TW201134562A - Cleaning method and cleaning device used in said cleaning method - Google Patents

Abstract

The disclosed cleaning method involves a cleaning step for cleaning an object to be cleaned, wherein said cleaning step involves: an immersion step (step 1) in which the object to be cleaned having deposited flux residues is immersed in a cleaning tank with adjustable pressure containing a detergent of a particular composition; a pressure reduction step (step 2) in which the pressure in the cleaning tank is set to P1 (kPa); a reduced pressure maintaining step (step 3) in which, for 8 to 16 seconds, the pressure in the cleaning tank, which was reduced in the pressure reduction step, is continuously maintained at P1 ± 0.4 (kPa) and the temperature of the detergent composition inside the cleaning tank is continuously maintained at 50-70 DEG C; and a pressure increasing step (step 4) in which the pressure inside the cleaning tank is raised to P2 (kPa) after the pressure maintaining step is complete. Steps 2 through 4 are performed in 10-220 seconds.

Description

[Technical Field] The present invention relates to a method for cleaning a washed object to which a flux residue adheres, a method for producing an electronic component using the cleaning method, and the washing method A cleaning method for the net method. / [Prior Art] Previously, a group of detergents containing a detergent-attached material that was attached to a smuggled fish was known to contain a combination of an ethylene glycol-based compound and an amine-based compound: T, Patent Document 2, etc. Or a composition containing a surfactant (refer patent documents 3, 4, etc.), etc.. Moreover, although it is not attached to the method of cleaning the washed matter of (4)_, is it a cleaning method for removing the abrasive attached to the parts of the wristwatch or the like, and does it increase the surrounding of the washing liquid? The operation of the force and the operation of reducing the pressure around the cleaning liquid are alternately applied to the tube tube for a plurality of times of cleaning (see Patent 5), and the method for cleaning the parts having a gap such as a fine bag-like hole is revealed. The pressure reduction and the normal pressure transformation (P-Swlng) washing method are repeatedly performed in the liquid tank (refer to Patent Document 6, etc.). In the washing method described in Patent Document 5, as the detergent composition, for example, a solvent petroleum brain-based washing liquid is used. In the cleaning method described in Patent Document 6, the dilution of the surfactant is used as the detergent composition, and after the pressure in the tank is reduced to the required pressure, the control valve is immediately switched to the normal pressure.门 阪 先前 先前 先前 先前 152 152 152 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The problem to be solved by the invention is that in the manufacturing process of an electronic component such as a semiconductor device, when a component (for example, a semiconductor wafer, a chip capacitor, or another circuit substrate) is mounted on a circuit board, the circuit board may be formed on the circuit board. A space (gap) is formed between the parts. The solder used for mounting the above-mentioned components contains a flux. However, if the flux remains in the gap as a residue for a long period of time after soldering, migration or the like occurs, which causes a short circuit between the electrodes. With the miniaturization and high density of electronic components, a semiconductor wafer mounting method using solder bumps such as a flip chip method is often used, and the installation is prone to be more cumbersome. Therefore, the importance of cleaning the flux residue in the manufacture of electronic parts is further enhanced. However, with the miniaturization and high density of the electronic components, the above-mentioned gaps are difficult to remove the flux residue entering the narrow gap, and as a result, the productivity of the electronic components is degraded. Therefore, it is desired to develop a cleaning method in which the flux residue remaining in the gap is excellent in removability. 15250).doc 201134562 The present invention provides a kind of cleaning material which is not only for a narrow fishing net. The agent is "relative, and the washing power of the water is also good. The foaming method is used to clean the washed residue of the flux residue." and: Use: The manufacturing method of the electronic parts of the net method and use Technical Solution for Solving the Problem The cleaning method of the washed matter to which the flux is adhered in the present invention includes washing the step of washing the adhered material with the flux residue by using the detergent composition. The washing step includes: a step of impregnating the detergent composition to which the flux is adhered to the detergent composition contained in the cleaning tank of the adjustable pressure (first step); The dusting force in the washing tank is reduced to a pressure reducing step (second step) satisfying the pressure P1 (kPa) of the following formula (1); the above-mentioned washing in the depressurizing step is carried out under reduced pressure for 8 to 16 seconds. The pressure in the tank is maintained at the crucible (10)), and the above washing in the above-mentioned washing tank The temperature of the detergent composition is maintained at 50 to 7 (the pressure reduction holding step of TC (third step); and after the pressure reduction holding step, the pressure in the cleaning tank is such that the following formula (2) is satisfied. The pressure step (step 4) of the pressure pjkPa). The above second step to fourth step are carried out in 10 to 220 seconds. 2) (2) 0.1 (kPa)^P1^7 (kPa) 50 (kPa) $ P2$ 120 (kPa) The detergent composition contains 2% by weight or more of water (component A) of less than 9% by weight, 50% by weight or more and less than 97.75% by weight of the glycol ether (ingredient B) 'and 〇.〇 5 wt% or more and 5 wt%. /. The following amine compound (ingredient C). The above component B is represented by the following general formula (1). R]-0-(E0)m-R2 (1) 152501.doc 201134562 In the above formula (1), 'R1 is an alkyl group having a carbon number, and R2 is a hydrogen atom or a carbon number of 1 to 3, and EO is Oxygen-extended ethyl group, m represents the average addition molar number of EO', and the above-mentioned component C is represented by the following general formula (2). R3-n-(E〇)ph (UH (2) In the above formula (2), R3 represents a hydrogen atom or an alkyl group of carbon number 4, and E〇 is an oxygen-extension ethyl group 'p, q respectively The average addition molar number of E〇 satisfies 1 each p+q$ 4. The manufacturing method of the electronic component including the solder bump of the present invention comprises: forming a solder on the substrate of the electronic component using a solder flux containing a flux a step of bumping; and a step of cleaning the flux residue derived from the flux by the cleaning method of the above-mentioned washed object of the present invention. The cleaning device of the present invention is a washing of the washed object of the present invention. a cleaning device for a clean method; and a moisture control mechanism for causing the water (former A) of the detergent composition in the cleaning tank to have a content of 2% by weight or more and 5% by weight or less EFFECTS OF THE INVENTION In the present invention, a specific detergent composition is used, and a series of steps including a salt pressure step, a pressure reduction holding step, and a pressure increasing step are sequentially employed as a cycle because of a specific time. Performing this cycle, the physical force and cause due to pressure changes Detergent (4) step of the detergent composition 152501. (J〇q 201134562 / Fu Teng and the physical strength of the house to taste the role of the broken powder in the narrow gap of the material exists in the flux residue Therefore, ]t Υ /Γ仔 is not only in the supply of the flux residue in the narrow gap, but also has good cleanability, and the foaming is good The method of cleaning the cleaned material of the flux residue and the method of manufacturing the electronic component including the solder bump using the cleaning method is omitted. < · The rosin-based flux containing rosin or rosin derivative used in the case of q π, in the present invention, the welding method of the reflow method and the flow mode. In the present invention, the term "draining agent" refers to a mixture of a stilbant and a auxiliaries. The term "flux residue" refers to a source of self-retaining on a substrate after soldering using a flux or a tan flux. In the present invention, the scoop person contains the ship (Pb) solder and no external solder." 匕3, the term "physical due to the boiling of the detergent composition" means washing by The water contained in the detergent composition is stagnation and production: the so-called "frozenness of the detergent composition" means the boiling of the water of the detergent. Thereby, the more the amount of the detergent composition is, the larger the physical force is, and the smaller the detergent composition is, the smaller the physical force is. The cleaning method of the washed matter to which the flux residue is adhered according to the present invention is also referred to as "the cleaning method J", and the use of the specific glycol ether and the specific amine compound respectively in the specific water is used. The detergent composition having a content of 2% by weight or more and 10% by weight or less is subjected to a 152501.doc 201134562 sequence including a reduction step, a reduction column, a retention step, and a step of -1 step In the step, and even if the holding time of the reduction is short, a certain time is ensured, and it is unexpectedly found that the flux residue remaining in the flux is more excellent, the foaming is suppressed, and the washing of the water is not green. In the case where the above-mentioned series of steps are 1 circumstance, when the repetitive grading 1 is re-introduced into the 仃1 cycle, the cleaning property of the X.Vjfc flux residue which is present in the narrow gap is further improved. Therefore, if the cleaning method of the present invention is used in the manufacturing process of the electronic component including the solder bumps, it is expected to improve the productivity or reliability of the electronic component. [The method of cleaning the object to be washed] Cleaning method For example, the washing step is sequentially performed, the rinsing step of washing the washed matter using the rinsing agent composition, and the drying step. [Washed material] As the washing method of the present invention, the washed object is preferably used. A manufacturing intermediate including a circuit board or the like and a component soldered to a circuit board or the like is included, and the manufacturing inter-substance contains a flux residue in a gap between the circuit board and the component. The intermediate is a semiconductor package or a semiconductor device. The manufacturing intermediate in the manufacturing step of the electronic component includes, for example, a semiconductor wafer, a wafer type electric valley Is, and other circuit boards mounted on the circuit board by soldering using a flux. The gap is, for example, a space between a circuit board and the above-described components mounted on the circuit board by soldering, and the height (the shortest distance between the circuit board and the component) is, for example, 5 to 500 μm, 1 to 250 μm, Or a space of 2〇~100 μΠ1. The width and depth of the gap depend on the size or spacing of the electrodes (solder joints) on the mounted component or circuit board. Such as 152501.doc 201134562 is 130~20000 4 melon or 13〇~1〇〇〇〇μιη, the depth is 13〇~25〇〇〇Claw or 130~10000. [Washing step] Washing steps include: will attach The impregnation step of the flux residue impregnated with the adjustable pressure in the following detergent composition contained in the cleaning tank (the impregnation step is also referred to as "the third step"); a pressure reduction step in which the pressure in the washing tank is reduced to a specific value (the pressure reducing step is also referred to as "second step"); maintaining the pressure in the depressurized washing tank in the depressurizing step at a specific specific time for a specific period of time a pressure reduction holding step in which the temperature of the detergent composition in the washing tank is maintained within the temperature range (the pressure reduction holding step is also referred to as "third step"); After the step, the pressure in the wash = is boosted to a specific value step (this step is also referred to as the fourth step). The washing step may further include a post-boost pressure maintaining step (step 2) and/or a fifth step. The step 4a is carried out after the fourth step, and is carried out before the fifth step in the case where the washing includes the fifth step. In the step 4a, the pressure in == is maintained within a specific pressure range and is continuously maintained, and the fifth step is performed after the fourth step, and in the case where the washing step is blunt, the step is repeated in the fourth step - At least the steps of the second step of the above step are sequentially included. In the U4 step, one of the washing methods of the umbrella is praised, and the cleaning tank may be used for two or more washing tanks. For example, when the washing tank is subjected to the washing method of the present invention, No. 5: In the fifth step, I52501.doc 201134562 may be performed without repeating the i-th step. In the case of the human music 2 steps to the fourth step, the present invention is implemented in two or more washing tanks. The washing method β is repeated in the fifth step, and may also be in the case of the 铱c soil brother 1 dream step 4 step 15 step towel is the sputum, = step ~ 2 ^ V ; "x 1 °^2 2 °# # ^ ^ ^ ^ ^ 'P includes a series of steps from step 2 to step 4 above to improve the cleanliness of the flux residue present in the narrow gap and From the viewpoint of shortening the washing time, it is preferably carried out at 15 to H) for 0 seconds, more preferably for 15 to 50 seconds, and further preferably for a heart of (10) seconds. (Step 1) First, in the step, the detergent residue adhered to the detergent residue in the cleaning tank containing the detergent composition is first added to the detergent composition. The amount of the detergent composition to be washed is not particularly limited as long as the amount of the object to be washed is impregnated. The cleaning tank may be, for example, a heating mechanism. a pressure vessel such as an ultrasonic oscillator, etc. The cleaning tank is connected to an air pipe connected to a suction device such as a vacuum pump, and the air pipe includes a branch pipe that is not connected to the suction device. In the pipe, the opening and closing control of the switching control valve is performed, and the pressure in the cleaning tank is reduced to the required pressure or the pressure is raised to the required pressure. An example of the above-described cleaning tank is disclosed in Japanese Laid-Open Patent Publication No. Hei 6-29694 No. 152501. .doc -10- 201134562 In the first step, from the viewpoint of improving the detergency, the temperature of the detergent composition filled in the washing tank is preferably 50 to 70 C immediately before the pressure reduction is started. More preferably, it is 55 to 70. (:, and further preferably 60 to 70. (:. specifically, δ, which is adjusted to be 〇~4〇〇c, the detergent composition is filled into the above-mentioned washing tank) Heating is carried out to a temperature within the above preferred range. The heating of the compound may be carried out by using a heating mechanism provided in the washing tank. The temperature of the detergent composition is measured by a thermometer provided in the washing tank. (Second step) Next, the washing tank is cleaned. The pressure inside is depressurized to Pi (kPa). Ρι satisfies the relationship of 0.1 (kPa) $ p 丨彡 7 (kPa). In the second step, it improves the presence of the narrow gap in the washed object. From the viewpoint of the detergency of the flux residue and the shortening of the washing time, it is more preferable to depressurize the inside of the washing tank until it is preferably 〇1 to _ small, preferably 0.1 to 5 (kPa), and further Good for the pressure within the range of ~ (4)). In the second step, the detergent composition can be forcibly mixed in a narrower gap by decompression. Thus, the flux residue present in the narrow gap can be prevented from coming into contact with the detergent composition. The air is forced out from the gap, and the dissolved gas contained in the detergent composition can also be degassed. Therefore, the cleaning method of the present invention is suitable as a washing method for the residue of the aid agent which is mixed into a narrow gap. In the second step, the pressure in the clean tank of the cleaning I52501.doc 201134562 is P1 (the viewpoint of improving the detergency of the coal-carrying agent residue present in the narrow gap and shortening the washing time). kPa) required decompression r 1 is more difficult, preferably more than 1 second or more after the start of decompression of the pressure in the washing tank, more preferably within 1 second to 60 seconds, and more preferably 】 Within seconds, further better than 1 second and 15 seconds. ~ In the second step, (4) to improve the cleaning property of the flux (4) present in the narrow gap and shorten the cleaning time, the pressure in the cleaning tank is Pl (kPa) The speed is preferably i5 to 3Q (kpa/s), more preferably 17 to 30 (kPa/s), and still more preferably 18 to 3 Å (kpa/s). From the viewpoint of improving the detergency of the cognac money present in the narrow gap, more specifically, obtaining a higher physical force and suppressing the detergent by boiling of the detergent composition The evaporation of water in the composition suppresses the decrease in water in the washing tank, and the detergent composition in the second step is suppressed from the viewpoint of suppressing the deterioration of the detergent property due to the composition fluctuation of the detergent composition. The temperature is the same as in the first step, preferably 5 〇 7 7 (rc, more preferably 55 to 70 ° C, still more preferably 6 〇 7 7 Torr). The heating of the detergent composition is required to be washed. Preferably, in the second step, the temperature of the detergent composition adjusted to the temperature within the preferred range in the first step is maintained in the second step. In the second step The above temperature of the detergent composition is an average value of the temperature measured per 1 second by a thermometer provided in the washing tank, and the average value may be based on the average temperature of the detergent composition in the third step described below. Calculated by the formula. (Step 3) Next, in the depressurization holding step, 'Continuous 8 The pressure in the above-mentioned depressurization step in the degassing washing tank was maintained at p>±〇4 kPaT for 16 seconds, and the temperature of the detergent composition in the 152501.doc 12 201134562 washing tank was maintained at 5 〇~70〇C. In the third step, from the viewpoint of maintaining a stable boiling state of the detergent composition, the pressure in the washing tank must be 〇, from the same viewpoint, the third step The fluctuation range of the pressure in the washing tank is preferably P1: t〇_3 (kPa), more preferably P1 ± 0 2 (kPa), and further preferably Pi ± 0.1 (kPa). The pressure in the washing tank in the holding step is preferably substantially constant, more preferably fixed. Further, the pressure in the washing tank is measured by a manometer. The boiling of the detergent composition is maintained. From the viewpoint of the state, the temperature of the detergent composition in the third step must be 5 Torr to 7 Torr when the pressure in the washing tank is PpO.VkPa). In other words, from the viewpoint of improving the detergency of the flux residue present in the gap by the physical force of boiling, when the pressure 匕 in the cleaning tank is 〇, it is preferably 50 to 70°. C. When the pressure in the washing tank exceeds 5 kPa and is 7 kpa or less, it is preferably 60 to 70. (: The temperature of the detergent composition in the third step may vary from 5 Torr to 7 Torr. The temperature range of 〇 varies, but the change is maintained from the viewpoint of maintaining a stable boiling state of the detergent composition. The amplitude is based on the average value of the temperature of the detergent composition in the third step, and the car is good as the illusion. (4), more preferably the gentry is less than or equal to ±0.2. That is, in the cleaning method of the present invention, the temperature of the detergent composition in the third step is preferably substantially fixed, and more preferably fixed. The temperature of the detergent composition in the third step is 0. The thermometer provided in the washing tank is measured, for example, every one second. The detergent combination in the third step 152501.doc 201134562 The average value Tx (time average holding temperature) of the material/dish can be determined.遴 而 时间 时间 时间 Σ Σ Σ Σ Σ Σ Σ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ Τ 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持In the view of improving the detergency of the flux residue in the narrower (four), the sea of the detergent composition The state must be 8 or more. In addition, at the same time, the maintenance of the depletion of the flux remaining in the gap and the shortening of the cleaning time are simultaneously achieved, and the decompression is maintained: (the time of the third step) It must be 16 seconds or less. Therefore, the dust holding time is 8 to 16 seconds from the viewpoint of improving the cleaning property of the flux residual edge and the cleaning time in the gap. The reason is 5, preferably 8 to 15 seconds, more preferably 9 to 13 seconds. The holding time of the grinding is in the second step (decreasing step), and the time when the I force in the self-cleaning sample reaches Pl The point starts to calculate. In the second step, when the repeated force in the washing tank is reduced to 5 (kPa), for example, the measurement starts at the time point when the pressure in the self-cleaning tank reaches 5 (kPa). Dust reduction retention = between. In the third step, even if the pressure in the washing tank rises or falls, the value within the range of P^G.VkPa) can also be used as the wish in the washing tank. The holding time of the reduced pressure is calculated while maintaining the reduced pressure state. Preferably, the ultrasonic vibration is applied to the detergent composition. Step 3. By the second step 'the air present in the gap is forced out from the gap ' thereby allowing the flux residue to be in good contact with the detergent composition' and if in the detergent composition After the degassing of the dissolved gas, ultrasonic vibration is applied to the I52501.doc 201134562 detergent composition, and the cleaning property of the flux residue is improved, so that it is excellent in m. Therefore, in terms of improving the damage to the washed matter existing in the gap, the third step: f = netness and suppression of the frequency of the ultrasonic wave and the super-wave complex, Η Λ super-wave Here, the density is preferably 20 to 400, (Μ~4.〇w/cm2 HZ, G.2 to 2.GW/cm2. The super-wave vibration is given by, for example, #南丨振堡器. Ultrasonic vibration is applied to the detergent composition by the ultrasonic cleaning method disposed in the cleaning tank = only during the third step. Ultrasonic vibration can be applied to the detergent composition at least at least one of the first step to the fifth step, and the process of "10" is carried out until a wide step. From the viewpoint of the net nature, it is preferred that the ultrasonic composition imparts ultrasonic vibration to all the steps from the first step to the fifth step. (Step 4) ^, the pressure in the washing tank is raised to (10) Satisfied with 5〇^P2S12〇(kPa) 〇: In the fourth step, 'the pressure in the cleaning tank is better than the viewpoint of improving the compatibility of the flux residue in the gap. The pressure in the range is better than the pressure in the range of 8〇~1〇2(4), and then the normal dust. In addition, the so-called normal pressure means the strength is not particularly reduced or the dust is usually 'atmospheric pressure'. Equivalent, approximately 41 air pressure (10)! Male (10). In the 4th step, the viewpoint is to improve the cleaning performance and shortening the cleaning time of the flux residue of I52501.doc • 15· 201134562 which exists in the narrow gap. In other words, the pressure increase time required to make the pressure in the cleaning tank P2 (kPa) is preferably in the cleaning tank. When the pressure rise starts, the ice is less than 60 seconds, more preferably less than the ice, and further preferably less than 10 seconds and less than 10 seconds. In terms of improving the cleanliness of the flux recorded in the narrow gap, The temperature of the detergent composition in the fourth step is preferably such that the temperature of the detergent composition in the third step of the tray is equal, specifically, preferably 50 to 7 (TC' more specifically. Preferably, the temperature is the same as the temperature maintained in the third step. The heating of the detergent composition may be carried out by using a heating means provided in the cleaning tank. The detergent composition in the fourth step The above temperature is an average value of the temperature measured by a thermometer provided in the cleaning tank, for example, the average value can be obtained from the above formula of the average temperature of the detergent composition in the third step. Step 4a) In terms of improving the detergency of the flux residue present in the narrow gap, the cleaning method of the present invention preferably further comprises the step of the step after the third step Post-press pressure holding step (this step It is called "Step 4a"), which is to keep the pressure p in the washing tank within the range of rhyme (4) and equal to or higher than P2 ± ( (4 kPa). The pressure lasts for 8 to 16 seconds. Especially in the case where ultrasonic vibration is applied to the detergent composition in the fourth step, the cleaning method of the present invention preferably includes the above from the viewpoint of improving the detergency. Step 43. For example, when the pressure P2 (kPa) in the washing tank in the fourth step is lower than that of the normal dust, the 'opening washing tank' causes the pressure in the washing tank to be I52501 outside the washing tank. Doc 201134562 Pressure balance, keep the balance between the pressure in the washing tank and the pressure outside the washing tank for a specific time. In the case where the pressure in the washing tank in the third step is p] ± 〇 4 (kpa), especially in the viewpoint of the efficiency at the time of the reverse washing, the washing tank in the second step The temperature of the detergent composition is preferably ~7 〇t:. The temperature of the detergent composition in the cleaning tank in the step 4a may be varied within the range of 50 to 70 t, more preferably the same temperature as the temperature of the detergent composition in the fourth step. The temperature of the detergent composition in the step 4a is determined by using a thermometer provided in the washing tank, for example, every! The average of the temperatures measured in seconds. The average value can be obtained from the above formula of the average temperature of the detergent composition in the third step. In the step 4a, the fooling force p3 in the washing tank is maintained at P2 ± 0.4 (kPa) from the viewpoint of simultaneously improving the cleaning property of the agent and the washing time which are present in the material gap. The time of the pressure higher than (4) tearing a) in the range of 50 to 12 〇 kpa is preferably 8 to _, more preferably 8 to 10, more preferably 9 to 16 seconds. When the method of cleaning the Niu Mingming includes the step #1, if a series of steps including the same step is used as one cycle, the netness is improved to improve the flux present in the narrow gap. The washing of the residual stains is carried out in the above-mentioned U Tanglu ± quanjia for 20 to 230 seconds (4), preferably 25 to UG seconds, more preferably 25 to 60 R, and more preferably 25 ~5〇 seconds to proceed. (Step 5) In order to improve the flux residue in the narrow gap, 152501.doc 17 201134562, the method of 'φ total na of the invention is preferably included to further repeat 5 times. Steps 2 to 4 of the fourth step are repeated (step 5). Steps 2 to 4 which are repeatedly performed in the fifth step are performed under the same conditions as the second to fourth steps before the fifth step. However, in the second step of repeating, in view of the fact that the cleaning time of the flux residue which is present by the π + water t is narrower, the washing time is shortened. Preferably, the grinding force in the washing tank is reduced to the range of (4), and the temperature between the reducing materials is preferably less than 1 second and 120 seconds after the start of the pressure reduction, and the temperature of the detergent composition is higher. Preferably, in the third step of repeating the same viewpoint, it is preferable to maintain the pressure in the washing tank at a pressure of P1±G.4 (kPa), and more preferably to wash. The force in the clean tank is maintained at P!±〇.i(kpa), and the temperature of the detergent composition in the washing tank is P1±G.4 (kPa). In the case of a shape, it is preferably 5 (four). c, the calorie of the detergent group is more preferably a solid, and the holding time of the reduced pressure is preferably 8 to 10. The same viewpoint is used to repeat the fourth In the step, the pressure reached by the pulverization is preferably normal pressure, and the temperature of the detergent composition is preferably 50 to 70 〇 C. Further, since the cleaning is performed every time the second to the *th steps are completed, the cleaning is performed. In the case of a groove, it is necessary to further carry out the step of immersing the object to be washed in the detergent composition (first step), and this will "further repeat 1 to 50 times to ^2 to 4th steps above. The "step" is replaced by "the step of repeating the above steps 1 to 4". Further, in the case where the cleaning method of the present invention includes the above-mentioned step 4a, it is preferable to carry out the fourth step after each of the fourth steps performed in the fifth step. When the fifth step includes the fourth step 152501.doc 201134562, the second to fourth steps to be repeated as the (10) ring are preferably at least one repeated cycle and then the fourth step is performed, and the improvement is simultaneously achieved. From the viewpoint of the detergency of flux remnant and the cleaning time in the narrow gap, it is more preferable to carry out step 4a after all the cycles in the fifth step, and in the fifth step, Preferably, the step of repeating (four) times includes at least the above-mentioned second step to the first step of the cycle, preferably repeating 1 to 50 times of the U shield ring including the first step to the first step, or preferably repeating The sub-step includes the above-mentioned second step to the first step of the first step. The number of cycles in the number of times of the repetition (4) is different depending on the shape of the gap of the object to be washed and the state of the flux residue, but the viewpoint of improving the detergency and productivity of the flux residue existing in the gap is improved. In general, it is preferably (four) times, more preferably 2 to 35 times, and still more preferably (four) times. By repeating the second step to the fourth step, the step - 4a step, or the second step to the 43rd step in a short time, the physical force due to the pressure change and the The physical force generated by the boiling of the detergent composition in the step of reducing the holding is repeatedly applied to the object to be washed. Therefore, the cleansing power of the flux present in the narrow gap is further improved. (Adjustment of water content) In the cleaning method of the present invention, it is also possible to wash a washed object, and to add it to the detergent composition in the washing tank in the middle of the washing step, in order to wash A plurality of washed objects and a continuous use of the washing tank can also be used in the washing step for washing the washed objects and/or before the cleaning agent in the washing tank. Water is added to the composition. In the first method of the present invention, the detergent composition is boiled. Therefore, especially in the fifth step 152501.doc •19·201134562, the water content in the second step to the second composition is repeated. During the process, each component of the detergent composition used in the detergent composition maintains a similar change in the ratio of the deviation of the fish to the ratio of w ± 0, preferably in the first step. Pre- and/or t-way, in the step of washing in the washing tank, water is added to the first detergent composition to suppress the composition of the detergent composition. For example, water is used as a water sensor, and the water is concentrated in the detergent composition before and/or in the first step to the fifth step, and the water is supplied to the washing according to the measured value. The detergent composition in the clean tank can be used. In order to accurately measure the concentration of water in the detergent composition, it is preferred to measure the concentration of water in the state of (iv) _, circulation pump, ultrasonic __ detergent composition. The type of the detector for the moisture sensor is not particularly limited, and may be, for example, any of a near-infrared spectroscopy type, a capacitance conductivity type, and a conductivity type. The water supply to the detergent composition in the cleaning tank is performed by, for example, circulating a detergent composition in the sub tank and a detergent composition in the cleaning tank, and the sub tank is connected to the cleaning. The solenoid valve that opens and closes according to the measured value of the moisture sensor provided in the cleaning tank. In the case where the washing tank is continuously used for washing a plurality of objects to be washed, the replenishment of water is preferably, for example, during the period in which the liquid is lifted and removed from the washing tank in order to move the object to the washing tank, and It is carried out before putting other washed materials into the washing tank. Preferably, the moisture sensor is disposed not only in the cleaning tank but also in the sub tank. The adjustment of the water content in the above detergent composition can be carried out using, for example, the cleaning apparatus shown in Fig. 3. 152501.doc • 20-201134562 As shown in Fig. 3, the cleaning device includes a cleaning tank u containing a pressure adjusting unit (not shown) that can store the detergent composition inside and adjust the internal pressure. And a moisture meter 15 for the concentration of the water of the detergent plant accumulated in the interior of the washing tank η; a subtank 14 which can accumulate the detergent composition and a circulation line 18 which is provided The cleaning tank u is connected to the sub tank, and the valve of the flow path can be opened and closed according to the measured value of the moisture meter i 5 (for example, electromagnetic enthalpy); and the liquid supply unit (pump or the like, not shown) based on the moisture meter The measured value of ruthenium circulates the detergent composition in the cleaning tank 11 and the detergent composition in the sub tank 14 via the circulation line 18. In the cleaning apparatus, if the measured value of the moisture meter 15 is not a value within a specific range, the valve 17 can be opened, and the liquid supply unit can be operated, and the detergent composition and the cleaning liquid can be passed through the circulation line 18 14 . The inner washing composition is circulated until the concentration of water in the washing composition in the washing tank n becomes a value within a specific range. From the viewpoint of ensuring high detergency of the flux residue, the above-mentioned range must be 2% by weight or more and less than or equal to the amount of the amount, and is preferably 3 to 8% by weight, from the same viewpoint, It is preferably Η% by weight. Further, the value within the specific range is preferably the initial value of the concentration of water in the cleaning composition of the washing tank. In the cleaning apparatus shown in Fig. 3, the moisture control means includes a sub tank 14, a moisture meter 15, and a circulation line 18 having a valve 17. Preferably, not only the cleaning tank 11, but also the sub-tank 14 is provided with a moisture meter 16. Further, the cleaning device may further include: a first washing tank 12 for pre-rinsing the washed matter in the washing tank U through the washing step, and a second washing tank 13 for performing the flushing. Thus, if the detergent composition for washing the washed matter is replenished, 152501.doc •21 · 201134562 can also be used to wash the detergent composition for other washed materials, which is economical. . (Preparation for washing) In the cleaning method of the present invention, the washing step may further include washing before being subjected to the correcting step, for example, in a washing tank different from the washing tank for performing the second step to the fifth step. The step of immersing the detergent in the detergent composition for a certain period of time. The detergent composition may be the same as the following detergent composition used in the seventh step of the second step, or may be a previously known flux to be washed and adhered to the flux residue other than the following detergent composition. A detergent composition for the laundry. The impregnation time for the detergent composition is, for example, preferably from 1 to 10 minutes. [Rinsing Step] The rinsing step is a step of adhering the detergent to the detergent composition on the object to be washed, residual flux residue/inspection, or re-attaching flux residue, etc. When the net method does not include the fourth step and the fifth step, it is performed after the fourth step. When the cleaning method of the present invention includes the step 4a but does not include the fifth step, it is tied to the third step. After the step, when the cleaning method of the present invention includes the fifth step, it is carried out after the fifth step. The rinsing step can be carried out using one rinsing tank or by using more than two rinsing tanks. The rinsing step is carried out by, for example, replacing the detergent composition with the rinsing composition, and the other steps are carried out by the same conditions as the second to fourth steps in the above-described washing step. That is, in one example of the rinsing step, after the rinsing agent in the washing step is immersed in the 152501.doc •22-201134562 rinsing agent composition contained in the rinsing tank, the steps including the decompression step are sequentially performed. And the steps of the boost step - series. The series of steps may include the step of the fourth step (the rising seat holding step) of the above washing step relative to the library. In addition to replacing the detergent composition with the rinse composition in the third step of the rinsing step, X is also prepared under the same conditions as step 4a of the washing step, preferably during the rinsing step. The detergent composition used in the step is replaced with a rinsing agent composition, and the salt pressure step, the pressure reduction holding step, and the pressure increasing step are repeatedly performed - the series of cattle: the step is more preferably repeated, including a pressure reduction step, A series of steps of the pressure reduction holding step and the pressure increasing step after pressure boosting. The conditions such as the degree = degree, star force, time, number of cycles, "time taken by the shield ring, and the imparting of the ultra-chopping vibration' may be the same as in the washing step. The number of times of the second to fourth steps in the rinsing step or the number of times from the second to the fourth step 4 to the number of times of the smear can be determined according to the degree of the above-mentioned dirt, and the two can be cleaned and the productivity is improved. W. More preferably, it is 2 3 §, preferably 1 to 5 times. In the case of using a plurality of rinsing tanks; ~: human, and more preferably 3 to 30, in the case of sucking double 1u sweat washing tanks, the total number of washings may be the above-mentioned number of times. s 仃 冲 The above rinsing composition is usually water or the like. Depending on the degree of soiling, it is preferred to use the ion-exchanged water, preferably ion-exchanged water, to form the composition and the diluent. The use of the diluent as a washing step: the rinsing step of the composition includes a rinsing step using a diluent < In the shape of a moon, the ion-exchanged water is used as the flushing brake composition of the flushing brake composition, and the washing step is used. In order to distinguish the I5250i.doc • 23· 201134562, the diluent is used. The rinsing step is called a pre-flushing step. The pre-rinsing step and the completion rinsing step are performed, for example, using the same washing tank as the washing tank used in the washing step as the rinsing tank. If the soil and/or detergent composition does not remain in the object after the completion of the rinsing step, the active ingredient other than the water of the detergent composition in the rinsing composition used in the pre-rinsing step The content is not particularly limited, and is preferably 0.0001 to 10 parts by weight. /〇, more preferably 〇1~8 wt%, and then 轼 preferably 0.0001~5 weight 0/〇. The rinse composition used in the pre-rinsing step may contain a previously known detergent composition for washing the deposited residue to which the flux residue is attached, other than the following detergent composition. When any of the following detergent compositions or the above-described known detergent compositions are included in the rinse composition,

The content of water in the rinsing agent composition is preferably from 90 to 99.9999 by weight, more preferably from 92 to 99.9999% by weight, from the viewpoint of improving the residual flux residue or the flux of the re-adhesive flux. It is preferably 95 to 99.999% by weight. The rinsing agent composition preferably has a temperature of from 50 to 70 〇C 观点 from the viewpoint of improving the washing, and is preferably a rinsing agent in the rinsing step from the viewpoint of improving the washing property. Give ultrasonic vibration. If ultrasonic vibration is applied to the rinsing agent composition in the third step of the rinsing step, u & after the second step, the air existing in the gap is forced out of the gap, so that the upper side is finely smeared with the rinsing agent, : Good contact, and due to the ultrasonic vibration applied to the rinsing agent group & the degassing of the dissolved gas, the dirt of the (4) towel is removed. I5250l.doc -24- 201134562: Health is improved. Therefore, if ultrasonic vibration is applied to the object in the third step of the rinsing step, the rinsing time can be expected to be shortened. Therefore, it is preferable. The frequency of the ultrasonic waves and the energy density of the ultrasonic waves can be the same as those in the third step of the detergent composition. [Drying step] In the drying step performed after the rinsing step, for example, by blowing warm air to the washed material taken out of the lotion composition, the rinsing composition attached to the surface is removed, and then transferred to vacuum drying. Inside the container. The temperature in the vacuum drying vessel is set, for example, to 50 to 1 Torr, and the vacuum drying vessel is depressurized to 〇·b 5 (kPa). The drying by vacuum drying of the container can be carried out, for example, for 1 to 30 minutes. Furthermore, from the viewpoint of improving productivity, the cleaning method of the present invention uses a device including more than one cleaning tank capable of adjusting the wish force, two or more adjustable t-wash tanks, and a vacuum drying container. The washing step is continuously performed, for example, a rinsing step including a pre-rinsing step and a finishing rinsing step, and a drying step. An example of the above-mentioned apparatus is disclosed in Japanese Laid-Open Patent Publication No. Hei 6-296940. [Detergent composition] Next, the detergent composition for the cleaning method of the present invention will be described. The detergent composition of the present invention contains water (ingredient A), a specific glycol ether (ingredient B), and a specific amine compound (ingredient c). (Component A) The forming blade A contains water such as hot distilled water, ion exchanged water, or ultrapure water.

S 152501.doc •25- 201134562 The water content in the detergent composition must be 2% by weight or more and 1% by weight or less from the viewpoint of ensuring high detergency of the flux residue. It is preferably from 3 to 8% by weight, and more preferably from 4 to 7% by weight. One of the features of the present invention is that in the method of performing the pressure reduction, the pressure reduction state, and the pressure increase, it is preferable to carry out the method of repeatedly performing the pressure reduction, the pressure reduction state, and the pressure increase cleaning method. The water content of the detergent composition used was 2% by weight. The above range is less than or equal to the specific range of %. In the present invention, the physical force generated by the pressure change due to the pressure reduction and the pressure increase and the physical force generated by the boiling of the detergent composition in the pressure reduction holding step can be dramatically removed. A narrower gap of flux residue. Focusing on the physical strength of the detergent composition due to the physical force generated by the boiling of the detergent composition, if the water content is less than 2% by weight, the physical strength of boiling is insufficient, and if it exceeds 1% by weight, it is helpful. The flux residue has poor solubility. Therefore, sufficient detergency cannot be obtained in either case. (Component B) Component B contains a glycol ether represented by the following formula (1).

Ri-CKEO^R2 (1) wherein 'in the above formula (1), 'R1 is an alkyl group having 1 to 6 carbon atoms, and R2 is a nitrogen atom or an alkyl group having 1 to 3 carbon atoms. EO is an oxygen-extended ethyl group. , m represents the average addition mole of EO, which satisfies 2SmS3. From the viewpoint of ensuring high detergency and high safety of the flux residue, the carbon number of R1 is preferably 2 to 4', more preferably 3 to 4. As a specific example of the component B represented by the above formula (1), from the viewpoint of improving the solubility of the flux residue to the detergent composition, it is preferably e〇2 152501.doc -26· 201134562 average addition. The monoalkyl type glycol ether having a molar number m of 2, the average addition molar number m of the monoalkyl type glycol ether of 3, and the average addition molar number of the E m m is 2 The dialkyl type glycol ether and the average addition molar number of the E 〇 are the dialkyl type glycol ethers. These glycol ethers may be used alone or in combination of two or more. As a single-added base type ethylene glycol oxime with an average addition molar number m of 2, it can be used. One-ethyl alcohol monomethyl scale, diethylene glycol single-ethyl shunt, diethylene glycol single isopropyl scale , diethylene glycol monobutyl ether, diethylene glycol monoisobutyl mystery, diethylene glycol single self and so on. 4 is an average addition of EO, and the monoalkyl type glycol ether having a molar number of 3 is exemplified by .S ethylene glycol monomethyl sequestration, triethylene glycol monoethyl _, triethylene glycol monoisopropyl ether. , triethylene glycol monobutyl ether and the like. As the average addition molar amount of EO, the melon number is a dialkyl glycol ether of 2, which may be exemplified by - ethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol methyl propyl ether. Ethyl alcohol diethyl ether, diethylene glycol methyl butyl ether, diethylene glycol butyl methyl ether, ethylene glycol methyl isobutyl ether and the like. As the average addition molar amount of EO _ 3 bis-based ethylene glycol mystery, triethylene glycol dimethyl ether or the like can be mentioned. Among these ethylene glycol mysteries, from the viewpoint of improving safety, exhibiting high water solubility, and improving the solubility of the residue of the second flux, it is preferably selected from the group consisting of diacetyl alcohol squama and diterpene retention. A private early ether, diethylene glycol monobutyl ether, diethylene glycol early isobutyl ether, [ethylene glycol single test, triethylene glycol monomethyl ether, triethylene glycol monoethyl (10), triethylene glycol At least one of a group consisting of monoisopropyl ether, triethylene glycol monobutylene, diethylene glycol butyl mystery, ethylene glycol methyl isobutyl hydrazine, and triethylene glycol dimethyl test. 152501.doc -27- 201134562 From the viewpoint of improving the detergency of the flux residue remaining in the narrow gap, the content of the component B in the detergent composition must be 5% by weight or more and less than 97%. From the viewpoint of the same, from the viewpoint of the same, it is preferably less than 97.75% by weight 'more preferably 8 〇 to 97.25 〇/〇. (Component C) Component C contains an amine compound represented by the following formula (2). R3 —Ν—(ΕΟ)ρ—Η (E〇)qH (2) In the above formula (7), 'is a hydrogen atom or a carbon number of 4, and E is an oxygen-free ethyl group. p, # don't indicate the average addition of the number of moles, satisfying 1 Sp+q each. The carbon number of R3 is preferably from 1 to 3 from the viewpoint of improving the detergency and the washing property of the flux-residue remaining in (4). In order to satisfy the viewpoint of improving the detergency of the flux residue remaining in the gap, the heart satisfies, for example, l$p+q$3. Specific examples of the component C represented by the above formula (7) are preferably monoethanolamine, rethanolamine, and hydrazine from the viewpoint of improving the detergency and the cleaning property of the flux residue remaining in the gap. Alkyl alcohol amines such as diethanolamine, methyl monoethanolamine, and ethyl monoethanolamine. The content of the component c in the detergent composition must be 〇.5% by weight or more and 5% by weight or less from the viewpoint of improving the cleansing property and improving the cleanability of the flux residue remaining in the _: Preferably, it is 0.5 M.5% by weight. From the viewpoint of improving the detergency of the flux residue remaining in the gap 152501.doc -28 · 201134562, the weight ratio of component B to component C (component b/component 〇 is 20~", more preferably 94 to 98, further preferably 95 to 97. 'The weight ratio of the component B to the component A from the viewpoint of improving the detergency of the flux residue remaining in the gap (component b/component A) 20~ " More preferably, it is 20 to 50, and further preferably 30 to 50. The weight of the component B and the component A and the component c are from the viewpoint of improving the detergency of the residue of the aiding agent remaining in the gap. The weight ratio of the total weight (component A component A + component C]} is preferably from 1 〇 to 5 (), more preferably from 15 to 35, still more preferably from 23 to 33. The detergent composition may also contain the following The surfactant (component D). The content of the component D in the detergent composition is preferably less than 0.01% by weight from the viewpoint of suppressing foaming property, and is preferably 0.005 by weight from the same viewpoint. In the following, it is more preferable that the paste I is T-free and does not contain the component D, and X is more preferably the component D. The specific example of the component D is as follows: Non-ionic interfacial activity such as polyoxyethylene bromide test, polyoxygen: olefin polyoxyalkyl ether, polyoxyethylene vinegar, polyoxyethylene polyoxypropylene = acid, polyoxyethylene polyoxypropylene copolymer [ Other optional ingredients] The agent composition washes away the detergent residue with high washability without detrimental to the use of the detergent composition, good cleaning of the flux mκ, and low foaming property. Fan as an aminized character of the component c' can also contain the taste of you, Ethyllinium exclusive taste: (4), triethyldiamine, pentamethyldiethylenetriamine, four 152501.doc •29- 201134562 Methyl propylene diamine, etc. As other additional components in the detergent composition, it may optionally be selected from the group consisting of a chelating agent, a preservative, a rust inhibitor, a bactericide, and the like, which are used in a usual detergent composition. At least one of a group consisting of an antibacterial agent, an antioxidant, an ester, and a glycerin or a polyhydric alcohol-specific alcohol. The detergent is improved from the viewpoint of improving the detergency of the flux residue remaining in the gap. The total content of the above other optional components in the composition is preferably 45% by weight. More preferably, it is 2 (% by weight or less), further preferably 〇" by weight / 〇 or less, more preferably 0 〇 5 by weight. Hereinafter. [Preparation method of detergent composition] detergent composition The preparation method is not limited, and may be prepared by mixing the component A, the component B, and the component C, and further mixing the component d and/or any other component as needed. Further, as a component for mixing the components As the container, a container made of SUS, GS (glass lining) can be used as a solution mixing mechanism, and a spiral purple blade, a pitched paddle, a paddle or a magnetic stirrer can be used. The temperature of the mixture in the stirring is preferably 1 Torr to 4 Torr: and more preferably Μ 3 〇 °C. The peripheral speed of the agitating blades described above is usually preferably 3 seconds. Further, it is preferred that after all the components are added to the container, the mixed solution is mixed for (four) minutes or more, more preferably for 20 minutes or more. [pH of the detergent composition] The pH of the detergent composition is appropriately determined depending on the type of the object to be washed or the required quality of the object to be washed after washing, and the object to be washed is suppressed. It

152501.dQC • 30· 201134562 From the viewpoint of corrosion, it is preferably 8 to u, more preferably 9 to η. The enthalpy value of the detergent composition may be appropriately adjusted by using a desired amount of an inorganic acid such as nitric acid or sulfuric acid, an organic acid such as an oxycarboxylic acid, a polycarboxylic acid, an amine polycarboxylic acid or an amino acid, and the like. The metal salt is adjusted with a mineral salt such as a salt, ammonia, sodium hydroxide, potassium hydroxide or an amine. [Manufacturing Method of Electronic Component] The manufacturing method of the electronic component of the present invention is a method of manufacturing an electronic component including solder bumps, and includes the steps of: forming a solder bump on a substrate of the electronic component using a solder flux; The cleaning method of the invention cleans the flux residue derived from the solder flux. That is, the method of manufacturing an electronic component according to the present invention includes: soldering a component to a substrate using a solder flux, and then performing reflow to obtain a manufacturing intermediate (washed material) on which the component is mounted on the substrate via a solder bump And the step of cleaning the flux residue derived from the solder flux present in the gap between the substrate and the component by the cleaning method of the present invention. The solder bumps can be formed, for example, by a previously known method of forming a solder bump using a flux: a paste solder flux is printed on a substrate, followed by heating (reflow) to form a solder bump. Or a plating method in which a solder paste is applied to an opening portion of a solder resist layer formed on a substrate, followed by heating (reflow) to form a solder bump; and an opening portion of the solder resist layer formed on the substrate is filled with a paste A solder flux, followed by heating (reflow) to form a solder bump, and the like. Here, the "substrate" of the electronic component includes a semiconductor chip 152501.doc -31 - 201134562 in which a solder bump is formed, in addition to a circuit board, a package substrate (inserted substrate), and the like. A semiconductor device or the like including the above substrate. Examples of the "parts" include a semi-conductive m-chip type capacitor and a circuit board different from the circuit board used as the "substrate". When the solder bump is formed by any of the methods, the space (gap) between the substrate and the component can be efficiently cleaned by washing the substrate or the like by the cleaning method of the present invention after the reflow step. Flux residue. According to the cleaning method of the present invention, for example, the height (the shortest distance between the upper and lower sides of the substrate and the part) can be easily removed, 5 to 5 μm, width 13 〇 2 〇〇〇〇, depth 130 to 25000 Ϊ́πΐ2 flux residue entering in a narrow gap. EXAMPLES Examples were prepared and mixed in such a manner as to have the compositions described in Tables 1, 3, 5, and 6, to obtain Examples and Comparative Examples. The detergent composition. The temperature of the mixture in the stirring was set to 25 ° C, and the stirring of the mixture was carried out using a magnetic stirrer (80 mm rotor). The speed of the magnetic stirrer was set to 200 rpm, and the stirring time after all the ingredients were added to the container was set to 30 minutes. The pH of the detergent compositions is from 1 〇 to 11 . The pH of each of the detergent compositions was measured at 25 ° C using a pH meter (manufactured by Toago Corporation, 3 〇 G). Using the obtained detergent composition, the following tests (1) to (6) were carried out. The obtained detergent composition was filled in a washing tank (volume: 25 L) and heated to 60 °G. <Preparation of Flux Residue> After applying a cream solder (UFSOLDER LF_204-11 manufactured by Tamura Chemical Co., Ltd.) to a copper plate, heat treatment was performed under the nitrogen atmosphere (25 〇. 〇, 152501.doc • 32- 201134562 Preparation of flux m by the above-mentioned heat treatment to melt the flux in the f-shaped solder and float the metal from the material, and to separate the metal and the flux residue. Help (4) (4) Observe the stain on the copper plate such as a brown film. <Production of test piece> Processing, in which one pair of aluminum is shown in Fig. 1A and Fig. 1A, which are commercially available as Mpu (micr〇unit, micro processing unit) PKG substrate 1 A main surface interval W4 is arranged in parallel with each other in a manner of 3 mm. The cover glass 5 is disposed on the plate 2 of the plate 2. The height W3 of the space between the cover glass 5 and the substrate is 50 (four). Oxygenation will be performed by fixing the aluminum plate 2 to the ρκ = plate 1 and fixing the cover glass 5 to the iridium pair aluminum plate 2 to form a gap 17 surrounded by the PKG substrate 1, 1 for the aluminum plate 2 and the cover glass 5. The copper plate is removed from the flux residue prepared in the above <Preparation of flux residue> After placing 0.05 g near one of the ends of the gap 17, the sheet is placed in a 15 (TC high temperature bath. Thus, the flux is invaded into the gap 17 by capillary action. Then, by epoxy resin The test piece is obtained by sealing one of the ends of the gaps 17. The length of the flux residue filled in the region 4 is 5 mm in length by the capillary phenomenon, and is covered by the flux residue. The entire surface of the region 4 is surrounded. In Fig. 1A, the lengths of W丨 and W2 are both 5 mm, and the component number 6 refers to the accumulated air formed by the accumulation of air. The PKG substrate 1, 1 pairs of the nameplate 2, the cover glass 5, And the space surrounded by epoxy resin 3b (gap} 7) has a height of 50 μηη, a width of 3 mm, and a depth of 1〇mm. (1) Gap washability test 1 152501.doc •33- 201134562 After the formula is placed on the jig, the accumulated air 6 is immersed in the detergent composition (6 (TC ' 5 ) in a washing tank (volume: 25 l) in a manner lower than the area 4 (then, TC ' 5 . The speed of the cleaning tank is, for example, at a speed of 19 kPa/s (in the case of the embodiment) After the pressure reaches the decompression step until the pressure Pi of Table 3, Table 3, Table 5 and Table 6, the pressure of the decompression is maintained in Table 1, Table 3, Table 5, and Friends Table 6 (refer to " The pressure is maintained for a time"), and then the pressure in the washing tank is increased, for example, at a rate of 19 kPa/s (in the case of Example 1) until the pressures shown in Table 丨, Table 3, Table 5, and Table 6 are reached. P2. When the pressure 1 > 2 is equal to the normal pressure (10) 3 (kPa), the pressure in the washing tank is thereafter the time shown in Table i, Table 3, Table 5, and Table 6 (refer to " The pressure holding time after boosting is maintained at normal pressure. When the pressure P2 is lower than the normal pressure, the pressure in the cleaning tank is maintained at μ, and the times described in Tables 3, 5, and 6 (refer to "pressure-holding time after pressurization"). The series of steps including the pressure reduction step, the pressure reduction holding step, the pressure increasing step, and the pressure holding step after the pressure increase are performed in the table, Table 3, Table 5, and Table 6 (refer to "cycle number"). However, in the comparative example, no pressure reduction or pressure increase was performed. Further, in Examples 16 to 17, and Comparative Examples 2 and 2A to 23, the post-boost pressure holding step was not performed. In Comparative Example 13, the pressure reduction holding step and the pressure increasing pressure holding step were not performed. The decompression speed and the pressure increase rate are respectively obtained by dividing the pressure difference of the initial force (specific pressure) in the initial pressure spot-step in each step by the time required to become the specific pressure. For example, in Example i, the pressure was reduced from normal pressure (101.3 kPa) to 40 kPa in 5 seconds, so the pressure reduction rate was kPa/s (= (1〇ΐ·3-4·0)/5). I5250I.doc -34. 201134562 Reduction and retention steps, pressure-up steps Pressure-reduction step The pressure in the cleaning tank in the step is measured using a manometer (DM-10S manufactured by Shibata Scientific Co., Ltd.). The pressure in the washing tank was continuously monitored in each step. Further, in any of the examples of the pressure reduction holding step and the pressure maintaining step after pressure increase, the pressure in the washing tank in the pressure reducing holding step is controlled at 卩1±〇.4 (卯Within the range, the pressure in the cleaning tank after the boosting pressure maintaining step t is controlled within the range of p2 ± 〇 4 (kPa). The dust reduction step, the pressure reduction holding step, the pressure increasing step, and the pressure maintaining after the pressure increase The temperature of the detergent composition in the washing tank in the step, and the following rinsing month J" and the basket of the sputum are measured by a thermometer attached to the washing tank. The temperature of the detergent composition in the step, the step of increasing the pressure, and the pressure-retaining step after the step-up is monitored every 1 second in each step of the step, but the examples are controlled in the detergent. The average temperature of the composition

The value is less than ο.1 C. For example, the temperature "60t" of the detergent composition of Example J in Table 1 means a pressure reduction step (second step), a pressure reduction holding step (third step), and a pressure increasing step (fourth step). And the liter=force holding step (step 4a), the detergent composition:: value is in the machine-by-step. Furthermore, the control steps of the depressurization step, the subtraction (4) holding step, the step of increasing the pressure, and the temperature of the compound are controlled by using the detergent set in ::::, and the temperature is controlled as follows::: : The temperature control in the tank is completed by performing a pre-flushing step, a finishing rinsing step, a pre-flushing step, and - drying. The washing step and the rinsing step are carried out in different tanks. 152501.doc •35· 201134562 In the pre-rinsing step, the same conditions as the washing step were carried out except that 5% of the detergent composition used in each of the examples and the comparative examples was used as the rinsing composition. The pressure reduction step, the pressure reduction holding step, the pressure increasing step, and the post-boost pressure maintaining step are sequentially performed. Regarding the number of cycles, it is also the same as the number of cycles of the corresponding washing step. The pressure reduction step, the pressure reduction holding step, the pressure increasing step, and the post-boost pressure maintaining step are sequentially performed under the same conditions as the corresponding washing step except that water is used as the rinsing agent composition in the finishing rinsing step. . The number of cycles 'is also the same as the number of cycles of the corresponding washing step. In the pre-rinsing step and the completion rinsing step, no pressure reduction and pressure increase were performed in Comparative Example 1. Further, in the above Examples 16 to 17, and Comparative Examples 2 and 20 to 23, the pressure-retaining pressure holding step was not performed. In Comparative Example 3, the pressure reduction holding step and the pressure after pressure step were not performed. The drying of the test piece after the washing step and the rinsing step is performed by blowing a warm air (25 〇 to the test piece and removing the rinsing agent composition attached to the surface, and setting the test piece to 80 dead vacuum dry grain placed in the grain for 5 minutes. The pressure in the vacuum drying container is lO (kPa). In the gap washability test, the test piece is dipped in the cleaning of the examples, 13, 16, and 17. The composition of the agent and the detergent group of Comparative Example 13, 2〇~23. During the period of the article, 'ultrasonic vibration (10) kHz, 1.0 w/cm 2 was continuously applied to the detergent composition. (2) Gap Detergency Test 2 The test was carried out in the same manner as the gap detergency test 1 (4) except that the energy density of the ultrasonic vibration applied to the detergent composition was 〇.5 W/cm2. Further, 152501.doc • 36 - 201134562 2 = detergency test 2 (4) was carried out for the detergent compositions of Examples 1 to 13 as compared with the detergent compositions of Examples 1 to 3. (3) Gap Detergency Test 2 (b) The same test as the gap detergency test 2 (4) was carried out except that the number of cycles in the washing step was twice the number of cycles in the gap detergency test 2 (4). Further, the "gap detergent test 2" was carried out for the detergent compositions of Comparative Examples and Comparative Examples. Using a light microscope (magnification: 5 times), the area of the area where the helper agent was left in the area 4 observed in the sample after the test piece was examined in a plan view. I take the ratio of the area of the flux-removing residue in the area of the region 4 to the area of the region 4 observed when the test piece is viewed from above, as the washing rate (percentage), and evaluate the washing with the following criteria. The detergency of the detergent composition for the flux residue. (4) Gap Washability Test 3 The same as the gap cleansing test 1 except that the ultrasonic wave vibration was not applied to the detergent compositions of Examples 14 to 15 and the detergent compositions of Comparative Examples 14 to 19. The way to conduct the test. In the comparative example 14, no pressure reduction or pressure increase was performed. Further, in Examples 14 and 15, and Comparative Examples 15 to 19, the pressure-retaining step was not performed. (5) Gap Detergency Test 4 (Example 18: Adjustment of the concentration of water in the detergent composition) As shown in Fig. 3, the test uses a washing tank containing a washing step to carry out the pretreatment. The i-th washing tank 12 for rinsing and the washing device for the second washing tank 13 for performing the finishing rinsing step. Further, 20 test pieces prepared in the same manner as the above <test piece 152501.doc •37-201134562 > After the one of the test pieces 20 is placed on the jig, the test piece is immersed in the detergent tank 11 so that the accumulated air 6 (refer to FIG. 1A) is located below the area 4 (7) In the detergent composition, the detergent composition of Example 1 was used. The pressure reduction step and the pressure reduction retention step were sequentially performed under the same conditions as in the above (1) gap cleaning property test. The step of boosting and the step of maintaining the pressure after boosting, that is, reducing the pressure in the washing tank to 4 kPa, maintaining the reduced pressure state for 1 second, and then boosting the pressure in the washing tank to normal pressure ( After 1 〇 1 3 is illusory, the pressure state is maintained for 1 〇 seconds. Repeatedly, the pressure reduction step, the pressure reduction holding step, the pressure increasing step, and the pressure maintaining step after pressure step are washed. The amount of the detergent composition in the washing tank before the start of the step is a cycle of performing the pressure reduction step, the pressure reduction holding step, and the pressure increasing step and the pressure increasing step after the pressure increase in 30 seconds. The time is in seconds. Continue to the detergent combination during the impregnation of the test piece with the detergent composition. Ultrasonic vibration (40 kHz, 1.0 W/cm2) is applied to the device. After repeated steps of 10 steps including decompression step, depressurization holding step, step-up step and post-boost pressure holding step, self-cleaning tank The test piece is taken out and the same condition as the above (1) gap cleaning test, and '~ the piece is pre-rinsed in sequence, and the finished rinsing is completed after the completion, and the washed test piece is dried. The pre-rinsing step and the finishing step are performed for 300 seconds. In the pre-rinsing step, a 5% dilution of the detergent composition of Example 1 is used as a rinsing composition, and water is used as a rinsing step in the finishing rinsing step. Agent composition. 152501.doc •38- 201134562 The person will circulate the wash-group detergent composition before the net test, which will be different from the test piece above, and clean the detergent in the tank. The internal water content is adjusted to a concentration equal to the initial value (5.0% by weight). The water content of the detergent composition in the cleaning tank u is f and the water content in the composition in the sub tank 14 is At the same time, a capacitive moisture meter is used (the mechanic is made by her company). , EM (10) mail, 16 and measured. Pre-step, finishing rinsing step is to wash the gentleman each time a piece of test piece... do not change to the unused rinsing agent composition. In the same way, enter the second test until the second 〇 Piece test piece. For the cleaning of each test piece: - - person, the total number of cycles for a total of 20 test pieces is 2 times. The whole, dr two as a reference example 'except for the above-mentioned detergency test In the same manner as in Example 18 except for the water content in the unregulated composition, the same detergency test was carried out on 20 test pieces. The results of the detergency test were not shown in Table 7. As can be seen from Table 7, if the water content in the detergent composition is 2 to 〇%, high detergency is obtained. When the detergent composition is used repeatedly, the water evaporated by use is replenished. When the content of water in the m-cleaning composition is maintained at 2 to 1 G% by weight, high detergency can be maintained. (6) Evaluation of detergency <Criteria for determination of detergency of flux residue> A: Washing rate is 9〇% or more B: Washing rate is 80% or more and less than 90% C: Washing rate 70% or more is less than 80% 152501.doc -39- 201134562 D : Washing rate is 60% or more and less than 70% E: Washing rate is 50% or more and less than 60% F: Washing rate is less than 50% (7) Washability test In the washability test, the detergent composition which was entered in the gap 17 between the glass sheets in the test piece by the water can be washed to a large extent. Among them, regarding the test piece used in the test, the flux residue was not filled in the gap 17. A test piece in which the above-mentioned gap 17 was filled with a water-soluble dye methylene blue (reagent; Sigma Aldrich) and the colored detergent composition was prepared. After the test piece is placed on the jig in such a manner that the end side away from the epoxy resin in the longitudinal direction of the glass plate is located below, the test piece is immersed in the rinsing composition in this posture ( Water, 6 〇. 〇中. In the water washing test, 'replace the detergent composition with water, in the same conditions as the washing step (1st to 5th steps) in the gap washing test Bugo 3 The area of the dye residue observed when the washability test name = the gap 17 of the test piece was observed by an optical microscope (magnification: 50 times) ^ The plane observed when the gap 17 of the test piece was viewed from above was calculated. The ratio (percentage) of the area of the area of the dye-removed area relative to the gap (4) of the top view test piece was taken as a wash, according to the washing property of the base detergent composition described below. A criterion for determining the washing property of water of the detergent composition > A: the washing property is 90°/. The above B: the washing property is 70°/. The above is less than 9〇〇/0 152501.doc • 40- 201134562 C · · Washability is 50% or more and less than 70% D: Washability is not up to 5 〇 ° / (8) Foaming test at the time of ultrasonic pulse cleaning (a) 2 liters of the detergent composition was placed in the container 7 shown in Fig. 2, and the inside of the granulator 7 was decompressed visually. (b) the height of the bubble at (5 kPa), (b) 2 liters of the detergent composition diluted with water in the container 7 shown in Fig. 2 to obtain a concentration of the detergent composition of 10% by weight. The diluent (corresponding to the rinsing composition for the pre-rinsing step) was visually observed for the degree of bubble when the inside of the container 7 was depressurized (5 kPa). Further, in Fig. 2, the member number 8 means decompression. Open valve, member No. 1 〇 refers to the valve for opening and closing control of the pipe connected to the vacuum pump, and the component number 9 is the drain valve. <Criteria for determining the foaming property of ultrasonic pulse cleaning; > A : The bubble height is less than 10 cm B. The bubble degree is 10 cm or more and less than 2 cm C. The bubble height is 20 cm or more. Table 6 is shown in Table 1, and the water content used as the detergent composition is as low as 2~ 10% by weight of the specific composition, the internal pressure of the cleaning tank reached in the decompression step is pi (kpa) in the range of 0.1 to 7 kPa, and the pressure is maintained for 8 to 16 seconds in a row. The pressure in the cleaning tank is maintained at Pi±G4 (kpa), and the temperature of the detergent composition is maintained at 5 〇 7 (TC, in the first clean tank reached in the step of pressure < pressure is 5 P2 (kpa) in the range of 〇~12〇kpa, the depressurization step to the step of boosting in 1 〇 to 220 seconds, and the cleaning of the embodiment W7 "Do not leave the flux remaining in the gap 17 having a narrow width Residue 152501.doc 201134562 The detergency was higher than that of Comparative Examples 1 to 23, and the water washability was also good. Further, in the detergent compositions of Examples 1 to 17, the components B and C were not. The content of the surfactant is 8% by weight or less, and since the surfactant other than the component BB and the component C is substantially not contained, foaming is suppressed. Knife 152501.doc 42· 20 45 3 Bucket I <] 6: ss 2丄1 〇〇I 101.3 1 〇300 | 10(9) ii 1 1 1 i 1 1 1 1 1 I 卜jj 1 SI 〇1 〇 〇I 300 I 宕1〇(9) i 1 1 1 1 1 1 1 1 1 I l Private 1 § i inch 〇 1 〇 1 300 I 1 10(9) I i 1 1 1 1 1 1 1 i 1 1 I v HIaJ 1 〇1 inch 〇1 1 101.3 〇300 沄| ίο(9) | 1 1 1 1 1 i 1 1 1 III to I 1 I inch 〇I | 101.3 | *Τ) (HI 1 mm S i 1 1 1 1 1 1 1 1 III 1 1 1 〇1 1 101.3 | ! 300 (N 1 12(11) ! I 1 1 1 1 I 1 1 II l I -Ο 1 I 1 Pair I (loi^l ο | 320 | 〇m ο 00 II 1 1 1 1 1 1 1 i Ϊ 1 <NII inch 1 | 101.3] ο Γ315Π <Ν m 0? GN l 1 1 1 1 1 1 1 1 I Ϊ I to uJ m * 1 1 I 1 101.3 1 ο 1 300 ] in <N 丨12(11)] I 1 1 1 1 1 1 1 1 1 1 li 驷Reverse pressure and decompression (with boiling) 1 1 〇I | 101.3 I ο 〇m 10 (9) 1 I 1 I t 1 1 1 1 1 1 1 m -£ Overpressure and decompression (no boiling) 1 1 〇m 〇1 ί 101.3 ο 300 10(9) 1 1 1 1 • 1 1 1 II i 1 CN Decompression wash (with boiling) 1 m inch 290 m 101.3 1 300 300 300 1 1 1 1 1 1 t 1 1 1 1 I _〇 Normal pressure washing 1_ § 1 1 1 1 | 101.3 I 1 300 1 1 1 o 94.0 1 1 1 q 1 1 100.0 as Step 2 ~Step 43 2nd Step 3rd Step 4th Step 4a Step All Cleaning Steps 2nd Step - 4th Step 2nd Step - 43rd Step Component A Component B Component c Component D Summary of Cleaning Method Detergent Composition temperature (°c) Time to pressure P丨 (sec) Pressure P/kPa) Pressure reduction time (sec) Time to reach pressure P2 (sec) Pressure P2 (kPa) Pressure hold time after boost [sec] ] Washing time (sec) 1 Φ: S Prize Ν Ν !! ^ S» :: Cycle number (times) ※4 <Detergent composition> Water (ion exchange water) Diethylene glycol monobutyl ether Triethylene glycol monobutyl ether Diethylene glycol monohexyl ether Ethylene glycol dimethyl ether decyl diethanolamine diethanolamine SccCi2-14~〇-(E〇)7H Total weight ratio (component B / component C) Weight ratio (component B / component A) + province - Μ υ >W <r •5 驷 驷 炽 炽 炽 * 52 52 52 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -肊羿萆^朱羿柏-^丨"^·^^-※ 琀屯'雎^蝶~蜊*丨 淑淑蝶古丨结轵-雄皙丨皙丨皙丨淑哟哟哟卩筠-※ 152501 .doc •43- 20 45 3 0 u Q u CQ << 卜jj Q ω Q <<<< CD <<<<< VD iJ ω lx PJ <<<;< DQ <<<< m ίΚ < OQ <<<<u-> u QU <<<< (N < OQ <<<<寸 £ u Q u <<< %κ < CQ <<<< mi? u Q u CQ << (N -O ω [JU ω 0Q << [Xl PL , [X. Q << Ultrasonic physical force (40 kHz, 1.0 WVcm2) Ultrasonic Physical force (40 kHz, 0·5 W/cm2) iTi 〇N 3 o Visit w <N Ultrasonic physical force (40 kHz, 1.0 W/cm2) Gap washability test 1 Gap washability test 2 (a ) Gap Detergency Test 2(b) Washed Strip Foaming (a) Foaming (b) 152501.doc •44· 201134562

[ε^ι——I than 13 〇l|S tw sword s $ gs (/) 〇 17,3 ο 101.3 ο 300 νΊ */Ί S: 2 itchy but ΦΊ 岭 ratio 12 1 I 〇VO vd «ο 101.3 300 »〇1 ^ ^ 3S 炒Θ $ 实13 1 I 1 1 i 1 1 Ο 1 1 1 1 〇54.0 1 1 1 40.0 〇实12 I 1 1 I 1 1 I 1 Ο 1 i I 1 I 5.000 93.992 1 1 1 1 1.000 i 1 1 1 1 1 1 ο 1 1 I 1 〇69.0 10.0 I 1〇.〇1 〇V) I 〇 ίο 1 1 1 1 1 1 1 1 ο II 1 1 ο wS 190.0 1 1 1 1 〇ON •ζ I 1 1 1 1 1 I ο 1 II 1 ο »〇94.95 ; 1 1 1 1 0.05 00 1 I 1 1 II 1 ο 1 1 1 I ο iri | 94.0 i 1 I 1 1 1 11 I 1 I 1 II 1 101.3 1 ο I i 1 1 1 15.0 1 84.0 1 〇 ratio 10 II 1 I 1 1 1 101.3 ο 1 II 1 1 »2·〇1 1 87,0 | 1 1 1 1 〇〇 \ £ 1 1 1 1 1 1 1 101.3 ο i 1 1 I ο | 98.0 | 1 1 1 1 〇m I ] 1 1 1 i 101.3 ο 1 I ] 1 ο CN 97.0 t 1 1 1 〇VO %: Repeat Pressure and decompression (with boiling) § ρ — o in 1 101.3 ο 300 sgo' 10.0 89.0 1 1 1 1 〇i § ^ t (N inch step 2 | step 3! Step 4 step 4a step city i ^ <N ^ Component A Component B Army Φ Component C Summary of cleaning method Temperature of detergent composition (°c) Time to reach pressure 卩! (sec) Pressure P/kPa) Pressure reduction time (sec) Pressure P2 Time (sec) Pressure P2 (kPa) Pressure hold time after boost [sec] Wash time (sec) 1 Time spent by cycle & 1 (sec) Φα <Ν JS Awards K \ T\ (J • ώ ^ number of cycles (sub-strict 4 < detergent composition > water (ion exchange water) diethylene glycol monobutyl ether triethylene glycol monobutyl ether diethylene glycol monohexyl ether triethylene glycol dioxime Ether glycerol methyl diethanolamine -45- - ς pair * SPIGSl 152501.doc 201134562 | than 13 to 12 real 13 1 1 100.0 〇 \ 04 1 | 0.008 I 100.000 Os 2 1 1 1 loo.o I 〇\ real 10 1 1 100.0 〇〇〇〇ON as i 1 1 ιοο.ο I | 1899 | 〇ON 〇〇〇1 ιοο.ο I Os v〇i than 11 1 1 100.0 v〇V-) than 10 1 1 100.0 Bub On £ 1 1 I ιοο.ο ] 00 Os 00 σ\ 卜 1 1 1 ιοο.ο I (Ν m Ό 1 1 1 ιοο.ο IS 00 I component D 1 diethanolamine SCCCi2-I4*〇~(EO)7H Total Weight ratio (component B/ Sub C) Weight ratio (component Β / composition Α) | Weight ratio {component B / [component A + composition C]} 舡蜊 舡蜊 舡蜊 丨 丨 啭Τ 啭Τ 啭Τ 啭Τ 啭Τ 啭Τ 啭Τ ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί 152 152 .doc. Army 驷 l-tv Tong "驷" * f apricot 锑 qm handle "ugly" ^ ※.柘一Ϊ wa-余赵 sw嫦i<f«lWM 德龙(inch※ .^^^^^^«^"丄"^^^^※ #淑农缉9哟靼哟古丨锜轵li4fT余-维蜊嘱ΐ余蜊嘱ΐ ==3⁄43⁄4 Award I (^※ -9 inch - 'loszsl •46· 201134562 [inch <1 ratio 13 ω ω ω < U 〇 12 UQ OQ D can not be washed and insoluble于水实13 < CQ <<<<d L real 12 < CQ << CQ << CQ <<<<<<<<<<<< 〇\ < CQ <<<< 00 < CQ <<<<< 11 UQ u <<<< 10 UQ u <<<< \ Jj UQ u <<<< CQ <<<<<< OQ <<<<<<<<<<1^, 1.0 recognize 7<: 1112) Ultrasonic physical force (40 kHz, 0.5 W/cm2) Ultrasonic physical force (40 kHz, 0.5 W/cm2) Cycle number 2 times Ultrasonic physical force (40 kHz '1.0 W/cm2) Gap washability test 1 Gap Detergency Test 2 (a) Gap Detergency Test 2 (b) Water Washability Foaming (a) Foaming (b) 152501.doc • 47· - Bud uop.slnfslnl 201134562 \ •Ι Ι 006 οε οε (6α0ε - • ΙΟΙ 0 006 (S9e s ε-οι 006 - - (65) 09 mm 01 ε-οι 006 β 02 (5) π inch £

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nB--ra^rtoT 5B*tou 砩Β- 0s,n Η 卜(03)-0k.2uu3s ϋφ^/βφ^)^ϊ 锏(νφ^/ραφ^)^«Η« {υφ 哒+νφ哒】 / Η φ ^ } jade one - side 3OP.I0s (N51 152501.doc -50- 201134562, than 23 < UU than 22 1 1 1 : than 21 <<< than 20 <<< 17 <<< Real 16 <<< Ultrasonic physical force (40 kHz, 1.0 W/cm2) Washed Susceptibility (a) Foaming (b) 152501.doc .羿艄 "驷" <f4«qi If埘"壬" ※.鹓蛘ww-e-GaN^s«r嫦;t^w Μ浈 (inch ※.匣巽萆^遽^·^·^ ^,—""·!!-^?^※ 埭 埭 嘞 嘞 嘞 嘞 趔 - - - - - - - - - - - - - - - - - - ί ti ti ti ti ti ti ti ti ti ti ti ti ti ti ti ti ti uop.losfNsl •51 · 201134562 [Table 7]

And the details of the components in Table 6 are as follows [Component B] Diethylene glycol monobutyl ether (manufactured by Nippon Emulsifier Co., Ltd.) Triethylene glycol monobutyl ether (manufactured by Nippon Emulsifier Co., Ltd.) Diethyl alcohol monohexanide ( Made by Japan Emulsifier Co., Ltd.) Ethyl alcohol-to-one (manufactured by Nippon Emulsifier Co., Ltd.) [Component C] Diethanolamine (manufactured by Wako Pure Chemical Industries, Ltd.) Methyldiethanolamine (manufactured by Wako Pure Chemical Industries, Ltd.) [Ingredient D]

SecCi2_M_〇-(EO)7H (nonionic surfactant, manufactured by Nippon Shokubai Co., Ltd.)

SecC12.14-〇_(E〇)7H is a mixture of SecC12-0-(E0)7H and SecC14-0-(E0)7H. [Independent ingredients] Glycerin (manufactured by Kao Corporation) [Others] 152501.doc -52· 201134562 Solvent petroleum brain (manufactured by Wako Pure Chemical Industries, Ltd.) Surfactant 10% aqueous solution: Lutensol XL-70 from BASF Corporation (nonionic interfacial activity) 10% by weight aqueous solution of the agent) Industrial Applicability The detergent composition of the present invention can be preferably used for washing of the residual agent which remains in a narrow gap. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a conceptual plan view of a test piece used for the detergent residue of the detergent composition; FIG. 1B is a conceptual side view of the test piece shown in FIG. 1A; A schematic view of the cleaning tank for the force in the foaming test of the pressure-sensitive composition 2; and FIG. 3 is a conceptual diagram of the cleaning device in the embodiment [Description of the main components] 1 PKG substrate 2 Aluminum plate 3a, 3b Epoxy resin 4 Area 5 Cover glass 6 Accumulated air 7 Container 8 Decompression open valve 9 Discharge valve 10 Piping opening and closing control valve 152501.doc -53- 201134562 11 Washing tank 12 1st washing Tank 13 2nd washing tank 14 Sub tank 15, 16 Moisture meter 17 Valve 18 Circulation line 152501.doc •54

Claims (1)

201134562 VII. Patent application scope: 1·: A method for cleaning a washed object', which comprises washing a cleaning agent with a cleaning agent and a flux residue by using a detergent composition; The step includes: immersing the object to which the flux residue is attached, the impregnation step in the detergent composition contained in the cleaning tank of the adjustable pressure (step )); The pressure inside is reduced to a pressure reduction step (second step) satisfying the pressure (PKkPa) of the following formula (丨); 0.1 (kPa)^P, ^7 (kPa) (1) for 8 to 16 seconds in succession During the depressurization step, the pressure in the above-mentioned washing tank under reduced pressure is maintained? And 〇.4 (1^?&), and maintaining the temperature of the detergent composition in the above-mentioned cleaning tank at a pressure reduction step of 5 〇 to 70 ° C (step 3); After the pressure reduction holding step, the pressure in the washing tank is a pressure increasing step (fourth step) satisfying the pressure (JJ) of the following formula (2); 50 (kPa)^P2^120 (kPa) (2) The second step to the fourth step are carried out in 10 to 220 seconds, and the detergent composition contains 2% by weight or more and 1% by weight or less of water (ingredient a), and 5% by weight or more and less than 97.75% by weight. A glycol ether (ingredient 0) and an amine compound (component c) of 0.05% by weight or more and 5% by weight or less, and the above component B is represented by the following formula (1): R'-O^EO)TM^ 2 (1) 152501.doc 201134562 [In the above formula (1), R1 is an alkyl group having 1 to 6 carbon atoms, R2 is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and E is an oxygen-extended ethyl group. The claws indicate that the average addition molar number of E〇 satisfies 2^m^3], and the above component C is represented by the following general formula (2): [Chemical Formula 1] R3-N-(EO)pH (ΕΟ), -Η (2) [In the above formula (2), 'r3 represents a hydrogen atom or Alkyl groups of 1 to 4, ΕΟ is an oxygen-extended ethyl group, and p and q respectively represent the average addition molar number of E〇, satisfying 1^p+q^4] 〇2. The cleaning method of the net material further comprises the step of repeating at least the second step to the fourth step (the fifth step), and repeating the fifth step in the fifth step, respectively, in 10 to 220 seconds. The second step to the fourth step described above. 3. The method of cleaning the washed matter of claim 1 or 2, further comprising a pressure maintaining step after pressure increase (step 4a), wherein the step is after the fourth step, 'the inside of the cleaning tank is The pressure is maintained in the range of 5 Torr to 12 kPa, and is equal to the pressure of P2 soil. 4 (kPa) or higher than P2 ± 〇. 4 (kPa) for 8 to 16 seconds. 4. The method of cleaning a washed article according to any one of claims 3 to 3, which further comprises the step of rinsing said washed matter with a rinsing composition containing 90 to 99.9999% by weight of water. 5. The method of cleaning the washed matter according to claim 4, wherein the rinsing step 152501.doc 201134562 2 replaces the detergent composition used in the second step to the fourth step of the fifth step with the above The rinse composition is carried out. The method of cleaning the washed matter according to any one of the items 1 to 5, wherein the third step of the washing step is performed while applying ultrasonic vibration to the detergent composition. 7. The method of cleaning a washed article according to claim 5, wherein a detergent composition is subjected to ultrasonic vibration, and the third step of said rinsing step is carried out. 8. A method of manufacturing an electronic component including a solder bump, comprising: a step of forming a solder bump on a substrate of an electronic component using a solder flux containing a flux; and utilizing any of the items 1 to 7 A method of washing the above-mentioned washed matter by a method of washing the above-mentioned flux-removing agent. A cleaning device for use in a method of cleaning a washed article according to any one of claims 1 to 3, further comprising: said water-repellent composition in said cleaning tank; The content of (component Α) is 2% by weight or more and 1% by weight or less. & 152501.doc