TW201142238A - Rotation angle measurement system - Google Patents

Rotation angle measurement system Download PDF

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TW201142238A
TW201142238A TW099116638A TW99116638A TW201142238A TW 201142238 A TW201142238 A TW 201142238A TW 099116638 A TW099116638 A TW 099116638A TW 99116638 A TW99116638 A TW 99116638A TW 201142238 A TW201142238 A TW 201142238A
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Taiwan
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dimensional position
sensitive detector
position sensitive
signal processing
rotation angle
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TW099116638A
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Chinese (zh)
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TWI414751B (en
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Yung-Cheng Wang
Jui-Cheng Lin
Lih-Horng Shyu
Chung-Ping Chang
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Univ Nat Yunlin Sci & Tech
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Abstract

For the precision measurement of rotary indexing angles, a measurement system has been proposed that consists of: a light source, a detector module and a signal processing module. A laser beam serves as the light source. The detector module which includes a beam splitter, a focus lens and a wedge mirror will detect the light beam. The beam is divided into two beams by the beam splitter. One of them propagates through the center of the focus lens. The wedge mirror is fixed on the rotary axis of the object. The laser beam travels through the focus lens and then is reflected by the wedge mirror. The reflected beam transmits through the focus lens again and also the beam splitter. The reflected laser beam is detected by the signal processing module. In the module there are a 2D position sensitive detector (PSD) and a signal processing circuit. And the circuit is connected with the 2D PSD. By this way, a rotary indexing angle measurement which has the advantages of being non-sensitive to eccentricity error and simple structure can be realized.

Description

201142238 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種量測系統，尤指一種方便架設 且可避免因偏心而造成量測誤差的旋轉角度量測系 統。 【先前技術】 按，隨著科技的日新月異，在精密工業中對加工201142238 VI. Description of the Invention: [Technical Field] The present invention relates to a measuring system, and more particularly to a rotating angle measuring system which is easy to set up and can avoid measurement errors caused by eccentricity. [Prior Art] Press, with the rapid development of technology, processing in precision industry

精度的要求也越來越高’因此’發展高精度的檢測設 備已成為研發的重點，目前，在對於待測物的旋轉軸 進行檢測時，主要係藉由一旋轉編碼器對於旋轉軸的 位置與速度等進行檢測，進而掌握旋轉軸的加工精 度；The requirements for accuracy are also increasing. Therefore, the development of high-precision inspection equipment has become the focus of research and development. At present, when detecting the rotation axis of the object to be tested, the position of the rotary shaft is mainly caused by a rotary encoder. Detecting with speed, etc., and then grasping the machining accuracy of the rotating shaft;

既有旋轉編碼器雖可將 電氣訊號，並將該訊號處理 速度，既有旋轉編碼器於組 裝設於的旋轉軸上且需避免 可對於待測物旋轉軸進行檢 器裝設於待測物旋轉軸上時 上的誤差，明顯會影響檢測 改進之處。 【發明内容】 因此，本發明有鑑於既 物旋轉軸時’容易因偏心而 後檢測出旋轉軸的位置與 裝時，除了要精準地將其 與水滴或油體相接觸，方 測二然而，既有旋轉編碼 沾各易因偏心而造成量測 '、。果之準確度’誠有加以 有妖轉編碼器組裝於 v妻檢測準確度之缺 201142238 不足’特經過不斷的試驗與研究，终於發展出一種能 改進現有缺失之本發明。 本發明主要在於提供一種旋轉角度量測系統，其 係透過光學檢測的方式，於組裝時可避免產生偏心的 情形’藉以提供一方便架設且可避免因偏心而造成量 測誤差的旋轉角度量測系統之目的者。 基於上述目的’本發明之主要技術手段在於提供 一種旋轉角度量測系統，其係包含有一光源、一感測 組及一訊號處理組，其中： 該光源係為一雷射光束； 該感測組係用以接收該光源且設有一分光鏡、一 焦透鏡與一楔形鏡’該分光鏡係用以接收該光源的 雷射光束並將其均分為兩道光束，其中一光束係垂直 穿過聚焦透鏡的中心點，該楔形鏡係設於一待測物的 旋轉軸上’藉以接收經該聚焦透鏡聚焦的雷射光束， 並將其反射回該分光鏡；以及 該訊號處理組係用以接收該感測組經反射的雷射 光束且設有一二維位置靈敏檢測器及一訊號處理電 路’該二維位置靈敏檢測器係設有一用以接收光源經 楔形鏡反射並經由該聚焦透鏡與分光鏡而射入該二維 位置靈敏檢測器的檢測面上，而該訊號處理電路係與 該二維位置靈敏檢測器相電連接，該訊號處理電路係 可對於該二維位置靈敏檢測器上相對應光點所輸出的 訊號進行處理，即可準確地求得待測物旋轉轴的位 201142238 . 置。 進一步 ^ - y ’ 5亥雷射光束係為一二極體雷射。 步，該楔形鏡係設有—與待測物旋轉軸相 結合的聯軸器。 較佳地，守_ &, ^ 一維位置靈敏檢測器的檢測面係為一 4x4公厘的平面。 ,、，軚佳地，该二維位置靈敏檢剛器的解析度可達^ % 微米b m) ’將其換算為角度感測的解析度約為0.03。。 藉由上述的技術手段，本發明旋轉角度量測系 統，主要係藉由二維位置靈敏檢測器，可準確地判斷 光.’4在k剩面上的位置特性，並且利用二維位置靈敏 檢測器兩軸向的比值做為角度判斷的參數，使其在各 種轉速下皆能進行角度的檢測，相對增加旋轉角度量 測系統的穩定性，再則，另外，本發明旋轉角度量測 系統可得到解析度0.03。以下的高精度檢測，因此可 鲁 有效避免因偏心而造成的角度量測誤差，藉以提供一 方便架設且可避免因偏心而造成量測誤差的旋轉角度 量測系統者。 【實施方式】 為能詳細瞭解本發明的技術特徵及實用功效，並 可依照說明書的内容來實施’兹進一步以如圖式所示 的較佳實施例，詳細說明如后’請參閱如第一圖所示， 本發明之旋轉角度量測系統’其係包含有一光源（1 〇)、 201142238 一感測組（20)及一訊號處理組（3〇)，其中： 該光源（1 0)係為一雷射光束，較佳地，該雷射光 束係為一二極體雷射；Although the rotary encoder can transmit the electrical signal and process the signal, the rotary encoder is assembled on the rotating shaft and the detector can be prevented from being mounted on the rotating object of the object to be tested. The error on the axis of rotation obviously affects the improvement of the detection. SUMMARY OF THE INVENTION Therefore, in the present invention, in view of the fact that when rotating a shaft, it is easy to detect the position and timing of the rotating shaft due to eccentricity, in addition to accurately contacting it with water droplets or oil bodies, There is a rotation code that is easy to measure due to eccentricity. The accuracy of the fruit 'has been added to the lack of a demon-to-encoder to the accuracy of the detection accuracy of the wife. 201142238 Insufficient. After continuous trials and research, finally developed a invention that can improve the existing defects. The invention mainly provides a rotation angle measuring system, which is capable of avoiding eccentricity during assembly by means of optical detection, thereby providing a rotation angle measurement which is convenient for erection and can avoid measurement error caused by eccentricity. The purpose of the system. The main technical means of the present invention is to provide a rotation angle measuring system, which comprises a light source, a sensing group and a signal processing group, wherein: the light source is a laser beam; the sensing group The system is configured to receive the light source and is provided with a beam splitter, a focal lens and a wedge mirror. The beam splitter is configured to receive the laser beam of the light source and divide it into two beams, one of which passes vertically Focusing a center point of the lens, the wedge mirror being disposed on a rotation axis of the object to be tested 'by receiving a laser beam focused by the focus lens and reflecting it back to the beam splitter; and the signal processing group is used Receiving the reflected laser beam of the sensing group and providing a two-dimensional position sensitive detector and a signal processing circuit. The two-dimensional position sensitive detector is provided with a receiving light source reflected by the wedge mirror and passing through the focusing lens And the beam splitter is incident on the detecting surface of the two-dimensional position sensitive detector, and the signal processing circuit is electrically connected to the two-dimensional position sensitive detector, and the signal processing circuit can be For the signal output by the corresponding spot on the two-dimensional position sensitive detector, the position of the rotating axis of the object to be tested can be accurately determined. Further ^ - y ' 5 ray laser beam is a diode laser. In step, the wedge mirror is provided with a coupling that is coupled to the rotating shaft of the object to be tested. Preferably, the detection plane of the _ &, ^ one-dimensional position sensitive detector is a 4x4 mm plane. ,,, preferably, the resolution of the two-dimensional position sensitive detector is up to ^ % micron b m) 'the resolution of the angle sensing is about 0.03. . According to the above technical means, the rotation angle measuring system of the present invention mainly utilizes a two-dimensional position sensitive detector to accurately determine the positional characteristics of the light '4 on the remaining surface of k, and utilizes two-dimensional position sensitive detection. The ratio of the two axial directions is used as the parameter of the angle judgment, so that the angle can be detected at various speeds, and the stability of the rotation angle measuring system is relatively increased. In addition, the rotating angle measuring system of the present invention can be The resolution is 0.03. The following high-precision detection makes it possible to effectively avoid angle measurement errors caused by eccentricity, thereby providing a rotation angle measuring system that is easy to set up and can avoid measurement errors due to eccentricity. [Embodiment] In order to understand the technical features and practical effects of the present invention in detail, and in accordance with the contents of the specification, the present invention will be further described with reference to the preferred embodiments as illustrated in the accompanying drawings. As shown in the figure, the rotation angle measuring system of the present invention comprises a light source (1 〇), a 201142238 sensing group (20) and a signal processing group (3 〇), wherein: the light source (10) is a laser beam, preferably the laser beam is a diode laser;

該感測組（20)係用以接收該光源（1〇)且設有一分 光鏡（21)、一聚焦透鏡（22)與一楔形鏡（23)，其中該 分光鏡（21 )係用以接收該光源（1〇)的雷射光束並將其 均分為兩道光束’其中一光束係垂直穿過該聚焦透鏡 (2 2)的中心點’該楔形鏡（2 3)係設於一待測物的旋轉 軸（40)上，藉以接收經該聚焦透鏡（22)聚焦的雷射光 束’並將其反射回s亥分光鏡（21 )，較佳地，該楔形鏡（2 3) 係設有一與待測物旋轉軸（4〇)相結合的聯軸器（231); 以及 該訊號處理組（30)係用以接收該感測組（2〇)經反 射的雷射光束且設有一二維位置靈敏檢測器 (31)(TW〇-DIMENSI〇N Position Sensitive Detector ; 2D-PSD)及一訊號處理電路（32)，其中該 二維位置靈敏檢測器（31)係設有一用以接收光源（彳〇) 經楔形鏡（23)反射並經由該聚焦透鏡（22)與分光鏡（21) 而射入該二維位置靈敏檢測器（31 )的檢測面（31彳）上， 較佳地，該二維位置靈敏檢測器（31 )的檢測面（31彳）係 為一 4x4公厘（mm)的平面，其解析度可達j微米（" m) ’將其換算為角度感測的解析度約為〇 〇3。（36〇。+ 0_03 =12000 pulses)，而該訊號處理電路（32)係與該 二維位置靈敏檢測器（31)相電連接，該訊號處理電路 201142238 (32)係可對於該二维位置靈敏檢測器（31)上相對應光 點所輸出的訊號進行處理，即可準確地求得待測物旋 轉抽（40)的位置。The sensing group (20) is configured to receive the light source (1) and is provided with a beam splitter (21), a focusing lens (22) and a wedge mirror (23), wherein the beam splitter (21) is used for Receiving a laser beam of the light source (1 〇) and equally dividing it into two beams 'one of which passes through a center point of the focusing lens (2 2 ) vertically. The wedge mirror (23) is provided in a a rotating shaft (40) of the object to be tested, thereby receiving a laser beam 'focused by the focusing lens (22) and reflecting it back to the s-splitting mirror (21), preferably, the wedge mirror (23) A coupling (231) coupled to the rotating shaft of the object to be tested (4〇) is provided; and the signal processing group (30) is configured to receive the reflected beam of the sensing group (2〇) and A two-dimensional position sensitive detector (31) (TW〇-DIMENSI〇N Position Sensitive Detector; 2D-PSD) and a signal processing circuit (32) are provided, wherein the two-dimensional position sensitive detector (31) is provided with a The receiving light source (彳〇) is reflected by the wedge mirror (23) and injected into the two-dimensional position sensitive detector (31) via the focusing lens (22) and the beam splitter (21). Preferably, the detection surface (31彳) of the two-dimensional position sensitive detector (31) is a plane of 4×4 mm (mm), and the resolution is up to j micron (&quot ; m) 'The resolution of converting it to angle sensing is approximately 〇〇3. (36〇.+ 0_03 =12000 pulses), and the signal processing circuit (32) is electrically connected to the two-dimensional position sensitive detector (31), and the signal processing circuit 201142238 (32) is for the two-dimensional position The signal outputted by the corresponding detector on the sensitive detector (31) can accurately determine the position of the rotating object (40) of the object to be tested.

本發明旋轉角度量測系統於使用時係如第一圖所 不其中S亥光源（1 〇)的雷射光束係射入分光鏡（2 1)中， 其中一光束係穿過該聚焦透鏡（22)而射向該楔形鏡 (23)，並經由該楔形鏡（23)反射而經過該聚焦透鏡（22) 與分光鏡(2”後，使光源(1〇)的光點落在該二維位置 靈敏檢測器（31)的檢測面（311)上，此時該二维位置靈 敏檢測器（31)會感測到光源（1〇)的重心位置，設定以 該二維位置靈敏檢測器(3 ”的中心為平面座標：中心 位置，則光源（10)的光點重心會如第二圖所示在某個 初始角度上，其中當待測物的旋轉軸(4〇)轉動則光源 ⑽的光點會如第三圖所示’以該二維位 器（31)的中心為圓心且卩R為半徑的方式旋轉，心 二維位置靈敏檢測器(31)所接收到的訊就 :： 號處理電路(32)即可知道角度的變化量， ::： 的旋轉軸(40)如為-移動平台的導螺桿，則可二 推算出平台的位移量； 由即距 由視準儀原理可得到式（1) 其中如第一圖所示， . R tan(2«)=— 其中如第四圖所+幺 汁不為不同各角度與焦距時，夫 8 (1) 201142238 的I作半徑關係表，可搭配相同尺寸的二維位置靈敏 檢測器（31)檢測面（311)進行使用； 並且由二維位置靈敏檢測器（3 1)的原理可得到式 (2) ’其中丨彳、丨2、丨3、丨4為二維位置靈敏檢測器（31)的 四個輸出電流，D則為二維位置靈敏檢測器（31)檢測 面（311)的寬度： Δχ 2/,+/3 (2)The rotating angle measuring system of the present invention is used in a laser beam (1 〇) in which the laser beam is incident on the beam splitter (2 1), wherein a beam passes through the focusing lens ( 22) and directed to the wedge mirror (23), and reflected by the wedge mirror (23) and passed through the focusing lens (22) and the beam splitter (2", so that the light spot of the light source (1〇) falls on the two On the detection surface (311) of the dimensional position sensitive detector (31), the two-dimensional position sensitive detector (31) senses the position of the center of gravity of the light source (1〇), and sets the two-dimensional position sensitive detector. The center of (3 ” is the plane coordinate: the center position, and the center of gravity of the light source (10) will be at an initial angle as shown in the second figure, wherein the rotation axis (4〇) of the object to be tested is rotated. The light spot of (10) will rotate as shown in the third figure, with the center of the two-dimensional positioner (31) as the center and the radius of the radius R, and the signal received by the two-dimensional position sensitive detector (31). The number of processing circuits (32) can be used to know the amount of change in angle. The rotation axis (40) of ::: is the lead screw of the mobile platform. The amount of displacement of the platform; from the distance is obtained by the principle of the collimator (1), as shown in the first figure, R tan(2«)=—where the fourth figure is not different angles In the case of focal length, the radius relationship table of I 8 (1) 201142238 can be used with the detection surface (311) of the same size two-dimensional position sensitive detector (31); and by the two-dimensional position sensitive detector (3 1 The principle of (2) 'where 丨彳, 丨2, 丨3, 丨4 are the four output currents of the two-dimensional position sensitive detector (31), and D is the two-dimensional position sensitive detector (31) Width of the detection surface (311): Δχ 2/, +/3 (2)

其中將Δχ與的電流訊號透過放大電路而轉換為 電壓訊號並傳送至訊號處理組（3 〇)中，再由如第五圖 所示之各象限的表示方式： (3) 第一象限= tarT1 (艺）第二象限= π十tan-1 (艺) 第: ί 象限々 θ = π + tan—’ (盖）第四象限= 2π + tan—1 (f) 將方程式（2)中所求出的Αχ:與~待入上述的方程式 (3)即可求出角度0 ’若下一時刻的角度為0，，則此 時間内的角度變化量： △Θ⑴⑴-_ ⑷ 再將方程式（4)的ΔΘ⑴對時間⑴由量測開始t = 〇至 量測結束t = n進行積分’即可得到量測過程中的總角 度變化量： Θ- = L ⑺汾 （5) 另外，該訊號處理電路（32)的訊號處理流程係如 第六圖所示，透過§礼號處理的方式，即可方便地得到 旋轉角度量Δ0。 201142238 藉由上述的技術手段’本發明旋轉角度量測系 統，主要係藉由二維位置靈敏檢測器（31)，可準確地 判斷光點在檢測面（311)上的位置特性，並且利用二 維位置靈敏檢測器（31)兩輛向的比值做為角度判斷的 參數’使其在各種轉速下皆能進行角度的檢測，相對 增加旋轉角度量測系統的穩定性，再則，另外，本發 明旋轉角度量測系統可得到解析度〇〇3。以下的高精 度檢測，®此可有效避免因偏心而造成的角度量測言; 產，藉以提供一方便架設且可避免因偏心而造成量測 誤差的旋轉角度量測系統者。 以上所述’僅是本發明的較佳實施例，並非對本 心月作任何形式上的限制，任何所屬技術領域中具有 I㊉知4者，若在不脫離本發明所提技術方案的範圍 内，利用本發明所揭示技術内容所作出局部更動或修 飾的等效實施例，並且未脫離本發明的技術方案内 谷’均仍屬於本發明技術方案的範圍内。 【圖式簡單說明】 第 圖係本發明旋轉角度量測系統之操作原理示 意圖。 第一圖係本發明二維位置靈敏檢測器之側視示意 圖。 一 二圖係本發明二維位置靈敏檢測器之操作側視 圖。 10 201142238The Δχ and the current signal are converted into voltage signals through the amplifying circuit and transmitted to the signal processing group (3 〇), and then represented by the quadrants as shown in FIG. 5: (3) First quadrant = tarT1 (Art) Second Quadrant = π 十tan-1 (Art) No.: ί Quadrant 々 θ = π + tan—' (Cover) Fourth Quadrant = 2π + tan—1 (f) Equation (2) The Αχ:: and ~ can enter the above equation (3) to find the angle 0 ' If the angle of the next moment is 0, then the amount of angular change during this time: △ Θ (1) (1) - _ (4) Then the equation (4 The ΔΘ(1) versus time (1) is measured by the start of the measurement t = 〇 to the end of the measurement t = n, and the total angular change during the measurement can be obtained: Θ- = L (7) 汾 (5) In addition, the signal processing The signal processing flow of the circuit (32) is as shown in the sixth figure, and the rotation angle amount Δ0 can be conveniently obtained by the method of the ancestry processing. 201142238 The above-mentioned technical means 'the rotation angle measuring system of the present invention mainly uses the two-dimensional position sensitive detector (31) to accurately determine the positional characteristics of the light spot on the detecting surface (311), and utilizes two The dimensional position sensitive detector (31) compares the ratio of the two directions as the parameter of the angle judgment, so that the angle can be detected at various speeds, and the stability of the rotation angle measurement system is relatively increased, and in addition, this The resolution 〇〇3 can be obtained by inventing the rotation angle measuring system. The following high-precision test, this can effectively avoid the angular measurement caused by eccentricity; to provide a rotating angle measurement system that is easy to set up and avoids measurement errors due to eccentricity. The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any one of the technical fields in the art may be within the scope of the technical solution of the present invention. Equivalent embodiments that make local modifications or modifications made by the teachings of the present invention, and which do not depart from the technical solutions of the present invention, are still within the scope of the technical solutions of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS The drawings are schematic illustrations of the operational principle of the rotational angle measuring system of the present invention. The first figure is a side view of a two dimensional position sensitive detector of the present invention. The second diagram is an operational side view of the two-dimensional position sensitive detector of the present invention. 10 201142238

第四圖係本發明不同各^ 作半徑關係表。 第五圖係本發明二維位： 處理示意圖。 第六圖係本發明訊號處 圖。 【主要元件符號說明】 (1〇)光源 (20) 感測組 (21) 分光鏡 (23)楔形鏡 (30) 訊號處理組 (31) 二維位置靈敏檢測器 (32) 訊號處理電路 (40)待測物旋轉軸 丨度與焦距時’光點的工 【靈敏檢測器上角度運算 理電路之邏輯關係方塊 (22)聚焦透鏡 (231)聯軸器 (31 1)檢測面The fourth figure is a table of different radius relationships of the present invention. The fifth figure is a two-dimensional position of the invention: a schematic diagram of the process. The sixth figure is a diagram of the signal of the present invention. [Main component symbol description] (1〇) light source (20) sensing group (21) beam splitter (23) wedge mirror (30) signal processing group (31) two-dimensional position sensitive detector (32) signal processing circuit (40 ) The rotation axis of the object to be tested and the focal length of the 'light point' work [the logical relationship between the angle detector circuit of the sensitive detector (22) focusing lens (231) coupling (31 1) detection surface

Claims (1)

201142238 七、申請專利範圍： 1. 一種旋轉角度量測系統，其係包含有一光源、 一感測組及一訊號處理組，其中： 該光源係為一雷射光束； 該感測組係用以接收該光源且設有一分光鏡、一 聚焦透鏡與一楔形鏡，該分光鏡係用以接收該光源的 雷射光束並將其均分為兩道光束，其中一光束係垂直 穿過該聚焦透鏡的中心點，該楔形鏡係設於一待測物 的旋轉軸上，藉以接收經該聚焦透鏡聚焦的雷射光 束’並將其反射回該分光鏡；以及 該訊號處理組係用以接收該感測組經反射的雷射 光束且設有一二維位置靈敏檢測器及一訊號處理電 路’該二維位置靈敏檢測器係設有一用以接收光源經 模形鏡反射並經由該聚焦透鏡與分光鏡而射入該二維 位置靈敏檢測器的檢測面上’而該訊號處理電路係與 5亥二維位置靈敏檢測器相電連接，該訊號處理電路係 可對於該二維位置靈敏檢測器上相對應光點所輸出的 訊號進行處理，即可準確地求得待測物旋轉軸的位 置。 2 ·如申專利範圍第1項所述之旋轉角度量測系 統，其中該雷射光束係為一二極體雷射。 3.如申叫專利範圍第1或2項所述之旋轉角度量 叫系統，#中該楔形鏡係言史冑一與待測物旋轉轴相結 12 201142238 合的聯軸器。 4.如申請專利範圍第3項所述之旋轉角度量 統，其中該二維位置靈敏檢測器的檢測面係為一 公厘的平面。 5 ·如申請專利範圍第4項所述之旋轉角度量 統，其中該二維位置靈敏檢測器的解析度可達] U m)，將其換算為角度感測的解析度約為〇 〇3。 6 _如申請專利範圍第1項所述之旋轉角度量 統，其中該二維位置靈敏檢測器的檢測面係為一 公厘的平面。 7.如申請專利範圍第1項所述之旋轉角度量 統，其中該二維位置靈敏檢測器的解析度可達^ (# m)，將其換算為角度感測的解析度約為〇 〇3。 八、圖式：（如次頁) 測系 4x4 測系 微米 〇 測系 4x4 測系 微米201142238 VII. Patent application scope: 1. A rotation angle measuring system, comprising: a light source, a sensing group and a signal processing group, wherein: the light source is a laser beam; the sensing group is used for Receiving the light source and providing a beam splitter, a focusing lens and a wedge mirror, the beam splitter is configured to receive the laser beam of the light source and divide it into two beams, wherein a beam of light passes vertically through the focusing lens a center point, the wedge mirror is disposed on a rotation axis of the object to be tested, thereby receiving a laser beam focused by the focus lens and reflecting it back to the beam splitter; and the signal processing group is configured to receive the Sensing the reflected laser beam and providing a two-dimensional position sensitive detector and a signal processing circuit. The two-dimensional position sensitive detector is provided with a light source for receiving the light reflected by the lens mirror and via the focusing lens. The beam splitter is injected into the detecting surface of the two-dimensional position sensitive detector, and the signal processing circuit is electrically connected to the 5H two-dimensional position sensitive detector, and the signal processing circuit can The signal processing-dimensional position sensitive detector corresponding to the output spot can be accurately determined position of the rotary shaft analyte. 2. The rotation angle measuring system of claim 1, wherein the laser beam is a diode laser. 3. For the rotation angle quantity system described in claim 1 or 2 of the patent scope, the wedge mirror is the coupling of the hinge axis of the object to be tested 12 201142238. 4. The rotation angle measurement of claim 3, wherein the detection surface of the two-dimensional position sensitive detector is a one-millimeter plane. 5 · The rotation angle system described in claim 4, wherein the resolution of the two-dimensional position sensitive detector is up to U m), and the resolution of the angle sensing is about 〇〇3 . 6 _ The rotation angle measurement according to claim 1, wherein the detection surface of the two-dimensional position sensitive detector is a one-millimeter plane. 7. The rotation angle system according to claim 1, wherein the resolution of the two-dimensional position sensitive detector is up to ^ (# m), and the resolution of the angle sensing is about 〇〇 3. Eight, the pattern: (such as the next page) measuring system 4x4 measuring system micron 〇 measuring system 4x4 measuring system micron
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