TW201121698A - Multifunctional in-machine measurement device for machine tool. - Google Patents

Multifunctional in-machine measurement device for machine tool. Download PDF

Info

Publication number
TW201121698A
TW201121698A TW099138036A TW99138036A TW201121698A TW 201121698 A TW201121698 A TW 201121698A TW 099138036 A TW099138036 A TW 099138036A TW 99138036 A TW99138036 A TW 99138036A TW 201121698 A TW201121698 A TW 201121698A
Authority
TW
Taiwan
Prior art keywords
machine
unit
axis
slider
workpiece
Prior art date
Application number
TW099138036A
Other languages
Chinese (zh)
Inventor
Masaki Tanoue
Original Assignee
Seibu Electric & Amp Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seibu Electric & Amp Machinery Co Ltd filed Critical Seibu Electric & Amp Machinery Co Ltd
Publication of TW201121698A publication Critical patent/TW201121698A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012Contact-making feeler heads therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004Supports
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention provides a multifunctional in-machine measurement device that uses a single measurement unit to perform various measurements on a finished workpiece with a horizontal-axis unit equipped with an auxiliary-axis grinding wheel, a Y-axis unit equipped with a tool clamping portion switchable between a vertical-axis state or a slant-axis state, and an in-machine measurement unit that are arranged on an X-axis slide block in a machine tool, such as an NC machine tool that performs various machining operation on a workpiece without re-checking the workpiece. Applicable on processed workpieces, the single in-machine measurement unit has dual functions of contact sensors for measurement of workpiece shape and dimensions, including inside diameter, profile, step height difference and movement sensors for tracking the shapes of surfaces, such as spherical/non-spherical end faces.

Description

201121698 六、發明說明: 【發明所屬之技術領域】 ^發明係關於-種加工機中之多功 加工機在可相對於央持工作件的主轴移動的χ f 徑 '内徑、段差等形狀尺寸外,工作件外 ;狀、非球面形狀整表面形狀,二 【先前技術】 在習知旋盤、研削盤、NC工作機 作件加工成預定圖面形狀時,-般中,要將工 ㈣件加工未達目的形:進r 件之接觸感測器型和移位計型,,分成對工作 過工作件之直徑、長度、段差等要測量所加工 =工過的工作件端面等表面,以破 ^位叶型是追 狀等,面形狀,或其形狀誤差。;〉狀、非球面形 之自由曲面形:面二特 揭示。 特開2〇〇Μ3779號公報所 心軸的正交三軸移工作件心輛和工且 工機之三軸控制ϋ位測疋态,進行正交三鈾; 使工作件測定點,和===,測定:工 線向量,所形成之角。度°_之定向置,與在狀點的自由曲面2 ’在加工金屬模型等球面、非披而A 置卜把工作件下、:由曲面之加工 之滑况下,利用接觸式挪量工 201121698 之自由曲面加工裝置 ’有例如特開2005-103667 隔開口ί褒置係在加工時把接觸式測量器和工具 和X軸方向=線和轉動軸線交叉,按Ζ轴 形狀,做為一定’ ϊ定工作件加工面之 =。定=含轉動轴在内測二= =保==狀,狀,做為^ 裝置H ί 之機内測量器校正 等,以校正測在主袖的原狀,測量其外徑 正用裝載機指令機構,:㉝旋,校 載機把常置部的模範工作件間城以南架裝 加以^ 裝_1作件,把機内測量器的測量補正值 進行工作機械,不需對, 報)。_工作機械包括主轴號公 裝夾頭以把持工作件;和x轴轉^己置^主轴口,並安 向正交之X軸方向移動,而卜° ^軸移動的z軸方 位,即置設於X軸滑塊上。工且I /:早位之γ轴早 單位的夹持具底座設定成與=具轴m直轴狀態時,Υ轴 時,央持具底座設定成與x轴方^ ;平仃’而呈斜轴狀態 機械設有調節板’安襄在旋轉板,係可旋二自 201121698 之基板,旋轉上自90 再者H 立i ’在基板上導引旋轉板的旋轉。 爾^程度’即可把卫具單位設定固定在¥轴單位。 NC&而舰本If人之上述特開2_2533G6號公報揭示之 ,曰機械’對於進行各種研削、切削加工之 ,内測量健咐卫作件外形等各種 :形,差等表面形狀之測定,並未有所涉里= 内^裝置_題是’由於制器麵 單位無法對工作件之各種外形或表== :疋。又’如果將其他測量單位安裝於NC工作檣 gl扭2工機,會使機内加工所用有效空間變狹窄,習知機内 實丄測量單位的設置場所即受到报大限制,現 K精工作機械等加工機 南精密度工作件加工,為其問題所在。 本發明之目的,在於解決上述問題,提供一 例如在本中請人開發的特開2007· ^進行各種加工二作件工&機特g於 _滑塊單】之治具’把滑件固定在空氣 工作件接:時藉内藏的接觸感測器以非加工的 寺之座才示為基準進行測量,而使用移位感測器追 201121698 球面形狀,或其他種種表面形狀, 施工測量單位即可在機_定,高精密度實 間,提高工作件加^巧’驗工作件之測定時 特徵為,包括主軸,俜轉動自如:;:二: 地立接工作件Υ 自如&在主轴台’且可轉動自如 乍件,和X軸滑塊,可按該主軸軸心〖 轴方向移動;以及機内測量單位,配置在該χ轴滑 i發Γί,—種加工機内之多功能機内測定裝置,其 ζ軸方向垂 直之X 塊; 3機2測量單位包括單位底座,固定於該 X軸滑塊 由安裝於該單位底座之滑件底座,和相對 固定並放_滑件和該;及定機構,可 動該滑, =r 一‘ R絕對值之該形狀尺寸,而藉該移測或角隅 T工作,球面形狀狀誤 該表“狀。球面等所構成連續形狀’附帶之端面等 ,件測定對象機3以:外Ϊ該=感測器測量之該 工作件 形狀誤 201121698 οσ ,,此多功能機内測定裝置中,該滑件與該移位感測 盗’係利用固定於該滑件之連結桿,以及連結該連結桿和該 移位感測器之接頭,加以連結。 迓杆牙 另外,此多功能機内測定裝置係在該空氣靜壓滑塊單位 的該滑件底座與該單位底座之連結中途,設有傾斜調整用單 ,丄可調整姑氣祕滑塊單位相麟該單位底座之傾斜; 度調觀單位’糊整該空氣靜歸塊單位相對於該單 位底座之高度。 队^叨恥機内测定裝置中,固定於該滑件的該 干’與該移位感測器延伸,貫穿該傾斜調整用單位和該201121698 VI. Description of the invention: [Technical field to which the invention pertains] The invention relates to a shape of a 多f diameter 'inner diameter, a step difference, etc. of a multi-function processing machine in a processing machine that can move relative to a main axis of a central workpiece In addition, outside the work piece; shape, aspherical shape, full surface shape, two [Prior Art] When the conventional rotary disc, grinding disc, NC working machine is processed into a predetermined drawing shape, in general, the work (four) pieces The processing is not up to the target shape: the contact sensor type and the shift meter type of the r-piece are divided into the surface, the length, the step difference, etc. of the work piece to be measured, etc. The broken leaf shape is chasing shape, surface shape, or shape error. ;>-shaped, aspherical free-form surface shape: surface two special reveal. The three-axis shifting work piece of the mandrel of the mandrel of the special opening 2〇〇Μ3779 and the three-axis control of the work machine are used to measure the 疋 state, and the orthogonal uranium is made; ==, measurement: the line vector, the angle formed. The orientation of the degree °_, and the free-form surface 2' at the point, in the processing of the spherical surface such as the metal model, the non-blind A, the work piece, the smooth processing of the surface, the contact type The free-form surface machining device of 201121698 has, for example, a special opening 2005-103667. The opening of the contact measuring device and the tool and the X-axis direction = line and the axis of rotation intersect, according to the shape of the x-axis, as a certain ' Determine the working surface of the workpiece =.定=With the rotation axis in the test 2 = = Guarantee == shape, as ^ Device H ί In-machine gauge correction, etc., to correct the original shape of the main sleeve, measure the outer diameter of the loader command mechanism ,: 33 rotation, the school-mounted machine will be installed in the south of the model work piece of the normal part of the city to install the _1, and the measuring value of the measuring instrument in the machine will be used to work the machine, no need to report. _Working machine includes the spindle number of the chuck to hold the workpiece; and the x-axis is rotated to the spindle, and is moved to the orthogonal X-axis direction, and the z-axis of the axis is moved. Set on the X-axis slider. Work and I /: The y-axis early unit of the early position of the clamping unit is set to be the same as the = axis with the axis m, when the Υ axis, the central holding device base is set to the x-axis square; The inclined axis state machine is provided with an adjustment plate 'amplified on the rotating plate, which can be rotated from the substrate of 201121698, and rotated from 90 to H, and then the rotation of the rotating plate is guided on the substrate. The degree ^ can be fixed to the ¥ axis unit. NC & and the ship of the Japanese version of the above-mentioned special opening 2_2533G6 bulletin, the 曰 machinery 'for a variety of grinding, cutting, internal measurement of the shape of the health care and other shapes: shape, poor surface shape measurement, and Not involved in the inner = inside ^ device _ title is 'because the manufacturer of the unit can not be on the various shapes or tables of the work piece == :疋. In addition, if other measuring units are installed in the NC work 樯 gl twist 2 machine, the effective space used for machining in the machine will be narrowed, and the setting place of the actual measuring unit in the machine is limited by the report, and now K fine working machine, etc. Machining machine South precision work piece processing, for its problems. The object of the present invention is to solve the above problems, and to provide, for example, a special open tool developed by the applicant in the present invention, which performs various processing, two workpieces, and a special tool for the slider. Fixed to the air work piece: when using the built-in contact sensor to measure with the non-machined temple seat as the reference, and use the displacement sensor to chase the 201121698 spherical shape, or other various surface shapes, construction measurement The unit can be set in the machine, high precision, and improve the work piece. The characteristics of the work piece are measured, including the spindle, and the rotation is free:;: 2: Ground connection work piece Υ Free & In the spindle table 'and can rotate freely, and the X-axis slider can be moved according to the axis of the spindle 〖 axis direction; and the measurement unit in the machine, configured in the shaft to slide the hair, the multi-function in the processing machine The internal measuring device has an X block perpendicular to the ζ axis direction; the 3 machine 2 measuring unit includes a unit base fixed to the X-axis slider by a slider base mounted on the unit base, and a relatively fixed and placed _slider and the And the fixed mechanism, can move the slip , =r a 'R absolute value of the shape size, and by the shift or the angle 隅T work, the spherical shape is erroneously in the table "shape. The continuous shape of the spherical surface or the like" is attached to the end surface, etc., the measuring object machine 3 In the inside of the multi-function measuring device, the sliding member and the shift sensing stolen use a connecting rod fixed to the sliding member, the external measuring device=the sensor measures the shape of the workpiece error 201121698 οσ And connecting the connecting rod and the joint of the displacement sensor, and connecting the rod. In addition, the multi-function measuring device is in the middle of the connection between the sliding base of the air static sliding block unit and the unit base There is a single adjustment for the tilt adjustment, and the tilt of the unit base of the unit can be adjusted. The degree adjustment unit 'blinds the height of the air static return block unit relative to the base of the unit. In the internal measuring device, the stem fixed to the slider extends with the displacement sensor, and the unit for tilting adjustment and the

=形成的中空處。再者,該滑件固定機構係 件SU用板’把該滑件@定於該滑件底H 設觸力,销雜祕黯塊單位;; 卫機中之多功能機内測定裝置,在該χ軸滑塊,分 單位,以第—研削心軸驅動,且安裝第-磨 J γ rfr,以第二研削心軸驅動,且安裝第二磨輪, 轴早位所設祕具底座,安裝有可隨4改㈣直軸狀離 持部。又,該機内測量單位在 早位f該Y軸早糊之位置,配麵χ軸滑塊。 、、典播t 加工機中之多功能機内測定裝置,係在該X鮎 j女裝至>、-夾帶具底座,鄰接該機 ^ „刀之削刀夾持具,係固定於該夾持具底座而女裝 【實施方式】= hollow formed. Furthermore, the slider fixing mechanism member SU uses the plate 'to set the slider@ to the bottom of the slider H to set the contact force, and to pin the secret block unit;; the multi-function internal measuring device in the maintenance machine, The χ shaft slider, sub-unit, is driven by the first grinding spindle, and the first grinding J γ rfr is installed, driven by the second grinding spindle, and the second grinding wheel is installed, and the shaft of the shaft is set in the early position, and the mounting is provided. Can be changed with 4 (four) straight shaft off the holding part. In addition, the measurement unit in the machine is in the early position f, the position of the Y-axis is early, and the matching surface is the slider. , the multi-function in-machine measuring device in the processing machine, is in the X鲇j women's to >, - the entrainment with the base, adjacent to the machine ^ 刀 knife cutting tool holder, is fixed to the clip Holding a base and women's clothing [implementation]

本發明加工機中之多功能機内測定I 生之尺寸誤差或开^狀誤差,不i:你:的工作件發 工作件推杆姑ίΓ 需轴卸下工作件,即可對 各種## ΜΙσ工,而且谷易以高精確度測量對工作件之 各種誤差,例如關於光學金屬模型等,可實施外經、=之 201121698 端面等一般加工,以及透鏡部的球面加工或非球面加工 進行同時加工,於透鏡等工作件之加工後,不用夾丄 全在機内進行測量之效果。 70 兹參照附圖就本發明在加工機中搭載多功能機内測 置之NC工作機械為例加以說明。此多功能機内測定 广 適用於種種類型之加工機。此NC工作機械具有例如^轴 塊3,配置在機台1上,可沿Z軸方向往復移動;主轴^ 11,轉動自如地支持設置在Z軸滑塊3上之主軸1〇 ;以及& 軸滑塊2,相對於Z轴滑塊3獨立設在機台丨且可在z典 塊3往復移_ Z軸方向垂直之x轴方向移動。 地月 係由機台1上的伺服馬達等馬達(圖上未示)構成,可 軸方向往復移動。另外,轉動自如地支持於主軸台u上之主 軸10,係例如利用心軸馬達,加以旋轉驅動。主轴⑴ 端,設有把持功件19之_ 12。卫作件19細失頭^ 把持,隨主軸10的旋轉驅動而轉動。又,χ軸滑塊 軸滑塊3的ζ軸方向垂直之χ軸方向 2上構成與刀ΤΐΓ咖丨2之増19對 於隔在X軸滑塊2上,有水平軸單位5和位 圃?Γ軸單位4二種刃物台,以及鄰接該 的多^機 單位5和γ軸單位4早組裝二二二作: 旋轉等工具,對工作件進行研削加工。 軸滑塊52f2H64 ’可以改變相軸定在χ 變安裝平額’在赠具64絲有可以改 具64,利;夹6f^5 ’可在底座24上旋轉移動夾持 25之水平方向。^ +固疋於底座24,即可改變工具夾持部 ° 夹持具64設有一體構成之工具夾持部 201121698 ,磨輪32等工具。另外,* γ軸單位4所設 ί能6,裝設工具夾持部26,可改變成垂直軸狀 之任—姿勢。工具夾持部26崎軸姿勢裝設於 若在裝設卫具夾持部26的筒夾工具14 (見 筒型磨輪18做為附軸磨輪32,即適於對小 ^ , 進行加王。王具鱗部26可經由夹持具底座 二種狀態(即姿勢)絲於Υ軸單位4。此NC工 工具央,26以垂直轴狀態之姿勢,裝設於Υ軸 ’Υ軸單位4之夾持具底座1516可按χ軸方向平 2^設定於χ軸滑塊2。又,工具夾持部26以斜軸狀態 15^6勢J軸單位4 ·,Υ軸單位4的夾持具底座 15,16 ’係按垂直於χ軸方向,奴在χ軸滑塊2。 从明加工機中之多功能機内測定裝置,即設於上述NC =^械°此Nc工作機械在X轴滑塊2分別置設(亦即配 ί 平軸單位5,以研削心軸13㈣,並安裝有附軸磨 輪,對工作件19進行加工;γ鮮位4,係垂直轴單位,The multi-function machine in the processing machine of the invention measures the dimensional error or the opening error of the I, and does not: you: the working piece sends the working piece push rod, the shaft needs to be unloaded, and the various ## ΜΙσ Work, and Gu Yi measures various errors on the workpiece with high precision, such as optical metal models, etc., can be used for general processing such as external warp, =201121698 end face, and spherical or aspherical processing of the lens portion for simultaneous processing After processing the workpiece such as a lens, it is not necessary to clamp the measurement inside the machine. 70. An NC working machine equipped with a multi-function machine in a processing machine will be described as an example with reference to the accompanying drawings. This multi-function machine is widely used in all types of processing machines. The NC working machine has, for example, a shaft block 3 disposed on the machine table 1 and reciprocally movable in the Z-axis direction; the spindle ^11 rotatably supports the spindle 1设置 disposed on the Z-axis slider 3; and & The shaft slider 2 is independently provided on the machine table with respect to the Z-axis slider 3, and is movable in the x-axis direction in which the z-block 3 reciprocates in the Z-axis direction. The moon is composed of a motor such as a servo motor on the machine 1 (not shown), and is reciprocally movable in the axial direction. Further, the main shaft 10 rotatably supported by the spindle table u is rotationally driven by, for example, a spindle motor. The main shaft (1) end is provided with a holding member 19 of -12. The guard member 19 loses its head and is controlled to rotate as the spindle 10 rotates. Further, the χ-axis slider shaft slider 3 has a χ-axis direction perpendicular to the χ-axis direction 2 and is formed on the X-axis slider 2 with a horizontal axis unit of 5 and a position 圃? The shaft unit has 4 types of blade stages, and the multi-machine unit adjacent to the unit 5 and the γ-axis unit 4 are assembled early and two or two: Rotating tools and the like, grinding the workpiece. The shaft slider 52f2H64' can change the phase axis to be set at the 安装 variable mounting level'. The gift 64 can be modified 64, and the clip 6f^5' can be rotated on the base 24 to move the horizontal direction of the clamp 25. ^ + Fixing on the base 24, the tool holding portion can be changed. The holder 64 is provided with a tool holder portion 201121698, a grinding wheel 32 and the like. Further, the * γ-axis unit 4 is provided with a knives 6, and the tool holding portion 26 is provided, and can be changed to a vertical axis-like posture. The tool holding portion 26 is attached to the collet tool 14 in which the keeper holding portion 26 is attached (see the cylindrical grinding wheel 18 as the shaft grinding wheel 32, that is, it is suitable for the small tong. The kingware scale 26 can be wired to the x-axis unit 4 through the two states (ie, posture) of the clamp base. The NC tool tool 26 is mounted in the vertical axis state and is mounted on the x-axis unit. The holder base 1516 can be set to the x-axis slider 2 in the direction of the x-axis. Further, the tool holding portion 26 is in the oblique axis state 15^6 potential J-axis unit 4 ·, the clamping unit 4 The bases 15, 16 ' are perpendicular to the χ axis direction, and are slaved to the 滑块 shaft slider 2. The multi-machine internal measuring device from the Ming processing machine is set at the above NC = ^ mechanical ° This Nc working machine is sliding on the X axis Block 2 is set separately (that is, with a flat shaft unit 5 for grinding the mandrel 13 (4), and a shaft grinding wheel is mounted to machine the workpiece 19; γ fresh position 4 is a vertical axis unit.

It研心^13驅動’且安裝有算盤型磨輪17或圓筒型磨輪 地肉、目,件19進行加卫;以及構成多功能機内測定裝置之 ,,測1早?6,配置於水伟單位5和γ轴單位4之間。 卜’ Y轴單位4在所設夾持具底座1S,10裝設有工具炎持 可改垂直軸狀態或斜軸狀態之任一姿勢。 ,内測量單位6經單位底座2〇安裝於χ袖滑塊2。機内 2早位!•包括空氣靜壓滑塊單位22,由安裝於固定在χ軸 二i的單位底座2G之滑件底座45,和可在該滑件底座45 ,的滑件21所構成;接觸探針8,安裝於接觸感測器本 ^,以壓住滑件21的治具36,37加以固定,且在主轴H)側 接糊1作件19;移位制119,連結於滑件21; 定機構,將滑件21和滑件底座45 @定或解開之 '月疋用板30等。機内測量單位6可對進行各種研削加工 之工作件19 ’測定工作件19外徑、内徑、段差等外形之形 201121698 以及追縱測量工作件19之球面形狀、非球面形狀等 形狀誤差等。此多功能機内= 鲅姑Γ件固疋用板30將滑件21固定於滑件底座45之狀 探針8構成接觸感測器,測量工作件19 $ 又,滑件固定用板3〇,從滑件底座45解開S 之樞動狀態,接觸探針8即追蹤測量工作件19 器9利用變動的移位感測器9測定工作 =即此多功能基⑽定裝置可對卫作件19,測定不同的丄 狀尺寸和表面形狀。在此多功能機内測定裝置中, 在空氣靜壓滑塊單位22和 強滑動構件4°之—對補強板55 ’加以補 ^機_#單位6 _氣靜黯塊單位22上部,設 ,簧23,可調整接聰針8對工作件19之觸壓。 =有調整觸壓(即接觸探針8對工作件19之施壓之 觸壓調整機構在滑件21前後固定有端板6〇, = ,安裝有㈣涵棒58,彈簧23之―_掛概。另外板 2i上面’㈣安裝調整板57。調整板57安 59,懸掛彈箐23之另一端。如第5圖所示,機; 里单位6係以固定螺釘62插入調整板π所設調整孔之之 LL 61,,整板57藉此以固定螺釘62固定在滑件21所要調 整之預定位置。 _滑件21只能前後調整移動例如± 1 mm左右,將針盤於 規檔在滑件21前面,對準衝程中心,把彈簀23懸 弹簧掛鈎棒58,59,以調整板57調整到衝程中心。又,接 探針8突出長度較短時,可使用延伸桿(圖上未示)。空 壓滑塊單位22利用下面固定螺釘或球形柱塞等支持構 56,以載置狀態支持於單位底座2〇上,確保其安定性。 機内測量單位6利用可由板構成的滑件固定機構,將滑 201121698 ΐ、21。。固定於滑件底座45,對接觸制11賴7内嵌之接總 感測器施能、’以測量工作件19外徑、内徑、段差等 寸,另利用滑件固定機構,從滑件底座Μ釋放滑 ί觸探針8的變動傳到移位感· 9,對移位感測器9 ,巴 =器,使用非加工===】内= ί1量^作件19的球面形狀、非球面形狀等端面之表面 =而追_,可微空氣靜壓滑件單位22之滑件 =於滑件底座45,經由與工作件19接觸之接觸探 = 口::後移動量的移位感測器9之功能,追十开: 二感測器9穿過罩殼54内蚊,例如 力可用到0_01 μηι的精密度。 Ί刀辨能 9正S 能機内測定裝置中,滑件21和移位输 第和6圖所示’係藉岭於滑件2i之二2 J把=桿35和移位感測器9加 = 結桿35之-端如的施f台具36,螺合固定於連 34,固定於移位感測器9。又丄 利疋裝置中,空氣靜壓滑件單位 多功月匕機内 28和傾斜調整用單位27,安^由同度調整用單位 探針8相對於工作件19 I #早位底座2G。相對於接觸 ’而傾斜狀態是以傾以=整用單位 工氣靜Μ滑塊單位22之構 早27調整。因此, 調節相對於單位底座2〇 J用间度調整用單位28, ^調節相對於單位底座20 用^斜調整用單位 連結桿35加以固定 2 f的中央孔等中央空間53之 从連結。所以,滑件移9,係以接頭 鐵勒9,係經由連結桿35 201121698 和接頭34連妹。t 作件19之表面幵% 觸探針8接觸工作件19,因應工 2卜成為滑件2Γ的二^變H ’此軸向變動即傳至滑件 35,傳到移位感測器9。動π件21的軸向移動經連結桿 在此多功能機内測定奘 _ 定構件43 *滑動構^ m’同度調整用單位28係由固 44,板44固定於古片道二成,固定構件43係安裝於板 係相對於固定構件階之單位底座20,而滑動構件 動。以高度調整用把手48 =手48在高度方向移 用的固定螺釘3卜把于^度方向’再用高度單位固定 係微調式,例如設定成月要^把手°高度調整用把手48 42即向下動,把手48向上 =調整時,滑動構件 把手48和滑動構件42之構造a件42即向上動。 口。滑動構件42的構造是在滑動並不固 ==構件4〇構成,固定構件41固定二 滑塊單位22,滑動構件⑽於空氣靜壓 ,杯,以傾斜調整用把手49面樞;7相 =定構件“之 _、腎塊單位22之傾斜狀態,以傾斜;田再設定空 :广以固定。滑動構件4_咖早定'螺固=,累 ^可藉彈力回復到原來位置。傾 &^了 33解除固定 =了調整傾斜雜财卜,和高度調 之作動, 作/ί/ί能機内測定裝置,以接觸感測器測定加工、_ 作件19外役、内徑、段差等外形之形力工過的工 空氣靜壓滑塊單位22巾的滑件h 制、=螺釘等把 於空氣靜壓滑塊單位22,_滑件 12 201121698 常測針8發揮接觸感測器功能,按通 工作件19的开工作件19之上述各種形狀尺寸。 之外形形狀,做為I觸二;探觸工作件19 理,測,工作件19的外幵f等;^力尺^取付之:貝訊,經電腦處 形狀時形狀、非球师狀等表面 壓滑塊單位22的滑·;,=空氣靜 呈相對於滑件底庙夕ό ^二件口疋用板3〇,令滑件21 觸探針8做為移位_器9之將二妾=器:的接 ===氣靜二後 變動位感測器9在前後 ^ 9之表面形狀時,使空氣靜壓滑塊單位a自 和誤,,製成附加差之 ==作== =正:;=9=γγ誤差。按照 測器9追蹤,容易明白球面等加工面之位感 Ϊ中可:ί進行精密加工’不至因再檢查引起力:工過= 之中心偏差,或發生段差時間。 幻作件It is the heart of the ^13 drive' and is equipped with an abacus type grinding wheel 17 or a cylindrical grinding wheel for meat, mesh, and 19 to be reinforced; and a multi-function internal measuring device, measuring 1 early? 6, arranged in Shui Wei Unit 5 and γ axis unit are between 4. The 'Y-axis unit 4' is provided with any of the postures of the tool holder base 1S, 10 in which the tool can be changed to the vertical axis state or the oblique axis state. The inner measuring unit 6 is mounted on the sleeve slider 2 via the unit base 2〇. 2 in the machine! • comprising an aerostatic slide unit 22 consisting of a slider base 45 mounted to a unit base 2G fixed to the shaft 2i, and a slider 21 at the slider base 45; the contact probe 8, Mounted in the contact sensor, fixed by the jigs 36, 37 of the sliding member 21, and connected to the side of the main shaft H) as a member 19; the displacement 119 is coupled to the sliding member 21; , the slider 21 and the slider base 45 are fixed or unwound. The in-machine measuring unit 6 can measure the shape of the outer shape such as the outer diameter, the inner diameter, and the step of the workpiece 19, and the shape of the spherical shape and the aspherical shape of the measuring workpiece 19, and the like. In the multi-function machine, the probe 8 for fixing the slider 21 to the slider base 45 constitutes a contact sensor, and the measuring member 19 $, the slider fixing plate 3, Unlocking the pivoting state of S from the slider base 45, the contact probe 8 is the tracking measuring work member 19 and the measuring device 9 is measured by the variable displacement sensor 9; that is, the multifunctional base (10) device can be used for the guarding device 19. Determine different braided sizes and surface shapes. In the multi-function measuring device of the multi-function machine, in the air static pressure slider unit 22 and the strong sliding member 4°, the reinforcing plate 55' is supplemented with the machine_# unit 6 _ air static block unit 22 upper portion, set, spring 23, the contact pressure of the working piece 19 of the connecting pin 8 can be adjusted. = There is an adjustment touch pressure (ie, the contact pressure adjustment mechanism of the contact probe 8 for pressing the work piece 19 is fixed with the end plate 6 前后 before and after the slider 21, =, the (four) hank 58 is mounted, and the spring 23 is hanged. In addition, on the upper plate 2i, the upper (2) mounting adjustment plate 57. The adjustment plate 57A 59, the other end of the suspension magazine 23. As shown in Fig. 5, the unit 6 is inserted into the adjustment plate π by the fixing screw 62. By adjusting the LL 61 of the hole, the entire plate 57 is thereby fixed by the fixing screw 62 at a predetermined position to be adjusted by the slider 21. The slider 21 can only be moved forward and backward by, for example, about ± 1 mm, and the dial is placed on the gauge. In front of the slider 21, aiming at the center of the stroke, the magazine 23 is suspended from the spring hooks 58 and 59, and the adjustment plate 57 is adjusted to the center of the stroke. Further, when the length of the probe 8 is short, the extension rod can be used (on the figure) The air pressure slider unit 22 is supported by the support structure 56 such as a fixing screw or a spherical plunger below, and is supported on the unit base 2〇 in a mounted state to ensure stability. The internal measurement unit 6 utilizes a slippery plate. The fixing mechanism will slide 201121698 ΐ, 21.. Fixed to the slider base 45, the contact system 11 Lai 7 embedded in the total sensor energy, 'to measure the outer diameter, inner diameter, step of the workpiece 19, etc., and use the slider fixing mechanism to release the sliding probe 8 from the slider base The change is transmitted to the sense of displacement. 9. For the shift sensor 9, the bar = the device, use the non-machining ===] inner = ί1 quantity ^ the spherical shape of the workpiece 19, the surface of the aspherical surface, etc. _, the slider of the micro-air static pressure slider unit 22 = at the slider base 45, through the contact with the workpiece 19, the mouth: the function of the displacement sensor 9 of the rear movement amount, chasing the ten : The second sensor 9 passes through the mosquito inside the casing 54, for example, the force can be used to the precision of 0_01 μηι. The knives can identify 9 positive S. In the internal measuring device, the sliding member 21 and the shifting input and the sixth figure are shown. 'Take the ridge on the slider 2i 2 2 J = the lever 35 and the shift sensor 9 plus = the end of the tie rod 35 as the end of the f set 36, screwed to the joint 34, fixed to the shift Sensor 9. In the device, the air static slide unit is multi-functioned in the machine 28 and the tilt adjustment unit 27, and the unit probe 8 for the same degree adjustment is relative to the workpiece 19 I Position base 2G. Relative to The contact state and the tilting state are adjusted by the tilting = the whole unit of the working air static sliding block unit 22. Therefore, the adjustment is made with respect to the unit base 2〇J with the adjustment unit 28, ^ adjustment relative to the unit The base 20 is connected to the central space 53 such as the center hole of the 2f by the unit connecting rod 35 for tilt adjustment. Therefore, the slider is moved by 9, and the joint irons 9 are connected via the connecting rod 35 201121698 and the joint 34. 。.t Surface 19 of the workpiece 19% The touch probe 8 contacts the work piece 19, and the second change H' of the slider 2Γ is transmitted to the slider 35, and the shift is sensed. 9. The axial movement of the moving π member 21 is measured in the multi-function machine via the connecting rod. The fixing member 43 * the sliding structure ^ m' unit for adjusting the degree 28 is fixed by the solid 44, the plate 44 is fixed to the ancient film 20, the fixing member The 43 series is attached to the unit base 20 of the plate system with respect to the fixed member step, and the sliding member moves. The height adjustment knob 48 = the fixing screw 3 that the hand 48 is moved in the height direction is fixed in the direction of the 'degree of re-use of the height unit, for example, the setting is set to the month. The handle height adjustment handle 48 42 is When the handle 48 is up-down, the sliding member handle 48 and the structure a member 42 of the sliding member 42 are moved upward. mouth. The structure of the sliding member 42 is formed by sliding without fixing == member 4〇, the fixing member 41 is fixed to the two slider unit 22, the sliding member (10) is statically pressed by the air, and the cup is tilted to adjust the handle 49 to face; 7 phase = The member "", the tilting state of the kidney block unit 22, to tilt; the field is set to empty: wide to fix. The sliding member 4_ coffee early set 'snail solid =, tired ^ can return to the original position by the elastic force. ; ^ 33 unfixed = adjusted tilt miscellaneous wealth, and height adjustment, for / ί / ί can be measured inside the device, contact sensor measurement processing, _ work 19 external service, inner diameter, step, etc. The shape of the shape of the work of the air static pressure slider unit 22 towel slide h system, = screw, etc. placed on the air static pressure slider unit 22, _ slider 12 201121698 constant stylus 8 to play the contact sensor function , according to the above various shapes and sizes of the opening work piece 19 of the work piece 19. The outer shape is used as the I touch; the work piece 19 is sensed, the outer part of the work piece 19 is f, etc.; It is: Beixun, the shape of the computer, the shape of the non-spherical, etc., the surface pressure slider unit 22 slips; Relative to the bottom of the sliding part of the temple ό ^ ^ 2 疋 疋 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二The position sensor 9 makes the air static pressure slider unit a self-and error when the surface shape of the front and rear surfaces is 9, and makes an additional difference =====正:;=9=γγ error. 9 tracking, easy to understand the spherical surface and other processing surface feelings can be: ί for precision machining 'not to cause force due to re-examination: the work center = the center deviation, or the time difference occurs.

其次,參見第8圖說明本發明加工機中多处 定裝置其他實施例。此實施例適用於做為加工機之g盤:I 具有刃物台單位65功能之X軸滑塊2,鄰接H 且(第8圖所示為二)失持具底座66,= 具底座66固定有削刃夾持具67,钱各種(第 13 201121698 一種)削刃B1,B2,B3,B4。此實施例中之機内測量單位6, 發揮上述實施例情況相同之功能。 ' ’ 定 本案加工機中之多功能機内測定裝置,適用於以削刃、 磨輪等工具,對工作件切削加工之旋盤、研削盤、NC 械等加工機,最好以單一測量單位即可適用於工作 2徑等形狀尺寸、球©形狀、非球面形狀等表面形狀二測 【圖式簡單說明】 C工作機 第1圖為載有本發明多功能機内測定裝置之N 械平面圖; 第2圖為第1圖NC工作機械中γ軸單位傾斜狀態之平 工作機械中多功能機内測定裝置之 第3圖為第1圖NC 侧視圖; ^ 3圖多功能機内測定裝置之擴放大側視圖; 第5圖為第3圖多功能機内測定裝置之平面圖; 圖為第5圖多功能機内測絲置在A區和B區放大 之部份破開放大平面圖; 匕现大 第7圖為第3圖多功能機内測定裝置後視圖; 機平圖域有本發明多功能機_找置之旋盤等加工 【主要元件符號說明】 I 機台 3 Z轴滑塊 5 水平軸單位 7 接觸感測器本體 9 移位感測器 II 主軸台 13 研削心轴 15 夾持具底座 2 X軸滑塊 4 Y軸單位 6 機内測量單位 8 接觸探針 10 主袖 12 失頭 14 筒夹工具 16 夹持具底座 201121698 17 算盤型磨輪 18 圓筒型磨輪 19 工作件 20 單位底座 21 滑件 22 空氣靜壓滑塊單位 23 彈簧 24 底座 25 工具夾持部 26 工具夾持部 27 傾斜調整用單位 28 高不調整用單位 30 滑件固定用板 31 固定螺釘 32 附軸磨輪 33 固定螺釘 34 接頭 35 連結桿 36 滑件治具 37 滑件治具 39 連結桿之一端 40 滑動構件 41 固定構件 42 滑動構件 43 固定構件 44 板 45 滑件底座 46 固定構件之凹面 47 滑動構件之凸面 48 高度調整用把手 49 傾斜調整用把手 52 中央空間 53 中央空間 54 罩殼 55 補強板 56 支持構件 57 調整板 58 彈簧掛鈎棒 59 彈簧掛鈎棒 60 端板 62 固定螺釘 63 彈簧 64 夾持具 65 刃物台單位 66 夾持具底座 B1,B2,B3,B4 削刃 67 削刃夾持具 15Next, another embodiment of the multi-position apparatus in the processing machine of the present invention will be described with reference to FIG. This embodiment is suitable for use as a g-disc of the processing machine: I has an X-axis slider 2 with a blade unit unit 65 function, adjacent to H and (two shown in Fig. 8) a missing holder base 66, = fixed with a base 66 There are sharpening clamps 67, money various (13th 201121698) cutting edges B1, B2, B3, B4. The in-machine measurement unit 6 in this embodiment functions in the same manner as in the above embodiment. ' 'The multi-function in-machine measuring device in the processing machine is suitable for turning, grinding discs, NC machines, etc. for cutting workpieces with tools such as sharpening and grinding wheels. It is best to use a single measuring unit. The surface shape such as the working 2 diameter and the shape of the sphere, the shape of the sphere, the shape of the aspherical surface, etc. [Simplified description of the drawing] The first working diagram of the C working machine is the N-machine plan carrying the measuring device of the multi-function machine of the present invention; Fig. 3 is a third side view of the multi-function internal measuring device in the flat working machine of the γ-axis unit tilting state in the NC working machine of Fig. 1; Fig. 1 is a side view of the NC; Figure 5 is a plan view of the measuring device in the multi-function machine of Figure 3. The picture shows the enlarged plan of the enlarged part of the A-zone and the B-zone in the multi-function machine of Figure 5; Figure 7 is the third picture. Rear view of the multi-function machine inside the measuring device; machine flat field has the multi-function machine of the invention _ find the rotary table and other processing [main component symbol description] I machine 3 Z-axis slider 5 horizontal axis unit 7 contact sensor body 9 Shift sensor II Pillow table 13 Grinding mandrel 15 Clamping base 2 X-axis slide 4 Y-axis unit 6 In-machine measuring unit 8 Contact probe 10 Main sleeve 12 Lost head 14 Collet tool 16 Clamping base 201121698 17 Abacus type grinding wheel 18 round Cartridge grinding wheel 19 Working piece 20 Unit base 21 Sliding member 22 Air static pressure slider unit 23 Spring 24 Base 25 Tool holding portion 26 Tool holding portion 27 Tilt adjustment unit 28 High non-adjusting unit 30 Sliding plate fixing plate 31 Fixing screw 32 Axial grinding wheel 33 Fixing screw 34 Joint 35 Connecting rod 36 Slider fixture 37 Slider fixture 39 One end of coupling rod 40 Sliding member 41 Fixing member 42 Sliding member 43 Fixing member 44 Plate 45 Sliding base 46 Fixed Concave surface of member 47 Convex surface of sliding member 48 Height adjustment handle 49 Tilt adjustment handle 52 Central space 53 Central space 54 Case 55 Reinforcement plate 56 Support member 57 Adjustment plate 58 Spring hook bar 59 Spring hook bar 60 End plate 62 Fixing screw 63 spring 64 clamp 65 blade stage unit 66 holder base B1, B2, B3, B4 cutting edge 67 cutting edge holder 15

Claims (1)

201121698 七、申請專利範圍: 動自1〇=加王機巾之?魏機_定裝置,包括主軸,可轉 主軸台’且可轉動自如支持工作件·,χ軸滑塊,可 空氣靜量單?具料位底座,固定於該χ軸滑塊; 件接ΐ ===於轴側延伸’可與該工作 解除自如地固ί二以及滑件固定機構,可 滑件,該滑件,可枢動該 >;;r,變動,經 置:其如所項二^= 該=該: 工作件球面形狀、非球面形狀、作=量對象,係該 所構成連續職附帶的該 之、:差、斜縮、球面 置 桿,以及連結該連、轉和該移位❹口於f、f件的連 4.如申請專利範圍第】項力:工^接:頁,進行連結者。 該空_滑塊單位之傾斜;以及高 201121698 單位底座’調整該空氣靜酿滑邋單位之高度者。 專利範1第4項加工機中之多功能機內测定裝 固叱於該滑件之該連結桿’係貫穿該傾斜調整用單位 調整用單仇所形成中央空間,與該移位感測器延伸 署,專概11第1項加工機中之多舰機内測定裝 番ϊΐΐΐ專利範圍第1項加工機中之多功能機内測定裝 靜壓滑塊單位之觸壓調整彈簧,加以調整者。U該工孔 8甘如申請專利範圍第i項加工機中之多功能機内測定裝 八肩X軸滑塊上,置设有水平轴單位,以第一研削 心軸驅動’且安裝第-磨輪,以及γ軸單位,以第二研削心 袖驅動’且安震第二磨輪,該γ軸單位所設失持且底 有可改變垂直轴狀態或斜軸狀態任一情況之工作失持部者厂 穿專利範圍第8項加工機中之多功能機内測定裝 置,其中該機_量轉在該水平料位和該 位置,設於該X軸滑塊上者。 干干〃 ·^丨J 港ί專利範圍第1項加工機中之多功能機内測定裝 座,而安裝各種靡之卿鱗具,_定於敎ί具= 者0 一201121698 VII. Application for patent scope: Move from 1〇=加王机巾? Wei machine _ fixed device, including the main shaft, can be rotated to the spindle table' and can rotate freely support the work piece ·, the 滑块 axis slider, can the air static single? The material base is fixed to the 滑块 shaft slider; the component ΐ === extends on the shaft side ′ can be freely detached from the work and the sliding member fixing mechanism, the sliding member, the sliding member, the pivot Move the >>;;r, change, set: as the item 2^= the = the: the spherical shape of the workpiece, the aspheric shape, the object of the quantity, which is the attached to the continuous position: Poor, skewed, spherically placed, and connected to the joint, turn and the shifting mouth in the f, f pieces of the joint 4. As claimed in the scope of the article: force: work ^ page: page, the linker. The slope of the empty_slider unit; and the height of the 201121698 unit base's adjustment of the height of the air static sliding unit. In the multi-function machine of the fourth processing machine of Patent No. 1, the connecting rod of the sliding member is inserted into the central space formed by the unit for adjusting the inclination adjustment unit, and the displacement sensor Extension Department, specializes in the 11th processing machine of the multi-ship machine to measure the Panyu patent range. The first part of the processing machine in the multi-machine measuring the static pressure slider unit of the touch pressure adjustment spring, to adjust. U The working hole 8 is as in the multi-function machine in the processing machine of the i-th processing patent range. The eight-shoulder X-axis slider is mounted on the horizontal axis unit, driven by the first grinding spindle and the first grinding wheel is installed. And the γ-axis unit, driven by the second grinding heart sleeve and the second wheel of the Anzhen earthquake, the γ-axis unit is set to be misplaced and the bottom has a working dislocation unit that can change the vertical axis state or the oblique axis state. The factory wears the multi-function in-machine measuring device in the processing machine of the eighth scope of the patent, wherein the machine_quantity is at the horizontal level and the position, and is disposed on the X-axis slider. Dry Cognac ·^丨J Port ί Patent range No. 1 processing machine in the multi-function machine measurement mount, and install a variety of 靡 卿 卿 鳞 ,, _ 定 敎 具 = = 0
TW099138036A 2009-12-28 2010-11-05 Multifunctional in-machine measurement device for machine tool. TW201121698A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009297365A JP5330219B2 (en) 2009-12-28 2009-12-28 Multifunctional in-machine measuring device for processing machine

Publications (1)

Publication Number Publication Date
TW201121698A true TW201121698A (en) 2011-07-01

Family

ID=44171716

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099138036A TW201121698A (en) 2009-12-28 2010-11-05 Multifunctional in-machine measurement device for machine tool.

Country Status (4)

Country Link
JP (1) JP5330219B2 (en)
KR (1) KR20110076758A (en)
CN (1) CN102107373A (en)
TW (1) TW201121698A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102744666B (en) * 2012-07-03 2014-11-19 上海交通大学 Numerical control accurate grinding device and grinding method for seal ring internal spherical surface
JP6538355B2 (en) * 2015-01-06 2019-07-03 中村留精密工業株式会社 Turning tool and true ball machining method
CN108788925B (en) * 2018-06-21 2020-04-28 贵州理工学院 Chuck axiality detects orthotic devices and includes its lathe
CN108747499A (en) * 2018-07-29 2018-11-06 赫克测控技术(苏州)有限公司 Automatic processing one-shot measurement rollback system and lathe
CN110146001B (en) * 2019-05-30 2021-04-06 峦阳机电科技(上海)有限公司 Coupler concentricity correcting device
CN110701991B (en) * 2019-09-30 2021-01-01 沈阳建筑大学 Bearing inner race terminal surface beats intelligent detection device with external diameter
CN114878056B (en) * 2022-02-28 2024-01-09 广西玉柴机器股份有限公司 Method and device for detecting assembly times of high-strength bolts
CN114986256B (en) * 2022-07-18 2022-12-13 成都飞机工业(集团)有限责任公司 Multifunctional finish machining roughness on-machine measuring device and measuring method
CN116952180B (en) * 2023-09-20 2023-11-17 深圳市侨柏科技有限公司 Numerical control machine tool spindle length measurer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6248407A (en) * 1985-08-28 1987-03-03 Hitachi Ltd Cutting tool setting device
JPS63237866A (en) * 1987-03-26 1988-10-04 Komatsu Ltd Highly precision grinding machine
JPH05208344A (en) * 1992-01-30 1993-08-20 Murata Mach Ltd Calibration device for inside machine measuring instrument of lathe
JPH0783653A (en) * 1993-09-13 1995-03-28 Nikon Corp Method and system for measuring shape
JPH07260470A (en) * 1994-03-16 1995-10-13 Nikon Corp Measuring apparatus of surface shape
JP4712586B2 (en) * 2006-03-27 2011-06-29 西部電機株式会社 NC machine tool
JP5186976B2 (en) * 2008-03-31 2013-04-24 株式会社ジェイテクト Measuring tool adjustment method, measuring device angle detection method, detection result correction method by measuring device, and machine tool equipped with a thread groove detection device

Also Published As

Publication number Publication date
JP2011136390A (en) 2011-07-14
CN102107373A (en) 2011-06-29
KR20110076758A (en) 2011-07-06
JP5330219B2 (en) 2013-10-30

Similar Documents

Publication Publication Date Title
TW201121698A (en) Multifunctional in-machine measurement device for machine tool.
JP5124579B2 (en) Surface sensing device
EP0526056B1 (en) Calibration and measurement device
CN101253383B (en) Coordinate measuring machine
CA2298341C (en) Lens tracing apparatus for high warp shapes
JP2017518487A (en) Calibration of measuring probe
JP2001526967A (en) Workpiece processing equipment
JPH02502488A (en) position detection probe
JP6992999B2 (en) 3D floating support system for elongated objects and associated geometry detectors
ES2313357T3 (en) PROCEDURE AND APPLIANCE TO CONTROL THE MACHINING OF MECHANICAL PARTS.
JP2007198791A (en) Surface property measuring instrument
JPH01295713A (en) In-process measuring method and device for thread shaft effective diameter
CN110026833A (en) A kind of milling cutter grinder
CN101137462A (en) A gemstone polishing device and a method of polishing
TW519504B (en) 3D errors measurement device and method
CN101512285B (en) Surface sensing device
JP6380811B2 (en) Position detecting device and jig
US4991306A (en) Tactile center locator
JPH02131851A (en) Polishing device for curved face
JP7215845B2 (en) measuring device
CN212718950U (en) Detachable 3D scanner
JP5151545B2 (en) Simultaneous multi-axis control evaluation method
JP2006043779A (en) Free curved surface shape measuring method
CN105043290B (en) A kind of contour detecting device and its method for detecting optical aspherical surface
TWM394454U (en) The fixture is automatic elastic press locating of plane with three-point for high accuracy square-master base of z axis axial adjusting