1285254 %年v月p曰修(t)正替換貫 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種高精度熱變形量測系統，特別針對旋轉軸 會因溫度上升所產生平移誤差、角度偏移作量測，利用具有低成 本、精簡化之架構，以及光學反射原理之達成，即可有效解決傳 統以探針量測所致之困難，以達到高精度之旋轉軸量測技術。 【先前技術】 按，一般工具機之旋轉軸A具有多自由度的誤差，實際運動 時，會因溫度影響，而在基準軸上產生X、Y、Z三方向的六自由 度誤差；如圖一所示，關於六自由度誤差，其包括三個線誤差， 即εχ(θ)、ε/θ)、εζ(θ)，與三個角誤差，即俯仰（Pitch)度誤差 δχ(θ)、搖擺（Yaw)度誤差δγ(θ)及滾動（Roll)度誤差δζ(θ)。 由於旋轉軸Α是經由主軸Μ、軸承、驅動器等元件組裝而成， 會因為元件尺寸的誤差、元件間配合度等關係，而產生具有多自 由度的誤差，機器中之旋轉軸A的特性將影響整台機器的精度與 加工產品的品質’因此’被加工之精密工件的加工尺寸皆需要考 慮六個自由度的誤差。 而隨著旋轉軸A量測技術的發展，就目前所使用之旋轉軸A 量測技術有以下幾種分類，如下所述： 一、直接使用標準球（master ball)/軸（axis)/棒 (cylinder)，但不補償旋轉軸A之誤差： 5 1285254 月μ μ:⑵正替換頁 此方法是最早期的旋轉軸Α量測技術，由於此技術會受限於 標準棒/球的加工精度，故不適用於高精度量測，因在2〇〇〇年12 月Eric的論文，其提供之技術可測得1 μ m解析度，然而在羅伯 特E· Gleason文章，他提出以目前加工技術極限，標準球之球度 (out 〇f roundness)為75⑽，以Air Spindle之極限精度可達 到50 nm，故此第一類方法以目前的技術而言，尚無法達成。1285254 %年月月月月曰曰(t) is being replaced by ninth, invention description: [Technical Field] The present invention relates to a high-precision thermal deformation measurement system, particularly for a rotation axis which is caused by temperature rise Error and angular offset measurement, using low cost, streamlined architecture, and optical reflection principle, can effectively solve the difficulties caused by traditional probe measurement, to achieve high precision rotation axis measurement technology. [Prior Art] Press, the rotary axis A of the general machine tool has multiple degrees of freedom error. In actual motion, six degrees of freedom errors in the X, Y, and Z directions are generated on the reference axis due to temperature effects; As shown, with respect to the six-degree-of-freedom error, it includes three line errors, namely εχ(θ), ε/θ), εζ(θ), and three angular errors, ie, pitch error δχ(θ). , Yaw degree error δ γ (θ) and rolling (Roll) degree error δ ζ (θ). Since the rotating shaft 组装 is assembled by components such as a spindle 轴承, a bearing, a driver, and the like, an error having a plurality of degrees of freedom is generated due to an error in the size of the component, a degree of fit between the components, and the like, and the characteristics of the rotating shaft A in the machine will be Affects the accuracy of the entire machine and the quality of the processed product. Therefore, the machining dimensions of the precision workpiece to be machined need to consider the error of six degrees of freedom. With the development of the rotating axis A measuring technology, the rotating axis A measuring technology currently used has the following classifications, as follows: 1. Direct use of the standard ball (axis) / axis (axis) / rod (cylinder), but does not compensate for the error of the rotation axis A: 5 1285254 month μ μ: (2) positive replacement page This method is the earliest rotation axis measurement technology, because this technology will be limited by the standard rod / ball processing accuracy Therefore, it is not suitable for high-precision measurement, because in the paper of Eric in December of the next year, the technology provided can measure 1 μm resolution. However, in the article of Robert E. Gleason, he proposed the current processing technology. The limit, the standard sphericity of the ball (out 〇f roundness) is 75 (10), and the ultimate accuracy of the Air Spindle can reach 50 nm, so the first type of method is still impossible to achieve with the current technology.
直接使用標準球（master ball)/ 轴（axis)/ 棒 (cylinder)，但補償旋轉轴a之誤差，補償方式為單探 定（multi-steps):Use the master ball/axis/cylinder directly, but compensate for the error of the rotary axis a. The compensation method is multi-steps:
對於採用單（多）探頭（Prode)Pxi、Px2、Ργι、P ^ Ρζι多次設定 是將旋轉軸A誤差分離的第一種方法，如圖二所示· ,、而，上述 旋轉軸A之誤差必須再加以分離，分解才能得到所+ • 1而之解析精 度；有關此論文之發表皆以數學理論為主，部分以模擬為辅For the use of single (multiple) probes (Prode) Pxi, Px2, Ργι, P ^ Ρζι multiple settings is the first method to separate the rotation axis A error, as shown in Figure 2, and the above rotation axis A The error must be separated and decomposed to get the resolution accuracy of + 1; the publication of this paper is based on mathematical theory, partly supplemented by simulation.
本分析是建立之模式，但皆未能有實際之用途；而其基本才二 如圖三所示，於量測時候需架設多次，每架設一次鼍 里取一次參考 點（Reference Point)S資料，量測方式係依不同指定& 月度位置固 定探頭P’^'P”2;故其技術最困難之部份，就是角伋置〜 欠位不易， 有偏心問題，還有待測旋轉轴（Tested Spindle)T及旋轉差^ 之重複性（repeatability)，以及固定探頭P'、P，，2>去… 董複性，此 方法必須克服之處。 三、使用Reversal technique (反轉技術）： 6 1285254 矽年9月⑽.(更、正雜頁. 如圖四所τΓ反轉技術亦是旋轉轴a量測技術中最早以姨 分離之發明’雖此技術就當時而言，確實提供很大之貢獻;S、差 此方法，理論上也是前述mult卜steps之一 種簡化方法 雖是最簡單，最直接，卻^；且 > 1不易達到高準確度，原 multi-steps之困難點。 ’此方 法 因如前述 基於此，本&月有鐘於上述傳統旋轉軸a量測技術有不 易達 到高精度之缺失’秉持著精益求精之理念，以及多年從事 術研究及發明之實務經驗，牿則a 符學 針對此項技術不斷研發，迷 驗及測試，終而成功創造出前及實 厅未有之高精度旋轉軸熱變形< 系統，乃利用低成本及精簡仆+ ★ 里唰 <架構，運用一般雷射光反射 理，即能有效且精準量測出# 的原 印峡轉輛之自由度誤差。 【發明内容】 本發明之目的在於提供 種高精度旋轉軸熱變形量测έ 統，利用取得容易且低成本 ’、系 乂不之精簡架構，運用一般光反射 理，即能有效且精準量測出斿Μ Α 屬 疋轉輛之自由度誤差，使其精度 勝於前述傳統之探頭量測，熹 、 疋目則旋轉軸量測技術所無法達到 可 為達本發明上揭目的之— 種高精度旋轉軸熱變形量測系 -仙反射鏡置於夾置具，I將夾置具裝在旋轉軸上，其以 :雷射二極體經過一分光鏡照射在該旋轉轴所架設之反射鏡以 量測其旋轉軸誤差’此時經^射鏡產生反射光，_分光鏡產 生透射光及反料分別照射在兩個光感測器上，再#點的變化 1285254 丫¢)年月[必修便、疋替換頁 來量測求得自由度誤差；據此，當旋轉軸有誤差時，會造成反射 光的變化，進而影響到反射光打到光感測器上之位置，再經由數 學運算後而得到其平移與角度誤差值。 【實施方式】 為使貴審查委員進一步了解本發明於前述之發明目的及 特徵，茲配合最佳實施例及圖面詳細說明如下： 有關本發明設計之高精度旋轉軸熱變形量測系統所採技術 手段及功效’兹以最佳之實施例及配合圖示詳述於下： 如圖五所示，本發明係提供一種高精度旋轉軸熱變形量測系 統，其結構包括： 反射鏡1，其尺寸約為1mm X 1mm，為將光線做180度的轉 折，其設置於夾置具（如微型銑床、微型鑽床、微型雕刻機等微 型加工母機），並藉夾置具裝設在旋轉軸10上，為供光學讀寫頭 2之照射而產生反射光； ® 光學讀寫頭2，係為數位光碟機D V D之讀寫頭，其設立於 f近旋轉軸10側方處，其内建發射雷射光源及可將光線作90度 轉折之光路（圖中未示），為供發射雷射光線至連接旋轉軸10之 反射鏡1上。 分光鏡3，係設立於鄰近光學讀寫頭2之相對應處，以方型 分光鏡為最佳運用，圓板型分光鏡亦可，而方形分光鏡之特點是 比圓板型分光鏡有較大的穿透和反射的接觸面積，該分光鏡3使 8 正替換3 1285254 雷射光線作90度轉折，並供反射鏡1之反射光經過，而產生分 光，即分出二道光（垂直及水平方向）；一道光為透射光，為供 穿過雙凸透鏡4打入第一光感測器5，以量測旋轉軸之俯仰度誤 差δχ(θ)、搖偏度誤差δγ(θ)等角度偏移數值；另一道光為反射光， 返回光學讀寫頭2而經其内部光路將光線轉折90度後，直接打 入第二光感測器6,以測量旋轉軸之位移誤差訊號（線誤差εχ(θ)、 ε/θ))與角度誤差訊號（角誤差δχ⑻、δγ(0))。 ® 雙凸透鏡4,係設置於鄰近光學讀寫頭2之另一相對應位置， 為供上述分光鏡3所分之透射光穿透，以供過濾透射光的位移訊 號’而使第一光感測器5能得到旋轉軸1 〇的角度偏移訊號； 第一光感測器5，其係為四象線光感測器，設置於鄰近雙凸 透鏡32之相對應處，為依據光點的變化來量測，再經由類比/數 位轉換卡（A/D卡）轉換求得俯仰度誤差δχ(0)、搖偏度誤差δγ(θ) 等角度偏移數值之自由度誤差。 第二光感測器6 ’其係為四象線光感測器，設置於鄰近光學 讀寫頭2之側方處，亦依據光點的變化來量測，再經由類比/數 位轉換卡轉換求得位移與角度誤差訊號之自由度誤差。 如圖六及圖七所示，本發明高精度旋轉軸熱變形量測系統之 没计，於貫施量測時，係利用光學讀寫頭2之雷射光源以一 γ方 向產生雷射光束之發射後，先通過一分光鏡3反射至旋轉軸1〇 上的lmmxlmm反射鏡（丨），使照射在反射鏡1之雷射光束產生反 9 、替換頁; 1285254 射光’此反射光穿過分光鏡3’而分成透射光與反射光，該透射 光，再穿過雙凸透鏡4後，打入第一光感測器5，如此一來，可 藉第一光感測器5以求得量測旋轉軸1〇之俯仰度誤差δχ、搖偏 度誤差δγ等角度偏移數值；該反射光，再返回光學讀寫頭2而經 其内部光路將光線轉折90度後，直接打入第二光感測器6，如此 一來，可藉第二光感測器6以測量旋轉軸之位移與角度誤差訊號。 此外，對於前述第一及第二光感測器4、5再經由類比/數位 轉換卡轉換及數據運算後即可精確求得其自由度誤差。 亦即，當旋轉軸10因溫度上升所產生平移誤差（線誤差 εχ(θ)、sy(0))、角度偏移（角誤差心(0)、^0))時，會造成由 旋轉軸10連結反鏡鏡1產生反射光的變化，進而影響到反射光 打到第一光感測器5及第二光感測器6上之位置，再依據光點的 變化來量測，再經由數學運算後而得到其平移與角度誤差值。 因此’本發明之高精度旋轉軸熱變形量測系統，所使用之反 射鏡1、具雷射光源及光路之光學讀寫頭2、分光鏡3、雙凸透鏡 4、第一象限光感測器5及第二光感測器6，具有如下之特點： 1、 反射鏡1 :可將光線做180度的轉折，縮小量測架構。 2、 光學5買寫頭2·取得容易，成本低，而且光學讀寫頭2 其内建發射雷射光源及可將光線轉折90度之光路，無 需使用價格昂貴之雷射二極體以及又得搭配另一分光 鏡之使用。 1285254 i : .. .·，，和.-,一·.·"·v -- · **ynd^vmr -ϊγΤλΛ 3、 分光鏡3:可將反射光源經過分光鏡3後再產生分光（垂 直及水平方向）效果之現象。 4、 雙凸透鏡4 ··可過濾透射光源的位移訊號，使得第一光 感測器5能得到旋轉軸1 〇的角度偏移訊號。 5、 第一光感測器5、第二光感測器6 :兩者皆依據所接收 之光點的變化來量測，再經由類比/數位轉換卡轉換求 得旋轉軸於溫度上升時所產生其他自由度誤差；惟第一 光感測器5必須透過雙凸透鏡4先過濾透射光源的位移 訊號，即可求得量測旋轉軸之俯仰度、搖偏度等角度偏 移數值；而第二光感測器6則可量測出旋轉軸之位移與 角度誤差訊號，最後再類比/數位轉換卡轉換及數據運 算後即可精確求得其自由度誤差。 上列詳細說明係針對本發明之—可行實施例之具體說明，惟 該實施例並非用以限制本發明之專利範圍，凡未脫離本發明技藝 精神所為之等效實施或變更，均應包含於本案之專利範圍中。 綜上所述，本案*但在方法上確屬缝，並陳習用處理方 法增進上述多項功效’應已充分符合新穎性及進步性之法定發明 專利要件，纽法提出中請，_貴局核准本件發明專利申請 案’以勵發明，至感德便。 【圖式簡單說明】 圖一為傳統旋轉軸的六自由度誤差示意圖； 11 1285254 「一〜——一_ 6年7¾ 你巧正替換頁 u ...... ....^ 圖二為傳統採用單⑷探頭多次設一定^ 圖：為傳統採用單(多)探頭多次設定的探測動作圖(_); 圖:A為傳統採用單（多）探頭多次設定的探測動作圖（二） 圖二B為傳統採用單（多）探頭多次設定的探測動作圖（三） 圖四為傳統採用反轉技術的探測動作圖（一）； 圖四A為傳統採用反轉技術的探測動作圖（二）； 圖五為本發明的探測原理圖； 鲁圖六為本發明的探測動作圖；以及 圖七為本發明的量測流程圖。 【主要元件符號說明】 1反射鏡 2光學讀寫頭 3分光鏡 4雙凸透鏡 Φ 5第一光感測器 6第二光感測器 10旋轉軸 XI、X2探頭 Yl、Y2探頭 PI、P2探頭 Z1探頭 p X軸線誤差 12 1285254 ?怦7月π日修復)正替換頁 ^-1 . _ . II.W*· Ί >n I- r -r,,,·, -ιιΓ·- -I , -«!.·** ····» r* 产_·» ι_ _ p Y軸線誤差 by εζ Z軸線誤差 &俯仰度誤差 S搖擺度誤差 °yThis analysis is a model for establishment, but it has no practical use; and its basic only two is shown in Figure 3. It needs to be set up several times during the measurement. Each set is set to take a reference point (Reference Point). The data and measurement method are fixed to the probe P'^'P"2 according to the specified & monthly position; therefore, the most difficult part of the technique is that the angle is too low, the eccentricity is problematic, and the rotation is to be measured. The repeatability of the tested Spindle T and the rotational difference ^, as well as the fixed probe P', P,, 2> go... The remedy, this method must be overcome. 3. Using the Reversal technique ): 6 1285254 September of the following year (10). (more, correct miscellaneous page. As shown in Figure 4, the τΓ reversal technique is also the earliest invention of the separation of the rotation axis a measurement technology. Although this technology is true at the time, Providing a great contribution; S, the difference method, theoretically also a simplified method of the aforementioned mult step steps is the simplest, most direct, but ^; and > 1 is not easy to achieve high accuracy, the difficulty of the original multi-steps Point. 'This method is based on the above, this &a Mp; Month has the traditional rotation axis a measurement technology is not easy to achieve the lack of high precision' adhering to the concept of excellence, as well as years of experience in the research and invention of practice, 牿 a a fuxue for the continuous development of this technology , the test and test, and finally succeeded in creating the high-precision rotary shaft thermal deformation of the front and the real hall. The system uses low-cost and lean servant + ★ 唰 唰 < architecture, using general laser light reflection, ie The invention can effectively and accurately measure the degree of freedom error of the original Indian dynasty turning vehicle. SUMMARY OF THE INVENTION The object of the present invention is to provide a high-precision rotating shaft thermal deformation measuring system, which is easy to use and low in cost. If you don't reduce the structure, you can use the general light reflection theory to effectively and accurately measure the degree of freedom error of the 斿Μ 疋 疋 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The axial measurement technology cannot achieve the high-precision rotating shaft thermal deformation measuring system which is disclosed in the present invention - the fairy mirror is placed on the clamping device, and the clamping device is mounted on the rotating shaft. The laser diode is irradiated to the mirror mounted on the rotating shaft through a beam splitter to measure the error of the rotating shaft. At this time, the reflected light is generated by the mirror, and the _beam splitter generates the transmitted light and the opposite material respectively. On the two light sensors, the change of #点1285254 丫¢) the year and month [compulsory repair, 疋 replacement page to measure the degree of freedom error; according to this, when there is an error in the rotation axis, it will cause reflected light The change, in turn, affects the position where the reflected light hits the photosensor, and then obtains the translation and angle error values through mathematical operations. [Embodiment] In order to further understand the present invention, the present invention aims at the foregoing invention and The features and the detailed description of the preferred embodiment and the drawings are as follows: The technical means and the efficiency of the high-precision rotating shaft thermal deformation measuring system designed according to the present invention are described in detail with the best embodiment and the cooperation diagram. Bottom: As shown in FIG. 5, the present invention provides a high-precision rotating shaft thermal deformation measuring system, and the structure thereof comprises: a mirror 1 having a size of about 1 mm X 1 mm, which is a turning point of 180 degrees for light. to A device (such as a micro-milling machine, a micro-drilling machine, a micro-engraving machine, etc.) is mounted on the rotating shaft 10 to generate reflected light for the illumination of the optical pickup head 2; The head 2 is a head of a digital CD player DVD, which is set at the side of the near-rotation axis 10, and has a built-in laser light source and an optical path that can turn the light into a 90-degree turn (not shown). For emitting laser light to the mirror 1 connected to the rotating shaft 10. The beam splitter 3 is set up in the vicinity of the adjacent optical pickup 2, and the square beam splitter is optimally used, and the circular plate type beam splitter can also be used, and the square beam splitter is characterized by a mirror type spectroscope. With a large penetration and reflection contact area, the beam splitter 3 causes 8 to replace the 3 1285254 laser light for a 90 degree turn, and allows the reflected light of the mirror 1 to pass through, thereby generating a splitting light, that is, splitting two lights (vertical And a horizontal direction); a light is transmitted light for passing through the lenticular lens 4 into the first photo sensor 5 to measure the pitch error δ χ (θ) of the rotating axis, and the skewness error δ γ (θ) The other angle is the reflected light. The other light is the reflected light. After returning to the optical head 2 and turning the light through the internal optical path for 90 degrees, it is directly driven into the second photo sensor 6 to measure the displacement error signal of the rotating shaft. (Line error ε χ (θ), ε / θ)) and angle error signal (angular error δ χ (8), δ γ (0)). The lenticular lens 4 is disposed at another corresponding position adjacent to the optical pickup 2 for penetrating the transmitted light of the spectroscope 3 for filtering the displacement signal of the transmitted light to make the first light sensation The detector 5 can obtain an angular offset signal of the rotating shaft 1 ;; the first photo sensor 5 is a four-line optical sensor disposed at a corresponding position of the adjacent lenticular lens 32, which is based on the light spot. The change is measured, and then the degree of freedom error of the angular offset value such as the pitch error δχ(0) and the skewness error δγ(θ) is obtained through the analog/digital conversion card (A/D card) conversion. The second photo sensor 6' is a four-line optical sensor disposed adjacent to the side of the optical pickup 2, and is also measured according to the change of the spot, and then converted by an analog/digital conversion card. The degree of freedom error of the displacement and angle error signals is obtained. As shown in FIG. 6 and FIG. 7 , the high-precision rotating shaft thermal deformation measuring system of the present invention does not count, and the laser beam of the optical pickup 2 is used to generate a laser beam in a γ direction during the continuous measurement. After the emission, it is first reflected by a beam splitter 3 to a lmmxlmm mirror (丨) on the rotating shaft 1〇, so that the laser beam irradiated on the mirror 1 produces an inverse 9 and replaces the page; 1285254 emits light. The beam splitter 3' is divided into a transmitted light and a reflected light. After passing through the lenticular lens 4, the transmitted light enters the first photo sensor 5, so that the first photo sensor 5 can be obtained by the first photo sensor 5. Measuring the angular offset value of the tilting error δχ and the skewness error δγ of the rotating shaft 1;; the reflected light is returned to the optical pickup 2 and the light is turned 90 degrees through the internal optical path, and then directly enters the first The second light sensor 6 can be used to measure the displacement and angular error signals of the rotating shaft by the second light sensor 6. In addition, the first and second photo sensors 4, 5 can be accurately determined by the analog/digital conversion card conversion and data operation. That is, when the rotation axis 10 generates a translation error (line error ε χ (θ), sy (0)), angular deviation (angular error center (0), ^ 0) due to temperature rise, the rotation axis is caused by the rotation axis The 10 connecting mirror 1 generates a change of the reflected light, thereby affecting the position where the reflected light hits the first photo sensor 5 and the second photo sensor 6, and then measures according to the change of the spot, and then passes through After the mathematical operation, the translation and angle error values are obtained. Therefore, the high-precision rotating shaft thermal deformation measuring system of the present invention uses the mirror 1, the optical reading head 2 with the laser light source and the optical path, the beam splitter 3, the lenticular lens 4, and the first quadrant photo sensor. 5 and the second light sensor 6, has the following characteristics: 1. Mirror 1: can make the light turn 180 degrees, and reduce the measurement structure. 2, optical 5 buy write head 2 · easy to obtain, low cost, and optical read / write head 2 built-in laser light source and light path can be turned 90 degrees, without the use of expensive laser diode and Can be used with another spectroscope. 1285254 i : .. . . , , and .-, one···"·v -- · **ynd^vmr -ϊγΤλΛ 3, Beamsplitter 3: The reflected light source can be split after passing through the beam splitter 3 ( Vertical and horizontal directions). 4. The lenticular lens 4 can filter the displacement signal of the transmitted light source so that the first optical sensor 5 can obtain an angular offset signal of the rotating shaft 1 。. 5. The first photo sensor 5 and the second photo sensor 6 are both measured according to the change of the received light spot, and then converted by the analog/digital conversion card to obtain the rotation axis when the temperature rises. Other degrees of freedom error are generated; however, the first photosensor 5 must first filter the displacement signal of the transmitted light source through the lenticular lens 4, thereby obtaining an angular offset value such as the pitch and the skewness of the rotating shaft; The two-photo sensor 6 can measure the displacement and angle error signals of the rotating shaft, and finally the analog-degree/digital conversion card conversion and data operation can accurately determine the degree of freedom error. The detailed description of the present invention is intended to be illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention. The patent scope of this case. In summary, the case* is indeed a seam in the method, and the conventional treatment method is used to enhance the above-mentioned multiple functions. 'The statutory invention patents that should have fully met the novelty and the progressiveness, the New Zealand proposal, _ your approval This invention patent application 'invented the invention, to the sense of virtue. [Simple diagram of the diagram] Figure 1 is a schematic diagram of the six-degree-of-freedom error of the traditional rotary axis; 11 1285254 "One ~ - one _ 6 years 73⁄4 You are replacing the page u ...... .... ^ Figure 2 For the traditional use of single (4) probes set a number of times ^ Figure: for the traditional use of single (multiple) probe set up multiple detection action diagram (_); Figure: A is the traditional use of single (multiple) probe multiple settings of the detection action diagram (2) Figure 2B shows the detection action diagram of the traditional multi- (multi) probe setting (3). Figure 4 is the traditional detection action diagram using the inversion technique (1); Figure 4A shows the traditional reversal technique. FIG. 5 is a schematic diagram of the detection of the present invention; Lutu 6 is a detection operation diagram of the present invention; and FIG. 7 is a measurement flow chart of the present invention. [Main Symbol Description] 1 Mirror 2 Optical head 3 splitter 4 lenticular lens Φ 5 first light sensor 6 second light sensor 10 rotating axis XI, X2 probe Yl, Y2 probe PI, P2 probe Z1 probe p X axis error 12 1285254 ? July π day repair) is replacing page ^-1 . _ . II.W*· Ί >n I- r -r,,,·, -ιιΓ·- -I , -«!.·** ····» r* Production _·» ι_ _ p Y-axis error by εζ Z-axis error & pitch error S-sway error °y
δζ滾動度誤差 Ρ探頭 Ρ”固定探頭 Α旋轉軸 T待測旋轉軸 Μ主軸 S 參考點 Reference Point 13Ζζ Rolling error ΡProbe Ρ”Fixed probe ΑRotary axis TRotary axis to be tested ΜSpindle S Reference point Reference Point 13