科技股份有限公司 | 半导体激光器阵列单巴实时测试系统及测试方法 |
CN105784330B (zh) * | 2016-02-29 | 2018-06-29 | 中国科学院长春光学精密机械与物理研究所 | 半导体激光器巴条单元一致性检测仪及其检测方法 |
CN109000895A (zh) * | 2018-09-03 | 2018-12-14 | 深圳奥比中光科技有限公司 | 一种光学测试设备 |
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CN101769819A (zh) * | 2008-12-31 | 2010-07-07 | 中国科学院西安光学精密机械研究所 | 光纤色散测量仪 |
CN202720390U (zh) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | 一种阵列半导体激光器的光束整形结构 |
JP5179754B2 (ja) * | 2004-08-09 | 2013-04-10 | 株式会社ニコン | 光学特性計測装置及び光学特性計測方法、露光装置及び露光方法、並びにデバイス製造方法 |
CN203672595U (zh) * | 2014-01-21 | 2014-06-25 | 北京工业大学 | 半导体激光阵列光学特性检测装置 |
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JPH06229871A (ja) * | 1993-02-02 | 1994-08-19 | Hitachi Cable Ltd | 光学部品の光軸調整方法 |
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JP5179754B2 (ja) * | 2004-08-09 | 2013-04-10 | 株式会社ニコン | 光学特性計測装置及び光学特性計測方法、露光装置及び露光方法、並びにデバイス製造方法 |
CN101769819A (zh) * | 2008-12-31 | 2010-07-07 | 中国科学院西安光学精密机械研究所 | 光纤色散测量仪 |
CN202720390U (zh) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | 一种阵列半导体激光器的光束整形结构 |
CN203672595U (zh) * | 2014-01-21 | 2014-06-25 | 北京工业大学 | 半导体激光阵列光学特性检测装置 |
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