200905156 九、發明說明： 【發明所屬之技術領域】 本發明提供一種可應用於角度量測的光學讀寫頭， 關於二種使用光學讀寫頭與原子力顯微鏡搭配，來進行位ϋ 角度量測。 【先前技術】 自光碟機發展以來，資訊儲存的方式由磁記錄向 ，’對於資訊齡的能力大幅邁進。拜科技進步所賜 & =先前CD的650ΜΒ到DVD的4.7GB，還有最新發展的高 饴度 DVD ( Hlgh Density DVD，HD-DVD )跟玆弁 m^(Biue-rayDVD) ’容量更是一口氣提升到15gb，充^顯 身流通及人類對大量儲存的渴望。在光碟機的 由、子5f寫頭扮演相當關鍵的角色，資料讀取過程是經 執聚焦在碟片上，糊聚焦誤差訊號以及循 iiii達，限，具備有高解析的光學量測特性，因此自 先予=寫頭發展出來，科學家便想應用於各式的量測用途。 於特ίί 力顯微鏡僅能測量位移且價格昂貴，同時必須 穿特乍’如此僅能舰於學術上或者少量樣品的研 ί偈限 大_品的量測以及工廠環境内，因此貢獻備 鏡季ί鑑ΐϋΐ必要提供一種結合光學讀寫頭的原子力麵 擁有位移量測及角度量測的能力，並且價格便宜、操 【發明内容】 寫頭的在於提供一種可應用於角度量測的光學讀 力，夂你以微鏡系統搭配擁有位移量測及角度量測的能 刀並且^格便宜、操作方便。 為了貝現本發明之目的，本發明提供一種可應用於角度量 200905156 ί的ίίί寫』貝於包括雷射二極體、柱面透鏡、準直鏡、分光 鏡、反射鏡、物鏡、巡執起動器、四象限 兄二光 係，以便確定鄕及狀與訊面偏移的關 貴，彳fμ ’她_轉且價格昂 詈機口 作’如此僅能舰於學術上或者少 罝樣印的研九，無法應祕大量樣 ，貢獻備受侷限。本發明光學讀寫頭應用於Ϊ度用 待產二找出四I限制器得到的訊號與 【實施方式】 邱山明所备應用之原理係利用一柱面透鏡使訊號產生像 iiii象限制器得到的訊號與待測面偏移的關係，確 疋角又與訊號變化的關係。從而達成位移及角度量測的目 的。 本發明之應用於角度量測的光學讀寫頭設計方法包括以 下步驟：200905156 IX. Description of the Invention: [Technical Field] The present invention provides an optical pickup that can be applied to an angular measurement, and two types of optical read/write heads are used in combination with an atomic force microscope to perform positional angle measurement. [Prior Art] Since the development of the optical disc drive, the way of information storage has been shifted from magnetic recording to 'the ability to information age. Thanks to the advancement of technology & = 6.5 先前 of the previous CD to 4.7GB of DVD, and the latest development of high-definition DVD (Hlgh Density DVD, HD-DVD) and 弁m^ (Biue-rayDVD) 'Capacity is Lifted to 15gb in one breath, full of circulation and human desire for mass storage. In the CD player, the sub-5f write head plays a very important role, the data reading process is focused on the disc, the paste focus error signal and the limit, with high resolution optical measurement characteristics, Therefore, since the development of the first = write head, scientists want to apply to various types of measurement purposes. The Uttra force microscope can only measure displacement and is expensive, and must wear special features. So it can only be used in the academic or small sample of the measurement and the factory environment, so contribute to the preparation period. Ϊ́ϋΐ ΐϋΐ ΐϋΐ ΐϋΐ ΐϋΐ ΐϋΐ ΐϋΐ ΐϋΐ 结合 结合 结合 结合 结合 结合 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子 原子夂You use the micro-mirror system with a knives with displacement measurement and angle measurement and it is cheap and easy to operate. For the purpose of the present invention, the present invention provides an ί 于 于 于 200 200 905 905 905 905 905 200 200 200 200 200 200 200 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于Starter, four quadrants, two light systems, in order to determine the relationship between the shape of the 鄕 and the signal offset, 彳fμ 'her _ turn and the price of the mouth to make 'so only ship can be academic or less The research of the nine, can not be asked a lot of secrets, contributions are limited. The optical read/write head of the present invention is applied to the signal obtained by finding the four-I limiter for the second generation of the defect and the method for the application. The principle of the application of Qiu Shanming is to use a cylindrical lens to generate a signal like the iiii like a limiter. The relationship with the deviation of the surface to be measured, and the relationship between the angle and the signal change. Thereby achieving the purpose of displacement and angle measurement. The optical pickup design method for angle measurement of the present invention comprises the following steps:
一，參照第一圖所示，提供一種應用於角度量測的光學讀寫 頭’ 3亥光學讀寫頭包括巡執起動器Η、物鏡1、反射鏡2、準 直崔兄3、分光鏡4、雷射一極體5、、柱面透鏡6、四象限偵測 器(PDIC)7，其中’柱面透鏡6使待測面所反射回來的光訊號 產生像散，由四象限偵測器(PDIC)7接收，請參照第二圖所示， 該四象限偵測器(PDIC)7將光訊號轉為電訊號’從而完成訊號 的擷取，擷取後的訊號分別VA、VB、Vc及VD，經由下列三 種運算式運算後，確定出位移及角度與訊號變化的關係。從而 達成位移及角度量測的目的。First, as shown in the first figure, an optical read/write head for angle measurement is provided. The 3H optical read/write head includes a patrol starter 物, an objective lens 1, a mirror 2, a collimation Cui brother 3, and a beam splitter. 4, a laser body 5, a cylindrical lens 6, a four-quadrant detector (PDIC) 7, wherein the 'cylindrical lens 6 causes the optical signal reflected by the surface to be measured to generate astigmatism, and is detected by four quadrants. (PDIC) 7 receives, please refer to the second figure, the four-quadrant detector (PDIC) 7 converts the optical signal into a signal signal to complete the signal acquisition, and the extracted signals are respectively VA, VB, Vc and VD, through the following three arithmetic operations, determine the relationship between displacement and angle and signal change. Thereby achieving the purpose of displacement and angle measurement.
運异式：NFES = Va + Vc - VB - Vd X signal = VA + VB - Vc - VD 200905156 Y signal = Va+vd.Vb.Vc 由於待測面的角度變化可以由其他機構進行控制，與系統 的座標可能有不同處，因此將待測面座標以區域座標（1^沉&1 coordinate)單獨定義’請參照第三圖所示顯示模擬量測時待測 面的座標定義。角度沿X軸旋轉定義為atilt，逆時針旋轉定 義為正值；角度隨Y軸旋轉定義為ptilt，逆時針旋轉定義為 正值。由於原子力顯微鏡量測的範圍在次微米到奈米之間，本 發明對於姉及肖度的變化分作三個部份騎分析，分別為待 測面位移為零時，單獨的atilt，單獨的p诎、與χ軸夾衫。 方向以及與X軸夾135。方向，肖度變化的範圍設定在土 2. 5。 之間；待測面位移為l,時，單獨的㈣，單獨的_、盘 ^由夾45。方向以及與X轴夾135。方向，角度變化的範圍設 疋在2. 5之間，待測面位移為_1师時，單獨的atiit，單獨 的ptdt、與X軸夾45。方向以及與χ轴夾135。方向，角度變 化的範圍設定在±2. 5。之間。 '、里由以上的分析，可以理解臟S、X輯與γ訊號，可 以協助判斷制面的轉量及傾斜方向。 由杜綜ί所述^本發明符合發明專利之要件，爰依法提出專利 實施例為限，舉凡熟習本案』藝之人 利ί圍内 敎修祕變化，皆應涵蓋独下申請專 【圖式簡單說明】 鏡產生像散讀寫頭的光 第一圖係本發明之使用柱面透 學系統結構示意圖。 圖係本發明之四象限偵測器結構示意圖。 f二Ξ係本發明之4測時待測面的座標定義示意圖。 J ΐ係本發明之待測_移為零時a tilt各訊號變化情 形式思圖 S f ΐ本發明之制面位移為料βtnt各訊號變化情 形式思圖 ^ 2本發明之待測面位移為零時45。各訊號變化情 本發明之待測面位移為零時135。各訊號 變化情 Ιμιη時a tilt各訊號變化 第八圖係本發明之待測面位移為 情形式意圖 ίί 發明之待測面位移為1_時P仙各訊號變化 發明之待測面位移為1叫時45。各訊號變化 ^形it發明之待測面位移為1哗時135。各訊號變 :Ϊ形:^發明之待測面位移為~1 μΠ1時atUt各訊號變 ^ Ϊ 3 本發明之待測面位移為—一時β t i技各訊號變 化情形式意圖 f 3 ΐ本發明之待測面位移為-1 時45。各訊號變 化情形式意圖 發明之待測面位移為_1μΠ1時135。各訊號變 200905156 【主要元件符號說明】 物鏡 1 巡執起動器 反射鏡 2 準直鏡 分光鏡 4 雷射二極體 柱面透鏡 6 四象限偵測器(PDIC)Operational variant: NFES = Va + Vc - VB - Vd X signal = VA + VB - Vc - VD 200905156 Y signal = Va+vd.Vb.Vc Since the angle of the surface to be measured can be controlled by other mechanisms, and the system The coordinates of the coordinates may be different, so the coordinates of the surface to be tested are defined separately by the area coordinates (1^Sink & 1 coordinate). Please refer to the third figure to show the coordinate definition of the surface to be tested during the analog measurement. The rotation of the angle along the X axis is defined as atilt, and the counterclockwise rotation is defined as a positive value; the rotation of the angle with the Y axis is defined as ptilt, and the rotation of the counterclockwise is defined as a positive value. Since the range of measurement by atomic force microscopy is between submicron and nanometer, the present invention divides the variation of enthalpy and diametry into three parts, respectively, when the displacement of the surface to be measured is zero, the individual atilt, alone. p诎, and the shaft of the shirt. Direction and clip 135 with the X axis. Direction, the range of the degree of change is set in the soil 2. 5. Between; the displacement of the surface to be measured is l, when it is separate (four), the separate _, the disk ^ by the clamp 45. Direction and clip 135 with the X axis. Direction, the range of angle change is set between 1.25, when the displacement of the surface to be tested is _1 division, the individual atiit, the separate ptdt, and the X-axis clamp 45. Direction and clamp 135 with the cymbal. 5。 The direction, the range of angle change is set at ±2.5. between. ', from the above analysis, you can understand the dirty S, X and γ signals, can help determine the rotation and tilt direction of the noodle. The invention is in accordance with the requirements of the invention patents, and is limited to the patent embodiments in accordance with the law. Anyone who is familiar with the case may be covered by the application of the artist. Brief Description of the Invention The first image of the astigmatism head produced by the mirror is a schematic diagram of the structure of the cylindrical transillumination system of the present invention. The figure is a schematic diagram of the structure of the four-quadrant detector of the present invention. f is a schematic diagram of the coordinates of the 4 test surface to be tested according to the present invention. J ΐ 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 移 移 移 移 移 移 移 移 移 a a 移 移 tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt tilt It is 0:45. Each signal change is 135 when the displacement of the surface to be tested of the present invention is zero. When the signal changes Ιμιη, a tilting signal changes. The eighth figure is the displacement of the surface to be tested according to the invention. ίί The displacement of the surface to be tested of the invention is 1_, and the displacement of the surface to be measured by the invention is 1 Called 45. Each signal change is 135 when the displacement of the surface to be tested is 1 哗. Each signal change: Ϊ shape: ^ When the displacement of the surface to be tested is ~1 μΠ1, the atUt signals change ^ Ϊ 3 The displacement of the surface to be tested according to the present invention is - one time β ti technology each signal change form intention f 3 ΐ the present invention The displacement of the surface to be measured is -1 to 45. The meaning of each signal change form is that the displacement of the surface to be tested of the invention is _1μΠ1. Each signal change 200905156 [Main component symbol description] Objective lens 1 Patrol starter Mirror 2 Collimation mirror Beam splitter 4 Laser diode Cylindrical lens 6 Four-quadrant detector (PDIC)