KR101743290B1 - Apparatus for chamfering of hard brittle plate - Google Patents

Abstract

[PROBLEMS] A chamfering apparatus for processing sides of a glass substrate for a display panel and other hard brittle plates, which can measure the processing dimensions of all the processed workpieces without increasing the tact time completely or largely, Therefore, it is possible to provide a chamfering device capable of realizing higher machining accuracy without lowering productivity.
[MEANS FOR SOLVING PROBLEMS] An upper-side upper camera for viewing the upper side of both side portions of a work is disposed on both sides in the width direction on the upstream side in the conveying direction with respect to the tool of the table, And a downstream-side lower camera for viewing the lower surface of the side of the work on the downstream side. Chamfering is performed while the table is moved and moved, and chamfering dimensions are measured by the downstream camera immediately after the processing is performed.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a device for chamfering a hard brittle plate,

The present invention relates to a chamfering apparatus for processing a side of a rectangular glass substrate or other hard brittle plate used for a display panel or the like. The present invention relates to such a device capable of measuring the working dimension in order to accurately set the angle of the table on which the hard brittle plate is placed and the position of the processing tool.

The chamfering device of a glass substrate (hereinafter referred to as a "substrate" or a "work") is a chamfering device in which a sharp ridgeline or angle formed on a side of a substrate cut by cutting or the like is chamfered or rounded Rim processing equipment. A general type of chamfering apparatus of this kind includes a table 2 for attracting the substrate 1 with a negative pressure and a tool 3 arranged on both sides of the table as shown in Fig. The table 2 is capable of turning 90 degrees about the vertical axis by a swiveling device not shown. The table 2 and the tool 3 are movable relative to each other in the transport direction (Y direction in the figure). The substrate 1 is fixed to the table so that the side 8 to be processed is parallel to this transfer direction.

A substrate used as a display panel is thinned by being thinned to be lightweight, and high precision is required around a processing accuracy of about 30 mu m (micron). In order to realize this accuracy, three positioning marks 4 are attached to the substrate 1 or a sheet attached thereto. The three positioning marks 4 are attached at positions where two orthogonal sides are vertices of a right triangle which is the direction of the side of the substrate 1. [ Then, two cameras 5, 5 arranged in the width direction of the table (orthogonal to the conveying direction, the X direction in the drawing) read two of the three positioning marks 4 arranged in the width direction The angle of the table 2 and the position of the tool 3 are set.

After this setting, one side opposite side 8,8 of the substrate 1 is processed with the tool 3,3 while moving the table 2 or the tool 3,3 in the transport direction. When the machining is finished, the table 2 is turned 90 degrees, the two positioning marks 4, 4 newly arranged in the width direction are read out, and the position in the width direction of the tool 3, 3 is set as a new position do. Then, the second opposing sides 9, 9 are machined while moving the table 2 or the tools 3, 3 in the conveying direction.

As described above, accurate positioning is performed by setting the angle around the vertical axis of the table 2 and the position of the tool with reference to the position of the positioning mark 4 attached to the substrate 1. However, for example, when there is an error in the positional relationship between the two cameras 5, 5, the tool 3 is worn, or there is an error in the height of the tool 3, an error in the machining dimension occurs.

Therefore, conventionally, the test substrate is taken out of the chamfer and put on the measuring machine. When the operator puts the distance from the positioning mark (4) to the chamfer line (7) the NC device (not shown) controls the angle of the table 2 and the width direction and the height position of the tool 3 based on the measurement values of the angles a and b, the chamfer widths c and d, So that accurate machining can be performed. Further, in order to correct a decrease in machining accuracy due to a change over time such as a tool wear or the like, a properly machined substrate is taken out, the machining dimensions are measured in the same manner as described above, there was.

However, in the method in which the measurement of the machining dimension is performed by a person, measurement failure due to carelessness or misidentification, failure to calculate correction value, or failure to input occurs. Therefore, the applicant of the present application has proposed a technique of automatically measuring the machining dimension of the plate material to be subjected to the test machining or drawing inspection on the chamfering device and correcting the position of the table or the tool of the chamfering device based on the measured value .

That is, two upper cameras 5, 5 and lower cameras 6, 6 (imaginary lines in Fig. 8) arranged below the upper cameras 5, 5 are provided on the upstream side (the side on which the workpiece is carried) of the tool 3 of the chamfering device, . Then, the substrate to be tested and the substrate to be subjected to the drawing inspection are read by the two upper cameras 5 in the widthwise direction and attached to the work 1, The table 2 is moved relative to the first opposing sides 8 and 8 in the transport direction (+ Y direction) (hereinafter simply referred to as 'transport movement') after the angle of the tool 3 and the position of the tool 3 are set. ) Is chamfered. When the processing is finished, the table 2 is moved in the direction of the return (-Y direction) (hereinafter simply referred to as "return movement") while two And the inclination of the workpiece is detected by reading out the positioning mark 4. Then, the table is moved again, and upper and lower machining dimensions are measured by the upper and lower cameras 5, 6.

Next, the table 2 is turned 90 degrees and the chamfering of the second opposite sides 9, 9 is performed while the table 2 is returned and moved. Then, the table 2 is moved again to detect the tilt of the work 1. [ Then, the processing dimension of the second opposite side 9 is measured while moving back to the table 2 again.

In the method proposed in Patent Document 1, the table 2 must be subjected to three round trips (six passes) in order to chamfer four sides of the substrate and measure the processing dimensions. On the other hand, when the workpiece is not measured, the work 2 is machined by moving the table 2 while moving the first opposing sides 8 and 8, turning the table 2 by 90 degrees, The second opposing sides 9 and 9 are machined.

On the other hand, Patent Document 2 proposes a chamfer device in which a top camera for viewing an upper surface of a substrate and a side camera for viewing a side are arranged on the left and right in the table width direction on the upstream side of the table in the conveying direction. In this apparatus, the positioning mark attached to the work is read by the upper camera to set the table angle and the position of the tool, the first opposite side edge is processed by the table movement, and the measurement of the working dimension of the first opposing side The table is turned 90 degrees at the position where it returns, and the chamfering of the second opposing side is performed again by the conveying movement, and the machining dimension of the second opposing side is measured by the returning movement. In the method proposed in Patent Document 2, the chamfering of four sides and the measurement of the machining dimension are performed, and the table is reciprocated (passed four times).

In Patent Document 3, a second camera attached to a second light source corresponding to the lower camera of Patent Document 1 is juxtaposed to the outside of the first camera corresponding to the upper camera, and the irradiation of the second light source is performed by the right and left mirrors And a structure for reflecting the light onto the lower surface of the plate glass is shown.

[Patent Document 1] JP-A-2007-223005 [Patent Document 2] JP-A-2007-38327 [Patent Document 3] Japanese Laid-Open Patent Publication No. 2004-99424

In the invention described in Patent Document 1, the work to measure the machining dimension is machined and measured in three reciprocations, and the work not measured is machined only in one reciprocation. On the other hand, according to the invention described in Patent Document 2, workpiece machining and measurement are performed in two reciprocations. In the invention of Patent Document 1, since the tilt detection of the workpiece is used as an independent measurement item, it is necessary to make three reciprocations for processing and measurement. However, if the tilt detection of the workpiece is not performed as in Patent Document 2, Processing and measurement can be performed.

In the methods described in Patent Documents 1 and 2, both machining and measurement are carried out by relative movement of independent tables. Therefore, at least four relative movements (four passes) are required to process and measure the four sides.

Depending on the structure of the tool, the table conveying direction at the time of processing may be limited to one direction. In this case, a structure in which two chamfering devices are arranged in the conveying direction of the workpiece, and a turning table for turning the workpiece 90 degrees in the middle is provided, is advantageous in speeding up the processing tact time. However, in this case, in the chamfering apparatus of the conventional structure, it is not possible to measure the working dimension on the chamfering apparatus.

On the other hand, in the chamfering apparatus provided with the mechanism for turning the work 90 degrees, as described in Patent Documents 1 and 2, by performing the turning operation of the work during the reciprocating relative movement of the table, Processing can be performed. When the machining of the workpiece is performed only in the relative movement in one direction, it is necessary to return the table in order to perform the next machining operation. Therefore, when the machining dimension is measured at the time of the return movement, It is also conceivable that the increase of the tact time by measurement does not occur.

However, in practice, when the return movement is performed at a high speed, when the grinding wheel capable of high speed machining can not be measured because the image of the camera flows and the machining dimension can not be measured, the flow of the return speed at the time of measurement is slower than the feed speed at the machining Sometimes you have to. That is, when the measurement is not performed, a high-speed return movement is possible, but when the measurement is made, the return speed is increased, and therefore the tact time is increased.

For this reason, the workpiece dimensions are measured one time for each of a plurality of predetermined workpiece machining operations, and necessary correction values are set. In this case, it is necessary to set the correction value with margin so that the machining error does not exceed the allowable value and the defective product does not occur during the machining of the plurality of workpieces until the next measurement is performed. That is, it is necessary to set the correction value with a higher accuracy than the allowable machining error. If the clearance can be large, the number of workpieces to be machined between the measurement operations can be increased correspondingly, and the productivity can be increased.

However, if the required machining precision becomes strict, it becomes difficult to obtain this margin. Finally, the machining dimensions of all machined workpieces are measured and the correction value must be changed whenever necessary. Thus, , A decrease in productivity is inevitable.

The present invention has been made to solve the above problems. That is, it is possible to provide a chamfering device capable of measuring the machining dimensions of all machined workpieces, without increasing the tact time at all or substantially, and thus achieving higher machining accuracy without lowering the productivity It is a task.

In the present invention, on both sides in the width direction on the upstream side of the table 2 in the conveying direction with respect to the tool 3, that is, on both sides in the width direction of the side on which the work 1 is first conveyed to the apparatus, A downstream side upper camera 5b in which the upstream side upper camera 5a is disposed and the upper side of both side portions of the work 1 is seen on the downstream side of the table 3 in the table conveying direction of the tool 3, And a downstream-side lower camera (6b) for viewing the side surface of the side portion is provided.

The distance between the tool 3 and the downstream cameras 5b and 6b is constant and the interval is narrower than the distance between the tool 3 and the upstream side upper camera 5a in the transport direction, It is less than half. Further, the cameras 5a, 5b, 6b and the tool 3 can be configured to move simultaneously in the width direction. The cameras 5a, 5b and 6b are mounted on the width direction moving table 16 which moves the tool 3 in the width direction in accordance with the dimension of the work 1, A structure in which the tool 3 is mounted so as to be freely movable up and down can be adopted.

Since the chamfering of the substrate is performed on both the front and rear surfaces, four cameras are required to measure the upper and lower working dimensions of both sides. In the chamfering apparatus of the present invention, the number of cameras installed is increased by two from the minimum required number. If it is desired to perform the chamfering of the work in both directions of the table movement (relative movement in the normal feed direction) and return movement (relative movement in the auxiliary feed direction), the lower camera 6a ) Must also be provided on the upstream side in the conveying direction of the work. Therefore, in this case, four cameras are added as compared with the conventional structure.

The upstream cameras 5a and 6a and the tool 3 are installed in the same positional relationship as the conventional apparatus. It is preferable that the downstream cameras 5b and 6b are disposed as close to each other as possible in the transport direction with respect to the tool 3. However, when machining the work 1, the cutting water (pure water) is supplied to the tool 3, so that the droplets of the cutting water are directed to the downstream cameras 5b and 6b It is necessary to keep it in the part. Therefore, it is usually necessary to provide an air curtain between the tool 3 and the downstream-side cameras 5b, 6b to cut off water and remove water droplets adhered to the work.

In the chamfering apparatus of the present invention, the positioning mark provided on the work is read by the upstream-side upper camera 5a, and the angle of the table (when the angle is set by the widthwise movement of the tool associated with the amount of movement of the table, And the position of the tool. Then, the chamfering is performed while the table is moved and transferred, and the chamfering dimensions are measured by the downstream cameras 5b and 6b immediately after the processing is performed. Therefore, the machining of the workpiece and the measurement of the machining dimension can be performed by one relative movement (pass or passage) of the workpiece.

The lower camera 6 (6a, 6b) is a camera for viewing the side surface of the side portion of the work, and is not necessarily disposed below the work. The lower camera 6b and the lower camera 6b are positioned outside the side of the work 1 in the widthwise direction of the work 1 as shown in Fig. And the optical axis 19 of the lower camera 6b is placed on the work 2 by two mirrors 25 and 26 inclined by 45 degrees arranged below the work placing surface of the table 2 1) facing the lower surface of the side portion of the side wall portion. 4, when the optical axis of the lower camera 6b is obliquely set to face inward in the width direction, when the optical axis 19 of the lower camera 6b is positioned on the side of the work 1 with one mirror 25 Lt; / RTI >

In such an attachment structure, the optical axis of the lower camera 6b passes through the upper surface height T of the table 2, and its optical axis is horizontally reflected in the width direction of the table 2 It is also possible to measure the height of the table top surface (work placement surface) at the time of replacing the table 2 when the workpiece dimensions are changed with the half mirror 28 placed thereon. In this case, whether the lower camera 6b views the lower side surface of the work 2 or the side surface of the table 2 is determined by turning on / off the illumination lamps 29 and 30 installed in the respective reading directions . That is, when the lamp 29 illuminating the side surface of the work is turned on, the lower camera 6b reads the lower surface. When the lamp 30 illuminating the table side is turned on, the lower camera 6b, The height of the upper surface of the table 2 is measured.

In the chamfering apparatus of the present invention, chamfering and measurement of the machining dimension are performed by one pass (one pass) of the table 2 with respect to the tool 3. Therefore, it is not necessary to perform the relative movement of the table 2 for measurement of the machining dimension, and even if the machining dimension is measured for all the work to be machined, the tact time does not increase at all (In the case where the measurement speed is slower than the machining speed, in this case, it is necessary to add the machining speed to the measurement speed), so that the productivity can be reduced at all It is possible to measure the machining dimension of the workpiece, to set the required machining value for each machining operation of a single workpiece, and to effect chamfering with high accuracy with high productivity.

1 is a perspective view showing an outline of a configuration of a main device of a first embodiment;
2 is a schematic perspective view showing a mounting structure of a tool and a camera;
3 is a front view showing the positional relationship between the camera on the downstream side and the work.
4 is a front view showing another positional relationship between the camera on the downstream side and the work.
FIG. 5 is a perspective view showing an outline of the main device configuration of the second embodiment; FIG.
FIG. 6 is a perspective view showing an outline of the main device configuration of the third embodiment; FIG.
7 is a partially enlarged plan view of a work showing a relationship between a positioning mark and a machining dimension;
Fig. 8 is a perspective view showing an outline of main components of a conventional apparatus.

Hereinafter, some preferred embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a perspective view showing an outline of a main device configuration. Fig. 2 is a schematic view showing a mounting structure of a tool and a camera. Fig. Fig. 3 is a front view showing the positional relationship between the camera on the downstream side and the work. Fig.

In the figure, reference numeral 11 denotes a table base which moves along a rail in the y direction (not shown), 2a denotes a circular table mounted on a table base 11 (not shown) about a vertical axis, Is a side table that is elongated in the conveying direction and is mounted on both sides of the table 2a in the width direction (X direction in the drawing) so as to be freely and closely spaced in the width direction with respect to the table base 11. The side tables 2b on both sides move in the width direction in accordance with the distance between the side edges 8 and 9 of the work 1 so that the turning and the angle of the work 1 can be set Is raised by a little higher than the side table 2b and then the original table 2a is pivoted and turned and then lowered to support the work 1 with the side table 2b. The table 2 having the original table 2a and the side tables 2b on both sides thereof is disclosed in detail in Japanese Patent Laid-Open Publication No. 2005-329471 by the present applicant.

In Fig. 2, reference numeral 16 denotes a width direction moving band. The width direction moving table 16 is mounted on a column (not shown) provided on both sides in the width direction of the table 2 so that the columns on both sides are individually movable in the width direction. Reference numeral 17 denotes a platform installed so as to be freely elevated and lowered in the width direction movement table 16. The tool 3 is mounted on a platform 17. The tool 3 in the drawing is a grinding wheel unit comprising a plurality of disk grindstones. Reference numeral 18 denotes a tool drive motor. The tool drive motor 18 is fixed to the platform 17. 5a is an upstream side upper camera, 5b is a downstream side upper camera, and 6b is a downstream side lower camera. The cameras 5a, 5b, and 6b are provided so as to be capable of finely adjusting the vertical position on the width direction moving table 16. [

The downstream cameras 5b and 6b are arranged such that when the tool 3 moves the width direction moving table 16 to a position where the side surfaces 8 and 9 of the work 1 are processed, And the downstream side lower camera 6b is installed outside the side in the width direction and above the position outside the side sides 8 and 9 of the work so that the downstream side upper camera 5b is positioned above the side side portion thereof .

Reference numerals 25 and 26 denote mirrors that bend the optical axis 19 of the downstream-side lower camera 6b by 90 degrees and direct the optical axis toward the lower side of the work 1, 28 denotes an optical axis 19 of the downstream- And the optical axis 19 is bent in the direction toward the side surface of the table 2. The optical axis 19 is a half mirror provided at a height position passing through the top surface position of the table 2, Reference numeral 29 denotes a lower lamp for illuminating a side surface of the work 1; and 30, a side lamp for illuminating the side surface of the table 2. The lamp that illuminates the upper surface of the side portion of the work 1 is built in the downstream side upper camera 5b. The mirrors 25 and 26, the half mirror 28, and the lamps 29 and 30 are attached to the width direction moving table 16.

2, 31 and 32 are upper and lower air nozzles provided between the tool 3 and the downstream cameras 5b and 6b. The outer ends of the air nozzles 31 and 32 are fixed to the width direction moving table 16 and extend inward in the width direction. The upper nozzle 31 is located above the upper surface of the work 1 fixed to the table 2 and the lower nozzle 32 is located below the lower surface of the work 1 fixed to the table 2. On the lower surface of the upper nozzle 31 and the upper surface of the lower nozzle 32, nozzle holes having a slit shape in the width direction are provided. Air is blown out from the nozzles 31 and 32 in the form of a film and the tool 3 and the downstream cameras 5b and 6b and the mirrors 25 and 26 The air curtain is interrupted.

The operation of moving the table base 11 in the conveying direction, the turning operation of the original table 2a, the moving operation of the side table 2b in the width direction, the moving operation of the width direction moving table 16, The operation is driven by a servomotor controlled by a command value of an NC controller (not shown). These command values are corrected by the correction value set in the correction value memory of the NC controller, and are given to the servo motor that drives each operation.

An image processing apparatus is added to the NC controller. An image at a predetermined timing of the cameras 5a, 5b, 6b is read into the image processing apparatus, and the positioning marks 4, The chamfer line (the intersection of the chamfer surface and the work surface) and the sides 8 and 9 of the work are recognized, and the difference between the command value and the measured value is calculated from the coordinates, And is set in the memory of the NC controller.

Next, the processing and measurement operation of the workpiece in the first embodiment shown in Figs. 1 to 3 will be described.

(1) The two positioning marks 4, 4 arranged in the width direction are read by the upstream side upper camera 5a, and the angle around the vertical axis of the table 2 and the position of the tool 3 are determined based on the read mark position. As shown in Fig.

(2) The chamfering of the first opposing sides 8 and 8 is performed while the table 2 is moved and moved. The processed portion of the work comes to the position of the downstream cameras 5b and 6b in association with the transfer of the table 2 so that the images of the downstream cameras 5b and 6b The downstream side camera recognizes the image at a position where the downstream side camera detects the mark), and measures the processing dimension at the above position. At this time, the edge of the workpiece can be detected by the upstream-side camera 5a, and the cutting accuracy of the first opposing sides 8 and 8 can be measured.

The original table 2a slightly rises and the positioning marks 4 and 4 arranged in the conveying direction in the state of (1) move in the direction of the return movement Turn 90 degrees to align them in the width direction from the front direction.

(4) Two positioning marks (4, 4) arranged in the width direction are read by the downstream side upper camera (5b), and the angle around the vertical axis of the table (2) In the width direction.

(5) Fast return movement.

(6) Chamfering of the second opposite sides 9 and 9 and measurement of the machining dimensions are performed by the same operation as in (2). The cutting accuracy of the second opposing sides 9 and 9 can be measured as in the case of (2).

(7) When the feed movement of (6) ends, the work is unloaded from the table (2) and returned to the high-speed returning position to return to the next work receiving position.

(8) Based on the machining dimensions measured in (2) and (6), the NC controller calculates the angle of the table 2 at the time of machining the next work, The correction value for the command value is updated.

In the above operation, the positioning marks are read twice in (1) and (4), but the turning accuracy of the table 2 (including the case where the work does not deviate from the top surface of the table at the time of turning) It is possible to omit the reading of the positioning mark of (4). In this case, two positioning marks 4, 4 arranged in the transport direction are read by the upstream-side upper camera 5a at the time of the feed movement of (2), and based on the quantum interval data, .

Fig. 5 is a schematic perspective view (corresponding to Fig. 1) showing the second embodiment of the present invention. The difference between the second embodiment and the first embodiment is that an upstream side lower camera 6a which is located on the downstream side of the upstream side upper camera 5a and which sees the side surface of the side of the work 1 on the upstream side of the tool 3, And that the tool 3 is structured so as to be capable of chamfering even when the tool 3 is returned or moved at the time of moving or moving.

The chamfering tool 3 composed of a plurality of disc grinders provided on the same grindstone shaft is provided so that the tool is deeply cut in the workpiece 1 in association with the relative movement of the workpiece 1 in the portion in contact with the tool . Therefore, in order to enable the same machining at the time of the transferring movement and the returning movement, it is necessary to install two tools opposite to each other in the direction of the transferring direction on both sides of the table 2, or to change the tilting of the tool In general, is necessary.

In the structure of the second embodiment, chamfering of four sides of the work 1 and measurement of the machining dimension can be performed by one reciprocating relative movement of the table 2. In other words,

(1) The operation is the same as the operation (1) of the first embodiment. That is, the positioning marks 4 and 4 are read by the upstream side upper camera 5a to set the angle of the table 2 and the position of the tool 3 in the width direction.

(2) The same as the operation (2) of the first embodiment. That is, the chamfering of the first opposing sides 8 and 8 and the machining dimensions of the downstream cameras 5b and 6b are measured while the table 2 is being moved.

And the separation accuracy can be measured by the upstream camera 5a or 6a.

(3) The operation is the same as the operation (3) of the first embodiment. That is, the workpiece is turned 90 degrees by the original table 2a.

(4) The same as the operation (4) of the first embodiment. Namely, the two positioning marks 4, 4 arranged in the width direction are read by the downstream side upper camera 5b, and the angle of the table 2 and the position in the width direction of the tool 3 are set.

(5) Chamfering of the second opposing sides (9, 9) is performed while returning to the table (2). The processed portions of the work are located at the positions of the upstream cameras 5a and 6a along with the movement of the table 2 and the positions of the upstream cameras 5a and 6a at the predetermined positions are shifted from the image of the upstream cameras 5a and 6a to the positions Is measured. At this time, the separation accuracy can be measured by the downstream side upper or lower cameras 5b and 6b.

(6) When the return movement of (5) ends, the work is unloaded from the table 2 and the next work is received.

(7) The NC control call is based on the angle of the table 2 when the next work is machined, the position in the width direction of the tool 3 and the position in the height direction The correction value for the command value of the command is updated.

According to the above-described operation of the apparatus of the second embodiment, the tact time can be further shortened as compared with the first embodiment. However, the upstream cameras 5a and 6a and the tool 3 are separated from each other for a moving mechanism in the width direction or the like, a camera requires two spare parts, a tool (3) There is a disadvantage that it should be used.

6, in the configuration in which two chamfering apparatuses are provided in the workpiece conveying direction and the swivel pedestal 20, which rotates the workpiece 90 degrees therebetween, is provided as the chamfering apparatus, It is possible to realize a machining operation with extremely high productivity, in which the machining dimensions of all machined workpieces can be measured. As the chamfering device in this case, the structure of the first embodiment in which only the upper camera 5 is provided on the upstream side and the table (not including the original table 2a in the example of Fig. 6) .

1: Hard brittle plate
2: Table
3: Chamfer tool
4: Mark
5a: upstream side upper camera
5b: upstream-side lower camera
6b: a downstream-side lower camera
25, 26: Mirror
28: Half mirror

Claims (4)

A table 2 for fixing and holding the hard brittle plate 1 on an upper surface thereof, a chamfering tool 3 disposed on both sides in the width direction of the table, and a table 2 for holding the table in a direction orthogonal to the width direction And an upstream side upper camera (5a) for reading a positioning mark (4) attached to a lateral side portion of the hard brittle plate, wherein the mark reading data And the chamfering of the sides of the hard brittle plate is performed by relatively moving the table in the conveying direction, the chamfering device comprising:
And a lower side reading section for reading the upper and lower surfaces of the lateral side portions of the hard brittle plate after being machined by the tool on the opposite side of the upstream side camera in the carrying direction with the tool of the width direction moving band for moving the tool in the width direction interposed therebetween Side camera 5b and a downstream-side lower camera 6b, and when the table is moved relative to the table when the chamfering is performed by the imaging signals of the downstream-side cameras 5b and 6b, Is measured at a position at which the distance from the center of the hard brittle plate is constant. An apparatus according to claim 1, wherein an air curtain is formed between the tool (3) and the downstream-side upper camera (5b) and the downstream-side lower camera (6b) Chamfering device of hard brittle plate. The camera according to claim 1 or 2, wherein the downstream-side lower camera (6b) is disposed downward on the outside in the width direction of the downstream-side upper camera (5b) above the upper surface of the table, And a mirror (25, 26) facing the side surface of the side of the plate. The chamfer according to claim 3, further comprising a half mirror (28) that horizontally reflects the optical axis toward the table side at a position where the optical axis passes the height of the upper surface of the table.

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