201127556 六、發明說明： 【發明所屬之技術領域】 本發明涉及倒角裝置’用於加工在顯示器面板等中使 用的矩形的玻璃基板及其他硬質脆性板的邊。本發明尤其 涉及能夠計測加工尺寸的上述裝置，以便準確設定承載硬 質脆性板的工作臺的角度和加工工具的位置。 【先前技術】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chamfering device </ RTI> for processing a rectangular glass substrate and other hard brittle plates used in a display panel or the like. More particularly, the present invention relates to such a device capable of measuring the size of a process to accurately set the angle of the table carrying the rigid brittle plate and the position of the processing tool. [Prior Art]
玻璃基板（以下稱爲“基板”或“工件”）的倒角裝 置是利用工具（一般是砂輪），對在通過切割等被切斷的 基板的邊上産生的銳利棱線和角進行倒角及倒圓加工的裝 置。一般，如第八圖所示，這種倒角裝置具有利用負壓來 吸附基板1的工作臺2、和配置在該工作臺兩側的工具3。 工作臺2能夠通過未圖示的旋轉裝置繞垂直轴旋轉9〇度。 工作臺2和工具3能夠沿進給方肖（圖中的γ方向）相對 移動。基板”皮固定在工作臺上，並使要加工的邊8與該 進給方向平行。 被用作顯示器面板的基板的厚度正在變薄而且重量變 輕’並且對加工精度也要求3一（微米）左右的較高精 度。爲了實現該精度，在基板卜戈㈣在該基板，上的薄 片上標註三個定位標記4β三個定位標記彳被設定在把正 父的兩邊作爲基板彳的邊的方向的直角三角形的頂點的位 f。並且’利用配置於工作臺的寬度方向（與進給方向正 父的、圖中的X方向）的兩個攝影機5、5，讀取三個定位 標記4中沿寬度方向㈣的兩個定位標記，並設定工作臺 2的角度和工具3的位置。 201127556 在該設定之後’使工作臺2或工具3、3沿進給方向 移動’同時利用卫具3、3加卫基板]—方的相對邊8、8。 在該加工結束後，使工作臺2旋轉9〇度，重新讀取沿寬 度方向排列的兩個定位標記4、4，將工具3、3的寬度方 向位置設定在新的位置。然後，使工作臺2或工具3、3 沿進給方向移冑，同時進行第二相對邊9、9的加工。 這樣，把標註在基板彳上的定位標記4 #位置作爲基 準疋工作臺2繞垂直軸的角度和工具的位置，由此進 订準確的加工。但是，例如在兩個攝影機5、5的位置關 係存在誤差、工具3磨損、或工具3的高度存在誤差時， 將産生加工尺寸的誤差。 因此，以往將已試驗加工過的基板從倒角裝置中取出 並放置在測定11上，操作者制測定ϋ的顯微鏡計測加工 尺寸（-般是從第七圖所示的定位標記4到倒角線7的距 離a、b、倒角寬度c、d、角的加工尺寸e、f)，將校正 值輸入到根據該計測值控制工作臺2的角度、工具3的寬 度方向及高度位置的數控裝置中，以便進行準確的加工。 爲了 t正因工具磨損等隨時間經過而形成的變化造 成的加工精度的下降，冑當抽取已加工的基板，利用與上 述相同的方法計測加工尺寸，並向數控裝置重新輸入必要 的校正值。 仁是在由人進行加工尺寸的計測的方法中，産生因 不小二和看錯造成的計測錯誤、校正值的計算錯誤和輸入 錯誤等。因此’本申請的申請人提出下述技術，在下述專 利文獻1 在倒角裝置上自動計測成爲計測加卫及抽樣 201127556 檢查的對象的板材的加工尺寸’根據該計測值來修正倒角 裝置的工作臺和工具的位置。 即，在倒角裝置的工具3的上游側（工件被搬入的一 側）設置兩個上部攝影機5、5、和配置于它們下方的下部 攝影機6、6 (第八圖t的虛擬線）。並且，對於將要計測 加工的基板和抽樣檢查的基板’利用兩個上部攝影機5、5 讀取在工件1上標註的寬度方向上的兩個定位標記η 設定工作臺2的角度和工具3的位置，然後使工作臺2沿 進給方向（+Y方向）相斜孩& γ )才目對移動（以下簡稱爲“進给移 動”），同時㈣-相對邊8、8進行倒角加工。在2 工結束後，使工作臺2沿返回方向（—γ (以下簡稱爲‘‘返回移動，，）’ η °目對移動 )冋時利用上部攝影機5中 的-個攝影機讀取沿進給方向排列的兩個定位 檢測工件的傾斜。然後，再次使Ml 2進行進 來 利用上部及下部攝影機5、6計測上下的加卫尺^動’ ㈣’使工作臺2旋轉9〇度 ::’同時進行第二相對“、9的倒角加工，I:: 進口移動並檢測工件，的傾斜。然後，再仃 行返回移動，同時進行第 臺2進 在專利文獻i提出的方法;工尺寸的計測。 倒角加工及加工尺寸的二二’爲了進行基板的四邊的 過…。另外，：:不::使… 是使工作臺2進行進給移動同時加工第一時的:的加工’ 工作臺2旋轉90度， 十邊、8’使 工 第二相對邊9、9。 臺2進仃返回移動同時加 5 201127556 另一方面，專利文獻2提出了一種倒角裝置，在工作 臺相對於工具的進給方向上游側的卫作臺寬度方向左右 側，配：觀察基板的上表面的上部攝影機和觀察側面的側 部攝影機。在該裝置令，利用 J用上攝影機讀取在工件上標 δ主的疋位^示S己，並進行工作臺_ _ & 忭壹角度和工具的位置設定，通 過工作臺的進給移動來加工第一 矛相對側邊’通過返回移動 來進行第一相對邊的加工尺寸 寸的測，在返回後的位置使 工作臺紅轉90度，通過再 丹次的進給移動對第二相對邊進 行倒角加工，通過再：：女的π ^Λ丄 丹人的返回移動來計測第二相對邊的加 工尺寸。在該專利文獻2提 权出的方法中’使工作臺往返2 次（通過4次），以便進 w w理的倒角加工和加工尺寸的 計測。 另外，下述專利文獻3公 ^ d A開了下述構造，將相當於專 利文獻1的下部攝影機的帶_ ^ ^ ^ 咿第一先源的第二攝影機並列設 1目I於上部攝影機的第一攝影機的外侧，利用左右的 兩個=鏡使第二光源的照射反射到玻璃板的下表面。 【專利文獻1】曰太牲„ 特開2007— 223005號公報 【專利文獻2】曰太姓„ 本特開2007 - 38327號公報 【專利文獻3】曰太姓0 Λ Λ 寺開2004 - 99424號公報 在專利文獻1記述的發 妁發明中，關於計測加工尺寸的工 件通過彺返3次來進行加 ,e ,,. 加工和計測，關於不計測的工件則 往返1次只進行加工。另— 明中，通過㈣2次來二方面，在專利文獻2記述的發 .1 ^ 仃工件的加工和計測。在專利文 獻1的發明中，把工件 干的傾斜檢測作爲獨立的計測項目， 所以加工和計測需要往 ύ =入’但如果像專利文獻2那樣 201127556 不進行工件的傾斜檢測，則能夠通過往返2次來進行工件 的加工和計測。 專利文獻1和2記述的方法都是分別通過獨立的工作 臺的相對移動來進行加工和計測。因此，爲了進行4邊的 加工和什測，需要進行最少4次的相對移動（通過4次）。 根據工具的構造，有時加工時的工作臺進給方向被限 定爲一個方向。該情況時，沿工件的輸送方向排列2台倒 角裝置，在其中間設置使工件轉向9〇度的轉向台，這種 構造比較有利於加快加工的生産節拍。但是，肖情況時， 在現有構造的倒角裝置中，不能在倒角裝置上進行加工尺 寸的計測。 力一万面，在具有 T疋付 /又〜仍δ傅的倒角裝 置申，像專利文獻1、2記述的那樣，通過在工作臺的往 返相對移動期間進行工件的旋轉動作，能夠利肖^台倒角 裝置進行四邊的加工。並且，當只在一個方向的相對移動 時進行工件的加工時，需要使工作臺返回來，以便進行下 個加工動作，所以認爲如果在該返回移動時能夠進行加 工尺寸的計測’將不會因爲在倒角裝置上自動計測加：： 寸而産生生産節拍的增加。 但是，實際上在快速進行返回移動時，攝影機的圖像 閃過’不能進行加工尺寸的計測，在使用能夠快速加工的 砂輪時，有時必須使計測時的返回速度比加工時的進仏速 度慢。即，雖然在不進行計測時能夠進行快速的返回移=，、 但進行計測時返回速度變慢，因此導致生產節拍延長。 因爲這種情況，在每進行預先確定的多個工件加工 201127556 後，進行一次工件尺寸的計測，設定必要的校正值。該情 况時，需要留取餘量來設定校正值，以使在進行下一次計 測之前的期間的多個工件加工中，加工誤差不超過允許 值’不會産生不合格品。即，需要以高於所允許的加工誤 差的精度來設定校正值》如果能夠獲取較大的該餘量，則 相應地能夠增多在計測動作期間的工件的加工個數，能夠 提兩生產性。 但定，在所要求 ^ 明厌變嚴格時，獲取該邊緣比 較困難，最終必須計測被加工後的全部工件的加工尺寸， 並隨時根據需要來變更校正值，在現有構造 不得不降低生產性。 【發明内容】 本發明就是爲了解決上述門Β自& , 的課題是提供一種倒角裝置I :即’本發明 〜 鬥衣罝成夠對加工後的全部工件進 計測，而完全或幾乎不增加生產節拍，因此 實見更间的加工精度而不會降低加工精度。 述倒==:::Γ裝置來解決上述問㈣ 向兩側、即工件被最初送入到裝=向二游側的寬度方 "’配置觀察，兩側邊部的上二一=度方向兩 機，同時設置在工具的工作臺面的上游側上部攝影 察工件的兩側：：側上部攝影機、和在該下游側觀 工表面的下游侧下部攝影機。 間隔小於工具鱼上游咖μ⑺方向的間隔是固定的，該 、’[1上部攝影機的m給方向的㈤隔，一 201127556 般是其一半以下。並且，能夠實現攝影機和工具同時沿寬 度方向移動的構造。因此，能夠採用下述構造，即，在根 據工件的尺寸使工具沿寬度方向移動的寬度方向移動台上< 安裝攝影機，在該寬度方向移動台上安裝上下自由移動的 工具。The chamfering device of the glass substrate (hereinafter referred to as "substrate" or "workpiece") is a chamfering of sharp ridges and corners generated on the sides of the substrate cut by cutting or the like using a tool (generally a grinding wheel). And rounding machine. Generally, as shown in Fig. 8, the chamfering device has a table 2 for adsorbing the substrate 1 by a negative pressure, and a tool 3 disposed on both sides of the table. The table 2 can be rotated by 9 degrees around the vertical axis by a rotating device (not shown). The table 2 and the tool 3 are relatively movable along the feed side (the gamma direction in the figure). The substrate "skin" is fixed on the table, and the edge 8 to be processed is parallel to the feeding direction. The thickness of the substrate used as the display panel is being thinned and the weight is lighter, and the processing precision is also required to be 3 (micron). In order to achieve this precision, three positioning marks 4β are placed on the substrate on the substrate, and three positioning marks are set on the sides of the parent to be the sides of the substrate. Bit f of the vertex of the right triangle of the direction. And 'three positioning marks 4 are read by two cameras 5, 5 arranged in the width direction of the table (the X direction in the feed direction, the X direction in the drawing) Two positioning marks in the width direction (four), and set the angle of the table 2 and the position of the tool 3. 201127556 After this setting, 'move the table 2 or the tools 3, 3 in the feed direction' while using the guard 3 3, the base plate] - the opposite sides 8 and 8. After the machining is finished, the table 2 is rotated by 9 degrees, and the two positioning marks 4, 4 arranged in the width direction are re-read, and the tool 3, 3 width direction position Set to a new position. Then, the table 2 or the tools 3, 3 are moved in the feeding direction while the second opposite sides 9, 9 are processed. Thus, the positioning mark 4 # position marked on the substrate 彳 is placed. As the reference 疋 table angle of the table 2 about the vertical axis and the position of the tool, accurate machining is thus performed. However, for example, there is an error in the positional relationship between the two cameras 5, 5, wear of the tool 3, or the height of the tool 3 exists. In the case of an error, an error in the machining size is generated. Therefore, in the past, the substrate that has been tested and processed has been taken out from the chamfering device and placed on the measurement 11, and the operator measured the size of the microscopic measurement of the crucible (-the general is from the seventh The distances a, b, the chamfer widths c, d, the machining dimensions e, f) of the positioning marks 4 to the chamfering lines 7 shown in the figure, the correction values are input to the angle of the table 2 according to the measured values, The numerical control device of the width direction and the height position of the tool 3 is used for accurate machining. In order to reduce the machining accuracy caused by changes in the wear of the tool or the like over time, the processed substrate is extracted. The machining size is measured in the same manner as described above, and the necessary correction value is re-entered into the numerical control device. In the method of measuring the machining size by a person, the measurement error and the correction value due to the error and the error are generated. The calculation error of the calculation, the input error, etc. Therefore, the applicant of the present application has proposed the following technique, and in the following Patent Document 1, the processing size of the sheet material which is the object of the measurement and the inspection 201127556 is automatically measured on the chamfering device. The position of the table and the tool of the chamfering device is corrected by measuring the value. That is, two upper cameras 5, 5 and the lower side are disposed on the upstream side of the tool 3 of the chamfering device (the side on which the workpiece is carried) The lower cameras 6, 6 (virtual lines of the eighth figure t). And, for the substrate to be measured and the substrate to be sampled, two upper cameras 5, 5 are used to read the two width directions marked on the workpiece 1. Positioning marks η set the angle of the table 2 and the position of the tool 3, and then make the table 2 tilt in the feed direction (+Y direction) to the child & γ) Movable (hereinafter referred to as "mobile feed"), while the opposite sides 8,8 ㈣- chamfered. After the completion of the 2nd work, the workbench 2 is moved in the return direction (-γ (hereinafter referred to as ''return to move, ') η°, and the edge of the upper camera 5 is used to read the edge feed. The two orientations arranged in the direction detect the tilt of the workpiece. Then, M1 is again brought in and the upper and lower cameras 5 and 6 are used to measure the upper and lower calipers. (4) 'Rotate the table 2 by 9 degrees: 'At the same time, the second relative, 9 chamfering is performed. , I:: The inlet moves and detects the tilt of the workpiece. Then, it moves back and moves, and at the same time carries out the method proposed in Patent Document i; the measurement of the size of the workpiece. The chamfering and processing of the size of the 22' In order to carry out the four sides of the substrate....::::::... The processing of the table 2 when the table 2 is fed and moved first: The table 2 is rotated by 90 degrees, ten sides, 8' The second opposite side 9 and 9. The second stage 2 moves back and moves while adding 5 201127556 On the other hand, Patent Document 2 proposes a chamfering device, which is a width of the table on the upstream side of the table relative to the feed direction of the tool. The left and right sides of the direction are equipped with: an upper camera for observing the upper surface of the substrate and a side camera for observing the side surface. In this device, the camera is used to read the position of the δ main body on the workpiece by using a camera, and Workbench _ _ & 忭壹 angle The position of the tool is set, and the opposite side of the first spear is processed by the feed movement of the table. 'The measurement of the first opposite side is performed by the return movement, and the table is turned red by 90 degrees at the position after the return. The second opposite side is chamfered by the feed movement of the second time, and the processing size of the second opposite side is measured by the return movement of the female: π ^Λ丄丹人. In the method of the method, the workbench is reciprocated twice (passed 4 times) to perform the chamfering process and the measurement of the machining size. In addition, the following Patent Document 3 discloses the following structure, which will be equivalent. In the lower camera of the patent document 1, the second camera of the first source is arranged in parallel with the first camera of the upper camera, and the second light source is irradiated by the two left and right mirrors. It is reflected on the lower surface of the glass plate. [Patent Document 1] 曰太牲 特 2007 2007- 223005 pp. [Patent Document 2] 曰太姓 „ 本特开2007-38327号 [Patent Document 3] 曰太姓0 Λ Λ Temple Open 2004 - 99424 In the hairpin invention described in Patent Document 1, the workpiece for measuring the processing size is subjected to the addition, e, and processing by means of three times of returning, and the workpiece to be measured is processed only once or twice. In the present invention, the processing and measurement of the workpiece are described in Patent Document 2, and the tilt detection of the workpiece dry is regarded as an independent measurement item. Therefore, the processing and processing are performed. It is necessary to measure 入=入', but if the 201127556 does not perform the tilt detection of the workpiece as in Patent Document 2, the workpiece can be processed and measured by reciprocating twice. The methods described in Patent Documents 1 and 2 are each processed and measured by relative movement of independent stages. Therefore, in order to perform the processing and measurement of the four sides, a minimum of four relative movements (four passes) are required. Depending on the construction of the tool, sometimes the table feed direction during machining is limited to one direction. In this case, two chamfering devices are arranged in the conveying direction of the workpiece, and a steering table for turning the workpiece to 9 degrees is provided therebetween, which is advantageous for accelerating the production tact of the machining. However, in the case of the case, in the chamfering device of the conventional structure, the measurement of the machining size cannot be performed on the chamfering device. In the case of a chamfering device having a T 疋 / 又 仍 仍 仍 仍 , , , , , , , , , , , , , , δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ ^The table chamfering device performs four-sided processing. Further, when the workpiece is machined only when the relative movement is performed in one direction, it is necessary to return the table to perform the next machining operation. Therefore, it is considered that the measurement of the machining size can be performed when the return movement is performed. Because the automatic measurement on the chamfering device increases the production beat by an inch. However, in fact, when the return movement is performed quickly, the image of the camera flashes 'The measurement of the machining size cannot be performed. When using a grinding wheel that can be processed quickly, it is sometimes necessary to make the return speed at the time of measurement higher than the speed at the time of machining. slow. In other words, although the fast return movement can be performed when the measurement is not performed, the return speed is slowed down during the measurement, and thus the production tact is prolonged. Because of this, after each predetermined workpiece machining 201127556 is performed, the workpiece size is measured and the necessary correction value is set. In this case, it is necessary to set a margin to set the correction value so that the machining error does not exceed the allowable value in the plurality of workpiece machining during the period before the next measurement. In other words, it is necessary to set the correction value with an accuracy higher than the allowable machining error. If a large margin can be obtained, the number of workpieces to be processed during the measurement operation can be increased accordingly, and both productivity can be improved. However, it is difficult to obtain the edge when the required deformation is strict. Finally, it is necessary to measure the processing size of all the workpieces after machining, and change the correction value as needed, and the productivity is reduced in the existing structure. SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-described problem of the sills and the like, and to provide a chamfering device I: that is, the present invention is capable of measuring all the workpieces after processing, and is completely or almost not Increase the production cycle, so the actual machining accuracy is not reduced without reducing the machining accuracy. Describe the ==:::Γ device to solve the above problem (4) to the two sides, that is, the workpiece is initially sent to the width = "width" side of the configuration side of the configuration, the upper two sides = degree Two machines in the direction are disposed on the upper side of the upstream side of the work surface of the tool to inspect both sides of the workpiece: a side upper camera, and a downstream lower camera on the downstream side viewing surface. The interval is smaller than the interval of the tool fish upstream (μ) direction, which is equal to or less than half of the (5) spacing of the upper camera. Further, it is possible to realize a configuration in which the camera and the tool are simultaneously moved in the width direction. Therefore, it is possible to adopt a configuration in which the tool is moved in the width direction in which the tool moves in the width direction according to the size of the workpiece. The camera is mounted, and a tool that moves up and down is attached to the moving table in the width direction.
基板的倒角是在正反兩面進行的，所以需要四個攝影 機來計測兩側邊的上下的加工尺寸。在本發明的倒角裝置 中’攝影機的設置個數相比最少必要個數多兩個。假如想 要在工作臺的進給移動（正進給方向的相對移動）和返= 移動（負進給方向的相對移動）的兩個方 倒角加工時，需要也在工件的進給方向的上游::: = 工件的側邊部下表面的下部攝影機。因此，在該情況時， 與現有構造相比增設了四個攝影機。 上游側攝影機和工具按照與現有裝置相同的位置關係 設置。優選將下游側攝影機設置爲使它們與工具之間的進 給方向的距離盡可能接近。但是，在加工工件時，向工具 提供切削液（純水），所以需要使該切削液的水滴不殘留 在利用下游側攝影機觀察的部分。因此，通常需要在工具 和下游側攝影機之間設置空氣幕’以便切斷； 附著在工件上的水滴。 除 在本發明的倒角裝置中，利用上游側上部攝影機讀取 汉於工件上的定位標記，設〇作臺的角纟（在通過與進 給移動量相關聯的工具的寬度方向移動來設定角度時，指 /寬度方向移動量）和工具的位置 '然後，使工作臺進行 進給移動，同時進行倒角加工，在進行加工後馬上利用下 201127556 因此，能夠通過工件的 工件的加工和加工尺寸 游側攝影機進行倒角尺寸的計測。 —次相對進給（旁通及通過）進行 的計測。The chamfering of the substrate is performed on both the front and back sides, so four cameras are required to measure the upper and lower machining dimensions of the two sides. In the chamfering apparatus of the present invention, the number of cameras is set to be two more than the necessary number. If you want to chamfer the two sides of the table in the feed movement (relative movement in the positive feed direction) and back = movement (relative movement in the negative feed direction), it is also necessary in the feed direction of the workpiece. Upstream::: = Lower camera on the lower surface of the side of the workpiece. Therefore, in this case, four cameras are added as compared with the conventional configuration. The upstream camera and tool are set in the same positional relationship as the existing device. The downstream side cameras are preferably arranged such that their distance from the feed direction between the tools is as close as possible. However, when the workpiece is machined, the cutting fluid (pure water) is supplied to the tool, so that the water droplets of the cutting fluid do not remain in the portion observed by the downstream camera. Therefore, it is usually necessary to provide an air curtain ' between the tool and the downstream side camera to cut off; water droplets attached to the workpiece. In addition to the chamfering device of the present invention, the upstream side upper camera is used to read the positioning mark on the workpiece, and the corner of the table is set (the setting is made by moving in the width direction of the tool associated with the amount of feed movement) At the angle, the amount of movement in the finger/width direction) and the position of the tool ' Then, the table is moved by the feed, and chamfering is performed at the same time. Immediately after the machining, the next 201127556 is used. Therefore, the workpiece can be processed and processed through the workpiece. The size side camera measures the chamfer size. - Measurements made by relative infeed (bypass and pass).
I部攝影機是觀察工件的側邊部的下表面的攝影機， 不疋-置在工件的下方。例如，將下游側上部攝影機和 下部攝影機配置在卫件的側邊部上方的位置，並且使下部 攝影機處於工件的寬度方向外側的位置並朝下配置，利用 配置在工作臺的1件承載面下方的傾冑45度的兩個反射 鏡，能夠使下部攝影機的光轴朝向工件的側邊部的下表 面。在傾斜⑦置下部攝影機的光轴以使其朝向寬度方向内 側時’也能夠利用—個反射鏡使該光軸朝向卫件的側邊部 的下表面。 另外，在這種安裝構造中，在下部攝影機的光抽通過 工作臺的上表面高度的位置處，g己置用於使該光軸向工作 臺的寬度方向内側水平反射的半透半反鏡，在伴隨工件尺 寸改變的工作臺的換産調整時，也能夠計測工作臺上面（工 件承載面）的咼度。該情況時，關於下部攝影機是觀察工 :的側邊部下表面、還是觀察工作臺的側面，能夠通過使 設於各個讀取方向上的照明燈亮燈、滅燈來進行選擇。即， 在使照明I件的側邊部下表面的帛亮燈肖，下冑攝影機讀 取U下表面，在使照明工作臺側面的燈亮燈時，下部攝影 機讀取工作臺的上面的高度。 在本發明的倒角裝置中，在工作臺相對工具通過一次 夺進行倒角加工及加工尺寸的計測。因此，不需要進行用 於计測加工尺寸的工作臺的相對移動，即使對被加工的全 201127556 部工件進行加工尺寸的計測，生産節拍也根本不會增加（計 測速度比加工速度快的情況）、或者生産節拍的增加很小 (S十測速度比加工速度慢的情況’在該情況時，需要使加 工速度與計測速度一致）’所以根本不會或幾乎不會降低 生産性’具有能夠進行全部工件的加工尺寸的計測，能夠 在每加工一個工件時進行必要的校正值的設定，能夠以較 高的生産性進行高精度的倒角加工的效果。 【實施方式】 以下，參照附圖說明本發明的幾個優選實施方式。 第一圖至第三圖是表示本發明的倒角裝置的第一實施 例的圖，第一圖是表示主要機器結構的概況的立體圖，第 一圖疋表示工具及攝影機的安裝構造的示意立體圖，第三 圖是表示下游側攝影機與工件之間的位置關係的正視圖。 在圖中，11表示沿著未圖示的y方向的導軌移動的工 作臺座，2a表示通過未圖示的繞垂直軸旋轉的旋轉裝置， 安裝在工作臺座11上的圓臺，2b表示安裝在圓臺2a的 寬度方向（圖中的X方向）兩側的沿進給方向的細長的側 台，該側台被安裝爲相對於工作臺座11沿寬度方向自由 地接近或離開。兩側的側台2b根據工件1的要加工的側 邊8、9的間隔沿寬度方向移動，工件彳的旋轉及角度的 設定是這樣進行的’在圓臺2a上升並略微高出側台2b後， 圓臺2a旋轉、並在旋轉後下降，利用側台2b來支撐工件 1。關於具有這種圓臺2a及其兩側的側台2b的工作臺2， 本申請的申請人在曰本特開2005- 329471號公報中進行 了詳細公開。 11 201127556The I camera is a camera that observes the lower surface of the side portion of the workpiece, and is placed under the workpiece. For example, the downstream upper camera and the lower camera are disposed at a position above the side portion of the guard, and the lower camera is placed at a position outside the width direction of the workpiece and disposed downward, and is disposed below one of the load surfaces of the table. The two mirrors, which are inclined at 45 degrees, enable the optical axis of the lower camera to face the lower surface of the side portion of the workpiece. When the optical axis of the lower camera is tilted 7 so as to face the inner side in the width direction, it is also possible to use the mirror to face the lower surface of the side portion of the guard. Further, in this mounting configuration, at the position where the light of the lower camera is drawn through the height of the upper surface of the table, a half mirror for horizontally reflecting the inner side in the width direction of the optical axis table is placed. It is also possible to measure the twist of the upper surface of the table (work surface) when the change of the table with the change in the size of the workpiece is adjusted. In this case, whether the lower camera is the lower surface of the side portion of the observation unit or the side surface of the observation table can be selected by turning on and off the illumination lamps provided in the respective reading directions. That is, when the lower surface of the side portion of the illumination I is illuminated, the lower jaw camera reads the lower surface of the U, and when the light on the side of the illumination table is turned on, the lower camera reads the height of the upper surface of the table. In the chamfering apparatus of the present invention, the work is performed by chamfering and machining the size of the work tool relative to the tool. Therefore, it is not necessary to carry out the relative movement of the table for measuring the machining size, and even if the machining size of all the 201127556 workpieces to be processed is measured, the production tact will not increase at all (the measurement speed is faster than the machining speed) Or the increase in the production tact is small (the case where the S-test speed is slower than the machining speed), in which case the machining speed needs to be the same as the measurement speed), so there is no or almost no reduction in productivity. The measurement of the machining dimensions of all the workpieces enables the setting of necessary correction values for each workpiece, and the high-precision chamfering process can be performed with high productivity. [Embodiment] Hereinafter, several preferred embodiments of the present invention will be described with reference to the drawings. 1 to 3 are views showing a first embodiment of a chamfering device of the present invention, the first drawing is a perspective view showing an outline of a main machine structure, and the first drawing is a schematic perspective view showing a mounting structure of a tool and a camera. The third diagram is a front view showing the positional relationship between the downstream camera and the workpiece. In the figure, reference numeral 11 denotes a table base that moves along a guide rail in the y direction (not shown), and 2a denotes a rotary table that is mounted on the table base 11 by a rotating device that rotates about a vertical axis (not shown), and 2b indicates An elongated side table in the feeding direction mounted on both sides in the width direction (X direction in the drawing) of the truncated cone 2a, the side table being mounted to be freely approached or separated in the width direction with respect to the work pedestal 11. The side tables 2b on both sides are moved in the width direction according to the interval between the side edges 8, 9 of the workpiece 1, and the rotation and angle setting of the workpiece 是 are performed as follows: 'the table 2a is raised and slightly raised above the side table 2b. Thereafter, the truncated cone 2a is rotated and descends after the rotation, and the workpiece 1 is supported by the side table 2b. Regarding the table 2 having such a truncated cone 2a and the side tables 2b on both sides thereof, the applicant of the present application has been disclosed in detail in Japanese Patent Laid-Open Publication No. 2005-329471. 11 201127556
在第二圖中，16表示寬度方向移動台。寬度方向移動 台16被安裝在立設於工作臺2的寬度方向兩側的未圖示 的立柱上，並且兩側的部分能夠分別獨立地沿寬度方向移 動。17表示被安裝在寬度方向移動台16上的升降自如的 升降臺。工具3被安裝在升降臺17上。圖中的工具3是 由多個圓板砂輪構成的砂輪單元。18表示工具驅動電機。 工具驅動電機18被固定在升降臺17上。5a表示上游側 上部攝影機，5b表示下游側上部攝影機，6b表示下游側 下部攝影機。攝關5a、5b、6b被安裝在寬度方向移動 台1 6上並能夠微調上下位置。 如第三圖所示，下游側攝影機5b、6b被安裝成爲’ 在使寬度方向移動台16移動到工具3對卫件i的側邊8、 9進行加工的位置時，下游側上部攝影機5匕位於工件1的 側邊部的上方，下游側下部攝影機6b被安裝在工件，的 寬度方向外側’並且位於偏離工件的側邊8、9的位 上方。 巧 ,25 #26表示反射鏡’其使下游側下部攝影機讣的 :轴19逐次折彎90度，使該光軸朝向工件1的側邊部下 来鈾2:〇表不半透半反鏡’其被設置在下游側下部攝影機的 it過工作臺2的上表面位置的高度處的位置 於使該光軸19向朝向卫作臺2的側面的方向折彎= 不對工件1的側邊部下表面進行照明的下部燈 Π臺2的側面進行照明的側燈。對工件彳的側邊= 仃照明的燈使用内置於下游側上部攝影機5b中的饩 這些反射鏡25、26和半透半反鏡28以及燈29、3心旋 12 201127556 合安裝在寬度方向移動台16上。 在第二圖中，31和32志-π M 5h 不扠於工具3和下游側攝影 機讣，之間的上部及下部空氣嘴嘴。空氣喷嘴31、; 將寬度方向外側端固定在$ 2 疋在寬度方向移動台16上，並沪眘 向内側延伸。上部空氣喷嘴31位於固定在工作臺° 2 :的：件1的上表面的上方，下部空氣喷嘴 Γ: 下V上的工件1的下表面的下方。在上部空氣噴嘴 + 噴嘴32的上表面設有沿寬度方向 車乂長的狹縫狀的喷嘴孔。在工且 如卜 八d加工工件1的側邊時， 工氣呈膜狀從喷嘴31、32喷出，擗占故 a 0匕噴出，形成將工具3與下游側 攝影機5b、6b及反射鏡25、26之間切斷的空氣幕。 由按照未圖示的數控控制器的指令值進行控制的伺服 電機來驅動工作臺座”的進給方向的移動動作、圓臺& 的旋轉動作、側台2b的寬度方向移動動作、寬度方向移 動台16的移動動作以及升降臺17的升降動作◊這些指令 值月b夠利用在數控控制器的校正值存儲器中設定的校正值 進行校正，並提供給驅動各個動作的伺服電機。 在數控控制器中附設有圖像處理裝置，攝影機5a、5b、 6b的預定定時的圖像被讀入到圖像處理裝置中，通過圖像 處理裝置的圖像處理來識別定位標記4、倒角線（倒角面 與工件表面之間的交線）、工件的側邊8、9等，根據其 上&來運算指令值與計測值之差’運算使計測值與指令值 —致的校正值，並設定在數控控制器的存儲器中。 下面’說明第一至三圖所示的第一實施例的工件的加 工及計測動作。 13 201127556 (1 )利用上游側上部攝影機5a讀取沿寬度方向排列 的兩個定位標記4、4，根據讀取到的標記位置，設定工作 臺2的繞垂直轴旋轉的角度和工具3的寬度方向位置。 (2) 使工作臺2進行進給移動，同時進行第一相對 邊8、8的倒角加工。在工件的加工部伴隨工作臺2的進 給移動到達下游側攝影機5b、6b的位置後，根據在每個 預先確定的預定位置的下游側攝影機5b、6b的圖像（如 果是顯示器用的基板，由於標註有表示計測位置的標記， 籲 所以在下游侧攝影機檢測到該標記的位置讀入其圖像）， 計測在該位置的加工尺寸。此時，能夠利用上游側攝影機 5a來檢測工件的邊，計測第一相對邊8、8的切割精度。 (3) 在（2)的進給移動結束後’使圓臺2a略微上 升並旋轉90度’以使在（1 )的狀態下沿進給方向排列的 足位標記4、4在返回移動時的移動方向前側沿寬度方向 排列。 (4 )利用下游側上部攝影機5b讀取沿寬度方向排列 籲的兩個定位標記4、4，根據讀取到的標記位置數據，設定 工作臺2的繞垂直軸旋轉的角度和工具3的寬度方向位 置。 (5 )進行快速返回移動。 (6) 通過與（2)相同的動作，進行第二相對邊9、9 的倒角加工及加工尺寸的計測。與（2 )相同，也能夠計 測第二相對邊9、9的切割精度。 (7) 在（6)的進給移動結束後，從工作臺2上卸下 工件’並進行快速返回移動，返回到下一個工件的接受位 14 201127556 (8)數控控制器根據在（2) (6)計測到的 寸，更新在加工下一個工件時針對工作臺2的角度和工具 3的寬度方向位置及高度方向位置的指令值的校正值。 另外’在上述的動作φ，+ , , 進行兩次定 如果工作臺2的旋轉精度（也包括在旋 轉時工件在工作臺上表面不偏移的情況）d 略⑷的定位標記的讀取。該情沉時，在⑺的= 動時利用上游侧上部攝影機5a讀取沿進給方向排列的 兩個定位標記4、4,並根據兩者的間隔數據 寬度方向位置。 八的 第五圖是表示本發明的第二實施例的示意立體圖（相 當於第-圖的圖）。第m猫圖（相 _ ;第一實轭例的構造與第一實施例的不 同之處有兩點’一個是在上游側上部攝影冑&的下方位 置設有上游側下部攝影機6a，用於在工具3的上游側觀察 件1的側邊部下表面’另_個是工具3在進給移動時和 返回移動時都能夠進行倒角加工。 由女裝在同一砂輪轴上的多個圓板砂輪構成的倒角工 被叹置成爲’伴隨工件，中與該工具接觸部分的相對 :動’工具深深地切入到工件中。因此，肖了能夠在進給 f和返回移動時進行相同的加工，一般需要在工作臺 的兩侧刀別设置使進給方向的朝向相反的兩個工具，或 操作進。移動時和返回移動時進行改變工具的傾斜度等的 在該第一實施例的構造中，能夠借助工作臺2的往返 15 201127556 -一次的相對移動，進行工件1四邊的倒角加工和加工尺寸 的計测。即， (1)與第一實施例的（1)的動作相同。即，利用上 游側上部攝影機5a讀取定位標記4、4，設定工作臺2的 角度和工具3的寬度方向位置。 (2 )與第一實施例的（2 )的動作相同。即，使工作 臺2進行進給移動，同時進行第一相對邊8、8的倒角加 工’並利用下游側攝影機5b、6b計測加工尺寸^也能夠 鲁 利用上游側攝影機5 a或6 a計測切割精度。 (3) 與第一實施例的（3)的動作相同。即，利用圓 臺2a使工件旋轉90度。 (4) 與第一實施例的（4)的動作相同。即，利用下 游側上部攝影機5b讀取沿寬度方向排列的兩個定位標記 4、4’並設定工作臺2的角度和工具3的寬度方向位置。 (5) 使工作臺2進行返回移動，同時進行第二相對 邊9、9的倒角加工。在工件的加工部伴隨工作臺2的進 鲁給移動到達上游側攝影機5a、6^位置後，根據在每個 預先確定的預定位置的上游側攝影機5a、6a的圖像， 測在該位置的加工尺寸。此時，能夠利用下游側 ； 部攝影機5b、6b計測切割精度。 (6) 在（5)的返回移動結束後，從工作臺2In the second figure, 16 denotes a moving station in the width direction. The width direction moving table 16 is attached to a column (not shown) which is erected on both sides in the width direction of the table 2, and the both side portions can be independently moved in the width direction. Reference numeral 17 denotes a lifting platform which is mounted on the moving platform 16 in the width direction. The tool 3 is mounted on the lifting platform 17. The tool 3 in the drawing is a grinding wheel unit composed of a plurality of circular grinding wheels. 18 denotes a tool drive motor. The tool drive motor 18 is fixed to the lift table 17. 5a denotes an upstream upper camera, 5b denotes a downstream side upper camera, and 6b denotes a downstream side lower camera. The shutters 5a, 5b, and 6b are mounted on the width direction moving table 16 and can finely adjust the up and down positions. As shown in the third figure, the downstream side cameras 5b, 6b are mounted as 'the downstream side upper camera 5' when the width direction moving table 16 is moved to the position where the tool 3 is processed to the side edges 8, 9 of the guard i. Located above the side portion of the workpiece 1, the downstream side lower camera 6b is mounted on the outer side of the workpiece in the width direction and located above the side of the side edges 8, 9 of the workpiece. Coincidentally, 25 #26 denotes a mirror' which causes the downstream lower camera to smash: the shaft 19 is bent 90 degrees one after the other, so that the optical axis is directed toward the side of the workpiece 1 and the uranium 2: 〇 不 semi-transparent mirror It is disposed at a position at the height of the upper surface position of the lower-side lower camera which is over the upper surface of the table 2 to bend the optical axis 19 in the direction toward the side surface of the table 2 = the lower surface of the side portion of the workpiece 1 A side light that illuminates the side of the lower lamp stage 2 on which illumination is performed. The side of the workpiece = = 仃 illuminated lamp is built in the downstream side upper camera 5b, these mirrors 25, 26 and the half mirror 28 and the lamps 29, 3 whirl 12 201127556 are mounted in the width direction On the 16th. In the second figure, 31 and 32-π M 5h are not forked between the upper and lower air nozzles between the tool 3 and the downstream side camera 讣. The air nozzle 31; fixes the outer end in the width direction at $2 疋 on the moving table 16 in the width direction, and extends inwardly. The upper air nozzle 31 is located above the upper surface of the workpiece 1 fixed to the table 2, and the lower air nozzle Γ is below the lower surface of the workpiece 1 on the lower V. A slit-shaped nozzle hole that is long in the width direction is provided on the upper surface of the upper air nozzle + nozzle 32. When the side of the workpiece 1 is machined, the working gas is ejected from the nozzles 31, 32 in a film form, and the sputum is ejected to form the tool 3 and the downstream side cameras 5b, 6b and the mirror. The air curtain cut off between 25 and 26. The movement operation in the feed direction of the table pedestal by the servo motor controlled by the command value of the numerical control controller (not shown), the rotation operation of the round table & the movement operation in the width direction of the side table 2b, and the width direction The movement operation of the moving table 16 and the lifting operation of the lifting table 17 ◊ these command value months b can be corrected by using the correction value set in the correction value memory of the numerical control controller, and supplied to the servo motor for driving each operation. An image processing device is attached to the image, and images of predetermined timings of the cameras 5a, 5b, and 6b are read into the image processing device, and the positioning marks 4 and chamfer lines are recognized by image processing of the image processing device ( The intersection between the chamfered surface and the surface of the workpiece, the sides 8, 9 of the workpiece, etc., based on the sum & the difference between the command value and the measured value is calculated as the correction value of the measured value and the command value. And set in the memory of the numerical control controller. The following describes the processing and measurement operation of the workpiece of the first embodiment shown in the first to third figures. 13 201127556 (1) Taking the upper side of the upstream side The machine 5a reads the two positioning marks 4, 4 arranged in the width direction, and sets the angle of rotation of the table 2 about the vertical axis and the position of the width direction of the tool 3 in accordance with the read mark position. (2) Making the table 2, the feed movement is performed, and the chamfering processing of the first opposite sides 8, 8 is performed at the same time. After the processing portion of the workpiece reaches the position of the downstream side cameras 5b, 6b with the feed movement of the table 2, it is predetermined according to each The image of the downstream side cameras 5b and 6b at the predetermined position (if the substrate for the display is marked with a mark indicating the measurement position, the image is read at the position where the downstream camera detects the mark), and the measurement is performed. The processing size at this position. At this time, the edge of the workpiece can be detected by the upstream camera 5a, and the cutting accuracy of the first opposing sides 8, 8 can be measured. (3) After the end of the feed movement of (2) The table 2a is slightly raised and rotated by 90 degrees' so that the foot marks 4, 4 arranged in the feed direction in the state of (1) are arranged in the width direction on the front side in the moving direction at the time of return movement. (4) Using the downstream side upper portion Photo The machine 5b reads the two positioning marks 4, 4 arranged in the width direction, and sets the angle of rotation of the table 2 about the vertical axis and the position of the width direction of the tool 3 based on the read mark position data. (6) The chamfering of the second opposing sides 9, 9 and the measurement of the machining size are performed by the same operation as (2). Similarly to (2), the second opposite side 9, 9 can also be measured. (7) After the end of the feed movement of (6), remove the workpiece from the table 2 and perform a quick return movement to return to the acceptance position of the next workpiece 14 201127556 (8) CNC controller according to In the measured dimensions of (2) and (6), the correction value for the angle of the table 2 and the command value of the width direction position and the height direction position of the tool 3 at the time of processing the next workpiece is updated. In addition, the above-described operations φ, + , , are performed twice. If the rotation accuracy of the table 2 (including the case where the workpiece is not offset on the upper surface of the table during rotation) d is slightly read (4). In the case of the depression, the two positioning marks 4, 4 arranged in the feeding direction are read by the upstream upper camera 5a at the time of (7), and the data width direction position is based on the interval between the two. The fifth diagram of the eighth diagram is a schematic perspective view showing a second embodiment of the present invention (corresponding to the diagram of the first diagram). The m-th cat diagram (phase _; the configuration of the first yoke example has two points different from the first embodiment) - one is provided with the upstream side lower camera 6a at the lower position of the upstream upper photographic camera & On the upstream side of the tool 3, the lower surface of the side portion of the viewing member 1 is another tool that can be chamfered during the movement of the feed and the return movement. A plurality of circles on the same wheel axle by the women's wear. The chamfering machine formed by the plate grinding wheel is slanted into the 'associated with the workpiece, the opposite of the part in contact with the tool: the moving tool penetrates deeply into the workpiece. Therefore, the same can be performed when the feed f and the return movement are the same. For the machining, it is generally required to set two tools on the opposite sides of the table to face the opposite directions of the feed direction, or to operate in. The inclination of changing the tool during moving and returning movement, etc., in the first embodiment In the structure, the chamfering and the processing of the four dimensions of the workpiece 1 can be performed by the relative movement of the table 15 of the table 2 201127556 - that is, (1) the action of (1) of the first embodiment. Same. That is, use The side upper camera 5a reads the positioning marks 4, 4, sets the angle of the table 2, and the position in the width direction of the tool 3. (2) The same operation as (2) of the first embodiment. That is, the table 2 is advanced. The movement is performed while the chamfering processing of the first opposite sides 8, 8 is performed simultaneously, and the processing size is measured by the downstream side cameras 5b, 6b. It is also possible to measure the cutting accuracy using the upstream side camera 5a or 6a. (3) The operation of (3) of the embodiment is the same. That is, the workpiece is rotated by 90 degrees by the circular table 2a. (4) The same operation as (4) of the first embodiment, that is, the edge is read by the downstream side upper camera 5b. Two positioning marks 4, 4' arranged in the width direction and setting the angle of the table 2 and the width direction of the tool 3. (5) The table 2 is moved back while the second opposite sides 9, 9 are chamfered. After the processing portion of the workpiece reaches the upstream side cameras 5a, 6^ with the movement of the table 2, the image of the upstream side cameras 5a, 6a at each predetermined predetermined position is measured. The processing size of the position. At this time, it can be utilized Downstream side;. Camera portion 5b, 6b measurement precision cutting (6) (5) after the end of the return movement, from the table 2
工件，接受下一個工件。 # T ⑺數控控制器根據在（2)、（5)計測到的加工 尺寸，更新在加王下—個卫件時針對王料2㈣ 具3的寬度方向位置及高度方向位置的指令值的校：值 201127556 上述動作，與第一實施例相 但是’存在以下不利之處： 根據第一實施例的裝置的 比’能夠進一步縮短生産節拍。 上游側攝影機5a、6a和工具3由於寬度方向的移動機構 等的緣故而分離開’需要多準備兩個攝影機，而且工具3 必須使用能夠在正反兩個方向進行加工的工具。 如第六圖所示，在沿工件的輸送方向設χ 2台倒角裝 置’並在它們之間配置使工件旋轉9〇度的旋轉台2〇的結 構中’如果倒角裝置能夠使用本發明的倒角裝置，則能夠 貫見斤加工的全部工件的加工尺寸的計測，能夠實現生産The workpiece accepts the next workpiece. # T (7) According to the machining dimensions measured in (2) and (5), the numerical control controller updates the command value of the width direction position and the height direction position of the king material 2 (four) with the king under the king-guard. : Value 201127556 The above-described action, in contrast to the first embodiment, has the following disadvantages: The ratio of the device according to the first embodiment can further shorten the production tact. The upstream side cameras 5a, 6a and the tool 3 are separated by the movement mechanism in the width direction, etc. Two cameras are required to be prepared, and the tool 3 must use a tool that can be processed in both the forward and reverse directions. As shown in the sixth figure, in the structure in which the two chamfering devices are disposed along the conveying direction of the workpiece and the rotary table 2 that rotates the workpiece by 9 degrees is disposed between them, if the chamfering device can use the present invention The chamfering device can measure the processing size of all the workpieces processed by the jin, and can realize the production.
性極尚的加工動作。關於該情況時的倒角裝置，可以採用 在上游側，、叹置上部攝影機5a的第一實施例的構造，而 且設有不具有旋轉機構（在第六圖的示例中沒有圓臺2a ) 的工作臺的倒角裳置。 【圖式簡單說明】 第一圖是表示第一實施例的主要機器結構的概況的立 體圖。 第二圖是表示工具及攝影機的安裝構造的示意立體 圖。 * 第三圖是表示下游側攝影機與工件的位置關係的正視 圖0 第四圖是表示下游側攝影機與工件的另—種位置關係 的正視圖。 第五圖是表示第二實施例的主要機器結構的概況的立 體圖。 第六圖是表示第三實施例的主要機器結構的概況的立 17 201127556 體圖。 第七圖是表示定位標記與加工尺寸之間的關係的工件 的局部放大俯視圖。 第八圖是表示現有裝置的主要機器結構的概況的立體 圖。 【主要元件符號說明】 1硬質脆性板 2工作臺 2a圓臺 2b側臺Extremely precise processing action. In the case of the chamfering device in this case, the configuration of the first embodiment of the upper camera 5a may be employed on the upstream side, and the rotation mechanism (there is no round table 2a in the example of the sixth figure) may be provided. The chamfer of the workbench is set. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a perspective view showing an outline of the main machine configuration of the first embodiment. The second drawing is a schematic perspective view showing the mounting structure of the tool and the camera. * The third figure is a front view showing the positional relationship between the downstream camera and the workpiece. Fig. 4 is a front view showing another positional relationship between the downstream camera and the workpiece. The fifth diagram is a perspective view showing an outline of the main machine configuration of the second embodiment. Fig. 6 is a perspective view showing the outline of the main machine configuration of the third embodiment. The seventh figure is a partially enlarged plan view showing the workpiece between the positioning mark and the machined size. The eighth figure is a perspective view showing an outline of the main machine structure of the conventional apparatus. [Main component symbol description] 1 hard brittle board 2 workbench 2a round table 2b side table
3倒角工具 4標記 5a上游側上部攝影機 5b上游側下部攝影機 6a上游側下部攝影機 6b下游側下部攝影機 7倒角線 8第一相對邊3 chamfering tool 4 mark 5a upstream side upper camera 5b upstream side lower camera 6a upstream side lower camera 6b downstream side lower camera 7 chamfering line 8 first opposite side
9第二相對邊 16寬度方向移動台 1 8工具驅動電機 25、26反射鏡 29下部燈 31上部空氣喷嘴 1 1工作臺座 17升降臺 1 9光軸 28半透半反鏡 30側燈 32下部空氣喷嘴 189 second opposite side 16 width direction moving table 1 8 tool drive motor 25, 26 mirror 29 lower lamp 31 upper air nozzle 1 1 working table seat 17 lifting table 1 9 optical axis 28 semi-transparent mirror 30 side light 32 lower part Air nozzle 18