TW201133022A - Optoelectronic sensor - Google Patents

Optoelectronic sensor Download PDF

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Publication number
TW201133022A
TW201133022A TW99107919A TW99107919A TW201133022A TW 201133022 A TW201133022 A TW 201133022A TW 99107919 A TW99107919 A TW 99107919A TW 99107919 A TW99107919 A TW 99107919A TW 201133022 A TW201133022 A TW 201133022A
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Taiwan
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light
signal
receiving
detected
light projecting
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TW99107919A
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Chinese (zh)
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TWI400471B (en
Inventor
Yoshitane Saitou
Kenji Nishikido
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Anywire Corp
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Abstract

The purpose of the present invention is to obtain an optoelectronic sensor and an optoelectronic sensor system in which even an extremely thin subject can be correctly detected under the influence of a disturbance. To achieve the purpose, the optoelectronic sensor of the present invention comprises a projector and a receiver, and it detects the existence of the subject between the projector and the receiver according to the intensity variation of the received signal of the receiver. The reciver receives the projecting signal from the projector that does not intersect with the subject, and the projecting signal from the projector that intersects with the subject, then works in synchronization with the project timing signal from the projector. Then, comparing the difference between the level of the receiving signal that is not weaken due to the subject and the level of the reciving signal that is weaken due to the subject, the existence information of the subject is detected.

Description

201133022 六、發明說明： 【發明所屬之技術領域】 本發明有關於根據在投光元件與受光元件之間有被檢 測體存在時之受光信號位準的差來檢測出被檢測體之有無 的光電感測器及光電感測系統。 【先前技術】 在根據在投光元件與受光元件之間有被檢測體存在時 * 之受光信號位準的差來檢測出被檢測體之有無的光電感測 器及光電感測系統中，成對之投光元件與受光元件一般配 置成從投光元件至受光元件的光路徑與被檢測體的軸線平 行。然而，在被檢測體之厚度薄的情況，例如被檢測體是 薄平板的情況，與被檢測體之軸線平行的光路徑不會被該 被檢測體遮蔽，因而可能無法檢測出被檢測體。因此，在 特開平8 — 1 4898 1號公報（專利文獻1)，已提議一種檢測方 法，其係在複數個投光部與受光部相對向地配置之多光軸 光電感測器中，利用配置於與發出投光信號之投光部相異 的段之受光部來進行檢測。 若依據此方法，因爲從投光部至受光部的光路徑相對 於水平方向具有角度，即傾斜，所以即使是薄平板狀之被 檢測體配置成其軸線水平的情況，光路徑亦被被檢測體遮 蔽而可實現該檢測。 [專利文獻1]特開平8 — 1 4898 1號公報 【發明內容】 201133022 發明所欲解決之課題 然而’在被檢測體是極薄的情況，有利用在該專利文 獻1所揭示的方法亦無法檢測的情況。又，即使是被檢測 體遮蔽光路徑的情況，如果被檢測體是半透明，則具有在 受光部之受光位準的變化小並受到在受光部周邊之照明或 反射等之擾亂的影響而檢測結果變成不正確的問題。 因此，本發明之目的在於得到即使是被檢測體是極薄 的情況，亦不會受到擾亂的影響而可正確地檢測出被檢測 體之光電感測器及光電感測系統。 解決課題之手段 本發明之光電感測器的第一型具有相對向設置之投光 部與受光部，並以受光部之受光信號的強度變化來檢測出 被收容於該投光部與該受光部之間的空間之被檢測體的有 無，而該受光部具有ά該投光部之投光時序信號同步地動 作的第1受光元件與第2受光元件。又，該投光部具有第 1投光元件，係配置成'投光信號在沒有與該被檢測體交叉 的情況下到達該第1受I元件，在與該被檢測體交叉的情 \ 況下到達該第2受光元件；及第2投光元件，係配置成投 光信號在沒有與該被檢測體交叉的情況下到達該第2受光 元件，在與該被檢測體交叉的情況下到達該第1受光元 件。然後，將該第1投光元件與該第1受光元件的一對、 及該第1投光元件與該第2受光元件的一對設爲第1組’ 將該第2投光元件與該第1受光元件的一對、及該第2投 201133022 光元件與該第2受光元件的一對設爲第2組，並在該第1 組’比較不會因該被檢測體而衰減之該第1受光元件的受 光信號、與會因該被檢測體而衰減之該第2受光元件之受 光信號的位準差，以檢測出該被檢測體的有無資訊。又， 在該第2組’比較會因該被檢測體而衰減之該第1受光元 件的受光信號、與不會因該被檢測體而衰減之該第2受光 元件之受光信號的位準差，以檢測出該被檢測體的有無資 訊’雙重地比對檢測出從該第1組所得之該被檢測體的有 無資訊與從該第2組所得之該被檢測體的有無資訊。 在此情況，亦可在該第1投光元件的投光時序進行在 該第1組之該位準差的比較，並在該第2投光元件的投光 時序進行在該第2組之該位準差的比較。此外，在此光電 感測器係以二個受光元件接收來自一個投光元件的投光信 號，而在以下的說明有時將此型式稱爲第一光電感測器。 本發明之光電感測器的第二型具有相對向設置之投光 部與受光部，並以受光部之受光信號的強度變化來檢測出 被收容於該投光部與該受光部之間的空間之被檢測體的有 無，而該投光部具投射在沒有與該被檢測體交叉的情況下 到達該受光部的投光信號之第1投光元件；及投射在與該 被檢測體交叉的情況下到達該受光部的投光信號之第2投 光元件。然後，比較接收來自該第1投光元件之不會因該 被檢測體而衰減之投光信號而產生之分時受光信號、與接 收來自該第2投光元件之會因該被檢測體而衰減之投光信 201133022 號而產生之另一個分時受光信號的位準差’以檢測出被檢 測體的有無資訊。在此情況，以一個受光元件接收來自二 個相異之投光元件的投光信號，在以下的說明，有時將此 型式稱爲第二光電感測器。此外，雖從一個受光元件來產 生二個受光信號，但受光信號係被分爲來自其中一個投光 元件之受光時間與來自另一個投光元件之受光時間’即進 行分時受光，而其中使前者之受光時間爲分時受光信號’ 並使後者之受光時間爲另一個分時受光信號。本發明之光 電感測器的第三型是具有相對向設置之投光部與受光部’ 並以受光部之受光信號的強度變化來檢測出被收容於該投 光部與該受光部之間的空間之被檢測體的有無’而該投光 部具有第1投光元件與第2投光元件。又，該受光部具有 接收來自該第1投光元件之不會因該被檢測體而衰減的投 光信號及來自該第2投光元件之會因該被檢測體而衰減的 投光信號之第1受光元件；及接收來自該第2投光元件之 不會因該被檢測體而衰減的投光信號及來自該第1投光元 件之會因該被檢測體而衰減的投光信號之第2受光元件》 而且，將該第1投光元件與該第1受光元件的一對、及該 第2投光元件與該第1受光元件的一對設爲第1組’將該 第2投光元件與該第2受光元件的一對、及該第1投光元 件與該第2受光元件的一對設爲第2組，並在該第1組比 較不會因該被檢測體而衰減之該第1受光元件的分時受光 信號、與會因該被檢測體而衰減之該第1受光元件之另一 201133022 個分時受光信號的位準差’以檢測出該被檢測體的有無資 訊。並且，在該第2組’比較會因該被檢測體而衰減之該 第2受光元件的分時受光信號、與不會因該被檢測體而衰 減之該第2受光元件之另一個分時受光信號的位準差，以 檢測出該被檢測體的有無資訊’雙重地比對檢測出從該第 1組所得之該被檢測體的有無資訊與從該第2組所得之該 被檢測體的有無資訊。 在此情況，亦可在該第1投光元件及該第2投光元件 的分時投光時序進行該位準差的比較。 此外，因爲在此光電感測器，亦以二個受光元件接收 來自一個投光元件的投光信號，在以下的說明，與該本發 明的第二型一樣，有時稱爲第二光電感測器。 又，在該投光部具有第1及第2投光元件並具有該第 1及第2組的情況，亦可從在該第1組所得之該被檢測體 的有無資訊與在該第2組所得之該被檢測體的有無資訊雙 重地比對該被檢測體的有無資訊，而在未檢測出該被檢測 體之有無的情況，檢測出該被檢測體的異常狀態及/或感測 器故障。 並且，亦可多段地構成該光電感測器，並作成檢測複 數個該被檢測體的光電感測器，亦可共用在該第2組的該 第2投光元件及用於與被進行與該第2組有關的檢測之被 檢測體相鄰之其他的被檢測體之在該第1組的該第1投光 元件，並共用在該第2組的該第2受光元件及用於該其他 201133022 的被檢測體之在該第1組的該第1受光元件。或者，亦可 該第2投光元件被共用作爲用於與跟投光信號交叉之被檢 測體相鄰之其他的被檢測體之該第1投光元件，該第2受 光元件被共用作爲用於與該其他的被檢測體之該第1受光 元件。 再者，亦可在上述之任一種情況，將成對之投光部與 受光部進行單元化。 本發明的光電感測系統，具備有複數個上述之光電感 測器的任一型，並具備與一連串之該投光部連接的第1管 理子站、及與對應於該投光部之一連串之該受光部連接的 第2管理子站》而且，該第1管理子站產生該投光時序信 號，而該第2管理子站產生與該投光時序信號同步之受光 信號的時序信號。 又，本發明的光電感測系統亦可係複數個一連串之該 投光部與一連串之該受光部連接於共同的資料信號線，並 向上階母站傳達該被檢測體的有無資訊、該被檢測體的異 常狀態及/或感測器故障資訊。 並且，本發明的光電感測系統亦可係在具備該投光部 具有第1及第2投光元件且具有該第1及第2組之光電感 測器的情況，從在該第1組所得之該被檢測體的有無資訊 與在該第2組所得之該被檢測體的有無資訊雙重地比對該 被檢測體的有無資訊，而未檢測出該被檢測體之有無的情 況，檢測出該被檢測體的異常狀態及/或感測器故障。 201133022 發明之效果 本發明的光電感測器使受光部作用爲基準感測器及檢 測感測器即作用爲接收不會被被檢測體遮蔽之投光信號的 感測器（基準感測器）、與接收在被檢測體位於投光部與受 光部之間時被被檢測體遮蔽之投光信號的感測器（檢測感 測器），並藉由比較這些基準感測器與檢測感測器，以檢測 出被檢測體的有無。此時，因爲作爲檢測感測器的受光部 接收從投光部在與被檢測體交叉的情況下到達受光部的投 光信號，所以該受光信號在被檢測體存在的情況衰減。又， 藉由比較2個檢測結果即藉由取得2個受光信號的差分， 可排除擾亂的影響。因此，即使是被檢測體極薄的情況， 亦不會受到擾亂的影響，可正確地檢測出被檢測體。 又，將在受光部所接收之不會因被檢測體而衰減的受 光信號、與因被檢測體而衰減之受光信號之位準差的比較 在兩受光信號的受光結束時序進行，即若是第一光電感測 器則在投光部之投光時序，而若是第二光電感測器則在第 2投光元件之投光時序進行的情況，就在各段檢測出被檢 測體的有無。因而，至被檢測體之檢測出的響應時間短， 而可得到高速的響應速度。 並且，投光部採用具有第1及第2投光元件者，受光 部採用具有第1及第2受光元件者，將第1投光元件與第 1受光元件的一對、及第1投光元件與第2受光元件的一 對設爲第1組，將第2投光元件與第1受光元件的一對、 -10- 201133022 及第2投光元件與第2受光元件的一對設爲第2組，藉由 使檢測構造雙重化，可使被檢測體的檢測精度變成更高。 此外，在此情況’在第一光電感測器，在第1投光元件的 投光時序進行在第1組之位準差的比較，在第2投光元件 的投光時序進行在第2組之位準差的比較，又，若在第二 光電感測器’則在第2投光元件的投光時序進行，藉此， 在各段檢測出被檢測體的有無。因而，至被檢測體之檢測 出的響應時間短，可得到高速的響應速度。又，雙重地比 對被檢測體的有無資訊，在未檢測出被檢測體之有無的情 況’根據從複數個受光信號進行邏輯判斷的結果所得之邏 輯値，可檢測出被檢測體的異常保持或保管狀態（斜放 置）、或者感測器故障。 此外，在投光部具有第1及第2投光元件，而投光元 件及受光元件具有第1及第2組的情況，若利用來自投光 元件的散射光，則共用在第2組的第2投光元件及用於與 與在第2組被檢測之被檢測體相鄰之其他的被檢測體之在 第1組的該第1投光元件，已使投光元件減半，成爲更簡 單之構造。 此外，若使成對的投光部與受光部單元化，則因爲可 自由地設定各段的間隔，所以具有可應用於各種厚度或大 小的被檢測體又可大爲擴大對被檢測體之形狀相異之情況 的應用範圍。 在本發明之光電感測系統，因爲具備有該本發明的光 -11- 201133022 電感測器，所以即使是被檢測體極薄的情況，亦不會受到 擾亂的影響，可正確地檢測出被檢測體。又，使被檢測體 之有無的響應時間變快，並且使檢測構造雙重化，藉此得 到可確實檢測出被檢測體之有無的改善。又’根據從複數 個受光信號進行邏輯判斷的結果所得之邏輯値，可檢測出 被檢測體的異常保持或保管狀態（斜放置）' 或者感測器故 障，可提高可靠性。此外’因爲各段的間隔可自由地設定， 所以可大爲擴大對厚度或大小相異的被檢測體、或被檢測 體之形狀相異之情況的應用範圍。 此外，因爲亦可利用光電感測器進行用以檢測出被檢 測體的異常保持或保管狀態（斜置）、或者感測器故障的邏 輯判斷，又亦可利用光電感測系統所具備之判斷裝置（PLC 或主電腦等）進行。 【實施方式】 以下，一面參照圖式一面說明本發明之第1光電感測 器及具備該光電感測器之光電感測系統的實施形態》 第1圖係本發明之光電感測系統之實施例的整體圖， 第2圖係該光電感測系統的方塊圖。此光電感測系統係將 複數個光電感測器11與是共用之資料信號線的DP信號線 7、DN信號線8連接。光電感測器11由管理子站l〇a、l〇b、 從管理子站l〇b所串接之複數個子站輸入部12b及從管理 子站10a所串接之複數個子站輸出部12a所構成。子站輸 入部12b相當於本發明的投光部，子站輸出部12a相當於 -12- 201133022 本發明的受光部，用以檢測有無被收容於子站輸出部12a 與子站輸入部1 2b之間的被檢測體。例如，在掌握被檢測 體位於棚架構造之棚架之哪個位置的系統中，是掌握半導 體晶圓或液晶面板等之被保管的棚架位置或狀況。但，被 檢測體未限定如此，亦可是未定型或形狀相異的被檢測體。 構成光電感測器1 1的管理子站10a、10b、子站輸入 部12b及子站輸出部12a共用母站6及資料，母站6以並 行信號與控制部1進行資料的收發。即，從控制部1的輸 出單元2向母站6送出是並行（平行）輸出信號的控制部輸 出信號4，輸入單元3從母站6將並行輸入信號作爲控制 部輸入信號5來接收，是主系統之控制部1與母站6之間 的通信是收發並行信號並以高速進行信號傳輸》母站6與 DP信號線7、DN信號線8連接，而與此信號線所連接的 光電感測器11連接。又，構成光電感測器11的子站輸入 部12b及子站輸出部12a亦與DP信號線7、DN信號線8 連接<*而，成爲控制部1可經由母站6掌握全部之控制、 監視資料的構成。此外，在第1圖，雖然管理子站l〇a、 l〇b包含於光電感測器11之構成中，但是亦可與光電感測 器1 1分開。 在第3圖放大表示光電感測器之構成。如第3圖所示， 光電感測器11連結由一對子站輸出部12a與子站輸入部 1 2b所構成之複數個感測部1 1 a、1 1 b。此外，對感測部的 個數無限制，可因應於需要而連結所需要的個數，此光電 -13- 201133022 感測器亦連結多個感測部，但是在第3圖權宜上僅表示2 個感測部。 管理子站l〇a、管理子站10b與感測部1 la之間由橋接 配線1 3連接，並且感測部1 1 a與下一段的感測部1 1 b由子 站間連接3 4連接。而，感測部1 1 b以後之段的感測部間亦 —樣地由子站間連接3 4連接。 在藉橋接配線13或子站間連接34的連接，使用連接 器33。以簡化連接。此外，在複數個子站間連接34是等 間隔的情況，藉由將子站間連接3 4之長度進行規格化，以 簡化配線，而在不是等間隔的情況，藉由使子站間連接3 4 之長度配合間隔，而可簡化配線作業、連接作業。 管理子站10a是投光側的管理子站，向對管理子站l〇a 串接而附屬之複數個子站輸出部12a送出串接信號，而設 定複數個子站輸出部12a的動作時序。另一方面，管理子 站l〇b是受光側的管理子站。向對管理子站1 〇b串接而附 屬之複數個子站輸出部12b送出串接信號，而設定複數個 子站輸出部12b的動作時序。 由是投光部之子站輸出部12a與是受光部之子站輸入 部12b所構成的感測部lla、lib本身是透過式感測器，被 檢測體35a被收容於子站輸出部12a與子站輸入部12b之 間。感測部1 1 a的子站輸入部1 2b具有：第1受光元件 PDld，係從子站輸出部12a的投光元件LDld接收在沒有 與被檢測體35a交叉的情況下到達子站輸入部12b的投光 -14- 201133022 信號；及第2受光元件PD1 u，係從投光元件LD1 d 與被檢測體3 5 a交叉的情況下到達子站輸入部1 2 b 信號。又，子站輸出部12a不僅該投光元件LDld’ 第2投光元件LDlu，其配置成投光信號在沒有與被 3 5a交叉的情況下到達第2受光元件PDlu，並在與 體3 5 a交叉的情況下到達第1受光元件PD 1 d。感測 之下一段所連結的感測部1 1 b等亦是一樣之構成。 在以下的說明，發光元件及受光元件之編號係對初 測部11 a賦予1，對下一段的感測部1 1 b賦予2 ’對 的光電感測器1 1 η賦予η。因此，例如感測部1 1 b 投光元件成爲LD2u，感測部lln的第2投光元件成爲 從發光元件LDnd至第1受光元件PDnd的投光 不會被被檢測體35a遮蔽的受光信號，並成爲對投 被被檢測體35a遮蔽之情況比較的基準信號。又， 元件LDnd向第2受光元件PDnu斜分散的投光信號 測體35a遮蔽，而在第2受光元件PDnu的受光信號 成爲微小位準的檢測信號。然後，比較這些基準信 測信號的位準差，而檢測有無被檢測體3 5 a的資訊《 具有難受到受光元件周邊之影響的特徵。 根據基準信號與檢測信號之比較的檢測判斷係 部之投光時序進行。此外，對進行檢測判斷的時序弈 例如亦可藉各感測部所內建的定時器動作進行，或 在全部感測部巡迴後進行。但，在投光部之投光時 接收在 的投光 還具有 檢測體 被檢測 部1 la 此外， 段的感 第η段 的第2 L D n u。 信號是 光信號 從發光 被被檢 i衰減， 號與檢 •因而， 在投光 专限制， 者亦可 序進行 -15- 201133022 根據基準信號與檢測信號之比較之檢測判斷的情況與在全 部感測部巡迴後進行檢測判斷的情況相比，至檢測出被檢 測體的響應時間縮短，而可實現高速的響應速度。此外， 檢測判斷的細節將後述。又，在藉各感測部所內建的定時 器動作進行檢測判斷的情況，預先設置記憶保持基準信號 與檢測信號的區域，並以子站輸入部12b進行比較計算， 關於記憶保持區域將後述。 另一方面，從第2投光元件LDnu至第2受光元件PDnu 的投光信號是不會被被檢測體35a遮蔽的受光信號，並成 爲對投光信號被被檢測體35a遮蔽之情況比較的基準信 號，從第2投光元件LDnu向第1受光元件PDnd斜分散的 投光信號被檢測體35遮蔽，而在第1受光元件PDnd的受 光信號衰減，成爲微小位準的檢測信號。因此，將投光元 件LDnd與第1受光元件PDnd的一對、及投光元件LDnd 與第2受光元件PDnu的一對作爲第1組，將第2投光元件 LDnu與第1受光元件PDnd的一對、及第2投光元件LDnu 與第2受光元件PDnu的一對作爲第2組，可雙重地比對檢 測出從第1組所得之該被檢測體的有無資訊與從第2組所 得之該被檢測體的有無資訊。因而，能以可靠性高之感測 器的檢測準確性檢測出被檢測體3 5 a。此外，在第1組之 基準信號與檢測信號之位準差的比較係在投光元件LDnd 之投光時序進行，而在第2組之基準信號與檢測信號之位 準差的比較係在第2投光元件LDnu之投光時序進行。 -16- 201133022 如上述所示，管理子站l〇a及管理子站1 Ob各自在同 —時序向各自之後續的子站輸出部12a、子站輸入部12b 送出串接信號（以下有時稱爲TDn信號）。子站輸入部12b 或子站輸出部12a接收根據此TDn信號所傳來的本站的位 址時序。此外，管理子站l〇a、10b如上述所示，因爲各自 與DP信號線7、DN信號線8連接，所以可從後述之傳送 時鐘信號產生決定光電感測器11之動作時序的TD0信 號。因而，即使子站輸出部12a與子站輸入部12b之間是 長距離，管理子站l〇a、10b亦產生自己的位址時序，而可 向成對之子站輸出部12a與子站輸入部12b同時送出串接 信號。 收到TD0信號的子站輸入部12a或.子站輸出部12a產 生在後續之子站間連接34間所串接之下一個子站輸入部 12b或子站輸出部12b的位址時序。例如，將複數個子站 輸出部12a的位址時序設爲#A0、#A1、#A2、...，例如將 複數個子站輸入部12b的位址時序設爲〇0、#B1、#B2、... 的情況，從管理子站l〇a收到串接信號（TD0信號）之#八0 的子站輸出部12a在TDn信號的時序以輸出信號從投光元 件向子站輸入部12a、12b投光。從管理子站10b收到串接 信號（TD0信號）之化0的子站輸入部12b在TDn信號的時 序從受光元件接收投光信號。依此方式，#A0的子站輸出 部12&與心0的子站輸入部12b成對地動作。接著#A0之子 站輸出部12a之#八1的子站輸出部12a與接著#B0之子站輸 -17- 201133022 入部12b 2#B1的子站輸入部12b亦一樣成對地在同一時 序投光、受光。即，在本實施形態，複數個成對之子站輸 出部12a與子站輸入部12b構成在串接信號（TD η信號）的時 序依序切換並檢測出被檢測體的多光軸光電感測器。而 且’根據受光信號之強度變化而檢測在是投光部之子站輸 出部12a與是受光部的子站輸入部i 2b之間有無被檢測體。 在此，如第1圖所示，在本光電感測系統，因爲連接 複數個由一連串的感測部11a、lib、...所構成的光電感測 器1 1，所以成對（同一感測部）之子站輸出部12a與子站輸 入部12b各自之管理子站l〇a、l〇b的位址（意指用以區別 複數個光電感測器1 1的位址）必須相同，在子站輸出部1 2a 與子站輸入部12b各自之管理子站10a、10b所產生的串接 信號（從TD1信號至TDn信號）係在同一時序從#A0至#An 的子站輸出部123向#60至#811的子站輸入部12b傳送，投 光、受光的時序可同步地動作。此外，在第2圖，從#An 的子站輸出部123向#611的子站輸入部12b(從#A0的子站 輸出部123向#8 0的子站輸入部121)、從#八1的子站輸出部 12a向#81的子站輸入部12b等）所寫的投光信號（箭號）表 示複數個子站輸出部12a與子站輸入部12b同步地在串接 信號的時序進行投光、受光。 第4圖係此光電感測系統中之管理子站的功能方塊 圖，第5圖係管理子站的系統方塊圖。此外，因爲子站輸 出部12a所連接的管理子站10a與子站輸入部12b所連接 -18 - 201133022 的管理子站1 Ob的功能方塊圖相同，所以在第4圖、第5 圖表示雙方，而將表示管理子站的符號設爲1〇。 如第4圖所示，DP信號線7、DN信號線8與管理子 站10經由DP、DN連接端子連接。在管理子站1〇中，首 先，利用用以從傳送信號得到本站的電力之由電容器與二 極體所構成的電源部產生電力，而該傳送信號係自DP信號 線7、DN信號線8所傳來並重疊了電力。信號線所重疊之 電力經由二極體向電容器充電，而得到電源電壓 Vcc。供 給此電源電壓Vcc，作爲管理子站10內的電源。將電力與 此傳送信號重疊而得到本站之電力的方式省略配線，而實 現所謂的省配線。同時，管理子站1〇從DP信號線7、DN 信號線8抽出CK信號，並交給MCU15。又’管理子站10 具有位址設定14，並利用此位址設定功能進行自己的位址 設定。 MCU15根據經由DP信號線7、DN信號線8所傳來之 傳送信號所包含的時鐘信號CK分析輸出入信號，並將各 子站的資料資訊保持於記憶處。時鐘信號CK包含長週期 的起始信號與短週期的傳送時鐘。MCU15識別起始信號 後，計數傳送時鐘數，並將與在本站位址之位址設定14所 設定之位址一致的時刻作爲本站動作時序。在管理子站 1 0，根據傳送時鐘從CK信號得到本站的位址時序，並從 Tout端子將TD0信號作爲串接信號向接著管理子站10之 #B0的子站輸入部1213或#八0的子站輸出部12a送出。此 -19- 201133022 MCU15 由 CPU18、RAM19 及 ROM20 所構成，並根據 ROM20 內部所記憶保持的程式，按照後述之程式流程圖的流程動 作。CPU 18具有內部時鐘產生電路，並根據此內部時鐘執 行M C U 1 5內的控制》 構成橋接配線13或子站間連接34之DP信號線7、DN 信號線8及傳送TDn信號的串接線17如上述所示，利用 連接器33與後續2#B0的子站輸入部121)或#八0的子站輸 出部12a連接，成爲易於進行配線作業之構造》 如第5圖所示，CPU18利用MCU15的內部匯流排與 RAM19及ROM2 0連接，並具有內部時鐘，根據此時鐘時 序與RAM19及ROM20交換資料。又，CPU18與I/O匯流 排21連接。MCU15與投入電源時之起動同時利用ROM20 內部的起始化程式被起始化後，利用ROM20內所記憶之程 式PRG1，系統開始動作。RAM19具有資料區域，保持從 CK信號所得之資料，同時在於從位址設定部所收到之 ADRS信號的時序，將是往後續之子站的串接信號之Tout 信號分別經由I/O匯流排21與外部進行資料收發。 第6圖係#An之子站輸出部的系統構成圖，第7圖係 子站輸出部的系統方塊圖。此外，對具備與管理子站相同 之功能的構成部分賦予相同的符號。 如第6圖所示，子站輸出部12a亦與管理子站10 — 樣，本站電源係從經由DP信號線7、DN信號線8所傳來 的傳送信號產生。接著管理子站10a所連接之#人0的子站 -20- 201133022 輸出部12a自管理子站10a從TiO端子27接收是串接 的TD0信號，並經由Tout端子24向接著之#八1的子 出部12a送出TD1信號。一樣地，#An的子站輸出部 從#An+l的子站輸出部12a從Tin端子27接收是串接 的TDn信號，並經由Tout端子24向接著之#An+l的 輸出部12a送出TDn+Ι信號。即，對下一段所串接的 輸出部12a，作爲TDn信號輸出對本站的位址加上1 接信號。MCU15具有獨自的時鐘信號產生電路，並根 時鐘信號經由RAM19、ROM20及I/O匯流排21進f 控制。 在收到TDn信號的子站輸出部12a，按照從管理 l〇a所送出之串接信號的順序，在收到TDn信號的 CPU18從Ld端子32向發光二極體LDnd送出信號， 二極體LDnd產生第1投光信號。而，在產生第1投光 後，從LU端子30向發光二極體LDnu送出信號，而 第2投光信號。此外，雖然LU端子30與發光二極體 成爲由虛線所包圍的表示，但是這意指根據實施形態 省略。關於省略了發光二極體LDnu之情況的實施形 將後述。 如第7圖所示，CPU18根據獨自的內部時鐘信號 程式，並適當地經由系統與RAM19及ROM20進行資 發。CPU18與I/O匯流排21連接。MCU15與起動同時 ROM20內部之起始化程式被起始化後，利用R〇M2〇 信號 站輸 12a 信號 子站 子站 的串 據此 :I/O 子站 時序 發光 信號 產生 LDnu 而可 態， 執行 料收 利用 內所 -21- 201133022 記憶之程式PRG2L，系統開始動作。又，MCUl 5在 內具有資料區域，經由I/O匯流排21，受理CK信 自Tin端子27的TDn信號，並進行Tout端子24¾ 子30與Ld端子32的輸出動作，與外部進行信號的 CPU18監視CK端子22,確認已從Tin端子27取入 之投光時序的TDn信號，並從Ld端子32向發光 LDnd送出信號，產生第1投光信號後，再從LUi 向發光二極體LDnu送出信號，產生第2投光信號。 LU端子30與發光二極體Ldnu係亦以虛線表示根據 態而可省略。 第8圖係子站輸入部的系統構成圖，第9圖係 入部的系統方塊圖，以模式表示連接構成子站輸入 路元件的信號匯流排。此外，與第6圖、第7圖一 具備與管理子站相同之功能的構成部分賦予相同的 如第8圖所示，子站輸入部12b經由DP、DN 子與DP信號線7、DN信號線8連接。子站輸入部 與管理子站10或子站輸出部12a —樣，從重疊了電 的傳送信號產生本站的電力。接收作爲MCU15之輸 並是感測系統之傳送時鐘信號的CK信號，又，從Ί 27接收TDn信號，在該時序進行輸入處理，同時 端子24送出TDn+Ι信號。又，以A/D變換器16將 光元件的發光二極體PDnu及PDnd所收到的受光 比信號）變換成數位信號，並作爲輸入信號ADATu RAMI 9 號或來 :LU端 I交換。 是本站 二極體 端子30 在此， 實施形 子站輸 部之電 樣，對 符號。 連接端 1 2b亦 源電壓 入信號 ’in端子 從 Tout :從是受 信號（類 信號的 -22- 201133022 資料及ADATd信號的資料記憶保持於raM19。CPU18計 算該記憶保持於RAM19之ADATu信號的資料及ADATd信 號之資料的差分，再將被檢測體3 5之有無判定結果記憶保 持於RAM 1 9的記憶區域。例如，在第3圖的感測部1丨a、 1 1 b，檢測出有被檢測體3 5。在此，在第8圖，是受光元 件之發光二極體PDnu與A/D變換器16亦以虛線表示根據 實施形態而可省略。 又，MCU1 5向A/D變換器u及A/D變換器d送出作爲 輸入ADATu信號及ADATd信號之有效動作信號的ENu信 號及ENd信號，並取入來自A/D變換器u及A/D變換器d 的信號。並且，對在下一段側所串接的子站輸入部12b， 作爲串接信號（TD η信號），在從本站的位址時序開始計數2 次CK信號之下降緣時輸出串接信號串接信號（TDn+Ι信 號）。此外，受光元件PDnd的受光信號在是來自該投光元 件LDnd之受光信號的情況成爲基準信號，另一方之受光 元件PDnu的受光信號成爲用以檢測出被檢測體之有無的 檢測信號》 子站輸入部12b的動作由第9圖所示ROM20所記憶的 程式PRG2P決定，與電源的投入同時被起始化，並根據後 述之程式流程圖的流程動作，並且利用後述的信號計算， 進行用以檢測出被檢測體3 5的判定或異常檢測的判定。 MCU15由CPU18、經由內部匯流排與CPU18進行資料收發 的RAM19與ROM20、以及I/O匯流排21所構成。CPU18 -23- 201133022 具有獨自的時鐘信號產生電路，與電源的投入同時根據 ROM20所記憶的程式PRG2P動作。此外，程式PRCj2P之 主要功能是受理作爲輸入信號的CK信號、從Tin端子27 接收TDn信號、受理ADATu信號及ADATd信號、進行受 理各個信號時的判斷、從Tout端子24送出輸出信號、向 A/D變換器16送出ENu信號、ENd信號以及從lout端子 31送出輸出信號。 —面參照第1〇圖，一面說明該信號的收發時序。第 10圖係傳送信號的時序圖。 在第10圖，最上段表示重疊了電源的DP信號線7、 DN信號線8上的傳送信號。在傳送信號的起始部分，以是 週期比一般之光電感測系統時鐘週期長的起始位元（Start Bit)的信號STB0爲起點進行週期動作。g卩，在起始位元 (Start Bit)後之位址的資料長度是1位元的情況，如第10 圖所示，第1位元成爲位址UADRS1)，第2位元成爲位址 2 (ADRS 2)，僅持續子站輸入部或子站輸出部的個數，再回 到起始位元（Start Bit)。在位址之資料長度具有寬度的情況 之位址資料成爲各位址寬度之資料的劃分，而在此表示位 址之資料長度是1位元的情況。第2段的CK信號是傳送 時鐘信號，具有從〇至5V的波峰値。接著之TD0信號表 示在起始位元（Start Bit)後從管理子站10所送出的TD0信 號。 如第1 〇圖所示，在位址之資料長度是1位元的情況， -24- 201133022 在TD0信號之後，從TD1信號至TDn— 1信號的各信號作 爲串接信號，每2位元連續。又，與CK信號的下降緣同 步地LD Id信號上昇，成爲半時鐘的投光信號。在接著之 傳送時鐘週期，LDlu信號上昇，成爲半時鐘的投光信號。 並且在接著之傳送時鐘週期，LD2d信號上昇，成爲半時鐘 的投光信號。以後一樣，至LDnu信號上昇。LDnu信號亦 成爲半時鐘的投光信號。投光信號在被檢測體反射或透過 的信號由受光元件接收，而產生PDld信號、PDlu信號、 PD2d信號、PD2u信號，以後一樣，至PDnu信號產生受光 信號。受光信號PDld信號是接收投光信號LD Id或LDlu 信號的結果所產生，接著之PDlu信號亦是接收投光信號 LD Id或LDlu信號的結果所產生。在這些PDld信號及PDlu 信號，亦包含在接收與被檢測體交叉之投光信號的情況所 產生之信號。接著之受光信號PD2d信號亦與PDld信號一 樣，是接收投光信號LD2d或LD2u信號的結果所產生。在 這些PDld信號及PDlu信號，亦包含在接收與被檢測體交 叉之投光信號的情況所產生之信號。並且至PDn信號，受 光信號是接收LDnd或LDnu信號的結果所產生，各自將受 光位準記憶於記憶區域。在圖10中之從PDld信號至PD2u 信號，波峰値低的部分表示因被檢測體而投光信號衰減之 狀態。 ϋ其次，按照程式PRG1的流程說明關於在該管理子站 之信號受理、信號輸出之具體的動作。第11圖係管理子站 -25- 201133022 程式PRG1的流程圖。 程式PRG1在電源的上昇緣起動，進行起始處理si。 接著，判定是傳送時鐘的CK信號是否是起始位元（S 2)。在 下一個時鐘CK信號的下降緣對位址計數器加1 (S3)，再判 定是否是該管理子站的位址設定値（S4)。在不是該管理子 站之位址設定値的情況，至成爲該管理子站的位址，在下 一個時鐘CK信號的下降緣將位址計數器持續加1(從S3至 S 4)。在是該管理子站之位址設定値的情況，將Tout信號（來 自Tout端子24的輸出信號，以下關於「信號」可能採用 —樣的表達）設爲「on」（S5)，在下一個時鐘CK信號的下 降緣對位址計數器加1 (S 6)，再判斷是否成爲位址設定値 + 2 (S 7)，若不是位址設定値+2，回到步驟S6的最前面，若 是位址設定値+2，將Tout信號設爲「off」，並回到步驟 S2的最前面。依此方式，管理子站內部的程式按照流程圖 動作。 接著，按照程式PRG2L的流程說明關於在該子站輸出 部的信號受理、信號輸出之具體的動作。第12圖、第13 圖是子站輸出部程式PRG2L的流程圖。 程式PRG2L在電源的上昇緣起動，進行起始處理S9。 接著，判定是傳送時鐘的CK信號（在以下的說明有時稱爲 CK)是否是起始位元（S10)。在下一個時鐘CK信號的下降 緣對位址計數器加1，並判定Tin信號是否是「on」（SI 1)。 若Tin信號不是「on」，再對位址計數器加1，並重複Tin -26- 201133022 信號是否是「on」的判斷（S11)。確認Tin信號是「on」時， 將位址計數器的値設定成位址値（S11)。接著，將LDnd設 爲「on」（S13)。判斷CK是否是「on」（S14)，若CK不是 「on」，則回到步驟S13的最前面。若CK是「on」，則 將LDnd設爲「off」（S15)。在下一個時鐘CK信號的下降 緣對位址計數器加1(S16)。接著，將LDnu設爲「on」（S17)。 接著，判定CK是否是「on」（S18)，若CK不是「on」， 回到步驟S17的最前面。若CK是「on」，將LDnu設爲「off」。 接著，在下一個時鐘CK信號的下降緣對位址計數器 加1(S20).。接著，判斷位址計數器是否是（位址値+位址資 料寬2)(S21)。若是（位址値+位址資料寬2)，將Tout信號 設爲「on」（S 2 2)，若不是（位址値+位址資料寬2)，回到步 驟S 20的最前面。在下一個時鐘CK信號的下降緣再對位 址計數器加US23)。判斷位址計數器是否是（位址値+位址 資料寬2+1) (S 24)。若位址計數器不是（位址値+位址資料寬 2 + 2)，回到步驟S23的最前面，並等待下一個時鐘CK信 號。若位址計數器是（位址値+位址資料寬2 + 2)，將Tout 信號設爲「off」（S25)。然後，回到該步驟S10的最前面。 其次，按照程式PRG2P的流程說明關於在該管理子站 之信號受理、信號輸出之具體的動作。第14圖〜第18圖是 子站輸入部程式PRG2P的流程圖。 程式PRG2P與系統電源的投入同時進行電源ON起 動。接著，進行起始處理（S 2 6)。從CK信號判斷是否是起 -27- 201133022 始位元（Start Bit)(STB0)(S27p若是起始位 下一個時鐘CK信號的下降緣對位址計數器 若不是起始位元（STB0) ’回到步驟S27的最 判斷Tin信號是否是「on」（S29)。若Tin信丨 回到步驟S2 8的最前面，並等待下一個時鐘 Tin信號是「on」，將位址計數器値記憶於位 (S 3 0)。接著，進行A/D變換器d及A/D變 (S31)。 然後，將是A/D變換器d之資料的 ADATndd ΐ己憶（S32)。 並且，將是 A/D變換器u之資料的 ADATnud 記憶（S3 3)。 接著，判斷物體檢測資料Dna「on/0ff _ (S3 4)。若物體檢測資料Dna「on/off」不是 信號設爲「off」（S35)。另一方面，若物體 「on/off」是「on」，將lout信號設爲「on 在步驟S30的位址，從子站輸入部12b向S 檢測資料Dna「on/off」資訊。 接著，如第15圖所示，在下一個時鐘 緣對位址計數器値加1(S37)。並且將Iout (538) »接著，進行A/D變換器d與A/D變 (539) ，將是A/D變換器d之資料的ADATd 記億（S40)。並且，將是A/D變換器u之資 元（STB0)，在 値加 1(S28) » :前面。接著， 號不是「on」， ί CK：信號。若 :址値記億位址 換器u的動作 ADATd作爲 ADATu作爲 j是否是「on」 「on」，將 lout 檢測資料Dna ‘」（S 3 6)。即， t站6傳送物體 CK信號的下降 酔號設爲「off」 丨換器u的動作 作爲 ADATndu 料的ADATu作 -28- 201133022 爲 ADATnuu記憶（S41)。接著，判斷異常檢測資料 An 「on/off」是否是「on」（S42)。若異常檢測資料An「on/off」 不是「on」，將lout信號設爲「off」（S43)。 若異常檢測資料An「on/off」是「on」，將i〇ut信號 設爲「on」（S44)。接著，將Tout設爲「〇n」（S45)。在下 一個時鐘CK信號的下降緣對位址計數器値加1(S46)，再 將lout信號設爲「off」（S 47)。接著，判斷是否是（位址値 +位址資料寬 2 + 2)(S48)。若不是（位址値+位址資料寬 2 + 2)，回到步驟S46的最前面，若是（位址値+位址資料寬 2 + 2)，將Tout設爲「off」（S49)。即，在步驟S37的位址 從子站輸入部12b向母站6傳送異常檢測資料An「on/offj 資訊。 接著，如第 16 圖所示，判斷是否是 ADATnuu 2 S(S 5 0) »在此，S是用以判斷是未被被檢測體遮 蔽之基準信號的ADATnuu是既定以上之値的臨限値資料。 若是ADATnuug S，則將直邏輯判定値Snu「on/off」 (根據第2組之基準信號與S之比較的邏輯信號）設爲「on」 (551) 。若不是 ADATnuugS，貝IJ 將 Snu「on/off」設爲「off」 (552) 。 接著，判斷是否是ADATnddg S(S53)。在此，S是用 以判斷是未被被檢測體遮蔽之基準信號的ADATndd是既 定以上之値的臨限値資料。 若是ADATnddg S，則將直邏輯判定値Snd「on/off」 -29- 201133022 (根據第1組之基準信號與S之比較的邏輯信號）設爲「on」 (S5 4)。若不是 ADATnddg S，則將 Snd「on/off」設爲「off」 (S55) 〇 接著，如第17圖所示，將[ADATnuu — ADATndu]的計 算結果記憶於△ADATnd(S56)。 並且，將[ADATndd - ADATnud]的計算結果記憶於 △ ADATnu(S57)。 然後，判斷是否是△ ADATndg C(S58)。在此，C是用 以判斷是基準信號之 ADATnuu與是該檢測信號之 ADATndu的位準差是既定以上之値的臨限値資料。 若是△ ADATndg C，則將交叉邏輯判定値Cnd「on/off」 (根據第2組之基準信號與檢測信號之位準差與C之比較的 邏輯信號）設爲「〇.n」（S59)。若不是△ADATndgC，則將 交叉邏輯判定値Cnd「on/off」設爲「off」（S60)。一樣地， 判斷是否是△ ADATnug C(S61)。在此，C是用以判斷是該 基準信號之ADATndd與是該檢測信號之ADATnud的位準 差是既定以上之値的臨限値資料。 若是△ ADATnug C，則將交叉邏輯判定値Cnu「on/off」 (根據第1組之基準信號與檢測信號之'位準差與C之比較的 邏輯信號）設爲「on」（S62)。若不是△ADATnugC，則將 交叉邏輯判定値Cnu「on/off」設爲「off」（S63)。 接著，如第18圖所示，將物體檢測資料Dne「on/off」 設爲「off」，並且將物體不存在檢測資料Dna「on/off」 -30- 201133022 設爲「off」（S64)。接著’對如下之邏輯計算第（1)式判斷 (S65) » [數學式1][Technical Field] The present invention relates to a photoelectric device that detects the presence or absence of a subject based on a difference in the level of a light receiving signal when a light-emitting element and a light-receiving element are present between the light-emitting element and the light-receiving element. Sensor and photo-sensing system. [Prior Art] In the photo-sensing device and the photo-sensing system that detect the presence or absence of the object to be detected based on the difference in the level of the received light signal when there is a detected object between the light-emitting element and the light-receiving element The light projecting element and the light receiving element are generally arranged such that the light path from the light projecting element to the light receiving element is parallel to the axis of the object to be detected. However, when the thickness of the subject is thin, for example, when the subject is a thin flat plate, the optical path parallel to the axis of the subject is not blocked by the subject, and thus the subject may not be detected. For this reason, a detection method has been proposed in a multi-optical-axis photo-electrical sensor in which a plurality of light-projecting units and a light-receiving unit are disposed to face each other, and is disclosed in Japanese Laid-Open Patent Publication No. Hei. The light receiving unit is disposed in a segment different from the light projecting portion that emits the light projecting signal, and is detected. According to this method, since the light path from the light projecting portion to the light receiving portion has an angle with respect to the horizontal direction, that is, the tilt, even if the thin flat object is disposed such that its axis is horizontal, the light path is detected. This detection can be achieved by body shading. [Patent Document 1] Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. Detected situation. Further, even when the subject is shielded from the light path, if the subject is translucent, the change in the light receiving level of the light receiving unit is small, and the detection is affected by the disturbance of illumination or reflection around the light receiving unit. The result becomes an incorrect question. Therefore, an object of the present invention is to provide a photodetector and a photo-sensing system which can accurately detect a subject without being disturbed even when the subject is extremely thin. MEANS FOR SOLVING THE PROBLEMS A first type of photodetector of the present invention has a light projecting portion and a light receiving portion that are disposed opposite to each other, and is detected by the intensity change of a light receiving signal of the light receiving portion, and is received in the light projecting portion and the light receiving portion. The presence or absence of the object to be detected in the space between the portions, and the light receiving portion has the first light receiving element and the second light receiving element that operate in synchronization with the light emission timing signal of the light projecting portion. Further, the light projecting unit includes a first light projecting element, and is arranged such that the light projecting signal reaches the first light receiving element without intersecting with the object to be detected, and intersects with the object to be detected. The second light-receiving element is arranged to reach the second light-receiving element; and the second light-emitting element is arranged such that the light-emitting signal reaches the second light-receiving element without crossing the object, and arrives when intersecting the object The first light receiving element. Then, the pair of the first light projecting element and the first light receiving element, and the pair of the first light projecting element and the second light receiving element are the first group 'the second light projecting element and the pair A pair of the first light-receiving elements and a pair of the second-projection 201133022 optical element and the second light-receiving element are set to the second group, and the first group 'is relatively less attenuated by the object to be detected. The light receiving signal of the first light receiving element and the level difference of the light receiving signal of the second light receiving element that is attenuated by the object are detected to detect the presence or absence of the object. Further, in the second group, 'the light receiving signal of the first light receiving element attenuated by the object and the level difference of the light receiving signal of the second light receiving element which is not attenuated by the object are compared The information on the presence or absence of the subject is detected by the double detection of the presence or absence of the subject obtained from the first group and the presence or absence of the subject obtained from the second group. In this case, the comparison of the level differences in the first group may be performed at the light emission timing of the first light projecting element, and the light emission timing of the second light projecting element may be performed in the second group. Comparison of this bit difference. Further, in this photosensor, a light-emitting signal from one light-emitting element is received by two light-receiving elements, and this type is sometimes referred to as a first photo-electrical sensor in the following description. In the second aspect of the photodetector of the present invention, the light projecting portion and the light receiving portion are provided to face each other, and the intensity of the light receiving signal of the light receiving portion is detected to be detected between the light projecting portion and the light receiving portion. The presence or absence of the object to be detected in the space, and the light projecting portion is projected on the first light projecting element that has reached the light projecting signal of the light receiving unit without intersecting the object to be detected; and is projected to intersect the object to be detected. In the case of the second light projecting element that reaches the light projecting signal of the light receiving unit. Then, the time-division light-receiving signal generated by receiving the light-emission signal that is not attenuated by the object from the first light-emitting element is compared, and the object from the second light-emitting element is received by the object. The level difference of another time-division light-receiving signal generated by the attenuation of the light-emitting signal 201133022 is used to detect the presence or absence of the object to be detected. In this case, the light-emitting elements receive the light-emitting signals from the two different light-emitting elements. In the following description, this type may be referred to as a second photo-electric detector. Further, although two light-receiving signals are generated from one light-receiving element, the light-receiving signal is divided into a light-receiving time from one of the light-emitting elements and a light-receiving time from the other light-emitting element, that is, time-division light is received, and The light receiving time of the former is the time-division receiving light signal' and the latter receiving time is another time-sharing light receiving signal. In the third aspect of the photodetector of the present invention, the light projecting portion and the light receiving portion ′ are disposed opposite to each other, and the intensity of the light receiving signal of the light receiving unit is detected to be detected between the light projecting portion and the light receiving portion. The presence or absence of the object to be detected in the space includes the first light projecting element and the second light projecting element. Further, the light receiving unit has a light projecting signal that receives the light from the first light projecting element that is not attenuated by the object, and a light projecting signal that is attenuated by the object from the second light projecting element. a first light receiving element; and a light projecting signal from the second light projecting element that is not attenuated by the object and a light projecting signal that is attenuated by the object from the first light projecting element; Second light-receiving element>> The pair of the first light-emitting element and the first light-receiving element, and the pair of the second light-emitting element and the first light-receiving element are the first group' A pair of the light projecting element and the second light receiving element, and a pair of the first light projecting element and the second light receiving element are set to the second group, and the first group is not compared with the object to be detected. Attenuation of the time-division light-receiving signal of the first light-receiving element and the level difference ' of another 201133022 time-division light-receiving signals of the first light-receiving element that is attenuated by the object to detect the presence or absence of the object to be detected News. Further, in the second group, the time-division light-receiving signal of the second light-receiving element attenuated by the object and the other time-sharing of the second light-receiving element that is not attenuated by the object are compared The positional difference of the received light signal is detected by the presence or absence of the detected object. The information on the presence or absence of the object obtained from the first group and the object obtained from the second group are detected in a double comparison. Whether or not there is information. In this case, the comparison of the level differences may be performed at the time division projection timing of the first light projecting element and the second light projecting element. In addition, since the photodetector also receives the light projecting signal from one of the light projecting elements by the two light receiving elements, the following description is the same as the second type of the present invention, sometimes referred to as the second photo inductor. Detector. Further, when the light projecting unit has the first and second light projecting elements and has the first and second groups, the presence or absence of the object and the second information obtained in the first group may be The presence/absence information of the subject obtained by the group is double compared to the presence or absence of the subject, and the abnormal state and/or the sensing of the subject is detected without detecting the presence or absence of the subject. The device is faulty. Further, the photodetector may be configured in a plurality of stages, and a photodetector for detecting a plurality of the objects to be detected may be formed, or may be shared by the second group of light projecting elements of the second group and used for The second light-emitting elements of the first group are shared by the second light-receiving elements of the second group and the other light-receiving elements of the first group adjacent to the detected object in the second group and used for the The other object of the 201133022 is the first light-receiving element of the first group. Alternatively, the second light projecting element may share the first light projecting element as another object to be detected adjacent to the object to which the light is projected, and the second light receiving element may be shared. The first light receiving element of the other object to be detected. Further, in either case, the pair of light projecting portions and the light receiving portion may be unitized. The photo-sensing system of the present invention includes any one of the plurality of photo-sensing devices described above, and includes a first management sub-station connected to the series of the light-emitting portions and a series of ones corresponding to the light-emitting portions The second management sub-station to which the light-receiving unit is connected, the first management sub-station generates the light-emission timing signal, and the second management sub-station generates a timing signal of the light-receiving signal synchronized with the light-emission timing signal. Moreover, the photo-sensing system of the present invention may be configured such that a plurality of the light projecting portions and a series of the light-receiving portions are connected to a common data signal line, and the presence or absence of information of the object to be detected is transmitted to the parent station. Detection of abnormal state of the body and / or sensor failure information. Further, the photo-sensing system of the present invention may be provided in the first group and the second group of light-emitting elements having the first and second light-emitting elements, and the first and second groups of optical-inductance sensors may be provided in the first group. The presence or absence of the obtained information of the subject and the presence or absence of the subject obtained in the second group are compared with the presence or absence of the subject, and the presence or absence of the subject is not detected. An abnormal state of the object to be detected and/or a sensor failure. 201133022 EFFECT OF THE INVENTION The photodetector of the present invention causes the light receiving unit to function as a reference sensor and a detecting sensor, that is, a sensor (reference sensor) that functions to receive a light projecting signal that is not blocked by the object to be detected. And a sensor (detection sensor) that receives a light-emitting signal that is blocked by the object when the object is positioned between the light projecting unit and the light-receiving unit, and compares the reference sensors with the sense sensing To detect the presence or absence of the object to be detected. At this time, since the light receiving unit that is the detecting sensor receives the light projecting signal that reaches the light receiving unit when the light projecting portion intersects with the object to be detected, the light receiving signal is attenuated when the object is present. Further, by comparing the two detection results, that is, by obtaining the difference between the two received light signals, the influence of the disturbance can be eliminated. Therefore, even when the object to be detected is extremely thin, it is not affected by the disturbance, and the object to be detected can be accurately detected. Moreover, the comparison between the received light signal that is received by the light receiving unit and is not attenuated by the object and the level difference of the light receiving signal that is attenuated by the object is performed at the end of the light receiving end of the received light signals, that is, When the photodetector is in the light projecting timing of the light projecting portion, and the second photodetector is in the light projecting timing of the second light projecting element, the presence or absence of the object to be detected is detected in each segment. Therefore, the response time to the detected object is short, and a high-speed response speed can be obtained. Further, in the light projecting unit, the first and second light projecting elements are used, and the light receiving unit includes the first and second light receiving elements, and the pair of the first light projecting element and the first light receiving element, and the first light projecting unit. A pair of the element and the second light receiving element is set to be the first group, and a pair of the second light projecting element and the first light receiving element, -10-201133022, and a pair of the second light projecting element and the second light receiving element are set. In the second group, the detection accuracy of the subject can be made higher by double the detection structure. In this case, in the first photo-electrical sensor, the timing of the first group of light-emitting elements is compared with the level of the first group, and the timing of the second group of light-emitting elements is performed at the second. In the comparison of the positional difference of the group, the second photodetector's is performed at the light projection timing of the second light projecting element, whereby the presence or absence of the object to be detected is detected in each segment. Therefore, the response time to the detected object is short, and a high-speed response speed can be obtained. In addition, the information on the presence or absence of the subject is double-checked, and the presence or absence of the subject is not detected. 'According to the logical 所得 obtained from the logical judgment of the plurality of received light signals, the abnormality of the detected object can be detected. Or storage status (inclined placement), or sensor failure. Further, the light projecting unit has the first and second light projecting elements, and the light projecting element and the light receiving element have the first and second groups. When the scattered light from the light projecting element is used, the light is shared by the second group. The second light projecting element and the first light projecting element in the first group of the other object to be detected adjacent to the object to be detected in the second group have halved the light projecting element. Simpler construction. Further, when the pair of light projecting portions and the light receiving portion are unitized, since the interval between the respective segments can be freely set, the object to be detected can be applied to various thicknesses or sizes, and the object to be detected can be greatly enlarged. The range of applications where the shapes are different. In the photo-sensing system of the present invention, since the optical-11-201133022 inductive measuring device of the present invention is provided, even when the object to be detected is extremely thin, it is not affected by the disturbance, and the detected object can be accurately detected. Test body. Further, the response time for the presence or absence of the subject is increased, and the detection structure is doubled, whereby the improvement of the presence or absence of the subject can be surely detected. Further, based on the logical 所得 obtained by logically judging the plurality of received light signals, the abnormality of the object to be detected or the state of storage (inclined placement) or the sensor failure can be detected, and the reliability can be improved. Further, since the interval between the segments can be freely set, the range of application to the case where the thickness or the size of the object to be detected differs from the shape of the object to be detected can be greatly expanded. In addition, since the optical inductance detector can be used to detect the abnormality of the object to be detected or stored (oblique) or the logic of the sensor failure, the judgment of the photo-sensing system can also be utilized. The device (PLC or host computer, etc.) is used. [Embodiment] Hereinafter, an embodiment of a photodetector system according to the present invention and a photo-sensing system including the photo-electrical sensor will be described with reference to the drawings. FIG. 1 is an embodiment of the photo-sensing system of the present invention. The overall diagram of the example, Figure 2 is a block diagram of the photo-sensing system. The photo-sensing system connects a plurality of photo-inductors 11 to a DP signal line 7 and a DN signal line 8 which are shared data signal lines. The photo-inductance detector 11 is composed of a plurality of sub-station input units 12b connected in series from the management sub-station l〇b, and a plurality of sub-station output units 12a connected in series from the management sub-station 10a. Composition. The substation input unit 12b corresponds to the light projecting unit of the present invention, and the substation output unit 12a corresponds to -12 to 201133022. The light receiving unit of the present invention detects whether or not the substation output unit 12a and the substation input unit 1 2b are accommodated. Between the detected objects. For example, in a system in which the position of the scaffold in which the object to be detected is located in the scaffolding structure is grasped, the position or condition of the scaffold in which the semiconductor wafer or the liquid crystal panel is stored is grasped. However, the object to be detected is not limited to this, and may be an object that is not shaped or has a different shape. The management substation 10a, 10b, the substation input unit 12b, and the substation output unit 12a constituting the photodetector 1 share the parent station 6 and the data, and the parent station 6 transmits and receives data to and from the control unit 1 by the parallel signal. That is, the control unit output signal 4 which is a parallel (parallel) output signal is sent from the output unit 2 of the control unit 1 to the parent station 6, and the input unit 3 receives the parallel input signal from the parent station 6 as the control unit input signal 5, and is received. The communication between the control unit 1 of the main system and the parent station 6 is to transmit and receive parallel signals and perform signal transmission at high speed. The mother station 6 is connected to the DP signal line 7 and the DN signal line 8, and the optical inductance connected to the signal line is connected. The detector 11 is connected. Further, the substation input unit 12b and the substation output unit 12a constituting the photodetector 11 are also connected to the DP signal line 7 and the DN signal line 8. <*, the control unit 1 can grasp all of the control and monitoring data via the parent station 6. Further, in Fig. 1, although the management sub-station l〇a, l〇b is included in the configuration of the photodetector 11, it may be separated from the photo-inductance detector 11. The structure of the photodetector is shown enlarged in Fig. 3. As shown in Fig. 3, the photodetector 11 is connected to a plurality of sensing units 1 1 a and 1 1 b composed of a pair of substation output unit 12a and a substation input unit 1 2b. In addition, there is no limit to the number of sensing units, and the number of required parts can be connected according to needs. The photoelectric-13-201133022 sensor is also connected to a plurality of sensing units, but only the convenience is shown in FIG. 2 sensing units. The management sub-station l〇a, the management sub-station 10b and the sensing unit 1 la are connected by the bridge wiring 1 3 , and the sensing unit 1 1 a is connected to the sensing unit 1 1 b of the next segment by the inter-substation connection 34 . Further, the sensing portions of the sensing unit 1 1 b and subsequent sections are also connected by the inter-substation connection 34. The connector 33 is used by the connection of the bridge wiring 13 or the sub-station connection 34. To simplify the connection. Further, in the case where the plurality of sub-station connections 34 are equally spaced, the length of the inter-substation connection 34 is normalized to simplify wiring, and in the case of not equal intervals, by sub-station connection 3 The length of 4 is matched with the interval to simplify wiring and connection work. The management substation 10a is a management substation on the light projecting side, and sends a serial signal to a plurality of substation output units 12a that are connected in series to the management substation l〇a, and sets the operation timing of the plurality of substation output units 12a. On the other hand, the management station l〇b is the management substation on the light receiving side. The serial sequence signal is sent to a plurality of substation output units 12b to which the management substation 1 〇b is connected in series, and the operation timing of the plurality of substation output units 12b is set. The sensing unit 11a and lib which are the substation output unit 12a of the light projecting unit and the substation input unit 12b which is the light receiving unit are transmissive sensors, and the subject 35a is accommodated in the substation output unit 12a and the sub Between the station input units 12b. The substation input unit 1 2b of the sensor unit 1 1 a has the first light receiving element PDld received from the light projecting element LDld of the substation output unit 12a and arrives at the substation input unit without crossing the subject 35a. The light projection 14-201133022 signal of 12b and the second light receiving element PD1 u reach the substation input unit 1 2 b signal when the light projecting element LD1 d intersects with the subject 35 5 a. Further, the substation output unit 12a is disposed not only by the light projecting element LDld', but also by the second light projecting element LDlu, so that the light projecting signal reaches the second light receiving element PDlu without intersecting with the 35a, and is in the body 3 5 When a crosses, the first light receiving element PD 1 d is reached. The sensed portion 1 1 b and the like connected to the next section are also configured in the same manner. In the following description, the number of the light-emitting element and the light-receiving element is given 1 to the initial detecting portion 11a, and η is given to the photodetector 1 1 η of the pair of the sensing portion 1 1 b of the next stage. Therefore, for example, the light-emitting element of the sensor unit 1 1 b is the LD 2 u, and the second light-emitting element of the sensor unit 11 n is a light-receiving signal that is not blocked by the detector 35 a from the light-emitting element LDnd to the first light-receiving element PDnd. And it becomes a reference signal which compares the case where it is shielded by the to-be-detected body 35a. Further, the element LDnd is shielded from the light projecting signal measuring body 35a in which the second light receiving element PDnu is obliquely dispersed, and the light receiving signal of the second light receiving element PDnu becomes a minute level detecting signal. Then, the level difference of these reference signal signals is compared, and the presence or absence of the information of the subject 35 5 a is detected to have a characteristic that is hard to be affected by the periphery of the light receiving element. The light emission timing of the detection unit is determined based on the comparison of the reference signal and the detection signal. Further, the timing game for performing the detection determination may be performed by, for example, a timer operation built in each of the sensing units, or may be performed after all the sensing units are patrolled. However, the light projection received at the time of light projection by the light projecting unit also has the second L D n u of the detected portion of the detected portion 1 la. The signal is that the optical signal is attenuated from the illumination, and the number and the detection are thus limited. In the case of the light emission limitation, the -15-201133022 can also be used to detect and judge the comparison between the reference signal and the detection signal. When the detection unit performs the detection and judgment after the tour, the response time to the detected object is shortened, and the high-speed response speed can be realized. In addition, the details of the detection judgment will be described later. In addition, when the detection is performed by the timer operation built in each of the sensing units, the area in which the memory retention reference signal and the detection signal are set is set in advance, and the comparison is performed by the substation input unit 12b, and the memory holding area will be described later. . On the other hand, the light-emitting signal from the second light-emitting element LDnu to the second light-receiving element PDnu is a light-receiving signal that is not blocked by the object 35a, and is compared with the case where the light-emitting signal is blocked by the object 35a. In the reference signal, the light-emitting signal obliquely dispersed from the second light-emitting element LDnu to the first light-receiving element PDnd is blocked by the detector 35, and the light-receiving signal of the first light-receiving element PDnd is attenuated to become a minute level detection signal. Therefore, a pair of the light projecting element LDnd and the first light receiving element PDnd, and a pair of the light projecting element LDnd and the second light receiving element PDnu are the first group, and the second light projecting element LDnu and the first light receiving element PDnd are A pair of the pair of second light-emitting elements LDnu and the second light-receiving element PDnu is used as the second group, and the presence/absence information of the object obtained from the first group and the second group are detected by double comparison. The presence or absence of information on the subject. Therefore, the subject 35 5 can be detected with the detection accuracy of the highly reliable sensor. Further, the comparison of the level difference between the reference signal of the first group and the detection signal is performed at the light projection timing of the light projecting element LDnd, and the comparison of the level difference between the reference signal of the second group and the detection signal is performed. 2 The light projection timing of the light projecting element LDnu is performed. -16- 201133022 As described above, the management sub-station l〇a and the management sub-station 1 Ob each send a serial connection signal to the subsequent sub-station output unit 12a and the sub-station input unit 12b in the same timing (hereinafter sometimes Called TDn signal). The substation input unit 12b or the substation output unit 12a receives the address timing of the own station transmitted based on the TDn signal. Further, as described above, since the management sub-frames 10a and 10b are connected to the DP signal line 7 and the DN signal line 8, respectively, the TD0 signal which determines the operation timing of the photo-detector 11 can be generated from the transfer clock signal which will be described later. . Therefore, even if the substation output unit 12a and the substation input unit 12b are long distances, the management substation 10a, 10b generates its own address timing, and can input to the paired substation output unit 12a and the substation. The portion 12b simultaneously sends out the serial signal. The substation input unit 12a or the substation output unit 12a that has received the TD0 signal generates an address timing of the next substation input unit 12b or the substation output unit 12b that is connected in series between subsequent substation connections 34. For example, the address timing of the plurality of substation output units 12a is set to #A0, #A1, #A2, ..., for example, the address timing of the plurality of substation input units 12b is set to 〇0, #B1, #B2. In the case of ..., the substation output unit 12a that receives the serial signal (TD0 signal) from the management substation l〇a is output from the light projecting element to the substation input unit at the timing of the TDn signal. 12a, 12b cast light. The substation input unit 12b that receives the concatenation signal (TD0 signal) from the management substation 10b receives the light projection signal from the light receiving element in the timing of the TDn signal. In this manner, the substation output unit 12& of #A0 operates in pairs with the substation input unit 12b of the heart 0. Next, the substation output unit 12a of #81 of the substation output unit 12a of #A0 and the substation input unit 12b of the substation -17-201133022 of the following section #B0 are also paired in the same timing. Received light. In other words, in the present embodiment, the plurality of pairs of sub-station output units 12a and sub-station input units 12b sequentially switch the timing of the serial signal (TD η signal) and detect the multi-optical-axis photo-sensing of the object to be detected. Device. Further, "the presence or absence of the object to be detected between the substation output portion 12a of the light projecting portion and the substation input portion i2b which is the light receiving portion is detected based on the change in the intensity of the light receiving signal. Here, as shown in Fig. 1, in the photo-sensing system, since a plurality of photo-inductors 1 1 composed of a series of sensing portions 11a, lib, ... are connected, they are paired (same feeling The address of the management sub-station l〇a, l〇b of each of the sub-station output unit 12a and the sub-station input unit 12b of the measurement unit) (which means that the address of the plurality of photo-electrical sensors 1 1 is different) must be the same. The serial signal (from the TD1 signal to the TDn signal) generated by the management substation 10a, 10b of each of the substation output unit 1 2a and the substation input unit 12b is the substation output unit of the same timing from #A0 to #An. 123 transmits to the substation input unit 12b of #60 to #811, and the timings of the light projection and the light reception can be synchronized. Further, in Fig. 2, the substation input unit 123 from #An is input to the substation input unit 12b of #611 (from the substation output unit 123 of #A0 to the substation input unit 121 of #8 0), and from #八The light projection signal (arrow) written by the substation output unit 12a of the first substation unit 12a to the #81 substation input unit 12b or the like indicates that the plurality of substation output units 12a and the substation input unit 12b are synchronized in the timing of the serial signal. Cast light and receive light. Figure 4 is a functional block diagram of the management substation in the photo-sensing system, and Figure 5 is a system block diagram of the management sub-station. Further, since the management sub-station 10a to which the sub-station output unit 12a is connected is the same as the functional block diagram of the management sub-station 1 Ob to which the sub-station input unit 12b is connected -18 - 201133022, the fourth and fifth figures show both sides. , and the symbol indicating the management substation is set to 1〇. As shown in Fig. 4, the DP signal line 7 and the DN signal line 8 are connected to the management substation 10 via DP and DN connection terminals. In the management substation 1 first, power is generated by a power supply unit composed of a capacitor and a diode for obtaining power of the own station from the transmission signal, and the transmission signal is from the DP signal line 7, the DN signal line. 8 came and overlapped the power. The power superposed by the signal lines charges the capacitor via the diode to obtain the power supply voltage Vcc. This power supply voltage Vcc is supplied as a power source in the management substation 10. The wiring is omitted in such a manner that the power is superimposed on the transmission signal to obtain the power of the own station, and the so-called wiring is realized. At the same time, the management substation 1 extracts the CK signal from the DP signal line 7, the DN signal line 8, and hands it to the MCU 15. Further, the management substation 10 has an address setting of 14, and uses this address setting function to set its own address. The MCU 15 analyzes the input and output signals based on the clock signal CK included in the transmission signal transmitted via the DP signal line 7 and the DN signal line 8, and holds the data information of each substation in the memory. The clock signal CK includes a long period start signal and a short period transfer clock. After the MCU 15 recognizes the start signal, it counts the number of transmission clocks and sets the time coincident with the address set in the address setting 14 of the own station address as the own station operation timing. In the management substation 10, the address timing of the own station is obtained from the CK signal according to the transmission clock, and the TD0 signal is used as a serial signal from the Tout terminal to the substation input unit 1213 or #8 of the #B0 of the substation 10; The substation output unit 12a of 0 transmits. This -19-201133022 MCU15 is composed of CPU18, RAM19, and ROM20, and operates according to the program flow chart described later based on the program stored in ROM20. The CPU 18 has an internal clock generating circuit and performs control in the MCU 15 based on the internal clock. The DP signal line 7 constituting the bridge wiring 13 or the inter-station connection 34, the DN signal line 8, and the string wiring 17 for transmitting the TDn signal are as follows. As described above, the connector 33 is connected to the substation input unit 121) of the subsequent 2#B0 or the substation output unit 12a of the #8 0, and the wiring operation is easy. As shown in FIG. 5, the CPU 18 uses the MCU 15 as shown in FIG. The internal bus is connected to the RAM 19 and the ROM 20, and has an internal clock for exchanging data with the RAM 19 and the ROM 20 according to the clock timing. Further, the CPU 18 is connected to the I/O bus line 21. When the MCU 15 is initialized by the initialization program in the ROM 20 at the same time as the startup of the power supply, the system starts operating using the program PRG1 stored in the ROM 20. The RAM 19 has a data area, holds the data obtained from the CK signal, and at the same time, the timing of the ADRS signal received from the address setting unit, and the Tout signal of the serial signal to the subsequent substation respectively passes through the I/O bus 21 Send and receive data with the outside. Fig. 6 is a system configuration diagram of the output unit of #An's substation, and Fig. 7 is a system block diagram of the substation output unit. Further, the same components are assigned to the components having the same functions as those of the management substation. As shown in Fig. 6, the substation output unit 12a is also generated similarly to the management substation 10, and the own station power is generated from the transmission signals transmitted via the DP signal line 7 and the DN signal line 8. Next, the sub-station -20-201133022 of the #人0 connected to the sub-station 10a is connected. The output unit 12a receives the TD0 signal that is serially connected from the TiO terminal 27 from the management sub-station 10a, and proceeds to the next #八1 via the Tout terminal 24. The sub-outlet 12a sends a TD1 signal. Similarly, the sub-station output unit of #An receives the TDn signal that is serially connected from the Tin terminal 27 from the sub-station output unit 12a of #An+1, and sends it to the output unit 12a of the following #An+1 via the Tout terminal 24. TDn+Ι signal. That is, the output unit 12a connected in series to the next stage is used as a TDn signal output to add a 1-link signal to the address of the own station. The MCU 15 has its own clock signal generating circuit, and the root clock signal is controlled via the RAM 19, the ROM 20, and the I/O bus bar 21 to f. In the substation output unit 12a that has received the TDn signal, the CPU 18 that has received the TDn signal transmits a signal from the Ld terminal 32 to the light emitting diode LDnd in the order of the serial signal sent from the management l〇a, and the diode LDnd generates a first light projecting signal. On the other hand, after the first projection is generated, a signal is sent from the LU terminal 30 to the light-emitting diode LDnu, and a second projection signal is output. Further, although the LU terminal 30 and the light-emitting diode are shown by a broken line, this means that it is omitted according to the embodiment. The embodiment of the case where the light-emitting diode LDnu is omitted will be described later. As shown in Fig. 7, the CPU 18 performs the capitalization based on the internal clock signal program and the RAM 19 and the ROM 20 as appropriate. The CPU 18 is connected to the I/O bus bar 21. After the MCU 15 and the start-up simultaneous initialization program in the ROM 20 is initialized, the R 〇 M2 〇 signal station transmits the 12a signal sub-station sub-station according to this: the I/O sub-station timing illuminating signal generates LDnu and is in a state, Execute the program to use the program PRG2L, which is 21-201133022, and the system starts to operate. Further, the MCU 105 has a data area, receives the TDn signal of the CK signal from the Tin terminal 27 via the I/O bus bar 21, and performs an output operation of the Tout terminal 243⁄4 sub 30 and the Ld terminal 32, and the CPU 18 that performs external signals. The CK terminal 22 is monitored, and the TDn signal of the light-emitting timing taken in from the Tin terminal 27 is confirmed, and a signal is sent from the Ld terminal 32 to the light-emitting LDnd to generate a first light-emitting signal, and then sent from the LUi to the light-emitting diode LDnu. The signal generates a second light projecting signal. The LU terminal 30 and the light-emitting diode Ldnu are also indicated by broken lines and can be omitted depending on the state. Fig. 8 is a system configuration diagram of the input unit of the substation, and Fig. 9 is a system block diagram of the subsection, and the signal busbars connecting the input elements of the substation are connected in a mode. Further, the components having the same functions as those of the management substation in Fig. 6 and Fig. 7 are given the same as shown in Fig. 8, and the substation input unit 12b transmits signals via DP, DN and DP signal lines 7, DN. Line 8 is connected. The substation input unit generates power of the own station from the superimposed transmission signal, similarly to the management substation 10 or the substation output unit 12a. The CK signal, which is the transmission clock signal of the sensing system, is received as the input of the MCU 15, and the TDn signal is received from the Ί27, the input processing is performed at this timing, and the terminal 24 sends the TDn+Ι signal. Further, the A/D converter 16 converts the light-receiving diodes PDnu and PDnd received by the optical elements into digital signals, and exchanges them as the input signal ADATu RAMI 9 or the LU terminal I. This is the station's diode terminal 30. Here, the sample of the output of the sub-station is implemented, and the symbol is used. The connection terminal 1 2b also source voltage input signal 'in terminal from Tout: slave is signal (class signal -22-201133022 data and ADATd signal data memory is maintained at raM19. CPU18 calculates the data of the ADATu signal that the memory is held in RAM19 And the difference between the data of the ADATd signal and the result of the determination of the presence or absence of the sample 35 is held in the memory area of the RAM 19. For example, the sensing unit 1a, 1bb of the third figure detects that there is In the eighth embodiment, the light-emitting diodes PDnu and the A/D converter 16 of the light-receiving element are also indicated by broken lines, and can be omitted according to the embodiment. Further, the MCU1 5 is converted to A/D. The u and the A/D converter d send the ENu signal and the ENd signal as input effective signals of the ADATu signal and the ADATd signal, and take in signals from the A/D converter u and the A/D converter d. For the substation input unit 12b connected in series on the next stage side, as the serial connection signal (TD η signal), the serial connection signal serial connection signal is output when the falling edge of the CK signal is counted twice from the address timing of the own station ( TDn+Ι signal). In addition, the light receiving signal of the light receiving element PDnd is The light receiving signal from the light projecting element LDnd is a reference signal, and the light receiving signal of the other light receiving element PDnu is a detection signal for detecting the presence or absence of the object. The operation of the substation input unit 12b is shown in FIG. The program PRG2P stored in the ROM 20 is determined to be initialized at the same time as the input of the power source, and is operated in accordance with the flow of the program flow chart to be described later, and the determination for detecting the object 35 is performed by the signal calculation described later. The determination of the abnormality detection is performed by the CPU 18, the RAM 19 and the ROM 20 for transmitting and receiving data via the internal bus and the CPU 18, and the I/O bus bar 21. The CPU 18-23-201133022 has a separate clock signal generating circuit and a power supply. In addition, the program PRC2P operates in accordance with the program PRG2P stored in the ROM 20. The main function of the program PRCj2P is to receive the CK signal as an input signal, receive the TDn signal from the Tin terminal 27, accept the ADATu signal and the ADATd signal, and determine the reception of each signal. An output signal is sent from the Tout terminal 24, an ENu signal, an ENd signal is sent to the A/D converter 16, and is sent from the lout terminal 31. Output signal - Refer to Figure 1 for a description of the timing of transmission and reception of the signal. Figure 10 is a timing diagram of the transmitted signal. In Figure 10, the uppermost section shows the DP signal line 7 and the DN signal line 8 with the power supply superimposed. The upper transmission signal is periodically operated at the beginning of the transmission signal with the signal STB0 which is a start bit longer than the clock period of the general photo-sensing system. g卩, the data length of the address after the start bit (Start Bit) is 1 bit. As shown in Fig. 10, the 1st bit becomes the address UADRS1), and the 2nd bit becomes the address. 2 (ADRS 2), only the number of substation input units or substation output units is continued, and then returns to the start bit (Start Bit). In the case where the data length of the address has a width, the address data becomes the division of the data of the address width, and the case where the data length of the address is one bit is indicated here. The CK signal of the second stage is a transmission clock signal having a peak 〇 from 〇 to 5V. The next TD0 signal indicates the TD0 signal sent from the management substation 10 after the start bit (Start Bit). As shown in the first figure, when the data length of the address is 1 bit, -24- 201133022 After the TD0 signal, each signal from the TD1 signal to the TDn-1 signal is used as a serial signal, every 2 bits. continuous. Further, the LD Id signal rises in synchronization with the falling edge of the CK signal, and becomes a half-clock projection signal. In the subsequent transfer clock cycle, the LDlu signal rises to become a half-clock projection signal. And in the subsequent transmission clock cycle, the LD2d signal rises and becomes a half-clock projection signal. As before, the LDnu signal rises. The LDnu signal also becomes a half-clock projection signal. The signal reflected or transmitted by the light-emitting signal on the object to be detected is received by the light-receiving element, and a PDld signal, a PDlu signal, a PD2d signal, and a PD2u signal are generated, and thereafter, the PDnu signal generates a light-receiving signal. The received light signal PDld signal is generated as a result of receiving the light projecting signal LD Id or LDlu signal, and the PDlu signal is also generated as a result of receiving the light projecting signal LD Id or LDlu signal. These PDld signals and PDlu signals also include signals generated in the case of receiving a light projecting signal that intersects with the object to be detected. The received optical signal PD2d signal is also generated as a result of receiving the light-emitting signal LD2d or LD2u signal, as is the PDld signal. These PDld signals and PDlu signals also include signals generated in the case of receiving a light projecting signal that intersects with the object to be detected. And to the PDn signal, the received light signal is generated as a result of receiving the LDnd or LDnu signal, and each of the received light levels is memorized in the memory area. In the signal from the PDld signal to the PD2u signal in Fig. 10, the portion where the peak is degraded indicates the state in which the light projection signal is attenuated due to the object to be detected. Next, the specific operation of the signal reception and signal output at the management substation will be described in accordance with the flow of the program PRG1. Figure 11 is a management substation -25- 201133022 Flowchart of program PRG1. The program PRG1 is started at the rising edge of the power supply, and the initial processing si is performed. Next, it is determined whether or not the CK signal of the transfer clock is the start bit (S 2). The address counter is incremented by 1 (S3) at the falling edge of the next clock CK signal, and it is determined whether or not the address of the management sub-address is set (S4). In the case where the address of the management substation is not set, the address counter becomes the address of the management substation, and the address counter is continuously incremented by 1 (from S3 to S4) on the falling edge of the next clock CK signal. In the case where the address of the management substation is set to 値, the Tout signal (the output signal from the Tout terminal 24, the following "signal" may be used) is set to "on" (S5), on the next clock. The falling edge of the CK signal is incremented by 1 (S 6), and it is judged whether it is the address setting 値 + 2 (S 7). If it is not the address setting 値+2, it returns to the top of step S6, if it is a bit The address is set to 2+2, the Tout signal is set to "off", and the process returns to the top of step S2. In this way, the program inside the management substation operates according to the flowchart. Next, the specific operation of the signal reception and signal output at the substation output unit will be described in accordance with the flow of the program PRG2L. Fig. 12 and Fig. 13 are flowcharts of the substation output unit program PRG2L. The program PRG2L is started at the rising edge of the power supply, and the initial processing S9 is performed. Next, it is determined whether or not the CK signal (hereinafter referred to as CK in the following description) of the transfer clock is the start bit (S10). The address counter is incremented by 1 at the falling edge of the next clock CK signal, and it is determined whether the Tin signal is "on" (SI 1). If the Tin signal is not "on", add 1 to the address counter and repeat the judgment of whether the signal of Tin-26-201133022 is "on" (S11). When it is confirmed that the Tin signal is "on", the address of the address counter is set to the address 値 (S11). Next, LDnd is set to "on" (S13). It is judged whether or not CK is "on" (S14), and if CK is not "on", the process returns to the top of step S13. If CK is "on", LDnd is set to "off" (S15). The address counter is incremented by one at the falling edge of the next clock CK signal (S16). Next, set LDnu to "on" (S17). Next, it is determined whether CK is "on" (S18), and if CK is not "on", the process returns to the top of step S17. If CK is "on", set LDnu to "off". Next, the address counter is incremented by 1 at the falling edge of the next clock CK signal (S20). Next, it is judged whether or not the address counter is (address 値 + address address width 2) (S21). If it is (address 値 + address data width 2), the Tout signal is set to "on" (S 2 2), and if not (address 値 + address data width 2), the process returns to the top of step S20. On the falling edge of the next clock CK signal, the address counter is incremented by US23). It is judged whether or not the address counter is (address 値 + address data width 2 +1) (S 24). If the address counter is not (address 値 + address data width 2 + 2), it returns to the top of step S23 and waits for the next clock CK signal. If the address counter is (address 値 + address data width 2 + 2), set the Tout signal to "off" (S25). Then, it returns to the forefront of this step S10. Next, the specific operation of the signal reception and signal output at the management substation will be described in accordance with the flow of the program PRG2P. Fig. 14 to Fig. 18 are flowcharts of the substation input unit program PRG2P. The program PRG2P starts the power ON at the same time as the input of the system power. Next, the initial processing is performed (S26). It is judged from the CK signal whether it is -27-201133022 Start Bit (STB0) (S27p if the start bit of the next clock CK signal falls edge to the address counter if it is not the start bit (STB0) 'back It is determined in step S27 whether the Tin signal is "on" (S29). If the Tin signal returns to the top of step S2 8 and waits for the next clock Tin signal to be "on", the address counter is memorized in place. (S 3 0) Next, the A/D converter d and the A/D converter (S31) are performed. Then, it will be the ADATndd of the data of the A/D converter d (S32). The ADATnud memory of the data of the /D converter u (S3 3). Next, the object detection data Dna "on/0ff _ (S3 4) is judged. If the object detection data Dna "on/off" is not the signal is set to "off" ( S35) On the other hand, if the object "on/off" is "on", the lout signal is set to "on" at the address of step S30, and the data Dna "on/off" information is detected from the substation input unit 12b to S. Next, as shown in Fig. 15, the address counter is incremented by 1 at the next clock edge (S37), and Iout (538) » is followed by A/D converter d and A/D. (539) will be the ADATd of the data of the A/D converter d (S40), and will be the element of the A/D converter u (STB0), before the addition of 1 (S28) » :. Then, the number is not "on", ί CK: signal. If the address of the address bitter u is ADTAd as ADATu as j is "on" "on", lout detection data Dna '" (S 3 6) That is, the falling nickname of the t-station 6 transmitting object CK signal is set to "off" The operation of the converter u as the ADATndu material ADATu -28-201133022 is the ADATnuu memory (S41). Next, the abnormality detecting data is judged. An "on/off" is "on" (S42). If the abnormality detection data An "on/off" is not "on", the lout signal is set to "off" (S43). If the abnormality detection data An"on/ Off" is "on", and the i〇ut signal is set to "on" (S44). Next, Tout is set to "〇n" (S45). The address counter is incremented by 1 at the falling edge of the next clock CK signal. (S46), the lout signal is set to "off" (S 47). Next, it is judged whether it is (address 値 + address data width 2 + 2) (S48). If not (address 値 + address capital) The material width is 2 + 2), and returns to the top of step S46. If it is (address 値 + address data width 2 + 2), Tout is set to "off" (S49). In other words, the abnormality detection data An "on/offj information is transmitted from the substation input unit 12b to the parent station 6 at the address of step S37. Next, as shown in Fig. 16, it is judged whether it is ADATnuu 2 S (S 5 0) » Here, S is a threshold data for judging that the reference signal that is not masked by the subject is a predetermined threshold. If it is ADATnuug S, the straight logic is determined 値Snu "on/off" (according to The logic signal of the comparison between the reference signals of the two groups and S is set to "on" (551). If it is not ADATnuugS, Bay IJ sets Snu "on/off" to "off" (552). Next, it is judged whether it is ADATnddg S (S53). Here, S is an access code for determining that the reference signal that is not masked by the subject is a predetermined amount or more. In the case of ADATnddg S, the straight logic decision 値Snd "on/off" -29-201133022 (the logic signal based on the comparison of the reference signal of the first group and S) is set to "on" (S5 4). If it is not ADATnddg S, set Snd "on/off" to "off" (S55). Next, as shown in Fig. 17, the calculation result of [ADATnuu - ADATndu] is memorized in ΔADATnd (S56). Also, the calculation result of [ADATndd - ADATnud] is memorized in Δ ADATnu (S57). Then, it is judged whether or not Δ ADATndg C (S58). Here, C is a threshold data for determining that the bit difference between the ADATnuu which is the reference signal and the ADATndu which is the detection signal is more than or equal to the predetermined value. In the case of Δ ADATndg C, the cross logic determination 値Cnd "on/off" (the logic signal based on the comparison between the reference signal of the second group and the level difference of the detection signal and C) is "〇.n" (S59) . If it is not ΔADATndgC, the cross logic determination 値Cnd "on/off" is set to "off" (S60). Similarly, it is judged whether or not Δ ADATnug C (S61). Here, C is a threshold data for judging that the ADMTndd of the reference signal and the ADMTnud of the detection signal are more than or equal to the predetermined value. In the case of Δ ADATnug C, the cross logic is determined 値Cnu "on/off" (the logic signal based on the comparison between the reference signal of the first group and the "signal difference of the detection signal and C" is "on" (S62). If it is not ΔADATnugC, the cross logic determination 値Cnu "on/off" is set to "off" (S63). Next, as shown in Fig. 18, the object detection data Dne "on/off" is set to "off", and the object non-existent detection data Dna "on/off" -30-201133022 is set to "off" (S64). . Then, judge the following equation (1) for the logic (S65) » [Math 1]

Snd X Cnu x Cnd x SnuSnd X Cnu x Cnd x Snu

若是「on」，則將物體檢測資料Dne「on/0ff」設爲If it is "on", set the object detection data Dne "on/0ff" to

(S66)。若不是「on」，則向步驟S67跳越。對如下之邏輯 計算第（2)式判斷（S67P(S66). If it is not "on", it jumps to step S67. Calculate the following equation (2) for the logic below (S67P

II

[數學式2][Math 2]

SndX Cnu x Cnd x Snu -... ^2)SndX Cnu x Cnd x Snu -... ^2)

OiwtOiw之反邏輯 之反邏輯 在滿足該邏輯計算第（2)式的情況’將物體不存在檢測 資料Dna「on/off」設爲「〇n」（S6 8)。若不是「on」，則 向步驟S69跳越。對如下之邏輯計算第（3)式判斷（S69)。 [數學式3] Z>2e X Dm? + X舶=”⑽"…（3) : 之反邏輯 Z)«e:/>2e之反邏輯 在滿足該邏輯計算第（3)式的情況，將異常檢測資料An 「〇n/〇ff」設爲「off」（S7〇)，並回到步驟S27的最前面。 又，在不滿足該邏輯計算第（3)式的情況，將異常檢測 資料An「〇n/〇ff」設f n」（S7D，並回到步‘驟⑵的最 201133022 從該步驟S50以後至步驟S71，成爲判定被檢測體之 有無的計算處理/而關於該邏輯判定的槪略，一面參照第 19圖一面說明。若直邏輯判定値Snu「on/off」是「on」及 Snd「on/off」是「on」，且交叉邏輯判定値Cnu「on/offj 是「on」及Cnd「on/off」是「on」，則可檢測出有被檢測 體。又，若直邏輯判定値Snu「on/off」是「on」及Snd「on/off」 是「on」，且交叉邏輯判定値Cnu「on/off」是「off」及 Cnd「on/off」是「off」，則可檢測出無被檢測體。在邏輯 判定値是除此以外之邏輯的情況，檢測出異常狀態。 並且，以#Bn(第η個）的子站輸入部12b爲例，說明該 計算處理。此外，在以下的說明，△(三角形）記號表示差 分資料。 將第η個基準信號與第η個檢測信號的差分計算結果 設爲△ ADATnd。將第 η個第 2組的基準信號設爲 ADATnuu，並將第η個第2組的檢測信號設爲ADATndu 時’言己憶保持△ADATnd = ADATnuu — ADATndu。 將第η個第1組的基準信號設爲ADATndd，並將第n 個第1組的檢測信號設爲 ADATnud時，記憶保持 △ ADATndu = ADATndd— ADATnud 〇 若是第η個第2組之基準信號的ADATnuu大於用以判 斷是既定以上之値的臨限値資料S，則直邏輯判定値S nu 「on/off」狀態變成「on」，判斷第n個第2組之基準信號 正常地動作。 -32- 201133022 若是第η個第2組之基準信號的ADATnuu小於用以判 斷是既定以上之値的臨限値資料S，則直邏輯判定値Snu 「on/off」狀態變成「off」，判斷第η個第2組之基準信 號未正常地動作。 若是第η個第1組之基準信號的ADATndd大於用以判 斷是既定以上之値的臨限値資料S，則直邏輯判定値Snd 「on/off」狀態變成「on」’判斷第η個第1組之基準信號 正常地動作》 若是第η個第1組之基準信號的ADATndd小於用以判 斷是既定以上之値的臨限値資料S，則直邏輯判定値Snd 「〇n/off」狀態變成「0ff」，判斷第η個第1組之基準信 號未正常地動作。 又’若△ ADATnd大於用以判斷是既定以上之値的臨 限値資料C，則交叉邏輯判定値Cnd「on/off」狀態變成 ^ 〇n」’意指在第2組存在被檢測體。 又，若△ ADATnd小於用以判斷是既定以上之値的臨 限値資料C，則交叉邏輯判定値Cnd「on/off」狀態變成 ^ 〇ff」’意指在第2組未存在被檢測體。 又’若AADATnu大於用以判斷是既定以上之値的臨 限値資料C，則交叉邏輯判定値Cnu「on/off」狀態變成 ^ Qn」’意指在第1組存在被檢測體的可能性。 又’若△ ADATnu小於用以判斷是既定以上之値的臨 限値資料C，則交叉邏輯判定値Cnu「on/off」狀態變成 -33- 201133022 「off」，意指在第1組未存在被檢測體的可能性。 在如下之第（4)式的邏輯値是「on」時，將物體檢測資 料Dne「0n/0ff」設爲「on」。這意指被檢測體完全存在之 狀態。 [數學式4] •SW X X CM X iSm/…（4) 該第（4)式的邏輯値是「off」時，物體檢測資料Dne 「on/off」依然是「0ff」。這意指被檢測體完全未存在之 狀態。 該Dne「on/off」之「on」、「off」狀態被記憶保持。 在如下之第（5)式的邏輯値是「on」時，將物體不存在 檢測資料Dna「0n/0ff」設爲「on」。這意指被檢測體完全 不存在之狀態。 [數學式5] X C«w X Cm/X iSww …（5)Inverse logic of the inverse logic of OiwtOiw In the case where the equation (2) of the logic calculation is satisfied, the object non-existence detection data Dna "on/off" is set to "〇n" (S6 8). If it is not "on", it jumps to step S69. The equation (3) is judged (S69) for the following logic. [Math 3] Z>2e X Dm? + X Ship = "(10)" (3) : The inverse logic Z) «e: /> 2e The inverse logic satisfies the logic (3) The abnormality detection data An "〇n/〇ff" is set to "off" (S7〇), and the process returns to the top of step S27. When the equation (3) of the logic calculation is not satisfied, the abnormality detection data An "〇n/〇ff" is set to fn" (S7D, and returns to the most 201133022 of the step (2) from the step S50 to In step S71, the calculation processing for determining the presence or absence of the object to be detected is described with reference to Fig. 19. If the logic is determined, nuSnu "on/off" is "on" and "Snd" on /off" is "on", and the cross logic determines that Cnu "on/offj is "on" and Cnd "on/off" is "on", and the detected object can be detected. Snu "on/off" is "on" and Snd "on/off" is "on", and the cross logic determines that Cnu "on/off" is "off" and Cnd "on/off" is "off". It is possible to detect that there is no object to be detected. When the logic is determined to be other logic, an abnormal state is detected. The calculation process is described by taking the sub-station input unit 12b of #Bn (n-th) as an example. Further, in the following description, the Δ (triangle) symbol indicates the difference data. The difference between the ηth reference signal and the ηth detection signal The calculation result is set to ΔADATnd. When the reference signal of the nth second group is set to ADATnuu, and the detection signal of the nth second group is set to ADATndu, the speech is maintained as ΔADATnd = ADATnuu — ADATndu. When the reference signals of the n first groups are set to ADATndd, and the detection signal of the nth first group is set to ADATnud, the memory remains Δ ADATndu = ADATndd - ADATnud ADA if the ADATnuu of the reference signal of the nth second group is larger than When it is judged that the threshold data S is more than the predetermined threshold, the straight logic determines that the state of "on/off" is "on", and the reference signal of the nth second group is normally operated. -32- 201133022 If the ADATnuu of the reference signal of the ηth second group is smaller than the threshold data S for judging that it is more than or equal to the predetermined value, the straight logic determines that the state of "on/off" becomes "off" and judges the nth The reference signal of the second group does not operate normally. If the ADATndd of the reference signal of the nth first group is larger than the threshold data S for judging that it is more than a predetermined value, the straight logic determines 値Snd "on/off" The status changes to "on" to judge the nth first The reference signal operates normally. If the ADATndd of the reference signal of the nth first group is smaller than the threshold data S for judging that it is more than a predetermined value, the straight logic determines that the state of "〇n/off" becomes "" 0ff", it is determined that the reference signal of the nth first group does not operate normally. Further, if ΔADATnd is larger than the threshold 値 data C for judging that it is more than or equal to the predetermined value, the cross logic determines that the ndCnd "on/off" state becomes ^ 〇n", meaning that the subject exists in the second group. Further, if ΔADATnd is smaller than the threshold data C for judging that it is more than or equal to the predetermined value, the cross logic determines that the "on/off" state becomes ^ 〇 ff"' means that the object is not present in the second group. . In addition, if AADATnu is larger than the threshold C for judging whether it is more than or equal to the predetermined value, the cross logic determines that the "on/off" state becomes "Qn", which means the possibility of existence of the object in the first group. . Also, if △ ADATnu is smaller than the threshold C for judging whether it is more than or equal to the predetermined limit, the cross logic determines that the state of nuCnu "on/off" becomes -33-201133022 "off", meaning that the first group does not exist. The possibility of being tested. When the logic 第 of the following formula (4) is "on", the object detection data Dne "0n/0ff" is set to "on". This means the state in which the object is completely present. [Math 4] • SW X X CM X iSm/...(4) When the logic 第 of the (4)th equation is "off", the object detection data Dne "on/off" is still "0ff". This means a state in which the object is completely absent. The "on" and "off" states of the Dne "on/off" are memorized. When the logic 第 of the following formula (5) is "on", the object does not exist. The detection data Dna "0n/0ff" is set to "on". This means a state in which the object is completely absent. [Math 5] X C«w X Cm/X iSww ...(5)

Cm/: C«w之反邏輯 : Οίί/之反邏輯 在該第（5)式的邏輯値是「off」時，物體不存在檢測資 料Dna「on/off」依然是「0ff」。這意指被檢測體不是不 存在之狀態。 該Dna「on/off」之「on」、「off」狀態被記憶保持。 即，表示被檢測體完全存在之狀態的物體檢測資料Due 「on/off」與表示被檢測體完全不存在之狀態的物體不存在 -34- 201133022 檢測資料Dna「on/off」的邏輯成爲互斥之關係。 數學第（6)式的互斥邏輯與是「〇n」時，將異常檢測資 料An「on/off」設爲「off」。 [數學式6]Cm/: The inverse logic of C«w : 反ίί/ The inverse logic When the logic 第 of the equation (5) is "off", the object does not have the detection data Dna "on/off" is still "0ff". This means that the subject is not in a non-existent state. The "on" and "off" states of the Dna "on/off" are memorized. In other words, the object detection data Due "on/off" indicating that the subject is completely present and the object indicating that the subject is completely absent are not present -34- 201133022 The logic of the detection data Dna "on/off" becomes mutual Rejected the relationship. When the mutual exclusion logic of the formula (6) is "〇n", the abnormality detection material An "on/off" is set to "off". [Math 6]

DnexDna + DnexDna··· (6) : 之反邏輯 之反邏輯 在數學第（6)式的互斥邏輯與不是「on」時，將異常檢 測資料An「on/off」設爲「on」。即，物體檢測資料Dne 「on/off」與物體不存在檢測資料Dna「on/off」的邏輯不 是互斥之關係時，將異常檢測資料An「on/off」設爲「on」。 在異常檢測資料An「on/off」是「on」時，表示投光單元 36及受光單元37之故障狀態、或保持被檢測體之異常之 狀態》 第20圖係是在#Bn之子站輸入部之記憶處的RAM記 憶圖。在此圖，成爲從位於最下段之1通道的資料向上至 η ®道的資料排列，資料項目從左分別是發光二極體（受光 元件）的信號資料（A/D變換後的資料）、交叉差分資料、直 邏輯判定資料、交叉邏輯判定資料、物體檢測資料及異常 檢測資料。這些資料是CPU18每次使RAM19之既定的記 憶位址記憶者β 第2 1圖係表示在#Βη之子站輸入部的計算資料之各資 料名稱的圖。在此圖，亦與第20圖一樣，成爲從位於最下 -35- 201133022 段之1通道的計算資料向上至η通道的資料排列。資料項 目從左分別是投光器LD依序發光狀態、發光二極體（受光 元件）的信號資料、交叉差分資料、直邏輯判定資料、交叉 邏輯判定資料、物體檢測資料及異常檢測資料。這些資料 亦是CPU18每次使RAM19之既定的記憶位址記億者。 在此光電感測系統，如上述所示，將投光元件L D n d 與第1受光元件PDnd的一對及投光元件LDnd與第2受光 元件PDnu的一對設爲第1組，將第2投光元件LDnu與第 1受光元件PDnd的一對及第2投光元件LDnu與第2受光 元件PDnu的一對設爲第2組，並雙重地比對檢測出從第1 組所得之被檢測體的有無資訊與從第2組所得之被檢測體 的有無資訊。然而，在兼顧所要求之精度而不必雙重地比 對檢測出的情況，亦可僅使用第1組或第2組之任一方來 檢測。在此情況，子站輸出部僅具有1個投光元件即可。 又，雖然在此光電感測系統所使用的感測部lln是由 構成子站輸出部12a的投光單元36與構成子站輸出部的受 光單元3 7所組合並單元化者，但是單元化係因應於需要進 行即可，但，在進行單元化的情況，因爲各段的間隔可自 由地設定，所以具有可擴大應用範圍的優點。 並且，在未檢測出被檢測體3 5 a之有無的情況，亦可 當作檢測出被檢測體3 5 a的異常狀態或感測器故障、或者 雙方。在此情況的邏輯計算亦可由各子站輸入部12b進 行，或者亦可由母站6或控制部1進行。 -36- 201133022 此外，雖然在此光電感測系統作爲子站輸入部12b使 用具有2個受光元件PDnu、PDnd者，但是如上述所示， 亦可省略其中1個。即，作爲子站輸入部12b，亦可使用 僅具有1個受光元件者。第22圖係表示本發明之光電感測 器之其他的實施形態之構成圖。此外，對與第1圖〜第21 圖所示之實施形態實質上相同的部分賦予相同的符號，並 簡化或省略其說明。又，使用此光電感測器的光電感測系 統亦因爲成爲與第1圖~第21圖所示之光電感測系統實質 上相同的構成，所以省略系統的圖示。 第22圖所示的光電感測器11連結複數個由具有單一 之投光元件LDnd的子站輸出部12a與具有單一之受光元件 PDnd的子站輸入部12b所構成的感測部》對感測部的個數 無限制，可因應於需要而連結所需的個數，雖然此光電感 測器亦連結多個感測部，但是在第22圖權宜上僅表示5個 感測部1 1 a、1 1 b、1 1 c、1 1 d、1 1 e (以下有時將這些總稱爲 感測部1 1)。 又，光電感測器1 1經由投光側的管理子站1 〇a及受光 側的管理子站l〇b與DP信號線7、DN信號線8連接，並 可經由母站6控制。投光側的管理子站1 0a與受光側的管 理子站1 Ob經由橋接配線1 3與感測部1 1 a連接，從感測部 1 1 a至感測部1 1 e各自利用子站間連接3 4串接。此外，各 個感測部1 1與DP信號線7、DN信號線8連接，從各個感 測部1 1向DP信號線7、DN信號線8送出被檢測體之有無 -37- 201133022 的檢測信號。 在此光電感測器1 1，從發光元件L D n d至相同之感測 部1 In的受光元件PDnd之投光信號成爲不會被被檢測體 3 5a遮蔽的受光信號，即基準信號。又，從發光元件LDnd 向與具有發光元件 LDnd的感測部1 1 n相鄰之感測部 11η+1(上段側）的受光元件PD(n+l)d斜分散之投光信號被 被檢測體35a遮蔽，而在受光元件PD(n+l)d的受光信號衰 減，成爲微小位準的檢測信號。然後，比較這些基準信號 與檢測信號的位準差，而檢測出被檢測體3 5 a的有無資 訊。此外，與具有發光元件LDnd的感測部1 1 η相鄰之感測 部亦可是感測部1 1 η — 1 (初段側）。但，因爲是任一方的感 測部都無實質上的差異，所以以下僅說明感測部1 1 η+ 1的 情況。 依此方式，即使子站輸入部12b未具有2個受光元件， 亦藉由利用相鄰之子站輸入部12b的受光元件，而可作用 爲與使用具有2個受光元件之子站輸入部的情況相同。 管理子站l〇a及管理子站10b各自在同一時序向各自 所連續的子站輸出部12a、子站輸入部12b送出串接信號 (以下有時稱爲TDn信號）。子站輸入部12b或子站輸出部 12a接收利用此TD η信號所傳來之本站的位址時序，並向 下一段側所串接的子站輸入部12b輸出串接信號（TDn+Ι信 號）。此時，是串接信號的TDn+Ι信號係在計數了 CK信號 的下降緣2次時向本站的位址輸出。TDn信號與第1圖〜 -38- 201133022 第21圖所示的光電感測系統一樣，成爲後續之子站輸出部 或子站輸入部的位址時序信號。例如，若是感測部1 1 b的 子站輸入部12b，其受光時序成爲感測部11a之投光元件 LD Id的投光時序與感測部1 lb之投光元件LD2d的投光時 序。在投光元件LD Id的投光時序，受光元件PD Id的受光 信號成爲基準信號，受光元件PD2d的受光信號成爲檢測信 號。又，在投光元件LD2d的投光時序，受光元件PDld的 受光信號成爲檢測信號，受光元件PD2d的受光信號成爲基 準信號。即，感測部1 In在LD(n- l)d的投光時序與LDnd 的投光時序受理受光信號。受光信號與第1圖〜第21圖所 示的光電感測系統一樣，每次利用A/D變換器將受光信號 變換成數位信號資料，並記憶於各個記憶區域。 又，在此光電感測器11，亦可雙重地比對檢測出被檢 測體3 5 a的有無資訊。在此情況，亦將感測部1 1 η之投光 元件LDn與受光元件PDn的一對、及感測部11η之投光元 件LDn與感測部1 ln+1之受光元件PDn+1的一對設爲第1 組，.並將感測部1 ln+1之投光元件LDn+Ι與感測部1 In之 受光元件PDn的一對、及感測部1 ln+1之投光元件LDn+1 與受光元件PDn+1的一對設爲第2組即可。 此外，因爲此光電感測器U中之子站輸入部12b的基 本構成與第1圖〜第2 1圖所示之光電感測系統的相同，所 以參照第8圖之子站輸入部的系統構成圖。 此子站輸入部12b省略在第8圖以虛線所示之受光元 -39- 201133022 件PDnu，而僅具有受光元件PDnd。 雖然相鄰的感測部是感測部1 1 n+ 1，但是在將檢測比 對雙重化的情況，成爲感測部1 1 η - 1與感測部1 1 n+ 1。 其次，按照第22圖說明該光電感測器1 1的動作。首 先，從管理子站l〇a及l〇b送出TD0時序信號，在此時刻， 感測部11a的受光元件PDld與感測部lib的受光元件 PD2d以各自之感測部的A/D變換器16將受光信號進行類 比信號的數化信號化，並作爲AD AT的資料位準，記憶保 持於各自的RAM1 9。此時，受光元件PDld的受光信號作 爲ADATd信號的資料位準，受光元件PD2d的受光信號作 爲ADATu信號的資料位準，記憶保持於RAM19。各自的 CPU18從該記憶保持於RAM19之ADATu信號的資料位準 計算與ADATd之資料位準的差分，並將被檢測體35a的有 無判定結果記憶保持於R Α Μ 1 9的記憶區域。在此光電感測 器1 1的例子，檢測出在感測部1 1 a與感測部1 1 b之間有被 檢測體3 5 a。 在第2 2圖，以虛線所示的被檢測體3 5 b表示若是正常 之狀態應被收容的被檢測體未存在。關於此被檢測體3 5 b 的位置，感測部1 1 b之受光元件P D 2 d的受光信號作爲 ADATd信號的資料位準，感測部1 lc之受光元件PD3d的 受光信號作爲ADATu信號的資料位準，各自被α/D變換器 1 6進行數位信號化，並記憶保持於R α Μ 1 9。感測部1 1 b與 11c各自的CPU18進行求得RAM19所記憶保持之ADATu -40- 201133022 信號的資料位準與 ADATd信號之資料位準之差分的計算 處理。在此光電感測器的例子，被檢測體不存在，從感測 部lib之投光元件LD2d至受光元件PD2d及受光元件PD3d 的投光信號都不衰減。因而，該差分成爲接近〇的値，被 檢測體35b被判定無，該判定結果被記憶保持於RAM19的 記憶區域。 關於被檢測體3 5 c，感測部1 1 c與感測部1 1 d進行與關 於被檢測體3 5之感測部1 1 a、1 1 b —樣的動作，被檢測出 有。 被檢測體35d被保持成異常地具有傾斜，從在正常的 情況不會被遮蔽之感測部Hd的投光元件LD4d至受光元 件PD 4 d的投光信號成爲被被檢測體35d遮蔽之狀態。另一 方面，從投光元件LD4d至感測部1 le之受光元件PD5d的 投光信號成爲被被檢測體35d遮蔽之狀態。因爲基準信號 與檢測信號之雙方被遮蔽，所以檢測出被檢測體3 5d的異 常保持或保管狀態（斜放置）異常。 —面參照第23圖，一面說明在此光電感測器11之信 號的收發時序。第23圖係傳送信號的時序圖。此外，因爲 第23圖的時序圖與第10圖的時序圖之主要的相異點是投 光信號及受光信號，關於除此以外的信號實質上相同，所 以在此，僅說明是受光信號的PDld信號、PD2d信號及PD3d 信號》 受光信號PDld信號是接收LD Id信號或LD2d信號的 •41 - 201133022 結果所產生，接下來的受光信號PD2d信號是接收LD Id信 號、LD2d及LD3d信號（未圖示）。在這些PDld信號及PD2d 信號，亦包含在接收與被檢測體交叉之投光信號的情況所 產生之信號。後續之受光信號PD3d信號亦與PD2d信號一 樣，是接收LD2d信號、LD3d信號（未圖示）及LD4d信號（未 圖示）的結果所產生。在此PD3d信號，亦包含在接收與被 檢測體交叉之投光信號的情況所產生之信號。並且至PDnd 信號，是接收LD(n—l)d信號、LDnd信號及LD(n+l)信號 的結果所產生，各自將受光位準記憶於記憶區域。在圖中 的PD3d信號，波高値低之以虛線表示的部分表示收容被檢 測體的情況，即一般投光信號成爲衰減之狀態。 此光電感測器中的感測部lln與第1圖〜第21圖所示 者相同，是由構成子站輸出部12a的投光單元36與構成子 站輸出部的受光單元37所組合並單元化者》因而，具有可 自由地設定各段的間隔，並應用於各種厚度或大小的被檢 測體，又，可大爲擴大對被檢測體之形狀相異的情況之應 用範圍的優點。 此外，在該實施形態，都以2個受光元件接收來自一 個投光元件的投光信號，那些受光元件各自產生基準信號 與檢測信號。然而，亦可採用以一個受光元件在各自之分 時投光時序接收來自2個相異之投光元件的投光信號，並 各自之分時投光時序產生基準信號與檢測信號。在此情 況，成爲本發明之第2光電感測器的實施形態。在第2光 -42- 201133022 電感測器，除了可得到上述之效果以外’並且即使受光部 是具備有單一之受光元件者’亦不必與相鄰的受光部進行 信號的收發，就可得到基準信號與檢測信號的位準差，亦 具有可使電路或計算變成更簡單之優點。 【圖式簡單說明】 第1圖係本發明之光電感測系統之實施形態的系統整 體圖。 第2圖係該光電感測系統的方塊圖。 第3圖係該光電感測系統中之光電感測器的構成圖。 第4圖係該光電感測系統中之管理子站的功能方塊 圖。 第5圖係該光電感測系統中之管理子站的系統方塊 圖。 第6圖係該光電感測系統中之子站輸出部的系統構成 圖。 第7圖係該光電感測系統中之子站輸出部的系統方塊 圖。 第8圖係該光電感測系統中之子站輸入部的系統構成 圖。 第9圖係該光電感測系統中之子站輸入部的系統方塊 圖。 第10圖係該光電感測系統中之傳送信號的時序圖。 第11圖係該光電感測系統中之管理子站程式流程圖。 -43- 201133022 第1 2圖係該光電感測系統中之子站輸出部的程式流 程圖。 第1 3圖係接著第1 2圖之該光電感測系統中之子站輸 出部的程式流程圖。 第1 4圖係該光電感測系統中之子站輸入部程式流程 圖。 第15圖係接著第14圖之該光電感測系統中之子站輸 入部的程式流程圖》 第16圖係接著第15圖之該光電感測系統中之子站輸 入部的程式流程圖。 第17圖係接著第16圖之該光電感測系統中之子站輸 入部的程式流程圖。 第1 8圖係接著第1 7圖之該光電感測系統中之子站輸 入部的程式流程圖。 第19圖係在該光電感測系統的邏輯判定圖。 第20圖係該光電感測系統中之#Bn之子站輸入部的 RAM記憶圖。 第21圖係該光電感測系統中之#Bn之子站輸入部的計 算資料。 第22圖係本發明之光電感測系統之其他的實施形態 之光電感測器的構成圖。 第23圖係在使用該光電感測器之光電感測系統之傳 送信號的時序圖。 -44 - 201133022 【主要元件符號說明】 1 控制部 2 輸出單元 3 輸入單元 4 控制信號 5 監視信號 6 母站 7 DP信號線 8 DN信號線 10 管理子站 11 光電感測器 11a、 …、1 In感測部 12 子站輸入部、子站輸出部 13 橋接配線 14 位址設定 15 MCU 16 A/D變換器 17 串接線 18 CPU 19 RAM 20 ROM 2 1 I/O匯流排 22 CK端子 • 45- 201133022 24 Tout端子 27 Tin端子 30 LU端子 3 1 lout端子 32 Ld端子 3 3 連接器 34 子站間連接 3 5 被檢測體 36 投光單元 3 7 受光單元 -46-DnexDna + DnexDna··· (6) : The inverse logic of the inverse logic When the mutual exclusion logic of the mathematical equation (6) is not "on", the abnormal detection data An "on/off" is set to "on". In other words, when the object detection data Dne "on/off" and the logic of the object non-existent detection data Dna "on/off" are not mutually exclusive, the abnormality detection data An "on/off" is set to "on". When the abnormality detection data An "on/off" is "on", it indicates the failure state of the light projecting unit 36 and the light receiving unit 37, or the state in which the abnormality of the object to be detected is maintained." Fig. 20 is the input of the substation at #Bn. RAM memory map of the memory of the department. In this figure, the data is arranged from the data in the lowermost channel to the η ® channel, and the data items are the signal data (A/D converted data) of the light-emitting diode (light-receiving element) from the left, Cross-difference data, straight logic decision data, cross-logic decision data, object detection data, and anomaly detection data. These pieces of data are maps of the respective data names of the calculation data of the sub-station input unit of the #Βη, which the CPU 18 makes the predetermined memory address memory β of the RAM 19 each time. In this figure, as in the 20th figure, it becomes the data arrangement from the calculation data of the 1 channel located in the lowermost -35-201133022 section to the η channel. From the left, the data items are the sequential illumination state of the emitter LD, the signal data of the light-emitting diode (light-receiving element), the cross-difference data, the straight logic decision data, the cross logic determination data, the object detection data, and the anomaly detection data. This information is also the CPU 18 each time the RAM 19 has a predetermined memory address. In the photo-sensing system, as described above, the pair of the light-emitting element LD nd and the first light-receiving element PDnd and the pair of the light-emitting element LDnd and the second light-receiving element PDnu are set to the first group, and the second group is set to be the second group. A pair of the light projecting element LDnu and the first light receiving element PDnd, and a pair of the second light projecting element LDnu and the second light receiving element PDnu are set to the second group, and the double detection is detected to be detected from the first group. Information on the presence or absence of the body and the presence or absence of information on the subject obtained from the second group. However, it is also possible to detect using only one of the first group or the second group without having to doublely detect the required accuracy. In this case, the substation output unit may have only one light projecting element. Further, the sensing unit 11n used in the photo-sensing system is combined and unitized by the light projecting unit 36 constituting the sub-station output unit 12a and the light-receiving unit 37 constituting the sub-station output unit, but unitized. Although it is necessary to perform the unitization, in the case of unitization, since the interval of each stage can be freely set, there is an advantage that the range of application can be expanded. Further, when the presence or absence of the subject 35 a is not detected, it is also possible to detect an abnormal state of the subject 35 a or a sensor failure or both. The logical calculation in this case can also be performed by each substation input unit 12b, or can be performed by the parent station 6 or the control unit 1. In addition, in the photo-sensing system, the two light-receiving elements PDnu and PDnd are used as the sub-station input unit 12b. However, as described above, one of them may be omitted. In other words, as the substation input unit 12b, only one light receiving element can be used. Fig. 22 is a view showing the configuration of another embodiment of the photo-electrical inductance sensor of the present invention. The components that are substantially the same as those in the first embodiment to the first embodiment are denoted by the same reference numerals, and the description thereof will be simplified or omitted. Further, since the photo-sensing system using the photo-electrical sensor is substantially the same as the photo-sensing system shown in Figs. 1 to 21, the illustration of the system is omitted. The photodetector 11 shown in Fig. 22 is connected to a plurality of sensing portions including a substation output unit 12a having a single light projecting element LDnd and a substation input unit 12b having a single light receiving element PDnd. The number of the measuring portions is not limited, and the required number can be connected according to the need. Although the photo-sensing device also connects the plurality of sensing portions, only the five sensing portions 1 1 are indicated on the expedient of FIG. a, 1 1 b, 1 1 c, 1 1 d, 1 1 e (hereinafter, these are collectively referred to as a sensing unit 1 1). Further, the photodetector 1 is connected to the DP signal line 7 and the DN signal line 8 via the management sub-station 1 〇a on the light-emitting side and the management sub-station 〇b on the light-receiving side, and can be controlled via the parent station 6. The management sub-station 10a on the light-emitting side and the management sub-station 1ob on the light-receiving side are connected to the sensing unit 1 1 a via the bridge wiring 1 3, and the sub-station is used from the sensing unit 1 1 a to the sensing unit 1 1 e The connection is 3 4 in series. Further, each of the sensing units 1 1 is connected to the DP signal line 7 and the DN signal line 8, and the detection signal of the presence or absence of the object-37-201133022 is sent from the respective sensing units 1 1 to the DP signal line 7 and the DN signal line 8. . In the photodetector 1, the light projecting signal from the light-emitting element L D n d to the light-receiving element PDnd of the same sensing unit 1 In becomes a light-receiving signal which is not blocked by the object 35a, that is, a reference signal. In addition, the light-emitting signal that is obliquely dispersed from the light-emitting element LDnd to the light-receiving element PD(n+1) of the sensing portion 11n+1 (upper side) adjacent to the sensing portion 11n having the light-emitting element LDnd is The detection body 35a is shielded, and the light receiving signal of the light receiving element PD(n+1)d is attenuated, and becomes a detection signal of a minute level. Then, the level difference between the reference signal and the detection signal is compared, and the presence or absence of the detected object 35 a is detected. Further, the sensing portion adjacent to the sensing portion 1 1 η having the light-emitting element LDnd may be the sensing portion 1 1 η - 1 (the first stage side). However, since there is no substantial difference in the sensing unit of either one, only the case of the sensing unit 1 1 η + 1 will be described below. In this manner, even if the substation input unit 12b does not have two light receiving elements, it can be used in the same manner as in the case of using the substation input unit having two light receiving elements by using the light receiving elements of the adjacent substation input unit 12b. . Each of the management sub-station l〇a and the management sub-station 10b transmits a serial connection signal (hereinafter sometimes referred to as a TDn signal) to each of the consecutive sub-station output units 12a and sub-station input units 12b at the same timing. The substation input unit 12b or the substation output unit 12a receives the address timing of the own station transmitted by the TD η signal, and outputs the serial connection signal (TDn+Ι) to the substation input unit 12b connected in series to the next stage side. signal). At this time, the TDn+Ι signal which is the serial signal is output to the address of the own station when the falling edge of the CK signal is counted twice. The TDn signal is the address timing signal of the subsequent substation output section or substation input section, as in the photo-sensing system shown in Fig. 1 to -38-201133022. For example, in the substation input unit 12b of the sensing unit 1 1 b, the light receiving timing is the light projection timing of the light projecting element LD Id of the sensing unit 11a and the light projecting timing of the light projecting element LD2d of the sensing unit 11b. At the light emission timing of the light projecting element LD Id, the light receiving signal of the light receiving element PD Id becomes a reference signal, and the light receiving signal of the light receiving element PD2d becomes a detection signal. Further, at the light projection timing of the light projecting element LD2d, the light receiving signal of the light receiving element PDld becomes a detection signal, and the light receiving signal of the light receiving element PD2d becomes a reference signal. In other words, the sensing unit 1 In receives the light receiving signal at the light emission timing of LD(n-1)d and the light emission timing of LDnd. The received light signal is converted into digital signal data by the A/D converter every time, similar to the photo-sensing system shown in Figs. 1 to 21, and is memorized in each memory area. Further, in the photodetector 11, the presence or absence of the information of the detected object 35a can be detected in a double comparison. In this case, the pair of the light projecting element LDn and the light receiving element PDn of the sensing unit 1 1 η and the light projecting element LDn of the sensing unit 11n and the light receiving element PDn+1 of the sensing unit 1 ln+1 are also One pair is set to the first group, and the pair of light projecting elements LDn+ of the sensing unit 1 ln+1 and the light receiving element PDn of the sensing unit 1 In and the light of the sensing unit 1 ln+1 are projected. A pair of the element LDn+1 and the light receiving element PDn+1 may be the second group. In addition, since the basic configuration of the substation input unit 12b in the photodetector U is the same as that of the photo-sensing system shown in Figs. 1 to 2, the system configuration diagram of the substation input unit in Fig. 8 is referred to. . This substation input unit 12b omits the light receiving element -39 - 201133022 PDnu shown by a broken line in Fig. 8, and has only the light receiving element PDnd. The adjacent sensing portion is the sensing portion 1 1 n+ 1, but in the case where the detection ratio is doubled, the sensing portion 1 1 η - 1 and the sensing portion 1 1 n+ 1 are formed. Next, the operation of the photodetector 11 will be described with reference to Fig. 22. First, the TD0 timing signals are sent from the management sub-station l〇a and l〇b, and at this time, the light-receiving element PDld of the sensing unit 11a and the light-receiving element PD2d of the sensing unit lib are A/D-converted by the respective sensing units. The device 16 digitizes the received signal with the analog signal and uses it as the data level of the AD AT, and the memory is held in the respective RAM 19. At this time, the light receiving signal of the light receiving element PDld serves as the data level of the ADATd signal, and the light receiving signal of the light receiving element PD2d serves as the data level of the ADATu signal, and is stored in the RAM 19. The respective CPUs 18 calculate the difference from the data level of the ADAD signal stored in the RAM 19 and the data level of the ADATd, and retains the result of the presence or absence of the subject 35a in the memory area of the R Α Μ 19. In the example of the photo-electrical inductance detector 1, it is detected that there is a subject 35 5 a between the sensing portion 1 1 a and the sensing portion 1 1 b. In Fig. 2, the subject 35b indicated by a broken line indicates that the subject to be accommodated in the normal state does not exist. Regarding the position of the subject 35b, the light receiving signal of the light receiving element PD2d of the sensing unit 1 1 b is used as the data level of the ADATd signal, and the light receiving signal of the light receiving element PD3d of the sensing unit 1 lc is used as the ADATu signal. The data levels are each digitally signaled by the alpha/D converter 16 and stored in R α Μ 1 9 . The CPU 18 of each of the sensing units 1 1 b and 11 c performs calculation processing for determining the difference between the data level of the ADATu -40-201133022 signal and the data level of the ADATd signal memorized and held by the RAM 19. In the example of the photo-electrical sensor, the object to be detected does not exist, and the light-emitting signals from the light projecting element LD2d of the sensing portion lib to the light-receiving element PD2d and the light-receiving element PD3d are not attenuated. Therefore, the difference is close to 〇, and the object to be detected 35b is judged to be absent, and the result of the determination is stored and held in the memory area of the RAM 19. With respect to the subject 35c, the sensing unit 1 1 c and the sensing unit 1 1 d perform an operation similar to the sensing units 1 1 a and 1 1 b of the subject 35, and are detected. The object to be detected 35d is held in an abnormally inclined state, and the light projection signal from the light projecting element LD4d to the light receiving element PD4d of the sensing portion Hd that is not normally blocked is in a state of being blocked by the object 35d. . On the other hand, the light projecting signal from the light projecting element LD4d to the light receiving element PD5d of the sensing unit 1d is in a state of being shielded by the object 35d. Since both the reference signal and the detection signal are shielded, it is detected that the abnormality of the detected object 35d or the storage state (inclined placement) is abnormal. - Referring to Fig. 23, the timing of transmitting and receiving signals of the photodetector 11 will be described. Figure 23 is a timing diagram of the transmitted signal. In addition, since the main difference between the timing chart of FIG. 23 and the timing chart of FIG. 10 is the light projecting signal and the light receiving signal, the other signals are substantially the same, and therefore, only the light receiving signal is described here. PDld signal, PD2d signal and PD3d signal" The received signal PDld signal is generated by the result of receiving the LD Id signal or the LD2d signal from 41 to 201133022. The next received signal PD2d signal is the received LD Id signal, LD2d and LD3d signals (not shown). Show). These PDld signals and PD2d signals also include signals generated in the case of receiving a light projecting signal that intersects with the object to be detected. The subsequent received light signal PD3d signal is also generated as a result of receiving the LD2d signal, the LD3d signal (not shown), and the LD4d signal (not shown), as is the PD2d signal. The PD3d signal also includes a signal generated in the case of receiving a light projecting signal that intersects the object to be detected. And the PDnd signal is generated as a result of receiving the LD(n-1)d signal, the LDnd signal, and the LD(n+l) signal, and each of the received light levels is memorized in the memory area. In the PD3d signal in the figure, the portion indicated by a broken line of the wave height is indicated by a dotted line indicating a state in which the object to be detected is accommodated, that is, a state in which the general light projecting signal is attenuated. The sensor unit 11n in the photodetector is the same as that shown in FIGS. 1 to 21, and is composed of a light projecting unit 36 constituting the substation output unit 12a and a light receiving unit 37 constituting the substation output unit. Therefore, the unitizer has the advantage that the interval between the segments can be freely set and applied to various thicknesses or sizes of the object, and the application range of the case where the shape of the object is different can be greatly expanded. Further, in this embodiment, the light-emitting signals from one light-emitting element are received by the two light-receiving elements, and each of the light-receiving elements generates a reference signal and a detection signal. However, it is also possible to employ a light-receiving element to receive the light-emitting signals from the two different light-emitting elements at their respective time-division projection timings, and to generate the reference signal and the detection signal for each of the time-division projection timings. In this case, it is an embodiment of the second photodetector of the present invention. In the second light-42-201133022 inductance sensor, in addition to the above-described effects, and even if the light receiving unit has a single light receiving element, it is not necessary to transmit and receive signals to and from the adjacent light receiving unit, and the reference can be obtained. The difference in the level of the signal and the detected signal also has the advantage of making the circuit or calculation simpler. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a system overall view of an embodiment of a photo-sensing system of the present invention. Figure 2 is a block diagram of the photo-sensing system. Figure 3 is a block diagram of the photo-electrical sensor in the photo-sensing system. Figure 4 is a functional block diagram of the management substation in the photo-sensing system. Figure 5 is a system block diagram of the management substation in the photo-sensing system. Fig. 6 is a system configuration diagram of the output of the substation in the photo-sensing system. Figure 7 is a system block diagram of the output of the substation in the photo-sensing system. Fig. 8 is a system configuration diagram of the input unit of the substation in the photo-sensing system. Figure 9 is a system block diagram of the input of the substation in the photo-sensing system. Figure 10 is a timing diagram of the transmitted signals in the photo-sensing system. Figure 11 is a flow chart of the management substation program in the photo-sensing system. -43- 201133022 Figure 1 2 is a program flow diagram of the output of the substation in the photo-sensing system. Fig. 1 is a flow chart of the program of the substation output section of the photo-sensing system of Fig. 2; Figure 14 is a flow chart of the substation input program in the photo-sensing system. Fig. 15 is a flowchart showing the flow of the substation input portion of the photo-sensing system in the photo-sensing system of Fig. 14. Fig. 16 is a flow chart showing the sub-station input portion of the photo-sensing system of Fig. 15. Fig. 17 is a flow chart showing the program of the substation input section in the photo-sensing system of Fig. 16. Fig. 18 is a flow chart of the program of the substation input section in the photo-sensing system of Fig. 17. Figure 19 is a logic diagram of the photo-sensing system. Figure 20 is a RAM memory diagram of the input of the substation #Bn in the photo-sensing system. Fig. 21 is a calculation data of the input unit of the substation #Bn in the photo-sensing system. Fig. 22 is a view showing the configuration of an optical inductor according to another embodiment of the photo-electric sensing system of the present invention. Figure 23 is a timing diagram of the transmitted signal of the photo-sensing system using the photo-electrical sensor. -44 - 201133022 [Description of main component symbols] 1 Control unit 2 Output unit 3 Input unit 4 Control signal 5 Monitor signal 6 Parent station 7 DP signal line 8 DN signal line 10 Management substation 11 Photo-inductance detectors 11a, ..., 1 In sensing unit 12 Substation input unit, substation output unit 13 Bridge wiring 14 Address setting 15 MCU 16 A/D converter 17 Series wiring 18 CPU 19 RAM 20 ROM 2 1 I/O bus bar 22 CK terminal • 45 - 201133022 24 Tout terminal 27 Tin terminal 30 LU terminal 3 1 lout terminal 32 Ld terminal 3 3 Connector 34 Substation connection 3 5 Object 36 Projection unit 3 7 Light unit -46-

Claims (1)

201133022 七、申請專利範圍· 1.一種光電感測器，其特徵爲： 具有相對向設置之投光部與受光部，以受光部之受 光信號的強度變化來檢測出被收容於該投光部與該受光 部之間的空間之被檢測體的有無； 該受光部具有與該投光部之投光時序信號同步地動 作的第1受光元件與第2受光元件； 該投光部具有第1投光元件，係配置成投光信號在 沒有與該被檢測體交叉的情況下到達該第1受光元件， 在與該被檢測體交叉的情況下到達該第2受光元件；及 第2投光元件，係配置成投光信號在沒有與該被檢測體 交叉的情況下到達該第2受光元件’在與該被檢測體交 叉的情況下到達該第1受光元件； 將該第1投光元件與該第1受光元件的—對、及該 第1投光元件與該第2受光元件的一對設爲第1組； 將該第2投光元件與該第1受光元件的一對、及該 第2投光元件與該第2受光元件的一對設爲第2組； 在該第1組，比較不會因該被檢測體而衰減之該第1 受光元件的受光信號、與會因該被檢測體而衰減之該第2 受光元件之受光信號的位準差，以檢測出該被檢測體的 有無資訊； 而且， 在該第2組，比較會因該被檢測體而衰減之該第1 受光元件的受光信號、與不會因該被檢測體而衰減之該 -47- 201133022 第2受光元件之受光信號的位準差，以檢測出該被檢測 體的有無資訊； 雙重地比對檢測出從該第1組所得之該被檢測體的 有無資訊與從該第2組所得之該被檢測體的有無資訊。 2 ·如申請專利範圍第1項之光電感測器，其中在該第1投 光元件的投光時序進行在該第1組之該位準差的比較， 並在該第2投光元件的投光時序進行在該第2組之該位 準差的比較。 3 .—種光電感測器，其特徵爲： 具有相對向設置之投光部與受光部，以受光部之受 光信號的強度變化來檢測出被收容於該投光部與該受光 部之間的空間之被檢測體的有無； 該投光部具有第1投光元件，係投射在沒有與該被 檢測體交叉的情況下到達該受光部的投光信號；及第2 投光元件，投射在與該被檢測體交叉的情況下到達該受 光部的投光信號； 比較接收來自該第1投光元件之不會因該被檢測體 而衰減之投光信號而被產生之分時受光信號、與接收來 自該第2投光元件之會因該被檢測體而衰減之投光信號 而被產生之另一個分時受光信號的位準差，以檢測出該 被檢測體的有無資訊。 4. 一種光電感測器，其特徵爲： 具有相對向設置之投光部與受光部，以受光部之受 光信號的強度變化來檢測出被收容於該投光部與該受光 -48- 201133022 部之間的空間之被檢測體的有無； 該投光部具有第1投光元件與第2投光元件； 該受光部具有第1受光元件，接收來自該第1投光 元件之不會因該被檢測體而衰減的投光信號及來自該第 2投光元件之會因該被檢測體而衰減的投光信號：及第2 受光元件，接收來自該第· 2投光元件之不會因該被檢測 體而衰減的投咣信號及來自該第1投光元件之會因該被 檢測體而衰減的投光信號； 將該第1投光元件與該第1受光元件的一對、及該 第2投光元件與該第1受光元件的一對設爲第1組； 將該第2投光元件與該第2受光元件的一對、及該 第1投光元件與該第2受光元件的一對設爲第2組； 在該第1組，比較不會因該被檢測體而衰減之該第1 受光元件的分時受光信號、與會因該被檢測體而衰減之 該第1受光元件之另一個分時受光信號的位準差，以檢 測出該被檢測體的有無資訊； 而且， 在該第2組，比較會因該被檢測體而衰減之該第2 受光元件的分時受光信號、與不會因該被檢測體而衰減 之該第2受光元件之另一個分時受光信號的位準差，以 檢測出該被檢測體的有無資訊； 雙重地比對檢測出從該第1組所得之該被檢測體的 有無資訊與從該第2組所得之該被檢測體的有無資訊。 5.如申請專利範圍第4項之光電感測器，其中在該第丨投 -49- 201133022 光元件及該第2投光元件的分時投光時序進行該位準差 的比較。 6. 如申請專利範圍第1、2、4及5項之光電感測器，其中 從在該第1組所得之該被檢測體的有無資訊與在該第2 組所得之該被檢測體的有無資訊雙重地比對該被檢測體 的有無資訊，而未檢測出該被檢測體之有無的情況’檢 測出該被檢測體的異常狀態及/或感測器故障。 7. —種光電感測器，其多段地構成申請專利範圍第卜2、4、 5及6項之該光電感測器，並檢測出複數個該被檢測體， 該光電感測器的特徵爲： 共用在該第2組的該第2投光元件及關於與被進行 與該第2組有關的檢測之被檢測體相鄰之其他的被檢測 體之在該第1組的該第1投光元件； 共用在該第2組的該第2受光元件及關於該其他的 被檢測體之在該第1組的該第1受光元件。 8 . —種光電感測器，其多段地構成申請專利範圍第3項之 該光電感測器，並檢測出複數個該被檢測體，該光電感 測器的特徵爲： 該第2投光元件係被共用作爲關於與與投光信號所 交叉之被檢測體相鄰之其他的被檢測體之該第1投光元 件： 該第2受光元件係被共用作爲關於與該其他的被檢 測體之該第1受光元件。 9.如申請專利範圍第1至8項中任一項之光電感測器，其 -50- 201133022 中將成對之該投光部與該受光部單元化。 1〇.—種光電感測系統， 具備有複數個申請專利範圍第1至9項中任一項之 光電感測器； 具備與一連串之該投光部連接的第1管理子站、及 與對應於該投光部之一連串之該受光部連接的第2管理 子站； 該第1管理子站產生該投光時序信號，而該第2管 理子站產生與該投光時序信號同步之受光信號的時序信 疏。 11 ·如申請專利範圍第1 〇項之光電感測系統，其中複數個一 連串之該投光部與一連串之該受光部與共同的資料信號 線連接，並向上階母站傳達該被檢測體的有無資訊、該 被檢測體的異常狀態及/或感測器故障資訊。 12.—種光電感測系統， 具備有申請專利範圍第1、2、4及5項之光電感測 器； 從在該第1組所得之該被檢測體的有無資訊與在該 第2組所得之該被檢測體的有無資訊雙重地比對該被檢 測體的有無資訊，而未檢測出該被檢測體之有無的情 況，檢測出該被檢測體的異常狀態及/或感測器故障。 -51-201133022 VII. Patent application scope 1. An optical-inductance detector characterized in that: a light projecting portion and a light-receiving portion are provided to face each other, and are detected in the light projecting portion by a change in intensity of a light receiving signal of the light receiving portion. The presence or absence of the object to be detected in the space between the light-receiving portions; the light-receiving portion having the first light-receiving element and the second light-receiving element that operate in synchronization with the light-emission timing signal of the light-emitting portion; the light-emitting portion has the first The light projecting element is arranged such that the light projecting signal reaches the first light receiving element without crossing the object, and reaches the second light receiving element when intersecting the object; and the second light projecting The element is arranged such that the light projecting signal reaches the second light receiving element when it does not intersect the object, and reaches the first light receiving element when intersecting the object; the first light projecting element a pair with the first light receiving element, a pair of the first light projecting element and the second light receiving element, a first group, a pair of the second light projecting element and the first light receiving element, and The second light projecting element and the second light receiving unit The pair of members is set to the second group; in the first group, the light receiving signal of the first light receiving element that is not attenuated by the object and the second light receiving element that is attenuated by the object are compared The position difference of the received light signal is used to detect the presence or absence of the information of the object; and in the second group, the light receiving signal of the first light receiving element that is attenuated by the object is compared, and the cause is not The level difference of the light receiving signal of the second light receiving element is attenuated by the sample to detect the presence or absence of the object; and the double sense is detected to detect the Information on the presence or absence of the sample and the presence or absence of the object obtained from the second group. [2] The optical inductance detector of claim 1, wherein the comparison of the level difference in the first group is performed at a light projection timing of the first light projecting element, and the second light projecting element is The projection timing is performed by comparing the quasi-differences of the second group. 3. A photo-electrical sensor, characterized in that: a light projecting portion and a light receiving portion are provided to face each other, and are detected between the light projecting portion and the light receiving portion by a change in intensity of a light receiving signal of the light receiving portion The presence or absence of the object to be detected in the space; the light projecting unit has a first light projecting element, and projects a light projecting signal that reaches the light receiving unit when there is no intersection with the object; and the second light projecting element projects a light-emitting signal that reaches the light-receiving unit when intersecting with the object; and a time-division light-receiving signal that is generated by receiving a light-emitting signal that is not attenuated by the object from the first light-emitting element And a level difference of another time-division light-receiving signal generated from the second light-emitting element that is generated by the light-emitting signal attenuated by the object to detect the presence or absence of the object. 4. A photo-electrical sensor, comprising: a light projecting portion and a light receiving portion that are disposed opposite to each other, and detecting a intensity of a light receiving signal of the light receiving portion to be received in the light projecting portion and the light receiving portion - 48-201133022 The presence or absence of the object to be detected in the space between the parts; the light projecting unit includes the first light projecting element and the second light projecting element; and the light receiving unit has the first light receiving element, and receives the light from the first light projecting element a light projecting signal attenuated by the object and a light projecting signal attenuated by the object from the second light projecting element and the second light receiving element receiving the light from the second light projecting element a throwing signal that is attenuated by the object and a light projecting signal that is attenuated by the object from the first light projecting element; and a pair of the first light projecting element and the first light receiving element And a pair of the second light projecting element and the first light receiving element is a first group; a pair of the second light projecting element and the second light receiving element; and the first light projecting element and the second A pair of light-receiving elements is set to the second group; in the first group, the object is not compared And attenuating the time-division light-receiving signal of the first light-receiving element and the level difference of the other time-division light-receiving signal of the first light-receiving element attenuated by the object to detect the presence or absence of the object Further, in the second group, the time-division light-receiving signal of the second light-receiving element attenuated by the object and the other second light-receiving element that is not attenuated by the object are compared. Receiving the positional difference of the light signal to detect the presence or absence of the object; and detecting the presence or absence of the object obtained from the first group and the detected from the second group The presence or absence of information. 5. The optical inductance detector of claim 4, wherein the comparison of the level difference is performed at a time division projection timing of the optical element and the second light projecting element of the second light source. 6. The optical inductance detector of claim 1, 2, 4 and 5, wherein the information on the presence or absence of the object obtained in the first group and the object obtained in the second group Whether or not the information is double compared to the presence or absence of the object to be detected, and the presence or absence of the object is not detected, 'the abnormal state of the object and/or the sensor failure are detected. 7. A photo-electrical sensor, which comprises a plurality of sections of the optical-inductance detector of the claims 2, 4, 5 and 6 and detects a plurality of the detected objects, the characteristics of the optical-inductance detector The first light-emitting element shared in the second group and the other object adjacent to the object to be detected in the second group are the first one of the first group. The light-emitting element; the second light-receiving element shared by the second group and the first light-receiving element of the first group of the other object to be detected. 8. A photo-electrical sensor, which comprises the optical-inductance detector of claim 3 in a plurality of stages, and detects a plurality of the objects to be detected, the photo-inductor having the following features: The element is shared as the first light projecting element with respect to another subject adjacent to the subject to which the light projecting signal intersects: the second light receiving element is shared with the other subject The first light receiving element. 9. The optical inductance detector according to any one of claims 1 to 8, wherein the light projecting portion and the light receiving portion are unitized in a pair of -50-201133022. 1. A photo-sensing system having a plurality of optical inductance detectors according to any one of claims 1 to 9; having a first management sub-station connected to a series of the light-emitting portions, and a second management substation connected to the light receiving unit connected to one of the light projecting units; the first management substation generates the light emission timing signal, and the second management substation generates a light receiving signal synchronized with the light emission timing signal The timing of the signal is poor. 11. The photo-sensing system of claim 1, wherein the plurality of light-emitting portions and the series of light-receiving portions are connected to a common data signal line, and the subject is communicated to the parent station. Whether there is information, abnormal state of the detected object, and/or sensor failure information. 12. A photo-sensing system having an optical sensor having the patent claims 1, 2, 4 and 5; information on the presence or absence of the object obtained in the first group and in the second group The presence or absence of the obtained object is double compared to the presence or absence of the object, and the presence or absence of the object is not detected, and the abnormal state and/or sensor failure of the object is detected. . -51-
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